JP2012179868A - Channel unit, liquid injection head unit, and liquid injection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a channel unit capable of operating a valve element with desired working pressure, and a liquid injection head unit and a liquid injection device, which use the channel unit and which suppress a liquid discharge velocity and variations in weight of discharged droplets.SOLUTION: A pressure receiving member includes a pressure receiving part 47a that pushes the valve element, a shank 47c that serves as a rotating shaft of the pressure receiving member, and a connection part 47b that connects the pressure receiving part and the shank together and the length of which is smaller in dimension than the width of the shank and the width of the pressure receiving part in the longitudinal direction of the shank. A pressure chamber 34 comprises first protrusions provided in an opposed state at both the longitudinal ends of the shank of the connection part, respectively, and a second protrusion provided inside with respect to a wall surface for partitioning the pressure chamber, in the longitudinal direction of the shank. A film is fixed to the first and second protrusions.

Description

  The present invention relates to a flow path unit, a liquid ejecting head unit, and a liquid ejecting apparatus.

  As a typical example of the liquid ejecting head, there is an ink jet recording head that ejects ink droplets from a nozzle opening using a pressure acting on ink in a pressure chamber due to displacement of a piezoelectric element, for example. In an ink jet recording head, ink supplied from a liquid source such as an ink cartridge filled with ink is ejected from a nozzle by driving pressure generating means such as a piezoelectric element or a heating element. For example, by inserting an ink supply needle into the ink cartridge, ink in the ink cartridge is introduced into a reservoir, which is a common liquid chamber of the liquid ejecting head, from an introduction hole of the ink supply needle.

  In this type of ink jet recording head, an ink jet recording head unit is configured in combination with a flow path unit provided in the middle of a flow path for supplying ink from a liquid supply source such as an ink cartridge to the ink jet recording head. The thing is known (refer patent document 1). The flow path unit of such an ink jet recording head unit opens the valve body when ink drops are ejected from the nozzle openings and the inside of the reservoir becomes negative pressure, and ink from the ink cartridge is supplied to the reservoir of the ink jet recording head. To supply. For this reason, the flow path unit is a part of the flow path in which the valve body is disposed, and the pressure chamber on which the negative pressure acts is formed in the flow path unit body in which the ink flow path is formed. Yes. Here, the pressure chamber is formed by covering the opening with a film. Thus, the valve is pressed by the film being bent toward the pressure chamber by the negative pressure acting in the pressure chamber, and the valve is moved by this pressing force to open the flow path.

  In addition, as a valve body installed in the pressure chamber, a pressure plate and a film arranged in the pressure chamber are thermally welded, and the valve and the pressure plate are operated to operate the valve body. (See Patent Document 2).

JP 2009-184202 A JP 2008-230196 A

  In the valve body shown in Patent Document 2, since the pressure receiving plate and the film are welded and the pressure receiving plate is supported only by the springs behind the film and the pressure receiving plate, the posture of the pressure receiving plate during deformation of the film, That is, the displacement state of the pressure receiving plate was not stable. Thereby, the operating pressure, which is the pressure when the valve body is in the open state, is different in each flow path unit.

  In particular, as shown in Patent Document 1, when the shape of the pressure chamber in which the valve body is installed is not circular, the deformation of the film at the time of negative pressure is non-uniform, which makes the posture of the pressure receiving plate more stable. There is a problem of not. Further, such a variation in the operating pressure of each flow path unit has a problem that causes a variation in the ink ejection speed of the liquid ejecting head using the flow path unit and the weight variation of the ejected droplets.

  Such a problem exists not only in the ink jet recording head unit but also in a liquid ejecting head unit that ejects liquid other than ink.

  In view of the above prior art, the present invention provides a flow path unit capable of operating a valve body at a desired operating pressure, a liquid ejecting head unit using the same, and a liquid ejection head unit and a liquid in which variation in the weight of ejected liquid droplets is suppressed It aims at providing an injection device.

