JP2013053924A - Electron beam irradiation apparatus and scan horn for the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten measurement time of a dose or energy as compared with a conventional apparatus, and to measure the dose or energy while continuing its irradiation to a work without requiring specific operation.SOLUTION: A scan horn 120 to which a deflection amount of an electron beam accelerated in an acceleration space of an accelerator 118 is varied under control of a current value of a scan electromagnet 130 by a control unit 140a and the deflected electron beam is led includes: a main body 120a connected to the accelerator; an introduction part 121 connected to the acceleration space of the accelerator; an inner space 122 connected to the acceleration space through the introduction part while maintaining vacuum; an electron beam extraction member 124 arranged oppositely to the introduction part to separate the inner space from the external; a measurement window 125 arranged on a position to which an electron beam of a deflection amount equal to or more than a deflection amount passed through the electron beam extraction part is led; and a measurement beam derivation member 126 arranged on the measurement window to separate the inner space from the external and derive an electron beam led to the measurement window to the external.

Description

  The present invention relates to an electron beam irradiation apparatus that irradiates an irradiation object with an electron beam, and a scan horn of the electron beam irradiation apparatus.

  Conventionally, electron beam irradiation apparatuses used in various fields such as sterilization of medical instruments and foods, cross-linking and curing of resins, and removal of lesions such as malignant tumors are known. In such an electron beam irradiation apparatus, a cathode electrode provided in an electron gun is heated to a high temperature to emit electrons to an accelerator, and the electrons are accelerated by the accelerator, and then scanned by a scan horn to irradiate an object to be irradiated. is there.

  The electron beam irradiation apparatus as described above needs to periodically measure the dose of the electron beam to be output and the like in order to confirm whether the dose and energy of the electron beam are provided as controlled. Therefore, in the conventional electron beam irradiation apparatus, as shown in, for example, Patent Document 1, doses and doses are obtained by irradiating an electron beam to a dedicated dosimeter or the like in which dosimeters such as plastics are stacked in multiple stages Energy is measured.

JP 02-28585 A

  However, as described above, when measuring dose and energy using a dosimeter, the time of molecular change in the dosimeter must be taken into account. It took a long time to be derived. Therefore, the control cannot be immediately changed based on the measurement result, and there is a possibility that the reliability of the sterilization action or the like may be lowered until the measurement result is derived. Also, when measuring dose and energy, a dosimeter must be transported and installed in the irradiation area instead of the workpiece, which complicates the measurement work and interrupts the irradiation of the workpiece. There wasn't.

  Therefore, in view of such problems, the present invention can shorten the measurement time of dose and energy as compared with the conventional technique, and can measure without requiring any special work and continuing to irradiate the workpiece. It is an object of the present invention to provide an electron beam irradiation device and a scan horn for the electron beam irradiation device.

  In order to solve the above problems, an electron beam irradiation apparatus of the present invention includes an accelerator that accelerates an electron beam in an acceleration space maintained in a vacuum, a scan electromagnet that deflects an electron beam accelerated by the accelerator, and a scan electromagnet. A control unit that controls the current value to vary the deflection amount of the electron beam, an introduction unit connected to the acceleration space of the accelerator, an internal space that communicates with the acceleration space via the introduction unit, and A scan horn having a main body provided with an electron beam extraction unit that is disposed opposite to the introduction unit and separates the internal space from the outside and that guides the electron beam deflected by the scan electromagnet toward the irradiation object. The scanning horn is a measurement window provided at a position where an electron beam having a deflection amount equal to or greater than the deflection amount passing through the electron beam extraction unit is guided in the main body, and provided in the measurement window. A measurement line deriving member for separating an electron beam from the outside and deriving an electron beam guided to the measurement window to the outside or generating an X-ray from the electron beam led to the measurement window and deriving the electron beam to the outside. It is characterized by having.

