JP2012087384A - Method and apparatus for adjusting process gas for heat treatment of metallic material/metallic workpiece in industrial furnace - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for adjusting process gas used for the heat treatment of metallic materials/metallic workpieces in an industrial furnace, the method monitoring the optimum adjustment of the gas in an adjustment chamber via an output/input monitor without causing decomposition reaction of the gas led between a processing chamber and the adjustment chamber, and to provide an apparatus for adjusting a process gas used for the heat treatment of metallic materials/metallic workpieces in an industrial furnace.SOLUTION: The method includes the steps of: supplying a used process gas which is consumed in the heat treatment to adjustment chambers 2.2 after the heat treatment in processing chambers 1.1; adjusting the process gas 3 by reusing the used process gas in the adjusting chamber 2.2 at a temperature, maximum about 1,250°C independent from the temperature in the processing chamber 1.1; supplying the adjusted process gas adjusted in the adjusting chamber 2.2 to the processing chamber 1.1; and optionally generating a reactive gas in the adjusting chamber 2.2 before the heat treatment in the processing chamber 1.1.

Description

  The present invention relates to a method and apparatus for adjusting a process gas for heat treatment of a metal material / metal workpiece in an industrial furnace. The heatable process gas includes a processing medium such as a protective gas and a reactive gas.

  Applicant, in Japanese Patent Application No. 2010-163600, a metal material / metal workpiece of an industrial furnace having at least one process chamber containing at least one actually adjusted process gas such as homogenization or heating, or at least one processing chamber In order to supply the process gas related to the heat treatment, a general method or a general apparatus has already been proposed.

  By doing so, it is possible to add to the already operating unit of the industrial furnace and use the process gas for heat treatment while reducing the exhaust gas while saving.

  According to Japanese Patent Application No. 2010-163600, the temperature, the supply of the flow to the member to be processed, the homogenization of the gas phase, and the rapid reaction rate are determined in accordance with Japanese Patent Application No. 2010-163600. When prepared in a temperature range up to a temperature of about 1250 ° C. in a process separate from the heat treatment process, it is provided uniformly throughout the processing chamber of the industrial furnace. This process gas is basically the consumed process gas after the heat treatment process or thermochemical treatment and is adjusted in a separate process.

Regulating, enriching and generating process gas
2CH ₄ + O ₂ → 2CO + 4H ₂
CH ₄ + CO ₂ → 2CO + 2H ₂
CH ₄ + H ₂ O → CO + 3H ₂

  In the adjustment step, it is performed up to about 1250 ° C. at a temperature independent of the temperature in the processing chamber according to one reaction relationship.

The consumed process gas is
2CO → C + O ₂
CO + H ₂ → C + H ₂ O
CO → C + 1 / 2O ₂

  After the carburizing process step related to at least one reaction relationship, the gas is supplied again to the processing chamber.

  The adjustment steps and the progress of the treatment steps such as heat treatment, thermochemical treatment or carburization take place in a recycle cycle. That is, a separate preparation chamber with catalyst and temperature controller is used from the processing chamber of the industrial furnace.

DE 10 2008 029 001.7-45

  With respect to Japanese Patent Application No. JP2010-163600, the present invention monitors the optimal adjustment of these gases in the preparation chamber via the output / input monitor without causing a decomposition reaction of the gases introduced between the processing chamber and the preparation chamber. The realization of the established method and the developed device that will be developed in accordance with the established method.

  In a further development of the invention, the object is to avoid decomposition due to quenching of the gas after passing through the processing chamber or after passing through the preparation chamber.

  As another method, gas decomposition is avoided by appropriate means such as maintenance of a high gas temperature by heat insulation or heating of piping when necessary.

  Relatedly, the cooling unit is implemented by a device for carrying out the process, for example, in a saddle-like tube section with forced or internal cooling, and the heating device and heat insulating material of each pipe, in particular at the rear of the processing chamber, or Located directly at the rear of the conditioning chamber.

  Depending on the degree of the thermal gas reaction and the metal reaction of the gas proceeding in the processing chamber, the gas drawn from the processing chamber and the gas introduced in the preparation chamber vary in composition.

  The purpose of the input / output monitor developed according to the present invention is the ratio of the total volume supplied or the individual volume supplied depending on the amount and composition of the adjusted gas or the target adjustment result. When supplied unburned gases, such as natural gas and air, or other hydrocarbons or other oxidizing gases, are adjusted in the preparation chamber, optimal adjustment of these gases in the preparation chamber is achieved. Is done.

