JP2012233564A - Gate valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heat exchanger for cooling a valve element, and to connect a passage for cooling water in the heat exchanger with a cooling water supply passage inside a main rod simply by a method capable of relatively changing without causing liquid leak.SOLUTION: The gate valve includes: a valve body 5 having an opening part 2; an opening and closing cylinder 6 for contacting and parting the valve element 5 to the opening part 2; a main cylinder 7 for changing the position of the valve element 5 to the position facing the opening part 2 and to the position not facing; and a heat exchanger 8 for cooling the valve 5. The opening and closing cylinder 6 is mounted on a top end of a main rod 13 of the main cylinder 7. The heat exchanger 8 is mounted to an opening and closing rod 25 of the opening and closing cylinder 6. The valve body 5 is mounted to the heat exchanger 8, and extensible and fluid tight bellows joints 52a, 52b for supplying and discharging are used to connect between inlet 48a and an outlet 48b for cool water of a cool water passage 48 in the heat exchanger 8 and a cool water supply passage 50 and a cool water discharge passage 51 in the main rod 13 respectively.

Description

  The present invention relates to a gate valve used for opening and closing an opening of a process chamber in a semiconductor manufacturing apparatus or the like.

For example, in a semiconductor manufacturing apparatus, a gate valve is used to open and close an opening leading to a process chamber. This gate valve generally contains a valve body in a valve box having the opening, the valve body is attached to the tip of the main rod, the main rod is moved up and down by the main cylinder, and a cam or the like is used. By performing a tilting operation with a tilting mechanism, the valve body is brought into contact with and separated from a valve seat portion around the opening portion to open and close the opening portion.
However, the type of gate valve that opens and closes the opening by tilting the main rod in this way is difficult to make the entire valve body evenly contact the valve seat portion, so the seal is likely to be uneven, especially the upper and lower portions of the opening. This tendency becomes stronger when the width is large.

  Therefore, an opening / closing cylinder is used instead of the tilting mechanism, the opening / closing cylinder is attached to the tip of the main rod, the valve body is attached to the opening / closing rod of the opening / closing cylinder, and the valve body is attached to the opening / closing rod by the opening / closing rod. A gate valve (see Patent Document 1) that opens and closes the opening by moving it back and forth toward the opening has also been proposed. This type of gate valve has the advantage that the valve body can be brought into contact with the valve seat portion evenly, so that a uniform sealing force can be obtained as a whole, and even if the opening is large, the sealing performance is excellent. is there.

On the other hand, when the opening of the process chamber is large, there is a problem that the valve body is heated by the radiant heat from the work in the process chamber and the temperature is likely to rise. For this reason, it is necessary to suppress the temperature rise of the valve body to a certain limit or less (for example, 120 ° C. or less).
This problem can be solved by providing a cooling mechanism for the valve body and cooling the valve body with cooling water. For this purpose, a cooling water passage is formed inside the valve body, and the cooling is performed. Cooling water must be supplied to the water passage through a cooling water supply passage formed inside the main rod.

  However, when such a cooling mechanism is provided, when the gate valve is of a type that opens and closes the opening by tilting the main rod, the valve body is directly attached to the main rod. There is no special problem because the cooling water passage and the cooling water supply path can be directly communicated with each other. However, in the case of a gate valve that opens and closes the valve body by an open / close cylinder, the main valve is used. Since the rod and the valve body are relatively displaced, the cooling water passage and the cooling water supply passage cannot be directly communicated with each other. For this reason, it is necessary to connect the cooling water passage and the cooling water supply passage simply and by some method capable of relative displacement so as not to cause liquid leakage.

JP 2003-148635 A

  Accordingly, an object of the present invention is to provide a cooling mechanism for cooling the valve body in a gate valve of a type that opens and closes the valve body with an opening / closing cylinder, and inside the cooling water passage formed on the valve body side and the main rod. An object of the present invention is to connect the formed cooling water supply path with a relatively displaceable method so as not to cause liquid leakage.

In order to achieve the above object, the gate valve of the present invention includes a valve body that opens and closes an opening that leads to a process chamber, an opening and closing cylinder that contacts and separates the valve body from a valve seat around the opening, and the valve body. And a heat exchanger that cools the valve body. The main cylinder is displaced to a position facing the opening and a position not facing the opening.
The main cylinder has a main rod that moves forward and backward by the action of air pressure, and the opening and closing cylinder is attached to a valve body mounting portion at the tip of the main rod, and the opening and closing cylinder moves forward and backward by the action of air pressure. An opening / closing rod, and the heat exchanger is attached to the opening / closing rod, and the valve body is attached to the heat exchanger. The heat exchanger includes a cooling water passage through which cooling water flows, and the cooling A cooling water inlet that leads to one end of the water passage and a cooling water outlet that leads to the other end, a cooling water supply passage and a cooling water discharge passage are provided inside the main rod, and the valve of the main rod The body attachment portion has a supply connection port for sending the cooling water from the cooling water supply path toward the cooling water inlet, and the cooling water from the cooling water outlet to the cooling water discharge path. Accept to return The outlet connection port is open, and the cooling water inlet and cooling water outlet of the heat exchanger, and the supply connection port and the discharge connection port of the valve body mounting portion are extendable and liquid-tight. And a bellows joint for discharging.

