JP2012060754A - Magnetic levitation type rotation introduction apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic levitation type rotation introduction apparatus which adopts a magnetic levitation type needless to use a magnetic fluid seal, and which makes it possible to make a length in an axial direction as a device short as much as possible.SOLUTION: There is provided a rotor 12 which outputs a rotation power, and the rotor 12 is rotation-supported at a prescribed position in a state of non-contact by two or more pairs of radial magnetic bearings 40 which are arranged in a radial direction of the rotor 12, and control a radial direction variation of the rotor 12 in a state of non-contact, and axial magnetic bearings 50 which are separated into 3 or more pairs and arranged in a circumference of the rotor 12, and control a axial direction variation of the rotor 12 in a state of non-contact. Radial electromagnets 44 of the radial magnetic bearing 40, and axial electromagnets 54 of the axial magnetic bearing 50 are arranged on approximately the same plane, and are fixed to a casing part 14.

Description

  In the present invention, for example, when a thin film is formed on the surface of a substrate such as a semiconductor wafer or an etching process is performed on the thin film formed on the surface of the substrate, the substrate is held and accommodated in a process chamber. The present invention relates to a magnetic levitation type rotation introducing machine used for rotating a substrate mounting table or the like.

  In general industry and semiconductor industry, a vapor deposition apparatus that deposits a metal material on the surface of a base material such as a substrate can deposit a metal material on a large number of base materials arranged inside a process chamber where the vapor deposition process is performed. In order to perform uniformly, a plurality of base materials are widely rotated in a process chamber. Also, in the semiconductor industry, in the etching process that etches the surface of the base material (wafer) after the vapor deposition process, the base material is rotated so that the etching reaction to the base material surface can be performed uniformly in the process chamber filled with the etching gas. It is also widely done.

  As a means for rotating a substrate such as a wafer housed in the process chamber, a motor is disposed inside the process chamber, and a large number of substrates are mounted in the process chamber by the motor disposed in the process chamber. It is known to rotate the accommodated substrate mounting table.

  However, when a motor is installed inside the process chamber, the motor itself is exposed to a process gas such as a vapor deposition gas or an etching gas filled in the process chamber. For this reason, the motor is greatly affected by the internal atmosphere of the process chamber. In particular, the motor is provided with a contact bearing such as a ball bearing that rotatably supports the drive shaft. When a process gas enters the inside of the bearing, a product is generated inside the bearing to cause the bearing to move. It may cause failure. For this reason, a structure in which a shaft sealing mechanism such as a magnetic fluid seal is installed outside the bearing so that process gas does not enter the motor through the inside of the bearing and further inside the bearing is widely adopted. ing.

  FIG. 1 includes an external motor 102 installed outside the process chamber 100, and the rotational force of the external motor 102 is transmitted to the inside of the process chamber 100 via the coupling force of the magnet coupling 104. An example of the substrate processing apparatus provided with the rotation introducer is shown. The rotation introducing machine is mounted on the lifting arm 108 of the lifting shaft 106, and includes a casing portion 112 having a flange portion 110 for holding the process chamber 100 on the upper surface, and a turntable table portion 116 for holding the heat retaining cylinder 114 on the upper surface. The rotor 118 is provided. A substrate mounting table 120 on which a large number of substrates W are mounted is placed on the heat retaining cylinder 114, and the heat retaining cylinder 114 and the substrate mounting table 120 are disposed in the process chamber 100.

  The rotor 118 has a shaft portion 122 that extends downward by connecting the turntable table portion 116 to the upper end, and a hollow portion that opens downward is provided below the shaft portion 122. The upper end of the drive shaft 124 of the external motor 102 reaches the inside of the hollow portion of the shaft portion 122, and the drive side inner magnet 126 of the magnet coupling 104 is connected to the outer peripheral surface of the drive shaft 124. The driven outer magnet 128 of the magnet coupling 104 is attached to a position facing the driving inner magnet 126 on the inner peripheral surface of the hollow portion. Accordingly, the rotor 118 is rotated by the rotation of the drive shaft 124 accompanying the driving of the external motor 102.

