JP2012154599A - Vapor generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vapor generator which can generate solvent steam efficiently while controlling the breakdown of a container being a tank.SOLUTION: In this steam generator 37, the tank 71 is supported from below by a supporting member 75 which has a flange 75a, the first recess 75b, and the first O ring 76. Therefore, the supporting function of the tank 71 can be maintained without a bonded seal being broken by thermal stress caused by heat from a conventional heating means. Moreover, since the tank 71 is supported from the side by the supporting member 75, the second recess 75c created at the side of the supporting member 75, and the second O ring 77, thermal deformation under the side of the tank 71 can be coped with by the second O ring 77. Furthermore, since a heat conductive sponge 84 is provided between the top of an upper aluminum plate 81 and the tank 71, the warp of the bottom of the tank 71 and the warp of a heater 41 can be coped with.

Description

  In the present invention, a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display device (hereinafter simply referred to as a substrate) is subjected to a treatment such as cleaning or etching with a treatment liquid, and then a solvent vapor is supplied to the substrate. The present invention relates to a vapor generation apparatus that generates solvent vapor used in a substrate processing apparatus for drying a substrate.

  Conventionally, a processing tank for storing a processing liquid, a chamber surrounding the processing tank, a lifter that supports a substrate and can be raised and lowered between a processing position and a drying position, a vacuum pump that discharges gas in the chamber, A substrate processing apparatus having a nitrogen gas nozzle for supplying nitrogen gas and a solvent nozzle for supplying solvent vapor into the chamber has been proposed.

  In the substrate processing apparatus having such a configuration, nitrogen gas is supplied into the chamber from the nitrogen gas nozzle, oxygen in the chamber is exhausted from the discharge port at the bottom of the chamber to make the inside of the chamber a nitrogen gas atmosphere, and then the processing is performed in the processing tank. With the liquid stored, the lifter is positioned at the processing position, and the substrate is processed with the processing liquid (for example, pure water cleaning). After the treatment with the treatment liquid is completed, nitrogen gas is supplied from the nitrogen gas nozzle to discharge oxygen in the chamber, solvent vapor is supplied from the solvent nozzle into the chamber, and the inside of the chamber is made a solvent vapor atmosphere. Then, the lifter is lifted from the processing position to the drying position, and the substrate is dried by the solvent vapor.

  In such a substrate processing apparatus, when the substrate is dried, a solvent vapor is used. As shown in Patent Documents 1 to 4, a vapor generating apparatus that generates a solvent vapor for drying the substrate is always used. Is provided.

  FIG. 4 is a schematic configuration diagram showing a conventional steam generator. This conventional steam generator mainly includes an explosion-proof enclosure 110, a tank 120 accommodated in the explosion-proof enclosure 110, and a support member 130 on which the tank 120 is placed. The tank 120 has a rectangular parallelepiped shape, and has a flange 121 formed around the upper portion thereof, and stores therein an organic solvent such as isopropyl alcohol (hereinafter simply referred to as IPA). The support member 130 has a square shape and is placed on the bottom of the explosion-proof enclosure 110.

  Around the tank 120, a total of ten columns 140, three on the long side of the tank 120 and two on the short side, are disposed (only two are disclosed in FIG. 4). The lower end portion of the support column 140 is attached to the bottom portion of the explosion-proof enclosure 110 and the support member 130 by bolts 131. In addition, the side part of the tank 120 and the side in contact with the tank 120 of the column 140 are attached by an adhesive (not shown).

  A plate-like heater 160 sandwiched between an upper aluminum plate 150 and a lower aluminum plate 151 is disposed on the bottom of the explosion-proof enclosure 110 inside the support member 130 having a square shape. The upper part of the upper aluminum plate 150 is in contact with the lower part of the tank 120, and the lower part of the lower aluminum plate 151 is in contact with the bottom of the explosion-proof enclosure 110. The lower periphery of the tank 120 and the support member 130 are attached by an adhesive seal 170. The adhesive seal 170 has a function of supporting the lower periphery of the tank 120 and also has a sealing function in case IPA liquid leaks from the tank 120.

  A lid 180 for sealing the inside of the tank 120 is placed on the flange portion 121 of the tank 120. The flange portion 121 and the lid 180 of the tank 120 are joined at a plurality of locations by bolts 190 and nuts 191 (in FIG. 4, two sets of bolts 190 and nuts 191 are disclosed).