  The electron beam irradiation apparatus of the present invention includes an accelerator that accelerates an electron beam in an acceleration space maintained in a vacuum, a scan magnet and a deflection magnet that deflect the electron beam accelerated by the accelerator, and a scan electromagnet or a deflection electromagnet. A control unit that controls the current value to vary the deflection amount of the electron beam, an introduction unit connected to the acceleration space of the accelerator, an internal space that communicates with the acceleration space via the introduction unit, and A scan horn having a main body provided with an electron beam extraction unit that is disposed opposite to the introduction unit and separates the internal space from the outside and that guides the electron beam deflected by the scan electromagnet toward the irradiation object. The scanning horn is a measuring device provided in a position different from the electron beam extraction unit while the electron beam deflected by the deflection electromagnet is guided in the main body. And is provided in the measurement window, separates the internal space from the outside, leads out the electron beam guided to the measurement window, or generates X-rays from the electron beam guided to the measurement window to the outside And a measurement line deriving member for deriving.

  The electron beam irradiation apparatus according to the present invention includes a detection unit that detects an electron beam or X-ray led out to the outside via the measurement line deriving member, and at least when the electron beam or X-ray is detected by the detection unit A calculation unit that calculates either one or both of dose and energy based on the current value controlled by the control unit.

  Moreover, the electron beam irradiation apparatus of this invention may provide a measurement window in an introduction part side rather than an electron beam extraction part among main bodies.

  In the electron beam irradiation apparatus of the present invention, the measurement line deriving member may be composed of a titanium foil that derives the electron beam to the outside.

  In the electron beam irradiation apparatus of the present invention, the measurement line deriving member may be composed of a tungsten or copper target that generates X-rays from the electron beams and derives them outside.

  Further, the scan horn of the electron beam irradiation apparatus of the present invention is accelerated in the acceleration space of the accelerator, and the control unit controls the current value of the scan electromagnet to derive an electron beam with a variable deflection amount toward the irradiated object. A scanning horn of an electron beam irradiation apparatus, the main body connected to the accelerator includes an introduction part connected to the acceleration space of the accelerator, and an internal space that communicates with the acceleration space via the introduction part while maintaining a vacuum An electron beam extraction unit that is disposed opposite to the introduction unit, separates the internal space from the outside, and leads out the electron beam deflected by the scanning electromagnet toward the irradiated object, and a deflection that exceeds the deflection amount that passes through the electron beam extraction unit A measurement window provided at a position where a quantity of electron beams are guided, and provided in the measurement window to separate the internal space from the outside and to guide the electron beam guided to the measurement window to the outside or to the measurement window Guidance Which was generated X-rays from the electron beam, characterized by comprising a measuring line leading member which led to the outside, the by.

  The scan horn of the electron beam irradiation apparatus of the present invention is an electron beam that is guided by varying the deflection amount of the electron beam accelerated in the acceleration space of the accelerator by controlling the current value of the scan magnet or the deflecting electromagnet by the control unit. The irradiation device is a scan horn, and a main body connected to the accelerator includes an introduction portion connected to the acceleration space of the accelerator, an internal space that communicates with the acceleration space via the introduction portion, and an introduction portion. And an electron beam extraction unit that guides the electron beam deflected by the scanning electromagnet toward the irradiated object, the electron beam deflected by the deflecting electromagnet is guided, and the electron beam A measurement window provided at a different position from the take-out part, and provided in the measurement window to separate the internal space from the outside and lead out the electron beam guided to the measurement window to the outside. It is characterized with the measurement-guiding member that led outside by generating X-rays from the electron beam guided to the measuring window, further comprising: a.

  According to the present invention, the dose and energy of an electron beam can be measured in a shorter time than before, without requiring any special work, and while continuing to irradiate the workpiece.

It is an external appearance perspective view of an electron beam irradiation apparatus. It is the figure which looked at the electron beam irradiation apparatus from the Y direction in FIG. It is explanatory drawing for demonstrating the structure of an accelerator. It is explanatory drawing for demonstrating the structure of a scan horn. It is explanatory drawing for demonstrating the structure of the scan horn of a modification. It is explanatory drawing for demonstrating the structure of the scan horn of another modification.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for facilitating the understanding of the invention, and do not limit the present invention unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted, and elements not directly related to the present invention are not illustrated. To do.

(Electron beam irradiation apparatus 100)
1 is an external perspective view of the electron beam irradiation apparatus 100, and FIG. 2 is a view of the electron beam irradiation apparatus 100 viewed from the Y direction in FIG. In FIG. 1, a support mechanism for supporting the electron beam irradiation apparatus 100 is omitted for easy understanding.

