JP2012094377A - Ion wind generation body and ion wind generation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ion wind generation body capable of easily aggregating ion winds.SOLUTION: An ion wind generation body 3 has a dielectric body 7, on which a through hole 7h is formed; an inner electrode 9 arranged nearer the through hole 7h than an outer periphery 7b of the dielectric body 7; and an outer electrode 11 arranged nearer the outer periphery of the dielectric body 7 than the inner electrode 9, isolated from the inner electrode 9 by the dielectric body 7, including a downstream region part 11m positioned nearer one side (side shown by an arrow a1) in a penetrating direction of the through hole 7h than the inner electrode 9, and capable of inducing the ion winds flowing in the through hole 7h toward the side shown by the arrow a1 by applying a voltage between the outer electrode and the inner electrode 9.

Description

  The present invention relates to an ion wind generator and an ion wind generator.

  Devices for inducing ion wind by movement of electrons or ions are known. For example, in Patent Document 1, an AC voltage is applied to two electrodes provided on a substrate-like dielectric material to generate a dielectric barrier discharge, and an ion wind is generated on one main surface of the dielectric material. A technique for arranging an ion wind generator composed of such a substrate-like dielectric and electrodes in a flow path is also known (for example, Patent Document 2).

JP 2007-317656 A JP 2009-30699 A

  With the technique of Patent Document 1, it is difficult to collect ion wind. That is, when the induced ion wind flows along the main surface of the substrate-like dielectric, it diffuses to the side of the main surface.

  An object of the present invention is to provide an ion wind generator and an ion wind generator that can easily collect ion wind.

  The ion wind generator according to the first aspect of the present invention includes a dielectric having a through hole formed therein, an inner electrode disposed on the through hole side of the outer peripheral surface of the dielectric, and the inner electrode more than the inner electrode. And a downstream area located on one side of the through-hole in the through direction with respect to the inner electrode and disposed between the inner electrode and the inner electrode. And an outer electrode capable of inducing an ionic wind flowing to the one side through the through-hole when a voltage is applied thereto.

  Preferably, the inner electrode and the outer electrode are formed so as to be able to induce an ionic wind flowing spirally through the through hole.

  Preferably, the inner electrode and the outer electrode extend in a spiral around the through hole.

  Preferably, a plurality of sets of the inner electrode and the outer electrode are arranged in a spiral around the through-hole, and each set of the inner electrode and the outer electrode is arranged in a direction orthogonal to the arrangement direction. Ionic wind can be induced.

  Preferably, the number of turns of the spiral formed by the inner electrode and the outer electrode is 1 or less.

  Preferably, the inner electrode and the outer electrode are formed in an annular shape surrounding the through hole.

  Preferably, a plurality of sets of the inner electrode and the outer electrode are arranged along the through hole.

  Preferably, the outer electrode is embedded in the dielectric.

  An ion wind generator according to a second aspect of the present invention includes a flow path component having a through-hole formed therein, a first and a second capable of inducing an ion wind spirally flowing through the through-hole by applying a voltage. A second electrode.

  The ion wind generator according to the first aspect of the present invention includes a dielectric having a through hole formed therein, an inner electrode disposed closer to the through hole than an outer peripheral surface of the dielectric, and the inner electrode more than the inner electrode. An outer electrode disposed on an outer peripheral side of a dielectric, separated from the inner electrode by the dielectric, and including a downstream region located on one side of the through hole in a through direction from the inner electrode; and the inner electrode And a power source capable of inducing an ionic wind flowing through the through hole to the one side by applying a voltage between the first electrode and the outer electrode.

  Preferably, a plurality of sets of the inner electrode and the outer electrode are provided, and a switch unit for switching a connection state between the power source and the plurality of sets of the inner electrode and the outer electrode is provided.

  According to said structure, aggregation of an ion wind becomes easy.

FIG. 1A is a perspective view schematically showing an ion wind generator according to the first embodiment of the present invention, and FIG. 1B is a sectional view taken along line Ib-Ib in FIG. is there. It is a perspective view which shows typically the principal part of the ion wind generator which concerns on 2nd Embodiment. It is a perspective view which shows typically the principal part of the ion wind generator which concerns on 3rd Embodiment. It is a perspective view which shows typically the principal part of the ion wind generator which concerns on 4th Embodiment. It is sectional drawing which shows typically the principal part of the ion wind generator which concerns on 5th Embodiment. It is sectional drawing which shows typically the principal part of the ion wind generator which concerns on 6th Embodiment. It is a figure explaining the modification of the method of forming the ion wind which flows spirally.

