JP2012189153A - Rolling bearing - Google Patents

Rolling bearing Download PDF

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JP2012189153A
JP2012189153A JP2011053666A JP2011053666A JP2012189153A JP 2012189153 A JP2012189153 A JP 2012189153A JP 2011053666 A JP2011053666 A JP 2011053666A JP 2011053666 A JP2011053666 A JP 2011053666A JP 2012189153 A JP2012189153 A JP 2012189153A
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Prior art keywords
bearing
rolling
raceway
inner ring
outer ring
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Japanese (ja)
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Takenobu Inaba
武信 稲葉
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NSK Ltd
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NSK Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a bearing having improved water resistance and wear resistance under a water environment.SOLUTION: The rolling bearing includes, to improve a bearing life and bearing performance, namely, water resistance and wear resistance, an outer ring having a raceway in an inner peripheral surface, an inner ring having a raceway in an outer peripheral surface, and a plurality of rolling elements arranged to freely roll between the pair of raceways. At least one of the outer ring and the inner ring is made of corrosion-resistant steel, and the plurality of rolling elements is made of ceramics mainly containing zirconium but no alumina.

Description

本発明は、半導体洗浄装置や水中ポンプなどの水環境下に用いられる転がり軸受に関するものである。   The present invention relates to a rolling bearing used in a water environment such as a semiconductor cleaning device or a submersible pump.

一般に、半導体洗浄装置や水中ポンプなどに用いられる軸受は、洗浄液や水などが浸入する空間に転がり軸受が設置されている。そのため、このような水環境下で使用される軸受には、高い耐腐食性能が求められている。軸受の腐食対策の一例としては、軸受内部に耐水性に優れたグリースを封入することが考えられている。例えば、非特許文献1のように、潤滑油中に僅か100ppmの水分が混入するだけで鋼の転がり強さが32〜48%の低下することが開示されている。
このような寿命低下は、混入した水分から発生した水素が軸受材料に作用し、白色組織剥離と呼ばれる金属剥離を引き起こすことが考えられる。
In general, a bearing used for a semiconductor cleaning device, a submersible pump, or the like is provided with a rolling bearing in a space into which a cleaning liquid or water enters. Therefore, high corrosion resistance is required for bearings used in such a water environment. As an example of measures against corrosion of a bearing, it is considered to enclose grease having excellent water resistance inside the bearing. For example, as disclosed in Non-Patent Document 1, it is disclosed that the rolling strength of steel is reduced by 32 to 48% when only 100 ppm of water is mixed in the lubricating oil.
Such a decrease in the life is considered that hydrogen generated from the mixed water acts on the bearing material and causes metal peeling called white tissue peeling.

この剥離を抑制するために従来から封入グリースを改良したものが多く提案されており、例えば以下の特許文献1〜3には、亜硝酸ナトリウムなどの不動態を形成する酸化剤を添加したグリースや、有機アンチモン化合物や有機モリブデン化合物を添加したグリースや、粒径2μm以下の無機系化合物を添加したグリースなどが提案されている。   In order to suppress this exfoliation, many improvements have been proposed in the past in the enclosed grease. For example, the following Patent Documents 1 to 3 include greases to which an oxidizing agent that forms a passive state such as sodium nitrite is added. In addition, greases to which organic antimony compounds and organic molybdenum compounds are added, greases to which inorganic compounds having a particle diameter of 2 μm or less are added, and the like have been proposed.

P.Schatzberg、I.M.Felsen:Effects of water and oxygen during rollingcontact lubrication、wear 12,pp.331-342,1968P.Schatzberg, I.M.Felsen: Effects of water and oxygen during rollingcontact lubrication, wear 12, pp.331-342,1968 特許第2878749号公報Japanese Patent No. 2878749 特許第3512183号公報Japanese Patent No. 3512183 特開平9−169989号公報Japanese Patent Laid-Open No. 9-169989

しかしながら、特許文献1〜3の様に、グリースの組成の改良で軸受の耐水性を高めるだけでは、水環境下での軸受の永年使用による腐食の進行は避けられず、耐腐食手段として抜本的な対策が求められていた。そこで、本発明では前記問題点を解決する為になされたものであり、軸受の寿命、すなわち耐水性能、対摩耗性能を向上させた軸受を提供することを目的とする。   However, as described in Patent Documents 1 to 3, simply by improving the water resistance of the bearing by improving the grease composition, the progress of corrosion due to long-term use of the bearing in an aqueous environment is unavoidable, and it is drastic as a corrosion-resistant means. Measures were required. Accordingly, the present invention has been made to solve the above-described problems, and an object thereof is to provide a bearing having improved bearing life, that is, water resistance and wear resistance.