  In thermochemical heat treatment processes such as carburizing or carbonitriding, the gas composition in the processing chamber varies over the elapsed time of processing. A constant supply of the amount of unburned gas in time at a fixed time ratio of the individual unburned gas components in the preparation chamber is therefore not possible because it produces an optimally adjusted reaction gas.

  The innovative gas conditioning process is thus designed with respect to the process, and the temperature and flow rate of the conditioned gas before passing through the preparation chamber and after passing through the processing chamber, the composition, and before passing through the processing chamber. The adjusted amount of gas after passing through the preparation chamber is measured and the total amount of unburned gas supplied in the preparation chamber, as well as the associated capacity of the individual unburned gas components, is continuously changed from one another.

  Therefore, an optimum adjustment result can be obtained.

This is because the housed control circuit for the process is formed and for the gas to be adjusted, in particular the relevant CO content or CH ₄ content, or if necessary H ₂ content, CO ₂ or H ₂ O The basic analysis of the adjusted gas object, such as content, is defined.

  The achievement of these objectives is ensured by a change in the individual unburned gas volume and supplied to the preparation chamber and controlled by a calibrated gas analysis means, or in some cases readjusted.

In order to ensure a regulated gas quality, a suitable device for this control circuit is for the gas composition, in particular the gas component CO or CH ₄ , or CO ₂ or H ₂ , as well as H ₂ O if necessary. Or an analyzer for O ₂ , a measuring sensor that defines the temperature and volume of the conditioned gas flowing into the prep chamber, or conditioned gas released from the prep chamber, or unburned gas supplied into the prep chamber A controllable outlet valve, flow meter, or programmable control system that processes measurement data, a device that calculates a target size or sends a control signal to an actuator, etc. ing.

  Therefore, this method is further developed in quality, in which the external unit draws the conditioned process gas from the processing chamber, where it is conditioned and reprocessed into the processing chamber of the industrial furnace. Is maintained and strengthened as described in detail in Japanese Patent Application JP2010-163600.

  For example, if an industrial furnace, such as an atmospheric heat treatment furnace, equipped with an excellent internal gas circulation system is equipped, the multipoint supply device exhausts the regulated reaction gas from the processing chamber and into the preparation chamber. The re-supply of the supplied gas can be guided through a single joint in the coaxial double tube system in which the inner tube in the processing chamber is slightly longer than the outer tube.

  In so doing, beneficially conditioned reaction gas is aspirated through the inner tube and the conditioned gas is returned through the outer tube.

  In this respect, existing heat treatment furnaces usually require only no structural changes or minimal changes due to additional equipment via the gas conditioning system according to the present invention.

  The present invention shows further advantages of the process, as outlined, while the generation and enrichment of the protective gas is performed separately from the charge, and the charge is always operated in a homogeneous gas atmosphere, On the other hand, gas decomposition is prevented by an optimally conditioned gas.

A new process for the initial relevant invention of the principle related gas regulation is defined in DE 10 2008 029 B1. These processes are arranged separately with the aid of the supplied unburned gas in the preparation chamber, consisting essentially of a certain proportion of hydrocarbons, optionally O ₂ , CO _2, etc., with oxidizing action. In an unprepared preparation chamber, it is determined from the reduction of CO ₂ or H ₂ O relative to the gaseous component CO or H ₂ .

  For this, the required reaction temperature for the conversion, or the unburned gas to speed up the process and the heating of the conditioned gas, requires the presence of a metal catalyst. Depending on the metal of the catalyst used, the required conversion temperature is located between 800 ° C and 1250 ° C.

  If the reaction gas of the heat treatment furnace that is operated at the start of the process and often a tunable reaction gas is not available, these must first be generated in the relevant furnace.

  For particularly effective preparation chamber embodiments, they can also use the necessary reaction gases for production from the heat treatment furnace.

  By these reaction gas generation processes, the preparation chamber is operated in the same manner as an end gas generator (end gas generator), and in this procedure, the gas supplied from the processing chamber is completely or partially in the preparation chamber. The volume of hydrocarbon or oxidant gas that was blocked (by shutting down or shutting down the circulation fan or closing the associated control valve) and dispensed into the preparation chamber is appropriate for the endothermic gas produced. The quality of the generated endothermic reaction gas is analyzed or controlled, and the generated end gas is heated or cooled and supplied to the furnace.

