JP2011218397A - Laser beam machine and holding device - Google Patents

Laser beam machine and holding device Download PDF

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JP2011218397A
JP2011218397A JP2010089465A JP2010089465A JP2011218397A JP 2011218397 A JP2011218397 A JP 2011218397A JP 2010089465 A JP2010089465 A JP 2010089465A JP 2010089465 A JP2010089465 A JP 2010089465A JP 2011218397 A JP2011218397 A JP 2011218397A
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thin plate
pressing
receiving member
holding
clamping
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JP5489829B2 (en
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Yoshio Fujisawa
佳生 藤澤
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Nippon Sharyo Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a laser beam machine and a holding device enhancing working precision.SOLUTION: This holding device 10 for the laser beam machine 1 includes a reception member 32 mounted with a thin sheet W, a wall part 32b erected in a rear end side of a mounting face 32a of the reception member 32, an energizing member 35 arranged in an upper stage part 32c formed step-differently on the mounting face 32a, and a press member 33 having a long pressing face 33a opposed to the mounting face 32a while energized upwards by the energizing member 35, clamping is thereby allowed without generating a strain in the thin sheet W, between the press member 33 and the reception member 32, using a fastening member 34, and an elastic deformation amount of the thin sheet W is prevented from being dispersed to enhance the working precision. Further, the thin sheet W is prevented from butting against the wall part 32b, and sufficient tension is imparted to the thin sheet W, because a distance between wall parts of the first clamping part 20 and the second clamping part 30 is set to be larger than the maximum value of a dimensional tolerance of the thin sheet W. The working precision is enhanced by this manner.

Description

本発明はレーザ加工機および保持装置に関し、特に、加工精度を向上できるレーザ加工機および保持装置に関するものである。   The present invention relates to a laser beam machine and a holding device, and more particularly to a laser beam machine and a holding device that can improve machining accuracy.

金属製の薄板からなる被加工物に微細な加工を行う場合、レーザ加工機が使用される。レーザ加工機は、薄板をXY方向へ移動させつつ、集光したレーザ光を加工ヘッドから照射することで薄板を切断する。その薄板は保持装置に取り付けられて緊張保持され、保持装置を移動させることによりXY方向へ移動される。   A laser processing machine is used when performing fine processing on a workpiece made of a thin metal plate. The laser processing machine cuts the thin plate by moving the thin plate in the XY directions and irradiating the focused laser beam from the processing head. The thin plate is attached to the holding device and held in tension, and is moved in the XY direction by moving the holding device.

出願人は先に、簡便に薄板を緊張保持する保持装置を開発している(特許文献1)。以下、図6を参照して、特許文献1に開示されるレーザ加工機の保持装置100について説明する。図6(a)は、従来の保持装置100の平面図であり、図6(b)は、保持装置100の正面図である。図6(a)に示すように、保持装置100は、薄板Wの長手方向の両端が載る長尺の受部材101と、その受部材101に押圧可能に構成される複数の押え部材102とを備えている。押え部材102は複数本が隣接して全体として受部材101の長さと略同一の長さに形成されており、各々の押え部材102に締付レバー103が連結されている。締付レバー103を順に押し下げることによって、押え部材102の各々が順に受部材101の上に下降し、受部材101に載せられた薄板Wが受部材101との間で挟持される。   The applicant has previously developed a holding device that easily holds a thin plate in tension (Patent Document 1). Hereinafter, with reference to FIG. 6, a holding apparatus 100 for a laser beam machine disclosed in Patent Document 1 will be described. 6A is a plan view of a conventional holding device 100, and FIG. 6B is a front view of the holding device 100. FIG. As shown in FIG. 6A, the holding device 100 includes a long receiving member 101 on which both ends in the longitudinal direction of the thin plate W are mounted, and a plurality of pressing members 102 configured to be able to press the receiving member 101. I have. A plurality of pressing members 102 are adjacent to each other and are formed to have substantially the same length as the length of the receiving member 101, and a clamping lever 103 is connected to each pressing member 102. By pressing down the tightening lever 103 in order, each of the pressing members 102 is sequentially lowered onto the receiving member 101, and the thin plate W placed on the receiving member 101 is held between the receiving member 101.

また、図6(b)に示すように、各々の受部材101には壁部101aが向かい合うように立設されている。向かい合う壁部101a間に薄板Wを収めるようにして、薄板Wを受部材101に載せることにより、受部材101に載せられた薄板Wが左右方向(図6左右方向)に移動することが規制される。このため、向かい合う壁部101a間の距離Lは、薄板Wの寸法公差のほぼ標準値に設定されている。   Moreover, as shown in FIG.6 (b), each receiving member 101 is standingly arranged so that the wall part 101a may face each other. By placing the thin plate W on the receiving member 101 so that the thin plate W is accommodated between the opposing wall portions 101a, the thin plate W placed on the receiving member 101 is restricted from moving in the left-right direction (left-right direction in FIG. 6). The For this reason, the distance L between the facing wall portions 101a is set to a substantially standard value of the dimensional tolerance of the thin plate W.

特開2004−174519号公報(図2、図4など)Japanese Unexamined Patent Application Publication No. 2004-174519 (FIG. 2, FIG. 4, etc.)

ここで、レーザ加工は薄板Wに張力を付与した状態で施され、レーザ加工後は緊張が開放され、薄板Wは緊張前の状態に戻る。張力が付与されることで薄板Wが所定の変形比率で均一に弾性変形するのであれば、目標寸法に変形比率を乗じた補正寸法に基づいてレーザ加工を行うことで、緊張が開放されて弾性回復した薄板Wは目標寸法通りの加工が行われたこととなる。   Here, the laser processing is performed in a state where tension is applied to the thin plate W, the tension is released after the laser processing, and the thin plate W returns to the state before the tension. If the thin plate W is uniformly elastically deformed at a predetermined deformation ratio by applying tension, laser processing is performed based on a correction dimension obtained by multiplying the target dimension by the deformation ratio, so that the tension is released and elastic. The recovered thin plate W is processed according to the target dimension.

これに対して、従来は複数の別々の押え部材102(図6参照)で受部材101に薄板Wが押し付けられるため、押え部材102の押し付け方によっては、受部材101の長さ方向に沿って薄板Wに歪みが生じることがあった。受部材101の長手方向に沿って薄板Wに歪みが生じると、薄板Wを緊張させたときの変形比率が受部材101の長手方向でばらつき、変形比率が不規則となるため、正確な補正寸法を算出することが困難であった。従って、薄板Wに目標寸法通りの加工を施すことができず、薄板Wの加工精度が低下する。   On the other hand, conventionally, since the thin plate W is pressed against the receiving member 101 by a plurality of separate pressing members 102 (see FIG. 6), depending on how the pressing member 102 is pressed, the thin plate W is moved along the length direction of the receiving member 101. The thin plate W may be distorted. When the thin plate W is distorted along the longitudinal direction of the receiving member 101, the deformation ratio when the thin plate W is tensioned varies in the longitudinal direction of the receiving member 101, and the deformation ratio becomes irregular. It was difficult to calculate Therefore, the thin plate W cannot be processed according to the target dimension, and the processing accuracy of the thin plate W is lowered.

