JP2013084366A - Method for manufacturing x-ray image tube - Google Patents

Method for manufacturing x-ray image tube Download PDF

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JP2013084366A
JP2013084366A JP2011221825A JP2011221825A JP2013084366A JP 2013084366 A JP2013084366 A JP 2013084366A JP 2011221825 A JP2011221825 A JP 2011221825A JP 2011221825 A JP2011221825 A JP 2011221825A JP 2013084366 A JP2013084366 A JP 2013084366A
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envelope
photocell
electrical connection
ray image
image tube
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JP5889591B2 (en
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Ryo Mibuka
亮 身深
Masahiro Sugiyama
正弘 杉山
Shigeharu Kawamura
重治 河村
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Toshiba Corp
Canon Electron Tubes and Devices Co Ltd
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Toshiba Electron Tubes and Devices Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing an X-ray image tube, capable of reducing electric connection parts arranged on an envelope.SOLUTION: A method for manufacturing an X-ray image tube 11 including an envelope 12 having a plurality of electric connection parts 24 arranged thereon, and a plurality of electrodes 20 arranged so as to be connected with the electric connection parts 24 therein, includes: arranging a photocell 31 in the envelope 12; connecting a pair of terminals 40 and 41 of the photocell 31 to two of the electric connection parts 24 including an electric connection part 24a connected with the electrode 20; and when measuring a thickness of a film deposited in the envelope 12, outputting an output signal from the photocell 31 receiving light with which the inside of the envelope 12 is irradiated, from the electric connection parts 24 to the outside.

Description

本発明の実施形態は、膜厚を測定するためのフォトセルを用いたX線イメージ管の製造方法に関する。   Embodiments described herein relate generally to a method for manufacturing an X-ray image tube using a photocell for measuring a film thickness.

一般に、X線イメージ管は、外囲器内に入力部、入力部に対向する出力部、入力部と出力部との間に位置する集束電極および陽極などが設置されて構成されている。入力部は入力蛍光面および光電変換面を積層した構成となっており、出力部は出力蛍光面で構成されている。また、外囲器には、入力部を含む陰極、集束電極、陽極などの複数の電極をそれぞれ外部と電気的に接続するための複数の電気接続部が設けられている。   In general, an X-ray image tube is configured such that an envelope includes an input unit, an output unit facing the input unit, a focusing electrode and an anode positioned between the input unit and the output unit, and the like. The input unit has a configuration in which an input phosphor screen and a photoelectric conversion surface are stacked, and the output unit is configured by an output phosphor screen. In addition, the envelope is provided with a plurality of electrical connection portions for electrically connecting a plurality of electrodes such as a cathode including an input portion, a focusing electrode, and an anode to the outside.

そして、X線イメージ管に入射したX線は、入力部の入力蛍光面により蛍光に変換されてから光電変換面により電子に変換される。この電子は、電子ビームとなって集束電極および陽極などによる電子レンズ系によって加速集束され、出力部の出力蛍光面に衝突して可視光像に変換されるように構成されている。   The X-rays incident on the X-ray image tube are converted into fluorescence by the input phosphor screen of the input unit and then converted into electrons by the photoelectric conversion surface. The electrons are accelerated and focused as an electron beam by an electron lens system including a focusing electrode and an anode, and the electrons collide with the output fluorescent screen of the output unit to be converted into a visible light image.

このようなX線イメージ管の製造工程において、外囲器内に設置した入力部に例えばアンチモンなどの所定の材料を蒸着させて光電変換面を成膜する工程がある。この成膜工程では、入力部に蒸着された膜厚を測定するために、予め外囲器内にフォトセルを設置した状態で成膜工程を実施することにより、外囲器内で入力部とともにフォトセルの受光面にも成膜される。そして、成膜前に外囲器内に一定光量の光を導入してフォトセルで測定した測定値と、成膜後に外囲器内に一定光量の光を導入してフォトセルで測定した測定値とを比較し、フォトセルの受光面に成膜された膜厚を測定することにより、入力部に成膜された膜厚を判定している。   In the manufacturing process of such an X-ray image tube, there is a process of depositing a photoelectric conversion surface by depositing a predetermined material such as antimony on an input portion installed in the envelope. In this film forming process, in order to measure the film thickness deposited on the input part, the film forming process is performed in a state in which a photocell is installed in the envelope in advance, so that the input part is included in the envelope. A film is also formed on the light receiving surface of the photocell. Then, a measurement value measured with a photocell after introducing a constant amount of light into the envelope before film formation, and a measurement measured with a photocell after introducing a constant amount of light into the envelope after film formation The film thickness formed on the light receiving surface of the photocell is measured and the film thickness formed on the input portion is determined by comparing the values.