  The casing portion 112 has a cylindrical portion 130 that extends downward by connecting the flange portion 110 to the upper end. Between the cylindrical portion 130 and the shaft portion 122 of the rotor 118, the shaft portion 122 is rotatable. A pair of bearings 132 and 134 to be supported are arranged vertically. The bearings 132 and 134 are contact type bearings such as ball bearings. Further, the process gas is located above the bearing 132 located above and between the cylindrical portion 130 of the casing portion 112 and the shaft portion 122 of the rotor 118, and the process gas enters the bearings 132 and 134. A shaft sealing mechanism 136 made of, for example, a magnetic fluid seal is arranged to prevent.

  According to this substrate processing apparatus, as the external motor 102 is driven, the rotor 118 is rotated to rotate the substrate mounting table 120 on which a large number of substrates W are mounted. At the same time, by introducing the process gas into the process chamber 100, a more uniform process is performed on the substrate W.

  In recent years, in the vapor deposition technique and the etching technique, a higher purity of the atmosphere inside the process chamber in which the process is performed is required, and it is possible to prevent foreign matter from being generated as much as possible inside the process chamber into which the process gas is introduced. Is desired.

  However, as shown in FIG. 1, in order to prevent the process gas introduced into the process chamber from entering the bearing, if a shaft sealing mechanism such as a magnetic fluid seal is provided at a position exposed to the process gas, Decomposition and gasification of the oil content of the magnetic fluid used in the sealant and generation of contamination due to substances mixed in the magnetic fluid cannot be avoided, and there are problems with the life of the magnetic fluid. It was. The same applies to the case where the motor is arranged inside the pressure device.

  For this reason, a rotor arranged in the process chamber is supported in a non-contact manner by a radial magnetic bearing or an axial magnetic bearing without using a contact bearing such as a ball bearing that requires a shaft sealing mechanism such as a magnetic fluid seal. Thus, there has been proposed a process chamber in which foreign matter is not generated by a bearing or a shaft seal mechanism (see Patent Documents 1 to 4).

International Publication No. 2005/039019 Pamphlet International Publication No. 2006/098500 Pamphlet JP-A-8-139171 JP 10-46336 A

  As described above, when a rotor is supported rotatably using a contact bearing such as a ball bearing, a shaft sealing mechanism such as a magnetic fluid seal is required, and the oil decomposed gas of the magnetic fluid used in the sealant And contamination caused by substances mixed in the magnetic fluid cannot be avoided.

  Further, for example, as in the invention described in Patent Document 4, a rotating shaft (rotor) arranged in the vertical direction is arranged between an upper and lower radial magnetic bearing and an upper and lower radial magnetic bearing arranged at a predetermined interval in the vertical direction. If the levitation support is performed by the axial magnetic bearing, the upper and lower radial magnetic bearings and the axial shaft are arranged in parallel along the axial direction of the rotating shaft, which becomes considerably longer in the axial direction. It becomes difficult to incorporate.

  The present invention has been made in view of the above circumstances, adopting a magnetic levitation type that does not require the use of a magnetic fluid seal, and capable of shortening the axial length of the apparatus as much as possible. It aims at providing a floating type rotation introduction machine.

  The invention described in claim 1 includes a rotor that outputs rotational power, and the rotors are arranged in the radial direction of the rotor, and two or more sets for controlling the radial displacement of the rotor in a non-contact manner. The radial magnetic bearing and the axial magnetic bearing which is divided into three or more sets around the rotor and controls the axial displacement of the rotor in a non-contact manner, and is rotatably supported in a non-contact manner at a predetermined position. A magnetic levitation type rotary introduction machine is characterized in that a radial electromagnet of a radial magnetic bearing and an axial electromagnet of the axial magnetic bearing are arranged on substantially the same plane and fixed to a casing portion.

  In this way, by using a magnetic bearing, non-contact support of the rotor that does not require the use of a magnetic fluid seal is realized, and the radial electromagnet of the radial magnetic bearing and the axial electromagnet of the axial magnetic bearing are on substantially the same plane. By disposing and fixing to the casing part, the length in the axial direction can be shortened as much as possible and can be easily incorporated into a substrate processing apparatus or the like.

