JP2012195434A - Surface light emitting laser module, optical scanner using surface light emitting laser module, and image formation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface light emitting laser module with high reliability capable of monitoring a light amount in a module without deteriorating the light amount or without using a separate light receiving element or optical member, and capable of stabilizing a beam shape and the light amount at a radiation position, and its application device.SOLUTION: The surface light emitting laser module comprises a light emitting element 105 made of a surface light emitting laser, a mirror 109, a light receiving element 106, a cap 102, a cover glass 103, and a base 101, to which the light emitting element, the mirror and the light receiving element are mounted. The light emitting element, the light receiving element, the mirror, and mirror incident angle change means 108 for changing an incident angle of light emitted from the light emitting element onto the mirror at an entire part or one part of the mirror are arranged at an inner part sealed by the cap, the cover glass and the base. The mirror incident angle change means switches a condition that the light is incident on the light receiving element, and a condition that the light is outputted to the outside through a window, and sets the light amount of the outputs of the light emitting element by the outputs of the light receiving element when the light is incident on the light receiving element.

Description

  The present invention relates to light output control and packaging technology of a surface emitting laser element, and in particular, does not reduce the amount of light that should be used as an original application, does not use another light receiving element or optical member, and forms an image. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface emitting laser module capable of stabilizing the beam shape on the photosensitive member of the apparatus and capable of monitoring the amount of light in the module, an optical scanning device using the surface emitting laser module, and an image forming apparatus. Is.

  A surface-emitting laser (vertical cavity surface emitting laser: hereinafter referred to as a VCSEL) emits light in a direction perpendicular to a substrate on which it is formed. Compared with a light emitting semiconductor laser, it is characterized by low cost, low threshold, low power consumption, and easy inspection and two-dimensional array in a wafer state. In addition, the surface emitting laser has high performance, so that it has been conventionally used for the light source of an image forming apparatus such as a laser printer, an optical recording apparatus such as an optical disc, an optical interconnection such as an optical interconnection, an image reading apparatus, and an image display apparatus. Research and development has been vigorously conducted as an alternative to edge-emitting lasers.

  In the case of an edge-emitting laser, the light output from the opposite end face of the light output to the outside is monitored by the light receiving element incorporated in the same package, output to the drive circuit, and output from the drive circuit to the VCSEL It is possible to control the light output to be stabilized by feeding back to the current to be supplied. However, as described above, in the case of a VCSEL, the structure emits light in a direction perpendicular to the substrate on which it is formed. Therefore, it is not possible to adopt a configuration like an edge emitting laser.

  For this reason, various techniques for controlling and stabilizing the light output for applications where the light output of the light source needs to be stabilized, such as an image forming apparatus, have been studied and proposed in several patent documents. The following is a brief description of typical patent documents.

  As a light amount detection method for a two-dimensional VCSEL array, Japanese Patent Application Laid-Open No. 2004-287085 (Patent Document 1) describes a method of separating a part of a laser beam used for exposure by a half mirror.

  FIG. 23 is a view showing an exposure apparatus 600 having a configuration for separating a part of the laser beam described in Patent Document 1, in which the laser beam emitted from the surface emitting laser array 601 is a collimating lens. After being made into a substantially parallel light beam by 602, it is incident on the half mirror 603 and partly separated and reflected. A part of the laser beam separated and reflected by the half mirror 603 passes through the lens 604 and enters the light amount sensor 605, and the light amount sensor 605 detects the light amount.

  The main laser beam used for exposure emitted from the half mirror 603 is shaped by the aperture 606 and then reflected to the rotary polygon mirror 609 side through the cylinder lens 607 and the folding mirror 608 and is reflected by the Fθ lenses 610 and 610a. After being refracted, it is reflected by the cylinder mirrors 611 and 612 and irradiated onto the outer peripheral surface of the photosensitive drum 613.

  Further, when the surface reflecting the laser beam among the reflecting surfaces of the rotary polygon mirror 609 is directed to reflect the incident beam in the direction corresponding to the end portion on the scanning start side in the scanning range, Reflected by the pickup mirror 614 and incident on the beam position detection sensor 615, this incident signal is used to synchronize the modulation start timing.

  As another method for detecting the amount of light of a single-element semiconductor laser, for example, in Japanese Patent Laid-Open No. 08-330661 (Patent Document 2), a beam splitter is inserted into an optical system through which emitted laser light passes, A method has been proposed in which a part of outgoing light is branched and detected as monitor light.

  FIG. 24 is a diagram showing a method of partially diverging forward emitted light proposed in Patent Document 2 and detecting it as monitor light. In FIG. 24, the laser light emitted from the surface emitting laser diode array 620 is a beam. The light is divided by the splitter 621, one of which is laser light 623 incident on the photosensitive material and the other is monitor light incident on the photodetector 622.

  In Japanese Patent Application Laid-Open No. 2004-87816 (Patent Document 3), the emitted laser light is collimated by a collimator lens, and then is divided into a peripheral light beam and a central light by a reflecting mirror having an opening. A method has been proposed in which center light that has passed through the opening of the reflecting mirror is used for image recording, and ambient light reflected by the reflecting mirror is received by a photodiode and used for monitoring the amount of light.

  In FIG. 25, the emitted laser light proposed in Patent Document 3 is spatially divided into a peripheral light beam and a central light, the central light is used for image recording, and the peripheral light is received by a photodiode to monitor the amount of light. In this figure, a diffused light beam (first light) La emitted from the front end face of the semiconductor laser chip 630 is firstly collimated by a collimator lens 631. The light beam L0 is spatially divided into center light Lb passing through the opening of the plane mirror 632 and ambient light Lc reflected by the plane mirror 632, and the center light Lb is used for image recording. Lc is incident on the photodiode 633 to generate a light reception signal F, and the injection current G to the semiconductor laser chip 630 is controlled so that the level of the light reception signal F is constant.

  Japanese Patent Laid-Open No. 2007-328334 (Patent Document 4) discloses that a reflecting mirror having an opening is arranged before the emitted laser light is converted into parallel light by a collimator lens, so that the peripheral light beam and the central light are arranged. The center light that has been divided into spaces and passed through the opening of the reflecting mirror is converted into parallel light by a collimating lens, and then used for image recording. The ambient light reflected by the reflecting mirror is received by a photodiode and used for monitoring the amount of light. A method has been proposed.

  In FIG. 26, the emitted laser beam proposed in Patent Document 4 is spatially divided into a peripheral luminous flux and a central light, and the central light is used for image recording after being converted into parallel light. It is a figure which shows the method of light-receiving and using it for the monitor of light quantity, In the same figure, the peripheral light of the area which does not permeate | transmit the collimator lens 643 among the laser beams radiated | emitted from the laser light emission part 641 of the semiconductor laser 640 is a concave reflection part. It is converted into parallel reflected light by 644 (broken line arrow in the figure) and enters the photodiode 645. After being narrowed down by the diaphragm member 642, the laser beam C that has passed through the collimator lens 643 and became parallel is used for image recording.

  Japanese Patent Application Laid-Open No. 6-309585 (Patent Document 5) and Japanese Patent Application Laid-Open No. 10-303513 (Patent Document 6) disclose a periphery of laser light emitted by arranging a PD (light receiving element) on a window of a package. What monitors the light quantity with light is described.

  FIG. 27 is a diagram showing a configuration in which the amount of light is monitored by ambient light of laser light emitted by arranging a PD (light receiving element) in the window of the package described in Patent Document 5, The laser chip 650 is mounted inside a housing 652 that is hermetically maintained by a transparent flat plate 653 serving as a laser light emission window. Is monitored and fed back to the output control circuit of the semiconductor laser. Of the forward radiated light from the semiconductor laser chip 650, light near the center is converted into parallel light by the collimator lens 651 and used for image recording.

  FIG. 28 is a diagram showing another configuration for monitoring the amount of light with ambient light of laser light emitted by arranging a PD (light receiving element) in the window of the package described in Patent Document 6, and in FIG. Of the diffused beam emitted from the front light emitting point of the laser chip 660, the light near the center of the forward radiated light from the laser chip 660 is used for recording / reproducing of the optical disk, and is not used for recording / reproducing of the optical disk. Is received by a donut-shaped light receiving element 662 installed around the window glass 661, and the light reception output is monitored and fed back to the output control circuit of the laser chip 660. The electrode 663 is used for supplying current to the laser chip 660 and transmitting current generated by the light receiving element 662.

  Furthermore, as a means for changing the light emission direction when controlling the light output, Japanese Patent Laid-Open No. 2006-261494 (Patent Document 7) has a function of changing the light emission direction with a liquid microlens in the light source device. Usually, the emitted light is incident on the coupling lens, but when controlling the light output, a method is proposed in which the emitted light is folded by an external mirror and incident on an external photodetector to detect the amount of light. .

  FIG. 29 is a diagram showing a method of detecting the amount of light using a liquid microlens having a function of changing the light emission direction proposed in Patent Document 7, and in this figure, the light is emitted from the surface emitting laser 670. A coupling lens 673 for converting the divergent light beam that has passed through the cover glass 672 into a desired light beam shape, a photodetector 675 that receives at least part of the light beam from the surface emitting laser 670, and a surface emitting laser. Cover glass 672 for sealing 670, optical path changing means for switching the optical path so that a part of the light beam from surface emitting laser 670 is guided to photodetector 675 (having a large separation angle and high-speed response) Liquid microlens) 671, a folding mirror 674 for guiding the light beam switched by the optical path changing means 671 to the photodetector 675. The light beam emitted from the surface emitting laser 670 is normally radiated in the optical axis direction, but the optical path is switched by the optical path changing means 671 only when the light amount is controlled (in the direction of the broken line in the figure) and turned back. After being reflected by the mirror 674, the amount of light is detected by the photodetector 675, and the light reception output is monitored and fed back to the output control circuit of the surface emitting laser 670.