フォトセルを外囲器内に設置するには、フォトセルを外囲器に設けたフォトセル専用の電気接続部に接続し、フォトセルからの出力信号をフォトセル専用の電気接続部から外部に出力している。   To install the photocell in the envelope, connect the photocell to the electrical connection dedicated to the photocell provided in the envelope, and send the output signal from the photocell to the outside from the electrical connection dedicated to the photocell. Output.

特開2010−186600号公報JP 2010-186600 A

X線イメージ管の外囲器には複数の電気接続部が設けられるが、外囲器内に配置される複数の電極を接続するための電気接続部以外にも、フォトセルを接続するためのフォトセル専用の電気接続部を設けているため、外囲器に設ける電気接続部の数が多くなり、製造工数が増加し、コストが高くなる問題がある。   The envelope of the X-ray image tube is provided with a plurality of electrical connection portions. In addition to the electrical connection portion for connecting a plurality of electrodes arranged in the envelope, a photocell is connected to the envelope. Since the electrical connection portion dedicated to the photocell is provided, there are problems that the number of electrical connection portions provided in the envelope increases, the number of manufacturing steps increases, and the cost increases.

本発明が解決しようとする課題は、外囲器に設ける電気接続部を少なくできるX線イメージ管の製造方法を提供することである。   The problem to be solved by the present invention is to provide an X-ray image tube manufacturing method capable of reducing the number of electrical connections provided in an envelope.

本実施形態は、外囲器に複数の電気接続部が設けられるとともに外囲器内に電気接続部と接続されて複数の電極が配置されるX線イメージ管の製造方法である。外囲器内にフォトセルを配置し、このフォトセルの一対の端子を電極が接続された電気接続部を含む2つの電気接続部に接続する。外囲器内で成膜される膜の膜厚測定時に、外囲器内に照射される光を受けたフォトセルからの出力信号を電気接続部から外部に出力する。   The present embodiment is a method of manufacturing an X-ray image tube in which a plurality of electrical connection portions are provided in an envelope and a plurality of electrodes are arranged in the envelope and connected to the electrical connection portions. A photocell is disposed in the envelope, and a pair of terminals of the photocell are connected to two electrical connection portions including an electrical connection portion to which electrodes are connected. When measuring the film thickness of the film formed in the envelope, an output signal from the photocell that has received the light irradiated in the envelope is output from the electrical connection portion to the outside.

X線イメージ管の製造方法の一実施形態を示し、X線イメージ管の一部の断面図である。FIG. 2 is a cross-sectional view of a part of the X-ray image tube, showing an embodiment of a method for manufacturing the X-ray image tube. 同上X線イメージ管の断面図である。It is sectional drawing of an X-ray image tube same as the above.

以下、一実施形態を、図面を参照して説明する。   Hereinafter, an embodiment will be described with reference to the drawings.

図2に示すように、X線イメージ管11は、金属製の外囲器(真空外囲器)12を有し、この外囲器12にはX線の入射側に入力窓13が形成され、この入力窓13に対して反対側に出力窓14が形成されている。   As shown in FIG. 2, the X-ray image tube 11 has a metal envelope (vacuum envelope) 12, and an input window 13 is formed in the envelope 12 on the X-ray incident side. An output window 14 is formed on the opposite side of the input window 13.