  According to a second aspect of the present invention, there is provided a motor rotor core integrally formed with the rotor, a motor stator magnetic pole core disposed to face the motor rotor core and rotating the motor rotor core. The motor rotor part which has this, The said radial electromagnet, the said axial electromagnet, and the said motor stator magnetic pole iron core are arrange | positioned on the substantially the same plane, and are being fixed to the said casing part. This is a magnetic levitation type rotation introduction machine.

  Thus, even when the motor rotor portion for rotating the rotor is integrated, the motor stator magnetic pole core of the motor rotor portion is arranged on substantially the same plane as the radial electromagnet and the axial electromagnet. As a result, the length in the axial direction can be made as short as possible and can be easily incorporated into a substrate processing apparatus or the like.

According to a third aspect of the present invention, the casing portion functions as a lid of a process chamber, and the radial magnetic bearing, the axial magnetic bearing, and the motor rotor portion are hermetically sealed by the process chamber and the casing portion. The magnetic levitation type rotary introduction machine according to claim 2, wherein the magnetic levitation type rotation introduction machine is arranged inside a space.
In this way, by allowing the casing portion to function as a lid of the process chamber, the process gas introduced into the process chamber can be sealed in the process chamber.

According to a fourth aspect of the present invention, the motor stator magnetic pole core of the radial electromagnet, the axial electromagnet and the motor rotor portion is covered with a metal partition so that the surface thereof is not exposed to the outside, or each magnetic pole 4. The magnetically levitated rotary introduction machine according to claim 3, wherein the whole is covered with a protective film.
Thereby, when the surface of a radial electromagnet is exposed to corrosive gas, it can prevent that a radial electromagnet is corroded by corrosive gas. The same applies to the axial electromagnet and the motor stator magnetic pole core.

The invention according to claim 5 is characterized in that the casing part has a purge gas introduction part for introducing purge gas into a space accommodating the radial electromagnet, the axial electromagnet, and the motor stator magnetic pole core. It is a magnetic levitation type rotation introduction machine of statement.
In this way, the radial electromagnet, the axial electromagnet, and the motor stator magnetic pole core are prevented from being corroded by the corrosive gas even by introducing the purge gas into the space for housing the radial electromagnet, the axial electromagnet, and the motor stator magnetic pole core. can do.

According to a sixth aspect of the present invention, the casing portion functions as a lid of a process chamber, and the radial magnetic bearing, the axial magnetic bearing, and the motor rotor core of the motor rotor portion are connected to the process chamber. 3. The magnetically levitated rotary introduction machine according to claim 2, wherein the motor stator magnetic pole core of the motor rotor part is disposed outside the space inside the space sealed by the casing part. 4. It is.
Thus, by arranging the motor stator magnetic pole core outside the space defined by the process chamber and the casing portion, the motor stator magnetic pole core can be prevented from being exposed to corrosive gas.

The invention according to claim 7 has an external motor, the drive shaft of the external motor and the rotor are coupled to each other via a magnet coupling, and the drive side inner coupling of the magnet coupling is the The outer outer coupling is disposed on the outer motor side with the casing portion interposed therebetween, and the radial electromagnet, the axial electromagnet, the driving inner coupling, and the driven outer coupling are disposed on the rotor side with the casing portion interposed therebetween. The magnetically levitated rotary introduction machine according to claim 1, wherein the driven side outer coupling is disposed on substantially the same plane.
In this way, even when the rotor is rotated using an external motor and a magnet coupling, the axial direction can be obtained by arranging the magnet coupling on the same plane as the radial electromagnet and the axial electromagnet. Can be easily incorporated into a substrate processing apparatus or the like.

  According to the present invention, a rotating mechanism using a magnetic bearing device that supports a rotor disposed in a process chamber in a non-contact manner without using a contact bearing such as a ball bearing that requires a magnetic fluid seal or the like. By using it, it is possible to theoretically eliminate the generation of foreign matter inside the process chamber. In addition, the length in the axial direction can be shortened as much as possible, which facilitates the incorporation into the substrate processing apparatus or the like.