  The flow path unit of the present invention includes a liquid flow path through which a liquid flows, a pressure chamber provided in the liquid flow path, a film that is fixed to a wall surface that partitions the pressure chamber and seals the pressure chamber, A valve body provided at a connection portion between the pressure chamber and the liquid flow path to open or close the liquid flow path; and a pressure receiving member provided in the pressure chamber and provided to face the valve body. And the film is displaced toward the pressure chamber based on the negative pressure acting on the pressure chamber and presses the pressure receiving member, whereby the valve body facing the pressure receiving member is pressed and the liquid channel A flow path unit in which liquid flows from the pressure chamber to the liquid flow path, wherein the pressure receiving member includes a pressure receiving portion that presses the valve body, and a shaft portion that serves as a rotation shaft of the pressure receiving member. The pressure receiving portion and the shaft portion are connected, and in the longitudinal direction of the shaft portion, the width of the shaft portion and the pressure receiving portion A first connecting portion provided opposite to both ends of the connecting portion in the longitudinal direction of the shaft portion, and the longitudinal direction of the shaft portion, A second protrusion provided on the inner side of the wall surface defining the pressure chamber is provided, and the film is fixed to the first protrusion and the second protrusion.

  In the present invention, since the pressure receiving member is pivotally supported by the shaft portion to form a so-called cantilever structure, the pressure receiving plate is supported and the posture is stabilized even if the pressure receiving plate and the film are not fixed. The valve body can be operated with pressure. And since the distance between the shaft part and the film at the end part of the shaft part is short because the film is fixed to the first projecting part and the second projecting part, the lifting of the shaft part can be suppressed, which is more desirable. The valve body can be operated with an operating pressure of.

  As a preferred embodiment of the present invention, the shaft portion is provided with the second protrusions at both ends in the longitudinal direction, or a notch is provided at the center in the longitudinal direction. It is mentioned that the second protrusion is provided in the notch.

  The liquid ejecting head unit according to the present invention includes any one of the above-described flow path units, a nozzle opening that ejects liquid, and the flow path unit that communicates with the liquid flow path of the flow path unit. And a pressure generating means for generating a pressure change in the pressure chamber and ejecting the liquid from the nozzle opening. By including the flow path unit that suppresses the variation in the operating pressure, the liquid ejection head unit of the present invention suppresses the liquid ejection speed and the variation in the weight of the ejected droplets.

  The liquid ejecting apparatus according to the invention includes a liquid ejecting head unit. By including the liquid ejecting head unit in which the liquid ejection speed and the weight variation of the ejected droplets are suppressed, the liquid ejecting apparatus of the present invention improves the liquid ejecting characteristics.

1 is a schematic configuration diagram of an ink jet recording apparatus. It is a front view of a channel unit and a head. It is an external view of a flow path unit. FIG. 3 is a plan view of FIG. 2. It is a VV line arrow directional view in FIG. It is a general | schematic partially enlarged view of a pressure-receiving plate part. FIG. 6A is a partial schematic cross-sectional view taken along the line A-A in FIG. It is explanatory drawing for demonstrating the relationship between a pressure receiving plate and a film. It is a partial schematic sectional drawing for demonstrating a manufacturing process. It is a schematic partial enlarged view of the pressure-receiving plate part concerning another embodiment. Explanatory drawing for demonstrating the relationship between the pressure receiving plate and film of another embodiment.

  FIG. 1 is a schematic configuration of an ink jet recording apparatus including an ink jet recording head according to an embodiment of the present invention, FIG. 2 is a front view of the flow path unit and the head, and FIG. 4 is a plan view of FIG. 2, and FIG. 5 is a view taken along line VV in FIG.

