JP2012197900A - Sliding component and method for manufacturing the same - Google Patents

Sliding component and method for manufacturing the same Download PDF

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Publication number
JP2012197900A
JP2012197900A JP2011063342A JP2011063342A JP2012197900A JP 2012197900 A JP2012197900 A JP 2012197900A JP 2011063342 A JP2011063342 A JP 2011063342A JP 2011063342 A JP2011063342 A JP 2011063342A JP 2012197900 A JP2012197900 A JP 2012197900A
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Prior art keywords
sliding
sliding component
recess
lipophilic substance
substance
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JP2011063342A
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Japanese (ja)
Inventor
Nobuhiko Fukuoka
信彦 福岡
Shinya Sekiyama
伸哉 関山
Toshio Takahashi
俊雄 高橋
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2011063342A priority Critical patent/JP2012197900A/en
Priority to PCT/JP2011/079564 priority patent/WO2012127759A1/en
Publication of JP2012197900A publication Critical patent/JP2012197900A/en
Withdrawn legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B1/00Multi-cylinder machines or pumps characterised by number or arrangement of cylinders
    • F04B1/12Multi-cylinder machines or pumps characterised by number or arrangement of cylinders having cylinder axes coaxial with, or parallel or inclined to, main shaft axis
    • F04B1/122Details or component parts, e.g. valves, sealings or lubrication means
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0254Physical treatment to alter the texture of the surface, e.g. scratching or polishing
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B1/00Multi-cylinder machines or pumps characterised by number or arrangement of cylinders
    • F04B1/12Multi-cylinder machines or pumps characterised by number or arrangement of cylinders having cylinder axes coaxial with, or parallel or inclined to, main shaft axis
    • F04B1/14Multi-cylinder machines or pumps characterised by number or arrangement of cylinders having cylinder axes coaxial with, or parallel or inclined to, main shaft axis having stationary cylinders
    • F04B1/141Details or component parts
    • F04B1/146Swash plates; Actuating elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B1/00Multi-cylinder machines or pumps characterised by number or arrangement of cylinders
    • F04B1/12Multi-cylinder machines or pumps characterised by number or arrangement of cylinders having cylinder axes coaxial with, or parallel or inclined to, main shaft axis
    • F04B1/20Multi-cylinder machines or pumps characterised by number or arrangement of cylinders having cylinder axes coaxial with, or parallel or inclined to, main shaft axis having rotary cylinder block
    • F04B1/2014Details or component parts
    • F04B1/2078Swash plates
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/10Construction relative to lubrication
    • F16C33/1095Construction relative to lubrication with solids as lubricant, e.g. dry coatings, powder
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05CINDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00Non-metallic inorganic materials
    • F05C2203/08Ceramics; Oxides
    • F05C2203/0804Non-oxide ceramics
    • F05C2203/0808Carbon, e.g. graphite
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05CINDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00Material properties
    • F05C2251/14Self lubricating materials; Solid lubricants
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2202/00Solid materials defined by their properties
    • F16C2202/50Lubricating properties
    • F16C2202/52Graphite
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02Carbon based material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02Carbon based material
    • F16C2206/04Diamond like carbon [DLC]
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00Engines or pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00Engines or pumps
    • F16C2360/42Pumps with cylinders or pistons

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Sliding-Contact Bearings (AREA)
  • Compressor (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a sliding component that has recessed parts that are effective in holding lubricating oil and securing abrasive powder, has superior abrasion resistance, and can suppress seizure.SOLUTION: The sliding component is provided with a pair of sliding surfaces with flat surfaces made to face each other and slide, and characterized by recessed parts formed in at least one of the sliding surfaces and a lipophilic substance being formed so as to cover the inside surfaces of these recessed parts. In addition, the lipophilic substance is an inorganic substance containing carbon atoms and is characterized by being formed from any of graphite, diamond-like carbon, and carbon nanotubes. Because of this constitution, in mechanical components that slide, lubricating oil can be maintained on the surface of the sliding components during sliding, and therefore friction loss can be reduced and seizure can be suppressed.

Description

本発明は、高負荷を受けて摺動する摺動部品およびその製造方法に関するものである。   The present invention relates to a sliding component that slides under a high load and a method for manufacturing the same.

潤滑油等を介して対面して摺動する摺動部品において、高負荷や潤滑油の劣化等によって生じる摩耗や焼付きに対して耐摩耗性や耐焼付き性の向上が求められている。摺動部材に基地組織中に球状の黒鉛を持っている球状黒鉛鋳鉄は、黒鉛自体が固体潤滑剤としての働きをするほか、潤滑油の保持性が良いために、一般に軸受け性能が良いことは知られている。しかし、切削加工や研削加工では球状黒鉛上に鋳鉄が引き伸ばされて形成され、これが稼動時にバリとなって相手部材と接触して摩耗や焼付きを生じる要因の一つとされていた。このバリを抑制して球状黒鉛鋳鉄を軸受けに用いるための技術として、特開平2−310335号公報(特許文献1)がある。この公報には、材料の基地組織および表面処理の両者による表面状態の改善により、高負荷、高回転に耐える優れた軸受性能を持つ、球状黒鉛鋳鉄部材からなる高速回転部材を提供すると記載されている。   In sliding parts that slide facing each other through a lubricating oil or the like, there is a demand for improved wear resistance and seizure resistance against wear and seizure caused by high loads, deterioration of the lubricating oil, and the like. Spheroidal graphite cast iron, which has spherical graphite in the base structure of the sliding member, generally has good bearing performance because graphite itself functions as a solid lubricant and has good lubricating oil retention. Are known. However, in cutting and grinding processes, cast iron is stretched and formed on spheroidal graphite, and this has become one of the factors that cause wear and seizure by contact with the mating member during operation. Japanese Patent Laid-Open No. 2-310335 (Patent Document 1) discloses a technique for suppressing the burrs and using spheroidal graphite cast iron for bearings. This publication describes that a high-speed rotating member made of spheroidal graphite cast iron member having excellent bearing performance that can withstand high load and high rotation is provided by improving the surface condition by both the base structure of the material and the surface treatment. Yes.

特開平2−310335号公報Japanese Patent Laid-Open No. 2-310335

しかしながら、特許文献1の表面処理方法にて球状黒鉛鋳鉄を処理した場合、基地組織の尖閣部が除去されて内在する球状黒鉛の露出は可能であるが、基地組織表面に対する球状黒鉛の露出部の凹みは、大きくても1.0μm程度である。この大きさでは凹部に貯められる潤滑油が少なく、また摺動により定常的に生じる摩耗粉の凹部への確保も不十分である。   However, when the spheroidal graphite cast iron is treated by the surface treatment method of Patent Document 1, the stencil portion of the base structure is removed and the underlying spheroidal graphite can be exposed. The dent is about 1.0 μm at most. With this size, the amount of lubricating oil stored in the recess is small, and it is not sufficient to secure the wear powder generated regularly by sliding in the recess.

本発明の目的は、潤滑油の保持と摩耗粉の確保に効果的な凹部を有する優れた耐摩耗性と焼きつき抑制可能な摺動部品を提供することにある。   An object of the present invention is to provide an excellent wear resistance and a sliding part capable of suppressing seizures having a concave portion effective for retaining lubricating oil and securing wear powder.

上記目的を達成するために、例えば特許請求の範囲に記載の構成を採用する。   In order to achieve the above object, for example, the configuration described in the claims is adopted.

(1)本願は上記課題を解決する手段を複数含んでいるが、その一例を挙げるならば、互いの一面を突き合わせて摺動させる一対の摺動面を備えた摺動部品であって、少なくとも一方の摺動面に凹部が形成され、凹部の内面の少なくとも一部の領域に親油性物質が形成されていることを特徴とする。   (1) The present application includes a plurality of means for solving the above-described problems. To give an example, the present application is a sliding component having a pair of sliding surfaces that slide against each other, and at least A concave portion is formed on one sliding surface, and a lipophilic substance is formed on at least a part of the inner surface of the concave portion.

