JP2013024568A - Equivalent circuit parameter measuring apparatus and equivalent circuit parameter measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure a parameter value of the same value as another measuring apparatus when a parameter of an equivalent circuit is measured for the same sample.SOLUTION: A processing section 6 executes frequency characteristic data acquisition processing, frequency characteristic data correction processing and parameter correction processing. In the frequency characteristic data acquisition processing, measurement frequency characteristic data Dindicating impedance Zand a phase θin each frequency of a sample 8 are acquired. In the frequency characteristic data correction processing, the impedance Zindicated by the acquired measurement frequency characteristic data Dis multiplied by an impedance correction coefficient (m) for correction into correction impedance Zand a phase correction value (n) is added to the phase θindicated by the measurement frequency characteristic data Dfor correction into a correction phase θ, thereby calculating correction frequency characteristic data D. In the parameter correction processing, parameter values D, D, Dof parameters of an equivalent circuit of the sample 8 are calculated on the basis of the correction frequency characteristic data Dand multiplied by parameter correction values k, k, kfor correction.

Description

  The present invention relates to an equivalent circuit parameter measuring apparatus and an equivalent circuit parameter measuring method for measuring parameters of an equivalent circuit of a sample.

  As this type of measuring apparatus, a constant measuring instrument disclosed in Patent Document 1 below is known. The constant measuring instrument includes a control unit, a terminal switching unit, an impedance measurement unit, an impedance storage unit, an impedance minimum / maximum point search unit, a T-type network conversion unit, an admittance peak point search unit, A circuit calculation unit, a parallel circuit synthesis unit, and an equivalent circuit display unit are included.

  In this constant measuring instrument, the frequency range of the impedance near the minimum point or maximum point in the impedance change measured between two terminals of the A terminal, the B terminal, and the ground terminal of the communication device is narrowed in detail. A command for re-measurement is issued, and the measured impedance measurement value between the terminals is converted into each impedance of the T-type network when the above communication device is assumed to be a T-type network, and each admittance is converted. Convert, search for the peak point, assume the series resonant circuit based on the peak point frequency and admittance, calculate the resonant circuit constant, issue the next peak point search command, and calculate the calculated circuit constant Then, it is synthesized into a parallel circuit by mode synthesis and the common mode equivalent circuit of the communication device is displayed.

  According to this constant measuring instrument, it is possible to derive a common mode equivalent circuit of a communication device in which the measurement point interval can be reduced by one digit or more as compared with the related art.

Japanese Patent Laying-Open No. 2005-62045 (pages 7-18, FIG. 1)

  By the way, when a user has a plurality of measuring devices as described above, all the measuring devices may be of the same model of the same manufacturer, but may be of different manufacturers.

  In the latter case, it is generally defined by an equivalent circuit (for example, an inductance L, a capacitance C, and a resistance R as shown in FIGS. 4 and 5) of a communication device (sample) stored in advance in a measurement device for each manufacturer. The calculation formula of the calculation algorithm for each communication device (sample) is different. In addition, even if the calculation formula of the calculation algorithm is the same, the derivation method of each constant (inductance L, capacitance C, and resistance R) used in the calculation formula may be different. For this reason, there is a problem to be solved that the same result cannot be obtained even if the parameters of the equivalent circuit for the same communication device (sample) are measured by each measuring apparatus.

  The present invention has been made to solve such a problem, and an equivalent circuit parameter measuring apparatus and an equivalent circuit capable of measuring the same parameter values as other measuring apparatuses when measuring the parameters of the equivalent circuit for the same sample. The main object is to provide a circuit parameter measurement method.

