JP2012134595A - Oscillation device and electronic apparatus - Google Patents

Oscillation device and electronic apparatus Download PDF

Info

Publication number
JP2012134595A
JP2012134595A JP2010282668A JP2010282668A JP2012134595A JP 2012134595 A JP2012134595 A JP 2012134595A JP 2010282668 A JP2010282668 A JP 2010282668A JP 2010282668 A JP2010282668 A JP 2010282668A JP 2012134595 A JP2012134595 A JP 2012134595A
Authority
JP
Japan
Prior art keywords
piezoelectric element
oscillation device
oscillation
vibration
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2010282668A
Other languages
Japanese (ja)
Inventor
Yasuharu Onishi
康晴 大西
Atsushi Kuroda
淳 黒田
Yuichiro Kishinami
雄一郎 岸波
Yukio Murata
行雄 村田
Shigeo Sato
重夫 佐藤
Nobuhiro Kawashima
信弘 川嶋
Motoyoshi Komoda
元喜 菰田
Tatsuya Uchikawa
達也 内川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Casio Mobile Communications Ltd
Original Assignee
NEC Casio Mobile Communications Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Casio Mobile Communications Ltd filed Critical NEC Casio Mobile Communications Ltd
Priority to JP2010282668A priority Critical patent/JP2012134595A/en
Publication of JP2012134595A publication Critical patent/JP2012134595A/en
Withdrawn legal-status Critical Current

Links

Images

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric oscillation device in which generation of splitting oscillation can be suppressed.SOLUTION: In the oscillation device, i.e. an electroacoustic transducer 100, a peripheral part of a piezoelectric element 123 is reinforced by a reinforcing member 130. In the splitting oscillation mode, a peripheral part and a central part of an elastic member 122 are deformed in the phases different from each other. Since the peripheral part of the piezoelectric element 123 that becomes a node of the splitting oscillation is reinforced, the rigidity can be enhanced locally. Consequently, the mode of the splitting oscillation can be deformed, and thereby the sound pressure level can be increased.

Description

本発明は、圧電振動子を利用した発振装置、この発振装置を利用した電子機器、に関する。   The present invention relates to an oscillation device using a piezoelectric vibrator, and an electronic apparatus using the oscillation device.

携帯電話機においては、音楽再生、ハンズフリーなどの音響機能を商品価値とした薄型スタイリッシュ携帯の開発が活発化している。この中、電気音響変換器に対しては、小型・薄型でかつ高音質への要求が高い。これらの要望を解決する手段としては、圧電素子を駆動源とする圧電型の電気音響変換器が開発されている。圧電型の電気音響変換器は圧電素子の自己伸縮運動を利用するため、磁気回路から構成される動電型の電気音響変換器より、薄型となる。   In mobile phones, the development of thin and stylish mobile phones that have commercial value such as music playback and hands-free acoustic functions is becoming active. Among these, electroacoustic transducers are highly demanded for being small and thin and having high sound quality. As means for solving these demands, a piezoelectric electroacoustic transducer using a piezoelectric element as a drive source has been developed. Since the piezoelectric electroacoustic transducer utilizes the self-expanding motion of the piezoelectric element, the piezoelectric electroacoustic transducer is thinner than the electrodynamic electroacoustic transducer composed of a magnetic circuit.

現在、上述のような電気音響変換器として各種の提案がある(特許文献1)。   Currently, there are various proposals as the above-mentioned electroacoustic transducer (Patent Document 1).

特開2008−151666号公報JP 2008-151666 A

しかしながら、圧電式の電気音響変換器は、機械品質係数Qが高いため、共振周波数近傍にエネルギーが集中し、凹凸のある音圧レベル周波数特性になる。さらに、圧電素子では、基本共振周波数以降の高次振動モードにおいて、分割振動が発生する問題点がある。   However, since the piezoelectric electroacoustic transducer has a high mechanical quality factor Q, energy concentrates in the vicinity of the resonance frequency, and the sound pressure level frequency characteristic is uneven. Furthermore, the piezoelectric element has a problem that split vibration occurs in a higher-order vibration mode after the fundamental resonance frequency.

分割振動とは、高次の振動モードであり、基本振動モードが重畳することで成長する。ここでは、局所的に正相と逆相の振動姿態が重なりあい、音波放射の際に、干渉(キャンセリング)が発生し、音圧レベルが著しく低下する問題がある。このため、圧電素子を用いた電気音響変換器において、分割振動の発生を抑制できる画期的な技術が必要とされていた。   The divided vibration is a higher-order vibration mode and grows by superimposing the fundamental vibration mode. Here, there is a problem that the vibration modes of the normal phase and the reverse phase overlap locally, and interference (cancelling) occurs when sound waves are emitted, so that the sound pressure level is significantly reduced. For this reason, in an electroacoustic transducer using a piezoelectric element, an epoch-making technique capable of suppressing the occurrence of divided vibrations is required.