  However, when an optical member such as a beam splitter or a half mirror is disposed in the optical system as described in Japanese Patent Application Laid-Open No. 2004-287085 (Patent Document 1) and Japanese Patent Application Laid-Open No. 08-330661 (Patent Document 2). Since the amount of light reaching the photoconductor of the image forming apparatus is reduced by the amount of light reflected by the optical member, it is necessary to increase the light output of the light source in order to keep the amount of light reaching the photoconductor constant.

  In addition, as described in Japanese Patent Application Laid-Open No. 2004-87816 (Patent Document 3) and Japanese Patent Application Laid-Open No. 2007-328334 (Patent Document 4), when laser light is spatially divided outside a semiconductor package on which a light source is mounted, There are restrictions on the arrangement and shape of the light receiving elements for monitoring the amount of light. For example, it is necessary to mount on a substrate different from the light source (Patent Document 3), or an optical member for mounting in the vicinity of the light source on the same substrate as the light source is required (Patent Document 4).

  In addition, the amount of light per unit area decreases as the distance from the light source increases until the collimated lens produces parallel light, so an optical member or a large-area light receiving element for concentrating the monitor light on the light receiving element is required. However, as the area of the light receiving element increases, the response speed to changes in the amount of light decreases.

  Furthermore, it is necessary to adjust the position of the optical member for making the light incident on the light receiving element and the optical member for condensing the light so that the monitor light is made incident on the light receiving element.

  In JP-A-6-309585 (Patent Document 5) and JP-A-10-303513 (Patent Document 6), when the light source of the one-dimensional array or the two-dimensional array is used, the monitor light quantity is the position of the light emitting point. Therefore, the exact light source cannot be set.

  Furthermore, in Japanese Patent Application Laid-Open No. 2006-261494 (Patent Document 7), the light emission direction is changed by the refractive power of the lens, but the lens has a large attenuation of light, and when the light is condensed outside due to aberration. There are problems such as blurring and distortion in the image. Further, it is necessary to provide a folding mirror and a photodetector outside the semiconductor package on which the light source is mounted.

  Therefore, the present invention solves the above-described problems, and can stabilize the beam shape at the irradiation position (for example, on the surface of the photoreceptor in the image forming apparatus) without reducing the amount of light that should be used for the original application. An object of the present invention is to provide a highly reliable small surface emitting laser module capable of monitoring the amount of light in the module, and an image forming apparatus and an optical scanning device using the surface emitting laser module. .

The present invention employs the following configuration in order to achieve the above object.
a) A surface-emitting laser module according to the present invention includes a light-emitting element composed of a surface-emitting laser, a mirror that reflects light emitted from the light-emitting element, a light-receiving element that receives light reflected by the mirror, A cap having a window that transmits light reflected by the mirror; a cover glass installed in the window of the cap; and a base on which the light emitting element, the mirror, and the light receiving element are mounted, the cap and the cover glass. In the interior sealed by the base, the incident angle of the light emitted from the light emitting element, the light receiving element, the mirror, and the light emitted from the light emitting element to the mirror is the whole of the mirror or one of the mirrors. And a state in which light is incident on the light receiving element by changing the incident angle to the mirror by the mirror incident angle changing means. The light output from the light emitting element is set on the basis of the output of the light receiving element when the light is incident on the light receiving element. It is said.

b) Further, the light-emitting element and the mirror are arranged so that the portions where the incident angles of the light-emitting element and the mirror are changed are both one-dimensional arrays and the arrangement directions of the two-dimensional arrays are parallel to each other.

c) In addition, the light emitting element is a two-dimensional array, the location where the incident angle to the mirror is changed is a one-dimensional array, and the arrangement direction of the one-dimensional array where the incident angle to the mirror is changed is It is characterized by being installed so as to be parallel to either one of the arrangement directions of the binary array of light emitting elements.

d) In addition, both the light emitting element and the part where the incident angle to the mirror is changed are two-dimensional arrays, and the arrangement direction of the two-dimensional array where the incident angle of the mirror is changed is It is characterized by being installed parallel to the array direction of the original array.

e) Further, the mirror incident angle changing means controls the incident angle to the mirror so that the light emitted from the light emitting element for setting the light amount enters the light receiving element.

f) The mirror incident angle changing means simultaneously turns on the light of the light emitting element for setting the light amount and the light of the light emitting element other than the light emitting element for setting the light amount, and the light of the light emitting element other than the light emitting element for setting the light amount. Is output from the window to the outside.

g) Further, the area of the mirror for changing the incident angle in order to make the light from the light emitting element incident on the light receiving element is matched with the beam profile of the light from the light emitting element.

h) Further, the angle of the mirror in a state where the light of the light emitting element is incident on the light receiving element is changed according to the position of the light emitting element incident on the mirror.

i) The inside of the package sealed by the cap, the cover glass, and the base is filled with an inert gas.

j) The inside of the package sealed by the cap, the cover glass, and the base is decompressed.

k) An optical device according to the present invention is characterized in that the surface emitting laser module according to any one of the above a) to j) is used as a light source.

l) An optical scanning device according to the present invention includes a surface emitting laser module according to any one of the above a) to j), and a deflecting unit that deflects one or more laser beams emitted from the surface emitting laser module. And a scanning optical element for condensing one or a plurality of laser beams output from the deflecting means on the surface to be scanned.

m) a collimating lens that converts the light into parallel light, and an aperture plate having an aperture that allows the light at the center of the parallel light to pass therethrough, and the one or more laser light emitted from the surface emitting laser module And the light incident on the deflecting means through the aperture plate.

n) The image forming apparatus according to the present invention is characterized by using the surface emitting laser module according to any one of the above a) to j) or the optical scanning device according to the above l) or m). .

o) Further, an image forming apparatus according to the present invention includes at least one image carrier and at least one laser beam that scans the at least one image carrier with one or more laser beams modulated by image information. The optical scanning device according to 1) or m) is provided.

p) Further, the image information is color image information, and the image carrier is provided for each color element of the color image information.

  According to the present invention, by adopting the above-described configuration, it is possible to monitor the amount of light in the module without reducing the amount of light that should be used as the original application, and to adjust the irradiation position (for example, in an image forming apparatus). It is possible to stabilize the beam shape and light quantity on the photosensitive member surface, and to realize a highly reliable small surface emitting laser module, and an image forming apparatus and an optical scanning device using the surface emitting laser module. .

It is a figure for demonstrating the surface emitting laser module which concerns on Example 1 of this invention. It is the figure which looked at the surface emitting laser module of FIG. 1 from the upper surface. It is a figure for demonstrating the surface emitting laser module which concerns on Example 2 of this invention. It is the figure which looked at the surface emitting laser module of FIG. 3 from the upper surface. It is a figure which shows the surface emitting laser module which concerns on Example 3 of this invention. It is the figure which looked at the surface emitting laser module of FIG. 5 from the upper surface. It is a figure which shows the example in the case of making all the light from a light emitting element array enter into the light receiving element which is not shown in figure. It is a figure which shows the example in the case of making a part of light from a light emitting element array enter into the light receiving element which is not shown in figure. It is a figure which shows the example in the case of making a part of light from a light emitting element array enter into the light receiving element which is not shown in figure. It is a figure which shows the example which radiate | emits the light from the other light emitting element of a light emitting element array outside simultaneously, making the light from one light emitting element of a light emitting element array enter into a light receiving element, and setting light quantity. It is a figure for demonstrating the surface emitting laser module which concerns on Example 4 of this invention. In Example 4, it is a figure for demonstrating the irradiation range of the one-dimensional mirror array by the light from a two-dimensional light emitting element array. It is a figure for demonstrating the surface emitting laser module which concerns on Example 5 of this invention. In Example 5, it is a figure for demonstrating the relationship between the irradiation range of the one-dimensional mirror array by the light from a two-dimensional light emitting element array, and the range of the mirror made movable. It is a figure for demonstrating the laser printer as an image forming apparatus which concerns on Example 6 of this invention. It is a figure for demonstrating the optical scanning device which concerns on Example 7 of this invention. It is a figure for demonstrating the example of arrangement | positioning of the light emitting element in case the light emitting element of a surface emitting laser module is a two-dimensional array. It is a figure for demonstrating the VCSEL drive circuit in case a light emitting element is a single element of VCSEL. It is a figure for demonstrating the VCSEL drive circuit in case the light emitting element is 4 elements of VCSEL. It is a block diagram of the laser printer as a color image forming apparatus which concerns on Example 8 of this invention. It is a figure for demonstrating the optical transmission module which concerns on Example 10 of this invention. It is a figure for demonstrating the optical transmission / reception module which concerns on Example 11 of this invention. It is a figure which shows the prior art example disclosed by patent document 1. FIG. It is a figure which shows the prior art example disclosed by patent document 2. FIG. It is a figure which shows the prior art example disclosed by patent document 3. FIG. It is a figure which shows the prior art example disclosed by patent document 4. FIG. It is a figure which shows the prior art example disclosed by patent document 5. FIG. It is a figure which shows the prior art example disclosed by patent document 6. FIG. It is a figure which shows the prior art example disclosed by patent document 7. FIG.