  Hereinafter, ion wind generators and ion wind generators according to a plurality of embodiments of the present invention will be described with reference to the drawings. Note that the drawings used in the following description are schematic, and the dimensional ratios and the like on the drawings do not necessarily match the actual ones.

  In the second and subsequent embodiments, configurations that are the same as or similar to those already described are denoted by the same reference numerals as those already described, and illustrations and descriptions may be omitted. In addition, in the case where there are a plurality of similar or similar configurations, a capital letter may be added to or omitted from the reference numeral.

<First Embodiment>
FIG. 1A is a perspective view schematically showing an ion wind generator 1 according to the first embodiment of the present invention, and FIG. 1B is a cross-sectional view taken along the line Ib-Ib in FIG. It is. However, in FIG.1 (b), only the cross section is shown about some members.

  The ion wind generator 1 is configured as an apparatus that generates an ion wind that flows in a direction (x direction) indicated by a schematic arrow a1.

  The ion wind generator 1 includes an ion wind generator 3 that generates an ion wind, and a drive unit 5 (FIG. 1A) that drives and controls the ion wind generator 3.

  The ion wind generator 3 includes a dielectric 7 and an inner electrode 9 and an outer electrode 11 separated by the dielectric 7. The ion wind generator 3 generates a dielectric barrier discharge by applying a voltage between the inner electrode 9 and the outer electrode 11 to generate an ion wind.

  The dielectric 7 is formed in a cylindrical shape, for example. In other words, the dielectric 7 has a through hole 7h. For example, the dielectric 7 is formed so that the inner peripheral surface 7a and the outer peripheral surface 7b are concentric perfect circles in a cross section orthogonal to the through direction of the through hole 7h, and the cross-sectional shape is the same as the through hole 7h. Constant in direction. Therefore, the thickness of the dielectric 7 (the length from the inner peripheral surface 7a to the outer peripheral surface 7b) is constant.

  The dielectric 7 may be formed of an inorganic insulator or an organic insulator. Examples of the inorganic insulator include ceramic and glass. Examples of the ceramic include an aluminum oxide sintered body (alumina ceramic), a glass ceramic sintered body (glass ceramic), a mullite sintered body, an aluminum nitride sintered body, a cordierite sintered body, and a silicon carbide sintered body. Examples include ligation. Examples of the organic insulator include polyimide, epoxy, and rubber.

  As a method of forming the dielectric 7 in a cylindrical shape when the dielectric 7 is formed of ceramic (method of forming the through hole 7h), for example, a ceramic green sheet is wound around a round bar formed of an organic resin material The method of baking as it is can be mentioned. Since the round bar is decomposed and removed during firing, the dielectric 7 can be formed in a cylindrical shape.

  For example, the inner electrode 9 and the outer electrode 11 are each formed in a layer shape with a constant thickness and a long shape with a constant width. The inner electrode 9 is spirally disposed on the inner peripheral surface 7 a of the dielectric 7, and the outer electrode 11 is spirally disposed on the outer peripheral surface 7 b of the dielectric 7. The number of turns of the spiral may be set as appropriate, but FIG. 1 illustrates a case where the number of turns is 1.

  The inner electrode 9 and the outer electrode 11 are translated spirally. More specifically, since the thickness of the dielectric 7 is constant as described above, the inner electrode 9 and the outer electrode 11 are kept at a constant distance in the thickness direction of the dielectric 7. Also, the inner electrode 9 and the outer electrode 11 maintain a certain relative position in the through direction of the through hole 7h (or in the direction orthogonal to the spiral). That is, the inner electrode 9 and the outer electrode 11 extend in parallel.

  The outer electrode 11 is arranged so as to be shifted to one side of the through hole 7 h with respect to the inner electrode 9. In other words, the outer electrode 11 has a downstream region portion 11m (FIG. 1B) located on the downstream side of the ion wind from the inner electrode 9. The outer electrode 11 can also be regarded as being displaced in a direction perpendicular to the spiral with respect to the inner electrode 9.

