JP2013061248A - Information processing device and information processing program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an information processing device that decreases the influence by abnormal data to obtain shape data on the whole of measurement areas with high precision.SOLUTION: An information processing device of the present invention comprises: a data acquisition part that acquires a plurality of shape data items obtained by measuring the shape of a work per each prescribed area by a shape measurement device; an information acquisition part that acquires position attitude information indicating the position attitude relationship between the work and the shape measurement device; a conversion part that converts a coordinate system of each shape data item into a common coordinate system on the basis of the position attitude information; a correction amount calculation part that calculates a correction amount that is used for performing a stitching process in which the coordinate of one shape data item in the common coordinate system is corrected and the one shape data item is stitched to a shape data item on an area adjacent to the area indicated by the one shape data item, by using shape data items on areas where the area of the one shape data item overlaps with the areas adjacent thereto; and a reliability calculation part that calculate reliability of the stitching process on the basis of the correction amount or shape data corrected by the correction amount.

Description

  The present invention relates to an information processing apparatus and an information processing program for processing a plurality of shape data obtained by measuring a shape of a workpiece in units of a predetermined area by a shape measuring device.

  In machining a workpiece such as an optical element with high accuracy, it is important to measure the shape of the workpiece with high accuracy. A shape measuring device having a contact or non-contact type probe is used for measuring the shape of the workpiece.

  When measuring the shape of a workpiece with a non-contact type probe, the shape of the workpiece is measured in units of minute regions with the non-contact type probe while changing the relative position between the workpiece and the non-contact type probe. Then, by integrating a plurality of shape data obtained by measuring the shape of the work in units of a micro area with a non-contact type probe, three-dimensional shape data of the entire work is acquired (for example, Patent Document 1). .

  In relation to this, from the viewpoint of improving the accuracy when integrating a plurality of shape data, using the shape data of the region overlapping between two adjacent minute regions, the two shape data of the adjacent minute regions are obtained. A stitching process for stitching is known. In the stitching process, an algorithm such as an ICP (Iterative Closest Point) algorithm is used, and the shape data in the overlapping region is accurately superimposed by performing joint conversion of the shape data (for example, Patent Document 2).

  However, the shape data of the plurality of minute regions may include abnormal data due to measurement failure or the like. When stitching processing of a plurality of shape data, if the abnormal data is included in the shape data, the accuracy of the shape data of the entire workpiece is lowered due to the influence of the abnormal data, which is not preferable.

JP 2009-122066 A JP 2010-107300 A

  The present invention has been made in view of the above-described problems. Therefore, an object of the present invention is to reduce the influence of abnormal data in stitching processing even when abnormal data is included in a plurality of shape data obtained by measuring a workpiece in units of a predetermined area. Another object is to provide an information processing apparatus and an information processing program that can obtain shape data of the entire measurement region with high accuracy.

  The above object of the present invention is achieved by the following means.

  (1) A data acquisition unit that acquires a plurality of shape data obtained by measuring a shape of a workpiece in units of a predetermined area by a shape measuring device, and a relative relationship between the workpiece and the shape measuring device when measuring the shape data Information acquisition unit for acquiring position and orientation information indicating a general position and orientation relationship, and based on the position and orientation information acquired by the information acquisition unit, the local coordinate system of each shape data is common to a plurality of shape data A conversion unit for converting to a coordinate system, and a correction amount for performing a stitching process for correcting the coordinates of one shape data in the common coordinate system and joining the shape data of an area adjacent to the area indicated by the shape data Is calculated by using the shape data of the region overlapping between the region indicated by the one shape data and the adjacent region, and the correction amount calculating unit. Correction amount or based on the shape data corrected by the correction amount, the information processing apparatus characterized by having a reliability calculation unit that calculates the reliability of the stitching process.

  (2) The reliability calculation unit calculates the reliability based on a difference between the one shape data corrected by the correction amount and the shape data of the adjacent region. The information processing apparatus described in 1.

  (3) The reliability calculation unit calculates the reliability from the measurement accuracy and the correction amount of the position and orientation information acquired by the information acquisition unit. Information processing device.

  (4) The correction amount calculation unit and the reliability calculation unit calculate the correction amount and the reliability for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data, and the information processing The apparatus further includes a correction amount determination unit that calculates a combined correction amount that is a final correction amount of the one shape data based on the plurality of reliability levels and correction amounts. Information processing apparatus as described in any one of-(3).

