JP2013050149A - Air spindle - Google Patents

Air spindle Download PDF

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JP2013050149A
JP2013050149A JP2011187715A JP2011187715A JP2013050149A JP 2013050149 A JP2013050149 A JP 2013050149A JP 2011187715 A JP2011187715 A JP 2011187715A JP 2011187715 A JP2011187715 A JP 2011187715A JP 2013050149 A JP2013050149 A JP 2013050149A
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bearing
static pressure
pressure gas
housing
axial
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JP5857537B2 (en
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Hideki Kin
秀樹 金
Atsushi Takahashi
淳 高橋
Naoya Kobayashi
直也 小林
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NSK Ltd
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NSK Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide an air spindle capable of exhibiting good bearing performance by a static pressure gas bearing even in the case a rotary body expands and extends in an axial direction along with temperature rise.SOLUTION: A fixed shaft 1 has a protruding part 1a in a radial direction and bearing parts 1b in both the side sandwiching the protruding part 1a. A pair of static pressure gas bearings 3 are outwardly fitted to the bearing part 1b and are attached by an O-ring 5 movably in an axial direction. Consequently, the static pressure gas bearing 3 has a radial bearing surface 31 facing the inner peripheral surface of a housing 2, an end member 4, and an axial bearing surface 32 facing the end surface of the protruding part 1a.

Description

この発明は、エアスピンドル（軸と、ハウジングと、軸とハウジングとの間に配置されて、軸およびハウジングの一方である回転体を他方である固定体に対して回転可能に支持する静圧気体軸受と、を有する回転装置）に関する。   The present invention relates to an air spindle (static pressure gas which is disposed between a shaft, a housing, and a shaft and the housing and rotatably supports a rotating body which is one of the shaft and the housing with respect to a fixed body which is the other. And a rotating device having a bearing.

一般的なエアスピンドルにおいて、静圧気体軸受は固定体に固定され、回転体との間にアキシアル軸受面とラジアル軸受面を有する。すなわち、静圧気体軸受は軸方向に移動できない。そのため、エアスピンドルの温度上昇に伴って回転体が膨張して軸方向に伸びた場合、静圧気体軸受のアキシアル軸受面と回転体のアキシアル軸受面との隙間（アキシアル隙間）が広がって、良好な軸受性能が発揮できない場合がある。   In a general air spindle, a static pressure gas bearing is fixed to a fixed body, and has an axial bearing surface and a radial bearing surface between the rotating body. That is, the static pressure gas bearing cannot move in the axial direction. Therefore, when the rotating body expands and extends in the axial direction as the temperature of the air spindle rises, the gap (axial gap) between the axial bearing surface of the hydrostatic gas bearing and the axial bearing surface of the rotating body widens, which is good The bearing performance may not be achieved.

特許文献１には、エアスピンドルの回転体であるハウジングと非回転体である支持軸との間に温度差が生じた場合に、軸受隙間が無くなることを防止するために、支持軸がアルミニウム製の場合には、ラジアル静圧気体軸受をカーボングラファイト製とし、ハウジングをカーボン繊維とカーボンとの複合材製とすることが記載されている。また、特許文献１に記載されたエアスピンドルでは、回転体がラジアル方向への突出部（スラストランナ）を有し、軸方向でスラストランナを挟んだ両側にスラスト静圧気体軸受が配置されている。   In Patent Document 1, in order to prevent a bearing gap from being lost when a temperature difference occurs between a housing that is a rotating body of an air spindle and a support shaft that is a non-rotating body, the support shaft is made of aluminum. In this case, it is described that the radial static pressure gas bearing is made of carbon graphite and the housing is made of a composite material of carbon fiber and carbon. In the air spindle described in Patent Document 1, the rotating body has a projecting portion (thrust runner) in the radial direction, and thrust hydrostatic gas bearings are arranged on both sides of the thrust runner in the axial direction. .

