JP2012044189A - Light source device, image display unit and monitoring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light source device in which coherence of multiple laser light beams is reduced and speckle noise is minimized, and to provide an image display unit and a monitoring device.SOLUTION: The light source device comprises multiple light-emitting elements 11a-11f which emit light, a wavelength selection element 12 having multiple light selection areas A-F where light beams emitted from the multiple light-emitting elements 11a-11f are selected and reflect light beams emitted from the multiple light-emitting elements 11a-11f selectively, state detection means 21 for detecting the state of the multiple light selection areas A-F of the wavelength selection element 12, and state change means 22 for changing the state of the multiple light selection areas A-F of the wavelength selection element 12 according to the state of the multiple light selection areas A-F detected by the state detection means 21 so that the wavelengths of light beams selected by the multiple light selection areas A-F are different from each other.

Description

  The present invention relates to a light source device, an image display device, and a monitor device.

  In recent projection type image display apparatuses, a discharge lamp such as an ultrahigh pressure mercury lamp is generally used as a light source. However, such discharge lamps have problems such as a relatively short life, difficult to light instantaneously, a narrow color reproducibility range, and ultraviolet rays emitted from the lamp may deteriorate the liquid crystal light bulb. . Therefore, a projection type image display apparatus using a laser light source that emits monochromatic light instead of such a discharge lamp has been proposed. However, the laser light source does not have the above-mentioned problem, but has a defect that it has coherence. As a result, interference fringes appear as speckle noise on the projection surface on which the laser light is projected, and the image deteriorates. Therefore, in order to display a high-definition image, it is necessary to take measures against speckle noise.

  As a means for removing speckle noise, a plurality of light emitting elements are provided, and a light emitting element having a slightly different central wavelength in the design is arrayed, so that a wider spectral band than in the case of using one light emitting element. As a result, speckle noise can be reduced.

JP-T-2004-503923

The means for removing speckle noise described in Patent Document 1 is premised on the use of a light source that does not require an external resonator structure, that is, a light source that directly outputs laser light.
Certainly, in the case of a light source that does not require an external resonator structure, there is an effect of suppressing speckle noise.
Here, in the case of a light source including an external resonator, basic components are a light emitting element and a wavelength selection element (resonator mirror). Even when a plurality of light emitting elements are used, a wavelength selecting element that selects a single wavelength is generally used in consideration of cost and ease of assembly. In this wavelength selection element, it is necessary to narrow the wavelength band to be selected in order to cause laser oscillation. As a result, as described in Patent Document 1, even if the wavelengths of the light emitted from the array light source are varied, a single wavelength is selected by the wavelength selection element. The coherence of the entire light source including the element does not decrease.
The present invention has been made to solve the above problems, and provides a light source device, an image display device, and a monitor device that reduce coherence between a plurality of laser beams and suppress speckle noise. Objective.

In order to achieve the above object, the present invention provides the following means.
The light source device of the present invention includes a plurality of light emitting elements that emit light, and a plurality of light selection regions in which selection is performed for light emitted from the plurality of light emitting elements, and the light emitted from the plurality of light emitting elements. A wavelength selection element for selectively reflecting the selected light, a state detection unit for detecting a state of the plurality of light selection regions of the wavelength selection element, and a state of the plurality of light selection regions detected by the state detection unit And a state changing unit that changes a state of the light selection region of the wavelength selection element so that wavelengths of light selected by the plurality of light selection regions are different from each other.

In the light source device according to the present invention, the light emitted from the plurality of light emitting elements is amplified by the wavelength selection element by reflecting a part of the light having a predetermined selection wavelength and resonating between the light emitting element and the wavelength selection element. The remaining light is transmitted without being amplified. In addition, the state detection unit detects the states of the plurality of light selection regions of the wavelength selection element, and the state change unit determines whether the wavelengths of the light selected by the plurality of light selection regions are mutually different according to the detected state. The state of the light selection region of the wavelength selection element is changed differently. Thereby, the wavelength of the light selected for every light selection area | region differs. Therefore, even if the peak wavelengths of light emitted from a plurality of light emitting elements are the same, the light emitted from the light emitting elements has a certain amount of bandwidth, and therefore has different wavelengths within the bandwidth. Light is amplified and extracted. That is, when each light emitted from the light emitting element resonates in each light selection region of the wavelength selection element, the light is amplified in the resonator mirror structure between the light source and the wavelength selection element and emitted from each region. Will have different wavelengths. Therefore, according to the present invention, since the wavelength selection element does not emit light having a single wavelength as in the prior art, the wavelength band of the light transmitted through the wavelength selection element is expanded as a whole. As a result, the coherence between the amplified lights emitted from the respective regions of the wavelength selection element is reduced, so that speckle noise can be suppressed.
In addition, since the state of the light selection region of the wavelength selection element is changed by the state change unit according to the state detected by the state detection unit, the wavelengths of light emitted from the plurality of light selection regions are surely different. Can be made.

  In the light source device of the present invention, it is preferable that the state detection unit and the state change unit are provided for each light selection region of the wavelength selection element.

In the light source device according to the present invention, the wavelength selection element is provided with a state detection unit and a state change unit for each of the plurality of light selection regions. At this time, the state detection means detects the state of each light selection region of the wavelength selection element, and according to this detected state, the wavelengths of light selected by the individual light selection regions are different from each other, Each state of the plurality of light selection regions of the wavelength selection element is changed. That is, since the state can be changed for each light selection region, the degree of freedom in changing the output wavelength distribution emitted from the wavelength selection element is increased. Therefore, the wavelength of light emitted from the light emitting element can be matched with the wavelength of light selected by each light selection region of the corresponding wavelength selection element. As a result, even when the output wavelength varies due to a manufacturing error or the like of the light emitting element, it is possible to improve the utilization efficiency of light emitted from the wavelength selection element while reducing speckle noise.
A plurality of state change means may be provided, and the state change means may be provided for each of the plurality of light selection regions. Also in this configuration, the state may be changed so that the wavelengths of light selected by the plurality of light selection regions are different from each other.

  In the light source device of the present invention, it is preferable that the states of the plurality of light selection regions are temporally changed by the state changing unit.

  In the light source device according to the present invention, the states of the plurality of light selection regions are temporally changed by the state changing means. As a result, the speckle pattern of light emitted from each light selection region changes in a complicated manner with time. The speckle (spotted pattern due to interference) that is visible moves with the change, and the speckle pattern is integrated and averaged within the afterimage time of the human eye, reducing the generation of speckle. Become.

  Further, the light source device of the present invention includes light intensity detection means for detecting the intensity of light emitted from the plurality of light selection regions, and based on the light intensity detected by the light intensity detection means, It is preferable to adjust the intensity of light emitted from the plurality of light emitting elements.

  In the light source device according to the present invention, the light emitted from the plurality of light selection regions is adjusted by adjusting the intensity of the light emitted from the plurality of light emitting elements based on the intensity of the light detected by the light intensity detection unit. The light intensity can be made uniform. Compared to the case where the intensity of light emitted from each region of the wavelength selection element is not uniform, the effect of reducing speckles when the wavelength is different is more uniform as in the present invention. Becomes larger. That is, it becomes possible to more effectively reduce the coherence of light emitted from the wavelength selection element.

  Further, in the light source device of the present invention, the state detection unit is a temperature detection unit that detects the temperature of the light selection region of the wavelength selection element, and the state change unit has a temperature detected by the temperature detection unit. Accordingly, it is preferable that the temperature selecting means changes the temperature of the light selection region of the wavelength selection element.

  In the light source device according to the present invention, the temperature changing means varies the temperature for each light selection region of the wavelength selection element, so that the interval between the gratings inside the wavelength selection element changes according to the temperature of each light selection region. Thereby, the wavelength selection element differs in the wavelength of the light selected in each light selection area | region. Therefore, each light emitted from a plurality of light emitting elements and emitted from each light selection region of the wavelength selection element becomes light having a different wavelength. As described above, the interval between the periodic gratings inside the wavelength selection element changes only by changing the temperature of each light selection region without applying an external force to the wavelength selection element. As a result, the coherence between the light reflected and amplified by each region of the wavelength selection element with a simpler configuration is reduced, so that speckle noise can be suppressed.

  In the light source device of the present invention, the state detection unit is a strain detection unit that detects the magnitude of distortion in the light selection region of the wavelength selection element, and the state change unit is detected by the strain detection unit. It is preferable that the strain applying means changes the magnitude of the distortion in the light selection region of the wavelength selection element according to the magnitude of the distortion.