また、薄板Wの寸法(縦横の長さ)は薄板Wの一つの製造ロット内では安定しているが、製造ロット間では公差の範囲内で変動している。薄板Wの寸法が向かい合う壁部101a間の距離Lより長くなると、薄板Wの両端が壁部101aに突き当たって薄板Wが弛んでしまう。この場合には、受部材101と押え部材102との間に薄板Wを挟持して薄板Wを緊張させたとしても、薄板Wに十分な張力を付与できず、極端な場合には薄板Wに弛みが残ることがあった。このような場合は、十分な張力を薄板Wに付与できた場合と比べて薄板Wの変形比率が変わるため、上記と同様に加工精度が低下する。   Further, the dimension (length and width) of the thin plate W is stable within one production lot of the thin plate W, but varies within the range of tolerance between the production lots. If the dimension of the thin plate W becomes longer than the distance L between the wall portions 101a facing each other, both ends of the thin plate W abut against the wall portion 101a and the thin plate W is loosened. In this case, even if the thin plate W is sandwiched between the receiving member 101 and the holding member 102 and the thin plate W is tensioned, a sufficient tension cannot be applied to the thin plate W. Looseness sometimes remained. In such a case, since the deformation ratio of the thin plate W is changed as compared with the case where sufficient tension can be applied to the thin plate W, the processing accuracy is reduced as described above.

本発明は上述した問題を解決するためになされたものであり、加工精度を向上できるレーザ加工機および保持装置を提供することを目的とする。   The present invention has been made to solve the above-described problems, and an object thereof is to provide a laser processing machine and a holding device that can improve processing accuracy.

課題を解決するための手段および発明の効果Means for Solving the Problems and Effects of the Invention

この目的を達成するために、請求項1記載のレーザ加工機によれば、保持装置は、薄板が載上される載上面を有する受部材と、その受部材の載上面の後端側に立設される壁部と、その壁部の上端と連絡され載上面と段差状に形成される上段部に一端側が配設される付勢部材と、その付勢部材により上向きに付勢されつつ、載上面と所定の間隔をあけて載上面の長手方向に沿って対向する押圧面を有する押え部材とを備えているので、付勢部材によって形成される受部材と押え部材との隙間に薄板を容易に差し込むことができる。   To achieve this object, according to the laser processing machine of the first aspect, the holding device stands on the receiving member having a mounting surface on which the thin plate is mounted and on the rear end side of the mounting surface of the receiving member. While being biased upward by the biasing member, the biasing member disposed at one end side of the wall portion to be installed, the upper step portion connected to the upper end of the wall portion and formed in a stepped shape with the mounting surface, A pressing member having a pressing surface facing the mounting surface at a predetermined interval along the longitudinal direction of the mounting surface, and a thin plate is provided in the gap between the receiving member and the pressing member formed by the urging member. Can be easily inserted.

また、壁部によって載上面と段差状に形成された上段部に付勢部材の一端側が配設されているので、受部材と押え部材との間に薄板を差し込むときに、薄板は壁部に邪魔されて付勢部材に達することができない。これにより、薄板の端部が突き当たって付勢部材が損傷することを防止できる。さらに、締付具を備えているので、薄板を差し込んで受部材の載上面に載上した後、押え部材の押圧面を薄板に押し付けることで、薄板を保持装置に保持できる。   In addition, since the one end side of the urging member is disposed on the upper portion formed stepwise with the mounting surface by the wall portion, when the thin plate is inserted between the receiving member and the pressing member, the thin plate is attached to the wall portion. It is obstructed and cannot reach the biasing member. Thereby, it can prevent that the urging | biasing member is damaged by the edge part of a thin plate colliding. Further, since the fastener is provided, the thin plate can be held by the holding device by inserting the thin plate and placing it on the mounting surface of the receiving member and then pressing the pressing surface of the pressing member against the thin plate.

また、押え部材は、第2挟持部の相対移動方向と直交方向における薄板の幅よりも長く形成される押圧面を有しているので、薄板の幅全体を単一の押え部材で押えることができ、押え部材の押圧面と受部材の載上面との間で歪みが生じることなく薄板を挟持できる。その結果、受部材の長手方向に亘って薄板の弾性変形量にばらつきが生じることを防ぎ、加工精度を向上できる効果がある。   Further, since the pressing member has a pressing surface formed longer than the width of the thin plate in the direction orthogonal to the relative movement direction of the second holding portion, the entire width of the thin plate can be pressed by a single pressing member. The thin plate can be held without distortion between the pressing surface of the pressing member and the mounting surface of the receiving member. As a result, it is possible to prevent variation in the amount of elastic deformation of the thin plate along the longitudinal direction of the receiving member and to improve the processing accuracy.

また、第2挟持部が第1挟持部から離反する方向に相対移動する前の状態において、第1挟持部および第2挟持部の受部材にそれぞれ立設された壁部の下端部間の距離は、薄板の寸法公差の最大値よりも大きく設定されているので、薄板の寸法が公差の範囲内で最大値側に変動しても、受部材と押え部材との間に差し込まれる薄板の端部が壁部に突き当たることを防止できる。これにより、受部材と押え部材との間で、薄板に弛みが生じることなく挟持することができ、薄板を緊張させることで薄板に十分な張力を安定して付与することができる。よって、加工精度を向上できる効果がある。   In addition, the distance between the lower end portions of the wall portions erected on the receiving members of the first sandwiching portion and the second sandwiching portion in a state before the second sandwiching portion relatively moves in the direction away from the first sandwiching portion. Is set to be larger than the maximum value of the dimensional tolerance of the thin plate, so even if the size of the thin plate fluctuates to the maximum value within the tolerance range, the end of the thin plate inserted between the receiving member and the holding member The part can be prevented from hitting the wall part. As a result, the thin plate can be sandwiched between the receiving member and the presser member without causing slack, and sufficient tension can be stably applied to the thin plate by tensioning the thin plate. Therefore, there is an effect that processing accuracy can be improved.

請求項2記載のレーザ加工機によれば、受部材の載上面と押え部材の押圧面とが上下に重なる部位の受部材または押え部材の一方の壁部から遠い側に配設され、受部材または押え部材の他方に向かって光ビームを照射する光ビーム照射部と、受部材または押え部材の他方に形成され照射された光ビームが入射される透孔とを備えているので、透孔に入射される光ビームの有無を検知することによって、薄板の寸法が透孔の位置に達しないような短いものであるかを検出できる。薄板の寸法が短いときは、受部材の載上面と押え部材の押圧面とによる挟持や緊張が不完全になり、加工精度が低下することがあるが、レーザ加工前に薄板の寸法が短いかを判別できるため、請求項1記載のレーザ加工機の奏する効果に加え、薄板の寸法が短いことに気づかずに加工が行われることによる加工精度の低下を防止できる効果がある。   According to the laser processing machine of claim 2, the receiving surface of the receiving member and the pressing surface of the pressing member are disposed on the side far from the receiving member or the one wall portion of the pressing member where the pressing surface of the pressing member overlaps vertically. Alternatively, a light beam irradiating unit that irradiates a light beam toward the other side of the holding member and a through hole that is formed on the other of the receiving member or the holding member and that receives the irradiated light beam are provided. By detecting the presence or absence of an incident light beam, it is possible to detect whether the dimension of the thin plate is short enough not to reach the position of the through hole. When the dimensions of the thin plate are short, pinching and tension between the mounting surface of the receiving member and the pressing surface of the holding member may be incomplete, and the processing accuracy may be reduced. Therefore, in addition to the effect of the laser processing machine according to claim 1, there is an effect of preventing a reduction in processing accuracy due to processing performed without realizing that the dimension of the thin plate is short.

