JP2013076672A - Measurement apparatus using spiral inductor and oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measurement method resistant to noise in an apparatus for measuring an intersection angle, a rotation angle, a position, a speed, acceleration, an inclination, vibration, etc. by utilizing variation of mutual inductance generated between spiral inductors and variation of self-inductance using a metal of spiral inductance and a substance with relative magnetic permeability sharply different from "1".SOLUTION: Since the variation of the mutual inductance or the variation of the self-inductance is detected as variation of the oscillation frequency by using an oscillator including the spiral inductor, a system resistant to noise and capable of easily and inexpensively performing measurement is constructed even when a distance from a sensor part up to a measurement part is comparatively long.

Description

The present invention constitutes an oscillator using one or a plurality of spiral inductors, and measures the self-inductance of the spiral inductor or the mutual inductance variation generated between the spiral inductors by measuring the oscillation frequency by two oscillation frequencies. The present invention relates to an apparatus for measuring an intersection angle between objects, a rotation angle of a rotating object, a position and speed of an object, an acceleration, a tilt, a degree of vibration, and the like.

In modern times, remote operation and automatic operation have progressed, and in terms of security, it is important to monitor the opening and closing of doors. In factories and the like, precise control of robot arms and the like has become necessary. The opening and closing of doors, the loosening of screws, and the control of joints such as robot arms can be visually corrected in many places where humans can approach, but humans approach twice. In places where it is impossible to control, for example, how to open and close, how much the arm etc. has rotated, and at what speed in remote control of a spacecraft etc. It is very important to accurately measure and know whether it has moved without relying on humans.

Systems that use multiple inductors, such as spiral inductors, are being developed as a simple and inexpensive method for measuring intersection and rotation angles, but these systems use a voltage from the primary side to the secondary side. It is a method that uses the transmission efficiency of the transmitted voltage, etc. If the distance from the measurement location to the measuring instrument is long, it is also vulnerable to noise from the outside, so it is necessary to optimize each measurement location and operate it It is difficult to do.

Japanese Patent Application 2010-194144

Shinya Morishita and Masayuki Yamauchi, “Study on Measurement of Aperture Angle Using Printed Spiral Inductor”, IEICE 2011 General Conference, A-2-20, February 28, 2011, p . 59 Kazuhisa Yoshimatsu, Takashi Kunihiro, Tatsuya Minamiguchi, Masayuki Yamauchi, “Study on Motion Detection Experiments Using Mutual Inductance Between Spiral Inductors” 2008 IEICE General Conference, A-1-2, March 2008 Issued on the 5th, p. 2

In the conventional cross angle measurement system and rotation angle measurement system using mutual inductance generated between spiral inductors, one spiral inductor as described in Patent Document 1 or Non-Patent Document 1 is replaced with the other spiral inductor. There are methods that use the efficiency of transmitting voltage to the outside, but these methods are highly susceptible to external noise and need to be optimized, so they cannot be said to be suitable for measurements from remote locations. . For this reason, in order to unify the measurement unit and install multiple sensors to perform measurement, individual adjustments are required and it can be said that the operation is difficult.

In addition, in a technique similar to that described in Non-Patent Document 2, in one of the stacked spiral inductors, which is an application of the intersection angle measurement system and the rotation angle measurement system, one spiral inductor is moved horizontally. In addition, voltage and power can be measured even in measuring devices such as position, vibration, acceleration, speed, and tilt that can be realized by holding a metal or an object with different permeability between two spiral inductors and moving the sandwiched object. The method using the transmission efficiency is weak to the installation environment and noise and difficult to operate.

In order to solve the above problem, the present invention is formed on the base 16 and base 17 that can be installed on the crossed member 12 and member 13 as shown in FIG. A first spiral inductor (for example, spiral inductor 14), which is an element in which conductors such as copper are spirally arranged in a shape based on a circle, square, polygon, distorted egg shape, etc. It has a second spiral inductor (for example, spiral inductor 15), the angle of intersection changes around the intersection between the member 12 and the member 13, and the spiral inductor 14 as the member 12 or the member 13 or both move. And the spiral inductor 15 and the spiral inductor 15 are changed in the distance, overlapping condition, intersection angle, and the like. For example, a capacitor 18 is connected to the spiral inductor 15 in parallel, and the spiral inductors 14 and 15 and the capacitor 18 are used. The oscillator 19 is prepared, the frequency is modulated by the change in the mutual inductance between the spiral inductor 14 and the spiral inductor 15, and the crossing angle or the fluctuation of the crossing angle is measured. The spiral inductors 14 and 15 are constructed in such a way as to be slightly spaced so as not to energize or sandwich an insulator.