It is a vertical front view which shows the outline | summary of the substrate processing apparatus provided with the conventional rotation introducing machine. It is a vertical front view which shows the outline | summary of the magnetic levitation type | mold rotation introduction machine of embodiment of this invention. It is a top view which shows the arrangement | positioning state of the motor, the radial electromagnet of a radial magnetic bearing, the radial displacement sensor, and the axial electromagnet of an axial magnetic bearing in the magnetic levitation type rotation introducing machine shown in FIG. It is a longitudinal front view which shows the outline | summary of the substrate processing apparatus incorporating the magnetic levitation type rotation introduction machine shown in FIG.2 and FIG.4. It is a vertical front view which shows the outline | summary of the magnetic levitation type | mold rotation introduction machine of other embodiment of this invention. It is a vertical front view which shows the outline | summary of the magnetic levitation type | mold rotation introduction machine of further another embodiment of this invention. It is a vertical front view which shows the outline | summary of the magnetic levitation type | mold rotation introduction machine of further another embodiment of this invention.

  Embodiments of the present invention will be described below with reference to FIGS. 2 to 7, the same or corresponding members are denoted by the same reference numerals, and redundant description is omitted.

  FIG. 2 is a longitudinal front view showing an outline of the magnetic levitation type rotary introduction machine according to the embodiment of the present invention, and FIG. 3 shows a motor, a radial electromagnet of a radial magnetic bearing, It is a top view which shows the arrangement state of the axial electromagnet of a radial displacement sensor and an axial magnetic bearing. As shown in FIGS. 2 and 3, the magnetic levitation type rotation introducing machine 10 includes a rotor 12 that outputs rotational power and a casing portion 14 that opens upward and surrounds the outer periphery and the lower part of the rotor 12. is doing. For example, as shown in FIG. 4, the casing portion 14 functions as a lid that closes the lower end opening of the process chamber 68 when the magnetic levitation type rotation introducing machine 10 is incorporated into the substrate processing apparatus.

  The rotor 12 includes a plate-shaped turntable table portion 16, and an inner shaft portion 18 and an outer shaft portion 20 that extend downward concentrically by connecting the turntable table portion 16 to the upper end. For example, as shown in FIG. 4, a heat retaining cylinder 64 is placed on the upper surface of the turntable table section 16, and a substrate mounting table 66 on which a large number of substrates W are mounted is placed on the heat retaining cylinder 64. . As a result, the heat retaining cylinder 64 and the substrate mounting table 66 rotate together with the rotation of the turntable table unit 16.

  The casing portion 14 has a flat bottom plate (blocking plate) 22, a cylindrical portion 24 integrally connected around the bottom plate 22, and a flange portion 26 extending outward from the upper end of the cylindrical portion 24. is doing. Near the center of the bottom plate 22, a purge gas introduction port 22a for introducing purge gas therein is provided. The purge gas introduction port 22a is used when the process gas inside the process chamber enters the gap between the rotating body portion and the fixed side portion and corrosion or the like may occur on the surface of the structure. This port is used to introduce a purge gas to prevent the process gas from entering the gap with the part. The purge gas introduction port 22a is not provided in the examples shown in FIGS. 5 to 7 below, but may be provided in the examples shown in FIGS.

  For example, as shown in FIG. 4, when the process chamber 68 is set on the upper surface of the flange portion 26, the flange portion 26 is pressed against the lower end flange portion 68 a of the flange portion 26, and the flange portion of the casing portion 14. 26 and a seal ring 28 that seals between the lower end flange portion 68a of the process chamber 68 is mounted. With this configuration, the process chamber 68 can be a sealed space.

  In this example, a motor rotor portion 30 that rotates the rotor 12 is integrated. That is, a motor rotor core 32 is provided on the outer peripheral surface of the inner shaft portion 18 of the rotor 12, and in this example, a total of three motor stator magnetic pole cores 34 are disposed at positions facing the motor rotor core 32. Is fixed to the bottom plate 22 of the casing portion 14. The motor rotor portion 30 is configured by the motor rotor core 32 and the motor stator magnetic pole core 34. In this example, the motor rotor core 32 is configured by winding a coil 32b around an iron core 32a, and the motor stator magnetic pole core 34 is configured by winding a coil 34b around an iron core 34a. As a result, current flows through the coil 32 b of the motor rotor core 32 and the coil 34 b of the motor stator magnetic pole core 34, whereby the motor rotor core 32 rotates integrally with the rotor 12.