上記(1)の親油性物質が炭素原子含有の無機物であり、炭素含有の無機物が黒鉛、ダイヤモンドライクカーボン、カーボンナノチューブのいずれからなることを特徴とする。   The lipophilic substance (1) is a carbon atom-containing inorganic substance, and the carbon-containing inorganic substance is composed of any of graphite, diamond-like carbon, and carbon nanotubes.

上記(1)の前記凹部内面の少なくとも一部の領域に形成された親油性物質表面が前記摺動面の表面に対して5μm以上凹んでいることを特徴とする。   (1) The lipophilic substance surface formed in at least a part of the inner surface of the recess is recessed by 5 μm or more with respect to the surface of the sliding surface.

上記(1)の一対の摺動面が圧縮機の摺動部品の摺動面であることを特徴とする。   The pair of sliding surfaces of (1) is a sliding surface of a sliding component of a compressor.

上記(1)の一対の摺動面が油圧機器の摺動部品の摺動面であることを特徴とする。   The pair of sliding surfaces of (1) is a sliding surface of a sliding component of a hydraulic device.

(2)本願は、互いの一面を突き合わせて摺動させる一対の摺動面を備えた摺動部品の製造方法であって、前記一対の摺動面のうち少なくとも一方の摺動面を、親油性物質を内在させた鋳鉄の表面を遊離砥粒を用いて研磨することにより形成することを特徴とする。   (2) The present application is a method of manufacturing a sliding component having a pair of sliding surfaces that slide while abutting one surface of each other, and at least one of the pair of sliding surfaces is a parent surface. It is characterized in that it is formed by polishing the surface of cast iron containing an oily substance with loose abrasive grains.

上記(2)の親油性物質が炭素原子含有の無機物であり、炭素原子含有の無機物が黒鉛からなることを特徴とする。   The lipophilic substance (2) is a carbon atom-containing inorganic substance, and the carbon atom-containing inorganic substance is made of graphite.

上記(2)の遊離砥粒の平均粒径が30μm以上であることを特徴とする。   The free abrasive grains of (2) above have an average particle size of 30 μm or more.

(3)本願は、互いの一面を突き合わせて摺動させる一対の摺動面を備えた摺動部品の製造方法であって、前記一対の摺動面のうち少なくとも一方の摺動面を、摺動部材の表面に凹部を形成し、該凹部の内面であって少なくとも一部の領域に親油性物質を堆積させることで形成することを特徴とする。   (3) The present application is a manufacturing method of a sliding component having a pair of sliding surfaces that slide while abutting one surface of each other, and at least one of the pair of sliding surfaces is slid. A concave portion is formed on the surface of the moving member, and the lipophilic substance is deposited on at least a part of the inner surface of the concave portion.

上記(3)の親油性物質が炭素原子含有の無機物であり、炭素含有の無機物が黒鉛、ダイヤモンドライクカーボン、カーボンナノチューブのいずれからなることを特徴とする。   The lipophilic substance (3) is a carbon atom-containing inorganic substance, and the carbon-containing inorganic substance is composed of any of graphite, diamond-like carbon, and carbon nanotubes.

本発明によれば、摺動する機械部品において、摺動時摺動部品の表面に潤滑油を保持できるので摩擦損失を低減でき、また焼きつきを抑制することができる。   According to the present invention, in a sliding machine part, the lubricating oil can be held on the surface of the sliding part during sliding, so that friction loss can be reduced and seizure can be suppressed.

本願発明の摺動部品の構造の断面図である。It is sectional drawing of the structure of the sliding component of this invention. 本発明の摺動部品の摺動面近傍の断面の模式図である。It is a schematic diagram of the cross section of the sliding surface vicinity of the sliding component of this invention. 本発明の第一の実施形態に関わる摺動部品の製造工程を説明するための工程図である。It is process drawing for demonstrating the manufacturing process of the sliding components in connection with 1st embodiment of this invention. 本発明の第一の実施形態に関わる摺動部品の摺動面において、開口部が内部より狭い構造の凹部を表す断面図である。It is sectional drawing showing the recessed part of a structure where an opening part is narrower than an inside in the sliding surface of the sliding component in connection with 1st embodiment of this invention. 本発明の第一の実施形態に関わる凹部を形成した摺動面の平面図である。It is a top view of the sliding face in which the recessed part in connection with 1st embodiment of this invention was formed. 本発明の第二の実施形態に関わる摺動部品の製造工程を説明するための工程図である。It is process drawing for demonstrating the manufacturing process of the sliding components in connection with 2nd embodiment of this invention. 本発明の第三の実施形態に関わる摺動部品の製造工程を説明するための工程図である。It is process drawing for demonstrating the manufacturing process of the sliding components in connection with 3rd embodiment of this invention. 本発明の第四の実施形態に関わる摺動部品の製造工程を説明するための工程図である。It is process drawing for demonstrating the manufacturing process of the sliding component in connection with 4th embodiment of this invention. 本発明の摺動部品の一例であるスクロール圧縮機の旋回スクロール部品の概略図である。It is the schematic of the turning scroll components of the scroll compressor which is an example of the sliding components of this invention. 本発明の摺動部品を構成部材として有する油圧機器の構成例を表す断面図である。It is sectional drawing showing the structural example of the hydraulic equipment which has the sliding component of this invention as a structural member.

以下、本発明の実施例を図面を用いて説明する。   Embodiments of the present invention will be described below with reference to the drawings.

本実施例では、摺動面の凹部に親油性物質が備えられ、かつ親油性物質が摺動面から凹んでいる摺動部品の例を説明する。   In the present embodiment, an example of a sliding component in which a lipophilic substance is provided in the concave portion of the sliding face and the lipophilic substance is recessed from the sliding face will be described.

図1は、本願発明の摺動部品の構造の断面図である。   FIG. 1 is a cross-sectional view of the structure of the sliding component of the present invention.

図1において、1は摺動部材、2は摺動面、6は摺動表面に設けられた凹部で、7は凹部6内に設けた親油性物質である。また、摺動部材1の表面に設けた凹部6は、図1のように大きさは異なってもよく、ほぼ同じ大きさでもよい。また、表面の凹部6内に設ける親油性物質7は、凹部6内の内側を覆う程度とし、凹部6にある程度空間を設けることにより摺動時に潤滑油を貯め保持することができる。ここで、摺動部材として、鋳鉄材や鍛鉄材、ステンレス鋼材、リン青銅、クロムモリブデン鋼等を用いることができ、親油性物質7には潤滑油5とのなじみが良好(すなわち潤滑油に対する親油性物質7の表面エネルギーが高い状態)な炭素原子含有の無機物である黒鉛やダイヤモンドライクカーボン(以後、DLCと称する)、カーボンナノチューブ(以後、CNTと称する)等を用いることができる。   In FIG. 1, 1 is a sliding member, 2 is a sliding surface, 6 is a recess provided on the sliding surface, and 7 is a lipophilic substance provided in the recess 6. Moreover, the recessed part 6 provided in the surface of the sliding member 1 may differ in a magnitude | size like FIG. 1, and may be the substantially same magnitude | size. Further, the lipophilic substance 7 provided in the concave portion 6 on the surface is formed to cover the inside of the concave portion 6, and by providing a certain amount of space in the concave portion 6, lubricating oil can be stored and retained during sliding. Here, as the sliding member, cast iron material, wrought iron material, stainless steel material, phosphor bronze, chrome molybdenum steel, or the like can be used, and the lipophilic substance 7 has good familiarity with the lubricating oil 5 (that is, the parent to the lubricating oil). Graphite, diamond-like carbon (hereinafter referred to as DLC), carbon nanotubes (hereinafter referred to as CNT), etc., which are carbon atom-containing inorganic substances having a high surface energy of the oily substance 7 can be used.

図2は、本実施例の摺動部品が別の摺動部品と対向して摺動する場合の摺動面近傍の断面の模式図を示している。   FIG. 2 is a schematic diagram of a cross section in the vicinity of the sliding surface when the sliding component of this embodiment slides facing another sliding component.