  An ink jet recording apparatus will be described with reference to FIG. As shown in the figure, an ink jet recording apparatus 1 as a liquid ejecting apparatus has an ink jet recording head (hereinafter referred to as a head) 4 as a liquid ejecting head. The head 4 is fixed to a carriage 3 on which the ink cartridge 2 is mounted. The carriage 3 has a box shape that opens to the top, is attached so that the nozzle surface of the recording head 4 is exposed on the surface (lower surface) facing the recording paper S, and accommodates the ink cartridge 2. Then, the ink from the ink cartridge 2 is supplied to the head 4 via a flow path unit (not shown).

  The carriage 3 is connected to a stepping motor 6 via a timing belt 5 and reciprocates in the paper width direction (main scanning direction) of the recording paper S. As a result, ink droplets are ejected onto the upper surface of the recording paper S while moving the carriage 3 so that images and characters are printed on the recording paper S in a dot matrix.

  The illustrated head 4 is provided with a flow path unit (not shown in FIG. 1) that also serves as a flow path forming member in which a flow path for supplying ink from the ink cartridge 2 to the head 4 is formed. . In the example of FIG. 1, an example in which the ink cartridge 2 as a liquid source is accommodated in the carriage 3 has been described. However, the ink cartridge 2 is accommodated in a location different from the carriage 3 and is supplied via a supply pipe. The present invention can also be applied to an ink jet recording apparatus configured to pump ink to the flow path forming member of the head 4.

  Next, the head 4 will be described with reference to FIG. A flow path unit 10, which will be described in detail later, is provided at the upper part of the head 4, and a nozzle plate 8 is provided at the lower part of the head 4. The head 4 is formed with a head flow path (not shown). The head flow path includes a reservoir chamber for storing ink and a pressure chamber for generating pressure by the pressure generating means. It communicates with the nozzle openings formed in the nozzle plate 8 at the bottom. Ink from the flow path unit 10 is supplied to the head flow path and filled in the head flow path, and pressure is generated by pressure generating means such as a piezoelectric element so that the ink in the pressure chamber ejects ink droplets from the nozzle openings. It has become. In the present embodiment, the liquid jet head unit 9 includes the head 4 and the flow path unit 10. The flow path unit 10 is supplied with ink from the ink cartridge 2. For example, ink is supplied from the ink cartridge 2 to the flow path unit 10 via a supply tube or an ink supply needle.

  The flow path unit 10 will be specifically described with reference to FIGS. As shown in these drawings, the flow path unit 10 has a rectangular parallelepiped block shape having a rectangular board surface, and a resin film 20 (in FIG. 2 and FIG. 3, it is transparent for the description of the flow path unit 10). The board surface ink flow path 11 is formed on each board surface by heat-welding and sealing to both board surfaces of the resin main body 21. That is, a disk surface ink flow path 11 is defined by the wall surface portion 12 on each disk surface of the main body 21. The board surface ink flow paths 11 are formed so as to be symmetrical with each other as will be described later, and each has a main flow path 24. The main channel 24 is in a wide state (in a wide portion) from the inlet portion 25 toward the outlet portion 26 (in the direction of ink flow), and the outlet portion 26 is provided with a first filter 27. The first filter 27 is arranged on a wide part of the board surface in an area including the wide outlet portion 26, and a large area is secured. The first filter 27 mainly traps foreign matter contained in ink that has circulated through a valve body 35 described later.

  The first filter 27 has a surface along the ink flow direction (a surface parallel to the disk surface), and the ink flowing through the main flow path 24 passes through the first filter 27 from the outside of the disk surface to the inside of the main body 21. It is sent to the lower part and sent from the two discharge holes 28 to the head 4 (see FIG. 2). The ink sent to the main flow path 24 spreads from a narrow flow path to a wide flow path (spreads in the width direction of the outlet portion) and is discharged from the discharge hole 28 at the end to one reservoir chamber of the head 4 (see FIG. 2). Sent. That is, two discharge holes 28 connected to one reservoir chamber are provided for each main flow path 24, and four discharge holes 28 are provided in one flow path unit 10 (see FIG. 4).

