JP2012036737A - Diaphragm pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the followability of a diaphragm and allow for improvement in fixed-quantity conveyability of conveyed fluid.SOLUTION: A diaphragm pump includes a pump chamber 2 partitioned by a diaphragm 1 placed inside into a working-fluid chamber 2a supplied with working fluid for reciprocating deformation of the diaphragm 1, and a conveyed-fluid chamber 2b with conveyed fluid sucked therein and discharged therefrom, wherein a wall section on the side of the working-fluid chamber 2a in the pump chamber 2 is formed so as to be along a surface shape of the diaphragm 1 facing the wall section.

Description

  The present invention relates to a diaphragm pump that conveys fluid by reciprocatingly deforming a diaphragm disposed in a pump chamber by pressure fluctuation of a working fluid.

  Conventionally, as shown in FIG. 9, as a pump for conveying a fluid, a diaphragm 100 is incorporated in a container 200 and the inside of the container 200 is divided into two chambers. As a result, the carrier fluid is sucked into the other chamber, while the working fluid is pressurized and supplied to one of the negative chambers, and the diaphragm 100 is pushed out by the pressure of the supplied working fluid. A diaphragm pump configured to quantitatively convey the carrier fluid by discharging the carrier fluid to the outside and alternately repeating the suction operation and the discharge operation of the carrier fluid is known (Patent Document). 1).

JP 2001-193658 A

  However, the conventional diaphragm pump has a problem of compressibility of the working fluid. That is, when considering a discharge operation in which the working fluid is pressurized and supplied to one chamber to deform the diaphragm to the other chamber side, and the carrier fluid in the other chamber is discharged to the outside by the deformation of the diaphragm, If the fluid is not compressible, the diaphragm can be linearly deformed. However, since the working fluid is compressible, the volume is slightly reduced due to the compressibility of the working fluid. This is a loss in deforming the diaphragm, and it is a problem that the diaphragm cannot be deformed linearly. Such a problem causes a problem that the followability of the diaphragm that sucks and discharges the transport fluid is lowered, thereby reducing the quantitative transportability of the transport fluid.

  In view of the above problems, an object of the present invention is to provide a diaphragm pump that can improve the followability of the diaphragm and improve the quantitative conveyance performance of the conveyance fluid.

  In order to solve the above-described problems, a diaphragm pump according to the present invention includes a working fluid chamber 2a to which a working fluid for reciprocatingly deforming the diaphragm 1 is supplied by a diaphragm 1 disposed therein, and a carrier fluid. In a diaphragm pump having a pump chamber 2 that is divided into a carrier fluid chamber 2b through which fluid is sucked and discharged, the wall portion on the side of the working fluid chamber 2a in the pump chamber 2 follows the surface shape of the diaphragm 1 facing the diaphragm pump. It is formed in this.

  In this case, since the wall portion on the working fluid chamber 2a side in the pump chamber 2 is formed along the surface shape of the diaphragm 1 facing the pump chamber 2, the volume of the working fluid chamber 2a is reduced, and the operation in the working fluid chamber 2a is performed. The amount of fluid is reduced. And the influence of the compressibility becomes less because the amount of the working fluid is reduced. Therefore, even if the working fluid has compressibility, the operability (followability) of the diaphragm 1 is improved. That is, the quantitative transportability of the transport fluid can be improved.

  In another diaphragm pump according to the present invention, a working fluid chamber 2a to which a working fluid for reciprocatingly deforming the diaphragm 1 is supplied by a diaphragm 1 disposed therein, and a carrier fluid are sucked and discharged. In the diaphragm pump provided with the pump chamber 2 partitioned into the transport fluid chamber 2b, the wall portion on the side of the transport fluid chamber 2b in the pump chamber 2 is formed so as to follow the surface shape of the diaphragm 1 opposed thereto. It is characterized by.

