JP2012174592A - Injection device and injection method and dye sensitized solar cell manufacturing method using the same - Google Patents

Injection device and injection method and dye sensitized solar cell manufacturing method using the same Download PDF

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JP2012174592A
JP2012174592A JP2011037220A JP2011037220A JP2012174592A JP 2012174592 A JP2012174592 A JP 2012174592A JP 2011037220 A JP2011037220 A JP 2011037220A JP 2011037220 A JP2011037220 A JP 2011037220A JP 2012174592 A JP2012174592 A JP 2012174592A
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injection
assembly
rubber pad
solution
infusion
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JP5743599B2 (en
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Masaharu Kaneko
正治 金子
V V Jayaweera P
ピー.ヴィ.ヴィ.ジャイヤウィラ
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SPD LABORATORY Inc
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/542Dye sensitized solar cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

PROBLEM TO BE SOLVED: To provide an injection device and injection method which can inject an infusion into a space between two substrates which are pasted together in a short time without letting it exposed to the air, and a dye sensitize solar cell manufacturing method using the injection device and injection method.SOLUTION: Following steps are included: a step of fitting by suction a rubber pad 5 connected with a vacuum pump to an inlet 23 of an assembly 10 into which an infusion 41 is injected, thereby making the internal pressure of the assembly 10 negative; a step of introducing the infusion 41 into the inside of the rubber pad 5 now under negative pressure and into at least the inlet 23 part of the assembly 10; a step of pressuring the infusion 41 inside the rubber pad 5 by inert gas 7b to force the infusion 41 into the inside of the assembly 10; and a step of pushing the remainder of infusion which was introduced into the rubber pad 5 side but not forced into the assembly 10 back to an injection jig 3 by the inert gas 7b.

Description

本発明は、色素増感太陽電池や液晶表示装置などの2枚の基板の狭い間隙に電解液や液晶などの液状物を注入する注液装置、注液方法およびその注液方法を用いた色素増感太陽電池の製法に関する。さらに詳しくは、液状物を大気中に晒すことなく、しかも、1個1個流れ作業的に液状物を注入することにより、色素増感太陽電池を自動機により製造することができる注液装置、注液方法およびその注液方法を用いた色素増感太陽電池の製法に関する。   The present invention relates to a liquid injection device, a liquid injection method, and a dye using the liquid injection method for injecting a liquid material such as an electrolyte or liquid crystal into a narrow gap between two substrates such as a dye-sensitized solar cell and a liquid crystal display device. The present invention relates to a method for producing a sensitized solar cell. More specifically, a liquid injection device capable of manufacturing a dye-sensitized solar cell by an automatic machine by injecting the liquid material in a flow operation one by one without exposing the liquid material to the atmosphere, The present invention relates to a liquid injection method and a method for producing a dye-sensitized solar cell using the liquid injection method.

従来、色素増感太陽電池の電解質材料(電解液)を、作用極基板および対向極基板を貼り合せた組立体の両基板間の狭い間隙部に注入する場合や、液晶パネルの2枚の基板間に液晶を注入する場合、2枚の基板を貼り合せた組立体や液晶パネルと液晶などの注入液体を真空にし得る耐圧容器内に入れ、耐圧容器内を真空吸引し液晶パネルなどの注入口を液晶などに接触させて、液晶の表面を大気圧などにすることにより、圧力差で注入する方法が一般的に行われている(たとえば特許文献1参照)。この装置は、たとえば図5に示されるように、耐圧容器51内に、液晶52を満たした液晶溜め容器53を設置すると共にその液晶52の上方に、2枚のセル基板を一定の間隔で貼り合せた液晶パネル54を回転軸56により吊るして、バルブ57を開くことにより、排気系により耐圧容器51内を負圧にして液晶パネル54の間隙部を負圧にする。そして、回転軸56を回転させることにより、液晶パネル54の液晶注入口55を液晶溜め容器53内の液晶52に接触させてから、バルブ58を開き外気を吸入して耐圧容器51内を大気圧にすることにより、液晶52の表面の圧力と、液晶パネル54の2枚の基板間の圧力との圧力差を利用して液晶パネル54内に液晶53を注入するものである。なお、この方法によれば、液晶パネル54を複数個並べて吊るすことにより、複数個の液晶注入を同時に行うことができる。   Conventionally, an electrolyte material (electrolytic solution) of a dye-sensitized solar cell is injected into a narrow gap between both substrates of an assembly in which a working electrode substrate and a counter electrode substrate are bonded together, or two substrates of a liquid crystal panel When injecting liquid crystal between the two substrates, the liquid crystal panel and liquid injection liquid such as liquid crystal panel are placed in a pressure-resistant container that can be evacuated, and the pressure container is vacuumed to fill the liquid crystal panel injection port. In general, a method of injecting with a pressure difference by bringing the liquid crystal into contact with liquid crystal or the like to bring the surface of the liquid crystal to atmospheric pressure or the like (see, for example, Patent Document 1). For example, as shown in FIG. 5, this apparatus is provided with a liquid crystal reservoir 53 filled with liquid crystal 52 in a pressure vessel 51, and two cell substrates are pasted on the liquid crystal 52 at regular intervals. The combined liquid crystal panel 54 is suspended by the rotating shaft 56 and the valve 57 is opened, whereby the pressure inside the pressure vessel 51 is made negative by the exhaust system, and the gap between the liquid crystal panels 54 is made negative. Then, by rotating the rotating shaft 56, the liquid crystal inlet 55 of the liquid crystal panel 54 is brought into contact with the liquid crystal 52 in the liquid crystal reservoir container 53, and then the valve 58 is opened to suck in outside air and the atmospheric pressure in the pressure resistant container 51 is increased. Thus, the liquid crystal 53 is injected into the liquid crystal panel 54 using the pressure difference between the pressure on the surface of the liquid crystal 52 and the pressure between the two substrates of the liquid crystal panel 54. According to this method, a plurality of liquid crystal injections can be performed simultaneously by suspending a plurality of liquid crystal panels 54 side by side.

また、液晶パネルなどの全体を耐圧容器51に入れて、全体を真空吸引しないで、たとえば図6に示されるように、1個ごとの液晶パネル64の液晶注入口65に注入治具63を取り付け、バルブ66、67、68と減圧装置69とを操作することにより注入する方法も知られている。この方法では、まず、液晶貯蔵容器61内を大気圧より若干低い気圧にした状態にしてバルブ66、67を閉じた状態で、液晶パネル64を注入治具63に取り付けてバルブ66を開くと、減圧装置69の作動により液晶パネル64内が液晶貯蔵容器61内の圧力より低い負圧になる。その後、バルブ66を閉じてバルブ67を開くことにより、大気圧より若干負圧にした液晶貯蔵容器61と液晶パネル64との圧力差により、液晶貯蔵容器61内の液晶62が、注入治具63を介して液晶パネル64内に移り、液晶パネル64内に液晶62を注入することができる。この際、液晶貯蔵容器61内の圧力を一定に維持するために、バルブ68を開けて減圧装置69のリークバルブを開放することにより、液晶貯蔵容器61内の圧力を維持する。注入が終ったら、注入治具63より液晶パネル64を取り外すと注入治具63の露出部が大気圧になり、液晶貯蔵容器61内の負圧との圧力差により、注入治具63およびパイプ内に残存する液晶62が液晶貯蔵容器61内に戻り、注入治具63に新たに取り付ける液晶パネル64内の空気を、注入治具63を介して吸引することができる。このような構成にすることにより、液晶パネル64の全体を真空容器内に入れて真空にする必要がないため、狭い空間で液晶の注入を行うことができる(たとえば特許文献2参照)。   In addition, the entire liquid crystal panel or the like is put in the pressure vessel 51 and the whole is not vacuum-sucked, and an injection jig 63 is attached to the liquid crystal injection port 65 of each liquid crystal panel 64 as shown in FIG. In addition, a method of injecting by operating the valves 66, 67, 68 and the pressure reducing device 69 is also known. In this method, first, when the liquid crystal storage container 61 is at a pressure slightly lower than atmospheric pressure and the valves 66 and 67 are closed, the liquid crystal panel 64 is attached to the injection jig 63 and the valve 66 is opened. Due to the operation of the decompression device 69, the inside of the liquid crystal panel 64 becomes a negative pressure lower than the pressure inside the liquid crystal storage container 61. Thereafter, the valve 66 is closed and the valve 67 is opened, so that the liquid crystal 62 in the liquid crystal storage container 61 is injected into the injection jig 63 due to the pressure difference between the liquid crystal storage container 61 and the liquid crystal panel 64 that is slightly negative from atmospheric pressure. The liquid crystal 62 can be injected into the liquid crystal panel 64. At this time, in order to keep the pressure in the liquid crystal storage container 61 constant, the pressure in the liquid crystal storage container 61 is maintained by opening the valve 68 and opening the leak valve of the decompression device 69. After the injection is completed, when the liquid crystal panel 64 is removed from the injection jig 63, the exposed portion of the injection jig 63 becomes atmospheric pressure, and due to the pressure difference from the negative pressure in the liquid crystal storage container 61, the injection jig 63 and the pipe The liquid crystal 62 remaining in the liquid crystal returns to the liquid crystal storage container 61, and the air in the liquid crystal panel 64 newly attached to the injection jig 63 can be sucked through the injection jig 63. By adopting such a configuration, it is not necessary to put the entire liquid crystal panel 64 in a vacuum container to make a vacuum, so that liquid crystal can be injected in a narrow space (for example, see Patent Document 2).

