JP2013066983A - Abrasive - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an abrasive which brings about no streak-like fine ruggedness on a surface to be polished caused by the repeated periodicity of ruggedness formed on the surface of the abrasive.SOLUTION: A net-like uneven part 2 in one surface of a body 1 comprises a projected streak part 3 and a concave recessed part 4 surrounded with the projected streak part. A projected streak pattern 3P being a planar shape of the projected streak part, is formed as a pattern formed from many border line segments L which define many opening regions A corresponding to the concave recessed part and extend between two branch points B to define the opening regions, wherein an average value N of the number of border line segments extending from one branch point is 3.0≤N<4.0, and wherein the projected streak pattern 3P includes a region where there is no direction in which the opening regions are arrayed at a constant repeated period. Preferably, the shapes of the opening regions include two or more types of pentagon, hexagon, and heptagon. The body can be a two-layer configuration where supports are stacked.

Description

  The present invention relates to an abrasive for polishing the surface of various articles such as electronic parts, mechanical parts, and optical parts.

  When polishing the surface of the object to be polished with an abrasive, in order to prevent scratches caused by polishing debris generated by the polishing, a groove for storing or discharging polishing debris on the surface of the abrasive It is known to provide a depression (Patent Document 1, Patent Document 2).

The abrasive 20 shown in the perspective view of FIG. 16 is a net-like concavo-convex portion 22 having a large number of grooves 21 whose polishing surfaces are arranged vertically and horizontally. Further, an abrasive having a net-like uneven portion 22 which is a concave portion in which the grooves 21 are convex and the portions other than the convex stripes are recessed, which is opposite to that shown in FIG. 16, is also known.
The concavo-convex pattern 22P exhibited by the mesh-like concavo-convex portions 22 includes a square lattice illustrated in FIG. 16 as shown in FIG. 17A, a rectangular lattice in FIG. 17B, a hexagonal lattice in FIG. All have a repetition period in a specific direction.

Japanese Patent Publication No.8-362 Japanese Patent No. 2980682

However, since the conventional abrasive 20 having the mesh-like uneven portion 22 as described above has a convex portion involved in polishing and a concave portion not involved in polishing, the polishing performance is not uniform. This uneven pattern of polishing performance is also the uneven pattern 22P. Moreover, since the concave / convex pattern 22P is a pattern having a repeating cycle in a specific direction, the polishing performance also has periodicity or directionality.
For this reason, there is a problem that streaky fine irregularities are easily generated on the surface to be polished of the object to be polished.

  That is, an object of the present invention is to provide an abrasive that does not have streak-like fine irregularities on the surface to be polished, which occurs because the irregularities provided on the surface of the abrasive have a repeating periodicity.

Therefore, in the present invention, an abrasive having the following configuration is used.
(1) At least one surface of the main body portion has a net-like uneven portion, and the net-like uneven portion is composed of a convex strip portion and a concave portion surrounded by the convex strip portion,
A ridge pattern that is a planar view shape when the ridge portion is viewed from the normal direction of the one surface,
A number of boundary lines that define a large number of open areas corresponding to the recesses and that are formed from a large number of boundary lines that extend between two branch points to define the open areas, and extend from one branch point. A polishing material, wherein the average value N is 3.0 ≦ N <4.0, and the opening region is a pattern including a region where there is no direction in which the regions are arranged at a constant repetition period.
(2) The abrasive according to (1) above, wherein the shape of the opening region includes two or more kinds of polygons selected from a pentagon, a hexagon and a heptagon.
(3) The abrasive according to (1) or (2) above, wherein a support is laminated on a surface of the main body portion that is not the net-like uneven portion.

  According to the abrasive of the present invention, since the ridge pattern exhibited by the ridges of the mesh-like concavo-convex part is a specific pattern having no periodicity, the ridge pattern is a periodic pattern, so that the surface to be polished is It is possible to prevent the occurrence of streaky fine irregularities.

The perspective view explaining one Embodiment of the abrasives by this invention. Sectional drawing which illustrates another embodiment of the abrasive | polishing material by this invention. The top view which shows an example of a protruding item | line pattern. The top view explaining that a repeating cycle does not exist in a protruding pattern. The figure which shows the method of determining a generating point in the method of designing a protruding item | line pattern. The figure which shows the method of determining a generating point in the method of designing a protruding item | line pattern. The figure which shows the method of determining a generating point in the method of designing a protruding item | line pattern. The figure explaining the degree of dispersion | distribution of the determined mother point group by an absolute coordinate system and a relative coordinate system. The figure which shows the method of creating a Voronoi diagram from the determined generating point, and determining a ridge pattern. Sectional drawing which illustrates the cross-sectional shape of a recessed part. Drawing which shows various examples of planar shape (A1)-(A2) and cross-sectional shape (B1)-(B4) of an abrasives. Explanatory drawing which shows an example of the method of producing the shape of a net-like uneven part. Sectional drawing which shows the shape of the protruding item | line part in the concave line shape in a type | mold surface, and a net-like uneven surface. Sectional drawing which shows the example of embodiment of the abrasive | polishing material which consists of a main-body part containing an abrasive | polishing agent particle | grain and a support body. The top view which shows an example by which the protruding item | line pattern was repeated as a unit pattern area | region of the magnitude | size of 1/3 or more of the dimension of an abrasives. The perspective view which shows an example of the conventional abrasive | polishing material which has a net-like uneven part. The top view which illustrates the uneven | corrugated pattern of the conventional net-like uneven part.

    Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the drawings are conceptual diagrams, and the scale relations, aspect ratios, and the like of components may be exaggerated as appropriate for convenience of explanation.

