JP2012189342A - Microspectrometry apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure optical spectrum within a measurement range while defining various shapes as the measurement range without being limited by an aperture shape of a field diaphragm.SOLUTION: A microspectrometry apparatus comprises imaging means 41 which images a measurement sample 1 to capture color image information within a measurement range, image processing means 68 which performs image processing on the color image information to extract a plurality of color regions 11 from the measurement range, illumination optical system 29 which irradiates, as an irradiation range, a part of the color regions extracted by the image processing means 68 with illumination light, and optical spectrum acquisition means 51 which acquires optical spectrum of a part of the color regions 11 through reflection light generated by the illumination light with which the irradiation range has been irradiated. The optical spectrum of the part of each of the plurality of color regions 11 is acquired by the illumination optical system 29 and the optical spectrum acquisition means 51, and the optical spectrum of the entire measurement range is calculated on the basis of a region area and the optical spectrum of the part corresponding to each of the plurality of color regions 11.

Description

  The present invention relates to a microscopic spectrophotometer for measuring a spectroscopic spectrum in a measurement range using a part of a measurement sample as a measurement range.

  2. Description of the Related Art Conventionally, a microspectrophotometer for obtaining an enlarged image of a measurement sample with an objective lens and measuring a spectrum of the enlarged image has been proposed (see, for example, Patent Documents 1 and 2). This microscopic spectrophotometer measures the illumination optical system that irradiates the measurement sample with illumination light, and spectroscopically reflects the reflected light from the measurement sample by the illumination light and detects the intensity of the dispersed light for each wavelength to obtain a spectral spectrum. And a spectroscope for acquiring the same.

  In order to measure only a spectral spectrum within the target measurement range using such a microspectrophotometer, generally, the field of view disposed in the optical path of the illumination optical system or in the optical path from the measurement sample to the spectroscope. A diaphragm is used. By adjusting the aperture diameter of this field stop, it is possible to adjust the irradiation range so that only the measurement range is irradiated, or to block light outside the measurement range from the reflected light from the measurement sample As a result, only the reflected light from the measurement range can be dispersed to obtain only the spectrum of the measurement range.

Japanese Patent Application Laid-Open No. 11-230829 JP 2000-356588 A

  By the way, while the shape of the measurement range for measuring the spectrum is various, the aperture shape of the field stop is a substantially circular shape made of a polygon, an elongated rectangular shape, etc. It has a certain shape. For this reason, it is difficult to adjust the aperture shape of the appropriate field stop according to the shape of the measurement range, and there is a problem in that it may not be possible to obtain a spectrum of the desired measurement range.

  In addition, the spectrum acquisition range from the measurement sample is set to a minute range that is small relative to the measurement range, and the entire measurement range is scanned two-dimensionally to obtain a spectrum for each minute range. A method is also conceivable in which the spectral spectrum of the entire measurement range is calculated as an operation value by adding the light intensity of the spectral spectrum for each wavelength component. However, according to such a method, since it is necessary to acquire a spectrum for each minute range within the measurement range by scanning two-dimensionally over the entire measurement range, the measurement time increases excessively. There was a problem of end.

  Therefore, the present invention has been devised in view of the above-described problems, and the object of the present invention is to use various shapes as a measurement range without being limited by the aperture shape of the field stop. Another object of the present invention is to provide a microspectroscopic measurement device that can measure the spectral spectrum of the light and complete the measurement within the measurement range in a short time.

  In order to solve the above-described problems, the present inventor has invented the following microspectroscopy light measuring apparatus after intensive studies.