  A furnace for thermochemical heat treatment is prepared after cleaning in a long time, sufficiently suitable for the processing chamber of the furnace according to the present invention with the endothermic reaction gas generated in the preparation chamber, It is possible to switch from a gas generation program to a gas adjustment program.

  Thus, as a special advantage, a combined use of the preparation chamber design for gas production from the reaction gas or gas conditioning is possible.

  In order to meet these requirements, the preparation chamber has a heat-resistant and airtight structure and is equipped with a heater or a temperature controller.

  In order to speed up the gas reactions described above, special metals such as nickel as the catalyst material are used by the gas generator.

  The performance of the preparation chamber in terms of the quantity or quality of the reaction gas that is tuned or produced depends on the high reaction temperature and in particular the size of the catalyst surface. In particular, the high performance of the preparation chamber, due to the compact structure at the same time, is achieved by the use of a catalyst, such as an exhaust cleaning device installed in a passenger car.

FIG. 2 schematically shows an embodiment of an industrial furnace operated by an apparatus for preparing a process gas, corresponding to the method for preparing a process gas according to the invention.

  FIG. 1 schematically shows an installation comprising an industrial furnace 1 designed according to the invention and suitable for retrofit. The industrial furnace 1 includes a processing chamber 1.1, a multipoint supply system 1.2 as a multipoint supply device, and a quenching region 1.3. The process gas 3 includes at least a first processing medium 3.1 as a protective gas (containing a predetermined amount of carbon dioxide, oxygen, and water vapor in addition to a minimum amount of carbon monoxide, hydrogen, and nitrogen), and a carburizing process. And a second processing medium 3.2 as a reaction gas used in the above.

  The multi-point supply system 1.2 discharges the used process gas consumed in the heat treatment in the processing chamber 1.1 from the processing chamber 1.1 and the prepared process gas prepared in the preparation chamber 2.2. Supply to the processing chamber 1.1. The process gas is discharged and supplied by the multipoint supply system 1.2 by using a joint portion in the form of a coaxial double pipe having an outer pipe and an inner pipe slightly longer than the outer pipe. Spent process gas in the processing chamber 1.1 is sucked out through the inner tube and supplied to the preparation chamber 2.2. The preparation chamber 2.2 prepares the process gas by reusing the used process gas supplied from the processing chamber 1.1. The prepared process gas prepared in the preparation chamber 2.2 is supplied to the preparation chamber 2.2 through the outer tube. It is also possible to use a single point supply system instead of a multipoint supply system.

  A processing chamber circulation device 1.4 is disposed above the processing chamber 1.1.

  A supply line 1.5 for supplying the prepared process gas 3 to the processing chamber 1.1 extends from the preparation chamber 2.2 to the processing chamber 1.1. A discharge line 1.6 for discharging at least the first processing medium 3.1 of the used process gas 3 from the processing chamber 1.1 extends from the processing chamber 1.1 to the preparation chamber 2.2.

  The external module 2 consists of a housing 2.1 containing a preparation chamber 2.2 with a catalyst 2.2.1 and a temperature control device 2.2.2. The preparation chamber 2.2 is connected to the processing chamber 1.1 by a supply line 1.5 for supplying the prepared process gas 3. Preparation chamber 2 in the discharge line 1.6 extending from the processing chamber 1.1 to the preparation chamber 2.2 in order to expedite the first processing medium 3.1 of the process gas 3 from the processing chamber 1.1 more quickly. The process gas compressor 2.3 is arranged at a position before. The process gas compressor 2.3 can be, for example, in the form of a turbocharger. The process gas compressor 2.3 also ensures that the highly compressed process gas 3 is prepared in the preparation chamber 2.2, so that the highly compressed process gas 3 is supplied to the processing chamber 1.1. Is to do.

  The processing chamber 2.2 can also be designed to be heat and air tight and to include a heater and temperature controller.

  In order to accelerate the gas reaction, a metal such as nickel is used as the material for the catalyst 2.2.1. As the catalyst 2.2.1, it is preferable to use a catalyst that is effective for cleaning exhaust gas of a passenger car engine, that is, a type that is effective for cleaning exhaust gas of a passenger car engine.