First, an abrasive according to the present invention will be described with reference to an embodiment shown in the perspective view of FIG.
A polishing material 10 of the present invention illustrated in FIG. 1 has a net-like uneven portion 2 on at least one surface of a main body portion 1, and this net-like uneven portion 2 is surrounded by a convex strip portion 3 and the convex strip portion 3. And the recessed portion 4. In the present embodiment shown in the figure, one surface of the main body 1 is the surface of the sheet-like or flat plate-like main body 1 in the drawing and is the surface of the net-like uneven portion 2.

The ridge pattern 3P which is a planar view shape when the ridge portion 3 is viewed from the direction of the normal line n of the one surface is an aperiodic pattern unique to the present invention. In addition, the normal line n with respect to the one surface is also a normal line n with respect to the envelope surface of the surface of the mesh-like uneven portion 2.
This ridge pattern 3P defines a large number of opening areas A corresponding to the recessed portions 4, and is formed from a large number of boundary line segments L that extend between two branch points B to define the opening area A. The average value N of the number of boundary line segments L extending from one branch point B is 3.0 ≦ N <4.0, and the opening regions A are arranged at a constant repetition period. This is a pattern including a region where no exists.

  For this reason, in this embodiment, since the above-mentioned ridge part 3 which exhibits the above-mentioned ridge pattern 3P is not a periodic pattern like the past, since a ridge pattern is a periodic pattern, it has occurred conventionally on a surface to be polished. The streak-like fine irregularities that have been made can be prevented.

  FIG. 2 shows a modification of the abrasive 10 of the present invention. In the present invention, like the abrasive 10 shown in the cross-sectional view of FIG. 2, a surface other than one surface having the main body portion 1 and the net-like uneven portion 2 of the main body portion 1 (in the embodiment of FIG. The support 5 may be laminated on the surface opposite to the surface. With the support body 5, the main body 1 can be designed mainly based on the polishing characteristics, and the support body 5 can be designed mainly based on the mechanical strength, outer shape and the like of the abrasive 10 as a whole.

  Hereinafter, the ridge part 3 having the ridge pattern 3P characteristic of the present invention will be described in detail first, and then the material of each component, the forming method, and the like will be described.

(Ridge section)
The ridge part 3 is. It is a convex part of the mesh-like uneven part 2 that is also a polishing surface of the abrasive 10, and is a part that actively polishes the surface to be polished of the object to be polished. A portion other than the ridge portion 3 of the net-like uneven portion 2 is a recessed portion 4.

[Ridge pattern and opening area defined by this]
The ridge pattern 3 </ b> P is parallel to the normal line n with respect to the envelope surface of the surface of the mesh-like uneven portion 2 having the protrusion 3 (also having one surface of the main body 1 having the mesh-like uneven portion 2). It is a planar view shape when observed from various directions. Hereinafter, the ridge pattern 3P will be described with reference mainly to FIG. 3 and FIG.

As shown in FIG. 3, the ridge pattern 3 </ b> P is formed from a large number of boundary line segments L that extend between the two branch points B and define the opening region A, and the boundary line segments L that extend from the one branch point B. The average value N of the numbers of 3.0 is 3.0 ≦ N <4.0, that is, is 3.0 or more and less than 4.0, and is repeated in the opening region A defined by the boundary line segment L. The pattern includes a region where there is no direction having a return period.
The ridge pattern 3P has an array in which the opening region A does not have a direction having a repeating cycle, and the ridge pattern 3P is a periodic pattern, and therefore, fine line-like irregularities generated on the surface to be polished are formed. In order for the prevention effect to be sufficiently manifested, it is preferable to use a pattern in which the area and shape of the opening region A having the same number of boundary line segments L surrounding the periphery are not constant. Preferably, 50% or more of the opening regions A having the same number of boundary line segments L surrounding the periphery have different areas and shapes. More preferably, the opening area A having the same number of boundary line segments L surrounding the periphery is spread over the entire area of the ridge pattern 3P so that the areas and shapes thereof are all different from each other. In other words, among the opening regions A included in the ridge pattern 3P, the shapes and areas of the opening regions A in which the number of boundary line segments L surrounding the periphery are the same are not all the same, and at least a part thereof It means to be different from others. Here, the number of boundary line segments L surrounding the periphery is the same as the number of corners (or the number of sides) of the polygon when the opening region A is a polygon. In addition, in the above description, even when the two opening areas A are congruent figures and have different directions, it is considered that the shapes of the two opening areas A are different from each other.

  As shown in FIGS. 3 and 9, the line portion Lt of the ridge pattern 3 </ b> P includes a large number of branch points B. The line portion Lt of the ridge pattern 3P is composed of a number of boundary line segments L that form branch points B at both ends. That is, the line portion Lt of the ridge pattern 3P is composed of a number of boundary line segments L extending between the two branch points B. Then, at the branch point B, the boundary line segment L is connected, so that the opening region A is defined. In other words, an opening area A as a closed area is defined by being surrounded by a boundary line segment L and partitioned.

  As shown in FIGS. 3 and 9, since the line portion Lt is composed only of the boundary line segment L, there is no line portion Lt that extends into the opening region A and becomes a dead end. According to such an aspect, it is possible to effectively realize the polishing action by the ridges 3 and the storage action of the polishing scraps of the recessed parts 4.