In order to solve the above-mentioned problem, the present invention also provides a circular shape formed on a base that can be installed on the member 20 and the member 21 as shown in FIG. A first spiral inductor (for example, spiral inductor 14), which is an element in which conductors such as copper are arranged in a spiral shape based on a beautiful shape such as a square, a polygon, a fan shape, an egg shape, or a shape obtained by distorting them. A means for detecting a change in mutual inductance between the spiral inductor 14 and the spiral inductor 15 due to a change in the rotation angle between the member 20 and the member 21, having a second spiral inductor (for example, the spiral inductor 15). For example, a capacitor 18 is connected to a spiral inductor 15. The oscillator 19 using the spiral inductors 14 and 15 and the capacitor 18 is connected to the row, and the frequency is modulated by the change in the mutual inductance between the spiral inductor 14 and the spiral inductor 15, and the rotation angle or It is characterized by measuring the fluctuation of the rotation angle. The spiral inductors 14 and 15 are constructed in such a way as to be slightly spaced so as not to energize or sandwich an insulator.

In order to solve the above problem, a system as shown in FIG. 3 is constructed in the same manner as the intersection angle measurement system and the rotation angle measurement system. A spiral inductor 14 built on the base 16 and a spiral inductor 15 built on the base 17, which are installed so as to sandwich an insulator between them so as not to be energized or to have a slight gap; A capacitor 18 and an oscillator 19 including a capacitor / resistor are constructed, and the base 17 and the capacitor 18, that is, the spiral inductor 15 and the capacitor 18 move left and right or back and forth at the same time. The mutual inductance fluctuates, whereby the oscillation frequency of the oscillator 19 changes. It has means for measuring the change in the oscillation frequency, and has means for back-calculating the position of the base 17 with respect to the base 16. The shape of the spiral inductors 14 and 15 is an element in which conductors such as copper are arranged in a spiral shape based on a clean, well-rounded shape such as a circle, a rectangle, a polygon, a fan, an egg shape, or a shape obtained by distorting them. To do.

In order to solve the above problem, a system as shown in FIG. A spiral inductor 14 constructed on the substrate 16, a spiral inductor 15 constructed on the substrate 17, and a member 22 having a relative permeability significantly different from 1 between the spiral inductor 14 and the spiral inductor 15 are sandwiched between the capacitor 18, By constructing the oscillator 19 including the capacitor and the resistor, the base body 17 and the capacitor 18, that is, the spiral inductor 15 and the capacitor 18 move left and right or back and forth simultaneously, or only the member 22 moves left and right or back and forth. The mutual inductance between the spiral inductor 14 and the spiral inductor 15 fluctuates, whereby the oscillation frequency of the oscillator 19 changes. It has means for measuring the change in the oscillation frequency, and has means for back-calculating the position of the base 17 with respect to the base 16 or the position of the member 22 with respect to the base 16. The shape of the spiral inductors 14 and 15 is an element in which conductors such as copper are arranged in a spiral shape based on a clean, well-rounded shape such as a circle, a rectangle, a polygon, a fan, an egg shape, or a shape obtained by distorting them. To do. When the member 22 is a conductor, the spiral inductors 14 and 15 are constructed so as to be slightly spaced or sandwich an insulator so that the member 22 is not energized.

In these measuring devices using an oscillator, a resistor may be connected to the spiral inductor 15.

In the measuring device using an oscillator, the spiral inductor 14 and the spiral inductor 15 may be connected in series or in parallel.

In these measuring devices using an oscillator, a spiral inductor 15 and a capacitor 18 are not used, a base material having a relative permeability that is not large and 1 is installed instead of the spiral inductor 15, and the magnitude of the self-inductance is varied. The angle and speed may be measured from the oscillation frequency.