  (5) The information according to (4), wherein the correction amount determination unit calculates a weighted average value of the plurality of correction amounts using the reliability as a weighting coefficient as the combined correction amount. Processing equipment.

  (6) The information processing apparatus according to (4), wherein the correction amount determination unit calculates a correction amount having the highest reliability among the plurality of correction amounts as the combined correction amount. .

  (7) When the determination unit determines whether the one shape data is abnormal data based on the reliability, and the determination unit determines that the one shape data is abnormal data, The information processing apparatus according to any one of (1) to (6), further including a deletion unit that deletes the one shape data.

  (8) The correction amount calculation unit and the reliability calculation unit calculate the correction amount and the reliability for each of shape data of a plurality of regions adjacent to the region indicated by the one shape data, and the determination unit Determines whether or not the one shape data is abnormal data from the plurality of maximum reliability values. The information processing apparatus according to (7), wherein:

  (9) The correction amount calculation unit and the reliability calculation unit calculate the correction amount and the reliability for each of shape data of a plurality of regions adjacent to the region indicated by the one shape data, and the determination unit Determines whether or not the one shape data is abnormal data from the sum of the plurality of reliability levels. The information processing apparatus according to (7), wherein:

  (10) A recognition unit that recognizes the one shape data as abnormal data when the composite correction amount is a predetermined value or more, and a deletion unit that deletes the one shape data recognized by the recognition unit. The information processing apparatus according to any one of (4) to (6), wherein the information processing apparatus includes the information processing apparatus.

  (11) The information processing apparatus according to (10), wherein the predetermined value is a value determined by measurement accuracy of the position and orientation information acquired by the information acquisition unit.

  (12) A plurality of shape data obtained by measuring the shape of the workpiece in units of a predetermined area by the shape measuring device, and a relative position and orientation relationship between the workpiece and the shape measuring device when measuring the shape data. And a step (a) for converting a local coordinate system of each shape data into a coordinate system common to a plurality of shape data based on the position and orientation information, and the common coordinate system The correction amount for performing the stitching process for correcting the coordinates of one shape data in the image and joining the shape data of the region adjacent to the region indicated by the shape data is adjacent to the region indicated by the one shape data. Based on the procedure (b) calculated using the shape data of the region overlapping with the region, and the correction amount calculated in the procedure (b) or the shape data corrected by the correction amount The information processing program to be executed as the procedure (c) for calculating a reliability of the stitching process, to the computer.

  (13) In the step (c), the reliability is calculated from a difference between the one shape data corrected by the correction amount and shape data of the adjacent region. ) Information processing program.

  (14) In the step (c), the reliability is calculated from the measurement accuracy of the position and orientation information acquired in the step (a) and the correction amount. The information processing program described.

  (15) In the steps (b) and (c), the correction amount and the reliability are calculated for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data, and the information processing The program causes the computer to further execute a step (d) of calculating a composite correction amount that is a final correction amount of the one shape data based on the plurality of reliability levels and correction amounts. The information processing program according to any one of (12) to (14) above.

  (16) In the step (d), a weighted average value of the plurality of correction amounts using the reliability as a weighting coefficient is calculated as the combined correction amount. Information processing program.

  (17) In the step (d), the correction amount having the maximum reliability among the plurality of correction amounts is calculated as the combined correction amount. program.

  (18) A procedure (e) for determining whether the one shape data is abnormal data based on the reliability, and a determination that the one shape data is abnormal data in the procedure (e) If it is, the information processing program according to any one of (12) to (17) above, further causing the computer to execute a procedure (f) of deleting the one shape data.

  (19) In the procedure (b) and the procedure (c), the correction amount and the reliability are calculated for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data, and the procedure ( e) The information processing program according to (18), wherein whether or not the one shape data is abnormal data is determined from the plurality of maximum reliability values.

  (20) In the procedure (b) and the procedure (c), the correction amount and the reliability are calculated for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data, and the procedure ( e) The information processing program according to (18), wherein whether or not the one shape data is abnormal data is determined from the sum of the plurality of reliability levels.

  (21) When the composite correction amount is equal to or greater than a predetermined value, a procedure (g) for recognizing the one shape data as abnormal data and a procedure for deleting the one shape data recognized in the procedure (g) ( h) is further executed by the computer. The information processing program according to any one of the above (15) to (17).