[Example 1] << Surface emitting laser module using a single light emitting element and a single mirror >>
FIG. 1 is a view for explaining a surface emitting laser module using a single light emitting element and a single mirror according to Embodiment 1 of the present invention. A surface emitting laser is formed in the single light emitting element. In the figure, (a) is a normal state (a state in which light from a surface emitting laser is taken out and used as a light source), and (b) is a state at the time of setting a light amount (when setting the amount of light emitted from a surface emitting laser). State).

  In the figure, 101 is a base, 102 is a cap, 103 is a window glass, 104 and 107 are posts, 105 is a light emitting element using a surface emitting laser, 106 is a light receiving element such as a photodiode, 108 is a mirror moving mechanism, 109 Indicates a mirror.

  The surface emitting laser module according to the present invention has a package which is surrounded and sealed by a base 101, a cap 102 and a window glass 103, as shown in FIG. Posts 104 and 107 are mounted on the base 101 inside the package, a light emitting element 105 and a light receiving element 106 are mounted on the post 104, and a mirror movable mechanism 108 and a mirror 109 are mounted on the post 107.

  FIG. 2 is a top view of the surface emitting laser module of FIG. In FIG. 2, all of the light emitted from the light emitting element 105 and expanded in the dotted line direction enters the mirror 109.

  In FIG. 1, light emitted from the light emitting element 105 travels while spreading at a radiation angle in the dotted line direction with the solid line direction as the center of the optical axis, and is reflected by the mirror 109. In the normal state of FIG. Light is emitted outside the package through the window glass 103 while maintaining the radiation angle. In the normal state of FIG. 2A, referring to FIG. 2, light is emitted toward the surface of the paper.

  On the other hand, in the state when the light amount is set in FIG. 5B, all the light is transmitted to the light receiving element 106 inside the package by changing the incident angle of the light emitted from the light emitting element 105 to the mirror 109 by the mirror enabling mechanism 108. Incident. Thereafter, the light receiving element 106 measures the amount of incident light. Then, by using a control circuit 403 described later, the light amount is controlled by increasing or decreasing the light output from the measured light amount to the light emitting element.

  As described above, when the angle of the mirror 109 in the state in which the light of the light source of the light emitting element 105 is incident on the light receiving element 106 is changed according to the position of the light source incident on the mirror 109, the size of the light receiving element 106 is increased. It can be made smaller.

  As in this embodiment, the incident angle of the light emitted from the light emitting element 105 to the mirror 109 is changed by the whole or a part of the mirror so that the light is incident on the light receiving element and the light is output from the window to the outside. Can be switched. As a result, the light quantity of the light source can be set by the output of the light receiving element, the light quantity of light that should be used as the original application is not reduced as much as possible, and another light receiving element or optical member is not used. It is possible to monitor the light quantity of the surface emitting laser 105.

  Further, since the light quantity per unit area incident on the light receiving element 106 is increased by arranging the mirror 109 and the light receiving element 106 at a position close to the light emitting point, the light receiving area of the light receiving element 106 can be reduced, so that high-speed light output is possible. Control becomes possible.

[Example 2] << Surface emitting laser module using a single light emitting element and a two-part mirror >>
FIG. 3 is a view for explaining a surface emitting laser module using a single light emitting element and a two-part mirror according to Example 2 of the present invention. The mirror 109 of the surface emitting laser module of FIG. This is divided into a fixed mirror 109a and a movable mirror 109b at the center. Similar to FIG. 1, a surface emitting laser is formed in the single light emitting element. In FIG. 3, (a) is a normal state (a state where light from a surface emitting laser is taken out and used as a light source), and (b) is a state when a light amount is set (when an emitted light amount of the surface emitting laser is set). State).

  FIG. 4 is a top view of the surface emitting laser module of FIG. In FIG. 4, the peripheral portion of the light emitted from the light emitting element 105 and extending in the dotted line direction is incident on the fixed mirror 109a, and the periphery of the optical axis center of the light is incident on the movable mirror 109b.

  In FIG. 3, the light emitted from the light emitting element 105 travels while spreading at a radiation angle in the dotted line direction with the solid line direction as the center of the optical axis, and is reflected by the fixed mirror 109a and the movable mirror 109b. In this state, since both the fixed mirror 109a and the movable mirror 109b are incident at the same angle, all the light is transmitted through the window glass 103 and emitted outside the package while maintaining the radiation angle. In the state of FIG. 3A, referring to FIG. 4, light is emitted toward the surface of the paper.

  On the other hand, in the state when the light amount is set in FIG. 5B, the peripheral portion of the light incident on the fixed mirror 109a is transmitted through the window glass 103 to the outside of the package while maintaining the radiation angle as in the normal state. Although the light is emitted, the central portion of the light incident on the movable mirror 109b is incident on the light receiving element 106 inside the package by changing the incident angle of the light emitted from the light emitting element 105 to the movable mirror 109b by the mirror enabling mechanism 108. The

  Here, it is known that a semiconductor laser including a surface emitting laser has a phenomenon that the operation becomes unstable when the emitted light returns. For this reason, even in the present invention, if necessary, the window glass 103 is provided with a non-reflective coating, or the window glass 103 is installed obliquely without facing the optical axis of the emitted light from the light emitting element 105, It is desirable to prevent return of emitted light. Similarly, in order to prevent stray light (scattered light), it is desirable to take anti-reflection measures such as matte coating or surface treatment.

  Further, it is preferable that the window glass 103 transmits 90% or more of the light emitted from the light emitting element 105, and an antireflective coating may be applied as necessary to improve the transmittance. Not only glass but transparent resin may be used. In the case of a transparent resin, it may be formed integrally with the cap 102 after taking measures against light shielding.

  In Examples 1 and 2, the mirrors 109, 109a, and 109b are preferably metal or dielectric multilayer mirrors having a reflectance of 90% or more with respect to the light emitted from the light emitting element 105. 1 and 2, all the light emitted from the light emitting element 105 with respect to the mirror 109 in FIGS. 1 and 2, and the combined mirror 109 a and the movable mirror 109 b in FIGS. 3 and 4. Is incident and reflected to be output to the outside of the package, that is, to the outside of the surface emitting laser module. However, the outside of the surface emitting laser module is incident on, for example, an aperture plate provided with an aperture in the center portion to be centered on the optical axis. When only a narrow range including is used, light in a range not used outside the surface emitting laser module may not necessarily be output.

  Further, the light incident on the light receiving element 106 at the time of setting the amount of light does not necessarily include the center of the optical axis of the light. For example, the center of the optical axis is incident outside the surface emitting laser module by entering an aperture plate having an aperture at the center. In the case where only a narrow range including is used, it is better to limit the range of light incident on the light receiving element 106 to a range used outside the surface emitting laser module or in the vicinity of the range used outside. The light amount setting accuracy is improved as compared with the case where the light is incident on the light receiving element 106. Thereafter, the light receiving element 106 measures the amount of incident light. Then, by using a control circuit 403 described later, the light amount is controlled by increasing or decreasing the light output from the measured light amount to the light emitting element.

  Further, the post 104 and the post 107 may be formed integrally with the base 101. Further, the arrangement of the light emitting element 105, the light receiving element 106, and the mirror 109 is not limited to this, and an optical element for changing the optical axis direction or condensing between the mirror 109 and the light receiving element 106 is provided. It may be arranged.

  In addition, as the power for moving the mirrors 109 and 109b by the mirror moving mechanism 108, an actuator using electrostatic force, electromagnetic force, piezoelectric effect, or thermal strain may be used. Further, the actuator and the mirror may be integrally formed using MEMS (Micro Electro Mechanical Systems).

  Further, when sealing with the base 101, the cap 102, and the window glass 103, it may be hermetically sealed in an inert gas environment such as nitrogen or in a reduced pressure environment.

  When hermetically sealed in an inert gas environment, condensation inside the module can be prevented. In addition, when hermetically sealed in a reduced pressure environment, in addition to preventing condensation, the air resistance when moving the mirror is reduced, so that the mirror can be operated at high speed, so the operation time of the mirror can be shortened. Accordingly, it is possible to lengthen the time for setting the light amount.

  The light amount setting method of the light emitting element of this embodiment is performed by turning on the light emitting element at regular intervals, and will be described in detail with reference to FIG.

[Example 3] << Surface emitting laser module using a one-dimensional light emitting array element and a one-dimensional mirror array >>
A surface-emitting laser module using a one-dimensional light-emitting array element and a one-dimensional mirror array according to Example 3 of the present invention will be described.

  FIG. 5 is a view for explaining a surface emitting laser module according to Embodiment 3 of the present invention. The light emitting element 105 and the mirror 109 of the surface emitting laser module of FIG. The array element 205 and the mirror array 209 are changed, and the arrangement directions of both are arranged in parallel. In the light emitting element array, surface emitting lasers arranged in a line are formed. In FIG. 5, (a) is a normal state (a state where light from a surface emitting laser is taken out and used as a light source), and (b) is a state when a light amount is set (when a light amount emitted from a surface emitting laser is set). State).

  FIG. 6 is a top view of the surface emitting laser module of FIG. In the figure, a one-dimensional light-emitting array element 205 is a one-dimensional light-emitting array element having eight light-emitting portions provided with a surface-emitting laser arranged one-dimensionally, and 206a to 206h are light from individual light-emitting portions. Is shown. Reference numerals 209a to 209j denote one-dimensionally arranged mirrors constituting the mirror array 209.

