JP2012004311A - High-output laser device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a stable and compact high-output laser device capable of compensating for wavefront fluctuations on the order of a kilohertz or higher.SOLUTION: A high-output laser device comprises: first phase error detection means (11) for detecting a phase error among arrays after optical amplification; a wavefront sensor (12) for detecting a wavefront after space propagation so as to generate positional information according to an angle of the wavefront; second phase error detection means (13) for detecting a phase error after space propagation based on the positional information; phase control means (14) for calculating first and second feedback signals to compensate for the respective phase errors and selectively outputting one of the feedback signals; and optical phase modulation means (4) for compensating for the phase error in response to the selected feedback signal.

Description

  The present invention relates to a stable and compact high-power laser device capable of compensating for high-speed wavefront fluctuations.

  As a method for realizing a high-power laser device, coherent beam combination (CBC) is known in which a single laser beam is used as seed light for optical amplification and optical amplification is performed after branching and then combined (for example, Coherent Beam Combine: CBC). , See Patent Document 1).

  In a CBC-based high-power laser, the phase of each optical path is aligned and a beam is output. In addition to the phase control feedback loop that aligns the phases at the time of output, a wavefront error is detected by a wavefront sensor in order to compensate for wavefront fluctuations in space propagation. And the condensing pattern with a single lobe is formed by compensating the wavefront error detected by the wavefront sensor.

  Conventionally, a wavefront sensor such as a camera is used as a means for detecting a wavefront error, and an adaptive mirror is used as a means for compensating. However, there is a problem that the phase error detection speed of the wavefront sensor and the response speed of the adaptive mirror are lower than the kHz order and cannot respond more than the kHz order (see, for example, Patent Document 2).

  With respect to such a problem, in Patent Document 1, an RF signal is used as a reference signal of a phase control feedback loop at the time of output, and wavefront fluctuation is used as an offset phase of an RF signal (reference signal) corresponding to each optical path. A method has been proposed that enables control at a high speed of the order of kHz or more.

JP 2000-323774 A JP 2009-244030 A

However, the prior art has the following problems.
In the conventional methods described in Patent Documents 1 and 2, the response speed of wavefront fluctuation correction is limited by the wavefront sensor (camera, etc.) and the band of the correction method (adaptive mirror: <1 [kHz]). As a result, there is a problem that high-speed wavefront fluctuations of the order of kHz or higher cannot be compensated.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to obtain a stable and compact high-power laser device that can compensate for wavefront fluctuations in the order of kHz or more.

  The high-power laser device according to the present invention is a high-power laser device that branches a single-frequency reference light into sub-arrays, optically amplifies each array, detects an optical phase error between the arrays, and coherently adds the outputs. A wavefront for generating position information corresponding to the angle of the wavefront by performing wavefront detection after spatial propagation and first phase error detecting means for detecting a phase error between the arrays after optical amplification as a first phase error A sensor, second phase error detecting means for detecting a phase error after spatial propagation as a second phase error based on position information generated by the wavefront sensor, and a first phase error and a second phase error. A first feedback signal that compensates for the first phase error and a second feedback signal that compensates for the second phase error are calculated, and the first phase error and the second phase error are calculated. A first feedback signal and a second feedback signal based on a comparison result between the first value and a predetermined threshold value, and a phase control means for outputting the selected feedback signal; And optical phase modulation means for compensating for phase errors in response to the selected feedback signal.

  According to the high-power laser device of the present invention, by using a photodetector instead of a camera for wavefront detection after propagation, and using an optical phase modulator instead of an adaptive mirror for phase control, wavefront fluctuations in the order of kHz or more can be prevented. It is possible to obtain a stable and compact high-power laser device that can compensate for the above.

It is a block diagram of the high output laser apparatus in Embodiment 1 of this invention. It is an illustration figure of the wavefront sensor used in Embodiment 1 of this invention. It is a block diagram of the high output laser apparatus in Embodiment 2 of this invention. It is a block diagram of the high output laser apparatus in Embodiment 3 of this invention. It is a block diagram of the high output laser apparatus in Embodiment 4 of this invention. It is a block diagram of the high output laser apparatus in Embodiment 5 of this invention. It is a block diagram of the high output laser apparatus in Embodiment 6 of this invention. It is a block diagram of the high output laser apparatus in Embodiment 7 of this invention. It is a flowchart which shows a series of flows of the switching process of the phase locked loop by the phase control circuit in the high output laser apparatus of this invention.