In the light source device according to the present invention, as the strain applying means, for example, a piezoelectric element is used to apply the strain so that the strain is different for each wavelength selection element region. As a result, the spacing between the gratings inside the wavelength selection element changes, so that the wavelength selection element reflects different wavelengths for each region. Accordingly, when the light emitted from the plurality of light emitting elements is reflected by the wavelength selection element and causes resonance, the amplified light has different wavelengths when emitted from each region. Therefore, since the coherence between the lights transmitted through each region of the wavelength selection element is reduced with a simple configuration, it is possible to suppress speckle noise while reducing the cost.
A plurality of strain applying means may be provided, and the strain applying means may be provided for each of the plurality of light selection regions. Also in this configuration, distortion may be applied so that the wavelengths of light selected by the plurality of light selection regions are different from each other.

  The light source device of the present invention has a plurality of light emitting elements that emit light and a plurality of light passage regions through which light emitted from the plurality of light emitting elements passes, respectively, and the light emitted from the plurality of light emitting elements Among them, a wavelength conversion element that converts at least some of the wavelengths to a predetermined wavelength, and a plurality of light selection regions for selecting light emitted from a plurality of light passage regions of the wavelength conversion device, A wavelength selection element that selectively reflects light emitted from the wavelength conversion element toward the light-emitting element; a conversion-side state detection unit that detects states of a plurality of light passage regions of the wavelength conversion element; and the conversion side The state of the light passage region of the wavelength conversion element is changed according to the state of the plurality of light passage regions detected by the state detection means so that the wavelengths of light converted by the plurality of light passage regions are different from each other. Let A conversion-side state changing unit, a selection-side state detecting unit that detects states of the plurality of light selection regions of the wavelength selection element, and a state of the plurality of light selection regions detected by the selection-side state detection unit And selection side state changing means for changing the state of the light selection region of the wavelength selection element so that the wavelengths of light selected by the plurality of light selection regions are different from each other.

In the light source device according to the present invention, for example, when green light is emitted, a light source having a wavelength of 1060 nm is used as the light emitting element, and the wavelength of the light emitted from the light emitting element by the wavelength conversion element is halved, and then the wavelength As the selection element, an element that transmits green light is used. Thereby, the light emitted from the light emitting element is transmitted through the wavelength conversion element, and is repeatedly reflected between the light emitting element and the wavelength selection element. Thereafter, the light converted to green is emitted from the wavelength selection element.
At this time, the state of the light passing region of the wavelength conversion element is changed by the conversion side state changing means according to the state detected by the conversion side state detecting means, and further, the state detected by the selection side state detecting means is changed. Accordingly, the state of the light selection region of the wavelength selection element is changed by the selection side state changing means. Thereby, the wavelength of the light inject | emitted from a several light passage area | region and a light selection area | region can be varied reliably.
Therefore, light having a desired wavelength can be obtained by the wavelength conversion element, and light with reduced speckle noise can be emitted.

  In the light source device of the present invention, the conversion-side state detection unit and the conversion-side state change unit are provided for each light passage region of the wavelength conversion element, and the selection-side state detection unit and the selection-side state change unit Are provided for each light selection region of the wavelength selection element, and the conversion-side state change means and the selection-side state change means respectively convert the conversion wavelength of each light passage region of the wavelength conversion element and each light of the wavelength selection element. It is preferable to change the state of each region so that the selected wavelength of the selected region changes substantially coincident.

In the light source device according to the present invention, the wavelength (conversion wavelength) of light converted in each light passage region of the wavelength conversion element is substantially the same as the wavelength of light selected in each light selection region of the corresponding wavelength selection element. Become. Thereby, each light converted in each light passage region of the wavelength conversion element is effectively extracted when passing through each light selection region of the corresponding wavelength selection element.
Note that a plurality of selection-side state changing means may be provided, and the selection-side state changing means may be provided for each of a plurality of light selection regions. Also in this configuration, the temperature may be changed so that the wavelengths of light selected by the plurality of light selection regions are different from each other. Similarly, conversion-side state change means may be provided for each of a plurality of light passage regions.

  In the light source device of the present invention, it is preferable that at least one of the plurality of light passage regions and the plurality of light selection regions is temporally changed.

  In the light source device according to the present invention, at least one of the plurality of light passage regions and the plurality of light selection regions is temporally changed. As a result, the speckle pattern of light emitted from the light selection region of the wavelength selection element changes in a complicated manner with time. The speckle (spotted pattern due to interference) that is visible moves with the change, and the speckle pattern is integrated and averaged within the afterimage time of the human eye, reducing the generation of speckle. Become.

Further, the light source device of the present invention includes light intensity detection means for detecting the intensity of light emitted from the plurality of light selection regions, and based on the light intensity detected by the light intensity detection means, It is preferable to adjust the intensity of light emitted from the plurality of light emitting elements.
In the light source device according to the present invention, the same effect as that obtained when the light intensity detecting means is provided can be obtained.

  Further, in the light source device of the present invention, the wavelength conversion element has a repeating structure of domains whose polarizations are reversed with respect to each other along a central axis of light emitted from the plurality of light emitting elements. The state detection means is voltage detection means for detecting a voltage in the light passage region of the wavelength conversion element, and the conversion-side state change means is configured to detect the voltage conversion element according to the voltage detected by the voltage detection means. It is preferable that the voltage applying means be different from each other in the voltage applied to the light passage region.

  In the light source device according to the present invention, the applied voltage to be applied to the voltage applying unit in each light passing region of the wavelength conversion element is made different according to the voltage detected by the voltage detecting unit, so The refractive index is definitely different for each. In this way, by changing the voltage applied to each light passage region of the wavelength conversion element, the output wavelength of light emitted from the plurality of light emitting elements and the light passage regions of the wavelength conversion elements corresponding to the respective light emitting elements. The wavelength of the transmitted light can be made the same. Furthermore, the wavelength of light converted in each light passage region of the wavelength conversion element and the wavelength of light selected in each light selection region of the wavelength selection element corresponding to each region can be made the same. Thereby, the wavelength of the light converted in each light passage region of the wavelength conversion element can be changed. Accordingly, it is possible to obtain a light source device that suppresses speckle noise while improving the utilization efficiency of light emitted from a plurality of light emitting elements with a simpler configuration.

In the light source device of the present invention, the selection-side state detection unit is a temperature detection unit that detects the temperature of the light selection region of the wavelength selection element, and the selection-side state change unit is detected by the temperature detection unit. It is preferable that the temperature change means changes the temperature of the light selection region of the wavelength selection element from each other according to the measured temperature.
In the light source device of the present invention, the same effect as that obtained when the state detecting means is a temperature detecting means and the state changing means is a temperature changing means can be obtained.

In the light source device of the present invention, the selection-side state detection unit is a distortion detection unit that detects the magnitude of distortion in the light selection region of the wavelength selection element, and the selection-side state change unit is the distortion detection unit. It is preferable that the strain applying means changes the magnitude of the distortion in the light selection region of the wavelength selection element according to the magnitude of the distortion detected by the means.
In the light source device of the present invention, the same effect as that obtained when the state detecting unit is a strain detecting unit and the state changing unit is a strain applying unit can be obtained.

  An image display device of the present invention includes the above light source device, a light modulation device that modulates light emitted from the light source device in accordance with an image signal, and a projection device that projects an image formed by the light modulation device. It is characterized by providing.

  In the image display device according to the present invention, the light emitted from the light source device enters the light modulation device. Then, the image formed by the light modulation device is projected by the projection device. At this time, since the light emitted from the light source device is light with reduced coherence as described above, the light projected by the projection device suppresses speckle noise. Therefore, a good image can be displayed.

  An image display apparatus according to the present invention includes the light source device described above and a scanning unit that scans light emitted from the light source device on a projection surface.

  In the image display device according to the present invention, the light emitted from the light source device is scanned by the scanning means. Then, the light scanned by the scanning unit is projected onto the projection surface. At this time, since the light emitted from the light source device is light with reduced coherence as described above, speckle noise is suppressed in the light irradiated on the projection surface. Therefore, it is possible to display a high-quality image without luminance unevenness.

  A monitor device according to the present invention includes the light source device described above and an imaging unit that images a subject irradiated by the light source device.

  In the monitor device according to the present invention, the light emitted from the light source device irradiates the subject, and the subject is imaged by the imaging means. At this time, as described above, since the light source device emits light with reduced coherence, the subject is irradiated with bright light without uneven brightness. Therefore, the subject can be clearly imaged by the imaging means.

