JP2012019243A - Group iii nitride semiconductor laser element, and method of manufacturing group iii nitride semiconductor laser element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a group III nitride semiconductor laser element having a long service life of the element.SOLUTION: A group III nitride semiconductor laser element 11 has a laser waveguide extending in a direction of a line of an intersection between an m-n plane and a semipolar plane 17a. First and second end surfaces 26, 28 to form a laser resonator are provided on both ends of the laser waveguide. The first and second end surfaces 26, 28 intersect the m-n plane (or an a-n plane). A c+ axis vector forms an acute angle with a waveguide vector WV. The waveguide vector WV corresponds to a direction from the second end surface 28 to the first end surface 26. The thickness of a second dielectric multilayer film (C- side) 43b on the second end surface 28 is smaller than the thickness of a first dielectric multilayer film (C+ side) 43a on the first end surface 26.

Description

  The present invention relates to a group III nitride semiconductor laser device and a method for manufacturing a group III nitride semiconductor laser device.

  Non-Patent Document 1 describes a laser diode fabricated on an m-plane GaN substrate. The laser diode has two cleaved end faces for the resonator. One cleaved end face is a + c plane, and the other cleaved end face is a -c plane. In this laser diode, the reflectance of the dielectric multilayer film on the front side end face (outgoing face) is 70%, and the reflectance of the dielectric multilayer film on the rear side end face is 99%.

  Non-Patent Document 2 describes a laser diode manufactured on a GaN substrate inclined at an angle of 1 degree in the −c axis direction from the m-plane. The laser diode has two cleaved end faces for the resonator. One cleaved end face is a + c plane, and the other cleaved end face is a -c plane. In this laser diode, the reflectance of the dielectric multilayer film on the front side end face (outgoing face) is 90%, and the reflectance of the dielectric multilayer film on the rear side end face is 95%.

APPLIEDPHYSICS LETTERS 94, (2009), 071105 AppliedPhysics Express 2, (2009), 082102

  A light emitting element is fabricated on a semipolar surface of a gallium nitride substrate. In the gallium nitride surface exhibiting semipolarity, the c-axis of gallium nitride is inclined with respect to the normal line of the semipolar surface of the gallium nitride substrate. In manufacturing a semiconductor laser using a semipolar surface of gallium nitride, when the c-axis of gallium nitride is inclined in the extending direction of the waveguide of the semiconductor laser, an end face usable for the resonator can be formed. A dielectric multilayer film having a desired reflectance is formed on these end faces to form a resonator. The thicknesses of the dielectric multilayer films on both end faces are different from each other in order to obtain dielectric multilayer films having different reflectivities. Since the laser light is emitted from the front end face, the reflectance of the dielectric multilayer film on the front end face is made smaller than the reflectance of the dielectric multilayer film on the rear end face.

  According to the experiments by the inventors, when several semiconductor lasers are manufactured as described above, the element lifetimes of these semiconductor lasers are various, and the reason for the long element lifetime and the reason for the short element lifetime are clear. It wasn't. As a result of studying this point, the inventors have found that the crystal orientation of the semiconductor end face for the resonator is related to the thickness of the dielectric multilayer layer.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a group III nitride semiconductor laser device having a long device life and to produce a group III nitride semiconductor laser device having a long device life. It aims to provide a way to do.

  A group III nitride semiconductor laser device according to one aspect of the present invention is provided on (a) a support base having a semipolar main surface made of a group III nitride semiconductor, and the semipolar main surface of the support base. A laser structure including a semiconductor region; and (b) first and second dielectric multilayers provided on first and second end faces of the semiconductor region, respectively, for the resonator of the nitride semiconductor laser diode. And a membrane. The semiconductor region includes a first cladding layer made of a gallium nitride semiconductor of a first conductivity type, a second cladding layer made of a gallium nitride semiconductor of a second conductivity type, the first cladding layer, and the first cladding layer. The first cladding layer, the second cladding layer and the active layer are arranged along a normal axis of the semipolar main surface. The active layer includes a gallium nitride based semiconductor layer, and the c + axis vector indicating the direction of the <0001> axis of the group III nitride semiconductor of the support base is relative to the normal vector indicating the direction of the normal axis. Tilted at an angle in the range of 45 degrees to 80 degrees and 100 degrees to 135 degrees in the direction of the crystal axis of either the m-axis or the a-axis of the group III nitride semiconductor, The end face of 2 is the hexagonal group III nitride Intersecting a reference plane defined by the crystal axis and the normal axis of the semiconductor, and the c + axis vector forms an acute angle with a waveguide vector indicating a direction from the second end face to the first end face, The thickness of the second dielectric multilayer film is smaller than the thickness of the first dielectric multilayer film.

  According to this group III nitride semiconductor laser device, the c + axis vector forms an acute angle with the waveguide vector, and this waveguide vector is directed in the direction from the second end face to the first end face. The angle formed between the normal vector of the second end face and the c + axis vector is larger than the angle formed between the normal vector of the first end face and the c + axis vector. At this time, since the thickness of the second dielectric multilayer film on the second end face is smaller than the thickness of the first dielectric multilayer film on the first end face, the second dielectric multilayer film on the second end face is obtained. The body multilayer film is on the front side, and laser light is emitted from the front side. The first dielectric multilayer film on the first end face is on the rear side, and most of the laser light is reflected on the rear side. In the laser element on the semipolar surface, when the thickness of the second dielectric multilayer film on the front side is smaller than the thickness of the first dielectric multilayer film on the rear side, it is caused by the dielectric multilayer film on the end surface. Deterioration of the device is reduced, and a decrease in device life is avoided.

  In the group III nitride semiconductor laser device according to the present invention, the laser structure includes first and second surfaces, and the first surface is a surface opposite to the second surface, and the semiconductor region Is located between the first surface and the support base, and each of the first and second end surfaces extends from the edge of the first surface to the edge of the second surface. Can be included.

  According to the group III nitride semiconductor laser device, the first and second end faces of the laser structure have a reference defined by the a-axis or m-axis of the hexagonal group III nitride semiconductor and the normal axis of the main surface. Since it intersects the plane, the first and second end faces can be formed as a split section, which extends from the edge of the first plane to the edge of the second plane.

  In the group III nitride semiconductor laser device according to the present invention, the c-axis of the group III nitride semiconductor may be inclined in the direction of the m-axis of the nitride semiconductor. Alternatively, in the group III nitride semiconductor laser device according to the present invention, the c-axis of the group III nitride semiconductor may be inclined in the direction of the a-axis of the nitride semiconductor.

  In the group III nitride semiconductor laser device according to the present invention, the main surface of the support base is any one of {10-11}, {20-21}, {20-2-1}, and {10-1-1}. It can incline in the range of -4 degree or more and 4 degrees or less from the surface. In the group III nitride semiconductor laser device according to the present invention, the main surface of the support base is {10-11}, {20-21}, {20-2-1}, {10-1-1}. Can be in any aspect.

  In this group III nitride semiconductor laser device, when the c-axis of the group III nitride semiconductor is inclined in the direction of the m-axis of the nitride semiconductor, the practical plane orientation and angle range are at least the above plane orientation and angle range. Included.

  In the group III nitride semiconductor laser device according to the present invention, the main surface of the support base is any one of {11-22}, {11-21}, {11-2-1}, and {11-2-2}. It can incline in the range of -4 degree or more and 4 degrees or less from the surface of this. In the group III nitride semiconductor laser device according to the present invention, the main surface of the support base is {11-22}, {11-21}, {11-2-1}, {11-2-2}. Can be in any aspect.

  In this group III nitride semiconductor laser device, when the c-axis of the group III nitride semiconductor is inclined in the direction of the a-axis of the nitride semiconductor, the practical plane orientation and angle range are at least the above plane orientation and angle range. Included.

  In the group III nitride semiconductor laser device according to the present invention, the active layer may include a well layer made of a gallium nitride-based semiconductor containing In as a constituent element and including strain. In the group III nitride semiconductor laser device according to the present invention, the active layer can include a well layer made of InGaN containing strain.

  According to this group III nitride semiconductor laser device, deterioration of the present case is observed in a gallium nitride based semiconductor containing In as a group III constituent element. Further, the degree of deterioration becomes conspicuous as the indium composition increases.

  In the group III nitride semiconductor laser device according to the present invention, the active layer may be provided so as to generate oscillation light having a wavelength of 430 to 550 nm.

  According to this group III nitride semiconductor laser device, light emission in the above-mentioned wavelength range can be provided using a well layer made of a gallium nitride-based semiconductor containing, for example, In as a group III constituent element and including strain.

  In the group III nitride semiconductor laser device according to the present invention, the group III nitride semiconductor may be GaN. According to this group III nitride semiconductor laser device, light emission in the above wavelength range (wavelength range from blue to green) can be realized, for example, by realizing a laser structure using the GaN main surface.

  In the group III nitride semiconductor laser device according to the present invention, the dielectric layer in the first dielectric multilayer film includes silicon oxide, silicon nitride, silicon oxynitride, titanium oxide, titanium nitride, and titanium. Oxynitride, zirconium oxide, zirconium nitride, zirconium oxynitride, zirconium fluoride, tantalum oxide, tantalum nitride, tantalum oxynitride, hafnium oxide, hafnium nitride, hafnium oxynitride, hafnium fluoride , Aluminum oxide, aluminum nitride, aluminum oxynitride, magnesium fluoride, magnesium oxide, magnesium nitride, magnesium oxynitride, calcium fluoride, barium fluoride, cerium fluoride, antimony oxide, bismuth oxide , Consisting of at least one of gadolinium oxide, in the second dielectric multilayer film Electrical layer is silicon oxide, silicon nitride, silicon oxynitride, titanium oxide, titanium nitride, titanium oxynitride, zirconium oxide, zirconium nitride, zirconium oxynitride, zirconium fluoride, tantalum oxide Tantalum nitride, tantalum oxynitride, hafnium oxide, hafnium nitride, hafnium oxynitride, hafnium fluoride, aluminum oxide, aluminum nitride, aluminum oxynitride, magnesium fluoride, magnesium oxide, magnesium It can be made of at least one of nitride, magnesium oxynitride, calcium fluoride, barium fluoride, cerium fluoride, antimony oxide, bismuth oxide, and gadolinium oxide.