  In order to achieve the above object, the equivalent circuit parameter measuring apparatus according to claim 1 is a frequency characteristic data indicating an impedance and a phase at each predetermined frequency with respect to a reference sample measured in another measuring apparatus, and the other The input unit for inputting the parameter values of the respective parameters for the equivalent circuit of the reference sample calculated based on the frequency characteristic data in the measurement apparatus of FIG. 5, and the impedance and phase at each frequency for the sample to be measured A measurement unit for measuring frequency characteristic data; and the frequency characteristic data for the reference sample measured in the other apparatus and the calculated parameter values for the reference sample as the input frequency characteristic data and input parameter values. Input processing input via the unit, the input frequency And calculating the parameter value of each parameter for the equivalent circuit of the reference sample based on the sex data and dividing the input parameter value corresponding to the parameter value by the calculated parameter value, A parameter correction coefficient calculation process for calculating a parameter correction coefficient for, a frequency characteristic data measurement process for measuring frequency characteristic data indicating impedance and phase at each frequency with respect to the reference sample as measurement frequency characteristic data by the measurement unit, By dividing the impedance indicated by the input frequency characteristic data by the impedance indicated by the measured frequency characteristic data, an impedance correction coefficient for the impedance at each frequency is calculated, and the input frequency A processing unit for performing a characteristic data correction coefficient calculation process for calculating a phase correction value for the phase at each frequency by subtracting the phase indicated by the measurement frequency characteristic data from the phase indicated by the sex data; And the processing unit performs the frequency characteristic data measurement process for the new sample when calculating the parameters for the new sample, and sets the impedance and phase at each frequency for the sample. A frequency characteristic data acquisition process for acquiring the measured frequency characteristic data shown, and correcting the corrected impedance by multiplying the impedance indicated by the measured frequency characteristic data for the acquired new sample by the impedance correction coefficient, And complementary to the phase indicated by the measured frequency characteristic data. A frequency characteristic data correction process for calculating corrected frequency characteristic data by adding a positive value to correct the corrected phase, and a parameter value of each parameter for the equivalent circuit of the new sample based on the corrected frequency characteristic data And a parameter correction process for correcting the calculated parameter value by multiplying the calculated parameter value by the parameter correction value.

  The equivalent circuit parameter measuring device according to claim 2 is the equivalent circuit parameter measuring device according to claim 1, wherein the input unit is measured in the other measuring device via an external storage medium or a telecommunication line. The frequency characteristic data for the reference sample, and an interface circuit for inputting the parameter values of the parameters for the equivalent circuit of the reference sample calculated based on the frequency characteristic data.

  Further, the equivalent circuit parameter measuring method according to claim 3 is the frequency characteristic data indicating the impedance and phase at each predetermined frequency with respect to the reference sample measured in the other measuring device, and the other measuring device. Input processing for inputting the parameter value of each parameter for the equivalent circuit of the reference sample calculated based on the frequency characteristic data as input frequency characteristic data and input parameter value, and based on the input frequency characteristic data, The parameter correction coefficient for each parameter is calculated by calculating the parameter value of each parameter for the equivalent circuit of the reference sample and dividing the input parameter value corresponding to the parameter value by the calculated parameter value. Parameter correction coefficient calculation process Frequency characteristic data measurement processing for measuring frequency characteristic data indicating the impedance and phase at each frequency for the reference sample as measurement frequency characteristic data, and the impedance indicated by the input frequency characteristic data as the measurement frequency characteristic data The impedance correction coefficient for the impedance at each frequency is calculated by dividing by the impedance indicated by ## EQU2 ## and the phase indicated by the measured frequency characteristic data is subtracted from the phase indicated by the input frequency characteristic data. By performing the characteristic data correction coefficient calculation processing for calculating the phase correction value for the phase at each frequency, and calculating the parameters for the new sample, the frequency characteristic data for the new sample is calculated. Measurement process To obtain the measurement frequency characteristic data indicating the impedance and phase at each frequency for the sample, and the measurement frequency characteristic data for the acquired new sample. The corrected frequency characteristic data is calculated by multiplying the impedance by the impedance correction coefficient to correct the corrected impedance, and adding the phase correction value to the phase indicated by the measured frequency characteristic data to correct the corrected phase. A frequency characteristic data correction process to be performed, and a parameter value of each parameter for the equivalent circuit of the new sample is calculated based on the corrected frequency characteristic data, and the calculated parameter value is multiplied by the parameter correction value. Parameter for correcting the calculated parameter value. Data correction processing.