外囲器12内には、入力窓13の内側に入力窓13から入射したX線を電子に変換して放出する入力部15が設置され、出力窓14の内側に入力部15からの電子を可視光像に変換して出力する出力部16が形成されている。さらに、外囲器12内には、入力部15を含む陰極17、入力部15から出力部16に向かって進行する電子の進路に沿って電子を加速および集束する電子レンズを構成する複数の集束電極18および陽極19を含む、複数の電極20が設置されている。これら電極20は外囲器12に対して絶縁された状態で外囲器12内に設置されている。   Inside the envelope 12, an input unit 15 that converts X-rays incident from the input window 13 into electrons is emitted inside the input window 13 and emits electrons from the input unit 15 inside the output window 14. An output unit 16 that converts the light into a visible light image and outputs it is formed. Further, in the envelope 12, a plurality of focusing elements constituting an electron lens that accelerates and focuses the electrons along the path of electrons traveling from the cathode 17 including the input unit 15 toward the output unit 16 from the input unit 15 A plurality of electrodes 20 including an electrode 18 and an anode 19 are installed. These electrodes 20 are installed in the envelope 12 while being insulated from the envelope 12.

入力部15は、入力窓13に向かって凸曲面に形成された入力基板、この入力基板の入力窓13と対向する面とは反対側の面に形成されてX線を蛍光に変換する入力蛍光面、およびこの入力蛍光面に積層されて蛍光を電子に変換する光電変換面を有している。また、出力部16には、電子を可視光に変換する出力蛍光面が形成されている。また、複数の集束電極18および陽極19は環状に形成されている。   The input unit 15 is an input substrate that is formed in a convex curved surface toward the input window 13, and an input fluorescence that is formed on a surface opposite to the surface facing the input window 13 of the input substrate and converts X-rays into fluorescence. And a photoelectric conversion surface that is laminated on the input phosphor surface and converts fluorescence into electrons. The output unit 16 is formed with an output phosphor screen that converts electrons into visible light. The plurality of focusing electrodes 18 and anodes 19 are formed in an annular shape.

図1に示すように、入力部15は環状の支持フレーム23によって外囲器12内に支持されている。この支持フレーム23は、金属製で、入力部15が溶接にて固定されているとともに電気的に接続されている。   As shown in FIG. 1, the input unit 15 is supported in the envelope 12 by an annular support frame 23. The support frame 23 is made of metal, and the input portion 15 is fixed by welding and is electrically connected.

外囲器12には、入力部15の近傍位置に、入力部15が電気的に接続される電気接続部24aが設けられている。この電気接続部24aは、外囲器12に開けられた貫通孔を閉塞する例えばガラスなどの絶縁部25を貫通し、外囲器12とは絶縁された状態に設けられている。金属製のワイヤ26の一端が支持フレーム23に溶接によって電気的に接続され、他端が電気接続部24aに溶接によって電気的に接続され、中間部が例えばガラスなどの絶縁部材27で外囲器12に支持されている。このワイヤ26および支持フレーム23を介して入力部15と電気接続部24とが電気的に接続されている。   The envelope 12 is provided with an electrical connection part 24a to which the input part 15 is electrically connected at a position near the input part 15. The electrical connection portion 24a passes through an insulating portion 25 such as glass that closes a through hole opened in the envelope 12, and is provided in an insulated state from the envelope 12. One end of the metal wire 26 is electrically connected to the support frame 23 by welding, the other end is electrically connected to the electrical connection portion 24a by welding, and the middle portion is surrounded by an insulating member 27 such as glass. Supported by 12. The input unit 15 and the electrical connection unit 24 are electrically connected via the wire 26 and the support frame 23.

なお、図1には、入力部15が接続される電気接続部24aしか示していないが、外囲器12には各電極20毎に同様の電気接続部24が設けられ、これら各電気接続部24と各電極20とがそれぞれワイヤ26などの接続部材で電気的に接続されている。また、外囲器12の金属製の外囲器本体12aも、他の電気接続部24とは絶縁されている電気接続部24として構成されている。   FIG. 1 shows only the electrical connection part 24a to which the input part 15 is connected. However, the envelope 12 is provided with the same electrical connection part 24 for each electrode 20, and each of these electrical connection parts. 24 and each electrode 20 are electrically connected by a connecting member such as a wire 26, respectively. The metal envelope body 12a of the envelope 12 is also configured as an electrical connection portion 24 that is insulated from the other electrical connection portions 24.