  Note that the inner electrode 9 and the outer electrode 11 may be adjacent to each other without a gap in plan view, or may be separated by a predetermined gap. Further, a part of the outer electrode 11 may overlap with a part or the whole of the inner electrode 9. In FIG. 1, the case where the inner electrode 9 and the outer electrode 11 partially overlap each other is illustrated. The widths of the inner electrode 9 and the outer electrode 11 may be set as appropriate.

  The inner electrode 9 and the outer electrode 11 are made of a conductive material such as metal. Examples of the metal include tungsten, molybdenum, manganese, copper, silver, gold, palladium, platinum, nickel, cobalt, and alloys containing these as a main component.

  When the inner electrode 9 and the outer electrode 11 are formed of metal, for example, a metal paste is printed on the surface of the ceramic green sheet, and the ceramic green sheet is wound around a round bar formed of an organic resin material and fired. It can be formed by the method.

  The drive unit 5 (FIG. 1A) includes a power supply device 13 that applies an AC voltage between the inner electrode 9 and the outer electrode 11, and a control device 15 that controls the power supply device 13.

  The AC voltage applied by the power supply device 13 may be a voltage whose potential is continuously changed, represented by a sine wave or the like, or a pulse-like voltage whose potential change is discontinuous. . The alternating voltage may be one in which the potential varies with respect to the reference potential in both the inner electrode 9 and the outer electrode 11, or one of the inner electrode 9 and the outer electrode 11 is connected to the reference potential, and the other The potential may vary only with respect to the reference potential. The fluctuation of the potential may be positive and negative with respect to the reference potential, or may be only positive and negative with respect to the reference potential.

  For example, the control device 15 controls on / off of voltage application by the power supply device 13 or the magnitude of the applied voltage in accordance with a predetermined sequence or in accordance with a user operation.

  The dimensions of the dielectric 7, the inner electrode 9 and the outer electrode 11, and the magnitude and frequency of the AC voltage vary depending on the technology to which the ion wind generator 1 is applied or the nature of the required ion wind. It may be set appropriately according to the circumstances.

  Next, the operation of the ion wind generator 1 will be described.

  The ion wind generator 3 is placed in the atmosphere, and air exists around the ion wind generator 3. The ion wind generator 3 may be used by being placed in a specific type of gas atmosphere (for example, in a nitrogen atmosphere).

  When a voltage is applied between the inner electrode 9 and the outer electrode 11 by the power supply device 13 and the potential difference between these electrodes exceeds a certain threshold value, dielectric barrier discharge occurs. And a plasma is produced | generated with discharge.

  Electrons or ions in the plasma move due to the electric field formed by the inner electrode 9 and the outer electrode 11. Neutral molecules also move with electrons or ions. In this way, an ionic wind is induced.

  More specifically, in the through hole 7h, the ion wind is induced in a direction orthogonal to the spiral of the inner electrode 9 and the outer electrode 11 by electrons or ions moving from the inner electrode 9 side to the outer electrode 11 side. . Therefore, as indicated by the arrow b1 (FIG. 1A), a spiral ion wind that is swirled in the opposite direction to the spiral of the inner electrode 9 and the outer electrode 11 is induced in the through hole 7h. Become. And ion wind is discharge | released from the through-hole 7h in the direction shown by the arrow a1.

  According to the first embodiment described above, the ion wind generator 3 includes the dielectric 7 in which the through hole 7 h is formed, and the inner electrode 9 disposed on the through hole 7 h side with respect to the outer peripheral surface 7 b of the dielectric 7. And disposed on the outer peripheral side of the dielectric 7 with respect to the inner electrode 9, separated from the inner electrode 9 by the dielectric 7, and on one side of the through hole 7 h in the penetrating direction with respect to the inner electrode 9 (the side indicated by the arrow a 1). And an outer electrode 11 capable of inducing an ionic wind flowing through the through hole 7h to the side indicated by the arrow a1 when a voltage is applied to the inner electrode 9.