  According to the equivalent circuit parameter measuring apparatus according to claim 1 and the equivalent circuit parameter measuring method according to claim 3, when measuring frequency characteristic data of a new sample, an impedance correction coefficient is added to the impedance at each frequency. Multiply to correct the corrected impedance, and add the phase correction value to the phase indicated by the measured frequency characteristic data to correct the corrected phase. Based on the corrected impedance and corrected phase, a new sample equivalent circuit When the parameter value of each parameter is calculated, the parameter value for the equivalent circuit parameter for the same sample as the other measurement apparatus is measured by multiplying the parameter value by each parameter correction coefficient. Measure parameter values that are the same as the parameter values measured by other measuring devices Door can be.

  According to the equivalent circuit parameter measuring apparatus of claim 2, the frequency characteristic data of the reference sample measured by another measuring apparatus, and the reference sample calculated based on the frequency characteristic data by the other measuring apparatus. Simply connect an external storage medium that stores each parameter value for the equivalent circuit to the input unit, or connect a telecommunication line that transmits this frequency characteristic data and each parameter value to the input unit. Through the external storage medium or the telecommunication line, the frequency characteristic data and other parameter values in other measuring devices can be input in a short time and easily.

1 is a configuration diagram of an equivalent circuit parameter measurement device 1. FIG. 5 is a flowchart for explaining an operation of a correction data calculation process 50. 5 is a flowchart for explaining an operation of a parameter measurement process 60. It is a circuit diagram which shows an example of an equivalent circuit. It is a circuit diagram which shows the other example of an equivalent circuit.

  Hereinafter, an embodiment of an equivalent circuit parameter measuring apparatus 1 and an equivalent circuit parameter measuring method will be described with reference to the accompanying drawings.

  First, the configuration of the equivalent circuit parameter measurement device 1 (hereinafter also referred to as “measurement device 1”) will be described with reference to the drawings.

  As shown in FIG. 1, the measurement apparatus 1 includes an input unit 2, a measurement unit 3, an operation unit 4, a storage unit 5, a processing unit 6, and an output unit 7, and a sample as a measurement object connected to the measurement unit 3. Each of the eight equivalent circuits can be measured. In this example, as an example, it is assumed that the equivalent circuit of the sample 8 includes parameters of inductance L, capacitance C, and resistance R as shown in FIG.

The input unit 2 includes other measuring devices (although the equivalent circuit measured for the sample 8 is different from the equivalent circuit measured by the measuring device 1), the parameters L, C, R Each frequency defined in advance for a reference sample (for example, a specific normal sample 8) 8r measured by a measuring device configured to measure each of the parameters L, C, and R). Frequency characteristic data D _Fra that associates the impedance Z _ra and the phase θ _ra with each frequency thereof, and an equivalent circuit of the reference sample 8r that is calculated based on the frequency characteristic data D _Fra in another measurement apparatus. The parameter values D _Lra , D _Cra , and D _Rra for each parameter L, C, and R are input. The input unit 2 outputs the input frequency characteristic data D _Fra and the parameter values D _Lra , D _Cra , and D _Rra to the processing unit 6. Further, the input unit 2 _executes the input of the frequency characteristic data D _Fra and the parameter values D _Lra , D _Cra and D _Rra and the output to the processing unit 6 in response to a request from the processing unit 6.

In this example, as an example, the input unit 2 includes an interface circuit for an external storage medium such as a USB (Universal Serial Bus) memory, and the above-described frequency characteristics of other measurement devices stored in the external storage medium 9. Data D _Fra and parameter values D _Lra , D _Cra and D _Rra are input. The input unit 2 is configured by an interface circuit connected to various communication systems such as RS-232C, GPIB, wired LAN, and wireless LAN, and other measurement devices can communicate with the communication network according to these communication systems. It is also possible to adopt a configuration in which the frequency characteristic data D _Fra transmitted via the D and the parameter values D _Lra , D _Cra and D _Rra are input (received).

The measurement unit 3 is configured to be able to connect the sample 8 (including the reference sample 8r) via the probe 3a, and the connected sample 8 is connected to each frequency described above (the same frequency as that of other measurement devices). Frequency characteristic data D _{Frb in} which impedance Z _rb and phase θ _rb are associated with the frequency is measured. In addition, the measurement unit 3 outputs the measured frequency characteristic data D _Frb to the processing unit 6. In addition, the measurement unit 3 executes frequency characteristic data D _Frb measurement and output to the processing unit 6 in response to a request from the processing unit 6.