  Between the outer shaft portion 20 of the rotor 12 and the bottom plate 22 of the casing portion 14, the radial displacement of the rotor 12 is controlled in a non-contact manner. In this example, a total of four sets of radial magnetic bearings 40 are arranged. Yes. That is, a radial electromagnet target 42 is attached to the inner peripheral surface of the outer shaft portion 20 of the rotor 12, and a total of four radial electromagnets 44 are attached to the bottom plate 22 of the casing portion 14 at positions facing the radial electromagnet target 42. It is fixed and arranged. This radial electromagnet target 42 and one radial electromagnet 44 constitute a set of radial magnetic bearings 40. The radial electromagnet 44 is configured by winding a coil 44b around an iron core 44a. By providing two or more sets of radial magnetic bearings 40, the rotor 12 can be controlled in two axes.

  A radial displacement sensor 46 that is positioned between the radial electromagnets 44 and detects a radial displacement of the outer shaft portion 20 of the rotor 12 faces the radial electromagnet target 42 attached to the inner peripheral surface of the outer shaft portion 20. And it is fixed to the bottom plate 22 of the casing portion 14 and arranged. The radial displacement sensor 46 is configured by winding a coil 46b around an iron core 46a. Although the radial magnetic sensor 40 can be easily controlled by providing the radial displacement sensor 46, the radial displacement sensor 46 is not always necessary.

  Axial magnetic bearings 50 that are positioned between the outer shaft portion 20 of the rotor 12 and the cylindrical portion 24 of the casing portion 14 and control the axial displacement of the rotor 12 in a non-contact manner in this example include a total of four sets. It is divided and arranged. In other words, the inner peripheral surface of the ring-shaped axial disk 52 is fixed to the outer peripheral surface of the outer shaft portion 20 of the rotor 12, and a pair of upper and lower axial electromagnets 54 are disposed at the upper and lower positions sandwiching the axial disk 52. The bottom plate 22 of the casing part 14 or the inner peripheral surface of the cylindrical part 24 is fixed and arranged. The axial disk 52 and a pair of upper and lower axial electromagnets 54 constitute a pair of axial magnetic bearings 50. In this example, the pair of upper and lower axial electromagnets 54 is divided into four. The axial electromagnet 54 is configured by mounting a coil 54b in a recess provided in the iron core 54a. By dividing the axial magnetic bearing 50 into three or more sets, the rotor 12 can be controlled in three axes.

  By arranging three or more sets of the axial electromagnets 54, the flatness of the axial disk 52 itself, that is, the outer shaft portion 20 of the rotor 12 can be controlled to be kept horizontal. Normally, radial electromagnets are composed of two sets of four electromagnets arranged around the (rotor). Therefore, when the axial electromagnet is an odd number set based on 3, the arrangement of radial electromagnets and the arrangement of axial electromagnets In some cases, the directions are not arranged at the same position, which makes the entire control difficult. In such a case, if the axial electromagnets are arranged in an even number group having 4 as a key, they are arranged at the same positions as the radial electromagnets, so that control in cooperation with the radial electromagnets can be easily performed. Whether to select three sets of axial electromagnets or four sets of axial electromagnets may be selected in consideration of the weight of the structure, the characteristics of the control circuit, and the overall cost.

  In this example, by using the radial magnetic bearing 40 and the axial magnetic bearing 50, non-contact support of the rotor 12 is realized without using a magnetic fluid seal. In addition, the motor stator magnetic pole core 34 of the motor rotor 30, the radial electromagnet 44 of the radial magnetic bearing 40, the axial electromagnet 54 of the axial magnetic bearing 50, and the radial displacement sensor 46 are connected to the bottom plate 20 to the cylindrical portion of the casing portion 14. By fixing the magnetic levitation type rotary introduction machine 10 to the substrate processing apparatus or the like, the axial length of the magnetic levitation type rotation introduction machine 10 is shortened as much as possible. It can be done easily.

