JP2012522235A - 導波路集積型光検出器 - Google Patents

導波路集積型光検出器 Download PDF

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Publication number
JP2012522235A
JP2012522235A JP2012502682A JP2012502682A JP2012522235A JP 2012522235 A JP2012522235 A JP 2012522235A JP 2012502682 A JP2012502682 A JP 2012502682A JP 2012502682 A JP2012502682 A JP 2012502682A JP 2012522235 A JP2012522235 A JP 2012522235A
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JP
Japan
Prior art keywords
layer
waveguide
radiation
integrated photodetector
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2012502682A
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English (en)
Japanese (ja)
Other versions
JP2012522235A5 (enExample
Inventor
ポル・ファン・ドルぺ
ピーテル・ネーテンス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Katholieke Universiteit Leuven
Interuniversitair Microelektronica Centrum vzw IMEC
Original Assignee
Katholieke Universiteit Leuven
Interuniversitair Microelektronica Centrum vzw IMEC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Katholieke Universiteit Leuven, Interuniversitair Microelektronica Centrum vzw IMEC filed Critical Katholieke Universiteit Leuven
Publication of JP2012522235A publication Critical patent/JP2012522235A/ja
Publication of JP2012522235A5 publication Critical patent/JP2012522235A5/ja
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12138—Sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Integrated Circuits (AREA)
JP2012502682A 2009-03-31 2010-03-31 導波路集積型光検出器 Withdrawn JP2012522235A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16499309P 2009-03-31 2009-03-31
US61/164,993 2009-03-31
PCT/EP2010/054372 WO2010115828A1 (en) 2009-03-31 2010-03-31 Waveguide integrated photodetector

Publications (2)

Publication Number Publication Date
JP2012522235A true JP2012522235A (ja) 2012-09-20
JP2012522235A5 JP2012522235A5 (enExample) 2012-11-01

Family

ID=42617403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012502682A Withdrawn JP2012522235A (ja) 2009-03-31 2010-03-31 導波路集積型光検出器

Country Status (4)

Country Link
US (1) US20120006981A1 (enExample)
EP (1) EP2414879A1 (enExample)
JP (1) JP2012522235A (enExample)
WO (1) WO2010115828A1 (enExample)

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US8649014B2 (en) * 2009-10-02 2014-02-11 Lehigh University Vertical plasmonic Mach-Zehnder interferometer
US8829633B2 (en) 2012-05-03 2014-09-09 The Board Of Trustees Of The Leland Stanford Junior University Self-aligned semiconductor ridges in metallic slits as a platform for planar tunable nanoscale resonant photodetectors
WO2015050602A1 (en) 2013-06-25 2015-04-09 The Trustees Of Columbia University In The City Of New York Integrated photonic devices based on waveguides patterned with optical antenna arrays
US9231131B2 (en) 2014-01-07 2016-01-05 International Business Machines Corporation Integrated photodetector waveguide structure with alignment tolerance
KR102122963B1 (ko) 2014-01-17 2020-06-15 삼성전자주식회사 광학 소자 및 광학 소자로부터의 광의 진행 방향을 제어하는 방법
CA2951550A1 (en) 2014-06-09 2015-12-17 Stc.Unm Integrated bound-mode spectral/angular sensors
US11480463B2 (en) 2014-06-09 2022-10-25 Unm Rainforest Innovations Integrated bound-mode spectral/angular sensors
KR102429868B1 (ko) * 2014-12-04 2022-08-05 삼성전자주식회사 플라즈몬 비아를 이용한 광 인터커넥션 소자
US10424733B2 (en) * 2016-11-25 2019-09-24 National University Of Singapore Interconnect structure and method for on-chip information transfer
WO2020180630A1 (en) * 2019-03-01 2020-09-10 California Institute Of Technology Waveguide integrated plasmon assisted field emission detector
CN119786929B (zh) * 2024-12-06 2025-11-25 天津大学 双地面无金属通孔全金属集成波导结构
CN120232485B (zh) * 2025-06-03 2025-08-22 山东省科学院海洋仪器仪表研究所 一种基于纳米狭缝限域效应的溶液-界面测量装置及制备方法和测量方法

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US7351374B2 (en) * 2000-10-17 2008-04-01 President And Fellows Of Harvard College Surface plasmon enhanced illumination apparatus having non-periodic resonance configurations
DK1370690T3 (da) * 2001-03-16 2012-07-09 Kalim Mir Arrays og fremgangsmåder til anvendelse heraf
US20080099667A1 (en) * 2001-08-14 2008-05-01 President And Fellows Of Harvard College Methods and apparatus for sensing a physical substance
US7027689B2 (en) * 2003-01-24 2006-04-11 Lucent Technologies Inc. Optical routers based on surface plasmons
US20050031278A1 (en) * 2003-05-16 2005-02-10 Xiaolei Shi Near-field sub-wavelength apertures
US20070253051A1 (en) * 2003-09-29 2007-11-01 Kunihiko Ishihara Optical Device
WO2005052644A2 (en) * 2003-11-21 2005-06-09 Perkinelmer Las, Inc. Optical device integrated with well
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Publication number Priority date Publication date Assignee Title
WO2015030518A1 (ko) * 2013-09-02 2015-03-05 삼성전자 주식회사 가변성 나노 안테나와 그 제조 및 방법
US9904077B2 (en) 2013-09-02 2018-02-27 Samsung Electronics Co., Ltd. Tunable nano-antenna and methods of manufacturing and operating the same

Also Published As

Publication number Publication date
US20120006981A1 (en) 2012-01-12
WO2010115828A1 (en) 2010-10-14
EP2414879A1 (en) 2012-02-08

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