The operation unit 4 includes, for example, a plurality of operation keys (not shown), and outputs to the processing unit 6 command data D _cmd for causing the processing unit 6 to execute processing pre-assigned to the operated operation key. . The storage unit 5 is composed of a semiconductor memory such as a RAM, an HDD (Hard disk drive), the above-described frequency characteristic data D _{Fra of} other measurement devices, and parameter values D _Lra , D _Cra , D _Rra , The frequency characteristic data D _Frb measured by the measuring unit 3 is stored.

The processing unit 6 is constituted by a CPU, for example, and executes control on the input unit 2 and the measurement unit 3 and also executes correction data calculation processing and parameter measurement processing. Further, the processing unit 6 outputs the parameter values D _Lb , D _Cb , and D _Rb of each parameter for the equivalent circuit of the sample 8 measured in the parameter measurement process to the output unit 7. For example, the output unit 7 includes a display device such as a liquid crystal display, and displays the measured parameter values D _Lb , D _Cb , and D _Rb on the screen. Instead of the display device, the output unit 7 is configured by an interface circuit with an external device (including an external storage device such as an external storage medium), and parameter values D _Lb , D _Cb , D _Rb are stored in the external device. It can also be output.

Next, referring to the drawings, the measurement apparatus 1 measures the parameter values D _Lb , D _Cb , and D _Rb of the parameters L, C, and R, and measures the parameter values D _Lb , D _Cb , and D _Rb . I will explain.

In the measurement apparatus 1, the processing unit 6 first executes the correction data calculation process 50 shown in FIG. 2 prior to the measurement of the parameter values D _Lb , D _Cb , D _Rb . In the correction data calculation process 50, the processing unit 6 first executes an input process (step 51). In executing this input process, the frequency characteristic data D _Fra for the reference sample 8r measured in another measurement apparatus and the reference sample calculated based on the frequency characteristic data D _Fra in the other measurement apparatus. It is _assumed that an external storage medium 9 in which parameter values D _Lra , D _Cra , and D _Rra for an 8r equivalent circuit are stored is connected to the input unit 2 in advance.

In the input processing, when the processing unit 6 inputs command data D _cmd (command data for instructing reading of the frequency characteristic data D _Fra or the like from the external storage medium 9) from the operation unit 4 in which an operation on the operation key has been performed. The input unit 2 _receives (reads) the frequency characteristic data D _Fra and the parameter values D _Lra , D _Cra , and D _{Rra from} the external storage medium 9, and inputs the frequency characteristic data D _Fra and the parameters. Requests output of values D _Lra , D _Cra , and D _{Rra to} the processing unit 6.

In response to a request from the processing unit 6, the input unit 2 reads the frequency characteristic data D _Fra and the parameter values D _Lra , D _Cra , and D _Rra from the external storage medium 9 and outputs them to the processing unit 6. The processing unit 6 inputs the frequency characteristic data D _Fra and the parameter values D _Lra , D _Cra and D _Rra, and _uses the frequency characteristic data D _Fra as input frequency characteristic data (hereinafter referred to as “input frequency characteristic data D _Fra. And the parameter values D _Lra , D _Cra , D _Rra as input parameter values (hereinafter also referred to as “input parameter values D _Lra , D _Cra , D _Rra ”). Remember me. Thereby, the input process is completed.

The processing unit 6 executes a parameter correction coefficient calculation process following the input process (step 52). In this parameter correction coefficient calculation process, the processing unit 6 first sets the parameter values of the parameters L, C, and R for the equivalent circuit of the reference sample 8r based on the input frequency characteristic data D _Fra stored in the storage unit 5. D _Lra1 , D _Cra1 and D _Rra1 are calculated. In this case, the processing unit 6 uses a calculation algorithm (predetermined algorithm) for calculating the parameter values D _Lb , D _Cb , and D _Rb of the parameters L, C, and R for the equivalent circuit in the measurement apparatus 1. The parameter values D _Lb , D _Cb , D _Rb are calculated from the input frequency characteristic data D _Fra and stored in the storage unit 5 as the parameter values D _Lra1 , D _Cra1 , D _Rra1 .

