JP2012084648A - Gas piping member, gas piping - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gas piping member which can reduce liquefaction of gas therein, for example.SOLUTION: The gas piping member that supplies gas for processing a semiconductor substrate comprises: an inner tube which passes the gas on the inside thereof; a heater extending in the longitudinal direction of the inner tube in contact with the outer wall of the inner tube; an outer tube arranged on the outside of the inner tube and the heater coaxially with the inner tube and having an end provided with a ramp that inclines to the inner tube side and is connected to the inner tube; and a heat insulating material arranged between the inner tube and the outer tube. The heater is configured to be connected with the heater of other gas piping member by penetrating the ramp.

Description

  Embodiments described herein relate generally to a gas pipe member and a gas pipe.

  2. Description of the Related Art In recent years, various gases have been used for semiconductor substrate processing (etching processing, film forming processing, etc.) due to progress in process technology. Such a gas is supplied to a processing chamber of a processing apparatus for processing a semiconductor substrate via a gas piping member extending in the clean room. At this time, in order to supply the gas to the processing chamber at an appropriate flow rate (pressure) according to the recipe information (process conditions), it is desired that the gas does not liquefy in the gas piping member.

JP-A-6-168877 JP 2000-150387 A Japanese Patent Laid-Open No. 11-288927 JP 2004-146508 A JP-A-11-108283

  One embodiment aims at providing a gas piping member which can reduce liquefaction of gas in a gas piping member, for example.

  According to one embodiment, a gas pipe member for supplying a gas for processing a semiconductor substrate, the inner pipe passing the gas inward, and the inner pipe in contact with the outer wall of the inner pipe A heater extending in the longitudinal direction; and an outer tube having an inclined portion that is arranged coaxially with the inner tube on the outer side of the inner tube and the heater, and whose end portion is inclined toward the inner tube and connected to the inner tube. A heat insulating material disposed between the inner pipe and the outer pipe, and the heater is configured to pass through the inclined portion and be connected to a heater of another gas piping member. A featured gas piping member is provided.

FIG. 1 is a diagram illustrating a configuration of a gas pipe according to a first embodiment. FIG. 2 is a diagram illustrating a configuration of a gas piping member according to the first embodiment. FIG. 3 is a diagram illustrating a configuration in the vicinity of a connection portion between gas piping members according to the first embodiment. FIG. 4 is a diagram showing a configuration in the vicinity of a connecting portion between gas piping members in a modification of the first embodiment. FIG. 5 is a diagram illustrating a configuration of a gas piping member according to another modification of the first embodiment. FIG. 6 is a diagram illustrating a configuration of a gas piping member according to the second embodiment.

  Hereinafter, gas pipes according to embodiments will be described in detail with reference to the accompanying drawings. Note that the present invention is not limited to these embodiments.

(First embodiment)
A gas pipe 100 according to the first embodiment will be described with reference to FIG. FIG. 1 is a diagram illustrating a configuration of a gas pipe 100 according to the first embodiment.

  The gas pipe 100 is connected to the processing chamber CH of the processing apparatus PA via an opening / closing valve VL1 and is connected to a gas supply source (not shown) via a flow rate regulator (not shown). Thereby, when the on-off valve VL1 is opened, the gas G1 (see FIG. 3) is supplied from the gas supply source through the gas pipe 100 in the clean room into the processing chamber CH of the processing apparatus PA. That is, the gas pipe 100 can supply, for example, the gas G1 to the processing chamber CH of the processing apparatus PA. The processing apparatus PA processes a semiconductor substrate (not shown) using the gas G1. The processing apparatus PA is arranged in the clean room. Accordingly, the gas pipe 100 extends in the clean room. The flow rate regulator adjusts the flow rate of the gas flowing in the gas pipe 100 so that the gas is supplied to the processing chamber at an appropriate flow rate (pressure) according to the recipe information (process conditions).