特許文献２には、回転軸が受けた外力や振動、共振などを吸収するために、外力や振動が生じた際に回転軸と軸受部材（静圧気体軸受）が共に動くように構成された、回転霧化静電塗装装置が記載されている。また、特許文献２に記載された装置では、回転体（回転軸）がラジアル方向への突出部（フランジ部）を有し、軸方向でフランジ部を挟んだ両側に静圧気体軸受が配置されている。また、静圧気体軸受が固定体（合成樹脂製のハウジング）に対して、Ｏリング等の弾性支持部材を介して取り付けられている。   In Patent Document 2, in order to absorb external force, vibration, resonance, and the like received by the rotating shaft, the rotating shaft and the bearing member (hydrostatic gas bearing) move together when external force or vibration occurs. A rotary atomizing electrostatic coating device is described. In the device described in Patent Document 2, the rotating body (rotating shaft) has a projecting portion (flange portion) in the radial direction, and static pressure gas bearings are disposed on both sides of the flange portion in the axial direction. ing. A static pressure gas bearing is attached to a fixed body (synthetic resin housing) via an elastic support member such as an O-ring.

特開平９−１５８９５０号公報JP-A-9-158950 特開平９−２９４９４２号公報Japanese Patent Laid-Open No. 9-294942

この発明の課題は、温度上昇に伴って回転体が膨張して軸方向に伸びた場合でも、静圧気体軸受による良好な軸受性能が発揮できるエアスピンドルを提供することである。   An object of the present invention is to provide an air spindle capable of exhibiting good bearing performance by a static pressure gas bearing even when a rotating body expands and extends in the axial direction as the temperature rises.

上記課題を解決するために、この発明のエアスピンドルは、軸と、ハウジングと、軸とハウジングとの間に配置されて、軸およびハウジングの一方である回転体を他方である固定体に対して回転可能に支持する静圧気体軸受と、を有し、前記固定体はラジアル方向（軸に垂直な方向）への突出部を有し、前記静圧気体軸受は、軸方向で前記突出部を挟んだ両側に配置され、前記静圧気体軸受は、前記回転体との間にアキシアル軸受面とラジアル軸受面を有し、前記静圧気体軸受は、前記固定体の前記突出部以外の部分に、軸方向で移動可能に取り付けられていることにより、前記固定体との間にもアキシアル軸受面を有することを特徴とする。   In order to solve the above-mentioned problems, an air spindle of the present invention is disposed between a shaft, a housing, and the shaft and the housing, and a rotating body that is one of the shaft and the housing is fixed to a stationary body that is the other. A static pressure gas bearing that rotatably supports the fixed body, and the stationary body has a protrusion in a radial direction (a direction perpendicular to the axis), and the static pressure gas bearing has the protrusion in the axial direction. The static pressure gas bearings are disposed on both sides of the sandwich, and the static pressure gas bearing has an axial bearing surface and a radial bearing surface between the rotary body, and the static pressure gas bearing is provided on a portion other than the protruding portion of the fixed body. The axial bearing surface is also provided between the fixed body and the fixed body by being attached so as to be movable in the axial direction.

この発明のエアスピンドルでは、静圧気体軸受が軸方向で移動可能に取り付けられているため、エアスピンドルの温度上昇に伴って回転体が膨張して軸方向に伸びた場合でも、静圧気体軸受のアキシアル軸受面と回転体および固定体のアキシアル軸受面との隙間（アキシアル隙間）が適切な隙間に保持される。
前記静圧気体軸受は、前記固定体に対して、例えば、弾性支持部材またはラビリンスシールを介して取り付けることで、軸方向で移動可能にできる。 In the air spindle of the present invention, since the static pressure gas bearing is mounted so as to be movable in the axial direction, even if the rotating body expands and extends in the axial direction as the temperature of the air spindle rises, the static pressure gas bearing A gap (axial gap) between the axial bearing surface of this and the axial bearing surfaces of the rotating body and the fixed body is held in an appropriate gap.
The static pressure gas bearing can be moved in the axial direction by being attached to the fixed body through, for example, an elastic support member or a labyrinth seal.

この発明のエアスピンドルによれば、温度上昇に伴って回転体が膨張して軸方向に伸びた場合でも、静圧気体軸受による良好な軸受性能が発揮できる。   According to the air spindle of the present invention, even when the rotating body expands and extends in the axial direction as the temperature rises, good bearing performance by the hydrostatic gas bearing can be exhibited.

第１実施形態のエアスピンドルを示す断面図である。It is sectional drawing which shows the air spindle of 1st Embodiment. 図１の部分拡大図である。It is the elements on larger scale of FIG. 第２実施形態のエアスピンドルを示す断面図である。It is sectional drawing which shows the air spindle of 2nd Embodiment. 第３実施形態のエアスピンドルを示す断面図である。It is sectional drawing which shows the air spindle of 3rd Embodiment. 第４実施形態のエアスピンドルを示す断面図である。It is sectional drawing which shows the air spindle of 4th Embodiment.