Next, the processing unit 6 uses the parameter values D _Lb , D _Cb , D _Rb calculated in the parameter correction coefficient calculation process, and the input parameter values D _Lra1 , D _Rb corresponding to the parameter values D _Lb , D _Cb , D _{Rb. By} dividing _Cra1 and D _Rra1 , parameter correction coefficients k _L (= D _Lra1 / D _Lb ), k _C (= D _Cra1 / D _Cb ), k _R (= D _Rra1 ) for each parameter L, C, R / D _Rb ) is calculated and stored in the storage unit 5. Thereby, the parameter correction coefficient calculation process is completed.

Subsequently, the processing unit 6 executes frequency characteristic data measurement processing (step 53). In the frequency characteristic data measurement process, first, the reference sample 8r is connected to the measurement unit 3 via each probe 3a. In this case, the reference sample 8r is the same as the reference sample 8r used when the frequency characteristic data D _Fra or the like is measured in another measuring apparatus (the same reference sample 8r or another reference exhibiting the same characteristics). Sample 8r) is used. In this state, the processing unit 6 sends the command data D _cmd (frequency characteristic data D _{Fb of the} sample 8 to the measurement unit 3 (frequency characteristic data D for the reference sample 8r) from the operation unit 4 on which the operation key is operated. _Frb ) is input to the measurement unit 3, the frequency characteristic data D _Frb for the reference sample 8r is measured, and the measured frequency characteristic data D _{Frb to} the processing unit 6 is input to the measurement unit 3. Request output.

In response to a request from the processing unit 6, the measurement unit 3 measures frequency characteristic data D _Frb (impedance Z _rb and phase θ _rb at each frequency) for the reference sample 8 r and outputs the frequency characteristic data D _Frb to the processing unit 6. . Processing unit 6 inputs the frequency characteristic data D _Frb, the frequency characteristic data D _Frb as measured frequency characteristic data (hereinafter, also referred to as "measurement frequency characteristic data D _Frb") is stored in the storage unit 5. The reference sample 8r is removed from the measurement unit 3 after the measurement unit 3 measures the frequency characteristic data D _Frb . Thereby, the frequency characteristic data measurement process is completed.

Next, the processing unit 6 executes a characteristic data correction coefficient calculation process (step 54). In this characteristic data correction coefficient calculation process, first, the processing unit 6 uses the impedance Z _ra indicated by the input frequency characteristic data D _Fra at each frequency as the impedance Z _rb indicated by the measured frequency characteristic data D _Frb at the corresponding frequency. By dividing, an impedance correction coefficient m (= Z _ra / Z _rb ) for the impedance Z _{rb at} each frequency is calculated and stored in the storage unit 5. Further, the processing unit 6 subtracts the phase θ _rb indicated by the measured frequency characteristic data D _Frb at the corresponding frequency from the phase θ _ra indicated by the input frequency characteristic data D _Fra at each frequency, thereby _obtaining a phase at each frequency. theta _rb stores calculated in the storage unit 5 the phase correction value n (= θ _ra -θ _rb) for. Thereby, the characteristic data correction coefficient calculation process is completed, and the correction data calculation process 50 is also completed. As described above, the measuring apparatus 1 is in a state where the parameters L, C, and R of the equivalent circuit for the new sample 8 can be calculated.

  The impedance correction coefficient m calculated in this manner generally has a value that differs for each frequency, and the phase correction value n also generally has a value that differs for each frequency.

Next, the measurement operation of the parameter values D _Lb , D _Cb , and D _Rb of the parameters L, C, and R for the equivalent circuit of the new sample 8 by the measurement apparatus 1 will be described.

  In the measurement apparatus 1, the processing unit 6 executes the parameter measurement process 60 shown in FIG. 3 while the sample 8 is connected to the measurement unit 3. In the parameter measurement process 60, the processing unit 6 first executes a frequency characteristic data acquisition process (step 61).

In this frequency characteristic data acquisition process, the processing unit 6 receives the command data D _cmd (measurement (acquisition) of the frequency characteristic data D _Fb of the sample 8 from the measurement unit 3) from the operation unit 4 on which the operation key is operated. When the command data to be instructed) is input, the measurement unit 3 is requested to measure the frequency characteristic data D _Fb for the sample 8 and to output the measured frequency characteristic data D _{Fb to} the processing unit 6.