According to this group III nitride semiconductor laser device, practical dielectric film materials include silicon oxide (for example, SiO ₂ ), silicon nitride (for example, Si ₃ N ₄ ), and silicon oxynitride (for example, SiO _x). N _1-x ), titanium oxide (eg TiO ₂ ), titanium nitride (eg TiN), titanium oxynitride (eg TiO _x N _1-x ), zirconium oxide (eg ZrO ₂ ), zirconium nitride ( For example, ZrN), zirconium oxynitride (eg, ZrO _x N _1-x ), zirconium fluoride (ZrF ₄ ), tantalum oxide (eg, Ta ₂ O ₅ ), tantalum nitride (Ta ₃ N ₅ ), tantalum oxynitride things _{(TaO x N 1-x)} , hafnium oxide (e.g. _HfO 2), hafnium nitride (e.g. HfN), hafnium oxynitride (e.g. H O _x N _1-x), hafnium fluoride (e.g. _HfF 4), aluminum oxide (e.g. _Al 2 _O 3), aluminum nitride (e.g. AlN), aluminum oxynitride _{(AlO x N 1-x)} , magnesium Fluoride (eg MgF ₂ ), magnesium oxide (eg MgO), magnesium nitride (eg Mg ₃ N ₂ ), magnesium oxynitride (eg MgO _x N _1-x ) calcium fluoride (eg CaF ₂ ), barium From fluorides (eg BaF ₂ ), cerium fluorides (eg CeF ₃ ), antimony oxides (eg Sb ₂ O ₃ ), bismuth oxides (eg Bi ₂ O ₃ ), gadolinium oxides (eg Gd ₂ O ₃ ) Can be.

  The invention according to another aspect of the present invention is a method of fabricating a group III nitride semiconductor laser device. This method includes (a) a step of preparing a substrate having a semipolar main surface made of a hexagonal group III nitride semiconductor, and (b) a semiconductor region formed on the semipolar main surface and the substrate. Forming a substrate product having a laser structure, an anode electrode, and a cathode electrode, and (c) forming first and second end faces after forming the substrate product; Forming first and second dielectric multilayer films for the resonator of the nitride semiconductor laser element on the first and second end faces, respectively. The first and second end faces intersect a reference plane defined by a crystal axis of one of the a-axis and m-axis of the hexagonal group III nitride semiconductor and a normal axis of the semipolar principal surface. The semiconductor region includes a first cladding layer made of a gallium nitride semiconductor of a first conductivity type, a second cladding layer made of a gallium nitride semiconductor of a second conductivity type, the first cladding layer, The first cladding layer, the second cladding layer, and the active layer are arranged in the direction of the normal axis, and the active layer is provided between the active layer and the second cladding layer. The layer includes a gallium nitride based semiconductor layer, and the semipolar principal surface of the substrate is 45 degrees or more and 80 degrees or less and 100 degrees on a plane orthogonal to a c + axis vector indicating a <0001> axis direction of the nitride semiconductor. Cross at an angle in the range of 135 degrees or more The c + axis vector forms an acute angle with a waveguide vector indicating the direction from the second end face to the first end face, and the thickness of the second dielectric multilayer film (C−) is , Thinner than the thickness of the first dielectric multilayer film (C +).

  According to this method, the waveguide vector that forms an acute angle with the c + axis vector corresponds to the direction from the second end face to the first end face, and the second dielectric multilayer film on the second end face ( (C− side) is formed thinner than the thickness of the first dielectric multilayer film (C + side) on the first end face, so that the crystal quality that proceeds from the second end face due to the dielectric multilayer film on the end face It is possible to reduce the deterioration of the element accompanied by the deterioration of the element and to avoid a decrease in the element life. In this group III nitride semiconductor laser device, the angle formed between the normal vector of the second end face and the c + axis vector is larger than the angle formed between the normal vector of the first end face and the c + axis vector. When the thickness of the second dielectric multilayer film on the front side (C− side) is thinner than the thickness of the first dielectric multilayer film on the rear side (C + side), the second dielectric on the second end face The body multilayer film is on the front side, and laser light is emitted from the front side. The first dielectric multilayer film on the first end face is on the rear side, and most of the laser light is reflected on the rear side.

  The method according to the present invention further includes a step of discriminating a plane orientation of the first and second end faces before forming the first and second dielectric multilayer films. According to this method, an appropriate dielectric multilayer film can be selected and grown on each end face according to this discrimination.

  In the method according to the present invention, the step of forming the first and second end faces includes the step of scribing the first surface of the substrate product and the pressing of the substrate product on the second surface. Separating the substrate product to form a laser bar. The laser bar has first and second end surfaces formed by the separation, the first surface is a surface opposite to the second surface, and the semiconductor region is connected to the first surface. Each of the first and second end faces of the laser bar is located between the substrate and extends from the first face to the second face and is included in the split section formed by the separation. It is.

  According to this method, the first and second end faces of the laser bar intersect the reference plane defined by the a-axis or m-axis of the hexagonal group III-nitride semiconductor and the normal axis of the principal surface. The first and second end faces can be formed as a split section by scribe formation and thickness, the split section extending from the edge of the first face to the edge of the second face.

  In the method according to the present invention, the c-axis of the group III nitride semiconductor may be inclined in the direction of the m-axis of the nitride semiconductor. Alternatively, in the method according to the present invention, the c-axis of the group III nitride semiconductor may be inclined in the direction of the a-axis of the nitride semiconductor.

  In the method according to the present invention, the main surface of the substrate is −4 degrees from any one of {10-11}, {20-21}, {20-2-1}, and {10-1-1}. It can be inclined in the range of 4 degrees or less. In the method according to the present invention, the main surface of the substrate is any one of {10-11}, {20-21}, {20-2-1}, and {10-1-1}. be able to.

  In this method, when the c-axis of the group III nitride semiconductor is inclined in the direction of the m-axis of the nitride semiconductor, the practical plane orientation and angle range include at least the above-described plane orientation and angle range.

  In the method according to the present invention, the main surface of the substrate is −4 degrees or more from any one of {11-22}, {11-21}, {11-2-1}, and {11-2-2}. It can be tilted within a range of 4 degrees or less. In the method according to the present invention, the main surface of the substrate is any one of {11-22}, {11-21}, {11-2-1}, and {11-2-2}. be able to.

  In this substrate, when the c-axis of the group III nitride semiconductor is inclined in the direction of the a-axis of the nitride semiconductor, the practical plane orientation and angle range include at least the above plane orientation and angle range.

  In the method according to the present invention, in forming the active layer, it is preferable to grow a well layer made of a gallium nitride-based semiconductor containing In as a constituent element and including a strain. In the method according to the present invention, the well layer grown by the formation of the active layer is made of InGaN containing a strain. This strain is caused by the stress from the semiconductor layer adjacent to the well layer. According to this method, deterioration of the present case is observed in a gallium nitride semiconductor containing In as a group III constituent element. Further, the degree of deterioration becomes conspicuous as the indium composition increases.

  In the method according to the present invention, the active layer may be configured to generate oscillation light having a wavelength of 430 to 550 nm. According to this method, according to this method, light emission in the above wavelength range can be provided using a well layer made of a gallium nitride-based semiconductor containing In as a constituent element and including strain.

  In the method according to the present invention, the group III nitride semiconductor is preferably GaN. According to this method, by realizing a laser structure using a GaN main surface, light emission in the above-described wavelength range (wavelength range from blue to green) can be realized, for example.

  In the method according to the present invention, the dielectric layer in the first dielectric multilayer film is formed of silicon oxide, silicon nitride, silicon oxynitride, titanium oxide, titanium nitride, titanium oxynitride, zirconium oxide. , Zirconium nitride, zirconium oxynitride, zirconium fluoride, tantalum oxide, tantalum nitride, tantalum oxynitride, hafnium oxide, hafnium nitride, hafnium oxynitride, hafnium fluoride, aluminum oxide, aluminum Of nitride, aluminum oxynitride, magnesium fluoride, magnesium oxide, magnesium nitride, magnesium oxynitride, calcium fluoride, barium fluoride, cerium fluoride, antimony oxide, bismuth oxide, gadolinium oxide It can be formed using at least one. The dielectric layer in the second dielectric multilayer film is made of silicon oxide, silicon nitride, silicon oxynitride, titanium oxide, titanium nitride, titanium oxynitride, zirconium oxide, zirconium nitride. , Zirconium oxynitride, zirconium fluoride, tantalum oxide, tantalum nitride, tantalum oxynitride, hafnium oxide, hafnium nitride, hafnium oxynitride, hafnium fluoride, aluminum oxide, aluminum nitride, aluminum acid Use at least one of nitride, magnesium fluoride, magnesium oxide, magnesium nitride, magnesium oxynitride, calcium fluoride, barium fluoride, cerium fluoride, antimony oxide, bismuth oxide, gadolinium oxide Can be formed.

According to this method, practical dielectric films include silicon oxide (eg, SiO ₂ ), silicon nitride (eg, Si ₃ N ₄ ), silicon oxynitride (eg, SiO _x N _1-x ), titanium oxide objects (e.g., _TiO 2), titanium nitride (eg TiN), titanium oxynitride (e.g. _TiO x _{N 1-x),} zirconium oxide (e.g., _ZrO 2), zirconium nitride (e.g. ZrN), zirconium oxynitride (e.g. _ZrO x _{N 1-x),} zirconium fluoride _(ZrF 4), tantalum oxide (e.g., _Ta 2 _O 5), tantalum nitride _{(Ta 3 N} 5), tantalum oxynitride _{(TaO x N 1-x} ), hafnium oxide (e.g. _HfO 2), hafnium nitride (e.g. HfN), hafnium oxynitride (e.g. _HfO x _{N 1-x),} Hafuniu Fluorides (eg _HfF 4), aluminum oxide (e.g. _Al 2 _O 3), aluminum nitride (e.g. AlN), aluminum oxynitride _{(AlO x N 1-x)} , magnesium fluoride (e.g. _MgF 2), magnesium Oxides (eg MgO), magnesium nitride (eg Mg ₃ N ₂ ), magnesium oxynitride (eg MgO _x N _1-x ) calcium fluoride (eg CaF ₂ ), barium fluoride (eg BaF ₂ ), cerium It may be made of at least one of fluoride (eg, CeF ₃ ), antimony oxide (eg, Sb ₂ O ₃ ), bismuth oxide (eg, Bi ₂ O ₃ ), and gadolinium oxide (eg, Gd ₂ O ₃ ). .

  The above and other objects, features, and advantages of the present invention will become more readily apparent from the following detailed description of preferred embodiments of the present invention, which proceeds with reference to the accompanying drawings.

  As described above, according to the present invention, a group III nitride semiconductor laser device having a long device life is provided. The present invention also provides a method for producing a group III nitride semiconductor laser device having a long device lifetime.