By using the present invention, a plurality of spiral inductors are used, and a crossing angle such as an opening / closing angle and an inclination angle between two intersecting objects and a change in a crossing angle such as an opening / closing speed are utilized. In addition to increasing the accuracy of the device that detects the speed, the rotation angle and rotation speed of an object relative to an object, and the position, velocity, acceleration, tilt, degree of vibration, etc., the measuring device from the sensor unit As a result, it is possible to increase the number of sensor units to be measured by one measuring instrument, so that it is possible to construct a more inexpensive and accurate system.

By using the present invention, by measuring the change of the self-inductance of the spiral inductor in place of the change of the oscillation frequency due to the change of the position of the base material where the relative permeability placed on the spiral inductor is not large and 1, Not only can the accuracy be increased, but the distance from the sensor unit to the measuring device can be increased, resulting in an increase in the number of sensor units measured by a single measuring instrument. It becomes possible.

It is a block diagram at the time of wearing this invention on a crossing angle measuring apparatus. It is a block diagram at the time of wearing this invention to a rotation angle measuring device. It is a block diagram at the time of attaching this invention to a position, speed, acceleration, inclination, vibration measuring device. FIG. 3 is a block diagram when the present invention is attached to a position / velocity / acceleration / tilt / vibration measuring apparatus having a shape in which an object having a large relative permeability other than 1 is sandwiched between spiral inductors. It is an example of a circular spiral inductor. The measurement circuit used in this embodiment for the modified Colpitts oscillator 19 including the spiral inductors 14 and 15 and the capacitor 18 in FIGS. 1 to 4 used when obtaining the crossing angle and the rotation angle from the frequency fluctuation in this embodiment. FIG. 6 is a circuit diagram to which an equivalent circuit 312 is added. FIG. 7 shows an actual measurement result and a simulation result of the oscillation frequency when the crossing angle is changed every 1 ° using the circuit of FIG. FIG. 7 is an actual measurement result of an oscillation frequency when the rotation angle is changed every 1 ° using the circuit of FIG.

Hereinafter, the intersection angle measurement system according to the first embodiment will be described with reference to FIG.

The crossing angle detection system according to the present embodiment shown in FIG. 1 includes a member 12 and a sensor unit 11 including a member 13 for which a crossing angle is obtained, a connection wiring unit 110, and a measuring unit 300. By detecting the variation of the mutual inductance generated between the spiral inductor 14 and the spiral inductor 15 formed on the base 16 and the base 17 installed on the member 13 due to the change in the crossing angle between the members 12 and 13, Find the angle of intersection.

The spiral inductor 14 and the spiral inductor 15 are arranged so as to be overlapped cleanly when the crossing angle of the members 12 and 13 becomes 0 °, and are fixed to the member 12 and the member 13, respectively. Further, the spiral inductors 14 and 15 are covered with a thin insulator having a low dielectric constant so that the spiral inductors 14 and 15 do not come into contact with each other when the crossing angle between the members 12 and 13 becomes 0 °, or a gap is slightly opened.

In addition to the members 12 and 13, the spiral inductors 14 and 15, and the base bodies 16 and 17, the sensor unit 11 includes an oscillator circuit for measuring the mutual inductance generated between the spiral inductors 14 and 15 using an oscillator. An oscillator circuit 19 to be configured and a capacitor 18 connected to the spiral inductor 15 are included.

From the operation unit 316 included in the measurement unit 300, which is a user interface for the user to operate, for example, when the user presses a measurement start button, a signal for performing measurement is sent to the control unit 313. In response to the signal, the control unit 313 generates a DC voltage from the DC voltage application unit 315 that can generate an arbitrary DC voltage, and connects the connection unit 311, the connection terminals 301 and 302, and the connection wirings 111 and 112 connected thereto. To the oscillator circuit 19 connected to the spiral inductor 14, and the oscillator circuit 19 oscillates using the spiral inductor 15 coupled to the spiral inductor 14 by mutual inductance and the capacitor 18 coupled to the spiral inductor 15. .

The oscillator circuit 19 needs to be an oscillator whose oscillation frequency varies depending on the mutual inductance. For example, a Colpitts oscillator circuit using a resonance 000 of an inductor and a capacitor is desirable, and a spiral inductor 14 or 15 is used. Thus, the oscillator circuit 19 needs to be constructed.