特公昭58−49853号公報Japanese Examined Patent Publication No. 58-49853 特開平11−174400号公報Japanese Patent Laid-Open No. 11-174400

前述のように、2枚の基板を貼り合せた組立体を真空容器内に入れて、圧力差を利用しながら注入液体を注入する方法は、一度に複数個の注入を行うことができる反面、自動化で流れ作業的に1個1個製造を行う場合には、途中の注液工程だけバッチ処理をすることになり、完全な自動化をすることができないという問題がある。さらに、負圧と大気圧を用いた圧力差により注入する方法では、大気圧にするとき注入液体が空気中に晒されることになり、空気や水分などに触れることを避けたい注入液体の場合には利用することができない。また、一般に圧力差だけでは、狭い間隔の基板間に注入液を注入する場合、時間がかかる割に内部の全体に注入することができず、気泡を生じ安いという問題もある。   As described above, the method of injecting an injection liquid using a pressure difference by putting an assembly in which two substrates are bonded into a vacuum vessel can perform a plurality of injections at the same time, When manufacturing one by one in a flow operation by automation, there is a problem that batch processing is performed only in the liquid injection process in the middle, and complete automation cannot be performed. Furthermore, in the method of injecting by the pressure difference using negative pressure and atmospheric pressure, the injection liquid is exposed to the air when it is set to atmospheric pressure, and in the case of an injection liquid that you want to avoid touching air or moisture. Is not available. In general, when an injection solution is injected between substrates having a narrow interval only by a pressure difference, it cannot be injected into the entire interior for a long time, and there is a problem that bubbles are generated and cheap.

さらに、1個ごとに2枚の基板を貼り合せた組立体の基板間のみを真空吸引する方法によれば、両基板の間隙部分の狭い空間だけを真空吸引すればよいため、装置を簡単にすることができ、狭い作業場で注入作業を行うことができる。しかし、この方法によっても、注入治具から液晶パネルを取り外した後に、注入治具に残留した液晶などの注入液を注入液貯蔵容器に戻すのに、大気圧を利用しているので、注入治具内の注入液が空気に触れて汚染し、汚染された注入液が注入液貯蔵容器内で混ざってしまうことになり、全体の注入液を汚染することになる。また、減圧装置だけにより負圧を調整しているため、所定の圧力にするのに、時間がかかり(たとえば引用文献2では、液晶セルを取り替えて真空吸引するのに10分放置する、また、注入時間が151分、とある)、かつ、その圧力の制御が非常に大変であると共に、気圧が低いとはいえ、常に空気と注入液やパイプ内部が空気と接触しており、水分などが混入しやすいという問題がある。   Further, according to the method of vacuum suction only between the substrates of the assembly in which two substrates are bonded to each other, it is only necessary to vacuum suction only a narrow space between the gap portions of the two substrates. The injection work can be performed in a small work place. However, this method also uses the atmospheric pressure to return the injection liquid such as liquid crystal remaining in the injection jig to the injection liquid storage container after removing the liquid crystal panel from the injection jig. The injected solution in the device is contaminated by contact with air, and the contaminated injected solution is mixed in the injected solution storage container, thereby contaminating the entire injected solution. In addition, since the negative pressure is adjusted only by the decompression device, it takes time to obtain a predetermined pressure (for example, in Cited Document 2, the liquid crystal cell is replaced and left for 10 minutes to be vacuumed, The injection time is 151 minutes), and the control of the pressure is very difficult, and even though the atmospheric pressure is low, the air and the injection solution and the pipe are always in contact with the air, and moisture etc. There is a problem that it is easy to mix.

本発明は、このような状況に鑑みてなされたもので、2枚の基板をそれぞれ作製し、それらを貼着してその間隙部に注入液を注入する一連の工程を自動化でき、かつ、注入液を空気中に晒すことなく自動的に注入液を注入することができ、さらには短時間で注入することができるような注液装置および注液方法を提供することを目的とする。   The present invention has been made in view of such a situation, and it is possible to automate a series of processes in which two substrates are respectively produced, adhered to each other, and an injection solution is injected into the gap portion, and injection is performed. It is an object of the present invention to provide a liquid injection apparatus and a liquid injection method that can automatically inject an injection liquid without exposing the liquid to the air and that can be injected in a short time.

本発明の他の目的は、この注液方法を用いて色素増感太陽電池の電解液を注入する色素増感太陽電池の製法に関する。   The other objective of this invention is related with the manufacturing method of the dye-sensitized solar cell which inject | pours the electrolyte solution of a dye-sensitized solar cell using this injection method.

本発明の注入液の注入装置は、(i)筒状体の内壁に固着され、中心部に貫通孔を有する第1および第2の隔壁、(ii)底部が前記筒状体の内壁を摺動し得ると共に、前記第1および第2の隔壁の貫通孔を摺動し、該摺動により先端部と前記第1の隔壁の貫通孔との間隙を可変し得る突起棒が前記底部に固着されたストッパピン、および(iii)該ストッパピンの底部と前記筒状体の一端部との間に設けられた弾性体を有する注入治具と、上部に空隙部を有するように注入液が充填されて密閉し得る注入液貯蔵容器と、組立体の注入口を被覆して該組立体に吸着させるゴムパッドと、該ゴムパッドと一端部が気密に接続され、他端部が第1の開閉バルブを介して真空ポンプに接続される第1のチューブと、該第1のチューブから分岐され、第2のソレノイドを介して不活性ガス源に接続される第2のパイプと、前記不活性ガス源と前記注入液貯蔵容器の前記空隙部とを第3の開閉バルブを介して気密に接続する第3のチューブと、前記注入治具の前記第2の隔壁と前記ストッパピンの底部との間の第1空間部に一端部が気密に接続され、他端部が第4の開閉バルブを介して圧力印加装置に接続される第4のチューブと、前記注入液貯蔵容器内の注入液内に一端部が挿入され、他端部が前記注入治具の他端部に接続される第5のチューブと、前記注入治具の前記第1および第2の隔壁の間に形成される第2空間部に一端部が気密に接続され、他端部が前記ゴムパッド内に挿入されて注入液を前記第2空間部から前記ゴムパッド内に送り出す注入針とを具備している。   The injection device for an injection solution of the present invention comprises (i) first and second partition walls fixed to the inner wall of the cylindrical body and having a through hole at the center, and (ii) a bottom portion sliding on the inner wall of the cylindrical body. A protruding rod that can move and slides through the through holes of the first and second partition walls, and can change the gap between the tip portion and the through hole of the first partition wall, and is fixed to the bottom portion. And (iii) an injection jig having an elastic body provided between the bottom of the stopper pin and one end of the cylindrical body, and an injection solution filled with a gap at the top An infusion solution storage container that can be sealed, a rubber pad that covers the inlet of the assembly and is adsorbed to the assembly, one end of the rubber pad is hermetically connected, and the other end is the first on-off valve. A first tube connected to the vacuum pump via the first tube, branched from the first tube, and second A second pipe connected to an inert gas source via a solenoid, and a third pipe for airtightly connecting the inert gas source and the gap of the injection solution storage container via a third on-off valve; One end is hermetically connected to the first space between the tube, the second partition wall of the injection jig, and the bottom of the stopper pin, and the other end is pressure-applied via a fourth open / close valve. A fourth tube connected to the apparatus; a fifth tube having one end inserted into the infusion solution in the infusion solution storage container and the other end connected to the other end of the infusion jig; One end of the pouring jig is hermetically connected to a second space formed between the first and second partition walls, and the other end is inserted into the rubber pad so that the pouring solution is poured into the second space. And an injection needle that is fed into the rubber pad from the portion.

本発明の注液方法は、注入液を注入する組立体の注入口に真空ポンプと接続されるゴムパッドを吸着させて前記組立体の内部を負圧にする工程と、該負圧にされたゴムパッド内および前記組立体の少なくとも注入口部に注入液を導入する工程と、前記ゴムパッド内の注入液に不活性ガスにより圧力を加えることにより、前記組立体内に前記注入液を押し込む工程と、前記不活性ガスにより前記ゴムパッド側に導入され、前記組立体内に押込まれないで残留した注入液を注入治具まで押し戻す工程とを有している。   The liquid injection method of the present invention includes a step of adsorbing a rubber pad connected to a vacuum pump to an injection port of an assembly for injecting an injection solution to make the inside of the assembly have a negative pressure, and the rubber pad having the negative pressure A step of introducing an injection solution into at least an injection port of the assembly and the assembly, a step of pushing the injection solution into the assembly by applying pressure to the injection solution in the rubber pad with an inert gas, And a step of pushing back the injected liquid which is introduced into the rubber pad side by the active gas and remains without being pushed into the assembly body to the injection jig.

