JP2013084366A - Method for manufacturing x-ray image tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing an X-ray image tube, capable of reducing electric connection parts arranged on an envelope.SOLUTION: A method for manufacturing an X-ray image tube 11 including an envelope 12 having a plurality of electric connection parts 24 arranged thereon, and a plurality of electrodes 20 arranged so as to be connected with the electric connection parts 24 therein, includes: arranging a photocell 31 in the envelope 12; connecting a pair of terminals 40 and 41 of the photocell 31 to two of the electric connection parts 24 including an electric connection part 24a connected with the electrode 20; and when measuring a thickness of a film deposited in the envelope 12, outputting an output signal from the photocell 31 receiving light with which the inside of the envelope 12 is irradiated, from the electric connection parts 24 to the outside.

Description

  Embodiments described herein relate generally to a method for manufacturing an X-ray image tube using a photocell for measuring a film thickness.

  In general, an X-ray image tube is configured such that an envelope includes an input unit, an output unit facing the input unit, a focusing electrode and an anode positioned between the input unit and the output unit, and the like. The input unit has a configuration in which an input phosphor screen and a photoelectric conversion surface are stacked, and the output unit is configured by an output phosphor screen. In addition, the envelope is provided with a plurality of electrical connection portions for electrically connecting a plurality of electrodes such as a cathode including an input portion, a focusing electrode, and an anode to the outside.

  The X-rays incident on the X-ray image tube are converted into fluorescence by the input phosphor screen of the input unit and then converted into electrons by the photoelectric conversion surface. The electrons are accelerated and focused as an electron beam by an electron lens system including a focusing electrode and an anode, and the electrons collide with the output fluorescent screen of the output unit to be converted into a visible light image.

  In the manufacturing process of such an X-ray image tube, there is a process of depositing a photoelectric conversion surface by depositing a predetermined material such as antimony on an input portion installed in the envelope. In this film forming process, in order to measure the film thickness deposited on the input part, the film forming process is performed in a state in which a photocell is installed in the envelope in advance, so that the input part is included in the envelope. A film is also formed on the light receiving surface of the photocell. Then, a measurement value measured with a photocell after introducing a constant amount of light into the envelope before film formation, and a measurement measured with a photocell after introducing a constant amount of light into the envelope after film formation The film thickness formed on the light receiving surface of the photocell is measured and the film thickness formed on the input portion is determined by comparing the values.

  To install the photocell in the envelope, connect the photocell to the electrical connection dedicated to the photocell provided in the envelope, and send the output signal from the photocell to the outside from the electrical connection dedicated to the photocell. Output.

JP 2010-186600 A

  The envelope of the X-ray image tube is provided with a plurality of electrical connection portions. In addition to the electrical connection portion for connecting a plurality of electrodes arranged in the envelope, a photocell is connected to the envelope. Since the electrical connection portion dedicated to the photocell is provided, there are problems that the number of electrical connection portions provided in the envelope increases, the number of manufacturing steps increases, and the cost increases.

  The problem to be solved by the present invention is to provide an X-ray image tube manufacturing method capable of reducing the number of electrical connections provided in an envelope.

  The present embodiment is a method of manufacturing an X-ray image tube in which a plurality of electrical connection portions are provided in an envelope and a plurality of electrodes are arranged in the envelope and connected to the electrical connection portions. A photocell is disposed in the envelope, and a pair of terminals of the photocell are connected to two electrical connection portions including an electrical connection portion to which electrodes are connected. When measuring the film thickness of the film formed in the envelope, an output signal from the photocell that has received the light irradiated in the envelope is output from the electrical connection portion to the outside.

FIG. 2 is a cross-sectional view of a part of the X-ray image tube, showing an embodiment of a method for manufacturing the X-ray image tube. It is sectional drawing of an X-ray image tube same as the above.

  Hereinafter, an embodiment will be described with reference to the drawings.

  As shown in FIG. 2, the X-ray image tube 11 has a metal envelope (vacuum envelope) 12, and an input window 13 is formed in the envelope 12 on the X-ray incident side. An output window 14 is formed on the opposite side of the input window 13.

  Inside the envelope 12, an input unit 15 that converts X-rays incident from the input window 13 into electrons is emitted inside the input window 13 and emits electrons from the input unit 15 inside the output window 14. An output unit 16 that converts the light into a visible light image and outputs it is formed. Further, in the envelope 12, a plurality of focusing elements constituting an electron lens that accelerates and focuses the electrons along the path of electrons traveling from the cathode 17 including the input unit 15 toward the output unit 16 from the input unit 15 A plurality of electrodes 20 including an electrode 18 and an anode 19 are installed. These electrodes 20 are installed in the envelope 12 while being insulated from the envelope 12.