It is a top view which shows the light source device which concerns on 1st Embodiment of this invention. It is a flowchart used for the light source device of FIG. It is a top view which shows the modification of the light source device of FIG. It is a flowchart which shows the modification of the light source device of FIG. It is a top view which shows the light source device which concerns on 2nd Embodiment of this invention. It is a perspective view which shows the modification of the light source device of FIG. It is a top view which shows the light source device which concerns on 3rd Embodiment of this invention. It is a top view which shows the modification of the light source device of FIG. It is a flowchart which shows the modification of the light source device of FIG. It is a top view which shows the light source device which concerns on 4th Embodiment of this invention. It is a flowchart used for the light source device of FIG. It is a top view which shows the image display apparatus which concerns on 5th Embodiment of this invention. It is a top view which shows the modification of the image display apparatus of this invention. It is a top view which shows the monitor apparatus which concerns on 6th Embodiment of this invention.

Hereinafter, embodiments of a light source device, an image display device, and a monitor device according to the present invention will be described with reference to the drawings. In the following drawings, the scale of each member is appropriately changed in order to make each member a recognizable size.
[First Embodiment]
Next, a first embodiment of the present invention will be described with reference to FIG.
As illustrated in FIG. 1, the light source device 10 according to the present embodiment includes a light emitting unit 11, a wavelength selection element 12, and a control unit 20.
The light emitting unit 11 includes six light emitting elements (semiconductor lasers; LDs) 11a, 11b, 11c, 11d, 11e, and 11f that emit laser light. These light emitting elements 11 a to 11 f are all supported by the support portion 13. The peak wavelength of the light emitted from the light emitting elements 11a to 11f differs by about several nm due to manufacturing errors of the light emitting elements 11a to 11f. Here, when the wavelengths of light emitted from the light emitting elements 11a to 11f are λ1, λ2, λ3, λ4, λ5, and λ6, λ1>λ4>λ5>λ3>λ2> λ6. Note that a light emitting element that intentionally emits light of a different wavelength from the beginning of the design may be used instead of accidentally different due to manufacturing errors.

The wavelength selection element 12 selects a part (about 98 to 99%) of light (a broken line shown in FIG. 1) W <b> 1 having a predetermined selection wavelength from the incident laser light and reflects it toward the light emitting unit 11. It functions as a resonator mirror of the light emitting elements 11a to 11f and transmits the remaining laser light (two-dot chain line shown in FIG. 1) W2. As the wavelength selection element 12, for example, an optical element such as a hologram having a periodic grating can be used.
The fundamental wave light (solid line shown in FIG. 1) W3 emitted from the light-emitting unit 11 is repeatedly reflected and amplified between the light-emitting unit 11 and the wavelength selection element 12, and then amplified as a laser beam W2. 12 is injected. The wavelength selection element 12 transmits light having a certain range of wavelengths, but only light having a predetermined wavelength is amplified. The intensity of the amplified light is significantly higher than the intensity of light of other wavelengths. Therefore, the light W2 that has passed through the wavelength selection element 12 can be regarded as light having a substantially single wavelength. The wavelength of the light W2 is substantially the same as the wavelength selected by the wavelength selection element 12, that is, the wavelength of the light W1 reflected by the wavelength selection element 12. Since the wavelength selection element 12 reflects a part (about 98 to 99%) of light having a predetermined selection wavelength, the remaining light (about 1 to 2%) is used as output light.

  Here, in one substrate constituting the wavelength selection element 12, areas (light selection areas) in which light emitted from the light emitting elements 11a to 11f is selected are A, B, C, D, E, and F, respectively. . However, since the areas A to F are actually continuous areas having different sizes of selected wavelengths, there is no physical boundary between them.

As shown in FIG. 1, the control unit 20 includes a temperature sensor (state detection unit) 21, a Peltier element (state change unit) 22, and a temperature adjustment unit 23.
The temperature sensor 21 and the Peltier element 22 are bonded to the surface 12a of each region A to F of the wavelength selection element 12, respectively. Further, the temperature sensor 21 and the Peltier element 22 provided in each of the areas A to F are connected to the temperature adjustment unit 23.
The temperature sensor 21 is a sensor that measures the temperature of each region A to F of the wavelength selection element 12.
Further, since the Peltier element 22 is provided on the surface 12a of each of the areas A to F, the wavelength selection element 12 is heated or cooled from the surface 12a of each of the areas A to F toward the back surface (the surface on the back side of the paper). Is done. The wavelength selection element 12 expands by heating and contracts by cooling to change the refractive index. Corresponding to this refractive index, the selection wavelength of the wavelength selection element 12, that is, the wavelength of the light W1 reflected by the wavelength selection element 12 is different.
Further, the Peltier element 22 is provided in each of the regions A to F on the surface 12a with a predetermined interval. A heat insulating material may be provided between the adjacent Peltier elements 22 so that heat is not transmitted between the adjacent regions A to F.
Further, the Peltier element 22 has the regions A to F of the wavelength selection element 12 such that the wavelengths of the light selected by the regions A to F are different from each other according to the temperatures of the regions A to F detected by the temperature sensor 21. Change the state of.

  The temperature adjustment unit 23 controls the current supplied to each Peltier element 22 based on the temperature detected by the temperature sensor 21 for each of the regions A to F. And the temperature for every area | region AF is varied and the selection wavelength is varied. Thus, in this embodiment, the wavelength of the light W1 reflected by the wavelength selection element 12 is changed for each region by individually controlling the temperature of each region A to F and making the temperature of each region A to F different. Can be made different. Specifically, the selected wavelength shifts to the longer wavelength side in a region where the thermal expansion is large at a high temperature. That is, assuming that the wavelengths of the light W1 reflected by the regions A to F of the wavelength selection element 12 are λ1, λ2, λ3, λ4, λ5, and λ6, respectively, λ1> according to the wavelength of the light emitting elements 11a to 11f. The temperature adjusting unit 23 controls the Peltier element 22 to adjust the temperatures of the regions A to F so that λ4> λ5> λ3> λ2> λ6.

  Then, after the wavelength of the light W1 reflected by the wavelength selection element 12 is different for each of the regions A to F in this manner, reflection is repeatedly performed between the light emitting unit 11 and the wavelength selection element 12 and amplified. The light W2 emitted from the wavelength selection element 12 is also different for each of the regions A to F.

Next, a specific example of the light source device 10 according to the present embodiment will be described.
First, the light emitting elements 11a to 11f are red semiconductor lasers, and the peak wavelengths λ1, λ2, λ3, λ4, λ5, and λ6 of emitted light are 630 nm, 626 nm, 627 nm, 629 nm, 628 nm, and 625 nm, respectively. ing.
Then, the selection wavelengths λ1, λ2, λ3, λ4, λ5, and λ6 in the regions A, B, C, D, E, and F of the wavelength selection element 12 are 630 nm, 626 nm, 627 nm, 629 nm, 628 nm, and 625 nm, respectively. When the Peltier element 22 is controlled by the temperature adjustment unit 23 so that the difference between the wavelength selection element 12 is 5 nm at the maximum), the wavelength of the light W2 emitted from the regions A, B, C, D, E, and F of the wavelength selection element 12 is also increased. 630 nm, 626 nm, 627 nm, 629 nm, 628 nm, and 625 nm, respectively.

Specific control of the temperature adjustment unit 23 will be described with reference to a flowchart shown in FIG.
Here, the region A of the wavelength selection element 12 has a selection wavelength of 630 nm when the temperature is T1, the region B has a selection wavelength of 626 nm when the temperature is T2, and the region C of the wavelength selection element 12 is selected when the temperature is T3. The wavelength D is 627 nm, the region D of the wavelength selection element 12 has a selection wavelength of 629 nm when the temperature is T4, the region E of the wavelength selection element 12 has a selection wavelength of 628 nm when the temperature is T5, and the region F of the wavelength selection element 12 The selected wavelength is 625 nm when the temperature is T6.
First, the wavelength distribution in each area | region AF is set to the temperature adjustment part 23 (step S0). Here, as a representative example, when the wavelength distribution is determined, the temperature of the region A is set to T1 from the relationship between the wavelength and the temperature (Step S1), and the temperature of the region A is set to T1. The Peltier element 22 is controlled by the adjusting unit 23 (step S2). And the temperature of the area | region A is measured by the temperature sensor 21 (step S3), and it is judged whether the temperature measured by the temperature sensor 21 and set temperature T1 correspond (step S4). When the temperature measured by the temperature sensor 21 does not match the set temperature T1 (step S4 “NO”), that is, when the actual temperature of the region A is lower than the set temperature T1, the control of the temperature adjusting unit 23 is performed. Thus, when the Peltier element 22 heats the area A and the actual temperature of the area A is higher than the set temperature T1, the Peltier element 22 cools the area A under the control of the temperature adjusting unit 23. By repeating such an operation, when the temperature measured by the temperature sensor 21 and the set temperature T1 coincide with each other (step S4 “YES”), the temperature of the region A is not changed by the Peltier element 22, and this temperature Is maintained (step S5). At this time, the temperature sensor 21 constantly or intermittently measures the temperature of the region A and compares it with the set temperature T1. When the temperature of the region A measured by the temperature sensor 21 deviates from the set temperature T1, the temperature adjustment unit 23 controls the Peltier element 22.
In the regions B to F, the temperature control unit 23 performs similar control.