  The third embodiment shown in FIGS. 5 and 6 is different from the first embodiment shown in FIGS. 1 and 2 in that the movable mirrors at the time of light quantity setting are arranged in the individual light emitting sections of the one-dimensional light emitting array element 205. This is limited to a mirror in a range in which light from a one-dimensional light emitting array element that performs light amount setting is incident.

  FIG. 7 is a diagram illustrating an example in which all of the light from the one-dimensional light emitting array element is incident on a light receiving element (not shown).

  In FIG. 9, (a) shows that the mirrors 209a to 209c are moved when light 206a from the one-dimensional light emitting array element 205 is incident on a light receiving element (not shown).

  Similarly, (b) shows that the mirrors 209b to 209d are moved when the light 206b is incident on a light receiving element (not shown). Similarly, the mirrors in the corresponding ranges are moved with respect to the light 206c to 206g (not shown).

(C) shows that the mirrors 209h to 209j are moved when the light 206h is incident on a light receiving element (not shown). Further, the light receiving element that receives the light measures the amount of incident light. Then, by using a control circuit 403 described later, the light amount is controlled by increasing or decreasing the light output from the measured light amount to the light emitting element.

  FIG. 8 is a diagram illustrating an example in which a part of light from the one-dimensional light emitting array element is incident on a light receiving element (not shown).

  In FIG. 9, (a) shows that the mirror 209b is moved when light 206a from the one-dimensional light emitting array element 205 is incident on a light receiving element (not shown).

Similarly, (b) shows that the mirror 209c is moved when the light 206b is incident on a light receiving element (not shown). Similarly, corresponding mirrors are also moved with respect to light 206c to 206g (not shown).

(C) shows that the mirror 209i is moved when the light 206h is incident on a light receiving element (not shown).

  FIG. 9 shows another example in which a part of light from the one-dimensional light emitting array element is incident on a light receiving element (not shown).

  In this example, as shown in the figure, when the light 206a from the one-dimensional light emitting array element 205 is incident on a light receiving element (not shown), the mirror 209a is moved. When the light 206b is incident on a light receiving element (not shown), the mirror 209c is moved. Similarly, the corresponding mirrors are also moved for light 206c to 206g (not shown). When the light 206h is incident on a light receiving element (not shown), the mirror 209h is moved.

  As shown in FIG. 7 to FIG. 9, the movable mirror is divided into a mirror array, and is limited to a range in which light from the light emitting element for setting the light quantity among the individual light emitting elements of the one-dimensional light emitting array element 205 is incident. And move. This makes it possible to reduce the size of the movable mirror each time the light amount is set, thereby realizing high-speed operation.

  According to this embodiment, the location where the incident angle of the light emitting element and the mirror is changed is a one-dimensional array. It becomes possible to monitor the light amount of the light emitting elements of the one-dimensional array.

  In addition, by arranging the mirror and the light receiving element close to the light emitting point, the amount of light per unit area incident on the light receiving element increases, so the light receiving area of the light receiving element can be reduced, enabling high-speed light output control. Become.

  FIG. 10 is a diagram showing a configuration example in which light 206a from the one-dimensional light emitting array element 205 is incident on the light receiving element and light quantity is set, and at the same time, another light 206e from the one-dimensional light emitting array element 205 is emitted to the outside. It is. Adopting this configuration makes it possible to set the light amount in parallel with processing other than optical writing, such as synchronization detection, which is performed as preprocessing when performing optical writing, and at the same time can increase the time required for light amount setting. Thus, it is possible to increase the degree of freedom of time distribution for various processes of the image forming apparatus.

  In addition, the method of setting the light amount in the one-dimensional light emitting array element combined with the one-dimensional mirror array is performed by sequentially lighting the individual light emitting elements of the one-dimensional light emitting array element 205 one by one at a fixed period. This will be described with reference to FIG.

[Example 4] << Surface-emitting laser module using a two-dimensional light-emitting array element and a one-dimensional mirror array >>
Next, a surface emitting laser module using a two-dimensional light emitting array element and a one-dimensional mirror array according to a fourth embodiment of the present invention will be described.

  In this example, in the surface emitting laser module of Example 3 shown in FIGS. 5 and 6, the two-dimensional light emitting array element 205 is changed from a two-dimensional array of light emitting units 205aa to 205hh made of a surface emitting laser as shown in FIG. , 205ha on the post 104 so that the light emitting portions 205aa, 205ba,..., 205ha are on the upper side, and the arrangement direction of the light emitting portions 205aa, 205ba,. The light emitting units 205aa, 205ab,..., 205ah are arranged so that the arrangement direction thereof is perpendicular to the arrangement direction of the one-dimensional mirror array 209, that is, the mirror array 209 is inclined.

  When the two-dimensional light emitting array element having the light emitting portions 205aa to 205hh in this embodiment is used, the mirror is moved from the two-dimensional light emitting array element in the direction orthogonal to the arrangement direction of the mirror array 209, that is, the direction in which the mirror array 209 is inclined. The spread of light on the mirror array differs depending on the distance up to.

  12 shows the two-dimensional light emitting array element 205 when the light emitted from the two-dimensional two-dimensional light emitting array element 205 shown in FIG. 11 is incident on a one-dimensional mirror array 209 made up of a plurality of movable mirrors. It is a figure for demonstrating the range of the mirror shape and the beam shape on the one-dimensional mirror array 209 of the light radiate | emitted from.

  FIG. 12A is a side view of the arrangement of the two-dimensional light emitting array element 205 and the mirror array 209. Comparing the light emitting units 205aa and 205ah, the light emitting unit 205aa has a longer distance from the mirror array 209, and the length Vaa of the light emitted from the light emitting element 205aa on the mirror array 209 in the mirror tilt direction and the light emitting element 205ah For the length Vah of the emitted light in the mirror tilt direction, Vaa> Vah.

  FIG. 12B is a view of the arrangement of the two-dimensional light emitting array element 205 and the mirror array 209 as viewed from above. Similar to FIG. 12A, the length Vaa of the beam shape 207aa in the mirror tilt direction on the mirror array of the light emitted from the light emitting unit 205aa on the mirror array 209 and the mirror array of the light emitted from the light emitting unit 205ah. When the length Vah of the beam shape 207ah in the mirror tilt direction is Vah> Vah, the length Haa and the beam shape 207ah in the array direction (direction orthogonal to the mirror tilt direction) of the one-dimensional mirror array 209 of the beam shape 207aa. The length Hah of the one-dimensional mirror array 209 in the arrangement direction (direction orthogonal to the mirror tilt direction) also satisfies Haa> Hah. Note that the beam shape 207aa and the beam shape 207aa in FIG. 12B are not strictly circular, but do not affect the essence of the invention, and are therefore circular for simplicity.

  In such a case, in particular, when a part of the light from the two-dimensional light emitting array element is incident on a light receiving element (not shown), for example, according to the beam shape on the mirror array 209, for example, the light emitted from the light emitting unit 205aa The mirrors 209b to 209d in the mirrors 209a to 209l are movable for the beam shape 207aa, and only the mirror 209c in the mirrors 209a to 209l is movable for the beam shape 207ah of the light emitted from the light emitting unit 205ah. Thus, the accuracy of light amount setting can be improved by changing the range in which the mirror is moved. Then, the accuracy of light quantity setting can be further improved by increasing the number of divisions of the mirrors constituting the mirror array. Further, the light receiving element that receives the light measures the amount of incident light. Then, by using a control circuit 403 described later, the light amount is controlled by increasing or decreasing the light output from the measured light amount to the light emitting element.

  Thus, the light-emitting element is a two-dimensional light-emitting array element, the part that changes the incident angle of the mirror is a one-dimensional array, and the one-dimensional array that changes the incident angle of the mirror is a binary array of two-dimensional light-emitting array elements It is possible to monitor the light quantity of the two-dimensional light-emitting array element in the module without reducing the light quantity of light that should be used as the original application.

  In addition, by arranging the mirror and the light receiving element close to the light emitting point, the amount of light per unit area incident on the light receiving element increases, so the light receiving area of the light receiving element can be reduced, enabling high-speed light output control. Become.

  Note that the method of setting the light amount in the two-dimensional light emitting array element combined with the one-dimensional mirror array is performed by sequentially lighting the individual light emitting elements of the light emitting element array 205 one by one at regular intervals. I will explain it.

[Example 5] << Surface emitting laser module using a two-dimensional light-emitting array element and a two-dimensional mirror array >>
FIG. 13 illustrates a surface emitting laser module using a two-dimensional light-emitting array element and a two-dimensional mirror array according to Example 5 of the present invention. As shown in the fourth embodiment, the two-dimensional light emitting array element is provided with a light emitting unit composed of a surface emitting laser. In this embodiment, the one-dimensional mirror array shown in FIG. 12B is changed to a two-dimensional mirror array.

  12B, the length Vaa of the beam shape 207aa in the mirror tilt direction on the mirror array of the light emitted from the light emitting unit 205aa on the mirror array 209 and the mirror array of the light emitted from the light emitting unit 205ah. The length Vah of the beam shape 207ah in the mirror tilt direction is Vaa> Vah. Similarly, the length Haa of the beam shape 207aa in the direction orthogonal to the mirror tilt direction and the length of the beam shape 207ah in the direction orthogonal to the mirror tilt direction. Hah also satisfies Haa> Hah.