  As shown in FIGS. 1 and 2, the electron beam irradiation apparatus 100 includes an electron gun 110, a high frequency power source 112, a waveguide 114, a prebuncher 116, an accelerator 118, a scan horn 120, and a scan electromagnet 130. The control device 140 (not shown in FIGS. 1 and 2) and the detection unit 150 (not shown in FIGS. 1 and 2) are configured. The electron gun 110, the prebuncher 116, the accelerator 118, and the scan horn 120 are continuous in an internal space (vacuum chamber). The internal space is changed from a high vacuum state to an ultrahigh vacuum state by a vacuum pump 102 such as an ion pump. (For example, 10E-5 Pa or less). In the electron beam irradiation apparatus 100, thermoelectrons (electron beams) emitted from the electron gun 110 are accelerated by the prebuncher 116 and the accelerator 118, pass through the scan horn 120, and are irradiated by the carrier 200. 1 is irradiated in the Z direction in FIG. Hereinafter, each functional unit of the electron beam irradiation apparatus 100 will be described in detail.

(Electron gun 110)
The electron gun 110 is composed of, for example, a triode electron gun, heats the cathode electrode with the power supplied from the AC power supply 104, generates thermoelectrons (electrons), and intermittently draws electrons with the grid pulse voltage. A high voltage pulse voltage is applied between the cathode electrode and the anode electrode to accelerate the extracted electrons in the direction of the prebuncher 116.

(High frequency power supply 112)
The high-frequency power source 112 includes a high-frequency amplifier 112a configured by a klystron or the like, a power supply unit 112b that supplies power to the high-frequency amplifier 112a, and a pulse transformer 112c, and the prebuncher 116 and the accelerator 118 through the waveguide 114. For example, pulsed high frequency power of 3 GHz corresponding to the S band is supplied.

(Waveguide 114)
The waveguide 114 supplies a high-frequency voltage supplied from the high-frequency power source 112 to the accelerator 118. The waveguide 114 is filled with an insulating gas such as sulfur hexafluoride (SF ₆ ) to avoid a situation where the waveguide 114 is discharged by the voltage output from the high-frequency power source 112. Note that the end of the waveguide 114, separate the SF ₆ and vacuum, RF window 114a for sealing the SF _6, 114b are provided.

(Prebuncha 116)
The prebuncher 116 is provided between the electron gun 110 and the accelerator 118, and is connected to the high frequency power source 112 through the waveguide 114. The prebuncher 116 bunches the electrons incident from the electron gun 110 (density compression (velocity modulation)) and sends the electrons to the accelerator 118. More specifically, a high-frequency electric field is formed in the prebuncher 116 by high-frequency power supplied from the high-frequency power source 112, and electrons that have passed through the prebuncher 116 are bunched to the high-frequency electric field. By bunching electrons with the pre-buncher 116, the dispersion of the energy of electrons accelerated by the accelerator 118 can be reduced, and the uniformity of the energy of electrons can be improved.

  Here, when the incident timing of the electrons compressed by the prebuncher 116 to the accelerator 118 is synchronized with the high-frequency positive phase in the accelerator 118, the electrons are efficiently accelerated by the accelerator 118. Therefore, in order to adjust the incident timing of electrons from the prebuncher 116 to the accelerator 118, the high-frequency introduction unit 116a of the prebuncher 116 is provided with a phase adjusting unit (not shown). Note that the compression ratio of electrons (the length of the bunched electrons / the length of the electrons before bunching) also affects the acceleration efficiency by the accelerator 118, and the acceleration efficiency improves as the electron length is shorter. Accordingly, in order to adjust the strength of the high frequency to be supplied and adjust the length of the electrons, the high frequency introducing portion 116a of the prebuncher 116 is provided with an attenuation (attenuator) means (not shown).

(Accelerator 118)
FIG. 3 is an explanatory diagram for explaining the configuration of the accelerator 118. In this embodiment, a standing wave type linear accelerator is used as the accelerator 118. However, it is only necessary to accelerate electrons, and a traveling wave type linear accelerator or a circular accelerator such as a synchrotron or a cyclotron is used. You can also

  As shown in FIG. 3, the electron gun 110 emits electrons into the internal space of the prebuncher 116 in a state where the electron gun 110 is extended in the Z direction, as indicated by the black fill in FIG. 3. Then, by the bunching function by the prebuncher 116, the electrons are compressed in the Z direction and are incident on the accelerator 118.