以下、この発明の実施形態について説明する。
［第１実施形態］
この実施形態のエアスピンドルは、軸が固定体でハウジングが回転体の例であり、図１および２に示すように、固定軸（固定体）１と、細長い円筒状のハウジング（回転体）２と、固定軸１とハウジング２との間に配置された１対の静圧気体軸受３と、１対の円環状の端部材（回転体）４と、Ｏリング（弾性支持部材）５とで構成されている。
固定軸１は、ハウジング２の軸方向中央部に配置される部分に、ラジアル方向への突出部１ａを有する。１対の静圧気体軸受３は円筒体からなり、軸方向で固定軸１の突出部１ａを挟んだ両側の部分（軸受部）１ｂに外嵌されている。 Embodiments of the present invention will be described below.
[First Embodiment]
The air spindle of this embodiment is an example in which the shaft is a fixed body and the housing is a rotating body. As shown in FIGS. 1 and 2, a fixed shaft (fixed body) 1 and an elongated cylindrical housing (rotating body) 2 are used. A pair of static pressure gas bearings 3 disposed between the fixed shaft 1 and the housing 2, a pair of annular end members (rotating bodies) 4, and an O-ring (elastic support member) 5. It is configured.
The fixed shaft 1 has a projecting portion 1 a in the radial direction at a portion arranged in the central portion of the housing 2 in the axial direction. The pair of static pressure gas bearings 3 is formed of a cylindrical body, and is externally fitted to both side portions (bearing portions) 1b sandwiching the protruding portion 1a of the fixed shaft 1 in the axial direction.

図２に示すように、固定軸１の軸受部１ｂの外周面には、各４本の周溝１１が形成されている。そして、全ての周溝１１にＯリング５が配置されている。これらのＯリング５により、１対の静圧気体軸受３が固定軸１に対して、軸方向で移動可能に取り付けられている。
静圧気体軸受３は、ハウジング２の内周面と対向するラジアル軸受面３１と、端部材４および突出部１ａの端面と対向するアキシアル軸受面３２を有する。静圧気体軸受３の軸方向中央部に、径方向に貫通する排気穴３５が形成されている。排気穴３５は周方向の複数箇所に形成されている。静圧気体軸受３の内周面には、軸方向で排気穴３５を挟んだ両側に、気体導入用の周溝３６が形成されている。固定軸１の周溝１１は、静圧気体軸受３の周溝３６を挟んだ両側となる位置に形成されている。 As shown in FIG. 2, four circumferential grooves 11 are formed on the outer peripheral surface of the bearing portion 1 b of the fixed shaft 1. In addition, O-rings 5 are arranged in all the circumferential grooves 11. By these O-rings 5, a pair of static pressure gas bearings 3 are attached to the fixed shaft 1 so as to be movable in the axial direction.
The hydrostatic gas bearing 3 has a radial bearing surface 31 that faces the inner peripheral surface of the housing 2 and an axial bearing surface 32 that faces the end surfaces of the end member 4 and the protruding portion 1a. An exhaust hole 35 penetrating in the radial direction is formed in the axially central portion of the static pressure gas bearing 3. The exhaust holes 35 are formed at a plurality of locations in the circumferential direction. On the inner peripheral surface of the static pressure gas bearing 3, gas introduction peripheral grooves 36 are formed on both sides of the exhaust hole 35 in the axial direction. The circumferential groove 11 of the fixed shaft 1 is formed at positions on both sides of the circumferential groove 36 of the static pressure gas bearing 3.

