JP2012133848A - Load beam, suspension, suspension with head, hard disk drive, and method of manufacturing load beam - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a load beam that can prevent an actuator element from being damaged.SOLUTION: A load beam 61 includes a head-side beam 62 which is arranged on the side of a head part 2a of a suspension substrate 1, a tail-side beam 63 which is arranged on the side of a tail part 2b of the suspension substrate 1, and a flexible part 64 which is arranged between mounting areas 70 of a pair of actuator elements 54, and couples the head-side beam 62 and the tail-side beam 63 to each other. A pair of head-side support parts 65 which each extend from the head-side beam 62 toward the tail-side beam 63 and have an edge part 54e of the actuator element 54 attached on the opposite side from the flexible part 64 are provided on both sides of the flexible part 64. Further, a pair of tail-side support parts 66 which each extend from the tail-side beam 63 toward the head-side beam 62 and have the edge part 54e of the actuator element 54 attached on the opposite side from the flexible part 64 are provided on both sides of the flexible part 64.

Description

  The present invention relates to a load beam for supporting a suspension substrate, a suspension, a suspension with a head, a hard disk drive, and a method for manufacturing a load beam. , Hard disk drive and load beam manufacturing method.

  In general, a hard disk drive (HDD) includes a suspension board on which a magnetic head slider for writing and reading data to and from a disk storing data is mounted. The suspension substrate includes a metal support layer and a wiring layer having a plurality of wirings stacked on the metal support layer with an insulating layer interposed therebetween. It is designed to write or read data.

  In such a hard disk drive, in order to move the magnetic head slider to a desired data track on the disk, a VCM actuator (for example, a voice coil motor) that rotates an actuator arm that supports the magnetic head slider is used as a servo control system. Is controlled by.

  By the way, in recent years, the track width has been reduced by increasing the density of the disk. For this reason, it may be difficult to accurately align the magnetic head slider to a desired track by the VCM actuator.

  In order to cope with this, a dual actuator type suspension is known in which a VCM actuator and a PZT microactuator (Dual Stage Actuator: DSA) cooperate to move a magnetic head slider to a desired track (for example, , See Patent Document 1). This PZT microactuator is constituted by a piezoelectric element such as a piezoelectric element made of PZT (lead zirconate titanate), and expands and contracts when a voltage is applied to move the magnetic head slider minutely. In such a dual actuator type suspension, the VCM actuator roughly adjusts the position of the magnetic head slider, and the PZT microactuator finely adjusts the position of the magnetic head slider. In this way, the magnetic head slider is aligned with a desired track quickly and accurately.

JP 2010-86649 A

  In the suspension shown in Patent Document 1, a rectangular parallelepiped piezoelectric element is embedded in an opening of a base plate, and the piezoelectric element includes a leading edge (head side edge) and a trailing edge (tail side). Edge) and is joined to the base plate. However, the two edges of the piezoelectric element along the longitudinal direction of the suspension substrate are not joined to the base plate. For this reason, there is a problem that the piezoelectric element is damaged when a load, an impact, or the like is applied to the brittle piezoelectric element in the lateral direction and the thickness direction.

  The present invention has been made in consideration of such points, and provides a load beam, a suspension, a suspension with a head, a hard disk drive, and a method of manufacturing a load beam that can prevent damage to an actuator element. Objective.

  The present invention provides a suspension substrate head for a load beam that extends from a head portion on which a slider is mounted to a tail portion connected to an external device and supports a suspension substrate connectable to a pair of rectangular parallelepiped actuator elements. The head side beam is arranged on the part side and joined to the head part side edge of each actuator element to be mounted, and the tail part side edge of each actuator element is arranged on the tail part side of the suspension substrate. A head-side beam is disposed between the tail-side beam to be joined and the mounting region of the pair of actuator elements, and is provided on both sides of the flexible portion with a flexible portion connecting the head-side beam and the tail-side beam. A pair of heads that extend from the tail side beam to the edge of the actuator element opposite to the flexible part A pair of tail side support portions that are provided on both sides of the flexible portion, extend from the tail side beam toward the head side beam, and are joined to the edge of the actuator element on the opposite side of the flexible portion; A load beam is provided.

  In the load beam described above, the head side support portion is erected on each head side support portion, and the head side wall portion to which the edge of the actuator element on the side opposite to the flexible portion is joined, and each tail side support portion is erected. And a tail side wall portion to which an edge portion of the actuator element opposite to the flexible portion is joined.

  In the load beam described above, each head side support portion is preferably connected to a corresponding tail side support portion.

  In the load beam described above, it is preferable that the head side beam and the tail side beam are provided with insulating bases interposed between the mounted actuator elements.

  The present invention includes a base plate, any one of the load beams described above, and a suspension substrate attached to the base plate via the load beam and extending from a head portion on which the slider is mounted to a tail portion connected to an external device. A suspension comprising: a pair of rectangular parallelepiped actuator elements which are bonded to a load beam and connectable to a suspension substrate.

  In the suspension described above, it is preferable that the edge portion of each actuator element on the flexible portion side of the load beam is joined to the flexible portion.

  In the suspension described above, the edge of each actuator element on the flexible part side of the load beam is joined to the flexible part by the first adhesive, and the edge of each actuator element on the side opposite to the flexible part. Is bonded to the head side support portion and the tail side support portion by the first adhesive, and the edge of each actuator element on the head portion side is bonded to the head side beam of the load beam by the second adhesive, The edge of each actuator element on the tail portion side is preferably joined to the tail side beam by the second adhesive, and the second adhesive preferably has a higher elastic modulus than the first adhesive.

  In the suspension described above, it is preferable that the first adhesive has a lower elastic modulus than the load beam, and the second adhesive has a higher elastic modulus than the load beam.

  In the suspension described above, it is preferable that the edge of each actuator element on the head portion side and the edge of each actuator element on the tail portion side are joined to the base plate by the second adhesive.

  The present invention provides a suspension with a head comprising any one of the suspensions described above and a slider mounted on the suspension.

  The present invention provides a hard disk drive including the above-described suspension with a head.

  The present invention relates to a method of manufacturing a load beam that extends from a head portion on which a slider is mounted to a tail portion connected to an external device and supports a suspension substrate connectable to a pair of rectangular parallelepiped actuator elements. A step of preparing a material plate, a head side beam that is arranged on the head portion side of the suspension substrate and is joined to a head portion side edge of the mounted actuator element, and a tail portion side of the suspension substrate. A tail-side beam to which the edge of each actuator element on the tail portion side is joined, a flexible part that is disposed between the mounting area of the pair of actuator elements, and that connects the head-side beam and the tail-side beam; It is provided on both sides of the flexible part, extends from the head side beam toward the tail side beam, and is on the side opposite to the flexible part. A pair of head side support portions to which the edge portions of the actuator elements are joined, and provided on both sides of the flexible portion, extend from the tail side beam toward the head side beam, and the actuator element on the opposite side of the flexible portion. A pair of tail side support portions to which edges are joined, a head side wall panel extending from each head side support portion to the opposite side of the flexible portion, and extending from each tail side support portion to the opposite side of the flexible portion. A step of processing the load beam material plate so as to have a tail side wall panel, and bending each head side wall panel with respect to the corresponding head side support, and standing on the head side support. A head side wall portion to which the edge portion of the actuator element opposite to the flexible portion is joined is formed, and each tail side wall panel is bent with respect to a corresponding tail side support portion, and the tail side support portion is formed. Standing up The flexible portion to provide a method for manufacturing a load beam, characterized in that it comprises a step of forming a tail side walls edge of the actuator element on the opposite side is bonded.