  On the other hand, in order to prevent the occurrence of streak-like fine irregularities on the surface to be polished, the entire area of the ridge pattern 3P of the net-like irregularities (polishing surface) 2 of the abrasive 10 according to the present embodiment is the opening area A. There is no direction in which has a repetition period. In order to surely eliminate the streak-like fine irregularities, it is preferable that the entire region of the ridge pattern 3P is composed only of such regions. The present embodiment has such a configuration. As a result of intensive research, the inventors of the present invention do not simply irregularize the pattern of the ridge pattern 3P, but the opening area A corresponding to the recessed portion 4 defined by the ridge pattern 3P is constant. By forming the pattern of the ridge pattern 3P so that there is no direction arranged in a repeating cycle having regularity, a streak formed in the abrasive 20 having the conventional uneven pattern 22 having periodicity It has been found that the fine irregularities of can be made ineffective and inconspicuous.

[No repeat cycle]
FIG. 4 is an illustration of the net-like concavo-convex portion 2 illustrating that there are no regions where a large number of opening regions A defined by the ridge pattern 3P are arranged at a constant cycle, and there is no repeating cycle. It is a top view in a surface parallel to an envelope surface. Within this plane, in the figure, one imaginary straight line di that faces an arbitrary direction at an arbitrary position is selected.
This one straight line di intersects with the boundary line segment L of the line portion Lt to form an intersection. The intersections are shown as intersections c1, c2, c3,..., C9 in order from the lower left in the drawing. The distance between adjacent intersections, for example, the intersection c1 and the intersection c2, is a dimension t1 on the straight line di of the certain opening region A. Next, the dimension t2 on the straight line di is similarly determined for another open area A adjacent to the open area A having the dimension t1 on the straight line di. Then, with respect to a straight line di in an arbitrary direction at an arbitrary position, from the boundary line segment L intersecting with the straight line di, a large number of opening regions A that encounter the straight line di in an arbitrary direction at an arbitrary position, t1, t2, t3,..., t8 are determined. And the sequence of numerical values of t1, t2, t3,..., T8 has no periodicity.
In FIG. 4, t1, t2, t3,..., T8 are drawn separately from the ridge pattern 3P along with the straight line di at the bottom of the drawing for easy understanding.

When this straight line di is rotated at an arbitrary angle from the one shown in FIG. 4 to obtain the dimensions t1, t2,... Of each opening region A in another direction, the straight line is again the same as in FIG. There is no repetitive periodicity in the di direction.
That is, there is no direction having a repetition period in the opening area A defined by the boundary line segment L as in the sequence of numerical values of t1, t2, t3,.
In other words, in the arrangement of the opening area A, a number sequence of the arrangement of the dimensions ti of the opening area A on the virtual line segment di in an arbitrary direction passing through an arbitrary position becomes an aperiodic function. That is, there is no M that satisfies t (i) = t (i + M) (i and M are independent positive integers).
Thus, the fact that there is no direction in which the opening area A has a repetition period is expressed as the absence of a direction in which the opening areas A are arranged at a constant repetition period.

  Furthermore, in the convex stripe pattern 3P which the convex stripe part 3 of the mesh-like uneven part 2 of the abrasive 10 according to the present embodiment has, the average value N of the number of boundary line segments L extending from one branch point B is 3.0 ≦ N <4.0. In this way, when the average value N of the number of boundary line segments L extending from one branch point B is 3.0 ≦ N <4.0, the arrangement pattern of the ridge pattern 3P is shown in FIG. The square lattice pattern (N = 4.0) shown in FIG. Further, when the average value N of the number of boundary line segments L extending from one branch point B is 3.0 <N <4.0, the honeycomb arrangement shown in FIG. N = 3.0), and a very different pattern can be obtained. Then, the average value N of the number of boundary line segments L extending from one branch point B is set to 3.0 ≦ N <4.0, and the arrangement of the opening regions A is made irregular so that the partition regions A It is possible to prevent the directions arranged with the repetition period from stably existing. Moreover, it can be set as the recessed part 4 corresponding to such an opening area | region A. FIG. As a result, it has been confirmed that the fine scrapes of the surface to be polished, which has been generated in the past, can be made extremely inconspicuous by the polishing scraps housed in the recessed portion 4.

  The average value N of the number of boundary line segments L extending from one branch point B is strictly the number of boundary line segments L extended for all the branch points B included in the ridge pattern 3P. The average value is calculated by checking. In practice, however, the total number of boundary line segments L extending from one branch point B is considered in consideration of the size of the opening area A per line defined by the line portion Lt. For a branch point B included in one section having an area expected to reflect the tendency (for example, a portion of 10 mm × 10 mm in the protruding pattern 3P in which the opening region A is formed in the dimension example described later) The number of boundary line segments L that extend is calculated by calculating the average value, and the calculated value is treated as the average value N of the number of boundary line segments L that extend from one branch point B for the ridge pattern 3P. You may do it.

  Actually, in the ridge pattern 3P in the ridge portion 3 shown in FIG. 3, the average value N of the number of boundary line segments L extending from one branch point B is 3.0 <N <4. 0. For example, in the case of the ridge pattern 3P in FIG. 3, when a total of 387 branch points B are measured, the boundary line segment L has three branch points B, the boundary line segment L has four boundary lines L, and so on. The number of branch points B is 14 (the number of branch line segments L to be branched is 5 or more), and the average number of boundary line segments L coming from the branch point B (average branch number) is 3.04. It was a piece.

[Method of creating pattern shape of ridge pattern]
Here, the average value N of the number of boundary line segments L extending from one branch point B is 3.0 ≦ N <4.0, and the open areas A are arranged in a repeating cycle having a certain regularity. An example of a method for producing the pattern of the projected stripe pattern 3P that does not have a given direction will be described below.

