JP2011220148A - Turbo-molecular pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve efficiency of heat transfer between constituent members in a blade exhaust portion.SOLUTION: Stator blade component members 7 with spacers 5 and stator blades 6 integrally formed are axially layered in a multistage form. A clearance G is formed between the stepped portion 5f of the lower spacer 5 and the lower end surface 5a of the upper spacer 5, and an O-ring 21 formed of a soft material is interposed in the clearance G. Since the O-ring 21 is deformed following minute irregular portions formed on the surfaces of the groove 5f and lower end surface 5a of the spacer 5, the contact area of a contact portion is increased. Thereby, the efficiency of heat transfer is improved.

Description

  The present invention relates to a turbo molecular pump.

A turbo molecular pump is used when a semiconductor manufacturing apparatus or an analysis apparatus is changed from a medium vacuum to an ultra-high vacuum.
The turbo vacuum pump continuously exhausts a process gas supplied into the vacuum chamber and a by-product due to the process reaction in order to maintain the process reaction in the vacuum chamber with high quality and high efficiency. The process gas and the reaction product are exhausted while repeatedly colliding and rubbing with the rotor blade and the stator blade. In this process, the temperature of the rotor blades and the stator blades gradually increases. Since the rotor blades rotate at a high speed, it is necessary to keep the temperature at a certain temperature or lower during long-term operation from the viewpoint of creep strength.

Since the inside of the turbo molecular pump is in a high vacuum, radiation transfer is dominant in the heat exchange between the rotor blade and the stator blade, particularly in the magnetic bearing type. On the other hand, the heat transferred from the rotor blades to the stator blades is removed by the contact between the stator blades and the spacers. That is, heat exchange between the stator blades and the spacer is heat conduction proportional to the contact area of the contact portion. Here, the spacer is a ring-shaped member that is laminated on the outer periphery of the stator blade with the stator blade interposed therebetween in order to maintain the rotor blade and the stator blade at a predetermined interval.
The blade exhaust part formed by stacking rotor blades and stator blades in multiple stages is divided into two parts, the intake port side and the exhaust port side, so that the contact area between the spacers is larger on the exhaust port side than on the intake port side A structure is also known in which the temperature gradient when transferring heat from the intake port side to the exhaust port side is larger on the intake port side (see, for example, Patent Document 1).

JP 2006-348765 A

As described in the above-mentioned prior documents, a structure in which the spacers are directly placed on the spacers is employed for the contact between the spacers. The contact at the boundary between the spacers is usually dominated by point contact because microscopic unevenness is formed on the surface of each spacer.
Such heat exchange by point contact is not sufficient as a heat removal structure of a turbo vacuum pump used for manufacturing a recent high-performance and high-quality product in which supplied process gas is increased.

The turbo molecular pump according to the first aspect of the present invention includes a rotor having rotor blades provided in a plurality of stages and rotatably supported, and a plurality of stages alternately arranged in the axial direction with the rotor blades via spacers. Between the spacer blades and the stator blades or between the spacers disposed adjacent to each other in the axial direction, the spacers and the stator blades, or the spacers are in contact with each other. A heat transfer member, and the heat transfer member is brought into contact with an increased contact area so that heat transfer efficiency is larger than in the case where the spacer and the stator blades or the spacers are in direct contact with each other. It is characterized by being.
The turbo molecular pump of the invention according to claim 8 includes a rotor having rotor blades provided in a plurality of stages and rotatably supported, and a spacer and a stator blade integrally formed as separate members or one member. Comprising a rotor blade portion and a plurality of stages of stator blade structures arranged alternately in the axial direction, and a sharp protrusion integrally formed on one member of the spacer and the stator blade adjacent in the axial direction. It has a heat transfer mechanism biting into the other member.

  According to the present invention, the heat transfer efficiency can be improved by increasing the heat transfer area between the spacer and the stator blade, between the spacers, or between the stator components.