  In order to prevent reactive decomposition of the process gas 3 discharged from the processing chamber 1.1 and / or the preparation chamber 2.2, the present invention exhausts from the processing chamber 1.1 and / or the preparation chamber 2.2. The process gas 3 may be cooled to adjust the temperature.

  In this case, the cooling means 1.7 is arranged in the supply line 1.5 and / or the discharge line 1.6. The cooling means 1.7 is preferably designed as a ribbed pipe member and is configured for duct cooling or induction cooling.

  Alternatively, prevention of the reactive reaction of the process gas 3 can be achieved by adiabatic or heating the process gas discharged from the processing chamber 1.1 and / or the preparation chamber 2.2 to adjust the temperature.

  In this case, thermal insulation means or heating means are arranged in the supply line 1.5 and / or the discharge line 1.6.

  Process gas 3.1 process medium 3.1, 3.2 supply to preparation chamber 2.2, pressure in process chamber 1.1, rotational speed of process gas compressor 2.3, and catalyst 2.2. A measurement control device 2.4 for measuring the temperature of 1 is connected to the processing chamber 1.1 and the switch unit 2.5. The switch unit 2.5 is supplied with the first processing medium 3.1, the second processing medium 3.2 and the air 3.3 to the preparation chamber 2.2, the preparation prepared in the preparation chamber 2.2. The purpose is to control and adjust the supply amount and C amount of the spent process gas 3 to the processing chamber 1.1 and the discharge amount of at least one of the processing media 3.1 and 3.2 from the processing chamber 1.1. For controlling and adjusting parameters such as pressure, temperature and volume flow rate of the process gas 3 prepared in the preparation chamber 2.2.

The extended control measurement device 2.4 for the gas supply / exhaust monitoring system, designed as a control loop circuit, includes (not shown):
-Gas component analyzer. Specifically, CO and CH ₄ , or CO ₂ and H ₂ , or H ₂ O and / or O ₂ are analyzed.
A sensor for measuring the amount and temperature of the used process gas supplied from the processing chamber 1.1 to the preparation chamber 2.2 and the prepared process gas supplied from the preparation chamber 2.2 to the processing chamber.
A controllable flow control valve and flow meter for controlling and measuring the flow of unburned gas supplied to the preparation chamber 2.2.
A programmable control system for processing each data measured by gas component analyzers, sensors and flow meters, calculating target variables, and sending control signals to actuators (such as flow control valves).

  The preparation step and the processing step (here, the carburizing step) are performed in a recirculation circuit. That is, the preparation step performed in the preparation chamber 2.2 and the processing step performed in the processing chamber 1.1 are performed as a process gas recirculation cycle. The preparation chamber 2.2 has a catalyst 2.2.1 and a temperature control device 2.2.2. The preparation chamber 2.2 is provided outside the industrial furnace 1 and is connected to the processing chamber 1.1 via a supply line 1.5 and a discharge line 1.6.

  This recirculation process also optionally includes generating a reaction gas 3 in the preparation chamber 2.2. For example, since the reaction gas cannot be used at the start of the heat treatment process, the reaction gas 3 is generated in the preparation chamber 2.2 in such a case.

The reaction gas generation is
(A) supplying a predetermined amount of hydrocarbon and oxidizing gas according to the required production amount of the reaction gas from an external source to the preparation chamber 2.2;
(B) reacting hydrocarbons and oxidizing gas in the preparation chamber 2.2 to produce an endothermic reaction gas, and analyzing and adjusting the quality of the produced endothermic reaction gas as needed;
(C) supplying the endothermic reaction gas generated in the preparation chamber to the processing chamber 1.1 in a high or low temperature state;
(D) cleaning the processing chamber with the endothermic reaction gas to prepare for the heat treatment.

  When cleaning of the processing chamber 1.1 with the endothermic reaction gas is complete, the preparation for heat treatment is complete and the preparation chamber 2.2 is switched from reaction gas generation to process gas preparation.

  The spent process gas 3 is accelerated and discharged from the processing chamber 1.1 and delivered to the preparation chamber 2.2 via the discharge line 1.6. Then, after being prepared again as a process gas in the preparation chamber 2.2, the prepared process gas 3 in a highly compressed state is supplied again to the processing chamber 1.1 via the supply line 1.5. This series of processes is performed by using a process gas compressor 2.3.

