JP2013048557A - Driving circuit for electrostatic motor, electrostatic motor, and driving method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a driving circuit capable of driving the rotation of an electrostatic motor at a high driving force.SOLUTION: The driving circuit 100 for electrostatic motor processes a signal of an encoder mounted on an electrostatic motor with a control section (microcomputer) 101, and its output is added to gates of switching transistors 107, 108 connected to primary coils of flyback transformers 103, 104 to control electric current of the primary coil. A high voltage is generated from secondary coils of the flyback transformers 103, 104 and added to electrodes 44B, 44A of the electrostatic motor through high-voltage diodes 113, 114 for charging.

Description

  The present invention relates to a driving circuit for an electrostatic motor for driving an electrostatic motor that is driven to rotate using static electricity.

  Most of the conventional electric motors use an electromagnetic force composed of a coil and a magnet. There are also known electrostatic motors that rotate using electrostatic force (for example, Patent Document 1, Non-Patent Document 1, etc.).

  However, in a conventional electric motor using an electromagnetic force composed of a coil and a magnet, gas is generated in a vacuum, and the vacuum may be broken. Further, since a magnetic material is used, it could not be operated in a high magnetic field.

  Even in the conventional electrostatic motor, gas is generated in the vacuum as described above, and there is a risk of breaking the vacuum. In addition, in the conventional electrostatic motor, a large number of electrode pairs are arranged on an insulator and the distance between them is narrowed to increase the electric field. However, a high electric field is required for dielectric breakdown, creeping discharge, spark discharge, etc. It could not be produced and sufficient driving force could not be obtained. As a result, a practical electrostatic motor could not be realized.

  Therefore, the present applicant has proposed a novel electrostatic motor in Patent Document 2. In this electrostatic motor, a disk-shaped stator and a disk-shaped rotor are disposed opposite to each other in a vacuum container, the stator is fixed to the vacuum container body, and the rotor is freely rotatable via a rotating shaft. The first electrode and the second electrode, which are pivotally supported by the main body and are respectively attached to the electrode support body and electrically insulated from each other by the insulator, are alternately arranged in the circumferential direction on the stator. The first electrode and the second electrode, which are respectively attached to the electrode support and electrically insulated from each other by the insulator, are alternately arranged in the circumferential direction, and the first electrode and the second electrode on the stator side are the center of the rotation axis. The first electrode and the second electrode on the rotor side are separated by a predetermined distance from the center of the rotating shaft, and the first electrode on the stator side and The first electrode on the stator side is disposed so as to be positioned between the second electrode rows. Between electrode and the second electrode is applied a predetermined electric field is, the first electrode and the second electrode on the rotor side is characterized by a voltage of different polarity is applied to switch at a predetermined timing.

The electrostatic motor of Patent Document 2 can generate a high electric field in a vacuum and can be rotationally driven with a sufficient driving force, and can effectively prevent dielectric breakdown, creeping discharge, spark discharge, etc. Among them, it is possible to provide an electrostatic motor that can operate and can be reduced in weight.
However, in order to stably drive the electrostatic motor of Patent Document 2 at a high voltage, there is room for further improvement of the drive circuit.

JP-A-8-88984 JP 2007-336735 A "Research on servo systems using electrostatic motors" www.intellec t.pe.u-tokyo.ac.jp/japanese/dissertation_j/yamamoto.html Author: Yasuo Yamamoto

  The present invention has been made in view of the circumstances as described above, and an object of the present invention is to provide an electrostatic motor drive circuit capable of stably driving an electrostatic motor at a high voltage.

  The electrostatic motor of the present invention is characterized by the following in order to solve the above problems.