Sectional drawing which shows Embodiment 1 of the turbo-molecular pump of this invention. FIG. 2 is a plan view of a stator blade structure in which the spacer illustrated in FIG. 1 is integrally formed. FIG. 2 is a side view of a stator blade structure in which the spacer illustrated in FIG. 1 is integrally formed. FIG. 4 is a sectional view taken along line IV-IV of the stator blade structure illustrated in FIG. 2. The principal part expanded sectional view for demonstrating the heat-transfer mechanism of the stator blade | wing structure shown in FIG. Sectional drawing which shows the modification of Embodiment 1 of the turbo-molecular pump of this invention. Sectional drawing which shows Embodiment 2 of the turbo-molecular pump of this invention. Sectional drawing which shows the modification 1 of the principal part of Embodiment 2 of the turbo-molecular pump of this invention. Sectional drawing which shows the modification 2 of the principal part of Embodiment 2 of the turbo-molecular pump of this invention. Sectional drawing which shows Embodiment 3 of the turbo-molecular pump of this invention. Sectional drawing which shows the modification 1 of the principal part of Embodiment 3 of the turbo-molecular pump of this invention. Sectional drawing which shows Embodiment 4 of the turbo-molecular pump of this invention. Sectional drawing which shows the modification of the principal part of Embodiment 4 of the turbo-molecular pump of this invention.

(Embodiment 1)
Hereinafter, the best mode for carrying out the present invention will be described with reference to the drawings. FIG. 1 is a sectional view showing Embodiment 1 of a turbo molecular pump according to the present invention. The turbo molecular pump 1 shown in FIG. 1 is a magnetic bearing type turbo molecular pump. The case member 11 of the turbo molecular pump 1 includes an upper case 12 and a base 13 that are configured to be sealed from the outside by a seal member 42. In the center of the case member 11, a rotor 4 having a plurality of stages of rotor blades 4a and a rotor cylindrical portion 4b is rotatably arranged.

  The turbo molecular pump 1 is a composite type turbo molecular pump having a blade exhaust part 2 in an internal space of an upper case 12 and a thread groove exhaust part 3 in an internal space of a base 13. The blade exhaust section 2 is composed of a plurality of rotor blades 4a each having a circular plane, and a plurality of stator blade structures 7 each having a spacer 5 and a stator 6 integrally formed by molding. Has been. The screw groove exhaust part 3 is composed of a rotor cylindrical part 4 b and a screw stator 8.

  The rotor blades 4a and the stator blade structure 7 are alternately arranged in the axial direction (vertical direction in the drawing) of the pump. An O-ring (heat transfer member) 21 is provided between the stator structural bodies 7 adjacent in the axial direction. The stator structure 7 and the O-ring 21 will be described later. A ring-shaped spacer 5 ′ is placed on the inner surface of the upper case 12 on the base 13, and a plurality of stages of the stator structure 7 are stacked on the spacer 5 ′.

  A thread groove (not shown) is formed on the inner peripheral surface of the cylindrical screw stator 8. The rotor cylindrical portion 4b provided at the lower portion of the rotor 4 is formed with a thread groove (not shown) facing the inner circumferential surface of the screw stator 8 with a slight gap. The screw stator 8 is fixed to the base 13 with bolts 41.

  The rotor 4 is supported in a non-contact state by a radial magnetic bearing 31 and a thrust magnetic bearing 32 provided on the base 11. The rotor 4 supported in a non-contact manner by the magnetic bearings 31 and 32 is rotationally driven by a motor 35. The magnetic levitation position of the rotor 4 is detected by gap sensors 33a, 33b, and 33c. Reference numeral 34 denotes a mechanical protective bearing that supports the rotor 4 in a state where the rotor 4 is not levitated by the magnetic action of the magnetic bearings 31 and 32.

  A flange 17 is formed on the upper case 12. An intake port 15 is formed at the center of the flange 17. The flange 17 is attached to a flange of an exhaust system of a vacuum chamber (not shown) by a fastening member (not shown). When the rotor 4 is rotationally driven by the motor 35, gas molecules in the vacuum chamber flow from the intake port 15. The gas molecules flowing in from the intake port 15 are blown off downstream in the blade exhaust part 2. Although not shown, the rotor blades 4a and the stator blades 6 have opposite blade inclination directions, and the inclination angle is such that the gas molecules move from the upstream side, which is the high vacuum side, toward the downstream side, which is the downstream side. Is formed to change at an angle that is difficult to reverse. The gas molecules are compressed in the blade exhaust part 2 and transferred to the screw groove exhaust part 3 below in the figure.