また、支持フレーム23には、フォトセル31が設置されている。このフォトセル31は、密閉された筐体32、およびこの筐体32内に配置された例えばフォトダイオードなどの光電変換素子33を有している。   A photocell 31 is installed on the support frame 23. The photocell 31 includes a sealed casing 32 and a photoelectric conversion element 33 such as a photodiode disposed in the casing 32.

筐体32は、金属製で筒状のケース34、このケース34の一端開口を閉塞する透明なガラス板35、および他端開口を閉塞する絶縁板36を有している。   The casing 32 includes a metal-made cylindrical case 34, a transparent glass plate 35 that closes one end opening of the case 34, and an insulating plate 36 that closes the other end opening.

光電変換素子33は、受光面をガラス板35に対向させて絶縁板36に取り付けられている。光電変換素子33が例えばフォトダイオードの場合、アノードおよびカソードを有し、アノードと絶縁板36を貫通するリード37とが例えばワイヤボンディングによって形成される溶断可能部としてのワイヤ38で電気的に接続され、カソードがワイヤ39でケース34に電気的に接続されている。ワイヤ38は、例えば金などの材料で細く形成され、外部から所定の電流値以上の溶断電流が流れることで溶断可能としている。   The photoelectric conversion element 33 is attached to the insulating plate 36 with the light receiving surface facing the glass plate 35. When the photoelectric conversion element 33 is a photodiode, for example, it has an anode and a cathode, and the anode and the lead 37 penetrating the insulating plate 36 are electrically connected by a wire 38 as a fusing part formed by, for example, wire bonding. The cathode is electrically connected to the case 34 by a wire 39. The wire 38 is thinly formed of a material such as gold, for example, and can be blown when a fusing current of a predetermined current value or more flows from the outside.

光電変換素子33のアノードに接続されたリード37と、光電変換素子33のカソードに接続されたケース34とが、フォトセル31の一対の端子40,41として構成されている。   A lead 37 connected to the anode of the photoelectric conversion element 33 and a case 34 connected to the cathode of the photoelectric conversion element 33 are configured as a pair of terminals 40 and 41 of the photocell 31.

フォトセル31のケース34が支持フレーム23に設けられた開口部23aに嵌め込まれて溶接にて固定されているとともに電気的に接続され、フォトセル31のリード37が外囲器12に溶接にて固定されているとともに電気的に接続されている。これにより、フォトセル31の一方の端子40がリード37によって外囲器12に電気的に接続され、他方の端子41が支持フレーム23およびワイヤ26を通じて電気接続部24aに電気的に接続されている。また、支持フレーム23に固定されたフォトセル31のガラス板35の表面は、入力部15の蛍光入力面および光電変換面が積層形成される面に対向されている。   The case 34 of the photocell 31 is fitted into an opening 23a provided in the support frame 23 and fixed by welding and electrically connected, and the lead 37 of the photocell 31 is welded to the envelope 12 It is fixed and electrically connected. Thereby, one terminal 40 of the photocell 31 is electrically connected to the envelope 12 by the lead 37, and the other terminal 41 is electrically connected to the electrical connection portion 24a through the support frame 23 and the wire 26. . Further, the surface of the glass plate 35 of the photocell 31 fixed to the support frame 23 is opposed to the surface on which the fluorescence input surface and the photoelectric conversion surface of the input unit 15 are laminated.

そして、このように構成されているX線イメージ管11の製造工程において、入力部15の蛍光入力面に光電変換面の膜を形成する成膜工程がある。   In the manufacturing process of the X-ray image tube 11 configured as described above, there is a film forming process of forming a film of the photoelectric conversion surface on the fluorescence input surface of the input unit 15.

この成膜工程にあたっては、予め、外囲器12内にフォトセル31を配置し、このフォトセル31の一対の端子40,41を電極20が接続された電気接続部24aを含む2つの電気接続部24に接続しておく。すなわち、上述したように、フォトセル31の一方の端子40をリード37によって外囲器本体12aに電気的に接続し、他方の端子41を支持フレーム23およびワイヤ26を通じて入力部15用(陰極17用)の電気接続部24aに電気的に接続する。   In this film forming process, a photocell 31 is disposed in the envelope 12 in advance, and a pair of terminals 40 and 41 of the photocell 31 are connected to two electrical connections including an electrical connection portion 24a to which the electrode 20 is connected. Connect to part 24. That is, as described above, one terminal 40 of the photocell 31 is electrically connected to the envelope body 12a by the lead 37, and the other terminal 41 is connected to the input unit 15 (cathode 17 through the support frame 23 and the wire 26. For electrical connection) 24a.