  The method described here includes a step of determining a generating point, a step of creating a Voronoi diagram from the determined generating point, and a boundary line segment extending between two Voronoi points connected by one Voronoi boundary in the Voronoi diagram. Determining the path of L, and determining the thickness of the determined path to demarcate each boundary line segment L to determine the pattern of the ridge pattern 3P (line portion Lt). Yes. Hereinafter, each step will be described in order. Note that the pattern shown in FIG. 3 described above is a pattern actually determined by the method described below.

  First, the process of determining a generating point will be described. First, as shown in FIG. 5, an absolute coordinate system O-X-Y (this coordinate system O-X-Y is a normal two-dimensional plane. The first generating point (hereinafter referred to as “first generating point”) BP1 is arranged at an arbitrary position of “. Next, as shown in FIG. 6, the second generating point BP2 is arranged at an arbitrary position separated from the first generating point BP1 by a distance r. In other words, at any position on the circumference of a circle with a radius r centered on the first generating point BP1 on the absolute coordinate system XY (hereinafter referred to as “first circumference”), the second A generating point BP2 is arranged. Next, as shown in FIG. 7, the third mother point BP3 is arranged at an arbitrary position away from the first mother point BP1 by the distance r and away from the second mother point BP2 by the distance r or more. Thereafter, the fourth generating point is arranged at an arbitrary position separated from the first generating point BP1 by the distance r and from the other generating points BP2 and BP3 by the distance r or more.

  In this way, the mother point is arranged at an arbitrary position away from the first mother point BP1 by the distance r and away from the other mother points until the next mother point cannot be arranged. Go. Thereafter, this operation is continued based on the second generating point BP2. That is, the next generating point is arranged at an arbitrary position separated from the second generating point BP2 by the distance r and from the other generating points by the distance r or more. Based on the second generating point BP2, until the next generating point cannot be arranged, it is at an arbitrary position away from the second generating point BP2 by the distance r and from the other generating points by the distance r or more. Place the mother point. Thereafter, the base point as a reference is sequentially changed, and the base point is formed in the same procedure.

  With the above procedure, the mother point is arranged until it becomes impossible to arrange the mother point in the region where the ridge pattern 3P is to be formed. When the generating point cannot be arranged in the region where the protruding pattern 3P is to be formed, the step of generating the generating point is completed. By the processing so far, the group of irregularly arranged points on the two-dimensional plane (XY plane) is uniformly dispersed in the region where the ridge pattern 3P is to be formed.

With respect to the generating point groups BP1, BP2,..., BP6 (see FIG. 8A) distributed in the two-dimensional plane (XY plane) in such a process, the distances between the individual generating points are not constant. Have However, the distribution of the distance R between any two adjacent generating points is not a complete random distribution (uniform distribution), but a range ΔR between the upper limit value R _MAX and the lower limit value R _MIN with the average value R _AVG in mind. = R _MAX -R _MIN is distributed. Note that, here, two Voronoi regions XA are adjacent to each other, but when two Voronoi regions XA are adjacent after generating a Voronoi diagram from the generating point groups BP1, BP2,... It is defined that the generating points of are adjacent to each other.

That is, the generating point group described here is referred to as a coordinate system having each generating point as an origin (referred to as a relative coordinate system oxy, while a coordinate system defining an actual two-dimensional plane is referred to as an absolute coordinate system O. 8 (B), FIG. 8 (C),..., In which all the generating points adjacent to the generating point placed on the origin are plotted are obtained for all generating points. Then, when the graph of the adjacent generating points on all the relative coordinate systems is displayed with the origin o of each relative coordinate system superimposed, a graph as shown in FIG. 8D is obtained. The distribution pattern of adjacent mother point groups on this relative coordinate system is that the distance between any two adjacent mother points constituting the mother point group is not a uniform distribution from 0 to infinity, but the distance from the origin o. Is distributed in a finite range from R _AVG −ΔR to R _AVG + ΔR (a donut-shaped region from radius R _MIN to R _MAX ).
As can be seen from FIG. 8D, the azimuth (angle) distribution of other generating points viewed from an arbitrary generating point is isotropic (or substantially isotropic). This corresponds to the orientation (angle) distribution of the opening region A in the ridge pattern 3P generated from these generating points (group) being isotropic (or substantially isotropic).

  As described above, by setting the distance between each generating point, the Voronoi region XA obtained from the generating point group by the method described below, and further, the size D (or through) of the opening region A obtained therefrom are obtained. The distribution of the area of the opening region A) is not uniform (completely random) but distributed within a finite range.

By constituting in this way, since the ridge pattern 3P is a periodic pattern, the fine line-shaped unevenness generated on the surface to be polished by the ridge pattern 3P is more effectively eliminated. In order to eliminate the fine line irregularities and make the surface finish (residual fine irregularities) uniform on the surface to be polished, the maximum value of the size D of the opening area A (size of the opening area A) is set to D _MAX , When the minimum value is D _MIN , the distribution range ΔD = D _MAX −D _MIN of the size D is relative to the average value D _AVG of the size D.
0.1 ≦ ΔD / D _AVG ≦ 0.6
More preferably,
0.2 ≦ ΔD / D _AVG ≦ 0.4
And
Here, the size D of the opening area A is defined as follows for all the opening areas A.
(1) When a circle passing through all the branch points B (all vertices in the case of a polygon) belonging to a certain opening area A can be drawn, the size D is determined by the circumscribed circle diameter of the opening area A. And
(2) If a circle passing through all the branch points B (all vertices in the case of a polygon) belonging to a certain opening area A cannot be drawn, the maximum distance between the two branch points B belonging to this opening area A The value (maximum diagonal length in the case of a polygon) is taken as the size D.