  Preferably, in the present invention, the supply and discharge bellows joints are arranged in parallel at a position closer to the main cylinder side than a position at which the opening / closing cylinder is mounted in the valve body mounting portion of the main rod. It is that you are.

  Further, in the present invention, one end of the supply and discharge bellows joints is connected to the valve body mounting portion via one joint connection member, and the joint connection member is connected to each bellows joint for supply. And a relay hole for discharge, and a contact portion where the joint connecting member and the valve body mounting portion contact each other includes the supply and discharge relay hole and the supply and discharge connection port. Two inner seal members that individually surround the portion to which the two are connected, and an outer seal member that collectively surrounds the two inner seal members, and the inner seal member and the outer seal member The area in between may be open to the outside through the drainage passage inside the main rod.

Preferably, in the present invention, the open / close cylinder is a spring return type single-acting cylinder in which a piston and an open / close rod are moved back and forth by air pressure and a return spring, and a pressure acting chamber on one side of the piston is provided on the main rod. The spring chamber communicating with the internal air supply passage and provided with the return spring on the other side of the piston is open to the atmosphere through the air release passage inside the main rod.
In this case, preferably, the drainage passage is communicated with the atmosphere release passage inside the main rod, so that the atmosphere release passage has a part of the drainage passage.

  In the present invention, the main rod has a cylindrical shape, and inside the main rod, a cooling water supply pipe that forms the cooling water supply path, a cooling water discharge pipe that forms a cooling water discharge path, and an air supply path It is desirable that an air supply pipe for forming the air and an air release pipe for forming the air release passage are accommodated.

  In the present invention, a heat shield plate that shields heat from another chamber adjacent to the process chamber is provided on the side of the valve body mounting portion of the main rod opposite to the side on which the valve body is mounted. The heat shield plate may be fixed and may have therein a second cooling water passage through which the cooling water flows.

  The heat shield plate has a second cooling water inlet and a second cooling water outlet communicating with the second cooling water passage, and the second cooling water inlet is the discharge connection port of the valve body mounting portion. And the second cooling water outlet is connected to the cooling water discharge passage so that the second cooling water passage is connected in series to the cooling water passage of the heat exchanger. Is desirable.

  In addition, the contact portion where the heat shield plate and the valve body mounting portion abut is connected to the second cooling water inlet and the discharge connection port, and the second cooling water outlet. And the cooling water discharge path are connected with two inner seal members individually surrounding each of the connection portions and an outer seal member surrounding the two inner seal members together. The region between the inner seal member and the outer seal member may be communicated with the atmosphere release passage through a second drain passage inside the main rod.

  According to the present invention, the heat exchanger is attached to the valve body, and the heat exchanger is moved forward and backward together with the valve body by the open / close cylinder, so that the valve body is reliably cooled by the heat exchanger. The temperature rise can be suppressed and the cooling water passage of the heat exchanger and the cooling water supply passage and the cooling water discharge passage inside the main rod are connected to each other through a bellows joint. Even if the heat exchanger is displaced relative to the main rod together with the valve body, the expansion and contraction of the bellows joint ensures that the cooling water passage, the cooling water supply passage, and the cooling water discharge passage are in a liquid state. It can be connected in an orderly manner to prevent leakage.

In 1st Embodiment of the gate valve which concerns on this invention, it is a front view which shows the state which the valve body displaced to the position which is not opposite to an opening part. It is a side view of FIG. It is a bottom view of FIG. It is an expanded sectional view in the IV-IV line of FIG. It is sectional drawing in the VV line | wire of FIG. FIG. 3 is a partially enlarged view of FIG. 2. It is an expanded sectional view in the VII-VII line of FIG. It is sectional drawing in the VIII-VIII line of FIG. It is a partially broken side view which shows 2nd Embodiment of the gate valve which concerns on this invention. FIG. 10 is a perspective view of the gate valve of FIG. 9. FIG. 11 is a perspective view showing the gate valve of FIG. 10 with a heat shield plate separated. It is the perspective view which looked at the gate valve of FIG. 11 from the other side. FIG. 10 is an enlarged sectional view taken along line XIII-XIII in FIG. 9. It is sectional drawing in the XIV-XIV line | wire of FIG.

1 to 8 show a first embodiment of a gate valve according to the present invention. As can be seen from FIGS. 1 to 3, the gate valve A of the first embodiment is a process chamber 1A of a semiconductor manufacturing apparatus. And opens and closes the opening 2 leading to the process chamber 1A.
The gate valve A is interposed between the process chamber 1 </ b> A and the valve box 3 and has a seat plate 4 having the opening 2, and is brought into and out of contact with the seat plate 4 in the valve box 3. A valve body 5 that opens and closes the opening 2, an open / close cylinder 6 that contacts and separates the valve body 5 from the seat plate 4, and the valve body 5 is displaced between a position facing the opening 2 and a non-facing position. And a heat exchanger 8 for cooling the valve body 5.