  (22) The information processing program according to (21), wherein the predetermined value is a value determined by measurement accuracy of the position and orientation information acquired in the procedure (a).

  (23) A computer-readable recording medium on which the information processing program according to any one of (12) to (22) is recorded.

  According to the present invention, since the reliability of the stitching process is calculated, it is possible to reduce the influence of abnormal data using the reliability. That is, even when abnormality data is included in a plurality of shape data obtained by measuring the workpiece in units of a predetermined area, the shape data of the entire measurement area can be obtained with high accuracy.

1 is a diagram showing a schematic configuration of a shape measuring system according to a first embodiment of the present invention. It is a block diagram which shows schematic structure of the information processing apparatus shown by FIG. It is a flowchart which shows the procedure of the shape measurement process performed by information processing apparatus. It is a figure for demonstrating the process which calculates a synthetic | combination correction amount. It is a figure for demonstrating the process which deletes abnormal data. It is a figure for demonstrating the process which calculates the synthetic | combination correction amount which concerns on the 3rd Embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(First embodiment)
FIG. 1 is a diagram showing a schematic configuration of a shape measuring system according to the first embodiment of the present invention.

  As shown in FIG. 1, the shape measuring system according to the present embodiment includes a shape measuring device 10 and an information processing device 20.

  The shape measuring apparatus 10 measures the shape of a workpiece. The shape measuring apparatus 10 includes a non-contact type probe, and measures the shape of the workpiece in units of a predetermined minute area. The shape measuring apparatus 10 includes an XY stage that moves the workpiece in the horizontal direction and a Z stage that moves the non-contact type probe in the vertical direction, and changes the relative position between the workpiece and the non-contact probe. Continuously measure a small area of. The non-contact type probe is an optical interference type probe, and a predetermined minute area (for example, 0.3 mm square) is measured by a single measurement operation, and a predetermined number of data (for example, 500 × 500 dots) is formed. Generate data. Moreover, the shape measuring apparatus 10 of this embodiment is provided with a plurality of laser length measuring machines (not shown), and can measure the position and posture of the stage and the non-contact probe with high accuracy.

  The information processing apparatus 20 processes a plurality of shape data obtained by measuring a plurality of minute regions by the shape measuring apparatus 10. The information processing apparatus 20 performs a stitching process for connecting a plurality of shape data, and generates shape data for the entire measurement region.

  FIG. 2 is a block diagram illustrating a schematic configuration of the information processing apparatus. The information processing apparatus 20 includes a CPU (Central Processing Unit) 21, a ROM (Read Only Memory) 22, a RAM (Random Access Memory) 23, a hard disk 24, an input unit 25, a display unit 26, and a transmission / reception unit 27. These units are connected to each other via a bus 28.

  The CPU 21 performs various calculations and controls on the shape data acquired from the shape measuring apparatus 10. The CPU 21 functions as a conversion unit, a correction amount calculation unit, a reliability calculation unit, a correction amount determination unit, a determination unit, and a deletion unit.

  Here, the conversion unit converts the local coordinate system of the shape data into the world coordinate system. The correction amount calculation unit calculates a correction amount for performing a stitching process for correcting the coordinates of the shape data in the world coordinate system and connecting the shape data to the reference shape data. The reliability calculation unit calculates the reliability of the stitching process. The correction amount determination unit calculates a combined correction amount that is a final correction amount of the shape data. The determination unit determines whether the shape data is abnormal data. The deletion unit deletes abnormal data. The specific processing contents of each unit will be described later.

  The ROM 22 stores various programs and various data in advance. The RAM 23 temporarily stores the shape data and programs described above as a work area.

  The hard disk 24 stores various programs including an operating system and various data. The hard disk 24 includes a conversion program for converting a coordinate system of shape data, a correction amount calculation program for calculating a correction amount, a reliability calculation program for calculating reliability, and a correction for calculating a composite correction amount. An amount determination program, a determination program for determining abnormal data, and a deletion program for deleting abnormal data are stored.

  The input unit 25 is a pointing device such as a keyboard, a touch panel, and a mouse, and is used for inputting various types of information. The display part 26 is a liquid crystal display, for example, and displays various information.

  The transmission / reception unit 27 is an interface, for example, and functions as an acquisition unit that acquires shape data and position / orientation information from the shape measurement apparatus 10. Further, the transmission / reception unit 27 outputs various commands for controlling the operation of the shape measuring apparatus 10.