さらに、本発明による色素増感太陽電池の製法は、透明基板表面に透明導電膜、光電変換層、集電線、およびシール剤層を形成することにより、作用極を形成し、基板表面に耐食性で導電性の膜および触媒性の金属層を形成することにより対向極を形成し、該作用極および対向極を前記シール剤層により貼着した後、前記作用極と対向極との間の間隙部に電解液を注入する色素増感太陽電池の製法であって、前記電解液の注入方法を請求項2記載の方法により行うことを特徴とする。
ここに「透明」とは、光を透過させる透光性の意味で、完全に透き通ることを意味するものではない。
Furthermore, the method for producing a dye-sensitized solar cell according to the present invention is to form a working electrode by forming a transparent conductive film, a photoelectric conversion layer, a current collector, and a sealant layer on the transparent substrate surface, and to provide corrosion resistance on the substrate surface. A counter electrode is formed by forming a conductive film and a catalytic metal layer, and the working electrode and the counter electrode are pasted by the sealant layer, and then a gap between the working electrode and the counter electrode is formed. A method for producing a dye-sensitized solar cell in which an electrolytic solution is injected into the electrolytic solution, wherein the electrolytic solution is injected by the method according to claim 2.
Here, “transparent” means translucency that transmits light, and does not mean that it is completely transparent.

本発明の注入装置および注入方法によれば、組立体の全体を真空容器内に入れて負圧にするのではなく、組立体の間隙部だけを真空吸引する構成であるため、非常に短時間で組立体の間隙部を負圧にすることができる。しかも、注入口近傍に供給された注入液を不活性ガスにより組立体の間隙部に押し込む構成にしているため、真空吸引から注入液の注入完了までを40秒弱の非常に短時間で完了させることができる。   According to the injection device and the injection method of the present invention, since the entire assembly is not placed in the vacuum vessel and set to a negative pressure, only the gap portion of the assembly is vacuum-sucked, so that the time is very short. Thus, the gap of the assembly can be set to a negative pressure. In addition, since the injection solution supplied near the injection port is pushed into the gap of the assembly by an inert gas, the process from the vacuum suction to the completion of the injection of the injection solution is completed in a very short time of less than 40 seconds. be able to.

さらに、組立体の注入口への注入液の供給および注入後に注入口近傍に残存する注入液を注入液貯蔵容器側に戻す操作を、全て不活性ガスとの接触だけで行っているため、注入液を、全く空気に触れさせる必要がなく、空気中の水分や不純物を注入液内に紛れ込ませることがない。そのため、不純物が混入すると非常に困る注入液の場合でも、全く問題が生じない。   In addition, the injection solution is supplied to the injection port of the assembly and the operation of returning the injection solution remaining in the vicinity of the injection port to the injection solution storage container side after injection is performed only by contact with an inert gas. The liquid does not need to be exposed to air at all, and moisture and impurities in the air do not get mixed into the injected liquid. Therefore, no problem occurs even in the case of an infusion solution that is very difficult to be mixed with impurities.

とくに、色素増感太陽電池の場合には、作用極基板と対向極基板との間隙部に電解液を注入する。このような電解液は僅かな水分の混入もその作用が低下するので好ましくないが、本発明によれば、全く性能を劣化させることなく、しかも非常に短時間で注入することができるため、各生産工程のタイミングと合せて行うことができ、全工程を自動化して色素増感太陽電池の製造をすることができるという効果がある。   In particular, in the case of a dye-sensitized solar cell, an electrolytic solution is injected into the gap between the working electrode substrate and the counter electrode substrate. Such an electrolytic solution is not preferable because even a slight amount of moisture is mixed in, so that the action is reduced. However, according to the present invention, since the performance can be injected in a very short time without any deterioration, It can be performed in conjunction with the timing of the production process, and there is an effect that the dye-sensitized solar cell can be manufactured by automating all the processes.

本発明による注液装置の一実施形態の全体構成を示す図である。It is a figure which shows the whole structure of one Embodiment of the liquid injection apparatus by this invention. 図1の注入ジグ3の部分の説明図である。It is explanatory drawing of the part of the injection | pouring jig 3 of FIG. 図1の注入装置を用いて注入液を注入する説明図である。It is explanatory drawing which inject | pours injection liquid using the injection apparatus of FIG. 本発明により製造する色素増感太陽電池の一例の対向極をはずした平面説明図およびそのB−B線断面で、対向極を設けた状態の断面説明図である。It is plane explanatory drawing which removed the counter pole of an example of the dye-sensitized solar cell manufactured by this invention, and the cross-sectional explanatory drawing of the state which provided the counter pole in the BB line cross section. 従来の液晶を注入する一例の説明図である。It is explanatory drawing of an example which inject | pours the conventional liquid crystal. 従来の液晶を注入する他の例の説明図である。It is explanatory drawing of the other example which inject | pours the conventional liquid crystal.

次に、図面を参照しながら、本発明の注液装置および注液方法について説明する。   Next, the liquid injection device and the liquid injection method of the present invention will be described with reference to the drawings.

本発明の注液装置は、その一実施形態の構成例が図1に示されるように、注入治具1と、真空吸引および不活性ガスによる圧力の制御により注入液を注入することに特徴がある。注入治具3は、図2にその部分の拡大説明図が示されるように、筒状体31の内壁31aに第1の隔壁32および第2の隔壁33が一定の間隙を介して固着されている。その第1および第2の隔壁32、33の中心部には貫通孔32a、33aが設けられ、ストッパピン34の突起部34bがエアや注入液が殆ど漏れないで第2の隔壁33の貫通孔33aと摺動でき、第1の隔壁32の貫通孔32aとは、突起部34bが押し付けられた状態では貫通孔32aを閉塞し、突起部34bの移動により間隙部が生じるようになっている。ストッパピン34は、突起部34bを固着する底部34aを有しており、その底部34aは筒状体31の内壁31aを摺動し得ると共に、エアなどが殆ど漏れないように形成されている。ストッパピン34の突起部34bの先端は、徐々に細くなるテーパ状になっており、前述のように、ストッパピン34bの移動により、第1の隔壁32の中心部に設けられる貫通孔32aとの間隙の程度が変動するようになっている。そのストッパピン34の底部34aと筒状体31の一端部との間にスプリングなどの弾性体35が設けられている。これらにより前述の注入治具3が構成されている。なお、図1に示される例では、筒状体31が、ブロックの中心部に断面が円形の空洞部を形成した例であるが、外形も円形で、円筒状の形状をした簡単な構成でも良い。   As shown in FIG. 1, the liquid injection device of the present invention is characterized in that an injection solution is injected by an injection jig 1 and vacuum suction and pressure control using an inert gas. is there. As shown in the enlarged explanatory view of the portion of FIG. 2, the injection jig 3 has the first partition wall 32 and the second partition wall 33 fixed to the inner wall 31 a of the cylindrical body 31 with a certain gap. Yes. Through holes 32a and 33a are provided in the central portions of the first and second partition walls 32 and 33, and the protrusion 34b of the stopper pin 34 hardly leaks air or injected liquid, and the through holes of the second partition wall 33 are provided. The through-hole 32a of the first partition wall 32 can be slid with the through-hole 32a when the projection 34b is pressed, and a gap is formed by the movement of the projection 34b. The stopper pin 34 has a bottom 34a to which the protrusion 34b is fixed. The bottom 34a can slide on the inner wall 31a of the cylindrical body 31 and is formed so that air or the like hardly leaks. The tip of the protrusion 34b of the stopper pin 34 has a tapered shape that becomes gradually thinner. As described above, the tip of the protrusion 34b is connected to the through hole 32a provided at the center of the first partition wall 32 by the movement of the stopper pin 34b. The degree of the gap is changed. An elastic body 35 such as a spring is provided between the bottom 34 a of the stopper pin 34 and one end of the cylindrical body 31. Thus, the above-described injection jig 3 is configured. In the example shown in FIG. 1, the cylindrical body 31 is an example in which a hollow portion having a circular cross section is formed in the central portion of the block, but the outer shape is also circular and a simple configuration having a cylindrical shape is also possible. good.