前記課題を解決するための第1の発明は、内周面に軌道面を有する外輪と、外周面に軌道面を有する内輪と、上記一対の軌道面間に転動自在に設けられた複数の転動体と、を備えた転がり軸受において、前記外輪及び前記内輪の少なくとも一が耐食鋼よりなり、前記複数の転動体がジルコニアを主成分とし、アルミナを含有しないセラミックスであることを特徴とする。   According to a first aspect of the present invention, there is provided a plurality of outer rings having a raceway surface on an inner peripheral surface, an inner ring having a raceway surface on an outer peripheral surface, and a plurality of rolls provided between the pair of raceway surfaces. A rolling bearing provided with a rolling element is characterized in that at least one of the outer ring and the inner ring is made of corrosion-resistant steel, and the plurality of rolling elements are ceramics containing zirconia as a main component and not containing alumina.

本発明に係る転がり軸受にあっては、外輪や内輪に耐食鋼、転動体にジルコニアを主成分とし、アルミナを含有しないセラミックスを用いることにより、水環境下における軸受寿命すなわち耐水性、耐摩耗性などの軸受性能を向上させることが出来る。   In the rolling bearing according to the present invention, the bearing life in a water environment, that is, water resistance and wear resistance is obtained by using a corrosion-resistant steel for the outer ring and the inner ring, a ceramic containing zirconia as a main component and no alumina for the rolling element. It is possible to improve the bearing performance.

本発明の一実施形態に相当する転がり軸受を示す概略断面図である。It is a schematic sectional drawing which shows the rolling bearing corresponded to one Embodiment of this invention.

次に、本発明の実施の一形態を図面を参照しながら詳細に説明する。図1は、本発明に係る転がり軸受10の実施の一形態を示したものである。図示するようにこの転がり軸受10は、外輪1と内輪2間に互いの間隔を所定になるように保持器4によって保持された複数の転動体3が設けられた構成となっている。   Next, an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an embodiment of a rolling bearing 10 according to the present invention. As shown in the figure, the rolling bearing 10 has a configuration in which a plurality of rolling elements 3 held by a retainer 4 are provided between an outer ring 1 and an inner ring 2 so as to have a predetermined interval.

(実施例・比較例)
ここで、転動体3を表1に示すように、ジルコニアを主成分としてイットリアを含有させたものを実施例1、窒化珪素を主成分としてイットリア、アルミナを含有させたものを比較例1、アルミナを主成分としたものを比較例2とした。
(Examples and comparative examples)
Here, as shown in Table 1, the rolling element 3 containing yttria containing zirconia as the main component was used in Example 1, and yttria containing alumina as the main component and alumina containing the comparative example 1, alumina. Comparative Example 2 was used as a main component.

Figure 2012189153
Figure 2012189153

試験軸受の諸元と試験条件は以下のように設定した。
使用軸受:スラスト軸受
内輪、外輪材料:耐食鋼(SUSC440相当)
転動体直径:3/8インチ
転動体個数:6個
保持器材料:フッ素樹脂(ポリテトラフルオロエチレン)
試験荷重:1666N(軸受アキシアル方向)
試験回転速度:1000min−1
潤滑剤:なし
シール及び潤滑剤を有しない転がり軸受を水中に浸し、上記条件により軸受寿命と摩耗性の試験を行った。
The specifications and test conditions of the test bearing were set as follows.
Bearing used: Thrust bearing inner ring, outer ring material: Corrosion resistant steel (SUSC440 equivalent)
Rolling element diameter: 3/8 inch Number of rolling elements: 6 Cage material: Fluororesin (Polytetrafluoroethylene)
Test load: 1666N (bearing axial direction)
Test rotation speed: 1000 min −1
Lubricant: None Seals and rolling bearings without lubricant were immersed in water, and bearing life and wear tests were performed under the above conditions.