  In the thread groove exhaust portion 3, when the rotor cylindrical portion 4 b rotates at a high speed with respect to the screw stator 8, an exhaust function by a viscous flow is generated, and the gas transferred from the blade exhaust portion 2 to the thread groove exhaust portion 3 is further compressed. However, it is transferred to the exhaust port 45 and evacuated. In the present embodiment, the screw groove exhaust portion 3 having a screw groove configuration is used. However, a portion that exhibits an exhaust function by viscous flow, including configurations other than the screw groove configuration, may be referred to as a drag pump portion.

  2 is a plan view of the stator blade structure 7 shown in FIG. 1, FIG. 3 is a side view of the stator blade structure 7, and FIG. 4 is a sectional view taken along line IV-IV in FIG. is there. 3 and 4, for convenience of illustration, the thickness direction is a larger scale than the diameter direction of the stator structure 7. FIG. 4 shows a state in which the stator structure 7 is stacked in two stages.

  Each stator blade structure 7 is disposed between the rotor blades 4a of the rotor 4 in which circular rotor blades 4a are integrally formed in multiple stages. For this reason, as a whole, the planar circular stator structure 7 is formed by integrating at least two divided parts, and each of the divided stator parts having a circumferential angle of 180 degrees or less.

  In the present embodiment, the case where the stator blade constituent body 7 is constituted by the stator blade constituent portions 7a and 7b divided into two parts will be described. The divided stator components 7a and 7b are formed in line symmetry with the boundary surface 7c as a symmetry plane. Each stator component 7a and 7b has a large number of stator blades 6, respectively. A large number of stator blades 6 are connected by inner connecting portions 7d and 7d 'and outer connecting portions 7e and 7e', and are formed in a semicircular ring shape. Each stator blade 6 is formed to be inclined along the circumferential direction. The inclination angle of the rotor blade 6 varies depending on each stage, and is formed at different angles so as to gradually approach the horizontal from the intake port 15 side toward the rotor cylindrical portion 4b side.

  In the spacer 5, the lower end surface 5a on the outer peripheral side extends downward from the lower end surface 5b on the inner peripheral side. A lower groove 5d for fitting the upper end surface 5c of the spacer 5 adjacent in the axial direction is formed in a semi-annular shape on the lower end surface 5b on the inner peripheral side. A side groove 5e for fitting the O-ring 51 is formed on the outer peripheral side surface. Stator blade constituent portions 7a and 7b having a line-symmetric shape are inserted between the rotor blades 4a from opposite sides of the outer circumferential direction and contacted at the boundary surface 7c in the side groove 5e of the spacer 5 with an O-ring 51. To be integrated. Thereby, the stator blade | wing structure part 7 of each stage is formed.

  In FIG. 4, the lower-stage stator blade structure 7 and the upper-stage stator blade structure 7 are located at positions where the boundary surface 7 c is shifted in the circumferential direction. This is to prevent a gas molecule retrograde path from being formed along the boundary surface 7c when the position of the boundary surface 7c of each stator blade structure 7 coincides in the circumferential direction. .

By fitting the lower groove 5d of the spacer 5 of the stator blade structure 7 to the upper end surface 5c of the spacer 5 of the lower stator blade structure 7, the stator blade structure 7 is prevented from being displaced in the radial direction. The
The O-ring 51 has a function of sealing the gap with the upper case 12 (see FIG. 1) as well as a function of integrating the stator blade constituent portions 7a and 7b. This sealing function prevents the gas from going backward from the lower side to the upper side of the blade exhaust part 2.

In each stator blade constituent portion 7a, 7b, a step portion 5f is formed between the side groove 5e of the spacer 5 on the outer peripheral surface and the upper end surface 5c.
With the lower groove 5d of the spacer 5 of the upper stator blade structure 7 placed on the upper end surface 5c of the spacer 5 of the lower stator blade structure 7, the spacer 5 of the lower stator structure 7 The gap G is formed between the step 5f and the lower end surface 5a of the spacer 5 of the upper stator blade structure 7. An elastic O-ring 21 is provided in the gap G. The O-ring 21 is made of rubber, hollow metal, or plastic such as Teflon (registered trademark), and its thickness (diameter) is slightly larger than the gap G. Preferably, a material having high thermal conductivity is used.
In the turbo molecular pump 1 of the present invention, the heat transfer efficiency is improved by performing heat transfer with the stator blade structure 7 of each stage stacked in the axial direction by the O-ring 21 disposed at the boundary. is doing.