The lid 180 has a nitrogen gas introduction hole 181 for introducing nitrogen gas (N ₂ gas) into the tank 120, an IPA liquid supply hole 182 for supplying IPA liquid into the tank 120, and IPA vapor as a substrate. An IPA vapor supply hole 183 for supplying to a processing unit (not shown) is formed. Also, on the upper side of the explosion-proof enclosure 110, a nitrogen gas introduction hole 111 for introducing nitrogen gas into the explosion-proof enclosure 110, and an IPA liquid supply hole 112 for supplying IPA liquid into the explosion-proof enclosure 110, , IPA vapor supply holes 113 for supplying IPA vapor to a substrate processing unit (not shown) are formed.

  A nitrogen gas introduction pipe 185 is connected to the nitrogen gas introduction hole 111 of the explosion-proof enclosure 110 and the nitrogen gas introduction hole 182 of the lid 180. An IPA liquid supply pipe 186 is connected to the IPA liquid supply hole 112 of the explosion-proof enclosure 110 and the IPA liquid supply hole 181 of the lid 180. An IPA vapor supply pipe 187 is connected to the IPA vapor supply hole 113 of the explosion-proof enclosure 110 and the IPA vapor supply hole 183 of the lid 180.

JP 2009-21420 A JP 2009-21421 A JP 2010-67811 A JP 2010-86981 A

  However, the conventional steam generator having such a configuration has the following problems. Typically, the heater 160 is heated to a temperature of about 120 ° C. to convert the IPA liquid to IPA vapor. At this time, a force is exerted on the lower portion of the tank 120 to extend left and right due to heat from the heater 160. Further, since the support member 130 itself has a temperature close to room temperature, there is a temperature difference between the bottom of the tank 120 and the support member 130.

  Due to the force that the lower part of the tank 120 tends to extend and the temperature difference described above, the adhesive seal 170 may be subjected to thermal stress, and the adhesive seal 170 may be damaged. If the adhesive seal 170 is broken, the support function of the tank 120 in the explosion-proof enclosure 110 is lowered. As a result, if the support function of the tank 120 is lowered, the tank 120 may be damaged in the explosion-proof enclosure 110.

  This invention is made | formed in view of such a situation, Comprising: It aims at providing the vapor | steam generator which can generate | occur | produce solvent vapor | steam efficiently, suppressing the damage of a container.

  In order to achieve the above-described object, the invention according to claim 1 is a vapor generating apparatus for heating a solvent liquid to generate a solvent vapor, and is disposed below the container for storing the solvent liquid and the container. A heating means for heating the solvent liquid stored in the container; a support housing the container; and a support member attached to the bottom of the enclosure in the enclosure and for mounting the container And a plurality of support posts attached to the upper part of the support member for supporting the container from the outer peripheral side, and forming a recess on the flange in contact with the lower side of the container, An O-ring contacting the lower side of the container is fitted.

  The steam generator according to claim 2 is the steam generator according to claim 1, wherein a recess is formed on a side of the support member that contacts the side of the container, and the side of the container is formed in the recess. The contact O-ring is fitted.

  The steam generator according to claim 3 is the steam generator according to claim 1 or 2, wherein the heating means is plate-shaped, the support member is shaped like a square in plan view, and A flange is provided inside the support member, and the heating means is arranged inside the support member.

  The steam generator according to claim 4 is the steam generator according to claim 3, further comprising a heat transfer sponge disposed between the lower side of the container and the heating means. It is.

  The steam generator according to the present invention includes a support member having a flange for placing the container. The flange of the support member has a recess formed on the side in contact with the lower side of the container. Since the O-ring that comes into contact with the lower side is fitted, the support function of the container can be maintained without damaging the adhesive seal due to the thermal stress caused by the heat from the conventional heating means. As a result, there is a remarkable effect that breakage of the container can be suppressed.

It is the block diagram which showed schematic structure of the substrate processing apparatus provided with the steam generator which concerns on embodiment of this invention. It is sectional drawing of the steam generator which concerns on embodiment of this invention. It is the figure seen from the direction which the arrow I in FIG. 2 shows. It is a schematic block diagram which shows the conventional steam generator.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing a schematic configuration of a substrate processing apparatus including a vapor generating apparatus according to an embodiment of the present invention.