  The valve box 3 has a rectangular box shape, and has a rectangular opening 3a communicating with the process chamber 1A on one of the opposite front and rear walls, and is connected to the process chamber 1A via the seat plate 4. Is. Further, the other wall of the valve box 3 has an opening 3b that communicates with another chamber 1B adjacent to the process chamber 1A, and is connected to the chamber 1B through the opening 3b. The inside of the chamber 1B is usually at room temperature.

  The seat plate 4 is rectangular in a front view, and includes a large-diameter attachment frame 4a for attaching to the process chamber 1A and a small-diameter seat frame 4b for forming the valve seat portion 4c. The opening 2 that penetrates the sheet plate 4 is provided. The opening 2 has a shape in which four corners of a rectangle are rounded into an arc shape. The valve seat portion 4 c surrounding the opening 2 is formed on the end face of the seat frame 4 b located in the valve box 3.

  A cooling channel (not shown) is formed in the seat plate 4 so as to surround the opening 2, and a liquid inlet and a liquid outlet leading to the cooling channel are provided on the mounting frame 4 a. The cooling water supply pipe 10 and the cooling water discharge pipe 11 are connected to one of the outer peripheral surfaces (the lower surface in the drawing) and the liquid inlet and the liquid outlet. The sheet plate 4 is cooled while the cooling water supplied from the cooling water supply pipe 10 flows through the cooling flow path and is discharged from the cooling water discharge pipe 11.

The valve body 5 is a plate having a rectangular shape when viewed from the front, and is formed of a heat-resistant material such as metal. As shown in FIGS. 4 and 5, the front surface of the valve body 5 (seat plate) 4 is attached to the outer periphery of the valve seat portion 4c), and the seal member 12 is attached to and separated from the valve seat portion 4c. The opening 2 is opened and closed by the valve body 5.
In FIG. 4, for convenience of explanation, the seat plate 4 is drawn with imaginary lines at a position facing the valve body 5 that is lowered to the non-opposing position.

  The valve body 5 is attached to the valve body attachment portion 14 at the upper end of the main rod 13 extending upward from the main cylinder 7 via the open / close cylinder 6 and the heat exchanger 8. This point will be described in detail below. In the illustrated embodiment, since the gate valve A is disposed with the valve body 5 facing upward, for convenience, the valve body 5 is described as being up and vice versa. However, the gate valve A may be arranged in a posture in which the valve body 5 is directed downward or sideways.

As shown in FIGS. 1 and 2, the upper end of the main cylinder 7 arranged vertically is fixed to the lower surface of the cylinder mounting member 17 attached to the lower end of the valve box 3. The main cylinder 7 is a double rod type air cylinder in which the main rod 13 extends in both directions in the direction of the axis L1, that is, both in the vertical direction. By supplying and discharging compressed air into the air cylinder through a port (not shown). The built-in piston (not shown) moves up and down, and the main rod 13 moves forward and backward.
Reference numeral 17 a in FIG. 2 is a seal member such as an O-ring that seals between the outer periphery of the main rod 13 and the inner periphery of the cylinder mounting member 17.

  The main rod 13 has a cylindrical shape, and a guide rod 19 extending in parallel with the axis L1 is attached to a rod plate 18 attached to the lower end of the main rod 13. The guide rod 19 slidably penetrates the cylinder plate 20 at the lower end of the main cylinder 7, and the upper portion extends above the cylinder plate 20. The guide rod 19 prevents the main rod 13 from rotating. And guidance for raising and lowering.

  A columnar member 21 is attached to the upper end portion of the main rod 13. The columnar member 21 is a member having a columnar base end portion 21 a and a semi-columnar tip end portion 21 b, and the base end portion 21 a is integrally connected to the upper end of the main rod 13 by a welded portion 22. The valve body attaching portion 14 is formed at the tip end portion 21b having a semi-cylindrical shape, and the opening / closing cylinder 6 is fixed to a flat attachment surface 14a on the front surface of the valve body attaching portion 14.

  As shown in FIGS. 4 and 5, the open / close cylinder 6 is a spring return type single-acting cylinder in which a piston 24 and an open / close rod 25 are moved back and forth by air pressure and a return spring 23. The open / close cylinder 6 has a cylinder body 27 including a rectangular body body 27a having a concave cylinder hole 26 opened at one end and a rectangular end plate 27b closing the open end of the cylinder hole 26, The end plate 27 b is fixed to the valve body mounting portion 14 with a plurality of bolts 28 in a posture in which the end plate 27 b is in contact with the mounting surface 14 a of the valve body mounting portion 14.

