JP2013024719A5 - - Google Patents

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Publication number
JP2013024719A5
JP2013024719A5 JP2011159578A JP2011159578A JP2013024719A5 JP 2013024719 A5 JP2013024719 A5 JP 2013024719A5 JP 2011159578 A JP2011159578 A JP 2011159578A JP 2011159578 A JP2011159578 A JP 2011159578A JP 2013024719 A5 JP2013024719 A5 JP 2013024719A5
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JP
Japan
Prior art keywords
inspected
inspection
curved mirror
holding table
inner periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011159578A
Other languages
English (en)
Japanese (ja)
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JP2013024719A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011159578A priority Critical patent/JP2013024719A/ja
Priority claimed from JP2011159578A external-priority patent/JP2013024719A/ja
Publication of JP2013024719A publication Critical patent/JP2013024719A/ja
Publication of JP2013024719A5 publication Critical patent/JP2013024719A5/ja
Pending legal-status Critical Current

Links

JP2011159578A 2011-07-21 2011-07-21 放射状照明と曲面鏡を有する検査装置。 Pending JP2013024719A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011159578A JP2013024719A (ja) 2011-07-21 2011-07-21 放射状照明と曲面鏡を有する検査装置。

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011159578A JP2013024719A (ja) 2011-07-21 2011-07-21 放射状照明と曲面鏡を有する検査装置。

Publications (2)

Publication Number Publication Date
JP2013024719A JP2013024719A (ja) 2013-02-04
JP2013024719A5 true JP2013024719A5 (uk) 2014-09-04

Family

ID=47783242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011159578A Pending JP2013024719A (ja) 2011-07-21 2011-07-21 放射状照明と曲面鏡を有する検査装置。

Country Status (1)

Country Link
JP (1) JP2013024719A (uk)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018091759A (ja) * 2016-12-05 2018-06-14 リコーエレメックス株式会社 光切断検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7636204B1 (en) * 2007-10-30 2009-12-22 LumenFlow Corp. 360 degree view imaging system
DE102009019459B4 (de) * 2009-05-04 2012-02-02 Hommel-Etamic Gmbh Vorrichtung zur Abbildung der Innenfläche eines Hohlraumes in einem Werkstück

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