  Also in such a case, the range in which the mirror can be moved may be changed according to the beam shape on the mirror array 209 of the light from the light emitting element (two-dimensional light emitting array element).

  FIG. 14 shows two of the light emitted from the two-dimensional light emitting array element 205 when the light emitted from the two-dimensional light emitting array element 205 shown in FIG. 11 is incident on the two-dimensional mirror array 209 shown in FIG. It is a figure for demonstrating the range of the mirror which moves the beam shape on the two-dimensional mirror array 209. FIG.

  FIG. 14A is a diagram illustrating an example in which all of the light from the light emitting element is incident on a light receiving element (not shown), and the range of 211aa for the beam shape 207aa of the light emitted from the light emitting unit 205aa. This indicates that the mirror in the range of 211ah is moved with respect to the beam shape 207ah of the light emitted from the light emitting unit 205ah. Further, the light receiving element that receives the light measures the amount of incident light. Then, by using a control circuit 403 described later, the light amount is controlled by increasing or decreasing the light output from the measured light amount to the light emitting element.

  FIG. 14B is a diagram showing an example in which a part of the light from the two-dimensional light emitting array element is incident on a light receiving element (not shown), and the beam shape 207aa of the light emitted from the light emitting unit 205aa is shown. Indicates that the mirror in the range of 212 aa is moved, and the mirror in the range of 212 ah is moved with respect to the beam shape 207 ah of the light emitted from the light emitting unit 205 ah. Also in this case, the accuracy of light amount setting can be improved by changing the range in which the mirror is moved. Then, the accuracy of light quantity setting can be further improved by increasing the number of divisions of the mirrors constituting the mirror array.

  The location where the incident angle of the light emitting element and the mirror is changed is a two-dimensional array, and the two-dimensional array of the location where the incident angle of the mirror is changed is installed in parallel in both the arrangement directions of the binary array of the light emitting elements. Therefore, it is possible to monitor the light amount of the light emitting elements of the binary array in the module without reducing the light amount of light that should be used as the original application.

  In addition, by arranging the mirror and the light receiving element close to the light emitting point, the amount of light per unit area incident on the light receiving element increases, so the light receiving area of the light receiving element can be reduced, enabling high-speed light output control. Become.

  Furthermore, by controlling the movable mechanism of the mirror so that only the light emitted from the light source for setting the light amount enters the light receiving element, it is possible to monitor the light amount of a specific channel of the light emitting element.

  Further, as shown in FIG. 14, the area of the mirror that is moved to make the light from the light source incident on the light receiving element is matched to the beam shape of the light from the light source, so that the amount of light incident on the light receiving element is between the light sources. Variations can be reduced.

  Further, as in the other embodiments, the angle of the mirror in a state in which the light from the light source is incident on the light receiving element is changed according to the position of the light source incident on the mirror. It can be made smaller.

  In this embodiment, the light quantity setting method for the two-dimensional light-emitting array element combined with the two-dimensional mirror array is performed by sequentially lighting the individual light-emitting elements of the two-dimensional light-emitting array element 205 one by one at regular intervals. Details will be described with reference to FIG.

  The surface emitting laser modules described in the first to fifth embodiments do not reduce the amount of light that should be used as the original application, and stabilize the beam shape at the irradiation position (for example, on the surface of the photoreceptor in the image forming apparatus). It is possible to realize a reliable and compact light source that can monitor the amount of light in the module, so it can be used for image forming devices (laser printers, copiers, etc.), projectors, optical scanning devices, optical information recording / reproduction. It is suitable for use as a light source for various optical devices such as a device (such as an optical disk device), an optical transmission module, an optical transmission / reception module, and an optical communication system.

  Hereinafter, an image forming apparatus (laser printer), an optical scanning apparatus, an optical information recording / reproducing apparatus (such as an optical disk apparatus), an optical transmission module, an optical transmission / reception module, and an optical communication system will be described as examples of optical devices.

[Embodiment 6] << Image forming apparatus (laser printer) >>
FIG. 15 is a diagram showing a schematic configuration of a laser printer as an image forming apparatus according to Embodiment 6 of the present invention.

  As shown in the figure, a laser printer 500 according to this embodiment includes an optical scanning device 900, a photosensitive drum 901, a charging charger 902, a developing roller 903, a toner cartridge 904, a cleaning blade 905, a paper feed tray 906, a paper feed. A roller 907, a registration roller pair 908, a transfer charger 911, a static elimination unit 914, a fixing roller 909, a paper discharge roller 912, and a paper discharge tray 910 are provided.

  Specifically, the charging charger 902, the developing roller 903, the transfer charger 911, the charge eliminating unit 914, and the cleaning blade 905 are each in the vicinity of the surface of the photosensitive drum 901 with respect to the rotation direction of the photosensitive drum 901. The rollers 903, the transfer charger 911, the charge eliminating unit 914, and the cleaning blade 905 are arranged in this order.

  A photosensitive layer is formed on the surface of the photosensitive drum 901. Here, the photosensitive drum 901 rotates clockwise (in the direction of the arrow in the drawing) within the plane in FIG. The charging charger 902 has a function of uniformly charging the surface of the photosensitive drum 901.

  The optical scanning device 900 irradiates the surface of the photosensitive drum 901 charged by the charging charger 902 with light modulated based on image information from a host device (for example, a personal computer). By this light irradiation, a latent image corresponding to the image information is formed on the surface of the photosensitive drum 901. The area of the latent image formed on the surface of the photosensitive drum 901 moves in the direction of the developing roller 903 as the photosensitive drum 901 rotates. The detailed configuration of the optical scanning device 900 will be described in Example 7 (FIG. 16).

  The toner cartridge 904 stores toner, and the toner is supplied to the developing roller 903. The developing roller 903 causes the toner supplied from the toner cartridge 904 to adhere to the latent image formed on the surface of the photosensitive drum 901 to visualize the image information. Here, the latent image to which the toner is attached moves in the direction of the transfer charger 911 as the photosensitive drum 901 rotates.

  Recording paper 913 is stored in the paper feed tray 906. A paper feed roller 907 is disposed in the vicinity of the paper feed tray 906, and the paper feed roller 907 takes out the recording paper 913 one by one from the paper feed tray 906 and conveys it to the registration roller pair 908.

  The registration roller pair 908 is disposed in the vicinity of the transfer roller 911, temporarily holds the recording paper 913 taken out by the paper feed roller 907, and the recording paper 913 is synchronized with the rotation of the photosensitive drum 901. It is sent out toward the gap between 901 and the transfer charger 911.

  A voltage having a polarity opposite to that of the toner is applied to the transfer charger 911 in order to electrically attract the toner on the surface of the photosensitive drum 901 to the recording paper 913. With this voltage, the latent image on the surface of the photosensitive drum 901 is transferred to the recording paper 913. The recording sheet 913 transferred here is sent to the fixing roller 909.

  In the fixing roller 909, heat and pressure are applied to the recording paper 913, whereby the toner is fixed on the recording paper 913. The recording paper 913 fixed here is sent to the paper discharge tray 910 via the paper discharge roller 912 and sequentially stacked on the paper discharge tray 910.

  The neutralization unit 914 neutralizes the surface of the photosensitive drum 901. The cleaning blade 905 removes toner remaining on the surface of the photosensitive drum 901 (residual toner). The removed residual toner is used again. The surface of the photosensitive drum 901 from which the residual toner has been removed returns to the position of the charging charger 902 again.

  According to the present embodiment, since the surface emitting laser modules described in Embodiments 1 to 5 are used, it is possible to realize an image forming apparatus capable of forming a high-quality image with a stable light output.

[Embodiment 7] << Optical scanning device >>
Next, an optical scanning device according to Embodiment 7 of the present invention will be described.
FIG. 16 is a diagram for explaining the configuration and operation of the optical scanning device.

  As shown in FIG. 15, the optical scanning device according to the present embodiment (900 in FIG. 15) includes a light source unit 310 including a surface emitting laser module according to the above-described embodiment, a coupling lens 311, and an aperture plate 312 having an aperture. A cylindrical lens 313, a polygon mirror 314, an fθ lens 315, a toroidal lens 316, two mirrors (317 and 318), and a main controller (not shown) that comprehensively controls the above-described units.

  The light source unit 310 in the present embodiment includes a surface emitting laser array LA (consisting of surface emitting laser modules according to embodiments 4 to 5) in which surface emitting lasers (VCSEL) are arranged in an array. Shall.

  The coupling lens 311 is for shaping the light beam emitted from the light source unit 310 into parallel light.

  The aperture plate 312 defines the beam diameter of the light beam that has passed through the coupling lens 311, and has an aperture that allows only central light in a narrow range to pass through the light emitted from the light emitting element in the surface emitting laser module. Have.

  The light beam that has passed through the aperture of the aperture plate 312 is further condensed on the reflection surface of the polygon mirror 314 via the cylindrical lens 313 and the mirror 317.

  The polygon mirror 314 is formed of a regular hexagonal columnar member having a low height, and six deflection surfaces (mirror surfaces) are formed on the side surface. And it is rotated at a constant angular velocity in the direction of the arrow shown in the figure by a rotating mechanism (motor) (not shown). Therefore, the light beam emitted from the light source unit 310 and condensed on the deflection surface of the polygon mirror 314 by the cylindrical lens 313 is deflected at a constant angular velocity by the rotation of the polygon mirror 314.