  In this case, since the wall portion on the side of the transfer fluid chamber 2b in the pump chamber 2 is formed along the surface shape of the diaphragm 1 facing the pump chamber 2, the volume of the transfer fluid chamber 2b is reduced, and the transfer in the transfer fluid chamber 2b is performed. The amount of fluid is reduced. And the influence of the compressibility becomes less because the amount of the carrier fluid is reduced. Therefore, even if the transport fluid has compressibility, the suction / discharge performance (follow-up performance) of the transport fluid is improved. That is, the quantitative transportability of the transport fluid can be improved.

  In another diaphragm pump according to the present invention, a working fluid chamber 2a to which a working fluid for reciprocatingly deforming the diaphragm 1 is supplied by a diaphragm 1 disposed therein, and a carrier fluid are sucked and discharged. In a diaphragm pump having a pump chamber 2 partitioned into a transport fluid chamber 2b, the wall portions of the pump chamber 2 on the working fluid chamber 2a side and the transport fluid chamber 2b side are in line with the surface shape of the diaphragm 1 facing each other. It is formed in this.

  In this case, since the wall portions on the working fluid chamber 2a side and the transport fluid chamber 2b side in the pump chamber 2 are formed along the surface shapes of the diaphragms 1 facing each other, the volumes of the working fluid chamber 2a and the transport fluid chamber 2b are formed. And the amount of working fluid in the working fluid chamber 2a and the amount of transport fluid in the transport fluid chamber 2b are reduced. For this reason, the fixed quantity conveyance property of a conveyance fluid can be improved further.

  In addition, according to the present invention, the configuration is such that at least one of the wall portions on the working fluid chamber 2a side and the transport fluid chamber 2b side of the pump chamber 2 has a wave shape formed concentrically from the center. It can also be adopted.

  In this case, since at least one wall portion of the pump chamber 2 on the working fluid chamber 2a side and the transport fluid chamber 2b side is formed so as to follow the wave shape that is the surface shape of the diaphragm 1, the working fluid and The amount of at least one of the carrier fluids is reduced, and the influence of the compressibility is reduced. Further, since the diaphragm surface shape is a wave shape, rigidity is imparted to the diaphragm, the diaphragm 1 can be linearly deformed, and the loss due to the deformation of the diaphragm 1 caused by the compressibility of the fluid is reduced. It can be greatly reduced. That is, the quantitative transportability of the transport fluid is further improved.

  According to the present invention, at least one of the walls of the working fluid chamber side and the carrier fluid chamber side of the pump chamber partitioned by the diaphragm is formed so as to follow the surface shape of the diaphragm facing the pump chamber. The amount of at least one of the fluid and the transport fluid is reduced, and as a result, there is an effect that the quantitative transportability of the transport fluid can be improved.

The front view of the diaphragm pump which concerns on one Embodiment of this invention. The enlarged view of the pump chamber by which the wall part by the side of the working fluid chamber was formed in the waveform. (A), (b) is a figure which shows the nonreturn valve of a discharge side and a suction side. The enlarged view of the driving force supply part of FIG. The enlarged view of the pump chamber by which the wall part by the side of the working fluid chamber was formed in the waveform. The enlarged view of the pump chamber in which the wall part by the side of the working fluid chamber and the conveyance fluid chamber was formed in the waveform. The enlarged view of the pump chamber in which the wall part by the side of the working fluid chamber was formed in the wave shape (triangular wave shape) of a cross section triangle. The enlarged view of the pump chamber in which the wall part by the side of the working fluid chamber was formed in the wave shape (rectangular wave shape) of a cross-sectional square shape (a square shape and a trapezoid are included). The figure which shows the state which a diaphragm deform | transforms by supply of the pressurized working fluid in the conventional diaphragm pump.