FIG. 1 is a drawing schematically showing a structure of a group III nitride semiconductor laser device according to the present embodiment. FIG. 2 is a drawing showing the polarization of light emission in the active layer of the group III nitride semiconductor laser device. FIG. 3 is a drawing showing the relationship between the end face of the group III nitride semiconductor laser device and the m-plane of the active layer. FIG. 4 is a process flow diagram showing the main processes of the method for manufacturing the group III nitride semiconductor laser device according to the present embodiment. FIG. 5 is a drawing schematically showing main steps of a method for producing a group III nitride semiconductor laser device according to the present embodiment. FIG. 6 is a drawing showing a scanning electron microscope image of the resonator end face while showing the {20-21} plane in the crystal lattice. 7 is a drawing showing the structure of the laser diode shown in Example 1. FIG. FIG. 8 is a drawing showing the structure of the laser diode shown in Example 1. FIG. 9 is a diagram showing the relationship between the obtained degree of polarization ρ and the threshold current density. FIG. 10 is a drawing showing the relationship between the inclination angle of the c-axis in the m-axis direction of the GaN substrate and the oscillation yield. FIG. 11 shows the atomic arrangement of the (−1010) plane and the (10-10) plane perpendicular to the (0001) plane principal plane, and the (−2021) plane and (20−) perpendicular to the (10-17) plane principal plane. 2-1) It is drawing which shows the atomic arrangement | sequence of a surface. FIG. 12 shows an atomic arrangement of the (−4047) plane and the (40-4-7) plane perpendicular to the (10-12) plane principal plane, and the (−2027) plane perpendicular to the (10-11) plane principal plane. And (20-2-7) The atomic arrangement of the plane. FIG. 13 shows an atomic arrangement of the (−1017) plane and the (10-1-7) plane perpendicular to the (20-21) plane principal plane, and the (0001) plane perpendicular to the (10-10) plane principal plane and It is drawing which shows the atomic arrangement | sequence of (000-1) plane. FIG. 14 shows the atomic arrangement of the (10-17) plane and the (−101-7) plane perpendicular to the (20-2-1) principal plane, and the (10-1-1) plane principal plane ( It is drawing which shows the atomic arrangement | sequence of a (20-27) plane and a (-202-7) plane. FIG. 15 shows the atomic arrangement of the (40-47) plane and (-404-7) plane perpendicular to the (10-1-2) plane principal plane, and the (10-1-7) plane principal plane ( It is drawing which shows the atomic arrangement | sequence of a 20-21) plane and a (-202-1) plane. FIG. 16 is a drawing showing an atomic arrangement of a (10-10) plane and a (-1010) plane perpendicular to the (000-1) plane main surface.

  The knowledge of the present invention can be easily understood by considering the following detailed description with reference to the accompanying drawings shown as examples. Subsequently, embodiments of the group III nitride semiconductor laser device and the method for manufacturing the group III nitride semiconductor laser device of the present invention will be described with reference to the accompanying drawings. Where possible, the same parts are denoted by the same reference numerals.

  FIG. 1 is a drawing schematically showing a structure of a group III nitride semiconductor laser device according to the present embodiment. Although group III nitride semiconductor laser device 11 has a gain guide type structure, the embodiment of the present invention is not limited to the gain guide type structure. The group III nitride semiconductor laser device 11 includes a laser structure 13 and an electrode 15. The laser structure 13 includes a support base 17 and a semiconductor region 19. The support base 17 has a semipolar main surface 17a made of a hexagonal group III nitride semiconductor and a back surface 17b. The semiconductor region 19 is provided on the semipolar main surface 17 a of the support base 17. The electrode 15 is provided on the semiconductor region 19 of the laser structure 13. The semiconductor region 19 includes a first cladding layer 21, a second cladding layer 23, and an active layer 25. The first cladding layer 21 is made of a first conductivity type gallium nitride semiconductor, and is made of, for example, n-type AlGaN, n-type InAlGaN, or the like. The second cladding layer 23 is made of a second conductivity type gallium nitride based semiconductor, for example, p-type AlGaN, p-type InAlGaN, or the like. The active layer 25 is provided between the first cladding layer 21 and the second cladding layer 23. The active layer 25 includes a gallium nitride based semiconductor layer, and this gallium nitride based semiconductor layer is, for example, a well layer 25a. The active layer 25 includes barrier layers 25b made of a gallium nitride semiconductor, and the well layers 25a and the barrier layers 25b are alternately arranged. The well layer 25a is made of, for example, InGaN, and the barrier layer 25b is made of, for example, GaN, InGaN, or the like. The active layer 25 can include a quantum well structure provided to generate light having a wavelength of 360 nm to 600 nm. Use of a semipolar plane is suitable for generation of light having a wavelength of 430 nm or more and 550 nm or less. The first cladding layer 21, the second cladding layer 23, and the active layer 25 are arranged along the normal axis NX of the semipolar principal surface 17a. The normal axis NX extends in the direction of the normal vector NV. The c-axis Cx of the group III nitride semiconductor of the support base 17 extends in the direction of the c-axis vector VC.

  The laser structure 13 includes a first end face 26 and a second end face 28 for the resonator. The waveguide for the resonator extends from the second end face 28 to the first end face 26, and the waveguide vector WV indicates the direction from the second end face 28 to the first end face 26. The first and second end faces 26 and 28 of the laser structure 13 intersect a reference plane defined by a crystal axis (m-axis or a-axis) of the hexagonal group III nitride semiconductor and a normal axis NX. In FIG. 1, the first and second end faces 26, 28 intersect the mn plane defined by the m-axis and the normal axis NX of the hexagonal group III nitride semiconductor. However, the first and second end faces 26 and 28 may intersect an a-n plane defined by the a-axis and the normal axis NX of the hexagonal group III nitride semiconductor.

  Referring to FIG. 1, an orthogonal coordinate system S and a crystal coordinate system CR are depicted. The normal axis NX is directed in the direction of the Z axis of the orthogonal coordinate system S. The semipolar principal surface 17a extends in parallel to a predetermined plane defined by the X axis and the Y axis of the orthogonal coordinate system S. FIG. 1 also shows a representative c-plane Sc. The c + axis vector indicating the direction of the <0001> axis of the group III nitride semiconductor of the support base 17 is relative to the normal vector NV in the direction of the crystal axis of either the m axis or the a axis of the group III nitride semiconductor. Tilt. This inclination angle is in the range of 45 degrees to 80 degrees and 100 degrees to 135 degrees. In the present embodiment, the direction of the c + axis vector coincides with the direction of the vector VC. In the embodiment shown in FIG. 1, the c + axis vector of the hexagonal group III nitride semiconductor of the support base 17 has a finite angle with respect to the normal axis NX in the direction of the m axis of the hexagonal group III nitride semiconductor. Inclined by ALPHA. This angle ALPHA can be in the range of 45 degrees to 80 degrees, and can be in the range of 100 degrees to 135 degrees.

  The thickness DREF2 of the second dielectric multilayer film (C− side) 43b is smaller than the thickness DREF1 of the first dielectric multilayer film (C + side) 43a. According to the group III nitride semiconductor laser device 11, the c + axis vector forms an acute angle with the waveguide vector WV, and this waveguide vector WV is in the direction from the second end face 28 to the first end face 26. Correspond. At this time, the thickness of the second dielectric multilayer film 43b on the second end face (C− side) 28 is larger than the thickness of the first dielectric multilayer film 43a on the first end face 26 (C + side). Since it is thin, the second dielectric multilayer film 43b is on the front side, and laser light is emitted from the front side. The first dielectric multilayer film 43a is on the rear side, and most of the laser light is reflected on the rear side. When the thickness of the second dielectric multilayer film 43b on the front side is smaller than the thickness of the first dielectric multilayer film 43a on the rear side, the second element multilayer is caused by the dielectric multilayer film on the end face with respect to the element lifetime. Deterioration of the device accompanied by deterioration of the crystal quality that progresses from the end face is reduced.

  Group III nitride semiconductor laser device 11 further includes an insulating film 31. The insulating film 31 is provided on the surface 19a of the semiconductor region 19 of the laser structure 13 and covers the surface 19a. The semiconductor region 19 is located between the insulating film 31 and the support base 17. The support base 17 is made of a hexagonal group III nitride semiconductor. The insulating film 31 has an opening 31a. The opening 31a has, for example, a stripe shape. When the c-axis is inclined in the m-axis direction as in the present embodiment, the opening 31a extends in the direction of the intersection line LIX between the surface 19a of the semiconductor region 19 and the mn plane. The intersection line LIX extends in the direction of the waveguide vector WV. When the c-axis is inclined in the direction of the a-axis, the opening 31a extends in the direction of the intersection line LIX between the an surface and the surface 19a.

  The electrode 15 is in contact with the surface 19a (for example, the second conductivity type contact layer 33) of the semiconductor region 19 through the opening 31a, and extends in the direction of the intersection line LIX. In the group III nitride semiconductor laser device 11, the laser waveguide includes the first cladding layer 21, the second cladding layer 23, and the active layer 25, and extends in the direction of the intersection line LIX.

  In the group III nitride semiconductor laser device 11, each of the first end surface 26 and the second end surface 28 may have a cut section. In the following description, the first end surface 26 and the second end surface 28 are referred to as a first fractured surface 27 and a second fractured surface 29. The first fractured surface 27 and the second fractured surface 29 intersect the mn plane defined by the m-axis and the normal axis NX of the hexagonal group III nitride semiconductor. The laser resonator of the group III nitride semiconductor laser device 11 includes first and second fractured faces 27 and 29, and a laser waveguide is provided from one of the first fractured face 27 and the second fractured face 29 to the other. It is extended. The laser structure 13 includes a first surface 13a and a second surface 13b, and the first surface 13a is a surface opposite to the second surface 13b. The first and second fractured surfaces 27 and 29 extend from the edge 13c of the first surface 13a to the edge 13d of the second surface 13b. The first and second fractured surfaces 27 and 29 are different from conventional cleavage planes such as c-plane, m-plane, or a-plane.

  According to the group III nitride semiconductor laser device 11, the first and second fractured surfaces 27 and 29 constituting the laser resonator intersect with the mn plane. Therefore, it is possible to provide a laser waveguide extending in the direction of the intersecting line between the mn plane and the semipolar plane 17a. Therefore, the group III nitride semiconductor laser device 11 has a laser resonator that enables a low threshold current.

  The group III nitride semiconductor laser device 11 includes an n-side light guide layer 35 and a p-side light guide layer 37. The n-side light guide layer 35 includes a first portion 35a and a second portion 35b, and the n-side light guide layer 35 is made of, for example, GaN, InGaN, or the like. The p-side light guide layer 37 includes a first portion 37a and a second portion 37b, and the p-side light guide layer 37 is made of, for example, GaN, InGaN, or the like. The carrier block layer 39 is provided, for example, between the first portion 37a and the second portion 37b. Another electrode 41 is provided on the back surface 17b of the support base 17, and the electrode 41 covers, for example, the back surface 17b of the support base 17.