  The fθ lens 315 has an image height proportional to the incident angle of the light beam from the polygon mirror 314, and the image surface of the light beam deflected by the polygon mirror 314 at a constant angular velocity is displayed with respect to the main scanning direction. Move at a constant speed.

  The toroidal lens 316 forms an image of the light beam from the fθ lens 315 on the surface of the photosensitive drum 901 via the mirror 318.

FIG. 17 is a schematic diagram of an example of the surface emitting laser array LA (comprising the surface emitting laser modules according to Examples 4 to 5) constituting the light source unit 310 used in the present embodiment. In the surface emitting laser array LA, The surface emitting lasers are arranged with a predetermined sufficient interval in the main scanning direction, and the arrangement of the surface emitting lasers in the main scanning direction is arranged with a gap of d2 in the sub scanning direction. In this way, an array arranged in the main scanning direction while being shifted by an interval d2 in the sub scanning direction is formed for each pitch d1 in the sub scanning direction.
The

  By arranging in this way, the intervals of the perpendiculars perpendicular to the sub-scanning direction from the center of each surface emitting laser can be made equal (the interval d2 is equal). Thus, by controlling the lighting timing of each surface emitting laser, it is possible to grasp the same configuration as when light sources are arranged at narrow regular intervals in the sub-scanning direction on the photosensitive drum 901. Become.

  For example, when the pitch d1 of the surface emitting laser elements in the direction corresponding to the sub-scanning direction is 26.5 μm and ten surface emitting semiconductor lasers are arranged in the main scanning direction, the interval d2 is 2.65 μm. It becomes.

  If the magnification of the optical system is doubled, writing dots can be formed on the photosensitive drum 901 at intervals of 5.3 μm in the sub-scanning direction. This corresponds to 4800 dpi (dots / inch) and means that high-density writing of 4800 dpi (dots / inch) can be performed.

  Note that the density can be increased by increasing the number of VCSELs in the direction corresponding to the main scanning direction, making the array arrangement in which the pitch d1 is narrowed and the interval d2 is further narrowed, or the magnification of the optical system is decreased. And higher quality printing becomes possible. Note that the writing interval in the main scanning direction can be easily controlled by the lighting timing of the light source.

  Further, in this case, in the laser printer 500, even if the writing dot density increases, the surface emitting laser element can generate a high single basic transverse mode output, so that printing can be performed without reducing the printing speed. it can. Further, when the writing dot density is the same, the printing speed can be further increased.

  According to the present embodiment, since the surface emitting laser modules described in Embodiments 1 to 5 are used, it is possible to realize an optical scanning device capable of forming a high-quality image with a stable light output.

<< VCSEL drive circuit board >>
Next, an example of the light amount control circuit of the surface emitting laser module of the present invention in the optical scanning device 900 is shown.

  FIG. 18 is a diagram for explaining a VCSEL driving circuit board 400 when the light emitting element is a single VCSEL (surface emitting laser) element as in the first and second embodiments. As shown in the figure, the VCSEL drive circuit board 400 includes a surface emitting laser module 401 according to the present invention, a VCSEL drive circuit 402, a control circuit 403, a power supply circuit (not shown), and an external interface circuit.

  The internal circuit of the surface emitting laser module 401 includes a single VCSEL 411 that is the light emitting element 105 in the first and second embodiments, a photodiode 421 that is the light receiving element 106 in the first and second embodiments, and a mirror moving mechanism control circuit 431. The anode electrode of the VCSEL 411 is connected to the VCSEL drive circuit 402, and the cathode electrode of the photodiode 421 is connected to the control circuit 403.

  The cathode electrode of the VCSEL 411 and the anode electrode of the photodiode 421 are connected to a constant potential such as GND on the circuit. The mirror moving mechanism control circuit 431 is connected to the control circuit 403.

  The VCSEL 411 is lit based on the current output from the VCSEL drive circuit 402. The VCSEL drive circuit 402 outputs a current based on the light amount setting signal to the VCSEL 411 at a time based on the timing signal from the control circuit 403.

  The control circuit 403 has a function of controlling the time during which the VCSEL 411 is lit and the amount of light at the time of lighting. The control circuit 403 divides the time of one main scanning line into a time for forming an image on the photosensitive drum 901 and a time for other adjustments at a constant ratio, and repeats each operation at a constant time period. The time for adjustment and the like is further divided for various adjustments, and the time for setting the light amount is also included therein.

  The control circuit 403 outputs a timing signal for blinking the VCSEL 411 to the VCSEL driving circuit 402 based on the image forming signal from the outside during the image forming time. On the other hand, the light amount setting signal is kept constant during image formation.

  The control circuit 403 outputs a timing signal for continuously lighting the VCSEL 411 to the VCSEL drive circuit 402 during the light amount setting time, while the light amount setting signal is a photo generated when light emitted from the VCSEL 411 enters. The output current of the diode 421 is changed so as to be equal to the standard.

  The control circuit 403 allows the light from the VCSEL 411 to be emitted to the outside of the surface emitting laser module 401 during the image formation time, while the light from the VCSEL 411 enters the photodiode 421 during the light amount setting time. Move the mirror (not shown).

<< Example of VCSEL drive circuit >>
FIG. 19 illustrates the case of an array element composed of VCSELs (surface emitting lasers) as in Examples 3 to 5, taking a four-element array as an example. In FIG. 19, the VCSEL 411 further includes four VCSELs 411a to 411d. The anode electrodes of the VCSELs 411a to 411d are individually connected to the VCSEL driving circuit 402.

  On the other hand, the cathode electrodes of the VCSELs 411a to 411d are common and are connected to a constant potential such as GND on the circuit together with the anode electrode of the photodiode 421 as in FIG. 18, and the cathode electrode of the photodiode 421 is connected to the control circuit 403. .

  The VCSELs 411a to 411d are turned on based on the currents output from the VCSEL drive circuit 402, respectively.

  The VCSEL driving circuit 402 outputs currents based on the light amount setting signals individually prepared for the VCSELs 411a to 411d to the VCSELs 411a to 411d at times based on the timing signals from the control circuit 403, respectively.

  The control circuit 403 controls the lighting time of the VCSELs 411a to 411d and the light amount at the time of lighting. The control circuit 403 divides the time of one main scanning line into a time for forming an image on the photosensitive drum 901 and a time for other adjustments at a constant ratio, and repeats each operation at a constant time period. The time for adjustment and the like is further divided for various adjustments, and the time for setting the light amount is also included therein.

  The control circuit 403 outputs a timing signal for blinking the VCSELs 411a to 411d to the VCSEL driving circuit 402 based on an image forming signal from the outside during the image forming time. On the other hand, the light amount setting signal is kept constant during image formation.

  The control circuit 403 outputs a timing signal for continuously lighting one element of the VCSEL 411a to the VCSEL 411d to the VCSEL drive circuit 402 during the light amount setting time, while the light amount setting signal is 1 of the VCSEL 411a to the VCSEL 411d. One of the VCSELs 411a to 411d that is lit is changed so that the magnitude of the output current of the photodiode 421 generated by the incidence of light emitted from the element is equal to the reference level.

  The order is, for example, “main scanning 1 line image formation” → “VCSEL 411a light amount setting” → “main scanning 1 line image formation” → “VCSEL 411b light amount setting” → “main scanning 1 line image formation” → “VCSEL 411c light amount setting”. -> "Main scan 1 line image formation"-> "VCSEL 411d light intensity setting"-> "Main scan 1 line image formation"-> ... The amount of light can be set at time intervals, and as shown in Japanese Patent Application Laid-Open No. 2004-287085 (Patent Document 1), a VCSEL having a plurality of light sources that conventionally had to be provided with an optical system for monitoring and a PD separately. The light quantity monitor of the array is small in the same device. Kutomo be realized by a single PD.

  Note that the control circuit 403 causes all the VCSEL light from the VCSEL 411a to the VCSEL 411d to be emitted to the outside of the surface emitting laser module 401 during the image formation time, while the VCSEL 411a to the VCSEL 411d during the light amount setting time. A part of the region of the mirror array (not shown) is moved so that all or a part of the light from the VCSEL for setting the light amount enters the photodiode 421. The mirror that is not related to the light amount setting does not move in the direction of the image formation time.

  The anode electrode of the photodiode 421 may be connected to a constant potential such as the same GND as the common cathode electrode of the VCSELs 411a to 411d, as shown in FIG. It may be electrically insulated and then connected to another electrode, and any connection is possible.

  However, when the drive current of the VCSEL 411 is large, the current flowing from the common cathode electrode to the GND becomes a multiple of the numerical aperture of the drive current per element and becomes very large. Can be reduced.

  As described above, according to the optical scanning device 900 according to the present embodiment, the light source unit 310 includes the light emitting element array 205 including the plurality of surface emitting lasers described in the third to fifth embodiments. It is possible to scan and form a high-definition latent image at a high speed on the surface.

  In addition, the laser printer 500 according to the present embodiment includes the optical scanning device 900 including the light emitting element array 205 including the plurality of surface emitting lasers described in the third to fifth embodiments as the light source unit 310. It is possible to form a simple image at high speed.

  In the optical scanning device 900 according to the above embodiment, the light source unit 310 may include an array of a plurality of surface emitting lasers having the same arrangement configuration instead of the VCSEL array LA shown in FIG. .