請求項3記載のレーザ加工機によれば、押え部材の押圧面または受部材の載上面は、第2挟持部の引張方向に沿って壁部から離れるにつれ互いに近づく方向に傾斜しているので、受部材と押え部材とによる薄板の挟持および第2挟持部と第1挟持部との離反により、押圧面または載上面の内側の縁が薄板に食い込むような力が働いて薄板を押止できる。その結果、受部材と押え部材との間に挟持される薄板に、引張力を損失なく付与することができ、制御された状態で薄板を弾性変形させることができる。その結果、請求項1又は2に記載のレーザ加工機の奏する効果に加え、加工精度を向上できる効果がある。   According to the laser processing machine of claim 3, since the pressing surface of the pressing member or the mounting surface of the receiving member is inclined in a direction approaching each other as the distance from the wall portion increases along the pulling direction of the second clamping portion, By holding the thin plate between the receiving member and the pressing member and separating the second holding portion and the first holding portion, a force that causes the inner edge of the pressing surface or the mounting surface to bite into the thin plate acts and can hold the thin plate. As a result, a tensile force can be applied to the thin plate sandwiched between the receiving member and the pressing member without loss, and the thin plate can be elastically deformed in a controlled state. As a result, in addition to the effect produced by the laser beam machine according to claim 1 or 2, there is an effect that machining accuracy can be improved.

請求項4記載のレーザ加工機によれば、壁部は、下部側に対して上部側が加工ヘッドの方向に向かってそれぞれせり出しているので、受部材と押え部材との間に差し込まれる薄板の先端が、壁部に突き当たって受部材に収まり、壁部を乗り越えてしまうことが防止される。これにより、請求項1から3のいずれかに記載のレーザ加工機の奏する効果に加え、受部材と押え部材とに挟まれる薄板が、壁部で折れ曲げられてしまうことを防止できる効果がある。   According to the laser processing machine according to claim 4, since the upper portion of the wall portion protrudes toward the processing head with respect to the lower portion side, the tip of the thin plate inserted between the receiving member and the pressing member However, it is prevented from striking the wall portion and being received by the receiving member and overcoming the wall portion. Thereby, in addition to the effect which the laser processing machine in any one of Claims 1-3 shows, there exists an effect which can prevent that the thin plate pinched | interposed into a receiving member and a pressing member is bent by a wall part. .

請求項5記載の保持装置によれば、請求項1から4のいずれかに記載のレーザ加工機に使用される保持装置と同等の効果がある。   According to the holding device of the fifth aspect, there is an effect equivalent to that of the holding device used in the laser processing machine according to any one of the first to fourth aspects.

本発明の一実施の形態におけるレーザ加工機のXYステージの平面図である。It is a top view of XY stage of the laser beam machine in one embodiment of the present invention. レーザ加工機のXYステージの部分拡大平面図である。It is the elements on larger scale of the XY stage of a laser beam machine. 図2のIII−III線における保持装置の断面図である。It is sectional drawing of the holding | maintenance apparatus in the III-III line of FIG. 図2のIV−IV線における保持装置の断面図である。It is sectional drawing of the holding | maintenance apparatus in the IV-IV line of FIG. (a)は図2のVa−Va線における保持装置の断面図であり、(b)は締付具を開放したときの押え部材および受部材の断面図である。(A) is sectional drawing of the holding | maintenance apparatus in the Va-Va line | wire of FIG. 2, (b) is sectional drawing of a pressing member and a receiving member when a fastener is open | released. (a)は従来の保持装置の平面図であり、(b)は保持装置の正面図である。(A) is a top view of the conventional holding | maintenance apparatus, (b) is a front view of a holding | maintenance apparatus.

以下、本発明の好ましい実施の形態について添付図面を参照して説明する。図1は本発明の一実施の形態におけるレーザ加工機1のXYステージ3の平面図である。レーザ加工機1は、被加工物としての金属製の薄板Wにレーザ光を照射することにより薄板Wを切断する装置である。レーザ加工機1は、集光したレーザ光を薄板Wに照射する加工ヘッド(図示せず)と、その加工ヘッドとの間に薄板Wを挟み込む加工台2とが定盤に対して固定配置されると共に、加工ヘッドから照射されるレーザ光の光軸に対して直交する方向に平面移動可能にXYステージ3が取り付けられ、加工ヘッドからのレーザ光の照射やXYステージ3のXY方向への移動或いはシリンダ40の駆動力などが制御装置(図示せず)によって制御される。   Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view of an XY stage 3 of a laser beam machine 1 according to an embodiment of the present invention. The laser processing machine 1 is an apparatus that cuts a thin plate W by irradiating a metal thin plate W as a workpiece with laser light. In the laser processing machine 1, a processing head (not shown) for irradiating the thin plate W with condensed laser light and a processing table 2 for sandwiching the thin plate W between the processing head are fixedly arranged with respect to the surface plate. At the same time, the XY stage 3 is mounted so as to be movable in a plane perpendicular to the optical axis of the laser beam emitted from the machining head, and the laser beam is emitted from the machining head and the XY stage 3 is moved in the XY direction. Alternatively, the driving force of the cylinder 40 is controlled by a control device (not shown).

図1に示すようにXYステージ3は、所定間隔を隔てて対向する2本の長枠部材3a,3bの端部同士を2本の短枠部材3c,3dで連結して、平面視略額縁状に形成されている。なお、XYステージ3は長枠部材3a,3b及び短枠部材3c,3dに複数本の補強部材(図示せず)が連結され、それら各補強部材により箱状に形成されることで、全体としての剛性が補強されている。   As shown in FIG. 1, the XY stage 3 is formed by connecting the ends of two long frame members 3 a and 3 b facing each other at a predetermined interval with two short frame members 3 c and 3 d so as to have a substantially frame shape in plan view. It is formed in a shape. The XY stage 3 has a plurality of reinforcing members (not shown) connected to the long frame members 3a and 3b and the short frame members 3c and 3d, and is formed into a box shape by each of the reinforcing members, so that as a whole The rigidity of is reinforced.

XYステージ3には、薄板Wを保持する保持装置10が配設されている。保持装置10は、第1挟持部20及び第2挟持部30を備えて構成されている。第1挟持部20及び第2挟持部30は、短枠部材3c,3dに平行に配設された固定部材21及び可動部材31をそれぞれ備えており、固定部材21は、短枠部材3cの内側に沿って長枠部材3a,3b間に架設され、それら長枠部材3a,3bに対して締結ボルト31aによって締結固定される。なお、長枠部材3a,3bにはその長手方向(図1左右方向)に沿って所定間隔毎に締結孔(図示せず)が形成されており、固定部材21は薄板Wの大きさに応じた位置に固定される。可動部材31は、短枠部材3dの内側に沿って設けられ、その長手方向両端部(図1上下方向端部)がガイド部材4の案内面(図示せず)に摺動可能に保持されている。   The XY stage 3 is provided with a holding device 10 that holds the thin plate W. The holding device 10 includes a first clamping unit 20 and a second clamping unit 30. The first clamping part 20 and the second clamping part 30 are each provided with a fixed member 21 and a movable member 31 arranged in parallel to the short frame members 3c and 3d, and the fixed member 21 is inside the short frame member 3c. Are installed between the long frame members 3a and 3b, and are fastened and fixed to the long frame members 3a and 3b by fastening bolts 31a. The long frame members 3a and 3b are formed with fastening holes (not shown) at predetermined intervals along the longitudinal direction (left and right direction in FIG. 1), and the fixing member 21 corresponds to the size of the thin plate W. It is fixed at the position. The movable member 31 is provided along the inner side of the short frame member 3d, and both longitudinal end portions (vertical end portions in FIG. 1) are slidably held on a guide surface (not shown) of the guide member 4. Yes.