  Hereinafter, a diaphragm pump according to an embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the diaphragm pump (one form of reciprocating pump) conveys fluid by periodically elastically deforming (reciprocating deformation) the two diaphragms 1, 1. This diaphragm has two right and left fluid conveying parts 10 and 10 each having the diaphragms 1 and 1 inside, and a working fluid (hydraulic oil in the present embodiment) at an appropriate timing to drive the diaphragms 1 and 1. A driving force supply unit 40 that supplies the fluid conveyance units 10 and 10, an electric motor that generates a rotational motion, and a driving unit 50 that includes a gear and the like for transmitting the rotational force of the electric motor to the driving force supply unit 40. ing.

  Each diaphragm 1 has a substantially circular shape in a plan view, a plurality of concentric annular recesses are formed concentrically, and a side section has an arc shape, that is, a wave shape like a sine wave shown in FIG. By doing so, the intensity | strength which can fully endure elastically deforming with the high pressure of a working fluid is ensured. The diaphragm 1 is made of, for example, a metal having a low Young's modulus and a high elastic deformability (for example, a titanium alloy), has good durability and corrosion resistance, and has a reduced manufacturing cost.

  The fluid transport units 10 and 10 are provided between the working fluid supply units 31 and 31 and the left and right working fluid supply units 31 and 31 for supplying the working fluid from the driving force supply unit 40 to the diaphragms 1 and 1. Pressure adjustment for discharging the gas mixed in the working fluid in the provided pump head 32 and the working fluid supply parts 31 and 31 to the outside and maintaining the pressure in the working fluid restriction chambers 5 and 5 described later in an appropriate state A mechanism 20 is provided. Each fluid conveyance part 10 and 10 is comprised by clamping each diaphragm 1 and 1 using the pump head 32 and the right and left working fluid supply parts 31 and 31. FIG.

  A pump chamber 2 is configured using the working fluid supply unit 31 and the pump head 32, and the above-described diaphragm 1 is provided inside the pump chamber 2.

  As shown in FIG. 2, the inside of the pump chamber 2 is partitioned by a diaphragm 1 into a working fluid chamber 2a to which a working fluid is supplied and a carrier fluid chamber 2b to which a carrier fluid is sucked and discharged. . The diaphragm 1 is elastically deformed by supplying the working fluid and the transport fluid, but the volume change between the working fluid chamber 2a and the transport fluid chamber 2b is smaller than that in the case of FIG. This is because the wall portion on the working fluid chamber 2a side is formed in a wave shape so as to follow the surface shape (wave shape) of the diaphragm 1 opposed to the wall portion. By doing so, the volume of the working fluid chamber 2a defined by the wall portion on the working fluid chamber 2a side and the surface shape of the diaphragm 1 facing the wall portion is reduced, and the amount of working fluid in the working fluid chamber 2a is small. Become. And the influence of the compressibility becomes less because the amount of the working fluid is reduced. Therefore, even if the working fluid has compressibility, the operability (followability) of the diaphragm 1 is improved. That is, the quantitative conveyance property of the conveyance fluid is improved. This is more effective as the pressure applied to the working fluid becomes higher, and this point is suitable for a high-pressure pump.

  In each of the working fluid supply sections 31, 31, there is provided a working fluid restriction chamber 5 having valve bodies 3, 3 connected to the diaphragms 1, 1, and valve seats 4, 4 corresponding thereto.

  Further, the pump head 32 is provided with a suction-side check valve 33 that functions to suck the transport fluid and a discharge-side check valve 34 that functions to discharge the transport fluid. The fluid flows into the transport fluid chamber 2b of the pump chamber 2 through the suction path 33a and the suction side check valve 33, and is discharged to a predetermined transport path through the discharge side check valve 34 and the discharge path 34a.