The measurement unit 3 measures the frequency characteristic data D _Fb (impedance Z _b and phase θ _b at each frequency) for the sample 8 in response to a request from the processing unit 6, and outputs it to the processing unit 6. Processing unit 6, the input frequency characteristic data D _Fb (acquired) that stores the frequency characteristic data (measurement frequency characteristic data) D _Fb in the storage unit 5. Thereby, the frequency characteristic data acquisition process is completed.

Next, the processing unit 6 executes frequency characteristic data correction processing (step 62). This frequency characteristic data correction processing, the processing unit 6, the correction impedance Z _b1 is multiplied by the impedance correction factor m the impedance Z _b at each frequency represented by the measured frequency characteristic data D _Fb for new samples 8 obtained And the phase correction value n is added to the phase θ _b indicated by the measured frequency characteristic data D _Fb to correct the correction phase θ _b1 . Further, the correction impedance Z _b1 and the correction phase θ _b1 calculated by this correction are stored in the storage unit 5 as the correction frequency characteristic data D _Fb1 .

As a result, the corrected impedance Z _b1 and the corrected phase θ _b1 obtained by the frequency characteristic data correction process can be obtained by using the sample 8 measured by the measuring apparatus 1 with another measuring apparatus (in the above-described step 51, the input unit 2 is connected). The frequency characteristic data D _Fra input via the signal and the measurement values measured by the parameter values D _Lra , D _Cra , and D _Rra ) are matched (aligned) with the impedance Z _a1 and the correction phase θ _a1 obtained. ).

Subsequently, the processing unit 6 executes a parameter correction process (step 63). In this parameter correction process, the processing unit 6 first calculates the parameter values D _Lb1 , D _Cb1 , and D _Rb1 of the parameters L, C, and R for the equivalent circuit of the sample 8 based on the corrected frequency characteristic data D _Fb1. To do. Next, the processing unit 6 multiplies the calculated parameter values D _Lb1 , D _Cb1 , and D _Rb1 by parameter correction coefficients k _L , k _C , and k _R for the parameters L, C, and R read from the storage unit 5. As a result, the parameter values D _Lb1 , D _Cb1 , D _Rb1 are corrected to the final parameter values D _Lb , D _Cb , D _Rb for the parameters L, C, R and stored in the storage unit 5. Thereby, the parameter measurement process 60 is completed.

As a result, the parameter values D _Lb , D _Cb , and D _Rb obtained by this parameter correction processing are obtained by using the sample 8 being measured by the measuring device 1 through another measuring device (in step 51 described above, via the input unit 2). And the parameter values D _La , D _Ca , and D _Ra obtained when the frequency characteristic data D _Fra and the parameter values D _Lra , D _Cra , and D _Rra are measured).

Finally, the processing unit 6 displays the parameter values D _Lb , D _Cb , and D _Rb of the parameters L, C, and R of the calculated (measured) equivalent circuit of the sample 8 on the screen of the display device as the output unit 7. Let

As described above, in this measuring apparatus 1 and equivalent circuit parameter measuring method, the frequency characteristic data (input frequency characteristic data) D _Fra of the reference sample 8r and the equivalent circuit of the reference sample 8r measured in another measuring apparatus are parameters. The L, C, R parameter values (input parameter values) D _Lra , D _Cra , D _Rra and the parameters L, C, R for the equivalent circuit calculated by the measuring apparatus 1 based on the input frequency characteristic data D _Fra Parameter correction coefficients k _L , k _C , and k _R for the parameters _L , _C , and _R are calculated based on the parameter values D _Lra1 , D _Cra1 , and D _Rra1 . Further, based on the frequency characteristic data D _Frb of the reference sample 8r measured by the measurement apparatus 1 and the frequency characteristic data (input frequency characteristic data) D _{Fra of} the reference sample 8r measured by another measurement apparatus, the impedance Z _rb An impedance correction coefficient m and a phase correction value n of the phase θ _rb are calculated. Further, when the frequency characteristic data (measurement frequency characteristic data) D _Fb of the new sample 8 is measured, the impedance Z _b at each frequency indicated by the measurement frequency characteristic data D _Fb is multiplied by the impedance correction coefficient m to be corrected. When the measurement is performed by the other measurement device described above by correcting to the impedance Z _b1 and adding the phase correction value n to the phase θ _b indicated by the measurement frequency characteristic data _DFb to correct the correction phase θ _b1 The parameters L, C, R of the equivalent circuit of the new sample 8 are matched with the obtained impedance Z _a1 and the correction phase θ _a1 and based on the impedance Z _a1 and the correction phase θ _a1 (frequency characteristic data D _Fb1 ). parameter values _{D Lb1,} D _Cb1, calculates the _{D Rb1,} finally, the parameter value _{D Lb1} D _{Cb1, D Rb1} each parameter correction coefficient _{k L,} k C, _{k by R} multiplying the parameter values _D La obtained when measuring the sample 8 in the above other measuring _{device, D} Ca, D _The parameter values D _Lb , D _Cb , and D _Rb that match _Ra are corrected.