固定軸１の内部に、軸方向に延びる給気路（気体供給経路）１２と排気路（気体排出経路）１３が形成されている。固定軸１の突出部１ａの軸方向中央位置に、排気路１３から分岐して径方向に延び、突出部１ａの外周面に至る連通路（気体排出経路）１４が形成されている。
固定軸１の内部には、また、静圧気体軸受３の排気穴３５の位置に、排気路１３から分岐して径方向に延び、固定軸１の外周面に至る回収穴（気体排出経路）１５が形成されている。固定軸１の内部には、さらに、静圧気体軸受３の周溝３６の位置に、給気路１２から分岐して径方向に延びる給気穴（気体供給経路）１２ａが形成されている。 An air supply path (gas supply path) 12 and an exhaust path (gas discharge path) 13 extending in the axial direction are formed inside the fixed shaft 1. A communication path (gas discharge path) 14 that branches from the exhaust path 13 and extends in the radial direction and reaches the outer peripheral surface of the protrusion 1 a is formed at the axial center position of the protrusion 1 a of the fixed shaft 1.
Inside the fixed shaft 1 and at the position of the exhaust hole 35 of the hydrostatic gas bearing 3, a recovery hole (gas discharge path) branched from the exhaust passage 13 and extending in the radial direction to reach the outer peripheral surface of the fixed shaft 1. 15 is formed. Inside the fixed shaft 1, an air supply hole (gas supply path) 12 a that branches from the air supply path 12 and extends in the radial direction is further formed at the position of the circumferential groove 36 of the static pressure gas bearing 3.

端部材４は、図２に示すように、ハウジング２の軸方向端面との接触面を有する大径部４１と、ハウジング２の軸方向端部内に挿入される中径部４２および小径部４３とからなる。端部材４には、軸方向に延びる排気穴４４が形成されている。端部材４は固定軸１を内挿し、ハウジング２の軸方向両端に固定されている。端部材４の小径部４３の端面と対向する面が、静圧気体軸受３のアキシャル軸受面３２となっている。端部材４の小径部４３の外周面とハウジング２の内周面との間に気体排出隙間６が存在する。   As shown in FIG. 2, the end member 4 includes a large diameter portion 41 having a contact surface with the axial end surface of the housing 2, a medium diameter portion 42 and a small diameter portion 43 inserted into the axial end portion of the housing 2. Consists of. The end member 4 has an exhaust hole 44 extending in the axial direction. The end member 4 has the fixed shaft 1 inserted therein and is fixed to both ends of the housing 2 in the axial direction. The surface facing the end surface of the small diameter portion 43 of the end member 4 is an axial bearing surface 32 of the static pressure gas bearing 3. A gas discharge gap 6 exists between the outer peripheral surface of the small diameter portion 43 of the end member 4 and the inner peripheral surface of the housing 2.

この実施形態のエアスピンドルでは、外部から固定軸１の給気路１２に導入された加圧気体が、給気穴１２ａから静圧気体軸受３の内周溝３６に入り、静圧気体軸受３のラジアル軸受面３１とアキシアル軸受面３２に供給される。これにより、静圧気体軸受３が機能する。
ラジアル軸受面３１とアキシアル軸受面３２を通った気体は、排気穴３５から回収穴１５を介して排気路１３に回収される。排気路１３に回収された気体は外部に排出される。また、端部材４側のアキシアル軸受面３２を通った気体は、主に、気体排出隙間６から端部材４の排気穴４４を介して外部に排出される。 In the air spindle of this embodiment, the pressurized gas introduced from the outside into the air supply path 12 of the fixed shaft 1 enters the inner peripheral groove 36 of the static pressure gas bearing 3 from the air supply hole 12a, and the static pressure gas bearing 3 The radial bearing surface 31 and the axial bearing surface 32 are supplied. Thereby, the static pressure gas bearing 3 functions.
The gas that has passed through the radial bearing surface 31 and the axial bearing surface 32 is recovered from the exhaust hole 35 to the exhaust path 13 through the recovery hole 15. The gas collected in the exhaust passage 13 is discharged to the outside. Further, the gas that has passed through the axial bearing surface 32 on the end member 4 side is mainly discharged to the outside from the gas discharge gap 6 through the exhaust hole 44 of the end member 4.

この実施形態のエアスピンドルによれば、静圧気体軸受３が固定軸１の軸受部１ｂにＯリング５により軸方向で移動可能に取り付けられているため、温度上昇に伴ってハウジング（回転体）２が膨張して軸方向に伸びた場合でも、静圧気体軸受３のアキシアル軸受面３１と、端部材（回転体）４の小径部４３の端面および固定軸（固定体）１の突出部１ａの端面との隙間（アキシアル隙間）が、適切な隙間に保持される。よって、静圧気体軸受３による良好な軸受性能が発揮できる。   According to the air spindle of this embodiment, since the static pressure gas bearing 3 is attached to the bearing portion 1b of the fixed shaft 1 so as to be movable in the axial direction by the O-ring 5, the housing (rotating body) is increased as the temperature rises. Even when 2 expands and extends in the axial direction, the axial bearing surface 31 of the static pressure gas bearing 3, the end surface of the small-diameter portion 43 of the end member (rotating body) 4, and the protruding portion 1 a of the fixed shaft (fixed body) 1. A gap (axial gap) with the end face of the is maintained in an appropriate gap. Therefore, the favorable bearing performance by the static pressure gas bearing 3 can be exhibited.

