JP2012075577A - Hydrogen peroxide solution atomization device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an atomization device that efficiently atomizes a hydrogen peroxide solution, extends lifetime of a vibration plate, and keeps constant quality by preventing the vibration plate from being distorted during assembly.SOLUTION: The hydrogen peroxide solution atomization device includes a reservoir storing the hydrogen peroxide solution, and an atomization unit which atomizes the hydrogen peroxide solution in the reservoir by ultrasonic vibrations so that the hydrogen peroxide solution can be discharged together with carrier gas. The atomization unit is provided with an accommodation portion storing a propagation liquid for propagating the ultrasonic vibrations. The reservoir comprises an opening which penetrates a bottom plate and which communicates with the accommodation portion, a groove which is continuously formed around the opening in the outer surface of the bottom plate, an elastic seal member which is disposed so as to come into contact with a bottom surface of the groove and an inner peripheral surface closer to the opening and protrude from the outer surface of the bottom plate, the vibration plate which covers the opening and the groove, and a fixing plate which fixes the vibration plate so as to press the vibration plate against the elastic seal member and the outer surface of the bottom plate so that the vibration plate can seal the opening.

Description

  The present invention relates to an atomizing device for hydrogen peroxide water.

  In an isolator that performs a work on a biological material such as a human cell, a sterilization process is performed in order to make the work chamber aseptic as possible before the work. In this sterilization process, for example, gasified hydrogen peroxide solution is supplied into the working chamber to kill germs and the like existing in the working chamber. The applicant of the present application has applied for a sterilizing substance supply device that gasifies the hydrogen peroxide solution and supplies it into the working chamber of the isolator (patent application: Japanese Patent Application No. 2009-178085).

  This sterilizing substance supply apparatus is provided with a cup for storing hydrogen peroxide water, an ultrasonic vibrator, and a heater. The liquid hydrogen peroxide water is atomized by ultrasonic vibration, and the atomized hydrogen peroxide water is heated by a heater. It is gasified by heating. When the hydrogen peroxide solution in the cup is exhausted, the ultrasonic vibrator is empty and damaged, so a container is placed under the cup to fill it with ultrasonic propagation material (for example, pure water). The sonic transducer is provided under the container so as to transmit the ultrasonic vibration to the hydrogen peroxide solution in the cup through the propagation material. And at the boundary between the bottom of the cup and the container filled with the propagating substance, it is sealed so that the propagating substance and hydrogen peroxide are not mixed, and the stainless steel thin plate is used to transmit the ultrasonic vibration efficiently. (Diaphragm) is attached. The ultrasonic vibration generated by the ultrasonic vibrator is transmitted through the propagation material, passes through the vibration plate and reaches the surface of the hydrogen peroxide solution, so that a water column stands there and promotes atomization.

  In this apparatus, an O-ring is used to maintain airtightness when attaching the diaphragm. As shown in FIGS. 2A and 3A in the above patent application, an annular groove 2145 is cut in the bottom surface of the cup 214, an O-ring 2144 is fitted therein, and a diaphragm 2141 and a presser plate are provided thereon. The flat plates 2142 are overlapped and fixed with screws 2143. In such a configuration, the outer diameter of the annular groove 2145 and the width of the groove are usually set so that the O-ring contacts the wall surface on the outer peripheral side of the groove at the beginning of assembly.

JP 2010-169366 A

  In such an atomizing device, when the screw is tightened and the diaphragm is pressed against the O-ring by a flat plate, the O-ring is elastically deformed and is in close contact with the bottom and outer peripheral surfaces of the groove and the diaphragm so as to be airtight. By the way, since the O-ring is pressed down and flattened at this time, the contact with the diaphragm moves away from the outer peripheral surface of the groove when the assembly is completed, that is, approaches the inside. Since the diaphragm is made of a very thin plate, when attached to the apparatus, the O-ring may be dragged to cause wrinkles or distortion. When wrinkles or distortion occur in the diaphragm, it is considered that the ultrasonic vibration is refracted or reflected, and the ultrasonic vibration is diffused and attenuated, which adversely affects the formation of water columns on the hydrogen peroxide surface. The speed of atomization was decreasing. In addition, the life of the diaphragm may be adversely affected. Since distortion generated in the diaphragm is generated during the work of assembling the diaphragm to the atomizer, the degree of the distortion varies depending on the individual apparatus, and it may be difficult to keep the quality of the atomizer constant.

  In order to solve the above-mentioned problems, the atomization device of the present invention includes a storage unit in which hydrogen peroxide solution is stored, and the hydrogen peroxide solution so that the hydrogen peroxide solution in the storage unit is discharged together with a carrier gas. An atomizing unit for atomizing the ultrasonic vibration by ultrasonic vibration, wherein the atomizing unit includes a storage unit for storing a propagation liquid that propagates ultrasonic vibration, and the storage unit An opening that penetrates through the bottom plate and communicates with the housing portion, a groove that is continuously formed around the opening on the outer surface of the bottom plate, a bottom surface of the groove, and an inner peripheral surface near the opening, and An elastic seal member arranged so as to protrude from the outer surface of the bottom plate, a diaphragm covering the opening and the groove, and the diaphragm pressed against the outer surface of the elastic seal member and the bottom plate so as to seal the opening A fixing plate to be fixed; Characterized by comprising.