  For example, as shown in FIG. 4, the magnetic levitation type rotation introducing machine 10 is used by being incorporated in a substrate processing apparatus, and the casing portion 14 functions as a lid for closing the opening of the process chamber 68. For this reason, when the process gas is introduced into the process chamber 68, the process gas surrounded by the process chamber 68 and the casing portion 14 is filled with the process gas, and the motor rotor portion 30 positioned in the process region, The radial magnetic bearing 40, the radial displacement sensor 46, and the axial magnetic bearing 50 are exposed to a process gas atmosphere. When the process gas is a corrosive gas, for example, when the iron core 34a of the motor stator magnetic pole core 34 is made of iron, the iron core 34a may be corroded by the corrosive gas. The same applies to the iron core 32a of the motor rotor iron core 32, the iron core 44a of the radial electromagnet 44, the iron core 46a of the radial displacement sensor 46, and the iron core 54a of the axial electromagnet 54.

  For this reason, in this example, as the iron core 34a of the motor stator magnetic pole core 34, for example, an iron surface coated with a protective film made of a resin having excellent corrosion resistance such as polyimide is used. Corrosion resistance of the iron core 34a of the magnetic pole iron core 34 is enhanced. The same applies to the iron core 32a of the motor rotor iron core 32, the iron core 44a of the radial electromagnet 44, the iron core 46a of the radial displacement sensor 46, and the iron core 54a of the axial electromagnet 54.

  As a motor stator coil or an electromagnet coil, a so-called enameled wire in which a conductive wire is covered with enamel is generally used. Enamel wire may corrode when exposed to corrosive gases. For this reason, in this example, as the coil 34b of the motor stator magnetic pole core 34, a wire around the conductor is coated with a protective film made of a resin having excellent corrosion resistance such as polyimide, and the motor stator magnetic pole The corrosion resistance of the coil 34b of the iron core 34 is enhanced. The same applies to the coil 32b of the motor rotor core 32, the coil 44b of the radial electromagnet 44, the coil 46b of the radial displacement sensor 46, and the coil 54b of the axial electromagnet 54.

  Furthermore, in this example, a purge gas introduction port 22a is provided in the approximate center of the bottom plate 22 of the casing portion 14, and the purge gas is introduced into the process region surrounded by the process chamber 68 and the casing portion 14 from the purge gas introduction port 22a. The corrosive gas is prevented from staying on the surface of the iron core 34 a of the motor stator magnetic pole core 34, the iron core 44 a of the radial electromagnet 44, and the like, whereby the iron core 34 a of the motor stator magnetic pole core 34 and the iron core of the radial electromagnet 44 are Corrosion resistance such as 44a is further increased.

  In the above example, the resin having excellent corrosion resistance such as polyimide is coated to improve the corrosion resistance of the motor stator magnetic pole core 34, the radial electromagnet 44, and the like. As shown by the phantom line, the radial electromagnet 44 is covered with the metal partition wall 56 so that the radial electromagnet 44 is not exposed to the outside. You may make it raise property. The same applies to the motor rotor iron core 32, the motor stator magnetic pole iron core 34, the radial displacement sensor 46, and the axial electromagnet 54.

  FIG. 4 is a longitudinal sectional view showing an outline of the substrate processing apparatus incorporating the magnetic levitation type rotation introducing machine 10 shown in FIGS. 2 and 3. As shown in FIG. 4, the substrate processing apparatus is provided with an elevating arm 62 that elevates along an elevating shaft 60, and a magnetic levitation type rotation introducing device 10 is installed on the upper surface of the elevating arm 62. A heat insulating cylinder 64 is placed on the upper surface of the rotary table 16 of the magnetic levitation type rotation introducing machine 10, and a substrate mounting table 66 on which a large number of substrates W are mounted is placed on the upper surface of the heat insulating cylinder 64. .