さらに、外囲器12の外部において、外囲器本体12aと電気接続部24aとの間にフォトセル31からの出力信号を測定する測定器を接続し、外囲器12に設けられている図示しない光導入部から外囲器12内に一定光量の光を照射する。この外囲器12内に照射された一定光量の光がフォトセル31のガラス板35を透過して光電変換素子33に入射し、光電変換素子33が光の入射量に応じた出力信号を外囲器本体12aおよび電気接続部24aを通じて測定器に出力する。測定器は、光電変換素子33からの出力信号を入力し、基準となる初期測定値として記憶する。   Further, outside the envelope 12, a measuring device for measuring an output signal from the photocell 31 is connected between the envelope body 12a and the electrical connection portion 24a, and the envelope 12 is illustrated. A constant amount of light is irradiated into the envelope 12 from the light introducing portion that is not. A certain amount of light irradiated into the envelope 12 passes through the glass plate 35 of the photocell 31 and enters the photoelectric conversion element 33. The photoelectric conversion element 33 outputs an output signal corresponding to the amount of incident light. The data is output to the measuring instrument through the envelope body 12a and the electrical connection 24a. The measuring instrument inputs an output signal from the photoelectric conversion element 33 and stores it as a reference initial measurement value.

成膜工程では、外囲器12内において、入力部15の入力蛍光面に例えばアンチモンなどの所定の材料を蒸着させて所定の膜厚の光電変換面を成膜する。このとき、フォトセル31のガラス板35の表面にも、入力部15に形成される膜の膜厚と同じ膜厚の膜が成膜される。   In the film forming process, a predetermined material such as antimony is deposited on the input phosphor screen of the input unit 15 in the envelope 12 to form a photoelectric conversion surface having a predetermined film thickness. At this time, a film having the same thickness as the film formed on the input unit 15 is also formed on the surface of the glass plate 35 of the photocell 31.

この成膜工程で成膜された膜の膜厚を、フォトセル31を用いて測定する。すなわち、外囲器12に設けられている図示しない光導入部から外囲器12内に一定光量の光を照射する。この外囲器12内に照射された一定光量の光がフォトセル31のガラス板35の表面に蒸着された膜およびガラス板35を透過して光電変換素子33に入射し、光電変換素子33が光の入射量に応じた出力信号を外囲器本体12aおよび電気接続部24aを通じて測定器に出力する。このとき、光電変換素子33が光の入射量は、ガラス板35の表面に蒸着された膜の膜厚に応じた光の入射量となる。   The film thickness of the film formed in this film forming process is measured using the photocell 31. That is, a certain amount of light is irradiated into the envelope 12 from a light introducing portion (not shown) provided in the envelope 12. A certain amount of light irradiated in the envelope 12 passes through the film deposited on the surface of the glass plate 35 of the photocell 31 and the glass plate 35 and enters the photoelectric conversion element 33, and the photoelectric conversion element 33 is An output signal corresponding to the amount of incident light is output to the measuring instrument through the envelope body 12a and the electrical connection 24a. At this time, the amount of incident light by the photoelectric conversion element 33 is the amount of incident light according to the film thickness of the film deposited on the surface of the glass plate 35.

測定器は、光電変換素子33からの出力信号を入力し、成膜後の測定値を取得して基準となる初期測定値と比較するとともに、予め測定によって特定されている膜厚と光電変換素子33の出力値との関係に基づいて、フォトセル31のガラス板35の表面に成膜された膜厚すなわち入力部15に成膜された膜厚を判定する。   The measuring device receives an output signal from the photoelectric conversion element 33, acquires a measured value after film formation, compares it with an initial measured value as a reference, and determines the film thickness and photoelectric conversion element specified in advance by measurement. Based on the relationship with the output value 33, the film thickness formed on the surface of the glass plate 35 of the photocell 31, that is, the film thickness formed on the input unit 15 is determined.