  In addition, in the process of determining the above generating points, the size of the opening area A per one can be adjusted by changing the size of the distance r. Specifically, by reducing the size of the distance r, it is possible to reduce the size of the opening area A, and conversely, by increasing the size of the distance r, The size of the opening area A can be increased.

  Next, as shown in FIG. 9, a Voronoi diagram is created based on the arranged generating points. As shown in FIG. 9, the Voronoi diagram is composed of line segments that are drawn at the intersection of two bisectors by drawing a perpendicular bisector between two adjacent generating points BP and BP. FIG. Here, the line segment of the bisector is called Voronoi boundary XB, the intersection of Voronoi boundary XB forming the end of Voronoi boundary XB is called Voronoi point XP, and the area surrounded by Voronoi boundary XB is Voronoi area XA Call it.

  In the Voronoi diagram created as shown in FIG. 9, each Voronoi point XP forms a branch point B of the ridge pattern 3P. Then, one boundary line segment L is provided between two Voronoi points XP forming the end of one Voronoi boundary XB. At this time, the boundary line segment L may be determined so as to extend linearly between the two Voronoi points XP as in the example shown in FIG. Various paths (for example, circle (arc), ellipse (arc), fence line, hyperbola, sine curve, hyperbolic sine curve, elliptic function curve, Bessel function curve, etc.) between the two Voronoi points XP without It may be extended by a broken line or the like. When the boundary line segment L is determined to extend linearly between two Voronoi points XP as in the example shown in FIG. 3, each Voronoi boundary XB defines the boundary line segment L. It becomes like this.

After determining the path of each boundary line segment L, the line width (thickness) of each boundary line segment L is determined. The line width of the boundary line segment L is the bank width of the ridge portion 3 that exhibits the created ridge pattern 3P. As will be described later with reference to FIG. 13, the bank width is a surface that is orthogonal to the extending direction of the ridges 3 at the portion of interest and is parallel to the normal line n of the envelope surface of the mesh-like irregularities 2 (this is The width W3 at the same level surface as the upper surface 3tp of the protrusion 3 in the main cut surface) that contacts the surface to be polished of the object to be polished. The bank width W3 is determined in consideration of the balance between the polishing performance of the ridges 3 and the storage performance of polishing scraps in the recessed portions 4.
As described above, the pattern shape of the ridge pattern 3P can be determined.

  According to the present embodiment as described above, the ridge pattern 3 </ b> P that is the planar shape of the ridge portion 3 in the mesh-like concavo-convex portion 2 of the abrasive 10 and that defines the recessed portion 4 has two branch points B. An average value N of the number of boundary line segments L extending from one branch point B is 3.0 ≦ N <4. 0, and there is no direction in which the opening region A has a repetition period. As a result, in the conventional abrasive, the streak fine irregularities generated on the surface to be polished can be effectively prevented because the ridge pattern is a periodic pattern.

[Cross sectional shape of ridges]
The cross-sectional shape of the main cut surface of the ridge 3 is not particularly limited. As shown in FIG. 13B, in the protruding line portion 3, a portion of the protruding line portion 3 that comes into contact with the surface to be polished of the object to be polished is usually an upper surface 3 tp forming a flat surface. In the case of a trapezoidal shape as shown in the figure, the width Wb of the bottom of the ridge 3 is larger than the bank width W3.
The bank width W3, which is the width of the portion of the upper surface 3tp of the ridge 3, is about 10 to 1000 μm. The height of the ridge 3 is about 10 to 1000 μm.
The slope that is a portion of the ridge 3 excluding the upper surface 3 tp is also the slope of the recessed portion 4. Therefore, the cross-sectional shape of the recessed portion described below is complementary to the cross-sectional shape of the ridge portion.
Further, the width Wb (also referred to as the width of the bottom portion) on the side opposite to the surface of the upper surface 3tp in the main cut surface of the ridge portion 3 is set to a range of about 10 to 2000 μm. The relationship between the bank width W3 and the bottom width Wb can be either W3 = Wb or W3 <Wb, but the releasability when employing a manufacturing method that uses a forming die as shown in FIG. 12, and From the viewpoint of easy discharge of the polishing dust stored in the recessed portion 4, it is preferable to satisfy W3 <Wb.

(Concave part)
The recessed part 4 is a part which bears a storage effect | action with respect to the grinding | polishing waste generated by grinding | polishing, when the protruding item | line part 3 contacts the to-be-polished surface of a to-be-polished body. The recessed part 4 is a part corresponding to the opening area A defined by the protruding line pattern 3P exhibited by the protruding line part 3.

[Cross sectional shape of the recessed part]
The sectional shape of the main cut surface of the recessed portion 4 is not particularly limited. For example, the rectangular shape shown in FIG. 10 (A), the triangular shape with the bottom side shown in FIG. 10 (B) as the same level as the top surface 3tp of the ridge 3, and the dimensions relative to the upper base shown in FIG. 10 (C). A trapezoidal shape in which the lower bottom having a large height is the same level as the upper surface 3tp of the ridge portion 3, a semicircular shape in which the section (string) shown in FIG. It is. The semicircular circular shape is a shape composed of only a curve such as a circle, an ellipse, etc., which has a convex shape from the inside of the recessed portion 4 to the outside except for a section having the same level as the upper surface 3tp of the protruding portion 3. Including parabolic curves.

The width W4 of the recessed portion 4 is about 10 to 1000 μm. As shown in FIG. 10B, the width W4 of the recessed portion 4 is the maximum value of the width (the value varies depending on the cut surface) on the upper surface 3tp of the protruding strip portion 3 for each recessed portion 4. , Corresponding to the size D of the opening area A.
In addition, the depth of the recessed part 4 is equal to the height of the protruding item | line part 3. FIG.

