JP2013048202A - Laser system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate installation and maintenance of a module.SOLUTION: A laser system includes a frame including a mount on which support portions are mounted in each of at least two modules, in at least two modules out of a first module including an oscillator for oscillating a laser beam and a support portion for supporting the oscillator, a second module including a beam transmitter for transmitting the laser beam and a support portion for supporting the beam transmitter, and a third module including an amplifier for amplifying the laser beam and a support portion for supporting the amplifier, and a frame on which at least the two modules are mounted.

Description

  The present disclosure relates to laser systems.

  In recent years, along with miniaturization of semiconductor processes, miniaturization of transfer patterns in optical lithography of semiconductor processes has been rapidly progressing. In the next generation, fine processing of 70 nm to 45 nm and further fine processing of 32 nm or less are required. Therefore, for example, in order to meet the demand for fine processing of 32 nm or less, development of an exposure apparatus combining an apparatus for generating extreme ultraviolet (EUV) light with a wavelength of about 13 nm and a reduced projection reflection optical system is expected. .

  As an apparatus for generating EUV light, an LPP (Laser Produced Plasma) apparatus in which plasma generated by irradiating a target material with laser light is used, and plasma generated by discharge are generally used. Three types of devices are known: a DPP (Discharge Produced Plasma) system and an SR (Synchrotron Radiation) system using orbital radiation.

US Patent Application Publication No. 2009-0103575

Overview

  A laser system according to an aspect of the present disclosure includes a first module including an oscillator that oscillates laser light and a support unit that supports the oscillator, a beam transmitter that transmits the laser light, and a beam transmitter. At least two modules, and a second module including a second module including a support section, an amplifier that amplifies laser light, and a third module including a support section that supports the amplifier. And a frame including a mount on which a support portion is mounted for each of at least two modules.

  A laser system according to another aspect of the present disclosure includes a module including an amplifier that amplifies laser light, first to third support portions that support the amplifier, and a frame on which the module is mounted. A frame including first to third mounts on which the first to third support portions are respectively mounted, and the module includes an incident portion for incident light to be incident from the first external unit; And an emission part for emitting the emitted light to the second external unit, and the first support part is located at the first position on the incident part side as seen from the center of gravity of the module, and the second support The portion may be provided at the second position on the incident direction side of the incident light when viewed from the first position, and the third support portion may be provided at the third position.

  A laser system according to another aspect of the present disclosure includes a module including an amplifier that amplifies laser light, first to third support portions that support the amplifier, and a frame on which the module is mounted. The first to third mounts on which the first to third support parts are respectively mounted, and the module further includes an emission part for emitting the emitted light to the external unit, The first support portion has a first position on the emission portion side when viewed from the center of gravity of the module, and the second support portion is a second position on the opposite side to the emission direction of the emitted light when viewed from the first position. The third support portion may be provided at the third position.

  A laser system according to another aspect of the present disclosure includes a module including an amplifier that amplifies laser light, first to third support portions that support the amplifier, and a frame on which the module is mounted. A frame including first to third mounts on which the first to third support portions are respectively mounted, and the module includes an incident portion for incident light to be incident from the first external unit; And an emission part for emitting the emitted light to the second external unit, and the first support part is located at the first position on the incident part side as seen from the center of gravity of the module, and the second support The part may be provided at the second position on the emission part side when viewed from the center of gravity of the module, and the third support part may be provided at the third position.

  A laser system according to another aspect of the present disclosure includes a module including an amplifier that amplifies laser light, first to third support portions that support the amplifier, and a frame on which the module is mounted. A frame including first to third mounts on which the first to third support portions are respectively mounted, and first to third installation portions on which the first to third mounts are respectively mounted. The first mount positions the first support portion at a predetermined position of the frame, and the second mount is movable so as to move along the step formed in the second installation portion. Since the second mounting portion is inclined with respect to the plane perpendicular to the direction of gravity, the second mount is pressed against the step, and the second mount is the second support. By positioning the portion at a predetermined position of the second mount, The second support portion is supported so that the holding portion can move in a direction along one direction intersecting the direction of gravity with respect to the frame. You may support a 3rd support part so that it can move in the surface which cross | intersects.

  A laser system according to another aspect of the present disclosure includes a module including an amplifier that amplifies laser light, first to third support portions that support the amplifier, and a frame on which the module is mounted. A frame including first to third mounts on which the first to third support portions are respectively mounted, and first to third installation portions on which the first to third mounts are respectively mounted. The first mount positions the first support portion at a predetermined position of the frame, and the second mount is movable so as to move along the step formed in the second installation portion. The second mount is pressed against the step by the elastic member provided on the second installation section and provided on the second installation section or the second mount, and the second mount pushes the second support section to the second mount. The second support portion is positioned by positioning the mount at a predetermined position. The second support portion is supported so that the frame can move in a direction along one direction intersecting the gravitational direction, and the third mount has the third support portion intersecting the gravitational direction with respect to the frame. You may support a 3rd support part so that it can move in a surface.

  A laser system according to another aspect of the present disclosure includes a module including a beam transmitter that transmits laser light, first to third support portions that support the beam transmitter, and the module. A frame including first to third mounts on which the first to third support portions are respectively mounted, and the first and second mounts are disposed on the first surface of the frame. The third mount is provided on a second surface of the frame that intersects the first surface, the first mount positions the first support portion at a predetermined position, and the second mount. The mount supports the second support portion so that the second support portion can move in a direction along the direction approaching the first mount, and the third mount has the third support portion that is the second support portion. You may support a 3rd support part so that it can move to the direction along a surface.

  A frame according to one aspect of the present disclosure supports a first module including an oscillator that oscillates laser light and a support unit that supports the oscillator, a beam transmitter that transmits the laser light, and a beam transmitter. A frame on which at least two modules of a second module including a support part, a third module including an amplifier that amplifies laser light, and a support part that supports the amplifier are mounted. In each of the at least two modules, a mount on which the support portion is placed may be included.

Several embodiments of the present disclosure are described below by way of example only and with reference to the accompanying drawings.
FIG. 1 schematically shows a configuration of an LPP EUV light generation apparatus. FIG. 2 is a block diagram illustrating a configuration of the EUV light generation system according to the first embodiment of the present disclosure. FIG. 3A is a perspective view showing a specific arrangement of modules constituting the laser system according to the first embodiment. FIG. 3B is a perspective view showing the arrangement of the modules in the lower layer in FIG. 3A. FIG. 3C is a perspective view showing the frame in FIG. 3A. FIG. 4 is a plan view showing a specific arrangement of modules constituting the laser system. FIG. 5 is a perspective view of the first main amplifier. FIG. 6 is a plan view of the first main amplifier as viewed from the direction indicated by the arrow VI in FIG. FIG. 7A is a front view of the first main amplifier as viewed from the direction indicated by the arrow VIIA in FIG. FIG. 7B is a front view illustrating a state in which the distance between the wheel and the main amplifier is increased. FIG. 8 is a side view of the first main amplifier as viewed from the direction indicated by the arrow VIII in FIG. FIG. 9A is a perspective view of the second and third preamplifiers. FIG. 9B is a plan view of the second and third preamplifiers as viewed from the direction indicated by the arrow IXB in FIG. 9A. FIG. 10A is a perspective view of a third beam transmitter. FIG. 10B is a plan view of the third beam transmitter as viewed from the direction indicated by the arrow XB in FIG. 10A. FIG. 11A is a front view of the master oscillator. FIG. 11B is a plan view of the master oscillator viewed from the direction indicated by arrow XIB in FIG. 11A. FIG. 12 is a front view of the first main amplifier according to the second embodiment of the present disclosure. FIG. 13 is a front view of the first main amplifier according to the third embodiment of the present disclosure. FIG. 14 is a perspective view of the first main amplifier according to the fourth embodiment of the present disclosure. FIG. 15 is a front view of the first main amplifier according to the fifth embodiment of the present disclosure. FIG. 16 is a side view of the first main amplifier according to the sixth embodiment of the present disclosure. FIG. 17 is a side view of the first main amplifier according to the seventh embodiment of the present disclosure. FIG. 18A is an exploded perspective view showing a structure for supporting a module in the eighth embodiment of the present disclosure. FIG. 18B is a perspective view showing a structure for supporting a module in the eighth embodiment. FIG. 19 is a cross-sectional view illustrating a second mount for supporting a module according to the ninth embodiment of the present disclosure. FIG. 20A is an exploded perspective view showing a structure for supporting a module in the tenth embodiment of the present disclosure. FIG. 20B is a perspective view showing a structure for supporting a module in the tenth embodiment of the present disclosure. 20C is a partial cross-sectional view as seen from the direction indicated by arrow XXC in FIG. 20B. FIG. 21 is a block diagram illustrating a configuration of an EUV light generation system according to the eleventh embodiment of the present disclosure. FIG. 22A is a perspective view showing a specific arrangement of modules constituting the laser system according to the eleventh embodiment. 22B is a perspective view showing the arrangement of modules in the lower layer in FIG. 22A. FIG. 22C is a perspective view showing the frame in FIG. 22A.