  A cylindrical process chamber 68 is disposed above the lift arm 62 and opens downward. The lower end opening of the process chamber 68 is closed by the casing portion 14 of the magnetic levitation type rotary introduction machine 10 by raising the elevating arm 62 together with the magnetic levitation type rotation introduction machine 10. At this time, the seal ring 28 attached to the outer peripheral portion of the casing portion 14 of the magnetic levitation type rotary introduction machine 10 is in pressure contact with the lower end flange portion 68a of the process chamber 68, and the casing 14 of the magnetic levitation type rotation introduction machine 10 and the process. The space between the lower end flange portion 68a of the chamber 68 is sealed. As a result, a process region is formed that is hermetically surrounded by the process chamber 68 and the casing portion 14 of the magnetic levitation type rotary introduction machine 10.

  According to this substrate processing apparatus, the substrate mounting base 66 on which a large number of substrates W are mounted is placed on the heat retaining cylinder 64 placed on the upper surface of the turntable table unit 16 with the lifting arm 62 lowered. Put it on. Then, the elevating arm 62 is raised, and the lower end opening of the process chamber 68 is closed with the casing portion 14 of the magnetic levitation type rotary introduction machine 10.

  In this state, the motor rotor unit 30 is driven, and the rotor 12 is rotated by the radial magnetic bearing 40 and the axial magnetic bearing 50 while controlling the five axes in a non-contact manner. The substrate mounting table 66 on which a large number of substrates W are mounted is rotated at a predetermined speed. At the same time, a process gas is introduced into the process chamber 68, thereby performing a predetermined process on the substrate W while rotating the substrate W.

  FIG. 5 is a longitudinal front view showing an outline of a magnetic levitation type rotation introducing machine 10a according to another embodiment of the present invention. 2 and FIG. 3 of this example is different from the magnetic levitation type rotation introducing machine 10 shown in FIG. 2 in that a concave portion 22b that rises upward in a cylindrical shape is provided at the center of the bottom plate 22 of the casing portion 14, The control unit 70 that controls the rotor unit 30, the radial magnetic bearing 40, the axial magnetic bearing 50, and the like is housed.

  According to this example, the controller 70 can be integrated with the magnetic levitation type rotation introducing machine 10a, and the magnetic levitation type rotation introducing machine 10a can be made more compact.

  FIG. 6 is a longitudinal front view showing an outline of a magnetic levitation type rotation introducing machine 10b according to still another embodiment of the present invention. The differences from the magnetic levitation type rotary introduction machine 10 shown in FIGS. 2 and 3 in this example are as follows. That is, in the center of the bottom plate 22 of the casing portion 14, a recess 22b having a partition wall portion 22c rising upward in a cylindrical shape is provided. The motor rotor core 32 and the motor stator magnetic pole core 34 of the motor rotor section 30 are arranged at positions facing each other across the partition wall 22c, and the motor rotor core 32 is positioned outside the partition wall 22c. Then, the motor stator magnetic pole core 34 is fixed to the inner wall 18 of the rotor 12, and the motor stator magnetic pole core 34 is fixed to the inner wall 22c.

  According to this example, the motor stator magnetic pole core 34 of the motor rotor part 30 is placed outside the process region formed between the process chamber 68 and the casing part 14 of the magnetic levitation type rotary introduction machine 10b. As a result, it is possible to eliminate the need for considering corrosion caused by the inert gas of the motor stator magnetic pole core 34.

  FIG. 7 is a longitudinal front view showing an outline of a magnetic levitation type rotation introducing machine 10c according to still another embodiment of the present invention. In this example, the external motor 80 is provided without integrating the motor integrally, and the rotational force of the external motor 80 is transmitted to the rotor 12 via the coupling force of the magnet coupling 82. The differences from the magnetic levitation type rotation introducing machine 10 shown in FIG. 3 are as follows.

  That is, in the center of the bottom plate 22 of the casing portion 14, a recess 22b having a partition wall portion 22c rising upward in a cylindrical shape is provided. The upper end of the drive shaft 84 of the external motor 80 reaches the inside of the recess 22 b of the bottom plate 22, and a drive wheel 88 in which the drive side inner magnet 86 of the magnet coupling 82 is attached to the outer peripheral surface of the drive shaft 84. It is fixed. On the other hand, the driven-side outer magnet 90 of the magnet coupling 82 is fixed to the inner peripheral surface of the inner shaft portion 18 of the rotor 12 at a position facing the driving-side inner magnet 86 across the partition wall portion 22c of the bottom plate 22. The driven ring 92 is fixed to the inner peripheral surface. Accordingly, the rotor 12 is rotated by the rotation of the drive shaft 84 accompanying the driving of the external motor 80.