本発明は上述のような課題に鑑みてなされたものであり、分割振動の発生を抑制することができる圧電型の発振装置、このような発振装置を利用した電子機器、を提供するものである。   The present invention has been made in view of the above-described problems, and provides a piezoelectric oscillation device capable of suppressing the occurrence of divided vibrations, and an electronic apparatus using such an oscillation device. .

本発明の発振装置は、枠状の支持フレームと、支持フレームに外周部で支持されている扁平な振動部材と、振動部材の少なくとも一面に配置されていて振動部材より高剛性な弾性部材と、弾性部材の少なくとも一面に配置されていて電界の印加により伸縮運動する圧電素子と、圧電素子の周縁部を補強する補強部材と、を有する。   The oscillation device of the present invention includes a frame-shaped support frame, a flat vibration member supported on the support frame at the outer peripheral portion, an elastic member disposed on at least one surface of the vibration member and having higher rigidity than the vibration member, The piezoelectric element is disposed on at least one surface of the elastic member and expands and contracts when an electric field is applied, and a reinforcing member that reinforces the peripheral edge of the piezoelectric element.

本発明の第一の電子機器は、本発明の発振装置と、発振装置に可聴域の音波に復調される超音波を出力させる発振駆動部と、を有する。   A first electronic device according to the present invention includes the oscillation device according to the present invention and an oscillation drive unit that causes the oscillation device to output an ultrasonic wave demodulated into an audible sound wave.

本発明の第二の電子機器は、本発明の発振装置と、発振装置に超音波を出力させる発振駆動部と、発振装置から発振されて測定対象物で反射した超音波を検知する超音波検知部と、検知された超音波から測定対象物までの距離を算出する測距部と、を有する。   A second electronic device according to the present invention includes an oscillation device according to the present invention, an oscillation drive unit that outputs an ultrasonic wave to the oscillation device, and an ultrasonic detection that detects an ultrasonic wave oscillated from the oscillation device and reflected from a measurement object. And a distance measuring unit that calculates a distance from the detected ultrasonic wave to the measurement object.

なお、本発明の各種の構成要素は、必ずしも個々に独立した存在である必要はなく、複数の構成要素が一個の部材として形成されていること、一つの構成要素が複数の部材で形成されていること、ある構成要素が他の構成要素の一部であること、ある構成要素の一部と他の構成要素の一部とが重複していること、等でもよい。   The various components of the present invention do not necessarily have to be independent of each other. A plurality of components are formed as a single member, and a single component is formed of a plurality of members. It may be that a certain component is a part of another component, a part of a certain component overlaps with a part of another component, or the like.

本発明の発振装置は、圧電素子の周縁部が補強部材で補強されている。分割振動モードにおいては、弾性部材の周縁部と中心部とが互いに異なる位相で変形する。このため、分割振動の節目となる圧電素子の周縁部が補強されているので、その剛性を局所的に強化することができる。従って、分割振動の発生を抑制することができる。   In the oscillation device of the present invention, the peripheral portion of the piezoelectric element is reinforced by the reinforcing member. In the split vibration mode, the peripheral edge portion and the central portion of the elastic member are deformed at different phases. For this reason, since the peripheral part of the piezoelectric element that becomes a node of the divided vibration is reinforced, the rigidity thereof can be locally strengthened. Therefore, occurrence of divided vibration can be suppressed.

本発明の実施の形態の発振装置である電気音響変換器の構造を示す模式的な縦断正面図である。It is a typical longitudinal section front view showing the structure of the electroacoustic transducer which is an oscillation device of an embodiment of the invention. 電気音響変換器の構造を示す模式的な平面図である。It is a typical top view which shows the structure of an electroacoustic transducer. 一変形例の発振装置である電気音響変換器の構造を示す模式的な平面図である。It is a typical top view which shows the structure of the electroacoustic transducer which is an oscillation apparatus of one modification.