  Here, the accelerator 118 has a plurality of acceleration spaces 119 (indicated by 119a to 119c in FIG. 3) inside. In FIG. 3, for the sake of easy understanding, the acceleration space 119 is simplified as 3, and the accelerator 118 of the present embodiment has about 30 acceleration spaces 119. The distance L of the acceleration space 119 (the distance in the traveling direction of electrons in the acceleration space 119 (Z direction in FIG. 3)) is gradually increased from the electron gun 110 to a predetermined number as the distance from the electron gun 110 increases. After the predetermined acceleration space 119, the distance L is configured to be maintained at a predetermined length (constant).

  When a high-frequency voltage (for example, 3 GHz) is supplied from the high-frequency power source 112 to the accelerator 118, a plurality of acceleration spaces 119 function as spatial resonators as shown in FIG. As a result, an electric field that changes is generated. Then, the electrons are accelerated in a timely manner through the electric field that changes with time.

  More specifically, the acceleration space 119 of the accelerator 118 is accelerated by the high-frequency voltage introduced from the high-frequency power source 112, for example, as shown in FIGS. 3 (a) and 3 (b). A positive phase (positive (+) space charge in the traveling direction) and a negative phase (negative (-) space charge in the traveling direction) are alternately generated in the space 119. As shown in FIG. 3A, the negatively charged electrons emitted from the prebuncher 116 are located in the acceleration space 119a at the time t0 and are accelerated in the Z direction by the positive (+) space charge. . Then, as shown in FIG. 3B, at time t1, it is located in the adjacent acceleration space 119b, and is similarly accelerated in the Z direction by positive (+) space charge. Thus, by synchronizing the switching timing of the positive (+) space charge and the negative (−) space charge with the movement timing of the electrons, the electrons are gradually accelerated in the accelerator 118, and finally, For example, it is accelerated to about 10 MeV.

(Scan horn 120)
The scan horn 120 has an internal space communicating with the acceleration space 119 of the accelerator 118, and guides the electron beam accelerated by the accelerator 118 toward the irradiation object W as shown in FIGS. 1 and 2. As will be described in detail later, a scanning electromagnet 130 is provided on the upstream side of the scanning horn 120 in the traveling direction of the electron beam. The scanning electromagnet 130 is accelerated by the accelerator 118 and travels in the vertical direction (Z direction). The scanning electron beam is scanned in the horizontal direction (X direction).

  The electron beam derived from the scan horn 120 is applied to the irradiated object W that is transported in the Y direction on the conveyor 200a of the transport body 200. At this time, the electron beam is scanned in the X direction as described above. Therefore, the irradiated object W is uniformly irradiated with electrons. Below, the structure of the scan horn 120 is demonstrated concretely.

  FIG. 4 is an explanatory diagram illustrating the configuration of the scan horn 120. As shown in this figure, the scan horn 120 includes a main body 120a having a trapezoidal cross section (X direction cross section). In the main body 120a, a base end portion 120b having a narrow width in the X direction is connected to the accelerator 118, and a front end portion 120c having a wider width in the X direction than the base end portion 120b is disposed to face the conveyor 200a of the transport body 200. ing.

  An introduction portion 121 having an opening communicating with the acceleration space 119 of the accelerator 118 is provided at the base end portion 120b of the main body 120a, and the internal space 122 provided in the main body 120a is accelerated through the introduction portion 121. It will communicate with the space 119. The leading end 120c of the main body 120a is provided with a lead-out portion 123 formed of an opening, and the lead-out portion 123 is provided with an electron beam extraction member 124 that separates the internal space 122 from the outside. The electron beam extraction member 124 is made of, for example, a titanium foil having a thickness of about 50 μm, and guides accelerated electrons from the internal space 122 to the atmosphere while separating the internal space 122 from the atmosphere. As a result, the internal space 122 of the scan horn 120 communicates with the acceleration space 119 of the accelerator 118 via the introduction part 121 while maintaining a vacuum. The lead-out part 123 and the electron beam extraction member 124 in this embodiment form an electron beam extraction part.