In the light source device 10 according to the present embodiment, the temperature of each region A to F is made different from each other by the Peltier element 22, so that the band of light emitted from the wavelength selection element 12 is the same from all the regions A to F. The wavelength is wider than when emitted. Further, since the Peltier element 22 changes the states of the areas A to F of the wavelength selection element 12 according to the temperature measured by the temperature sensor 21, the wavelength of the light emitted from the areas A to F is surely determined. Can be different.
For this reason, the coherence between the laser beams is reduced, and as a result, it is possible to obtain the light source device 10 in which speckle noise is suppressed.
Further, since the temperature can be changed for each of the regions A to F, the degree of freedom of the output wavelength distribution emitted from the wavelength selection element 12 is increased. Therefore, it is possible to make the wavelength of the light emitted from the light emitting elements 11a to 11f and the wavelength of the light selected by each of the regions A to F of the corresponding wavelength selection element 12 match. Thereby, even if the light emitting elements 11a to 11f have variations in output wavelength due to manufacturing errors or the like, it is possible to improve the utilization efficiency of light emitted from the wavelength selection element 12.
That is, the light source device 10 of the present embodiment can reduce the coherence between a plurality of laser beams while maintaining high light utilization efficiency, and can suppress speckle noise.

In addition, there is no manufacturing error and the peak wavelength of the light emitted from the light emitting elements 11a to 11f may be the same. With this configuration, the light utilization efficiency is slightly reduced, but speckle noise can be reduced.
Further, instead of the Peltier element 22, a heating element or a piezoelectric element (strain imparting means) may be used. The piezoelectric element is displaced when a voltage is applied, and the displacement causes the wavelength selection element 12 to be distorted. The wavelength selection element 12 becomes shorter as the strain is larger. Therefore, other piezoelectric elements (strain detection means) for detecting the strain in each region A to F are provided, and the amount of strain in each region A to F is adjusted by the piezoelectric element according to the strain detected by the other piezoelectric element. By doing so, it becomes possible to vary the wavelength of the light emitted from each of the regions A to F. For example, a strain gauge or a magnetostrictive element may be used as the strain applying means.
In the above example, one wavelength selection element 12 is provided for the plurality of light emitting elements 11a to 11f, and one base is divided into a plurality of regions. However, the wavelength selection element is provided for each light emitting element individually. It may be.
Furthermore, the temperature may be controlled by one Peltier element 22 for each of a plurality of regions A to F, that is, two or three regions are combined. Also in this configuration, the temperature may be applied so that the wavelengths of light selected by the plurality of regions A to F are different from each other.

[First Modification of First Embodiment]
In the first embodiment shown in FIG. 1, the Peltier element 22 is used to change the temperature of each of the areas A to F. However, instead of the Peltier element 22, as shown in FIG. The light source device 30 using the changing means 35 may be used.
The temperature changing unit (temperature changing means) 35 used in the light source device 30 includes a heat generating laser light source 32, a mirror 33, a heat absorbing film 31, and a temperature sensor 21 similar to that of the first embodiment. .

The heat absorption film 31 is provided in each of the regions A to F on the surface 12 a with a predetermined interval, like the Peltier element 22. In addition, a heat insulating material may be provided between the heat absorption films 31 in the regions A to F so that heat is not transmitted between the adjacent regions A to F. Further, the film thickness of the heat absorption film 31 is the same in each of the regions A to F.
The mirror 33 scans the laser light emitted from the heat generation laser light source 32 toward the heat absorption film 31. Then, by controlling the tilt angle of the mirror 33, the heat absorption film 31 in which region A to F is controlled to be irradiated with light, and by determining the time to hold at a certain tilt angle, the heat absorption film 31 is moved to. Controls the light irradiation time.
The time of the laser beam irradiated to the heat absorption film 31 is adjusted. Thereby, as the time of the irradiated laser beam is longer, the temperature of the heat absorption film 31 is increased, and the temperatures of the regions A to F are increased. And the time of the laser beam irradiated to the heat absorption film 31 is controlled so that the temperature of area | regions A-F may each differ. That is, also in this modification, the output of the heat generating laser light source 32 is adjusted by the temperature adjusting unit 23 in accordance with the temperature detected by the temperature sensor 21 provided in each of the areas A to F.
Also in the light source device 30 of the present modification, speckle noise can be reduced and light utilization efficiency can be improved in the same manner as the light source device of the first embodiment.

In this modification, the film thickness of the heat absorption film 31 is the same, but the film thickness of the heat absorption film 31 may be changed irregularly. That is, as the film thickness of the heat absorption film 31 increases, the amount of heat absorption increases and the temperature rises. Therefore, in this modification, the scanning speed of the mirror 33 (light irradiation time for one heat absorption film 31) is changed. Without any problem, the regions A to F of the wavelength selection element 12 can have a temperature distribution. That is, instead of changing the irradiation time of the laser light for each of the areas A to F, the scanning speed for each scan in which the mirror 33 is swung to the areas A to F may be constant, so that the mirror 33 can be easily controlled.
Although the heat absorption film 31 is provided for each of the regions A to F, the heat absorption film 31 may be provided on the entire surface 12 a of the wavelength selection element 12.
Further, a MEMS mirror can be used as the mirror 83.

[Modification 2 of the first embodiment]
In the first embodiment shown in FIG. 1, when each of the areas A to F reaches the set temperature, the temperature is always maintained (the selected wavelength of each of the areas A to F is constant in time). The temperature of F may be changed with time.
That is, as shown in the flowchart of FIG. 4, first, a temperature change pattern with the passage of time in each of the regions A to F is set as a time table (wavelength distribution setting) in the temperature adjustment unit 23 (step S0). And the temperature of each area | region AF is adjusted similarly to 1st Embodiment, This temperature is maintained after the temperature measured by the temperature sensor 21 and set temperature T1 correspond (step S5). Thereafter, the process waits for the next temperature setting (step S6), returns to step S0 again, and sets the temperature for each region A to F (step S0). At this time, the temperature of each of the areas A to F is set to a temperature different from the previous set temperature. Thus, by changing the temperature of each area | region AF temporally, the degree of thermal expansion for every area | region AF changes, a refractive index changes, and a selection wavelength differs temporally. Accordingly, the wavelength of light emitted from each of the areas A to F changes with time.

  In this modification, the speckle pattern of light emitted from the regions A to F changes in a complicated manner with time by changing the temperatures of the regions A to F with time. The speckle (spotted pattern due to interference) that is visible moves with the change, and the speckle pattern is integrated and averaged within the afterimage time of the human eye, reducing the generation of speckle. Become.

[Second Embodiment]
Next, a second embodiment according to the present invention will be described with reference to FIG. Note that, in the drawings of the embodiments described below, portions having the same configuration as those of the light source device 10 according to the first embodiment described above are denoted by the same reference numerals and description thereof is omitted.
The light source device 40 according to the present embodiment is different from the first embodiment in that a light intensity adjustment unit 45 that adjusts the intensity of light emitted from the regions A to F is provided. Other configurations are the same as those of the first embodiment.

As shown in FIG. 5, the light intensity adjusting unit 45 includes a light intensity sensor (light intensity detecting means) 41, a mirror 42, and a light emitting element control unit 43. In the present embodiment, the same temperature adjustment unit 23 as that in the first embodiment is provided. However, in FIG. 5, the temperature adjustment unit 23 is omitted in order to simplify the drawing.
The light intensity sensor 41 is provided at a position away from the central axis O of the light emitted from the light emitting elements 11 a to 11 f on the emission end face 12 b of the wavelength selection element 12.
The mirror 42 is provided corresponding to each of the areas A to F on the emission end face 12 b side of the wavelength selection element 12, and can be rotated about the axis K. Then, the mirror 42 reflects the light emitted from each of the areas A to F by the rotation of the axis K, and makes the light incident on the light intensity sensor 41 provided on the emission end face 12b.
Further, the light emitting element control unit 43 adjusts the output of light emitted from each of the light emitting elements 11 a to 11 f based on the light intensity detected by the light intensity sensor 41.