図2において、本実施例の摺動部材1(以下、これを第一の摺動部材という)と、対向する摺動部材3(以下、これを第二の摺動部材という)との摺動面は、潤滑油5を介して配置されている。   In FIG. 2, sliding between the sliding member 1 of the present embodiment (hereinafter referred to as the first sliding member) and the opposing sliding member 3 (hereinafter referred to as the second sliding member). The surface is arranged via the lubricating oil 5.

第一の摺動部材1の摺動面2と第二の摺動部材3の摺動面4は、相対的に逆向きか、あるいは一方が止まった状態でもう一方が移動して摺動する。第一の摺動部材1の摺動面2には凹部6が設けられ、その内側に親油性物質7が形成されている。   The sliding surface 2 of the first sliding member 1 and the sliding surface 4 of the second sliding member 3 are in the opposite directions, or the other is moved and slid while one is stopped. A recess 6 is provided in the sliding surface 2 of the first sliding member 1, and a lipophilic substance 7 is formed on the inside thereof.

親油性物質7は、摺動面2に対して凹んでおり、稼動時に親油性物質7は潤滑油5とのなじみ性が良好であるため、この凹みである凹部6に潤滑油を確保し易くなり、摺動部に高負荷が掛かり外部からの摺動面への潤滑油の供給が困難になった場合に、この凹部6の潤滑油5が効果的に作用して焼きつき等を抑制することができる。また、稼動時に生じた摺動部材の摩耗粉をこの凹部6により確保できるため、摩耗粉の噛みこみによる摺動面2および摺動面4の摩耗を抑制することができる。   Since the lipophilic substance 7 is recessed with respect to the sliding surface 2 and the lipophilic substance 7 has good compatibility with the lubricating oil 5 during operation, it is easy to secure the lubricating oil in the recessed portion 6 that is the recess. Thus, when a high load is applied to the sliding portion and it becomes difficult to supply the lubricating oil from the outside to the sliding surface, the lubricating oil 5 in the concave portion 6 effectively acts to suppress seizure or the like. be able to. Further, since the wear powder of the sliding member generated during operation can be secured by the recess 6, wear of the sliding surface 2 and the sliding surface 4 due to the biting of the wear powder can be suppressed.

摺動面2の凹部6に親油性物質7を内在させる方式としては、第一の摺動部材1に球状黒鉛鋳鉄等の黒鉛からなる親油性物質を内在する材料を用いて、摺動面を全面加工した後で親油性物質である球状黒鉛部を露出させ、かつ球状黒鉛部を凹ませる方式や、摺動面2に凹部6を形成し、次いで親油性物質7を凹部6を含む摺動面全面に形成した後、摺動面2上に形成された親油性物質7を選択的に除去する方法や、摺動面を全面加工した後で凹部3を形成し、次いで親油性物質7を凹部6に選択的に設ける方式等のいずれの方式で得てもよい。   As a method of incorporating the lipophilic substance 7 in the recess 6 of the sliding surface 2, the sliding surface 1 is made of a material containing a lipophilic substance made of graphite such as spheroidal graphite cast iron in the first sliding member 1. After processing the entire surface, the spherical graphite portion, which is a lipophilic substance, is exposed and the spherical graphite portion is recessed, or a recess 6 is formed on the sliding surface 2, and then the lipophilic substance 7 is slid including the recess 6. After forming the entire surface, the method of selectively removing the lipophilic substance 7 formed on the sliding surface 2, or forming the recess 3 after processing the entire sliding surface, You may obtain by any system, such as the system selectively provided in the recessed part 6. FIG.

潤滑油の保持性と摩耗粉の確保性から親油性物質7の摺動面からの凹みの深さとしては、少なくとも5μm以上が好ましく、より深い方が潤滑油の保持性と摩耗粉の確保性が向上する。また、凹部6の摺動面から見た平面的な形状は、円形や矩形や楕円や、輪郭の一部が歪んだ形状であっても潤滑油の保持と摩耗粉の確保ができ、かつ輪郭がバリとならなければ支障はない。   The depth of the dent from the sliding surface of the lipophilic substance 7 is preferably at least 5 μm from the viewpoint of retaining the lubricating oil and securing the wear powder, and a deeper depth is preferably at least 5 μm. Will improve. In addition, the planar shape viewed from the sliding surface of the recess 6 can retain lubricating oil and ensure wear powder even when the shape is circular, rectangular, elliptical, or a part of the contour is distorted. If it doesn't become Bali, there is no problem.

また、第二の摺動部材3には第一の摺動部材1と同一の材料を用いることができ、第一の摺動部材1の摺動面2と同様に凹部に親油性物質を備える形態としてもよい。   Further, the same material as that of the first sliding member 1 can be used for the second sliding member 3, and a lipophilic substance is provided in the concave portion in the same manner as the sliding surface 2 of the first sliding member 1. It is good also as a form.

本実施例では、摺動面の凹部に親油性物質が備えられ、かつ親油性物質が摺動面から凹んでいる摺動部品の製造方法において、親油性物質を内在した摺動部材を用いて、遊離砥粒による研磨加工により凹んだ形状の親油性物質を形成する摺動部品の製造方法の例を説明する。   In this embodiment, in the manufacturing method of the sliding part in which the lipophilic substance is provided in the concave portion of the sliding surface and the lipophilic substance is recessed from the sliding surface, a sliding member containing the lipophilic substance is used. An example of a method for manufacturing a sliding component that forms a lipophilic substance having a concave shape by polishing with loose abrasive grains will be described.

図3は、本発明の第一の実施形態に関わる摺動部品の製造工程を説明するための工程図であり、同図(a)は親油性物質を内在した材料から摺動面を切り出す前の状態を、同図(b)は親油性物質を内在した摺動部材の遊離砥粒を用いた研磨加工の状態を、同図(c)は遊離砥粒による研磨加工で形成した摺動面の状態を表わす。   FIG. 3 is a process diagram for explaining the manufacturing process of the sliding component according to the first embodiment of the present invention. FIG. 3 (a) is a diagram before cutting the sliding surface from the material containing the lipophilic substance. (B) shows a state of polishing using free abrasive grains of a sliding member containing a lipophilic substance, and (c) shows a sliding surface formed by polishing with free abrasive grains. Represents the state of

図3(a)において、摺動部材8は球状黒鉛鋳鉄からなり、その内部には潤滑油とのなじみ性が良好な球状の黒鉛からなる親油性物質9を内在する。摺動部材8の破線A-A’の上部を機械加工等により除去加工して、摺動面となる破線A-A’の矢印で示す面を得る。   In FIG. 3 (a), the sliding member 8 is made of spheroidal graphite cast iron, and the lipophilic substance 9 made of spherical graphite having good compatibility with the lubricating oil is contained therein. The upper part of the broken line A-A ′ of the sliding member 8 is removed by machining or the like to obtain a surface indicated by an arrow of the broken line A-A ′ that becomes a sliding surface.

図3(b)において、摺動部材8の摺動面10に砥粒11を含んだ研磨液12を供給して定盤13を押し付けながら摺動部材8と相対運動する。砥粒11は摺動面10に遊離的に作用する。砥粒11は、鋳鉄材と黒鉛を加工する能力があればよく、一例として炭化ケイ素(SiC)、アルミナ(Al)、ダイヤモンド等を用いることができるし、それらの混合物であってもよい。研磨液12は、砥粒11を分散して遊離的に加工面に作用できるものであればよいが、鋳鉄表面の酸化を抑制するために炭化水素油等の油系のものが好ましい。定盤13は、被削物である摺動部材に砥粒11を遊離的に作用させる能力があればよく、純錫、純銅、錫合金、銅合金、鋳鉄等や、または、定盤13の表面に不織布やポリウレタン等からなる研磨パッドを貼り付けたものを用いることができる。 In FIG. 3 (b), the polishing liquid 12 containing the abrasive grains 11 is supplied to the sliding surface 10 of the sliding member 8 and the surface plate 13 is pressed against the sliding member 8 while moving relative to the sliding member 8. The abrasive grains 11 act freely on the sliding surface 10. The abrasive grains 11 need only have the ability to process cast iron and graphite. For example, silicon carbide (SiC), alumina (Al 2 O 3 ), diamond, or the like can be used, or even a mixture thereof. Good. The polishing liquid 12 may be any one that can disperse the abrasive grains 11 and act freely on the processed surface, but is preferably an oil-based one such as hydrocarbon oil in order to suppress oxidation of the cast iron surface. The surface plate 13 only needs to have the ability to cause the abrasive grains 11 to act freely on the sliding member, which is a workpiece, such as pure tin, pure copper, tin alloy, copper alloy, cast iron, or the like. It is possible to use one having a polishing pad made of nonwoven fabric or polyurethane on the surface.