  Ink introduction holes 31 are respectively provided at the upper end of the flow path unit 10, and ink is supplied to the ink introduction holes 31 from the ink cartridge 2 (see FIG. 1). The ink supplied to one of the ink introduction holes 31 (left side in FIG. 4) is sent to the inlet 25 of the main flow path 24 shown in FIG. 2 via the ink flow path 30, and the other (right side in FIG. 4). The ink supplied to the ink introduction hole 31 is sent to the inlet portion 25 of the main flow path 24 provided on the back side of the paper surface of FIG. That is, in the flow path unit 10 of the present embodiment, two symmetrical ink flow paths 30 are provided.

  In the ink flow path 30 connected to the ink introduction hole 31, as indicated by an arrow A in FIG. 4, the ink supplied to one (left side in FIG. 4) of the ink introduction hole 31 flows upward in FIGS. 4 and 5. After that, the second filter 32 provided in the filter chamber 33 is distributed downward and sent to the pressure chamber 34 shown in FIG. Further, as indicated by an arrow B in FIG. 4, the ink flow path 30 is configured so that the ink supplied to the other (right side in FIG. 4) ink flows to the lower side in FIGS. 4 and 5. It is formed so as to flow through the second filter 32 provided in the filter chamber 33 shown in FIG. 2 and to go to the upper side in FIGS. 4 and 5 and to be sent to the pressure chamber 34 existing on the back side of the paper surface of FIG. ing. The second filter 32 has a plane parallel to the board surface and is arranged in parallel with the first filter 27.

  In detail, a valve body 35 is provided in each ink flow path 30 between the ink introduction hole 31 and the pressure chamber 34, and when the pressure in the reservoir chamber of the head 4 (see FIG. 2) decreases, that is, ink is ejected. When the pressure on the main flow path 24 side is relatively lowered, the valve body 35 operates so as to allow the ink flow.

  That is, when the ink is supplied from the ink introduction hole 31 at a predetermined pressure, the valve body 35 is closed when the ink is stored in the reservoir chamber of the head 4 (see FIG. 2). When the pressure on the wake side decreases due to ink discharge, the valve body 35 is opened by the negative pressure generated thereby, and ink is supplied.

  Specifically, this will be described with reference to FIGS. As shown in FIG. 7, the valve body 35 includes a valve body shaft portion 40 and a disk portion 41 formed integrally with the valve body shaft portion 40 on one end side of the valve body shaft portion 40. The body shaft portion 40 is inserted through a through hole 42 formed in the pressure chamber 34. One end of a spring 44 is connected to the side opposite to the valve body shaft portion 40 of the disc portion 41, that is, the back surface, and the other end of the spring 44 is connected to a spring seat (not shown). The spring seat is fixed to the filter chamber 33 shown in the drawing. Since the spring seat is fixed to the filter chamber 33 (see FIG. 5), the spring 44 biases the valve body 35 toward the film 20 on the pressure chamber 34 side. In this case, the valve body 35 is closed by the disc portion 41 and the bottom surface of the pressure chamber 34. The film 20 is fixed to the board surface of the main body 21 so as to be bent on the pressure chamber 34 as will be described in detail later.

  In addition, a pressure receiving plate (pressure receiving member) 47 is provided in the pressure chamber 34, and the pressure receiving plate 47 is provided so as to contact the valve body shaft portion 40. The pressure receiving plate 47 is not fixed to the film 20 in this embodiment. That is, in the present embodiment, the pressure receiving plate 47 is displaced toward the pressure chamber 34 simultaneously with the film 20 when the film 20 contacts the pressure receiving plate 47 when the film 20 is displaced toward the pressure chamber 34. When the pressure receiving plate 47 is displaced, the valve body 35 is moved in contact with the valve body 35.