[Method for forming uneven shape of mesh-like uneven portion]
The formation method of the uneven | corrugated shape of the mesh-shaped uneven | corrugated | grooved part 2 is not specifically limited. For example, a conventionally known method for forming irregularities in a polishing material as disclosed in Patent Document 2 may be appropriately employed depending on the material constituting the mesh-shaped irregularities 2. For example, when the material constituting the mesh-like uneven portion 2 is a metal, a photo-etching method using a photomask of the ridge pattern 3P can be employed. Or when the material which comprises the mesh-shaped uneven | corrugated | grooved part 2 is resin containing abrasive | polishing agent particle | grains, a photopolymer method (2P method) is employable.

[Abrasive layer structure]
The material which comprises the main-body part 1 which has the mesh-shaped uneven | corrugated | grooved part 2 is not specifically limited. Various materials in conventionally known abrasives can be appropriately employed.
The surface of the net-like uneven portion 2 can be the surface of the main body portion 1 constituting the entire abrasive 10 as in the embodiment shown in FIG. In this embodiment, the abrasive 10 has a single layer configuration (or a single unit configuration).
The abrasive 10 may be configured such that the main body 1 having the net-like uneven portion 2 is laminated on the support 5 as in another embodiment shown in FIG. In this embodiment, the abrasive 10 has a two-layer (stacked) configuration or a two-body configuration. 1 can also be said that the support 5 also serves as the main body 1.
The support body 5 is provided for the case where the mechanical strength of the main body portion 1 itself is insufficient or the case where the main body portion 1 is easily formed.

[Material of main body]
As the material of the main body 1, for example, carbon steel or a composite material obtained by adding abrasive particles with high hardness to a resin binder can be used.
As the carbon steel, for example, carbon tool steel, alloy tool steel containing 3% by mass or more of chromium and, if necessary, one or more of tungsten, molybdenum, vanadium and the like can be used.
For example, a polyester resin, an acrylic resin, a vinyl chloride-vinyl acetate copolymer, or the like can be used as the resin binder resin in the composite material in which abrasive particles having high hardness are added to the resin binder.
As the abrasive particles, e.g., diamond, corundum, iron oxide (Fe ₂ O _3), cerium oxide, silicon oxide (Si0 ₂₎ or the like can be used. The size of the abrasive particles is about 0.1 to 100 μm in average particle size.
The composition ratio of the abrasive particles and the resin binder in the composite material obtained by adding abrasive particles with high hardness to the resin binder is a mass ratio of abrasive particles / resin binder = about 100/100 to 1400/100. is there.

(Support material)
As a material of the support body 5, when the main-body part 1 consists of carbon steel, iron-type alloys, such as carbon steel, soft iron, stainless steel, can be used, for example.
When the main body 1 is made of a composite material in which abrasive particles with high hardness are added to a resin binder, for example, when the abrasive 10 is made into a sheet, a resin such as polyethylene terephthalate, polypropylene, polyvinyl chloride, etc. A sheet can be used.

[Overall shape of abrasive]
The overall shape of the abrasive 10 is not particularly limited as long as it is a shape that can perform the required polishing, and there may be various shapes in plan view and cross sections.
For example, the shape in plan view, that is, the shape of the net-like uneven portion 2 viewed from the normal direction is a right-angled quadrangle as shown in FIG. 11 (A1), a circle as shown in FIG. 11 (A2), or the like.
The cross-sectional shape, that is, the shape in the cross-section including the normal line n of the net-like uneven portion 2 is a right-angled quadrangle as shown in FIG. 11B1, and one side of the long side is the net-like uneven portion 2, FIG. (B2) is a part of a circular shape with a circular arc as a net-like uneven part 2, and a trapezoidal shape as shown in FIG. The shape of the portion 2, the shape of the circular shape as shown in FIG.
The dimensions in the plan view shape are vertical and horizontal dimensions or diameters, and can be, for example, about 10 to 300 mm.
The dimension in the cross-sectional shape is a thickness or a diameter, and can be about 5 to 100 mm, for example.

[Deformation]
The abrasive 10 of the present invention can take other forms other than the forms described above. Here, a part thereof will be described.

[Shape of opening area]
The shape of the opening region A preferably includes at least a pentagon and a hexagon. By including at least a pentagon and a hexagon in the opening area A, it is possible to make the fine line irregularities generated on the surface to be polished inconspicuous and to make the unevenness of the ridge pattern 3P more uniform. The effect of eliminating the fine unevenness can be made more uniform on the surface to be polished. More preferably, the shape of the opening region A includes a pentagon, a hexagon, and a heptagon.
For example, when a total of 4631 open areas A (polygons) are measured for the planar view pattern 2P in FIG.
Triangle 0
79 squares
1141 pentagons
2382 hexagons
927 heptagons
94 octagons
Eight 9-sided
There were 0 decagons or more.
In addition, about this convex stripe pattern 3P, it was 3.07 when the average number of the boundary line segments L which come out from the branch point B was measured.