  In the load beam manufacturing method described above, folding lines are formed between each head side wall panel and the corresponding head side support, and between each tail side wall panel and the corresponding tail side support. It is preferable that the method further includes the step of:

  In the above-described method for manufacturing a load beam, in the step of forming a folding line, the folding line is preferably formed by half etching.

  In the load beam manufacturing method described above, it is preferable that the step of processing the load beam material plate and the step of forming the folding curve are performed simultaneously.

  Further, in the load beam manufacturing method described above, before the step of processing the load beam material plate, a position corresponding to the head side beam and a position corresponding to the tail side beam are placed between the mounted actuator elements. It is preferable that the method further includes a step of providing an interposed insulating pedestal.

  Further, in the load beam manufacturing method described above, after the step of processing the load beam material plate and before the step of forming the head side wall portion and the tail side wall portion, the head side beam and the tail side beam are connected to the actuator element. It is preferable that the method further includes a step of providing an insulating base interposed therebetween.

  According to the present invention, the pair of head side support portions extend from the head side beam toward the tail side beam, and the pair of tail side support portions extend from the tail side beam toward the head side beam. The edge part on the opposite side to the flexible part of the actuator element mounted is joined to each tail side support part. As a result, the actuator elements can be firmly joined, and damage to the actuator elements can be prevented.

FIG. 1 is a plan view showing an example of a suspension according to a first embodiment of the present invention. FIG. 2 is a rear view of FIG. FIG. 3 is a plan view showing a base plate in the suspension according to the first embodiment of the present invention. FIG. 4 is a plan view showing a load beam according to the first embodiment of the present invention. FIG. 5 is a diagram showing a load beam blank plate according to the first embodiment of the present invention. 6 is a cross-sectional view taken along line AA in FIG. 7 is a cross-sectional view taken along line BB in FIG. FIG. 8 is a perspective view showing a piezo element in the suspension according to the first embodiment of the present invention. FIG. 9 is a plan view showing an example of a suspension with a head according to the first embodiment of the present invention. FIG. 10 is a perspective view showing an example of the hard disk drive according to the first embodiment of the present invention. FIGS. 11A to 11E are views showing an example of a method for manufacturing a load beam in the first embodiment of the present invention. 12A to 12E are views showing an example of a suspension manufacturing method according to the first embodiment of the present invention. FIG. 13 is a view showing a modification of the cross section taken along line AA of FIG. 2 in the suspension according to the first embodiment of the present invention. FIG. 14 is a view showing another modification of the load beam blank plate according to the first embodiment of the present invention. FIG. 15 is a plan view showing a load beam according to the second embodiment of the present invention. FIG. 16 is a cross-sectional view taken along line AA of FIG. 2 in the suspension according to the second embodiment of the present invention. FIG. 17 is a view showing a modification of the cross section taken along line AA of FIG. 2 in the suspension according to the second embodiment of the present invention. FIG. 18 is a plan view showing a load beam according to the third embodiment of the present invention. FIG. 19 is a cross-sectional view taken along line BB of FIG. 2 in the suspension according to the third embodiment of the present invention. 20A to 20F are views showing an example of a method for manufacturing a load beam according to the third embodiment of the present invention.

First Embodiment A method of manufacturing a load beam, a suspension, a suspension with a head, a hard disk drive, and a load beam according to a first embodiment of the present invention will be described with reference to FIGS.

  First, the suspension 51 according to the present embodiment will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the suspension 51 is mounted on and bonded to a base plate 52, a suspension substrate 1 attached to the base plate 52 via a load beam 61, and the suspension substrate 1. And a pair of rectangular parallelepiped piezo elements (actuator elements) 54 respectively connected to the pair of element connection portions 3a and 3b. Each piezo element 54 is disposed along a longitudinal axis (X) described later.

  Next, the suspension substrate 1 according to the present embodiment will be described with reference to FIG. As shown in FIG. 1, the suspension substrate 1 has a head portion 2a on which a slider 72 (see FIG. 9) described later is mounted, and a tail portion 2b connected to an external device (not shown). A substrate body 2 extending from the head portion 2a to the tail portion 2b, and a pair of element connection portions (first element connection portion 3a and second element connection portion) disposed on both sides of the substrate body 2 and connected to the piezoelectric element 54 3b). Among these, the head portion 2 a of the substrate body 2 is a portion on the slider 72 side (tip side) from the piezo element 54, extends linearly, and extends in the longitudinal direction axis (through the center of the slider 72 to be mounted ( X). The head portion 2a is provided with a plurality of head terminals 5 connected to the slider 72, and the tail portion 2b is provided with a plurality of external device connection terminals 6 connected to an external device. 5 and the external device connection terminal 6 are connected to each other via a plurality of wires 13 to be described later.

  In the present embodiment, the pair of element connection portions 3a and 3b are arranged symmetrically with respect to the longitudinal axis (X). Thus, the pair of piezo elements 54 can be arranged symmetrically with respect to the longitudinal axis (X), and the first displacement of the slider 72 in the sway direction (the turning direction, see FIG. 1) The influence of expansion / contraction of the piezo element 54 connected to the one element connection portion 3a and the influence of expansion / contraction of the piezo element 54 connected to the second element connection portion 3b can be equalized, and the sway direction of the slider 72 Can be easily adjusted.

  The suspension substrate 1 includes an insulating layer 10, a metal support layer 11 provided on the surface (one surface) of the insulating layer 10 on the piezoelectric element 54 side, and a plurality of substrates provided on the other surface of the insulating layer 10. And a wiring layer 12 having wirings 13. That is, the metal support layer 11, the insulating layer 10, and the wiring layer 12 are laminated in this order. A protective layer (not shown) that covers the wiring layer 12 is provided on the insulating layer 10.

  As shown in FIG. 1, each of the pair of element connection portions 3a and 3b includes a first element connection portion 3a and a second element connection portion 3b that are circular in a plan view. A circular element that is connected to one of the plurality of wirings 13 of the wiring layer 12 in the substrate body 2 and is electrically connected to the piezo element 54 via a conductive adhesive (for example, silver paste). A connection terminal 16 is provided. The element connection terminal 16 is made of the same material as each wiring 13, and is provided on the same plane (on the insulating layer 10) as each wiring 13 together with the head terminal 5 and the external device connection terminal 6 described above. The wiring layer 12 is configured.