  1stly, it has the disk-shaped stator and disk-shaped rotor which were arrange | positioned facing each other, and a stator is arrange | positioned by the circumferential direction alternately, and several 1st electrodes to which the voltage from which polarity differs is applied, and An electric field having a predetermined strength is formed between adjacent electrodes, and the rotor is alternately arranged in the vicinity of the first electrode and the second electrode of the stator, and has a polarity. Has a plurality of first electrodes and second electrodes to which different voltages are applied, the polarities thereof are switched at a predetermined timing, and the electrode position of the rotor is detected by a built-in encoder, based on the detection result An electrostatic motor drive circuit for driving an electrostatic motor that switches the electrode polarity at the predetermined timing and applies a high voltage to the first electrode and the second electrode on the rotor side to drive the motor. The primary side coil is connected to the DC power input and the secondary side coil A first flyback transformer connected to the first electrode of the rotor via a first high-voltage diode, generating a high voltage and supplying the first electrode of the rotor as an A phase; A first switching transistor for turning on and off one flyback transformer, a primary side coil is connected to a DC power supply input, and a secondary side coil is connected to a second electrode of the rotor via a second high voltage diode A second flyback transformer that generates a high voltage and supplies it to the second electrode of the rotor as a B phase that is half-phase shifted from the A phase, and a second flyback transformer that turns on and off the second flyback transformer. A switching transistor and a control unit that receives a detection signal from the encoder and performs on / off control of the first and second switching transistors.

  Secondly, in the first invention, the control unit calculates the time timing of the current flowing through the primary coil of the first and second flyback transformers by the detection signal from the encoder and the time during which the current flows, On / off control of the first and second switching transistors is performed based on the calculation result.

  Thirdly, in the first or second invention, the intermediate point between the first high voltage diode and the first electrode of the rotor is connected in series with the secondary side coil of the second flyback transformer. A third switching transistor connected in series is connected between the intermediate point of the third switching transistor connected, the second high-voltage diode and the second electrode of the rotor, and the secondary coil of the first flyback transformer. 4, and the controller performs on / off control of the third and fourth switching transistors, and the residual electrostatic energy stored in the electrostatic motor is changed from the A phase to the B phase, and from the B phase to the A phase. To hand over.

  Fourth, in any one of the first to third inventions, a high voltage that creates an electrostatic field formed between the first electrode and the second electrode of the stator is obtained from the A-phase output and the B-phase output. To take out.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the drive circuit for electrostatic motors which can drive an electrostatic motor stably with a high voltage.

It is a longitudinal cross-sectional view of the electrostatic motor which is the drive object of this invention. It is a top view of the stator of the above-mentioned electrostatic motor. It is a top view of the rotor of the said electrostatic motor. It is a partial detailed sketch of the first electrode and the second electrode of the stator. (A) is a development view showing an arrangement of partial cross sections of the stator-side electrode support and the first electrode and the second electrode, and (B) is a view of the rotor-side electrode support and the first and second electrodes. It is an expanded view which shows arrangement | positioning of a partial cross section. It is operation | movement principle explanatory drawing by the 1st electrode by the side of a stator, a 2nd electrode, and the 1st electrode by the side of a rotor, and a 2nd electrode. (A) is a figure which shows the electrode position detection signal waveform from an encoder, (b) is a figure which shows the voltage waveform of the 1st electrode and 2nd electrode by the side of a rotor, (c) is a gate (B), (C) (D) is a figure which shows the waveform of gate (D), (E), (e) is a figure which shows the high voltage output waveform of F point and G point (A phase, B phase). . It is a circuit diagram which shows the structure of the drive circuit for electrostatic motors of this embodiment.

  Before describing the electrostatic motor drive circuit according to the embodiment of the present invention in detail, first, the electrostatic motor proposed by the present applicant will be described in Patent Document 2.

  1 is a longitudinal sectional view of the electrostatic motor, FIG. 2 is a plan view of a stator of the electrostatic motor, FIG. 3 is a plan view of a rotor of the electrostatic motor, and FIG. 4 is a stator of the electrostatic motor. It is a partial detailed sketch of the first electrode and the second electrode.

  In the electrostatic motor, a disk-shaped stator S and a disk-shaped rotor R are disposed opposite to each other in a vacuum container 11, and the stator S is fixed to the main body of the vacuum container 11. The electrostatic motor can operate under a vacuum of 3 Pa or less.

