JP2012093890A - Auto-tuning execution device and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently execute accurate auto-tuning (AT) in a multiloop control system where one-sided interference occurs.SOLUTION: An auto-tuning execution device comprises: an auto-tuning (AT) execution part 1 for executing limit-cycle based AT; a main control loop registration part 2 for preliminarily storing a control loop on a side giving interference as a main control loop; a vertical motion width detection part 3 for detecting vertical motion width of a controlled variable caused to the control loop while executing AT of the control loop other than the main control loop; a maximum variation detection part 4 for detecting a maximum variation of a controlled variable caused to the control loop other than the main control loop by interference between loops while executing AT of the main control loop; and an upper limit calculation part 5 for calculating an upper limit of manipulated variable at the time of executing AT of the main control loop, based on the maximum variation and the vertical motion width, and for setting the upper limit to the AT execution part 1.

Description

  The present invention relates to an auto-tuning execution device that performs limit cycle type auto-tuning that generates a limit cycle with a constant operation amount amplitude in a multi-loop control system and sets a control parameter of a controller of each control loop. The present invention relates to a technique for setting an operation amount upper and lower limit value at the time of execution of auto-tuning at the time before shipment.

  In control equipment such as a temperature controller, a limit cycle type auto-tuning (hereinafter referred to as AT) function is widely adopted, and a PID parameter value for PID control calculation is automatically determined. The limit cycle type AT is characterized in that the control amount PV is moved up and down by changing the manipulated variable MV to a maximum and a minimum, for example. Therefore, since the AT is performed, the heating device to be controlled is brought into a non-operating state, so that it is necessary to efficiently execute or avoid wasting execution results.

Moreover, in a heating apparatus provided with a plurality of similar control target zones, a plurality of temperature controllers are used. That is, a plurality of PID control loops (multi-loops) for controlling the temperature of the control target zone corresponding to each temperature controller are formed. In such a multi-loop temperature control system, basically, it is preferable that a plurality of temperature controllers execute AT individually. Therefore, on the assumption that the characteristics of each control loop do not change greatly, a method has been proposed in which the PID parameter obtained by executing AT for a typical control loop is diverted to a control loop where AT is not executed. (See Patent Document 1).
Further, the AT is used not only for determining the PID parameter value but also for estimating the temperature control stop time as disclosed in, for example, Patent Document 2.

JP 2009-301392A JP 2010-170254 A

  The AT function can be effectively used in addition to the adjustment of the PID parameter as disclosed in Patent Document 2, and the AT function is finally performed due to a special situation (for example, erasing due to an operation error) that requires the adjustment of the PID parameter. There are not a few cases of re-execution at the site of control technology users (end users). In this case, even in a multi-loop control system, the necessity of executing AT for each individual control loop is unavoidable, and the efficiency improvement by the method disclosed in Patent Document 1 is not effective.

  Furthermore, in order to efficiently perform multi-loop AT, it is necessary to make an operator's judgment and operation regarding inter-loop interference. If there is inter-loop interference, inter-loop interference due to the AT operation and the control operation is received until the temperature of the control loop that executed the AT settles, so the other control loops must wait for the AT to start executing.

  The present invention has been made to solve the above-described problem, and in a multi-loop control system in which one-sided interference occurs, an auto that can efficiently perform an accurate AT by reducing the inter-loop interference reasonably. An object is to provide a tuning execution apparatus and method.

  The present invention is an auto-tuning execution device that executes limit-cycle type auto-tuning (AT) for generating a limit cycle with a constant operation amount amplitude and setting a control parameter of a controller of each control loop in a multi-loop control system. AT execution means for executing AT of limit cycle method, main control loop registration means for preliminarily storing the control loop on the interference side as a main control loop, and during AT execution of control loops other than the main control loop A vertical movement width detecting means for detecting a vertical movement width of the control amount generated in the control loop, and a control amount generated due to inter-loop interference in a control loop other than the main control loop during AT execution of the main control loop. Maximum fluctuation amount detecting means for detecting the maximum fluctuation amount, and the main control based on the maximum fluctuation amount and the vertical movement width It is characterized in that to calculate the operation amount upper limit value at the time of AT execution-loop and a upper limit value calculating means for setting the AT execution unit.

  Further, the auto-tuning execution apparatus of the present invention includes an AT execution means for executing limit cycle AT, a main control loop registration means for preliminarily storing a control loop on the side giving interference as a main control loop, and the main control loop. A vertical movement width detecting means for detecting a vertical movement width of a control amount generated in the control loop during AT execution of a control loop other than the control loop, and a control loop other than the main control loop during AT execution of the main control loop, Maximum fluctuation amount detecting means for detecting the maximum fluctuation amount of the control amount generated by the inter-loop interference, and an upper limit and an upper limit of the operation amount when performing AT of the main control loop based on the maximum fluctuation amount and the vertical movement width And an upper / lower limit value calculating means for calculating a value and setting it in the AT execution means.

  Further, the auto-tuning execution device of the present invention includes an AT execution means for executing limit cycle AT, a main control loop registration means for storing a main control loop, and a control amount generated in a control loop during AT execution. A vertical movement width detecting means for detecting a moving width; a maximum fluctuation amount detecting means for detecting a maximum fluctuation amount of a control amount caused by inter-loop interference in a control loop other than a control loop that is performing AT; and the maximum fluctuation amount Determining a one-sided interference based on the vertical movement width, determining a control loop on which the interference is given, and registering this control loop as a main control loop in the main control loop registration unit, and the main control Based on the maximum fluctuation amount detected during the AT execution of the loop and the vertical movement width detected during the AT execution of the control loop other than the main control loop, A of the main control loop It is characterized in that to calculate the operation amount upper limit value at runtime and a upper limit value calculating means for setting the AT execution unit.

  Further, the auto-tuning execution device of the present invention includes an AT execution means for executing limit cycle AT, a main control loop registration means for storing a main control loop, and a control amount generated in a control loop during AT execution. A vertical movement width detecting means for detecting a moving width; a maximum fluctuation amount detecting means for detecting a maximum fluctuation amount of a control amount caused by inter-loop interference in a control loop other than a control loop that is performing AT; and the maximum fluctuation amount Determining a one-sided interference based on the vertical movement width, determining a control loop on which the interference is given, and registering this control loop as a main control loop in the main control loop registration unit, and the main control Based on the maximum fluctuation amount detected during the AT execution of the loop and the vertical movement width detected during the AT execution of the control loop other than the main control loop, A of the main control loop It is characterized in that to calculate the operation amount upper limit value at the time of execution and the operation amount lower limit value and a lower limit value calculating means on to be set in the AT execution unit.