［第２実施形態］
この実施形態のエアスピンドルは、軸が回転体でハウジングが固定体の例であり、図３に示すように、軸（回転体）７と、軸７に外嵌された円筒体（回転体）７１と、１対の端部材（回転体）７２と、ハウジング（固定体）８と、円筒体７１と端部材７２とハウジング８との間に配置された１対の静圧気体軸受９と、Ｏリング（弾性支持部材）５とで構成されている。 [Second Embodiment]
The air spindle of this embodiment is an example in which the shaft is a rotating body and the housing is a fixed body. As shown in FIG. 3, a shaft (rotating body) 7 and a cylindrical body (rotating body) externally fitted to the shaft 7 are used. 71, a pair of end members (rotating bodies) 72, a housing (fixed body) 8, a pair of static pressure gas bearings 9 disposed between the cylindrical body 71, the end members 72, and the housing 8, An O-ring (elastic support member) 5 is included.

ハウジング８は、円筒部８１の軸方向中央部の内周面にラジアル方向への突出部８２を有する形状である。ハウジング８の軸方向両端部の内周面（突出部８２が形成されていない円筒部８１の内周面）に、各２本の周溝８４が形成されている。そして、全ての周溝８４にＯリング５が配置されている。これらのＯリング５により、１対の静圧気体軸受９がハウジング８に対して、軸方向で移動可能に取り付けられている。
１対の静圧気体軸受９は穴開き円板状で、軸方向でハウジング８の突出部８２を挟んだ両側に配置されている。静圧気体軸受９は、円筒体７１の外周面と対向するラジアル軸受面９１と、端部材７２および突出部８２の端面と対向するアキシアル軸受面９２を有する。静圧気体軸受９の外周面に気体導入用の周溝９６が形成されている。 The housing 8 has a shape having a radially projecting portion 82 on the inner peripheral surface of the central portion in the axial direction of the cylindrical portion 81. Two circumferential grooves 84 are formed on the inner peripheral surfaces (the inner peripheral surface of the cylindrical portion 81 where the protruding portions 82 are not formed) at both axial ends of the housing 8. The O-ring 5 is disposed in all the circumferential grooves 84. With these O-rings 5, a pair of static pressure gas bearings 9 are attached to the housing 8 so as to be movable in the axial direction.
The pair of static pressure gas bearings 9 is in the shape of a perforated disk and is disposed on both sides of the protruding portion 82 of the housing 8 in the axial direction. The static pressure gas bearing 9 has a radial bearing surface 91 that faces the outer peripheral surface of the cylindrical body 71, and an axial bearing surface 92 that faces the end surfaces of the end member 72 and the protruding portion 82. A gas introduction circumferential groove 96 is formed on the outer peripheral surface of the static pressure gas bearing 9.

ハウジング８には、円筒部８１の軸方向に延びる第１の給気路（気体供給経路）８１ａと、第１の給気路８１ａと繋がり、円筒部８１の径方向に延びて円筒部８１の内周面に至る一対の第２の給気路（気体供給経路）８１ｂと、排気路（気体排出経路）８３が形成されている。１対の第２の給気路８１ｂは、１対の静圧気体軸受９の周溝９６の位置に配置されている。また、一方の第２の給気路８１ｂは円筒部８１の外周面で開口し、この開口部が、気体供給管を接続する雌ねじ穴８１ｃとなっている。排気路８３は、ハウジング８の軸方向中央（突出部８２が形成されている位置）を径方向に沿って貫通している。   The housing 8 is connected to a first air supply path (gas supply path) 81 a extending in the axial direction of the cylindrical portion 81 and the first air supply path 81 a, and extends in the radial direction of the cylindrical portion 81 to A pair of second air supply paths (gas supply paths) 81b and exhaust paths (gas discharge paths) 83 reaching the inner peripheral surface are formed. The pair of second air supply passages 81 b are disposed at the positions of the circumferential grooves 96 of the pair of static pressure gas bearings 9. One second air supply path 81b opens at the outer peripheral surface of the cylindrical portion 81, and this opening serves as a female screw hole 81c for connecting the gas supply pipe. The exhaust passage 83 penetrates the axial center of the housing 8 (the position where the protruding portion 82 is formed) along the radial direction.