遊離砥粒による研磨加工が進行すると図2(c)に示すように、摺動部材8の生地材料である鋳鉄に比べて、黒鉛からなる親油性物質9は加工されやすいため、摺動面10に対して黒鉛からなる親油性物質9の表面は凹んで凹部14が形成される。この凹部14の形状は、図2(b)の砥粒11の平均粒径等により変化する。砥粒11の平均粒径が黒鉛からなる親油性物質9の平均的な直径より大きい場合は、砥粒11は凹部14に入らないため、凹部の開口径は内部と同等以上の大きさとなる。一方、砥粒11の平均粒径が黒鉛からなる親油性物質9の平均的な直径より小さい場合は、砥粒11は凹部14に入り混んで内部の黒鉛をかき出す様に作用する。   As the polishing process with the loose abrasive proceeds, as shown in FIG. 2 (c), the lipophilic substance 9 made of graphite is more easily processed than the cast iron that is the material of the sliding member 8. On the other hand, the surface of the lipophilic substance 9 made of graphite is recessed to form a recess 14. The shape of the recess 14 varies depending on the average particle diameter of the abrasive grains 11 in FIG. When the average particle diameter of the abrasive grains 11 is larger than the average diameter of the lipophilic substance 9 made of graphite, since the abrasive grains 11 do not enter the recesses 14, the opening diameter of the recesses is equal to or larger than the inside. On the other hand, when the average particle diameter of the abrasive grains 11 is smaller than the average diameter of the lipophilic substance 9 made of graphite, the abrasive grains 11 enter the recesses 14 and act so as to scrape out the internal graphite.

図4は黒鉛からなる親油性物質の平均的な直径に比べて小さい平均粒径の砥粒11を用いて加工した摺動部材8の断面図である。図4に示すように黒鉛からなる親油性物質の平均的な直径に比べて小さい平均粒径の砥粒11を用いて加工した場合、凹部14の開口径(幅)Bが凹部14の内部の径(幅)Cより小さい形状となる。凹部14の内部より開口径が小さいため、凹部に入った潤滑油は、潤滑油の供給が滞った際に、凹部の開口径が広いものに比べて長時間に渡って少しずつ摺動面に供給されるため、焼き付きまでの時間を延ばすことが可能である。   FIG. 4 is a cross-sectional view of the sliding member 8 processed using abrasive grains 11 having an average particle size smaller than the average diameter of the lipophilic substance made of graphite. As shown in FIG. 4, when processing is performed using abrasive grains 11 having an average particle size smaller than the average diameter of the lipophilic substance made of graphite, the opening diameter (width) B of the recess 14 is set inside the recess 14. The shape is smaller than the diameter (width) C. Since the opening diameter is smaller than the inside of the recess 14, the lubricating oil that has entered the recess becomes a sliding surface little by little over a long period of time when the supply of the lubricating oil is delayed, compared to the one with a wide opening diameter of the recess. Since it is supplied, it is possible to extend the time until seizure.

例えば球状黒鉛鋳鉄の黒鉛の平均的な直径は40μmの場合、砥粒11の平均粒径に40μmより大きいものを用いた場合は、凹部の開口径は内部より大きくなり、40μmより小さいものを用いた場合は、凹部の開口径は内部より小さくできる。なお、凹部の開口径を確実に制御するには、砥粒11の平均粒径としては黒鉛の平均的な直径に比べて10μm以上大きいかあるは小さくするのが好ましい。また、球状黒鉛鋳鉄の黒鉛粒径は製造条件等の変動によってばらつきがあるため、球状黒鉛鋳鉄材料に合わせて砥粒11の平均粒径を調整するのが好ましい。   For example, when the average diameter of graphite of spheroidal graphite cast iron is 40 μm and the average particle diameter of the abrasive grains 11 is larger than 40 μm, the opening diameter of the recesses is larger than the inside and smaller than 40 μm is used. If so, the opening diameter of the recess can be made smaller than the inside. In order to reliably control the opening diameter of the concave portion, it is preferable that the average particle diameter of the abrasive grains 11 is 10 μm or more larger or smaller than the average diameter of graphite. Moreover, since the graphite particle diameter of spheroidal graphite cast iron varies depending on variations in manufacturing conditions and the like, it is preferable to adjust the average particle diameter of the abrasive grains 11 according to the spheroidal graphite cast iron material.

図5は図3(C)および図4に示した摺動面の平面図である。黒鉛からなる親油性物質9は摺動面10に対して上から見た場合、ほぼ円形でありランダムに配置されている。また黒鉛からなる親油性物質9の大きさにはばらつきがあり、本発明では黒鉛からなる親油性物質9の大きさには平均値を用いている。なお、ここでは図示していないが、黒鉛からなる親油性物質9は凹形状をしている。   FIG. 5 is a plan view of the sliding surface shown in FIG. The lipophilic substance 9 made of graphite is substantially circular and randomly arranged when viewed from the top with respect to the sliding surface 10. The size of the lipophilic substance 9 made of graphite varies, and in the present invention, the average value is used for the size of the lipophilic substance 9 made of graphite. Although not shown here, the lipophilic substance 9 made of graphite has a concave shape.

本実施例では、摺動面の凹部に親油性物質が備えられ、かつ親油性物質が摺動面から凹んでいる摺動部品の製造方法において、摺動面に凹部を形成した後、親油性物質を凹部に形成し、次いで摺動面に形成された親油性物質を除去することにより、親油性物質が凹部を覆うように配置された摺動部品の製造方法の例を説明する。   In this embodiment, in the manufacturing method of the sliding part in which the recess of the sliding surface is provided with the lipophilic substance and the lipophilic substance is recessed from the sliding surface, the recess is formed on the sliding surface, and then the lipophilic substance is formed. An example of a method for manufacturing a sliding component in which a lipophilic substance is disposed so as to cover the recess by forming the substance in the recess and then removing the lipophilic substance formed on the sliding surface will be described.

図6は、本発明の第二の実施形態に関わる摺動部品の製造工程を説明するための工程図であり、同図(a)は摺動面の凹部形成後の状態を、同図(b)は凹部に親油性部材を形成した状態を、同図(c)は凹部以外に形成された親油性物質を取り除いた状態を表す。   FIG. 6 is a process diagram for explaining the manufacturing process of the sliding component according to the second embodiment of the present invention. FIG. 6 (a) shows the state after the concave portion of the sliding surface is formed. b) shows a state in which an oleophilic member is formed in the recess, and FIG. 5 (c) shows a state in which the oleophilic material formed other than the recess is removed.

図6(a)において、摺動部材15の摺動面16に凹部17を形成する。摺動部材15は鋳鉄材や鍛鉄材やステンレス鋼材、リン青銅材等を用いることができる。凹部17は、球状等の工具を摺動面に押し付けて形状を転写する方式や、レーザ加工等により形成する。凹部17は摺動面16の上部から見た場合に円形に限らず、楕円や4角等の矩形であってもよい。また、摺動面16の平面方向に対してランダムに配置されていても、一定間隔で規則的に配置されていてもよい。また、凹部17の断面形状も半球に限らす、凹部17の底面と側面が直線状に近い形状で交わってもよい。凹部17の大きさは、潤滑油の保持と摩耗粉の確保のために摺動面の平面方向に20μm以上が好ましい。凹部の深さは内部に親油性物質を形成した状態で凹みが少なくても5μm以上になるように、親油性物質の厚みを考慮して深さを決定する。   In FIG. 6A, a recess 17 is formed on the sliding surface 16 of the sliding member 15. The sliding member 15 can be made of cast iron, wrought iron, stainless steel, phosphor bronze, or the like. The concave portion 17 is formed by a method of transferring a shape by pressing a spherical tool or the like against the sliding surface, laser processing, or the like. The recess 17 is not limited to a circle when viewed from the top of the sliding surface 16, and may be an ellipse or a rectangle such as a square. Moreover, even if arrange | positioned at random with respect to the plane direction of the sliding face 16, you may arrange | position regularly at a fixed space | interval. Moreover, the cross-sectional shape of the concave portion 17 is not limited to a hemisphere, and the bottom surface and the side surface of the concave portion 17 may intersect with each other in a shape close to a straight line. The size of the concave portion 17 is preferably 20 μm or more in the plane direction of the sliding surface in order to retain the lubricating oil and secure the wear powder. The depth of the recess is determined in consideration of the thickness of the lipophilic substance so that the recess is at least 5 μm in a state where the lipophilic substance is formed inside.