  Further, in one configuration example of the auto-tuning execution device of the present invention, the upper limit value calculating means includes the maximum fluctuation amount, the vertical movement width, an initial value of an operation amount upper limit value during AT execution of the main control loop, and the The limit of the main control loop for causing the influence rate of the interference to the vertical movement width of the control loops other than the main control loop to be a predetermined value based on the initial value of the operation amount lower limit value during AT execution of the main control loop An operation amount range calculation unit that calculates an operation amount range of a cycle; a candidate value calculation unit that calculates a candidate value of an operation amount upper limit value during AT execution of the main control loop based on the operation amount range; and the candidate value And an update value determining means for setting a minimum value of initial values of the operation amount upper limit value as an update value of the operation amount upper limit value during AT execution of the main control loop. .

  Further, in one configuration example of the auto-tuning execution device of the present invention, the upper and lower limit value calculating means includes the maximum fluctuation amount, the vertical movement width, and an initial value of an operation amount upper limit value during AT execution of the main control loop. Based on the initial value of the manipulated variable lower limit at the time of AT execution of the main control loop, the influence rate of interference with respect to the vertical movement width of the control loop other than the main control loop becomes a predetermined value. An operation amount range calculating means for calculating an operation amount range of a limit cycle, and a candidate for calculating each candidate value of an operation amount upper limit value and an operation amount lower limit value during AT execution of the main control loop based on the operation amount range A value calculating means, a minimum value of the operation amount upper limit candidate value and the operation amount upper limit initial value as an update value of the operation amount upper limit value during AT execution of the main control loop, and Update value determining means for setting the maximum value among the candidate values for the production lower limit value and the initial value of the operation quantity lower limit value as an update value of the operation quantity lower limit value during AT execution of the main control loop. It is a feature.

  In the auto-tuning execution method of the present invention, the AT execution step for sequentially executing ATs of a plurality of control loops one by one by the AT execution means and the control loop on the side giving interference are stored in advance as the main control loop. A vertical movement width detecting step for recognizing the main control loop with reference to a main control loop registration means and detecting a vertical movement width of a control amount generated in the control loop during AT execution of a control loop other than the main control loop And recognizing the main control loop with reference to the main control loop registration means, to the control loop other than the main control loop during AT execution of the main control loop, the maximum variation of the control amount caused by the inter-loop interference A maximum fluctuation amount detection step to be detected; and an upper limit value of an operation amount at the time of AT execution of the main control loop based on the maximum fluctuation amount and the vertical movement width, to calculate the AT actual value. It is characterized in further comprising an upper limit value calculation step of setting the unit.

  In the auto-tuning execution method of the present invention, the AT execution step for sequentially executing ATs of a plurality of control loops one by one by the AT execution means and the control loop on the side giving interference are stored in advance as the main control loop. A vertical movement width detecting step for recognizing the main control loop with reference to a main control loop registration means and detecting a vertical movement width of a control amount generated in the control loop during AT execution of a control loop other than the main control loop And recognizing the main control loop with reference to the main control loop registration means, to the control loop other than the main control loop during AT execution of the main control loop, the maximum variation of the control amount caused by the inter-loop interference A maximum fluctuation amount detection step to be detected, and an operation amount upper limit value and an operation amount lower limit value during AT execution of the main control loop are calculated based on the maximum fluctuation amount and the vertical movement width. Is characterized in further comprising a lower limit value calculation step on to be set in the AT execution means to.

  Also, the auto-tuning execution method of the present invention detects an AT execution step in which ATs of a plurality of control loops are sequentially executed one by one by the AT execution means, and a vertical movement width of a control amount generated in the control loop during the AT execution. A vertical movement width detecting step, a maximum fluctuation amount detecting step for detecting a maximum fluctuation amount of a control amount caused by inter-loop interference in a control loop other than the control loop that is performing AT, the maximum fluctuation amount and the vertical movement One-side interference is determined based on the width, a control loop on the side that gives interference is determined, a registration processing step of registering this control loop as a main control loop in the main control loop registration means, and AT of the main control loop being executed And when the main control loop performs AT based on the maximum fluctuation amount detected at the time and the vertical movement width detected during AT execution of the control loop other than the main control loop. It is characterized in further comprising an upper limit value calculating step calculates and sets the definitive operation amount upper limit value to the AT execution unit.

  Also, the auto-tuning execution method of the present invention detects an AT execution step in which ATs of a plurality of control loops are sequentially executed one by one by the AT execution means, and a vertical movement width of a control amount generated in the control loop during the AT execution. A vertical movement width detecting step, a maximum fluctuation amount detecting step for detecting a maximum fluctuation amount of a control amount caused by inter-loop interference in a control loop other than the control loop that is performing AT, the maximum fluctuation amount and the vertical movement One-side interference is determined based on the width, a control loop on the side that gives interference is determined, a registration processing step of registering this control loop as a main control loop in the main control loop registration means, and AT of the main control loop being executed And when the main control loop performs AT based on the maximum fluctuation amount detected at the time and the vertical movement width detected during AT execution of the control loop other than the main control loop. Is characterized in further comprising a lower limit value calculation step on to be set in the AT execution means calculates the operation amount upper limit value definitive and the operation amount lower limit.

  According to the present invention, the influence of interference on the vertical movement width of the control loop other than the main control loop can be suppressed by the operation amount upper limit automatically set by the upper limit calculating means. Therefore, after setting the operation amount upper limit value, ATs of a plurality of control loops can be executed simultaneously. As a result, according to the present invention, it is possible to efficiently and accurately perform AT.

  In the present invention, the influence of interference on the vertical movement width of the control loop other than the main control loop can be suppressed by the operation amount upper limit value and the operation amount lower limit value automatically set by the upper and lower limit value calculating means. Therefore, after setting the operation amount upper limit value and the operation amount lower limit value, ATs of a plurality of control loops can be executed simultaneously. As a result, according to the present invention, it is possible to efficiently and accurately perform AT.

  In the present invention, even when the one-sided interference cannot be grasped, the registration processing means determines the main control loop, and the upper limit value calculating means automatically sets the operation amount upper limit value of the main control loop. The influence of interference on the vertical movement width of control loops other than the control loop can be suppressed. Therefore, after setting the operation amount upper limit value, ATs of a plurality of control loops can be executed simultaneously. As a result, according to the present invention, it is possible to efficiently and accurately perform AT.

  In the present invention, even when the one-sided interference cannot be grasped, the registration processing means determines the main control loop, and the upper and lower limit value calculating means automatically sets the operation amount upper limit value and the operation amount lower limit value of the main control loop. By setting, the influence of interference on the vertical movement width of the control loop other than the main control loop can be suppressed. Therefore, after setting the operation amount upper limit value and the operation amount lower limit value, ATs of a plurality of control loops can be executed simultaneously. As a result, according to the present invention, it is possible to efficiently and accurately perform AT.

