JP2011226662A - Heating and cooling device - Google Patents

Heating and cooling device Download PDF

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Publication number
JP2011226662A
JP2011226662A JP2010094167A JP2010094167A JP2011226662A JP 2011226662 A JP2011226662 A JP 2011226662A JP 2010094167 A JP2010094167 A JP 2010094167A JP 2010094167 A JP2010094167 A JP 2010094167A JP 2011226662 A JP2011226662 A JP 2011226662A
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heat exchange
heating
cooling water
cooling
porous member
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JP2010094167A
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Japanese (ja)
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Yoshiki Nakanishi
良樹 中西
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TLV Co Ltd
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TLV Co Ltd
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Priority to JP2010094167A priority Critical patent/JP2011226662A/en
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Abstract

PROBLEM TO BE SOLVED: To obtain a heating and cooling device efficiently performing heating and cooling even when a heat exchange face is horizontal.SOLUTION: A cooling water supply pipe 5 is connected to a heat exchange container 1 through an automatic valve 12. A porous member 19 is mounted in the heat exchange container 1. The heat exchange face 2 is arranged on the upper face of the heat exchange container 1. An upper part 22 of the porous member 19 is connected to a suction chamber 10 of a suction means 6 through a pipe line 8. The suction means 6 is constituted of a liquid ejector 13, a cooling water tank 14 and a circulation pump 15. Steam passes through the porous member 19 and is supplied to the entire underside of the heat exchange face 2 so that uneven heating can be prevented.

Description

本発明は、熱交換容器の内部を減圧状態にして、被熱交換物を加熱又は冷却する加熱冷却装置に関する。  The present invention relates to a heating / cooling device that heats or cools an object to be heat exchanged by reducing the pressure inside the heat exchange container.

従来の加熱冷却装置は、冷却水注入ノズルに電動モータを接続して、この電動モータにより冷却水注入ノズル回転させることによって、数少ない冷却水注入ノズルでもって、より広い面積の被冷却物に冷却水を注入することができるものである。 In the conventional heating and cooling apparatus, an electric motor is connected to the cooling water injection nozzle, and the cooling water injection nozzle is rotated by the electric motor, so that the cooling water is supplied to the object to be cooled with a small number of cooling water injection nozzles. Can be injected.

上記従来の加熱冷却装置では、熱交換容器の熱交換面が水平状である場合に、供給した冷却水が熱交換面から瞬時に滴下してしまい、気化冷却を効率良く実施することができない問題があった。 In the above conventional heating and cooling device, when the heat exchange surface of the heat exchange vessel is horizontal, the supplied cooling water drops instantaneously from the heat exchange surface, and evaporative cooling cannot be performed efficiently. was there.

特開平7−208847号公報JP-A-7-208847

解決しようとする問題点は、熱交換容器の熱交換面が水平状の場合であっても、効率良く加熱冷却を行うことのできる加熱冷却装置を得ることである。   The problem to be solved is to obtain a heating / cooling device capable of efficiently performing heating / cooling even when the heat exchange surface of the heat exchange vessel is horizontal.

本発明は、熱交換容器へ弁を介して加熱又は冷却用の流体を供給すると共に、熱交換容器の内部を減圧状態に維持する吸引手段を接続して、熱交換容器の被熱交換物を加熱又は冷却するものにおいて、熱交換容器に多孔質部材を介在して加熱又は冷却用の流体供給部を設けたものである。  The present invention supplies a heating or cooling fluid to a heat exchange container via a valve, and connects a suction means for maintaining the inside of the heat exchange container in a reduced pressure state so that the heat exchange object of the heat exchange container is In what is heated or cooled, a fluid supply part for heating or cooling is provided in a heat exchange container with a porous member interposed.

本発明は、熱交換容器に多孔質部材を介在して加熱又は冷却用の流体供給部を設けたことにより、熱交換面の全面に微細な加熱又は冷却用流体を供給することができ、水平状の熱交換面でも全体を均一に加熱又は冷却することができる。   In the present invention, a heating or cooling fluid supply unit is provided with a porous member interposed in the heat exchange container, so that a fine heating or cooling fluid can be supplied to the entire surface of the heat exchange surface. The entire heat exchange surface can be uniformly heated or cooled.

本発明に係る加熱冷却装置の実施例を示す構成図である。It is a block diagram which shows the Example of the heating-cooling apparatus which concerns on this invention.

本発明は、熱交換容器に多孔質部材を介在して加熱又は冷却用の流体供給部を設けるものであるが、多孔質部材としては、パンチングプレート等で製作して、多孔質部材の一端面から他端面へ加熱又は冷却用流体を貫通通過させることができるものを用いることができる。 The present invention is to provide a heating or cooling fluid supply unit with a porous member interposed in a heat exchange vessel. As the porous member, one end surface of the porous member is manufactured by a punching plate or the like. What can pass the heating or cooling fluid through to the other end face can be used.