  The substrate body 2 and the first element connecting portion 3a are connected via a first connecting portion 4a, and the substrate body 2 and the second element connecting portion 3b are connected via a second connecting portion 4b. In this way, the element connection terminals 16 of the element connection portions 3a and 3b are connected to one wiring 13 extending from the head terminal 5 of the substrate body 2 through the corresponding connection portions 4a and 4b. Yes. Each of the connecting portions 4 a and 4 b does not include the metal support layer 11, and has a laminated structure in which the insulating layer 10, the wiring layer 12, and the protective layer are laminated, and is more flexible than the substrate body 2. Have.

  The substrate body 2 is provided with two jig holes 25 for alignment with the load beam 61 when the load beam 61 is mounted. Each jig hole 25 is disposed on the longitudinal axis (X) of the head portion 2 a of the substrate body 2. That is, the longitudinal axis (X) passes through each jig hole 25.

  Next, the base plate 52 will be described with reference to FIG. 3. The base plate 52 is made of stainless steel, and is disposed on the head side plate 52a disposed on the head portion 2a side of the suspension substrate 1 and on the tail portion 2b side. The tail side plate 52b is disposed between the head side plate 52a and the tail side plate 52b. The flexible part 52c is disposed between the mounting region 70 of the pair of piezo elements 54.

  Next, the load beam 61 will be described with reference to FIG. The load beam 61 is for supporting the suspension substrate 1 and is made of stainless steel like the base plate 52. Such a load beam 61 includes a head side beam 62 disposed on the head portion 2 a side of the suspension substrate 1, a tail side beam 63 disposed on the tail portion 2 b side, and a pair of piezoelectric elements 54. A flexible portion 64 is disposed between the mounting areas 70 and connects the head side beam 62 and the tail side beam 63. Among these, the head side beam 62 is joined to the front end side edge portion 54c of the mounted piezo element 54, and the tail side beam 63 is joined to the rear end side edge portion 54d of the piezo element 54. ing.

  As shown in FIGS. 1, 2, and 4, one of the pair of piezo elements 54 includes a first tail side edge 62 a of the head side beam 62 and a first head of the tail side beam 63. It is joined to the side edge 63a. The other piezo element 54 is joined to the second tail side edge 62 b of the head side beam 62 and the second head side edge 63 b of the tail side beam 63. Further, as shown in FIGS. 6 and 7, each piezo element 54 is provided on each tail side edge 62a, 62b and each head side edge 63a, 63b on the surface of the load beam 61 on the base plate 52 side. It is joined. The first tail side edge 62a and the second tail side edge 62b of the head side beam 62 are positioned on both sides of the flexible portion 64, and the first head side edge 63a of the tail side beam 63 and The second head side edge portion 63 b is positioned on both sides of the flexible portion 64.

  As shown in FIG. 4, on both sides of the flexible portion 64, a pair of head sides from the first tail side edge portion 62 a and the second tail side edge portion 62 b of the head side beam 62 toward the tail side beam 63. The support part 65 extends. In addition, a pair of tail side support portions 66 extends from the first head side edge portion 63 a and the second head side edge portion 63 b of the tail side beam 63 toward the head side beam 62. The pair of head side support portions 65 and the pair of tail side support portions 66 are joined to the outer edge portions 54e of the corresponding piezoelectric elements 54. In the present embodiment, the head side support portions 65 are separated from each other without being connected to the corresponding tail side support portions 66.

  As shown in FIGS. 4, 6, and 7, a head side wall 67 extending to the corresponding piezo element 54 is erected on each head side support 65. Similarly, a tail side wall 68 extending to the corresponding piezo element 54 side is erected on each tail side support portion 66. The outer edge 54e of the corresponding piezo element 54 is also joined to each head side wall 67 and each tail side wall 68.

  As shown in FIG. 4, the load beam 61 is provided with beam jig holes 66 corresponding to the jig holes 25 of the suspension substrate 1. When the load beam 61 is bonded to the metal support layer 11, the suspension substrate 1 and the load beam 61 can be aligned.

  Such a load beam 61 is obtained from a load beam blank plate 61a shown in FIG. Here, the load beam blank plate 61 a includes a head side beam 62, a tail side beam 63, a flexible portion 64, a head side support portion 65, and a tail side support portion 66. A head side wall panel 67a extends from each head side support portion 65 to the opposite side of the flexible portion 64, and a tail side wall panel 68a extends from each tail side support portion 66 to the opposite side of the flexible portion 64. Yes. Between the head side support part 65 and the head side wall panel 67a and between the tail side support part 66 and the tail side wall panel 68a, folding lines 69 formed by half etching are respectively provided. By bending each head side wall panel 67a with respect to the corresponding head side support part 65, a head side wall part 67 is formed, and by bending each tail side wall panel 68a with respect to the corresponding tail side support part 66, A tail side wall 68 is formed. In FIG. 5, the folding line 69 is indicated by a broken line for convenience, but the folding line 69 may be formed in a straight line shape or a perforation shape. The folding line 69 is preferably formed on the side where the head side wall panel 67a and the tail side wall panel 68a are bent. Thus, the head side wall panel 67a and the tail side wall panel 68a can be easily bent.

  The piezo element 54 is configured as a piezoelectric element that expands and contracts when a voltage is applied. As shown in FIG. 8, each piezoelectric element 54 is interposed between a pair of electrodes 54a facing each other and a pair of electrodes 54a, and a piezoelectric material portion 54b made of a piezoelectric ceramic such as PZT (lead zirconate titanate), for example. And have. The piezoelectric material portions 54b of the pair of piezo elements 54 are formed to have polarization directions different from each other by 180 °, and when a predetermined voltage is applied, one piezo element 54 contracts and the other piezo element 54 54 extends. As shown in FIGS. 1 and 2, the piezo elements 54 are arranged symmetrically with respect to the longitudinal axis (X) of the head portion 2a. As a result, the displacement of the slider 72 in the sway direction is affected by the expansion / contraction of the piezo element 54 connected to the first element connection portion 3a, and the expansion / contraction of the piezo element 54 connected to the second element connection portion 3b. Therefore, the displacement of the slider 72 in the sway direction can be easily adjusted.