  In this embodiment, since the pressure receiving plate 47 is not fixed to the film 20, the pressure receiving plate 47 has a cantilever structure in this embodiment in order to displace the pressure receiving plate 47 stably. This will be specifically described. As shown in FIG. 6, in the present embodiment, the pressure receiving plate 47 is connected to the pressure receiving portion 47 a via the connection portion 47 b on the base end side of the pressure receiving portion 47 a and the substantially circular pressure receiving portion 47 a in the front view. It consists of a shaft part 47c. The length of the connecting portion 47b in the longitudinal direction is shorter than the diameter of the pressure receiving portion 47a and the length of the shaft portion 47c in the longitudinal direction. A pair of protrusions (first protrusions) 48 protruding from the bottom surface of the pressure chamber 34 toward the film 20 are provided on the connection part 47b so as to face the connection part 47b in the longitudinal direction of the connection part 47b. . In other words, the pair of protrusions 48 are provided so as to sandwich both longitudinal sides of the connection portion 47 b of the pressure receiving plate 47. The protrusion 48 is formed integrally with the pressure chamber 34. The protrusion 48 is configured to be higher than the pressure receiving plate 47 in a sectional view, and the film 20 is melted and fixed on the upper surface thereof. The projection 48 and the film 20 constitute a bearing portion, and the pressure receiving plate 47 is pivotally supported without detaching from the bearing portion, and the tip end portion, that is, the pressure receiving portion 47a swings around the shaft portion 47c. Move. That is, the pressure receiving plate 47 is pivotally supported by the bearing portion and has a cantilever structure in which the tip portion can swing around the shaft portion 47c as described above.

  Further, in the present embodiment, the film 20 on the pressure chamber 34 bends and protrudes downstream from the bonding surface between the film 20 and the wall surface portion 12, and is welded onto the wall surface portion 12 of the pressure chamber 34. Has been. That is, the film 20 on the pressure chamber 34 is curved in this embodiment when no negative pressure is applied. If the film 20 is not in a relaxed and bent state but is in a tensioned state, if the negative pressure is applied, the film 20 is pulled downstream and resists the tension, so a reaction force is generated in the film 20 To do. However, in this embodiment, since the film 20 is in a bent state, even if a negative pressure is applied and the film 20 is pulled downstream, a reaction force is hardly generated.

  In such a flow path unit 10, the pressure on the film 20 in the flow path unit 10 is reduced by the discharge of the ink so that the pressure in the pressure chamber 34 is lower than the external pressure of the flow path unit, that is, the pressure chamber 34. When a negative pressure is applied to the inside, it is displaced toward the pressure chamber 34, and this displacement is transmitted to the valve body 35 via the pressure receiving plate 47. In this case, as shown in FIG. 7B, the pressure receiving plate 47 receives the displacement of the film 20 by the pressure receiving portion 47a (that is, the pressure receiving portion 47a is pressed by the film 20), and the shaft portion 47c is centered. As shown in FIG. This displacement is transmitted to the shaft portion 40 of the valve body 35. Then, against the urging force of the spring 44 acting on the valve body 35, the valve body 35 is moved via the pressure receiving plate 47, thereby opening the space between the ink flow path and the pressure chamber 34.

  Furthermore, in the present embodiment, the pressure receiving plate 47 and the film 20 are provided apart from each other when no negative pressure is applied, and the two are not fixed. Therefore, the film 20 can move more freely according to the negative pressure, the operating pressure variation factor can be eliminated, and a more stable operating pressure can be obtained. That is, it is possible to operate the valve body 35 at a desired operating pressure while suppressing variation in the operating pressure, whereby the head 4 can eject liquid more stably.

  By the way, when the pressure receiving plate 47 and the film 20 are not fixed as described above, when the film 20 presses the pressure receiving portion 47a and the pressure receiving plate 47 swings around the shaft portion 47c, the film 20 If the displacement toward the through hole 42 is large, the shaft portion 47c may be lifted. In this way, when the shaft portion 47c has been lifted, if the shaft portion 47c may come into contact with the film 20, the operation pressure of the film 20 may be hindered, resulting in variations in operating pressure. It is necessary to suppress this.