  Here, for the reason why the suction-side check valve 33 and the discharge-side check valve 34 are arranged near the pump chamber 2 and the inventive idea when they are arranged, refer to FIGS. (Hereinafter, it may be simply referred to as a check valve). The reason for disposing near the pump chamber 2 is to reduce the amount of transport fluid between the check valves 33 and 34. In order to bring the check valves 33 and 34 as close as possible to the pump chamber 2, an insertion hole is formed in the pump head 32 in the vicinity of the pump chamber 2, and the check valves 33 and 34 are inserted into the deepest portion of the insertion hole. However, it is difficult to take out the check valves 33 and 34 from the insertion hole during maintenance. That is, the discharge-side check valve 34 is inserted from the top to the bottom with respect to the pump head 32 because of its structure (a structure in which the valve body is lowered by its own weight and is closed). It becomes difficult to take out. On the other hand, the suction side check valve 33 is fixed to the deepest part of the insertion hole, and similarly to the above, it is difficult to take out from the insertion hole.

  Therefore, as shown in FIG. 1, insertion holes 320 for the check valves 33 and 34 are formed at both left and right ends of the pump head 32, and communicate with the flow paths 33 a and 34 a of the check valves 33 and 34. The substantially cylindrical insert 330 in which the communication channel 331 is formed is inserted into the insertion hole 320 of the pump head 32. The insertion body 330 is formed with a recess 332 into which the check valves 33 and 34 having a diameter larger than that of the communication channel 331 are inserted and removed at the opening end, and an annular wall is formed on the opening side of the recess 332. A groove 333 is formed. The groove 333 is formed so as to open larger toward the deepest portion, and in the deepest portion, an annular locking body 335 that is in close contact with the outer peripheral surface of the check valves 33 and 34 can be fitted.

  Then, the insertion body 330 in which the locking body 335 is inserted is inserted into the insertion hole 320 of the pump head 32. At this time, since the length of the insertion body 330 is shorter than the depth of the insertion hole 320, the insertion body 330 is inserted so as to be buried in the insertion hole 320 as shown in FIG. That is, the distal end portion of the insert 330 is positioned lower than the open end of the insert hole 320 in a state where the base end of the insert 330 is in contact with the bottom of the insert hole 320. When the check valves 33 and 34 are inserted into the insertion body 330 in this state, the check valves 33 and 34 are inserted so as to slightly expand the inner diameter of the locking body 335, and the check valves 33 and 34 and the insertion body 330 are inserted. Are integrated by the close contact of the locking body 335. And since the depth of the recessed part 332 is smaller than the length of the check valves 33 and 34, the edge part of the check valves 33 and 34 comes to protrude a little. By doing so, the check valves 33 and 34 are set so as to be close to the pump chamber 2. On the other hand, when the check valves 33 and 34 are taken out from the insertion hole 320 during maintenance, as shown in FIG. The ends of the check valves 33 and 34 protruding from the insert 330 are picked, and the check valves 33 and 34 and the insert 330 are pulled out. At this time, as described above, since the locking body 335 is in close contact with the outer peripheral surface of the check valves 33 and 34, the locking is performed by pulling out the check valves 33 and 34 as shown in FIG. Although the body 335 tries to move upward as the check valves 33 and 34 move, the shape of the groove 333 becomes narrower toward the opening end, so that the locking body 335 is connected to the check valves 33 and 34. 34 and the inner wall of the groove 333 of the insert 330 are pressed against each other and deformed into a triangular shape, so that the locking body 335 plays a wedge-like role, and the check valves 33 and 34 and the insert 330 can be integrally removed from the insertion hole 320. As described above, the check valves 33 and 34 are arranged near the pump chamber 2 to reduce the amount of the transport fluid between the check valves 33 and 34 and to facilitate attachment and detachment during maintenance. Can do.