第1挟持部20及び第2挟持部30は、固定部材21及び可動部材31の上面の縁部に沿って配設される細長い板状の受部材22,32(図3参照)と、受部材22,32の上部に配設される押え部材23,33と、その押え部材23,33に押圧力を付与する締付具24,34とを備えている。締付具24,34は、固定部材21及び可動部材31にそれぞれ4個がXYステージ3の幅方向(図1上下方向)中央を通る仮想線(図示せず)に対して対称となる位置に配設されている。   The first clamping unit 20 and the second clamping unit 30 are elongated plate-shaped receiving members 22 and 32 (see FIG. 3) disposed along the upper edge of the fixed member 21 and the movable member 31, and the receiving member. The holding members 23 and 33 are provided on the upper portions of the holding members 22 and 32, and the fastening tools 24 and 34 that apply a pressing force to the holding members 23 and 33. Four fasteners 24 and 34 are symmetric with respect to an imaginary line (not shown) passing through the center of the XY stage 3 in the width direction (vertical direction in FIG. 1). It is arranged.

また、可動部材31の短枠部材3d側の側面には、短枠部材3dに取着されたシリンダ40がリンクLを介して連結されている。さらに可動部材31と短枠部材3dとは、連結部材50により連結されている。なお、シリンダ40は、可動部材31よりもXYステージ3の幅方向外側となる位置であってXYステージ3の幅方向(図1上下方向)中央を通る仮想線(図示せず)に対して対称となる位置に1個ずつが配設されている。連結部材50(図2参照)は、シリンダ40よりもXYステージ3の幅方向内側なる位置であって仮想線に対して対称となる位置に1個ずつが配設されている。   A cylinder 40 attached to the short frame member 3d is connected to a side surface of the movable member 31 on the short frame member 3d side via a link L. Further, the movable member 31 and the short frame member 3d are connected by a connecting member 50. The cylinder 40 is symmetric with respect to a virtual line (not shown) that is located outside the movable member 31 in the width direction of the XY stage 3 and passes through the center of the XY stage 3 in the width direction (vertical direction in FIG. 1). One is disposed at each position. One connecting member 50 (see FIG. 2) is disposed at a position that is inward of the cylinder 40 in the width direction of the XY stage 3 and symmetrical with respect to the imaginary line.

次いで、図2を参照して可動部材31近傍の詳細構成について説明する。図2はレーザ加工機1のXYステージ3の部分拡大平面図である。図2に示すように、シリンダ40はロッド41を可動部材31側へ向けた状態で短枠部材3dに取着され、ロッド41の先端には、リンクLの一端側が揺動可能にピン結合されている。一方、リンクLの他端側には、可動部材の側面に締結固定されたステー部材42が揺動可能にピン結合されている。   Next, a detailed configuration near the movable member 31 will be described with reference to FIG. FIG. 2 is a partially enlarged plan view of the XY stage 3 of the laser processing machine 1. As shown in FIG. 2, the cylinder 40 is attached to the short frame member 3 d with the rod 41 facing the movable member 31, and one end side of the link L is pivotally coupled to the tip of the rod 41. ing. On the other hand, a stay member 42 fastened and fixed to the side surface of the movable member is pin-coupled to the other end side of the link L so as to be swingable.

これにより、シリンダ40を動作させ、ロッド41を収縮駆動した場合には、その収縮力により可動部材31がリンクLを介してシリンダ40側(図2右側)へ引き寄せられ、薄板Wに張力が付与されるので、薄板Wを緊張させた状態でXYステージ3(図1参照)に保持できる。また、この場合、可動部材31の長手方向両端部がガイド部材4の案内面に前後左右方向へ摺動可能に保持されると共に、2本のリンクLを介して(図1参照)可動部材31がシリンダ40に連結されているので、薄板Wが若干弛んだ状態で固定されていたとしても、可動部材31を水平方向に傾けて、薄板Wを均一に緊張させることができる。   Thereby, when the cylinder 40 is operated and the rod 41 is contracted and driven, the contracting force causes the movable member 31 to be drawn to the cylinder 40 side (right side in FIG. 2) via the link L, and tension is applied to the thin plate W. Therefore, the thin plate W can be held on the XY stage 3 (see FIG. 1) in a tensioned state. Further, in this case, both end portions in the longitudinal direction of the movable member 31 are held on the guide surface of the guide member 4 so as to be slidable in the front-rear and left-right directions, and through the two links L (see FIG. 1). Is connected to the cylinder 40, even if the thin plate W is fixed in a slightly slack state, the movable member 31 can be tilted in the horizontal direction to uniformly tension the thin plate W.

なお、シリンダ40は空気圧を利用してロッド41を伸縮駆動するエアシリンダであり、ロッド41の伸長駆動および収縮駆動の両方向を空気圧により動作させる復動型シリンダとして構成されている。よって、シリンダ40の駆動圧を開放(大気放出)することで、シリンダ40から可動部材31へ付与されている駆動力を解除することができる。   Note that the cylinder 40 is an air cylinder that extends and contracts the rod 41 by using air pressure, and is configured as a backward-acting cylinder that operates both the extension drive and the contraction drive of the rod 41 by air pressure. Therefore, the driving force applied from the cylinder 40 to the movable member 31 can be released by releasing the driving pressure of the cylinder 40 (releasing to the atmosphere).

連結部材50は、可動部材31と短枠部材3dとを連結する部材であり、可動部材31の側面に締結ボルトにより締結固定され短枠部材3dへ向けて突出される平板状のストッパ部材51の底面が当接される平板状の基体部材52と、それらストッパ部材51の底面と基体部材52の上面とが摺動可能とされている。   The connecting member 50 is a member that connects the movable member 31 and the short frame member 3d, and is a flat stopper member 51 that is fastened and fixed to the side surface of the movable member 31 by a fastening bolt and protrudes toward the short frame member 3d. The flat base member 52 with which the bottom surface abuts, the bottom surface of the stopper member 51, and the top surface of the base member 52 are slidable.

ストッパ部材51及び基体部材52は、上面及び底面が互いに平行な平坦面として形成され、それら上面および底面がシリンダ40の伸縮方向と平行となるように配設されている。よって、シリンダ40の伸縮に伴う可動部材の平行移動時には、ストッパ部材51の底面と基体部材52の上面とが摺動可能とされている。   The stopper member 51 and the base member 52 are formed as flat surfaces whose upper surface and bottom surface are parallel to each other, and are disposed so that their upper surface and bottom surface are parallel to the expansion / contraction direction of the cylinder 40. Therefore, the bottom surface of the stopper member 51 and the top surface of the base member 52 are slidable when the movable member moves in parallel with the expansion and contraction of the cylinder 40.

ストッパ部材51には、シリンダ40におけるロッド41の伸縮方向と平行に延設される平面視長円状の長穴51aが板厚方向に貫通形成され、基体部材52には、ストッパ部材51の長穴51aに対応する位置に平面視円形の軸挿通孔(図示せず)が板厚方向に貫通形成されている。また、短枠部材3dには、基体部材52の軸挿通孔に対応する位置に平面視円形の貫通孔(図示せず)が板厚方向に貫通形成されている。ハンドル部53は締結軸部材54の上部に螺着され、その締結軸部材54は、これら長穴51a、貫通孔にそれぞれ挿通され(図2紙面垂直方向)、下端にダブルナット機能を有する締結ナット部(図示せず)が回動不能に螺着されている。   The stopper member 51 is formed with a long hole 51a having a plan view oval shape extending in parallel with the expansion and contraction direction of the rod 41 in the cylinder 40, and the base member 52 has a length of the stopper member 51. A shaft insertion hole (not shown) having a circular shape in plan view is formed penetrating in the thickness direction at a position corresponding to the hole 51a. The short frame member 3d is formed with a through hole (not shown) having a circular shape in plan view at a position corresponding to the shaft insertion hole of the base member 52 in the plate thickness direction. The handle portion 53 is screwed onto the upper portion of the fastening shaft member 54, and the fastening shaft member 54 is inserted through each of the elongated holes 51a and the through holes (perpendicular to the plane of FIG. 2), and a fastening nut having a double nut function at the lower end. A portion (not shown) is screwed so as not to rotate.