Embodiment

Contents 1. Outline 2. 2. Explanation of terms 3. Overview of EUV light generation system 3.1 Configuration 3.2 Operation 4. First Embodiment 4.1 Laser System Configuration 4.2 Module Arrangement 4.3 Main Amplifier Support Mechanism 4.4 Preamplifier Support Mechanism 4.5 Beam Transmitter Support Mechanism 4.6 Master Oscillator Support Mechanism 5. Second embodiment 6. Third embodiment 7. Fourth embodiment 8. Fifth embodiment Sixth Embodiment 10. Seventh embodiment 11. Eighth Embodiment 12 Ninth embodiment 13. Tenth Embodiment Eleventh embodiment

  Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. Embodiment described below shows some examples of this indication, and does not limit the contents of this indication. In addition, all the configurations and operations described in the embodiments are not necessarily essential as the configurations and operations of the present disclosure. In addition, the same referential mark is attached | subjected to the same component and the overlapping description is abbreviate | omitted.

1. Overview In each embodiment of the present disclosure, a module such as a main amplifier that amplifies laser light includes a leg portion, and the module can be positioned by placing the leg portion at a predetermined position of the frame. In addition, wheels are attached to the module, and the wheels can expand and contract the distance to the module. The module can be moved relative to the frame if the legs are separated from the frame by increasing the distance between the wheel and the module. On the contrary, the module can be positioned at a predetermined position of the frame by placing the leg portion at a predetermined position of the frame by reducing the distance between the wheel and the module.

2. Explanation of Terms Terms used in the present disclosure will be described. The “chamber” is a chamber for isolating a space where EUV light is generated from the atmosphere. The “droplet generator” is a device that supplies a target material such as tin used for generating EUV light into the chamber in the form of droplets. The “laser system” is a system that outputs laser light for exciting a target material into plasma. The “plasma generation region” is a three-dimensional space preset as a space where plasma is generated. The light emitted by exciting the target material with the energy of the laser light includes light of a specific wavelength (EUV light). The “EUV collector mirror” is a mirror that reflects EUV light radiated from a plasma target material with high reflectivity and outputs the reflected light outside the chamber. “Upstream” in the optical axis or optical path of laser light refers to the side close to the master oscillator from which the laser light originates. On the other hand, “downstream” in the optical axis or optical path refers to the side close to the plasma generation region.

3. 3. General Description of EUV Light Generation System 3.1 Configuration FIG. 1 schematically shows a configuration of an exemplary LPP type EUV light generation apparatus 1. The EUV light generation apparatus 1 may be used with at least one laser system 3 (a system including the EUV light generation apparatus 1 and the laser system 3 is hereinafter referred to as an EUV light generation system 11). As shown in FIG. 1 and described in detail below, the EUV light generation device 1 may include a chamber 2, a target supply device (eg, a droplet generator 26), and the like. The chamber 2 may be sealable. The target supply device may be attached to the chamber 2, for example. The target material supplied from the target supply device may include, but is not limited to, a combination of two or more of tin, terbium, gadolinium, lithium, and xenon.

  The wall of the chamber 2 may be provided with at least one through hole, and the pulse laser beam 32 output from the laser system 3 may pass through the through hole. Alternatively, the chamber 2 may be provided with at least one window 21 through which the pulsed laser light 32 output from the laser system 3 is transmitted. For example, an EUV collector mirror 23 having a spheroidal reflecting surface may be disposed inside the chamber 2. The EUV collector mirror 23 may have first and second focal points. For example, a multilayer reflective film in which molybdenum and silicon are alternately laminated may be formed on the surface of the EUV collector mirror 23. In the EUV collector mirror 23, for example, the first focal point is located in the plasma generation region 25, and the second focal point is located at a desired condensing position (intermediate focal point (IF) 292) defined by the specifications of the exposure apparatus. It is preferable to arrange so as to. A through hole 24 may be provided at the center of the EUV collector mirror 23.

  The EUV light generation apparatus 1 may further include an EUV light generation control system 5, a target sensor 4, and the like. The target sensor 4 may have an imaging function, and may detect the presence, trajectory, position, and the like of the target.

  Further, the EUV light generation apparatus 1 may include a connection portion 29 that allows communication between the inside of the chamber 2 and the inside of the exposure apparatus 6. A wall 291 in which an aperture is formed may be provided inside the connection portion 29. The wall 291 may be arranged such that its aperture is located at the second focal position of the EUV collector mirror 23.

  Furthermore, the EUV light generation apparatus 1 may include a laser beam traveling direction control unit 34, a laser beam focusing optical system 22, a target recovery unit 28 for recovering the droplet target 27, and the like. The laser beam traveling direction control unit 34 may include an optical element for defining the traveling direction of the laser beam and an actuator for controlling the position, posture, and the like of the optical element.

3.2 Operation Referring to FIG. 1, the pulse laser beam 31 output from the laser system 3 passes through the window 21 as the pulse laser beam 32 through the laser beam traveling direction control unit 34 and enters the chamber 2. May be. The pulse laser beam 32 travels into the chamber 2 along at least one laser beam path, is reflected by the laser beam focusing optical system 22, and is irradiated to the at least one droplet target 27 as the pulse laser beam 33. Good.

  A droplet target 27 may be output from the droplet generator 26 toward the plasma generation region 25 inside the chamber 2. The droplet target 27 can be irradiated with at least one pulsed laser beam included in the pulsed laser beam 33. The droplet target 27 irradiated with the pulse laser beam is turned into plasma, and EUV light 251 can be emitted from the plasma. The EUV light 251 may be collected and reflected by the EUV collector mirror 23. The EUV light 252 reflected by the EUV collector mirror 23 may be output to the exposure apparatus 6 through the intermediate focal point 292. One droplet target 27 may be irradiated with a plurality of pulse laser beams included in the pulse laser beam 33.

  The EUV light generation control system 5 may control the entire EUV light generation system 11. The EUV light generation control system 5 may process image data of the droplet target 27 captured by the target sensor 4. The EUV light generation control system 5 may control the output timing of the droplet target 27, the output direction of the droplet target 27, and the like, for example. Further, the EUV light generation control system 5 may control, for example, the laser oscillation timing of the laser system 3, the traveling direction of the pulse laser light 32, the condensing position of the pulse laser light 33, and the like. The various controls described above are merely examples, and other controls may be added as necessary.

4). First Embodiment 4.1 Configuration of Laser System FIG. 2 is a block diagram illustrating a configuration of an EUV light generation system according to a first embodiment of the present disclosure. The laser system 3 included in the EUV light generation system 11 includes a master oscillator 300, first to third preamplifiers 301 to 303, first and second main amplifiers 304 and 305, a prepulse laser unit 306, an optical path The adjusting unit 307 may be included.

The master oscillator 300 (oscillator) may be constituted by a CO ₂ laser device, for example. The master oscillator 300 may be configured to generate seed light of main pulse laser light. The main pulse laser beam can be converted into plasma by irradiating the target with the target.

  On the downstream side of the master oscillator 300, the first preamplifier 301, the second preamplifier 302, the third preamplifier 303, the first main amplifier 304, and the second main amplifier 305 may be arranged in this order. . The first preamplifier 301, the second preamplifier 302, the third preamplifier 303, the first main amplifier 304, and the second main amplifier 305 sequentially amplify the seed light of the main pulse laser light generated by the master oscillator 300. Then, it may be configured to output to the optical path adjustment unit 307. Each of the first preamplifier 301, the second preamplifier 302, and the third preamplifier 303 may be constituted by, for example, a slab type amplifier. Each of the first main amplifier 304 and the second main amplifier 305 may be composed of, for example, a high-speed axial flow amplifier.

  First and second beam conditioners (BF) 311 and 312 may be arranged on the upstream side and the downstream side of the second preamplifier 302, respectively. Third and fourth beam conditioners 313 and 314 may be arranged on the upstream side and the downstream side of the third preamplifier 303, respectively.