  The total supply of unburned gas (eg, natural gas or air) and each component supply supplied to the preparation chamber 2.2 along with hydrocarbons and other oxidizing gases depends on the amount of process gas to be prepared, the components and the desired It is adjusted based on the preparation target.

  The composition, flow rate and temperature of the spent process gas 3 discharged from the processing chamber 1.1 are measured before the gas is supplied to the preparation chamber 2.2. Similarly, the composition, flow rate and temperature of the conditioned process gas exhausted from the preparation chamber 2.2 are measured before the gas is supplied to the processing chamber 1.1.

  The total amount of unburned gas supplied to the processing chamber 2.2 and the relative amount of each component of the unburned gas are continuously changed (adjusted) to optimize the preparation in the processing chamber 2.2. The

This sequence forms a closed control loop for setting target variables for the process gas to be prepared in the preparation chamber 2.2 based on the analysis of the used process gas and / or the prepared process gas. Is done. The analysis of the spent process gas and / or the prepared process gas is specifically performed with CO content and CH ₄ content, or H ₂ content and CO ₂ content, or H ₂ O content and / or O. _{2 for the} content. The target variable is set (changed) by changing the amount of each component of the unburned gas supplied to the preparation chamber 2.2. The process gas 3 prepared in the preparation chamber 2.2 is monitored and analyzed and reconditioned as necessary.

  If necessary, cold air 3.3 can be supplied to the processing media 3.1, 3.2 of the used process gas 3.

  At least one of the used process gas 3 or its processing medium 3.1, 3.2 is sucked out of the processing chamber 1.1 and then reused for the preparation of the process gas in the preparation chamber 2.2. . The process gas prepared in the preparation chamber 2.2 is supplied to the processing chamber 1.1. That is, the spent process gas 3 (or at least one of the processing media 3.1 and 3.2) discharged from the processing chamber 1.1 is adjusted in the preparation chamber 2.2 and then processed in the processing chamber 1.1. Returned to

  If necessary, in order to accelerate and compress the flow of spent process gas 3 (or at least one of its processing media 3.1, 3.2) from the processing chamber 1.1 to the preparation chamber 2.2, a plurality of A process gas compressor 2.3 may be used. Further, in order to cool the processing medium, cold air 3.3 may be supplied to the process gas compressor 2.3.

Measurement control device having at least one of measurement elements such as probes, analyzers and sensors for monitoring, controlling and adjusting the temperature of the process atmosphere or process gas 3 in the processing chamber 1.1 of the industrial furnace 1 2.4 is used. The measurement controller 2.4 measures the temperature, CO content and / or pressure in the processing chamber 1.1, as well as the oxygen partial pressure, CO ₂ content and dew point etc. of the atmosphere in the processing chamber 1.1. Used to make a measurement of at least one of the parameters. In addition, the measurement control device 2.4 is used to control supply of the processing mediums 3.1 and 3.2 to the processing chamber 1.1 or discharge of the processing chamber 1.1.

The apparatus of the present invention for carrying out the above-described method of the present invention comprises:
(A) A closeable preparation chamber 2.2 for preparing the process gas 3 used in the processing chamber 1.1 of the industrial furnace 1, comprising a catalyst 2.2.1 and a temperature control device 2.2. 2 and a removable and sealable supply line 1.5 for supplying the prepared process gas 3 or its components (processing medium 3.1, 3.2) to the processing chamber 1.1, And a preparation chamber 2.2 connected to a discharge line 1.6 for discharging at least one of the process gas 3 or the processing medium 3.1, 3.2 from the processing chamber 1.1 or other areas of the industrial furnace 1 When,
(B) a fan-type process gas compressor 2.3 with a drive, functionally integrated in the preparation chamber 2.2;
(C) supply of process medium 3.1, 3.2 of process gas 3 operatively connected to process chamber 1.1, preparation chamber 2.2 and process gas compressor 2.3 of an industrial furnace; A measurement controller 2.4 for measuring the pressure in the processing chamber 1.1, the rotational speed of the process gas compressor 2.3, and the temperature of the catalyst 2.2.1;
(D) Supply amount of the processing medium 3.1, 3.2, supply amount and C amount of the prepared process gas 3 to the processing chamber 1.1 of the industrial furnace 1, and processing medium 3.1, 3. 2. Control and adjust parameters such as pressure, temperature and volume flow rate of process gas prepared in preparation chamber 2.2 for the purpose of adjusting and controlling the discharge from at least one of the two processing chambers 1.1 And an external module 2 including a switch unit 2.5.