Since the mutual inductance between the spiral inductors 14 and 15 fluctuates due to the fluctuation of the crossing angle, the oscillation frequency also fluctuates.

This oscillation frequency is measured by the frequency measuring unit 312 via the connection wiring 113.

The control unit 313 obtains how many times the current intersection angle is based on the frequency measured as described above, and shows the display unit 314 that is a device that can be checked by a user such as a display.

The control unit may be a general-purpose computer or the like, and is a system that moves according to a program stored on a memory.

Even if there are a plurality of measurement locations, the sensor unit 11 can be increased, the connection wiring 110 and connection terminals can be increased in one measurement unit 300, and each sensor unit can be sensed in a time-sharing manner. Even if there is a distance between the measurement location and the sensor, since the frequency is measured, there is little noise from the outside, and the measurement is considered easy.

In the present embodiment, the spiral inductors 14 and 15 are formed on the bases 16 and 17, but may be directly constructed on the members 12 and 13.

In this embodiment, an example using two spiral inductors is shown, but instead of the spiral inductor 15, an object having a large relative magnetic permeability and not 1 is installed, and the self-inductance of the spiral inductor 14 is changed by the change of the crossing angle. You may measure by making it fluctuate.

In this embodiment, an example is shown in which two spiral inductors are used. However, the number of spiral inductors installed on the member 12 is three, and the spiral inductors installed on the member 13 are the same. Two spiral inductors may be connected in parallel or in series.

Further, even when a plurality of spiral inductors are used as described above, the oscillators 19 may be individually constructed.

Hereinafter, a rotation angle measurement system according to the second embodiment will be described with reference to FIG.

The rotation angle detection system according to the present embodiment illustrated in FIG. 2 includes a sensor unit 11 including a member 20 and a member 21 whose rotation angle is to be obtained, a connection wiring unit 110, and a measurement unit 300. The rotation angle is obtained by detecting the variation of the mutual inductance generated between the spiral inductor 14 and the spiral inductor 15 formed on the member 20 and the member 21 due to the change of the rotation angle between the members 20 and 21.

Desirably, the spiral inductor 14 and the spiral inductor 15 are arranged so as to be neatly overlapped when the rotation angle of the members 20 and 21 becomes 0 °.

Further, the surface is covered with a thin insulator having a low dielectric constant so that the spiral inductors 14 and 15 are not in direct contact with each other, or a slight gap is formed.

In addition to the members 20 and 21, the spiral inductors 14 and 15, and the capacitors 18 connected to the spiral inductor 15, the sensor unit 11 measures the mutual inductance generated between the spiral inductors 14 and 15 using an oscillator. It includes an oscillator 19 that forms an oscillator circuit using spiral inductors 14 and 15 and a capacitor 18.

From the operation unit 316 included in the measurement unit 300, which is a user interface for the user to operate, for example, when the user presses a measurement start button, a signal for performing measurement is sent to the control unit 313. In response to the signal, the control unit 313 generates a DC voltage from the DC voltage application unit 315 that can generate an arbitrary DC voltage, and connects the connection unit 311, the connection terminals 301 and 302, and the connection wirings 111 and 112 connected thereto. The oscillator 19 oscillates using the spiral inductor 15 coupled to the spiral inductor 14 and the capacitor 18 coupled to the spiral inductor 15.

The oscillator 19 needs to be an oscillator whose oscillation frequency varies depending on the magnitude of the mutual inductance. For example, a Colpitts oscillator circuit using resonance between the inductor and the capacitor is desirable, and the spiral inductors 14 and 15 and the capacitor 18 are connected. The oscillator 19 needs to be constructed by using it.

Since the mutual inductance between the spiral inductors 14 and 15 varies due to the variation of the rotation angle, the oscillation frequency also varies.

This oscillation frequency is measured by the frequency measuring unit 312 via the connection wiring 113.

The control unit 313 obtains how many times the current rotation angle is from the frequency measured as described above, and shows the display unit 314 that is a device that can be checked by a user such as a display.

The control unit 313 may be a general-purpose computer or the like, and is a system that operates according to a program stored on a memory.

Even if there are a plurality of measurement locations, the sensor unit 11 can be increased, the connection wiring 110 and connection terminals can be increased in one measurement unit 300, and each sensor unit can be sensed in a time-sharing manner. Even if there is a distance between the measurement location and the sensor, since the frequency is measured, there is little noise from the outside, and the measurement is considered easy.