FIG. 2 is a drawing showing the polarization of light emission in the active layer 25 of the group III nitride semiconductor laser device 11. FIG. 3 is a drawing schematically showing a cross section defined by the c-axis and the m-axis. As shown in FIG. 2, the dielectric multilayer films 43a and 43b are provided on the first and second fractured surfaces 27 and 29, respectively. The dielectric multilayer films 43a and 43b are made of, for example, silicon oxide, silicon nitride, silicon oxynitride, titanium oxide, titanium nitride, titanium oxynitride, zirconium oxide, zirconium nitride, and zirconium acid. Nitride, zirconium fluoride, tantalum oxide, tantalum nitride, tantalum oxynitride, hafnium oxide, hafnium nitride, hafnium oxynitride, hafnium fluoride, aluminum oxide, aluminum nitride, aluminum oxynitride, It can be composed of at least one of magnesium fluoride, magnesium oxide, magnesium nitride, magnesium oxynitride, calcium fluoride, barium fluoride, cerium fluoride, antimony oxide, bismuth oxide, and gadolinium oxide. . According to the group III nitride semiconductor laser device 11, practical dielectric films include silicon oxide (for example, SiO ₂ ), silicon nitride (for example, Si ₃ N ₄ ), and silicon oxynitride (for example, SiO _x N). _1-x ), titanium oxide (eg TiO ₂ ), titanium nitride (eg TiN), titanium oxynitride (eg TiO _x N _1-x ), zirconium oxide (eg ZrO ₂ ), zirconium nitride (eg ZrN), zirconium oxynitride (for example, ZrO _x N _1-x ), zirconium fluoride (ZrF ₄ ), tantalum oxide (for example, Ta ₂ O ₅ ), tantalum nitride (Ta ₃ N ₅ ), tantalum oxynitride _{(TaO x N 1-x)} , hafnium oxide (e.g. _HfO 2), hafnium nitride (e.g. HfN), hafnium oxynitride (e.g. Hf _x N _1-x), hafnium fluoride (e.g. _HfF 4), aluminum oxide (e.g. _Al 2 _O 3), aluminum nitride (e.g. AlN), aluminum oxynitride _{(AlO x N 1-x)} , magnesium fluoride Fluoride (eg MgF ₂ ), magnesium oxide (eg MgO), magnesium nitride (eg Mg ₃ N ₂ ), magnesium oxynitride (eg MgO _x N _1-x ) calcium fluoride (eg CaF ₂ ), barium fluoride Of hydrides (eg BaF ₂ ), cerium fluorides (eg CeF ₃ ), antimony oxides (eg Sb ₂ O ₃ ), bismuth oxides (eg Bi ₂ O ₃ ), gadolinium oxides (eg Gd ₂ O ₃ ) It can consist of at least one. By using these materials, the end face coat can be applied to the fracture surfaces 27 and 29 as well. The reflectance can be adjusted by the end face coating. With this adjusted reflectivity, when the reflectivity of the second dielectric multilayer film (C− side) 43b is smaller than the reflectivity of the first dielectric multilayer film (C + side) 43a, the end face is related to the element lifetime. Due to the upper dielectric multilayer film, element deterioration accompanied by deterioration of crystal quality progressing from the second end face is reduced.

  As shown in FIG. 2B, the laser beam L from the active layer 25 is polarized in the a-axis direction of the hexagonal group III nitride semiconductor. In this group III nitride semiconductor laser device 11, the band transition capable of realizing a low threshold current has polarization. The first and second fractured surfaces 27 and 29 for the laser resonator are different from conventional cleavage planes such as c-plane, m-plane or a-plane. However, the first and second fractured surfaces 27 and 29 have flatness and perpendicularity as mirrors for the resonator. Therefore, using the first and second fractured surfaces 27 and 29 and the laser waveguide extending between these fractured surfaces 27 and 29, as shown in FIG. Low-threshold laser oscillation is possible by using the light emission I1 caused by the transition stronger than the light emission I2 caused by the transition polarized in the direction projected onto the surface.

In the group III nitride semiconductor laser device 11, the end surface 17c of the support base 17 and the end surface 19c of the semiconductor region 19 appear in each of the first and second fractured surfaces 27 and 29, and the end surface 17c and the end surface 19c are It is covered with a dielectric multilayer film 43a. An angle BETA formed by the normal vector NA of the end face 17c of the support substrate 17 and the end face 25c of the active layer 25 and the m-axis vector MA of the active layer 25 is defined by the c-axis and m-axis of the group III nitride semiconductor. A component (BETA) ₁ defined in one plane S1 and a component (BETA) ₂ defined in a second plane S2 orthogonal to the first plane S1 and the normal axis NX. The component (BETA) ₁ is preferably in the range of (ALPHA-4) degrees to (ALPHA + 4) degrees in the first plane S1 defined by the c-axis and m-axis of the group III nitride semiconductor. This angle range is shown in FIG. 3 as an angle formed by a representative m-plane _SM and the reference plane F _A. A representative m-plane S _M is drawn from the inside to the outside of the laser structure in FIG. 3 for ease of understanding. The reference plane F _A extends along the end face 25c of the active layer 25. This group III nitride semiconductor laser device 11 has an end surface that satisfies the above-described perpendicularity with respect to an angle BETA taken from one of the c-axis and the m-axis to the other. The component (BETA) ₂ is preferably in the range of not less than −4 degrees and not more than +4 degrees on the second plane S2. Here, BETA ² = (BETA) ₁ ² + (BETA) ₂ ² . At this time, the end faces 27 and 29 of the group III nitride semiconductor laser device 11 satisfy the above-described perpendicularity with respect to an angle defined in a plane perpendicular to the normal axis NX of the semipolar surface 17a.

  Referring again to FIG. 1, in the group III nitride semiconductor laser device 11, the thickness DSUB of the support base 17 is preferably 400 μm or less. This group III nitride semiconductor laser device is suitable for obtaining a high-quality fractured surface for a laser resonator. In the group III nitride semiconductor laser device 11, the thickness DSUB of the support base 17 is more preferably 50 μm or more and 100 μm or less. This group III nitride semiconductor laser device 11 is further suitable for obtaining a high-quality fractured surface for the laser resonator. Moreover, handling becomes easy and production yield can be improved.

  In the group III nitride semiconductor laser device 11, the angle ALPHA formed by the normal axis NX and the c axis of the hexagonal group III nitride semiconductor is preferably 45 degrees or more, and preferably 80 degrees or less. The angle ALPHA is preferably 100 degrees or more, and preferably 135 degrees or less. If the angle is less than 45 degrees or more than 135 degrees, there is a high possibility that the end face formed by pressing is an m-plane. Further, when the angle is more than 80 degrees and less than 100 degrees, the desired flatness and perpendicularity may not be obtained.

  In the group III nitride semiconductor laser device 11, the angle ALPHA formed by the normal axis NX and the c axis of the hexagonal group III nitride semiconductor is more preferably 63 degrees or more from the viewpoint of forming a fracture surface. It is preferably 80 degrees or less. The angle ALPHA is preferably 100 degrees or more, and is preferably 117 degrees or less. If the angle is less than 63 degrees or more than 117 degrees, the m-plane may appear in a part of the end face formed by pressing. Further, when the angle is more than 80 degrees and less than 100 degrees, the desired flatness and perpendicularity may not be obtained.

  In the group III nitride semiconductor laser device 11, when the c-axis of the group III nitride semiconductor is inclined in the m-axis direction of the nitride semiconductor, the practical plane orientation and angle range are at least the following plane orientation and angle range. including. For example, the main surface 17a of the support base 17 is −4 degrees or more and 4 degrees from any one of {10-11}, {20-21}, {20-2-1}, and {10-1-1}. It can be inclined in the following range. Further, the main surface 17a of the support base 17 can be any one of {10-11}, {20-21}, {20-2-1}, and {10-1-1}.

  In the group III nitride semiconductor laser device 11, when the c-axis of the group III nitride semiconductor is inclined in the direction of the a-axis of the nitride semiconductor, the practical plane orientation and angle range are at least the following plane orientation and angle range. including. The main surface 17a of the support base 17 is in a range of not less than −4 degrees and not more than 4 degrees from any one of {11-22}, {11-21}, {11-2-1}, {11-2-2}. Can be tilted at. Further, the main surface 17a of the support base 17 can be any one of {11-22}, {11-21}, {11-2-1}, and {11-2-2}.

  In these typical semipolar surfaces 17a, the first and second end surfaces 26 and 28 having sufficient flatness and perpendicularity that can constitute the laser resonator of the group III nitride semiconductor laser device 11 can be provided. In the range of angles over these typical plane orientations, end faces exhibiting sufficient flatness and perpendicularity are obtained. When the thickness of the second dielectric multilayer film (C− side) 43b is thinner than the thickness of the first dielectric multilayer film (C + side) 43a, deterioration of the element lifetime due to the dielectric multilayer film can be avoided. In addition, when the reflectance of the second dielectric multilayer film (C− side) 43b is smaller than the reflectance of the first dielectric multilayer film (C + side) 43a, the element lifetime due to the dielectric multilayer film is deteriorated. can avoid.

  The support base 17 can be made of any one of GaN, AlN, AlGaN, InGaN, and InAlGaN. When these gallium nitride based semiconductor substrates are used, it is possible to obtain split sections 27 and 29 that can be used as resonators.

The support substrate 17 can be GaN. According to this group III nitride semiconductor laser device, light emission in the above wavelength range (wavelength range from blue to green) can be realized, for example, by realizing a laser structure using the GaN main surface. Further, when an AlN or AlGaN substrate is used, the degree of polarization can be increased, and light confinement can be enhanced by a low refractive index. When an InGaN substrate is used, the lattice mismatch rate between the substrate and the light emitting layer can be reduced, and the crystal quality can be improved. In the group III nitride semiconductor laser device 11, the stacking fault density of the support base 17 can be 1 × 10 ⁴ cm ⁻¹ or less. Since the stacking fault density is 1 × 10 ⁴ cm ⁻¹ or less, there is a low possibility that the flatness and / or perpendicularity of the fractured section will be disturbed due to accidental circumstances.

  FIG. 4 is a drawing showing the main steps of a method for producing a group III nitride semiconductor laser device according to the present embodiment. Referring to FIG. 5 (a), a substrate 51 is shown. In this embodiment, although the c-axis of the substrate 51 is inclined in the direction of the m-axis, this manufacturing method can also be applied to the substrate 51 in which the c-axis is inclined in the direction of the a-axis. In step S101, a substrate 51 for preparing a group III nitride semiconductor laser device is prepared. The c-axis (vector VC) of the hexagonal group III nitride semiconductor of the substrate 51 is at a finite angle ALPHA with respect to the normal axis NX in the m-axis direction (vector VM) direction of the hexagonal group III nitride semiconductor. Inclined. Therefore, the substrate 51 has a semipolar main surface 51a made of a hexagonal group III nitride semiconductor.