図6(b)において、凹部17に親油性物質18を形成する。親油性物質18は潤滑油とのなじみがよいものであれば支障がなく、黒鉛やDLCやCNT等を用いることができる。例えば、親油性物質にDLCを用いる場合、プラズマCVD装置を用いて、真空容器中で高周波等がかけられ、かつ温度調整可能な電極上に、摺動面に凹部を形成した摺動部材を装置の真空容器に設置し、真空容器の圧力を下げて、炭化水素ガスと水素ガス等を導入して、高周波をかけてプラズマ化させることで、凹部を含む摺動面にDLCが形成できる。成膜時間等の調整によりDLCの厚みの制御が可能であるが、潤滑油とのなじみのよいDLCが凹部に形成できていればよく、DLCは50nm程度以上あれば問題はない。また、黒鉛やCNTについては、CVD法や蒸着法やスパッタ法やイオンプレーティング法等により形成する。   In FIG. 6B, the lipophilic substance 18 is formed in the recess 17. As long as the lipophilic substance 18 has good compatibility with the lubricating oil, there is no problem, and graphite, DLC, CNT, or the like can be used. For example, when DLC is used as a lipophilic substance, a plasma CVD apparatus is used to provide a sliding member having a concave portion formed on a sliding surface on a temperature-adjustable electrode that is subjected to high frequency in a vacuum vessel. The DLC can be formed on the sliding surface including the concave portion by lowering the pressure of the vacuum vessel, introducing hydrocarbon gas and hydrogen gas, etc., and generating plasma by applying high frequency. Although the thickness of the DLC can be controlled by adjusting the film formation time or the like, it is sufficient that the DLC that is familiar with the lubricating oil can be formed in the recess, and there is no problem if the DLC is about 50 nm or more. Further, graphite and CNT are formed by CVD, vapor deposition, sputtering, ion plating, or the like.

また、図6(b)では全面に親油性物質を形成しているが、凹部に選択的に親油性物質を形成することで、凹部以外に形成された親油性物質を除去する工程を省略してもよい。例えば、親油性物質にDLCを用いる場合、摺動面の凹部に対応する場所が開口したメタルマスク等を摺動面に重ねて成膜することで、凹部にDCLを選択的に形成することが可能である。   Further, in FIG. 6B, the lipophilic substance is formed on the entire surface, but the step of removing the lipophilic substance formed other than the recess is omitted by selectively forming the lipophilic substance in the recess. May be. For example, when DLC is used as the lipophilic substance, a DCL can be selectively formed in the concave portion by depositing a metal mask or the like having an opening corresponding to the concave portion of the sliding surface on the sliding surface. Is possible.

図6(c)は、図6(b)において凹部以外に形成された親油性物質18を除去した後の状態である。摺動面14状に形成された親油性物質16の除去方法としては、例えば遊離砥粒を用いた研磨加工等により行う。研磨加工の基本構成は実施例2で述べたのと同様であるが、砥粒径としては、凹部に形成された親油性物質18の加工がなるべくなされないように粒径の小さい砥粒を用いる。粒径としては、0.5μm以下のものが好適である。   FIG. 6C shows a state after removing the lipophilic substance 18 formed other than the recesses in FIG. 6B. As a method for removing the lipophilic substance 16 formed in the shape of the sliding surface 14, for example, a polishing process using free abrasive grains is performed. The basic structure of the polishing process is the same as that described in the second embodiment, but the abrasive grains having a small grain size are used so that the lipophilic substance 18 formed in the recess is not processed as much as possible. . The particle size is preferably 0.5 μm or less.

本実施例では、摺動面の凹部に親油性物質が備えられ、かつ親油性物質が摺動面から凹んでいる摺動部品の製造方法において、摺動面に内部の幅に比べて開口幅が狭い凹部を形成した後、親油性物質を凹部を含む摺動面の全面に形成し、次いで摺動面に形成された親油性物質を除去することにより、親油性物質が凹部を覆うように配置され、かつ内部の幅より開口幅が狭い凹部を有する摺動部品の製造方法の例を説明する。   In this example, in the manufacturing method of the sliding part in which the recess of the sliding surface is provided with the lipophilic substance and the lipophilic substance is recessed from the sliding surface, the opening width in the sliding surface compared to the internal width. After forming a narrow recess, the lipophilic substance is formed on the entire sliding surface including the recess, and then the lipophilic substance formed on the sliding surface is removed so that the lipophilic substance covers the recess. An example of a method for manufacturing a sliding component having a recess which is arranged and whose opening width is narrower than the internal width will be described.

図7は、本発明の第三の実施形態に関わる摺動部品の製造工程を説明するための工程図であり、同図(a)は摺動面の凹部形成後の状態を、同図(b)は凹部に親油性部材を形成した状態を、同図(c)は凹部以外に形成された親油性物質を取り除いた状態を表す。   FIG. 7 is a process diagram for explaining the manufacturing process of the sliding component according to the third embodiment of the present invention. FIG. 7 (a) shows the state after the concave portion of the sliding surface is formed. b) shows a state in which an oleophilic member is formed in the recess, and FIG. 5 (c) shows a state in which the oleophilic material formed other than the recess is removed.

図7(a)において、摺動部材19の摺動面20に凹部21を形成する。摺動部材19は鋳鉄材や鍛鉄材やステンレス鋼材、リン青銅材等を用いることができる。凹部21は、ドリル等を回転させながら工具の先端を揺動させて加工することで摺動面20に内部より開口径が小さい凹部形状を形成する。凹部21は摺動面20の上部から見た場合に円形となる。また、摺動面20の平面方向に対してはランダムに配置されていても、一定間隔で規則的に配置されていてもよい。凹部21の大きさと深さは、実施例3で説明したのと同様に潤滑油の保持と摩耗粉の確保のために摺動面の平面方向に20μm以上が好ましく、また、凹部21の深さは内部に親油性物質を形成した状態で凹みが少なくても5μm以上になるように、親油性物質の厚みを考慮して深さを決定する。   In FIG. 7A, a recess 21 is formed on the sliding surface 20 of the sliding member 19. The sliding member 19 can be made of cast iron, wrought iron, stainless steel, phosphor bronze, or the like. The recess 21 is processed by swinging the tip of the tool while rotating a drill or the like, thereby forming a recess shape having a smaller opening diameter than the inside on the sliding surface 20. The recess 21 is circular when viewed from the top of the sliding surface 20. Moreover, even if it arrange | positions at random with respect to the plane direction of the sliding face 20, you may arrange | position regularly at fixed intervals. The size and depth of the concave portion 21 is preferably 20 μm or more in the plane direction of the sliding surface in order to retain the lubricating oil and secure the wear powder, as described in the third embodiment, and the depth of the concave portion 21. The depth is determined in consideration of the thickness of the lipophilic substance so that the dent is at least 5 μm with the lipophilic substance formed inside.

図7(b)において、凹部21に親油性物質22を形成する。親油性物質22には、実施例2と同様の材料を用いることがでる。親油性物質22は、斜方スパッタ等により開口幅より広い内部を有する凹部21の内部と摺動面20を含む全面に形成する。   In FIG. 7B, the lipophilic substance 22 is formed in the recess 21. For the lipophilic substance 22, the same material as in Example 2 can be used. The lipophilic substance 22 is formed on the entire surface including the inside of the recess 21 having the inside wider than the opening width and the sliding surface 20 by oblique sputtering or the like.