The substrate processing apparatus includes a processing tank 1 for storing a processing liquid such as pure water. The processing tank 1 stores a processing liquid and can accommodate a plurality of substrates W in an upright posture. At the bottom of the processing tank 1, two ejection pipes 7 having a long axis along the direction (paper surface direction) in which a plurality of substrates W are aligned are provided for supplying a processing liquid. Yes. One end of a supply pipe 11 is connected to each ejection pipe 7. The other end side of the supply pipe 11 is connected to a processing liquid supply source 15 and its flow rate is controlled by a processing liquid valve 17 including a control valve. The treatment liquid supply source 15 is a supply pipe using a chemical solution such as hydrofluoric acid (HF), a mixed solution of sulfuric acid / hydrogen peroxide solution (H ₂ SO ₄ .H ₂ O ₂ ), or pure water as a treatment liquid. 11 is supplied.

  The processing tank 1 is surrounded by a chamber 27. The chamber 27 includes an upper cover 29 that can be opened and closed. The lifter 31 that holds a plurality of substrates W in a standing posture is configured such that a “standby position” that is above the chamber 27, a “processing position” that is inside the processing tank 1, and a position above the processing tank 1 by a drive mechanism (not shown). However, it can be moved over a “drying position” which is inside the chamber 27. An exhaust pipe 28 a is disposed at one part of the side surface of the chamber 27. An exhaust pump 28b is connected to the exhaust pipe 28a and is opened and closed by an exhaust valve 28c.

  A pair of solvent nozzles 33 and a pair of inert gas nozzles 34 are disposed below the upper cover 29 and on the upper inner wall of the chamber 27. One end side of the IPA supply pipe 35 is connected to the solvent nozzle 33 in communication. The other end side is connected in communication with the steam generator 37. The IPA supply pipe 35 is provided with a steam valve 38 including a control valve for adjusting the flow rate of the solvent vapor and an in-line heater 40 for heating the solvent vapor in order from the upstream side. The IPA supply pipe 35 has a larger diameter (about 9.52 mm) than the conventional supply pipe of the substrate processing apparatus, and the solvent resistance in the IPA supply pipe 35 is reduced to reduce the solvent nozzle. The supply of the solvent vapor to 33 is performed smoothly. Since the IPA supply pipe 35 includes the in-line heater 40, the generated solvent vapor can be reduced from condensing in the IPA supply pipe 35, and the solvent concentration can be prevented from decreasing.

  The steam generator 37 is provided with a heater 41 for adjusting the temperature of the internal space, which is a steam generation space, to a predetermined temperature and heating it to generate solvent vapor. A solvent supply source 43 for supplying a solvent is connected in communication with the internal space of the steam generator 37. In this example, isopropyl alcohol (IPA) is used as the solvent. In addition to isopropyl alcohol, examples of the solvent include hydrofluoroether (HFE). Details of the steam generator will be described later.

  One end of a supply pipe 45 is connected to the inert gas nozzle 34 in communication. The other end side is connected in communication with an inert gas supply source 47 that supplies an inert gas. Examples of the inert gas include nitrogen gas. The supply amount of the inert gas is adjusted by an inert gas valve 49. An inline heater 50 is attached to the downstream side of the inert gas valve 49. The in-line heater 50 heats the inert gas from the inert gas supply source 47 to a predetermined temperature.

  The chamber 27 is provided with a breathing valve 53 comprising a control valve for eliminating the decompression state so that the pressure of the gas in the chamber 27 is not accumulated.

  A discharge port 57 is disposed at the bottom of the processing tank 1. A QDR valve 59 is attached to the discharge port 57. When the processing liquid in the processing tank 1 is discharged from the QDR valve 59, the processing liquid is once discharged to the bottom of the chamber 27. A discharge pipe 63 connected to the gas-liquid separator 61 is attached to the bottom of the chamber 27, and a drain valve 65 is attached to the discharge pipe 63. The gas-liquid separation unit 61 takes in gas and liquid from the discharge pipe 63 and separates and discharges them.