端部材７２の外径は静圧気体軸受９の外径と同じであり、端部材７２の内径は軸７の外径と同じである。端部材７２はボルトで円筒体７１の軸方向両端面に固定されている。
この実施形態のエアスピンドルでは、ハウジング８の雌ねじ穴８１ｃに接続された気体供給管から導入された加圧気体が、第２の給気穴８１ｂから静圧気体軸受９の外周溝９６に入り、静圧気体軸受９のラジアル軸受面９１とアキシアル軸受面９２に供給される。これにより、静圧気体軸受９が機能する。ラジアル軸受面９１およびアキシアル軸受面９２を通った気体は、円筒体７１とハウジング８との間を通って排気路８３から外部に排出される。 The outer diameter of the end member 72 is the same as the outer diameter of the static pressure gas bearing 9, and the inner diameter of the end member 72 is the same as the outer diameter of the shaft 7. The end member 72 is fixed to both axial end surfaces of the cylindrical body 71 with bolts.
In the air spindle of this embodiment, the pressurized gas introduced from the gas supply pipe connected to the female screw hole 81c of the housing 8 enters the outer peripheral groove 96 of the static pressure gas bearing 9 from the second air supply hole 81b. It is supplied to the radial bearing surface 91 and the axial bearing surface 92 of the static pressure gas bearing 9. Thereby, the static pressure gas bearing 9 functions. The gas that has passed through the radial bearing surface 91 and the axial bearing surface 92 passes between the cylindrical body 71 and the housing 8 and is discharged to the outside from the exhaust passage 83.

この実施形態のエアスピンドルによれば、静圧気体軸受９がハウジング８の円筒部８１に、Ｏリング５により軸方向で移動可能に取り付けられているため、温度上昇に伴って円筒体（回転体）７１が膨張して軸方向に伸びた場合でも、静圧気体軸受９のアキシアル軸受面９１と、端部材（回転体）７２およびハウジング（固定体）８の突出部８２の端面との隙間（アキシアル隙間）が、適切な隙間に保持される。よって、静圧気体軸受９による良好な軸受性能が発揮できる。   According to the air spindle of this embodiment, the static pressure gas bearing 9 is attached to the cylindrical portion 81 of the housing 8 so as to be movable in the axial direction by the O-ring 5. ) Even when 71 expands and extends in the axial direction, the gap between the axial bearing surface 91 of the static pressure gas bearing 9 and the end surface of the projecting portion 82 of the end member (rotating body) 72 and the housing (fixed body) 8 ( Axial gap) is held in an appropriate gap. Therefore, the favorable bearing performance by the static pressure gas bearing 9 can be exhibited.

［第３実施形態］
第１実施形態では、Ｏリング５により、１対の静圧気体軸受３が固定軸１に対して軸方向で移動可能に取り付けられているが、この実施形態では、Ｏリング５に代えてラビリンスシール５０を使用している。これ以外の点は第１実施形態と同じである。
図４に示すように、この実施形態のエアスピンドルでは、固定軸１の軸受部１ｂの外周面の各４箇所にラビリンスシール５０が形成されている。これらのラビリンスシール５０により、１対の静圧気体軸受３が固定軸１に対して、軸方向で移動可能に取り付けられている。ラビリンスシール５０は、静圧気体軸受３の周溝３６を挟んだ両側となる位置に形成されている。 [Third Embodiment]
In the first embodiment, the pair of static pressure gas bearings 3 are attached to the fixed shaft 1 so as to be movable in the axial direction by the O-ring 5. In this embodiment, instead of the O-ring 5, the labyrinth A seal 50 is used. Other points are the same as in the first embodiment.
As shown in FIG. 4, in the air spindle of this embodiment, labyrinth seals 50 are formed at four locations on the outer peripheral surface of the bearing portion 1 b of the fixed shaft 1. With these labyrinth seals 50, a pair of static pressure gas bearings 3 are attached to the fixed shaft 1 so as to be movable in the axial direction. The labyrinth seal 50 is formed at positions on both sides of the circumferential groove 36 of the static pressure gas bearing 3.