  According to this example, by placing the external motor 80 outside the process region formed between the process chamber 68 and the casing portion 14 of the magnetically levitated rotary introducer 10c, the inert gas of the external motor 80 is placed. It is possible to eliminate the need to consider corrosion due to.

  Although one embodiment of the present invention has been described so far, it is needless to say that the present invention is not limited to the above-described embodiment, and may be implemented in various forms within the scope of the technical idea.

10, 10a, 10b, 10c Magnetic levitation type rotary introduction machine 12 Rotor 14 Casing part 16 Turntable table part 18 Inner shaft part 20 Outer shaft part 22 Bottom plate 22a Purge gas introduction port 22c Bulkhead part 26 Flange part 28 Seal ring 30 Motor rotation Sub-unit 32 Motor rotor core 34 Motor stator magnetic pole core 40 Radial magnetic bearing 42 Radial electromagnet target 44 Radial electromagnet 46 Radial displacement sensor 50 Axial magnetic bearing 52 Axial disk 54 Axial electromagnet 56 Metal partition wall 62 Lifting arm 64 Heat insulation cylinder 66 Substrate mounting Base 68 Process chamber 80 External motor 82 Magnet coupling 84 Drive shaft 86 Drive side inner magmet 90 Driven side outer magnet

Claims (7)

It has a rotor that outputs rotational power,
The rotor is arranged in two or more sets of radial magnetic bearings arranged in the radial direction of the rotor to control the radial displacement of the rotor in a non-contact manner, and divided into three or more sets around the rotor. The axial magnetic bearing that controls the axial displacement of the rotor in a non-contact manner is rotatably supported in a predetermined position without contact.
A magnetic levitation type rotary introduction machine characterized in that a radial electromagnet of the radial magnetic bearing and an axial electromagnet of the axial magnetic bearing are arranged on substantially the same plane and fixed to a casing portion.   A motor rotor portion having a motor rotor core integrally formed with the rotor, and a motor stator magnetic pole core that is disposed opposite to the motor rotor core and rotates the motor rotor core; 2. The magnetically levitated rotary introducer according to claim 1, wherein the radial electromagnet, the axial electromagnet, and the motor stator magnetic pole core are arranged on substantially the same plane and fixed to the casing portion.   The casing portion functions as a lid of a process chamber, and the radial magnetic bearing, the axial magnetic bearing, and the motor rotor portion are disposed in a space sealed by the process chamber and the casing portion. The magnetic levitation type rotary introduction machine according to claim 2.   The radial electromagnet, the axial electromagnet, and the motor stator magnetic pole core of the motor rotor portion are covered with a metal partition so that the surface is not exposed to the outside, or the entire magnetic pole is covered with a protective film. The magnetic levitation type rotary introduction machine according to claim 3.   4. The magnetically levitated rotary introduction machine according to claim 3, wherein the casing part has a purge gas introduction part that introduces a purge gas into a space that houses the radial electromagnet, the axial electromagnet, and the motor stator magnetic pole core.   The casing portion functions as a lid of a process chamber, and the radial magnetic bearing, the axial magnetic bearing, and the motor rotor core of the motor rotor portion are in a space sealed by the process chamber and the casing portion. 3. The magnetic levitation type rotation introducing machine according to claim 2, wherein the motor stator magnetic pole cores of the motor rotor portion are respectively disposed outside the space. 4.   An external motor is provided, and the drive shaft of the external motor and the rotor are coupled to each other via a magnet coupling, and the drive side inner coupling of the magnet coupling is on the external motor side across the casing portion Further, the driven side outer coupling is disposed on the rotor side with the casing portion interposed therebetween, and the radial electromagnet, the axial electromagnet, the driving side inner coupling, and the driven side outer coupling are substantially the same. 2. The magnetic levitation type rotary introduction machine according to claim 1, wherein the magnetic levitation type rotation introduction machine is arranged on a plane.

Images