It is a figure which shows the structure of the heating apparatus used as the application object of the auto tuning execution apparatus which concerns on the 1st Embodiment of this invention. It is a block diagram which shows the structure of the auto tuning execution apparatus which concerns on the 1st Embodiment of this invention. It is a flowchart which shows operation | movement of the auto tuning execution apparatus which concerns on the 1st Embodiment of this invention. It is a figure explaining operation | movement of the largest variation | change_quantity detection part of the auto tuning execution apparatus which concerns on the 1st Embodiment of this invention. It is a block diagram which shows the structure of the auto tuning execution apparatus which concerns on the 2nd Embodiment of this invention. It is a flowchart which shows operation | movement of the auto tuning execution apparatus which concerns on the 2nd Embodiment of this invention. It is a block diagram which shows the structure of the auto-tuning execution apparatus which concerns on the 3rd Embodiment of this invention. It is a flowchart which shows operation | movement of the auto tuning execution apparatus which concerns on the 3rd Embodiment of this invention. It is a block diagram which shows the structure of the auto tuning execution apparatus which concerns on the 4th Embodiment of this invention. It is a flowchart which shows operation | movement of the auto-tuning execution apparatus which concerns on the 4th Embodiment of this invention.

[Principle of the Invention]
For example, assume a business process in which a device manufacturer ships to an end user. If there is only one-sided interference, the device manufacturer may supply the amount of up / down movement of the limit cycle on the side giving the interference reliably and appropriately at the end user's site. As a solution for this, as disclosed in Japanese Patent Laid-Open No. 2003-330504, the operation amount upper limit value AT_OH and the operation amount lower limit value AT_OL, which are operation amounts at the time of a limit cycle, are set in advance before shipment. preferable.

  More specifically, in the case of a one-sided interference system, the inventor reduces the manipulated variable upper limit value AT_OH of the control loop on the interference side or increases the manipulated variable lower limit value AT_OL to Since interference can be reduced, we focused on the ability to perform AT for all control loops simultaneously. In order to realize the simultaneous execution of such AT, the amount of operation of the control loop on the side giving the interference is measured by measuring the vertical movement width of the control amount PV due to the interference during the AT which the equipment manufacturer performs precisely before shipping. The inventors have conceived that the upper limit value AT_OH and the operation amount lower limit value AT_OL are automatically set.

[First Embodiment]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a configuration of a heating apparatus to which an auto tuning execution apparatus according to a first embodiment of the present invention is applied. In the example shown in FIG. 1, the temperature PV inside the oxidation diffusion furnace 100 is controlled by temperature controllers (PID controllers) 101-1 to 101-3. A silicon wafer 105 is carried into the quartz tube 104 in the oxidation diffusion furnace 100. Temperature sensors 102-1 to 102-3 measure temperatures PV of control zones Z1 to Z3 heated by heaters 103-1 to 103-3, respectively. The temperature controllers 101-1 to 101-3 calculate the manipulated variable MV so that the temperatures PV measured by the temperature sensors 102-1 to 102-3 coincide with the temperature set value SP, and the heaters 103-1 to 103-1. Output to 103-3.

  Thus, the oxygen introduced into the quartz tube 104 in the oxidation diffusion furnace 100 and the silicon wafer 105 are heated to form an oxide film on the surface of the silicon wafer 105. In the temperature control system shown in FIG. 1, three control loops for controlling the temperatures PV of the control zones Z1 to Z3 corresponding to the temperature controllers 101-1 to 101-3 are formed. . Hereinafter, the three control loops formed by the temperature controllers 101-1 to 101-3 will be referred to as R1 to R3. Further, there is a capacity difference between the heaters 103-1 to 103-3, and the heater capacity of the heater 103-2 is much larger than the heater capacity of the heaters 103-1 and 103-3. Therefore, the control zone Z2 is called the main control zone Z2, and the control zones Z1 and Z3 are called the auxiliary control zones Z1 and Z3.

  As described above, in the present embodiment, as an example of a target heating apparatus, a case where the heat retention is high and the difference in the heater capacities of each control loop is large, such as an oxidation diffusion furnace, one-side interference occurs. It is assumed that there is a possibility of doing. The one-sided interference is, for example, that interference from the control loop R2 to the control loops R1 and R3 occurs even though there is almost no interference from the control loops R1 and R3 to the control loop R2. This occurs when the heater capacity is much larger than the heater capacity of the control loops R1 and R3.

  FIG. 2 is a block diagram showing the configuration of the auto-tuning execution apparatus according to this embodiment. The auto-tuning execution apparatus according to the present embodiment includes an AT execution unit 1 that executes limit cycle AT, a main control loop registration unit 2 that stores in advance a control loop that gives interference as a main control loop, and a main control During AT execution of a control loop other than the loop, a vertical movement width detection unit 3 that detects the vertical movement width of the control amount generated in the control loop, and a control loop other than the main control loop during AT execution of the main control loop A maximum fluctuation amount detecting unit 4 for detecting the maximum fluctuation amount of the control amount generated by the inter-loop interference, and calculating the upper limit value of the operation amount at the time of AT execution of the main control loop based on the maximum fluctuation amount and the vertical movement width. And an upper limit calculation unit 5 set in the execution unit 1.

  The upper limit calculator 5 constitutes an operation amount range calculator, a candidate value calculator, and an update value determiner. In all the embodiments including this embodiment, the AT execution unit has a function capable of simultaneously executing ATs of a plurality of control loops. However, in all the embodiments including this embodiment, The AT is assumed to be precisely performed by the equipment manufacturer before shipment, and the ATs of a plurality of control loops are sequentially executed one by one.

FIG. 3 is a flowchart showing the operation of the auto-tuning execution apparatus of this embodiment. First, the operator of the auto-tuning execution apparatus registers the control loop R2 on the interference side as the main control loop in the main control loop registration unit 2 (step S100 in FIG. 3).
Further, the operator sets the initial value of the upper and lower operation amount at the time of AT execution in the AT execution unit 1 for all control loops (step S101 in FIG. 3). Here, the initial value of the operation amount upper / lower limit value is set to a value that is not unnecessarily restricted, for example, the operation amount upper limit value AT_OH = 100% and the operation amount lower limit value AT_OL = 0%.
Then, the operator inputs an AT activation instruction to the AT execution unit 1 with all functions turned on (step S102 in FIG. 3).

  In response to this activation instruction, the AT execution unit 1 executes AT for the control loop on the interference side, that is, the control loop R1 other than the main control loop R2 (step S103 in FIG. 3). When the control amount PV (temperature) measured by the temperature sensor 102-1 in the control loop R1 is larger than the set value SP, the AT execution unit 1 outputs the operation amount lower limit value AT_OL as the operation amount MV to the heater 103-1. When the control amount PV of the control loop R1 is equal to or less than the set value SP, the operation amount upper limit value AT_OH is output as the operation amount MV to the heater 103-1, and is repeatedly performed at regular operation cycles. Thus, a limit cycle in which the amplitude of the manipulated variable MV is constant occurs. Then, the AT execution unit 1 calculates a control parameter (for example, a PID parameter) based on the response of the control amount PV of the control loop R1 according to the output of the operation amount MV, and uses this control parameter as a temperature controller for the control loop R1 Set to 101-1. Since the limit cycle AT is disclosed in, for example, Japanese Patent No. 3881593, the details of the AT will not be described.