  FIG. 5 is an enlarged view of the vicinity of the O-ring 21 in FIG. 4, and the operation of the O-ring 21 will be described below. The stator structure 7 is usually made of aluminum, but fine irregularities derived from the surface roughness at the time of manufacture are formed on each surface. In the case of heat transfer in which the spacers 5 are in contact with each other or between the spacers 5 and the stator blades 6, the contact state is usually dominated by point contact because of the fine irregularities formed on the surface of each member. The heat transfer efficiency is small.

  In this embodiment, the O-ring 21 is placed on the step portion 5 f of the spacer 5 of the lower stator blade structure 7, and the lower end surface 5 a of the spacer 5 of the upper stator blade structure 7 is placed on the O-ring 21. Press from the top side. Due to this pressing, even if there are minute irregularities on the surfaces of the lower end surface 5a and the stepped portion 5f, the contact surface of the O-ring 21 is elastically deformed to some extent along the minute irregularities. In other words, the surface layer of the O-ring 21 fills in fine irregularities on the surface of the contact portion. For this reason, the contact area between the stator blade structure 7 and the O-ring 21 is increased, and the heat transfer efficiency is higher than the heat transfer efficiency by joining metal materials.

In this case, as an element of heat transfer efficiency, there is thermal conductivity in addition to the contact area. That is, it is necessary to compare the heat transfer efficiency by integrating the contact area and the thermal conductivity. Generally, the thermal conductivity of a rubber-based material used for an O-ring is considerably smaller than the thermal conductivity of a metal material such as aluminum. However, as described above, the heat transfer efficiency is obtained by integrating the thermal conductivity and the contact area, and the increase in the contact area when the O-ring is interposed is orders of magnitude higher than when the O-ring is not interposed. As a result, the heat transfer efficiency can be greatly improved.
In FIG. 5, the fine irregularities on the surface are shown only on the surface of the contact portion, and are exaggerated.

  4 and FIG. 5, the upper end surface 5c of the spacer 5 of the lower stator structure 7 and the surface of the lower groove 5d of the upper stator structure 7 are in direct contact with each other. That is, in this embodiment, the heat transfer is performed between the portion of the O-ring 21 interposed between the step portion 5f of the lower spacer 5 and the lower end surface 5a of the upper step, and the upper end surface of the lower spacer 5. 5c and the lower groove 5d of the upper spacer 5 are performed at two places on the boundary where they directly contact each other.

  In this case, in a conventional structure that does not use an O-ring, in order to obtain a structure that contacts at the boundary between two locations, the tolerance at the two locations must be zero, so that it was impossible to employ. In the present invention, one is a structure that conducts heat transfer with an O-ring 21 interposed therebetween. Since the O-ring 21 is elastically deformed, a plurality of tolerances can be obtained by keeping the tolerance of the directly contacting portion within this elastic deformation amount. It is possible to make a structure in which heat transfer is possible at a location. Also in this respect, the heat transfer effect in the axial direction of the spacer can be improved.

(Modification of Embodiment 1)
FIG. 6 shows a modification of the first embodiment. In the first embodiment illustrated in FIG. 4, the O-ring 21 for transferring heat from the upper stator blade structure 7 to the lower stator structure 7 includes the upper part 5f of the lower spacer 5 and the upper part. It arrange | positions between the lower end surfaces 5a of the spacer 5 of the side.
In the modification shown in FIG. 6, the O-ring 21 for transferring heat from the stator blade structure 7 to the lower stator structure 7 has an upper end surface 5 c of the spacer 5 of the lower stator blade structure 7. It is disposed between the lower grooves 5d of the stator blade structure 7 on the upper stage side.