  The piston 24 is accommodated in the cylinder hole 26 so as to be displaceable along a second axis L2 orthogonal to the axis L1 of the main cylinder 7. A pressure acting chamber 29 is formed between the piston 24 and the end plate 27b on one side of the piston 24 (pressure receiving surface 24a side), and on the other side (back surface 24b side) of the piston 24, A spring chamber 30 is formed between the piston 24 and the bottom of the cylinder hole 26, and a concave spring seat 31 is formed in the bottom of the cylinder hole 26 in the spring chamber 30. A plurality of return springs 23 are interposed between the piston 24 and the piston 24. Reference numeral 33 in FIG. 4 is a seal member attached to the outer periphery of the piston 24, and reference numeral 34 is a damper attached to the pressure receiving surface 24 a of the piston 24.

  The pressure working chamber 29 communicates with an air supply passage 37 formed inside the valve body mounting portion 14 of the main rod 13, and the spring chamber 30 is an atmosphere formed inside the valve body mounting portion 14. It communicates with the open passage 38. The air supply passage 37 is connected to a compressed air source (not shown) through an air supply pipe 37 a housed in the main rod 13, and the atmosphere release passage 38 is housed in the main rod 13. It is opened to the atmosphere through the atmosphere opening pipe 38a.

The open / close rod 25 is attached to the center of the back surface 24b of the piston 24. The open / close rod 25 extends slidably and airtightly through the cylinder body 27 and extends to the outside of the cylinder body 27. Is connected to the center of the back surface of the heat exchanger 8.
Further, two guide holes 40 are formed in the cylinder body 27 so as to be symmetrical with respect to the opening / closing rod 25 in parallel with the opening / closing rod 25, and the heat exchanger is disposed in the guide hole 40. The two guide shafts 41 extending from the back surface of 8 are slidably fitted, and the guide shaft 41 prevents rotation of the heat exchanger 8 and guides forward and backward movement.

In the open / close cylinder 6, when compressed air is supplied from the state shown in FIG. 4 into the pressure acting chamber 29 through the air supply passage 37, the piston 24 moves forward in the left direction while compressing the return spring 23, Since the heat exchanger 8 is advanced in the left direction in the figure by the open / close rod 25 that advances together with the piston 24, the seal member 12 of the valve body 5 abuts on the valve seat portion 4 c of the seat plate 4 and opens. 2 is closed.
When the supply of compressed air to the pressure working chamber 29 is stopped and the pressure working chamber 29 is opened to the atmosphere, the piston 24 and the opening / closing rod 25 are returned to the positions shown in FIG. The heat exchanger 8 and the valve body 5 also return together, and the valve body 5 is separated from the seat plate 4 to open the opening 2.

  The heat exchanger 8 has a rectangular shape when viewed from the front, and is fixed to the main body plate 45 connected to the valve body 5 with excellent heat conductivity, and a plurality of bolts 47 on the back surface of the main body plate 45. The lid body 46 includes a cooling water passage 48 between the main body plate 45 and the lid plate 46, and the valve body 5 is cooled by the cooling water flowing through the cooling water passage 48.

As can be seen from FIG. 1, the cooling water passage 48 has linear passage portions parallel to the four sides of the square heat exchanger 8 that gradually increase in length from the center side to the outer peripheral side of the heat exchanger 8. The cooling water passage 48 is formed by a groove formed in the back surface of the main body plate 45. However, the cooling water passage 48 can also be formed in a spiral shape.
Referring also to FIGS. 6 to 8, on the back surface of the heat exchanger 8, a cooling water inlet 48 a that leads to one end of the cooling water passage 48 at a position below the opening / closing cylinder 6, and the cooling water passage 48. The cooling water outlets 48b leading to the other end are arranged side by side in a state of being close to each other.

  On the other hand, in order to allow cooling water to flow through the cooling water passage 48, a cooling water supply passage 50 leading to a cooling water source (not shown) and a cooling water discharge passage 51 leading to a drain tank (not shown) are provided inside the main rod 13. And are provided.

  The cooling water supply path 50 includes a cooling water supply pipe 50a accommodated in the main rod 13 and a cooling water supply through hole formed in the columnar member 21 and connected to the cooling water supply pipe 50a. The cooling water supply through hole 50b communicates with a supply connection port 50c that opens to a flat flow path connection surface 14b on the front surface of the valve body mounting portion 14.

  The cooling water discharge passage 51 includes a cooling water discharge pipe 51a accommodated in the main rod 13 and a cooling water discharge formed in the columnar member 21 and connected to the cooling water discharge pipe 51a. The cooling water discharge passage hole 51b communicates with a discharge connection port 51c that opens at a position adjacent to the supply connection port 50c on the flow path connection surface 14b.

  The flow path connection surface 14b is formed at a position below the mounting surface 14a of the valve body mounting portion 14 to which the opening / closing cylinder 6 is mounted, that is, a position near the main cylinder 7.

The cooling water inlet 48a and the supply connection port 50c are connected by a supply bellows joint 52a, and the cooling water outlet 48b and the discharge connection port 51c are connected by a discharge bellows joint 52b. Yes.
The two bellows joints 52a and 52b are telescopic and at the same time liquid-tight, and are arranged in parallel on the left and right sides at a position closer to the lower side than the position where the open / close cylinder 6 is attached to the main rod 13, One end of each bellows joint 52a, 52b is liquid-tightly fixed to the heat exchanger 8 by a method such as brazing, and the other end is connected to the valve body attachment portion via a common joint connection member 53 and attachment fitting 54. 14 is removably attached.