  Therefore, in the present embodiment, by providing the extending portion 50 (second projecting portion), it is possible to suppress the lift of the shaft portion 47c, thereby inhibiting the operation of the film 20 and suppressing the variation in the operating pressure. ing.

  More specifically, a notch portion 47d is provided from the shaft portion 47c of the pressure receiving plate 47 to the connection portion 47b, and the extending portion 50 extends from the wall surface 34a constituting the pressure chamber 34 so as to fit into the notch portion 47d. Is formed to extend. A rib (fixed portion) 51 is formed on the wall surface 34 a and the extending portion 50, and the film 20 is fixed to the rib 51. In this case, as shown in FIG. 8A, if there is no extending portion 50, the film 20 is fixed only to the wall surface of the pressure chamber 34 in the longitudinal direction of the shaft portion 47c. The upper portion of the portion 47c is bent. By bending in this way, the region where the shaft portion 47c can move increases, and as a result, when the pressure receiving portion 47a (see FIG. 7) swings, the shaft portion 47c is lifted. When the shaft portion 47 c comes into contact with the film 20, the operation of the film 20 is hindered.

  On the other hand, in this embodiment, as shown in FIG. 8B which is a cross-sectional view taken along the line BB in FIG. 6, the extending portion 50 is provided, and the film 20 is applied to the rib 51 of the extending portion 50. By fixing, the distance between the film 20 and the shaft portion 47c is shortened at each end of the shaft portion 47c of the pressure receiving plate 47. As a result, the movement of the shaft portion 47c is restricted, so that the lift of the shaft portion 47c can be suppressed, and variations in operating pressure can be further suppressed. Even if the lifting of the shaft portion 47c is suppressed in this way, the shaft portion 47c may come into contact with the film 20. However, a large movement of the shaft portion 47c such as the lifting of the shaft portion 47c obstructs the operation of the film 20. However, if the shaft portion 47c is not lifted as in the present embodiment, the film 20 is not moved. Even if the shaft portion 47c comes into contact, the operation of the film 20 is not hindered.

  Further, since the pressure receiving plate 47 and the film 20 are not fixed in this manner, the film 20 is likely to return when the negative pressure is released. That is, if the pressure receiving plate 47 and the film are fixed, wrinkles may be uneven and the film may be difficult to deform in one direction, and the operation of the film is restricted. This may make it difficult for the film displaced toward the second filter 32 when negative pressure is released to return when the negative pressure is released. In particular, when the pressure receiving plate 47 has a cantilever structure as in the present embodiment, if there is a region where the operation of the film is restricted on the tip side, the valve body may not be operated at a desired negative pressure. It is done. However, in this embodiment, since the pressure receiving plate 47 and the film 20 are not fixed as described above, the film 20 does not wrinkle, so that the film 20 can move freely and operates even when the negative pressure is released. The cause of pressure variation can be eliminated, and a stable operating pressure can be obtained.

  If the pressure receiving plate 47 and the film 20 are not fixed in this manner, the pressure receiving plate is difficult to operate with the same trajectory for the same pressure during operation, but in this embodiment, the pressure receiving plate 47 is Since the pressure receiving plate 47 is not fixed to the film 20, the posture is stabilized during operation because of the cantilever structure.

  Thus, in this embodiment, since the film 20 is bent in a state where no negative pressure is applied, even if the negative pressure is applied and the film 20 is pulled downstream, a reaction force is hardly generated. As a result, in the flow path unit 10 of the present embodiment, it is possible to further suppress variations in operating pressure.