  The vertical movement width detector 3 detects the vertical movement width X1 that is the difference between the maximum value and the minimum value of the control amount PV generated in the control loop R1 that is performing AT (step S104 in FIG. 3). Then, after completion of AT of the control loop R1, the vertical movement width detection unit 3 registers the vertical movement width X1 detected during execution of this AT in the upper limit value calculation unit 5.

Next, the AT execution unit 1 determines whether there is an AT non-execution loop other than the main control loop R2 (step S105 in FIG. 3). Here, the control loop R3 other than the main control loop R2 remains as an AT non-execution loop.
Therefore, the AT execution unit 1 returns to step S103 and executes AT for the control loop R3.

  The vertical movement width detector 3 detects the vertical movement width X3 that is the difference between the maximum value and the minimum value of the control amount PV generated in the control loop R3 that is performing AT (step S104 in FIG. 3). Then, after the completion of the AT of the control loop R3, the vertical movement width detection unit 3 registers the vertical movement width X3 detected during the execution of the AT in the upper limit value calculation unit 5.

  When all ATs of the control loops other than the main control loop R2 are completed and there are no non-executed loops other than the main control loop R2 (NO in step S105 in FIG. 3), the AT execution unit 1 performs AT for the main control loop R2. This is executed (step S106 in FIG. 3).

  The maximum fluctuation amount detection unit 4 detects an interference waveform generated in each of the control loops R1 and R3 other than the main control loop R2 due to inter-loop interference during the AT of the main control loop R2, that is, a vertical movement of the control amount PV. Then, the difference between the maximum value and the minimum value of the vertical movement is detected as the maximum fluctuation amounts Y1, Y3 (step S107 in FIG. 3). Hereinafter, a method for detecting the maximum fluctuation amounts Y1 and Y3 will be described in more detail. 4 (A) to 4 (C) are diagrams for explaining the operation of the maximum fluctuation amount detection unit 4, and are diagrams showing the control amounts PV of the control loops R1 to R3. 4A shows the control amount PV of the control loop R1, FIG. 4B shows the control amount PV of the main control loop R2, and FIG. 4C shows the control amount PV of the control loop R3. FIG. X2 is the vertical movement width of the control amount PV of the main control loop R2.

  Here, the detection target of the maximum variation is assumed to be the control loop R1. The maximum fluctuation amount detector 4 uses the control amount PV (hereinafter referred to as PV1) of the control loop R1 at the time when the AT of the main control loop R2 is started to detect the maximum fluctuation amount Y1. That is, the maximum fluctuation amount detection unit 4 sets a difference PV1−PV between the control amount PV1 and the current control amount PV of the control loop R1 as a deviation used for detecting the maximum fluctuation amount. The extreme value of the control amount PV detected until the deviation PV1−PV changes from positive to negative and then changes from negative to positive is a local maximum value, and after the deviation PV1−PV changes from negative to positive, the positive value becomes negative. The extreme value of the control amount PV detected until it changes to the minimum value. Thus, the maximum fluctuation amount detection unit 4 can detect the maximum fluctuation amount Y1 that is the difference between the maximum value and the minimum value of the vertical movement of the control amount PV.

If the minimum value cannot be detected, the difference between the maximum value and the control amount PV1 may be the maximum fluctuation amount Y1, and if the maximum value cannot be detected, the difference between the control amount PV1 and the minimum value. May be the maximum variation Y1. If both the maximum value and the minimum value cannot be detected, the maximum fluctuation amount Y1 may be set to zero.
The method of detecting the maximum fluctuation amount Y3 of the control loop R3 is the same as that of the control loop R1. The difference from the case of the control loop R1 is that instead of the control amount PV1, the control amount PV (hereinafter referred to as PV3) of the control loop R3 when the AT of the main control loop R2 is started is detected as the maximum fluctuation amount Y3. It is a point to use for.

  The maximum fluctuation amount detector 4 detects the maximum fluctuation amounts Y1 and Y3 of the control loops R1 and R3 other than the main control loop R2 as described above. Then, after the completion of the AT of the main control loop R2, the maximum fluctuation amount detection unit 4 registers the maximum fluctuation amounts Y1 and Y3 detected during the execution of the AT in the upper limit value calculation unit 5.

Next, the upper limit calculation unit 5 performs AT execution of the main control loop R2 based on the maximum fluctuation amounts Y1, Y3 detected by the maximum fluctuation amount detection unit 4 and the vertical movement widths X1, X3 detected by the vertical movement width detection unit 3. Calculate the operation amount upper limit value for the hour. First, when the target influence rate by suppressing the one-sided interference is A% (for example, 5%), the upper limit value calculation unit 5 causes the influence rate of interference on the vertical movement width X1 of the control loop R1 to be A%. The operation amount width ΔMV1 of the limit cycle of the main control loop R2 and the operation amount width ΔMV3 of the limit cycle of the main control loop R2 for the influence rate of the interference with the vertical movement width X3 of the control loop R3 to be A%. And is calculated by the following equation (step S108 in FIG. 3).
ΔMV1 = (AT_OHa−AT_OLa) AX1 / (100Y1) (1)
ΔMV3 = (AT_OHa−AT_OLa) AX3 / (100Y3) (2)

In Expressions (1) and (2), AT_OHa is an initial value of an operation amount upper limit value when AT of the main control loop R2 is executed, and AT_OLa is an initial value of an operation amount lower limit value when the AT of the main control loop R2 is executed. . Expressions (1) and (2) are derived from the idea of adjusting the ratio of the operation amount width and the vertical movement width in Expressions (3) and (4).
ΔMV1: AT_OHa−AT_OLa = AX1 / 100: Y1 (3)
ΔMV3: AT_OHa−AT_OLa = AX3 / 100: Y3 (4)

In heat treatment chambers with high heat retention, it is a good idea to reduce the manipulated variable upper limit value AT_OHa while maintaining the manipulated variable lower limit value AT_OLa of the main control loop R2 when suppressing the manipulated variable range of the limit cycle. is there. The upper limit calculator 5 calculates the candidate AT_OHb1 and AT_OHb3 of the updated value AT_OHb of the manipulated variable upper limit AT_OHa by the following equation (step S109 in FIG. 3).
AT_OHb1 = AT_OLa + ΔMV1 (5)
AT_OHb3 = AT_OLa + ΔMV3 (6)

The upper limit calculation unit 5 sets the minimum value among the candidate AT_OHb1 and AT_OHb3 calculated in step S109 and the initial value AT_OHa of the operation amount upper limit value as the update value AT_OHb of the operation amount upper limit value during AT execution of the main control loop R2. Determine (step S110 in FIG. 3).
AT_OHb = min (AT_OHa, AT_OHb1, AT_OHb3)
... (7)

Then, the upper limit value calculation unit 5 updates the initial value AT_OHa of the operation amount upper limit value set in the AT execution unit 1 when the main control loop R2 is executed to the update value AT_OHb (step S111 in FIG. 3). .
This completes the operation of the auto-tuning execution device.