  The gas pipe 100 includes a first gas pipe member 10, a second gas pipe member 20, a third gas pipe member 30, a wiring member connection connector CN1, and a wiring member connection connector CN2. The first gas piping member 10 to the third gas piping member 30 may include different shapes. For example, in the case shown in FIG. 1, the first gas piping member 10 and the third gas piping member 30 are linearly extended, whereas the second gas piping member 20 has a curved portion. ing. The first gas piping member 10 and the third gas piping member 30 are connected to the second gas piping member 20 by welding, respectively. As described above, the gas pipe 100 of the present embodiment is a process used for semiconductor manufacturing by welding and combining gas pipe members having different shapes (first gas pipe member 10 to third gas pipe member 30). It is configured to conform to the specifications of a device such as the device PA and a clean room.

  One end side of the first gas piping member 10 is connected to the processing chamber CH of the processing apparatus PA via the opening / closing valve VL1, and the other end side is connected to the second gas piping member 20 via the wiring member connection connector CN1. Has been. One end side of the third gas piping member 30 is connected to the second gas piping member 20 via the wiring member connection connector CN2, and the other end side is a predetermined wiring member connection connector (not shown) and predetermined piping. (Not shown) and a gas supply source via a flow rate regulator (not shown).

  The wiring member connection connector CN1 is attached to a connection portion between the gas piping member 10 and the gas piping member 20 after the gas piping member 10 and the gas piping member 20 are connected by welding. Thereby, the wiring member connection connector CN1 connects the gas piping member 10 and the gas piping member 20.

  The wiring member connection connector CN2 is attached to a connection portion between the gas piping member 20 and the gas piping member 30 after the gas piping member 20 and the gas piping member 30 are connected by welding. Thereby, the wiring member connection connector CN2 connects the gas piping member 20 and the gas piping member 30.

  Next, the structure of each gas piping member 10-30 in the gas piping 100 of this embodiment is demonstrated using FIG. FIG. 2 is a perspective view showing the configuration of the first gas piping member 10. Below, although the structure of the 1st gas piping member 10 is demonstrated exemplarily, it is fundamentally the same also about the structure of the other gas piping members 20 and 30. FIG.

  The first gas piping member 10 includes an inner pipe 11, a heater 12, an outer pipe 13, and a heat insulating material 14.

The inner tube 11 allows the gas G1 to pass inside. The gas G1 is, for example, a corrosive gas. Such a gas G1 includes, for example, at least one gas selected from the group consisting of SiCl ₄ , BCl ₃ , C ₅ F ₈ , and WF ₆ . Accordingly, the inner tube 11 is made of a material having corrosion resistance and thermal conductivity. The inner tube 11 is made of, for example, stainless steel having corrosion resistance such as SUS316. The pressure of the gas G1 is adjusted to a value such that the gas G1 has a boiling point close to the temperature in the clean room (for example, 25 ° C.). For example, when the gas G1 is SiCl ₄ , the pressure of the gas G1 is adjusted to about 0.03 MPa (by a flow regulator (not shown) provided between the gas supply source and the third gas piping member 30). In this state, it flows inside the inner tube 11. The boiling point of the gas G1 at this time is about 23 ° C.

  The heater 12 extends in the longitudinal direction of the inner tube 11 while being in contact with the outer wall of the inner tube 11. Specifically, the heater 12 includes a heater 12a and a heater 12b.

  As shown in FIG. 2, the heater 12 a and the heater 12 b are in contact with the outer wall of the inner tube 11 and extend along the longitudinal direction of the inner tube 11. The heater 12 a and the heater 12 b heat the gas G <b> 1 passing through the inner pipe 11 by heat conduction through the inner pipe 11. A heat insulating material 14 is disposed around the heater 12a and the heater 12b, and the heat of the heater 12a and the heater 12b can be efficiently transmitted to the inner tube 11.

  For example, the heater 12 a and the heater 12 b may be arranged at positions symmetrical with respect to the central axis of the inner tube 11. Thereby, when it sees in the cross section perpendicular | vertical to the longitudinal direction of the inner pipe | tube 11, the gas G1 which passes the inner side of the inner pipe | tube 11 can be heated equally. The heater 12a and the heater 12b are made of a material that generates heat due to their resistance, and are made of, for example, a nickel chromium alloy.