  Furthermore, the cost of the light source unit can be reduced by eliminating the need for a separate monitor optical system (especially essential when the light emitting element is a VCSEL array).

  In the above-described embodiment, the case of the laser printer 500 as the image forming apparatus has been described. However, the present invention is not limited to this. In short, the image forming apparatus includes, as the light source unit 310, the light emitting element 105 made of a single surface emitting laser shown in Embodiments 1 and 2 or the light emitting element array 205 made of a plurality of surface emitting lasers shown in Embodiments 3 to 5. If it exists, it becomes possible to form a stable high-definition image at high speed.

[Embodiment 8] << Image forming apparatus; Color laser printer >>
Next, an image forming apparatus according to Embodiment 8 of the present invention will be described. The image forming apparatus according to this embodiment is a color laser printer, which is a dandem color machine including a plurality of photosensitive drums for color images.

  FIG. 20 is a configuration diagram of an image forming apparatus (color laser printer) capable of color printing according to the present embodiment.

  As shown in the figure, the color laser printer according to this embodiment includes a photosensitive drum K1 for black (K), a charger K2, a developing device K4, a cleaning unit K5, a transfer charging unit K6, and cyan ( C) photosensitive drum C1, charging unit C2, developing unit C4, cleaning unit C5, transfer charging unit C6, magenta (M) photosensitive drum M1, charging unit M2, developing unit M4, cleaning unit M5, transfer charging means M6, yellow (Y) photosensitive drum Y1, charger Y2, developing unit Y4, cleaning means Y5, transfer charging means Y6, optical scanning device 900, transfer belt 920, And a fixing unit 930.

  In this color laser printer, the optical scanning device 900 includes a semiconductor laser for black, a semiconductor laser for cyan, a semiconductor laser for magenta, and a semiconductor laser for yellow. It is comprised by the surface emitting laser module which has the stable high reliability which concerns on 1-5.

  The light beam from the black semiconductor laser is irradiated to the black photosensitive drum K1, the light beam from the cyan semiconductor laser is irradiated to the cyan photosensitive drum C1, and the light beam from the magenta semiconductor laser is magenta. The light beam from the yellow semiconductor laser is irradiated to the yellow photosensitive drum Y1, and the light beam from the yellow semiconductor laser is irradiated to the yellow photosensitive drum Y1.

  Each of the photosensitive drums K1, C1, M1, and Y1 rotates in the direction of the arrow, and in the order of the rotation direction, each of the chargers K2, C2, M2, and Y2, the developing devices K4, C4, M4, and Y4, for transfer. Charging means K6, C6, M6, Y6 and cleaning means K5, C5, M5, Y5 are arranged.

  Each of the chargers K2, C2, M2, and Y2 uniformly charges the surface of the corresponding photosensitive drum K1, C1, M1, and Y1. The surface of the charged photosensitive drums K1, C1, M1, and Y1 is irradiated with a light beam from the optical scanning device 900, and an electrostatic latent image is formed on the surfaces of the photosensitive drums K1, C1, M1, and Y1. It has become.

  Thereafter, toner images are formed on the surfaces of the photosensitive drums K1, C1, M1, and Y1 by the developing units K4, C4, M4, and Y4, and the transfer charging units K6, C6, M6, and Y6 corresponding to the toner images are formed. Thus, the toner images of the respective colors are transferred to the recording paper, and the image is fixed on the recording paper by the fixing unit 930.

  The cleaning units K5, C5, M5, and Y5 remove residual toner remaining on the surfaces of the corresponding photosensitive drums K1, C1, M1, and Y1.

  In this embodiment, the photosensitive drum is described as the image carrier. However, the image carrier may be an image forming apparatus using a silver salt film. In this case, a latent image is formed on the silver salt film by optical scanning, and this latent image can be visualized by a process similar to a developing process in a normal silver salt photographic process. Then, it can be transferred to photographic paper by the same process as the printing process in the ordinary silver salt photographic process. Such an image forming apparatus can be implemented as an optical plate making apparatus or an optical drawing apparatus that draws a CT scan image or the like.

  Further, an image forming apparatus using a color developing medium (positive photographic paper) that develops color by the heat energy of a beam spot as an image carrier may be used. In this case, a visible image can be directly formed on the image carrier by optical scanning.

  According to the present embodiment, by providing the surface emitting laser module described in Embodiments 1 to 5 as a writing light source, the light amount can be monitored in the apparatus without reducing the light amount that should be used for the original application. Therefore, it is possible to realize an image forming apparatus capable of forming a high-quality image with a stable light output.

  The embodiments of the image forming apparatus do not limit the content of the invention, and include all configurations that can be arbitrarily changed by those skilled in the art based on the conventional laser printer technology.

[Embodiment 9] << Optical information recording / reproducing apparatus >> (optical disc apparatus, optical pickup apparatus)
Next, an optical information recording / reproducing apparatus (optical disk apparatus) will be described as an example of an optical apparatus according to Embodiment 9 of the present invention.

  The optical information recording / reproducing apparatus (optical disk apparatus) of this example is a light source used for writing data to an information recording medium (optical disk) or reproducing data written on the information recording medium (optical disk). A stable and highly reliable surface emitting laser module with no decrease in light quantity is used as a light source unit. Thereby, a stable and high-performance optical information recording / reproducing apparatus (optical disk apparatus) can be realized.

[Embodiment 10] << Optical transmission module >>
Next, an optical transmission module according to Embodiment 10 of the present invention will be described. The present embodiment is an optical transmission module using the surface emitting laser modules according to the first to fifth embodiments as a light source. Hereinafter, the optical transmission module according to the present embodiment will be described with reference to the drawings.

  FIG. 21 is a schematic diagram of an optical transmission module. FIG. 21A shows an optical transmission module using a single surface emitting laser and a single optical fiber, and FIG. 21B shows a plurality of optical lasers. 1 shows an optical transmission module using a surface emitting laser array made of a plurality of optical fibers and a plurality of optical fibers corresponding to each of the plurality of optical lasers.

  The optical transmission module 250 using a single surface emitting laser emits laser light 252 emitted from the surface emitting laser 251 (surface emitting laser module according to Examples 1 and 2), as shown in FIG. This is a module that inputs to an optical fiber (plastic optical fiber (POF)) 253 and transmits it to another device.

  As shown in FIG. 2B, the optical transmission module 260 using the surface emitting laser array is obtained from each of the surface emitting lasers (surface emitting laser modules according to Examples 3 to 5) constituting the surface emitting laser array 261. This is a module for inputting the emitted laser beam 262 to a corresponding optical fiber 263 and transmitting it in parallel to another device.

  In the present embodiment, since the highly reliable surface emitting lasers according to the first to fifth embodiments are used as the surface emitting laser, a highly reliable optical transmission module can be realized. In addition, when an inexpensive POF is used as an optical fiber, a low-cost optical transmission module can be realized, which is effective for short-distance data communication for home use, indoor use in an office, and equipment.

  Further, when the optical transmission module shown in FIG. 5B is used, high-speed parallel transmission is possible, and more data can be transmitted simultaneously than in the past.

  Further, in the above case, the light emitting laser and the optical fiber are made to correspond one-to-one. However, a plurality of surface emitting laser elements having different oscillation wavelengths are arranged in a one-dimensional or two-dimensional array so that wavelength multiplexing is performed. By transmitting, the transmission rate can be further increased.

[Embodiment 11] << Optical transceiver module >>
Next, an optical transceiver module according to an eleventh embodiment of the present invention will be described. The present example is an optical transmission / reception module using the surface emitting laser module described in any of Examples 1 to 5 as a light source. The optical transceiver module according to this embodiment will be described below with reference to the drawings.

  FIG. 22 is a schematic diagram of an optical transmission / reception module, and FIG. 22A is a configuration example in the case where the surface emitting laser module has a single surface emitting laser, and the single surface emitting in the surface emitting laser module. An optical transceiver module using a laser, a single light receiving element (photodiode), and an optical fiber corresponding to each of them is shown. FIG. 5B shows a surface emitting laser module that includes a plurality of surface emitting lasers (Examples 3 to 5). This is a configuration example in the case of having such a surface emitting laser module), and shows an optical transmission / reception module using a surface emitting laser array composed of a plurality of optical lasers, a plurality of light receiving elements (photodiodes), and an optical fiber corresponding to each. ing.

  An optical transceiver module 270 using a single surface emitting laser and a single light receiving element (photodiode) includes a surface emitting laser 271 (surface emitting lasers according to Examples 1 and 2) as shown in FIG. The laser beam 272 emitted from the module is input to an optical fiber (plastic optical fiber (POF)) 273 and transmitted to another device, and also transmitted from another device via an optical fiber (plastic optical fiber (POF)) 275. This is a module for receiving the received laser beam 276 by a light receiving element (photodiode) 277.

  The optical transmission module 280 using the surface emitting laser array emits from each surface emitting laser (surface emitting laser module according to Examples 3 to 5) constituting the surface emitting laser array 281 as shown in FIG. The laser beam 282 is input to the corresponding optical fiber 283, and the laser beam 286 transmitted from the other device via the optical fiber (plastic optical fiber (POF)) 285 is received together with the module that transmits the laser beam in parallel to the other device. This is a module that receives an element (photodiode) array 287.

  In the present embodiment, since the surface emitting laser module having stable and high reliability described in Embodiments 1 to 5 is used as the light source, a stable and highly reliable optical transceiver module can be realized. In addition, when an inexpensive POF is used as an optical fiber, a low-cost optical transmission / reception module can be realized, which is effective for short-distance data communication for home use, indoor use in an office, and equipment.