  The input unit 15 is an input substrate that is formed in a convex curved surface toward the input window 13, and an input fluorescence that is formed on a surface opposite to the surface facing the input window 13 of the input substrate and converts X-rays into fluorescence. And a photoelectric conversion surface that is laminated on the input phosphor surface and converts fluorescence into electrons. The output unit 16 is formed with an output phosphor screen that converts electrons into visible light. The plurality of focusing electrodes 18 and anodes 19 are formed in an annular shape.

  As shown in FIG. 1, the input unit 15 is supported in the envelope 12 by an annular support frame 23. The support frame 23 is made of metal, and the input portion 15 is fixed by welding and is electrically connected.

  The envelope 12 is provided with an electrical connection part 24a to which the input part 15 is electrically connected at a position near the input part 15. The electrical connection portion 24a passes through an insulating portion 25 such as glass that closes a through hole opened in the envelope 12, and is provided in an insulated state from the envelope 12. One end of the metal wire 26 is electrically connected to the support frame 23 by welding, the other end is electrically connected to the electrical connection portion 24a by welding, and the middle portion is surrounded by an insulating member 27 such as glass. Supported by 12. The input unit 15 and the electrical connection unit 24 are electrically connected via the wire 26 and the support frame 23.

  FIG. 1 shows only the electrical connection part 24a to which the input part 15 is connected. However, the envelope 12 is provided with the same electrical connection part 24 for each electrode 20, and each of these electrical connection parts. 24 and each electrode 20 are electrically connected by a connecting member such as a wire 26, respectively. The metal envelope body 12a of the envelope 12 is also configured as an electrical connection portion 24 that is insulated from the other electrical connection portions 24.

  A photocell 31 is installed on the support frame 23. The photocell 31 includes a sealed casing 32 and a photoelectric conversion element 33 such as a photodiode disposed in the casing 32.

  The casing 32 includes a metal-made cylindrical case 34, a transparent glass plate 35 that closes one end opening of the case 34, and an insulating plate 36 that closes the other end opening.

  The photoelectric conversion element 33 is attached to the insulating plate 36 with the light receiving surface facing the glass plate 35. When the photoelectric conversion element 33 is a photodiode, for example, it has an anode and a cathode, and the anode and the lead 37 penetrating the insulating plate 36 are electrically connected by a wire 38 as a fusing part formed by, for example, wire bonding. The cathode is electrically connected to the case 34 by a wire 39. The wire 38 is thinly formed of a material such as gold, for example, and can be blown when a fusing current of a predetermined current value or more flows from the outside.

  A lead 37 connected to the anode of the photoelectric conversion element 33 and a case 34 connected to the cathode of the photoelectric conversion element 33 are configured as a pair of terminals 40 and 41 of the photocell 31.

  The case 34 of the photocell 31 is fitted into an opening 23a provided in the support frame 23 and fixed by welding and electrically connected, and the lead 37 of the photocell 31 is welded to the envelope 12 It is fixed and electrically connected. Thereby, one terminal 40 of the photocell 31 is electrically connected to the envelope 12 by the lead 37, and the other terminal 41 is electrically connected to the electrical connection portion 24a through the support frame 23 and the wire 26. . Further, the surface of the glass plate 35 of the photocell 31 fixed to the support frame 23 is opposed to the surface on which the fluorescence input surface and the photoelectric conversion surface of the input unit 15 are laminated.

  In the manufacturing process of the X-ray image tube 11 configured as described above, there is a film forming process of forming a film of the photoelectric conversion surface on the fluorescence input surface of the input unit 15.

  In this film forming process, a photocell 31 is disposed in the envelope 12 in advance, and a pair of terminals 40 and 41 of the photocell 31 are connected to two electrical connections including an electrical connection portion 24a to which the electrode 20 is connected. Connect to part 24. That is, as described above, one terminal 40 of the photocell 31 is electrically connected to the envelope body 12a by the lead 37, and the other terminal 41 is connected to the input unit 15 (cathode 17 through the support frame 23 and the wire 26. For electrical connection) 24a.

  Further, outside the envelope 12, a measuring device for measuring an output signal from the photocell 31 is connected between the envelope body 12a and the electrical connection portion 24a, and the envelope 12 is illustrated. A constant amount of light is irradiated into the envelope 12 from the light introducing portion that is not. A certain amount of light irradiated into the envelope 12 passes through the glass plate 35 of the photocell 31 and enters the photoelectric conversion element 33. The photoelectric conversion element 33 outputs an output signal corresponding to the amount of incident light. The data is output to the measuring instrument through the envelope body 12a and the electrical connection 24a. The measuring instrument inputs an output signal from the photoelectric conversion element 33 and stores it as a reference initial measurement value.

  In the film forming process, a predetermined material such as antimony is deposited on the input phosphor screen of the input unit 15 in the envelope 12 to form a photoelectric conversion surface having a predetermined film thickness. At this time, a film having the same thickness as the film formed on the input unit 15 is also formed on the surface of the glass plate 35 of the photocell 31.