Next, the operation of the light intensity adjusting unit 45 will be described.
When light is emitted from the light emitting elements 11a to 11f, the mirror 42 is rotated by about 80 ° counterclockwise around the axis K with respect to the center axis O of light and reflected by the mirror 42 at regular intervals. The light intensity is detected by the light intensity sensor 41. Then, when the light intensity detected by the light intensity sensor 41 is smaller than a predetermined value, the light emitting element control unit 43 increases the light output of the light emitting elements 11a to 11f that emit light to the region, and from the predetermined value. If larger, the light output of the light emitting elements 11a to 11f that emit light to the region is lowered. In this way, the intensity of light emitted from each of the regions A to F of the wavelength selection element 12 is made uniform.

  In the light source device 40 according to the present embodiment, the intensity of light emitted from each of the regions A to F of the wavelength selection element 12 can be made uniform. Thereby, compared with the case where the intensity | strength of the light inject | emitted from each area | region AF of the wavelength selection element 12 is nonuniform, the direction where the intensity | strength of light is uniform like this embodiment makes a wavelength different. The effect of reducing speckles is increased. That is, the coherence of light emitted from the wavelength selection element 12 can be more effectively reduced.

In the present embodiment, the mirror 42 is provided and the intensity of the light emitted from the wavelength selection element 12 is measured, but the mirror 42 may not be provided. That is, as shown in FIG. 6, the glass 47 fitted in the cap 46 provided outside the light emitting elements 11 a to 11 f and the wavelength selecting element 12 is tilted, and a part of the light that has passed through the wavelength selecting element 12 is The light intensity may be detected by reflection with the glass 47 and a light intensity sensor. In the case of this configuration, the light intensity sensor may be arranged at a position where the light reflected by the cap can be detected.
Further, the position where the light intensity sensor 41 is provided is not limited to the emission end face 12b.
Further, the output of the light emitted from each of the light emitting elements 11a to 11f is adjusted based on the light intensity detected by the light intensity sensor 41, but is fed back to the Peltier element 22 provided in the wavelength selection element 12, and the wavelength The output intensity may be adjusted by adjusting the temperature of each region A to F of the selection element 12 and changing the output wavelength. With this configuration, although the light utilization efficiency is slightly reduced, it is not necessary to provide the light emitting element control unit 43, so that the cost can be reduced.

[Third Embodiment]
Next, a third embodiment according to the present invention will be described with reference to FIG. 7. The light source device 50 according to the present embodiment is emitted from the light emitting unit 51 and the light emitting unit 51 as shown in FIG. 7. A wavelength conversion element 53 that converts the wavelength of light and a wavelength selection element 52 that selects and reflects the wavelength converted by the wavelength conversion element 53 are provided.
In FIG. 7, the temperature adjustment unit 23 on the wavelength selection element 52 side is omitted to simplify the drawing.
The light emitting unit 51 includes six light emitting elements (semiconductor lasers; LD) 51a, 51b, 51c, 51d, 51e, and 51f that emit laser light. These light emitting elements 51 a to 51 f are all supported by the support portion 54. The peak wavelength of the light emitted from the light emitting elements 51a to 51f differs by about several nm due to manufacturing errors of the light emitting elements 51a to 51f. Here, when the wavelengths of light emitted from the light emitting elements 51a to 51f are λ01, λ02, λ03, λ04, λ05, and λ06, λ01>λ04>λ05>λ03>λ02> λ06. Note that a light-emitting element that intentionally emits light having a different wavelength may be used.

A wavelength conversion element (second harmonic generation element, SHG: Second Harmonic Generation) 53 is a non-linear optical element that converts incident light into a substantially half wavelength.
Light W <b> 3 emitted from the light emitting unit 51 and traveling toward the wavelength selection element 52 is converted into light having a substantially half wavelength by passing through the wavelength conversion element. The wavelength conversion efficiency by the wavelength conversion element 53 has non-linear characteristics. For example, the higher the intensity of the laser light incident on the wavelength conversion element 53, the higher the conversion efficiency. However, the conversion efficiency of the wavelength conversion element 53 is about 40 to 50%. That is, not all of the laser light emitted from the light emitting unit 51 is converted into laser light having a predetermined wavelength.

A plate-shaped element is used as the wavelength conversion element 53. The wavelength conversion element 53 is divided into five regions P, Q, R, S, T, and U corresponding to the plurality of light emitting elements 51a to 51e.
That is, areas through which light emitted from the light emitting elements 51a, 51b, 51c, 51d, 51e, and 51f passes are defined as areas (light passing areas) P, Q, R, S, T, and U, respectively.

The wavelength conversion element 53 has a polarization periodic structure for each of the regions P to U, that is, a repeating structure of domains in which the polarizations are reversed from each other. The light is transmitted through the polarization periodic structure, so that the wavelength of the incident light is converted. The width (hereinafter referred to as “pitch”) Λ1 of the laser light in the domains P, Q, R, S, T, and U of the wavelength conversion element 53 in the direction of the central axis O is the same.
Such a polarization periodic structure has a stripe shape in which regions having electrodes and regions without electrodes are alternately arranged along a central axis O direction of a laser beam on a substrate made of a nonlinear ferroelectric material (for example, LiTaO 3). An electrode pattern is formed. Next, by applying a pulse voltage to these electrode patterns, a polarization periodic structure as shown in FIG. 7 is obtained. After the polarization periodic structure is formed in this way, the normal electrode pattern is removed, but it may be left as it is.
Thus, the wavelength conversion element 53 has a domain-inverted structure in which the periods (pitch) are the same in the regions P to U.

As shown in FIG. 7, the control unit 60 includes a temperature sensor (state detection unit) 61, a Peltier element (state change unit) 62, and a temperature adjustment unit 63.
The temperature sensor 61 and the Peltier element 62 are respectively bonded to the surface 53 a of each region A to F of the wavelength conversion element 53. Further, the temperature sensor 61 and the Peltier element 62 provided in each of the regions P to U are connected to the temperature adjustment unit 63.
The temperature sensor 61 is a sensor that measures the temperature of each region P to U of the wavelength conversion element 53.
Further, since the Peltier element 62 is provided on the surface 53a of each region P to U, the wavelength conversion element 53 is heated or cooled from the surface 53a of each region P to U toward the back surface (not shown). . Similarly to the wavelength selection element 52, the wavelength conversion element 53 expands by heating and contracts by cooling to change the domain pitch. Corresponding to this domain pitch, the conversion wavelength of the wavelength conversion element 53, that is, the wavelength of the light W1 converted by the wavelength conversion element 53 differs.
In addition, the Peltier element 62 has the regions P to U of the wavelength conversion element 53 so that the wavelengths of the light converted by the regions P to U are different from each other according to the temperatures of the regions P to U detected by the temperature sensor 61. Change the state of

Next, the wavelength in the case of the blue light source device will be described as an example. The peak wavelengths of the light emitted from the light emitting elements 51a to 51f are λ01 = 920 nm, λ02 = 914 nm, λ03 = 912 nm, λ04 = 916 nm, λ05 = 918 nm and λ06 = 910 nm. However, the wavelengths listed here are merely examples.
In the region P, the temperature is set to a temperature T2a at which light having a wavelength of 920 nm is converted into a half wavelength by the Peltier element 62. In the region Q, the temperature is set to a temperature T2b that converts light having a wavelength of 914 nm to a half wavelength, and in the region R, the temperature is set to temperature T2c that converts light having a wavelength of 912 nm to a half wavelength. In the region S, the temperature is set to a temperature T2d for converting light having a wavelength of 916 nm to a half wavelength, in the region T, the temperature is set to a temperature T2e for converting light having a wavelength of 918 nm to a half wavelength, and in the region U, the temperature is set to 910 nm. The temperature is set to a temperature T2f that converts light of a wavelength into a half wavelength. Then, the Peltier element 62 is controlled by the temperature adjusting unit 63 so that the regions P to U become the temperatures T2a to T2f. As a result, the wavelengths of light emitted from the regions P to U of the wavelength conversion element 53 are λ1 = 460 nm, λ2 = 457 nm, λ3 = 456 nm, λ4 = 458 nm, λ5 = 459 nm, and λ6 = 455 nm.