本実施の形態の発振装置である電気音響変換器100を図1および図2を参照して以下に説明する。本実施の形態の電気音響変換器100は、図1に示すように、枠状の支持フレーム110と、支持フレーム110に外周部で支持されている扁平な振動フィルム121と、振動部材である振動フィルム121の少なくとも一面に配置されていて振動フィルム121より高剛性な弾性部材122と、弾性部材122の少なくとも一面に配置されていて電界の印加により伸縮運動する圧電素子123と、圧電素子123の周縁部を補強する補強部材130と、を有する。   An electroacoustic transducer 100 that is an oscillation device of the present embodiment will be described below with reference to FIGS. 1 and 2. As shown in FIG. 1, the electroacoustic transducer 100 according to the present embodiment includes a frame-shaped support frame 110, a flat vibration film 121 supported on the support frame 110 at the outer peripheral portion, and vibration that is a vibration member. An elastic member 122 that is disposed on at least one surface of the film 121 and has higher rigidity than the vibration film 121, a piezoelectric element 123 that is disposed on at least one surface of the elastic member 122 and expands and contracts when an electric field is applied, and the periphery of the piezoelectric element 123 And a reinforcing member 130 for reinforcing the part.

補強部材130は、図1および図2に示すように、少なくとも圧電素子123より高剛性で圧電素子123の周縁部に埋設されている複数の軸状部材131からなり、軸状部材131は金属棒からなる。軸状部材131は高剛性な金属棒であれば利用できる。   As shown in FIGS. 1 and 2, the reinforcing member 130 is composed of a plurality of shaft-shaped members 131 that are at least more rigid than the piezoelectric elements 123 and are embedded in the periphery of the piezoelectric elements 123. The shaft-shaped members 131 are metal rods. Consists of. The shaft-like member 131 can be used as long as it is a highly rigid metal rod.

また、本実施の形態の電気音響変換器100では、図1に示すように、軸状部材131が圧電素子123から弾性部材122まで埋設されている。なお、本実施の形態の電気音響変換器100は、図2に示すように、圧電素子123と弾性部材122と振動フィルム121とが同心円状の平面形状に形成されており、軸状部材131は平面形状が円形の圧電素子123の周縁部に略等間隔に配置されている。   Moreover, in the electroacoustic transducer 100 of this Embodiment, as shown in FIG. 1, the shaft-shaped member 131 is embed | buried from the piezoelectric element 123 to the elastic member 122. As shown in FIG. In the electroacoustic transducer 100 according to the present embodiment, as shown in FIG. 2, the piezoelectric element 123, the elastic member 122, and the vibration film 121 are formed in a concentric planar shape, and the shaft-shaped member 131 is The planar shape is arranged at substantially equal intervals around the periphery of the piezoelectric element 123 having a circular shape.

より詳細には、圧電素子123の両面には電極層124も形成されており、この電極層124と圧電素子123と弾性部材122と振動フィルム121とで圧電振動子120が形成されている。このような圧電振動子120に、発振駆動部であるドライバ回路140が結線されている。このドライバ回路140が圧電振動子120を駆動することにより、圧電素子123は20kHz以上の超音波帯域の周波数で発振する。   More specifically, an electrode layer 124 is also formed on both surfaces of the piezoelectric element 123, and the piezoelectric layer 120 is formed by the electrode layer 124, the piezoelectric element 123, the elastic member 122, and the vibration film 121. A driver circuit 140 that is an oscillation drive unit is connected to such a piezoelectric vibrator 120. When the driver circuit 140 drives the piezoelectric vibrator 120, the piezoelectric element 123 oscillates at an ultrasonic band frequency of 20 kHz or more.

なお、金属棒からなる軸状部材131は電極層124も貫通しているが、例えば、電極層124の貫通孔を軸状部材131より大径に形成し、その間隙に絶縁体を成膜することなどで、軸状部材131と電極層124とは相互に絶縁されている。ただし、軸状部材131を部分的に電極層124に導通させることで、軸状部材131を電極層124の接続端子として利用することもできる。   The shaft member 131 made of a metal rod also penetrates the electrode layer 124. For example, the through hole of the electrode layer 124 is formed with a larger diameter than the shaft member 131, and an insulator is formed in the gap. Thus, the shaft member 131 and the electrode layer 124 are insulated from each other. However, the shaft-shaped member 131 can be used as a connection terminal of the electrode layer 124 by partially connecting the shaft-shaped member 131 to the electrode layer 124.

また、本実施の形態の電気音響変換器100では、例えば、樹脂製の振動フィルム121の縦弾性係数が金属製の弾性部材122の縦弾性係数の1/50以下であり、弾性部材122と振動フィルム121の厚み比が略3:1である。   In the electroacoustic transducer 100 of the present embodiment, for example, the longitudinal elastic coefficient of the resin vibration film 121 is 1/50 or less of the longitudinal elastic coefficient of the metal elastic member 122, and the elastic member 122 vibrates. The thickness ratio of the film 121 is approximately 3: 1.