  The film thickness of the film formed in this film forming process is measured using the photocell 31. That is, a certain amount of light is irradiated into the envelope 12 from a light introducing portion (not shown) provided in the envelope 12. A certain amount of light irradiated in the envelope 12 passes through the film deposited on the surface of the glass plate 35 of the photocell 31 and the glass plate 35 and enters the photoelectric conversion element 33, and the photoelectric conversion element 33 is An output signal corresponding to the amount of incident light is output to the measuring instrument through the envelope body 12a and the electrical connection 24a. At this time, the amount of incident light by the photoelectric conversion element 33 is the amount of incident light according to the film thickness of the film deposited on the surface of the glass plate 35.

  The measuring device receives an output signal from the photoelectric conversion element 33, acquires a measured value after film formation, compares it with an initial measured value as a reference, and determines the film thickness and photoelectric conversion element specified in advance by measurement. Based on the relationship with the output value 33, the film thickness formed on the surface of the glass plate 35 of the photocell 31, that is, the film thickness formed on the input unit 15 is determined.

  In addition, after the film thickness measurement using the photocell 31, the fusing power source is connected to the envelope body 12a and the electrical connection portion 24a to which the pair of terminals 40 and 41 of the photocell 31 are connected outside the envelope 12. Then, a predetermined fusing current is supplied to the photocell 31 through the envelope body 12a and the electrical connection portion 24a.

At this time, by passing a fusing current from the envelope body 12a to the anode of the photoelectric conversion element 33 through the lead 37 and the wire 38, the wire 38 that is thinly formed of a material such as gold is fused. By fusing the wire 38, the envelope body 12a to which the pair of terminals 40 and 41 to which the photocell 31 is connected is connected to the electrical connecting portion 24a to be insulated.

  As described above, according to the method of manufacturing the X-ray image tube 11, the pair of terminals 40 and 41 of the photocell 31 are connected to the two electrical connection portions 24 including the electrical connection portion 24a to which the electrode 20 is connected. When measuring the film thickness of the film formed in the envelope 12, the output signal from the photocell 31 that has received the light irradiated in the envelope 12 is output from the electrical connection unit 24 to the outside. The measurement circuit using the photocell 31 can be formed without newly adding a dedicated electrical connection for the photocell 31 to the vessel 12, and the number of electrical connections to be provided in the envelope 12 can be reduced. Can be reduced and cost increase can be suppressed.

  Furthermore, after the film thickness measurement using the photocell 31, in order to flow a predetermined fusing current to the photocell 31 through the electrical connection portion 24 to which the photocell 31 is connected from the outside, the wire 38 of the photocell 31 is blown, The two electrical connections 24 to which the photocell 31 is connected can be blocked and insulated. As a result, even when the electrical connection portion 24 for connecting the electrode 20 is shared for the connection of the photocell 31, the electrical connection portion 24 can be normally used for energizing the electrode 20 when the X-ray image tube 11 is used.

  In addition, one terminal 40 of the photocell 31 is connected to the envelope 12, and the other terminal 41 is connected to the cathode 17 which is an input unit 15 for converting X-rays of the plurality of electrodes 20 into electrons. Since the photocell 31 is connected to the connection portion 24a, the photocell 31 can be used for measuring the film thickness to be formed on the input portion 15.

  In addition, the electrical connection part 24 that connects the pair of terminals 40 and 41 of the photocell 31 is not limited to the electrical connection part 24a for the envelope body 12a and the input part 15 (for the cathode 17), but for other electrodes 20 The electrical connection 24 may be used.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

11 X-ray image tube
12 Envelope
15 Input section
17 Cathode
20 electrodes
24 Electrical connections
31 Photocell
38 Wire as a fusing part
40, 41 terminals

Claims (3)

In the manufacturing method of the X-ray image tube in which a plurality of electrical connection portions are provided in the envelope and a plurality of electrodes are arranged in the envelope and connected to the electrical connection portions.
A photocell is disposed in the envelope, and a pair of terminals of the photocell is connected to the two electrical connection portions including the electrical connection portion to which the electrodes are connected,
When measuring the film thickness of the film formed in the envelope, an output signal from the photocell that has received light irradiated in the envelope is output from the electrical connection portion to the outside. A method for manufacturing an X-ray image tube. The photocell has a fusing part that cuts off between a pair of terminals by fusing when a predetermined fusing current flows,
After the film thickness measurement, a predetermined fusing current is supplied to the photocell from the outside through the electric connection portion, and the fusing portion of the photocell is blown to connect between the two electric connection portions to which the photocell is connected. The method for manufacturing an X-ray image tube according to claim 1, wherein: One terminal of the photocell is connected to the envelope, and the other terminal is connected to an electrical connection part connected to a cathode which is an input part for converting X-rays of the plurality of electrodes into electrons. The method of manufacturing an X-ray image tube according to claim 1 or 2, wherein:

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