  Accordingly, the ion wind is generated in the through hole 7h and becomes a flow concentrated by the rectifying effect of the through hole 7h. Since the through-hole 7h is formed in the dielectric 7 for generating the dielectric barrier discharge, the number of members does not increase, and the ion wind receives the rectifying effect of the through-hole 7h from the time of occurrence. . As a result, for example, it is possible to realize a small ion wind generator that can efficiently generate an aggregated ion wind.

  The inner electrode 9 and the outer electrode 11 are formed so as to be capable of inducing an ionic wind flowing spirally through the through hole 7h. Therefore, for example, the straightness of the ion wind is improved by applying a rotational motion. Improvement in straightness itself can contribute to the efficient use of ion wind. Further, improvement in straightness can increase the wind speed of ion wind emitted from the dielectric 7. In addition, for example, an effect of stirring a fluid (for example, plasma and a gas modified by the plasma) inside the dielectric 7 by a spiral flow is expected.

  The inner electrode 9 and the outer electrode 11 extend in a spiral around the through hole 7h. Therefore, as described above, it is possible to generate an ion wind that flows spirally. Further, it is relatively easy to grasp the correspondence between the spiral shape (pitch, number of turns, etc.) of the inner electrode 9 and the outer electrode 11 and the spiral shape of the generated ion wind, and the desired spiral shape. It is easy to generate an ion wind.

  When the number of turns of the spiral formed by the inner electrode 9 and the outer electrode 11 is plural (for example, 2) (this case is also included in the present invention), with respect to the first round portion from the upstream side of the outer electrode 11. Thus, the second round portion from the upstream side of the inner electrode 9 is located on the downstream side. Therefore, if the helical pitch is small, the ion wind in the direction opposite to the arrow a1 may be induced in the through hole 7h by the first round part of the outer electrode 11 and the second round part of the inner electrode 9. There is. On the other hand, in this embodiment, the number of spiral turns is 1. Therefore, it is not necessary to consider avoiding unintended interference between the inner electrode 9 and the outer electrode 11, and the design is easy.

<Second Embodiment>
FIG. 2 is a perspective view schematically showing a main part of the ion wind generator 101 according to the second embodiment of the present invention.

  The ion wind generator 101 is different from the ion wind generator 1 of the first embodiment in the shape of the inner electrode and the outer electrode of the ion wind generator 103. Specifically, in the ion wind generator 103, as if the inner electrode 9 and the outer electrode 11 of the first embodiment were divided into a plurality of portions in the spiral extending direction, a plurality of sets of the inner electrode 109 and the outer electrode 111 were formed. Is formed.

  More specifically, for example, the inner electrode 109 and the outer electrode 111 are formed in a substantially rectangular shape, and the lengths in the direction along the spiral are substantially the same (see FIG. 7A). In each set of the inner electrode 109 and the outer electrode 111, the outer electrode 111 has a downstream region 111m that is shifted in a direction orthogonal to the spiral with respect to the inner electrode 109. The plurality of sets of the inner electrode 109 and the outer electrode 111 are arranged in a spiral shape to form a dotted spiral.

  The plurality of inner electrodes 109 are connected in parallel to each other (only a part is shown in FIG. 2). Similarly, the plurality of outer electrodes 111 are connected in parallel to each other (only a part is shown in FIG. 2). These may be connected in series.

  According to the second embodiment described above, the same effect as in the first embodiment can be obtained. That is, the ionic wind becomes an aggregated flow, and an ionic wind that flows spirally can be realized.

<Third Embodiment>
FIG. 3 is a perspective view schematically showing a main part of an ion wind generator 201 according to the third embodiment of the present invention.

  The ion wind generator 201 is different from the ion wind generator 1 of the first embodiment in the shape of the inner electrode and the outer electrode of the ion wind generator 203. Specifically, it is as follows.

  The inner electrode 209 and the outer electrode 211 are formed in an annular shape surrounding the through hole 7h. More specifically, for example, the inner electrode 209 and the outer electrode 211 are each formed in a layer shape with a constant thickness and a long shape with a constant width. The inner electrode 209 circulates in a direction perpendicular to the through direction of the through hole 7 h on the inner peripheral surface 7 a of the dielectric 7, and the outer electrode 211 extends in the through direction of the through hole 7 h on the outer peripheral surface 7 b of the dielectric 7. It circulates in the orthogonal direction.