(試験結果)
実施例1と比較例1、2の測定結果を表2に示す。これによると転動体の主成分をジルコニアとした実施例1が最も軸受寿命が長くなり、外輪、内輪の軌道面及び転動体の摩耗も比較例1、2に比べ少ないことが分かった。転動体主成分に窒化珪素を用いた比較例1に比べ、軸受寿命は1.5倍向上し、転動面の磨耗は3/4に、転動体の磨耗は1/6に減少した。また実施例1が比較例1、2に比べ摩耗量が減少した理由としては、実施例1では相手材料を摩耗させ易いアルミナ成分が含まれていないためであることが考えられる。この結果により水環境下での軸受の転動体成分としては、ジルコニアを主成分としアルミナを含有しないセラミックスとすること、外輪、内輪を耐食鋼とすることが軸受寿命上、耐摩耗上最も相性が良いことが分かった。
(Test results)
Table 2 shows the measurement results of Example 1 and Comparative Examples 1 and 2. According to this, it was found that Example 1 in which the main component of the rolling element is zirconia has the longest bearing life, and the outer ring, the raceway surface of the inner ring and the wear of the rolling element are less than those of Comparative Examples 1 and 2. Compared to Comparative Example 1 in which silicon nitride was used as the main component of the rolling element, the bearing life was improved 1.5 times, the wear of the rolling surface was reduced to 3/4, and the wear of the rolling element was reduced to 1/6. The reason why the wear amount of Example 1 is reduced compared to Comparative Examples 1 and 2 is considered that Example 1 does not contain an alumina component that easily wears the mating material. As a result, the rolling element component of the bearing in the water environment is to make the ceramics containing zirconia as the main component and not containing alumina, and to make the outer ring and inner ring corrosion-resistant steel. I found it good.

Figure 2012189153
Figure 2012189153

なお表2に示した軌道面摩耗率とは、内輪と外輪の最大摩耗深さの和を試験時間で除算して算出したものであり、転動体摩耗率とは、転動体の直径変化量を試験時間で除算して算出したものである。   The raceway wear rate shown in Table 2 is calculated by dividing the sum of the maximum wear depths of the inner ring and outer ring by the test time. The rolling element wear rate is the change in diameter of the rolling element. Calculated by dividing by test time.

1…外輪
2…内輪
3…転動体
4…保持器
10…軸受
DESCRIPTION OF SYMBOLS 1 ... Outer ring 2 ... Inner ring 3 ... Rolling element 4 ... Cage
10 ... Bearing

Claims (1)

内周面に軌道面を有する外輪と、外周面に軌道面を有する内輪と、上記一対の軌道面間に転動自在に設けられた複数の転動体と、を備えた転がり軸受において、前記外輪及び前記内輪の少なくとも一つが耐食鋼よりなり、前記複数の転動体がジルコニアを主成分としアルミナを含有しないセラミックスであることを特徴とする転がり軸受。   A rolling bearing comprising: an outer ring having a raceway surface on an inner peripheral surface; an inner ring having a raceway surface on an outer peripheral surface; and a plurality of rolling elements provided between the pair of raceway surfaces so as to be freely rollable. A rolling bearing, wherein at least one of the inner rings is made of corrosion-resistant steel, and the plurality of rolling elements are ceramics containing zirconia as a main component and not containing alumina.
JP2011053666A 2011-03-11 2011-03-11 Rolling bearing Withdrawn JP2012189153A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015219965A (en) * 2014-05-14 2015-12-07 佐鳥エス・テック株式会社 Trigger switch
CN106122280A (en) * 2016-08-24 2016-11-16 无锡诚石轴承有限公司 A kind of high/low temperature motor bearings

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015219965A (en) * 2014-05-14 2015-12-07 佐鳥エス・テック株式会社 Trigger switch
CN106122280A (en) * 2016-08-24 2016-11-16 无锡诚石轴承有限公司 A kind of high/low temperature motor bearings

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Effective date: 20140513