  The above-described processing liquid valve 17, exhaust valve 28c, exhaust pump 28b, upper cover 29, lifter 31, steam generator 37, steam valve 38, in-line heater 40, heater 41, inert gas valve 49, in-line heater 50, breathing valve 53, the QDR valve 59, the drain valve 65, and the like are controlled in an integrated manner by the control unit 67. The control unit 67 controls each unit described above and refers to data stored in the storage unit 69. The storage unit 69 stores a required reduction time obtained by an experiment performed in advance. The control unit 67 includes a timer (not shown) and measures time appropriately.

  The time required for reduction is the time required to reduce the oxygen concentration in the chamber 27 to a predetermined level by operating the exhaust pump 28 b and exhausting the gas from the chamber 27. The predetermined oxygen concentration is a target for reducing the oxygen concentration, and is, for example, 100 ppm or less, preferably 1 ppm or less, at which no adverse effects are caused in the process on the substrate W. The time required to become this concentration or less is the time required for the above reduction, for example, about 40 to 60 seconds. In this embodiment, it is assumed that it is 60 seconds.

  The control unit 67 described above performs the oxygen concentration reduction process after finishing the processing with the processing liquid. At that time, the storage unit 69 is referred to, and the oxygen concentration in the chamber 27 is equal to or less than 100 ppm. Each part mentioned above is operated so that pressure reduction may be stopped when required time passes.

  Next, a specific configuration of the steam generator according to the embodiment of the present invention will be described with reference to FIGS. FIG. 2 is a cross-sectional view of the steam generator according to the embodiment of the present invention, and FIG. 3 is a view as seen from the direction indicated by the arrow I in FIG.

  The steam generator 37 mainly includes an explosion-proof enclosure 70 and a tank 71 accommodated in the explosion-proof enclosure 70. The explosion-proof enclosure 70 is a stainless steel housing, and has a recess formed on the lower side. The tank 71 has a rectangular parallelepiped shape, and has a lip-shaped collar portion 72 formed around the upper portion, and stores an IPA liquid as a solvent liquid therein. A convex pedestal 73 is provided so as to correspond to the concave portion of the explosion-proof enclosure 70. This pedestal 73 is made of stainless steel. The tank 71 corresponds to the container of the present invention.

  Around the upper surface of the convex pedestal 73, a lower portion of the explosion-proof enclosure 70 and a support member 75 are attached by a plurality of attachment members 74 (two are disclosed in FIG. 2). The support member 75 is shaped like a square and includes a flange 75a protruding inward. The tank 71 is placed on the flange 75 a of the support member 75. The support member 75 is made of stainless steel.

  A flange-shaped first recess 75 b is formed on the lower side of the tank 71 in the flange 75 a. A first O-ring 76 is fitted in the first recess 75b. A second concave portion 75 c having a mouth shape is formed on the inner side portion of the support member 75. A second O-ring 77 is fitted in the second recess 75c. The first O-ring 76 and the second O-ring 77 are both elastomers that are rubber-like elastic members.

  Around this tank 71, a total of ten columns 79, three on the long side of the tank 71 and two on the short side, are arranged (only two are disclosed in FIG. 2, 10 in FIG. 3. Disclosure). The lower end portion of the column 79 is attached to the upper end portion of the support member 75 with a bolt 80. The ten struts 79 are made of stainless steel. In addition, the side part of the tank 71 and the side of the support 79 in contact with the tank 71 are attached by an adhesive (not shown).

  A plate-like heater 41 sandwiched between an upper aluminum plate 81 and a lower aluminum plate 82 is disposed on the pedestal 73 inside the support member 75 having a square shape. A heat transfer sponge 84 is provided between the upper part of the upper aluminum plate 81 and the tank 71. The heat transfer sponge 84 is a silicone main raw material gel.

  A lid 85 for sealing the inside of the tank 71 is placed on the flange portion 72 of the tank 71. As shown in FIGS. 2 and 3, the flange portion 72 and the lid 85 of the tank 71 are joined together by ten sets of bolts 86 and nuts 87.