  In step S102, a substrate product SP is formed. In FIG. 5A, the substrate product SP is depicted as a substantially disk-shaped member, but the shape of the substrate product SP is not limited to this. In order to obtain the substrate product SP, first, in step S103, the laser structure 55 is formed. The laser structure 55 includes a semiconductor region 53 and a substrate 51. In step S103, the semiconductor region 53 is formed on the semipolar main surface 51a. In order to form the semiconductor region 53, a first conductivity type gallium nitride based semiconductor region 57, a light emitting layer 59, and a second conductivity type gallium nitride based semiconductor region 61 are sequentially grown on the semipolar main surface 51a. The gallium nitride based semiconductor region 57 can include, for example, an n-type cladding layer, and the gallium nitride based semiconductor region 61 can include, for example, a p-type cladding layer. The light emitting layer 59 is provided between the gallium nitride based semiconductor region 57 and the gallium nitride based semiconductor region 61, and may include an active layer, a light guide layer, an electron blocking layer, and the like. The gallium nitride based semiconductor region 57, the light emitting layer 59, and the second conductivity type gallium nitride based semiconductor region 61 are arranged along the normal axis NX of the semipolar principal surface 51a. These semiconductor layers are epitaxially grown on the main surface 51a. The semiconductor region 53 is covered with an insulating film 54. The insulating film 54 is made of, for example, silicon oxide. An opening 54 a of the insulating film 54 is provided. The opening 54a has, for example, a stripe shape. Referring to FIG. 5A, a waveguide vector WV is drawn. In this embodiment, this vector WV extends in parallel to the mn plane. If necessary, a ridge structure may be formed in the semiconductor region 53 prior to the formation of the insulating film 54. This ridge structure can include a gallium nitride based semiconductor region 61 processed into a ridge shape.

  In step S <b> 104, the anode electrode 58 a and the cathode electrode 58 b are formed on the laser structure 55. Further, before forming the electrode on the back surface of the substrate 51, the back surface of the substrate used for crystal growth is polished to form a substrate product SP having a desired thickness DSUB. In the formation of the electrodes, for example, the anode electrode 58a is formed on the semiconductor region 53, and the cathode electrode 58b is formed on the back surface (polishing surface) 51b of the substrate 51. The anode electrode 58a extends in the X-axis direction, and the cathode electrode 58b covers the entire back surface 51b. Through these steps, the substrate product SP is formed. The substrate product SP includes a first surface 63a and a second surface 63b located on the opposite side thereof. The semiconductor region 53 is located between the first surface 63 a and the substrate 51.

  Next, in step S105, an end face for the laser resonator is formed. In this embodiment, a laser bar is produced from the substrate product SP. The laser bar has a pair of end faces on which a dielectric multilayer film can be formed. Subsequently, an example of manufacturing the laser bar and the end face will be described.

  In step S106, as shown in FIG. 5B, the first surface 63a of the substrate product SP is scribed. This scribing is performed using a laser scriber 10a. A scribe groove 65a is formed by scribing. In FIG. 5B, five scribe grooves have already been formed, and the formation of the scribe groove 65b is advanced using the laser beam LB. The length of the scribe groove 65a is shorter than the length of the intersection line AIS between the a-n plane and the first plane 63a defined by the a-axis and the normal axis NX of the hexagonal group III nitride semiconductor. The laser beam LB is irradiated on a part of the AIS. By irradiation with the laser beam LB, a groove extending in a specific direction and reaching the semiconductor region is formed in the first surface 63a. The scribe groove 65a can be formed at one edge of the substrate product SP, for example.

  In step S107, as shown in FIG. 5C, the substrate product SP is separated by pressing the substrate product SP against the second surface 63b to form the substrate product SP1 and the laser bar LB1. The pressing is performed using a breaking device such as a blade 69. The blade 69 includes an edge 69a extending in one direction and at least two blade surfaces 69b and 69c defining the edge 69a. The substrate product SP1 is pressed on the support device 71. The support device 71 includes a support surface 71a and a recess 71b, and the recess 71b extends in one direction. The recess 71b is formed in the support surface 71a. The substrate product SP1 is positioned on the recess 71b on the support device 71 by aligning the direction and position of the scribe groove 65a of the substrate product SP1 with the extending direction of the recess 71b of the support device 71. The edge of the breaking device is aligned with the extending direction of the recess 71b, and the edge of the breaking device is pressed against the substrate product SP1 from the direction intersecting the second surface 63b. The intersecting direction is preferably substantially perpendicular to the second surface 63b. Thereby, the substrate product SP is separated to form the substrate product SP1 and the laser bar LB1. By pressing, the laser bar LB1 having the first and second end faces 67a and 67b is formed, and at these end faces 67a and 67b, at least a part of the light emitting layer is vertical enough to be applicable to the resonant mirror of the semiconductor laser. And has flatness.

  The formed laser bar LB1 has first and second end surfaces 67a and 67b formed by the above separation, and each of the end surfaces 67a and 67b extends from the first surface 63a to the second surface 63b. Exists. Therefore, the end faces 67a and 67b constitute a laser resonator of the group III nitride semiconductor laser element and intersect the XZ plane. This XZ plane corresponds to the mn plane defined by the m-axis and the normal axis NX of the hexagonal group III nitride semiconductor. A waveguide vector WV is shown in each of the laser bars LB0 and LB1. The waveguide vector WV is directed in the direction from the end surface 67a to the end surface 67b. In FIG. 5C, the laser bar LB0 is partially broken to show the direction of the c-axis vector VC. The waveguide vector WV forms an acute angle with the c-axis vector VC.

  According to this method, after scribing the first surface 63a of the substrate product SP in the direction of the a-axis of the hexagonal group III nitride semiconductor, the substrate product SP is pressed against the second surface 63b. The product SP is separated to form a new substrate product SP1 and a laser bar LB1. Therefore, the first and second end faces 67a and 67b are formed on the laser bar LB1 so as to intersect the mn plane. This end face formation provides sufficient flatness and perpendicularity to the extent that a laser resonator of the group III nitride semiconductor laser element can be formed on the first and second end faces 67a and 67b. The formed laser waveguide extends in the direction of inclination of the c-axis of the hexagonal group III nitride. In this method, an end face of a resonator mirror that can provide this laser waveguide is formed.

  According to this method, a new substrate product SP1 and a laser bar LB1 are formed by cleaving the substrate product SP1. In step S108, separation by pressing is repeated to produce a large number of laser bars. This cleaving is caused by using a scribe groove 65a shorter than the breaking line BRAK of the laser bar LB1.

  In step S109, a dielectric multilayer film is formed on the end faces 67a and 67b of the laser bar LB1 to form a laser bar product. This process is performed as follows, for example. In step S110, the surface orientations of the end faces 67a and 67b of the laser bar LB1 are determined. For discrimination, for example, the direction of the c + axis vector can be examined. Alternatively, for the determination, when the end faces 67a and 67b are produced, for example, the following processing and / or operation for associating the end faces 67a and 67b with the direction of the c + axis vector can be performed: c + axis vector A mark indicating the orientation of the laser is produced on the laser bar; and / or the produced laser bar is arranged so as to represent the orientation of the c + axis vector. After the determination, in the laser bar LB1, the angle formed between the normal vector of the second end face 67b and the c + axis vector is larger than the angle formed between the normal vector of the first end face 67a and the c + axis vector.

  After the determination, in step S111, a dielectric multilayer film is formed on the end faces 67a and 67b of the laser bar LB1. According to this method, in the laser bar LB1, the direction of the waveguide vector WV that forms an acute angle with the c + axis vector corresponds to the direction from the second end face 67a to the first end face 67b. In this laser bar product, the heat DREF2 of the second dielectric multilayer film (C−) on the second end face 67a is changed to the thickness DREF1 of the first dielectric multilayer film (C +) on the first end face 67b. Since it is formed thinner, it is possible to reduce element deterioration accompanied by deterioration of crystal quality that proceeds from the second end face due to the dielectric multilayer film on the end face, and avoid a reduction in element life. When the thickness of the second dielectric multilayer film (C−) on the front side is smaller than the thickness of the first dielectric multilayer film (C +) on the rear side, the second dielectric multilayer film on the second end face The film is on the front side, and laser light is emitted from the front side. The first dielectric multilayer film on the first end face is on the rear side, and most of the laser light is reflected on the rear side.

  In step S112, the laser bar product is separated into individual semiconductor laser chips.

  In the manufacturing method according to the present embodiment, the angle ALPHA can be in the range of 45 degrees to 80 degrees and 100 degrees to 135 degrees. If the angle is less than 45 degrees or more than 135 degrees, there is a high possibility that the end face formed by pressing is an m-plane. Further, when the angle is more than 80 degrees and less than 100 degrees, the desired flatness and perpendicularity may not be obtained. More preferably, the angle ALPHA can be in the range of 63 degrees to 80 degrees and 100 degrees to 117 degrees. If the angle is less than 45 degrees or more than 135 degrees, the m-plane may appear in a part of the end face formed by pressing. Further, when the angle is more than 80 degrees and less than 100 degrees, the desired flatness and perpendicularity may not be obtained. The semipolar principal surface 51a can be any one of {20-21} plane, {10-11} plane, {20-2-1} plane, and {10-1-1} plane, Alternatively, when the c-axis is inclined in the direction of the a-axis, the surface can be any one of {11-22}, {11-21}, {11-2-1}, and {11-2-2}. . Furthermore, a surface slightly inclined from these surfaces within a range of −4 degrees or more and +4 degrees or less is also suitable as the main surface. In these typical semipolar planes, it is possible to provide an end face for the laser resonator with sufficient flatness and perpendicularity that can constitute the laser resonator of the group III nitride semiconductor laser device.

  The substrate 51 can be made of any one of GaN, AlN, AlGaN, InGaN, and InAlGaN. When these gallium nitride semiconductor substrates are used, an end face that can be used as a laser resonator can be obtained. The substrate 51 is preferably made of GaN.

  In step S106 for forming the substrate product SP, the semiconductor substrate used for crystal growth was subjected to processing such as slicing or grinding so that the substrate thickness was 400 μm or less, and the second surface 63b was formed by polishing. It can be a machined surface. With this substrate thickness, when flattening is used, sufficient flatness and perpendicularity that can constitute a laser resonator of the group III nitride semiconductor laser device can be obtained with a high yield. Further, when cleaving is used, end faces 67a and 67b without ion damage can be formed. More preferably, the second surface 63b is a polished surface formed by polishing, and is polished to have a substrate thickness of 100 μm or less. In order to handle the substrate product SP relatively easily, the substrate thickness is preferably 50 μm or more. When the cleaving is not used, the end surfaces 67a and 67b can be etched surfaces formed by etching, for example. The end face of the light emitting layer appears on the etched surface.