圧電素子123は、圧電効果を有する材料であれば、無機材料、有機材料ともに特に限定されないが、電気機械変換効率が高い材料、例えば、ジルコン酸チタン酸鉛(PZT)や、チタン酸バリウム(BaTiO)などの材料が使用可能である。また、厚みは特に限定されないが、10μm〜1mmであることが好ましい。 The piezoelectric element 123 is not particularly limited as long as it is a material having a piezoelectric effect. However, a material having high electromechanical conversion efficiency, such as lead zirconate titanate (PZT) or barium titanate (BaTiO 3). Materials such as 3 ) can be used. Moreover, although thickness is not specifically limited, It is preferable that they are 10 micrometers-1 mm.

脆性材料であるセラミック材料として厚み10μm未満の薄膜を使用した場合、取り扱い時に機械強度の弱さから、欠けや破損などが生じて、取り扱いが困難となる。また、厚み1mmを超えるセラミックを使用した場合は電気エネルギから機械エネルギに変換する変換効率が著しく低下し、電気音響変換器100として充分な性能が得られない。一般的に、電気信号の入力により電歪効果を発生させる圧電セラミックにおいては、その変換効率は電界強度に依存する。この電界強度は分極方向に対する厚み/入力電圧で表されることから、厚みの増加は必然的に変換効率の低下を招いてしまう問題がある。   When a thin film having a thickness of less than 10 μm is used as a ceramic material which is a brittle material, chipping or breakage occurs due to weak mechanical strength during handling, making handling difficult. In addition, when a ceramic having a thickness exceeding 1 mm is used, the conversion efficiency for converting electrical energy into mechanical energy is remarkably lowered, and sufficient performance as the electroacoustic transducer 100 cannot be obtained. In general, in a piezoelectric ceramic that generates an electrostrictive effect by inputting an electric signal, the conversion efficiency depends on the electric field strength. Since the electric field strength is expressed by the thickness / input voltage with respect to the polarization direction, an increase in thickness inevitably causes a decrease in conversion efficiency.

本発明の圧電素子123には電界を発生させるために主面に電極層124が形成されている。その材料は特に限定されないが、例えば、銀や銀/パラジウムを使用することが可能である。銀は低抵抗な汎用的な電極材料して使用されており、製造プロセスやコストなどに利点があり、銀/パラジウムは耐酸化に優れた低抵抗材料であるため、信頼性の観点から利点がある。   In the piezoelectric element 123 of the present invention, an electrode layer 124 is formed on the main surface in order to generate an electric field. Although the material is not particularly limited, for example, silver or silver / palladium can be used. Silver is used as a general-purpose electrode material with low resistance, which has advantages in manufacturing process and cost. Silver / palladium is a low-resistance material with excellent oxidation resistance, so it has advantages from the viewpoint of reliability. is there.

また、電極層124の厚みは特に限定されないが、その厚みが1〜100μmであるのが好ましい。厚み1μm未満では、膜厚が薄いため、均一に成形できず、変換効率が低下する可能性がある。また、電極層124の膜厚が100μmを超える場合は、製造上に特に問題はないが、電極層124が圧電素子123のセラミック材料に対して拘束面となり、エネルギ変換効率を低下させてしまう問題点がある。   Moreover, the thickness of the electrode layer 124 is not particularly limited, but the thickness is preferably 1 to 100 μm. If the thickness is less than 1 μm, since the film thickness is thin, it cannot be uniformly formed, and conversion efficiency may be reduced. In addition, when the thickness of the electrode layer 124 exceeds 100 μm, there is no particular problem in manufacturing, but the electrode layer 124 becomes a constraining surface with respect to the ceramic material of the piezoelectric element 123 and the energy conversion efficiency is lowered. There is a point.

弾性部材122には、金属や樹脂など脆性材料であるセラミックに対して高い弾性率を持つ材料であれば特に限定されないが、加工性やコストの観点からリン青銅やステンレスなどの汎用材料が使用される。また、厚みについては、5〜1000μmであることが好ましい。厚みが5μm未満の場合、機械強度が弱く、拘束部材として機能を損なうことや、加工精度の低下により、製造ロット間で振動子の機械振動特性のばらつきが生じてしまう問題点がある。   The elastic member 122 is not particularly limited as long as it is a material having a high elastic modulus with respect to a ceramic that is a brittle material such as metal or resin, but a general-purpose material such as phosphor bronze or stainless steel is used from the viewpoint of workability and cost. The Moreover, about thickness, it is preferable that it is 5-1000 micrometers. When the thickness is less than 5 μm, there is a problem that mechanical strength is weak, the function as a restraining member is impaired, and the mechanical vibration characteristics of the vibrators vary between manufacturing lots due to a decrease in processing accuracy.