これにより、ハンドル部53を回転させてハンドル部53を締結軸部材54に対して螺進させることで、ストッパ部材51及び基体部材52を締結ナット部(短枠部材3d)とハンドル部53との間で挟圧保持することができ(以下、この状態を「締結状態」と称す)、可動部材31と短枠部材3dとを連結部材50により締結することができる。即ち、薄板Wの切断加工を行うときには、シリンダ40の収縮力により可動部材31を短枠部材3d側へ引き寄せ、薄板Wの張力の付与による緊張状態を形成した後に、ハンドル部53の操作により連結部材50を締結状態とし、可動部材31と短枠部材3dとを連結部材50により連結する。その結果、薄板Wに切断加工が施される過程における薄板Wの伸び量を規制できる。   Accordingly, the handle portion 53 is rotated and the handle portion 53 is screwed with respect to the fastening shaft member 54, whereby the stopper member 51 and the base member 52 are connected to the fastening nut portion (short frame member 3 d) and the handle portion 53. The movable member 31 and the short frame member 3d can be fastened by the connecting member 50 (hereinafter, this state is referred to as a “fastened state”). That is, when cutting the thin plate W, the movable member 31 is pulled toward the short frame member 3d side by the contraction force of the cylinder 40, and a tension state is formed by applying the tension of the thin plate W. The member 50 is brought into a fastening state, and the movable member 31 and the short frame member 3d are connected by the connecting member 50. As a result, the amount of elongation of the thin plate W during the process of cutting the thin plate W can be regulated.

次に、図3から図5を参照して、保持装置10の詳細構成について説明する。図3は図2のIII−III線における保持装置10(第2挟持部30)の断面図である。なお、ここでは第2挟持部30の構成を説明して、同様に構成される第1挟持部20については説明を省略する。   Next, the detailed configuration of the holding device 10 will be described with reference to FIGS. 3 to 5. FIG. 3 is a cross-sectional view of the holding device 10 (second clamping unit 30) taken along line III-III in FIG. In addition, the structure of the 2nd clamping part 30 is demonstrated here and description is abbreviate | omitted about the 1st clamping part 20 comprised similarly.

図3に示すように、第2挟持部30は、薄板Wが載上される載上面32aが内側(図3左側)に形成される受部材32と、その受部材32の載上面32aの後端側(図3右側)に立設される壁部32bと、その壁部32bの上端と連絡され載上面32aと段差状に形成される上段部32cに一端側が固定される付勢部材35と、その付勢部材35の他端側が固定(当接)されて上向きに付勢されつつ、載上面32aと所定の間隔をあけて載上面32aの長手方向に沿って対向する押え部材33を備えて構成されている。   As shown in FIG. 3, the second clamping unit 30 includes a receiving member 32 in which a mounting surface 32 a on which the thin plate W is mounted is formed on the inner side (left side in FIG. 3), and a rear surface of the receiving member 32. A wall portion 32b erected on the end side (right side in FIG. 3), and a biasing member 35 which is connected to the upper end of the wall portion 32b and fixed at one end side to an upper step portion 32c formed in a step shape with the mounting surface 32a; The pressing member 33 includes a pressing member 33 that is fixed (abutted) on the other end side of the biasing member 35 and biased upward while facing the mounting surface 32a at a predetermined interval along the longitudinal direction of the mounting surface 32a. Configured.

受部材32は、可動部材31の上面の内側(図3左側)縁部近傍にボルト等によって固定されており、載上面32aは受部材32の長手方向に亘って薄板Wの幅(図1上下方向)よりも長く形成されている。載上面32aには、長手方向に亘って凹凸面となるように溝部32a1が形成されている。載上面32aの内側端部には、突条状に形成された凸部32dが長手方向に亘って上向きに凸設されている。   The receiving member 32 is fixed by bolts or the like in the vicinity of the inner edge (left side in FIG. 3) of the upper surface of the movable member 31, and the mounting surface 32 a is the width of the thin plate W in the longitudinal direction of the receiving member 32 (upper and lower sides in FIG. Direction). On the mounting surface 32a, a groove 32a1 is formed so as to be an uneven surface in the longitudinal direction. At the inner end of the mounting surface 32a, a protrusion 32d formed in a ridge shape is provided so as to protrude upward in the longitudinal direction.

壁部32bは、載上面32aの後端側(図3右側)に受部材32の長手方向(図3紙面垂直方向)に亘って立設されており、下部(図3下側)よりも上部が内側(図3左側)にせり出して形成されている。壁部32bの上部が下部よりもせり出しているため、載上面32aと押え部材33の押圧面33aとの間に薄板Wを差し込んだときに、差し込まれた薄板Wの先端が壁部32bを乗り越えてしまうことが防止される。なお、薄板Wが壁部32bを乗り越えてしまうと、受部材32に押え部材33を押し付けたときに、薄板Wの先端が壁部32bや上段部32cで折曲されてしまう。薄板Wへのレーザ加工は、薄板Wの一方の面からレーザ光を照射して切断した後、薄板Wを裏返して反対面にレーザ光で文字等を刻設することがあるが、薄板Wの先端が折曲されてしまうと、裏返した薄板Wの挟持が困難になるので、これを防止する必要があるからである。   The wall portion 32b is erected on the rear end side (right side in FIG. 3) of the mounting surface 32a in the longitudinal direction (perpendicular to the paper surface in FIG. 3) of the receiving member 32, and is higher than the lower portion (lower side in FIG. 3). Is formed protruding to the inside (left side in FIG. 3). Since the upper portion of the wall portion 32b protrudes from the lower portion, when the thin plate W is inserted between the mounting surface 32a and the pressing surface 33a of the pressing member 33, the tip of the inserted thin plate W gets over the wall portion 32b. Is prevented. If the thin plate W gets over the wall portion 32b, when the pressing member 33 is pressed against the receiving member 32, the leading end of the thin plate W is bent at the wall portion 32b or the upper step portion 32c. Laser processing of the thin plate W may be performed by irradiating a laser beam from one surface of the thin plate W and then cutting it, and then turning the thin plate W upside down and engraving letters or the like on the opposite surface with the laser beam. If the tip is bent, it becomes difficult to sandwich the inverted thin plate W, and it is necessary to prevent this.

上段部32cは、壁部32bの上端と連絡され載上面32aと段差状に形成される部位であり、受部材32の両端(図1上下方向)近傍の2箇所に、貫通孔32eが、上段部32cの上面から受部材32の底面に亘って貫通形成されている。付勢部材35は、圧縮コイルばねで形成されており、貫通孔32eに一端側から挿入されて可動部材31の上面と押え部材33の下面との間で圧縮されている。付勢部材35は、壁部32bによって載上面32aと段差状に形成された上段部32cに収装されているので、受部材32と押え部材33との間に薄板Wを差し込むときに、薄板Wは壁部32bに邪魔されて付勢部材35に達することができない。よって、薄板Wの端部が突き当たって付勢部材35が損傷することを防止できる。   The upper step portion 32c is a portion that is connected to the upper end of the wall portion 32b and is formed in a step shape with the mounting surface 32a. Through holes 32e are formed at two locations near both ends (the vertical direction in FIG. 1) of the receiving member 32. A penetration is formed from the upper surface of the portion 32 c to the bottom surface of the receiving member 32. The urging member 35 is formed of a compression coil spring, is inserted into the through hole 32 e from one end side, and is compressed between the upper surface of the movable member 31 and the lower surface of the pressing member 33. Since the urging member 35 is accommodated in the upper step portion 32c formed in a step shape with the mounting surface 32a by the wall portion 32b, the thin plate W is inserted when the thin plate W is inserted between the receiving member 32 and the pressing member 33. W is obstructed by the wall 32b and cannot reach the urging member 35. Therefore, it is possible to prevent the urging member 35 from being damaged due to the end of the thin plate W hitting.