  When the bellows joints 52a and 52b are arranged in this way, the cooling water inlet 48a and the cooling water outlet 48b are connected to the supply connection port 50c and the discharge connection port 51c with a tube or the like that bends and stretches. In comparison, orderly connection can be achieved in a small occupied space.

  The joint connection member 53 is a plate-like member that is elongated in the lateral width of the flow passage connection surface 14b of the valve body mounting portion 14, and is used for supply and discharge that individually communicate with the inside of the two bellows joints 52a and 52b. The end portions of the bellows joints 52a and 52b are liquid-tightly fixed to the joint connecting member 53 by a method such as brazing.

  The mounting bracket 54 includes a main body portion 54a that is curved in an arc shape and flat mounting portions 54b that extend from both ends of the main body portion 54a. The main body portion 54a is connected to the valve body mounting portion 14. The joint connecting member 53 is fixed to the mounting portion 54b with a screw 57 in contact with the arcuate outer peripheral surface, whereby the joint connecting member 53 is connected to the joint connecting member 53 and the mounting bracket 54. The valve body mounting portion 14 is sandwiched between the flow path connecting surface 14b and the valve body mounting portion 14 in a state of being pressed against the flow path connecting surface 14b.

The contact portion where the joint connection member 53 and the flow path connection surface 14b of the valve body mounting portion 14 contact each other is around a portion where the supply relay hole 56a and the supply connection port 50c communicate with each other. An inner supply sealing member 58a that surrounds and a discharge inner sealing member 58b that surrounds the portion where the discharge relay hole 56b and the discharge connection port 51c communicate with each other are provided, and the supply One outer seal member 59 that surrounds and surrounds the two inner seal members 58a and 58b is provided at a position outside the two inner seal members 58a and 58b for use and discharge. A region surrounded by the two inner seal members 58 a and 58 b and the outer seal member 59 is opened to the outside through a drainage passage 60 formed in the main rod 13.
The inner seal members 58 a and 58 b and the outer seal member 59 are fitted in a groove formed in the joint connecting member 53.
Further, the drainage passage 60 is connected to the atmosphere release passage 38 inside the columnar member 21, whereby the atmosphere release passage 38 also serves as a part of the drainage passage 60.

  As described above, the connecting portion between the cooling water passage 48 and the cooling water supply passage 50 and the cooling water discharge passage 51 by the bellows joints 52a and 52b has a double seal structure, and the inner seal members 58a and 58b and the outer seal member. 59, by opening the area between the inner seal members 58a and 58b to the outside through the drainage passage 60, the leaked liquid is discharged from the drainage passage 60 to the outside. As a result, it is possible to reliably prevent the leaked liquid from flowing into the process chamber 1A or the chamber 1B.

  In the gate valve A having the above configuration, FIGS. 1 and 2 show a state in which the main rod 13 of the main cylinder 7 is lowered and the valve body 5 occupies a position not facing the opening 2 of the seat plate 4. ing. When closing the opening 2 from this state, the main rod 13 is raised by the operation of the main cylinder 7, and the valve body 5 moves to a position facing the opening 2 as shown by a chain line in FIG. To do. This state is also shown in FIG.

Next, in FIG. 4, when compressed air is supplied into the pressure action chamber 29 of the open / close cylinder 6 through the air supply passage 37 inside the main rod 13, the piston 24 and the open / close rod 25 move forward to the left, In order to move the heat exchanger 8 and the valve body 5 to the left, the seal member 12 of the valve body 5 contacts the valve seat portion 4c of the seat plate 4 and the opening 2 is closed.
When the supply of compressed air to the pressure working chamber 29 is stopped, the piston 24 and the open / close rod 25 are returned to the positions shown in FIG. 7 by the return spring 23, and the heat exchanger 8 and the valve body 5 are also moved together therewith. In order to return, the valve body 5 is separated from the seat plate 4 and the opening 2 is opened.

At this time, cooling water flows into the cooling water passage 48 inside the heat exchanger 8 from the cooling water supply passage 50 and the connection port 50c inside the main rod 13 through the supply bellows joint 52a and the cooling water inlet 48a. The supplied valve body 5 is cooled by heat exchange with the cooling water, and the temperature rise is suppressed to a certain limit or less. The cooling water that has made a round in the cooling water passage 48 is returned to the connection port 51c of the main rod 13 through the discharge bellows joint 52b from the cooling water outlet 48b, and returned to the cooling water discharge passage 51 from the connection port 51c. After that, it is discharged outside.
The cooling water is also supplied from the cooling water supply pipe 10 to the cooling flow path inside the sheet plate 4, and the sheet plate 4 is simultaneously cooled.