振動フィルム121は、縦弾性係数が、100GPa以下の高分子材料であれば特に限定されないが、汎用性の観点から、ポリエチレンテレフタレートや、ポリエチレン、ウレタン、シリコンゴム、天然ゴム、合成ゴム、などの使用が可能である。   The vibration film 121 is not particularly limited as long as the longitudinal elastic modulus is a polymer material of 100 GPa or less, but from the viewpoint of versatility, use of polyethylene terephthalate, polyethylene, urethane, silicone rubber, natural rubber, synthetic rubber, or the like Is possible.

また、厚みが1000μmを超える場合は、剛性増による圧電素子123への拘束が強まり、振動変位量の減衰を生じさせてしまう問題点がある。また、本実施形態の弾性部材122は、材料の剛性を示す指標である縦弾性係数が、1〜500GPaであることが好ましい。上述のように、弾性部材122の剛性が過度に低い場合や、過度に高い場合は、機械振動子として特性や信頼性を損なう問題点がある。   Further, when the thickness exceeds 1000 μm, there is a problem in that the restraint on the piezoelectric element 123 due to the increase in rigidity is strengthened and the vibration displacement amount is attenuated. In addition, the elastic member 122 of the present embodiment preferably has a longitudinal elastic modulus, which is an index indicating the rigidity of the material, of 1 to 500 GPa. As described above, when the rigidity of the elastic member 122 is excessively low or excessively high, there is a problem that characteristics and reliability are impaired as a mechanical vibrator.

音波発生のメカニズムは、圧電素子123への電界の印加により発生する伸縮運動を利用する。また、超音波の周波数は20kHz以上に限定する。圧電素子123は機械品質係数Qが高いため、基本共振の近傍にエネルギが集中するため、基本共振周波数では高い音圧レベルを得ることができるが、その他の周波数帯域では、音圧が減衰してしまう。   As a mechanism for generating sound waves, an expansion and contraction motion generated by applying an electric field to the piezoelectric element 123 is used. Moreover, the frequency of an ultrasonic wave is limited to 20 kHz or more. Since the piezoelectric element 123 has a high mechanical quality factor Q, energy is concentrated in the vicinity of the basic resonance, so that a high sound pressure level can be obtained at the basic resonance frequency, but in other frequency bands, the sound pressure is attenuated. End up.

本実施の形態の電気音響変換器100は、特定周波数に限定した超音波を発振させるため、むしろ、圧電素子123の機械品質係数Qが高いことが特性として優位となる。また、圧電振動子の基本共振周波数は圧電素子123の形状に影響を受けるため、高い周波数帯域、例えば、超音波帯域に共振周波数を調整する場合、小型化に優位となる。   Since the electroacoustic transducer 100 of this embodiment oscillates an ultrasonic wave limited to a specific frequency, it is rather advantageous in that the mechanical quality factor Q of the piezoelectric element 123 is high. Further, since the basic resonance frequency of the piezoelectric vibrator is affected by the shape of the piezoelectric element 123, when the resonance frequency is adjusted to a high frequency band, for example, an ultrasonic band, it is advantageous for miniaturization.

なお、本実施の形態の電気音響変換器100は、FM(Frequency Modulation)やAM(Amplitude Modulation)変調させた超音波を発振させ、空気の非線形状態(疎密状態)を利用して、変調波を復調させ可聴音を再生する、いわゆるパラメトリックスピーカの原理に基づいて音響再生を行う。本実施の形態の電気音響変換器100では、圧電素子123は、高周波数帯域の発振に限定した構成になるため、小型化が可能となる。   The electroacoustic transducer 100 according to the present embodiment oscillates FM (Frequency Modulation) or AM (Amplitude Modulation) -modulated ultrasonic waves, and uses a nonlinear state (sparse / dense state) of air to generate a modulated wave. Sound reproduction is performed based on the principle of a so-called parametric speaker that demodulates and reproduces audible sound. In the electroacoustic transducer 100 of the present embodiment, the piezoelectric element 123 has a configuration limited to oscillation in a high frequency band, and thus can be miniaturized.

上述のような構成において、本構成の圧電型の電気音響変換器100では、分割振動の節目となる圧電素子123の周縁部に複数の軸状部材131が埋設されているため、この複数の軸状部材131からなる補強部材130で剛性を局所的に強化でき、分割振動の姿態を変形することが可能である。すなわち、分割振動の抑制により、音波の干渉を抑制でき、音圧レベルを増加させることが可能である。   In the above-described configuration, in the piezoelectric electroacoustic transducer 100 of the present configuration, a plurality of shaft-like members 131 are embedded in the peripheral portion of the piezoelectric element 123 serving as a split vibration node, and thus the plurality of shafts It is possible to locally enhance the rigidity by the reinforcing member 130 made of the member 131 and to change the form of the divided vibration. That is, by suppressing the divided vibration, it is possible to suppress the interference of sound waves and increase the sound pressure level.