  Further, the main flow path 24 of the flow path unit 10 of the present embodiment is formed with a shelf portion 36 as a stepped portion extending in the ink transport direction (vertical direction in FIG. 2). The shelf 36 is formed at the end of the main flow path 24 (both ends of the wide portion), and the depth is reduced. By providing the shelf 36 at the end of the main flow path 24, when bubbles are mixed in the main flow path 24, the shelf 36 has a shallow depth due to the bubbles floating in the narrow flow path near the inlet 25. Air bubbles are prevented from entering the glass. For this reason, even if air bubbles are mixed into the main flow path 24, the ink flows through the shelf 36 and is supplied to the head 4 (see FIG. 2).

  The manufacturing method of the flow path unit in this embodiment will be described.

  First, after forming the main body 21 made of resin by molding, the main body 21 is accommodated in the jig 100 as shown in FIG. The jig 100 has a block shape and includes a housing portion 101 that houses the main body 21. Then, in this state, the film substrate 102 larger than the opening of the housing portion 101 is placed on the jig 100 (placement step). The film base 102 is formed with perforations (not shown) having substantially the same shape as the board surface of the main body 21, and a positioning pin (not shown) is used so that the area surrounded by the perforations coincides with the board surface of the main body 21. The film substrate 102 is positioned on a jig.

  Thereafter, as shown in FIG. 9, the film substrate 102 on the pressure chamber 34 is bent and deformed (film deformation process), and the film substrate 102 is welded to the surface of the main body 21 formed on the surface in this state. (Fixing) (welding process). That is, a pressing member 104 that protrudes toward the pressure chamber 34 at the time of installation and presses and deflects the film substrate 102 and a heating member 105 that heats the film substrate 102 to cover the area to be welded and welds it to the board surface. Thus, the film substrate 102 is welded to the board surface of the main body 21 formed on the board surface in a state where the film substrate 102 is bent on the pressure chamber 34. In this case, the film base material 102 is placed on the manufacturing rib 106 provided on the wall surface and the projection 48 that defines the flow path and the pressure chamber 34 of the main body 21 in a specifically positioned state. . Accordingly, when the heating member 105 comes into contact, the manufacturing rib 106 is melted and shortened (becomes the rib 51), and the manufacturing rib 106 is melted so that the film substrate 102 is firmly bonded to the main body 21. The flow path is sealed. As the film base material 102 is welded to the main body 21 in this manner, the bearing of the pressure receiving plate 47 is formed by the extending portion 50, the protrusion 48 and the film base material 102.

  Moreover, the film 20 can be bent in the pressure chamber 34 by welding the film substrate 102 to the main body in a state where the film substrate 102 is pressed and bent by the pressing member 104 in this manner, When it occurs, the film 20 can easily operate, and variations in operating pressure can be suppressed.

  Thereafter, the pressing member 104 and the heating member 105 are removed, the region other than the region surrounded by the perforation is removed from the film base material 102, and the film 20 is fixed from the jig 100 to the main body 21, and the flow path The flow path unit 10 sealed with is taken out. Then, the liquid channel of the manufactured channel unit 10 is installed in the recording head 4 so as to communicate with the head channel.

  In the above-described embodiment, the film 20 and the pressure receiving plate 47 are not fixed, but the present invention is not limited to this. The film 20 and the pressure receiving plate 47 may be fixed. In this case, by forming the pressing member 104 from a material having good thermal conductivity, the pressure receiving plate 47 and the film 20 can be fixed while the film 20 is bent at the time of welding.

  The embodiment of the present invention is not limited to the above-described embodiment. For example, in the above-described embodiment, the plate-like member is provided, but the present invention is not limited to this. For example, as shown in FIG. 10, the wall surface 34 a and the protrusion 48 are connected without providing the notch 47 d in the pressure receiving plate 47. The extending portion 50A may be provided as described above. In this case, the extending portion 50A is provided close to both ends of the shaft portion 47c. Since the film 20A is fixed to the extended portion 50A at both ends of the shaft portion 47c as shown in FIG. 11, the distance between the film 20A and the shaft portion 47c, particularly the film 20A, is provided. The distance at both ends of the shaft portion 47c is shorter (indicated by the dotted line in the figure) than when the extending portion 50A is not provided. As a result, the lift of the shaft portion 47c can be suppressed, and variations in operating pressure can be suppressed.