  The outer tube 13 is disposed outside the inner tube 11 and the heater 12 and is not in contact with the heater 12. Further, the outer tube 13 is arranged so as to be coaxial with the inner tube 11. That is, the gas pipe of this embodiment generally has a double pipe structure in which the inner pipe 11 and the outer pipe 13 extend coaxially. The outer tube 13 is made of a predetermined metal. The outer tube 13 is made of, for example, stainless steel such as SUS304, and is preferably made of a material having a lower thermal conductivity than the material of the inner tube 11.

  The heat insulating material 14 is disposed between the inner tube 11 and the outer tube 13. Specifically, the heat insulating material 14 is filled between the inner tube 11 and the outer tube 13. That is, the heat insulating material 14 extends in a tubular shape coaxially with the inner tube 11 so as to cover the inner tube 11 and the heater 12 from the outside. This makes it difficult for heat to be conducted from the inner tube 11 and the heater 12 to the outer tube 13, and makes it difficult for the inner tube 11 to be cooled (heat radiation) via the outer tube 13. The heat insulating material 14 is made of a material having heat insulating properties, for example. The heat insulating material 14 is made of, for example, glass wool, rock wool, wool heat insulating material, cellulose fiber, urethane foam, phenol foam, or the like.

  Next, the configuration in the vicinity of the connecting portion between the gas piping members will be described with reference to FIG. FIG. 3 is a cross-sectional view showing the configuration of the connection portion between the first gas piping member 10 and the second gas piping member 20 and the configuration of the wiring member connection connector CN1.

  In the first gas piping member 10, the outer pipe 13 is connected to the inner pipe 12 at the end on the gas piping member 20 side to form a connection portion 15. Similarly, in the second gas piping member 20, the outer tube 23 is connected to the inner tube 22 at the end portion on the gas piping member 10 side to form a connection portion 25. In the connecting portions 15 and 25, as shown in FIG. 3, the diameters of the inner pipes 11 and 21 do not change, and the outer pipes 13 and 23 are connected to the gas piping members 20 and 10 in the inner pipes 11 and 21, respectively. As the connection ends 11a and 21a are approached, inclined portions 13e and 23e extending so that the diameter gradually decreases and the distance to the inner pipes 11 and 21 decreases. And the connection ends 13a and 23a to the gas piping members 20 and 10 in the outer pipes 13 and 23 are connected to the connection ends 11a and 21a to the gas piping members 20 and 10 in the inner tubes 11 and 21 by welding. . The inner pipes 11 and 21 are stably arranged on the inner side of the outer pipes 13 and 23 by being connected to the outer pipes 13 and 23 at the connection portions 15 and 25.

  In addition, in the inclined portions 13e and 23e, the heaters 12a, 12b, 22a, and 22b extend through the outer tubes 13 and 23 to the outside of the inner tubes 11 and 21 and the outer tubes 13 and 23, respectively. Specifically, through holes 13b, 13c, 23b, and 23c that penetrate the outer tubes 13 and 23, respectively, are formed in the inclined portions 13e and 23e. The heaters 12a, 12b, 22a, and 22b extend through the outer tubes 13 and 23 through the through holes 13b, 13c, 23b, and 23c to the connection terminals 12a1, 12b1, 22a1, and 22b1, respectively. Thereby, it is comprised so that it can connect with the connection terminal of the heater of another gas piping member (for example, it can insert / extract via a socket, a plug, etc. which are not illustrated). That is, the connection terminals 12a1, 12b1 of the heaters 12a, 12b in the first gas piping member 10 and the connection terminals 22a1, 22b1 of the heaters 22a, 22b in the second gas piping member 20 are electrically connected as shown in FIG. Connected. Thus, in order to improve the uniformity of the temperature inside the inner pipes 11 and 21, the heaters 12 and 22 are configured to be connectable between the gas piping members.

  In addition, you may form the inclination parts 13e and 23e with the material with low heat conductivity different from the other part in the outer tube | pipe 13. As shown in FIG. If the strength can be ensured, the inclined portions 13e and 23e may be formed of a resin material such as plastic.

  In the gas pipe 100 of the present embodiment, the heaters 12 and 22 are electrically connected between the gas pipe members 10 and 20, so that the heaters 12 and 22 are located outside the outer pipe 13 in the connection portions 15 and 25. It will be. Therefore, a pipe member connection connector CN1 is formed in the connection portions 15 and 25 so as to surround the heaters 12 and 22. The piping member connection connector CN1 is configured to cover the connection portions 15 and 25, and the inside thereof may be filled with a heat insulating material in the same manner as the gas piping member. Further, it is more preferable that the heaters 12 and 22 provided in the connection parts 15 and 25 are in contact with the connection parts 15 and 25 as shown in FIG.