[Repeat as unit pattern area]
In the embodiment described above, the opening area A defined by the convex stripe pattern 3P of the convex strip 3 has a repeating cycle in the entire area of the mesh-shaped concave / convex portion 2 having the convex strip 3 in the abrasive 10. Explained the example that is not present. However, as shown in FIG. 15, the entire area of the ridge pattern 3P of the ridge portion 3 in the interior of the ridge pattern 3P is formed by collecting a plurality of unit pattern areas S to form the entire area of the ridge pattern 3P. In each unit pattern region S, the plurality of opening regions A may be formed of regions arranged in a pattern having no predetermined repetition period.
That is, in this embodiment, when viewed locally, the entire region of the ridge pattern 3P includes two or more unit pattern regions S in which opening region groups are arranged in the same pattern. . In this case, if there are no repetitions of four or more places in a specific cycle in a specific direction, the joints between the unit pattern regions S are substantially inconspicuous, and it causes polishing scratches caused by the joints and uneven appearance of the polished surface. The impact can be ignored. In this example, the pattern of the ridge pattern 3P in one unit pattern region S can be created in the same manner as the pattern creation method described with reference to FIGS.

  In particular, for the abrasive 10 in which the net-like uneven portion 2 has a large area, the ridge pattern 3P of the ridge portion 3 is composed of an array of a plurality of unit pattern regions S, and each unit pattern In the region S, it is much easier to create a pattern of the ridge pattern 3P by including a plurality of unit pattern regions S in which the opening regions A are arranged in the same pattern. It is preferable in that it becomes possible.

  In particular, in an example in which a single type of unit pattern region S is arranged in a plurality of vertical and horizontal directions as shown in FIG. 15, there is a repetition as the unit pattern region S in a specific direction (two directions in the drawing vertical direction and horizontal direction). . In the embodiment of FIG. 15, the unit pattern region S is repeated with a repetition period SP2 in the horizontal direction and a repetition period SP1 in the vertical direction. Under this condition, when the dimension of the unit pattern area S in a specific direction is Ls, and the unit pattern area S has M opening areas A in the dimension Ls on an arbitrary straight line dj extending in the specific direction, When attention is paid to a certain opening area A on dj, there is a regularity that there is always an opening area A having exactly the same size tj and shape at a position where the number of the opening areas A is separated by M on the straight line dj. Have. That is, regarding the dimension tj on the straight line dj of the opening region A, the kth dimension tj (k) counted in order on the straight line dj, and the Mth (k + M) th dimension tj (k + M) from there. Is the same, and the relationship of tj (k) = tj (k + M) is established (k and M are independent positive integers).

  However, this regularity is based on the repetition cycle as the unit pattern region S (the dimension Ls corresponds to the repetition cycle in the above description), and is not the repetition cycle as the opening region A. In the unit pattern area S, the opening area A does not have a repetition period in the specific direction.

  In the example shown in FIG. 15, the mesh-like uneven portion 2 of the abrasive 10 is divided into six unit pattern regions S having the same shape, and exists in the mesh-like uneven portion 2 within each unit pattern region S. The ridge pattern 3P which the ridge part 3 has is comprised identically. In the six unit pattern regions S, three regions are arranged in the vertical direction (vertical direction in the drawing) in FIG. 15 at a repetition cycle SP1, and two regions are arranged in the horizontal direction in FIG. 15 at a repetition cycle SP2. Are arranged as follows.

[Use]
The abrasive material 10 according to the present invention can be used for polishing various articles as an abrasive tape, a metal file (soot) or the like. For example, the use of the surface of various articles made of materials such as metal, resin, glass, ceramics, and wood can be used. Moreover, you may use for the cutting use of the above various articles | goods.

  Next, as a representative embodiment of the abrasive 10 of the present invention, a polishing tape and a metal file (saddle) will be described more specifically.

[Example 1]
An abrasive tape was prepared as the abrasive 10 as follows.
As the ridge pattern 3P, a pattern similar to that shown in FIG. 3 prepared in accordance with the above-mentioned [Method for creating pattern shape of ridge pattern] described with reference to FIGS.
For the support 5, a biaxially stretched polyethylene terephthalate film having a continuous band shape (web shape) and a thickness of 38 μm was used.
As a main body forming material for forming the main body 1, a coating liquid made of an ionizing radiation curable resin composition in which 600 parts by mass of white fused alumina having an average particle diameter of 10 μm is blended with 100 parts by mass of a polyester acrylate prepolymer is used. Using.

  On one side of the support 5, it is composed of a convex portion 3 and a concave portion 4 that exhibit the convex pattern 3 </ b> P with a thickness of 150 μm (thickness when dried and cured) by the following method using the coating solution. A main body portion 1 having a net-like uneven portion 2 was formed, and an abrasive 10 was produced as an abrasive tape.

Formation of the protrusions 3 having a predetermined pattern of the main body 1 and the net-like uneven portion 2 is performed by a photopolymer method in a manufacturing form using a cylindrical cylindrical mold M as shown in FIG.
On the mold surface of the cylindrical mold M, a recess 3r as shown in FIG. This concave strip 3r has a concave / convex shape reverse to the concave shape of a predetermined convex strip portion 3 to be formed as shown in FIG. 13 (B). This concave strip 3r is produced using the above-mentioned convex strip pattern 3P.
The cylindrical mold M is formed by coating a copper layer on the surface of an iron core made of a carbon steel hollow cylinder by plating, and forming a ridge pattern 3P on the surface of the copper layer by a photoetching method.

  With respect to such a cylindrical mold M, as shown in FIG. 12, first, the continuous belt-like (web-like) support 5 made of the film is unwound from a winding (not shown), and the main body 1 is moved. The coating liquid for forming is applied. Coating is performed by applying a coating liquid 34 to one side of the continuous film-like support 5 at a coating portion 33 including a coating roller 31 and an impression cylinder 32. Next, when the coating liquid 34 contains a diluting solvent, the continuous film-like support 5 is passed through a drying device 35 to evaporate the diluting solvent by blowing hot air or the like. The coated surface is pressed against and brought into contact with the rotating cylindrical mold M, and a portion of the coated coating liquid 34 is filled into the concave portion of the mold surface. Next, ultraviolet rays as ionizing radiation are sequentially irradiated onto the coating liquid 34 on the rotating cylindrical mold M by the ionizing radiation irradiation devices 37a and 37b installed in the circumferential direction. The liquid body 34 is cured and the main body 1 is adhered and laminated to the support 5. Next, the main body 1 and the main body 1 are peeled as a single unit from the cylindrical mold M by the peeling roller 38, whereby the main body 1 and the main body 1 have a two-layer structure. A sheet-like abrasive 10 is produced in which a net-like concavo-convex portion 2 having a ridge portion 3 and a concave portion 4 having a predetermined pattern is formed on the surface.