  The shape measuring device 10 and the information processing device 20 may include components other than the above-described components, or some of the above-described components may not be included.

  In the shape measurement system of the present embodiment configured as described above, the information processing device 20 processes a plurality of shape data obtained by measuring the shape of the work in units of minute regions by the shape measurement device 10. Hereinafter, the operation of the information processing apparatus 20 in the present embodiment will be described with reference to FIGS.

  FIG. 3 is a flowchart illustrating the procedure of the shape measurement process executed by the information processing apparatus. Note that the algorithm shown in the flowchart of FIG. 3 is stored as a program in the hard disk 24 of the information processing apparatus 20 and is executed by the CPU 21.

  First, an instruction to drive the stage is given (step S101). In the present embodiment, a drive command for driving the stage is output to the shape measuring apparatus 10 in order to measure a predetermined minute area on the workpiece surface. As a result, the stage on which the workpiece is placed is driven, and a predetermined minute region is positioned below the probe.

  Subsequently, measurement of a minute area is instructed (step S102). In the present embodiment, a measurement command for instructing execution of shape measurement of a minute region is output to the shape measurement apparatus 10. As a result, the shape of the minute region of the workpiece is measured by the non-contact type probe.

  Subsequently, shape data is acquired (step S103). In the present embodiment, shape data obtained by measuring a minute region of the workpiece in the process shown in step S <b> 102 is acquired from the shape measuring apparatus 10.

  Subsequently, the position and orientation information of the shape measuring apparatus 10 is acquired (step S104). In the present embodiment, position / orientation information indicating a position / orientation relationship between the shape measuring apparatus 10 (probe) and the work when the minute region of the work is measured in the process shown in step S102 is acquired from the shape measuring apparatus 10. The position / orientation information is obtained from the values of a plurality of laser length measuring devices (not shown) provided in the shape measuring apparatus 10.

  Subsequently, the coordinate system of the shape data is converted into the world coordinate system (step S105). In the present embodiment, the local coordinate system of the shape data is converted into the world coordinate system based on the position and orientation information acquired in the process shown in step S104. In addition, since the process itself which converts the local coordinate system of shape data into a world coordinate system based on the position and orientation information of the shape measuring apparatus is a general coordinate conversion process, a description thereof will be omitted.

  Subsequently, it is determined whether or not the entire measurement object has been measured (step S106). In the present embodiment, it is determined whether or not all the measurement target areas of the workpiece have been measured in units of minute areas. When it is determined that the entire measurement target has been measured (step S106: YES), the process proceeds to step S107.

  On the other hand, when it is determined that the entire measurement target has not been measured (step S106: NO), the process returns to step S101. And the process after step S101 is repeated until the whole measuring object is measured.

  As described above, according to the processing shown in steps S101 to S106 in FIG. 3, the measurement target area of the workpiece is measured in units of a predetermined minute area while the relative position between the workpiece and the probe is changed. Each micro area is measured so as to have an area partially overlapping between adjacent micro areas. The coordinate system of the shape data obtained by measuring the minute area of the workpiece is converted into the world coordinate system.

  Subsequently, an individual correction amount is calculated (step S107). In this embodiment, for shape data converted into the world coordinate system, correction is performed for correcting the coordinates of the shape data and performing stitching processing to join the shape data of the minute area adjacent to the minute area indicated by the shape data. A quantity is calculated.

Specifically, for example, with respect to the shape data D _b and D _r of a pair of adjacent minute regions, the shape data _Dr is connected to the shape data D _b by using the shape data of the region overlapping between the minute regions. Is calculated. More specifically, the shape data D _b, using the shape data of the area overlapping between small area indicated D _r, X-axis of the shape data D _r, Y-axis, and the Z-axis direction of the correction amount dT = ( dT _x , dT _y , dT _z ) and correction amounts dθ = (dθ _x , dθ _y , dθ _z ) around the X, Y, and Z axes are calculated. The correction amount is calculated using a known algorithm such as an ICP (Iterative Closest Point) algorithm. Note that the processing itself for calculating the correction amount for joining two pieces of shape data using the shape data of the region overlapping between adjacent regions is a general stitching process, and thus the description thereof is omitted.