The wavelength selection element 52 includes a temperature sensor 21, a Peltier element 22, and a temperature adjustment unit 23, as in the first embodiment.
Further, the wavelength selection element 52 has a wavelength (that is, wavelengths λ01 to λ06) converted into the predetermined wavelengths λ1 to λ6 by the wavelength conversion element 53 (that is, the amount of light that has been transmitted without being converted by the wavelength conversion element 53). Only light) is selected and reflected toward the light emitting portion 51, and other laser light is transmitted. The Peltier element 22 is controlled so that the wavelengths λ01 to λ06 of the light converted in the regions P to U and the wavelengths of the light selected in the regions A to E of the wavelength selection element 52 have the same value. .
That is, in the case of a blue light source device, the temperature adjusting unit 23 controls the temperatures of the regions A to F by the Peltier element 22 so that the wavelengths of light reflected in the regions A to F are different from each other.

  The light W1 reflected by the wavelength selection element 52 (two-dot chain line shown in FIG. 7) passes through the wavelength conversion element 53 again and returns to the light emitting elements 51a to 51e. The light returned to the light emitting elements 51a to 51e is partially absorbed therein and becomes heat, but most of the light is used as energy of light emission, or is reflected in the light emitting elements 51a to 51e and is again emitted. It is used effectively by being injected from ˜51e.

On the other hand, the light W <b> 2 (the one-dot chain line shown in FIG. 7) that has been converted into the wavelengths λ <b> 1 to λ <b> 6 that passes through the wavelength selection element 52 by the wavelength conversion element 53 passes through the wavelength selection element 52.
As described above, the light W3 emitted from the light emitting unit 51 is repeatedly reflected between the light emitting unit 51 and the wavelength selection element 52 and converted into a predetermined wavelength (the dashed line shown in FIG. 7). ) Is emitted from the wavelength selection element 52. That is, the wavelength selection element 52 has a function as a resonator mirror of the light emitting elements 51a to 51e, although the action is slightly different from the wavelength selection element 12 of the first embodiment.

In the light source device 50 according to the present embodiment, the Peltier element 62 changes the domain pitch of each of the regions P to U, thereby converting the wavelength conversion element 53 that enables conversion to different wavelengths λ1 to λ6, and each of the regions A to F. In addition, the wavelength of the light emitted from the wavelength selection element 52 can be made different from each other by combining the wavelength selection elements 52 having different selection wavelengths. Therefore, since the band of light emitted from the wavelength selection element 52 is wider than when the same wavelength is emitted from all regions, the coherence between the laser beams is reduced. As a result, it is possible to obtain the light source device 50 that suppresses speckle noise.
Further, since the Peltier element 62 is provided for each of the regions P to T, the degree of freedom of the output wavelength distribution emitted from the wavelength conversion element 53 is increased. Therefore, the wavelength of the light emitted from the light emitting elements 51a to 51e can be matched with the wavelength of the light to be converted in each of the regions P to U of the corresponding wavelength conversion element 53. Thereby, even if the light emitting elements 51a to 51e have variations in output wavelength due to manufacturing errors or the like, it is possible to improve the utilization efficiency of the light emitted from the wavelength conversion element 53.
Further, since the Peltier element 62 is provided for each of the regions P to U, the difference in conversion wavelength for each of the regions P to T can be increased or decreased not limited to 2 nm, so that speckle is more efficiently performed. Noise can be reduced.

Instead of the Peltier element 62, a heating element or a piezoelectric element (strain imparting means) may be used. The piezoelectric element is displaced when a voltage is applied, and this displacement causes distortion in the wavelength conversion element 53. Since the wavelength conversion element 53 becomes shorter as the distortion becomes larger, the wavelength of light emitted from each of the regions P to U can be varied by adjusting the amount of distortion in each of the regions P to U. It becomes. For example, a strain gauge or a magnetostrictive element may be used as the strain applying means.
Moreover, you may vary the wavelength of the light inject | emitted from each area | region PU using the temperature change part 35 shown in FIG. 3 of the modification 1 of 1st Embodiment.
Moreover, the light source device 65 shown in FIG. 8 provided with the light intensity adjustment part 45 shown in FIG. 5 of 2nd Embodiment may be sufficient. Also in this configuration, the intensity of the light emitted from each of the regions A to F of the wavelength selection element 52 can be made uniform as in the second embodiment, so that the light emitted from the wavelength selection element 52 Coherence can be reduced more effectively.

[Modification of Third Embodiment]
In the third embodiment shown in FIG. 7, when each region P to U reaches a set temperature, the temperature is always maintained (the selected wavelength of each region P to U is constant in time). A light source device in which the temperature of U is changed with time may be used.
Furthermore, in the light source device of this modification, control is performed so that the temperature of each region P to U of the wavelength conversion element 53 is synchronized with the temperature of each region A to F of the corresponding wavelength selection element 52. The overall configuration is the same as that of the light source device 50 of the third embodiment.
As shown in the flowchart of FIG. 9, the light source device of the present modification includes a temperature adjustment unit 23 in which the temperatures in the areas A to F are timetable (wavelength distribution setting), and the temperature adjustment unit 63 in each area P. The temperature in the time of ~ U sets the wavelength distribution (step S0).
Here, since the flowcharts of the regions P to U are the same, the control of the region P and the region A corresponding to the light emitting element 51a shown on the left side of FIG. 9 will be described.
First, the wavelength emitted from the wavelength selection element 52 at a certain time is set (step S1), and the temperature T1a of the wavelength selection element 52 that emits light of that wavelength is set (step S2a). Then, similarly to the first embodiment, the temperature of each region A is controlled by the Peltier element 22 (step S3a), and the temperature of each region A is measured by the temperature sensor 21 (step S4a). Then, the temperature measured by the temperature sensor 21 is compared with the set temperature T1a (step S5a), and after matching, the temperature is maintained (step S6).
At the same time as the flow of steps S1a to S5a of the wavelength selection element 52 is performed, the temperature T2a of the wavelength conversion element 53 that converts light of the set wavelength is similarly set in the wavelength conversion element 53 ( Step S2b). Then, the temperature of each region P is controlled by the Peltier element 62 (step S3b), and the temperature of each region P is measured by the temperature sensor 61 (step S4b). Thereafter, the temperature measured by the temperature sensor 61 is compared with the set temperature T2a (step S5b), and after matching, the temperature is maintained (step S6).

Thereafter, the next temperature setting wait is set (step S7), the process returns to step S0 again, and the temperature at the time of each area A and area P is set (step S0). At this time, the temperature of each region A is set to a temperature different from the previous set temperature, and the temperature of each region P is set to a temperature different from the previous set temperature.
At this time, the temperature of each region A to F is controlled by the Peltier element 22 of the wavelength selection element 52 so that the temperature of the wavelength selection element 52 and the temperature of the wavelength conversion element 53 change synchronously, and the wavelength conversion element The temperature of each region P to U is controlled by 53 Peltier elements 62.
That is, for example, when the region P of the wavelength conversion element 53 is set to a temperature T2a that converts light having a wavelength of 918 nm to a half wavelength, the region A of the wavelength selection element 52 is set to a temperature T1a that reflects light having a wavelength of 918 nm. To do. As described above, by changing the temperature of the wavelength selection element 52 and the temperature of the wavelength conversion element 53 in synchronization, it is possible to improve the light use efficiency in the wavelength selection element 52.

In this modification, the speckle pattern of light emitted from the areas A to F is complicated by changing the temperatures of the areas A to F of the wavelength selection element 52 and the areas P to U of the wavelength conversion element 53 with time. To change. The speckle (spotted pattern due to interference) that is visible moves with the change, and the speckle pattern is integrated and averaged within the afterimage time of the human eye, reducing the generation of speckle. Become.
Furthermore, since the temperature of the wavelength selection element 52 and the temperature of the wavelength conversion element 53 change synchronously, the wavelength of light converted in each region P to U of the wavelength conversion element 53 corresponds to the corresponding wavelength selection element 52. The wavelength of light selected in each of the regions A to U is the same. Thereby, each light converted in each area | region PU of the wavelength conversion element 53 is taken out effectively, when each area | region PU of the corresponding wavelength selection element 52 permeate | transmits.
Note that the temperature of at least one of the wavelength selection element 52 and the wavelength conversion element 53 may be temporally changed.
Further, the light source device of the present modification may include the light intensity adjustment unit 45 shown in the second embodiment, as shown in FIG. By providing the light intensity adjusting unit 45 in this modification, the speckle pattern is integrated and averaged within the afterimage time of the human eye while reducing the coherence of the light emitted from the wavelength selection element 12. Therefore, speckle noise can be reduced more effectively.