In the laser end face manufacturing method according to the present embodiment, the angle BETA described with reference to FIG. 2 is defined also in the laser bar LB1. In the laser bar LB1, the component (BETA) ₁ of the angle BETA ₁ is in a first plane defined by the c-axis and the m-axis of the group III nitride semiconductor (a plane corresponding to the first plane S1 in the description with reference to FIG. 2). It is preferably in the range of (ALPHA-4) degrees or more and (ALPHA + 4) degrees or less. The end faces 67a and 67b of the laser bar LB1 satisfy the above-described perpendicularity with respect to the angle component of the angle BETA taken from one of the c-axis and the m-axis to the other. Further, the component (BETA) ₂ of the angle BETA is preferably in the range of −4 degrees to +4 degrees on the second plane (the plane corresponding to the second plane S2 shown in FIG. 2). At this time, the end faces 67a and 67b of the laser bar LB1 satisfy the above-described perpendicularity with respect to the angle component of the angle BETA defined by the plane perpendicular to the normal axis NX of the semipolar surface 51a.

  The end faces 67a and 67b are formed by a break by pressing against a plurality of gallium nitride based semiconductor layers epitaxially grown on the semipolar surface 51a. Because of the epitaxial film on the semipolar surface 51a, the end surfaces 67a and 67b are not cleaved surfaces with a low index such as the c-plane, m-plane, or a-plane that have been used as resonator mirrors. However, in the break of the lamination of the epitaxial film on the semipolar surface 51a, the end surfaces 67a and 67b have flatness and perpendicularity applicable as resonator mirrors.

Example 1
The laser diode was grown by metal organic vapor phase epitaxy as follows. Trimethylgallium (TMGa), trimethylaluminum (TMAl), trimethylindium (TMIn), ammonia (NH ₃ ), silane (SiH ₄ ), and biscyclopentadienyl magnesium (Cp ₂ Mg) were used as raw materials. As the substrate 71, a {20-21} GaN substrate was prepared. This GaN substrate was produced by cutting out from a (0001) GaN ingot grown thick by HVPE using a wafer slicing device at an angle in the range of 75 degrees in the m-axis direction.

  After this substrate was placed on the susceptor in the reactor, an epitaxial layer for the laser structure shown in FIG. 7 was grown by the following growth procedure. After placing the substrate 71 in the growth furnace, first, an n-type GaN layer (thickness: 1000 nm) 72 was grown on the substrate 71. Next, an n-type InAlGaN cladding layer (thickness: 1200 nm) 73 was grown on the n-type GaN layer 72. Subsequently, a light emitting layer was produced. First, an n-type GaN guide layer (thickness: 200 nm) 74 a and an undoped InGaN guide layer (thickness: 65 nm) 74 b were grown on the n-type InAlGaN cladding layer 73. Next, the active layer 75 was grown. The active layer 75 has a two-cycle multiple quantum well structure (MQW) composed of GaN (thickness: 15 nm) / InGaN (thickness: 3 nm). Thereafter, an undoped InGaN guide layer (thickness: 65 nm) 76a, a p-type AlGaN block layer (thickness: 20 nm) 76d, a p-type InGaN guide layer (thickness: 50 nm) 76b, and a p-type GaN guide layer (thickness 200 nm). ) 76c was grown on the active layer 75. Next, a p-type InAlGaN cladding layer (thickness: 400 nm) 77 was grown on the light emitting layer. Finally, a p-type GaN contact layer (thickness: 50 nm) 78 was grown on the p-type InAlGaN cladding layer 77.

Using this epitaxial substrate, an index guide type laser was produced by a photolithography method and an etching method. First, a striped mask was formed using photolithography. The mask extends in a direction in which the c-axis is projected onto the main surface. Using this mask, dry etching was performed to produce a 2 μm wide stripe ridge structure. For dry etching, for example, chlorine gas (Cl ₂ ) was used. An insulating film 79 was formed on the surface of the ridge structure. For example, SiO ₂ formed by a vacuum deposition method was used as the insulating film. After forming the insulating film 79, a p-side electrode 80a and an n-side electrode 80b were produced to produce a substrate product. The p-side electrode 80a was produced by a vacuum deposition method. The p-side electrode 80a is, for example, Ni / Au. The back surface of this epitaxial substrate was polished and thinned to 100 μm. The back surface was polished with diamond slurry. An n-side electrode 80b was formed on the polished surface by vapor deposition. The n-side electrode 80b was made of Ti / Al / Ti / Au.

In order to produce a laser bar from the substrate product by scribing, a laser scriber capable of irradiating a YAG laser having a wavelength of 355 nm was used. The following conditions were used for forming the scribe grooves:
Laser light output 100 mW;
Scanning speed 5 mm / sec.
The formed scribe groove was, for example, a groove having a length of 30 μm, a width of 10 μm, and a depth of 40 μm. A scribe groove was formed by directly irradiating the epitaxial surface with laser light through an insulating film opening portion of the substrate at a pitch of 800 μm. The resonator length was 600 μm. Using a blade, a resonant mirror was prepared by cleaving. A laser bar was produced by breaking by pressing the back surface of the substrate product.

  FIG. 6 is a drawing showing a scanning electron microscope image of the resonator end face while showing the {20-21} plane in the crystal lattice. More specifically, FIG. 6 (b) and FIG. 6 (c) show the relationship between the crystal orientation and the cleavage plane for the {20-21} -plane GaN substrate. FIG. 6B shows the surface orientation of the end face provided with the laser stripe in the <11-20> direction, which is indicated by the m-plane or c-plane that has been used as the resonator end face of the conventional nitride semiconductor laser. The cleavage plane is shown as end face 81d or c-plane 81. FIG. 6C shows the surface orientation of the end face provided with the laser stripe in the direction (hereinafter referred to as the M direction) in which the c-axis is projected onto the main surface, and the end face for the laser resonator together with the semipolar surface 71a. 81a and 81b are shown. The end surfaces 81a and 81b are substantially orthogonal to the semipolar surface 71a, but are different from conventional cleavage surfaces such as the conventional c-plane, m-plane, or a-plane.

  In the laser diode on the {20-21} plane GaN substrate in the present embodiment, the end face for the resonator is inclined with respect to the direction having polarity (for example, the direction of the c + axis vector). The surface chemistry is not equivalent. In the following description, the end surface 81a close to the + c plane is referred to as the {−1017} end surface, and the end surface 81b close to the −c plane is referred to as the {10-1-7} end surface. Further, as the normal vectors of these end faces, the <−1014> and <10-1-4> directions that are substantially normal vectors are used for convenience.

Dielectric multilayer films 82a and 82b were coated on the end face of the laser bar by vacuum deposition. The dielectric multilayer film was configured by alternately laminating SiO ₂ and TiO ₂ . Each film thickness was adjusted in the range of 50 to 100 nm and designed so that the central wavelength of the reflectance was in the range of 500 to 530 nm. The same wafer was divided into three in advance to produce the following three samples.
Device A:
A reflective film (4 periods, reflectance 60%) was formed on the {10-1-7} end face. Let {10-1-7} end face be a light emission surface (front).
A reflection film (10 cycles, reflectance 95%) was formed on the {−1017} end face. Let {-1017} end face be a reflective surface (rear).
Device B:
A reflective film (10 periods, reflectivity 95%) was formed on the {10-1-7} end face. Let {10-1-7} end face be a reflective surface (rear).
A reflection film (4 periods, reflectance 60%) was formed on the {−1017} end face. The {-1017} end face is the light exit face (front).
Device C:
The light exit surface (front) and the reflection surface (rear) are formed without considering the crystal plane (mixed by the bar). The thickness of the reflective film was the same as described above.

  After these laser elements were mounted on the TO header, the mounting body was energized to evaluate the element lifetime. A DC power source was used as the power source. Among the fabricated laser diodes, the device lifetime of one having an oscillation wavelength of 520 to 530 nm was evaluated. When measuring the light output, light emission from the end face of the laser element was detected by a photodiode. During the measurement, the ambient temperature was set to 27 degrees Celsius. The life of the laser diode was measured by monitoring the light output under a constant current condition. The current value was adjusted so that the initial value of the light output was 10 mW. Although the current value in the initial setting varied depending on the laser diode, the current value was in the range of about 80 to 150 mA. The elapsed time when the light output became half of the initial value was defined as the element lifetime. The measurement was performed up to 500 hours.

The element lifetime of devices A to C is shown below (unit: hour).
Device type, device A, device B, device sample C
SUB1:> 500, 362, 346;
SUB2:> 500, 366, 368;
SUB3:> 500, 242,>500;
SUB4:> 500, 340,>500;
SUB5:> 500, 348, 346;
SUB6:> 500, 312, 274;
SUB7:> 500, 198,>500;
SUB8:> 500, 326,>500;
SUB9:> 500, 256, 172;
SUB10:> 500, 242, 500.

When the average value of the element lifetime for each device was calculated from the above results, the following results were obtained.
Device A:> 500h (lifetime over 500 hours)
Device B: 299h (average lifetime 299 hours)
Device C:> 400h (lifetime over 400 hours)

  The above results show that in a laser diode chip manufactured from the same epitaxial substrate, a good element lifetime can be obtained by considering the relationship between the crystal plane and the total number of reflection films. Since the film stress increases as the number of reflection film layers increases, the crystal quality deteriorates when the total number of films on the {10-1-7} plane side having weak chemical properties is large as in the device B. Therefore, it is considered that the element deterioration is likely to proceed. The degree of deterioration is faster as the operating current is higher and the operating voltage is higher. For this reason, the greater the heat generated by the element and the smaller the heat released from the element, the faster the deterioration.

  The determination of the polarity at the end face of the laser bar (the plane orientation that the c-axis faces) can be performed, for example, as follows: A plane parallel to the waveguide is cut out by the focused ion beam (FIB) method and transmitted. In observation with a scanning electron microscope (TEM) method, it can be examined by focused electron diffraction (CBED) evaluation. The total number of films can be examined by observing the portion of the dielectric multilayer film with a transmission electron microscope. The cause of the element deterioration is presumed that the crystal quality of the well layer having a high In composition in contact with the reflective film is deteriorated. In order to suppress this deterioration and obtain a long-life element, it is preferable to reduce the reflective film thickness at the end face close to the −c plane and increase the reflective film thickness at the end face close to the + c plane.