  As described above, according to the process shown in step S107 of FIG. 3, the correction amount for performing the stitching process of the shape data is calculated. In the present embodiment, for each of a plurality of shape data, a correction amount for joining the shape data of a minute region adjacent to the minute region indicated by each shape data is calculated. In addition, when a minute area indicated by one shape data is adjacent to a plurality of minute areas, a correction amount is calculated for each of the shape data of a plurality of adjacent minute areas for the one shape data. The

  Subsequently, the reliability of the stitching process is calculated (step S108). In the present embodiment, the reliability of the stitching process is calculated for the stitching process in which the correction amount is calculated in the process shown in step S107. In the present embodiment, the reliability is calculated from the shape data corrected by the correction amount calculated in the process shown in step S107.

Specifically, first, the coordinates (position and orientation) of the shape data _Dr are corrected by the correction amount calculated in the process shown in step S107, and the shape data _Dr ′ is generated. Next, between a point constituting the corrected shape data D _r ′ and a point constituting the shape data D _b of the adjacent minute region, within a predetermined range (for example, within a range of one dot). A plurality of existing nearest point pairs are calculated. Then, an RMS (Root Mean Square) value of the distance between the nearest points is calculated, and the reliability V _br becomes lower as the RMS value (RMS (D _r ′ −D _b )) is larger according to the following equation (1). as such, the reliability V _br stitching process is calculated.

Note that unlike the present embodiment, the reliability V _br may be calculated so as to take a stepwise value. Specifically, V _br = 1 when the RMS value is less than the first threshold th1, V _br = 0 when the RMS value is greater than or equal to the second threshold th2, and the RMS value is greater than or equal to the first threshold th1 and the first threshold th1. If it is less than the threshold value th2 of 2, the reliability _Vbr may be calculated by the following equation (2).

Alternatively, the reliability V _br may be calculated by the following equation (3).

  In the above formulas (1) to (3), the standard deviation σ or the maximum value of the distance between nearest points may be used instead of the RMS value.

  As described above, according to the process shown in step S108 in FIG. 3, the stitching process is performed based on the difference between the shape data after the correction amount calculated in the process shown in step S107 and the shape data of the adjacent minute region. A confidence level is calculated. In the present embodiment, the reliability is calculated for all the correction amounts calculated in the process shown in step S107.

  Subsequently, a composite correction amount is calculated (step S109). In the present embodiment, a composite correction amount that is a final correction amount of the shape data is calculated based on the correction amount and the reliability calculated in the processes shown in steps S107 and S108. Specifically, based on a plurality of correction amounts calculated between one shape data and shape data of a plurality of minute regions adjacent to the minute region indicated by the shape data, and reliability corresponding to each correction amount. Thus, the combined correction amount of one shape data is calculated.

  FIG. 4 is a diagram for explaining the process of calculating the composite correction amount.

As shown in FIG. 4, the micro area indicated by the shape data _Dr is adjacent to the four micro areas indicated by the four shape data D _a , D _b , D _c , and D _d . In the process shown in step S107 of FIG. 3, four shape data _{D a, D b, D c} , for each _{D d,} the correction amount of the shape data _{D r (dT a, dθ a} ), (dT b, dθ _b ), (dT _c , dθ _c ), and (dT _d , dθ _d ) are respectively calculated, and in the process shown in step S108, the reliability V _a , V _b , V _c for the stitching process of each correction amount is calculated. , V _d are calculated. In the present embodiment, as shown in (4) below, the weighted average value of the correction amount for the reliability coefficient of the weighting, combined correction amount of the shape data D _r (dT, d [theta]) is calculated as.

Note that, unlike the present embodiment, the correction amount with the highest reliability among the above four correction amounts may be calculated as the combined correction amount of the shape data _Dr.

  As described above, according to the process shown in step S109 of FIG. 3, the combined correction amount that is the final correction amount of the shape data is calculated. In the present embodiment, a combined correction amount is calculated for each of a plurality of shape data.

  Subsequently, the composite correction amount is applied to the shape data (step S110). In the present embodiment, the composite correction amount calculated in the process shown in step S109 is applied to the corresponding shape data. Specifically, the coordinates (position and orientation) of the shape data to be corrected are corrected based on the combined correction amount. By applying a corresponding composite correction amount to each of the plurality of shape data, the plurality of shape data are connected to obtain the shape data of the entire measurement region.