  Similar to the first embodiment, the outer electrode 211 has a downstream area 211m located on one side (downstream side) of the through hole 7h from the inner electrode 209. As in the first embodiment, the distance (or the overlapping amount) between the inner electrode 209 and the outer electrode 211 in the through direction of the through hole 7h may be set as appropriate. The widths of the inner electrode 209 and the outer electrode 211 may be set as appropriate.

  When an AC voltage is applied to the inner electrode 209 and the outer electrode 211, an ion wind from the inner electrode 209 to the outer electrode 211 side is induced in the through hole 7h as in the first embodiment. However, since the inner electrode 209 and the outer electrode 211 circulate in a direction orthogonal to the penetrating direction of the through hole 7h, the ion wind flows parallel to the penetrating direction of the through hole 7h as indicated by an arrow b201. And ion wind is discharge | released from the through-hole 7h in the direction shown by the general arrow a1.

  According to the above third embodiment, the same effect as in the first embodiment can be obtained. That is, the ion wind becomes an aggregated flow. Further, since the inner electrode 209 and the outer electrode 211 are formed in an annular shape surrounding the through hole 7h, an ion wind can be induced over the entire circumference of the through hole 7h, and the concentrated ion wind can be efficiently generated. Can be generated.

<Fourth Embodiment>
FIG. 4 is a perspective view schematically showing a main part of an ion wind generator 301 according to the fourth embodiment of the present invention.

  The ion wind generator 303 of the ion wind generator 301 has a configuration in which the combination of the inner electrode 209 and the outer electrode 211 is increased in the penetration direction of the through hole 7h in the ion wind generator 203 of the third embodiment. Yes.

  Note that the number of the plurality of sets of inner electrodes 209 and outer electrodes 211 arranged along the penetration direction may be set as appropriate, but FIG. 4 illustrates two cases. Moreover, in each set, although the structure (for example, width | variety) of the inner side electrode 209 and the outer side electrode 211 may mutually be same or different, FIG. 4 has illustrated the same case.

  The drive unit 305 is configured to be able to select a set to which a voltage is applied from a plurality of sets of inner electrodes 209 and outer electrodes 211. Specifically, for example, the drive unit 305 includes a switch unit 317 that can switch a connection state between the power supply device 13 and a plurality of sets of inner electrodes 209 and outer electrodes 211.

  The switch unit 317 includes a switch 318 provided between the power supply device 13 and an arbitrary set of a plurality of sets of inner electrodes 209 and outer electrodes 211. FIG. 4 illustrates a case where the switch 318 is not provided for the upstream set, and the switch 318 is provided for the downstream set. The switch 318 is configured by, for example, an FET (Field Effect Transistor).

  And the switch part 317 can switch the connection state of the power supply device 13 and two groups between two states, the state in which two sets are connected, and the state in which only one set is connected. It is.

  According to the above fourth embodiment, the same effect as in the third embodiment can be obtained. That is, the ion wind becomes an aggregated flow, and the ion wind can be induced over the entire circumference of the through hole 7h. Further, in the fourth embodiment, since a plurality of sets of inner electrode 209 and outer electrode 211 are arranged along the through hole 7h, the wind speed can be increased.

  In addition, since the ion wind generator 301 includes the switch unit 317 that switches the connection state between the power supply device 13 and the plurality of sets of the inner electrode 209 and the outer electrode 211, a power supply device that can change the voltage is provided. The wind speed can be increased / decreased at a lower cost compared to the case of using or using a plurality of power supply devices 13 (these cases are also included in the present invention).

<Fifth Embodiment>
FIG. 5 is a cross-sectional view schematically showing a main part of an ion wind generator 401 according to the fifth embodiment of the present invention, and corresponds to FIG. 1B of the first embodiment.

  The ion wind generator 401 is different from the first embodiment in that the outer electrode 11 of the ion wind generator 403 is embedded in the dielectric 407.

  Also in the ion wind generator 403, when a voltage is applied to the inner electrode 9 and the outer electrode 11, as in the first embodiment, the inner electrode 9 side to the outer electrode 11 side (arrow a1) in the through hole 407h. Ion wind flowing to the side indicated by

  Here, in the first embodiment, an ion wind (back wind) flowing from the outer electrode 11 side to the inner electrode 9 side (the side opposite to the direction indicated by the arrow a1) can also occur outside the dielectric 7.