特に、軸状部材131が圧電素子123と弾性部材122を通貫しているため、外形形状に変化を与えない点も利点である。また、金属板からなる弾性部材122と金属棒からなる軸状部材131とを接合できるため、圧電素子123と弾性部材122との接合強度を高めることもできる。また、局所的に絶縁処理することで、電気接続端子としても利用することができ、製造容易性が向上する。   In particular, since the shaft-shaped member 131 penetrates the piezoelectric element 123 and the elastic member 122, there is an advantage that the outer shape is not changed. Further, since the elastic member 122 made of a metal plate and the shaft-like member 131 made of a metal rod can be joined, the joining strength between the piezoelectric element 123 and the elastic member 122 can also be increased. Moreover, by performing the insulation treatment locally, it can be used as an electrical connection terminal, and the manufacturability is improved.

また、本実施の形態の電気音響変換器100の圧電振動子120の動作原理は、圧電素子123への電界印加の際に発生する伸縮運動を利用するものである。発振する周波数は20kHz以上の超音波帯域が好ましい。発振周波数を超音波帯域にすることで、圧電振動子120を小型化できると同時に、超音波の直進性を利用して指向性を制御することが可能となる。その応用例として、音声信号を超音波に搬送させて、空気中で復調させるパラメトリックスピーカにも利用できる。   Further, the operation principle of the piezoelectric vibrator 120 of the electroacoustic transducer 100 of the present embodiment utilizes the expansion and contraction motion that occurs when an electric field is applied to the piezoelectric element 123. The oscillation frequency is preferably an ultrasonic band of 20 kHz or more. By setting the oscillation frequency to the ultrasonic band, the piezoelectric vibrator 120 can be miniaturized and the directivity can be controlled using the straightness of the ultrasonic wave. As an application example thereof, the present invention can also be used for a parametric speaker in which an audio signal is conveyed to an ultrasonic wave and demodulated in the air.

さらに、本実施の形態の電気音響変換器100は、振動時に応力が集中する端部が柔軟性に富む樹脂製の振動フィルム121で構成されている。すなわち、落下時の衝撃エネルギーを樹脂製の振動フィルム121で吸収することができるため、落下強度を向上させることができる。   Furthermore, the electroacoustic transducer 100 according to the present embodiment is composed of a resin-made vibration film 121 having a flexible end portion where stress is concentrated during vibration. That is, since the impact energy at the time of dropping can be absorbed by the resin vibration film 121, the dropping strength can be improved.

また、本構成の電気音響変換器100では、支持フレーム110と弾性部材122との間にある端部が振動フィルム121の樹脂で構成されている。すなわち、柔軟性に富む樹脂製の振動フィルム121が振動の端部に位置することで、端部の可動範囲が拡大し、振動姿態はよりピストン状に近づき、振動の際の体積排除量は拡大する。音圧レベルは、振動の際の空気への体積排除量に依存することから、本構成の電気音響変換器100では優位な特性を実現することができる。   Moreover, in the electroacoustic transducer 100 of this structure, the edge part between the support frame 110 and the elastic member 122 is comprised with resin of the vibration film 121. FIG. In other words, the flexible resin vibration film 121 located at the end of vibration expands the movable range of the end, the vibration state becomes closer to a piston shape, and the volume exclusion amount during vibration increases. To do. Since the sound pressure level depends on the volume exclusion amount to the air at the time of vibration, the electroacoustic transducer 100 having this configuration can realize superior characteristics.

なお、本発明は本実施の形態に限定されるものではなく、その要旨を逸脱しない範囲で各種の変形を許容する。例えば、上記形態では圧電素子123と弾性部材122と振動フィルム121とは相似形状に形成されており、同心円状に形成されていることを例示した。   The present invention is not limited to the present embodiment, and various modifications are allowed without departing from the scope of the present invention. For example, in the above embodiment, the piezoelectric element 123, the elastic member 122, and the vibration film 121 are formed in a similar shape and illustrated as being concentrically formed.

しかし、図3に発振装置として例示する電気音響変換器200のように、圧電素子123と弾性部材122と振動フィルム121と支持フレーム110とが多角形である正方形の相似形状に形成されており、その角部に補強部材130である軸状部材131が埋設されていてもよい。   However, like the electroacoustic transducer 200 illustrated as an oscillation device in FIG. 3, the piezoelectric element 123, the elastic member 122, the vibration film 121, and the support frame 110 are formed in a polygonal square similar shape, A shaft-like member 131 that is a reinforcing member 130 may be embedded in the corner portion.

