JP2013085298A5 - - Google Patents
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- JP2013085298A5 JP2013085298A5 JP2013017314A JP2013017314A JP2013085298A5 JP 2013085298 A5 JP2013085298 A5 JP 2013085298A5 JP 2013017314 A JP2013017314 A JP 2013017314A JP 2013017314 A JP2013017314 A JP 2013017314A JP 2013085298 A5 JP2013085298 A5 JP 2013085298A5
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- JP
- Japan
- Prior art keywords
- electrode
- crystal piece
- central portion
- extraction electrode
- extraction
- Prior art date
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Description
本発明によれば、中央部の厚さが周縁部の厚さよりも大きくなるように、その一面及び他面にその周方向に段差が形成された水晶片と、
その水晶片の中央部の一面及び他面に各々設けられた当該中央部を励振させるための励振電極と、
各励振電極から前記水晶片の一面側の周縁部に引き出されるように形成された、導電性接着材を介して水晶片支持部材の電極に固着される引き出し電極と、
を備え、
前記引き出し電極及び励振電極はスパッタまたは蒸着により形成され、その引き出し電極の表面を荒らすために、前記一面側の周縁部における表面が当該一面側の前記中央部の表面よりも荒れていることを特徴とする。
According to the present invention , a crystal piece in which a step is formed in the circumferential direction on one surface and the other surface so that the thickness of the central portion is larger than the thickness of the peripheral portion;
An excitation electrode for exciting the central portion provided on one surface and the other surface of the central portion of the crystal piece;
A lead electrode fixed to the electrode of the crystal piece support member via a conductive adhesive, formed so as to be drawn from each excitation electrode to the peripheral portion on one side of the crystal piece,
With
The extraction electrode and the excitation electrode are formed by sputtering or vapor deposition, and in order to roughen the surface of the extraction electrode, the surface of the peripheral portion on the one surface side is rougher than the surface of the central portion on the one surface side. And
本発明によれば、前記水晶片の一面側の前記周縁部における表面が一面側の前記中央部の表面よりもその荒く形成され、そして水晶片の表面に引き出し電極及び励振電極をスパッタまたは蒸着により形成している。従って水晶片の荒さが引き出し電極の表面に転写され、引き出し電極の表面の荒れを大きくすることができる。結果として、接着材が引き出し電極から励振電極に流れ出したり、引き出し電極間で導電性接着材による短絡が起きることが抑えられる。
According to the present invention , the surface of the peripheral portion on one side of the crystal piece is formed to be rougher than the surface of the central portion on the one side, and the extraction electrode and the excitation electrode are sputtered or deposited on the surface of the crystal piece. Forming. Therefore, the roughness of the crystal piece is transferred to the surface of the extraction electrode, and the roughness of the surface of the extraction electrode can be increased. As a result, it is possible to suppress the adhesive material from flowing from the extraction electrode to the excitation electrode, or a short circuit caused by the conductive adhesive material between the extraction electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013017314A JP5541377B2 (en) | 2013-01-31 | 2013-01-31 | Crystal resonator element, crystal resonator and electronic component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013017314A JP5541377B2 (en) | 2013-01-31 | 2013-01-31 | Crystal resonator element, crystal resonator and electronic component |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008198556A Division JP5219676B2 (en) | 2008-07-31 | 2008-07-31 | Crystal resonator element, crystal resonator and electronic component |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013085298A JP2013085298A (en) | 2013-05-09 |
| JP2013085298A5 true JP2013085298A5 (en) | 2013-08-01 |
| JP5541377B2 JP5541377B2 (en) | 2014-07-09 |
Family
ID=48529958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013017314A Expired - Fee Related JP5541377B2 (en) | 2013-01-31 | 2013-01-31 | Crystal resonator element, crystal resonator and electronic component |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5541377B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6592906B2 (en) | 2015-01-29 | 2019-10-23 | セイコーエプソン株式会社 | Vibrating piece, vibrator, vibrating device, oscillator, electronic device, and moving object |
| JP6842682B2 (en) * | 2017-09-13 | 2021-03-17 | 株式会社村田製作所 | Crystal oscillator and its manufacturing method |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004289650A (en) * | 2003-03-24 | 2004-10-14 | Seiko Epson Corp | Manufacturing of piezoelectric device and piezoelectric vibrating piece |
| JP4506135B2 (en) * | 2003-09-18 | 2010-07-21 | エプソントヨコム株式会社 | Piezoelectric vibrator |
| JP2005278069A (en) * | 2004-03-26 | 2005-10-06 | Seiko Epson Corp | Piezoelectric vibrating piece and piezoelectric device using it |
| JP2006074294A (en) * | 2004-08-31 | 2006-03-16 | Kyocera Kinseki Corp | Method of manufacturing piezoelectric diaphragm |
| JP5049479B2 (en) * | 2005-09-29 | 2012-10-17 | セイコーエプソン株式会社 | Quartz device and manufacturing method thereof |
| JP4771069B2 (en) * | 2006-01-12 | 2011-09-14 | エプソントヨコム株式会社 | Piezoelectric vibrating piece and piezoelectric device |
| JP2008109538A (en) * | 2006-10-27 | 2008-05-08 | Nippon Dempa Kogyo Co Ltd | Crystal oscillator |
-
2013
- 2013-01-31 JP JP2013017314A patent/JP5541377B2/en not_active Expired - Fee Related
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