  By the operation amount upper limit value AT_OHb obtained by the above processing, the influence rate of the interference with respect to the vertical movement widths X1 and X3 of the control loops R1 and R3 other than the main control loop R2 is suppressed to a target A% or less. Therefore, after the series of processing of steps S100 to S111 is performed, AT of the three control loops R1 to R3 can be executed simultaneously. That is, in a case where AT is re-executed at the end user's site, it is possible to efficiently and accurately perform AT.

  In the above description, the three control loops R1 to R3 are configured so that they can be specifically understood. However, the present embodiment is not limited to this configuration as long as the control system has only one-sided interference. The form of can be applied. That is, the processes of steps S103, S104, and S107 to S109 may be executed for each control loop other than the main control loop. In the present embodiment, the AT is described in the order of the control loop R1, the control loop R3, and the main control loop R2. However, this order is not particularly required, and any order may be used. .

  Further, according to the present invention, it is assumed that the device manufacturer sets the operation amount upper limit value during AT which is precisely performed before shipment, and the device is shipped to the end user. Needless to say, the memory for storing is non-volatile memory.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. This embodiment assumes a device having three control zones Z1 to Z3 as shown in FIG. 1 as an example of a target heating device. It is assumed that the target is a low heat treatment chamber (a heat treatment chamber with high heat dissipation that is easy to control).

  FIG. 5 is a block diagram showing the configuration of the auto-tuning execution apparatus according to the present embodiment. The same components as those in FIG. The auto-tuning execution device of the present embodiment is based on the AT execution unit 1, the main control loop registration unit 2, the vertical movement detection unit 3, the maximum fluctuation detection unit 4, the maximum fluctuation and the vertical movement. An upper / lower limit value calculation unit 6 that calculates an operation amount upper limit value and an operation amount lower limit value during AT execution of the main control loop and sets them in the AT execution unit 1 is provided. The upper and lower limit value calculation unit 6 constitutes an operation amount range calculation unit, a candidate value calculation unit, and an update value determination unit.

  FIG. 6 is a flowchart showing the operation of the auto-tuning execution apparatus of this embodiment. Since the processing from step S100 to S107 is the same as that in the first embodiment, description thereof is omitted. Further, the processing in step S108 is the same as that of the first embodiment except that the upper and lower limit value calculation unit 6 performs instead of the upper limit value calculation unit 5, and thus the description thereof is omitted.

  In a heat treatment chamber with low heat retention, it is a good idea to maintain an equilibrium point (median value) of the limit cycle when suppressing the operation range of the limit cycle. The upper / lower limit calculation unit 6 calculates candidates for the updated value AT_OHb of the manipulated variable upper limit value AT_OHa and the updated value AT_OLb of the manipulated variable lower limit value AT_OLa at the time of AT execution of the main control loop R2 by the following equation (step S112 in FIG. 6). .

AT_OHb1 = (AT_OHa + AT_OLa) / 2 + ΔMV1 / 2 (8)
AT_OLb1 = (AT_OHa + AT_OLa) / 2−ΔMV1 / 2 (9)
AT_OHb3 = (AT_OHa + AT_OLa) / 2 + ΔMV3 / 2 (10)
AT_OLb3 = (AT_OHa + AT_OLa) / 2−ΔMV3 / 2 (11)

The upper and lower limit value calculation unit 6 uses the minimum value of the candidate values AT_OHb1 and AT_OHb3 calculated in step S112 and the initial value AT_OHa of the operation amount upper limit value as the update value AT_OHb of the operation amount upper limit value during AT execution of the main control loop R2. And the maximum value of the candidate values AT_OLb1 and AT_OLb3 calculated in step S112 and the initial value AT_OLa of the operation amount lower limit value is determined as an update value AT_OLb of the operation amount lower limit value during AT execution of the main control loop R2. (FIG. 6, step S113).
AT_OHb = min (AT_OHa, AT_OHb1, AT_OHb3)
(12)
AT_OLb = max (AT_OLa, AT_OLb1, AT_OLb3)
... (13)

  The upper / lower limit value calculation unit 6 updates the initial value AT_OHa of the operation amount upper limit value set in the AT execution unit 1 at the time of AT execution of the main control loop R2 to the update value AT_OHb, and The initial value AT_OLa of the operation amount lower limit value at the time of AT execution of the main control loop R2 set to 1 is updated to the update value AT_OLb (step S114 in FIG. 6). This completes the operation of the auto-tuning execution device.

  By the operation amount upper limit value AT_OHb and the operation amount lower limit value AT_OLb obtained by the above processing, the influence rate of the interference with respect to the vertical movement widths X1 and X3 of the control loops R1 and R3 other than the main control loop R2 is less than the target A%. It can be suppressed. Therefore, after the series of processing of steps S100 to S108 and S112 to S114 is performed, AT of the three control loops R1 to R3 can be executed simultaneously. That is, in a case where AT is re-executed at the end user's site, it is possible to efficiently and accurately perform AT.

[Third Embodiment]
Next, a third embodiment of the present invention will be described. In the first and second embodiments, the operator registers the “control loop on the interference side” in the main control loop registration unit. Such registration assumes a configuration of a heating apparatus such as an oxidation diffusion furnace, and particularly where unilateral interference can be grasped empirically. Even with the same configuration, there is a case where the one-side interference cannot be grasped for the heaters having different heater sizes due to variations of the heating device.

  Therefore, during execution of AT by the AT execution unit, the difference between the maximum value and the minimum value of the vertical movement of the control amount PV generated in the other control loop due to the inter-loop interference is always detected as the maximum fluctuation amount. If the influence rate of the interference with respect to the vertical movement width of the control loop is not within A% (for example, 5%), it is determined that the control loop that executed AT and the other control loop have “interference relationship”, and AT is executed. The determined control loop is determined as “the control loop on the side that gives interference”.

  FIG. 7 is a block diagram showing the configuration of the auto-tuning execution apparatus according to this embodiment. The auto-tuning execution apparatus of the present embodiment includes an AT execution unit 1a, a main control loop registration unit 2a, a vertical movement width detection unit 3a, a maximum fluctuation amount detection unit 4a, an upper limit value calculation unit 5a, and a maximum fluctuation. A registration processing unit 7 that determines one-sided interference based on the amount and the vertical movement width, determines a control loop that gives interference, and registers the control loop as a main control loop in the main control loop registration unit 2a; Yes.

FIG. 8 is a flowchart showing the operation of the auto-tuning execution apparatus of this embodiment. First, the operator of the auto-tuning execution apparatus sets the initial value of the operation amount upper and lower limit values at the time of AT execution in the AT execution unit 1a for all control loops as in step S101 (step S200 in FIG. 8).
Then, the operator inputs an AT activation instruction to the AT execution unit 1a (step S201 in FIG. 8).