  A first beam transmitter (BD) 321 may be disposed between the first preamplifier 301 and the first beam adjuster 311. The first beam transmitter 321 may transmit the emitted light from the first preamplifier 301 to the incident position on the first beam adjuster 311.

  Between the fourth beam adjuster 314 and the first main amplifier 304, second and third beam transmitters 322 and 323 may be disposed. The second and third beam transmitters 322 and 323 may transmit the emitted light from the fourth beam adjuster 314 to the incident position on the first main amplifier 304.

  Third and fourth beam transmitters 323 and 324 may be disposed between the first main amplifier 304 and the second main amplifier 305. The third and fourth beam transmitters 323 and 324 may transmit the emitted light from the first main amplifier 304 to the incident position on the second main amplifier 305.

  Between the second main amplifier 305 and the optical path adjustment unit 307, fourth and fifth beam transmitters 324 and 325 may be arranged. The fourth and fifth beam transmitters 324 and 325 may transmit the emitted light from the second main amplifier 305 to the incident position on the optical path adjustment unit 307.

  The prepulse laser unit 306 can output prepulse laser light. By irradiating the droplet target 27 (see FIG. 1) with the pre-pulse laser beam, the droplet target 27 can be diffused and the absorption rate of the main pulse laser beam with respect to the diffused target can be improved. The prepulse laser beam output from the prepulse laser unit 306 may be incident on the optical path adjustment unit 307. The main pulse laser beam and the pre-pulse laser beam incident on the optical path adjustment unit 307 may be incident on the EUV light generation apparatus 1 via the sixth beam transmitter 326.

4.2 Module Arrangement FIG. 3A is a perspective view showing a specific arrangement of modules constituting the laser system according to the first embodiment. FIG. 3B is a perspective view showing the arrangement of the modules in the lower layer in FIG. 3A. FIG. 3C is a perspective view showing the frame in FIG. 3A. As shown in FIG. 3C, the frame may be a structure in which a plurality of beams are combined. The master oscillator 300, the first to third preamplifiers 301 to 303, the first and second main amplifiers 304 and 305, the prepulse laser unit 306, the optical path adjustment unit 307, and the first to fourth beam conditioners 311 to 111. 314 and the first to fourth beam transmitters 321 to 324 may be supported by the frame 330. Note that the sixth beam transmitter 326 and the EUV light generation apparatus 1 (see FIG. 2) may be remotely located from the components shown in FIG. 3A, and therefore the sixth beam transmitter 326 is shown in FIG. 3A. Is not listed. In FIG. 3A, a three-dimensional orthogonal axis of XYZ is defined, and a common coordinate axis is used in the subsequent drawings. The XY plane is a plane perpendicular to the direction of gravity, and the Z direction is the reverse direction of gravity.

  The frame 330 may be supported on the floor surface by at least three frame support portions 331 to 333. The frame support portions 331 to 333 may be configured by, for example, an air suspension device.

  As shown in FIG. 3A, the first preamplifier 301 and the first beam transmitter 321 may be housed in one housing. Further, the fifth beam transmitter 325, the pre-pulse laser unit 306, and the optical path adjustment unit 307 may be housed in separate housings.

  The master oscillator 300, the first preamplifier 301, the first beam transmitter 321, the second beam transmitter 322, the fifth beam transmitter 325, the prepulse laser unit 306, and the optical path adjustment unit 307 are the upper layers of the laser system 3. It may be arranged in the part. As shown in FIG. 3B, the second and third preamplifiers 302 and 303, the first and second main amplifiers 304 and 305, and the first to fourth beam adjusters 311 to 314 are arranged in the lower layer portion of the laser system 3. May be arranged.

  A housing that houses the first preamplifier 301 and the first beam transmitter 321 may be disposed adjacent to the master oscillator 300. A first beam adjuster 311 shown in FIG. 3B may be disposed below the housing in which the first preamplifier 301 and the first beam transmitter 321 are accommodated.

  As shown in FIG. 3B, a second preamplifier 302 may be disposed adjacent to the first beam adjuster 311. A second beam adjuster 312 may be disposed adjacent to the second preamplifier 302. A third beam conditioner 313 may be disposed adjacent to the second beam conditioner 312. A third preamplifier 303 may be disposed adjacent to the third beam adjuster 313. A fourth beam adjuster 314 may be disposed adjacent to the third preamplifier 303. A second beam transmitter 322 shown in FIG. 3A may be disposed above the fourth beam adjuster 314.

  As shown in FIG. 3A, a third beam transmitter 323 may be disposed adjacent to the second beam transmitter 322. The first main amplifier 304 may be disposed adjacent to the third beam transmitter 323 and at a position below the second beam transmitter 322. Further, a fourth beam transmitter 324 may be disposed adjacent to the third beam transmitter 323. A second main amplifier 305 may be disposed adjacent to the fourth beam transmitter 324. A housing that is adjacent to the fourth beam transmitter 324 and that houses the fifth beam transmitter 325, the prepulse laser unit 306, and the optical path adjustment unit 307 above the second main amplifier 305. May be arranged.

  As shown in FIG. 3B, each of the second preamplifier 302 and the third preamplifier 303 may be arranged in a state inclined by a predetermined angle θ (for example, θ = 45 °) with respect to the horizontal plane (XY plane). Good. The main pulse laser beam incident on the preamplifier arranged in such a manner may be, for example, an elliptical laser beam in which the longitudinal direction of the beam cross-sectional shape substantially coincides with the inclination direction of the preamplifier. Therefore, in the first embodiment, the first beam adjuster 311 may convert the main pulse laser beam having a substantially circular beam cross-sectional shape into a laser beam having a long beam cross-sectional shape in one direction. Then, the first beam adjuster 311 sends the main pulse laser beam to the second preamplifier 302 so that the longitudinal direction of the beam cross-sectional shape of the main pulse laser beam substantially coincides with the inclination direction of the second preamplifier 302. It may be incident.

  The second beam adjuster 312 may return the main pulse laser beam output from the second preamplifier 302 to a laser beam having a substantially circular beam cross-sectional shape. The third beam adjuster 313 may convert the main pulse laser beam having a substantially circular beam cross-sectional shape into a laser beam having a long beam cross-sectional shape in one direction. Alternatively, the second beam adjuster 312 may make the main pulse laser beam output from the second preamplifier 302 enter the third beam adjuster 313 as a laser beam having a long beam cross-sectional shape in one direction. . At this time, the divergence and beam cross-sectional area of the main pulse laser beam may be adjusted. Then, the third beam adjuster 313 causes the main pulse laser beam to enter the third preamplifier 303 so that the longitudinal direction of the beam cross section of the main pulse laser beam coincides with the tilt direction of the third preamplifier 303. May be. The fourth beam adjuster 314 may return the main pulse laser beam output from the third preamplifier 303 to a laser beam having a substantially circular beam cross-sectional shape.

  The second and third preamplifiers 302 and 303 and the first and second main amplifiers 304 and 305 may have a large amount of energy amplification of the main pulse laser beam. Therefore, these devices can be larger and heavier than the upstream master oscillator 300 and the first preamplifier 301. Therefore, these devices may be arranged in the lower layer portion of the laser system 3 in order to facilitate maintenance of the second and third preamplifiers 302 and 303 and the first and second main amplifiers 304 and 305.

  FIG. 4 is a plan view showing a specific arrangement of modules constituting the laser system. Master oscillator 300, first to third preamplifiers 301 to 303, first and second main amplifiers 304 and 305, prepulse laser unit 306, optical path adjustment unit 307, first to fourth beam conditioners 311 to 314, Modules such as the first to fourth beam transmitters 321 to 324 may be removed from the frame 330 for maintenance. For example, the master oscillator 300, the second and third preamplifiers 302 and 303, and the first and second main amplifiers 304 and 305 move parallel to the installation surface (for example, in the XY direction in FIG. 4) for maintenance. You may be able to do it. A configuration for positioning these modules with respect to the frame 330 and removing them from the frame 330 will be described below.

4.3 Main Amplifier Support Mechanism FIG. 5 is a perspective view of the first main amplifier. 6 is a perspective plan view of the first main amplifier as viewed from the direction indicated by the arrow VI in FIG. FIG. 7A is a transparent front view of the first main amplifier as viewed from the direction indicated by the arrow VIIA in FIG. 5. FIG. 8 is a see-through side view of the first main amplifier as seen from the direction indicated by the arrow VIII in FIG.