  In addition, a measurement window 125 including an opening formed in the main body 120a is provided between the introduction portion 121 and the lead-out portion 123 (electron beam extraction member 124) and on one side wall in the X direction of the main body 120a. ing. The measurement window 125 is provided at a position where an electron beam having a deflection amount greater than the deflection amount passing through the electron beam extraction member 124 is guided.

  That is, when the electron beam is irradiated to the irradiation object W, the deflection amount of the electron beam is controlled by the scan electromagnet 130 within the range indicated by the broken line in FIG. Therefore, the electron beam applied to the irradiation object W usually passes through the shaded area surrounded by the broken line in FIG. 4 in the internal space 122 of the main body 120a. The measurement window 125 is located outside the shaded region in the X direction, and only the electron beam having a deflection amount greater than the electron beam passing through the electron beam extraction member 124 is measured. Will be led to.

  Similar to the electron beam extraction member 124, the measurement window 125 is provided with a measurement line deriving member 126 for deriving an electron beam or the like for measuring dose or energy to the outside while separating the internal space 122 from the atmosphere. ing. In the present embodiment, the measurement line deriving member 126 is composed of a titanium foil having a thickness of about 50 μm that derives an electron beam from the internal space 122 to the outside. Note that the measurement line deriving member 126 may be formed of, for example, a tungsten or copper target that generates X-rays by electron beam collision and derives them outside. In any case, the measurement line deriving member 126 separates the internal space 122 from the outside and leads the electron beam guided to the measurement window 125 to the outside, or from the electron beam guided to the measurement window 125 X It includes a wide range of configurations that can generate a line and lead out to the outside.

(Scan Electromagnet 130)
The scanning electromagnet 130 scans the electron beam in the X direction by controlling the current value to vary the deflection amount of the electron beam. The control current value of the scanning electromagnet 130 is controlled by the control device 140. Has been.

(Control device 140)
The control device 140 controls the current value of the scan electromagnet 130 and scans the electron beam in the X direction, and includes a control unit 140a and a calculation unit 140b. The control unit 140a normally controls the current value of the scan electromagnet 130 so that the amount of deflection of the electron beam falls within the range of the broken line in FIG. 4 and measures the dose and energy of the electron beam. The current value is controlled so that the deflection amount indicated by the alternate long and short dash line in FIG.

(Detector 150)
The main body 120 a of the scan horn 120 is provided with a detection unit 150 made of a well-known Faraday cup that detects an electron beam led out from the measurement line lead member 126. An ammeter 150a is connected to the detection unit 150, and a current value measured by the ammeter 150a is input to the control device 140. As described above, when the measurement line deriving member 126 is composed of a tungsten or copper target and the X-ray is derived to the outside, a known X-ray detection device is used to detect the X-ray. Thus, the detection unit 150 is configured.

  When a current value signal is input from the ammeter 150a to the control device 140, the calculation unit 140b of the control device 140 causes the current value input from the ammeter 150a or the detection unit 150 to detect an electron beam. Based on the current value of the scanning electromagnet 130 controlled by the control unit 140a, the energy (beam energy) and the relative dose of the electron beam are calculated.

  More specifically, when performing measurement, first, the scanning electromagnet is configured so that the amount of deflection of the electron beam is larger than when the control unit 140a of the control device 140 irradiates the irradiation object W with the electron beam. The current value of 130 is controlled. Then, the amount of deflection of the electron beam gradually increases, and the electron beam is led out through the measurement line deriving member 126 at the angle indicated by the alternate long and short dash line in the figure. The electron beam led to the outside in this way is detected by the detection unit 150, and a detection signal (current value signal) is input to the control device 140. When the detection signal is input, the calculation unit 140b specifies the current value of the scan electromagnet 130 that is controlled by the control unit 140a, and calculates energy based on the current value.

  Here, a certain relationship is maintained among the deflection amount (scanning angle) of the electron beam, the current value of the scanning electromagnet 130, and the beam energy. In this embodiment, when the amount of deflection of the electron beam reaches a predetermined amount, that is, when the amount of deflection becomes a specific amount, the detection unit 150 detects the electron beam. By specifying the control current value of the scan electromagnet 130 when detected, the beam energy can be easily calculated.