In response to this activation instruction, the AT execution unit 1a executes AT for the control loop R1 (step S202 in FIG. 8).
The vertical movement width detector 3a detects the vertical movement width X1 of the control amount PV generated in the control loop R1 that is performing AT (step S203 in FIG. 8). Then, the vertical movement width detection unit 3a registers the vertical movement width X1 in the upper limit value calculation unit 5a.

  On the other hand, the maximum fluctuation amount detection unit 4a performs the maximum value and the minimum value of the vertical movement of the control amount PV generated in each of the control loops R2 and R3 other than the control loop R1 due to the inter-loop interference during the AT of the control loop R1. Are detected as the maximum fluctuation amounts Y2α and Y3α (step S204 in FIG. 8). Then, the maximum fluctuation amount detection unit 4a registers the maximum fluctuation amounts Y2α and Y3α in the upper limit value calculation unit 5a.

Next, the AT execution unit 1a determines whether or not an AT non-execution loop exists (step S205 in FIG. 8). Here, since the control loops R2 and R3 remain as AT non-execution loops, the AT execution unit 1a returns to Step S202 and executes AT for the control loop R2.
The vertical movement width detector 3a detects the vertical movement width X2 of the control amount PV generated in the control loop R2 that is executing AT (step S203 in FIG. 8). Then, the vertical movement width detection unit 3a registers the vertical movement width X2 in the upper limit value calculation unit 5a.

  On the other hand, the maximum fluctuation amount detection unit 4a performs the maximum value and the minimum value of the vertical movement of the control amount PV generated in each of the control loops R1 and R3 other than the control loop R2 due to inter-loop interference during the execution of the AT of the control loop R2. Are detected as the maximum fluctuation amounts Y1β and Y3β (step S204 in FIG. 8). Then, the maximum fluctuation amount detection unit 4a registers the maximum fluctuation amounts Y1β and Y3β in the upper limit value calculation unit 5a.

Further, the AT execution unit 1a determines whether or not an AT non-execution loop exists (step S205 in FIG. 8). Here, since the control loop R3 remains as an AT non-execution loop, the AT execution unit 1a returns to Step S202 and executes AT for the control loop R3.
The vertical movement width detector 3a detects the vertical movement width X3 of the control amount PV generated in the control loop R3 that is performing AT (step S203 in FIG. 8). Then, the vertical movement width detection unit 3a registers the vertical movement width X3 in the upper limit value calculation unit 5a.

  On the other hand, the maximum fluctuation amount detection unit 4a performs the maximum value and the minimum value of the vertical movement of the control amount PV generated in each of the control loops R1 and R2 other than the control loop R3 due to inter-loop interference during execution of the AT of the control loop R3. Are detected as the maximum fluctuation amounts Y1γ and Y2γ (step S204 in FIG. 8). Then, the maximum fluctuation amount detection unit 4a registers the maximum fluctuation amounts Y1γ and Y2γ in the upper limit value calculation unit 5a.

  When the ATs of all control loops are completed and there are no unexecuted loops (NO in step S205 in FIG. 8), the registration processing unit 7 determines the maximum fluctuation amounts Y2α, Y3α, Y1β, detected by the maximum fluctuation amount detection unit 4a. One-sided interference is determined based on Y3β, Y1γ, Y2γ and the vertical movement widths X1, X2, and X3 detected by the vertical movement width detection unit 3a, and the control loop on the side that gives interference is determined and registered in the main control loop registration unit 2a. (Step S206 in FIG. 8).

First, the registration processing unit 7 assumes that the control loop R1 is an interference control loop, and determines whether the control loop R1 and the other control loops R2 and R3 are in a relationship of interference according to the following equation. .
Y2α / X2> A / 100 (14)
Y3α / X3> A / 100 (15)

  When Expression (14) is satisfied, the influence rate of the interference with respect to the vertical movement width of the control loop R2 of the control loop R1 is larger than A% (for example, 5%). It becomes a control loop on the side that gives interference. Similarly, when Expression (15) is established, the control loop R1 is a control loop on the side that interferes with the control loop R3.

Subsequently, the registration processing unit 7 determines that the control loop R2 and the other control loops R1 and R3 have an interference relationship based on the following equation, assuming that the control loop R2 is a control loop on the interference side. To do.
Y1β / X1> A / 100 (16)
Y3β / X3> A / 100 (17)

  When Expression (16) is established, the control loop R2 is a control loop on the side that interferes with the control loop R1. Similarly, when Expression (17) is established, the control loop R2 is a control loop on the side that interferes with the control loop R3.

Further, the registration processing unit 7 assumes that the control loop R3 is a control loop on the interference side, and determines whether or not the control loop R3 and the other control loops R1 and R2 have an interference relationship by the following expression. .
Y1γ / X1> A / 100 (18)
Y2γ / X2> A / 100 (19)

When Expression (18) is satisfied, the control loop R3 is a control loop on the side that interferes with the control loop R1. Similarly, when Expression (19) is established, the control loop R3 is a control loop on the side that interferes with the control loop R2.
In this way, it is possible to determine whether or not each control loop R1 to R3 has an interference relationship. Then, the registration processing unit 7 determines whether there is a control loop that becomes a control loop that interferes with another control loop and that does not become a control loop that receives interference from another control loop, If the corresponding control loop exists, this control loop is registered in the main control loop registration unit 2a as the main control loop. This completes the processing of the registration processing unit 7.

Next, the upper limit calculation unit 5a calculates an operation amount upper limit value during AT execution of the main control loop registered in the main control loop registration unit 2a. First, the upper limit calculation unit 5 calculates the manipulated variable width ΔMV of the limit cycle of the main control loop so that the influence rate of interference with respect to the vertical movement width of the control loops other than the main control loop becomes A% (FIG. 8). Step S207). The process in step S207 is the same as step S108 in FIG. For example, if the main control loop is R2, Y1β and Y3β may be used in place of Y1 and Y3 in equations (1) and (2). Steps S208, S209, and S210 are the same as steps S109, S110, and S111 in FIG. 3, respectively.
This completes the operation of the auto-tuning execution device.

  Thus, in this embodiment, even when one-sided interference cannot be grasped, by determining the main control loop and setting the upper limit value of the operation amount of the main control loop, the control loops other than the main control loop are It is possible to suppress the influence rate of interference with respect to the moving width to a target A% or less. Therefore, after the series of processing of steps S200 to S210 is performed, AT of the three control loops R1 to R3 can be executed simultaneously. That is, in a case where AT is re-executed at the end user's site, it is possible to efficiently and accurately perform AT.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described. Although the third embodiment shows an improved form of the first embodiment, this embodiment shows an improved form of the second embodiment.
FIG. 9 is a block diagram showing the configuration of the auto-tuning execution apparatus according to the present embodiment. The same components as those in FIG. The auto-tuning execution apparatus of the present embodiment includes an AT execution unit 1a, a main control loop registration unit 2a, a vertical movement width detection unit 3a, a maximum fluctuation amount detection unit 4a, an upper / lower limit value calculation unit 6a, and a registration And a processing unit 7.