In this embodiment, the spiral inductors 14 and 15 are configured directly on the members 20 and 21, but they may be formed on the base and installed on the members 20 and 21.

In this embodiment, an example using two spiral inductors is shown. However, instead of the spiral inductor 15, an object having a large relative permeability and not 1 is installed, and the self-inductance of the spiral inductor 14 is changed by rotation. Therefore, measurement may be performed.

In this embodiment, an example is shown in which two spiral inductors are used. However, the number of spiral inductors installed on the member 12 is three, and the spiral inductors installed on the member 13 are the same. Two spiral inductors may be connected in parallel or in series.

Furthermore, even when a plurality of spiral inductors are used as described above, the oscillators 19 may be individually constructed.

Hereinafter, with reference to FIG. 3, a measurement apparatus for measuring any of position, vibration, velocity, acceleration, and tilt according to the third embodiment will be described.

The crossing angle measurement system and the rotation angle measurement system are the same except for the sensor unit. A direct current is applied to the oscillator 19 from the measurement unit, the oscillation frequency of the oscillator 19 is measured by the frequency measurement unit 312, and the control unit 313 determines the oscillation frequency from the oscillation frequency. In reverse, position information is displayed on the display unit 314 in the case of position measurement, vibration information in the case of vibration measurement, speed information in the case of speed, and acceleration information in the case of acceleration.

An apparatus for measuring any one of position, vibration, acceleration, speed, and tilt is, for example, in which the base 16 is placed on an object to be measured and the base 17 is within a range where the spiral inductors 14 and 15 slightly overlap. For example, a weight is placed on the base 17 so as to move freely, and the movement of the object is measured by installing it on the object to be measured using a spring or rubber. The shape of these spiral inductors does not have to be circular, but a distorted shape is better.

For example, when the object accelerates in the left direction in FIG. 3, the mutual inductance between the spiral inductors 14 and 15 varies due to the base body 17 shifting to the right due to inertia, and the oscillation frequency of the oscillator 19 changes. By measuring this oscillation frequency by the measuring unit 312, the position of the base body 17 with respect to the base body 16 is obtained.

If the position information of the base body 17 with respect to the base body 16 reveals, for example, that the base body 17 is shifted to the right in FIG. 3 with respect to the Xcm base body 16, the strength of the spring is XX [N / m ² ]. Yes, since the friction coefficient is YY, the object can be calculated backwards, such as accelerating to the left at 1 m / s ² .

If the history of acceleration data is stored in the control unit 313, the current speed can be known, and if the information of the first start point is stored, the position information of the object on which the base bodies 16 and 17 are installed can be known.

In addition, if the weight acceleration is added to the calculation of acceleration, the magnitude of the inclination can be found.

Furthermore, if it is designed so that the history of the acceleration sensor can be stored, it becomes possible to measure what kind of vibration has occurred.

In this embodiment, the spiral inductor 14 is formed on the base body 16, but a spiral inductor may be formed on the object itself on which the base body 16 is installed.

In this embodiment, two spiral inductors are used. However, a plurality of spiral inductors, three spiral inductors corresponding to the lower side of FIG. 3, and one spiral inductor corresponding to the upper side are provided. These spiral inductors may be connected in parallel or in series to the oscillator.

Furthermore, even when a plurality of spiral inductors are used as described above, the oscillator 19 may be constructed for each.

Hereinafter, with reference to FIG. 4, a measurement apparatus according to the fourth embodiment of the present invention that measures any of position, vibration, speed, acceleration, and tilt will be described.

The crossing angle measurement system and the rotation angle measurement system are the same except for the sensor unit. A direct current is applied to the oscillator 19 from the measurement unit 300, the oscillation frequency of the oscillator 19 is measured by the frequency measurement unit 312, and the control unit 313 performs the oscillation frequency. The position information is displayed on the display unit 314 for position measurement, the vibration information for vibration measurement, the speed information for speed, and the acceleration information for acceleration.