図7(c)は、図7(b)において凹部以外に形成された親油性物質18を除去した後の状態である。実施例3で説明したのと同様に凹部21以外に形成された摺動面20の親油性物質22を除去する。実施例2で説明したのと同様に凹部の開口幅が凹部の内部の幅より小さい形状となるため、凹部に入った潤滑油は、潤滑油の供給が滞った際に開口が広いものに比べて長時間に渡って少しずつ摺動面に供給されるため、潤滑油が消費するまでの時間を延長でき焼き付きまでの時間を延ばすことが可能である。   FIG. 7C shows a state after removing the lipophilic substance 18 formed in the portion other than the concave portion in FIG. In the same manner as described in the third embodiment, the lipophilic substance 22 on the sliding surface 20 other than the recess 21 is removed. Since the opening width of the concave portion is smaller than the width inside the concave portion as described in the second embodiment, the lubricating oil that has entered the concave portion has a larger opening when the supply of the lubricating oil is delayed. Therefore, the time until the lubricating oil is consumed can be extended and the time until seizure can be extended.

以上、発明の実施形態に述べてきた例のように、本発明によれば摺動面に形成した凹部に親油性物質を備え、その凹部が少なくとも5μm以上凹んでいることで、凹部に潤滑油を確実に確保して、高負荷が摺動部に掛かかり外部からの摺動面への潤滑油の供給が困難になった場合に、この凹みの潤滑油が効果的に作用して焼きつきの抑制ができ、また、稼動時に生じる摺動部材の摩耗粉をこの凹みにより確保できるため、摩耗粉の噛みこみによる摺動面の摩耗を抑制することが可能となる。また、凹部の開口幅が凹部の内部の幅より小さい形状とした場合には、凹部に入った潤滑油は、潤滑油の供給が滞った際に開口が広いものに比べて長時間に渡って少しずつ摺動面に供給されるため、潤滑油が消費するまでの時間を延長でき焼き付きまでの時間を延ばすことも可能となる。   As described above, as in the example described in the embodiment of the present invention, according to the present invention, the concave portion formed on the sliding surface is provided with the lipophilic substance, and the concave portion is recessed by at least 5 μm, so that the lubricating oil is contained in the concave portion. When the high load is applied to the sliding part and it becomes difficult to supply the lubricating oil from the outside to the sliding surface, the dent lubricating oil acts effectively and seizes. Since the wear powder of the sliding member generated during operation can be suppressed by this recess, wear of the sliding surface due to the biting of the wear powder can be suppressed. In addition, when the opening width of the recess is smaller than the inner width of the recess, the lubricating oil that has entered the recess has a longer opening time than the wide opening when the supply of lubricating oil is delayed. Since it is supplied to the sliding surface little by little, the time until the lubricating oil is consumed can be extended, and the time until seizure can be extended.

本実施例では、摺動面に凹部が設けられた摺動部品の製造方法において、摺動面に凹部を形成した後、摺動面に保護膜を設けて選択的に凹部の表面に微細な凹凸を形成し、次いで摺動面の保護膜を除去することにより、凹部の表面に微細な凹凸を有する摺動部品の製造方法の例を説明する。   In this example, in the manufacturing method of the sliding component in which the concave portion is provided on the sliding surface, after the concave portion is formed on the sliding surface, a protective film is provided on the sliding surface, and a fine surface is selectively formed on the surface of the concave portion. An example of a method for manufacturing a sliding component having fine unevenness on the surface of the recess by forming the unevenness and then removing the protective film on the sliding surface will be described.

図8は、本発明の第四の実施形態に関わる摺動部品の製造工程を説明するための工程図であり、同図(a)は摺動面の凹部形成後の状態を、同図(b)は凹部の表面に微細な凹凸を形成する途中の状態を、同図(c)は摺動面の保護膜を取り除いた状態を表す。   FIG. 8 is a process diagram for explaining the manufacturing process of the sliding component according to the fourth embodiment of the present invention. FIG. 8 (a) shows the state after the concave portion of the sliding surface is formed. b) shows a state in the middle of forming fine irregularities on the surface of the recess, and FIG. 7 (c) shows a state where the protective film on the sliding surface is removed.

図8(a)において、摺動部材23の摺動面24に凹部25を形成する。摺動部材23には実施例2で説明したのと同様の材料を用い、凹部25も実施例2で説明したのと同様の方式で形成する。   In FIG. 8A, a recess 25 is formed on the sliding surface 24 of the sliding member 23. The sliding member 23 is made of the same material as described in the second embodiment, and the recess 25 is formed in the same manner as described in the second embodiment.

図8(b)において、摺動面24に保護膜26を形成した後、サンドブラスト等により粒子27を凹部25の表面に衝突させて、凹部25の表面に微細凹凸を形成する。保護膜27は凹部25に対応する位置は開口しており、凹部25の表面に微細凹凸を形成する際に、摺動面24が加工されないように作用する。保護膜26には熱硬化性樹脂や光硬化性樹脂等のフォトレジスト等を用いる。粒子27は凹部25の表面に微細凹凸を形成するものであり、凹部25の開口幅に比べて十分小さい必要があり、平均粒径が1μm以下のSiCやAL等の粒子を用いるのが好ましい。 In FIG. 8B, after forming the protective film 26 on the sliding surface 24, the particles 27 are made to collide with the surface of the concave portion 25 by sandblasting or the like to form fine irregularities on the surface of the concave portion 25. The protective film 27 is opened at a position corresponding to the recess 25, and acts to prevent the sliding surface 24 from being processed when forming fine irregularities on the surface of the recess 25. The protective film 26 is made of a photoresist such as a thermosetting resin or a photocurable resin. The particle 27 forms fine irregularities on the surface of the recess 25, and needs to be sufficiently smaller than the opening width of the recess 25, and particles such as SiC or AL 2 O 3 having an average particle diameter of 1 μm or less are used. Is preferred.

図8(c)は、図8(b)において摺動面24に形成された保護膜26を除去した後の状態である。凹部25の表面に微細凹凸28が形成されている。凹部25の表面に微細凹凸28が設けられたことで、凹部25の表面積が大きくなり、潤滑油が凹部表面の微細凹凸の凹みに入りこむことで、微細凹凸が無い凹部に比べて潤滑油の保持性が向上できる。   FIG. 8C shows a state after removing the protective film 26 formed on the sliding surface 24 in FIG. 8B. A fine unevenness 28 is formed on the surface of the recess 25. By providing the fine irregularities 28 on the surface of the concave portion 25, the surface area of the concave portion 25 is increased, and the lubricating oil enters the concave portion of the fine irregularities on the concave surface, so that the lubricating oil is retained compared to the concave portion having no fine irregularities. Can be improved.

これにより、潤滑保持性の良好な凹部を摺動面に備えることで、これまで述べてきた実施例と同様の効果が得られ、焼きつきの抑制と摩耗粉の噛みこみによる摺動面の摩耗を抑制することが可能となる。   As a result, by providing the sliding surface with a recess having good lubricity retention, the same effect as the examples described so far can be obtained, and the sliding surface can be prevented from being seized and the abrasion of the sliding surface caused by biting of wear powder. It becomes possible to suppress.

本実施の形態で得られる摺動部品としては、例えば圧縮機や油圧ポンプや油圧モータ等に代表される油圧機器等に適用可能である。   The sliding component obtained in the present embodiment can be applied to, for example, a hydraulic device represented by a compressor, a hydraulic pump, a hydraulic motor, and the like.