  Specifically, the wiring member connection connector CN1 includes a heat insulating material 74 and an outer tube 73.

  The heat insulating material 74 covers the connecting portions 15 and 25 and the heater 72. Specifically, the heat insulating material 74 extends in a donut shape coaxially with the inner tubes 11 and 21 so as to cover the connection portions 15 and 25 and the heater 72 from the outside. This makes it difficult for heat to be transferred from the connection portions 15 and 25 and the heater 72 to the outer tube 73, and makes it difficult for the connection portions 15 and 25 to be cooled (heat radiation) via the outer tube 73. . The heat insulating material 14 is made of, for example, glass wool, rock wool, wool heat insulating material, cellulose fiber, urethane foam, phenol foam, or the like.

  The outer tube 73 covers the heat insulating material 74 and connects the outer tube 13 and the outer tube 23. Specifically, the outer tube 73 extends in a donut shape coaxially with the inner tubes 11 and 21 so as to cover the heat insulating material 74 from the outside. The outer tube 73 is connected to the portion 13d of the outer tube 13 where the outer diameter starts to decrease (for example, by welding) and is connected to the portion 23d of the outer tube 23 where the outer diameter starts to decrease (for example, by welding). Has been. The outer tube 73 is disposed outside the inner tubes 11 and 21, the outer tubes 13 and 23, the heat conducting member 71, the heater 72, and the heat insulating material 74. Further, the outer tube 73 is arranged so as to be coaxial with the inner tubes 11 and 21. The outer tube 73 is made of a predetermined metal. The outer tube 73 is made of stainless steel such as SUS304.

  Here, suppose that the outer tube 13 in the first gas piping member 10 does not have the inclined portion 13e, and the diameter of the outer tube 13 is the end portion on the second gas piping member 20 side and other portions. A similar case can be considered. In this case, it is difficult to connect the first gas piping member 10 and the second gas piping member 20 by welding, and the first gas piping member 10 and the second gas piping member 20 are connected via a joint. Therefore, the gas G1 tends to leak at the connecting portion between the first gas piping member 10 or the second gas piping member 20 and the joint. Further, even if the connecting portion between the gas piping member 10 or another gas piping and the joint is sealed with a sealing member such as an O-ring, the gas G1 flowing inside the gas piping member 10 is a corrosive gas. In this case, since the seal member deteriorates, the gas pipe member 10 or another gas pipe member (second gas pipe member 20) and the joint are likely to leak gas.

  On the other hand, in 1st Embodiment, the edge part of the outer tube | pipe 13 in the 1st gas piping member 10 inclines to the inner tube | pipe 11 side, and has the inclination part 13e connected with the inner tube | pipe 11. FIG. Thereby, since the 1st gas piping member 10 and the 2nd gas piping member 20 can be connected by welding, the 1st gas piping member 10 and other gas piping members (2nd gas piping member 20) are connected. The leakage of the gas G1 (for example, corrosive) can be reduced at the connection portion with the gas.

  Alternatively, the first gas piping member 10 does not have the heater 12, the outer tube 13, and the heat insulating material 14, and the outer wall (outer periphery) of the inner tube 11 is a heat pipe along the longitudinal direction of the inner tube 11. Consider the case of a covered configuration. In this configuration, one end (heat input portion) of the heat pipe is heated by the heater, and the liquefied working fluid such as chlorofluorocarbon in the heat pipe is vaporized. While the vaporized gaseous working fluid flows through the heat pipe, the heat pipe exchanges heat with the inner pipe 11 to condense and liquefy, thereby heating the inner pipe 11. The liquefied working fluid reaches the other end of the heat pipe and then returns to the one end side of the heat pipe through a thin tube provided in the heat pipe. In this case, since the heating capacity of the heat pipe tends to decrease as the distance from the heat input portion increases, the gas passing through the inside of the inner pipe 11 is evenly heated when viewed in the longitudinal direction of the inner pipe 11. The gas tends to be liquefied in the gas piping member.