  In the electrostatic motor, the first electrode 34A is fixedly disposed on each electrode support 31 on the stator S side. The first electrodes 34A are arranged in two rows with a predetermined distance from the center of the rotating shaft 1 (the center of the motor base 10). Similarly, the second electrode 34B is fixedly arranged on the other electrode support 32 on the stator S side. As shown in FIGS. 2 and 4, the first electrodes 34 </ b> A and the second electrodes 34 </ b> B are arranged alternately. The first electrode 34 </ b> A and the second electrode 34 </ b> B are arranged on the electrode supports 31 and 32 in an equal division in the circumferential direction in parallel with the rotation axis 1, and are arranged in two rows fixed in the radial direction. The electrode support 31 and the electrode support 32 provided with the first electrode 34A and the second electrode 34B are fixed by an insulator 33 and attached to the motor base 10 (the main body of the vacuum vessel 11). The insulator 33 has a sufficient insulation thickness and creepage distance, and is provided with a plurality of grooves to prevent creeping discharge. Here, a sufficient insulation thickness and creepage distance require a thickness greater than the dielectric breakdown voltage of the insulator and a creepage distance several times greater than that. Further, the number, shape, depth, and the like of the grooves can be set as appropriate according to the size and application of the electrostatic motor.

  On the other hand, the first electrode 44A is also fixedly arranged on each electrode support 41 on the rotor R side. The first electrodes 44 </ b> A are arranged in a row at a predetermined distance from the center of the rotating shaft 1. Similarly, the second electrode 44B is fixedly disposed on the other electrode support 42 on the rotor R side. As shown in FIG. 3, the first electrodes 44 </ b> A and the second electrodes 44 </ b> B are arranged so as to be alternately located as in the stator S side. The first electrode 44 </ b> A and the second electrode 44 </ b> B are arranged in an equal division in the circumferential direction on the electrode supports 41 and 42 in parallel with the rotation axis 1, and fixedly arranged in one row in the radial direction. The electrode support 41 and the electrode support 42 including the first electrode 44A and the second electrode 44B are fixed by an insulator 43 and attached to the rotary shaft 1. Similarly to the stator S side, the insulator 43 also has a sufficient insulation thickness and creepage distance, and has a shape that prevents creeping discharge by providing a plurality of grooves. Note that the number, shape, depth, and the like of the grooves can be set as appropriate according to the size and application of the electrostatic motor.

  As described above, the first electrode 44A and the second electrode 44B on the rotor R side are connected to the support bodies 41 and 42 in parallel with the rotary shaft 1 in the same manner as the first electrode 34A and the second electrode 34B on the stator S side. As shown in FIG. 1, the first electrode 34 </ b> A and the second electrode on the side of the stator S are arranged so as to be fixedly divided. Must be midway between 34B rows. The first electrode 34A, the second electrode 34B, the first electrode 44A, and the second electrode 44B have a pin shape, and it is preferable that the ends have roundness to prevent discharge between the electrodes. . These electrode shapes may be shapes other than the pin shape.

  Power is supplied to the electrodes 44A and 44B on the rotor R side through slip rings 51 and 52 and brushes 61 and 62.

  The encoder can be composed of an optical type (slit plate 7 and sensor 8) and a magnetic type (magnetic disk and sensor). Here, the former is adopted, but the first on the rotor R side is used. The energization timing of the electrode 44A and the second electrode 44B is detected by the sensor 8, signal processing is performed by a drive circuit (not shown), and a high voltage (about 1 to 100 kV) is output to output the first electrode 44A and the second electrode 44B. To supply. Since the voltage applied to the electrode of a practical electrostatic motor requires a high voltage on the order of kV, the lower limit is 1 kV. Since the torque increases in proportion to the square of the voltage, the lower limit is more preferably a voltage of 10 kV to 20 kV. The upper limit of the applied voltage is 100 kV from the viewpoint of the problem of X-ray radiation and the mechanical strength of the electrode.

  The vacuum seal 9 is attached to the motor base 10 when the electrostatic motor is used in air or gas, and maintains the vacuum inside the electrostatic motor.

  In the above description, the electrostatic motor is operated in a vacuum, but it goes without saying that it functions as an electrostatic motor even in an insulating gas such as SF6 gas.

  In the above description, the first electrode 34A and the second electrode 34B on the stator S side are arranged in two rows, and the first electrode 44A and the second electrode 44B on the rotor R side are arranged in one row. The number of columns is not limited to this, and can be set to a larger number of columns.

  The operation principle of the electrostatic motor configured as described above will be described. As shown in FIG. 5A, a high voltage (about 1 to 100 kV) is applied between the electrode supports 31 and 32 on the stator S side. Is applied, a high electric field (about 1 to 100 kV / mm) is formed between the first electrode 34A and the second electrode 34B.