A microspectroscopic light measurement apparatus according to a first aspect of the present invention is a microspectroscopic light measurement apparatus for measuring a spectral spectrum of a measurement range using a part of the measurement sample as a measurement range, and imaging the measurement sample and including the measurement range An imaging unit that acquires color image information of a range, and by performing image processing on the color image information, a plurality of color regions that are classified according to color are extracted from the measurement range, and the regions of the plurality of color regions Image processing means for calculating an area, illumination optical system for illuminating illumination light with a part of the color area extracted by the image processing means as an illumination range, and reflected light or transmission by illumination light emitted to the illumination range Spectral spectrum acquisition means for acquiring a spectral spectrum of a part of the color region by light, a region area of the color region, and a spectral spectrum of a part of the color region. Arithmetic processing means for performing arithmetic processing, and acquiring a partial spectrum of each of the plurality of color regions by the illumination optical system and the spectral spectrum acquisition means, the arithmetic processing means, each of the plurality of color regions The spectral spectrum of the whole measurement range is calculated based on the area of the region corresponding to the above and a part of the spectral spectrum.
In the microspectrophotometer according to a second aspect of the present invention, in the first aspect, the arithmetic processing means calculates a spectral spectrum per unit area based on a partial spectral spectrum of the color region acquired by the spectral spectrum means. The spectral spectrum per unit area of the calculated color area is multiplied by the area area of the color area to calculate a spectral spectrum of the entire color area, and the spectral spectrum of each of the plurality of color areas is added to perform the measurement. A spectral spectrum of the entire range is calculated.
The microspectrophotometer according to a third aspect of the present invention is the first aspect or the second aspect, wherein the measurement range is set from the display means for displaying the image picked up by the image pickup means and the image displayed by the display means. And setting means.
The microspectroscopic light measurement apparatus according to a fourth aspect of the present invention is the irradiation range adjustment according to any one of the first aspect to the third aspect, wherein the irradiation range of the illumination light irradiated from the illumination optical system is adjusted and the range is adjusted. And an illumination range adjusting unit that adjusts and adjusts the range of the illumination range based on the color region extracted by the image processing unit so that illumination light is irradiated to a part of the color region. It is characterized by that.
According to a fifth aspect of the present invention, in the fourth aspect, the illumination optical system includes: a light source that emits the illumination light; and an irradiation range on the measurement surface of the measurement sample of the illumination light emitted from the light source. A field stop for adjusting the range, and the illumination range adjusting means includes the light source and the field stop that are integrally movable in a direction orthogonal to the optical axis of the illumination light. .

  According to the first to fifth aspects of the invention, it is possible to measure the spectrum of the measurement range using various shapes as the measurement range without being restricted by the aperture shape of the field stop. In addition, when measuring the spectral spectrum of the measurement range, a plurality of color regions are extracted from the measurement range by performing image processing, and calculation processing is performed after obtaining a spectral spectrum for each of the extracted color regions. Since it is only necessary to perform the measurement, the measurement within the measurement range can be completed in a short time.

It is a figure which shows typically an example of the image which imaged the measurement sample used as the object which measures a spectrum in this invention. It is a schematic diagram which shows the outline | summary of the microspectroscopic light measuring apparatus which concerns on 1st Embodiment. It is a block diagram which shows the structure of the central controller used with the microspectroscopic light measuring apparatus which concerns on 1st Embodiment. (A) is a figure which shows a part spectral spectrum of the red area | region of the measurement sample which concerns on 1st Embodiment, (b) is a figure which shows a part spectral spectrum of the blue area | region of the measurement sample. (A) It is a figure which shows the spectrum of the whole red area | region of the measurement sample which concerns on 1st Embodiment, (b) is a figure which shows the spectrum of the whole blue area | region of the measurement sample. It is a figure which shows the spectrum of the whole measurement range of the measurement sample which concerns on 1st Embodiment. It is a flowchart for demonstrating operation | movement of the microspectroscopic light measuring apparatus which concerns on 1st Embodiment.

  Hereinafter, embodiments for implementing a microspectrophotometer to which the present invention is applied will be described in detail with reference to the drawings.

  First, a measurement sample that is a target for measuring a spectral spectrum in the present invention will be described.

  As shown in FIG. 1, the measurement sample 1 has a plurality of color regions 11 in a measurement range S1 in which a spectral spectrum is to be measured. Here, the color area 11 refers to an area divided according to colors represented by hue, saturation, brightness, and the like, and the single color area 11 is a color acquired by an imaging device 41 described later. An image is composed of pixel groups having similar hue, saturation, and lightness.

  In the first embodiment, the measurement sample 1 is composed of a glass substrate embedded with a color former that develops color by irradiation with white light. In the first embodiment, the measurement sample 1 includes a square red region 11A that develops red color and an L-shaped blue region 11B that produces blue color, and the square range is a mixed color of red and blue. Examples of color development are shown. In the following description, it is assumed that the square range that is colored with this mixed color is the measurement range S1. In addition, this measurement range S1 becomes a magnitude | size whose vertical-horizontal length is 10 micrometers x 10 micrometers or less, for example, The shape of the measurement range S1 is not specifically limited, In addition to polygonal shapes, such as square shape, circular shape It is formed in an indefinite shape or the like.

  Next, the microspectrophotometer 3 according to the first embodiment will be described.