Here, with the opening and closing of the opening 2 by the valve body 5, the valve body 5 and the heat exchanger 8 are relatively displaced with respect to the main rod 13, but with the displacement, the bellows joint Since 52a, 52b expands and contracts and absorbs the displacement, the opening / closing operation of the valve body 5 and the supply of cooling water are performed smoothly and do not affect each other.
Further, the connection between the cooling water passage 48 of the heat exchanger 8 and the cooling water supply passage 50 and the cooling water discharge passage 51 inside the main rod 13, for example, a plurality of members having flow passage holes are used as sealing members. Compared to the case where the members are slidably connected to each other, there is no portion that slides through the seal member, so that the configuration is simple, there is no sliding resistance, and there is no fear of liquid leakage.

  Further, the main rod 13 is formed in a cylindrical shape, and an air supply pipe 37 a that forms the air supply passage 37, an air release pipe 38 a that forms the air release path 38, and a cooling water supply path are formed inside the main rod 13. Since the four cooling water supply pipes 50 a forming the cooling water 50 and the four cooling water discharge pipes 51 a forming the cooling water discharge path 51 are accommodated in parallel, the pipes 37 a, 38 a, 50 a, 51 a are placed outside the main rod 13. Compared with the case of arranging and individually connecting to the open / close cylinder 6 and the heat exchanger 8 through the valve box 3, not only the arrangement of the pipes and the adjustment of the distance between them are simplified, but also the pipes 37a, 38a, 50a. , 51a and the valve box 3, the open / close cylinder 6 and the heat exchanger 8 need not be individually sealed with a sealing member, so that the seal structure is simplified and the reliability is improved.

  In the illustrated embodiment, the seat plate 4 is formed separately from the valve box 3. However, the seat plate 4 can be formed integrally with the valve box 3, and in this case, the valve box 3 Thus, the opening 2 and the valve seat 4c are directly formed.

9 to 14 show a second embodiment of the present invention. The gate valve B of the second embodiment is different from the gate valve A of the first embodiment in that it is adjacent to the process chamber 1A. This is a point having a heat shield plate 70 that shields heat from the chamber 1B.
The chamber 1B is a chamber for heat treatment, and the inside thereof is at a high temperature like the process chamber 1A. The chamber 1B is connected to the valve box 3 via a seat plate 71 having a cooling flow path therein, and has an opening 72 that communicates with the opening 3b of the valve box 3. Heat from the opening 72 is transmitted to the chamber 1B. Acts on the valve body 5.

  The configuration of the gate valve B of the second embodiment will be described below, but the configuration is substantially the same as the gate valve A of the first embodiment except that it is related to the heat shield plate 70. The configuration related mainly to the heat shield plate 70 will be described, and the same components and parts as those of the gate valve A will be described using the same names and symbols as those used in the description of the gate valve A. Is omitted.

  As shown in FIG. 9, the heat shield plate 70 is fixed to the valve body mounting portion 14 of the main rod 13 on the side opposite to the side on which the valve body 5 is mounted. As can be seen from FIGS. 10 to 12, the heat shield plate 70 has a rectangular plate shape in front view, and the valve body 5 closes the opening 2 of the seat plate 4 when the valve body 5 closes the opening 2. 3 has a large flat main body plate 70a facing the opening 3b, and a thin flat cover plate 70b fixed to the back surface of the main body plate 70a with screws 74. Although the vertical and horizontal dimensions of the heat shield plate 70 are substantially the same as those of the valve body 5, the overall thickness is slightly larger than the thickness of the valve body 5. The main body plate 70a and the lid plate 70b are made of a heat-resistant material such as metal.

  As shown in FIG. 9, the heat shield plate 70 does not abut against the valve box 3 even when the valve body 5 closes the opening 2, and thus does not completely close the opening 3b. In this state, a state of being slightly separated from the valve box 3 is maintained, and heat from the chamber 1B is cut off in this state.

  In order to mount the heat shield plate 70, a flat second mounting surface 14c is formed on the back surface of the valve body mounting portion 14, that is, the surface opposite to the mounting surface 14a, and the second mounting surface 14c has the above-mentioned surface. A plurality of bolts 75 inserted from the body plate 70a side into the screw mounting holes of the heat shield plate 70 in a state where the lid plate 70b of the heat shield plate 70 is in contact with the screw holes 76 of the second mounting surface 14c. The heat shield plate 70 is fixed to the valve body mounting portion 14 by being screwed into the valve body mounting portion 14.

  Further, as can be seen from FIG. 13, the joint connecting member 53 in which one ends of the two bellows joints 52 a and 52 b are fixed has a U-shape in plan view, and is connected to the left and right sides of the valve body mounting portion 14. A screw hole 77 is formed in an end surface of the connecting part 53a that contacts the heat shield plate 70, and the screw hole 77 is inserted into the screw hole 77. By screwing a plurality of bolts 78 inserted from the main body plate 70a side into the hole, the joint connecting member 53 is brought into contact with the valve body attaching portion 14 in a state of being pressed against the flow passage connecting surface 14b of the valve body attaching portion 14. It is fixed.