本発明の注液装置は、さらに、注入液貯蔵容器4を有しており、注入液貯蔵容器4は、その上部に空隙部42を有するように、たとえば色素増感太陽電池の2枚の基板間1、2に充填する電解液などの注入液41が充填されて密閉し得る容器になっている。また、色素増感太陽電池の作用極(基板)1と対向極(基板)2とを貼り合せた組立体10(図2参照)の注入口23(図2参照)を被覆して、その組立体10に吸着させるゴムパッド5を有し、そのゴムパッド5は、第1のチューブ91の一端部と気密に接続され、第1のチューブ91の他端部は第1の開閉バルブ91aを介して真空ポンプ6に接続されている。また、第1のチューブ91から分岐された第2のチューブ92が第2のソレノイド92aを介して不活性ガス源7に接続されている。不活性ガス源7は、また、注入液貯蔵容器4の空隙部42と、第3の開閉バルブ93aを介して第3のチューブ93により接続され、注入液41に一定の圧力を印加できるように、不活性ガス7の出力圧が圧力調整弁7aにより制御されている。   The liquid injection device of the present invention further includes an injection liquid storage container 4, and the injection liquid storage container 4 has, for example, two substrates of a dye-sensitized solar cell so as to have a gap 42 in the upper part thereof. It is a container that can be sealed by being filled with an injection solution 41 such as an electrolytic solution that fills the space 1 and 2. Further, the inlet 23 (see FIG. 2) of the assembly 10 (see FIG. 2) in which the working electrode (substrate) 1 and the counter electrode (substrate) 2 of the dye-sensitized solar cell are bonded together is covered, and the set A rubber pad 5 to be adsorbed to the solid 10 is provided, and the rubber pad 5 is airtightly connected to one end of the first tube 91, and the other end of the first tube 91 is vacuumed via the first opening / closing valve 91a. Connected to the pump 6. A second tube 92 branched from the first tube 91 is connected to the inert gas source 7 through a second solenoid 92a. The inert gas source 7 is also connected to the gap 42 of the injection liquid storage container 4 by a third tube 93 via a third opening / closing valve 93a so that a constant pressure can be applied to the injection liquid 41. The output pressure of the inert gas 7 is controlled by the pressure regulating valve 7a.

前述した注入治具3の第2の隔壁33とストッパピン34の底部34aとの間の第1空間部31dとコンプレッサなどの圧力印加装置8との間に第4のチューブ94が第4の開閉バルブ94aを介して気密に接続されている。さらに、この注入治具3の他端部31c(図2参照)が、前述の注入液貯蔵容器4内の注入液41内に一端部が挿入された第5のチューブ95により接続され、注入液41を注入治具3の他端部31cと第1の隔壁32との間の第3空間部31fに送り込まれる構造になっている。さらに、注入治具3の第1および第2の隔壁32、33の間に形成される第2空間部31eに一端部が接続され、他端部がゴムパッド5内に挿入されて注入液41を第2空間部31eからゴムパッド5内に送り出す注入針36を具備している。   A fourth tube 94 is opened and closed between the first space 31d between the second partition wall 33 of the injection jig 3 and the bottom 34a of the stopper pin 34 and the pressure applying device 8 such as a compressor. The valve 94a is connected in an airtight manner. Further, the other end portion 31c (see FIG. 2) of the injection jig 3 is connected by a fifth tube 95 having one end inserted into the injection solution 41 in the injection solution storage container 4 described above. 41 is fed into the third space 31 f between the other end 31 c of the injection jig 3 and the first partition wall 32. Furthermore, one end is connected to the second space portion 31e formed between the first and second partition walls 32, 33 of the injection jig 3, and the other end is inserted into the rubber pad 5 so that the injection solution 41 is supplied. An injection needle 36 that feeds the rubber pad 5 from the second space 31e is provided.

注入治具3(図2に拡大図が示されている)は、たとえば電解液などの注入液41にも腐食し難いステンレスなどの金属またはプラスティックなどにより形成することができる。ストッパピン34の底部34aと筒状体31の内壁31aとの摺動性は、コンプレッサ8などの圧力ガスが余り漏れない程度に滑合していればよく、少々のエアの漏れがあっても、筒状体31の一端部側にエア抜き用の孔31b(図2参照)を設けておけば問題はない。また、ストッパピン34の突起部34bと第2の隔壁33の貫通孔33aは、第1空間31dに送り込まれるエアおよび第3空間31fに送り込まれる注入液41が漏れないように滑合していることが好ましい。前述のように、突起部34bの先端部は徐々に細くなっており(図2参照)、ストッパピン34の位置がスプリング35により押し付けられているときは、第1の隔壁32の貫通孔32aを閉塞し、注入液が第3空間31fから第2空間31eに流れないようになり、第1空間31dに圧力印加装置(エアコンプレッサ)8から高圧エアが送り込まれて、スプリング35が縮んでストッパピン34が第1の隔壁32から離れると、突起部34bの細くなった部分と第1の隔壁32の貫通孔32aとの間の間隙が大きくなり、注入液41が移動できるように形成されている。   The injection jig 3 (enlarged view is shown in FIG. 2) can be formed of, for example, a metal such as stainless steel or plastic that hardly corrodes the injection solution 41 such as an electrolytic solution. The slidability between the bottom 34a of the stopper pin 34 and the inner wall 31a of the cylindrical body 31 only needs to be slid so that the pressure gas such as the compressor 8 does not leak so much. There is no problem if an air vent hole 31b (see FIG. 2) is provided on one end of the cylindrical body 31. Further, the protrusion 34b of the stopper pin 34 and the through hole 33a of the second partition wall 33 slide so that the air fed into the first space 31d and the injected liquid 41 fed into the third space 31f do not leak. It is preferable. As described above, the tip end portion of the protrusion 34b is gradually narrowed (see FIG. 2), and when the position of the stopper pin 34 is pressed by the spring 35, the through hole 32a of the first partition wall 32 is formed. The injection liquid does not flow from the third space 31f to the second space 31e, and high-pressure air is sent from the pressure application device (air compressor) 8 to the first space 31d, and the spring 35 contracts to stop the stopper pin. When 34 is separated from the first partition wall 32, the gap between the narrowed portion of the projection 34b and the through hole 32a of the first partition wall 32 is increased, so that the injection solution 41 can move. .

第1空間31dには、前述のように、エアコンプレッサのような圧力印加装置8が第4の開閉バルブ94aを介した第4のチューブで気密に接続されており、第1空間31dの圧力を調整することにより前述のように、弾性部材35を伸縮させ、ストッパピン34の位置を調整し、注入液41を移動させたり、移動を阻止させたりする制御をできるようになっている。また、第2空間31eには、注入針36が接続されており、第2空間31eに送り込まれた注入液41をゴムパッド5内に送り込んだり、注入が完了した後にゴムパッド5内に残った注入液を再度第3空間31fに戻したりする通路として用いられる。   As described above, the pressure applying device 8 such as an air compressor is airtightly connected to the first space 31d by the fourth tube via the fourth opening / closing valve 94a, and the pressure in the first space 31d is reduced. By adjusting, as described above, the elastic member 35 is expanded and contracted, the position of the stopper pin 34 is adjusted, and the injection liquid 41 can be controlled to be moved or prevented from moving. Further, the injection needle 36 is connected to the second space 31e, and the injection liquid 41 sent to the second space 31e is sent into the rubber pad 5, or the injection liquid remaining in the rubber pad 5 after the injection is completed. Is used as a passage for returning to the third space 31f again.

真空ポンプ6は、通常のロータリーポンプを使用することができ、100mTorr程度に真空吸引することができるものであれば問題はない。なお、6aは、ポンプ部で、6cはモータ部である。また、不活性ガス源7は、たとえば窒素ボンベなどを用いることができ、圧力調整弁7aを調整しておくことにより、一定の圧力、たとえば75Torr程度を常に印加することができ、第3開閉バルブ93aを開にすることにより、注入液貯蔵容器4内を常に一定の圧力にすることができる。なお、図1に示される例では、第3の開閉バルブ93aを2方向の開閉バルブとすることにより、注入液貯蔵容器4を不活性ガス源7と接続したり、真空ポンプ6と接続したりすることができるようになっている。真空ポンプ6と接続するのは、注入液41の注入が完了した後に、ゴムパッド5内に残った余分な注入液を注入液貯蔵容器4に戻すとき、あるいはたとえば注入液貯蔵容器4を取り替えた場合など、容器や第3のチューブ93内に空気が入ったときに、真空ポンプ6と接続して、注入液貯蔵容器4および第3のパイプ93内の空気を除去するときに使用する。   As the vacuum pump 6, a normal rotary pump can be used, and there is no problem as long as the vacuum pump 6 can perform vacuum suction to about 100 mTorr. In addition, 6a is a pump part and 6c is a motor part. The inert gas source 7 may be a nitrogen cylinder, for example, and by adjusting the pressure regulating valve 7a, a constant pressure, for example, about 75 Torr can always be applied. By opening 93a, the inside of the infusate storage container 4 can be kept at a constant pressure. In the example shown in FIG. 1, the third opening / closing valve 93 a is a two-way opening / closing valve, whereby the injection solution storage container 4 is connected to the inert gas source 7 or the vacuum pump 6. Can be done. The vacuum pump 6 is connected when the excess injection solution remaining in the rubber pad 5 is returned to the injection solution storage container 4 after the injection of the injection solution 41 is completed, or when the injection solution storage container 4 is replaced, for example. For example, when air enters the container or the third tube 93, it is connected to the vacuum pump 6 to remove the air in the infusate storage container 4 and the third pipe 93.