  As shown in FIG. 2, the microspectroscopic light measurement apparatus 3 according to the first embodiment irradiates the measurement sample 1 with an illumination optical system 29 that irradiates the measurement sample 1 placed on the stage 20 with illumination light. A spectroscope 51 as a spectroscopic spectrum acquisition means for acquiring a spectroscopic spectrum of reflected light by illumination light, an imaging device 41 that images the measurement sample 1 to acquire color image information, and the spectroscope 51 and the imaging device 41 are controlled. Central controller 61 is provided.

  In the first embodiment, the illumination optical system 29 includes a light source 30 that emits illumination light, and a light path from the light emitted from the light source 30 to the measurement surface 1a of the measurement sample 1 through the objective lens 36. A collector lens 32, a field stop 33, and a field lens 35 are arranged in this order. In the first embodiment, the illumination optical system 29 reflects the illumination light emitted from the light source 30 via the field lens 35 and guides it to the measurement surface 1 a of the measurement sample 1 via the objective lens 36. A half mirror 37 is further provided. The illumination optical system 29 further includes an optical fiber 31 that propagates illumination light emitted from the light source 30. The emission end 31a of the optical fiber 31 functions as a secondary light source that emits illumination light, and the illumination light emitted from the emission end 31a is guided to the measurement surface 1a of the measurement sample 1 via the collector lens 32 and the like. It is burned.

  For example, the light source 11 is configured to emit white light such as a halogen lamp.

  In the first embodiment, the illumination optical system 29 is arranged at a position where the field stop 33 and the measurement surface 1a of the measurement sample 1 are conjugated, whereby the image of the field stop 33 is measured on the measurement surface 1a of the measurement sample 1. It is comprised so that it may image. Thereby, it is possible to adjust the range of the irradiation range of the illumination light applied to the measurement surface 1a of the measurement sample 1 by adjusting the field stop 33.

  In the first embodiment, the illumination optical system 29 is supported by the support holder 34 so that the emission end side of the optical fiber 31, the collector lens 32, and the field stop 33 can be moved integrally. The support holder 34 is configured to be driven in two directions within a plane orthogonal to the optical axis by a drive motor (not shown). The emission end 31a of the optical fiber 31, the field stop 33, and the measurement surface 1a of the measurement sample 1 are arranged at conjugate positions. Thereby, the position of the image of the field stop 33 on the measurement surface 1a of the measurement sample 1 is moved by moving the support holder 34 in the direction orthogonal to the optical axis, that is, the position adjustment of the irradiation range of the illumination light is performed. Can be done. Further, since the emission end 31a of the optical fiber 31 is used as a secondary light source, the measurement surface 1a of the measurement sample 1 disposed at a position conjugate with the emission end 31a of the optical fiber 31 is irradiated. It is possible to irradiate the measurement surface 1a of the measurement sample 1 more uniformly than when not used.

  The illumination optical system 31 may not use the optical fiber 31. In this case, in order to uniformly irradiate the measurement surface 1a of the measurement sample 1, the so-called Koehler illumination may be configured by arranging the light source 31 and the incident-side pupil position 36a of the objective lens 36 at a conjugate position. Further, in this case, in order to adjust the position of the illumination light irradiation range, the light source 30 and the field stop 33 may be configured to be integrally movable by the support holder 34 or the like.

  In the microspectroscopic light measurement device 3 according to the first embodiment, reflected light obtained by irradiating the measurement sample 1 with illumination light passes through the first half mirror 37 through the objective lens 36 and passes through the second half mirror 38. A part of the light is reflected by the second half mirror 38 and guided to the first imaging optical system 39, and the remaining light is transmitted through the second half mirror 38 to the second imaging optical system 40. It is configured to be guided.

  The first imaging optical system 39 is configured to form an image of the measurement surface 1 a of the measurement sample 1 on the imaging surface 43 a of the imaging element 43 included in the imaging device 41. The first imaging optical system 39 is not limited to the above-described configuration as long as the image of the measurement surface 1a of the measurement sample 1 can be imaged on the imaging surface 43a of the imaging element 43.

  The second imaging optical system 40 is configured to form an image of the measurement surface 1 a of the measurement sample 1 on the incident port 52 of the spectroscope 51. The second imaging optical system 40 is not limited to the above-described configuration as long as it can form an image of the measurement surface 1a of the measurement sample 1 on the incident port 52 of the spectroscope 51.