Further, the step portion 5f of the spacer 5 of the lower stator structure 7 and the lower end surface 5a of the upper stator structure 7 are in direct contact with each other. That is, also in this modification, the heat transfer is performed between the upper ring surface 5c of the lower spacer 5 and the lower groove 5d on the upper stage, the step 5f of the spacer 5, and the step 5f of the spacer 5. It is performed at two locations on the boundary where the lower end surface 5a of the spacer 5 is in direct contact.
6 may be combined with the structure of the first embodiment illustrated in FIG. 4 in the modification illustrated in FIG. That is, in FIG. 6, an O-ring 21 may be interposed between the step portion 5 f of the lower-stage spacer 5 and the lower end surface 5 a of the upper-stage spacer 5.

(Embodiment 2)
FIG. 7 shows Embodiment 2 of the blade exhaust part 2 in the turbo molecular pump of the present invention.
In the second embodiment, the spacer 5 and the stator blade 6 are separated. Between the upper end surface 5c of the lower spacer 5 and the lower end surface 5b on the inner peripheral side of the upper spacer 5, an O-ring 21 that contacts both members and a stator blade 6 that contacts the O-ring 21 are provided. An outer peripheral edge is arranged. That is, in the second embodiment, the three members of the upper spacer 5, the lower spacer 5, and the stator blade 6 can transfer heat to each other by one O-ring 21.

(Modification 1 of Embodiment 2)
FIG. 8 shows a first modification of the second embodiment. In Modification 1 illustrated in FIG. 8, an O-ring 21 is disposed in a gap G between the step portion 5 f of the lower-stage spacer 5 and the lower end surface 5 a of the upper-stage spacer 5. Further, the outer peripheral edge of the stator blade 6 is disposed between the upper end surface 5 c of the lower spacer 5 and the inner peripheral lower end surface 5 b of the upper spacer 5.

(Modification 2 of Embodiment 2)
FIG. 9 shows a second modification of the second embodiment. The modification 2 has a structure in which the structure of the second embodiment illustrated in FIG. 7 is applied to the structure of the modification 1 illustrated in FIG. 8.
That is, in the second modification, the O-ring 21 is disposed in the gap G formed between the step portion 5f of the lower spacer 5 and the lower end surface 5a of the upper spacer 5. Further, between the upper end surface 5c of the lower spacer 5 and the lower end surface 5b on the inner peripheral side of the upper spacer 5, together with the O ring 21 that contacts both members, the stator blade that contacts this O ring 21 Six outer peripheral edges are arranged.
In the second modification, since the O-ring 21 is arranged at two places, the heat transfer efficiency can be further improved.

(Embodiment 3)
It is not necessary to interpose one independent member as a heat transfer means between the spacers 5, between the spacers 5 and the stator blades 6, or between the stator blade structures 7. The blade exhaust part 2 in the turbo molecular pump illustrated as Embodiment 3 of the present invention in FIG. 10 shows an example of a structure using such a heat transfer mechanism.

Sharp semicircular protrusions 22 are integrally formed on the spacer 5 by molding on the upper end surface 5c and the lower end surface 5a of the spacer 5 in the third embodiment. The sharp protrusions 22 formed on the upper end surface 5c and the lower end surface 5a of the spacer 5 bite into the inside from the upper and lower surfaces of the outer peripheral ring of the stator blade 6.
That is, a heat transfer mechanism is formed in which sharp protrusions 22 provided on the spacers 5 adjacent in the axial direction are bitten into the stator blades 6.

In order to form this heat transfer mechanism, the material of the spacer 5 is higher in hardness than the material of the stator blades 6. Then, the lower surface of the front end portion of the stator blade 6 is pushed into the sharp protrusion 22 formed on the upper end surface 5c of the lower spacer 7 and then the upper surface of the upper spacer 5 is inserted into the upper surface of the front end portion of the stator blade 6. A sharp protrusion 22 formed on the lower end surface 5b on the circumferential side is pushed in.
Since the protrusion 22 and the outer peripheral ring of the stator 6 are in close contact with each other inside the stator blade 6, the contact area is increased. Therefore, the heat transfer coefficient between the spacer 5 and the stator blade 6 can be improved.