図1において、円筒状で平板状の熱交換容器1と、この熱交換容器1の上端面に水平状に形成した熱交換面2と、熱交換容器1の内部を区画する多孔質部材19、及び、熱交換容器1の下方に連通した吸引手段6とで加熱冷却装置を構成する。また、加熱用の蒸気を蒸気供給管3から熱交換容器1へ供給することで、熱交換面2を加熱することができるものである。   In FIG. 1, a cylindrical and flat heat exchange vessel 1, a heat exchange surface 2 formed horizontally on the upper end surface of the heat exchange vessel 1, a porous member 19 that partitions the inside of the heat exchange vessel 1, And the heating / cooling apparatus is comprised with the suction means 6 connected below the heat exchange container 1. FIG. Moreover, the heat exchange surface 2 can be heated by supplying steam for heating from the steam supply pipe 3 to the heat exchange vessel 1.

蒸気供給管3には、熱交換容器1へ供給する蒸気の量を制御するための制御弁7を取り付ける。 A control valve 7 for controlling the amount of steam supplied to the heat exchange container 1 is attached to the steam supply pipe 3.

熱交換容器1に冷却水を供給する冷却水供給管5を接続する。冷却水供給管5の下端は吸引手段6の一部と接続する。冷却水供給管5には、水エゼクタ11と自動弁12を介在して、熱交換容器1の冷却水ノズル20と接続する。自動弁12が開弁することにより、冷却水ノズル20へ冷却水が供給されるものである。 A cooling water supply pipe 5 for supplying cooling water to the heat exchange vessel 1 is connected. The lower end of the cooling water supply pipe 5 is connected to a part of the suction means 6. The cooling water supply pipe 5 is connected to the cooling water nozzle 20 of the heat exchange container 1 through a water ejector 11 and an automatic valve 12. When the automatic valve 12 is opened, the cooling water is supplied to the cooling water nozzle 20.

熱交換容器1内で、熱交換面2側に、上下を区画する多孔質部材19を取り付ける。多孔質部材19の上側部分22は、後述するように吸引手段6の液体エゼクタ13と接続しているために低圧状態となっており、冷却水ノズル20から供給される冷却水が、熱交換面2の下面に供給されるものである。 In the heat exchange container 1, the porous member 19 which divides up and down is attached to the heat exchange surface 2 side. The upper portion 22 of the porous member 19 is in a low pressure state because it is connected to the liquid ejector 13 of the suction means 6 as will be described later, and the cooling water supplied from the cooling water nozzle 20 is used as a heat exchange surface. 2 is supplied to the lower surface of the plate.

冷却水供給管5に取り付けた水エゼクタ11の吸込室には蒸気供給管16を接続する。水エゼクタ11内を流下する冷却水に、蒸気供給管16から加熱用の蒸気を供給することで、熱交換容器1へ供給する冷却水の温度を調節することができるものである。 A steam supply pipe 16 is connected to the suction chamber of the water ejector 11 attached to the cooling water supply pipe 5. By supplying the heating steam from the steam supply pipe 16 to the cooling water flowing down in the water ejector 11, the temperature of the cooling water supplied to the heat exchange container 1 can be adjusted.

冷却水供給管5に取り付けた自動弁12と並列に、冷却水循環弁18を取り付ける。冷却水循環弁18は、常時、微少開弁しておき、自動弁12が閉弁しても、少しの冷却水を熱交換容器1内へ供給して、冷却水の一部を絶えず循環するものである。 A cooling water circulation valve 18 is attached in parallel with the automatic valve 12 attached to the cooling water supply pipe 5. The cooling water circulation valve 18 is always opened slightly, and even if the automatic valve 12 is closed, a small amount of cooling water is supplied into the heat exchange container 1 to circulate a part of the cooling water continuously. It is.

熱交換容器1の多孔質部材19の上側部分22から管路8によりスチームトラップ4の入口側と接続する。スチームトラップ4と並列に開閉弁9を取り付ける。スチームトラップ4と開閉弁9の出口側は、吸引手段6を構成する液体エゼクタ13の吸込室10と接続する。また、管路8を分岐した分岐管23により、熱交換容器1の下端と管路8を接続する。 The upper portion 22 of the porous member 19 of the heat exchange container 1 is connected to the inlet side of the steam trap 4 through the pipe line 8. An on-off valve 9 is attached in parallel with the steam trap 4. The outlet side of the steam trap 4 and the on-off valve 9 is connected to the suction chamber 10 of the liquid ejector 13 constituting the suction means 6. Further, the lower end of the heat exchange vessel 1 and the pipe line 8 are connected by a branch pipe 23 branched from the pipe line 8.