また、フォトセル31を用いた膜厚測定後には、外囲器12の外部において、フォトセル31の一対の端子40,41が接続された外囲器本体12aおよび電気接続部24aに溶断電源を接続し、外囲器本体12aおよび電気接続部24aを通じてフォトセル31に所定の溶断電流を流す。   In addition, after the film thickness measurement using the photocell 31, the fusing power source is connected to the envelope body 12a and the electrical connection portion 24a to which the pair of terminals 40 and 41 of the photocell 31 are connected outside the envelope 12. Then, a predetermined fusing current is supplied to the photocell 31 through the envelope body 12a and the electrical connection portion 24a.

このとき、外囲器本体12aからリード37およびワイヤ38を通じて光電変換素子33のアノードに対して溶断電流を流すことにより、例えば金などの材料で細く形成されているワイヤ38が溶断する。ワイヤ38を溶断させることにより、フォトセル31が接続された一対の端子40,41が接続された外囲器本体12aと電気接続部24aとの間を遮断し、絶縁する。 At this time, by passing a fusing current from the envelope body 12a to the anode of the photoelectric conversion element 33 through the lead 37 and the wire 38, the wire 38 that is thinly formed of a material such as gold is fused. By fusing the wire 38, the envelope body 12a to which the pair of terminals 40 and 41 to which the photocell 31 is connected is connected to the electrical connecting portion 24a to be insulated.

このように、X線イメージ管11の製造方法によれば、フォトセル31の一対の端子40,41を電極20が接続された電気接続部24aを含む2つの電気接続部24に接続し、外囲器12内で成膜される膜の膜厚測定時に、外囲器12内に照射される光を受けたフォトセル31からの出力信号を電気接続部24から外部に出力するため、外囲器12にフォトセル31の専用の電気接続部を新たに追加することなく、フォトセル31を用いた測定回路を形成することができ、外囲器12に設ける電気接続部を少なくでき、製造工数を削減し、コストアップを抑制することができる。   As described above, according to the method of manufacturing the X-ray image tube 11, the pair of terminals 40 and 41 of the photocell 31 are connected to the two electrical connection portions 24 including the electrical connection portion 24a to which the electrode 20 is connected. When measuring the film thickness of the film formed in the envelope 12, the output signal from the photocell 31 that has received the light irradiated in the envelope 12 is output from the electrical connection unit 24 to the outside. The measurement circuit using the photocell 31 can be formed without newly adding a dedicated electrical connection for the photocell 31 to the vessel 12, and the number of electrical connections to be provided in the envelope 12 can be reduced. Can be reduced and cost increase can be suppressed.

さらに、フォトセル31を用いた膜厚測定後には、外部からフォトセル31が接続された電気接続部24を通じてフォトセル31に所定の溶断電流を流すため、フォトセル31のワイヤ38を溶断させ、フォトセル31が接続された2つの電気接続部24間を遮断し、絶縁することができる。これにより、電極20を接続する電気接続部24をフォトセル31の接続に共用していても、X線イメージ管11の使用時には電気接続部24を電極20への通電に正常に使用できる。   Furthermore, after the film thickness measurement using the photocell 31, in order to flow a predetermined fusing current to the photocell 31 through the electrical connection portion 24 to which the photocell 31 is connected from the outside, the wire 38 of the photocell 31 is blown, The two electrical connections 24 to which the photocell 31 is connected can be blocked and insulated. As a result, even when the electrical connection portion 24 for connecting the electrode 20 is shared for the connection of the photocell 31, the electrical connection portion 24 can be normally used for energizing the electrode 20 when the X-ray image tube 11 is used.

また、フォトセル31の一方の端子40は外囲器12に接続し、他方の端子41は複数の電極20のうちのX線を電子に変換する入力部15である陰極17と接続される電気接続部24aに接続するため、フォトセル31を入力部15に成膜する膜厚の測定に利用できる。   In addition, one terminal 40 of the photocell 31 is connected to the envelope 12, and the other terminal 41 is connected to the cathode 17 which is an input unit 15 for converting X-rays of the plurality of electrodes 20 into electrons. Since the photocell 31 is connected to the connection portion 24a, the photocell 31 can be used for measuring the film thickness to be formed on the input portion 15.