  Hereinafter, preferred embodiments of the high-power laser device of the present invention will be described with reference to the drawings.

Embodiment 1 FIG.
FIG. 1 is a configuration diagram of a high-power laser device according to Embodiment 1 of the present invention. 1 includes a laser light source 1, an optical branching splitter 2, an optical branching splitter array (N branch) 3, an optical phase modulator (N) 4, an optical amplifier (N) 5, an RF signal. Oscillator 6, optical frequency shifter 7, optical multiplexing / branching element 8, collimator lens 9, optical multiplexing / branching element 10, phase error detection circuit 11, wavefront sensor (angle detector) 12, phase error detection circuit 13, and phase control circuit 14 It is configured with. Further, R1 and R2 in FIG. 1 indicate a signal optical path and a reference optical path branched by the optical branching splitter 2, respectively.

  The high-power laser apparatus according to the present invention has a phase-locked loop 1 that controls a phase error by feeding back phase fluctuations caused by an optical amplifier 5 after optical branching, and propagation obtained from wavefront information detected by a wavefront sensor 12. There are two control loops of the phase locked loop 2 that performs wavefront control by feeding back the phase fluctuation information by.

  Further, the high-power laser apparatus according to the present invention controls the phase of the control signals (corresponding to the phase error signal S1 from the phase locked loop 1 and the phase error signal S2 from the phase locked loop 2 in FIG. 1) by these two control loops. The circuit 14 selectively switches and the optical phase modulator 4 controls the phase of these two control loops.

Next, the operation of the high-power laser device according to the first embodiment will be described.
First, the output of the laser light source 1 is bifurcated into a signal optical path R1 and a reference optical path R2 by the optical branching splitter 2. The signal optical path R <b> 1 is N-branched using the optical branching splitter array 3 and then input to the optical phase modulator 4. In FIG. 1, only one optical path is shown for simplicity.

  The output modulated by the optical phase modulator 4 is amplified by the optical amplifier 5. The optical phase modulator 4 compensates for wavefront fluctuations accompanying propagation after being output from the optical amplifier 5 and this apparatus.

  On the other hand, the reference optical path R2 is frequency shifted by the optical frequency shifter 7 by the amount of the frequency corresponding to the RF signal. Here, the optical frequency shifter 7 is applied with an electric signal having a fixed frequency from the RF signal oscillator 6, and is thereby frequency-shifted by an amount corresponding to the RF signal. The beam diameter of the frequency-shifted light is adjusted by the collimator lens 9, and is multiplexed and branched with the signal light (N beams) by the optical multiplexing / branching element 8 (for example, the beam splitter 8) at the subsequent stage.

  In the optical path after multiplexing (in FIG. 1, after passing through the beam splitter 8, the optical path heads upward), the phase error detection circuit 11 detects the beat signal of each signal optical path, and phase error information (see FIG. 1 (corresponding to the phase error signal S1 in FIG. 1). Then, based on the phase error information detected by the phase error detection circuit 11, the phase control circuit 14 generates a control signal for locking the relative phase of each optical signal, and the optical path corresponding to each detected phase error. Is fed back to the optical phase modulator 4.

  In this manner, the phase locked loop 1 is synchronized by closing the phase control feedback loop based on the phase error signal S1. This phase-locked loop 1 compensates for the relative phase between the arrays immediately after output.

  On the other hand, the N signal lights that have passed through the optical multiplexing / branching element 8 (in FIG. 1, the optical path that passes through the beam splitter 8 and then goes to the right) pass through the optical multiplexing / branching element 10 and then converge to the target. Is done. Then, wavefront fluctuations that occur during propagation to the target are detected using the optical multiplexing / branching element 10 and the wavefront sensor 12 by the reflected light from the target.

  FIG. 2 is an exemplary diagram of the wavefront sensor 12 used in the first embodiment of the present invention. The wavefront sensor 12 can acquire wavefront information by configuring it as an angle detector using a lens array and a photodetector array as shown in FIG. 2, for example.

  When the wave front is disturbed, the detected position differs as shown in FIG. Therefore, for example, position detection is performed using a quadrant photodetector. Thereby, the subsequent phase error detection circuit 13 can detect the phase error from the position information detected by the wavefront sensor 12.

  The phase error detection circuit 13 outputs a phase error signal S2 based on the position information obtained by the wavefront sensor 12. As described above, the phase control circuit 14 first aligns the phase of each optical path immediately after output from the optical amplifier 5 by the phase locked loop 1. Thereafter, the phase control circuit 14 closes the phase control feedback loop based on the phase error signal S2 in order to compensate for phase fluctuations due to spatial propagation and to align each optical path phase on the target after spatial propagation. Thereby, the phase-locked loop 2 is established in synchronization.