Subsequently, determination of abnormal data is performed (step S111). In the present embodiment, based on the reliability, it is determined whether or not the shape data is abnormal data (for example, shape data in which some height information is missing). In the present embodiment, when the maximum values of the four reliability levels V _a , V _b , V _c , and V _d exceed a predetermined value (for example, 1/3), it is determined that the shape data is abnormal data.

Note that, unlike the present embodiment, whether or not the shape data is abnormal data may be determined from the sum of the four reliability levels. Specifically, for example, if the average value of four reliability levels ((V _a + V _b + V _c + V _d ) / 4) exceeds a predetermined value (for example, 1/3), the shape data is abnormal data. It may be judged. Alternatively, it may be determined whether or not the shape data is abnormal data from the sum of squares or the minimum value of the plurality of reliability levels, and is determined from statistical values (average value or standard deviation) of the reliability levels of the plurality of shape data types. May be.

  Then, abnormal data is deleted (step S112), and the process is terminated. In the present embodiment, the shape data determined as abnormal data in the process shown in step S111 is obtained from the shape data (a set of shape data) of the entire measurement region obtained by applying the composite correction amount in the process shown in step S110. Deleted.

FIG. 5 is a diagram for explaining processing for deleting abnormal data. In FIG. 5, a square block indicates shape data of a minute region, and a rectangular block that crosses a pair of adjacent square blocks indicates the reliability of stitching processing that connects adjacent shape data. The width of the rectangular block indicates the level of reliability. The narrower the width, the lower the reliability. In the present embodiment, the shape data _De whose maximum reliability is equal to or less than a predetermined value is deleted from the shape data of the entire measurement region as abnormal data. As a result, shape data of the entire measurement region not including abnormal data is obtained.

  In addition, the process shown to step S111 of FIG. 3 and step S112 can also be abbreviate | omitted.

  As described above, according to the information processing apparatus 20 of the present embodiment, the reliability of the stitching process is calculated, and the calculated reliability is used to reduce the influence of abnormal data. As a result, even when abnormality data is included in a plurality of shape data obtained by measuring the work in units of minute regions, the shape data of the entire measurement region can be obtained with high accuracy.

(Second Embodiment)
In the first embodiment, the reliability of the stitching process is calculated based on the shape data D _r ′ corrected by the correction amount. However, the reliability of the stitching process may be calculated based on the correction amount.

  In the present embodiment, the reliability is calculated from the correction amount (dT, dθ) and the measurement accuracy (σT, σθ) of the position and orientation information of the shape measuring apparatus 10 in the process shown in step S108 of FIG. The configuration of the shape measurement system in this embodiment is the same as that in the first embodiment except that the process for calculating the reliability is different, and thus detailed description thereof is omitted.

In the present embodiment, the correction amount (dT, dθ) calculated in the process shown in step S107, the measurement accuracy σT = (σT _x , σT _y , σT _z ) of the position information of the shape measuring apparatus 10 and the measurement of the posture information. The accuracy σθ = (σθ _x , σθ _y , θT _z ) is compared, and the reliability of the position component V ^T _br and the reliability of the posture component V ^θ _br are _expressed by the following equations (5) and (6), respectively. Calculated.

  Here, α and β are constants for adjusting the parameter scale. Further, the measurement accuracy (σT, σθ) of the position / orientation information of the shape measuring apparatus 10 is determined by the measurement accuracy of a laser length measuring device (not shown).

As shown in the following equation (7), the product of the position component reliability V ^T _br and the posture component reliability V ^θ _br is calculated as the stitching processing reliability V _br .

  In the above equations (5) and (6), σ may be N · σ (N is a positive constant). Further, the following formulas (8) and (9) may be used instead of the above formulas (5) and (6).

Furthermore, when the magnitude of the correction amount exceeds N times the measurement accuracy of the position and orientation information of the shape measuring apparatus 10, V _br = 0 may be set.

  Alternatively, the reliability may be calculated based on the individual components of the correction amount vector instead of the magnitude of the correction amount vector. In this case, for example, the reliability is calculated using only the largest component with respect to the measurement accuracy of the position and orientation information.

  As described above, according to the present embodiment, the reliability of the stitching process is calculated from the correction amount and the measurement accuracy of the position and orientation information of the shape measuring apparatus 10.

(Third embodiment)
The present embodiment is an embodiment in which the composite correction amount is cumulatively calculated for a plurality of shape data with reference to shape data of a specific minute region.