  However, in the fifth embodiment, since the outer electrode 11 is embedded in the dielectric 407 and is not exposed from the outer peripheral surface 407b, the generation of such a back wind is suppressed. Alternatively, by setting the thickness of the dielectric 407 between the outer peripheral surface 407b and the outer electrode 11 to a sufficient thickness, no back wind is generated. As a result, the air volume in the direction indicated by the arrow a1 is increased as compared with the first embodiment. In the first embodiment, the concentration of the ion wind is increased by the occurrence of the back wind on the outer peripheral side.

  According to the fifth embodiment described above, the same effect as in the first embodiment can be obtained. That is, the ion wind becomes a flow that is aggregated by the rectifying effect of the through hole 7h. Further, in the fifth embodiment, since the outer electrode 11 is embedded in the dielectric 407, for example, the generation of headwind is suppressed, the outer electrode 11 is protected, and the insulation to the outside is improved. You can make it.

<Sixth Embodiment>
FIG. 6 is a cross-sectional view schematically showing a main part of an ion wind generator 501 according to the sixth embodiment of the present invention, and corresponds to FIG. 1B of the first embodiment.

  As in the fifth embodiment, the ion wind generator 503 of the ion wind generator 501 has the outer electrode 11 embedded in the dielectric 507, but the third electrode 510 is provided on the outer peripheral surface 507b of the dielectric 507. This is different from the fifth embodiment.

  For example, the third electrode 510 is formed in the same shape as the inner electrode 9 (however, there is a dimensional difference due to the difference between the radius of the inner peripheral surface 507a and the radius of the outer peripheral surface 507b). The third electrode 510 is connected in parallel with the inner electrode 9, for example, and a voltage is applied between the third electrode 510 and the outer electrode 11.

  When an AC voltage is applied between the third electrode 510 and the outer electrode 11, as in the case where an AC voltage is applied between the inner electrode 9 and the outer electrode 11, from the third electrode 510 side to the outer electrode 11 side. A flowing ion wind is generated on the outer peripheral surface 507b. The ion wind flows along the outer peripheral surface 507b, and merges with the ion wind emitted from the through hole 507h at the end of the dielectric 7 as indicated by an arrow a503.

  According to the sixth embodiment described above, the same effect as in the first embodiment can be obtained. That is, the ion wind becomes a flow that is aggregated by the rectifying effect of the through hole 7h. In the sixth embodiment, since the ion wind in the same direction as that in the through hole 507h is also induced on the outer peripheral surface 507b, the air volume can be increased.

  The present invention is not limited to the above embodiment, and may be implemented in various aspects.

  The ion wind generator and ion wind generator of the present invention can be used in various fields. For example, the present invention may be used for forming a flow in a minute space (for example, forming cooling air for a small electronic device), may be used for gas reforming and delivery, and propulsion of a small electronic device. May be used for power.

  The above embodiments may be appropriately combined. For example, the switch unit 317 shown in the fourth embodiment may be applied to the second embodiment. That is, a switch unit capable of selectively applying a voltage to a plurality of sets of inner electrodes 109 and outer electrodes 111 is provided, and a voltage is applied to all pairs of electrode pairs, or voltages are applied to some pairs of electrode pairs. It is also possible to obtain an effect of increasing or decreasing the wind speed at a low cost by making it possible to apply. Conversely, the plurality of sets of electrode pairs of the fourth embodiment may be simply connected in parallel or in series as in the second embodiment. In addition, for example, the configuration shown in the fifth and sixth embodiments for suppressing a back wind or inducing an ion wind in the same direction as in the through hole on the outer peripheral surface of the dielectric is the first embodiment. Not only the form but also the second to fourth embodiments may be applied.

  The dielectric is not limited to a cylindrical one. For example, in a block-shaped dielectric, a bent through hole may be formed. Further, when the dielectric is cylindrical, the cross-sectional shape of the cylinder is not limited to a circle, and may be, for example, a polygon or an ellipse. The thickness of the tube may vary. The cylinder may extend in a bent or curved manner. Further, the dielectric does not have to function as a base for fixing the inner electrode and the outer electrode as long as they are separated from each other.