[Fourth Embodiment]
Next, a fourth embodiment according to the present invention will be described with reference to FIGS. 10 and 11. The light source device 80 according to the present embodiment includes regions P to U of the wavelength conversion element 81 instead of the Peltier element 62. The third embodiment is different from the third embodiment in that an electrode (state change means: voltage application means) 85 is provided on the surface 81a to be included.
In the wavelength conversion element 81 of the present embodiment, sheet-like electrodes 85 are respectively provided in the regions P to U on the surface 81a so as to keep a predetermined distance from the adjacent electrodes.
As shown in FIG. 10, the control unit 90 includes a voltage measurement element (state detection unit) 91, a power source (state change unit) V, and a voltage adjustment unit 93.
The voltage measuring element 91 and the electrode 85 are respectively bonded to the surface 81 a of each region P to U of the wavelength conversion element 81. Further, the voltage measuring element 91 provided in each of the regions P to U is connected to the voltage adjusting unit 93, and the electrode 85 is connected to the voltage adjusting unit 93 via the power source V.
The voltage measuring element 91 is an element that measures the temperature of each region P to U of the wavelength conversion element 81.
The wavelength conversion element 81 changes its refractive index when a voltage is applied. Corresponding to this refractive index, the conversion wavelength of the wavelength conversion element 81, that is, the wavelength of the light W1 converted by the wavelength conversion element 81 is different.

In addition, different voltages are applied to the electrodes 85 by the power source V. And according to the applied voltage, each area | region PT becomes different temperature. Due to this difference in temperature, in the regions P to U of the wavelength conversion element 81, the temperature changes, and the domain pitch changes due to thermal expansion. The electrodes 85 are controlled so that different voltages are applied thereto.
In FIG. 10, only the electrode 85 formed on the surface 81a is shown, but six electrodes each paired with the electrode 85 are also formed on the surface opposite to the surface 81a. By sandwiching the regions P to U with the paired electrodes, a predetermined voltage is applied to each of the regions P to U.

Further, similarly to the modification of the third embodiment, the temperature of each region P to U is changed with time, and the refractive index of each region P to U of the wavelength conversion element corresponds to each region of the corresponding wavelength selection element 52. Control is performed so as to synchronize with the temperatures A to F.
That is, as shown in the flowchart of FIG. 11, first, the temperature in each region AF is stored in the temperature adjustment unit 23 in the time table (wavelength distribution setting), and the temperature adjustment unit 63 is in the time in each region P through U. The wavelength distribution at is set (step S0).
Here, since the flowchart of the wavelength selection element 52 is the same as the flow shown in FIG. 9, the control of the wavelength conversion element 53 will be described.
First, the wavelength emitted from the wavelength conversion element 53 at a certain time is set (step S1), and the voltage value V2a of the wavelength conversion element 53 that emits light of that wavelength is set (step S2b). Then, the voltage value applied to each region P to U by the power source V is controlled (step S3b), and the voltage of each region P to U is measured by the voltage measuring element 91 (step S4b). Thereafter, the voltage value measured by the voltage measuring element 91 is compared with the set voltage value V2a (step S5b), and after matching, the voltage value is maintained (step S6).

After that, the wavelength selection element 52 waits for the next temperature setting, and the wavelength conversion element 53 waits for the next voltage setting (step S7), and returns to step S0 again, and the temperature in each region A to F and each region P to U. The voltage at the time is set (step S0). At this time, the temperature of each region A to F is set to a temperature different from the previous set temperature, and the voltage value of each region P to U is set to a voltage value different from the previous set voltage value.
At this time, the temperature of each region A to F is controlled by the Peltier element 22 of the wavelength selection element 52 so that the temperature of the wavelength selection element 52 and the voltage value of the wavelength conversion element 53 change synchronously, thereby converting the wavelength. Voltage control of each region P to U is performed by the voltage measuring element 91 of the element 81.
That is, when the region P of the wavelength conversion element 81 is set to the voltage value V2a that converts light having a wavelength of 918 nm into a half wavelength, the temperature T1a is set to reflect light having a wavelength of 918 nm in the region A of the wavelength selection element 52. . In this way, by changing the temperature of the wavelength selection element 52 and the voltage value of the wavelength conversion element 81 in synchronization, it is possible to improve the light use efficiency in the wavelength selection element 52.

  Also in the light source device 80 of the present embodiment, the same effect as that of the third embodiment can be obtained. Further, since the light source device 80 varies the wavelength of light emitted from each of the regions P to U by changing the voltage applied to each of the regions P to U, the wavelength conversion element 81 can be easily controlled. .

[Fifth Embodiment]
Next, a fifth embodiment according to the present invention will be described with reference to FIG.
In the present embodiment, an image display device 100 including the light source device 10 of the first embodiment will be described. In FIG. 12, the casing constituting the image display device 100 is omitted for simplification.

In the image display device 100, as the red laser light source (light source device) 101R that emits red light, the light source device 10 of the first embodiment is used, and the green laser light source (light source device) 101G that emits green light and blue light. As the blue laser light source (light source device) 101B, the light source device 50 of the third embodiment is used.
The image display device 100 emits light from the liquid crystal light valves (light modulation devices) 104R, 104G, and 104B and the liquid crystal light valves 104R, 104G, and 104B that modulate the laser light emitted from the laser light sources 101R, 101G, and 101B, respectively. A projection lens (projection device) that magnifies and projects the image formed by the cross dichroic prism (color light synthesis means) 106 that synthesizes the synthesized light to the projection lens 107 and the liquid crystal light valves 104R, 104G, and 104B. 107).

  Furthermore, the image display apparatus 100 is configured to make the illuminance distribution of the laser beams emitted from the laser light sources 101R, 101G, and 101B uniform, so that the homogenizing optical system 102R is disposed downstream of the laser light sources 101R, 101G, and 101B in the optical path. , 102G, and 102B are provided, and the liquid crystal light valves 104R, 104G, and 104B are illuminated with light whose illuminance distribution is made uniform by these. For example, the uniformizing optical systems 102R, 102G, and 102B are configured by, for example, a hologram 102a and a field lens 103b.

  The three color lights modulated by the respective liquid crystal light valves 104R, 104G, and 104B are incident on the cross dichroic prism 106. This prism is formed by bonding four right-angle prisms, and a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are arranged in a cross shape on the inner surface thereof. These dielectric multilayer films combine the three color lights to form light representing a color image. The synthesized light is projected onto the screen 110 by the projection lens 107, which is a projection optical system, and an enlarged image is displayed.

  In the image display apparatus 100 of the present embodiment described above, the light emitted from the red laser light source 101R, the green laser light source 101G, and the blue laser light source 101B is light with reduced coherence. The light that is emitted is one that suppresses speckle noise. Therefore, a good image can be displayed on the screen 110.

  In the image display device according to the present embodiment, the green and blue laser light sources 101G and 101B have been described using the light source device 50 according to the third embodiment. However, the light source devices according to other embodiments are used. Is also possible. At this time, the light source devices of different embodiments can be adopted for the light source devices 101R, 101G, and 101B, respectively, or the light source devices of the same embodiment can be adopted.

Further, although a transmissive liquid crystal light valve is used as the light modulator, a light valve other than liquid crystal may be used, or a reflective light valve may be used. Examples of such a light valve include a reflective liquid crystal light valve and a digital micromirror device. The configuration of the projection optical system is appropriately changed depending on the type of light valve used.
The light source devices of the first to fourth embodiments (including modifications) are also applied to a scanning image display device. An example of such an image display device is shown in FIG. The image display device 200 illustrated in FIG. 13 includes the light source device 10 according to the first embodiment, the MEMS mirror (scanning unit) 202 that scans the light emitted from the light source device 10 toward the screen 210, and the light source device 10. A condensing lens 203 that condenses the emitted light on the MEMS mirror 202 is provided. The light emitted from the light source device 10 is guided to scan the screen 210 in the horizontal direction and the vertical direction by moving the MEMS mirror. In the case of displaying a color image, the plurality of light emitting elements constituting the light emitting unit 11 may be configured by a combination of light emitting elements having red, green, and blue peak wavelengths.

[Sixth Embodiment]
Next, a configuration example of the monitor device 300 to which the light source device 50 according to the third embodiment is applied will be described. FIG. 14 is a schematic diagram showing an outline of the monitor device. The monitor device 300 includes a device main body 310 and an optical transmission unit 320. The apparatus main body 310 includes the laser light source apparatus 10 of the first embodiment described above.