なお、フォトセル31の一対の端子40,41を接続する電気接続部24は、外囲器本体12aおよび入力部15用(陰極17用)の電気接続部24aに限らず、他の電極20用の電気接続部24でもよい。   In addition, the electrical connection part 24 that connects the pair of terminals 40 and 41 of the photocell 31 is not limited to the electrical connection part 24a for the envelope body 12a and the input part 15 (for the cathode 17), but for other electrodes 20 The electrical connection 24 may be used.

本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これら新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれる。   Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

11 X線イメージ管
12 外囲器
15 入力部
17 陰極
20 電極
24 電気接続部
31 フォトセル
38 溶断可能部としてのワイヤ
40,41 端子
11 X-ray image tube
12 Envelope
15 Input section
17 Cathode
20 electrodes
24 Electrical connections
31 Photocell
38 Wire as a fusing part
40, 41 terminals

Claims (3)

外囲器に複数の電気接続部が設けられるとともに前記外囲器内に前記電気接続部と接続されて複数の電極が配置されるX線イメージ管の製造方法において、
前記外囲器内にフォトセルを配置し、このフォトセルの一対の端子を前記電極が接続された前記電気接続部を含む2つの前記電気接続部に接続し、
前記外囲器内で成膜される膜の膜厚測定時に、前記外囲器内に照射される光を受けた前記フォトセルからの出力信号を前記電気接続部から外部に出力する
ことを特徴とするX線イメージ管の製造方法。
In the manufacturing method of the X-ray image tube in which a plurality of electrical connection portions are provided in the envelope and a plurality of electrodes are arranged in the envelope and connected to the electrical connection portions.
A photocell is disposed in the envelope, and a pair of terminals of the photocell is connected to the two electrical connection portions including the electrical connection portion to which the electrodes are connected,
When measuring the film thickness of the film formed in the envelope, an output signal from the photocell that has received light irradiated in the envelope is output from the electrical connection portion to the outside. A method for manufacturing an X-ray image tube.
前記フォトセルは、所定の溶断電流が流れることで溶断して一対の端子間を遮断する溶断可能部を有しており、
前記膜厚測定後に、外部から前記電気接続部を通じて前記フォトセルに所定の溶断電流を流し、前記フォトセルの前記溶断可能部を溶断させて前記フォトセルが接続された2つの前記電気接続部間を絶縁する
ことを特徴とする請求項1記載のX線イメージ管の製造方法。
The photocell has a fusing part that cuts off between a pair of terminals by fusing when a predetermined fusing current flows,
After the film thickness measurement, a predetermined fusing current is supplied to the photocell from the outside through the electric connection portion, and the fusing portion of the photocell is blown to connect between the two electric connection portions to which the photocell is connected. The method for manufacturing an X-ray image tube according to claim 1, wherein:
前記フォトセルの一方の端子は前記外囲器に接続し、他方の端子は複数の前記電極のうちのX線を電子に変換する入力部である陰極と接続される電気接続部に接続する
ことを特徴とする請求項1または2記載のX線イメージ管の製造方法。
One terminal of the photocell is connected to the envelope, and the other terminal is connected to an electrical connection part connected to a cathode which is an input part for converting X-rays of the plurality of electrodes into electrons. The method of manufacturing an X-ray image tube according to claim 1 or 2, wherein:
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773853U (en) * 1980-10-22 1982-05-07
JPS5873937A (en) * 1981-10-28 1983-05-04 Toshiba Corp Production process of electron tube with photoelectric surface
JPH01217826A (en) * 1988-01-15 1989-08-31 Thomson Csf Manufacture of photocathode for image intensifier

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773853U (en) * 1980-10-22 1982-05-07
JPS5873937A (en) * 1981-10-28 1983-05-04 Toshiba Corp Production process of electron tube with photoelectric surface
JPH01217826A (en) * 1988-01-15 1989-08-31 Thomson Csf Manufacture of photocathode for image intensifier

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