押え部材33は、受部材32の上段部32cが収装される凹溝33bが長手方向に亘って形成されている。押え部材33に凹溝33bが形成されており、これに受部材32の上段部32cが収装される。そのため、受部材32に対して押え部材33が短手方向(図3左右方向)に位置ずれすることが防止される。また、凹溝33bの底面に付勢部材35の他端部が当接され、付勢部材35が可動部材31と押え部材33との間で圧縮されることにより、押え部材33は上向きに付勢される。このように、付勢部材35によって押え部材33が上向きに付勢されているので、載上面32aと押圧面33aとの間に隙間を設けておくことができる。保持装置10で薄板Wを保持する場合には、まず、この隙間に薄板Wを差し込めば良いので、容易に作業を行うことができる。   In the pressing member 33, a concave groove 33b in which the upper step portion 32c of the receiving member 32 is accommodated is formed in the longitudinal direction. A concave groove 33b is formed in the pressing member 33, and the upper step portion 32c of the receiving member 32 is accommodated in the concave groove 33b. Therefore, it is possible to prevent the pressing member 33 from being displaced in the short direction (left and right direction in FIG. 3) with respect to the receiving member 32. Further, the other end portion of the urging member 35 is brought into contact with the bottom surface of the concave groove 33b, and the urging member 35 is compressed between the movable member 31 and the pressing member 33, whereby the pressing member 33 is applied upward. Be forced. Thus, since the pressing member 33 is urged upward by the urging member 35, a gap can be provided between the mounting surface 32a and the pressing surface 33a. When the thin plate W is held by the holding device 10, the thin plate W may be inserted into the gap first, so that the operation can be easily performed.

押圧面33aは、凹溝33bより内側(図3左側)に長手方向に亘って形成されている。押圧面33aは、受部材32の載上面32aに押圧される部位であり、長手方向に亘って凹凸面となるように溝部33a1が形成されている。押圧面33a及び載上面32aに溝部33a1,32a1が形成されているので、薄板Wを挟持したときに、それらの面と薄板Wとの摩擦抵抗を大きくすることができる。その結果、シリンダ40(図1及び図2参照)を収縮駆動して薄板Wを緊張させたときに、緊張させた薄板Wが押圧面33a及び載上面32aの間を滑って抜けてしまうことが抑制される。   The pressing surface 33a is formed in the longitudinal direction on the inner side (left side in FIG. 3) from the concave groove 33b. The pressing surface 33a is a portion pressed against the mounting surface 32a of the receiving member 32, and a groove portion 33a1 is formed so as to be an uneven surface over the longitudinal direction. Since the groove portions 33a1 and 32a1 are formed in the pressing surface 33a and the mounting surface 32a, when the thin plate W is sandwiched, the frictional resistance between these surfaces and the thin plate W can be increased. As a result, when the cylinder 40 (see FIGS. 1 and 2) is driven to contract and the thin plate W is tensioned, the tensioned thin plate W may slip between the pressing surface 33a and the mounting surface 32a. It is suppressed.

押圧面33aの長手方向の長さは、可動部材31の相対移動方向(図3左右方向)と直交方向における薄板Wの幅よりも長く形成されている(図1及び図2参照)。これにより、押え部材33の押圧面33aと受部材32の載上面32aとの間で、薄板Wに歪みが生じることなく挟持できる。その結果、受部材32の長手方向に亘って薄板Wの弾性変形量にばらつきが生じることを防ぎ、加工精度を向上できる。   The length of the pressing surface 33a in the longitudinal direction is longer than the width of the thin plate W in the direction orthogonal to the relative movement direction (left and right direction in FIG. 3) of the movable member 31 (see FIGS. 1 and 2). Accordingly, the thin plate W can be sandwiched between the pressing surface 33a of the pressing member 33 and the mounting surface 32a of the receiving member 32 without being distorted. As a result, it is possible to prevent variation in the amount of elastic deformation of the thin plate W over the longitudinal direction of the receiving member 32 and improve processing accuracy.

押圧面33aの短手方向の長さは、載上面32aの短手方向の長さより小さく形成されている。これにより、受部材32の載上面32aに薄板Wを載せた後、押え部材33の押圧面33aを薄板Wに押し付けると、図3に示すように、薄板Wは、載上面32aの内側に凸設された凸部32dに接触し、凸部32dから押圧面33aにかけて傾斜する。これにより、シリンダ40(図1及び図2参照)を駆動して薄板Wを緊張させたときに、その緊張力の分力が押圧面33aや載上面32aに作用する。その結果、摩擦抵抗をさらに大きくできるため、緊張させた薄板Wが滑って、押圧面33a及び載上面32aの間から抜けてしまうことが抑制される。   The length of the pressing surface 33a in the short direction is smaller than the length of the mounting surface 32a in the short direction. Thus, after the thin plate W is placed on the mounting surface 32a of the receiving member 32, when the pressing surface 33a of the pressing member 33 is pressed against the thin plate W, the thin plate W protrudes inside the mounting surface 32a as shown in FIG. It contacts the provided convex part 32d, and inclines from the convex part 32d to the pressing surface 33a. Thereby, when the cylinder 40 (refer FIG.1 and FIG.2) is driven and the thin plate W is tensioned, the component force of the tension force acts on the press surface 33a and the mounting surface 32a. As a result, since the frictional resistance can be further increased, the tensioned thin plate W is prevented from slipping and coming out from between the pressing surface 33a and the mounting surface 32a.

規制部36(図1及び図2参照)は、上向きに付勢された押え部材33の上方向への移動量を規制する部材であり、押え部材33の両端(図1上下方向)近傍の2箇所に配設されている。本実施の形態においては、規制部36は軸部36aと頭部36bとを備えたボルトで形成されており、押え部材33の厚さ方向(図3上下方向)に貫通形成された貫通孔に軸部36aが挿通され、その軸部36aは下端部が受部材32に螺着されている。頭部36bの外径は、軸部36aが挿通された押え部材33の貫通孔の内径より大きく設定されており、可動部材31の上面から頭部36bの下面までの高さは、付勢された押え部材33の上面が当接する高さに設定されている。その結果、頭部36bの下面に押え部材33の上面が当接することで、付勢された押え部材33のそれ以上の上方向への移動が規制される。   The restricting portion 36 (see FIGS. 1 and 2) is a member that restricts the upward movement amount of the presser member 33 biased upward, and 2 near the both ends (vertical direction in FIG. 1) of the presser member 33. It is arranged at the place. In the present embodiment, the restricting portion 36 is formed by a bolt having a shaft portion 36a and a head portion 36b, and is formed in a through hole formed through the presser member 33 in the thickness direction (vertical direction in FIG. 3). The shaft portion 36 a is inserted, and the lower end portion of the shaft portion 36 a is screwed to the receiving member 32. The outer diameter of the head portion 36b is set larger than the inner diameter of the through hole of the pressing member 33 through which the shaft portion 36a is inserted, and the height from the upper surface of the movable member 31 to the lower surface of the head portion 36b is biased. The height of the pressing member 33 is set to a height at which the pressing member 33 comes into contact therewith. As a result, the upper surface of the presser member 33 comes into contact with the lower surface of the head portion 36b, so that further upward movement of the pressed presser member 33 is restricted.