  In an actual clean room, various shapes of piping members are connected to form the gas piping 100. For this reason, if the heater is interrupted at each connection portion of the piping member, it is difficult to keep the entire area of the inner pipe at a sufficient temperature, and it is not preferable from the viewpoint of energy saving to raise the heating temperature of the heater.

On the other hand, in 1st Embodiment, the edge part of the outer tube | pipe 13 in the 1st gas piping member 10 inclines to the inner tube | pipe 11 side, and has the inclination part 13e connected with the inner tube | pipe 11. FIG. Accordingly, in the inclined portions 13e and 23e, the heaters 12a, 12b, 22a and 22b penetrate the outer tubes 13 and 23, respectively, and the connection terminals 12a1 and 12b1 outside the inner tubes 11 and 21 and the outer tubes 13 and 23, respectively. 22a1 and 22b1. The connection terminals 12a1, 12b1 of the heaters 12a, 12b in the first gas piping member 10 and the connection terminals 22a1, 22b1 of the heaters 22a, 22b in the second gas piping member 20 are electrically connected as shown in FIG. It is connected. Thereby, in the gas piping 100, the heaters 12 and 22 that are electrically continuous are formed also in the connection portions 15 and 25 between the gas piping members, and the heaters are individually provided for each gas piping member and controlled independently of each other. Even temperature control is possible with energy saving compared to the case. As a result, when viewed in the longitudinal direction of the inner pipes 11 and 21, the gas passing through the inner pipes 11 and 21 can be heated evenly, so that liquefaction of the gas in the gas piping member can be reduced. .
Further, in the configuration in which the outer wall of the inner pipe 11 is covered with the heat pipe along the longitudinal direction of the inner pipe 11, the surface opposite to the side of the heat pipe that covers the inner pipe 11 is exposed. The heat caused by the heat is also dissipated from the exposed surface. Thereby, it is difficult to efficiently heat the gas passing through the inner side of the inner tube 11.

  On the other hand, in the first embodiment, in the first gas piping member 10, the heat insulating material 14 is disposed around the heater 12a and the heater 12b. Thereby, the heat of the heater 12a and the heater 12b can be efficiently transmitted to the inner tube 11.

  Furthermore, in 1st Embodiment, the edge part of the outer tube | pipe 13 in the 1st gas piping member 10 has the inclination part 13e inclined to the inner tube 11 side and connected with the inner tube 11. FIG. Thereby, in the connection part with another gas piping member, the inclination part 13e of the 1st gas piping member 10, the inclination part of another gas piping member, the connection part of a 1st connection terminal, and a 2nd connection terminal, Can be easily disposed. That is, positioning at the time of disposing the heat insulating material is easy, and an overall increase (increase in size) of the diameter of the portion where the heat insulating material is disposed can be suppressed. According to 1st Embodiment, the structure suitable for mounting | wearing with the wiring member connection connector CN1 which has such a heat insulating material in the connection part with another gas piping member can be provided.

  Alternatively, suppose that the heater is arranged inside the inner pipe 11 in the first gas piping member 10. In this configuration, when a corrosive gas flows inside the inner tube 11, the heater is corroded by the corrosive gas and its characteristics are deteriorated, so that the gas passing inside the inner tube 11 is stably heated. It becomes difficult.

  On the other hand, in the first embodiment, in the first gas piping member 10, the heater 12 extends in the longitudinal direction of the inner tube 11 while being in contact with the outer wall of the inner tube 11. Thereby, since corrosion of a heater can be reduced, it is easy to stably heat the gas passing through the inside of the inner tube 11.

  Alternatively, in the first gas piping member 10, a heater insertion hole for inserting an L-shaped rod-shaped cartridge heater is provided in the outer tube 13, and the heater 12 is inserted in the state where the cartridge heater is inserted into the heater insertion hole. Instead, consider the case where the cartridge heater contacts the outer wall of the inner tube 11. In this case, since the cartridge heater is exposed to air through the gap with the heater insertion hole and is oxidized and its characteristics tend to deteriorate, it becomes difficult to stably heat the gas passing through the inner tube 11. .