  On the other hand, the first electrode 44A and the second electrode 44B on the rotor R side are configured to freely move in the circumferential direction between the first electrode 34A and the second electrode 34B on the stator S side. When a positive high voltage (about 1 to 100 kV) is applied to the electrode support 42, the first electrode 44B is positively charged and the second electrode 44A is negatively charged. For the charging timing, for example, the direction of the thrust (rotational force) is determined depending on the position of the electrode 44B on the rotor R side with respect to the second electrode 34B on the stator S side. Affects the magnitude of (rotational force).

FIG. 6 is a diagram illustrating the operation principle by showing only the first electrode 34A and the second electrode 34B on the stator S side, and the first electrode 44A and the second electrode 44B on the rotor R side. For example, when the second electrode 44B of the rotor R side of the slightly right side position X ₀ of the second electrode 34B of the stator S side came (X ₁ position) given a positive potential to the second electrode 44B A repulsive force acts on the second electrode 34B and the second electrode 44B, and an attractive force acts on the first electrode 34A and the second electrode 44B. As a result, the rotor R coupled to the first electrode 44A and the second electrode 44B receives the driving force in the right direction and moves.

The second electrode 44B, the first electrode 34A (the position of X ₂₎ immediately before the voltage switched in, repeat the operation every time of detecting the position timing of the second electrode 44B by the signal of the sensor 8 of the encoder.

In FIG. 7B, E1 and E2 respectively indicate voltage waveforms of the second electrode 44B and the first electrode 44A on the rotor R side. However, the voltage waveform during the actual rotational drive is as shown in FIG. This is because the electrode of the rotor R has a capacitance and changes depending on its position. (However, t ₀ indicates the time at the point X _{1 when} the electrode 44A passes through the electrode 34B, and T ₀ indicates the time when the switching transistor 107 is turned on to accumulate magnetic energy in the flyback transformer 103 described later. T ₁ Indicates the time after a half cycle of the encoder at t ₀ , and T ₁ indicates the time when the potential of the electrode 44A is lowered immediately before the electrode 44A is in front of the electrode 34B.)
Next, an electrostatic motor drive circuit according to an embodiment of the present invention will be described.

  FIG. 8 is a circuit diagram showing the configuration of the electrostatic motor drive circuit 100 of the present embodiment.

  The drive circuit 100 includes a control unit 101 composed of, for example, a microcomputer, and an electrode position detection signal (A) from the encoder of the electrostatic motor [for convenience, the circled characters in FIG. Same. ], A command input such as a start / stop signal, a signal indicating the rotation direction, a signal indicating the rotation speed, a signal for operating the brake, and the like are performed, and each part of the drive circuit 100 is controlled. A photocoupler 102 is provided on the output side of the control unit 101. Here, the electrostatic motor has the configuration described above, the electrodes 44A and 44B of the rotor R are arranged on the circumference in equal divisions, and the code wheel of the encoder is the shaft 1 of the rotor R (FIG. 1). It shall be fixed to. The number of slits of the code wheel is assumed to be the same as the number of electrodes.

  The drive circuit 100 includes flyback transformers 103 and 104 that generate a high voltage (about 1 to 100 kV, the same applies hereinafter). One terminal of the primary coil L1 of the flyback transformer 103 is connected to a DC power source (not shown), and the other terminal is connected to the collector of the switching transistor 107. One terminal of the secondary coil L <b> 2 of the flyback transformer 103 is connected to the A-phase output via the high voltage diode 113 and is also connected to the collector of the switching transistor 111. One terminal of the primary side coil of the flyback transformer 104 is connected to a DC power supply (not shown), and the other terminal is connected to the collector of the switching transistor 108. One terminal of the secondary side coil of the flyback transformer 104 is connected to the B-phase output via the high voltage diode 114 and to the collector of the switching transistor 112. Here, the A phase output is applied to the electrode 44B of the electrostatic motor, and the B phase output is applied to the electrode 44A. Also, a part of the A phase output is connected to the electrostatic field output via the high voltage diode 120 and is taken out as a high voltage that creates an electrostatic field on the stator S side, and a part of the B phase output is also a high voltage diode 119. Is connected to an electrostatic field output via the, and is taken out as a high voltage that creates an electrostatic field on the stator S side.