  The calculation unit 140b derives the assumed scan width from the energy calculated as described above, and also detects the scan width, the control current value, the conveyance speed of the irradiation object W, and the measurement line deriving member 126. Based on the distance to 150 (titanium foil), the beam amount measured by the detector 150 (Faraday cup), and the like, the relative dose of the electron beam is calculated. Thus, the energy and the relative dose of the electron beam are calculated by the calculation unit 140b.

  When the measurement line deriving member 126 is composed of a tungsten or copper target and X-rays are derived to the outside, the X-rays detected by the detection unit 150 (X-ray detection device) can be detected under the same conditions. What is necessary is just to evaluate relatively. At this time, a metal having a known thickness and density is provided between the detection unit 150 and the measurement line deriving member 126, and the X-ray attenuation is calculated from the difference between the X-ray detection amount and the X-ray dose detected thereafter. Calculate and relatively identify and evaluate energy. In this way, it is also possible to derive the electron beam dose from the X-rays.

  As described above, according to the electron beam irradiation apparatus 100 of the present embodiment, the energy and the relative value of the electron beam dose under the same conditions (measured values and empirical values) can be used without using a conventional dosimeter. (Calculated value) can be derived immediately. Therefore, the dose and energy of the electron beam can be controlled in real time, and the reliability of sterilization action and the like can be improved. Further, when measuring dose or energy, it is only necessary to control the current value of the scan electromagnet 130 for a moment, so that almost no measurement work is required. In addition, for example, when the irradiation object W is transported while maintaining a predetermined interval, it is possible to perform the measurement in a short time during which the irradiation object W does not pass through the irradiation region. Therefore, the irradiation of the electron beam to the irradiation object W is not interrupted.

  In the present embodiment, the case where the measurement window 125 is provided on the side wall between the introduction part 121 and the lead-out part 123 (electron beam extraction member 124) in the main body 120a of the scan horn 120 has been described. The shape of the scan horn 120 is not limited to this. Another configuration of the scan horn will be described with reference to FIG.

  FIG. 5 is an explanatory diagram for explaining a configuration of a scan horn according to a modification. In FIG. 5, only the configuration of the scan horn is different from the above embodiment, and the other configurations are the same as the above embodiment. Accordingly, the same components as those in the above embodiment are denoted by the same reference numerals and the description thereof will be omitted, and only components different from those in the above embodiment will be described.

  The scan horn 160 of this modification includes a main body 160a having a trapezoidal section (X-direction section). In the main body 160a, a base end portion 160b having a narrow width in the X direction is connected to the accelerator 118, and a front end portion 160c having a wider width in the X direction than the base end portion 160b is disposed to face the conveyor 200a of the transport body 200. ing. The base end portion 160b of the main body 160a is provided with an introduction portion 161 having an opening communicating with the acceleration space 119 of the accelerator 118, and the internal space 162 provided in the main body 160a is accelerated through the introduction portion 161. It will communicate with the space 119. The leading end portion 160c of the main body 160a is provided with a lead-out portion 163 that is an opening. The lead-out portion 163 separates the internal space 162 from the outside and accelerates electrons from the internal space 122 to the atmosphere. An electron beam extraction member 164 made of a titanium foil led inside is provided. The lead-out part 163 and the electron beam extraction member 164 constitute an electron beam extraction part.

  Further, in this scan horn 160, a measurement mounting member 165 is detachably provided at the distal end portion 160c of the main body 160a. The measurement mounting member 165 is made of the same material as that of the main body 160a of the scan horn 160, and is disposed adjacent to the distal end portion 160c of the main body 160a in the X direction. The measurement mounting member 165 has a measurement window 165a formed of an opening penetrating in the vertical direction (Z direction). The measurement line derivation member formed of a titanium foil, tungsten, or copper target is formed in the measurement window 165a. 166 is provided. As a result, the internal space 162 is completely separated from the outside by the electron beam extraction member 164 and the measurement line lead-out member 166, and is maintained in a vacuum state.