  The imaging device 41 has an imaging element 43 such as a CCD. The imaging device 41 forms an image of reflected light from the measurement sample 1 incident through the first imaging optical system 39 on the imaging surface 43a of the imaging element 43, and photoelectrically converts the light and darkness of the image into the amount of charge. It functions as one that converts and acquires a two-dimensional image signal.

  The imaging device 41 is configured to acquire color image information by imaging the measurement sample 1. In the first embodiment, a Bayer array RGB primary color filter is provided at a position corresponding to each pixel of the imaging surface 43a of the imaging element 43, thereby obtaining an RGB image represented by an RGB value for each pixel. It becomes possible. The color image information acquired by the imaging device 41 is output to and stored in the ROM 64 under the control of the CPU 62 of the central control device 61. In acquiring color image information by the imaging device 41, any known method may be employed, and various complementary color filters may be used as an alternative to the RGB primary color filters, for example.

  The spectroscope 51 includes a spectroscopic unit 53 that divides the reflected light that has passed through the incident port 52, and a light detection unit 57 that detects the intensity of the light split by the spectroscopic unit 53 for each wavelength. In the first embodiment, the spectroscopic unit 53 converts the reflected light into parallel light by the concave mirror 54, diffracts the parallel light by the diffraction grating 55 and splits it, and collects each dispersed light beam by the concave mirror 56 to collect the light. 57 is formed on the detection surface 57a. In the first embodiment, the light detection unit 57 is composed of a line sensor, and the intensity at the image forming position of the separated light of each wavelength is detected on the detection surface 57a. As a result, it is possible to acquire a spectral spectrum of the reflected light by the illumination light irradiated on the irradiation range S3 by the illumination optical system 29. In addition to this, the spectroscopic unit 53 may be configured to perform spectral separation using a prism, a spectral filter, or the like.

  The central controller 61 includes a CPU (Central Processing Unit) 62 for controlling the entire operation of the microspectrophotometer 3, a RAM (Random Access Memory) 63 as a work area used for processing various types of information, and various types of information. A ROM (Read Only Memory) 64 for storing information, an operation unit 65 including a keyboard and a mouse for a user to input various commands, and a display unit 66 including a display for displaying various information. Have. These are connected to the data bus 67. The ROM 64 stores an image processing unit 68 that performs image processing of image information captured by the imaging device 41, and an arithmetic processing unit 69 that calculates a spectral spectrum of the entire measurement range S1 by arithmetic processing. The ROM 64 is composed of a recording medium such as a hard disk or a CD-ROM.

  Next, a basic concept of operation by the microspectrophotometer 3 according to the first embodiment will be described.

  When the measurement sample 1 as shown in FIG. 1 is used as a measurement target, when illumination light is irradiated with a part of the red region 11A as an irradiation range, the reflected light from the illumination light is, for example, shown in FIG. Thus, a spectral spectrum Sp1 having a peak wavelength λ1 in the red wavelength region of 600 nm to 670 nm can be acquired. Further, when illumination light is irradiated with a part of the blue region 11B as an irradiation range, a peak wavelength λ2 is set in a wavelength region of 420 nm to 480 nm as shown in FIG. It is possible to acquire the spectral spectrum Sp2 having. Note that the hatched portion in the figure indicates the range in which the spectral spectrum is acquired.

  Here, the light intensity of the spectral spectrum that can be obtained from the reflected light obtained by using a part of a single color region as the irradiation range represents the light amount of each wavelength component included in the reflected light from the irradiation range, and the irradiation It can be considered to be proportional to the area of the range. Therefore, in the present invention, a spectral spectrum per unit area is calculated based on a spectral spectrum obtained from reflected light obtained by using a part of a single color region as an irradiation range, and the spectral spectrum per unit area is color-coded. The spectral area of the entire color region 11 is calculated by multiplying the region area of the region 11.

  As a result, in the first embodiment, the red region 11A has a peak wavelength λ1 as shown in FIG. 5A, and the ratio of the light intensity of each wavelength component is the same as the spectrum Sp1. ′ Is calculated as a calculated value, and the blue region 11B has a spectral wavelength SP2 ′ having a peak wavelength λ2 as shown in FIG. 5B and a ratio of the light intensity of each wavelength component to the spectral spectrum Sp2. Is calculated as a calculated value.

  Further, since the spectral spectrum of the entire measurement range S1 can be considered as the total value of the spectral spectra of the entire color regions 11 occupying the measurement range S1, in the present invention, the spectral spectra of the plurality of color regions 11 as a whole. Is added to calculate the spectral spectrum of the entire measurement range S1 as a calculated value. As a result, in the first embodiment, a spectral spectrum Sp3 having peak wavelengths λ1 and λ2 as shown in FIG. 6 is calculated as a calculated value, and a spectral spectrum of the entire measurement range S1 is obtained.