  The first main amplifier 304 that can constitute one module may include, for example, a high-speed axial flow amplifier. The high speed axial flow amplifier may include an entrance window 401, a plurality of discharge tubes 411 to 418, mirrors 421 to 428, and an exit window 402. The incident window 401 may be a transparent window through which laser light from the third beam transmitter 323 (see FIG. 3A) enters along the X axis. The emission window 402 may be a transparent window for emitting laser light to the third beam transmitter 323 along the X axis.

As shown in FIG. 6, a pair of electrodes 433 and 434 may be included on the outer periphery of each of the discharge tubes 411 to 418. Further, a mixed gas containing CO ₂ gas may be supplied to each of the discharge tubes 411 to 418 as a laser medium.

In each of the discharge tubes 411 to 418, a high frequency voltage may be applied between the electrode 433 and the electrode 434 from an external RF power supply device (not shown), thereby exciting and exciting the mixed gas containing CO ₂ gas. The laser light passing through the formed region can be amplified. The laser light enters the discharge tube 411 from the incident window 401, is reflected by the mirrors 421 to 428 (see FIG. 5), passes through the discharge tubes 412 to 418, is sequentially amplified, and is emitted along the X axis. It can be output from the window 402.

  The first main amplifier 304 may further include leg portions (support portions) 441 to 443. Leg portions (support portions) may be provided at at least three locations, and the main amplifier may be supported at three points. Desirably, the leg portion 441 may be provided at a position on the entrance window 401 and exit window 402 side of the first main amplifier 304. Further, the leg portion 442 may be provided at a position on the incident direction side of the incident light from the incident window 401 when viewed from the leg portion 441. Further, the leg portion 443 may be provided on the side opposite to the side on which the leg portions 441 and 442 are provided.

  As shown in FIG. 7A, the frame 330 may include mounts 341 to 343 on which the leg portions 441 to 443 are placed. The first main amplifier 304 may be supported by the frame 330 by placing the leg portions 441 to 443 on the mounts 341 to 343, respectively.

  A conical recess 341 a may be formed on the upper surface of the mount 341. A groove 342 a having a V-shaped cross section may be formed on the upper surface of the mount 342. The groove 342a may be formed in a direction (X-axis direction) parallel to the incident direction (X-axis direction) of the incident light from the incident window 401 and parallel to the emission direction of the emitted light from the emission window 402. The upper surface of the mount 343 may be planar.

  Since the leg portion 441 is placed on the mount 341, the leg portion 441 hardly moves in the XY directions. By placing the leg portion 442 on the mount 342, the leg portion 442 can be supported so as to be movable in a direction along the groove 342a. That is, the leg 442 can move in a direction parallel to the incident direction (X-axis direction) of the incident light from the incident window 401 and parallel to the emission direction (X-axis direction) of the emitted light from the emission window 402. Can be supported. The leg 443 can be supported so as to be movable along the upper surface of the mount 343 by being placed on the mount 343. That is, the leg 443 can be supported so as to be movable in a plane that intersects the direction of gravity.

  As shown in FIG. 6, the legs 441 and 442 are provided immediately below a line in which the axis of incident light from the incident window 401 (axis of outgoing light from the exit window 402) extends into the first main amplifier 304. May be. The leg portion 441 may be provided on the incident window 401 side (outgoing window 402 side) to position the first main amplifier 304 with respect to the frame 330.

  With the above configuration, even when the first main amplifier 304 is expanded or deformed by heat, the spatial positions of the entrance window 401 and the exit window 402 are suppressed from changing. Further, it is possible to suppress the displacement of the emission direction of the emitted light relative to the incident direction of the incident light.

  As shown in FIGS. 6 and 7A, the first main amplifier 304 is provided with a plurality of expansion / contraction mechanisms (lifting mechanisms) 461, 462, 463, 464, and wheels (guide followers) 451 are attached to these expansion / contraction mechanisms. 452, 453, 454 may be attached. The wheels 453 and 454 attached to the expansion and contraction mechanisms 463 and 464 are hidden behind the wheels 451 and 452 in FIG. The frame 330 may be provided with two rails (guides) 351 and 352 arranged in parallel. In this configuration, the expansion and contraction mechanisms 461, 462, 463, and 464 may be extended to achieve the state shown in FIGS.

  FIG. 7B is a front view showing a state in which the distance between the wheel and the main amplifier is increased by extending the telescopic mechanisms 461, 462, 463, and 464. Mounts 341 to 343 in which the legs 441 to 443 fixed to the main amplifier are fixed to the frame 330 by separating the distance between the wheels 451 to 454 and the first main amplifier 304 by the extension mechanisms 461 to 464. Get away from. Thus, the wheels 451 to 454 can travel on the rails 351 and 352, and the first main amplifier 304 can be moved with respect to the frame 330.

  Furthermore, as shown in FIG. 8, a carriage 7 may be prepared near the frame 330. For example, the carriage 7 may be provided with two rails 751 and 752 arranged in parallel. Thus, the first main amplifier 304 may be moved from a position on the frame 330 to a position on the carriage 7 and transported to a desired maintenance area.

  Further, the carriage 7 may be provided with mounts 761 to 763 arranged in the same manner as the mounts 341 to 343. The mounts 761 to 763 may be formed in a shape that allows the first main amplifier 304 to be fixed to the carriage 7. The main amplifier 304 may be moved by rails 751 and 752 to positions immediately above the mounts 761 to 763 on the carriage 7 to which the legs 441 to 443 of the main amplifier 304 correspond respectively. In this state, the distance between the wheels 451 to 454 and the first main amplifier 304 may be reduced by shortening the expansion / contraction mechanisms 461 to 464. Accordingly, the leg portions 441 to 443 can be placed on the mounts 761 to 763 on the carriage 7, respectively, and the first main amplifier 304 can be stably placed on the carriage 7.

4.4 Preamp Support Mechanism FIG. 9A is a perspective view of the second and third preamps. FIG. 9B is a perspective plan view of the second and third preamplifiers as viewed from the direction indicated by the arrow IXB in FIG. 9A. 9A and 9B, the inside of the third preamplifier 303 is shown as a perspective view, and the inside of the second preamplifier 302 is not shown, but these configurations may be the same.

  The third preamplifier 303 that can constitute one module may include, for example, a slab type amplifier. The slab amplifier may include an entrance window 501, an exit window 502, a pair of concave mirrors 503 and 504, and a pair of discharge electrodes 505 and 506.

  The incident window 501 may be a transparent window through which laser light from the third beam adjuster 313 (see FIG. 3B) is incident. The emission window 502 may be a transparent window for emitting laser light to the fourth beam adjuster 314. A high voltage may be applied between the pair of discharge electrodes 505 and 506 by a power supply device (not shown). A gaseous laser medium may be held between the discharge electrode 505 and the discharge electrode 506 in a state of being isolated from the atmosphere by a laser chamber (not shown).

  The pair of concave mirrors 503 and 504 can cause the laser light to travel zigzag a predetermined number of times between the discharge electrode 505 and the discharge electrode 506 by reflecting the laser light, thereby forming a multipath amplification optical path. The gaseous laser medium may be excited by applying a high voltage between the discharge electrodes 505 and 506. The main pulse laser beam incident from the incident window 501 is reflected by the pair of concave mirrors 503 and 504 and amplified when traveling zigzag in the excited laser medium, and can be output from the emission window 502. The incident direction of the incident light from the incident window 501 and the emission direction of the emitted light from the emission window 502 are not the same direction, but can be almost coincident directions.

  Similar to the first main amplifier 304 described with reference to FIGS. 5 to 8, the third preamplifier 303 may further include legs 541 to 543. The leg portion 541 may be provided at a position on the exit window 502 side of the third preamplifier 303. The leg 542 may be provided at a position on the incident window 501 side of the third preamplifier 303. The leg portion 543 may be provided on the side opposite to the side where the leg portions 541 and 542 are provided.

  The frame 330 may include mounts 341 to 343 on which the leg portions 541 to 543 are placed. The configuration of the mounts 341 to 343 may be the same as the configuration described with reference to FIGS. However, the groove 342 a of the mount 342 may be formed in a direction substantially coincident with the incident direction of the incident light from the incident window 501 and the emission direction of the emitted light from the exit window 502. Note that the positions of the mounts 341 and 342 may be interchanged, and the V-shaped groove and the conical depression may be installed respectively.

  As shown in FIG. 9B, the legs 541 and 542 are respectively provided immediately below the lines extending the axis of the outgoing light from the outgoing window 502 and the axis of the incoming light from the incoming window 501 into the third preamplifier 303. May be. With the above configuration, even when the third preamplifier 303 is expanded or deformed by heat, the spatial positions of the entrance window 501 and the exit window 502 are suppressed from changing. Further, it is possible to suppress the displacement of the emission direction of the emitted light relative to the incident direction of the incident light.