第1〜第6のパイプ91〜96は、たとえばテフロン(登録商標)チューブや、ゴムチューブなどを用いることができ、気体通路として用いられる場合には気体が漏れないようにするもので、注入液の通路として用いられる場合には、注入液により腐食されないで、かつ、注入液が漏れないような材料が用いられる。第1〜第4のチューブ91〜94には、その間に第1〜第4の開閉バルブ91a〜94aが介在されており、気体の通過または遮断が制御されるようになっている。この開閉バルブ91a〜94aは、図1に示される例では、ソレノイドバルブが用いられており、電気信号によりその開閉を制御できるように、制御装置97と結線されている。しかし、このようなソレノイドバルブに限定されるものではなく、機械的にオン・オフを制御できる開閉バルブでも用いることができる。   As the first to sixth pipes 91 to 96, for example, a Teflon (registered trademark) tube, a rubber tube or the like can be used. When used as a gas passage, the first to sixth pipes 91 to 96 prevent the gas from leaking. In the case of being used as a passage of the material, a material which is not corroded by the injection solution and does not leak the injection solution is used. The first to fourth open / close valves 91a to 94a are interposed between the first to fourth tubes 91 to 94, and the passage or blocking of gas is controlled. In the example shown in FIG. 1, solenoid valves are used as the opening / closing valves 91a to 94a, and the opening / closing valves 91a to 94a are connected to a control device 97 so that the opening / closing thereof can be controlled by an electric signal. However, the present invention is not limited to such a solenoid valve, and an on-off valve that can be mechanically controlled on / off can also be used.

つぎに、この注液装置の動作および本発明の注液方法について、図1〜3を参照しながら説明する。なお、図1は、初期状態(注入液の注入を行うように設定された状態)を示しており、第1、第2および第4の開閉バルブ91a、92a、94aは閉じられた状態で、第3の開閉バルブ93aは開になっており、窒素ボンベ(不活性ガス源)7と注入液貯蔵容器4とが接続される状態になっている。従って、第1のパイプ91は真空ポンプ6と第1の開閉バルブ91aと第3の開閉バルブ93aとの間が真空吸引されており、点々で示した真空状態6bを示している。また、窒素ボンベ7からの窒素ガス7bは、窒素ボンベ7から第3の開閉バルブ93aを経て注入液貯蔵容器4の空隙部42まで窒素ガス7bが充満している(便宜上注入液貯蔵容器4内の空間部に42には窒素ガスを示す斜線を付していない)。さらに、エアコンプレッサ8も動作しており、第4の開閉バルブ94aまで高圧エア8aがきている。また、電解液などの注入液41は、窒素ボンベ7からの窒素ガス7bの圧力により注入液貯蔵容器4内の注入液41の表面が押されて注入治具3の第3空間31f(図2参照)まで押し出されている。   Next, the operation of the liquid injection apparatus and the liquid injection method of the present invention will be described with reference to FIGS. FIG. 1 shows an initial state (a state where injection liquid is set to be injected), and the first, second and fourth on-off valves 91a, 92a and 94a are closed, The third on-off valve 93a is open, and the nitrogen cylinder (inert gas source) 7 and the injection solution storage container 4 are connected. Therefore, the first pipe 91 is vacuum-sucked between the vacuum pump 6, the first on-off valve 91a, and the third on-off valve 93a, and shows the vacuum state 6b indicated by dots. The nitrogen gas 7b from the nitrogen cylinder 7 is filled with the nitrogen gas 7b from the nitrogen cylinder 7 through the third opening / closing valve 93a to the gap 42 of the injection liquid storage container 4 (in the injection liquid storage container 4 for convenience). 42 is not hatched with 42 indicating nitrogen gas). Furthermore, the air compressor 8 is also operating, and high-pressure air 8a is coming to the fourth on-off valve 94a. Further, the injection liquid 41 such as an electrolytic solution is pressed against the surface of the injection liquid 41 in the injection liquid storage container 4 by the pressure of the nitrogen gas 7b from the nitrogen cylinder 7, and the third space 31f of the injection jig 3 (FIG. 2). It is pushed out to see).

図1に示される状態で、まず、図2に示されるように、たとえば色素増感太陽電池の作用極1と対向極2を貼着した組立体10の注入口23に真空ポンプ6と接続されるゴムパッド5を当てて、第1の開閉バルブ91aを開にすることにより、ゴムパッド5内も真空吸引されて組立体10を吸着させると共に、組立体10の内部を負圧にする。この状態では、図3(a)に示されるように、ゴムパッド5内のみならず、組立体10の間隙部も真空状態になり、さらに図示されていないが、第2のパイプ92も真空吸引されている。   In the state shown in FIG. 1, first, as shown in FIG. 2, for example, the vacuum pump 6 is connected to the inlet 23 of the assembly 10 in which the working electrode 1 and the counter electrode 2 of the dye-sensitized solar cell are bonded. By applying the rubber pad 5 and opening the first opening / closing valve 91a, the inside of the rubber pad 5 is also vacuum-sucked to adsorb the assembly 10 and make the inside of the assembly 10 negative pressure. In this state, as shown in FIG. 3A, not only the inside of the rubber pad 5 but also the gap portion of the assembly 10 is in a vacuum state, and although not shown, the second pipe 92 is also vacuumed. ing.

つぎに、図3(b)に示されるように、第4の開閉バルブ94aを開にすることにより、エアコンプレッサ8の高圧エア8aを注入治具3の第1空間に供給することにより、弾性部材35が収縮し、ストッパピン34が筒状体31の一端側に移動する。その結果、ストッパピン34の突起部34bと第1の隔壁32の貫通孔32aとの間に隙間が生じ、第3空間部31fにある注入液41が第2空間部31eに流れ、さらに注入針36を介して、負圧にされたゴムパッド5の内部および組立体10の少なくとも注入口23部に注入液41を導入することができる。   Next, as shown in FIG. 3 (b), the fourth on-off valve 94 a is opened to supply the high-pressure air 8 a of the air compressor 8 to the first space of the injection jig 3. The member 35 contracts and the stopper pin 34 moves to one end side of the cylindrical body 31. As a result, a gap is generated between the protrusion 34b of the stopper pin 34 and the through hole 32a of the first partition wall 32, and the injection liquid 41 in the third space 31f flows into the second space 31e, and further the injection needle The injection liquid 41 can be introduced into the inside of the rubber pad 5 that is set to a negative pressure and at least the injection port 23 portion of the assembly 10 via 36.

つぎに、図3(c)に示されるように、第4の開閉バルブ94aを閉じることにより、弾性部材35の収縮が解除されて伸びるため、ストッパピン34が押し戻され、ストッパピン34の突起部34bの先端部と第1の隔壁32の貫通孔32aとの間隙は閉じられ、注入液41の第1の隔壁32を介した移動は停止される。この状態で、第1の開閉バルブ91aを閉じ、かつ、第2の開閉バルブ92aを開にすることにより、窒素ボンベ7からの高圧窒素が、第2のパイプ92および第1のパイプ91の第1の開閉バルブ91aからゴムパッド5の内部まで充満し、窒素ガス(不活性ガス)7bの圧力により、ゴムパッド5内の注入液41が押し付けられて組立体10の間隙部に押し込まれる。注入液41の充填後、一旦第2の開閉バルブ92aを閉じる。   Next, as shown in FIG. 3 (c), by closing the fourth on-off valve 94 a, the elastic member 35 is released from contraction and extended, so that the stopper pin 34 is pushed back, and the protruding portion of the stopper pin 34. The gap between the tip end of 34b and the through hole 32a of the first partition wall 32 is closed, and the movement of the injection liquid 41 through the first partition wall 32 is stopped. In this state, the first on-off valve 91 a is closed and the second on-off valve 92 a is opened, so that high-pressure nitrogen from the nitrogen cylinder 7 is supplied to the second pipe 92 and the first pipe 91. 1 is filled from the opening / closing valve 91a to the inside of the rubber pad 5, and the injection liquid 41 in the rubber pad 5 is pressed by the pressure of the nitrogen gas (inert gas) 7b to be pressed into the gap portion of the assembly 10. After filling with the injection solution 41, the second opening / closing valve 92a is once closed.