  Each piezo element 54 is bonded to the base plate 52 and the load beam 61 by a non-conductive adhesive. Here, as shown in FIG. 2, the piezo element 54 is formed in a rectangular parallelepiped shape, and has four edges in a plan view, that is, a tip side edge (an edge on the head portion 2 a side of the suspension substrate 1). Part) 54c, a rear end side edge part (an edge part on the tail portion 2b side) 54d, an outer edge part (an edge part opposite to the flexible part 64 of the load beam 61) 54e, and an inner edge part ( 54f of the flexible part 64 side). Among these, as shown in FIG. 6, the outer edge portion 54 e is connected to the head side support portion 65 and the tail side support portion 66 of the load beam 61 via the nonconductive adhesive portion 55 made of a nonconductive adhesive, and It is joined to the head side wall 67 and the tail side wall 68. The inner edge portion 54 f is joined to the flexible portion 52 c of the base plate 52 and the flexible portion 64 of the load beam 61 via the nonconductive adhesive portion 55. Further, as shown in FIG. 7, the front end side edge portion 54c is joined to the head side plate 52a of the base plate 52 and the head side beam 62 of the load beam 61 via the non-conductive adhesive portion 55, and the rear end side edge The portion 54 d is joined to the tail side plate 52 b of the base plate 52 and the tail side beam 63 of the load beam 61 via a non-conductive adhesive portion 55.

  Although not shown, one electrode 54a of the piezo element 54 (the side opposite to the suspension substrate 1) is electrically connected to the base plate 52 using a conductive adhesive, and the other piezo element 54 (suspension). The electrode 54a on the substrate 1 side) is bonded to the element connecting portions 3a and 3b using a conductive adhesive.

  Next, the suspension with head 71 in this embodiment will be described with reference to FIG. A suspension with head 71 shown in FIG. 9 has the suspension 51 described above and a slider 72 connected to the head terminal 5 of the suspension substrate 1.

  Next, the hard disk drive 81 in the present embodiment will be described with reference to FIG. A hard disk drive 81 shown in FIG. 10 is provided with a case 82, a disk 83 that is rotatably attached to the case 82, stores data, a spindle motor 84 that rotates the disk 83, and a desired flying height on the disk 83. And a suspension 71 with a head including a slider 72 for writing and reading data to and from the disk 83. Of these, the suspension with head 71 is movably attached to the case 82, and a voice coil motor 85 for moving the slider 72 of the suspension with head 71 along the disk 83 is attached to the case 82. . The suspension with head 71 is attached to the voice coil motor 85 via an arm 86.

  Next, an operation of the present embodiment having such a configuration, that is, a method for manufacturing the load beam 61 according to the present embodiment will be described. Here, description will be made with reference to FIG. 11 showing a cross section of the head side support portion 65 and the head side wall portion 67 of the load beam 61, but the tail side support portion 66 and the tail side wall portion 68 may be formed in the same manner. it can.

  First, as shown in FIG. 11A, a load beam material plate 61b made of stainless steel is prepared.

Subsequently, a resist 91 having a predetermined shape is formed on both surfaces of the load beam material plate 61b. In this case, first, as shown in FIG. 11B, an acrylic photosensitive dry film 91a is attached to both surfaces of the load beam material plate 61b. Thereafter, the dry film 91a is irradiated with ultraviolet rays through a photomask 92 having a predetermined shape (exposed), and the dry film 91a is developed using an aqueous solution of sodium carbonate (Na ₂ CO ₃ ) to have a predetermined shape. A resist 91 is formed (see FIG. 11C).

  Next, as shown in FIG. 11D, the load beam material plate 61b is trimmed so that the load beam blank plate 61a shown in FIG. In this case, a portion of the load beam material plate 61b exposed from the resist 91 is etched using an iron chloride based etchant such as a ferric chloride aqueous solution. As a result, the load beam material plate 61b is processed, and the load beam blank plate 61a shown in FIG. 5 is obtained. In addition, although the opening of the resist 91 is provided above the part corresponding to the folding line 69, the opening of the resist 91 is not provided below the part. As a result, the portion is half-etched, and a folding line 69 is formed. After the etching is performed, the resist 91 is peeled off.

  After that, as shown in FIG. 11E, each head side wall panel 67 a is bent with respect to the corresponding head side support portion 65 along the folding line 69, and stands on the head side support portion 65. A head side wall 67 is formed. Similarly, each tail side wall panel 68 a is bent along the folding line 69 with respect to the corresponding tail side support part 66, and the tail side wall part 68 standing on the tail side support part 66 is formed. .

  In this way, the load beam 61 shown in FIG. 4 is obtained.

  Next, a method for manufacturing the suspension 51 (a method for mounting the piezo element 54) in the present embodiment will be described with reference to FIG. 12A to 12E show a cross section taken along line BB in FIG.

  First, the suspension substrate 1 and the base plate 52 are prepared, and the above-described load beam 61 is prepared.

  Next, as shown in FIG. 12A, the suspension substrate 1 (see FIG. 1) is attached to the base plate 52 via the load beam 61 by welding. In this case, first, the load beam 61 is fixed to the base plate 52 by welding. Subsequently, the load beam 61 is provided by the beam jig hole 66 provided in the load beam 61 and the jig hole 25 provided in the suspension substrate 1. The beam 61 and the suspension substrate 1 are aligned. Thereafter, the load beam 61 and the suspension substrate 1 are joined and fixed together by welding.

  Subsequently, each piezo element 54 is bonded to the load beam 61 and the base plate 52 by a non-conductive adhesive.

  In this case, first, a nonconductive adhesive is applied to a predetermined portion of the load beam 61 (see FIG. 12B). Specifically, the non-conductive adhesive corresponds to the tip side edge portion 54c of the piezo element 54 among the flexible portion 64 of the load beam 61, the head side support portion 65, the tail side support portion 66, and the head side beam 62. And the portion corresponding to the rear end side edge portion 54d of the piezo element 54 in the tail side beam 63. The applied non-conductive adhesive is cured to form an adhesive pedestal 55a. On the adhesive pedestal 55a, a non-conductive adhesive is applied to form a first non-conductive adhesive part 55b (see FIG. 12C), and before the first non-conductive adhesive part 55b is cured, The piezo element 54 is placed on the first non-conductive adhesive portion 55b (see FIG. 12D). Thereafter, a nonconductive adhesive is sealed around the piezo element 54 to form a second nonconductive adhesive portion 55c (see FIG. 12E). Specifically, the non-conductive adhesive is formed between the front end side edge 54c of the piezo element 54 and the head side plate 52a, between the rear end side edge 54d and the tail side plate 52b, and on the inner edge 54c. A second non-conductive adhesive portion 55 c is formed between the flexible portion 52 c of the base plate 52 and between the outer edge portion 54 e and the head side wall portion 67 and the tail side wall portion 68. Thereafter, the first non-conductive adhesive portion 55b and the second non-conductive adhesive portion 55c are cured, and each piezo element 54 is bonded to the adhesive pedestal 55a, the first non-conductive adhesive portion 55b, and the second non-conductive adhesive portion 55c. The base plate 52 and the load beam 61 are joined via a non-conductive adhesive portion 55 made of

  Next, a conductive adhesive portion (not shown) made of a conductive adhesive is formed, and the electrode 54a on one side of the piezoelectric element 54 (on the side opposite to the suspension substrate 1) is connected to the base plate 52 via the conductive adhesive portion. Electrically connected. The other electrode 54a (the suspension substrate 1 side) of the piezo element 54 is joined to the element connection portions 3a and 3b (see FIG. 1) of the suspension substrate 1 and electrically connected by using a conductive adhesive. Connected.

