JP2013036396A5 - - Google Patents

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Publication number
JP2013036396A5
JP2013036396A5 JP2011173434A JP2011173434A JP2013036396A5 JP 2013036396 A5 JP2013036396 A5 JP 2013036396A5 JP 2011173434 A JP2011173434 A JP 2011173434A JP 2011173434 A JP2011173434 A JP 2011173434A JP 2013036396 A5 JP2013036396 A5 JP 2013036396A5
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JP
Japan
Prior art keywords
diaphragm
tube
ring
deformable portion
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011173434A
Other languages
English (en)
Japanese (ja)
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JP5553360B2 (ja
JP2013036396A (ja
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Priority to JP2011173434A priority Critical patent/JP5553360B2/ja
Priority claimed from JP2011173434A external-priority patent/JP5553360B2/ja
Publication of JP2013036396A publication Critical patent/JP2013036396A/ja
Publication of JP2013036396A5 publication Critical patent/JP2013036396A5/ja
Application granted granted Critical
Publication of JP5553360B2 publication Critical patent/JP5553360B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011173434A 2011-08-08 2011-08-08 流量調整装置 Active JP5553360B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011173434A JP5553360B2 (ja) 2011-08-08 2011-08-08 流量調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011173434A JP5553360B2 (ja) 2011-08-08 2011-08-08 流量調整装置

Publications (3)

Publication Number Publication Date
JP2013036396A JP2013036396A (ja) 2013-02-21
JP2013036396A5 true JP2013036396A5 (https=) 2014-04-17
JP5553360B2 JP5553360B2 (ja) 2014-07-16

Family

ID=47886228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011173434A Active JP5553360B2 (ja) 2011-08-08 2011-08-08 流量調整装置

Country Status (1)

Country Link
JP (1) JP5553360B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103244392B (zh) * 2013-05-10 2015-08-19 北京京城压缩机有限公司 一种具有多缸盖的隔膜式压缩机集成缸体部件
JP7449100B2 (ja) * 2020-01-23 2024-03-13 マブチモーターオーケン株式会社 ダイヤフラムポンプ
KR102666311B1 (ko) 2022-04-05 2024-05-16 세메스 주식회사 펌프, 액 공급장치 및 기판처리장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10288160A (ja) * 1997-04-16 1998-10-27 Anest Iwata Corp 復動式ダイヤフラムポンプの流量コントロールシステム
JP2004285883A (ja) * 2003-03-20 2004-10-14 Casio Comput Co Ltd ポンプ装置

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