Therefore, according to the measuring apparatus 1 and the equivalent circuit parameter measuring method, when the parameter values for the parameters L, C, and R of the equivalent circuit for the same sample 8 as the other measuring apparatuses are measured, The parameter values D _Lb , D _Cb , D _Rb having the same values as the measured parameter values D _La , D _Ca , D _Ra can be measured.

Further, according to the measuring apparatus 1, the input unit 2 is configured by an interface circuit that inputs data stored in the external storage medium 9, so that the frequency characteristics of the reference sample 8r measured by another measuring apparatus are obtained. Data D _Fra and an external storage medium in which parameter values D _Lra , D _Cra , and D _Rra for the equivalent circuit of the reference sample 8r calculated based on the frequency characteristic data D _Fra in the other measurement apparatus are stored 9 is connected to the input unit 2 and the frequency characteristic data D _Fra and other parameter values D _Lra , D _Cra , and D _Rra in other measuring devices can be obtained in a short time via the external storage medium 9. Easy input.

In the above example, the frequency characteristic data D _Fra measured by another measuring apparatus and the parameter values D _Lra , D _Cra , D _Rra about the equivalent circuit of the reference sample 8r are input to one measuring apparatus 1. Thus, when the parameter values for the parameters L, C, and R of the equivalent circuit for the same sample 8 as the other measuring apparatus are measured by one measuring apparatus 1, the parameter value D _La measured by the other measuring apparatus , D _Ca , D _Ra are configured so as to be able to measure parameter values D _Lb , D _Cb , D _Rb having the same values, but frequency characteristic data D _Fra measured by other measuring devices, and each parameter value D _{Lra, D Cra,} enter the _{D Rra} the plurality of measuring devices, in the same manner as the measuring device 1 described above in the plurality of measuring devices, the sample 8 Each parameter L for valence circuit, C, by the parameter values of R measured (calculated), the parameter value D _La measured by the other measuring _{apparatuses, D Ca,} the plurality of parameter values with the same value as D _Ra It can also comprise so that it can measure with this measuring device.

  In addition, the measurement apparatus 1 and other measurement apparatuses have been described with examples of calculating the parameter values of the equivalent circuit including the three parameters L, C, and R. However, the three parameters L, C, and R It can also be configured to calculate each parameter of the equivalent circuit including at least one of them.

1 Measuring device
2 Input section
3 Measurement unit
6 processing section
8 Sample 8r Reference sample DFb Measurement frequency characteristic data DFb1 Correction frequency characteristic data DFra Input frequency characteristic data DFrb Measurement frequency characteristic data DLa, DCa, DRa Parameter value DLb, DCb, DRb Parameter value DLb1, DCb1, DRb1 Parameter value DLra, DCra, DRra parameter value DLra1, DCra1, DRra1 parameter value kL, kC, kR Parameter correction coefficient
m Impedance correction factor
n Phase correction value Za1 impedance Zb impedance Zb1 correction impedance Zra impedance Zrb impedance θa1 correction phase θb phase θb1 correction phase θra phase θrb phase

Claims (3)