  In the lid 85, a nitrogen gas introduction hole 85 a for introducing nitrogen gas into the tank 71, an IPA liquid supply hole 85 b for supplying IPA liquid into the tank 71, and IPA vapor are supplied to the solvent nozzle 33. IPA vapor supply holes 85c for the purpose are formed. Further, on the upper side of the explosion-proof enclosure 70, a nitrogen gas introduction hole 70a for introducing nitrogen gas into the tank 71, an IPA liquid supply hole 70b for supplying IPA liquid into the tank 71, and IPA vapor are supplied. An IPA vapor supply hole 70c for supplying the solvent nozzle 33 is formed.

  A nitrogen gas introduction pipe 89 is connected to the nitrogen gas introduction hole 85 a of the lid 85 and the nitrogen gas introduction hole 70 a of the explosion-proof enclosure 70. An upstream IPA supply pipe 35 is connected to the IPA liquid supply hole 85 b of the lid 85 and the IPA liquid supply hole 70 b of the explosion-proof enclosure 70. A downstream IPA supply pipe 35 is connected to the IPA vapor supply hole 85 c of the lid 85 and the IPA vapor supply hole 70 c of the explosion-proof enclosure 70.

  The steam generator 37 generates IPA steam as follows. First, the IPA liquid is supplied from the solvent supply source 43 (FIG. 1) to the tank 71 in the vapor generating device 37 through the upstream IPA supply pipe 35. Next, the heater 41 is operated to heat the IPA liquid stored in the tank 71. As a result, IPA vapor is generated in the space above the IPA liquid in the tank 71. Finally, nitrogen gas is introduced into the tank 71 from a nitrogen gas supply source (not shown) through the nitrogen gas introduction pipe 89. As the nitrogen gas is introduced into the tank 71, the IPA vapor in the tank 71 is supplied to the solvent nozzle 33 through the IPA supply pipe 35 on the downstream side.

  According to the steam generator 37 according to the embodiment of the present invention described above, there are the following remarkable effects. First, in this steam generator 37, since the tank 71 is supported from the lower side by the support member 75 having the flange 75a, the first recess 75b, and the first O-ring 76, the heat from the conventional heating means is obtained. It is possible to maintain the support function of the tank 71 without damaging the adhesive seal due to the thermal stress caused by the above. As a result, the tank 71 can be prevented from being damaged and the solvent vapor can be generated efficiently. is there.

  Further, in this steam generation device 37, the tank 71 is supported from the side by the support member 75, the second recess 75c formed in the side of the support member 75, and the second O-ring 77, so the second O-ring. 77 has a remarkable effect that it can cope with thermal deformation of the lower side of the tank 71.

  Furthermore, in this steam generator 37, since the heat transfer sponge 84 is provided between the upper portion of the upper aluminum plate 81 and the tank 71, it is possible to cope with the warp of the bottom surface of the tank 71 and the warp of the heater 41. There is also an effect.

  Note that the present invention is not limited to the above-described embodiment. For example, although the embodiment of the invention described above is a batch type cleaning apparatus provided with the processing tank 1, it can also be used in a single wafer type cleaning apparatus that processes the substrates one by one while rotating the substrate. .

35 IPA supply pipe 37 steam generator 41 heater 70 explosion-proof enclosure 71 tank 73 pedestal 75 support member 75a flange 75b first recess 75c second recess 76 first O-ring 77 second O-ring 79 column 84 heat transfer sponge

Claims (4)

In a steam generator that heats solvent liquid and generates solvent vapor,
A container for storing a solvent liquid;
A heating means disposed on the lower side of the container for heating the solvent liquid stored in the container;
An enclosure containing the container;
A support member attached to the bottom of the enclosure within the enclosure and having a flange for mounting the container;
A plurality of support columns attached to an upper portion of the support member and supporting the container from the outer peripheral side;
In the flange, a recess is formed on a side of the flange that contacts the lower side of the container, and an O-ring that contacts the lower side of the container is fitted into the concave part. The steam generator according to claim 1,
A steam generator, wherein a recess is formed on a side of the support member that contacts the side of the container, and an O-ring that contacts the side of the container is fitted into the recess. The steam generator according to claim 1 or 2,
The heating means is plate-shaped,
The support member has a square shape in plan view, and the flange is provided inside the support member,
The steam generating apparatus, wherein the heating means is disposed inside the support member. The steam generator according to claim 3,
The steam generator further comprising a heat transfer sponge disposed between a lower side of the container and the heating means.

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