その後、第3の開閉バルブ93aを、第3のパイプ93が第6のパイプ96と連通するように開き、第3のパイプ93および注入液貯蔵容器4内を真空ポンプ6により0.5秒程度減圧する。その後、第2および第4の開閉バルブ92a、94aを開き、図3(d)に示されるように、注入治具3の第1空間部31dに高圧エアが送り込まれ、図3(b)の場合と同様に、弾性部材35が収縮し、ストッパピン34の突起部34bの先端と第1の隔壁32の貫通孔32aとの間に間隙が生じる。間隙ができると、ゴムパッド5内にある注入液41の表面は高圧窒素により押し付けられ、ゴムパッド5内にある注入液41は、注入針36を逆流して第3空間部31fに押し返される。そのため、高圧窒素7bは、注入針36内、および第2空間部31eまで侵入する。すなわち、高圧窒素7bにより、ゴムパッド5側に導入され、組立体内に押込まれないで残留した注入液41を注入治具3の他端部側である第3空間部31fまで押し戻される。   Thereafter, the third on-off valve 93a is opened so that the third pipe 93 communicates with the sixth pipe 96, and the inside of the third pipe 93 and the infusate storage container 4 is about 0.5 seconds by the vacuum pump 6. Reduce pressure. Thereafter, the second and fourth on-off valves 92a and 94a are opened, and as shown in FIG. 3 (d), high-pressure air is fed into the first space 31d of the injection jig 3, and as shown in FIG. 3 (b). Similarly to the case, the elastic member 35 contracts, and a gap is generated between the tip of the protrusion 34 b of the stopper pin 34 and the through hole 32 a of the first partition wall 32. When the gap is formed, the surface of the injection liquid 41 in the rubber pad 5 is pressed by high-pressure nitrogen, and the injection liquid 41 in the rubber pad 5 flows back through the injection needle 36 and is pushed back to the third space portion 31f. Therefore, the high-pressure nitrogen 7b penetrates into the injection needle 36 and the second space portion 31e. That is, the high-pressure nitrogen 7 b introduces the injected liquid 41 that is introduced into the rubber pad 5 side and remains without being pushed into the assembly into the third space 31 f that is the other end side of the injection jig 3.

この状態で、第4の開閉バルブ94aを閉じることにより、高圧エア8aの注入治具3への供給は止まり、ストッパピン34と第1の隔壁32の貫通孔32aとは嵌合した状態になり、注入液41の移動は停止する。ここで、第2の開閉バルブ92aを閉じることにより、ゴムパッド5から容易に組立体10を取り外すことができ、取り外すことにより図1に示される状態に戻る。従って、新たな組立体をゴムパッド5に当てて、第1の開閉バルブ91aを開にすることにより、同様に次の組立体への注入液41の注入を行うことができる。   In this state, by closing the fourth open / close valve 94a, the supply of the high-pressure air 8a to the injection jig 3 is stopped, and the stopper pin 34 and the through hole 32a of the first partition wall 32 are fitted. The movement of the injection solution 41 is stopped. Here, by closing the second opening / closing valve 92a, the assembly 10 can be easily detached from the rubber pad 5, and by removing it, the state shown in FIG. 1 is restored. Therefore, by injecting the new assembly to the rubber pad 5 and opening the first on-off valve 91a, the injection liquid 41 can be similarly injected into the next assembly.

以上のように、本発明の注液装置および注入方法によれば、常に窒素ガスなどの不活性ガスと注入液とを接触させているため、高圧のみならず低圧の状態でも、注入液を一切空気中に触れることなく、組立体に注入することができる。しかも、組立体の表面にある注入液を不活性ガスにより押し込んでいるため、短時間注入を完了することができると共に、組立体内に注入できなかった注入液は、残らず回収してつぎの注入に用いているので、注入液の無駄が全くない。また、真空中に注入液が晒される時間も図3(b)および図3(d)の工程だけであり、非常に短い時間であるため、注入液中の成分の蒸発も最小限に抑えることができる。さらに、注入液貯蔵容器をエタノールに変えることにより、チューブやゴムパッドなどを自動的に洗浄することができ、簡単にメインテナンスを行うことができる。また、窒素ガスなどの不活性ガスも、広い領域を窒素ガスで満たしたり、広い領域の空気などを置換したりする必要がないので、非常に少量ですむ。また、ゴムパッドの大きさは、組立体などの作業対象の注入液の注入量を確保できる大きさに設定する必要がある。さらに、スピードアップするため、複数のゴムパッドにすることも容易にできる。   As described above, according to the liquid injection device and the injection method of the present invention, since the inert gas such as nitrogen gas is always brought into contact with the injection liquid, the injection liquid can be completely discharged not only at a high pressure but also at a low pressure. It can be injected into the assembly without touching the air. In addition, since the injection solution on the surface of the assembly is pushed in by the inert gas, the injection can be completed for a short time, and all the injection solution that could not be injected into the assembly is recovered and the next injection. As a result, there is no waste of the injected solution. Also, the time during which the injection solution is exposed to vacuum is only the steps shown in FIGS. 3 (b) and 3 (d), and since it is a very short time, the evaporation of components in the injection solution can be minimized. Can do. Furthermore, by changing the infusion solution storage container to ethanol, the tubes, rubber pads and the like can be automatically cleaned, and maintenance can be performed easily. Further, an inert gas such as nitrogen gas is very small because it is not necessary to fill a wide area with nitrogen gas or replace air in a wide area. Further, the size of the rubber pad needs to be set to a size that can secure the injection amount of the injection liquid to be worked such as an assembly. Furthermore, a plurality of rubber pads can be easily formed to increase the speed.

さらに、本発明の注入方法によれば、1個ごとに注入作業を行いながら、1個当りの注入時間を、たとえば真空吸引を30秒、電解液注入を10秒、電解液回収を20秒程度の合計1分程度の短時間で行うことができるため、他の製造工程とタイミングを合せることができ、しかも電気信号による開閉バルブの開閉制御だけで注入を行うことができるため、完全な自動化により行うことができる。その結果、たとえば色素増感太陽電池の他の工程と合せて全ての工程を自動化することができる。   Further, according to the injection method of the present invention, while performing the injection operation one by one, the injection time per piece is, for example, 30 seconds for vacuum suction, 10 seconds for electrolyte injection, and about 20 seconds for electrolyte recovery. Because it can be performed in a short time of about 1 minute in total, the timing can be matched with other manufacturing processes, and injection can be performed only by opening / closing control of the opening / closing valve by an electric signal. It can be carried out. As a result, for example, all processes can be automated together with other processes of the dye-sensitized solar cell.

つぎに、色素増感太陽電池の製法について説明をする。色素増感太陽電池は、その一例の構造図が図4に対向極(対向電極基板)2を除去して作用極(光電極基板)1を上から見た平面説明図および対向極2を設けた状態のB−B断面説明図が示されるように、作用極1および対向極2が一定間隙を介して対向するようにシール剤14により貼着され、その作用極1と対向極2との間隙部に電解質材料(電解液)16が封入される構造になっており、太陽光により光電変換層15の色素内で励起された電子が光電変換層15内の半導体である酸化チタンなどの多孔質金属酸化物薄膜に注入され、薄膜内を移動して透明導電膜12に伝達され、さらに、作用極電極17を経て負荷を含む外部回路を介して対向極2の対向極電極25に到達することにより電流が流れて電池として作用する。   Next, a method for producing a dye-sensitized solar cell will be described. The example of the structure of the dye-sensitized solar cell is shown in FIG. 4 in which a counter electrode (opposite electrode substrate) 2 is removed and a plan view showing the working electrode (photoelectrode substrate) 1 as viewed from above and the counter electrode 2 are provided. As shown in the cross-sectional explanatory view of the B-B state, the working electrode 1 and the counter electrode 2 are attached by a sealing agent 14 so as to face each other with a predetermined gap, and the working electrode 1 and the counter electrode 2 are Electrolytic material (electrolytic solution) 16 is sealed in the gap, and the electrons excited in the dye of the photoelectric conversion layer 15 by sunlight are porous such as titanium oxide which is a semiconductor in the photoelectric conversion layer 15. It is injected into the porous metal oxide thin film, moves through the thin film and is transmitted to the transparent conductive film 12, and further reaches the counter electrode 25 of the counter electrode 2 through the working electrode 17 and the external circuit including the load. As a result, current flows and acts as a battery.

まず、透明基板11の一面に透明導電膜12を形成する。この透明導電膜12の製膜法としてはCVD法、スパッタ法、蒸着法あるいはスプレー熱分解法などが用いられる。この透明導電膜12としては可視光透過率が高く、シート抵抗の低いフッ素ドープ酸化スズ(FTO)膜が好ましいが、この例に限らず、酸化インジウム・スズ(ITO)膜あるいはアルミニウムドープ酸化亜鉛(AZO)膜のうちの少なくとも一つを含む膜から選ぶことができる。   First, the transparent conductive film 12 is formed on one surface of the transparent substrate 11. As a method for forming the transparent conductive film 12, a CVD method, a sputtering method, a vapor deposition method, a spray pyrolysis method, or the like is used. The transparent conductive film 12 is preferably a fluorine-doped tin oxide (FTO) film having a high visible light transmittance and a low sheet resistance. However, the transparent conductive film 12 is not limited to this example, and an indium tin oxide (ITO) film or an aluminum-doped zinc oxide ( AZO) can be selected from films including at least one of the films.

つぎに、透明導電膜12上に、図4に示されるようなパターンで、枠部13bおよび枠部13bの一辺から延びる線状部分13aを形成する。この集電線13(13a、13b)は、たとえば銀ペーストをディスペンサなどにより塗布することにより、光電変換層15の周囲および透明基板11の周囲になるように、0.5±0.1mmの幅で形成する。   Next, a linear portion 13a extending from one side of the frame portion 13b and the frame portion 13b is formed on the transparent conductive film 12 in a pattern as shown in FIG. The current collecting wires 13 (13a, 13b) have a width of 0.5 ± 0.1 mm so as to be around the photoelectric conversion layer 15 and the transparent substrate 11 by applying a silver paste with a dispenser or the like, for example. Form.