  On the other hand, in the first embodiment, the heater 12 is covered with the heat insulating material 14 and the outer tube 13 in the first gas piping member 10. Thereby, since the heater 12 is hard to be exposed to air, it is easy to stably heat the gas passing through the inner pipe 11.

  Alternatively, it is assumed that the first gas piping member 10 does not have the heater 12, the outer tube 13, and the heat insulating material 14, and uses a pair of sandwiching grooved heaters having a width enough to sandwich the inner tube 11. Consider the case where the tube 11 is sandwiched. In this case, the sandwiching grooved heater sandwiches a part of the inner tube 11 in the longitudinal direction. As a result, the inner pipe 11 is cooled (heat radiation) in a portion of the inner pipe 11 that is not sandwiched by the sandwiching grooved heater, so that the gas tends to be liquefied in the gas piping member.

  On the other hand, in the first embodiment, as described above, when viewed in the longitudinal direction of the inner tube 11, the gas G1 passing through the inner side of the inner tube 11 can be heated evenly, and the inner tube 11 and the heater are heated. Heat is not easily conducted from 12 to the outer tube 13, and the inner tube 11 is less likely to be cooled (heat radiation) via the outer tube 13. As a result, gas liquefaction in the gas piping member can be reduced.

  Alternatively, in the first gas piping member 10, vacuum insulation is performed between the inner tube 11 and the outer tube 13, and the inner tube 11 and the outer tube 13 are held between the inner tube 11 and the outer tube 13. Consider a case where a metal spacer is provided. In this case, since the inner pipe 11 is cooled (heat radiation) through the outer pipe 13 and the spacer, the gas tends to be liquefied in the gas piping member.

  On the other hand, in the first embodiment, the heat insulating material 14 extends in a tubular shape coaxially with the inner tube 11 so as to cover the inner tube 11 and the heater 12 from the outside. As a result, while the heat insulating material 14 holds the inner tube 11 and the outer tube 13, heat is not easily conducted from the inner tube 11 and the heater 12 to the outer tube 13, and the inner tube The tube 11 is difficult to be cooled (heat radiation). As a result, gas liquefaction in the gas piping member can be reduced.

Moreover, in 1st Embodiment, the gas G1 which passes the inner side of the inner pipe | tube 11 in the gas piping member 10 has a boiling point near the temperature in a clean room. For example, the gas G1 includes at least one gas selected from the group consisting of SiCl ₄ , BCl ₃ , C ₅ F ₈ , and WF ₆ . If there is an insufficiently heated portion inside the inner tube 11, there may be a problem that the gas G1 is liquefied. Even in this case, in the first embodiment, the gas G1 passing through the inner side of the inner tube 11 can be heated evenly when viewed in the longitudinal direction of the inner tube 11 as described above. Further, heat is not easily conducted from the inner tube 11 and the heater 12 to the outer tube 13, and the inner tube 11 is hardly cooled (heat radiation) through the outer tube 13. As a result, gas liquefaction in the gas piping member can be reduced.

  Moreover, in 1st Embodiment, the 2nd gas piping member 20 is provided with the inner tube | pipe 21, the heater 22, the outer tube | pipe 23, and the heat insulating material 24, and between each gas piping part by the wiring member connection connector CN1. A heater is also provided electrically continuously in the connection portion. The heater 22 extends in the longitudinal direction of the inner tube 21 while contacting the outer wall of the inner tube 21. Thereby, when it sees in the longitudinal direction of the inner tube | pipe 21, the gas G1 which passes the inner side of the inner tube | pipe 21 can be heated equally. Further, the heat insulating material 24 is disposed between the inner tube 21 and the outer tube 23. At the same time, also in the wiring member connection connector CN1 surrounding the connection portions 15 and 25, the heat insulating material 74 covers the connection portions 15 and 25 and the heater 72. This makes it difficult for heat to be transferred from the connection portions 15 and 25 and the heater 72 to the outer tube 73, and makes it difficult for the connection portions 15 and 25 to be cooled (heat radiation) via the outer tube 73. . That is, gas liquefaction in the gas piping member can be reduced also in the portions (connection portions 15 and 25) connecting the first gas piping member 10 and the second gas piping member 20. As a result, it is easier to supply the gas to the processing chamber at an appropriate flow rate (pressure) according to the recipe information (process conditions).