  As described above, according to the first embodiment, a photodetector is used instead of a camera for wavefront detection after propagation, and an optical phase modulator is used for phase control instead of an adaptive mirror. By providing such a configuration, high-speed phase control of the order of MHz or higher can be realized.

Embodiment 2. FIG.
In the first embodiment, the case where the angle detector 12 detects the wavefront information after propagation has been described. On the other hand, in this Embodiment 2, the case where it is set as the heterodyne detection system is demonstrated. FIG. 3 is a configuration diagram of a high-power laser device according to Embodiment 2 of the present invention. In FIG. 3, elements that are the same as or similar to those in FIG.

  The configuration of FIG. 3 in the second embodiment is different from the configuration of FIG. 1 in the first embodiment in that a collimator lens 15 is further provided. And by providing the collimator lens 15, the heterodyne detection system is realized. Therefore, the operation of the high-power laser device according to the second embodiment will be described focusing on this difference.

  A reference optical path for wavefront sensor detection is branched from the optical path R <b> 2 and collimated by the collimator lens 15. The output method collimated by the collimator lens 15 and the reflected light from the target are combined by the optical combining / branching element 10, so that the detection method at the wavefront sensor 12 is a heterodyne detection method.

  With such a configuration, heterodyne detection can be performed using reference light having a sufficient output. As a result, detection at the shot noise limit becomes possible, and reflected light from a weak target can be detected with high sensitivity.

  Furthermore, in the second embodiment, the wavefront sensor 12 can detect a beat signal having a fixed frequency output from the RF signal oscillator 6 as in the case of the phase error detection circuit 11 in the phase locked loop 1. Therefore, the phase error detection circuit 13 in the phase locked loop 2 can acquire the relative phase information of each optical path from the beat signal, as in the phase error detection circuit 11 in the phase locked loop 1.

  Based on the phase error information detected by the phase error detection circuit 13, the phase control circuit 14 generates a control signal that locks the relative phase of each optical signal, and the light in the optical path corresponding to each detected phase error. Feedback is made to the phase modulator 4. In this way, the phase locked loop 2 is synchronized by closing the phase control feedback loop based on the phase error signal S2.

  As described above, according to the second embodiment, a photodetector is used instead of a camera for wavefront detection after propagation, and an optical phase modulator is used for phase control instead of an adaptive mirror. By providing such a configuration, high-speed phase control of the order of MHz or higher can be realized.

  Furthermore, it has a configuration capable of heterodyne detection of the propagated wavefront information using reference light having a sufficient output. As a result, detection at the shot noise limit becomes possible, and a further effect that reflected light from a weak target can be detected with high sensitivity can be obtained.

Embodiment 3 FIG.
In the second embodiment, the case where the detection method of wavefront information after propagation is a heterodyne method has been described. On the other hand, in this Embodiment 3, the case where it is set as a homodyne detection system is demonstrated. FIG. 4 is a configuration diagram of a high-power laser device according to Embodiment 3 of the present invention. 4, the same or similar elements as those in FIG. 3 are denoted by the same reference numerals.

  The configuration of FIG. 4 in the third embodiment is basically the same as the configuration of FIG. 3 in the previous second embodiment, but instead of using the reference light branched behind the optical frequency shifter 7, The difference is that the reference light branched in front of the optical frequency shifter 7 is collimated by the collimator lens 15. With such a configuration, the reflected light from the target at the time of multiplexing by the optical multiplexing / branching element 10 matches the frequency of the reference light, and a homodyne detection system can be realized.

  Therefore, homodyne detection can be performed using reference light having a sufficient output. As a result, similar to the second embodiment, detection at the shot noise limit is possible, and the reflected light from the weak target can be detected with high sensitivity.

  As described above, according to the third embodiment, a photo detector is used instead of a camera for wavefront detection after propagation, and an optical phase modulator is used for phase control instead of an adaptive mirror. By providing such a configuration, high-speed phase control of the order of MHz or higher can be realized.

  Furthermore, it has a configuration capable of heterodyne detection of the propagated wavefront information using reference light having a sufficient output. As a result, detection at the shot noise limit becomes possible, and a further effect similar to that of the second embodiment can be obtained, in which reflected light from a weak target can be detected with high sensitivity.