  As shown in FIG. 9A, the third preamplifier 303 may be provided with a plurality of expansion / contraction mechanisms 461, 462, 463, 464, and wheels 451, 452, 453, 454 may be attached to these expansion / contraction mechanisms. . The frame 330 may be provided with two rails 351 and 352 arranged in parallel. The configuration of these components may be the same as the configuration described with reference to FIGS. Furthermore, as described with reference to FIG. 8, the third preamplifier 303 may be configured to be carried on a carriage.

4.5 Beam Transmitter Support Mechanism FIG. 10A is a perspective view of a third beam transmitter. FIG. 10B is a plan view of the third beam transmitter as viewed from the direction indicated by the arrow XB in FIG. 10A.

  The third beam transmitter 323 that can constitute one module includes a first incident window 601, a first exit window 602, a second entrance window 603, a second exit window 604, To third high reflection mirrors 605 to 607 may be included.

  The first incident window 601 may be a transparent window through which laser light from the second beam transmitter 322 (see FIG. 3A) enters. The first emission window 602 may be a transparent window for emitting laser light to the first main amplifier 304. The second incident window 603 may be a transparent window through which the laser light from the first main amplifier 304 is incident. The second emission window 604 may be a transparent window for emitting laser light to the fourth beam transmitter 324.

  The first and second highly reflective mirrors 605 and 606 may be arranged so that the main pulse laser beam incident from the first incident window 601 is reflected and output from the first emission window 602. . A third highly reflective mirror 607 may be arranged so that the main pulse laser beam incident from the second incident window 603 is reflected and output from the second emission window 604. As described above, the first high reflection mirror 605, the second high reflection mirror 606, and the third high reflection mirror 607 may be configured to reflect the direction of the incident beam.

  The incident direction of incident light from the first incident window 601, the emitting direction of emitted light from the first emitting window 602, and the incident direction of incident light from the second incident window 603 may be substantially parallel. . The incident direction of the incident light from the second incident window 603 and the emission direction of the emitted light from the second emission window 604 may be substantially orthogonal. As described above, the incident angle and the reflection angle with respect to the first high reflection mirror 605, the second high reflection mirror 606, and the third high reflection mirror 607 may be about 45 degrees.

  Similar to the first main amplifier 304 described with reference to FIGS. 5 to 8, the third beam transmitter 323 may further include legs 641 to 643. The leg portion 641 is provided immediately below a line in which the axis of the incident light from the second incident window 603 and the axis of the emitted light from the second exit window 604 are extended into the third beam transmitter 323. Also good. For example, it may be provided directly under the high reflection mirror 607. The leg 642 may be provided at a position opposite to the emission direction of the emitted light from the second emission window 604 when viewed from the leg 641. The leg portion 643 may be provided on the side opposite to the side on which the leg portions 641 and 642 are provided.

  The frame 330 (see FIG. 3A) may include mounts 341 to 343 on which the legs 641 to 643 are placed. The configuration of the mounts 341 to 343 may be the same as the configuration described with reference to FIGS. Further, the groove 342 a of the mount 342 may be formed in a direction parallel to the emission direction of the emitted light from the second emission window 604.

  As described with reference to FIGS. 5 to 8, the third beam transmitter 323 may be provided with a plurality of telescopic mechanisms and wheels. Moreover, you may comprise so that the 3rd beam transmitter 323 can be carried on a trolley | bogie similarly to having demonstrated referring FIG. These transport mechanisms may not be provided if the weight of the third beam transmitter 323 is not large. The embodiment in which the windows 601 to 604 for allowing the laser beam to enter or exit the beam transmitter is shown. However, the present invention is not limited to this embodiment. When the installation space of the laser system 3 is kept at a sufficiently clean level, a through-hole through which laser light passes without being provided with each window is provided at a position corresponding to each window. It may be provided. Moreover, piping for a laser beam to pass between a beam transmitter and another module may be provided for safety regardless of the presence or absence of a window.

4.6 Master Oscillator Support Mechanism FIG. 11A is a perspective front view of the master oscillator. FIG. 11B is a perspective plan view of the master oscillator viewed from the direction indicated by arrow XIB in FIG. 11A.

  The master oscillator 300 that can constitute one module may include an output coupling mirror 701, a high reflection mirror 702, a pair of discharge electrodes 703 and 704, a Q switch 705, and an exit window 706.

The emission window 706 may be a transparent window for emitting laser light to the first preamplifier 301 (see FIG. 3A). A high voltage may be applied between the pair of discharge electrodes 703 and 704 by a power supply device (not shown). A mixed gas containing CO ₂ gas as a laser medium may be held between the discharge electrode 703 and the discharge electrode 704 by a laser chamber (not shown).

  When a high voltage is applied between the discharge electrodes 703 and 704 from the power supply device, a discharge may occur between the discharge electrodes 703 and 704. Due to the energy of this discharge, the laser medium can be excited to shift to a high energy level. When the excited laser medium subsequently shifts to a low energy level, light corresponding to the energy level difference can be emitted.

  The light emitted from the excited laser medium reciprocates between the output coupling mirror 701 and the high reflection mirror 702 constituting the optical resonator, and passes between the discharge electrodes 703 and 704 (laser gain space). Can be amplified every time. The Q switch 705 suppresses the oscillation by keeping the optical loss large until many of the atoms constituting the laser medium are in an excited state, and reduces the optical loss when many of the atoms constituting the laser medium are in an excited state. Can be reduced. By providing the Q switch 705, pulsed laser light can be generated. A part of the pulsed laser light amplified to high energy can be output via the output coupling mirror 701. The pulsed laser light that has passed through the output coupling mirror 701 can be output to the first preamplifier 301 via the emission window 706.

  Similar to the first main amplifier 304 described with reference to FIGS. 5 to 8, the master oscillator 300 may further include legs 741 to 743. The leg 741 may be provided at a position on the exit window 706 side of the master oscillator 300. The leg 742 may be provided at a position opposite to the exit direction of the emitted light from the exit window 706 with respect to the leg 741. Alternatively, the leg portion 741 may be disposed directly below the output coupling mirror 701, and the leg portion 742 may be disposed directly below the high reflection mirror 702. The leg portion 743 may be provided on the side opposite to the side on which the leg portions 741 and 742 are provided. Alternatively, the leg portion 741 may be disposed directly below the output coupling mirror 701, and the leg portion 742 may be disposed directly below the high reflection mirror 702.

  The frame 330 may include mounts 341 to 343 on which the leg portions 741 to 743 are placed. The configuration of the mounts 341 to 343 may be the same as the configuration described with reference to FIGS. However, the groove 342 a of the mount 342 may be formed in a direction parallel to the emission direction of the emitted light from the emission window 706.

  As shown in FIG. 11B, the legs 741 and 742 may be provided immediately below a line obtained by extending the axis of light emitted from the emission window 706 into the master oscillator 300. The leg portion 741 may be provided on the exit window 706 side to position the master oscillator 300 with respect to the frame 330.

  With the above configuration, even when the master oscillator 300 is expanded or deformed by heat, it is possible to suppress deviation from the axis of the outgoing light output from the outgoing window 706.

  A plurality of extension mechanisms 461, 462, 463, 464 may be attached to the master oscillator 300, and wheels 451, 452, 453, 454 may be attached to these extension mechanisms. The frame 330 may be provided with two rails 351 and 352 arranged in parallel. The configuration of these components may be the same as the configuration described with reference to FIGS.

5. Second Embodiment FIG. 12 is a perspective front view of a first main amplifier according to a second embodiment of the present disclosure. In the second embodiment, the first main amplifier 304 may include support portions 344 to 346. A conical recess 341 a may be formed on the lower surface of the support portion 344. A groove 342a having a V-shaped cross section may be formed on the lower surface of the support portion 345. The groove 342 a may be formed in a direction parallel to the incident direction of the incident light from the incident window 401 and parallel to the emission direction of the emitted light from the emission window 402. The lower surface of the support portion 346 may be planar.

  On the other hand, the frame 330 may include leg portions (mounts) 444 to 446 on which the support portions 344 to 346 are placed. The leg portions 444 to 446 may protrude upward from below the frame 330.

  Thus, the second embodiment is different from the first embodiment described with reference to FIG. 7A in that the relationship between the support portion and the mount is reversed. Other points may be the same as those of the first embodiment described with reference to FIG. 7A.