  The emitter of the switching transistor 111 is connected to the other terminal of the secondary coil of the flyback transformer 104 via the high voltage diode 116 and to one terminal of the secondary coil of the insulating transformer 105. . The emitter of the switching transistor 112 is connected to the other terminal of the secondary coil of the flyback transformer 103 via the high-voltage diode 115 and to one terminal of the secondary coil of the insulating transformer 106. . The other terminal of the secondary coil of the insulating transformer 105 is connected to the gate of the switching transistor 111, and the other terminal of the secondary coil of the insulating transformer 106 is connected to the gate of the switching transistor 112. The GND of the electrostatic motor is connected to the other terminal of the secondary coil of the flyback transformer 103 via the high voltage diode 117 and is connected to the secondary side of the flyback transformer 104 via the high voltage diode 118. Connected to one terminal.

  The output of the photocoupler 102 is connected to the gates (B), (C), (D), and (E) of the switching transistors 107, 108, 109, and 110, respectively, and the emitters of the switching transistors 107, 108, 109, and 110 are Each is connected to GND. The collector of the switching transistor 109 is connected to one terminal of the primary coil of the insulation transformer 105, and the other terminal of the primary coil of the insulation transformer 105 is connected to the + DC side. The collector of the switching transistor 110 is connected to one terminal of the primary coil of the insulating transformer 106, and the other terminal of the primary coil of the insulating transformer 106 is connected to the + DC side.

  Next, the driving operation of the electrostatic motor driving circuit 100 having the above configuration will be described.

  In FIG. 7, (a) shows the output waveform of the encoder so that a signal that rises when the electrode 44B of the rotor R passes through the electrode 34B of the stator S and falls when it passes through the electrode 34A is output. It has become. (C) is a diagram showing waveforms of gates (B) and (C), and (d) is a diagram showing waveforms of gates (D) and (E). (B), (e) is a waveform diagram as described above.

  In the starting method, when the electrostatic motor is stopped, the encoder output is in the H or L state depending on the electrode position on the rotor R side. Therefore, this output signal is discriminated by the control unit 101, and a high voltage pulse is applied to the A phase or B phase to start the electrostatic motor.

The operation after startup is performed as follows. Here, focusing on the A phase, when the primary side coil L1 of the flyback transformer 103 is turned off, a high voltage is induced in the secondary side coil L2, and a voltage is applied to the electrode 44B through the high voltage diode 113 to be charged. . The flyback transformer 103 needs to store a magnetic energy by supplying a current before turning off the primary side coil L1, and the magnitude of the stored magnetic energy depends on the rotational speed and driving torque of the electrostatic motor. Therefore, it is necessary to control the time t ₀ during which the current flows. Therefore, the control unit 101 measures the time of one cycle of the encoder, and from the time of the rising signal from the encoder and the time t ₀ when a predetermined current is passed through the coil L1 on the primary side of the flyback transformer 103, A time T ₀ at which the switching transistor 103 is turned on before the rising time is calculated, and a voltage is applied to the gate of the switching transistor 107 at the timing shown in (B) of FIG. Thereby, a current flows through the coil L1 on the primary side of the flyback transformer 103, and magnetic energy is accumulated in the magnetic core.

  When the flyback transformer 103 is turned off by the control unit 101, the magnetic energy accumulated in the flyback transformer 103 is increased from the secondary side coil L2 to the shape shown in (F) of FIG. A current having a voltage output waveform is supplied as an A-phase output to the electrode 44B via the high-voltage diode 113, and the electrode 44B is charged.

  On the other hand, the electric charge charged in the electrode 44B needs to be discharged and lowered in potential before the electrode 44B reaches the electrode 34A. In the present embodiment, the A-phase side energy stored in the electrode 44B is transferred to the B-phase side to perform discharge.

The electrode 44B is discharged through the switching transistor 111. The discharge timing is the same as the charging timing described above, from the time t ₁ when the control unit 101 applies a predetermined current to the coil on the primary side of the insulation transformer 105 and the time of the falling signal of the encoder in the same manner as described above. The discharge time T ₁ is calculated, the switching transistor 109 is turned on, and the switching transistor 111 is turned on via the insulating transformer 105. Accordingly, the A-phase residual electrostatic energy of the electrode 44B is transferred to the secondary coil of the flyback transformer 104 as a part of the B-phase output via the high voltage diode 116.