  Next, a microspectroscopic light measurement method for measuring the spectroscopic spectrum in the measurement range S1 using the microspectroscopic light measurement apparatus 3 described above will be described. The subsequent steps are performed under the control of the CPU 62 of the central controller 61 in the first embodiment.

  First, in step S11, as shown in FIG. 1, by imaging the measurement sample 1, the range including the measurement range S1 is set as the imaging range S2, and the color image information in the imaging range S2 is acquired.

  Next, in step S12, the image acquired in step S11 is displayed on the display unit 66 of the central controller 61, and a measurement range is set from the displayed image in the imaging range. The measurement range is set by, for example, operating the pointer displayed on the image on the display unit 66 with the operation unit 65 while the user confirms the image captured on the imaging range on the display unit 66 of the central controller 61. Is done.

  Next, in step S13, the color image information acquired in step S11 is subjected to image processing, thereby extracting a plurality of color regions 11 from the measurement range S1 set in step S12. The process of extracting the plurality of color regions 11 is performed, for example, according to the following procedure.

  First, in sub-step S21, preprocessing such as smoothing processing is performed on the obtained image information to remove noise.

  Subsequently, in sub-step S22, a process of converting a color image expressed by color information such as RGB values into a gray scale image expressed by gray values such as luminance values and chromaticity values by a known algorithm is performed. . This process includes, for example, a process of calculating a weighted average value representing a luminance value from the RGB value of each pixel by a weighted average method using an NTSC coefficient and using the calculated value as the luminance value of each pixel.

  Subsequently, in sub-step S23, processing for extracting an edge of the grayscale image is performed by a known algorithm. Examples of the edge extraction processing include processing using a primary differential filter such as Sobel and Prewitt, and a secondary differential filter such as Laplacian.

  Subsequently, in sub-step S24, a process of binarizing the edge extracted image from which the edge is extracted by a known algorithm is performed. By performing binarization processing, a binarized image in which only the edges of the edge extracted image, that is, only the outlines of a plurality of color regions are drawn, is acquired. As an algorithm used in this binarization processing, for example, Otsu's method capable of automatically calculating a threshold for binarization can be cited.

  As described above, the plurality of color regions 11 are extracted from the measurement range S1 from the captured image information. Note that the algorithm for extracting the plurality of color regions 11 by performing image processing on the color image information acquired in step S11 is not limited to the above-described method.

  In step S13 described above, the color image information acquired in step S11 is subjected to image processing to calculate the area areas of the extracted color areas 11. The area area here means an area occupied by each of the plurality of color areas 11 in the measurement range S1. The area of the area is calculated based on, for example, the number of pixels in the contour lines of the plurality of color areas 11 in the binarized image acquired in the above-described sub-step S24.

  Next, in step S14, the illumination optical system 29 irradiates illumination light with a part of the color region 11 extracted in step S13 as an irradiation range S2. In step S14, the illumination light irradiation range S2 by the illumination optical system 29 is enlarged or reduced by the field stop 33, and the emission end 31a of the optical fiber 31 serving as the secondary light source and the field stop 33 are orthogonal to the optical axis. The step of adjusting the range and adjusting the position so that the irradiation range S2 is within the range of the color region 11 by moving in the direction is included. Thus, since the color region 11 is extracted by image processing in step S13, it is easily adjusted in this step S14 so that only a single color region 11 of the plurality of color regions 11 becomes the irradiation range S2. it can.

  Next, in step S15, the spectroscope 51 acquires a spectral spectrum of a part of the irradiation range S2, that is, the color region 11, by the reflected light from the illumination light irradiated to the irradiation range S2 in step S14. By these steps S14 and S15, only the spectral spectrum of the single color region 11 irradiated with the illumination light can be acquired.

  Steps S14 and S15 are repeated until partial spectral spectra of each of the plurality of color regions 11 within the measurement range S1 are acquired.

  Next, in step S <b> 16, the spectrum of the entire measurement range S <b> 1 is calculated based on the area and spectrum corresponding to each of the plurality of color areas 11.

  Specifically, first, based on a part of the spectral spectrum of the single color region 11 acquired in step S15, the spectral spectrum per unit area of the color region 11 is calculated as an operation value. The spectral spectrum per unit area is calculated by dividing the light intensity for each wavelength component of a part of the spectral spectrum of the color region 11 by the area of the irradiation range S2 by the illumination optical system 29 obtained by adjusting in step S14. To do.