  As shown in FIG. 11, a second cooling water passage 80 through which cooling water flows is formed in the heat shield plate 70. The second cooling water passage 80 is formed between the main body plate 70a and the lid plate 70b by a concave groove formed in the main body plate 70a. As shown in FIGS. 11, 13 and 14, the outer surface of the second cooling water passage 80 has a second cooling water inlet 80 a and a second cooling water outlet 80 b that communicate with one end and the other end of the second cooling water passage 80. Are arranged side by side.

  On the other hand, on the second mounting surface 14c of the valve body mounting portion 14, as is apparent from FIGS. 12 and 13, a discharge bellows joint is provided at a position corresponding to the second cooling water inlet 80a. The discharge connection port 51c leading to 52b opens in a state of penetrating the valve body mounting portion 14 from the mounting surface 14a side to the second mounting surface 14c side, and to the second cooling water outlet 80b. At a corresponding position, a discharge passage port 51d that leads to the cooling water discharge passage 51 is opened. The discharge connection port 51 c does not directly communicate with the cooling water discharge path 51.

  Then, by fixing the heat shield plate 70 to the second mounting surface 14c, the second cooling water inlet 80a and the discharge connection port 51c are connected, and the second cooling water outlet 80b. And the discharge passage port 51d are connected, whereby the second cooling water passage 80 is connected in series to the cooling water passage 48 of the heat exchanger 8. In this way, by connecting the cooling water passage 48 of the heat exchanger 8 and the second cooling water passage 80 of the heat shield plate 70 in series, the cooling water is supplied to each of the cooling water passages 48 and 80 by separate piping. Compared with the case of supplying / discharging through, the number of pipes can be reduced to simplify the structure and reduce the size.

Further, as shown in FIG. 11, FIG. 13 and FIG. 14, the contact portion where the heat shield plate 70 and the second mounting surface 14c abut is connected to the second cooling water inlet 80a and the discharge connection. The connection part to which the opening 51c is connected, and the connection part to which the second cooling water outlet 80b and the discharge path opening 51d of the cooling water discharge path 51 are connected are individually surrounded by two Inner seal members 81a and 81b and one outer seal member 82 that collectively surrounds the two inner seal members 81a and 81b are interposed, and the inner seal members 81a and 81b and the outer seal member 82 The area in between is communicated with the atmosphere opening passage 38 through a second drainage passage 83 formed inside the valve body mounting portion 14.
The inner seal members 81 a and 81 b and the outer seal member 82 are fitted in a groove formed in the lid plate 70 b of the heat shield plate 70.

  As described above, the connection portion between the second cooling water inlet 80a and the discharge connection port 51c and the connection portion between the second cooling water outlet 80b and the discharge passage port 51d have a double seal structure, and the inner side By opening the area between the seal members 81a and 81b and the outer seal member 82 to the outside through the second drainage passage 83, even if a liquid leak occurs, the leaked liquid can be released to the outside. it can.

  Since the gate valve B of the second embodiment is configured as described above, in FIG. 9, when the valve body 5 closes the opening 2 of the seat plate 4, the cooling water supply inside the main rod 13 is supplied. The cooling water supplied from the passage 50 to the cooling water passage 48 inside the heat exchanger 8 through the connection port 50c of the valve body mounting portion 14, the supply bellows joint 52a, and the cooling water inlet 48a is the cooling water passage. After making a round in 48, it returns to the connection port 51c of the said valve body attachment part 14 through the bellows joint 52b for discharge | emission from the cooling water outlet 48b, and the 2nd cooling water inlet 80a of the heat insulation board 70 from this connection port 51c Through the second coolant passage 80. Then, after making a round in the second cooling water passage 80, it is returned from the second cooling water outlet 80b to the cooling water discharge passage 51 of the main rod 13 through the discharge passage opening 51d of the valve body mounting portion 14, It is discharged outside.

Therefore, in the gate valve B of the second embodiment, the cooling water supplied to the heat exchanger 8 to cool the valve body 5 is returned to the connection port 51c, and then is cooled from the connection port 51c. Instead of being returned directly into the water discharge path 51, it is returned into the cooling water discharge path 51 via the second cooling water path 80 of the heat shield plate 70.
Other configurations and operations of the gate valve B of the second embodiment are substantially the same as those of the gate valve A of the first embodiment.

  Note that the second cooling water passage 80 of the heat shield plate 70 may be connected in parallel with the cooling water passage 48 of the heat exchanger 8. In this case, the cooling water inlet 48 a of the cooling water passage 48 and the second cooling water inlet 80 a of the second cooling water passage 80 are connected together to the cooling water supply passage 50, and cooling of the cooling water passage 48 is performed. The water outlet 48 b and the second cooling water outlet 80 b of the second cooling water passage 80 are connected together to the cooling water discharge path 51.