この実施形態のエアスピンドルによれば、静圧気体軸受３が固定軸１の軸受部１ｂにラビリンスシール５０により軸方向で移動可能に取り付けられているため、温度上昇に伴ってハウジング（回転体）２が膨張して軸方向に伸びた場合でも、静圧気体軸受３のアキシアル軸受面３１と、端部材（回転体）４の小径部４３の端面および固定軸（固定体）１の突出部１ａの端面との隙間（アキシアル隙間）が、適切な隙間に保持される。よって、静圧気体軸受３による良好な軸受性能が発揮できる。   According to the air spindle of this embodiment, since the static pressure gas bearing 3 is attached to the bearing portion 1b of the fixed shaft 1 so as to be movable in the axial direction by the labyrinth seal 50, the housing (rotating body) is increased as the temperature rises. Even when 2 expands and extends in the axial direction, the axial bearing surface 31 of the static pressure gas bearing 3, the end surface of the small-diameter portion 43 of the end member (rotating body) 4, and the protruding portion 1 a of the fixed shaft (fixed body) 1. A gap (axial gap) with the end face of the is maintained in an appropriate gap. Therefore, the favorable bearing performance by the static pressure gas bearing 3 can be exhibited.

［第４実施形態］
第２実施形態では、Ｏリング５により、１対の静圧気体軸受９がハウジング８に対して軸方向で移動可能に取り付けられているが、この実施形態では、Ｏリング５に代えてラビリンスシール５０を使用している。これ以外の点は第２実施形態と同じである。
図５に示すように、この実施形態のエアスピンドルでは、ハウジング８の軸方向両端部の内周面（突出部８２が形成されていない円筒部８１の内周面）の各２箇所に、ラビリンスシール５０が形成されている。これらのラビリンスシール５０により、１対の静圧気体軸受９がハウジング８に対して、軸方向で移動可能に取り付けられている。ラビリンスシール５０は、静圧気体軸受９の周溝９６を挟んだ両側となる位置に形成されている。 [Fourth Embodiment]
In the second embodiment, a pair of static pressure gas bearings 9 are attached to the housing 8 so as to be movable in the axial direction by the O-ring 5. In this embodiment, a labyrinth seal is used instead of the O-ring 5. 50 is used. The other points are the same as in the second embodiment.
As shown in FIG. 5, in the air spindle of this embodiment, the labyrinth is provided at each of two locations on the inner peripheral surface (the inner peripheral surface of the cylindrical portion 81 where the protruding portion 82 is not formed) at both axial ends of the housing 8. A seal 50 is formed. By these labyrinth seals 50, a pair of static pressure gas bearings 9 are attached to the housing 8 so as to be movable in the axial direction. The labyrinth seal 50 is formed at positions on both sides of the circumferential groove 96 of the static pressure gas bearing 9.

この実施形態のエアスピンドルによれば、静圧気体軸受９がハウジング８の円筒部８１に、ラビリンスシール５０により軸方向で移動可能に取り付けられているため、温度上昇に伴って円筒体（回転体）７１が膨張して軸方向に伸びた場合でも、静圧気体軸受９のアキシアル軸受面９１と、端部材（回転体）７２およびハウジング（固定体）８の突出部８２の端面との隙間（アキシアル隙間）が、適切な隙間に保持される。よって、静圧気体軸受９による良好な軸受性能が発揮できる。   According to the air spindle of this embodiment, the static pressure gas bearing 9 is attached to the cylindrical portion 81 of the housing 8 so as to be movable in the axial direction by the labyrinth seal 50. ) Even when 71 expands and extends in the axial direction, the gap between the axial bearing surface 91 of the static pressure gas bearing 9 and the end surface of the projecting portion 82 of the end member (rotating body) 72 and the housing (fixed body) 8 ( Axial gap) is held in an appropriate gap. Therefore, the favorable bearing performance by the static pressure gas bearing 9 can be exhibited.