  A slider 72 is connected to the head terminal 5 of the suspension 51 to obtain a suspension with head 71 shown in FIG. Further, the suspension with head 71 is attached to the case 82 of the hard disk drive 81 to obtain the hard disk drive 81 shown in FIG.

  When writing and reading data in the hard disk drive 81 shown in FIG. 10, the slider 72 of the suspension with head 71 is moved along the disk 83 by the voice coil motor 85, and the disk 83 is rotated by the spindle motor 84. Keep close to the desired flying height. As a result, data is exchanged between the slider 72 and the disk 83. During this time, an electrical signal is transmitted through each wiring 13 extending between the head terminal 5 (see FIG. 1) of the suspension substrate 1 and the external device connection terminal 6.

  When moving the slider 72, the voice coil motor 85 roughly adjusts the position of the slider 72, and the piezo element 54 finely adjusts the position of the slider 72. That is, by applying a predetermined voltage to the electrode 54a of the piezo element 54 on the element connecting portions 3a and 3b side of the suspension substrate 1, one piezo element 54 contracts in the longitudinal direction of the head portion 2a, while the other This piezo element 54 extends (see FIG. 1). In this case, the flexible portion 52b of the base plate 52 and the flexible portion 64 of the load beam 61 are elastically deformed, and the slider 72 positioned on the distal end side of the load beam 61 can move in the sway direction (turning direction). In this way, the slider 72 can be quickly and accurately aligned with a desired track of the disk 83.

  As described above, according to the present embodiment, the pair of head side support portions 65 extend from the head side beam 62 toward the tail side beam 63, and the pair of tails extend from the tail side beam 63 toward the head side beam 62. The side support portions 66 extend, and the outer edge portions 54e of the corresponding piezoelectric elements 54 are joined to the head side support portions 65 and the tail side support portions 66, respectively. As a result, the bonding area between the piezo element 54 and the load beam 61 is increased, and the piezo element 54 has a lateral direction (a direction perpendicular to the longitudinal direction of the suspension substrate 1, the left-right direction in FIG. 6) and a thickness direction (see FIG. 6 in the vertical direction). For this reason, the piezo element 54 can be firmly joined, and the piezo element 54 is prevented from being damaged even during the manufacturing process of the suspension 51, the suspension with head 71, the hard disk drive 81, and during the use of the hard disk drive 81. The durability of the hard disk drive 81 can be improved. In particular, according to the present embodiment, the outer edge portion 54e of the piezo element 54 is also joined to the head side wall portion 67 standing on the head side support portion 65 and the tail side wall portion 68 standing on the tail side support portion 66. Therefore, the piezo element 54 can be bonded more firmly. Further, the head side wall portion 67 and the tail side support portion 68 as described above can protect the piezo element 54 from the left-right direction in FIG. 6, so that the piezo element 54 can be prevented from being damaged.

  In addition, according to the present embodiment, the four edge portions 54c to 54f of the rectangular parallelepiped piezo element 54 are all connected via the bonding base 55a of the non-conductive bonding portion 55 and the first non-conductive bonding portion 55b. Are joined to the load beam 61. Thus, the piezo element 54 can be reliably bonded to the load beam 61 in parallel. Here, when the piezo element 54 is joined to the load beam 61 at an inclination, there is a problem that the electrode 54a of the piezo element 54 contacts the load beam 61 and is short-circuited. According to the embodiment, as described above, since the piezo element 54 can be joined in parallel to the load beam 61, it is possible to prevent the piezo element 54 and the load beam 61 from being short-circuited.

  Furthermore, according to the present embodiment, the head side wall portion 67 erected on each head side support portion 65 and the tail side wall portion 68 erected on each tail side support portion 66 are formed into a plate-like load beam material plate. 61b can be formed by externally processing and forming a folding line 69 by half-etching, and then bending the head side wall panel 67a and the tail side wall panel 68a along the folding line 69. Therefore, the load beam 61 that can give rigidity to the piezo element 54 can be easily manufactured.

  In the present embodiment, an example in which the inner edge portion 54f of the piezo element 64 is joined to the flexible portion 52c of the base plate 52 and the flexible portion 64 of the load beam 61 via the non-conductive adhesive portion 55. Explained. However, the present invention is not limited to this. As shown in FIG. 13, the inner edge portion 54 f of the piezo element 64 is not joined to the flexible portion 52 c of the base plate 52 and the flexible portion 64 of the load beam 61. Also good. Also in this case, since the outer edge portion 54e of the piezo element 54 is joined to the head side support portion 65 and the tail side support portion 66, rigidity can be imparted to the piezo element 54, and the piezo element 54 can be damaged. Can be prevented.

  Further, in the present embodiment, an example has been described in which the head side wall portion 67 is erected on each head side support portion 65 and the tail side wall portion 68 is erected on each tail side support portion 66. However, the present invention is not limited to this, and the outer edge portion 54e of each piezo element 54 is joined only to the head side support portion 65 and the tail side support portion 66 without providing the head side wall portion 67 and the tail side wall portion 68. You may make it do. Also in this case, since the outer edge portion 54e of the piezo element 54 is joined to the head side support portion 65 and the tail side support portion 66, rigidity can be imparted to the piezo element 54, and the piezo element 54 can be damaged. Can be prevented. In this case, the structure of the cross section taken along the line BB in FIG. 2 is as shown in FIG. 16 to be described later, and the non-conductive adhesive portion 55 along the longitudinal direction of the suspension substrate 1 includes the adhesive pedestal 55a and the 1 non-conductive adhesive portion 55b.

  Further, in the present embodiment, in the load beam blank plate 61a, the head side wall portion panel 67a corresponding to each head side support portion 65 and the tail side wall portion panel 68a corresponding to each tail side support portion 66 are provided. In the above example, the folding line 69 is formed by half etching. However, the present invention is not limited to this, and if each head side wall panel 67a and each tail side wall panel 68a can be bent with respect to the corresponding head side support part 65 and tail side support part 66, a folding line is obtained. 69 may be formed by a method other than half-etching, and the head side wall panel 67a and the tail side wall panel 68a may be bent without forming the folding curve 69.

  Further, in the present embodiment, the example in which each head side support portion 65 is separated without being connected to the corresponding tail side support portion 66 has been described. However, the present invention is not limited to this. As shown in FIG. 14, each head side support portion 65 is connected to the corresponding tail side support portion 66, and each head side wall portion 67 is connected to the corresponding tail side wall. It may be connected to the portion 68. In this case, the piezo element 54 can provide further rigidity, and damage to the piezo element 54 can be further prevented.