次に、図4を参照して、第2挟持部30の締付具について説明する。図4は図2のIV−IV線における保持装置10(第2挟持部30)の断面図である。なお、図4では、可動部材31の右側にみえるステー部材42の記載を省略している。   Next, with reference to FIG. 4, the fastener of the 2nd clamping part 30 is demonstrated. 4 is a cross-sectional view of the holding device 10 (second clamping unit 30) taken along line IV-IV in FIG. In FIG. 4, the description of the stay member 42 that can be seen on the right side of the movable member 31 is omitted.

図4に示すように、第2挟持部30は、可動部材31の上面の外側(図4右側)縁部近傍にボルト等で固定された締付具34を備えている。締付具34は、押え部材33に形成された押圧面33aの上部を押圧する加圧体34aがリンク34bに取り付けられ、そのリンク34bが可動部材31の上面に固定されたブラケット34cにピン34dで連結されている。さらに持ち手34eがピン34fでリンク34bに連結されると共に、リンク34gを介してブラケット34cにピン34hで連結されている。   As shown in FIG. 4, the second clamping unit 30 includes a fastening tool 34 fixed with a bolt or the like in the vicinity of the outer edge (right side of FIG. 4) of the upper surface of the movable member 31. In the fastener 34, a pressing body 34 a that presses the upper portion of the pressing surface 33 a formed on the pressing member 33 is attached to the link 34 b, and the link 34 b is pinned to a bracket 34 c fixed to the upper surface of the movable member 31. It is connected with. Further, the handle 34e is connected to the link 34b by a pin 34f, and is connected to the bracket 34c by a pin 34h through the link 34g.

締付具34は以上のように構成されているので、持ち手34eを押し下げると、図4に示すように、加圧体34aが押え部材33を押し付けて、載上面32aと押圧面33aとの間に差し込んだ薄板Wが挟持される。また、持ち手34eを上方に上げると、リンク34bが時計回りに回動し加圧体34aが上方へ移動するので、押え部材33は付勢部材35(図3参照)による付勢力で上昇し、載上面32aと押圧面33aとに隙間が形成される。その結果、載上面32aと押圧面33aとの間で薄板Wを挟持させるために、この間に薄板Wを差し込むことが可能となる。   Since the fastening tool 34 is configured as described above, when the handle 34e is pushed down, as shown in FIG. 4, the pressing body 34a presses the pressing member 33, and the mounting surface 32a and the pressing surface 33a The thin plate W inserted therebetween is sandwiched. Further, when the handle 34e is raised upward, the link 34b rotates clockwise and the pressurizing member 34a moves upward, so that the pressing member 33 is raised by the urging force of the urging member 35 (see FIG. 3). A gap is formed between the mounting surface 32a and the pressing surface 33a. As a result, in order to sandwich the thin plate W between the mounting surface 32a and the pressing surface 33a, it is possible to insert the thin plate W therebetween.

ここで、受部材32と押え部材33とに薄板Wを挟持させるためには、第2挟持部30が第1挟持部20(図1参照)から離反する方向に相対移動する前の状態(シリンダ40を伸長させて第2挟持部30と第1挟持部20との距離を近づけた状態)において、載上面32aと押圧面33aとの間に薄板Wを差し込むのであるが、第1挟持部20の受部材21に立設された壁部(図示せず)の下端部と、第2挟持部30の受部材32に立設された壁部32bの下端部との距離は、薄板Wの寸法公差の最大値よりも大きく設定されている。そのため、薄板Wの寸法が公差(±3mm程度)の範囲内で最大値側に変動しても、受部材32と押え部材33との間に差し込まれる薄板Wの端部が壁部32bに突き当たることを防止できる。   Here, in order to sandwich the thin plate W between the receiving member 32 and the pressing member 33, the state before the second sandwiching portion 30 is relatively moved in the direction away from the first sandwiching portion 20 (see FIG. 1) (cylinder In the state where the distance between the second clamping unit 30 and the first clamping unit 20 is reduced by extending 40, the thin plate W is inserted between the mounting surface 32a and the pressing surface 33a. The distance between the lower end portion of the wall portion (not shown) standing on the receiving member 21 and the lower end portion of the wall portion 32b standing on the receiving member 32 of the second holding portion 30 is the dimension of the thin plate W. It is set to be larger than the maximum tolerance. Therefore, even if the dimension of the thin plate W fluctuates to the maximum value within a tolerance range (about ± 3 mm), the end portion of the thin plate W inserted between the receiving member 32 and the pressing member 33 hits the wall portion 32b. Can be prevented.

これにより、第1挟持部20と第2挟持部30との間で、弛みが生じることなく薄板Wを挟持することができ、薄板Wを緊張させることで薄板Wに十分な張力を安定して付与することができる。よって、薄板Wに付与する張力が薄板毎に変動して弾性変形量が変動することを防止できる。従って、レーザ光による加工精度を向上できる。   Accordingly, the thin plate W can be sandwiched between the first sandwiching portion 20 and the second sandwiching portion 30 without causing slack, and by tensioning the thin plate W, sufficient tension can be stably applied to the thin plate W. Can be granted. Therefore, it can prevent that the tension | tensile_strength provided to the thin plate W fluctuates for every thin plate, and the amount of elastic deformations fluctuates. Therefore, the processing accuracy by the laser beam can be improved.

次に、図5(a)を参照して、光ビーム照射部60について説明する。図5(a)は図2のVa−Va線における保持装置10(第2挟持部30)の断面図である。図5(a)に示すように、第2挟持部30は、受部材32の載上面32aと押え部材33の押圧面33aとが上下に重なる部位の受部材32及び押え部材33に、上下に連通する透孔30a,30bが貫通形成されている。   Next, the light beam irradiation unit 60 will be described with reference to FIG. FIG. 5A is a cross-sectional view of the holding device 10 (second clamping unit 30) taken along the line Va-Va in FIG. As shown in FIG. 5 (a), the second clamping unit 30 is moved up and down on the receiving member 32 and the pressing member 33 in a portion where the mounting surface 32a of the receiving member 32 and the pressing surface 33a of the pressing member 33 overlap vertically. The communicating through holes 30a and 30b are formed through.

透孔30a,30bは、それぞれ受部材32及び押え部材33の壁部32bから遠い側(図5左側)の挟持限界線の位置に形成されている。挟持限界線は、差し込まれた薄板Wの端部が挟持限界線を超えて壁部32b側にあれば、薄板Wを緊張させたときも載上面32aと押圧面33aとの間で薄板Wを挟持することができる限界を示す線である。これに対し、差し込まれた薄板Wの端部が挟持限界線を超えなければ、即ち載上面32aと押圧面33aとに挟まれる薄板Wの面積が狭くなれば、薄板Wを緊張させたときに載上面32aと押圧面33aとの間から薄板Wが抜けてしまうおそれが生じる。   The through holes 30a and 30b are formed at the position of the clamping limit line on the side farther from the wall portion 32b of the receiving member 32 and the pressing member 33 (left side in FIG. 5). If the end of the inserted thin plate W is on the side of the wall 32b beyond the clamping limit line, the sandwiching limit line can be moved between the mounting surface 32a and the pressing surface 33a even when the thin plate W is tensioned. It is a line which shows the limit which can be clamped. On the other hand, if the end of the inserted thin plate W does not exceed the clamping limit line, that is, if the area of the thin plate W sandwiched between the mounting surface 32a and the pressing surface 33a is reduced, the thin plate W is tensioned. There is a risk that the thin plate W may come off between the mounting surface 32a and the pressing surface 33a.