A, B Gate valve 1A Process chamber 1B Chamber 2 Opening 4c Valve seat 5 Valve body 6 Opening / closing cylinder 7 Main cylinder 8 Heat exchanger 13 Main rod 14 Valve body mounting portion 23 Return spring 24 Piston 25 Opening / closing rod 29 Pressure working chamber 30 Spring chamber 37 Air supply passage 37a Air supply piping 38 Atmospheric release passage 38a Atmospheric release piping 48 Cooling water passage 48a Cooling water inlet 48b Cooling water outlet 50 Cooling water supply passage 50a Cooling water supply piping 50c Supply connection port 51 Cooling water discharge Channel 51a Cooling water discharge pipe 51c Discharge connection port 52a, 52b Bellows joint 53 Joint connection member 56a, 56b Relay hole 58a, 58b, 81a, 81b Inner seal member 59, 82 Outer seal member 60 Drainage passage 70 Heat shield plate 80 Second cooling water passage 80a Second cooling water Mouth 80b second cooling water outlet 83 second drain passage

Claims (9)

A valve body that opens and closes an opening communicating with the process chamber, an open / close cylinder that contacts and separates the valve body from a valve seat portion around the opening, and a position where the valve body faces the opening and a position that does not face the opening A main cylinder that displaces the valve body, and a heat exchanger that cools the valve body,
The main cylinder has a main rod that moves forward and backward by the action of air pressure, and the open / close cylinder is attached to a valve body mounting portion at the tip of the main rod,
The open / close cylinder has an open / close rod that moves forward and backward by the action of air pressure, the heat exchanger is attached to the open / close rod, and the valve body is attached to the heat exchanger,
The heat exchanger has a cooling water passage through which cooling water flows, a cooling water inlet that leads to one end of the cooling water passage, and a cooling water outlet that leads to the other end,
A cooling water supply path and a cooling water discharge path are provided inside the main rod, and cooling water from the cooling water supply path is sent out toward the cooling water inlet to the valve body mounting portion of the main rod. And a discharge connection port for receiving the cooling water from the cooling water outlet for returning to the cooling water discharge path is opened.
A cooling water inlet and a cooling water outlet of the heat exchanger, and a supply connection port and a discharge connection port of the valve body mounting portion are extendable and liquid-tight bellows joints for supply and discharge, respectively. It is connected,
A gate valve characterized by that.   The supply and discharge bellows joints are arranged in parallel at a position closer to the main cylinder side than a position at which the open / close cylinder is mounted in a valve body mounting portion of the main rod. The gate valve according to claim 1.   One end of the supply and discharge bellows joints is connected to the valve body mounting portion via a joint connection member, and the joint connection member has a supply and discharge relay hole leading to each bellows joint. The contact portion where the joint connecting member and the valve body mounting portion abut is a portion where the supply and discharge relay holes and the supply and discharge connection ports are connected. Two inner seal members that individually surround the periphery and an outer seal member that collectively surrounds the two inner seal members are interposed, and the region between the inner seal member and the outer seal member is The gate valve according to claim 1, wherein the gate valve is opened to the outside through a drainage passage inside the main rod.   The open / close cylinder is a spring return type single-acting cylinder in which a piston and an open / close rod are moved back and forth by air pressure and a return spring, and a pressure acting chamber on one side of the piston is provided in an air supply passage inside the main rod. 4. A spring chamber in communication with which the return spring on the other side of the piston is disposed is opened to the atmosphere through an atmosphere opening passage inside the main rod. The described gate valve.   4. A subordinate to claim 3, wherein the drainage passage is communicated with the atmosphere release passage inside the main rod, so that the atmosphere release passage also serves as a part of the drainage passage. The gate valve as described in.   The main rod has a cylindrical shape, and inside the main rod, a cooling water supply pipe that forms the cooling water supply path, a cooling water discharge pipe that forms a cooling water discharge path, and an air supply that forms an air supply path 6. The gate valve according to claim 4 or 5, wherein a pipe and an air opening pipe forming an air opening passage are accommodated.   A heat shield plate for blocking heat from another chamber adjacent to the process chamber is fixed to the valve body mounting portion of the main rod on the side opposite to the side on which the valve body is mounted. The gate valve according to any one of claims 1 to 6, wherein the blocking plate has a second cooling water passage through which cooling water flows.   The heat shield plate has a second cooling water inlet and a second cooling water outlet communicating with the second cooling water passage, and the second cooling water inlet is the discharge connection port of the valve body mounting portion. And the second cooling water outlet is connected to the cooling water discharge passage, so that the second cooling water passage is connected in series to the cooling water passage of the heat exchanger. The gate valve according to claim 7.   The contact portion where the heat shield plate and the valve body mounting portion contact each other includes a connection portion to which the second cooling water inlet and the discharge connection port are connected, and the second cooling water outlet and the Two inner seal members that individually surround each of the connection portions and an outer seal member that collectively surrounds the two inner seal members are interposed in the connection portion to which the cooling water discharge path is connected, 9. The gate according to claim 8, wherein a region between the inner seal member and the outer seal member communicates with the atmosphere release passage through a second drainage passage inside the main rod. valve.

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