図9は本発明の摺動部品の一例であるスクロール圧縮機の旋回スクロール部品の概略図である。旋回スクロール部品29は鏡板面30と渦巻き状のラップ31と、その端部の刃先面32から構成される。ハッチングで示した刃先面32が摺動面であり、ここに本発明の実施形態に基づいて凹部を有する構造を付与することで、摺動面の焼付き抑制と耐摩耗性が向上し長期安定性を有するスクロール圧縮機を提供することができる。   FIG. 9 is a schematic view of the orbiting scroll component of the scroll compressor as an example of the sliding component of the present invention. The orbiting scroll component 29 is composed of an end plate surface 30, a spiral wrap 31 and a blade edge surface 32 at the end thereof. The cutting edge surface 32 shown by hatching is a sliding surface, and by providing a structure having a recess according to the embodiment of the present invention, seizure suppression and wear resistance of the sliding surface are improved and long-term stability is achieved. A scroll compressor having the characteristics can be provided.

ここで、スクロール圧縮機について説明する。   Here, the scroll compressor will be described.

スクロール圧縮機は、一対の同一の渦巻き形状の摺動部品を、一方を固定し、他方を旋回運動(相対的には揺動運動)させることにより、圧縮室の体積を小さくしていき圧縮するものである。すなわち、上記の固定されたスクロール(固定スクロール)の外側の吸込み口より空気を吸入し、圧縮空間に封じ込めた空気を旋回運動に伴なう圧縮室の縮小により、渦の中心に向かって圧縮されていく。圧縮空気は渦巻きの中心で最小となり、空気は最高に圧縮されて中心部にある吐出口より外部へ吐き出される。この吸込み、圧縮、吐き出しの工程を連続的に繰り返して圧縮空気を製造している。   A scroll compressor compresses a pair of identical spiral-shaped sliding parts by reducing the volume of a compression chamber by fixing one and rotating the other (relatively swinging). Is. That is, air is sucked from the suction port outside the fixed scroll (fixed scroll), and the air enclosed in the compression space is compressed toward the center of the vortex by the reduction of the compression chamber accompanying the swirling motion. To go. The compressed air becomes the minimum at the center of the spiral, and the air is compressed to the highest level and discharged to the outside from the discharge port at the center. This process of suction, compression, and discharge is continuously repeated to produce compressed air.

上記の固定スクロールと旋回スクロールは、摺動面を対向させて高速で旋回しており、本発明の構成により摺動面の焼付き抑制と耐摩耗性が向上が図れる。   The fixed scroll and the orbiting scroll are revolving at high speed with the sliding surfaces facing each other, and the structure of the present invention can suppress seizure of the sliding surface and improve wear resistance.

図10は、本発明の摺動部品を構成部材として有する一例である油圧機器の断面図である。ポンプケーシング33は本体ケーシング33aとフロントケーシング33bとから構成され、本体ケーシング33aはフロントケーシング33bに接合して固定されている。シリンダブロック34の中心を貫通して連結した回転軸35が設けられ、回転軸35は本体ケーシング33aおよびフロントケーシング33bに、それぞれ軸受け36、37により回転自在に支持されている。また、回転軸35にはカップリング部材38が連結されており、このカップリング部材38には、エンジンの出力軸等が連結される。   FIG. 10 is a cross-sectional view of a hydraulic device which is an example having the sliding component of the present invention as a constituent member. The pump casing 33 includes a main casing 33a and a front casing 33b. The main casing 33a is joined and fixed to the front casing 33b. A rotation shaft 35 that is connected through the center of the cylinder block 34 is provided. The rotation shaft 35 is rotatably supported by bearings 36 and 37 on the main body casing 33a and the front casing 33b, respectively. Further, a coupling member 38 is connected to the rotating shaft 35, and an output shaft of the engine is connected to the coupling member 38.

斜板39は本体ケーシング33aに設けた傾転角制御部材40によって、回転軸35に対する斜板39の傾斜角度を制御することにより、油圧ポンプの塗出容量が決定される。斜板39には所定数のシュー41が装着されており、これら各シュー41には球面継手を介してそれぞれピストン42が連結している。ピストン42はシリンダブロック34に形成されたシリンダ穴43に往復稼動できるように挿入されている。シリンダブロック34には奇数個の例えば5個や7個のシリンダ穴43が設けられており、各シリンダ穴43にそれぞれピストン42が挿入されている。   The swash plate 39 controls the inclination angle of the swash plate 39 with respect to the rotary shaft 35 by the tilt angle control member 40 provided in the main body casing 33a, thereby determining the coating capacity of the hydraulic pump. A predetermined number of shoes 41 are mounted on the swash plate 39, and pistons 42 are connected to the shoes 41 via spherical joints. The piston 42 is inserted into a cylinder hole 43 formed in the cylinder block 34 so as to be able to reciprocate. The cylinder block 34 is provided with an odd number, for example, five or seven cylinder holes 43, and a piston 42 is inserted into each cylinder hole 43.

シリンダブロック34と本体ケーシング33aとの間には弁板44が介装されている。弁板44には、本体ケーシング33aに設けた吸い込み流路45および吐出流路46に連通する吸い込みポート47と吐出ポート48とが設けられている。   A valve plate 44 is interposed between the cylinder block 34 and the main body casing 33a. The valve plate 44 is provided with a suction port 47 and a discharge port 48 communicating with the suction flow path 45 and the discharge flow path 46 provided in the main body casing 33a.

駆動手段(図示しない)により回転軸35を回転駆動すると、この回転軸35に連結したシリンダブロック34が回転駆動される。シリンダブロック34が回転することにより、各シリンダ穴43に挿入したピストン42が回転軸35の軸回りに回転駆動されることになり、この時にピストン42に連結したシュー41が斜板39の表面上を摺動する。ここで、斜板39が回転軸35に対して傾斜していると、この傾斜角に応じてピストン42がシリンダ穴43内で上下運動して、油の吸い込みと吐出が繰り返されてポンプとして作用する。   When the rotary shaft 35 is rotationally driven by driving means (not shown), the cylinder block 34 connected to the rotary shaft 35 is rotationally driven. As the cylinder block 34 rotates, the piston 42 inserted into each cylinder hole 43 is driven to rotate about the axis of the rotation shaft 35. At this time, the shoe 41 connected to the piston 42 is moved on the surface of the swash plate 39. Slide. Here, when the swash plate 39 is inclined with respect to the rotation shaft 35, the piston 42 moves up and down in the cylinder hole 43 in accordance with the inclination angle, and the suction and discharge of oil are repeated to act as a pump. To do.

シュー41の斜板39に対向する面49が摺動面である。ここに本発明の実施形態に基づいて凹部を有する構造を付与することで、長期安定性を有する油圧ポンプを提供することができる。   A surface 49 facing the swash plate 39 of the shoe 41 is a sliding surface. By providing the structure which has a recessed part here based on embodiment of this invention, the hydraulic pump which has long-term stability can be provided.

1‥第一の摺動部材、 2‥第一の摺動部材の摺動面、 3‥第二の摺動部材
4‥第二の摺動部材の摺動面、 5‥潤滑油、 6‥凹部
7‥親油性物質、 8‥摺動部材、 9‥黒鉛からなる親油性物質
10‥摺動面、 11‥砥粒、 12‥研磨液
13‥定盤、 14‥凹部、 15‥摺動部材
16‥摺動面、 17‥凹部、 18‥親油性物質
19‥摺動部材、 20‥摺動面、 21‥凹部
22‥親油性物質、 23‥摺動部材、 24‥摺動面
25‥凹部、 26‥保護膜、 27‥粒子
28‥微細凹凸、 29‥旋回スクロール部品、 30‥鏡板面
31‥ラップ、 32‥刃先面、 33‥ポンプケーシング
33a‥本体ケーシング、 33b‥フロントケーシング
34‥シリンダブロック、 35‥回転軸、 36‥軸受け
37‥軸受け、 38‥カップリング部材、 39‥斜板
40‥傾転角制御部、 41‥シュー、 42‥ピストン
43‥シリンダ穴、 44‥弁板、 45‥吸い込み流路
46‥吐出流路、 47‥吸い込みポート、 48‥吐出ポート
49‥シューの斜板に対向する面
DESCRIPTION OF SYMBOLS 1 ... 1st sliding member, 2 ... Sliding surface of 1st sliding member, 3 ... 2nd sliding member 4 ... Sliding surface of 2nd sliding member, 5 ... Lubricating oil, 6 ... Recessed portion 7 ··· Lipophilic material 8 · Sliding member 9 · Lipophilic material made of graphite 10 · Sliding surface · 11 · Abrasive grain · 12 · Polishing liquid 13 · Platen · 14 · Recessed portion · 15 · Sliding member 16. Sliding surface, 17: Recessed portion, 18: Lipophilic substance, 19: Sliding member, 20 ... Sliding surface, 21: Recessed portion, 22: Lipophilic substance, 23: Sliding member, 24 ... Sliding surface, 25: Recessed portion 26 ... Protective film, 27 ... Particles 28 ... Fine irregularities, 29 ... Orbiting scroll parts, 30 ... End plate surface 31 ... Wrap, 32 ... Blade face, 33 ... Pump casing 33a ... Main body casing, 33b ... Front casing 34 ... Cylinder block 35 ... Rotating shaft, 36 ... Bearing 37 ... Bearing, 38 ... Coupling part , 39 ... Swash plate 40 ... Tilt angle control part, 41 ... Shoe, 42 ... Piston 43 ... Cylinder hole, 44 ... Valve plate, 45 ... Suction passage 46 ... Discharge passage, 47 ... Suction port, 48 ... Discharge port 49. Face facing the swash plate of the shoe