Second Embodiment Next, a method for manufacturing a load beam, a suspension, a suspension with a head, a hard disk drive, and a load beam according to a second embodiment of the present invention will be described with reference to FIGS.

  In the second embodiment shown in FIGS. 15 and 16, the head side wall portion and the tail side wall portion are not provided, and the inner edge portion of each piezoelectric element is formed by the flexible portion of the load beam by the first adhesive. And the outer edge of each piezo element is bonded to the head side support and the tail side support by the first adhesive, and the tip side edge of each piezo element is loaded to the load beam by the second adhesive. The rear end side edge portion is joined to the tail side beam by the second adhesive, and the second adhesive is mainly different in that the elastic modulus is higher than that of the first adhesive. Other configurations are the same as those of the first embodiment shown in FIGS. 15 and FIG. 16, the same parts as those of the first embodiment shown in FIG. 1 to FIG.

  As shown in FIG. 15, in the load beam 61 according to the present embodiment, the head side wall portion 67 and the tail side wall portion 68 as shown in FIG. 4 are not provided.

  As shown in FIG. 16, the outer edge 54e of each piezo element 54 is joined to the head side support 65 and tail side support 66 by the first adhesive, and the inner edge 54f of each piezo element 54 is non- It is joined to the flexible portion 64 of the load beam 61 by a conductive first adhesive. That is, the adhesive pedestal 55a, the first nonconductive adhesive portion 55b, and the second nonconductive adhesive portion 55c along the longitudinal direction of the suspension substrate 1 are formed by applying the first adhesive. The non-conductive adhesive portion 55 in this direction is composed of an adhesive pedestal 55a and a first non-conductive adhesive portion 55b.

  Further, the leading edge 54c of each piezo element 54 is made of a head-side beam 62 of the load beam 61 and a head-side plate 52a of the base plate 52 by a non-conductive second adhesive having a higher elastic modulus than the first adhesive. (See FIG. 7). Similarly, the rear end side edge portion 54d of each piezo element 54 is joined to the tail side beam 63 and the tail side plate 52b by the second adhesive. That is, the adhesive pedestal 55a, the first non-conductive adhesive portion 55b, and the second non-conductive adhesive portion 55c along the direction orthogonal to the longitudinal direction of the suspension substrate 1 are formed by applying the second adhesive. ing.

As described above, the second adhesive has a higher elastic modulus (Young's modulus) than the first adhesive. It is preferable to use a ceramic-containing modified epoxy resin for the first adhesive and the second adhesive. The ceramic-containing modified epoxy resin is an epoxy resin containing a particle size silica (for example, an alkyl-modified triphenolmethane type epoxy resin, a dicyclopentadiene-modified phenol resin, etc.), and by changing the content rate of the particle size silica, Young The rate can be changed. For this reason, by adjusting the content rate of the particle size silica, for example, a ceramic-containing modified epoxy resin having an elastic modulus of 450 N / mm ² is used for the first adhesive, and for example, 3300 N is used for the second adhesive. It is preferable to use a ceramic-containing modified epoxy resin having an elastic modulus of / mm ² . The first adhesive may have a lower elastic modulus (167000 N / mm ² ) than the load beam 61, and the second adhesive may have a higher elastic modulus than the load beam 61. Also in this case, the ceramic-containing modified epoxy resin in which the content of the particle size silica is adjusted can be used for the first adhesive and the second adhesive.

  As described above, according to the present embodiment, the second adhesive that joins the front end side edge portion 54c and the rear end side edge portion 54d of each piezoelectric element 54 to the load beam 61 is used as the outer edge of each piezoelectric element 54. The elastic modulus is higher than that of the first adhesive that joins the portion 54 e and the inner edge 54 f to the load beam 61. As a result, the outer edge portion 54e and the inner edge portion 54f of each piezoelectric element 54 are joined so as to have a relatively elastic action with respect to the load beam 61. Therefore, the deformation of the piezoelectric element 54 is efficiently applied to the load beam 61. I can tell you well. Further, since the front end side edge portion 54c and the rear end side edge portion 54d of each piezo element 54 are relatively firmly joined to the load beam 61, the deformation of the piezo element 54 is prevented from being absorbed. In addition, the deformation of the piezo element 54 can be reliably transmitted.

  In the present embodiment, the example in which the inner edge portion 54f of the piezo element 64 is joined to the flexible portion 52c of the base plate 52 and the flexible portion 64 of the load beam 61 has been described. However, the present invention is not limited to this. As shown in FIG. 17, the inner edge portion 54 f of the piezo element 64 is not joined to the flexible portion 52 c of the base plate 52 and the flexible portion 64 of the load beam 61. Also good. Even in this case, the deformation of the piezo element 54 can be efficiently transmitted to the load beam 61.

  Further, in the present embodiment, the outer edge portion 54e of each piezo element 54 is joined only to the head side support portion 65 and the tail side support portion 66 without providing the head side wall portion 67 and the tail side wall portion 68. Explained. However, the present invention is not limited to this, and in the same manner as in the first embodiment, the head side wall portion 67 is erected on each head side support portion 65 and the tail side wall portion 68 is provided on each tail side support portion 66. The outer edge 54e of each piezo element 54 may be joined to the head side wall 67 and the tail side wall 68 with a first adhesive. Even in this case, since the elastic modulus of the first adhesive is low, the deformation of the piezo element 54 can be efficiently transmitted to the load beam 61.

  Further, in the present embodiment, the example in which each head side support portion 65 is separated without being connected to the corresponding tail side support portion 66 has been described. However, the present invention is not limited to this, and although not shown, each head side support portion 65 may be coupled to a corresponding tail side support portion 66. In this case, the piezo element 54 can provide further rigidity, and damage to the piezo element 54 can be further prevented.

  Further, in the present embodiment, the front end side edge portion 54c of each piezo element 54 is joined to the head side beam 62 of the load beam 61 and the head side plate 52a of the base plate 52 by the second adhesive, and the rear end. The side edge part 54d demonstrated the example joined to the tail side beam 63 and the tail side plate 52b with the 2nd adhesive agent. However, the present invention is not limited to this, and the adhesive pedestal 55a and the first non-conductive adhesive portion 55b along the direction orthogonal to the longitudinal direction of the suspension substrate 1 are formed by the second adhesive, and the second in the direction. The non-conductive adhesive portion 55c may be formed with the first adhesive. Also in this case, since the front end side edge portion 54c and the rear end side edge portion 54d of each piezoelectric element 54 are relatively firmly bonded to the load beam 61 by the second adhesive, the deformation of the piezoelectric element 54 is suppressed. Can be prevented from being absorbed.

Third Embodiment Next, a method for manufacturing a load beam, a suspension, a suspension with a head, a hard disk drive, and a load beam according to a third embodiment of the present invention will be described with reference to FIGS.