In order to evaluate the basic characteristics of the manufactured laser, evaluation by energization was performed at room temperature. The power source was a pulse power source having a pulse width of 500 ns and a duty ratio of 0.1%. When measuring the optical output, the light emission from the laser end face was detected by a photodiode, and the current-optical output characteristic (IL characteristic) was examined. When measuring the emission wavelength, light emitted from the laser end face was passed through an optical fiber, and the spectrum was measured using a spectrum analyzer as a detector. When examining the polarization state, the polarization state was examined by rotating light emitted from the laser through a polarizing plate. When observing the LED mode light, an optical fiber was disposed on the upper surface side of the laser, and light emitted from the upper surface of the laser element was measured.

  As a result of confirming the polarization state after oscillation in all lasers, it was found that the laser beam was polarized in the a-axis direction. The oscillation wavelength was 500 to 530 nm.

The polarization state of LED mode (spontaneously emitted light) was measured with all lasers. The polarization component in the a-axis direction was defined as I1, the polarization component in the direction in which the m-axis was projected onto the principal surface was defined as I2, and (I1-I2) / (I1 + I2) was defined as the degree of polarization ρ. Thus, FIG. 9 was obtained as a result of investigating the relationship between the obtained degree of polarization ρ and the minimum value of the threshold current density. From FIG. 9, it can be seen that when the degree of polarization is positive, the threshold current density greatly decreases in the laser in the laser stripe M direction. That is, it can be seen that the threshold current density is greatly reduced when the degree of polarization is positive (I1> I2) and the waveguide is provided in the off direction.
The data shown in FIG. 9 is as follows.

Threshold current Threshold current polarization degree, (M direction stripe), (<11-20> stripe)
0.08 64 20
0.05 18 42
0.15 9 48
0.276 7 52
0.4 6

As a result of examining the relationship between the inclination angle of the c-axis in the m-axis direction of the GaN substrate and the oscillation yield, FIG. 10 was obtained. In this example, the oscillation yield was defined as (number of oscillation chips) / (number of measurement chips). FIG. 10 is a plot of measured values of a laser having a stacking fault density of 1 × 10 ⁴ (cm ⁻¹ ) or less and including a laser stripe in the M direction. FIG. 10 shows that the oscillation yield is very low when the off angle is 45 degrees or less. As a result of observing the end face state with an optical microscope, it was found that at an angle smaller than 45 degrees, the m-plane appeared in most of the chips and verticality could not be obtained. It can also be seen that when the off angle is in the range of 63 degrees to 80 degrees, the verticality is improved and the oscillation yield is increased to 50% or more. From these facts, the optimum range of the off-angle of the GaN substrate is 63 degrees or more and 80 degrees or less. Similar results can be obtained even in the range of 100 degrees to 117 degrees, which is the angle range in which the crystallographically equivalent end faces are provided.
The data shown in FIG. 10 is as follows.
Inclination angle, yield
10 0.1
43 0.2
58 50
63 65
66 80
71 85
75 80
79 75
85 45
90 35.

(Example 2)
The surface index of the gallium nitride substrate main surface and the surface index perpendicular to the substrate main surface and substantially perpendicular to the direction in which the c-axis is projected onto the main surface are shown below. The unit of angle is "degrees":
Main surface index, angle formed with (0001), perpendicular to main surface
Face index of the first end face, angle formed with the main face
(0001): 0.00, (-1010), 90.00; FIG. 11 (a)
(10-17): 15.01, (-2021), 90.10; FIG. 11 (b)
(10-12): 43.19, (-4047), 90.20; FIG. 12 (a)
(10-11): 61.96, (-2027), 90.17; FIG. 12 (b)
(20-21): 75.09, (-1017), 90.10; FIG. 13 (a)
(10-10): 90.00, (0001), 90.00; FIG. 13 (b)
(20-2-1): 104.91, (10-17), 89.90; FIG. 14 (a)
(10-1-1): 118.04, (20-27), 89.83; FIG. 14 (b)
(10-1-2): 136.81, (40-47), 89.80; FIG. 15 (a)
(10-1-7): 164.99, (20-21), 89.90; FIG. 15 (b)
(000-1): 180.00, (10-10), 90.00; FIG.
FIGS. 11 to 16 are diagrams schematically showing atomic arrangements on a crystal surface having a plane index that can be an end face as an optical resonator perpendicular to the main surface. Referring to FIG. 11A, the atomic arrangement of the (−1010) plane and the (10−10) plane perpendicular to the (0001) plane main surface is schematically shown. Referring to FIG. 11B, the atomic arrangement of the (−2021) plane and the (20-2-1) plane perpendicular to the (10-17) plane main surface is schematically shown. Referring to FIG. 12A, the atomic arrangement of the (−4047) plane and the (40-4-7) plane perpendicular to the (10-12) plane main surface is schematically shown. Referring to FIG. 12B, the atomic arrangement of the (−2027) plane and the (20-2-7) plane perpendicular to the (10-11) plane main surface is shown. Referring to FIG. 13A, the atomic arrangement of the (−1017) plane and the (10-1-7) plane perpendicular to the (20-21) plane main surface is schematically shown. Referring to FIG. 13B, the atomic arrangement of the (0001) plane and the (000-1) plane perpendicular to the (10-10) principal plane is schematically shown. Referring to FIG. 14A, the atomic arrangement of the (10-17) plane and the (−101-7) plane perpendicular to the (20-2-1) principal plane is shown. Referring to FIG. 14B, the atomic arrangement of the (20-27) plane and the (−202-7) plane perpendicular to the (10-1-1) plane main surface is shown. Referring to FIG. 15A, the atomic arrangement of the (40-47) plane and the (−404-7) plane perpendicular to the (10-1-2) principal plane is schematically shown. Referring to FIG. 15B, the atomic arrangement of the (20-21) plane and the (−202-1) plane perpendicular to the (10-1-7) plane main surface is shown. Referring to FIG. 16, the atomic arrangement of the (10-10) plane and the (-1010) plane perpendicular to the (000-1) plane main surface is schematically shown. In these figures, black circles indicate nitrogen atoms and white circles indicate group III atoms.

  Referring to FIGS. 11 to 16, it can be understood that even when the off-angle is relatively small from the c-plane, the constituent elements change and the surface appearance changes greatly. For example, in FIG. 11B, the substrate main surface is (10-17), and the angle formed with the (0001) surface is about 15 degrees. At this time, the first end face is (−2021), the second end face is (20-2-1), and these two crystal faces are the kind of constituent elements on the outermost surface and the number of bonds and angles bonded to the crystals. Are significantly different in chemical properties. Conventionally, when the substrate main surface that has been widely used for nitride semiconductor lasers is the (0001) plane, as shown in FIG. 11A, the end face for the resonator is (10-10) and ( -1010), and the two crystal planes have the same chemical properties because the types of constituent elements on the outermost surface and the number and angle of bonds bonded to the crystal are the same. It is shown that as the tilt angle of the main surface of the substrate increases from the (0001) plane, the type of constituent elements on the surface of the end face, the number of bonds bonded to the crystal, and the angle change greatly. From this, in the laser diode whose substrate main surface is the (0001) surface, it is possible to manufacture a good laser element without paying special attention to the characteristics of the end surface coating, but the substrate main surface is half-finished. In a laser diode having a polar face, the end face coat can be formed in a uniform manner so that the characteristics can be improved.

  According to the knowledge of the inventors, the reaction with the end face coat film is promoted when the ratio of the number of nitrogen atoms bonded to the crystal by three bonds in the surface constituent elements is increased at two or more consecutive positions. Presumed to be. For example, in FIG. 13A, the substrate main surface is (20-21), and the angle formed with the (0001) surface is about 75 degrees. At this time, the first end face is (−1017), the second end face is (10-1-7), and (10-1-7) includes a nitrogen atom bonded to the crystal by three bonds. The number is continuously arranged at three places. Therefore, the reaction with the end face coating film is easily promoted. At this time, the c + axis vector indicating the direction of the <0001> axis of the GaN substrate is a crystal of either the m-axis or the a-axis of the GaN substrate with respect to the normal vector indicating the direction of the normal axis of the main surface of the GaN substrate. It is inclined at an angle in the range of about 45 degrees to 80 degrees and 100 degrees to 135 degrees in the axial direction.

  In this laser diode, when the waveguide vector WV forming an acute angle with the c + axis vector is directed from the second end face (for example, the end face 28 in FIG. 1) to the first end face (for example, the end face 26 in FIG. 1), Since the thickness of the second dielectric multilayer film on the second end face (C− side) is smaller than the thickness of the first dielectric multilayer film on the first end face (C + side), the second dielectric The body multilayer film is on the front side, and laser light is emitted from the front side. The first dielectric multilayer film is on the rear side, and the laser light is reflected on the rear side. When the thickness of the second dielectric multilayer film (C− film) on the front side is thinner than the thickness of the first dielectric multilayer film (C + film) on the rear side, it is caused by the dielectric multilayer film on the end face. Thus, it is possible to reduce the deterioration of the element accompanied by the deterioration of the crystal quality that proceeds from the second end face, and to avoid a decrease in the element life.

  According to various experiments including the above-described embodiment, the angle ALPHA can be in the range of 45 degrees to 80 degrees and 100 degrees to 135 degrees. In order to improve the oscillation chip yield and device life, the angle ALPHA can be in the range of 63 degrees to 80 degrees and 100 degrees to 117 degrees. In the inclination of the <0001> axis in the m-axis direction, typical semipolar principal surfaces, for example, {20-21} plane, {10-11} plane, {20-2-1} plane, and {10-1 -1} plane. Furthermore, it can be a slightly inclined surface from these semipolar surfaces. Moreover, the semipolar principal surface is, for example, any one of {20-21} plane, {10-11} plane, {20-2-11} plane, and {10-1-1} plane, and m plane. It can be a slightly inclined surface that is turned off in the range of −4 degrees to +4 degrees in the direction. In the inclination of the <0001> axis in the a-axis direction, typical semipolar principal surfaces, for example, {11-22}, {11-21}, {11-2-1}, {11-2-2} It can be either side. Furthermore, it can be a slightly inclined surface from these semipolar surfaces. Further, the semipolar principal surface is, for example, at least −4 degrees in the a-plane direction from any one of {11-22}, {11-21}, {11-2-1}, and {11-2-2}. It can be a slightly inclined surface within a range of +4 degrees or less.

  While the principles of the invention have been illustrated and described in the preferred embodiments, it will be appreciated by those skilled in the art that the invention can be modified in arrangement and detail without departing from such principles. The present invention is not limited to the specific configuration disclosed in the present embodiment. We therefore claim all modifications and changes that come within the scope and spirit of the following claims.