Embodiment 4 FIG.
In the second and third embodiments, the case where the wavefront fluctuation detection method is the heterodyne or homodyne detection method has been described. In contrast, the fourth embodiment further includes means (corresponding to a frequency separation circuit 16 to be described later) capable of suppressing the influence of leakage light, internal reflection light, or background light of the transmission light itself at the time of detection. The case will be described.

  FIG. 5 is a configuration diagram of a high-power laser device according to Embodiment 4 of the present invention. In FIG. 5, the same or similar elements as those in FIG. 4 are denoted by the same reference numerals.

  The configuration of FIG. 5 in the fourth embodiment further includes a frequency separation circuit 16 between the angle detector 12 and the phase error detection circuit 13 as compared to the configuration of FIG. 4 in the previous third embodiment. The point is different. By providing the frequency separation circuit 16, the frequency of the light reflected from the target is detected by shifting the frequency by Doppler frequency shift when the target is moving. Therefore, the operation of the high-power laser device according to the fourth embodiment will be described focusing on this difference.

  5 shows a case where the frequency separation circuit 16 is added to FIG. 4 using the homodyne detection method, but the frequency separation circuit 16 is added to FIG. 3 using the heterodyne detection method. It is possible as well.

  The leakage light, internal reflection light, or background light of the transmission light itself is detected as a DC component signal. On the other hand, the reflected light from the target is detected as a signal shifted in frequency by the Doppler frequency shift. Therefore, in the fourth embodiment, the frequency separation circuit 16 removes the DC component of the signal using, for example, DC cut. As a result, only the reflected light from the target can be extracted, and the influence of leakage light, internal reflection light, or background light of the transmission light itself can be suppressed.

  As described above, according to the fourth embodiment, the frequency separation circuit is provided in the phase-locked loop 2. As a result, in addition to the effects of the second and third embodiments, the effect of suppressing the influence of leakage light, internal reflection light, or background light of the transmission light itself can be further obtained.

Embodiment 5 FIG.
In the first to fourth embodiments, the case where the phase compensation for synchronizing the relative phase between the arrays after optical amplification or the relative phase of the target is performed has been described. On the other hand, in the fifth embodiment, a case will be described in which means for generating an arbitrary wavefront on a target (corresponding to an offset phase output circuit 17 described later) is provided.

  FIG. 6 is a configuration diagram of a high-power laser device according to the fifth embodiment of the present invention. In FIG. 6, the same or similar elements as those in FIG. 1 are denoted by the same reference numerals.

  The configuration of FIG. 6 in the fifth embodiment is different from the configuration of FIG. 1 in the first embodiment in that an offset phase output circuit 17 is further provided in the previous stage of the phase control circuit 14. By providing the offset phase output circuit 17, an offset phase is applied to the phase between each array in the target after phase compensation, and the wavefront on the target is arbitrarily controlled. .

  6 shows a case where an offset phase output circuit 17 is added to FIG. 1 in the first embodiment, but in FIGS. 3 to 5 in the second to fourth embodiments. It is also possible to add an offset phase output circuit 17 to the same.

  As described above, according to the fifth embodiment, the offset phase output circuit is provided. As a result, in addition to the effects of the first to fourth embodiments, an effect that the wavefront on the target can be arbitrarily controlled can be further obtained.

Embodiment 6 FIG.
In the first to fifth embodiments, the case where one of the detected optical signals is used as the reference signal in the phase compensation has been described. On the other hand, in the sixth embodiment, a case will be described in which wavefront control is performed by further considering the signal output from the RF signal oscillator 6 as the reference signal S3.

  FIG. 7 is a configuration diagram of a high-power laser device according to Embodiment 6 of the present invention. In FIG. 7, the same or similar elements as those in FIG.

  The configuration of FIG. 7 in the sixth embodiment further includes a phase shifter 18 between the phase error detection circuit 13 and the phase control circuit 14 as compared to the configuration of FIG. 1 in the first embodiment. The point is different. Therefore, the operation of the high-power laser device according to the sixth embodiment will be described focusing on this difference.

  7 shows a case where a phase shifter 18 is added to FIG. 1 in the first embodiment, but in contrast to FIGS. 3 to 5 in the second to fourth embodiments. It is possible to add the phase shifter 18 in the same manner.

  In the high-power laser device according to the sixth embodiment, the signal output from the RF signal oscillator 6 is branched in the phase-locked loop 2 and used as the reference signal S3. The phase shifter 18 offsets the reference signal S3 using the phase error signal S2 detected via the wavefront sensor 12 and the phase error detection circuit 13 as an offset phase. With such a configuration, the wavefront fluctuation due to spatial propagation compensated by the phase locked loop 2 can be controlled as the offset phase of each RF signal (reference signal).