Claims (13)

互いの平面を突き合わせて摺動させる一対の摺動面を備えた摺動部品であって、
少なくとも一方の摺動面に凹部が形成され、該凹部の内面を覆うように親油性物質が形成されていることを特徴とする摺動部品。
A sliding component having a pair of sliding surfaces that slide against each other in a plane,
A sliding part, wherein a concave portion is formed on at least one sliding surface, and a lipophilic substance is formed so as to cover the inner surface of the concave portion.
請求項1記載の摺動部品において、
前記親油性物質は炭素原子含有の無機物であることを特徴とする摺動部品。
The sliding component according to claim 1,
The sliding part, wherein the lipophilic substance is a carbon atom-containing inorganic substance.
請求項2記載の摺動部品において、
前記炭素含有の無機物は黒鉛、ダイヤモンドライクカーボン、カーボンナノチューブのいずれからなることを特徴とする摺動部品。
In the sliding component according to claim 2,
The sliding component, wherein the carbon-containing inorganic material is any of graphite, diamond-like carbon, and carbon nanotube.
請求項1記載の摺動部品において、
前記凹部の内面を覆うように親油性物質表面が前記摺動面の表面に対して5μm以上凹んでいることを特徴とする摺動部品。
The sliding component according to claim 1,
A sliding component characterized in that the surface of the lipophilic substance is recessed by 5 μm or more with respect to the surface of the sliding surface so as to cover the inner surface of the recess.
請求項1記載の摺動部品において、
前記一対の摺動面が圧縮機の摺動部品の摺動面であることを特徴とする摺動部品。
The sliding component according to claim 1,
A sliding component characterized in that the pair of sliding surfaces are sliding surfaces of a sliding component of a compressor.
請求項1記載の摺動部品において、
前記一対の摺動面が油圧機器の摺動部品の摺動面であることを特徴とする摺動部品。
The sliding component according to claim 1,
A sliding component, wherein the pair of sliding surfaces are sliding surfaces of a sliding component of a hydraulic device.
互いの平面を突き合わせて摺動させる一対の摺動面を備えた摺動部品の製造方法であって、
前記一対の摺動面のうち少なくとも一方の摺動面を、親油性物質を内在させた鋳鉄の表面を遊離砥粒を用いて研磨することにより形成することを特徴とする摺動部品の製造方法。
A method of manufacturing a sliding component having a pair of sliding surfaces that slide against each other in a plane,
At least one sliding surface of the pair of sliding surfaces is formed by polishing a surface of cast iron in which an oleophilic substance is contained by using free abrasive grains. .
請求項7記載の摺動部品の製造方法において、
前記親油性物質が炭素原子含有の無機物であることを特徴とする摺動部品の製造方法。
In the manufacturing method of the sliding components according to claim 7,
The method for producing a sliding component, wherein the lipophilic substance is a carbon atom-containing inorganic substance.
請求項8記載の摺動部品の製造方法において、
前炭素原子含有の無機物が黒鉛からなることを特徴とする摺動部品の製造方法。
In the manufacturing method of the sliding component of Claim 8,
A method for producing a sliding component, wherein the inorganic substance containing a pre-carbon atom is made of graphite.
請求項7記載の摺動部品の製造方法において、
前記遊離砥粒の平均粒径が30μm以上であることを特徴とする摺動部品の製造方法。
In the manufacturing method of the sliding components according to claim 7,
The method for producing a sliding component, wherein the loose abrasive has an average particle size of 30 μm or more.
互いの平面を突き合わせて摺動させる一対の摺動面を備えた摺動部品の製造方法であって、
前記一対の摺動面のうち少なくとも一方の摺動面を、摺動部材の表面に凹部を形成し、該凹部の内面を覆うように親油性物質を堆積することで形成することを特徴とする摺動部品の製造方法。
A method of manufacturing a sliding component having a pair of sliding surfaces that slide against each other in a plane,
At least one of the pair of sliding surfaces is formed by forming a recess on the surface of the sliding member and depositing a lipophilic substance so as to cover the inner surface of the recess. Manufacturing method of sliding parts.
請求項11記載の摺動部品の製造方法において、
前記親油性物質が炭素原子含有の無機物であることを特徴とする摺動部品の製造方法。
In the manufacturing method of the sliding components according to claim 11,
The method for producing a sliding component, wherein the lipophilic substance is a carbon atom-containing inorganic substance.
請求項12記載の摺動部品の製造方法において、
前記炭素含有の無機物が黒鉛、ダイヤモンドライクカーボン、カーボンナノチューブのいずれからなることを特徴とする摺動部品の製造方法。
In the manufacturing method of the sliding components according to claim 12,
The method for producing a sliding component, wherein the carbon-containing inorganic substance is any one of graphite, diamond-like carbon, and carbon nanotubes.
JP2011063342A 2011-03-22 2011-03-22 Sliding component and method for manufacturing the same Withdrawn JP2012197900A (en)

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JP2015102240A (en) * 2013-11-28 2015-06-04 京セラ株式会社 Sliding device
CN104854356A (en) * 2012-12-13 2015-08-19 H.E.F.公司 Guiding member in the form of a metal ring for assembly with friction and with the articulating and/or sliding capability of a shaft
JP2022100954A (en) * 2020-12-24 2022-07-06 日本アイ・ティ・エフ株式会社 Hard carbon film and method for depositing the same
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JP5903391B2 (en) * 2013-02-06 2016-04-13 大豊工業株式会社 Manufacturing method of sliding member
JP6971045B2 (en) * 2017-03-17 2021-11-24 セイコーインスツル株式会社 Ankles, governors, movements and watches
TWI709459B (en) * 2019-11-06 2020-11-11 大陸商福暘技術開發有限公司 Method for roughening the surface of glass substrate

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JPH01164817A (en) * 1987-12-17 1989-06-28 Kubota Ltd Bearing structure having excellent slide characteristics
JP2762115B2 (en) * 1989-05-25 1998-06-04 本田技研工業株式会社 Magnesium alloy with high temperature creep strength
JP4779841B2 (en) * 2006-07-10 2011-09-28 日産自動車株式会社 Internal combustion engine
JP4840026B2 (en) * 2006-08-24 2011-12-21 株式会社Ihi Seizure-resistant cast iron

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Publication number Priority date Publication date Assignee Title
CN104854356A (en) * 2012-12-13 2015-08-19 H.E.F.公司 Guiding member in the form of a metal ring for assembly with friction and with the articulating and/or sliding capability of a shaft
JP2015102240A (en) * 2013-11-28 2015-06-04 京セラ株式会社 Sliding device
JP2022100954A (en) * 2020-12-24 2022-07-06 日本アイ・ティ・エフ株式会社 Hard carbon film and method for depositing the same
US20220314372A1 (en) * 2021-03-30 2022-10-06 GM Global Technology Operations LLC System and method for making an enhanced cast iron workpiece having increased lubricant retention

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