  On the flyback transformer 104 side, the same operation as that on the flyback transformer 103 is performed with a half cycle delay. That is, a current having a high voltage output waveform shown in (G) of FIG. 7E is supplied as a B-phase output to the electrode 44B through the high voltage diode 114, and the electrode 44A is charged. Then, in the same manner as described above, discharge and B-phase residual electrostatic energy are transferred to the A-phase. The above operation is repeated to rotate the electrostatic motor.

  In the electrostatic motor drive circuit 100 of this embodiment, the rotation direction of the electrostatic motor can be switched by the control unit 101 inverting the encoder signal (H → L, L → H).

  In the electrostatic motor drive circuit 100 of the present embodiment, the electrostatic motor can be braked in a stopped state. If a potential difference is given between the electrode potential on the rotor R side and the electrode potential on the stator S side, an attractive force acts on each other, and a holding force is generated at that position. Note that holding for a long time decreases the potential due to leakage from the insulator. Therefore, the flyback transformers 103 and 104 are intermittently operated and charged at a high voltage. Control in this case is also performed by the control unit 101.

  In the electrostatic motor drive circuit 100 of the present embodiment, the electrostatic motor can be braked to change from the high speed state to the low speed state. In this case, since an induced voltage is generated at the electrode of the rotor R, rotational energy is consumed by an external resistance by the power generation action. Alternatively, the rotational energy may be collected on the power source side. Control in this case is also performed by the control unit 101.

DESCRIPTION OF SYMBOLS 100 Electrostatic motor drive circuit 101 Control part (microcomputer)
102 Photocoupler 103, 104 Flyback transformer 105, 106 Insulating transformer 107, 108, 109, 110, 111, 112 Switching transistor 121 Resistance 122 Capacitor

Has a pair countercurrent arranged disc-shaped stator and a disk-shaped rotor, the stator, are arranged alternately in the circumferential polarity plurality of the first electrode and the second being different voltages applied An electric field having a predetermined strength is formed between adjacent electrodes, and the rotor is alternately arranged in the vicinity of the first electrode and the second electrode of the stator, and the voltages are different in polarity. The polarity of the first electrode and the second electrode are switched at a predetermined timing, and the electrode position of the rotor is detected by a built-in encoder, and the predetermined electrode is detected based on the detection result. A drive circuit for an electrostatic motor for driving an electrostatic motor that is driven by switching the electrode polarity at a timing and applying a high voltage to the first electrode and the second electrode on the rotor side. The coil is connected to the DC power input and the secondary coil is A first flyback transformer that is connected to the first electrode of the rotor via a high-voltage diode and supplies the first electrode of the rotor as an A phase to the first electrode of the rotor; The first switching transistor for turning on and off the transformer, the primary side coil is connected to the DC power supply input, and the secondary side coil is connected to the second electrode of the rotor via the second high voltage diode, A second flyback transformer that supplies the second electrode of the rotor to the second electrode of the rotor as a B phase that is out of phase with the A phase, a second switching transistor that turns on and off the second flyback transformer, A controller that receives a detection signal from the encoder and performs on / off control of the first and second switching transistors;

  The electrostatic motor drive circuit according to the present invention includes a stator, a rotor disposed opposite to the stator, a plurality of first electrodes and a plurality of second electrodes on which an electric field having a predetermined strength is formed. And an electrostatic motor drive circuit for driving an electrostatic motor having a plurality of third electrodes and a plurality of fourth electrodes applied so that voltages having different polarities are switched at a predetermined timing. A first transformer whose primary coil is connected to the power source and whose secondary coil is connected to the third electrode via a first high-voltage diode, and a first transformer for turning on and off the first transformer. Switching means, a second transformer in which a primary coil is connected to a power source and a secondary coil is connected to the fourth electrode via a second high-voltage diode, and the second transformer Second to turn on and off The on-off control of the first switching means so as to supply the A-phase voltage to the switching means and the third electrode, and the B-phase having a half-cycle phase shifted from the A-phase to the fourth electrode A controller that controls on / off of the second switching means so as to supply a voltage, and that controls on / off of the first and second switching means based on a detection signal from a sensor that detects a position of the electrode. It is characterized by that.