  Moreover, in 1st Embodiment, the heaters 12 and 22 provided in the connection parts 15 and 25 are contacting the connection parts 15 and 25 from the outer side, as shown in FIG. Thereby, also in the part (connection part 15 and 25) which connects the 1st gas piping member 10 and the 2nd gas piping member 20, the gas G1 which passes an inner side can be heated, Therefore In the gas piping member Gas liquefaction can be more easily reduced.

  The wiring member connection connector CN1i may further include a heater 72 as shown in FIG. That is, the heater 72 is provided with connection terminals at both ends thereof, and electrically connects the heater 12 in the gas piping member 10 and the heater 22 in the gas piping member 20. Specifically, the heater 72 includes a heater 72a and a heater 72b. Each of the heater 72a and the heater 72b is configured such that both ends thereof can be connected to the connection terminal of the heater of the gas piping member (for example, can be inserted and removed via a socket, a plug, etc., not shown). Thereby, one end of the heater 72a is electrically connected to the connection terminal 12a1 of the heater 12a (for example, by welding), and the other end is electrically connected to the connection terminal 22a1 of the heater 22a (for example, by welding). Yes. One end of the heater 72b is electrically connected to the connection terminal 12b1 of the heater 12b (for example, by welding), and the other end is electrically connected to the connection terminal 22b1 of the heater 22b (for example, by welding). . The heaters 72a and 72b are made of a material that generates heat due to their resistance, and are made of, for example, a nickel chromium alloy.

  Further, the wiring member connection connector CN1i may further include a heat conducting member 71 as shown in FIG.

  The heat conducting member 71 is disposed so as to be in contact with the connecting portions 15 and 25 and the heater 72. Specifically, the heat conducting member 71 includes a heat conducting member 71a and a heat conducting member 71b.

  In the heat conducting member 71a, one main surface 71a1 is in contact with the heater 72a, and the other main surface 71a2 is in contact with the connecting portions 15 and 25. As a result, the heat conducting member 71a transmits the heat generated by the heater 72a to the connecting portions 15 and 25. That is, the heater 72a is connected to the inside of the connection portions 15 and 25 by heat conduction through the heat conduction member 71a and the connection portions 15 and 25 of the inner tube 11, the outer tube 13, the inner tube 21, and the outer tube 23. The gas G1 passing through is heated. The heat conducting member 71a is made of a material having high heat conductivity, and is made of, for example, stainless steel such as SUS316.

  In the heat conducting member 71b, one main surface 71b1 is in contact with the heater 72b, and the other main surface 71b2 is in contact with the connecting portions 15 and 25. As a result, the heat conducting member 71b transfers the heat generated by the heater 72b to the connecting portions 15 and 25. In other words, the heater 72b is connected to the inside of the connection portions 15 and 25 by heat conduction through the heat conduction member 71b and the connection portions 15 and 25 of the inner tube 11, the outer tube 13, the inner tube 21, and the outer tube 23. The gas G1 passing through is heated. The heat conducting member 71b is made of a material having high heat conductivity, and is made of, for example, stainless steel such as SUS316.

  Thereby, since the gas G1 passing through the inner side is also heated at the connecting portions 15 and 25 between the gas piping member 10 and the gas piping member 20, when viewed in the longitudinal direction of the inner tubes 11, 21, the inner tube 11, The gas G1 passing through the inside of the gas can be evenly heated.

  Further, in the first embodiment, the example in which the heater 12a and the heater 12b extend in a stripe shape along the longitudinal direction of the inner tube 11 as illustrated in FIG. 2 has been described. However, as illustrated in FIG. In the gas piping member 10i, the heater 12i may extend in contact with the outer wall of the inner tube 11 in a spiral manner. For example, the heater 12ai and the heater 12bi may be alternately wound around the outer wall of the inner tube 11 in a spiral shape.

(Second Embodiment)
Next, a gas pipe 200 according to the second embodiment will be described with reference to FIG. FIG. 6 is a cross-sectional view illustrating a configuration of the gas piping member 110 in the gas piping 200 according to the second embodiment. Below, it demonstrates centering on a different part from 1st Embodiment.