  Subsequently, the spectral spectrum per unit area of the color region 11 is multiplied by the region area of the color region 11 to calculate the spectral spectrum of the entire color region 11 as an operation value. The spectral spectrum of the entire color region 11 is calculated by multiplying the light intensity for each wavelength component of the spectral spectrum per unit area of the color region 11 by the region area of the color region 11.

  Subsequently, the spectral spectra of the entire color region 11 occupying the measurement range S1 are added, and the spectral spectrum of the entire measurement range S1 is calculated as an operation value. The spectral spectrum of the entire measurement range S1 is calculated by adding the light intensities of the respective wavelength components of the spectral spectra of the plurality of color regions 11 as a whole.

  Note that the spectral spectrum of the entire measurement range S1 calculated in step S16 is displayed on, for example, the display unit 66 of the central controller 61 or stored in the ROM 64 of the central controller 61.

  According to the above, it is possible to measure the spectrum of the measurement range with various shapes as the measurement range S1 without being restricted by the aperture shape of the field stop. Further, when measuring the spectral spectrum of the measurement range S1, a plurality of color regions are extracted from the measurement range S1 by image processing, and calculation is performed after obtaining spectral spectra for a part of each of the extracted color regions. Since it is sufficient to perform the processing, the measurement within the measurement range S1 can be completed in a short time.

  As mentioned above, although the example of embodiment of this invention was demonstrated in detail, all the embodiment mentioned above showed only the example of actualization in implementing this invention, and these are the technical aspects of this invention. The range should not be construed as limiting.

  For example, in the above-described embodiment, the spectroscope 51 has been described as acquiring the spectral spectrum of the reflected light by the illumination light. However, the spectroscope 51 is configured to acquire the spectral spectrum of the transmitted light by the illumination light. May be.

1: Measurement sample 3: Microspectroscopic light measurement device 11: Color region 20: Stage 29: Illumination optical system 41: Imaging device 43: Imaging device 51: Spectroscope 61: Central control device S1: Measurement range S2: Irradiation range

Claims (5)

In a microspectrophotometer for measuring a part of a measurement sample as a measurement range and measuring a spectrum of the measurement range,
Imaging means for imaging the measurement sample and obtaining color image information of an imaging range including the measurement range;
An image processing unit that extracts a plurality of color regions classified according to color from the measurement range by performing image processing on the color image information, and calculates a region area of the plurality of color regions;
An illumination optical system for illuminating illumination light with a part of the color region extracted by the image processing means as an illumination range;
Spectral spectrum acquisition means for acquiring a spectral spectrum of a part of the color region by reflected light or transmitted light by illumination light irradiated on the irradiation range;
Arithmetic processing means for performing arithmetic processing based on the area of the color region and a part of the spectral spectrum of the color region,
Obtaining a partial spectrum of each of the plurality of color regions by the illumination optical system and the spectral spectrum acquisition means,
The arithmetic processing unit calculates a spectral spectrum of the entire measurement range based on a region area corresponding to each of the plurality of color regions and a partial spectral spectrum. The arithmetic processing means calculates a spectral spectrum per unit area of the color area based on a part of the spectral spectrum of the color area acquired by the spectral spectrum means, and calculates the spectral per unit area of the calculated color area. The spectral spectrum of the entire color area is calculated by multiplying the spectrum and the area of the color area, and the spectral spectrum of the entire color area of each of the plurality of color areas is added to calculate the spectral spectrum of the entire measurement range. The microspectroscopic light measuring apparatus according to claim 1, wherein: The microspectroscopic measurement apparatus according to claim 1, further comprising setting means for setting the measurement range. An irradiation range adjusting means for adjusting the range and position of the irradiation range of the illumination light irradiated from the illumination optical system to the measurement sample;
The illumination range adjustment unit is configured to perform range adjustment and position adjustment of the illumination range based on the color region extracted by the image processing unit so that illumination light is irradiated to a part of the color region. The microspectrophotometer according to any one of claims 1 to 3. The illumination optical system includes a light source that emits the illumination light, and a field stop that adjusts an irradiation range on the measurement surface of the measurement sample of the illumination light emitted from the light source,
The microscopic light measurement apparatus according to claim 4, wherein the illumination range adjustment unit includes the light source and the field stop that are integrally movable in a direction orthogonal to the optical axis of the illumination light. .

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