FIG. 6 is a diagram for explaining processing for calculating a composite correction amount according to the third embodiment of the present invention. In Figure 6, among the shape data of the entire measurement region, based on the shape data D _b region located at a corner, combined correction amounts of the shape data is calculated cumulatively.

Specifically, the number of cumulative calculations required to calculate the shape data composite correction amount is minimized, and the reliability (minimum reliability value or cumulative value of reliability included in the accumulation path) is increased. A route for calculating the composite correction amount is determined, and the cumulative correction amount of the determined route is calculated as the composite correction amount. For example, when calculating the combined correction amount of the shape data _Dr shown in FIG. _6A , the combined correction amount of the shape data _Dr is cumulatively along the path indicated by the arrow in FIG. Calculated.

(Fourth embodiment)
In the present embodiment, abnormal data is recognized based on the combined correction amount.

  In the present embodiment, the abnormal data is recognized by comparing the combined correction amount (dT, dθ) with the measurement accuracy (σT, σθ) of the position and orientation information of the shape measuring apparatus 10. Except for the point that the process for recognizing abnormal data is different, the configuration of the shape measurement system of this embodiment is the same as that of the first embodiment, and thus detailed description thereof is omitted.

  In the present embodiment, the combined correction amount (dT, dθ) calculated in the process shown in step S109 of FIG. 3 is N · (σT, σθ) (where N is a positive constant, for example, 3) or more. In this case, assuming that the shape data is abnormal data, the shape data is deleted from the shape data of the entire measurement region.

  The present invention is not limited to the first to fourth embodiments described above, and various modifications can be made within the scope of the claims.

  For example, in the first to fourth embodiments, the shape of the workpiece is measured by a shape measuring device including a non-contact type probe. However, as the shape measuring device, a shape measuring device including a three-dimensional digitizer or a digital camera may be used. In addition to the XY stage, the shape measuring apparatus may include a rotary stage. The position and orientation of the probe and stage may be measured using not only a laser length measuring machine but also a linear scale or an autocollimator.

  Means and methods for performing various processes in the information processing apparatuses according to the first to fourth embodiments can be realized by either a dedicated hardware circuit or a programmed computer. The program may be provided by a computer-readable recording medium such as a flexible disk and a CD-ROM, or may be provided online via a network such as the Internet. In this case, the program recorded on the computer-readable recording medium is usually transferred to and stored in a storage unit such as a hard disk. The program may be provided as a single application software, or may be incorporated into the software of the apparatus as a function of the information processing apparatus.

10 shape measuring device,
20 information processing device,
21 CPU,
22 ROM,
23 RAM,
24 hard disk,
25 input section,
26 display section,
27 Transmitter / receiver,
28 Bus,
D _a , D _b , D _c , D _d , D _e , _Dr shape data,
V _br confidence.

Claims (23)