吸引手段6を、液体エゼクタ13と冷却水タンク14と循環ポンプ15とで構成する。循環ポンプ15の駆動によって、冷却水タンク14内の冷却水を液体エゼクタ13へ供給して吸込室10で所定の吸引力を発生すると共に、冷却水供給管5から熱交換容器1へ冷却水を供給するものである。 The suction means 6 includes a liquid ejector 13, a cooling water tank 14, and a circulation pump 15. By driving the circulation pump 15, the cooling water in the cooling water tank 14 is supplied to the liquid ejector 13 to generate a predetermined suction force in the suction chamber 10, and the cooling water is supplied from the cooling water supply pipe 5 to the heat exchange container 1. To supply.

冷却水タンク14の上部に、冷却水補給管30を接続すると共に、循環ポンプ15の吐出側の管路を分岐して余剰水排出管17を接続する。 A cooling water supply pipe 30 is connected to the upper part of the cooling water tank 14, and a pipe on the discharge side of the circulation pump 15 is branched to connect an excess water discharge pipe 17.

熱交換面2を加熱する場合は、蒸気供給管3と制御弁7から熱交換容器1内へ所定量の蒸気を供給することによって、蒸気によって加熱される。この場合、蒸気は多孔質部材19を通過することによって、熱交換面2の下面の全体に均一に供給され、熱交換面2での加熱ムラを防止することができる。加熱により蒸気の凝縮した復水は、熱交換容器1下端の分岐管23からスチームトラップ4を通り、更に、液体エゼクタ13から冷却水タンク14へと至る。   When heating the heat exchange surface 2, the heat exchange surface 2 is heated by steam by supplying a predetermined amount of steam from the steam supply pipe 3 and the control valve 7 into the heat exchange container 1. In this case, the vapor passes through the porous member 19 and is uniformly supplied to the entire lower surface of the heat exchange surface 2, so that uneven heating on the heat exchange surface 2 can be prevented. Condensate condensed with steam by heating passes from the branch pipe 23 at the lower end of the heat exchange vessel 1 through the steam trap 4 and further from the liquid ejector 13 to the cooling water tank 14.

熱交換面2を冷却する場合は、冷却水供給管5の自動弁27を開弁して冷却水ノズル20へ冷却水を供給することによって、熱交換面2の熱により冷却水が蒸発気化して、その蒸発線熱でもって冷却することで、冷却効率を向上することができる。   When cooling the heat exchange surface 2, the automatic valve 27 of the cooling water supply pipe 5 is opened and the cooling water is supplied to the cooling water nozzle 20, whereby the cooling water is evaporated and evaporated by the heat of the heat exchange surface 2. And cooling efficiency can be improved by cooling with the evaporation line heat.

間接的な加熱と冷却を行うさまざまな加熱冷却装置として適用できる。   It can be applied as various heating and cooling devices that perform indirect heating and cooling.

1 熱交換容器
2 熱交換面
5 冷却水供給管
6 吸引手段
10 吸込室
11 水エゼクタ
12 自動弁
13 液体エゼクタ
14 冷却水タンク
15 循環ポンプ
18 冷却水循環弁
19 多孔質部材
20 冷却水ノズル
23 分岐管
DESCRIPTION OF SYMBOLS 1 Heat exchange container 2 Heat exchange surface 5 Cooling water supply pipe 6 Suction means 10 Suction chamber 11 Water ejector 12 Automatic valve 13 Liquid ejector 14 Cooling water tank 15 Circulation pump 18 Cooling water circulation valve 19 Porous member 20 Cooling water nozzle 23 Branch pipe

Claims (1)

熱交換容器へ弁を介して加熱又は冷却用の流体を供給すると共に、熱交換容器の内部を減圧状態に維持する吸引手段を接続して、熱交換容器の被熱交換物を加熱又は冷却するものにおいて、熱交換容器に多孔質部材を介在して加熱又は冷却用の流体供給部を設けたことを特徴とする加熱冷却装置。   A heating or cooling fluid is supplied to the heat exchange container via a valve, and a suction means for maintaining the inside of the heat exchange container in a reduced pressure state is connected to heat or cool the heat exchanged object in the heat exchange container. What is claimed is: 1. A heating / cooling device comprising a heat exchange vessel provided with a fluid supply part for heating or cooling with a porous member interposed therebetween.
JP2010094167A 2010-04-15 2010-04-15 Heating and cooling device Pending JP2011226662A (en)

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JP2010094167A JP2011226662A (en) 2010-04-15 2010-04-15 Heating and cooling device

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03127625A (en) * 1989-10-13 1991-05-30 Tlv Co Ltd Steam heating and vaporization cooling equipment
JP2005109375A (en) * 2003-10-02 2005-04-21 Canon Inc Positioning device, cooling device, and exposure device using them

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03127625A (en) * 1989-10-13 1991-05-30 Tlv Co Ltd Steam heating and vaporization cooling equipment
JP2005109375A (en) * 2003-10-02 2005-04-21 Canon Inc Positioning device, cooling device, and exposure device using them

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