  In this case, the extended portion 50A may be provided by further providing a notch 47d. By providing in this way, it is possible to further regulate the lifting of the shaft portion 47c.

  The shape of the pressure receiving member is not limited to the shape of the pressure receiving plate in the above-described embodiment. What is necessary is just to provide the axial part and the pressure receiving part so that it may become a cantilever structure.

  In the above-described embodiment, after the positioning step, the film substrate 102 is welded to the board surface of the main body 21 while being bent, that is, the film deformation step and the welding step are performed simultaneously, but the present invention is not limited to this. For example, positioning is performed (positioning step), and the film base material 102 is bent while maintaining the positioning (film deformation step), and then the film base material 102 is welded to the main body 21 while maintaining the positioning. Good (welding process).

  In the above-described embodiments, the ink jet recording head has been described as an example of the liquid ejecting head. However, the present invention is widely intended for all liquid ejecting heads, and ejects liquid other than ink. Of course, it can also be applied to the head. Other liquid ejecting heads include, for example, various recording heads used in image recording apparatuses such as printers, color material ejecting heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejection head used for electrode formation, a bioorganic matter ejection head used for biochip production, and the like.

  DESCRIPTION OF SYMBOLS 1 Inkjet recording device, 2 Ink cartridge, 4 Recording head, 10 Flow path unit, 20 Film, 21 Main body, 24 Main flow path, 25 Inlet part, 26 Outlet part, 27 First filter, 28 Ejection hole, 30 Ink flow Passage, 31 ink introduction hole, 32 second filter, 34 pressure chamber, 35 valve body, 47 pressure receiving plate, 47a pressure receiving portion, 47c shaft portion, 48 protrusion

Claims (5)

A liquid channel through which the liquid flows; a pressure chamber provided in the liquid channel; a film fixed to a wall surface defining the pressure chamber to seal the pressure chamber; the pressure chamber and the liquid channel A valve body that opens or closes the liquid flow path, and a pressure receiving member that is provided in the pressure chamber and that faces the valve body.
Based on the negative pressure acting on the pressure chamber, the film is displaced toward the pressure chamber and presses the pressure receiving member, whereby the valve body facing the pressure receiving member is pressed to open the liquid flow path. A flow path unit through which liquid flows from the pressure chamber to the liquid flow path,
The pressure receiving member connects a pressure receiving portion that presses the valve body, a shaft portion that is a rotation shaft of the pressure receiving member, the pressure receiving portion and the shaft portion, and a shaft portion in a longitudinal direction of the shaft portion. And a connection portion shorter than the width of the pressure receiving portion,
The pressure chamber includes a first protrusion provided opposite to both ends of the connecting portion in the longitudinal direction of the shaft portion, and an inner side of a wall surface defining the pressure chamber in the longitudinal direction of the shaft portion. And a second protrusion provided on the
The flow path unit, wherein the film is fixed to the first protrusion and the second protrusion.   The flow path unit according to claim 1, wherein the second protrusions are provided at both ends of the shaft portion in the longitudinal direction.   3. The flow according to claim 1, wherein the shaft portion is provided with a notch at a center in a longitudinal direction thereof, and the second protrusion is provided at the notch. Road unit.   The flow path unit according to any one of claims 1 to 3, a nozzle opening for ejecting liquid, and a flow path in the flow path that communicates with the liquid flow path of the flow path unit while communicating with the nozzle opening. A liquid ejecting head unit comprising: a liquid ejecting head including pressure generating means for causing a pressure change in the pressure chamber to eject liquid from the nozzle opening. A liquid ejecting apparatus comprising the liquid ejecting head unit according to claim 4.

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