  The inner electrode is not limited to the one exposed in the through hole. For example, the inner electrode may be embedded in a dielectric, or may be coated with a dielectric material. In addition, when the inner electrode is exposed in the through hole, the inner electrode may be fitted into a recess formed on the inner peripheral surface of the dielectric, and only a part of the inner electrode may be exposed from the dielectric.

  The outer electrode is not limited to those exposed on the outer peripheral surface of the dielectric and those embedded in the dielectric. For example, the outer electrode may be coated with a dielectric material. In addition, when the outer electrode is exposed on the outer peripheral surface of the dielectric, the outer electrode may be fitted into a recess formed on the outer peripheral surface of the dielectric, and only a part may be exposed from the dielectric.

  The inner electrode and the outer electrode are not limited to shapes and arrangements that realize an ion wind that flows spirally and an ion wind that flows parallel to the through hole. For example, the shape and arrangement of the inner electrode and the outer electrode may be set so as to realize a more complicated flow for the purpose of disturbing the gas in the through hole. Further, for example, by providing a switch unit, the wind direction may be switched, such as switching between a spiral flow and a parallel flow.

  The inner electrode and the outer electrode formed so as to be capable of inducing a spirally flowing ion wind are not limited to the spiral electrode or the spiral electrode as shown in the embodiment. For example, it is as follows.

  FIG. 7A is a diagram schematically showing the inner electrode 109 and the outer electrode 111 of the second embodiment in plan view. As indicated by an arrow b3, when a voltage is applied to the inner electrode 109 and the outer electrode 111, an ion wind flowing in a direction inclined with respect to the penetrating direction of the through-hole 7h causes the inner peripheral surface 7a (FIG. Induced). Since this ion wind flows along the inner peripheral surface 7a that circulates, it eventually flows in a spiral shape. That is, it is possible to generate a spiral flow by providing only one set of the inner electrode 109 and the outer electrode 111.

  Further, when a plurality of electrode pairs capable of inducing an ion wind flowing in a direction inclined with respect to the penetration direction of the through hole 7h, such as the inner electrode 109 and the outer electrode 111, are arranged, the plurality of electrode pairs. If the wind directions of the ion wind are substantially the same when the inner peripheral surface 7a is developed in a plane, the components in the rotational direction of the ion wind are not canceled out and a spiral flow can be realized.

  For example, even if a plurality of sets of the inner electrode 109 and the outer electrode 111 are arranged linearly along the penetration direction of the through hole 7h or arranged so as to circulate in a direction orthogonal to the penetration direction, The flow is feasible.

  Furthermore, an electrode pair that induces an ion wind flowing in a direction inclined with respect to such a penetration direction is a direction in which a rectangular electrode is inclined in the penetration direction of the through hole 7h, such as the inner electrode 109 and the outer electrode 111. It is not limited to what is displaced.

  FIG. 7B is a diagram schematically showing a modification of the electrode pair capable of inducing an ionic wind flowing in a direction inclined with respect to the penetration direction in a plan view. The inner electrode 609 is formed in a rectangle having sides that are parallel or orthogonal to the through direction of the through hole 7h, and its downstream edge 609a is orthogonal to the through direction of the through hole 7h. On the other hand, the outer electrode 611 is formed in a right triangle shape with the hypotenuse as the downstream edge 611a. In such a set of the inner electrode 609 and the outer electrode 611, the length d of the downstream region 611m of the outer electrode 611 in the penetrating direction of the through hole 7h is increased on one side in the direction orthogonal to the penetrating direction. Therefore, the wind direction of the ion wind is inclined with respect to the penetration direction as indicated by the arrow b3.

  As described above, the electrode pairs that realize the spirally flowing ionic wind can have various shapes and arrangements.

  As illustrated in the first, third, and fourth embodiments, the long electrode pair is not limited to one that extends with a certain width or that the inner electrode and the outer electrode maintain a certain distance. . That is, the electrode may be such that the width or the like changes locally and locally gives strength or weakness to the ion wind.