  As shown in FIG. 6, the gas pipe 200 includes a gas pipe member 110 instead of the gas pipe member 10. The gas piping member 110 has a heat insulating material 214. The heat insulating material 214 includes a plurality of heat insulating members 214a and 214b. Each of the heat insulating members 214 a and 214 b extends in a donut shape so as to surround the inner tube 11. The plurality of heat insulating members 214 a and 214 b are arranged at a predetermined pitch in the longitudinal direction of the inner tube 11. Thus, the plurality of heat insulating members 214 a and 214 b hold between the inner tube 11 and the outer tube 13. Moreover, the area | region 215 in which the heat insulating material 214 in the space between the inner tube 11 and the outer tube 13 is not arranged is evacuated. 6 shows a cross section not including the heater 12, and the heater 12b is in contact with the outer wall on the lower back side in FIG.

  Even with such a configuration, when viewed in the longitudinal direction of the inner tube 11, the gas G <b> 1 passing through the inner tube 11 can be evenly heated, and heat is conducted from the inner tube 11 and the heater 12 to the outer tube 13. The inner tube 11 is hardly cooled (heat dissipated) through the outer tube 13. As a result, gas liquefaction in the gas piping member can be reduced.

  Such a configuration may be similarly applied in place of the other gas piping members 20, 30, 40, 60. The configuration of the connecting portion is basically the same as that of the first embodiment. However, in this embodiment, the inner tube 11 and the outer tube 13 are fixed by a heat insulating member, so the member of the inclined portion is the inner tube. The outer tube may be formed of a weak material (compared to the first embodiment) that supports the outer tube.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  10, 10i, 20, 30, 40, 50, 60, 110 Gas piping member, 100, 200 Gas piping, CH treatment chamber, CN1, CN1i, CN2, CN2i Wiring member connection connector, PA treatment device, VL1 on-off valve.

Claims (6)

A gas piping member for supplying a gas for processing a semiconductor substrate,
An inner pipe for allowing the gas to pass inside;
A heater extending in the longitudinal direction of the inner tube while being in contact with the outer wall of the inner tube;
An outer tube that is arranged coaxially with the inner tube on the outside of the inner tube and the heater, has an inclined portion that is inclined toward the inner tube side and connected to the inner tube;
A heat insulating material disposed between the inner tube and the outer tube;
The gas pipe member, wherein the heater is configured to pass through the inclined portion and be connected to a heater of another gas pipe member. 2. The gas piping member according to claim 1, wherein the heat insulating material extends in a tubular shape coaxially with the inner tube so as to cover the inner tube and the heater. The heat insulating material has a plurality of heat insulating members each extending in a donut shape so as to hold the inner tube and the outer tube,
The gas piping member according to claim 1, wherein a region where the heat insulating material is not disposed in a space between the inner tube and the outer tube is in a vacuum. The gas piping member according to any one of claims 1 to 3, wherein the gas has a boiling point close to a temperature in the clean room. The gas piping member according to claim 4, wherein the gas includes at least one gas selected from the group consisting of SiCl ₄ , BCl ₃ , C ₅ F ₈ , and WF ₆ . A gas pipe in which a first gas pipe member and a second gas pipe member for supplying gas for processing a semiconductor substrate are connected via a pipe member connection connector,
Each of the first gas piping member and the second gas piping member is
An inner pipe for allowing the gas to pass inside;
A heater extending along the longitudinal direction of the inner tube while contacting the outer wall of the inner tube;
An outer tube that is arranged coaxially with the inner tube on the outside of the inner tube and the heater, has an inclined portion that is inclined toward the inner tube side and connected to the inner tube;
A heat insulating material disposed between the inner tube and the outer tube;
The heater of the first gas piping member extends through the inclined portion of the first gas piping member to a first connection terminal,
The heater of the second gas piping member extends through the inclined portion of the second gas piping member to a second connection terminal;
The first connection terminal and the second connection terminal are electrically connected to each other outside the outer pipe of the first gas piping member and the second gas piping member,
The piping member connection connector covers the inclined portion of the first gas piping member, the inclined portion of the second gas piping member, and the connection portions of the first connection terminal and the second connection terminal. Gas piping characterized by having a heat insulating material.

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