  As described above, according to the sixth embodiment, a phase shifter is provided. As a result, in addition to the effects of the first to fifth embodiments, the wavefront fluctuation due to spatial propagation compensated by the phase locked loop 2 can be controlled as the offset phase of each RF signal (reference signal). An effect can be obtained.

Embodiment 7 FIG.
In the first to sixth embodiments, when the phase error signal is detected in the phase-locked loop 1, the reference light is collimated by the collimator lens 9, and all the optical paths are multiplexed by the optical multiplexing / branching element 8. In the above, what adjusts the beam diameter has been described. On the other hand, in the seventh embodiment, a case will be described in which the light splitting splitter array 19 is used instead of the collimator lens 9 so that the reference light is arranged in an array like the transmission light.

  FIG. 8 is a configuration diagram of a high-power laser device according to Embodiment 7 of the present invention. In FIG. 8, the same or similar elements as those in FIG. 4 are denoted by the same reference numerals.

  The configuration of FIG. 8 in the seventh embodiment is different from the configuration of FIG. 4 in the third embodiment in that an optical branching splitter array 19 is provided instead of the collimator lens 9. Therefore, the operation of the high-power laser device according to the seventh embodiment will be described focusing on this difference.

  8 shows a case where the optical branching splitter array 19 is used instead of the collimator lens 9 in FIG. 4 in the previous third embodiment, but the previous first, second, fourth, and fourth embodiments. Similarly, it is also possible to use the optical branching splitter array 19 instead of the collimator lens 9 in FIGS.

  In the high-power laser device according to the seventh embodiment, an optical branching splitter array 19 is inserted into the reference optical path in the phase-locked loop 1 and is formed in an array shape like the signal light. Thereby, multiplexing can be performed for each optical path without spatially expanding the beam, and the loss of reference light can be reduced.

  As described above, according to the seventh embodiment, the optical branching splitter array is applied to the reference optical path in the phase locked loop 1. As a result, it is possible to perform detection in the phase error detection circuit with less reference light power than in the other first to sixth embodiments. Furthermore, since multiplexing is performed for each optical path, each can be modularized, and the output beams can be freely arranged in space. Furthermore, the number of arrays of transmitted light can be changed without changing other systems.

Embodiment 8 FIG.
In the eighth embodiment, the operation of the phase control circuit 14 that switches between the phase locked loop 1 and the phase locked loop 2 will be described in detail using a flowchart. The operation of the phase control circuit 14 is common to the first to seventh embodiments.

  FIG. 9 is a flowchart showing a series of flow of the phase-locked loop switching process by the phase control circuit 14 in the high-power laser apparatus of the present invention. The phase control circuit 14 includes a feedback signal (a feedback signal based on the phase error signal S1 output from the phase error detection circuit 11) for compensating for phase fluctuations caused by the optical amplifier 5 and the like, and wavefront information detected by the wavefront sensor 12. The feedback signal (the feedback signal based on the phase error signal S2 output from the phase error detection circuit 13) for compensating for the phase fluctuation due to the spatial propagation obtained from the above is switched according to the flowchart shown in FIG.

  First, in step S901, the phase control circuit 14 calculates feedback signals corresponding to the phase error signals S1 and S2 detected by the phase error detection circuit 11 and the phase error detection circuit 13, respectively.

  Next, in step S902, the phase control circuit 14 determines whether or not the phase error signal S1 falls within a preset phase synchronization establishment level (residual phase error when phase synchronization is established). When the phase control circuit 14 determines that the phase error signal S1 is not within the phase synchronization establishment level, the phase control circuit 14 proceeds to step S903 and uses the feedback signal calculated corresponding to the phase synchronization loop 1 as the optical phase modulator 4. And return to the process of step S901.

  On the other hand, if it is determined in step S902 that the phase error signal S1 is within the phase synchronization establishment level, the process proceeds to step S904, and the phase control circuit 14 determines that the phase synchronization loop 1 has been established in synchronization. . In step S905, the phase control circuit 14 determines whether or not the phase error signal S2 is detected.

  That is, the reflected light from the target is a weak signal and may not be detected. Therefore, the phase control circuit 14 determines whether or not the phase error signal S2 is detected in step S905.