  According to the atomization apparatus of the present invention, since distortion can be prevented from occurring in the diaphragm during assembly, the efficiency of atomization of hydrogen peroxide water is increased, the life of the diaphragm is extended, and the quality is made constant. Can be planned.

It is a figure which shows the structural example of an isolator. It is a figure which shows the structural example of a sterilization gas production | generation apparatus. (A) is an exploded view of the storage part of the atomization apparatus concerning this embodiment, (b) is the figure which assembled the storage part of the atomization apparatus shown to (a). (A) is the photograph which image | photographed the storage part of the atomization apparatus concerning this embodiment from the ultrasonic transducer | vibrator side, (b) is the diaphragm fixed to the bottom face of the cup of the atomization apparatus of a comparison object with the screw. 4 is a photograph of the flat plate taken from the ultrasonic transducer side. In the atomization apparatus concerning this embodiment, and the atomization apparatus of a comparison object, it is a figure which shows the relationship between the elapsed time after starting atomization, and the atomization amount, respectively.

At least the following matters will become apparent from the description of the present specification and the accompanying drawings.
Hereinafter, embodiments of the present invention will be described. In addition, the atomization apparatus 100 which concerns on this invention is integrated in the isolator as the sterilization gas production | generation apparatus 20 in this embodiment. For this reason, an isolator will be described as an example.
In this specification, the hydrogen peroxide solution is an aqueous hydrogen peroxide solution in which hydrogen peroxide is dissolved in water. In the present embodiment, an aqueous solution containing 35% hydrogen peroxide is mainly used. Further, the generation of hydrogen peroxide gas does not generate pure hydrogen peroxide gas, but also includes a mixture of hydrogen peroxide and a mist of hydrogen peroxide water.

<Overall configuration of isolator>
As shown in FIG. 1, the isolator includes a work chamber 1, a gas supply unit 2, a gas discharge unit 3, a sterilization gas supply device 4, and a control unit 5.

  The work chamber 1 is a part that divides a work space for performing work in an aseptic environment, and is configured by a box-like member having a front door 6 on the front surface. The front door 6 is configured to be openable and closable from the outside. A work glove 7 is provided on the front door 6. The work glove 7 is inserted with an operator's arm when working in the work space 8.

  A gas supply port 9 is provided on one side surface of the work chamber 1. A gas (for example, hydrogen peroxide gas as a sterilization gas) is supplied from the gas supply unit 2 through the gas supply port 9. Here, the gas supply port 9 is provided with a HEPA filter 10. For this reason, dust or the like contained in the gas from the gas supply unit 2 is captured by the HEPA filter 10, and only the gas is supplied to the work space 8.

  A gas discharge port 11 is provided on the other side surface of the work chamber 1. The gas exhaust port 11 is also provided with a HEPA filter 10. For this reason, dust and the like are prevented from entering the work space 8 through the gas discharge port 11. The gas in the work space 8 is discharged from the gas discharge port 11. The discharged gas is sent to the gas discharge unit 3.

  The gas supply unit 2 is a part that supplies gas to the work chamber 1. The gas supply unit 2 is provided with an intake port 12, a first three-way valve 13, and a fan 14.

  The intake port 12 is a part that takes in air from the outside. The fan 14 sends the air taken in from the outside to the first three-way valve 13. The first three-way valve 13 is in communication with each of the sterilization gas supply device 4, the fan 14, and the work chamber 1. And a flow path is switched according to the control information from the control part 5. FIG.

  Therefore, when the sterilization gas supply device 4 and the work chamber 1 are communicated with each other by the first three-way valve 13, hydrogen peroxide gas is supplied to the work chamber 1. On the other hand, when the fan 14 and the work chamber 1 are in communication with each other by the first three-way valve 13, air is supplied to the work chamber 1 by the operation of the fan 14. The fan 14 is switched between an operating state and a stopped state by a control signal from the control unit 5. In addition, the amount of gas delivered can be adjusted.

  The gas discharge unit 3 is a part that discharges the gas in the work chamber 1. The gas discharge unit 3 is provided with a second three-way valve 15, a sterilizing substance reduction processing unit 16, an exhaust port 17, and a fan 21. The second three-way valve 15 communicates with each of the gas discharge port 11, the fan 21, and the sterilizing substance reduction processing unit 16 of the work chamber 1. And a flow path is switched according to the control information from the control part 5. FIG. For example, the gas discharge port 11 and the sterilizing substance reduction processing unit 16 are communicated, or the gas discharge port 11 and the fan 21 are communicated.