１ 固定軸（固定体）
１ａ 固定軸（固定体）の突出部
１ｂ 固定軸の軸受部（固定体の突出部以外の部分）
１１ 周溝
１２ 給気路
１２ａ 給気穴
１３ 排気路
１４ 連通路
１５ 回収穴
２ ハウジング（回転体）
３ 静圧気体軸受
３１ ラジアル軸受面
３２ アキシアル軸受面
３５ 排気穴
３６ 周溝
４ 端部材（回転体）
４１ 端部材の大径部
４２ 端部材の中径部
４３ 端部材の小径部
４４ 排気穴
５ Ｏリング（弾性支持部材）
５０ ラビリンスシール
６ 気体排出隙間
７ 軸（回転体）
７１ 円筒体（回転体）
７２ 端部材（回転体）
８ ハウジング（固定体）
８１ ハウジング（固定体）の円筒部
８１ａ 給気路
８１ｂ 給気路
８１ｃ 雌ねじ穴
８２ ハウジング（固定体）の突出部
８３ 排気路
８４ 周溝
９ 静圧気体軸受
９１ ラジアル軸受面
９２ アキシアル軸受面
９６ 周溝 1 Fixed shaft (fixed body)
1a Protruding part of the fixed shaft (fixed body) 1b Bearing part of the fixed shaft (part other than the protruding part of the fixed body)
DESCRIPTION OF SYMBOLS 11 Circumferential groove 12 Air supply path 12a Air supply hole 13 Exhaust path 14 Communication path 15 Collection | recovery hole 2 Housing (rotating body)
3 Hydrostatic Gas Bearing 31 Radial Bearing Surface 32 Axial Bearing Surface 35 Exhaust Hole 36 Circumferential Groove 4 End Member (Rotating Body)
41 Large-diameter portion of end member 42 Medium-diameter portion of end member 43 Small-diameter portion of end member 44 Exhaust hole 5 O-ring (elastic support member)
50 Labyrinth seal 6 Gas exhaust gap 7 Shaft (Rotating body)
71 Cylindrical body (rotating body)
72 End member (rotating body)
8 Housing (fixed body)
81 Cylindrical portion of housing (fixed body) 81a Air supply path 81b Air supply path 81c Female screw hole 82 Projection of housing (fixed body) 83 Exhaust path 84 Circumferential groove 9 Hydrostatic gas bearing 91 Radial bearing surface 92 Axial bearing surface 96 groove

Claims (3)

軸と、ハウジングと、
軸とハウジングとの間に配置されて、軸およびハウジングの一方である回転体を他方である固定体に対して回転可能に支持する静圧気体軸受と、を有し、
前記固定体はラジアル方向への突出部を有し、
前記静圧気体軸受は、軸方向で前記突出部を挟んだ両側に配置され、
前記静圧気体軸受は、前記回転体との間にアキシアル軸受面とラジアル軸受面を有し、 前記静圧気体軸受は、前記固定体の前記突出部以外の部分に、軸方向で移動可能に取り付けられていることにより、前記固定体との間にもアキシアル軸受面を有することを特徴とするエアスピンドル。 A shaft, a housing,
A hydrostatic gas bearing disposed between the shaft and the housing and rotatably supporting a rotating body that is one of the shaft and the housing with respect to a stationary body that is the other;
The fixed body has a projecting portion in a radial direction,
The static pressure gas bearings are arranged on both sides of the protrusion in the axial direction,
The hydrostatic gas bearing has an axial bearing surface and a radial bearing surface between the rotating body, and the hydrostatic gas bearing is axially movable to a portion other than the projecting portion of the fixed body. An air spindle characterized by having an axial bearing surface between the fixed body by being attached. 前記静圧気体軸受は、前記固定体に対して弾性支持部材を介して取り付けられている請求項１記載のエアスピンドル。   The air spindle according to claim 1, wherein the static pressure gas bearing is attached to the fixed body via an elastic support member. 前記静圧気体軸受は、前記固定体に対してラビリンスシールを介して取り付けられている請求項１記載のエアスピンドル。   The air spindle according to claim 1, wherein the static pressure gas bearing is attached to the fixed body via a labyrinth seal.
JP2011187715A 2011-08-30 2011-08-30 Air spindle Expired - Fee Related JP5857537B2 (en)

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JP6234542B1 (en) 2016-12-27 2017-11-22 株式会社 ＴＬ Ｇｅｎｏｍｉｃｓ Method for obtaining chromosomal DNA derived from fetal cells
WO2019078277A1 (en) 2017-10-19 2019-04-25 株式会社 ＴＬ Ｇｅｎｏｍｉｃｓ Chip for cell classification

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