  Further, when the optical transceiver module shown in FIG. 5B is used, high-speed parallel transmission is possible, and more data can be transmitted simultaneously than in the past.

  Further, in the above case, the light emitting laser and the optical fiber are made to correspond one-to-one. However, a plurality of surface emitting laser elements having different oscillation wavelengths are arranged in a one-dimensional or two-dimensional array so that wavelength multiplexing is performed. By transmitting, the transmission rate can be further increased.

[Embodiment 12] << Optical communication system >>
Next, an optical information recording / reproducing apparatus (optical disc apparatus) according to Embodiment 9 of the present invention will be described.

  The optical communication system according to the twelfth embodiment is an optical communication system using the surface emitting laser modules according to the first to fifth embodiments, the optical transmission module according to the tenth embodiment, or the optical transmission / reception module according to the eleventh embodiment.

  The optical communication system according to the twelfth embodiment includes a high-performance surface-emitting laser module (embodiments 1 to 5) having a built-in mirror, and an optical transmission module using the high-performance surface-emitting laser module having a built-in mirror (embodiment 10). Or an optical transceiver module (Embodiment 11) using a high-performance surface-emitting laser module with a built-in mirror can be used to realize a stable and high-performance small optical communication system, such as a computer. In particular, it is effective for short-distance communication as an optical interconnection such as inter-transmission, data transmission between boards in a device, between LSIs in a board, and elements in an LSI, and an ultrahigh-speed computer system is possible.

  Note that a surface emitting laser is suitable for a parallel transmission type optical communication system because it can reduce power consumption by an order of magnitude compared to an edge emitting laser and can easily form a two-dimensional array.

  It should be noted that the above-described embodiments are merely examples and do not limit the scope of rights of the present invention. The scope of the right of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and all configurations that can be regarded as equivalent to the configurations of the scope of claims for patent are included.

DESCRIPTION OF SYMBOLS 101: Base 102: Cap 103: Window glass 104,107: Post 105: Light emitting element using surface emitting laser 106: Light receiving element such as a photodiode 108: Mirror moving mechanism (mirror incident angle changing means)
109: Mirror 109a: Fixed mirror 109b: Movable mirror 205: One-dimensional light emitting array element or two-dimensional light emitting array element 205aa to 205hh: Two-dimensionally arranged light emitting portions 206a to 206h: Laser light emitted from 205 207aa, 207ah: Beam shape on mirror 209: Mirror arrays 209a to 209j: One-dimensional array of mirrors 211aa, 211ah, 212aa, 212ah: Range of mirrors to be moved 250: Optical transmission module 251: Surface emitting laser 252: Laser light 253: Light Fiber (plastic optical fiber (POF))
260: Optical transmission module 261: Surface emitting laser array 262: Laser light 263: Optical fiber 270: Optical transmission / reception module 271: Surface emitting laser 272: Laser light 273: Optical fiber (plastic optical fiber (POF))
280: Optical transmission module 281: Surface emitting laser array 282: Laser light 283: Optical fiber 285: Optical fiber (plastic optical fiber (POF))
286: Laser light 287: Light receiving element (photodiode) array

310: Light source unit 311: Coupling lens 312: Aperture plate (aperture)
313: Cylindrical lens 314: Polygon mirror 315: fθ lens 316: Toroidal lens 317, 318: Mirror 400: VCSEL drive circuit board 401: Surface emitting laser module 402: VCSEL drive circuit 403: Control circuits 411, 411a to 411d: VCSEL ( (Light emitting element)
421: Photodiode (light receiving element)
431: Mirror moving mechanism control circuit 500: Laser printer 600: Exposure apparatus 601: Surface emitting laser array 602: Collimating lens 603: Half mirror 604: Lens 605: Light quantity sensor 606: Aperture 607: Cylinder lens 608: Folding mirror 609: Rotation Polyhedral mirrors 610, 610a: Fθ lenses 611, 612: Cylinder mirrors 620: Surface emitting laser diode array 621: Beam splitter 622: Photo detector 623: Laser light 630: Semiconductor laser chip 631: Collimate lens 632: Plane mirror 633: Photo diode 640: Semiconductor laser 641: Laser emission part 642: Aperture member 643: Collimator lens 644: Concave surface reflection part 645: Photo diode 650: Semiconductor laser chip 651: Collision Meter lens 652: Housing 653: Transparent flat plate 654: Donut-shaped light receiving element 660: Laser chip 661: Window glass 662: Donut-shaped light receiving element 663: Electrode 670: Surface emitting laser 671: Optical path changing means (liquid microlens array)
672: Cover glass 673: Coupling lens 674: Folding mirror 675: Optical detector 900: Optical scanning device 901: Photosensitive drum 902: Charger 903: Developing roller 904: Toner cartridge 905: Cleaning blade 906: Paper feed tray 907 : Feed roller 908: Registration roller pair 909: Fixing roller 910: Paper discharge tray 911: Transfer charger 912: Paper discharge roller 914: Static elimination unit 920: Transfer belt 930: Fixing means LA: Surface emitting laser array VCSEL: Surface light emission Type laser K1: Photosensitive drum for black (K) K2: Charger for black (K) K4: Developer for black (K) K5: Cleaning means for black (K) K6: For black (K) Charging means C1: Cyan (C) C2: Cyan (C) charger C4: Cyan (C) developer C5: Cyan (C) cleaning means C6: Cyan (C) transfer charging means M1: Magenta Photosensitive drum for M) M2: Charger for magenta (M) M4: Developer for magenta (M) M5: Cleaning means for magenta (M) M6: Charging means for transfer for magenta (M) Y1 : Photosensitive drum for yellow (Y) Y2: Charger for yellow (Y) Y4: Developer for yellow (Y) Y5: Cleaning means for yellow (Y) Y6: Transfer for yellow (Y) Charging means

JP 2004-287085 A Japanese Patent Laid-Open No. 08-330661 JP 2004-87816 A JP 2007-328334 A Japanese Patent Application Laid-Open No. 6-309685 JP-A-10-303513 JP 2006-261494 A

Claims (14)

A light emitting element comprising a surface emitting laser, a mirror for reflecting the light emitted from the light emitting element, a light receiving element for receiving the light reflected by the mirror, and the light emitted from the light emitting element to the mirror Mirror incident angle changing means for changing the incident angle with the whole of the mirror or a part of the mirror,
A surface-emitting laser module that switches between a state in which light is incident on the light receiving element and a state in which light is emitted to the outside by changing the incident angle of the light emitted to the mirror by the mirror incident angle changing means.   The location where the incident angle of the light emitting element and the mirror is changed is both a one-dimensional array, and both the one-dimensional arrays are arranged so that the arrangement directions thereof are parallel to each other. Surface emitting laser module.   The light emitting element is a two-dimensional array, the location where the incident angle to the mirror is changed is a one-dimensional array, and the arrangement direction of the one-dimensional array where the incident angle to the mirror is changed is 2. The surface emitting laser module according to claim 1, wherein the surface emitting laser module is installed so as to be parallel to one of the arrangement directions of the original array.   The location where the incident angle to the light emitting element and the mirror is changed is a two-dimensional array, and the arrangement direction of the two-dimensional array where the incident angle of the mirror is changed is 2. The surface emitting laser module according to claim 1, wherein the surface emitting laser module is installed so as to be parallel to the direction.   The said mirror incident angle change means controls the incident angle to the said mirror so that the light radiate | emitted from the light emitting element which sets light quantity may inject into the said light receiving element. Item 5. The surface emitting laser module according to any one of Items 4 to 7.   The mirror incident angle changing means simultaneously turns on light of a light emitting element that performs light amount setting and light of a light emitting element other than the light emitting element that performs light amount setting, and emits light of a light emitting element other than the light emitting element that performs light amount setting from the window. The surface emitting laser module according to claim 5, wherein the surface emitting laser module is output to the outside.   The area of the mirror that changes the incident angle in order to make the light from the light emitting element enter the light receiving element is matched with the beam profile of the light from the light emitting element. The surface emitting laser module according to any one of the above.   The angle of the mirror in a state where the light of the light emitting element is incident on the light receiving element is changed according to the position of the light emitting element incident on the mirror. The surface emitting laser module described.   An optical apparatus using the surface-emitting laser module according to claim 1 as a light source.   The surface emitting laser module according to any one of claims 1 to 8, a deflecting unit that deflects one or a plurality of laser beams emitted from the surface emitting laser module, and one or more output from the deflecting unit An optical scanning device comprising: a scanning optical element that condenses a plurality of laser beams on a surface to be scanned. A collimating lens that converts light into parallel light, and an aperture plate that has an aperture that allows light in the center of the parallel light to pass through.
11. The optical scanning device according to claim 10, wherein one or a plurality of laser beams emitted from the surface emitting laser module are incident on the deflecting unit through the collimating lens and the aperture plate.   An image forming apparatus using the surface emitting laser module according to claim 1 or the optical scanning device according to claim 10 or 11. At least one image carrier;
12. The optical scanning device according to claim 10 or 11, wherein the at least one image carrier is scanned with one or more laser beams modulated by image information. Item 13. The image forming apparatus according to Item 12.   The image forming apparatus according to claim 13, wherein the image information is color image information, and the image carrier is provided for each color element of the color image information.

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