  The third embodiment shown in FIGS. 18 to 20 is mainly different in that the head side beam and the tail side beam are provided with insulating pedestals interposed between the piezo elements. Is the same as that of the first embodiment shown in FIGS. In FIG. 18 to FIG. 20, the same parts as those in the first embodiment shown in FIG. 1 to FIG.

  As shown in FIG. 18, the head side beam 62 and the tail side beam 63 are provided with insulating bases 95 interposed between the piezoelectric element 54 and the head side beam 62 and the tail side beam 63. Specifically, the first tail side edge 62a and the second tail side edge 62b of the head side beam 62, and the first head side edge 63a and the second head side edge 63b of the tail side beam 63, Insulation bases 95 are provided. As shown in FIG. 19, each insulating base 95 is provided on the surface of the load beam 61 on the piezoelectric element 54 side. In this way, the insulating pedestal 95 is interposed between the front end side edge 54c of the piezo element 54 and the head side beam 62 and between the rear end side edge 54d and the tail side beam 63. It has become.

  The material of the insulating pedestal 95 is not particularly limited as long as it is a material having a desired insulating property. For example, it is preferable to use an acrylic polyimide film. By using a film-like insulating material in this way, the thickness of each insulating pedestal 95 becomes the same, and the piezo element 54 bonded on the insulating pedestal 95 is reliably bonded to the load beam 61 in parallel. be able to. The material of the insulating pedestal 95 can be a photosensitive material or a non-photosensitive material, and is not limited to a film-like insulating material, and a liquid insulating material is applied. And may be cured.

  The thickness of the insulating pedestal 95 is preferably 5 to 37 μm. Accordingly, the piezo element 54 can be disposed at the center of the base plate 52 in the thickness direction. That is, the thickness of the base plate 52 is generally 120 to 150 μm, and the thickness of the piezo element 54 is generally 70 to 100 μm. The thickness of the first non-conductive adhesive portion 55b between the piezo element 54 and the insulating pedestal 95 is preferably 3 to 5 μm in order to ensure the adhesion between the piezo element 54 and the insulating pedestal 95. . For this reason, in order to dispose the piezo element 54 at the center in the thickness direction of the base plate 52, it can be said that the thickness of the insulating pedestal 95 is preferably 5 to 37 μm as described above.

  The load beam 61 having such an insulating pedestal 95 can be manufactured as follows. Here, description will be made with reference to FIG. 20, which schematically shows a cross section of the load beam 61 including a portion where the insulating pedestal 95 is provided and a portion where the head side support portion 65 and the head side wall portion 67 are provided.

  First, as shown in FIG. 20A, a load beam material plate 61b made of stainless steel is prepared.

  Subsequently, as shown in FIG. 20B, an insulating pedestal 95 is formed at a position corresponding to the head side beam 62 and the tail side beam 63. In this case, first, the load beam material plate 61 b is cleaned, and the surface of the load beam material plate 61 b on the insulating pedestal 95 side is roughened in order to improve the adhesion strength with the insulating pedestal 95. Next, a 50 μm photosensitive polyimide film is laminated on the roughened surface. Subsequently, the polyimide film is irradiated with ultraviolet rays (exposed) through a photomask 92 having a predetermined shape, and the polyimide film is developed. Thereafter, curing (thermosetting) is performed at 300 ° C. to form an insulating base 95 shown in FIG.

Next, as shown in FIG. 20C, a resist 91 having a predetermined shape is formed on both surfaces of the load beam material plate 61b. In this case, first, an acrylic photosensitive dry film 91a is attached to both surfaces of the load beam material plate 61b. Here, a dry film 91 a having a thickness that can cover the insulating pedestal 95 is attached to the surface on the insulating pedestal 95 side. Thereafter, the dry film 91a is irradiated with ultraviolet rays (exposed) through a photomask 92 having a predetermined shape, and the dry film 91a is developed using an aqueous solution of sodium carbonate (Na ₂ CO ₃ ) to obtain a predetermined A resist 91 having a shape is formed.

  Next, as shown in FIG. 20D, in the same manner as in the first embodiment, the load beam material plate 61b is contoured, and at the same time, a fold curve 69 is formed by etching. After the etching is performed, the resist 91 is peeled off.

  After that, as shown in FIG. 20 (f), each head side wall panel 67 a is bent with respect to the corresponding head side support portion 65 along the folding line 69, and is erected on the head side support portion 65. A head side wall 67 extending to the side of the piezo element 54 to be joined is formed. Similarly, each tail side wall panel 68a is bent along the folding line 69 with respect to the corresponding tail side support part 66, and stands on the tail side support part 66, and the piezoelectric element 54 to be joined is joined. A tail side wall 68 extending to the side is formed.

  In this way, the load beam 61 shown in FIG. 18 is obtained.

  As described above, according to this embodiment, the head side beam 62 and the tail side beam 63 are provided with the insulating pedestals 95 interposed between the piezo elements 54. It is possible to reliably insulate between the front end side edge portion 54c of the piezoelectric element 54 and the head side beam 62 and between the rear end side edge portion 54d of the piezoelectric element 54 and the tail side beam 63. Further, since the front end side edge portion 54c and the rear end side edge portion 54d of the piezo element 54 are joined to the load beam 61 via the insulating base 95 in this way, the piezo element 54 is connected to the load beam 61. And can be reliably joined in parallel. Therefore, it is possible to prevent the piezo element 54 from being inclined and joined to the load beam 61 and to prevent the piezo element 54 and the load beam 61 from being short-circuited.

  Further, according to the present embodiment, the insulating pedestal 95 is formed in advance on the head side beam 62 and the tail side beam 63 of the load beam 61 using the film-like insulating material. Thus, when bonding the piezo element 54 to the load beam 61, a non-conductive adhesive is applied to the head side beam 62 and the tail side beam 63 so as to correspond to the edges 54c and 54d of the piezo element 54 and cured. Thus, the step of forming the adhesive pedestal 55a (see FIG. 12B) can be omitted. Therefore, the suspension 51 that can prevent the piezoelectric element 54 and the load beam 61 from being short-circuited can be easily manufactured.

  In the present embodiment, the example in which the load beam material plate 61b is externally processed after the insulating pedestal 95 is formed on the load beam material plate 61b has been described. However, the present invention is not limited to this, and the insulating pedestal 95 may be formed on the load beam blank plate 61a after the load beam material plate 61 is trimmed.

  Further, in the present embodiment, the first tail side edge 62a and the second tail side edge 62b of the head side beam 62, and the first head side edge 63a and the second head side edge of the tail side beam 63 are used. The example in which the insulating pedestal 95 is provided in the part 63b has been described. However, the present invention is not limited to this, and an insulating pedestal 95 may be provided in a portion of the flexible portion 64 corresponding to the inner edge portion 54f of the piezo element 54. Further, the head side support portion 65 and the tail are provided. An insulating pedestal 95 may be provided in a portion of the side support portion 66 corresponding to the outer edge portion 54e of the piezo element 54.