  Further, the measuring attachment member 165 is provided with a fixture 167 protruding vertically downward (Z direction). The fixture 167 detects an electron beam or an X-ray derived from the measurement line deriving member 166. The detecting unit 150 is fixed. Also in the scan horn 160 of the above modification, the measurement window 165a and the measurement line derivation member 166 are provided at positions where an electron beam having a deflection amount equal to or larger than the deflection amount passing through the electron beam extraction unit 164 is guided. The same effect as the embodiment will be realized.

  In the above-described modification, the measurement window 165a is provided in the measurement attachment member 165 that is a separate body from the main body 160a. Therefore, the ease of maintenance can be improved by removing the measurement attachment member 165 from the main body 160a. Can be improved.

  As described above, the shape or the like of the scan horn is particularly limited if the measurement window 165a and the measurement line deriving member 166 are provided at positions where an electron beam with a deflection amount that passes through the electron beam extraction member 164 is led. Is not to be done. However, the detection unit 150 may interfere with the irradiated object W or the like depending on the distance to the transport body 200, the size of the irradiated object W, or the like. Therefore, when there is a possibility of interference with the irradiated object W or the like, as in the above embodiment, the measurement window 165a and the measurement line deriving member 166 are arranged upstream of the electron beam extraction direction (accelerator). 118 side) is more desirable.

  In each of the above examples, the case where the scanning electromagnet 130 is also used for the function of changing the deflection amount of the electron beam in order to measure the dose and energy has been described. In other words, the scanning electromagnet 130 controls the amount of deflection of the electron beam both in the case of irradiating the irradiation object W with the electron beam and in the case of measuring the dose and energy. However, for example, a deflection electromagnet 170 may be provided separately from the scan electromagnet 130 as in another modification shown in FIG. In this case, when measuring the dose or energy, the control device 140 stops the control of the current value of the scan electromagnet 130 and controls the current value of the deflection electromagnet 170 so that the electron beam guided to the measurement window 125 is exposed to the outside. In the case of derivation (indicated by a one-dot chain line in FIG. 6) and irradiating the irradiation object W with an electron beam, the control device 140 stops the control of the current value of the deflection electromagnet 170 and the current value of the scan electromagnet 130. You may make it control (it shows with the broken line in FIG. 6).

  Thus, if the deflection electromagnet 170 is provided separately from the scanning electromagnet 130, for example, the electron beam is scanned in the X direction when irradiating the irradiation object W, and the Y direction is measured during the measurement. It is also possible to deflect the electron beam in different directions depending on whether the electron beam is deflected or not when the object W is irradiated and when the measurement is performed. However, if the scanning electromagnet 130 is used for both functions of the deflection amount control when measuring the dose and the like and the deflection amount control when irradiating the irradiation object W as in the above embodiment, Cost can be reduced.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this embodiment. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Is done.

  INDUSTRIAL APPLICABILITY The present invention can be used for an electron beam irradiation apparatus that irradiates an object to be irradiated with an electron beam and a scan horn of the electron beam irradiation apparatus.

DESCRIPTION OF SYMBOLS 100 ... Electron beam irradiation apparatus 118 ... Accelerator 119 ... Acceleration space 120 ... Scan horn 120a ... Main body 121 ... Introduction part 122 ... Internal space 123 ... Derivation part 124 ... Electron beam extraction member 125 ... Measurement window 126 ... Measurement line derivation member 130 ... Scan electromagnet 140 ... Control device 140a ... Control part 140b ... Calculation part 150 ... Detection part 150a ... Ammeter 160 ... Scan horn 160a ... Main body 161 ... Introduction part 162 ... Internal space 163 ... Derivation part 164 ... Electron beam extraction member 165a ... Measurement Window 166 ... Measuring line lead member 170 ... Bending electromagnet

Claims (8)