  The fan 21 supplies the gas from the gas discharge port 11 to the sterilization gas supply device 4 (sterilization gas generation device 20). For this reason, when the gas exhaust port 11 and the fan 21 are communicated and the sterilization gas supply device 4 and the work chamber 1 are communicated, the gas from the gas exhaust port 11 circulates in the isolator. Become.

  The sterilization substance reduction processing unit 16 is provided between the second three-way valve 15 and the exhaust port 17, and the concentration of hydrogen peroxide (sterilization substance) in the gas sent through the second three-way valve 15 is determined. This is the part that performs the process of reducing. The sterilizing substance reduction processing unit 16 is made of, for example, a metal catalyst such as platinum or activated carbon. The sterilization substance reduction processing unit 16 is not limited to a metal catalyst or activated carbon as long as the concentration of hydrogen peroxide can be reduced. The exhaust port 17 is a part that discharges the gas after being processed by the sterilizing substance reduction processing unit 16 to the atmosphere.

  The sterilization gas supply device 4 supplies hydrogen peroxide water by gasification. The sterilization gas supply device 4 includes a sterilization substance cartridge 18, a pump 19, and a sterilization gas generation device 20. The sterilizing substance cartridge 18 stores hydrogen peroxide water as a sterilizing substance. The pump 19 pumps up the hydrogen peroxide solution stored in the sterilizing substance cartridge 18 and sends it to the sterilizing gas generator 20. The pump 19 is constituted by a peristaltic pump, for example. The sterilization gas generator 20 generates hydrogen peroxide gas (sterilization gas) from the supplied hydrogen peroxide solution. The generated hydrogen peroxide gas is supplied to, for example, the first three-way valve 13. The sterilization gas generator 20 will be described in detail later.

  The control part 5 is a part which electrically controls each part mentioned above. The control unit 5 includes, for example, a first three-way valve 13 and a fan 14 that the gas supply unit 2 has, a second three-way valve 15 and a fan 21 that the gas discharge unit 3 has, and a sterilization gas generation device that the sterilization gas supply device 4 has. 20 etc. are controlled.

  Under the control of the control unit 5, for example, the hydrogen peroxide gas generated by the sterilization gas generator 20 is supplied to the work chamber 1 through the first three-way valve 13, and the hydrogen peroxide gas discharged from the work chamber 1 is supplied. It is also possible to circulate the system by sending it to the sterilization gas generator 20 side through the second three-way valve 15. And if hydrogen peroxide gas is circulated in the system, the system can be made aseptic environment. As described above, the aseptic environment refers to an environment that is almost dust-free and aseptic as long as it prevents the introduction of substances other than those necessary for work performed in the work chamber 1.

<About the sterilization gas generator 20>
Next, an example of the sterilization gas generator 20 will be described. As shown in the partial cross-sectional view of FIG. 2, the sterilization gas generation device 20 includes an atomization device 100 including a storage unit 30 and an atomization unit 40, and a gasification unit 50. FIG. 2 is a partial cross-sectional view of the sterilization gas generation apparatus 20 in which the configuration excluding the heater 52 of the gasification unit 50, which will be described later, is cut in the vertical direction.

  The storage unit 30 is a part that stores the hydrogen peroxide solution supplied from the pump 19. The storage unit 30 closes the storage unit main body 31 in which the hydrogen peroxide solution is stored, and the opening 312 opened in the bottom plate 311 of the storage unit main body 31, and generates ultrasonic waves in the hydrogen peroxide solution in the storage unit main body 31. A vibration plate 32 that transmits vibration, and an elastic seal member 33 and a fixing plate 34 for fixing the vibration plate 32 to the storage unit main body 31 are provided. Details of the storage unit 30 will be described later.

  The atomization unit 40 is a part that atomizes the hydrogen peroxide solution stored in the storage unit 30, and includes a storage unit 41 and an ultrasonic transducer 42. The accommodating portion 41 is a portion that accommodates the ultrasonic transducer 42 and the ultrasonic wave propagation liquid 43 and is a hollow cylindrical container having an opening on the upper surface. The accommodating portion 41 is made of a metal such as stainless steel or a resin. A circular plate-like partition plate 44 that partitions the inner space vertically is provided in the inner space of the accommodating portion 41.

  The ultrasonic transducer 42 is an element that generates ultrasonic vibrations, and is attached to the partition plate 44 in a state of being accommodated inside the accommodating body 45. The operation of the ultrasonic transducer 42 is controlled according to control information from the control unit 5. For example, the control unit 5 controls the start and stop of vibration and the strength of vibration.

  The ultrasonic wave propagation liquid 43 is stored in a space above the partition plate 44 in the accommodating portion 41. In the present embodiment, water is used as the ultrasonic wave propagation liquid 43. The ultrasonic wave propagation liquid 43 is not limited to water and may be any liquid that can propagate ultrasonic vibrations. Through this ultrasonic wave propagation liquid 43, the ultrasonic vibration generated by the ultrasonic vibrator 42 is propagated to the vibration plate 32 of the reservoir 30.