An apparatus for measuring any one of position, vibration, acceleration, speed, and inclination is provided, for example, by placing the base 16 and the base 17 so that the spiral inductors 14 and 15 are superimposed on an object to be measured in a clean manner. The movement of the object is measured by installing 22 on the object to be measured using a spring, rubber or the like so as to move freely within a range that overlaps the spiral inductors 14 and 15 even slightly. The shape of these spiral inductors does not have to be circular, but a distorted shape is better.

For example, when the object accelerates in the left direction in FIG. 4, the mutual inductance between the spiral inductors 14 and 15 varies due to the member 22 shifting to the right due to inertia, and the oscillation frequency of the oscillator 19 varies. To do.

By measuring this oscillation frequency by the measuring unit 312, the position of the member 22 with respect to the base bodies 16 and 17 is obtained.

If the position information of the member 22 with respect to the bases 16 and 17 determines from the frequency that the member 22 is displaced to the right in FIG. 3 with respect to the Xcm base 16, for example, the spring strength is XX [N / m ² ]. Since the friction coefficient is YY, it is possible to perform reverse calculations such as the object accelerating to the left at 1 m / s ² .

If the history of acceleration data is stored in the control unit 313, the current speed can be known, and if the information of the first start point is also stored, the position information of the object itself on which the base bodies 16 and 17 are installed can be known.

In addition, if the weight acceleration is added to the calculation of acceleration, the magnitude of the inclination can be found.

Furthermore, if it is designed so that the history of the acceleration sensor can be stored, it becomes possible to measure what kind of vibration has occurred.

In this embodiment, the spiral inductor 14 is formed on the base body 16, but a spiral inductor may be installed on the object itself on which the base bodies 16 and 17 are installed.

Further, in the present embodiment, an example using two spiral inductors is shown, but even if the spiral inductor 15 is not used, the self-inductance of the spiral inductor 14 varies depending on the position of the member 22. The self-inductance variation may be measured using the oscillation frequency variation to obtain information such as acceleration.

In this embodiment, two spiral inductors are used. However, a plurality of spiral inductors, three spiral inductors corresponding to the lower side of FIG. 3, and three spiral inductors corresponding to the upper side are also provided. These spiral inductors may be connected in parallel or in series to the oscillator.

Furthermore, even when a plurality of spiral inductors are used as described above, the oscillators 19 may be individually constructed.

In the present embodiment, a measurement method for obtaining the crossing angle by fluctuation of the oscillation frequency using a modified Colpitts oscillator 19 using a circular spiral inductor combining semicircles as shown in FIG. 5 will be described.

FIG. 6 shows a measurement circuit using the modified Colpitts oscillator 19. A circuit is configured using the inductors L1, L2, the mutual inductance M, the resistors R1, R2, R3, r1, r2, and the capacitors C1, C2, C3, C4, C5. However, in this example, C1 = 9.67 nF, C2 = 2.37 nF, C3 = 55.0 nF, C4 = 412 pF, C5 = 2.42 nF, R1 = 9.93 kΩ, R2 = 9.96 kΩ, R3 = 50 0.7Ω, r1 = 8.80Ω, r2 = 9.80Ω, and r1 and r2 are internal resistances of the spiral inductor.

C6 and R4 indicate an equivalent circuit of the measuring device (C6 = 0.270 pF, R4 = 50.0 kΩ), and the capacitor C5 included in the frequency measuring unit 312 is the capacitor 18.

In this method, the crossing angle between L1 and L2 changes and the mutual inductance M changes, whereby the oscillation frequency of the system changes. That is, the intersection angle is obtained by observing the oscillation frequency.

When the oscillator is configured with the above parameters and the crossing angle θ = 0 °, the oscillation frequency is 2.26 MHz. Therefore, the inductances of the spiral inductors on the primary side and the secondary side at 2.26 MHz are calculated using an LCR meter. As a result of the measurement, the spiral inductors on the primary side and the secondary side were both 14.1 μH.

The overlapping state of the two spiral inductors is set to 0 °, the secondary spiral inductor is changed to 180 ° at intervals of 1 °, and the frequency measurement results are shown in FIG. Some are shown in Table 1.

Moreover, the mutual inductance M when it changes 1 degree at a time is measured with an LCR meter, and the result of having performed simulation using those values is shown in FIG.

From the measurement results of FIG. 5 and Table 1, it can be seen that the frequency and the crossing angle have a one-to-one correspondence, and the crossing angle can be obtained by measuring the frequency.