  In this example, the external module 2 is configured as a single housing that includes a closeable preparation chamber 2.2, a catalyst 2.2.1, and a temperature control device 2.2.2. The housing 2 has at least one removable or sealable supply line for supplying the prepared process gas 3 or its components (processing media 3.1, 3.2) to the processing chamber 1.1 of the industrial furnace 1. 1.5 and at least one removable or sealable discharge line 1.6 for discharging at least one of the processing media 3.1, 3.2 from the processing chamber 1.1 or other area of the industrial furnace have.

  The measurement control device 2.4 includes the supply amount of the processing medium 3.1, 3.2 of the process gas 3, the pressure in the processing chamber 1.1, the rotational speed of the process gas compressors 1.4, 2.3, and It is configured to measure the temperature of catalyst 2.2.1. The measurement control device 2.4 is configured to operate components such as a valve for generating a partial mass flow of the process gas 3 (not shown).

  The switch unit 2.5 is provided for controlling and adjusting parameters such as pressure, temperature, volume flow rate, etc. of the process gas 3 prepared in the preparation chamber 2.2.

  A turbocharger can be used as the process gas compressor 1.4 installed in the processing chamber 1.1.

  In another embodiment, although not shown, the module 2 may be integrated with the industrial furnace 1 when implemented as, for example, a retort type carburizing furnace.

  In the embodiment described in the present specification, as a preferable example of the module 2, a module installed outside the industrial furnace 1 so as to be connectable to the industrial furnace is shown.

  Also, as is known in the art, a module backed with a ceramic material may be used.

Finally, the above-described measurement control device 2.4 included in the device of the present invention has at least one of the following elements (a) to (c).
(A) Measurement of temperature, CO content and pressure in the processing chamber 1.1 and measurement of at least one of parameters of oxygen partial pressure, CO ₂ content and dew point of the atmosphere in the processing chamber 1.1 Probes, analyzers and / or sensors for performing.
(B) Preparation of the process gas 3 in the preparation chamber 2.2 and supply of the prepared process gas to the processing chamber and discharge of the process gas consumed in the processing chamber from the processing chamber according to the reconditioning time of the process gas Switch unit 2.5 as a control and adjustment device for controlling
(C) Means for controlling the residence time, circulation or partial mass flow of the process gas 3 in the preparation chamber 2.2 or the processing chamber 1.1.

DESCRIPTION OF SYMBOLS 1 Industrial furnace 1.1 Processing chamber 1.2 Multipoint supply system 1.3 Quenching area 1.4 Processing chamber circulation device 1.5 Supply line 1.6 Discharge line 1.7 Cooling device 2 Module 2.1 Housing 2 .2 Preparation chamber 2.21 Catalyst 2.22 Temperature control device 2.3 Process gas compressor 2.4 Measurement control device 2.5 Switch unit 3 for control and adjustment Process gas 3.1 First treatment medium 3. 2 Second processing medium 3.3 Air

Claims (12)