A data acquisition unit for acquiring a plurality of shape data obtained by measuring the shape of a work in a predetermined area unit by a shape measuring device;
An information acquisition unit that acquires position and orientation information indicating a relative position and orientation relationship between the workpiece and the shape measurement device when measuring the shape data;
Based on the position and orientation information acquired by the information acquisition unit, a conversion unit that converts a local coordinate system of each shape data into a common coordinate system for a plurality of shape data,
The one shape data indicates a correction amount for performing a stitching process for correcting the coordinates of one shape data in the common coordinate system and joining the shape data in the region adjacent to the region indicated by the shape data. A correction amount calculating unit that calculates using shape data of a region overlapping between the region and the adjacent region;
A reliability calculation unit that calculates the reliability of the stitching process based on the correction amount calculated by the correction amount calculation unit or the shape data corrected by the correction amount;
An information processing apparatus comprising:   The information according to claim 1, wherein the reliability calculation unit calculates the reliability from a difference between the one shape data corrected by the correction amount and shape data of the adjacent region. Processing equipment.   The information processing apparatus according to claim 1, wherein the reliability calculation unit calculates the reliability from the measurement accuracy of the position and orientation information acquired by the information acquisition unit and the correction amount. The correction amount calculation unit and the reliability calculation unit calculate the correction amount and the reliability for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data,
The information processing apparatus includes:
The correction amount determination unit further calculates a composite correction amount that is a final correction amount of the one shape data based on the plurality of reliability levels and correction amounts. The information processing apparatus according to claim 1.   The information processing apparatus according to claim 4, wherein the correction amount determination unit calculates a weighted average value of the plurality of correction amounts using the reliability as a weighting coefficient as the combined correction amount.   The information processing apparatus according to claim 4, wherein the correction amount determination unit calculates a correction amount having a maximum reliability among the plurality of correction amounts as the combined correction amount. A determination unit for determining whether the one shape data is abnormal data based on the reliability;
7. The apparatus according to claim 1, further comprising: a deletion unit that deletes the one shape data when the determination unit determines that the one shape data is abnormal data. 8. The information processing apparatus described in 1. The correction amount calculation unit and the reliability calculation unit calculate the correction amount and the reliability for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data,
The information processing apparatus according to claim 7, wherein the determination unit determines whether the one shape data is abnormal data based on the plurality of maximum reliability values. The correction amount calculation unit and the reliability calculation unit calculate the correction amount and the reliability for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data,
The information processing apparatus according to claim 7, wherein the determination unit determines whether the one shape data is abnormal data based on a sum of the plurality of reliability degrees. When the composite correction amount is equal to or greater than a predetermined value, a recognition unit that recognizes the one shape data as abnormal data;
The information processing apparatus according to claim 4, further comprising: a deletion unit that deletes the one shape data recognized by the recognition unit.   The information processing apparatus according to claim 10, wherein the predetermined value is a value determined by measurement accuracy of the position and orientation information acquired by the information acquisition unit. Position and orientation indicating a plurality of shape data obtained by measuring the shape of the workpiece in a predetermined area unit by the shape measuring device, and a relative position and orientation relationship between the workpiece and the shape measuring device at the time of measuring the shape data Information, and based on the position and orientation information, a procedure (a) for converting a local coordinate system of each shape data into a coordinate system common to a plurality of shape data;
The one shape data indicates a correction amount for performing a stitching process for correcting the coordinates of one shape data in the common coordinate system and joining the shape data in the region adjacent to the region indicated by the shape data. A procedure (b) for calculating using shape data of a region overlapping between the region and the adjacent region;
A procedure (c) for calculating the reliability of the stitching process based on the correction amount calculated in the procedure (b) or the shape data corrected by the correction amount;
An information processing program that causes a computer to execute.   13. The reliability according to claim 12, wherein in the step (c), the reliability is calculated from a difference between the one shape data corrected by the correction amount and shape data of the adjacent region. Information processing program.   13. The information processing according to claim 12, wherein in the step (c), the reliability is calculated from the measurement accuracy and the correction amount of the position and orientation information acquired in the step (a). program. In the steps (b) and (c), the correction amount and the reliability are calculated for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data,
The information processing program includes:
13. The computer further executes a step (d) of calculating a composite correction amount that is a final correction amount of the one shape data based on the plurality of reliability levels and correction amounts. The information processing program of any one of -14.   16. The information processing program according to claim 15, wherein in the step (d), a weighted average value of the plurality of correction amounts using the reliability as a weighting coefficient is calculated as the combined correction amount.   16. The information processing program according to claim 15, wherein, in the step (d), a correction amount having a maximum reliability among the plurality of correction amounts is calculated as the combined correction amount. A step (e) of determining whether the one shape data is abnormal data based on the reliability;
The step (f) of deleting the one shape data is further executed by the computer when it is determined in the step (e) that the one shape data is abnormal data. The information processing program according to any one of 12 to 17. In the steps (b) and (c), the correction amount and the reliability are calculated for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data,
19. The information processing program according to claim 18, wherein, in the step (e), it is determined from the plurality of maximum reliability values whether the one shape data is abnormal data. In the steps (b) and (c), the correction amount and the reliability are calculated for each of the shape data of a plurality of regions adjacent to the region indicated by the one shape data,
19. The information processing program according to claim 18, wherein in the step (e), it is determined from the sum of the plurality of reliability levels whether the one shape data is abnormal data. A step (g) of recognizing the one shape data as abnormal data when the composite correction amount is a predetermined value or more;
The information processing according to any one of claims 15 to 17, further comprising causing the computer to execute a procedure (h) of deleting the one shape data recognized in the procedure (g). program.   The information processing program according to claim 21, wherein the predetermined value is a value determined by measurement accuracy of the position and orientation information acquired in the step (a).   A computer-readable recording medium on which the information processing program according to any one of claims 12 to 22 is recorded.

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