  Thus, the ridge portion 3 having the ridge pattern 3P shown in FIG. 3 is changed from the concave stripe 3r having a trapezoidal cross section shown in FIG. A convex strip 3 having a trapezoidal cross section is formed.

The size of the ridge 3 is the width of the ridge 3 in the pattern 3P, the width of the boundary line segment L is the width (bottom) of the ridge 3r on the mold surface, and the width W3 of the ridge 3 in the main body 1. It corresponds to. As for the width W3 of the ridge 3, the bank width W3 at the top surface 3tp is 80 μm, and the width Wb on the bottom side of the ridge 3 is 100 μm.
The dimension of the recessed portion 4 is such that the average value D _AVG of the size D of the opening area A defined as the maximum distance between the two branch points B in each opening area A in the ridge pattern 3P is 500 μm. The opening area A is a convex portion on the mold surface and corresponds to the concave portion 4 in the main body 1.
On the mold surface, the depth V of the concave stripe 3r is the height H of the convex stripe 3 in the main body 1, and this depth V is 130 μm.

  As described above, the main body 1 containing the abrasive particles 6 was formed on the support 5 as shown in FIG. 14, and the abrasive 10 as an abrasive tape was produced.

[Example 2]
A metal file (soot) as an abrasive 10 was prepared as follows.
The ridge pattern 3P is generated in the same manner as in the case of the polishing tape. Next, this ridge pattern 3P is exposed to a silver salt film having a silver salt photosensitive emulsion layer and developed to produce a photomask (original plate) of the ridge pattern 3P.
As the main body 1, a rectangular parallelepiped carbon tool steel having a thickness of 3 mm (3000 μm), a length of 150 mm, and a width of 15 mm is used.

  Using the above-mentioned photomask, the ridge pattern 3P is exposed to the photoresist coating film formed on the surface of the main body 1 and developed, and then the resist non-formation portion is etched using a ferric chloride aqueous solution. Then, the net-like concavo-convex portion 2 having the ridge portion 3 and the concave portion 4 is formed.

As for the dimensions, the width of the boundary line segment L is 400 μm, the average value D _AVG of the size D of the opening region A is 2000 μm, the bank width W3 of the finally formed ridge 3 is 350 μm, and the width Wb of the bottom is The width W4 of the recessed portion 4 is 2000 μm. The height H of the protrusion 3 is 500 μm.

  As described above, the abrasive 10 as a metal file (saddle) in which the surface of the main body 1 became the net-like uneven portion 2 was produced.

[Comparative Example 1]
In Example 1, except that the ridge pattern 3P was a polishing tape made of a square lattice made of a square having a diagonal length of 500 μm corresponding to the average D _AVG of the size D of the opening region A. Example 1 An abrasive 20 similar to that shown in FIG. 16 was produced.

[Comparative Example 2]
In Example 2, a metal file (鑢) made of a square lattice made of a square having a diagonal length of 2000 μm corresponding to the average D _AVG of the size D of the opening region A was used as the ridge pattern 3P. An abrasive 20 similar to that of Example 2 as shown in FIG.

[Comparison evaluation]
The abrasive tapes of Example 1 and Comparative Example 1 and the metal files (soots) of Example 2 and Comparative Example 2 were comparatively evaluated as follows.
A stainless steel plate (thickness 3 mm) is prepared as an object to be polished, and the polishing surface of the abrasive is applied to the surface of the stainless steel plate and rubbed by three reciprocations in one direction. Observed and evaluated.
As a result, the fine streaks on the surface to be polished were less in Example 1 than in Comparative Example 1 and less in Example 2 than in Comparative Example 2.

DESCRIPTION OF SYMBOLS 1 Main-body part 2 Reticulated uneven part 3 Convex part 3P Convex pattern 4 Concave part 5 Support body 6 Abrasive particle 10 Abrasive material 20 Conventional abrasive 21 Groove 22 Reticulated uneven part A Opening area B Branch point BP Mother point L Boundary Line segment Lt Line part (set of boundary line segments)
M Cylindrical mold S Unit pattern area

Claims (3)

It has a net-like uneven part on at least one surface of the main body part, and this net-like uneven part is composed of a convex line part and a concave part surrounded by this convex line part,
A ridge pattern that is a planar view shape when the ridge portion is viewed from the normal direction of the one surface,
A number of boundary lines that define a large number of open areas corresponding to the recesses and that are formed from a large number of boundary lines that extend between two branch points to define the open areas, and extend from one branch point. A polishing material, wherein the average value N is 3.0 ≦ N <4.0, and the opening region is a pattern including a region where there is no direction in which the regions are arranged at a constant repetition period.   The abrasive | polishing material of Claim 1 in which the shape of the said opening area | region contains 2 or more types of polygons chosen from the pentagon, the hexagon, and the heptagon. The abrasive | polishing material of Claim 1 or 2 with which the support body is laminated | stacked on the surface which is not the net | network uneven | corrugated | grooved part of the said main-body part.

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