FIG. 10 is a flowchart showing the operation of the auto-tuning execution apparatus of this embodiment. The processing from step S200 to S206 is the same as that in the third embodiment. Further, the processing in step S207 is the same as that of the third embodiment except that the upper / lower limit value calculation unit 6a performs the process instead of the upper limit value calculation unit 5a, and thus the description thereof is omitted.
The processes of steps S211, S212, and S213 are the same as steps S112, S113, and S114 of FIG. 6, respectively.

  Thus, in the present embodiment, even when the one-sided interference cannot be grasped, the main control loop is determined, and the main control loop is set by setting the operation amount upper limit value and the operation amount lower limit value of the main control loop. The influence rate of the interference with respect to the vertical movement width of the control loop other than can be suppressed to a target A% or less.

  Note that, in the third and fourth embodiments, the registration processing unit 7 detects a state that is bi-directionally “a relationship with interference”, that is, a side that interferes with another control loop. If there is no control loop that becomes a control loop and does not become a control loop that receives interference from other control loops, the operator is notified that the control loop is not subject to one-side interference. In this case, the processing of the upper limit calculation unit 5a or the upper / lower limit calculation unit 6a is omitted.

  The auto-tuning execution apparatus described in the first to fourth embodiments can be realized by a computer having a CPU, a storage device, and an interface, and a program for controlling these hardware resources. The CPU executes the processes described in the first to fourth embodiments in accordance with a program stored in the storage device.

  The present invention can be applied to a technique for executing limit cycle type auto-tuning in which a control cycle of a controller of each control loop is set by generating a limit cycle having a constant operation amount amplitude in a multi-loop control system.

  DESCRIPTION OF SYMBOLS 1, 1a ... AT execution part, 2, 2a ... Main control loop registration part, 3, 3a ... Vertical movement width detection part, 4, 4a ... Maximum fluctuation amount detection part, 5, 5a ... Upper limit calculation part, 6, 6a ... upper and lower limit value calculation unit, 7 ... registration processing unit.

Claims (12)