  When the ultrasonic vibrator 42 is operated in a state where the hydrogen peroxide solution is stored in the storage unit 30, the ultrasonic vibration is propagated to the vibration plate 32 through the ultrasonic propagation liquid 43, and further, the storage unit 30. The water column rises when it reaches the surface of the hydrogen peroxide solution, and the hydrogen peroxide solution is atomized.

  Next, the gasification unit 50 will be described. The gasification part 50 is a part that gasifies the atomized hydrogen peroxide solution, and includes an inner cylinder part 51, an outer cylinder part 52, a gas introduction pipe 53, and the like, and is provided above the storage part 30. It has been.

  The inner cylinder part 51 is comprised by the metal cylindrical members. The inner cylinder portion 51 of the present embodiment includes a stainless steel portion 51A made of a stainless steel member and an aluminum portion 51B made of an aluminum member that is connected to the lower side of the stainless steel portion 51 and is thinner than the stainless steel portion 51A. Including. The inner cylinder part 51 is attached in a state facing the vertical direction. In the attached state, the inner cylinder portion 51 is positioned such that the lower end portion 55 is at a height directly above the storage portion 30.

  The heater 52 is a member that is heated by energization, and includes a columnar heating element 56 and heat conductive fins 57 attached around the heating element 56. That is, the heat from the heating element 56 is diffused by the fins 57. The heater 52 is disposed in the inner space of the inner cylinder portion 51. For example, it is arranged in a range of about 3/4 of the length of the inner cylinder portion 51 from the upper end side.

  A flow path regulating plate 58 is attached between the heating element 56 of the heater 52 and the inner wall surface of the inner cylinder portion 51. The flow path regulating plate 58 is configured by a substantially semicircular metal plate in which a contact portion with the heating element 56 is cut out in a semicircular shape. The flow path regulating plate 58 is attached in a substantially horizontal direction so as to cover one half of the inner space of the inner cylinder portion 51. In addition, a plurality of flow path regulating plates 58 are alternately arranged with a predetermined interval in the vertical direction. For example, the flow path restriction plates 58 are arranged at regular intervals, or arranged so that the upper side is dense and the lower side is rough. Further, the heater 52 may be disposed so that the portion is dense and rougher on the lower side. The heater 52 is positioned in the inner space of the inner cylinder portion 51 by these flow path regulating plates 58. Further, a meandering passage through which gas passes is defined in the inner space of the inner cylinder portion 51 by the passage restriction plate 58, and heat generated by the heating element 56 is transmitted to the inner cylinder portion 51 through the passage restriction plate 58. Is done.

  A pipe 59 is attached to the upper side surface of the inner cylinder portion 51. Through this pipe 59, hydrogen peroxide gas is discharged. Note that the temperature of the gas flowing through the pipe 59 is detected by a temperature sensor (not shown), and a detection signal is output to the control unit 5. Moreover, the upper end part 60 of the inner cylinder part 51 is formed in the flange shape, and is sealed in the airtight state by the inner side cover member 61 being attached.

  The outer cylinder part 53 is configured by a metal cylindrical member having a diameter slightly larger than that of the inner cylinder part 51. The outer cylinder part 53 of this embodiment is comprised with the stainless steel pipe.

  In the inner space of the outer cylinder portion 53, the inner cylinder portion 51 is disposed. That is, the outer tube portion 53 and the inner tube portion 51 constitute a double tube. As described above, the lower end portion 54 of the outer cylinder portion 53 is connected to the upper end portion of the storage portion 30 in an airtight state. The outer cylindrical portion 53 covers the inner cylindrical portion 51 in a range of about 4/5 of its length from the lower end. A pipe 62 is attached to the upper side surface of the outer cylinder portion 53. This pipe 62 is for introducing a carrier gas. That is, the carrier gas flows into the space between the outer cylinder portion 53 and the inner cylinder portion 51 (the gas flow path 63 for carrier gas) through the pipe 62. In the present embodiment, clean air is used as the carrier gas, and air is introduced into the pipe 62 by the rotation of the air supply fan (carrier gas supply fan).

  Moreover, the upper end part 65 of the outer cylinder part 53 is formed in the flange shape, and is sealed in the airtight state by attaching the ring-shaped outer side cover member 66. FIG. Further, a tube opening 64 for passing a drain tube through which the hydrogen peroxide solution flows is provided on the lower side surface of the outer cylinder portion 53. Note that the gap between the drain tube and the tube opening 64 is closed by the bushing. For this reason, the tube opening 64 is sealed in an airtight state.

  As described above, the operation of the sterilization gas generation device 20 is controlled by the control signal from the control unit 5 to generate sterilization gas. In the sterilization gas generator 20, first, energization of the heater 52 (heating element 56) and rotation of the air supply fan are started by the control signal. As a result, heat generation from the heating element 56 and supply of carrier gas (air) are started. Further, the pump 19 is driven to supply a predetermined amount of the hydrogen peroxide solution in the sterilizing substance cartridge 18 to the storage unit 30.