Frequency characteristic data indicating impedance and phase at each predetermined frequency for a reference sample measured in another measurement apparatus, and the reference sample calculated based on the frequency characteristic data in the other measurement apparatus An input unit for inputting parameter values of each parameter for the equivalent circuit;
A measurement unit that measures frequency characteristic data indicating the impedance and phase at each frequency for the sample to be measured;
Input processing for inputting the frequency characteristic data for the reference sample measured in the other apparatus and the calculated parameter values for the reference sample as input frequency characteristic data and input parameter values via the input unit, By calculating the parameter value of each parameter for the equivalent circuit of the reference sample based on the input frequency characteristic data, and by dividing the input parameter value corresponding to the parameter value by the calculated parameter value, Parameter correction coefficient calculation process for calculating a parameter correction coefficient for each parameter, Frequency characteristic data measurement process for measuring frequency characteristic data indicating impedance and phase at each frequency for the reference sample as measurement frequency characteristic data by the measurement unit , The above By dividing the impedance indicated by the frequency characteristic data by the impedance indicated by the measured frequency characteristic data, an impedance correction coefficient for the impedance at each frequency is calculated, and the phase indicated by the input frequency characteristic data A processing unit for performing a characteristic data correction coefficient calculation process for calculating a phase correction value for the phase at each frequency by subtracting the phase indicated by the measured frequency characteristic data from
When the processing unit calculates the parameters for a new sample,
Frequency characteristic data acquisition processing for executing the frequency characteristic data measurement process for the new sample and acquiring the measurement frequency characteristic data indicating the impedance and phase at each frequency for the sample;
The impedance indicated by the measured frequency characteristic data for the acquired new sample is multiplied by the impedance correction coefficient to correct the corrected impedance, and the phase indicated by the measured frequency characteristic data is corrected to the phase correction value. Is added to correct the corrected phase, and the frequency characteristic data correction process for calculating the corrected frequency characteristic data,
The parameter value of each parameter for the new equivalent circuit of the new sample is calculated based on the corrected frequency characteristic data, and the calculated parameter value is multiplied by the parameter correction value to obtain the calculated parameter value. An equivalent circuit parameter measurement device that executes parameter correction processing for correction.   The input unit, through an external storage medium or an electric communication line, the frequency characteristic data of the reference sample measured in the other measurement device, and the reference sample calculated based on the frequency characteristic data The equivalent circuit parameter measuring device according to claim 1, comprising an interface circuit for inputting the parameter value of each parameter for the equivalent circuit. Frequency characteristic data indicating impedance and phase at each predetermined frequency for a reference sample measured in another measurement apparatus, and the reference sample calculated based on the frequency characteristic data in the other measurement apparatus Input processing for inputting the parameter values of each parameter for the equivalent circuit as input frequency characteristic data and input parameter values;
Based on the input frequency characteristic data, the parameter value of each parameter for the equivalent circuit of the reference sample is calculated, and by dividing the input parameter value corresponding to the parameter value by the calculated parameter value, A parameter correction coefficient calculation process for calculating a parameter correction coefficient for each parameter;
Frequency characteristic data measurement processing for measuring frequency characteristic data indicating impedance and phase at each frequency for the reference sample as measured frequency characteristic data;
By dividing the impedance indicated by the input frequency characteristic data by the impedance indicated by the measured frequency characteristic data, an impedance correction coefficient for the impedance at each frequency is calculated and indicated by the input frequency characteristic data. A characteristic data correction coefficient calculation process for calculating a phase correction value for the phase at each frequency by subtracting the phase indicated by the measured frequency characteristic data from the phase;
When calculating each parameter for a new sample,
Frequency characteristic data acquisition processing for executing the frequency characteristic data measurement process for the new sample and acquiring the measurement frequency characteristic data indicating the impedance and phase at each frequency for the sample;
The impedance indicated by the measured frequency characteristic data for the acquired new sample is multiplied by the impedance correction coefficient to correct the corrected impedance, and the phase indicated by the measured frequency characteristic data is corrected to the phase correction value. Is added to correct the corrected phase, and the frequency characteristic data correction process for calculating the corrected frequency characteristic data,
The parameter value of each parameter for the new equivalent circuit of the new sample is calculated based on the corrected frequency characteristic data, and the calculated parameter value is multiplied by the parameter correction value to obtain the calculated parameter value. An equivalent circuit parameter measurement method for executing parameter correction processing for correction.

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