  The electrostatic motor of the present invention includes a stator, a rotor disposed opposite to the stator, a plurality of first electrodes and a plurality of second electrodes that form an electric field having a predetermined strength, and polarity. Is an electrostatic motor having a plurality of third electrodes and a plurality of fourth electrodes applied so that different voltages are switched at a predetermined timing, and a drive circuit, wherein the drive circuit has a primary coil A first transformer connected to a power source and having a secondary coil connected to the third electrode via a first high-voltage diode; first switching means for turning on and off the first transformer; A second transformer in which a primary coil is connected to a power source and a secondary coil is connected to the fourth electrode via a second high-voltage diode; and a second transformer for turning on and off the second transformer Switching means and The first switching means is on / off controlled so as to supply an A-phase voltage to the third electrode, and a B-phase voltage having a half-cycle phase shifted from the A-phase is supplied to the fourth electrode. And a controller for controlling on / off of the second switching means and controlling on / off of the first and second switching means based on a detection signal from a sensor for detecting the position of the electrode. To do.

  In addition, the driving method of the present invention includes a stator, a rotor disposed opposite to the stator, a plurality of first electrodes and a plurality of second electrodes that form an electric field having a predetermined intensity, A driving method for driving an electrostatic motor having a plurality of third electrodes and a plurality of fourth electrodes applied so that different voltages are switched at a predetermined timing, wherein A is applied to the third electrode. A phase voltage is supplied to the fourth electrode, and a B phase voltage that is half-phase shifted from the A phase is supplied to the fourth electrode. Based on a detection signal from a sensor that detects the position of the electrode, the A phase The timing of applying the voltage or the B-phase voltage is controlled.

Claims (4)

A plurality of first electrodes and second electrodes, each having a disk-shaped stator and a disk-shaped rotor disposed opposite to each other, the stators being alternately arranged in a circumferential shape and applied with voltages having different polarities An electric field having a predetermined strength is formed between adjacent electrodes, and the rotors are alternately arranged in the vicinity of the first electrode and the second electrode of the stator, and voltages having different polarities are provided. A plurality of first electrodes and a second electrode to be applied, the polarities of which are switched at a predetermined timing, the electrode position of the rotor is detected by a built-in encoder, and the predetermined electrode is detected based on the detection result; An electrostatic motor drive circuit for driving an electrostatic motor that switches an electrode polarity at a timing and applies a high voltage to the first electrode and the second electrode on the rotor side to drive.
The primary side coil is connected to the DC power supply input, and the secondary side coil is connected to the first electrode of the rotor via the first high voltage diode to generate a high voltage to generate the first electrode of the rotor. A first flyback transformer to be supplied as A phase to
A first switching transistor for turning on and off the first flyback transformer;
The primary side coil is connected to the DC power supply input and the secondary side coil is connected to the second electrode of the rotor via the second high voltage diode to generate a high voltage to generate the second electrode of the rotor. A second flyback transformer that supplies a B phase that is half-cycle phase shifted from the A phase;
A second switching transistor for turning on and off the second flyback transformer;
An electrostatic motor drive circuit comprising: a control unit that receives a detection signal from an encoder and performs on / off control of the first and second switching transistors.   The control unit calculates the time timing of the current flowing through the primary side coils of the first and second flyback transformers based on the detection signal from the encoder and the time during which the current flows, and the first and second based on the calculation result. 2. The electrostatic motor drive circuit according to claim 1, wherein on / off control of the switching transistor is performed. A third switching transistor connected in series between an intermediate point between the first high-voltage diode and the first electrode of the rotor and the secondary coil of the second flyback transformer;
A fourth switching transistor connected in series between an intermediate point between the second high-voltage diode and the second electrode of the rotor and the secondary side coil of the first flyback transformer;
The control unit performs on / off control of the third and fourth switching transistors, and transfers residual electrostatic energy stored in the electrostatic motor from the A phase to the B phase and from the B phase to the A phase. Item 3. The driving circuit for an electrostatic motor according to Item 1 or 2.   4. The high voltage that creates an electrostatic field formed between the first electrode and the second electrode of the stator is extracted from the A-phase output and the B-phase output. The drive circuit for electrostatic motors as described.

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