  If it is determined in step S905 that the phase error signal S2 has not been detected, the process proceeds to step S903. Then, the phase control circuit 14 outputs the feedback signal calculated corresponding to the phase locked loop 1 to the optical phase modulator 4 in the same manner as in the case where the phase locked loop 1 is not established in synchronization, in step S901. Return to processing.

  On the other hand, if it is determined in step S905 that the phase error signal S2 is detected, the process proceeds to step S906, where the phase control circuit 14 uses the feedback signal calculated corresponding to the phase locked loop 2 as the optical phase. Output to the modulator 4.

  Next, in step S907, the phase control circuit 14 determines whether or not the phase error signal S2 falls within a preset phase synchronization establishment level (residual phase error when phase synchronization is established). When the phase control circuit 14 determines that the phase error signal S2 is not within the phase synchronization establishment level, the process returns to the process of step S901.

  On the other hand, if it is determined in the previous step S907 that the phase error signal S2 is within the phase synchronization establishment level, the process proceeds to step S908, and the phase control circuit 14 determines that the phase synchronization loop 2 has been established in synchronization. Then, a series of processing is completed.

  As described above, according to the eighth embodiment, the phase control is performed by switching between the phase locked loop 1 and the phase locked loop 2 based on the value of the phase error detected in each loop. have. As a result, phase synchronization can be established in the order of the phase locked loops 1 and 2. Furthermore, even when the reflected light from the target cannot be detected or when the phase synchronization is lost, the phase synchronization can be repeated.

  DESCRIPTION OF SYMBOLS 1 Laser light source, 2 Optical branch splitter, 3 Optical branch splitter array, 4 Optical phase modulator, 5 Optical amplifier, 6 RF signal oscillator, 7 Optical frequency shifter, 8 Optical multiplexing branch element (beam splitter), 9 Collimator lens, 10 Optical multiplexing branch element, 11 phase error detection circuit, 12 wavefront sensor (angle detector), 13 phase error detection circuit, 14 phase control circuit, 15 collimator lens, 16 frequency separation circuit, 17 offset phase output circuit, 18 phase shifter 19 Optical splitter splitter array.

Claims (6)

In a high-power laser device that branches a single-frequency reference light into sub-arrays and optically amplifies each array, detects and feeds back optical phase errors between the arrays, and coherently adds the output.
First phase error detection means for detecting a phase error between the arrays after optical amplification as a first phase error;
A wavefront sensor that generates position information according to the angle of the wavefront by performing wavefront detection after spatial propagation;
Second phase error detection means for detecting a phase error after spatial propagation as a second phase error based on the position information generated by the wavefront sensor;
The first phase error and the second phase error are input, and a first feedback signal that compensates for the first phase error and a second feedback signal that compensates for the second phase error are calculated. And selecting and switching between the first feedback signal and the second feedback signal based on a comparison result between the first phase error and the second phase error and a predetermined threshold value. Phase control means for outputting a feedback signal;
A high-power laser apparatus comprising: an optical phase modulation unit that compensates for a phase error in response to the selected feedback signal output from the phase control unit. The high-power laser device according to claim 1,
For wavefront detection by the wavefront sensor, further comprising collimating means for outputting parallel light obtained by collimating the reference light,
The high-power laser device according to claim 1, wherein the wavefront sensor generates the position information by performing heterodyne detection or homodyne detection using the parallel light output from the collimator. The high-power laser device according to claim 2,
From the position information generated by performing the heterodyne detection or the homodyne detection by the wavefront sensor, position information by reflected light from a target is extracted, and the extracted position information is detected as the second phase error. A high-power laser device further comprising frequency separation means for outputting to the means. The high-power laser device according to any one of claims 1 to 3,
Offset phase output means for outputting an arbitrary offset phase with respect to the phase between each array in the target after phase compensation to the phase control means;
The phase control means calculates the first feedback signal and the second feedback signal in consideration of the offset phase output from the offset phase output means, and controls the wavefront on the target. High-power laser device characterized. The high-power laser device according to any one of claims 1 to 3,
Phase shift for inputting the second phase error signal and the reference signal, offsetting the reference signal with the second phase error signal as an offset phase, and outputting the offset reference signal to the phase control circuit Further comprising means,
The high-power laser apparatus, wherein the phase control means calculates the second feedback signal so as to compensate the offset reference signal output from the phase shift means. The high-power laser device according to any one of claims 1 to 5,
Further comprising a light branching means for branching the reference light into an array of reference light,
The high-power laser apparatus, wherein the first phase error detection means detects the first phase error based on the arrayed reference light branched by the light branching means.

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