  Returning to FIG. 1, in the pump chamber 2, the diaphragms 1, 1 receive the driving force from the driving unit 50 via the driving force supply unit 40, and the diaphragms 1, 1 reciprocate based on this driving force. It is configured accordingly. Specifically, the driving force supply unit 40 and the working fluid supply units 31 and 31 communicate with each other via the working fluid piping units 35 and 35, and the inside of the working fluid piping units 35 and 35 and the working fluid supply units 31 and 31 are The diaphragm is filled with the working fluid, and the reciprocating motion of the piston portions 43 and 44 of the driving force supply unit 40 described later is performed through the working fluid in the working fluid piping units 35 and 35 and the working fluid supply units 31 and 31. 1 and 1 are transmitted.

  The valve bodies 3, 3 in the respective working fluid restriction chambers 5, 5 are attached to the valve body support portions 6, 6 via biasing means 7, 7 such as coil springs, and the working fluid restriction chambers 5, 5 It is fixed to shafts 8 and 8 communicating with the pump chambers 2 and 2.

  One end of each shaft 8, 8 is in contact with the surface of the diaphragm 1, 1 on the working fluid restriction chamber 5, 5 side, and the diaphragm 1, 1 side through the biasing means 7, 7 and the valve bodies 3, 3. It has come to be energized.

  Between the working fluid restriction chambers 5, 5 and the pump chambers 2, 2 are provided shaft support portions 9, 9 that support the shafts 8, 8. A through hole (not shown) for allowing the working fluid to flow from the restriction chambers 5 and 5 to the pump chambers 2 and 2 is formed.

  Due to the working fluid restriction chambers 5 and 5 having the above-described configuration, the diaphragms 1 and 1 are elastically deformed by the working fluid flowing into the working fluid supply units 31 and 31 via the working fluid piping portions 35 and 35 and reciprocate predeterminedly. Sometimes, the valve body 3 reciprocates together with the diaphragms 1 and 1. When an excessive pressure is applied to the working fluid restriction chambers 5 and 5, the valve body 3 moves and comes into contact with the valve seat 4.

  Thus, the working fluid restriction chambers 5 and 5 can prevent the diaphragms 1 and 1 from being damaged by preventing excessive pressure from being applied to the diaphragms 1 and 1. A pressure adjusting mechanism 20 is provided between the working fluid restriction chambers 5 and 5 and the driving force supply unit 40, and when a pressure more than necessary is applied to the working fluid restriction chambers 5 and 5, The pressure adjusting mechanism 20 can discharge a predetermined amount of working fluid and maintain the pressure in an appropriate state.

  In this diaphragm pump, the pump chambers 2 and 2 and the working fluid restriction chambers 5 and 5 are formed. Therefore, when a gas such as air is mixed in the working fluid, the gas is placed at the top of each chamber 2 and 5. May accumulate. In that case, in order to discharge the gas in the pump chambers 2 and 2 and the working fluid restriction chambers 5 and 5 appropriately, the pressure adjusting mechanism 20 is provided in the diaphragm pump. The pressure adjusting mechanism 20 is discharged through a first fluid discharge path 21 provided in the working fluid restriction chamber 5, a second fluid discharge path 22 provided in the pump chamber 2, and these fluid discharge paths 21 and 22. A pressure adjusting unit 25 for adjusting the pressure of the gas and the working fluid is provided.

  One end of the first fluid discharge path 21 is provided at a position above the valve seat 4 in the working fluid restriction chamber 5 on the working fluid piping section 35 side, and the first fluid discharge path 22 has one end thereof. Is provided at an upper position between the diaphragm 1 and the valve seat 4 in the pump chamber 2.

  The other ends of the fluid discharge paths 21 and 22 are provided close to each other so as to communicate with a communication part 24 formed between the pressure adjustment mechanism 20 and the working fluid supply part 31. Furthermore, ball bodies 23 and 23 (backflow prevention bodies) for preventing backflow are provided on the first fluid discharge path 21 and the second fluid discharge path 22, respectively.