そして、この集電線13で囲まれた部分に酸化物半導体膜(TiO2膜)を形成する。このTiO2膜は、n型酸化物半導体層で、色素を吸収し、DSCの活性層として作用する。多孔質半導体(酸化物半導体)膜としては酸化チタン(TiO2)の他に、酸化スズ(SnO2)、酸化亜鉛(ZnO)あるいは酸化ニオブ(Nb25)などを使用することもできる。この膜はドクターブレード法、スピンコート法、スクリーン印刷法あるいはスプレー製膜法などで成膜し、その後500℃前後で焼成する。焼成された酸化物半導体膜に増感色素を吸着させて光電変換層15を形成する。この酸化物半導体膜は、集電線13を形成する前に形成することもできる。 Then, an oxide semiconductor film (TiO 2 film) is formed in a portion surrounded by the current collector line 13. This TiO 2 film is an n-type oxide semiconductor layer that absorbs the dye and acts as an active layer of DSC. As the porous semiconductor (oxide semiconductor) film, in addition to titanium oxide (TiO 2 ), tin oxide (SnO 2 ), zinc oxide (ZnO), niobium oxide (Nb 2 O 5 ), or the like can also be used. This film is formed by a doctor blade method, a spin coating method, a screen printing method, a spray film forming method, or the like, and then baked at around 500 ° C. A photoelectric conversion layer 15 is formed by adsorbing a sensitizing dye to the fired oxide semiconductor film. This oxide semiconductor film can also be formed before the current collector 13 is formed.

その後、色素を吸着させる。色素としては可視光および赤外光領域に吸収スペクトルを有するルテニウム系色素、アゾ系色素、キノン系色素、キノンイミン系色素、シアニン系色素、メロシアニン系色素、クマリン系色素などを使用することができ、これらの色素をアセトニトリルとt−ブチルアルコールの50:50混合溶液に浸漬することにより行う。この色素吸着は、DSCの光感知活性層で、励起電子を発生させ、TiO2膜に移送する働きをする。このTiO2などの酸化物半導体層へのこの色素吸着により、光電変換層15になる。 Thereafter, the dye is adsorbed. As the dye, ruthenium dyes having absorption spectra in the visible light and infrared light regions, azo dyes, quinone dyes, quinone imine dyes, cyanine dyes, merocyanine dyes, coumarin dyes, and the like can be used. These dyes are immersed in a 50:50 mixed solution of acetonitrile and t-butyl alcohol. This dye adsorption serves to generate excited electrons in the DSC light-sensitive active layer and transfer them to the TiO 2 film. This dye adsorption to the oxide semiconductor layer such as TiO 2 becomes the photoelectric conversion layer 15.

その後、シール剤14として、たとえば紫外線硬化樹脂を、たとえば集電線13を被覆するように塗付する。このシール剤14としては、紫外線硬化樹脂の他にもエポキシ樹脂、アクリル樹脂、ポリウレタン樹脂、またはアイオノマー樹脂などを使用することができる。このシール剤14は、両者の接着のみではなく、集電線13を電解質材料16から保護する機能も有しているため、集電線13の上面だけではなく、その側面にも完全に被覆するように集電線13に沿って塗布されている。このシール剤14は、電解質材料16の蒸発、および水分や大気中の不純物や電解質材料16が集電線13と接触するのも防止している。この紫外線硬化樹脂の塗布は、たとえば多ノズルディスペンサでノズルを使用することができる。   Thereafter, for example, an ultraviolet curable resin is applied as the sealant 14 so as to cover the current collector 13, for example. As the sealant 14, an epoxy resin, an acrylic resin, a polyurethane resin, or an ionomer resin can be used in addition to the ultraviolet curable resin. Since this sealing agent 14 has not only the adhesion of both, but also the function of protecting the current collector 13 from the electrolyte material 16, so that not only the upper surface of the current collector 13 but also the side surface thereof is completely covered. It is applied along the current collector line 13. The sealing agent 14 also prevents evaporation of the electrolyte material 16 and prevents moisture, atmospheric impurities, and the electrolyte material 16 from coming into contact with the current collector 13. For the application of the ultraviolet curable resin, for example, a nozzle can be used with a multi-nozzle dispenser.

以上の各工程で作用極(光電極)1の形成が終了する。この作用極1の形成と並行して行われるが、対向極2の製造について、次に説明をする。   The formation of the working electrode (photoelectrode) 1 is completed in the above steps. Although it is performed in parallel with the formation of the working electrode 1, the manufacturing of the counter electrode 2 will be described next.

まず、金属基板21に電解質材料16の注入用の注入孔23を、ホールドリリング装置などを用いて穿孔する。この注入口23は、前述の集電線13で仕切られた空間ごとに形成する必要があるが、図4に示されるように、集電線13で仕切られる空間が1つに繋がっている場合、すなわち光電変換層15が1つに連続するように集電線13が形成されていれば、注入口23は1個でも電解質材料16を全体に注入することができる。   First, an injection hole 23 for injecting the electrolyte material 16 is drilled in the metal substrate 21 using a hold-rilling device or the like. This injection port 23 needs to be formed for each space partitioned by the above-described current collector 13, but as shown in FIG. 4, when the space partitioned by the current collector 13 is connected to one, that is, If the current collector 13 is formed so that one photoelectric conversion layer 15 is continuous, even one injection port 23 can inject the electrolyte material 16 into the whole.

その後、耐食性および導電性を具備する耐食性導電層22を形成する。この耐食性導電層22は、作用極側の透明導電膜12と全く同様に形成することができるが、ピンホールやクラックがなくシート抵抗を1Ω/□に形成される。この耐食性導電層22は、金属基板21を用いる場合には、導電層としての意味合いは小さくなるが、電解質材料16に対する腐食を防止することができ、金属基板21の材料が限定されなく、安価なものを使用することができる。この金属基板21としては、たとえばクロム、銅、アルミニウム、ニッケル、タングステン、モリブデン、チタンあるいは亜鉛などの高導電性の基板を用いることができる。また、耐食性導電層22としては、FTO膜の他に、チタン、タングステン、バナジウム、ジルコニウムなどの高耐食性膜などを使用することができる。   Thereafter, a corrosion-resistant conductive layer 22 having corrosion resistance and conductivity is formed. The corrosion-resistant conductive layer 22 can be formed in exactly the same manner as the transparent conductive film 12 on the working electrode side, but has a sheet resistance of 1Ω / □ without any pinholes or cracks. When the metal substrate 21 is used, the corrosion-resistant conductive layer 22 is less meaningful as a conductive layer. However, the corrosion of the electrolyte material 16 can be prevented, and the material of the metal substrate 21 is not limited and is inexpensive. Things can be used. As the metal substrate 21, for example, a highly conductive substrate such as chromium, copper, aluminum, nickel, tungsten, molybdenum, titanium, or zinc can be used. In addition to the FTO film, a highly corrosion resistant film such as titanium, tungsten, vanadium, and zirconium can be used as the corrosion resistant conductive layer 22.

そして触媒性金属膜の例として、白金膜を、たとえばスプレーにより形成する。この白金膜は、触媒として利用するもので、対向極電極25から効率的に電子が移動するのを助ける。そのため、厚くする必要はなく、40〜100nm程度の厚さで、むしろ途切れて粒状になった方が、表面積が大きくなって好ましい。この白金膜の形成は、150±10℃の温度で行う。その後、ベルト炉などにより450℃程度で、30分程度のシンタリングを行う。この熱処理により、耐食性導電層22上に、アイランドが形成され、触媒硬化を助長する。   As an example of the catalytic metal film, a platinum film is formed by spraying, for example. This platinum film is used as a catalyst, and helps to efficiently move electrons from the counter electrode 25. For this reason, it is not necessary to increase the thickness, and it is preferable that the thickness is about 40 to 100 nm, and rather it is intermittent and granular, because the surface area becomes large. The platinum film is formed at a temperature of 150 ± 10 ° C. Thereafter, sintering is performed at about 450 ° C. for about 30 minutes in a belt furnace or the like. By this heat treatment, islands are formed on the corrosion-resistant conductive layer 22 and promote catalyst curing.

以上の工程で対向極2を形成することができる。そして、シール剤14が塗布された作用極1と対向極2とを重ね合せる。この両者の重ね合せの精度も±0.2mmの精度で行う。そして、紫外線を照射して硬化させる。紫外線の照射時間は、ランプの紫外線エネルギーをモニターする実時間により調整される。   The counter electrode 2 can be formed by the above process. Then, the working electrode 1 and the counter electrode 2 coated with the sealing agent 14 are overlapped. The accuracy of the superposition of both is also performed with an accuracy of ± 0.2 mm. Then, it is cured by irradiating with ultraviolet rays. The ultraviolet irradiation time is adjusted by the actual time for monitoring the ultraviolet energy of the lamp.