A process gas preparation method used for heat treatment or thermochemical treatment of metal materials or metal workpieces in a processing chamber of an industrial furnace, comprising:
After the heat treatment in the processing chamber, supplying spent process gas consumed in the heat treatment to a preparation chamber provided separately from the processing chamber;
Reusing said spent process gas in said preparation chamber at a temperature up to about 1250 ° C. independent of the temperature of said processing chamber; and
Supplying a prepared process gas prepared in the preparation chamber to the processing chamber;
Optionally generating a reaction gas in the preparation chamber prior to performing a heat treatment in the processing chamber;
Generating the reaction gas comprises:
(A) supplying a predetermined amount of hydrocarbon and oxidizing gas corresponding to the required production amount of the reaction gas from an external source to the preparation chamber;
(B) reacting the hydrocarbon and the oxidizing gas in the preparation chamber to generate an endothermic reaction gas, and analyzing the quality of the generated endothermic reaction gas and adjusting as necessary;
(C) supplying the endothermic reaction gas generated in the preparation chamber to the processing chamber in a high or low temperature state;
(D) cleaning the processing chamber with the endothermic reaction gas to prepare for the heat treatment.   In order to prevent reactive decomposition of the spent process gas and / or the prepared process gas, spent process gas supplied from the processing chamber to the preparation chamber and / or supplied from the preparation chamber to the processing chamber. The method of claim 1, further comprising the step of cooling and adjusting the temperature of the prepared process gas.   In order to prevent reactive decomposition of the spent process gas and / or the prepared process gas, spent process gas supplied from the processing chamber to the preparation chamber and / or supplied from the preparation chamber to the processing chamber. The method of claim 1, further comprising the step of adiabatic or heating to adjust the temperature of the prepared process gas. Process for preparing each component supply and total supply of unburned gas such as natural gas or air supplied to the preparation chamber along with hydrocarbons and oxidizing gas for use in preparing the process gas in the preparation step And further comprising a feed rate adjustment step for adjusting based on the amount of gas, components and desired preparation target,
The supply amount adjusting step includes:
(A) Composition, flow rate and temperature of the used process gas supplied from the processing chamber to the preparation chamber and / or composition, flow rate and temperature of the prepared process gas supplied from the preparation chamber to the processing chamber. Measuring and analyzing
(B) measurement of the process gas comprising the CO, CH ₄ , H ₂ , CO ₂ and / or H ₂ O content of the used process gas and / or the prepared process gas so as to obtain optimum preparation results And setting a target variable of the gas to be prepared based on the analysis result, and continuously changing the relative amount of each component of the unburned gas and the total amount of the unburned gas supplied to the preparation chamber according to the target variable, And measuring and analyzing the prepared gas to confirm that the change to the target variable has been achieved and reconditioning as necessary. Method. The supply of the used process gas from the processing chamber to the preparation chamber and the supply of the adjusted process gas from the preparation chamber to the processing chamber are made up of an outer pipe and an inner pipe that is slightly longer than the outer pipe. Made using a multi-point supply system configured in an axial double tube structure,
The used process gas is sucked and discharged from the processing chamber through the inner pipe and supplied to the preparation chamber, and the prepared process gas prepared in the preparation chamber is supplied to the processing chamber through the outer pipe. The method according to claim 1, wherein the method is supplied. An apparatus for carrying out a method for preparing a process gas used for heat treatment or thermochemical treatment of a metal material or metal workpiece in a processing chamber of an industrial furnace,
(A) a preparation chamber for preparing a process gas that is connected to the processing chamber via a process gas supply line and a discharge line, has a catalyst and a temperature control device, and is closable;
(B) a process gas compressor functionally integrated with the processing chamber and the preparation chamber;
(C) a measurement control device for measuring the supply amount of each component of the process gas, functionally connected to the processing chamber, the preparation chamber, and the process gas compressor;
(D) a supply amount of one or more components of the process gas to the preparation chamber, a supply amount and a C amount of the prepared process gas to the processing chamber, and one or more of the process gases from the processing chamber A switch unit for controlling and adjusting at least one of parameters such as pressure, temperature and volume flow rate of the process gas prepared in the preparation chamber in order to control and adjust the discharge amount of the components of Equipment. The measurement control device is
A gas component analyzer for component analysis of CO and CH ₄ , or CO ₂ and H ₂ , or H ₂ O and / or O ₂ ;
A sensor for measuring the amount and temperature of the used process gas supplied from the processing chamber to the preparation chamber and the prepared process gas supplied from the preparation chamber to the processing chamber;
A controllable flow control valve and flow meter for measuring and controlling the flow rate of unburned gas supplied to the preparation chamber;
A programmable control system for processing each data measured by the gas component analyzer, the sensor and the flow meter, calculating a target variable, and transmitting a control signal to an actuator such as the valve. The device according to claim 6.   The apparatus according to claim 6 or 7, characterized in that the supply line and / or the discharge line cooling means are installed.   The apparatus according to claim 6 or 7, wherein a heat insulating means or a heating means is installed in the supply line and / or the discharge line.   10. The apparatus according to claim 6, wherein the preparation chamber has heat resistance and air tightness, and includes a heater and temperature control means.   The apparatus according to claim 6, wherein a metal such as nickel is used as a material of the catalyst for accelerating a gas reaction.   12. The apparatus according to claim 11, wherein a catalyst of a type used in an exhaust gas cleaning device for a passenger car engine is used as the catalyst.

Images