DESCRIPTION OF SYMBOLS 11 ... Group III nitride semiconductor laser element, 13 ... Laser structure, 13a ... 1st surface, 13b ... 2nd surface, 13c, 13d ... Edge, 15 ... Electrode, 17 ... Support base | substrate, 17a ... Semipolar main Surface, 17b ... Back surface of supporting substrate, 17c ... End surface of supporting substrate, 19 ... Semiconductor region, 19a ... Surface of semiconductor region, 19c ... End surface of semiconductor region, 21 ... First cladding layer, 23 ... Second cladding layer, 25 ... Active Layer, 25a ... well layer, 25b ... barrier layer, 27, 29 ... broken section, ALPHA ... angle, Sc ... c-plane, NX ... normal axis, 31 ... insulating film, 31a ... insulating film opening, 35 ... n-side light guide Layer, 37 ... p-side light guide layer, 39 ... carrier block layer, 41 ... electrode, 43a, 43b ... dielectric multilayer, MA ... m-axis vector, BETA ... angle, DSUB ... support substrate thickness, 51 ... substrate, 51a ... Semipolar main surface SP ... substrate product, 57 ... gallium nitride based semiconductor region, 59 ... light emitting layer, 61 ... gallium nitride based semiconductor region, 53 ... semiconductor region, 54 ... insulating film, 54a ... insulating film opening, 55 ... laser structure, 58a ... Anode electrode, 58b ... Cathode electrode, 63a ... First surface, 63b ... Second surface, 10a ... Laser scriber, 65a ... Scribe groove, 65b ... Scribe groove, LB ... Laser beam, SP1 ... Substrate product, LB1 ... Laser bar, 69 ... Blade, 69a ... Edge, 69b, 69c ... Blade surface, 71 ... Support device, 71a ... Support surface, 71b ... Recess

Claims (21)

A group III nitride semiconductor laser device comprising:
A support structure having a semipolar main surface made of a group III nitride semiconductor, and a laser structure including a semiconductor region provided on the semipolar main surface of the support base;
First and second dielectric multilayer films provided on the first and second end faces of the semiconductor region, respectively, for the resonator of the nitride semiconductor laser diode,
The semiconductor region includes a first cladding layer made of a gallium nitride semiconductor of a first conductivity type, a second cladding layer made of a gallium nitride semiconductor of a second conductivity type, the first cladding layer, and the first cladding layer. An active layer provided between the two clad layers,
The first cladding layer, the second cladding layer, and the active layer are arranged along a normal axis of the semipolar principal surface,
The active layer includes a gallium nitride based semiconductor layer,
The c + axis vector indicating the direction of the <0001> axis of the group III nitride semiconductor of the support base is the m-axis and a axis of the group III nitride semiconductor with respect to the normal vector indicating the direction of the normal axis. It is inclined at an angle in the range of 45 degrees to 80 degrees and 100 degrees to 135 degrees in the direction of any crystal axis,
The first and second end faces intersect a reference plane defined by the crystal axis and the normal axis of the hexagonal group III nitride semiconductor;
The c + axis vector forms an acute angle with a waveguide vector indicating a direction from the second end face to the first end face,
The group III nitride semiconductor laser device, wherein a thickness of the second dielectric multilayer film is thinner than a thickness of the first dielectric multilayer film. The laser structure includes first and second surfaces, wherein the first surface is a surface opposite the second surface;
The semiconductor region is located between the first surface and the support substrate;
3. The III according to claim 1, wherein each of the first and second end faces is included in a split section extending from an edge of the first face to an edge of the second face. 3. Group nitride semiconductor laser device.   3. The group III nitride semiconductor laser device according to claim 1, wherein a c-axis of the group III nitride semiconductor is inclined in a direction of an m-axis of the nitride semiconductor.   The main surface of the support base is in a range of not less than −4 degrees and not more than 4 degrees from any one of {10-11}, {20-21}, {20-2-1}, and {10-1-1}. The group III nitride semiconductor laser device according to claim 1, wherein the group III nitride semiconductor laser device is inclined at   3. The group III nitride semiconductor laser device according to claim 1, wherein a c-axis of the group III nitride semiconductor is inclined in a direction of the a-axis of the nitride semiconductor.   The main surface of the support base is in a range of −4 degrees or more and 4 degrees or less from any one of {11-22}, {11-21}, {11-2-1}, and {11-2-2}. The group III nitride semiconductor laser device according to claim 1, 2 or 5, wherein   The group III according to any one of claims 1 to 6, wherein the active layer includes a well layer made of a gallium nitride-based semiconductor containing In as a constituent element and including a strain. Nitride semiconductor laser device.   The group III nitride semiconductor laser device according to any one of claims 1 to 7, wherein the active layer is provided so as to generate oscillation light having a wavelength of 430 to 550 nm.   9. The group III nitride semiconductor laser device according to claim 1, wherein the group III nitride semiconductor is GaN. The dielectric layers in the first dielectric multilayer film are silicon oxide, silicon nitride, silicon oxynitride, titanium oxide, titanium nitride, titan oxynitride, zirconium oxide, zirconium nitride, zirconium. Oxynitride, zirconium fluoride, tantalum oxide, tantalum nitride, tantalum oxynitride, hafnium oxide, hafnium nitride, hafnium oxynitride, hafnium fluoride, aluminum oxide, aluminum nitride, aluminum oxynitride , Magnesium fluoride, magnesium oxide, magnesium nitride, magnesium oxynitride, calcium fluoride, barium fluoride, cerium fluoride, antimony oxide, bismuth oxide, gadolinium oxide,
The dielectric layer in the second dielectric multilayer film is made of silicon oxide, silicon nitride, silicon oxynitride, titanium oxide, titanium nitride, titanium oxynitride, zirconium oxide, zirconium nitride, zirconium. Oxynitride, zirconium fluoride, tantalum oxide, tantalum nitride, tantalum oxynitride, hafnium oxide, hafnium nitride, hafnium oxynitride, hafnium fluoride, aluminum oxide, aluminum nitride, aluminum oxynitride , Magnesium fluoride, magnesium oxide, magnesium nitride, magnesium oxynitride, calcium fluoride, barium fluoride, cerium fluoride, antimony oxide, bismuth oxide, gadolinium oxide, The group III nitride according to any one of claims 1 to 9, wherein Conductor laser element. A method for producing a group III nitride semiconductor laser device, comprising:
Preparing a substrate having a semipolar main surface made of a hexagonal group III nitride semiconductor;
Forming a substrate structure having a laser structure including a semiconductor region formed on the semipolar main surface and the substrate, an anode electrode, and a cathode electrode;
Forming the first and second end faces after forming the substrate product;
Forming first and second dielectric multilayer films for the resonator of the nitride semiconductor laser element on the first and second end faces, respectively.
The first and second end faces intersect a reference plane defined by a crystal axis of one of the a-axis and m-axis of the hexagonal group III nitride semiconductor and a normal axis of the semipolar principal surface. ,
The semiconductor region includes a first cladding layer made of a gallium nitride semiconductor of a first conductivity type, a second cladding layer made of a gallium nitride semiconductor of a second conductivity type, the first cladding layer, and the first cladding layer. An active layer provided between the two clad layers,
The first cladding layer, the second cladding layer, and the active layer are arranged in the direction of the normal axis;
The active layer includes a gallium nitride based semiconductor layer,
The semipolar principal surface of the substrate intersects a plane orthogonal to the c + axis vector indicating the <0001> axis direction of the nitride semiconductor at an angle in the range of 45 degrees to 80 degrees and 100 degrees to 135 degrees. And
The c + axis vector forms an acute angle with a waveguide vector indicating a direction from the second end face to the first end face,
The method of claim 1, wherein the thickness of the second dielectric multilayer film is thinner than the thickness of the first dielectric multilayer film.   The method according to claim 11, further comprising determining a plane orientation of the first and second end faces before forming the first and second dielectric multilayer films. The step of forming the first and second end faces includes:
Scribing a first surface of the substrate product;
Separating the substrate product by pressing on the second surface of the substrate product to form a laser bar,
The laser bar has first and second end faces formed by the separation,
The first surface is a surface opposite to the second surface;
The semiconductor region is located between the first surface and the substrate;
Each of the said 1st and 2nd end surface of the said laser bar is extended to the said 2nd surface from the said 1st surface, and is contained in the split surface formed by the said isolation | separation. 11. A method according to claim 11 or claim 12.   14. The method according to claim 11, wherein the c-axis of the group III nitride semiconductor is inclined in the direction of the m-axis of the nitride semiconductor.   The main surface of the substrate is within a range of −4 degrees or more and 4 degrees or less from any one of {10-11}, {20-21}, {20-2-1}, and {10-1-1}. The method according to claim 11, wherein the method is inclined.   14. The method according to claim 11, wherein the c-axis of the group III nitride semiconductor is inclined in the direction of the a-axis of the nitride semiconductor.   The main surface of the substrate is in a range of −4 degrees or more and 4 degrees or less from any one of {11-22}, {11-21}, {11-2-1}, and {11-2-2}. The method according to claim 11, wherein the method is inclined.   The formation of the active layer includes a step of growing a well layer made of a gallium nitride semiconductor containing In as a constituent element and including strain. The method described in.   The method according to claim 11, wherein the active layer is configured to generate oscillation light having a wavelength of 430 to 550 nm.   The method according to any one of claims 11 to 19, wherein the group III nitride semiconductor is GaN.   The dielectric layers in the first dielectric multilayer film are silicon oxide, silicon nitride, silicon oxynitride, titanium oxide, titanium nitride, titan oxynitride, zirconium oxide, zirconium nitride, zirconium. Oxynitride, zirconium fluoride, tantalum oxide, tantalum nitride, tantalum oxynitride, hafnium oxide, hafnium nitride, hafnium oxynitride, hafnium fluoride, aluminum oxide, aluminum nitride, aluminum oxynitride , Magnesium fluoride, magnesium oxide, magnesium nitride, magnesium oxynitride, calcium fluoride, barium fluoride, cerium fluoride, antimony oxide, bismuth oxide, gadolinium oxide And the dielectric layer in the second dielectric multilayer film is made of silicon oxide, silicon , Silicon oxynitride, titanium oxide, titanium nitride, titanium oxynitride, zirconium oxide, zirconium nitride, zirconium oxynitride, zirconium fluoride, tantalum oxide, tantalum nitride, tantalum oxynitride, Hafnium oxide, hafnium nitride, hafnium oxynitride, hafnium fluoride, aluminum oxide, aluminum nitride, aluminum oxynitride, magnesium fluoride, magnesium oxide, magnesium nitride, magnesium oxynitride, calcium fluoride 21. It is formed using at least one of barium fluoride, cerium fluoride, antimony oxide, bismuth oxide and gadolinium oxide. The described method.