(Modification 1 of Embodiment 3)
The modification 1 of Embodiment 3 illustrated in FIG. 11 has a structure in which a heat transfer structure using an O-ring 21 is further added to the heat transfer mechanism 3 illustrated in FIG.
Specifically, in the first modification of the third embodiment, the sharp protrusions 22 formed on the upper end surface 5 c and the lower end surface 5 a of the spacer 5 bite into the inside from the upper and lower surfaces of the outer peripheral ring of the stator 6. An O-ring 21 is disposed between the step portion 5 f of the lower-stage spacer 5 and the lower end surface 5 a of the upper-stage spacer 5.

  That is, in the first modification of the third embodiment, the heat transfer mechanism in which the protrusion 22 of one stator blade constituent body 7 is cut into the inside from the surface of the other stator blade constituent portion 7 and the spacer 5 adjacent in the axial direction. An O-ring 21 as a heat transfer member interposed therebetween is provided.

  In the third embodiment shown in FIGS. 10 and 11 and its modification, the hardness of the spacer 5 needs to be higher than the hardness of the stator blade 6. In this case, for example, stainless steel may be used as the material of the spacer 5, and aluminum may be used as the material of the stator blade 6. That is, different materials may be used. Further, a high hardness aluminum alloy such as duralumin or super duralumin may be used as the material of the spacer 5, and general aluminum may be used as the material of the stator blade 6.

(Embodiment 4)
FIG. 12 shows Embodiment 4 of the turbomolecular pump of the present invention. The fourth embodiment has a structure using a compound as a heat transfer member.
Specifically, the lower end surface 5b between the upper end surface 5c of the lower stage side spacer 5 and the lower surface of the front end portion of the stator blade 6 and the upper surface of the front end portion of the stator blade 6 and the inner peripheral side of the upper stage side spacer 5. A compound 23 is interposed between the two. The compound 23 may be either an insulating material such as rubber or plastic, or a conductive material such as metal. In short, the compound 23 fills minute irregularities of the spacer 5 and the stator blade 6 and increases the contact area of the contact portion. I just need it. The adhesion to the spacer 5 and the stator blade 6 may be achieved by spraying the compound as a liquid or paste and applying it with a dispenser. It is desirable to use a compound with high thermal conductivity. This is the same reason as described above for the O-ring.

(Modification of Embodiment 4)
A modification of the fourth embodiment shown in FIG. 13 has a structure using an O-ring together with a compound as a heat transfer member in the fourth embodiment shown in FIG.
In FIG. 13, an O-ring 21 is disposed between the upper end surface 5 c of the lower stage side spacer 5 and the inner peripheral side lower end face 5 b of the upper stage side spacer 5, and the outer peripheral edge of the stator blade 6 is disposed on this O ring 21. Are in contact. Further, a compound 23 is interposed between the lower surface and the lower spacer 5 on the outer peripheral edge of the stator blade 6 and between the upper surface and the upper spacer 5 on the outer peripheral edge of the stator blade 6.
As a result, the three members of the lower spacer 5, the upper spacer 5, and the stator blade 6 can transfer heat by the two different heat transfer members of the O-ring 21 and the compound 23.

  As described above, according to the turbo molecular pump of the present invention, heat such as the O-ring 21 or the compound 23 is provided between at least one of the spacer 5 and the stator blade 6 or between the spacers arranged adjacent to each other in the axial direction. Since the transmission member is interposed, there is an effect that the contact area in the contact portion is increased and the heat transfer efficiency is improved. In the above, the spacer 5 and the stator blade 6 may be comprised by another member, and may be integrally formed by shaping | molding.

  Further, according to the turbo molecular pump of the present invention, since the sharp protrusion 22 is provided on the spacer 5 adjacent in the axial direction, and the protrusion 22 bites into the stator blade 6, the contact area is increased. , Has the effect of improving the heat transfer efficiency. In this case, the protrusions 22 may be formed on the stator blades 6 so as to bite into the spacers 5.

The heat transfer member is not limited to the O-ring 21 or the compound 23. For example, as long as it is interposed so as to bridge a plurality of members that perform heat transfer, such as a wedge. Good.
Moreover, although the magnetic bearing type turbo molecular pump has been described as an embodiment, the present invention is not limited to the magnetic bearing type and can be applied.