An accelerator that accelerates the electron beam in an acceleration space maintained in a vacuum;
A scanning electromagnet for deflecting an electron beam accelerated by the accelerator;
A control unit for controlling the current value of the scanning electromagnet to vary the deflection amount of the electron beam;
An introduction part connected to the acceleration space of the accelerator, an internal space that communicates with the acceleration space via the introduction part, and an internal space that is arranged opposite to the introduction part and separates the internal space from the outside, A scan horn having a main body provided with an electron beam extraction unit for deriving an electron beam deflected by the scan electromagnet toward an irradiated object, and an electron beam irradiation apparatus comprising:
The scan horn is
A measurement window provided at a position where an electron beam having a deflection amount equal to or greater than a deflection amount passing through the electron beam extraction unit is guided in the main body,
Provided in the measurement window, the internal space is separated from the outside, and the electron beam led to the measurement window is led out to the outside, or X-rays are generated from the electron beam led to the measurement window An electron beam irradiation apparatus comprising: a measurement line deriving member led out to the outside. An accelerator that accelerates the electron beam in an acceleration space maintained in a vacuum;
A scanning electromagnet and a deflecting electromagnet for deflecting an electron beam accelerated by the accelerator;
A control unit that controls the current value of the scanning electromagnet or the deflection electromagnet to vary the deflection amount of the electron beam;
An introduction part connected to the acceleration space of the accelerator, an internal space that communicates with the acceleration space via the introduction part, and an internal space that is arranged opposite to the introduction part and separates the internal space from the outside, A scan horn having a main body provided with an electron beam extraction unit for deriving an electron beam deflected by the scan electromagnet toward an irradiated object, and an electron beam irradiation apparatus comprising:
The scan horn is
A measurement window provided in a position different from the electron beam extraction unit while the electron beam deflected by the deflecting electromagnet is guided out of the main body,
Provided in the measurement window, the internal space is separated from the outside, and the electron beam led to the measurement window is led out to the outside, or X-rays are generated from the electron beam led to the measurement window An electron beam irradiation apparatus comprising: a measurement line deriving member led out to the outside. A detection unit for detecting an electron beam or an X-ray derived outside through the measurement line deriving member;
A calculation unit that calculates at least one of dose and energy based on a current value controlled by the control unit when the electron beam or X-ray is detected by at least the detection unit. The electron beam irradiation apparatus according to claim 1 or 2. The measurement window is
The electron beam irradiation apparatus according to claim 1, wherein the electron beam irradiation device is provided on the introduction portion side of the main body with respect to the electron beam extraction portion. The measurement line deriving member is
The electron beam irradiation apparatus according to any one of claims 1 to 4, wherein the electron beam irradiation apparatus is made of a titanium foil for leading an electron beam to the outside. The measurement line deriving member is
The electron beam irradiation apparatus according to any one of claims 1 to 4, wherein the electron beam irradiation apparatus includes a tungsten or copper target that generates X-rays from an electron beam and derives the X-rays to the outside. A scan horn of an electron beam irradiation apparatus that derives an electron beam that is accelerated in the acceleration space of the accelerator and whose amount of deflection is varied by controlling the current value of the scan magnet by the control unit,
The main body connected to the accelerator is
An introduction part connected to the acceleration space of the accelerator;
An internal space that communicates with the accelerating space while maintaining a vacuum via the introduction portion;
An electron beam extraction unit that is disposed opposite to the introduction unit and separates the internal space from the outside, and that guides the electron beam deflected by the scan electromagnet toward the irradiation object;
A measurement window provided at a position where an electron beam having a deflection amount equal to or greater than the deflection amount passing through the electron beam extraction unit is guided;
Provided in the measurement window, the internal space is separated from the outside, and the electron beam led to the measurement window is led out to the outside, or X-rays are generated from the electron beam led to the measurement window A scanning horn for an electron beam irradiation apparatus, comprising: a measurement line deriving member led out to the outside. A scan horn of an electron beam irradiation device that is guided by varying the amount of deflection of the electron beam accelerated in the acceleration space of the accelerator by controlling the current value of the scan magnet or the deflection electromagnet by the control unit,
The main body connected to the accelerator is
An introduction part connected to the acceleration space of the accelerator;
An internal space that communicates with the accelerating space while maintaining a vacuum via the introduction portion;
An electron beam extraction unit that is disposed opposite to the introduction unit and separates the internal space from the outside, and that guides the electron beam deflected by the scan electromagnet toward the irradiation object;
The electron beam deflected by the deflection electromagnet is guided, and a measurement window provided at a position different from the electron beam extraction unit,
Provided in the measurement window, the internal space is separated from the outside, and the electron beam led to the measurement window is led out to the outside, or X-rays are generated from the electron beam led to the measurement window A scanning horn for an electron beam irradiation apparatus, comprising: a measurement line deriving member led out to the outside.

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