  The carrier gas flowing through the pipe 62 flows into the gas flow path 63 from the upper part of the outer cylinder portion 53 and flows downward through the gas flow path 63. That is, it flows along the outer peripheral surface of the inner cylinder portion 51. Since the heat from the heating element 56 is transmitted to the inner cylinder part 51 through the flow path regulating plate 58, the fins 57, and the air, the inner cylinder part 51 is heated. Heating the inner cylinder part 51 causes heat exchange with the carrier gas flowing along the outer peripheral surface of the inner cylinder part 51, and the temperature of the carrier gas rises.

  The carrier gas changes the direction of flow at the location of the reservoir 30. That is, it wraps around at the lower end 55 of the inner cylinder part 51 and flows into the inner space of the inner cylinder part 51. And this inner space rises. Since the heat from the heating element 56 is released to the inner space of the inner cylinder portion 51 through the fins 57 of the heater 52, the temperature of the carrier gas rising in the inner space is further increased. In addition, the meandering flow path formed by the plurality of flow path regulating plates 58 is formed in the inner space of the inner cylinder portion 51, so that the moving distance of the carrier gas can be increased, and the temperature of the carrier gas can be reliably ensured. Can be raised.

  When the temperature of the carrier gas discharged from the inner cylinder portion 51 reaches the vaporization temperature of the hydrogen peroxide solution, the driving of the ultrasonic vibrator 42 is started. As described above, the ultrasonic vibration generated by the ultrasonic vibrator 42 is propagated to the diaphragm 32 via the ultrasonic wave propagation liquid 43. Then, the hydrogen peroxide solution in the reservoir 30 is atomized by the ultrasonic vibration of the diaphragm 32.

  The atomized hydrogen peroxide solution rises in the inner space of the inner cylinder portion 51 on the carrier gas flow. At this time, since the carrier gas is heated while flowing through the gas flow path 63 and the inner space forms a meandering flow path, the atomized hydrogen peroxide solution is sufficiently discharged. It can be heated and reliably gasified. Further, since the carrier gas is preheated, it is possible to prevent the atomized hydrogen peroxide solution from adhering to the lower end portion 55 of the inner cylinder portion 51 and being liquefied.

  Furthermore, in this embodiment, since the inner cylinder part 51 is comprised with aluminum with favorable heat conductivity, also in this point, carrier gas can be heated efficiently and hydrogen peroxide water can be gasified reliably. In addition, since the carrier gas is heated in advance, heat exchange occurs between the hydrogen peroxide solution stored in the storage unit 30 and the carrier gas, and the evaporation of the hydrogen peroxide solution is promoted.

<About the storage unit>
Next, an example of the storage unit 30 will be described with reference to the cross-sectional views of FIGS. In the storage unit 30, a fixing plate 34 is attached to the storage unit main body 31 by screwing screws 35 so that the diaphragm 32 is fixed via an elastic seal member 33. First, with reference to Fig.3 (a), each structure of the storage part 30 before the fixing plate 34 is attached to the storage part main body 31 is demonstrated.

  The reservoir main body 31 is made of, for example, metal, and includes a concave portion 310 that is recessed in an inverted frustoconical shape on the inner surface side. A circular opening 312 penetrating the bottom plate 311 is formed so as to communicate with the housing portion 41. Note that the inner diameter of the upper surface side of the recess 310 is substantially equal to the inner diameter of the outer cylinder part 53 of the gasification part 50 and is set larger than the diameter of the inner cylinder part 51.

  An annular groove 313 is formed around the opening 312 on the outer surface of the bottom plate 311 of the storage body 31. In addition, a plurality of screw holes are formed on the outer surface of the bottom plate 311 of the storage unit body 31 at a distance L, which will be described later, from the groove 313 toward the opposite side of the opening 312 and at equal intervals around the opening 312. 314 is formed. Inside the screw hole 314, a female screw that is screwed with the male screw of the screw 35 is formed.

  An elastic seal member 33 (so-called O-ring) is disposed near the opening 312 in the groove 313 of the reservoir main body 31. The cross-sectional diameter (thickness) of the elastic seal member 33 is larger than the depth of the groove 313, and protrudes from the outer surface of the bottom plate 311 when arranged in contact with the bottom surface of the groove 313 and the inner peripheral surface near the opening 312. The elastic seal member 33 is an annular packing made of, for example, silicon rubber. Here, the inner diameter of the groove 313 (the diameter formed by the inner peripheral surface) is slightly larger than the inner diameter of the elastic seal member 33. Thereby, the elastic seal member 33 is disposed so as to be in close contact with the inner peripheral surface of the groove 313 by an elastic force. Further, the width of the groove 313 is larger than the thickness of the elastic seal member 33, and there is a gap between the outer peripheral surface of the groove 313 far from the opening 312 and the elastic seal member 33.