ついで、電解質材料16の注入を行う。この電解質材料(電解液)16の注入は、前述の注入液の注入方法を用いる。注入口23が複数個ある場合には、マルチノズルを有する注入装置を用いて、複数の注入口から同時に電解質材料(電解液)16の注入を行う。この電解質材料16は、対向極電極25からの電子を作用極1のTiO2膜上の色素分子に移動させる重要な機能を有している。そして、注入口23をカバーガラス24などにより封止することにより、DSCモジュールが完成(DSCモジュール完成ステージ84)し、ベルトコンベヤから降ろして製造作業が完了する。電解質材料16は、たとえばアセトニトリル、γ−ブチロラクトン、メトキシプロピオニトリルあるいはプロピレンカーボネートなどの溶媒にヨウ化リチウム、t−ブチルピリジン、ヨウ化ジメチルプロピルイミダゾリウムまたはヨウ化メチルプロピルイミダゾリウムなどを溶解したものを使用することができる。 Next, the electrolyte material 16 is injected. The electrolyte material (electrolytic solution) 16 is injected using the above-described injection method. When there are a plurality of injection ports 23, an electrolyte material (electrolytic solution) 16 is injected simultaneously from a plurality of injection ports using an injection device having a multi-nozzle. The electrolyte material 16 has an important function of moving electrons from the counter electrode 25 to the dye molecules on the TiO 2 film of the working electrode 1. Then, the inlet 23 is sealed with a cover glass 24 or the like, whereby the DSC module is completed (DSC module completion stage 84), and is lowered from the belt conveyor to complete the manufacturing operation. The electrolyte material 16 is obtained by dissolving lithium iodide, t-butylpyridine, dimethylpropylimidazolium iodide or methylpropylimidazolium iodide in a solvent such as acetonitrile, γ-butyrolactone, methoxypropionitrile, or propylene carbonate. Can be used.

最後に作用極電極17および対向極電極25をそれぞれ隣接する2辺の基板端部に形成し、色素増感太陽電池1とする。   Finally, the working electrode 17 and the counter electrode 25 are formed on the two adjacent substrate ends to form the dye-sensitized solar cell 1.

1 作用極
2 対向極
3 注入治具
4 注入液貯蔵容器
5 ゴムパッド
6 真空ポンプ
7 不活性ガス源(窒素ボンベ)
8 圧力印加装置(エアコンプレッサ)
10 組立体
11 透明基板
12 透明導電膜
13 集電線
14 シール剤
15 光電変換層
16 電解質材料
17 作用極電極
21 基板
22 導電層
23 電解質材料の注入口
24 カバーガラス
25 対向極電極
31 筒状体
32 第1の隔壁
33 第2の隔壁
34 ストッパピン
35 弾性部材(スプリング)
41 注入液(電解液)
42 空隙部
6b 真空状態
7b 窒素ガス
8a 高圧エア
91〜95 第1〜第5のチューブ
91a〜94a 第1〜第4の開閉バルブ
DESCRIPTION OF SYMBOLS 1 Working electrode 2 Opposite electrode 3 Injection jig 4 Injection liquid storage container 5 Rubber pad 6 Vacuum pump 7 Inert gas source (nitrogen cylinder)
8 Pressure application device (air compressor)
DESCRIPTION OF SYMBOLS 10 Assembly 11 Transparent substrate 12 Transparent electrically conductive film 13 Current collector 14 Sealing agent 15 Photoelectric conversion layer 16 Electrolyte material 17 Working electrode 21 Substrate 22 Conductive layer 23 Inlet of electrolyte material 24 Cover glass 25 Counter electrode 31 Cylindrical body 32 First partition 33 Second partition 34 Stopper pin 35 Elastic member (spring)
41 Injection solution (electrolyte)
42 Gap part 6b Vacuum state 7b Nitrogen gas 8a High pressure air 91-95 1st-5th tube 91a-94a 1st-4th on-off valve

Claims (3)

(i)筒状体の内壁に固着され、中心部に貫通孔を有する第1および第2の隔壁、(ii)底部が前記筒状体の内壁を摺動し得ると共に、前記第1および第2の隔壁の貫通孔を摺動し、該摺動により先端部と前記第1の隔壁の貫通孔との間隙を可変し得る突起棒が前記底部に固着されたストッパピン、および(iii)該ストッパピンの底部と前記筒状体の一端部との間に設けられた弾性体を有する注入治具と、
上部に空隙部を有するように注入液が充填されて密閉し得る注入液貯蔵容器と、
組立体の注入口を被覆して該組立体に吸着させるゴムパッドと、
該ゴムパッドと一端部が気密に接続され、他端部が第1の開閉バルブを介して真空ポンプに接続される第1のチューブと、
該第1のチューブから分岐され、第2のソレノイドを介して不活性ガス源に接続される第2のパイプと、
前記不活性ガス源と前記注入液貯蔵容器の前記空隙部とを第3の開閉バルブを介して気密に接続する第3のチューブと、
前記注入治具の前記第2の隔壁と前記ストッパピンの底部との間の第1空間部に一端部が気密に接続され、他端部が第4の開閉バルブを介して圧力印加装置に接続される第4のチューブと、
前記注入液貯蔵容器内の注入液内に一端部が挿入され、他端部が前記注入治具の他端部に接続される第5のチューブと、
前記注入治具の前記第1および第2の隔壁の間に形成される第2空間部に一端部が気密に接続され、他端部が前記ゴムパッド内に挿入されて注入液を前記第2空間部から前記ゴムパッド内に送り出す注入針
とを具備する注液装置。
(I) first and second partition walls fixed to the inner wall of the cylindrical body and having a through hole in the center; (ii) a bottom portion can slide on the inner wall of the cylindrical body; A stopper pin fixed to the bottom, and a projection pin that slides through the through-hole of the two partition walls and can change the gap between the tip portion and the through-hole of the first partition wall by the sliding; An injection jig having an elastic body provided between the bottom of the stopper pin and one end of the cylindrical body;
An infusion solution storage container that can be sealed by being filled with an infusion solution so as to have a void at the top;
A rubber pad that covers the inlet of the assembly and is adsorbed to the assembly;
A first tube whose one end is hermetically connected to the rubber pad and whose other end is connected to a vacuum pump via a first on-off valve;
A second pipe branched from the first tube and connected to an inert gas source via a second solenoid;
A third tube that hermetically connects the inert gas source and the gap of the infusate storage container via a third on-off valve;
One end of the injection jig is hermetically connected to the first space between the second partition wall and the bottom of the stopper pin, and the other end is connected to the pressure application device via a fourth open / close valve. A fourth tube to be
A fifth tube in which one end is inserted into the infusate in the infusate storage container and the other end is connected to the other end of the infusion jig;
One end of the pouring jig is hermetically connected to a second space formed between the first and second partition walls, and the other end is inserted into the rubber pad so that the pouring solution is poured into the second space. A liquid injection device comprising an injection needle that is fed from a section into the rubber pad.
注入液を注入する組立体の注入口に真空ポンプと接続されるゴムパッドを吸着させて前記組立体の内部を負圧にする工程と、
該負圧にされたゴムパッド内および前記組立体の少なくとも注入口部に注入液を導入する工程と、
前記ゴムパッド内の注入液に不活性ガスにより圧力を加えることにより、前記組立体内に前記注入液を押し込む工程と、
前記不活性ガスにより前記ゴムパッド側に導入され、前記組立体内に押込まれないで残留した注入液を注入治具まで押し戻す工程
とを有する注入液の注入方法。
Adsorbing a rubber pad connected to a vacuum pump to an inlet of an assembly for injecting an injection solution to make the inside of the assembly negative pressure;
Introducing an injection liquid into the negative pressure rubber pad and at least an injection port of the assembly;
Pushing the infusion into the assembly by applying pressure to the infusion in the rubber pad with an inert gas;
A method of injecting an injection solution, comprising the step of pushing back the injection solution that is introduced into the rubber pad side by the inert gas and remains without being pushed into the assembly into an injection jig.
透明基板表面に透明導電膜、光電変換層、集電線、およびシール剤層を形成することにより、作用極を形成し、基板表面に耐食性で導電性の膜および触媒性の金属層を形成することにより対向極を形成し、該作用極および対向極を前記シール剤層により貼着した後、前記作用極と対向極との間の間隙部に電解液を注入する色素増感太陽電池の製法であって、前記電解液の注入方法を請求項2記載の方法により行う色素増感太陽電池の製法。 Form a working electrode by forming a transparent conductive film, photoelectric conversion layer, current collector, and sealant layer on the transparent substrate surface, and form a corrosion-resistant conductive film and a catalytic metal layer on the substrate surface In the method for producing a dye-sensitized solar cell, the counter electrode is formed by attaching the electrolyte solution into the gap portion between the working electrode and the counter electrode after the working electrode and the counter electrode are attached by the sealant layer. A method for producing a dye-sensitized solar cell, wherein the electrolytic solution is injected by the method according to claim 2.
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