6). Third Embodiment FIG. 13 is a perspective front view of a first main amplifier according to a third embodiment of the present disclosure. FIG. 13 shows a state where the distance between the wheel and the first main amplifier 304 is increased. In the third embodiment, the expansion and contraction mechanisms 461 and 462 and the plate 465 fixed to the expansion and contraction mechanisms 463 and 464 (not shown) are pushed down together with the wheels 451 and 452 by the expansion and contraction mechanisms 461, 462, 463, and 464. May be. A through hole through which the mounts 441 to 443 can pass may be formed in the plate 465. The distance between the wheels 451 and 452 and the wheels 453 and 454 (not shown) and the first main amplifier 304 may be increased by extending the telescopic mechanism. Since the expansion / contraction mechanisms 461 to 464 are fixed to the plate 465, the main amplifier 304 may be held substantially horizontally even if the expansion / contraction speeds of the expansion / contraction mechanisms are different. Other points may be the same as those of the first embodiment described with reference to FIG. 7B.

7). Fourth Embodiment FIG. 14 is a perspective view of a first main amplifier according to a fourth embodiment of the present disclosure. In the fourth embodiment, wheels that run on the rails 351 and 352 may not be provided. The guide followers 455, 456, 457 and the guide follower 458 (not shown) may be attached to the extension mechanisms 461, 462, 463 and the extension mechanism 464 (not shown). These guide followers 455, 456, 457, 458 may be configured to run by sliding on rails 351 and 352. Other points may be the same as those of the first embodiment described with reference to FIG.

8). Fifth Embodiment FIG. 15 is a front view of a first main amplifier according to a fifth embodiment of the present disclosure. In the fifth embodiment, the rails may not be provided, and the wheels 451 and 452 may be configured to travel on any surface of the frame 330.

  As shown in FIG. 15, the frame 330 may be provided with a single guide 359. On the other hand, the first main amplifier 304 may be provided with a guide follower 459 that moves along the guide 359. The guide 359 may have a U-shaped cross section, and the guide follower 459 may be configured to move along the guide 359 while being sandwiched between the guides 359. Other points may be the same as those of the first embodiment described with reference to FIG. 7A.

9. Sixth Embodiment FIG. 16 is a side view of a first main amplifier according to a sixth embodiment of the present disclosure. In the sixth embodiment, the frame 330 may be provided with a plurality of wheels 371 to 373 instead of rails. The wheels 371 to 373 may be configured to rotate at a predetermined position on the frame 330. On the other hand, a rail 471 may be fixed to the extension mechanisms 461 and 463 of the first main amplifier 304. Rail 471 may be arranged on wheels 371-373. The first main amplifier 304 may be configured to move with the rail 471 as the wheels 371 to 373 rotate.

  Further, the carriage 7 may be provided with a plurality of wheels 771 to 773. Thus, the first main amplifier 304 may be moved from a position on the frame 330 to a position on the carriage 7 and transported to a desired maintenance area.

  Thus, the sixth embodiment differs from the first embodiment described with reference to FIG. 8 in that the relationship between the rails and the wheels is reversed. Other points may be the same as those of the first embodiment described with reference to FIG.

10. Seventh Embodiment FIG. 17 is a side view of a first main amplifier according to a seventh embodiment of the present disclosure. In the seventh embodiment, there may be no rail (guide) and wheels (guide follower). As shown in FIG. 17, an air blowing device (elevating mechanism) 475 may be provided on the lower surface of the first main amplifier 304. A skirt 476 may be provided around the air blowing device 475. By jetting high-pressure gas from the air blowing device 475, the gas pressure inside the skirt 476 may rise above atmospheric pressure, and the first main amplifier 304 may be raised. Thereby, the first main amplifier 304 may be moved from a position on the frame 330 to a position on the carriage 7 with a slight force. Other points may be the same as those of the first embodiment described with reference to FIG.

11. Eighth Embodiment FIG. 18A is an exploded perspective view showing a structure for supporting a module in an eighth embodiment of the present disclosure. FIG. 18B is a perspective view showing a structure for supporting a module in the eighth embodiment. 18A and 18B, only the legs 441 to 443 of the module are shown.

  In the eighth embodiment, conical depressions 361a to 363a may be formed on the upper surfaces of the mounts 361 to 363, respectively. The shape of the recess may be a shape other than a cone, for example, a hemispherical recess. The mount 361 may be fixed on the installation portion 361b of the frame 330 by a pin 361c or a bolt. Thereby, the leg 441 may be positioned so as not to move in the horizontal direction.

  A mounting table 362d may be fixed to the frame 330 with pins 362c or bolts. The mount 362 may be mounted on the mounting table 362d. An installation portion 362b having a step 362e and an inclination may be formed on the upper surface of the mounting table 362d. A step 362f corresponding to the step 362e may be formed on the lower surface of the mount 362. These steps 362e and 362f may be formed by, for example, a rectangular parallelepiped key and a key groove having a shape corresponding thereto. The mount 362 may not be fixed to the mounting table 362d.

  When the mount 362 is placed on the installation portion 362b of the placement table 362d, the step 362f may be pressed against the step 362e by sliding the mount 362 according to the inclination of the installation portion 362b. The installation portion 362b preferably has an inclination angle that is greater than or equal to the friction angle with respect to the horizontal plane. The mount 362 may be movable along the step 362e while being pressed against the step 362e. Thereby, the leg part 442 of the module may be able to move along the step 362e.

  The mount 363 may be placed on the installation portion 363b of the frame 330, and may not be fixed to the installation portion 363b. When the mount 363 is placed on the installation portion 363b, the mount 363 may be movable along the surface of the installation portion 363b. Thereby, the leg part 443 can be supported so that it can move with the mount 363 in a plane intersecting the direction of gravity.

  According to the eighth embodiment, since the leg portions 441 to 443 are supported by the conical depressions 361a to 363a formed in the mounts 361 to 363, the contact points between the mounts 361 to 363 and the leg portions 441 to 443 Becomes a line instead of a dot, and the load can be dispersed. Therefore, the mounts 361 to 363 and the leg portions 441 to 443 can withstand a large load of the module. Note that the ends of the leg portions 441 to 443 do not have to be round and may have a size and a shape in contact with the recess.

  Further, according to the eighth embodiment, since the upper surface of the mounting table 362d for mounting the mount 362 is inclined and the step 362e is formed, the mount 362 can be pressed against the step 362e. Therefore, the mount 362 can be accurately positioned along the step 362e. Other points may be the same as those of the first embodiment described with reference to FIG.

12 Ninth Embodiment FIG. 19 is a cross-sectional view showing a mount for supporting a module in a ninth embodiment of the present disclosure. In the ninth embodiment, instead of the mount 362 and the mounting table 362d (see FIG. 18A) in the eighth embodiment, a mount 382 mounted on an installation portion 382b having no inclination may be used. .

  A step 382e may be formed in the installation portion 382b. A step 382f corresponding to the step 382e may be formed on the lower surface of the mount 382. These steps may be formed by, for example, a key 382g fixed to the installation portion 382b with a pin 382c or a bolt, and a key groove 382h having a shape corresponding to the key 382g.

  The mount 382 may be provided with a plunger 382i biased toward the inside of the key groove 382h by an elastic member. When the mount 382 is placed on the installation portion 382b, the plunger 382i may press the key 382g. Accordingly, the step 382f may be pressed against the step 382e. The mount 382 may be movable along the step 382e (in the depth direction of FIG. 19) while being pressed against the step 382e. Thereby, the leg part 442 of a module can be supported so that it can move along the level | step difference 382e. Other points may be the same as in the eighth embodiment described with reference to FIGS. 18A and 18B.

13. Tenth Embodiment FIG. 20A is an exploded perspective view showing a structure for supporting a module in a tenth embodiment of the present disclosure. FIG. 20B is a perspective view showing a structure for supporting a module in the tenth embodiment of the present disclosure. 20C is a partial cross-sectional view as seen from the direction indicated by arrow XXC in FIG. 20B. 20A to 20C, the optical elements in the module and the windows or pipes through which the laser light passes are not shown.

  In the tenth embodiment, the frame 330 may have a plate-shaped portion in addition to the frame shape. On the side surface of the plate-shaped portion of the frame 330, a module such as the third beam transmitter 323 may be installed. The third beam transmitter 323 may be installed such that the long direction of the transmitter is in the direction of gravity. Instead of supporting the lower surface of the third beam transmitter 323 as described with reference to FIGS. 10A and 10B, in the tenth embodiment, the third beam transmitter 323 is supported on the side surface of the frame 330. May be.