また、上記形態では振動フィルム121の片面に圧電振動子120が形成されているモノモルフ構造の電気音響変換器100を例示した。しかし、振動フィルム121の両面に圧電振動子120が形成されているバイモルフ構造も実施可能である(図示せず)。その場合、一対の弾性部材の直径を相違させることにより、振動フィルムの両面に一個ずつ装着されている圧電振動子の構造を相違させることもできる。また、直径は同一のまま一対の弾性部材の板厚を相違させてもよく、圧電素子の直径や板厚を相違させてもよい(何れも図示せず)。   Moreover, in the said form, the electroacoustic transducer 100 of the monomorph structure in which the piezoelectric vibrator 120 was formed in the single side | surface of the vibration film 121 was illustrated. However, a bimorph structure in which the piezoelectric vibrator 120 is formed on both surfaces of the vibration film 121 can also be implemented (not shown). In that case, by making the diameters of the pair of elastic members different, it is possible to make the structures of the piezoelectric vibrators attached to both surfaces of the vibration film one by one different. In addition, the plate thickness of the pair of elastic members may be different with the same diameter, and the diameter and plate thickness of the piezoelectric element may be different (none is shown).

また、上記形態では電気音響変換器100に発振駆動部であるドライバ回路140が接続されている電子機器を想定した。しかし、このような電気音響変換器100と、電気音響変換器100に超音波を出力させる発振駆動部と、電気音響変換器100から発振されて測定対象物で反射した超音波を検知する超音波検知部と、検知された超音波から測定対象物までの距離を算出する測距部と、を有するソナーなどの電子機器(図示せず)も実施可能である。   Further, in the above embodiment, an electronic apparatus in which the electroacoustic transducer 100 is connected to the driver circuit 140 that is an oscillation driving unit is assumed. However, such an electroacoustic transducer 100, an oscillation drive unit that outputs an ultrasonic wave to the electroacoustic transducer 100, and an ultrasonic wave that is detected from the ultrasonic wave that is oscillated from the electroacoustic transducer 100 and reflected by the measurement object. An electronic device (not shown) such as a sonar that includes a detection unit and a distance measurement unit that calculates a distance from the detected ultrasonic wave to the measurement target can also be implemented.

なお、当然ながら、上述した実施の形態および複数の変形例は、その内容が相反しない範囲で組み合わせることができる。また、上述した実施の形態および変形例では、各部の構造などを具体的に説明したが、その構造などは本願発明を満足する範囲で各種に変更することができる。   Needless to say, the above-described embodiment and a plurality of modifications can be combined within a range in which the contents do not conflict with each other. Further, in the above-described embodiments and modifications, the structure of each part has been specifically described, but the structure and the like can be changed in various ways within a range that satisfies the present invention.

100 電気音響変換器
110 支持フレーム
120 圧電振動子
121 振動フィルム
122 弾性部材
123 圧電素子
124 電極層
130 補強部材
131 軸状部材
140 ドライバ回路
200 電気音響変換器
DESCRIPTION OF SYMBOLS 100 Electroacoustic transducer 110 Support frame 120 Piezoelectric vibrator 121 Vibration film 122 Elastic member 123 Piezoelectric element 124 Electrode layer 130 Reinforcing member 131 Axial member 140 Driver circuit 200 Electroacoustic transducer

Claims (9)