  The diaphragm 32 is formed of a stainless steel thin plate having a thickness of about 20 μm, for example. This diaphragm 32 is arrange | positioned so that the opening 312 of the storage part main body 31 and the groove | channel 313 in which the elastic seal member 33 is arrange | positioned may be covered. Further, in the vibration plate 32 arranged in this manner, a through hole 320 through which the screw 35 is inserted is formed at a position corresponding to the screw hole 314 of the storage unit main body 31.

  The fixed plate 34 is a metal plate member having a thickness of about 2 mm, for example, and is disposed so as to face the bottom plate 311 of the storage unit main body 31 with the vibration plate 32 interposed therebetween. In the fixed plate 34 arranged in this manner, a through hole 340 for exposing the diaphragm 32 is formed at a position corresponding to the opening 312 of the reservoir main body 31. The through hole 340 has the same size (diameter) as the opening 312. Therefore, when the fixed plate 34 is attached, the elastic seal member 33 is pressed with the diaphragm 32 interposed therebetween. Further, in the fixing plate 34, a through hole 341 through which the screw 35 is inserted is formed at a position corresponding to the screw hole 314 of the storage unit main body 31.

  Next, with reference to FIG. 3B, the structure of the reservoir 30 in which the fixing plate 34 is attached to the reservoir main body 31 will be described.

  As described above, the elastic seal member 33, the vibration plate 32, and the fixed plate 34 are arranged on the outer surface of the bottom plate 311 in the storage unit main body 31, so that the through holes 320 and 341 concentric with the screw hole 314 are formed. On the other hand, the screw 35 is inserted. The fixing plate 34 is fixed to the outer surface of the bottom plate 311 in the storage portion main body 31 together with the vibration plate 32 and the elastic seal member 33 by screwing and tightening the male screw of the screw 35 to the female screw of the screw hole 314. . As a result, the fixing plate 34 presses and fixes the diaphragm 32 against the elastic seal member 33 and the bottom plate 311. As a result, the diaphragm 32 seals the opening 312. At that time, a portion of the elastic seal member 33 protruding from the bottom plate 311 is pressed against the fixed plate 34 via the diaphragm 32, so that the elastic seal member 33 moves from the inner peripheral surface of the groove 313 toward the outer peripheral surface. Elastically deforms to spread. That is, the elastic seal member 33 having a circular cross section is deformed and flattened when pressed from above and below. At this time, since the elastic seal member 33 is in close contact with the inner peripheral surface of the groove 313, the elastic seal member 33 is deformed while expanding outward. The elastic seal member 33 applies a stress F to the diaphragm 32 in the direction from the center of the opening 312 to the outside (the direction indicated by the arrow in FIG. 3B) by the frictional force. This stress F becomes a force, that is, tension toward the outer side of the diaphragm 32 from the center to the entire circumference, so that tension is applied to the diaphragm 32 to suppress wrinkles and distortion. For this reason, when attaching the diaphragm 32 to the storage part main body 31, it can prevent that a distortion arises in the part facing the opening 312 of the diaphragm 32. FIG.

  The distance L between the groove 313 and the screw hole 314 is, for example, a plane where the diaphragm 32 is fixed to the outer surface of the bottom plate 311 so that the portion facing the opening 312 of the diaphragm 32 has no wrinkles or distortion. As shown, the portion opposite to the opening 312 with the groove 313 as a boundary is a distance at which the stress F can be sufficiently absorbed. That is, the longer the distance L, the smaller the stress per unit area on the opposite side of the opening 312 from the groove 313 in the diaphragm 32, and the easier it is to absorb the stress F.

  The storage unit main body 31 assembled in this way is attached so as to enter the storage unit 41 of the atomization unit 40 as shown in FIG. Accordingly, the lower part of the storage unit body 31 including the diaphragm 32 is immersed in the ultrasonic wave propagation liquid 43 in the storage unit 41.

<Comparison of characteristics of atomizer>
Here, referring to FIGS. 4 (a), (b) and FIG. 5, the atomization device 100 according to the present embodiment and the cup as shown in FIGS. 2A and 3A in the patent application described in the background art. When the diaphragm 2141 is fixed to the bottom surface of 214, the characteristics of the atomizer when the diaphragm 2141 is distorted (hereinafter referred to as a comparison target atomizer) are compared. 4A is a photograph of the storage unit 30 taken from the ultrasonic transducer 42 side in the atomization apparatus 100 according to this embodiment, and FIG. 4B is an atomization apparatus to be compared. 4 is a photograph of the diaphragm 2141 and the flat plate 2142 fixed to the bottom surface of the cup 214 by screws 2143 from the ultrasonic transducer side. FIG. 5 shows the relationship between the elapsed time from the start of atomization of the atomizer 100 shown in FIG. 4A and the amount of decrease in the amount of hydrogen peroxide water, and FIG. It is a figure which shows the relationship between the elapsed time after starting atomization of the atomization apparatus of the comparison object shown, and the amount of reduction of hydrogen peroxide water with a broken line.