  Mounts 391 and 392 on which the legs 641 and 642 of the third beam transmitter 323 are placed may be arranged on the upper surface of the plate-shaped portion of the frame 330. By placing the leg portion 641 on the mount 391, the leg portion 641 may be positioned so as not to move in the horizontal direction. By placing the leg 642 on the mount 392, the leg 642 may be supported so as to be movable in the Y direction.

  A mount 393 may be formed on the side surface of the plate-shaped portion of the frame 330. The mount 393 may be a recess formed in the frame 330. The leg portion 643 of the third beam transmitter 323 may be disposed on the surface of the third beam transmitter 323 facing the plate-shaped portion of the frame 330, and is pressed against the mount 393 and the frame 330. You may be able to move in the direction along the side of the. The flat surface 393b of the mount 393 against which the leg portion 643 is pressed is desirably a surface that passes through the centers of the mounts 391 and 392 as shown in FIG. 20C.

  In order to press the leg portion 643 against the mount 393, the bolt 643 a passes through the through holes (the large diameter portion 643 b and the small diameter portion 643 c) of the wall surface of the third beam transmitter 323 and is screwed into the frame 330. It may be. An elastic member 643e such as a spring may be disposed between the head portion 643d of the bolt 643a and the bottom surface of the large-diameter portion 643b of the through hole, and the third beam transmitter 323 may be pressed against the mount 393. In order to press the third beam transmitter 323 against the mount 393, a magnet or the like may be used instead of the bolt 643a or the like. A gap may be provided between the bolt 643a and the small diameter portion 643c so that the third beam transfer device 323 can easily move along the side surface of the frame 330.

  According to the tenth embodiment, even if the module has a height that is higher than the size of the bottom surface of the module and may fall down only by being supported on the lower surface, it can be stably supported. . Other points may be the same as those of the first embodiment described with reference to FIG.

14 Eleventh Embodiment FIG. 21 is a block diagram illustrating a configuration of an EUV light generation system according to an eleventh embodiment of the present disclosure. The laser system 3a included in the EUV light generation system 11a includes a master oscillator 300a, first, second and third preamplifiers 301a, 302a and 303a, first and second main amplifiers 304 and 305, and a prepulse laser. The unit 306 and the optical path adjustment unit 307 may be included.

  FIG. 22A is a perspective view showing a specific arrangement of modules constituting the laser system according to the eleventh embodiment. 22B is a perspective view showing the arrangement of modules in the lower layer in FIG. 22A. FIG. 22C is a perspective view showing the frame in FIG. 22A.

  The master oscillator 300a and the first preamplifier 301a may be housed in one housing. In the eleventh embodiment, each of the second and third preamplifiers 302a and 303a may be a high-speed axial flow amplifier similar to the first and second main amplifiers 304 and 305. Therefore, the first to fourth beam conditioners 311 to 314 in the first embodiment may not be provided.

  In the eleventh embodiment, a seventh beam transmitter 327 may be disposed between the first and second preamplifiers 301a and 302a. Seventh and eighth beam transmitters 327 and 328 may be arranged between the second and third preamplifiers 302a and 303a. Between the third preamplifier 303a and the first main amplifier 304, eighth, second, and third beam transmitters 328, 322, and 323 may be arranged.

  According to the eleventh embodiment, the laser system 3 can be configured compactly. The support mechanism for the various modules in the eleventh embodiment may be the same as the support mechanism in the first embodiment.

  The above description is intended to be illustrative only and not limiting. Thus, it will be apparent to one skilled in the art that modifications may be made to the embodiments of the present disclosure without departing from the scope of the appended claims.

  Terms used throughout this specification and the appended claims should be construed as "non-limiting" terms. For example, the terms “include” or “included” should be interpreted as “not limited to those described as included”. The term “comprising” should be interpreted as “not limited to what is described as having”. Also, the modifier “one” in the specification and the appended claims should be interpreted to mean “at least one” or “one or more”.

DESCRIPTION OF SYMBOLS 1 ... EUV light generation apparatus, 2 ... Chamber 3, 3a ... Laser system, 4 ... Target sensor, 5 ... EUV light generation control system, 6 ... Exposure apparatus, 7 ... Dolly, 11, 11a ... EUV light generation system, 21 DESCRIPTION OF SYMBOLS ... Window, 22 ... Laser beam condensing optical system, 23 ... EUV condensing mirror, 24 ... Through-hole, 25 ... Plasma production | generation area | region, 26 ... Droplet generator, 27 ... Droplet target, 28 ... Target collection part, 29 ... connection part 31, 32, 33 ... pulse laser beam, 34 ... laser beam traveling direction control part, 251, 252 ... EUV light, 291 ... wall, 292 ... intermediate focus, 300, 300a ... master oscillator, 301, 301a ... First preamplifier, 302, 302a, second preamplifier, 303, 303a, third preamplifier, 304, first main amplifier 305 ... second main amplifier, 306 ... pre-pulse laser unit, 307 ... optical path adjusting unit, 311 ... first beam adjuster, 312 ... second beam adjuster, 313 ... third beam adjuster, 314 ... fourth beam conditioner, 321 ... first beam transmitter, 322 ... second beam transmitter, 323 ... third beam transmitter, 324 ... fourth beam transmitter, 325 ... fifth beam Transmitter, 326 ... sixth beam transmitter, 327 ... seventh beam transmitter, 328 ... eighth beam transmitter, 330 ... frame, 331-333 ... frame support, 341-343 ... mount, 341a ... Recess, 342a ... groove, 344-346 ... support, 351, 352 ... rail (guide), 359 ... guide, 361-363 ... mount, 361a-363a ... recess, 361b-363 ... Installation part, 361c, 362c ... Pin, 362d ... Placing table, 362e ... Step, 362f ... Step, 371-373 ... Wheel (guide follower), 382 ... Mount, 382b ... Installation part, 382c ... Pin, 382e ... Step, 382f ... step, 382g ... key, 382h ... key groove, 382i ... plunger, 391-393 ... mount, 393b ... flat surface, 401 ... incident window, 402 ... outgoing window, 411-418 ... discharge tube, 421-428 ... mirror 433, 434 ... Electrodes, 441-433 ... Legs (supports), 444-446 ... Legs (mounts), 451-453 ... Wheels (guide followers), 455-459 ... Guide followers, 461-464 ... Expansion / contraction Mechanism, 465 ... Plate, 471 ... Rail, 475 ... Air blowing device, 476 ... Skirt, 501 ... Incident window , 502 ... exit window, 503 ... concave mirror, 505, 506 ... discharge electrode, 541 to 543 ... leg (support), 601 ... first entrance window, 602 ... first exit window, 603 ... second Incident window, 604 ... second exit window, 605 ... first high reflection mirror, 606 ... second high reflection mirror, 607 ... third high reflection mirror, 641 to 643 ... legs (supporting part), 643a ... bolt, 643b ... large diameter part, 643c ... small diameter part, 643d ... head, 643e ... elastic member, 701 ... output coupling mirror, 702 ... high reflection mirror, 703, 704 ... discharge electrode, 705 ... Q switch, 706 ... Outgoing window, 741 to 743 ... leg (support), 751, 752 ... rail, 761 to 763 ... mount, 771 to 773 ... wheel

4.2 Module Arrangement FIG. 3A is a perspective view showing a specific arrangement of modules constituting the laser system according to the first embodiment. FIG. 3B is a perspective view showing the arrangement of the modules in the lower layer in FIG. 3A. FIG. 3C is a perspective view showing the frame in FIG. 3A. As shown in FIG. 3C, the frame may be a structure in which a plurality of beams are combined. The master oscillator 300, the first to third preamplifiers 301 to 303, the first and second main amplifiers 304 and 305, the prepulse laser unit 306, the optical path adjustment unit 307, and the first to fourth beam conditioners 311 to 111. 314, first to fifth beam transmitter 321 to 32 5 may be supported by a frame 330. Note that the sixth beam transmitter 326 and the EUV light generation apparatus 1 (see FIG. 2) may be remotely located from the components shown in FIG. 3A, and therefore the sixth beam transmitter 326 is shown in FIG. 3A. Is not listed. In FIG. 3A, a three-dimensional orthogonal axis of XYZ is defined, and a common coordinate axis is used in the subsequent drawings. The XY plane is a plane perpendicular to the direction of gravity, and the Z direction is the reverse direction of gravity.

As shown in FIG. 3A, the first preamplifier 301 and the first beam transmitter 321 may be housed in one housing. Further, the fifth beam transmitter 325, the pre-pulse laser unit 306, and the optical path adjustment unit 307 may be housed in a separate case.