枠状の支持フレームと、
前記支持フレームに外周部で支持されている扁平な振動部材と、
前記振動部材の少なくとも一面に配置されていて前記振動部材より高剛性な弾性部材と、
前記弾性部材の少なくとも一面に配置されていて電界の印加により伸縮運動する圧電素子と、
前記圧電素子の周縁部を補強する補強部材と、
を有する発振装置。
A frame-shaped support frame;
A flat vibration member supported at the outer periphery of the support frame;
An elastic member disposed on at least one surface of the vibration member and having a higher rigidity than the vibration member;
A piezoelectric element that is disposed on at least one surface of the elastic member and that expands and contracts by application of an electric field;
A reinforcing member for reinforcing the peripheral edge of the piezoelectric element;
An oscillation device having
前記補強部材は、少なくとも前記圧電素子より高剛性で前記圧電素子の周縁部に埋設されている複数の軸状部材からなる請求項1に記載の発振装置。   2. The oscillation device according to claim 1, wherein the reinforcing member includes a plurality of shaft-like members that are at least more rigid than the piezoelectric element and are embedded in a peripheral portion of the piezoelectric element. 前記軸状部材は金属棒からなる請求項2に記載の発振装置。   The oscillation device according to claim 2, wherein the shaft-shaped member is made of a metal rod. 前記軸状部材が前記圧電素子から前記弾性部材まで埋設されている請求項2または3に記載の発振装置。   The oscillation device according to claim 2, wherein the shaft-like member is embedded from the piezoelectric element to the elastic member. 前記圧電素子と前記弾性部材と前記振動部材とが同心円状の平面形状に形成されており、
前記軸状部材は平面形状が円形の前記圧電素子の周縁部に略等間隔に配置されている請求項2ないし4の何れか一項に記載の発振装置。
The piezoelectric element, the elastic member, and the vibration member are formed in a concentric planar shape,
5. The oscillation device according to claim 2, wherein the shaft-like members are arranged at substantially equal intervals on a peripheral portion of the piezoelectric element having a circular planar shape.
前記圧電素子と前記弾性部材と前記振動部材とが多角形の相似形状の平面形状に形成されており、
前記軸状部材は前記圧電素子の複数の角部に配置されている請求項2ないし4の何れか一項に記載の発振装置。
The piezoelectric element, the elastic member, and the vibration member are formed in a polygonal similar planar shape,
The oscillation device according to claim 2, wherein the shaft-shaped member is disposed at a plurality of corners of the piezoelectric element.
前記圧電素子が20kHz以上の超音波帯域の周波数で発振する請求項1ないし6の何れか一項に記載の発振装置。   The oscillation device according to any one of claims 1 to 6, wherein the piezoelectric element oscillates at a frequency in an ultrasonic band of 20 kHz or more. 請求項1ないし7の何れか一項に記載の発振装置と、
前記発振装置に可聴域の音波に復調される超音波を出力させる発振駆動部と、
を有する電子機器。
The oscillation device according to any one of claims 1 to 7,
An oscillation driver for outputting an ultrasonic wave demodulated into an audible sound wave to the oscillation device;
Electronic equipment having
請求項1ないし7の何れか一項に記載の発振装置と、
前記発振装置に超音波を出力させる発振駆動部と、
前記発振装置から発振されて測定対象物で反射した前記超音波を検知する超音波検知部と、
検知された前記超音波から前記測定対象物までの距離を算出する測距部と、
を有する電子機器。
The oscillation device according to any one of claims 1 to 7,
An oscillation driver that outputs ultrasonic waves to the oscillation device;
An ultrasonic detector for detecting the ultrasonic wave oscillated from the oscillation device and reflected by the measurement object;
A distance measuring unit for calculating a distance from the detected ultrasonic wave to the measurement object;
Electronic equipment having
JP2010282668A 2010-12-20 2010-12-20 Oscillation device and electronic apparatus Withdrawn JP2012134595A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010282668A JP2012134595A (en) 2010-12-20 2010-12-20 Oscillation device and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010282668A JP2012134595A (en) 2010-12-20 2010-12-20 Oscillation device and electronic apparatus

Publications (1)

Publication Number Publication Date
JP2012134595A true JP2012134595A (en) 2012-07-12

Family

ID=46649710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010282668A Withdrawn JP2012134595A (en) 2010-12-20 2010-12-20 Oscillation device and electronic apparatus

Country Status (1)

Country Link
JP (1) JP2012134595A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101981174B1 (en) * 2018-06-05 2019-05-22 주식회사 티에이 A speaker unit with an air cleaning

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101981174B1 (en) * 2018-06-05 2019-05-22 주식회사 티에이 A speaker unit with an air cleaning

Similar Documents

Publication Publication Date Title
JP5954181B2 (en) Oscillator and electronic device
JP5761192B2 (en) Oscillator and electronic device
JP5741580B2 (en) Oscillator
JP5682973B2 (en) Oscillator and electronic device
JPWO2012060041A1 (en) Oscillator and portable device
JP5939160B2 (en) Oscillator and electronic device
JP6107138B2 (en) Oscillator and electronic device
JP2012015755A (en) Oscillation device and electronic equipment
JP2012015758A (en) Oscillator, method for manufacturing the same and electronic device
JP2012134595A (en) Oscillation device and electronic apparatus
JP5958463B2 (en) Oscillator
JP2012015757A (en) Oscillation device and electronic equipment
JP2012134597A (en) Oscillation device and electronic apparatus
JP2012134599A (en) Oscillation device and electronic apparatus
JP5516180B2 (en) Oscillator and electronic device
JP2012134596A (en) Oscillation device and electronic apparatus
JP2012029078A (en) Oscillation device
JP5505165B2 (en) Oscillator
JP2012029105A (en) Oscillation device
JP2012134593A (en) Oscillation device and electronic apparatus
JP2012134598A (en) Oscillator and electronic apparatus
JP2012134594A (en) Oscillation device and electronic apparatus
JP5691410B2 (en) Oscillator
JP2014086941A (en) Electro-acoustic transducer and electronic apparatus
JP2012015756A (en) Electronic apparatus and oscillation unit

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20131218

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20140411