  As shown in FIGS. 4A and 4B, the diaphragm 32 of the atomizing device 100 according to the present embodiment has a planar shape in which wrinkles and distortion are further suppressed as compared with the atomizing device to be compared. It has become. Moreover, as shown in FIG. 5, in the atomization apparatus 100 which concerns on this embodiment, it is confirmed that about 20 g of hydrogen peroxide water is atomized in about 6 minutes, and in the atomization apparatus of a comparison object, about It was confirmed that 20 g of hydrogen peroxide was atomized in about 11 minutes. Therefore, in the atomization apparatus 100 which concerns on this embodiment, it was confirmed that hydrogen peroxide solution can be atomized more efficiently.

<Summary>
As described above, the atomization apparatus 100 according to this embodiment includes at least the storage unit 30 in which the hydrogen peroxide solution is stored, and the hydrogen peroxide solution in the storage unit 30 so that the hydrogen peroxide solution is discharged together with the carrier gas. An atomizing section 40 for atomizing water by ultrasonic vibration, the atomizing section 40 includes a storage section 41 for storing the ultrasonic wave propagation liquid 43, and the storage section 30 penetrates the bottom plate 311 and stores the storage section. 41, an opening 312 communicating with 41, a groove 313 continuously formed around the opening 312 on the outer surface of the bottom plate 311, a bottom surface of the groove 313 and an inner peripheral surface near the opening 312, and protrudes from the outer surface of the bottom plate 311. The elastic seal member 33 arranged in this manner, the diaphragm 32 covering the opening 312 and the groove 313, and the diaphragm 32 is pressed against the outer surfaces of the elastic seal member 33 and the bottom plate 311 so as to seal the opening 312. It is sufficient a fixing plate 34 to be constant.

  According to this atomization apparatus 100, when assembling the storage unit 30, the diaphragm 32 can be fixed to the outer surface of the bottom plate 311 while applying a stress F to the diaphragm 32. Therefore, the diaphragm 32 can be kept in a uniform plane. it can.

  Therefore, it is possible to prevent the diaphragm 32 from being distorted while keeping the quality of each atomizing device 100 assembled constant. Thus, it can be expected that the atomization speed of the hydrogen peroxide solution is improved and the life of the diaphragm 32 is extended.

  Further, in the above-described atomizing apparatus 100, the groove 313 is an annular groove, and the elastic seal member 33 is an annular packing, and adheres to the inner peripheral surface of the groove 313 near the opening 312 against elastic force. To do. According to the atomizing device 100, the elastic seal member 33, which is an annular packing, can apply the stress F more uniformly from the center of the portion facing the opening 312 of the diaphragm 32 toward the outer edge. For this reason, the part facing the opening 312 of the diaphragm 32 can be made into a more uniform planar shape. Further, since the fixing plate 34 and the like can be attached to the outer surface of the bottom plate 311 in a state where the elastic seal member 33 is in close contact with the groove 313, the assembling of the storage unit 30 can be facilitated.

  Further, in the above-described atomizing apparatus 100, the fixed plate 34 is a single plate having a shape that exposes a portion facing the opening 312 of the vibration plate 32, and is screwed to the bottom plate 311 around the groove 313. According to this atomization apparatus 100, the ultrasonic vibration from the atomization part 40 can be more reliably transmitted to the part facing the opening 312 of the diaphragm 32. Further, the fixing plate 34 is attached to the bottom plate 311 by screwing the male screw of the screw 35 and the female screw of the screw hole 314 formed in the bottom plate 311, so that the diaphragm 32 is more attached to the outer surface of the bottom plate 311. It can be fixed reliably and easily.

  Further, in the above-described atomizing device 100, the fixed plate 34 is screwed to the bottom plate 311 via the diaphragm 32 around the groove 313. According to the atomizing device 100, the screw 35 is inserted into the through hole 321 provided in the vibration plate 32, so that the vibration plate 32 can be more reliably fixed to the outer plate 311.

  Further, in the above-described atomizing apparatus 100, the fixed plate 34 has a size that covers the diaphragm 32. According to this atomization apparatus 100, the fixing plate 34 can be attached to the bottom plate 311 so that the vibration plate 32 is sandwiched between the fixing plate 34 and the outer surface of the bottom plate 311. It can be more securely fixed to the outer surface.

  Further, in the above-described atomizing device 100, the distance L between the position where the fixing plate 34 is screwed to the bottom plate 311 and the groove 313 is an elastic seal when the diaphragm 32 is fixed to the outer surface of the bottom plate 311. The stress that deforms the member 33 in the direction of the outer peripheral surface of the groove 313 opposite to the opening 312 is set to a distance that the diaphragm 32 can absorb. According to the atomization device 100, the portion of the diaphragm 32 that faces the opening 312 can be more reliably formed into a uniform plane.

=== Other Embodiments ===
The above-described embodiment is intended to facilitate understanding of the present invention, and is not intended to limit the present invention. The present invention can be changed and improved without departing from the gist thereof, and the present invention includes equivalents thereof.