In the simulation and actual measurement, an error that seems to be an error due to the measurement environment has occurred, but since the same result as the simulation is obtained, it is considered that the measurement environment and the measurement system are not greatly affected.

From these results, it is easy to measure up to about 90 ° in this parameter, and after that, it seems necessary to increase the accuracy of the frequency measuring unit 312.

If it is necessary to measure up to θ = 180 °, if this parameter is used, two sets of sensor units that can be measured efficiently up to the above 90 ° are prepared, and the first set measures from 0 to 90 degrees. It is considered necessary to measure 90 to 180 degrees in the second set.

In the present embodiment, a measurement method for obtaining a rotation angle based on fluctuation of oscillation frequency using a spiral inductor having a fan shape instead of a circle and using a modified Colpitts oscillator 19 will be described.

FIG. 6 shows a measurement circuit using the modified Colpitts oscillator 19. A circuit is configured using the inductors L1, L2, the mutual inductance M, the resistors R1, R2, R3, r1, r2, and the capacitors C1, C2, C3, C4, C5. However, in this embodiment, C1 = 10.2 nF, C2 = 2.12 nF, C3 = 160 nF, C4 = 301 nF, C5 = 3.82 nF, R1 = 7.51 kΩ, R2 = 47.2 kΩ, R3 = 870Ω, r1 = 10.0Ω, r2 = 10.0Ω, and r1 and r2 are internal resistances of the spiral inductor.

C6 and R4 indicate an equivalent circuit of the measuring device (C6 = 0.270 pF, R4 = 50.0 kΩ), and the capacitor C5 included in the frequency measuring unit 312 is the capacitor 18.

In this method, when L2 rotates with respect to L1, the degree of overlap between L1 and L2 changes, the mutual inductance M changes, and the oscillation frequency of the system changes. That is, the rotation angle is obtained by observing the oscillation frequency.

When the oscillator is configured with the above parameters and the rotation angle θ = 0 °, the oscillation frequency is approximately 1.83 MHz. Therefore, the inductances of the spiral inductors on the primary side and the secondary side at 1.83 MHz are calculated using the LCR meter. As a result, the primary spiral inductor was 18.7 μH, and the secondary spiral inductor was 18.3 μH.

The state where the two spiral inductors overlap without deviation is 0 °, the secondary spiral inductor is changed to 360 ° at 1 ° intervals, and the actual frequency measurement results are shown in FIG. Some values of the results are shown in Table 2.

Looking at the measurement results in Fig. 8 and Table 2, with a fan-shaped spiral inductor, it is difficult to measure the rotation angle around 0 °, 360 °, and 180 °, but basically it corresponds to the frequency and the measurement is possible. If there is a history, it can be seen that the rotation angle can be obtained.

Measurement difficulties near 0 ° / 360 ° and 180 ° can be clearly observed by changing the shape, such as distorting the shape of the spiral inductor itself.