FIG. 4 is a plan view showing a specific arrangement of modules constituting the laser system. Master oscillator 300, first to third preamplifiers 301 to 303, first and second main amplifiers 304 and 305, prepulse laser unit 306, optical path adjustment unit 307, first to fourth beam conditioners 311 to 314, Modules such as the first to fifth beam transmitters 321 to 32 5 may be removed from the frame 330 for maintenance. For example, the master oscillator 300, the second and third preamplifiers 302 and 303, and the first and second main amplifiers 304 and 305 move parallel to the installation surface (for example, in the XY direction in FIG. 4) for maintenance. You may be able to do it. A configuration for positioning these modules with respect to the frame 330 and removing them from the frame 330 will be described below.

6). Third Embodiment FIG. 13 is a perspective front view of a first main amplifier according to a third embodiment of the present disclosure. FIG. 13 shows a state where the distance between the wheel and the first main amplifier 304 is increased. In the third embodiment, the expansion and contraction mechanisms 461 and 462 and the plate 465 fixed to the expansion and contraction mechanisms 463 and 464 (not shown) are pushed down together with the wheels 451 and 452 by the expansion and contraction mechanisms 461, 462, 463, and 464. May be. The plate 465 may be formed with through holes through which the leg portions 441 to 443 can pass. The distance between the wheels 451 and 452 and the wheels 453 and 454 (not shown) and the first main amplifier 304 may be increased by extending the telescopic mechanism. Since the expansion / contraction mechanisms 461 to 464 are fixed to the plate 465, the main amplifier 304 may be held substantially horizontally even if the expansion / contraction speeds of the expansion / contraction mechanisms are different. Other points may be the same as those of the first embodiment described with reference to FIG. 7B.

In order to press the leg portion 643 against the mount 393, the bolt 643 a passes through the through holes (the large diameter portion 643 b and the small diameter portion 643 c) of the wall surface of the third beam transmitter 323 and is screwed into the frame 330. It may be. An elastic member 643e such as a spring may be disposed between the head portion 643d of the bolt 643a and the bottom surface of the large-diameter portion 643b of the through hole, and the third beam transmitter 323 may be pressed against the mount 393. In order to press the third beam transmitter 323 against the mount 393, a magnet or the like may be used instead of the bolt 643a or the like. Third, as the beam Transmission 323 is easily moved along the sides of the frame 330 may be provided a gap between the bolt 643a and the small diameter portion 643c.

Claims (17)

A first module including an oscillator that oscillates laser light and a support that supports the oscillator;
A second module including a beam transmitter for transmitting laser light and a support for supporting the beam transmitter;
A third module including an amplifier that amplifies laser light and a support that supports the amplifier;
At least two modules of
A frame on which the at least two modules are mounted, the frame including a mount on which the support portion is mounted for each of the at least two modules;
Including laser system.   The laser system according to claim 1, further comprising an elevating mechanism that elevates and lowers the at least two modules with respect to the mount for each of the at least two modules. At least two guides installed in the frame;
At least two groups of guide followers that respectively support the at least two modules, the at least two groups of guide followers each moving the at least two modules by moving along the at least two guides, respectively. ,
The laser system according to claim 1, further comprising:   4. The laser according to claim 3, further comprising an elevating mechanism that raises and lowers each of the at least two modules by expanding and contracting a distance between the at least two groups of guide followers for each of the at least two modules. system.   2. The laser system according to claim 1, wherein the at least two modules are respectively disposed at a first position and a second position below the first position.   The laser system according to claim 5, wherein the module disposed at the second position has a smaller mass than the module disposed at the first position. A module including an amplifier that amplifies laser light, and first to third support portions that support the amplifier;
A frame on which the module is mounted, the frame including first to third mounts on which the first to third support portions are respectively mounted;
Including
The module is
An incident part for incident light to be incident from the first external unit;
An emission part for emitting the emitted light to the second external unit;
Further including
The first support part has a first position on the incident part side as seen from the center of gravity of the module;
The second support portion has a second position on the incident direction side of the incident light as viewed from the first position,
The laser system, wherein the third support portion is in a third position. The first mount positions the first support portion at a predetermined position;
The second mount supports the second support portion so that the second support portion can move in a direction along the incident direction of the incident light,
8. The laser system according to claim 7, wherein the third mount supports the third support portion so that the third support portion can move in a plane intersecting the direction of gravity. A module including an amplifier that amplifies laser light, and first to third support portions that support the amplifier;
A frame on which the module is mounted, the frame including first to third mounts on which the first to third support portions are respectively mounted;
Including
The module is
It further includes an emission part for emitting the emitted light to the external unit,
The first support part has a first position on the emission part side as seen from the center of gravity of the module;
The second support portion has a second position opposite to the emission direction of the emitted light when viewed from the first position;
The laser system, wherein the third support portion is in a third position. The first mount positions the first support portion at a predetermined position;
The second mount supports the second support part so that the second support part can move in a direction along the emission direction of the emitted light,
10. The laser system according to claim 9, wherein the third mount supports the third support portion so that the third support portion can move in a plane that intersects the direction of gravity. A module including an amplifier that amplifies laser light, and first to third support portions that support the amplifier;
A frame on which the module is mounted, the frame including first to third mounts on which the first to third support portions are respectively mounted;
Including
The module is
An incident part for incident light to be incident from the first external unit;
An emission part for emitting the emitted light to the second external unit;
Further including
The first support part has a first position on the incident part side as seen from the center of gravity of the module;
The second support part has a second position on the emission part side as seen from the center of gravity of the module,
The laser system, wherein the third support portion is in a third position. The first mount positions the first support portion at a predetermined position;
The second mount supports the second support part so that the second support part can move in a direction along the emission direction of the emitted light,
12. The laser system according to claim 11, wherein the third mount supports the third support portion so that the third support portion can move in a plane intersecting with the direction of gravity. The first mount positions the second support portion at a predetermined position;
The second mount supports the first support portion so that the first support portion can move in a direction along the incident direction of the incident light,
12. The laser system according to claim 11, wherein the third mount supports the third support portion so that the third support portion can move in a plane intersecting with the direction of gravity. A module including an amplifier that amplifies laser light, and first to third support portions that support the amplifier;
A frame on which the module is mounted, wherein the first to third mounts on which the first to third support portions are respectively mounted, and the first to third mounts are respectively mounted. The frame including first to third installation parts;
Including
The first mount positions the first support portion at a predetermined position of the frame;
The second mount is placed on the second installation portion so that the second mount can move along a step formed in the second installation portion, and the second installation portion is placed on a surface perpendicular to the direction of gravity. By being inclined with respect to the second mount, the second mount is pressed against the step, and the second mount is configured by positioning the second support portion at a predetermined position of the second mount. Supporting the second support portion so that the second support portion can move in a direction along the step with respect to the frame;
The third mount supports the third support portion so that the third support portion can move in a plane intersecting a gravitational direction with respect to the frame. A module including an amplifier that amplifies laser light, and first to third support portions that support the amplifier;
A frame on which the module is mounted, wherein the first to third mounts on which the first to third support portions are respectively mounted, and the first to third mounts are respectively mounted. The frame including first to third installation parts;
Including
The first mount positions the first support portion at a predetermined position of the frame;
The second mount is placed on the second installation portion so as to be movable along a step formed on the second installation portion, and is provided on the second installation portion or the second mount. The second mount is pressed against the step by the elastic member, and the second mount positions the second support portion at a predetermined position of the second mount. Supporting the second support part so that the support part can move in a direction along the step with respect to the frame;
The third mount supports the third support portion so that the third support portion can move in a plane intersecting a gravitational direction with respect to the frame. A module including a beam transmitter for transmitting laser light, and first to third support portions for supporting the beam transmitter;
A frame on which the module is mounted, the frame including first to third mounts on which the first to third support portions are respectively mounted;
Including
The first and second mounts are provided on a first surface of the frame;
The third mount is provided on a surface that is a second surface of the frame and intersects the first surface;
The first mount positions the first support portion at a predetermined position;
The second mount supports the second support portion so that the second support portion can move in a direction along a direction approaching the first mount,
The third mount is a laser system that supports the third support portion so that the third support portion can move in a direction along the second surface. A first module including an oscillator that oscillates laser light and a support that supports the oscillator;
A second module including a beam transmitter for transmitting laser light and a support for supporting the beam transmitter;
A third module including an amplifier that amplifies laser light and a support that supports the amplifier;
A frame on which at least two of the modules are mounted, the frame including a mount on which the support portion is mounted for each of the at least two modules.

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