  In the atomization apparatus 100 described above, the screw 32 is screwed into the screw hole 314 via the through holes 320 and 341, whereby the diaphragm 32 is fixed to the outer surface of the outer plate 311 by the fixing plate 34. However, the present invention is not limited to this. For example, the diaphragm 32 may be fixed to the outer surface of the outer plate 311 by attaching the fixing plate 34 with an adhesive. In addition, a locking hole may be provided on the outer surface of the outer plate 311 instead of the screw hole 314, and a claw portion that is locked to the locking hole may be provided on the fixing plate 34. Thus, the claw portion of the fixing plate 34 is locked in the locking hole of the outer plate 311, and the fixing plate 34 is attached to the outer plate 311, so that the diaphragm 32 is fixed to the outer surface of the outer plate 311. Also good.

  In the above-described atomizing device 100, the diaphragm 32 has the through hole 320 formed at a position corresponding to the screw hole 314. That is, the diameter of the diaphragm 32 is longer than the distance between the screw holes 314 facing each other with the opening 312 interposed therebetween. However, it is not particularly limited to this, and the diameter of the diaphragm 32 may be longer than the diameter of the annular groove 313.

DESCRIPTION OF SYMBOLS 1 ... Work room, 2 ... Gas supply part, 3 ... Gas discharge part, 4 ... Sterilization gas supply apparatus, 5 ... Control part, 6 ... Front door, 7 ... Work glove, 8 ... Work space, 9 ... Gas supply port , 10 ... HEPA filter, 11 ... Gas exhaust port, 12 ... Intake port, 13 ... First three-way valve, 14 ... Fan, 15 ... Second three-way valve, 16 ... Sterilization substance reduction processing unit, 17 ... Exhaust port, 18 ... Sterilization substance cartridge, 19 ... pump, 20 ... sterilization gas generator, 21 ... fan, 30 ... storage part, 31 ... storage part body, 32 ... vibration plate, 33 ... elastic seal member, 34 ... fixing plate, 35 ... screw, DESCRIPTION OF SYMBOLS 40 ... Atomization part, 41 ... Accommodating part, 42 ... Ultrasonic vibrator, 43 ... Ultrasonic propagation liquid, 44 ... Partition plate, 45 ... Container, 50 ... Gasification part, 51 ... Inner cylinder part, 51A ... Stainless steel Part, 51B ... aluminum part, 52 ... heater, 53 ... outer cylinder part, 54 ... under outer cylinder part 55, lower end portion of the inner cylindrical portion, 56 ... heating element, 57 ... fan, 58 ... flow path regulating plate, 59, 62 ... piping, 60 ... upper end portion of the inner cylindrical portion, 61 ... inner lid member, 64 ... Tube opening, 65 ... upper end of outer cylinder part, 66 ... outer lid member, 100 ... atomizing device, 214 ... cup, 310 ... recess, 311 ... bottom plate, 312 ... opening, 313 ... groove, 314 ... screw hole, 320, 340, 321 ... through hole

Claims (6)

A storage unit for storing the hydrogen peroxide solution, and an atomization unit for atomizing the hydrogen peroxide solution by ultrasonic vibration so that the hydrogen peroxide solution in the storage unit is discharged together with a carrier gas. In hydrogen peroxide water atomization equipment,
The atomization unit includes a storage unit that stores a propagation liquid that propagates ultrasonic vibrations,
The reservoir is
An opening penetrating the bottom plate and communicating with the accommodating portion;
A groove formed continuously around the opening in the outer surface of the bottom plate;
An elastic seal member arranged to contact the bottom surface of the groove and the inner peripheral surface near the opening and to protrude from the outer surface of the bottom plate;
A diaphragm covering the opening and the groove;
A fixing plate that is pressed against and fixed to the outer surfaces of the elastic seal member and the bottom plate so that the diaphragm seals the opening;
An atomizing device for hydrogen peroxide water, comprising: The groove is an annular groove,
2. The atomizing device for hydrogen peroxide solution according to claim 1, wherein the elastic seal member is an annular packing and is in close contact with an inner peripheral surface of the groove near the opening by an elastic force. 3. The fixed plate according to claim 1, wherein the fixed plate is a single plate having a shape exposing a portion facing the opening of the diaphragm, and is screwed to the bottom plate around the groove. The hydrogen peroxide water atomization apparatus as described. The hydrogen peroxide solution atomization apparatus according to claim 3, wherein the fixing plate is screwed to the bottom plate around the groove via the vibration plate. The hydrogen peroxide solution atomizing apparatus according to claim 3 or 4, wherein the fixed plate has a size covering the diaphragm. The distance between the position where the fixing plate is screwed to the bottom plate and the groove is such that the elastic seal member is opposite to the opening in the groove when the diaphragm is fixed to the outer surface of the bottom plate. The atomizing device for hydrogen peroxide solution according to claim 4 or 5, wherein the stress deformed in the direction of the outer peripheral surface on the side is set to a distance that can be absorbed by the diaphragm.