  Although the embodiments of the present invention have been described in detail above, the load beam, suspension, suspension with head, hard disk drive, and load beam manufacturing method according to the present invention are not limited to the above-described embodiments. Various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 1 Suspension board | substrate 2 Substrate body 2a Head part 2b Tail part 3a 1st element connection part 3b 2nd element connection part 4a 1st connection part 4b 2nd connection part 5 Head terminal 6 External apparatus connection terminal 10 Insulating layer 11 Metal support layer 12 Wiring layer 13 Wiring 16 Element connection terminal 25 Jig hole 51 Suspension 52 Base plate 52a Head side plate 52b Tail side plate 52c Flexible portion 54 Piezo element 54a Electrode 54b Piezoelectric material portion 54c Front end side edge portion 54d Rear end side edge portion 54e Outer edge portion 54f Inner edge portion 55 Non-conductive adhesive portion 55a Adhesive base 55b First non-conductive adhesive portion 55c Second non-conductive adhesive portion 61 Load beam 61a Load beam blank plate 61b Load beam material plate 62 Head side beam 62a First tail side edge 62b Second tail side edge 63 Tail side bee 63a First head side edge portion 63b Second head side edge portion 64 Flexible portion 65 Head side support portion 66 Tail side support portion 67 Head side wall portion 67a Head side wall portion panel 68 Tail side wall portion 68a Tail side wall portion panel 69 Folding curve 70 Mounting area 71 Suspension with head 72 Slider 81 Hard disk drive 82 Case 83 Disk 84 Spindle motor 85 Voice coil motor 86 Arm 91 Resist 91a Dry film 92 Photomask 95 Insulation base

Claims (17)

In a load beam that supports a suspension substrate that can be connected to a pair of rectangular parallelepiped actuator elements, extending from a head portion on which a slider is mounted to a tail portion connected to an external device,
A head-side beam that is disposed on the head portion side of the suspension substrate and to which the edge portion on the head portion side of each actuator element to be mounted is joined;
A tail beam disposed on the tail portion side of the suspension substrate and joined to the tail portion side edge of each actuator element;
A flexible portion that is disposed between the mounting region of the pair of actuator elements and connects the head side beam and the tail side beam;
A pair of head side support portions provided on both sides of the flexible portion, extending from the head side beam toward the tail side beam and to which the edge of the actuator element opposite to the flexible portion is joined;
A pair of tail side support portions provided on both sides of the flexible portion, extending from the tail side beam toward the head side beam and to which the edge of the actuator element opposite to the flexible portion is joined. A load beam characterized by that. A head side wall portion which is erected on each head side support portion and to which the edge portion of the actuator element on the opposite side to the flexible portion is joined;
2. The load beam according to claim 1, further comprising a tail side wall portion standing on each tail side support portion and to which an edge portion of the actuator element opposite to the flexible portion is joined. .   The load beam according to claim 2, wherein each head side support portion is connected to a corresponding tail side support portion.   The load beam according to any one of claims 1 to 3, wherein the head side beam and the tail side beam are provided with insulating pedestals interposed between the mounted actuator elements. A base plate;
The load beam according to any one of claims 1 to 4,
A suspension substrate attached to a base plate via a load beam and extending from a head portion on which a slider is mounted to a tail portion connected to an external device;
A suspension comprising: a pair of rectangular parallelepiped actuator elements that are bonded to a load beam and connectable to a suspension substrate.   6. The suspension according to claim 5, wherein an edge portion of each actuator element on the flexible portion side of the load beam is joined to the flexible portion. The edge of each actuator element on the flexible part side of the load beam is joined to the flexible part by the first adhesive, and the edge of each actuator element on the opposite side of the flexible part is the first adhesive. It is joined to the head side support part and tail side support part by
The edge of each actuator element on the head portion side is joined to the head side beam of the load beam by the second adhesive, and the edge of each actuator element on the tail portion side is joined to the tail side beam by the second adhesive. Has been
The suspension according to claim 6, wherein the second adhesive has a higher elastic modulus than the first adhesive.   The suspension according to claim 7, wherein the first adhesive has a lower elastic modulus than the load beam, and the second adhesive has a higher elastic modulus than the load beam.   The suspension according to claim 7 or 8, wherein the edge of each actuator element on the head portion side and the edge of each actuator element on the tail portion side are joined to the base plate by a second adhesive. A suspension according to any one of claims 5 to 9,
A suspension with a head, comprising: a slider mounted on the suspension.   A hard disk drive comprising the suspension with a head according to claim 10. In a method of manufacturing a load beam that extends from a head portion on which a slider is mounted to a tail portion connected to an external device and supports a suspension substrate connectable to a pair of rectangular parallelepiped actuator elements,
Preparing a load beam material plate;
A head-side beam that is arranged on the head portion side of the suspension substrate and is joined to the head portion side edge of the mounted actuator element, and a tail portion side of each actuator element that is arranged on the tail portion side of the suspension substrate Are arranged between the tail side beam to which the edge of the head is joined, the mounting region of the pair of actuator elements, and a flexible part connecting the head side beam and the tail side beam, and provided on both sides of the flexible part. A pair of head side support portions that extend from the head side beam toward the tail side beam and are joined to the edge of the actuator element on the opposite side of the flexible portion; A pair of tail side support portions that extend from the beam toward the head side beam and are joined to the edge of the actuator element opposite to the flexible portion, and from each head side support portion Flexure and the head side wall panel extending on the side opposite to the, to have a tail side wall panel extending on the opposite side of the flexible portion from the tail-side support portion, and the step of processing the load beam material plate,
Each head side wall panel is bent with respect to the corresponding head side support part, is erected on the head side support part, and the head side wall part to which the edge of the actuator element on the side opposite to the flexible part is joined In addition, each tail side wall panel is bent with respect to the corresponding tail side support part and is erected on the tail side support part, and the edge of the actuator element on the side opposite to the flexible part is joined. Forming a tail side wall portion. The method of manufacturing a load beam comprising:   The method further comprises a step of forming a folding line between each head side wall panel and the corresponding head side support, and between each tail side wall panel and the corresponding tail side support. The method for manufacturing a load beam according to claim 12.   14. The method of manufacturing a load beam according to claim 13, wherein in the step of forming the folding curve, the folding curve is formed by half etching.   The method of manufacturing a load beam according to claim 13 or 14, wherein the step of processing the load beam material plate and the step of forming the folding line are performed simultaneously.   Before the step of processing the load beam material plate, the method further includes the step of providing an insulating base interposed between the actuator element to be mounted at a position corresponding to the head side beam and a position corresponding to the tail side beam. The method of manufacturing a load beam according to any one of claims 12 to 15, wherein:   After the step of processing the load beam material plate, before the step of forming the head side wall portion and the tail side wall portion, the step of providing the head side beam and the tail side beam with an insulating base interposed between the actuator elements The load beam manufacturing method according to claim 12, further comprising:

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