  In addition, the present invention is directed to the turbo molecular pump having the thread groove exhaust portion 3, but the present invention is also applicable to a turbo molecular pump that does not have the rotor cylindrical portion 4 b in which the rotor 4 is threaded. Is possible.

  In addition, the turbo molecular pump of the present invention can be applied with various modifications within the scope of the gist of the present invention. In short, the turbo molecular pump has a rotor blade provided in a plurality of stages and rotatably supported. A plurality of stator blades arranged alternately in the axial direction with the rotor blades via spacers, and at least one of the spacers and the stator blades arranged adjacent to each other in the axial direction. The spacer and the stator blade, or a heat transfer member that contacts the spacer, and the heat transfer member has a higher heat transfer efficiency than the case where the spacer and the stator blade or the spacer are in direct contact with each other. Any contact area may be used as long as the contact area is increased.

  The turbo molecular pump of the present invention comprises a rotor having rotor blades provided in a plurality of stages and rotatably supported, and a spacer and stator blades integrally formed as separate members or one member. A plurality of stages of stator blades arranged alternately in the axial direction in the blade portion, and a sharp protrusion integrally formed on one member of the spacer blade and the stator blade adjacent in the axial direction on the other member It may have a heat transfer mechanism that has been bitten.

DESCRIPTION OF SYMBOLS 1 Turbo molecular pump 4 Rotor 4a Rotor blade 4b Rotor cylindrical part 5 Spacer 6 Stator blade 7 Stator blade structure 7a, 7b Stator blade structure 11 Case member 12 Upper case 13 Base 15 Inlet 21 O-ring 22 Protrusion 23 Compound

Claims (8)

A rotor having rotor blades provided in a plurality of stages and rotatably supported;
A plurality of stator blades arranged alternately in the axial direction with the rotor blades via spacers;
A heat transfer member interposed between at least one of the spacer and the stator blade or between the spacers arranged adjacent to each other in the axial direction and contacting the spacer and the stator blade or the spacers; Comprising
The turbomolecular pump, wherein the heat transfer member is in contact with an increased contact area so that heat transfer efficiency is greater than in the case where the spacer and the stator blades or the spacers are in direct contact with each other.   2. The turbo molecular pump according to claim 1, wherein the spacer and the stator blade are each formed by separate members, and each stator blade is supported by the spacer adjacent in the axial direction. Turbo molecular pump.   3. The turbo molecular pump according to claim 2, wherein the spacer is formed in a stepped shape having a step between an inner peripheral side and an outer peripheral side, and the heat transfer member is between the outer peripheral sides of the spacers adjacent in the axial direction. Alternatively, a turbo molecular pump characterized by being interposed between the inner peripheral sides.   3. The turbo molecular pump according to claim 2, wherein the spacer is formed in a stepped shape having a step between an inner peripheral side and an outer peripheral side, and the heat transfer member is between the outer peripheral sides of the spacers adjacent in the axial direction. A turbo molecular pump characterized in that the turbo molecular pump is interposed between either the inner circumferential side and the inner circumferential side, and the other is in direct contact between the spacers or between the spacers and the stator blades.   4. The turbo molecular pump according to claim 2, wherein the heat transfer member heats three members of a stator blade disposed between the axially adjacent spacers and between the axially adjacent spacers. 5. A turbo-molecular pump characterized in that it can be transmitted.   2. The turbo molecular pump according to claim 1, wherein the spacer and the stator blade are formed as a stator structure integrated by a single material, and are disposed between the stator blade structures disposed adjacent to each other in the axial direction. The turbomolecular pump is characterized in that the heat transfer member is interposed therebetween.   The turbo molecular pump according to any one of claims 1 to 5, wherein the heat transfer member includes at least one of an O-ring and a compound. A rotor having rotor blades provided in a plurality of stages and rotatably supported;
It comprises a spacer and stator blades integrally formed as separate members or one member, and comprises the rotor blade portions and a plurality of stages of stator blade structures arranged alternately in the axial direction,
A turbo-molecular pump having a heat transfer mechanism in which a sharp protrusion integrally provided on one member of the spacer and the stator blade adjacent in the axial direction is bitten into the other member.

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