  The pressure adjusting unit 25 has a hexagonal cylindrical body 25a at the upper end opening and a hexagonal shaft part, and is inserted into the upper end opening of the cylindrical body 25a so as to be movable up and down inside the cylindrical body 25a. The shaft 26 and the spring 27 externally inserted into the shaft 26 are press-fitted into a pair of spring receivers (not shown) provided to urge the shaft 26 downward and a lower end portion of the shaft 26. The ball body 28 is integrated with the shaft 26, and the cylinder 25 a and a protective cover 29 that is screwed onto the upper end of the shaft 26. Further, the pressure adjusting units 25 and 25 are connected to a working fluid recovery tank (not shown) via a fluid discharge piping unit 36.

  Here, the operation of the pressure adjustment mechanism 20 will be briefly described. The pressure adjusting mechanism 20 functions as a gas discharge valve and a relief valve. First, the operation of the pressure adjustment mechanism 20 as a gas discharge valve will be described. When gas is mixed into the pump chamber 2 and the working fluid restriction chamber 5, the ball bodies 23 and 23 are pushed up through the first fluid discharge path 21 and the second fluid discharge path 22. At this time, if the protective cover 29 is rotated in the tightening direction, the shaft 26 moves up against the urging force of the spring, and the ball body 28 integrated with the shaft 26 is separated from the valve seat, and the gas is removed. Is discharged to the outside through the inside of the cylindrical body 25a. Further, the working fluid that overflows with the discharge of the gas is collected in a working fluid collection tank (not shown) through the fluid discharge pipe section 36.

  Next, the operation of the pressure adjustment mechanism 20 as a relief valve will be described. When an excessive pressure is applied to the working fluid restriction chambers 5 and 5, the ball body 28 is pushed up against the urging force of the spring 27 by this pressure, and a predetermined amount of working fluid is discharged and the working fluid restriction chamber is discharged. A pressure of 5 or 5 is maintained in an appropriate state.

  As shown in FIGS. 1 and 4, the driving force supply unit 40 includes a driving force transmission shaft 41 that receives a driving force from the gear mechanism of the driving unit, an eccentric cam 42 attached to the driving force transmission shaft 41, and A piston part (first piston part 43 and second piston part 44) that reciprocates according to the movement of the eccentric cam 42, and a first rotating shaft 45 supported by an inner ring of a bearing 47 in the first piston part 43. And the second rotating shaft 46 supported by the inner ring of the bearing 48 in the second piston portion 44, and the first piston portion 43 and the second piston portion 44 are appropriately biased in the second piston portion 44. Then, the position restricting / biasing means 49 that is an adjusting means that functions to bring the rotating shafts 45, 46 provided in the piston portions 43, 44 into contact with the eccentric cam 42, and these elements are included. With the casing 55 etc. It is configured. And in the driving force supply part 40 which has the above elements, the working fluid is filled in the sealed space between the inner wall of the casing 55 and the piston parts 43 and 44.

  In the driving force supply unit 40, the second piston portion 44 is formed in a hollow shape. That is, the second piston portion 44 is formed so that the driving force transmission shaft 41, the eccentric cam 42, the first piston portion 43, the bearing 48, the position restriction biasing means 49, and the like can be included therein. .

  A position restriction urging means 49 is sandwiched between the wall portion (inner surface portion) of the second piston portion 44 and the outer wall portion (outer surface portion) of the first piston portion 43. In other words, the first piston portion 43 and the second piston portion 44 are biased in the direction in which the eccentric cam 42 is positioned by the position regulation biasing means 49. In other words, the position restricting and biasing means 49 always causes the first rotating shaft 45 in the first piston portion 43 and the second rotating shaft 45 in the second piston portion 44 to always have the outer periphery of the eccentric cam 42. It will be properly biased to contact the surface.

  In addition, according to the movement of the first piston portion 43 and the second piston portion 44, the working fluid is supplied to a working fluid recovery tank (not shown) through the fluid discharge piping portion 36 provided in the driving force supply portion 40 and the gas discharge mechanism 20. Although recovered, the driving force supply unit 40 includes auxiliary plunger mechanisms 60 and 60 and working fluid supply valves 70 and 70 in order to prevent the driving force from being reduced.