  The light transmission unit 320 includes two light guides 321 and 322 on the light sending side and the light receiving side. Each of the light guides 321 and 322 is a bundle of a large number of optical fibers, and can send laser light to a distant place. The laser light source device 10 is disposed on the incident side of the light guide 321 on the light transmitting side, and the diffusion plate 323 is disposed on the emission side thereof. The laser light emitted from the laser light source device 10 is transmitted to the diffusion plate 323 provided at the tip of the light transmission unit 320 through the light guide 321 and is diffused by the diffusion plate 323 to irradiate the subject.

  An imaging lens 324 is also provided at the tip of the light transmission unit 320, and reflected light from the subject can be received by the imaging lens 324. The received reflected light travels through the light guide 322 on the receiving side and is sent to a camera 311 as an imaging means provided in the apparatus main body 310. As a result, an image based on the reflected light obtained by irradiating the subject with the laser light emitted from the laser light source device 10 can be captured by the camera 311.

According to the monitor device 300 configured as described above, the light source device 50 emits light in which speckle noise is suppressed, so that the camera 311 can clearly image the subject.
In addition, although what used the light source device 50 of 3rd Embodiment was demonstrated as a monitor apparatus of this embodiment, it is also possible to use the light source device of other embodiment (a modified example is included).

The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, although a cross dichroic prism is used as the color light combining means, the present invention is not limited to this. As the color light synthesizing means, for example, a dichroic mirror having a cross arrangement to synthesize color light, or a dichroic mirror arranged in parallel to synthesize color light can be used.

  10, 30, 40, 50, 65, 80 ... light source device, 11a-11f, 51a-51f ... light emitting element, 12, 52 ... wavelength selection element, 21 ... temperature sensor (state detector), 22 ... Peltier element (state) Change means), 41 ... light intensity sensor (light intensity detection means), 53, 81 ... wavelength conversion element, 61 ... temperature sensor (state detection means), 62 ... Peltier element (state change means), 100, 200 ... image display 300, monitor device, 311 ... camera (imaging means)

In order to achieve the above object, the present invention provides the following means.
The light source device of the present invention includes a plurality of light emitting elements that emit light, and a plurality of light selection regions in which selection is performed for light emitted from the plurality of light emitting elements, and the light emitted from the plurality of light emitting elements. A wavelength selection element for selectively reflecting the selected light, a state detection unit for detecting a state of the plurality of light selection regions of the wavelength selection element, and a state of the plurality of light selection regions detected by the state detection unit And a state changing unit that changes a state of the light selection region of the wavelength selection element so that wavelengths of light selected by the plurality of light selection regions are different from each other.
The light source device of the present invention includes a plurality of light emitting elements that emit light, and a plurality of light selection regions in which selection is performed for light emitted from the plurality of light emitting elements, and the light emitted from the plurality of light emitting elements. A wavelength selection element for selectively reflecting the selected light, a state detection unit for detecting a state of the plurality of light selection regions of the wavelength selection element, and a state of the plurality of light selection regions detected by the state detection unit And a state changing unit that changes a state of the light selection region of the wavelength selection element so that wavelengths of light selected by the plurality of light selection regions are different from each other. A strain detection means for detecting the magnitude of distortion in the light selection region of the wavelength selection element, wherein the state change means selects the light of the wavelength selection element according to the magnitude of the strain detected by the distortion detection means; Territory Characterized in that it is a distortion imparting means for varying the size of the body to another.

Claims (16)

A plurality of light emitting elements that emit light;
A wavelength selection element that has a plurality of light selection regions each of which is selected for light emitted from the plurality of light emitting elements, and selectively reflects the light emitted from the plurality of light emitting elements;
State detection means for detecting the state of a plurality of light selection regions of the wavelength selection element;
The state of the light selection region of the wavelength selection element is set so that the wavelengths of light selected by the plurality of light selection regions differ from each other according to the state of the plurality of light selection regions detected by the state detection means. A light source device comprising: state changing means for changing.   The light source device according to claim 1, wherein the state detection unit and the state change unit are provided for each light selection region of the wavelength selection element.   3. The light source device according to claim 1, wherein the state changing unit temporally changes the states of the plurality of light selection regions. Light intensity detecting means for detecting the intensity of light emitted from the plurality of light selection regions,
The intensity of light emitted from the plurality of light emitting elements is respectively adjusted based on the intensity of light detected by the light intensity detecting means. The light source device described. The state detection means is a temperature detection means for detecting the temperature of the light selection region of the wavelength selection element;
5. The temperature change means for changing the temperature of the light selection region of the wavelength selection element according to the temperature detected by the temperature detection means. The light source device according to any one of the above. The state detection means is a distortion detection means for detecting the magnitude of distortion of the light selection region of the wavelength selection element;
The state changing unit is a strain applying unit that varies the magnitude of strain in the light selection region of the wavelength selection element according to the magnitude of strain detected by the strain detection unit. The light source device according to any one of claims 1 to 4. A plurality of light emitting elements that emit light;
A wavelength having a plurality of light passing regions through which light emitted from the plurality of light emitting elements respectively passes, and converting at least some of the wavelengths emitted from the plurality of light emitting elements to predetermined wavelengths, respectively A conversion element;
A plurality of light selection regions each for selecting light emitted from a plurality of light passage regions of the wavelength conversion element, and selectively reflecting the light emitted from the wavelength conversion element toward the light emitting element; A wavelength selective element;
Conversion-side state detection means for detecting states of a plurality of light passage regions of the wavelength conversion element;
Depending on the state of the plurality of light passage regions detected by the conversion side state detection means, the wavelength of the light passage region of the wavelength conversion element is different so that the wavelengths of the light converted by the plurality of light passage regions are different from each other. Conversion-side state changing means for changing the state;
Selection-side state detection means for detecting states of a plurality of light selection regions of the wavelength selection element;
Depending on the state of the plurality of light selection regions detected by the selection side state detection means, the wavelength of the light selection region of the wavelength selection element is different so that the wavelengths of light selected by the plurality of light selection regions are different from each other. A light source device comprising: a selection-side state changing unit that changes a state. The conversion side state detection means and the conversion side state change means are provided for each light passage region of the wavelength conversion element, respectively.
The selection side state detection unit and the selection side state change unit are provided for each light selection region of the wavelength selection element, respectively.
The conversion side state changing means and the selection side state changing means change the conversion wavelength of each light passage region of the wavelength conversion element and the selection wavelength of each light selection region of the wavelength selection element to substantially coincide with each other. The light source device according to claim 7, wherein the state of each region is changed.   9. The light source device according to claim 7, wherein at least one of the state of the plurality of light passage regions and the state of the plurality of light selection regions is temporally changed. Light intensity detecting means for detecting the intensity of light emitted from the plurality of light selection regions,
The intensity of light emitted from the plurality of light emitting elements is adjusted based on the intensity of light detected by the light intensity detection unit, respectively. The light source device described. The wavelength conversion element has a repeating structure of domains in which polarizations are reversed from each other along a central axis of light emitted from the plurality of light emitting elements.
The conversion-side state detection means is a voltage detection means for detecting a voltage in a light passage region of the wavelength conversion element;
8. The conversion side state changing unit is a voltage applying unit that changes a voltage applied to a light passage region of the wavelength conversion element according to a voltage detected by the voltage detecting unit. The light source device according to claim 10. The selection-side state detection means is a temperature detection means for detecting a temperature of a light selection region of the wavelength selection element;
8. The temperature change means for changing the temperature of the light selection region of the wavelength selection element from each other according to the temperature detected by the temperature detection means. Item 12. The light source device according to any one of Items 11. The selection-side state detection means is a distortion detection means for detecting the magnitude of distortion in the light selection region of the wavelength selection element;
The selection-side state changing unit is a strain applying unit that varies the magnitude of strain in the light selection region of the wavelength selection element according to the magnitude of strain detected by the strain detection unit. The light source device according to any one of claims 7 to 11. The light source device according to any one of claims 1 to 13,
A light modulation device that modulates light emitted from the light source device in accordance with an image signal;
An image display device comprising: a projection device that projects an image formed by the light modulation device. The light source device according to any one of claims 1 to 13,
An image display device comprising: scanning means for scanning light emitted from the light source device on a projection surface. The light source device according to any one of claims 1 to 13,
A monitor device comprising: an imaging unit that images a subject irradiated by the light source device.

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