1 Refers to the overall view of the crossing angle measurement device using an oscillator.
2 Refers to the overall view of the rotation angle measurement device using an oscillator.
3 Refers to the overall view of the position / velocity / acceleration / tilt / vibration measuring device using an oscillator.
4 Refers to an overall view of the position / velocity / acceleration / tilt / vibration measuring apparatus in which a member having a large relative permeability and not 1 is sandwiched between spiral inductors using an oscillator.
11 shows a sensor unit of the present invention.
12 Refers to one of the members for which the intersection angle measurement is performed.
13 Refers to the other member to be subjected to the intersection angle measurement.
14 One of the spiral inductors used in the present invention.
15 This refers to one used in combination with the spiral inductor 14 of the spiral inductor used in the present invention.
16 Refers to a substrate on which the spiral inductor 14 is generated.
17 Refers to a substrate on which the spiral inductor 15 is generated.
18 A capacitor connected in parallel to the spiral inductor 15.
19 An oscillator including a spiral inductor 14, a spiral inductor 15, a capacitor 18, a plurality of resistors, a plurality of capacitors, and a transistor. In the present embodiment, it refers to a modified Colpitts oscillator including a spiral inductor 14, a spiral inductor 15, and a capacitor 18, a resistor R1, a resistor R2, a resistor R3, a capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, and a transistor.
20 Refers to one of the members whose rotation angle is to be measured.
21 Refers to the other member whose rotation angle is to be measured.
22 Refers to a member having a large relative magnetic permeability between the spiral inductors 14 and 15, which is not 1.
110 Refers to a wiring connecting the sensor unit 11 and the measurement unit 300.
111 A wiring that sends a DC voltage from the measurement unit 300 to the oscillator 19 included in the sensor unit 11.
112 Refers to a wiring connecting the ground serving as a voltage reference of the sensor unit 11 and the measurement unit 300.
113 indicates a wiring that transmits an oscillation signal obtained by the oscillator 19 of the sensor unit 11 to the measurement unit 300.
300 Refers to the entire measurement unit of the present invention.
301 A connection terminal to the connection unit 311 that connects the wiring 111 to the measurement unit 300. When the number of sensor units is increased, the same number of connection terminals 301 are provided as the number of sensors.
302 A connection terminal to the connection unit 311 that connects the wiring 112 to the measurement unit 300. When the number of sensor units is increased, the number of connection terminals 302 is the same as the number of sensors.
303 A connection terminal to the connection unit 311 that connects the wiring 113 to the measurement unit 300. When the number of sensor units is increased, the same number of connection terminals 303 is provided as the number of sensors.
311 Refers to a connection part that is a doorway for signal and power delivery to the sensor part of the measurement part 300. When connecting a plurality of sensors by time division or the like, the sensor unit to be measured is switched by the connection unit 311.
312 indicates a frequency measurement unit that measures the frequency of a signal input from the sensor unit 11. FIG. 4 shows an equivalent circuit of a device that performs frequency measurement in this embodiment.
313 A control unit that calculates back from the frequency measured by the frequency measurement unit 312 to values such as an intersection angle, a rotation angle, a position, a velocity, acceleration, vibration, and tilt. When a plurality of sensor units 11 are shared by a time division method or the like, the control unit 313 determines a target sensor, sends a signal to the connection unit 311, and measures. In addition, a signal for displaying the obtained various values on the display unit 314 is sent. The control unit may be a general-purpose computer or the like, and is a system that moves according to a program stored on a memory.
Reference numeral 314 denotes a display unit that displays a result sent from the control unit 313. It may be displayed so as to be understood by humans, or may be a device that sends a signal to another system.
Reference numeral 315 denotes a DC voltage applying unit for moving the oscillator 19 included in the sensor unit 11.
316 Refers to an operation unit that operates the control unit 300. It may be a console that accepts human operations, or may be a component that accepts control from another system.

Claims (7)

Angle, vibration, position, tilt, speed, or acceleration measuring device using an oscillator with spiral inductor, capacitor, transistor, and resistor. An apparatus that configures an oscillator using a plurality of the spiral inductors, capacitors, transistors, and resistors, and measures a variation in mutual inductance between the spiral inductors by a variation in oscillation frequency. A measuring device that forms an oscillator using a plurality of the spiral inductors, capacitors, transistors, and resistors, and measures a change in mutual inductance between the spiral inductors based on a change in oscillation frequency and a change in the crossing angle. A measuring device that forms an oscillator using a plurality of spiral inductors, capacitors, transistors, and resistors, and measures a change in mutual inductance between spiral inductors by measuring a rotation angle and a change in rotation angle by a change in oscillation frequency. An oscillator is configured by using a plurality of the spiral inductors, capacitors, transistors, and resistors, and changes in the mutual inductance between the spiral inductors are caused by changes in the position of the other spiral inductor with respect to one spiral inductor due to fluctuations in the oscillation frequency. A measuring device that measures the position, tilt, vibration, and acceleration used. An oscillator is configured by using an object having a relative permeability not equal to 1 or a metal that is a conductor between the spiral inductors, a capacitor, a transistor, and a resistor, and fluctuations in mutual inductance between the spiral inductors are measured with respect to the oscillation frequency. A measuring device that measures position, tilt, vibration, velocity, or acceleration depending on the fluctuation. In the measuring device, using one spiral inductor and a metal whose relative permeability is not 1 or a metal that is a conductor, the magnitude of the self-inductance is changed and the frequency is changed by the movement of the position of the object with respect to the spiral inductor. , A measuring device that measures any of intersection angle, rotation angle, position, tilt, vibration, speed, and acceleration.