  The drive unit 50 includes a motor (not shown) and a gear mechanism unit 52 including a worm gear 53 that transmits the rotational force of the drive shaft of the motor to the drive force transmission shaft 41.

  The auxiliary plunger mechanisms 60, 60 are provided with a bellows 61 extrapolated, and a chamber 62 having a small inner volume partitioned by the bellows 61 is filled with a working fluid (working oil) having a low compressibility, and has an outer volume. The large chamber 63 is filled with a normal (slightly high compressibility) working fluid (working oil). The inner chamber 62 communicates with the working fluid piping section 35 so that a low-compressible working fluid is supplied to the diaphragm 1 via the working fluid piping section 35. That is, since the compressibility is low, an expensive working fluid (working oil) is supplied to the diaphragm 1 while being minimized. In other words, the diaphragm 1 can reliably press the transport fluid although it has a short stroke, and can follow the suction / discharge operation accurately. Further, the diaphragm 1 has a long life that can sufficiently withstand its shape and material even when such an operation is repeated.

  Next, the operation of the diaphragm pump according to the present embodiment will be described. During normal operation, it functions as follows. This diaphragm pump first rotates the electric motor of the drive unit and transmits this rotational force to the drive force transmission shaft 41 via a gear.

  Next, the eccentric cam 42 is rotated by the driving force transmission shaft 41, and the first and second piston portions 43 and 44 are reciprocated by the rotation of the eccentric cam 42. Here, based on the above-described configuration, the first piston portion 43 and the second piston portion 44 reciprocate integrally with one eccentric cam 42. Then, a reciprocating motion of the piston portions 43 and 44 causes a predetermined force and pressure to act on the working fluid, and the working fluid is sent to and discharged from the piping portions 35 and 35.

  Next, based on the pressure of the working fluid flowing through the piping parts 35, 35, the diaphragms 1, 1 reciprocate at an appropriate timing, and the movement of the diaphragms 1, 1 causes the suction side check valve 33 and The discharge-side check valve 34 is actuated to transport a desired liquid. At this time, the surface shape of the diaphragms 1, 1 is a wave shape, and the wall portion on the working fluid chamber 2 a side of the pump chamber 2 is formed so as to follow the surface shape of the diaphragm facing this, The volume of the working fluid chamber 2a divided by the wall portion of the working fluid chamber 2a and the surface shape portion of the diaphragm facing the working fluid chamber 2a is smaller than that in the case of FIG. Therefore, the amount of the working fluid in the working fluid chamber 2a is reduced, and the influence of the compressibility is reduced, so that reliable supply of the transport fluid is realized.

  During normal operation, the diaphragm pump according to the present embodiment can transport the desired fluid quantitatively by causing the constituent elements to function as described above and causing the diaphragms 1 and 1 to reciprocate repeatedly. It becomes possible. In addition, this diaphragm pump can convey a fluid without pulsation by making two diaphragms 1 and 1 reciprocate.

  In addition, this invention is not limited to said embodiment, A various change and deformation | transformation are possible.

  In the case of the above embodiment, the wall portion on the working fluid chamber 2a side in the pump chamber 2 is waved so as to follow the surface shape of the diaphragm 1 facing the pump chamber 2, but as shown in FIG. You may form the wall part of a side so that the surface shape of the diaphragm 1 which opposes this may be followed. In this case, since the amount of the transport fluid between the suction side check valve 33 and the discharge side check valve 34 is reduced, the amount of compression of the transport fluid can be suppressed, and the quantitative transportability of the transport fluid can be improved. .