An auto-tuning execution device that performs limit cycle type auto-tuning (AT) that generates a limit cycle with a constant operation amount amplitude in a multi-loop control system and sets a control parameter of a controller of each control loop,
AT execution means for performing limit cycle AT;
Main control loop registration means for preliminarily storing a control loop on the side giving interference as a main control loop;
A vertical movement width detecting means for detecting a vertical movement width of a control amount generated in the control loop during AT execution of a control loop other than the main control loop;
Maximum fluctuation amount detecting means for detecting the maximum fluctuation amount of the control amount caused by inter-loop interference in a control loop other than the main control loop during AT execution of the main control loop;
Auto tuning execution, comprising: an upper limit value calculating means for calculating an operation amount upper limit value during AT execution of the main control loop based on the maximum fluctuation amount and the vertical movement width and setting the upper limit value in the AT execution means apparatus. An auto-tuning execution device that performs limit cycle type auto-tuning (AT) that generates a limit cycle with a constant operation amount amplitude in a multi-loop control system and sets a control parameter of a controller of each control loop,
AT execution means for performing limit cycle AT;
Main control loop registration means for preliminarily storing a control loop on the side giving interference as a main control loop;
A vertical movement width detecting means for detecting a vertical movement width of a control amount generated in the control loop during AT execution of a control loop other than the main control loop;
Maximum fluctuation amount detecting means for detecting the maximum fluctuation amount of the control amount caused by inter-loop interference in a control loop other than the main control loop during AT execution of the main control loop;
Upper / lower limit value calculating means for calculating an operation amount upper limit value and an operation amount lower limit value at the time of AT execution of the main control loop based on the maximum fluctuation amount and the vertical movement width and setting the operation amount upper limit value in the AT execution means. Auto tuning execution device characterized by An auto-tuning execution device that performs limit cycle type auto-tuning (AT) that generates a limit cycle with a constant operation amount amplitude in a multi-loop control system and sets a control parameter of a controller of each control loop,
AT execution means for performing limit cycle AT;
Main control loop registration means for storing the main control loop;
A vertical movement width detecting means for detecting a vertical movement width of a control amount generated in a control loop during AT execution;
Maximum fluctuation amount detecting means for detecting the maximum fluctuation amount of the control amount caused by inter-loop interference in a control loop other than the control loop that is performing AT;
One-side interference is determined based on the maximum fluctuation amount and the vertical movement width, a control loop on the side that gives interference is determined, and a registration processing unit that registers the control loop as a main control loop in the main control loop registration unit; ,
Based on the maximum fluctuation amount detected during AT execution of the main control loop and the vertical movement width detected during AT execution of control loops other than the main control loop, the operation amount upper limit at the time of AT execution of the main control loop An auto-tuning execution apparatus, comprising: an upper limit calculation unit that calculates a value and sets the value in the AT execution unit. An auto-tuning execution device that performs limit cycle type auto-tuning (AT) that generates a limit cycle with a constant operation amount amplitude in a multi-loop control system and sets a control parameter of a controller of each control loop,
AT execution means for performing limit cycle AT;
Main control loop registration means for storing the main control loop;
A vertical movement width detecting means for detecting a vertical movement width of a control amount generated in a control loop during AT execution;
Maximum fluctuation amount detecting means for detecting the maximum fluctuation amount of the control amount caused by inter-loop interference in a control loop other than the control loop that is performing AT;
One-side interference is determined based on the maximum fluctuation amount and the vertical movement width, a control loop on the side that gives interference is determined, and a registration processing unit that registers the control loop as a main control loop in the main control loop registration unit; ,
Based on the maximum fluctuation amount detected during AT execution of the main control loop and the vertical movement width detected during AT execution of control loops other than the main control loop, the operation amount upper limit at the time of AT execution of the main control loop An auto-tuning execution apparatus, comprising: upper and lower limit value calculating means for calculating a value and an operation amount lower limit value and setting the same in the AT execution means. In the auto tuning execution device according to claim 1 or 3,
The upper limit calculation means
Based on the maximum fluctuation amount, the vertical movement width, the initial value of the operation amount upper limit value during AT execution of the main control loop, and the initial value of the operation amount lower limit value during AT execution of the main control loop, the main control An operation amount width calculating means for calculating an operation amount width of a limit cycle of the main control loop so that an influence rate of interference on a vertical movement width of a control loop other than the loop becomes a predetermined value;
Candidate value calculation means for calculating a candidate value of an operation amount upper limit value during AT execution of the main control loop based on the operation amount range;
And an update value determining means for setting a minimum value of the candidate value and the initial value of the operation amount upper limit value as an update value of the operation amount upper limit value during AT execution of the main control loop. Tuning execution device. In the auto tuning execution device according to claim 2 or 4,
The upper and lower limit value calculating means includes:
Based on the maximum fluctuation amount, the vertical movement width, the initial value of the operation amount upper limit value during AT execution of the main control loop, and the initial value of the operation amount lower limit value during AT execution of the main control loop, the main control An operation amount width calculating means for calculating an operation amount width of a limit cycle of the main control loop so that an influence rate of interference on a vertical movement width of a control loop other than the loop becomes a predetermined value;
Candidate value calculation means for calculating each candidate value of an operation amount upper limit value and an operation amount lower limit value during AT execution of the main control loop based on the operation amount range;
The minimum value among the candidate value of the manipulated variable upper limit value and the initial value of the manipulated variable upper limit value is set as an updated value of the manipulated variable upper limit value during AT execution of the main control loop, and the manipulated variable lower limit value Auto-tuning comprising: an update value determining means for setting a maximum value of the candidate value and the initial value of the manipulated variable lower limit value as an updated value of the manipulated variable lower limit value during AT execution of the main control loop. Execution device. An auto tuning execution method for executing limit cycle type auto tuning (AT) for generating a limit cycle having a constant operation amount amplitude in a multi-loop control system and setting a control parameter of a controller of each control loop,
An AT execution step for sequentially executing ATs of a plurality of control loops one by one by the AT execution means;
The main control loop is recognized by referring to the main control loop registration means that stores the interference control side control loop in advance as the main control loop, and this control loop is executed during AT execution of control loops other than the main control loop. A vertical movement detection step for detecting the vertical movement width of the control amount generated in
The main control loop is recognized with reference to the main control loop registration means, and the maximum fluctuation amount of the control amount generated by the inter-loop interference is detected in the control loop other than the main control loop during AT execution of the main control loop. A maximum variation detection step;
Auto-tuning execution comprising: an upper limit calculation step for calculating an operation amount upper limit value during AT execution of the main control loop based on the maximum fluctuation amount and the vertical movement width and setting the operation amount upper limit value in the AT execution means Method. An auto tuning execution method for executing limit cycle type auto tuning (AT) for generating a limit cycle having a constant operation amount amplitude in a multi-loop control system and setting a control parameter of a controller of each control loop,
An AT execution step for sequentially executing ATs of a plurality of control loops one by one by the AT execution means;
The main control loop is recognized by referring to the main control loop registration means that stores the interference control side control loop in advance as the main control loop, and this control loop is executed during AT execution of control loops other than the main control loop. A vertical movement detection step for detecting the vertical movement width of the control amount generated in
The main control loop is recognized with reference to the main control loop registration means, and the maximum fluctuation amount of the control amount generated by the inter-loop interference is detected in the control loop other than the main control loop during AT execution of the main control loop. A maximum variation detection step;
An upper / lower limit value calculating step for calculating an operation amount upper limit value and an operation amount lower limit value at the time of AT execution of the main control loop based on the maximum fluctuation amount and the vertical movement width and setting the operation amount lower limit value in the AT execution means; Auto tuning execution method characterized by this. An auto tuning execution method for executing limit cycle type auto tuning (AT) for generating a limit cycle having a constant operation amount amplitude in a multi-loop control system and setting a control parameter of a controller of each control loop,
An AT execution step for sequentially executing ATs of a plurality of control loops one by one by the AT execution means;
A vertical movement detection step for detecting a vertical movement width of a control amount generated in a control loop during AT execution;
A maximum fluctuation amount detecting step for detecting a maximum fluctuation amount of a control amount caused by inter-loop interference in a control loop other than the control loop that is performing AT;
A registration processing step of determining one-sided interference based on the maximum fluctuation amount and the vertical movement width, determining a control loop on the side that gives interference, and registering this control loop as a main control loop in a main control loop registration unit;
Based on the maximum fluctuation amount detected during AT execution of the main control loop and the vertical movement width detected during AT execution of control loops other than the main control loop, the operation amount upper limit at the time of AT execution of the main control loop An auto-tuning execution method, comprising: an upper limit calculation step for calculating a value and setting the value in the AT execution means. An auto tuning execution method for executing limit cycle type auto tuning (AT) for generating a limit cycle having a constant operation amount amplitude in a multi-loop control system and setting a control parameter of a controller of each control loop,
An AT execution step for sequentially executing ATs of a plurality of control loops one by one by the AT execution means;
A vertical movement detection step for detecting a vertical movement width of a control amount generated in a control loop during AT execution;
A maximum fluctuation amount detecting step for detecting a maximum fluctuation amount of a control amount caused by inter-loop interference in a control loop other than the control loop that is performing AT;
A registration processing step of determining one-sided interference based on the maximum fluctuation amount and the vertical movement width, determining a control loop on the side that gives interference, and registering this control loop as a main control loop in a main control loop registration unit;
Based on the maximum fluctuation amount detected during AT execution of the main control loop and the vertical movement width detected during AT execution of control loops other than the main control loop, the operation amount upper limit at the time of AT execution of the main control loop And an upper / lower limit value calculating step for calculating a value and an operation amount lower limit value and setting the upper limit value and the lower limit value in the AT execution means. The auto-tuning execution method according to claim 7 or 9,
The upper limit calculation step includes
Based on the maximum fluctuation amount, the vertical movement width, the initial value of the operation amount upper limit value during AT execution of the main control loop, and the initial value of the operation amount lower limit value during AT execution of the main control loop, the main control An operation amount width calculating step for calculating an operation amount width of a limit cycle of the main control loop so that an influence rate of interference on a vertical movement width of a control loop other than the loop becomes a predetermined value;
A candidate value calculating step of calculating a candidate value of an operation amount upper limit value during AT execution of the main control loop based on the operation amount range;
And an update value determining step in which the minimum value of the candidate value and the initial value of the operation amount upper limit value is used as an update value of the operation amount upper limit value during AT execution of the main control loop. Tuning execution method. In the auto-tuning execution method according to claim 8 or 10,
The upper / lower limit value calculating step includes:
Based on the maximum fluctuation amount, the vertical movement width, the initial value of the operation amount upper limit value during AT execution of the main control loop, and the initial value of the operation amount lower limit value during AT execution of the main control loop, the main control An operation amount width calculating step for calculating an operation amount width of a limit cycle of the main control loop so that an influence rate of interference on a vertical movement width of a control loop other than the loop becomes a predetermined value;
A candidate value calculating step of calculating each candidate value of an operation amount upper limit value and an operation amount lower limit value during AT execution of the main control loop based on the operation amount range;
The minimum value among the candidate value of the manipulated variable upper limit value and the initial value of the manipulated variable upper limit value is set as an updated value of the manipulated variable upper limit value during AT execution of the main control loop, and the manipulated variable lower limit value An auto-tuning comprising: an update value determining step in which a maximum value of the candidate value and the initial value of the operation amount lower limit value is an update value of the operation amount lower limit value during AT execution of the main control loop. Execution method.

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