  The electrode pairs formed in an annular shape surrounding the through hole as exemplified in the third and fourth embodiments are not limited to those that circulate in a direction orthogonal to the through direction of the through hole. For example, the electrode pair may circulate in a direction inclined in the penetrating direction, or may extend in a zigzag manner.

  The third electrode (510) only needs to be positioned on the outer peripheral side of the dielectric relative to the outer electrode, and may be embedded in the dielectric or coated with a dielectric material, like the inner electrode and the outer electrode. Then, it may be fitted into the recess. Further, the third electrode is not limited to one in which the outer electrode is formed so as to have the downstream region in the same direction as the inner electrode with respect to the third electrode. In other words, the third electrode may generate an ion wind in a direction opposite to the ion wind in the through hole. The third electrode is not limited to one connected in parallel with the inner electrode. For example, the third electrode may be connected in series with the inner electrode, or a voltage having a frequency and / or amplitude different from that of the inner electrode may be applied between the third electrode and the outer electrode.

  The switch may be appropriately provided for a plurality of electrode pairs. For example, the switches may be provided individually for all the sets, or may be provided in common for some of the sets.

  An ion wind generator according to a second aspect of the present invention, that is, a flow path constituent member in which a through hole is formed, and a first capable of inducing an ion wind spirally flowing through the through hole by applying a voltage. In the ion wind generator including the second electrode, the through hole may not be formed in the dielectric. For example, a through hole may be formed in an appropriate conductive member or insulating member, and a flat dielectric and an electrode disposed on the dielectric may be disposed in the through hole. Further, the ion wind is not limited to that caused by dielectric barrier discharge, and a dielectric may not be provided.

  DESCRIPTION OF SYMBOLS 1 ... Ion wind generator, 3 ... Ion wind generator, 7 ... Dielectric, 7b ... Outer peripheral surface, 7h ... Through-hole, 9 ... Inner electrode, 11 ... Outer electrode, 11m ... Downstream area part

Claims (11)

A dielectric having a through hole;
An inner electrode disposed closer to the through hole than the outer peripheral surface of the dielectric;
It is arranged on the outer peripheral side of the dielectric from the inner electrode and is separated from the inner electrode by the dielectric, and includes a downstream region portion located on one side of the through hole in the through direction from the inner electrode, An outer electrode capable of inducing an ionic wind flowing through the through hole to the one side by applying a voltage between the inner electrode and the inner electrode;
An ion wind generator. The ion wind generator according to claim 1, wherein the inner electrode and the outer electrode are formed so as to be capable of inducing an ion wind that spirally flows through the through hole. The ion wind generator according to claim 2, wherein the inner electrode and the outer electrode extend in a spiral around the through hole. A plurality of sets of the inner electrode and the outer electrode are arranged in a spiral around the through-hole,
The ion wind generator according to claim 2, wherein each set of the inner electrode and the outer electrode can induce an ion wind in a direction orthogonal to an arrangement direction thereof. The ion wind generator according to claim 3 or 4, wherein the number of turns of the spiral formed by the inner electrode and the outer electrode is 1 or less. The ion wind generator according to claim 1, wherein the inner electrode and the outer electrode are formed in an annular shape surrounding the through hole. The ion wind generator according to claim 6, wherein a plurality of sets of the inner electrode and the outer electrode are arranged along the through hole. The ion wind generator according to claim 1, wherein the outer electrode is embedded in the dielectric. A flow path component in which a through hole is formed;
First and second electrodes capable of inducing an ionic wind flowing spirally through the through-hole when a voltage is applied;
An ion wind generator. A dielectric having a through hole;
An inner electrode disposed closer to the through hole than the outer peripheral surface of the dielectric;
An outer side that is disposed on the outer peripheral side of the dielectric with respect to the inner electrode, is separated from the inner electrode by the dielectric, and includes a downstream region located on one side of the through hole in the penetration direction with respect to the inner electrode. Electrodes,
A power source capable of applying a voltage between the inner electrode and the outer electrode to induce an ion wind flowing through the through hole to the one side of the electrodes;
An ion wind generator. A plurality of sets of the inner electrode and the outer electrode are provided,
The ion wind generator according to claim 10, wherein a switch unit that switches a connection state between the power source and the plurality of sets of the inner electrode and the outer electrode is provided.

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