  Further, as shown in FIG. 6, the wall portions on the working fluid chamber 2 a side and the transport fluid chamber 2 b side may be formed along the surface shape of the diaphragm 1. In this case, since the amount of working fluid in the working fluid chamber 2a and the amount of transport fluid between the suction side check valve 33 and the discharge side check valve 34 are reduced, the quantitative transportability of the transport fluid is further improved. Can be improved.

  Further, in the case of the above embodiment, the wall portion on the working fluid chamber 2a side and the surface shape of the diaphragm 1 are formed in a wave shape having a circular cross section, but the wall portion on the working fluid chamber 2a side and the diaphragm 1 The surface shape may be a wave shape having a triangular cross section as shown in FIG. 7, or may be a wave shape having a square cross section (including square and trapezoid) as shown in FIG.

  DESCRIPTION OF SYMBOLS 1 ... Diaphragm, 1a ... Surface shape part, 2 ... Pump chamber, 2a ... Working fluid chamber, 2b ... Transfer fluid chamber, 3 ... Valve body, 4 ... Valve seat, 5 ... Working fluid restriction chamber, 6 ... Valve body support part , 7 ... biasing means, 8 ... shaft, 9 ... shaft support part, 10 ... fluid conveying part, 20 ... pressure adjusting mechanism, 21 ... first fluid discharge path, 22 ... second fluid discharge path, 23 ... ball body, 24 ... Communication part, 25 ... Pressure adjustment part, 25a ... Cylinder, 26 ... Shaft, 27 ... Spring, 28 ... Ball body, 29 ... Protective cover, 31 ... Working fluid supply part, 32 ... Pump head, 33 ... Suction side Check valve, 34 ... discharge-side check valve, 35 ... working fluid piping section, 36 ... fluid discharge piping section, 37 ... relief mechanism, 40 ... driving force supply section, 41 ... driving force transmission shaft, 42 ... eccentric cam, 43 ... 1st piston part, 44 ... 2nd piston part, 45 ... 1st rotating shaft, 4 ... second rotating shaft, 47 ... bearing, 48 ... bearing, 49 ... position restricting biasing means, 50 ... drive part, 51 ... motor, 52 ... gear mechanism part, 53 ... worm gear, 55 ... casing, 60 ... auxiliary plunger Mechanism, 70 ... Working fluid supply valve

Claims (4)

A working fluid chamber (2a) to which a working fluid for reciprocating deformation of the diaphragm (1) is supplied by a diaphragm (1) disposed therein, and a carrier fluid chamber (2b) from which a carrier fluid is sucked and discharged In a diaphragm pump provided with a pump chamber (2) partitioned into
A diaphragm pump characterized in that a wall portion on the working fluid chamber (2a) side in the pump chamber (2) is formed so as to follow the surface shape of the diaphragm (1) opposed to the wall portion. A working fluid chamber (2a) to which a working fluid for reciprocating deformation of the diaphragm (1) is supplied by a diaphragm (1) disposed therein, and a carrier fluid chamber (2b) from which a carrier fluid is sucked and discharged In a diaphragm pump provided with a pump chamber (2) partitioned into
A diaphragm pump characterized in that a wall portion on the side of the carrier fluid chamber (2b) in the pump chamber (2) is formed so as to follow the surface shape of the diaphragm (1) opposed to the wall portion. A working fluid chamber (2a) to which a working fluid for reciprocating deformation of the diaphragm (1) is supplied by a diaphragm (1) disposed therein, and a carrier fluid chamber (2b) from which a carrier fluid is sucked and discharged In a diaphragm pump provided with a pump chamber (2) partitioned into
Diaphragm pumps characterized in that the working fluid chamber (2a) side and the carrier fluid chamber (2b) side walls of the pump chamber (2) are formed so as to follow the surface shape of the opposing diaphragm (1). .   The wall portion of at least one of the working fluid chamber (2a) side and the transport fluid chamber (2b) side of the pump chamber (2) has a wave shape formed concentrically from the center. Item 4. The diaphragm pump according to any one of Items 1 to 3.

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