本実施の形態においては、受部材32aに形成された透孔30aに、他方の透孔30bに向かって光ビームを照射する光ビーム照射部60が収装されており、押え部材33に形成された透孔30bには、透孔30bに入射された光ビームを受ける受光部61が収装されている。受光部61はケーブルCを介して光ビームの検出の有無を出力回路(図示せず)に入力し、出力回路はその検出結果を処理して制御装置(図示せず)に出力する。   In the present embodiment, a light beam irradiating unit 60 that irradiates a light beam toward the other through hole 30 b is accommodated in the through hole 30 a formed in the receiving member 32 a, and is formed in the holding member 33. The light receiving portion 61 that receives the light beam incident on the through hole 30b is accommodated in the through hole 30b. The light receiving unit 61 inputs the presence / absence of detection of the light beam via the cable C to an output circuit (not shown), and the output circuit processes the detection result and outputs it to a control device (not shown).

制御装置は、加工ヘッドからのレーザ光の照射やXYステージ3のXY方向への移動或いはシリンダ40の駆動力などを制御する装置であり、受光部61が光ビームを検出した場合は、載上面32aと押圧面33aとに挟まれる薄板Wの面積が狭く、薄板Wを緊張させたときに載上面32aと押圧面33aとの間から薄板Wが抜けてしまうおそれが生じると判断されるため、警告音などによる作業者への報知がなされ、レーザ加工機1の動作を待機状態とする。   The control device is a device that controls the irradiation of the laser beam from the processing head, the movement of the XY stage 3 in the X and Y directions, or the driving force of the cylinder 40. If the light receiving unit 61 detects a light beam, the mounting surface Since the area of the thin plate W sandwiched between 32a and the pressing surface 33a is small, it is judged that the thin plate W may come out from between the mounting surface 32a and the pressing surface 33a when the thin plate W is tensioned. The operator is notified by a warning sound or the like, and the operation of the laser processing machine 1 is set in a standby state.

これに対し、受光部61が光ビームを検出しない場合は、差し込まれた薄板Wが挟持限界線(透孔30a,30bの位置)を越えていると判断されるため、シリンダ40(図1参照)を駆動させて薄板Wを緊張させ、レーザ加工を継続する。薄板Wの寸法が短いときは、受部材32の載上面32aと押え部材33の押圧面33aとによる薄板Wの挟持や緊張が不完全になり、薄板Wが抜けてしまう不具合が生じたり加工精度が低下したりすることがある。しかし、レーザ加工機1は光ビーム照射部60を備えており、レーザ加工前に薄板Wの寸法が短いかを判別できるため、薄板Wの寸法が短いことに気づかずに加工が行われることによる不具合や加工精度の低下を防止できる。   On the other hand, when the light receiving unit 61 does not detect the light beam, it is determined that the inserted thin plate W exceeds the clamping limit line (the positions of the through holes 30a and 30b), so the cylinder 40 (see FIG. 1). ) To tension the thin plate W and continue the laser processing. When the dimension of the thin plate W is short, pinching and tension of the thin plate W by the mounting surface 32a of the receiving member 32 and the pressing surface 33a of the pressing member 33 become incomplete, resulting in a problem that the thin plate W comes off or processing accuracy. May decrease. However, since the laser processing machine 1 includes the light beam irradiation unit 60 and can determine whether the dimension of the thin plate W is short before laser processing, the processing is performed without noticing that the dimension of the thin plate W is short. Defects and processing accuracy can be prevented from decreasing.

次に、図5(b)を参照して、押え部材33及び受部材32の形状について説明する。図5(b)は締付具34(図4参照)を開放したときの押え部材33及び受部材32の断面図である。図5(b)に示すように、押え部材33の押圧面33aは、第2挟持部30の相対移動方向(図5左右方向)に沿って壁部32bから離れるにつれて、受部材32の載上面32aに近づく方向に傾斜して構成されている。   Next, the shapes of the pressing member 33 and the receiving member 32 will be described with reference to FIG. FIG. 5B is a cross-sectional view of the pressing member 33 and the receiving member 32 when the fastener 34 (see FIG. 4) is opened. As shown in FIG. 5B, the pressing surface 33 a of the pressing member 33 is placed on the mounting surface of the receiving member 32 as it moves away from the wall portion 32 b along the relative movement direction (left and right direction in FIG. 5) of the second clamping unit 30. It is configured to be inclined in a direction approaching 32a.

これにより、薄板Wを載上面32aに載せてから締付具34(図4参照)を用いて押え部材33を下降させると、まず、押圧面33bの内側(図5左側)が薄板Wに接触し、押え部材33の下降に伴って次第に押圧面33aと薄板Wとの接触面積が広がっていく。そのため、押圧面33aの外側(図5右側)に比べて内側が薄板Wを強く圧迫する。シリンダ40(図1参照)を収縮させて第2挟持部30と第1挟持部20とを離反させると、押圧面33aの内側の縁が薄板Wに食い込むような力が働いて薄板Wを押止する。その結果、緊張した薄板Wが受部材32と押え部材33との間を滑ることが防止され、薄板Wに引張力を損失なく付与することができ、制御された状態で薄板Wを弾性変形させることができる。その結果、加工精度を向上できる。   Thus, when the pressing member 33 is lowered using the fastening tool 34 (see FIG. 4) after the thin plate W is placed on the mounting surface 32a, first, the inner side (left side in FIG. 5) of the pressing surface 33b contacts the thin plate W. As the pressing member 33 is lowered, the contact area between the pressing surface 33a and the thin plate W gradually increases. Therefore, the inner side strongly presses the thin plate W as compared with the outer side (right side in FIG. 5) of the pressing surface 33a. When the cylinder 40 (see FIG. 1) is contracted to separate the second clamping part 30 and the first clamping part 20, a force is applied so that the inner edge of the pressing surface 33a bites into the thin plate W to push the thin plate W. Stop. As a result, the tensioned thin plate W can be prevented from slipping between the receiving member 32 and the pressing member 33, and a tensile force can be applied to the thin plate W without loss, and the thin plate W is elastically deformed in a controlled state. be able to. As a result, processing accuracy can be improved.

以上、実施の形態に基づき本発明を説明したが、本発明は上記実施の形態に何ら限定されるものではなく、本発明の趣旨を逸脱しない範囲内で種々の改良変形が可能であることは容易に推察できるものである。例えば、上記実施の形態で挙げた数値(例えば、各構成の数量等)は一例であり、他の数値を採用することは当然可能である。   The present invention has been described above based on the embodiments. However, the present invention is not limited to the above embodiments, and various improvements and modifications can be made without departing from the spirit of the present invention. It can be easily guessed. For example, the numerical values (for example, the quantity of each component) given in the above embodiment are examples, and other numerical values can naturally be adopted.

上記実施の形態では、押え部材33に形成された透孔30bに受光部61が収装され、受部材32に配設された光ビーム照射部60からの入射光の有無によって制御装置がレーザ加工機1を動作させる場合について説明したが、必ずしもこれに限られるものではなく、押え部材33に光ビーム照射部60を配設し、受部材32に受光部61を配設することも当然可能である。   In the above embodiment, the light receiving unit 61 is accommodated in the through hole 30b formed in the holding member 33, and the control device performs laser processing depending on the presence or absence of incident light from the light beam irradiation unit 60 disposed in the receiving member 32. Although the case where the machine 1 is operated has been described, the present invention is not necessarily limited thereto, and it is naturally possible to arrange the light beam irradiation unit 60 on the pressing member 33 and the light receiving unit 61 on the receiving member 32. is there.

また、受光部61は必ずしも必要ではなく、押え部材33に形成された透孔30bに受光部61を収装しない場合もある。この場合は、レーザ加工機1を操作する者が、透孔30bを通過する光ビームを視認することで薄板Wの有無を判断できる。薄板Wを挟持する操作を行ったにも関わらず、操作する者が透孔30bを通過する光ビームを視認できた場合(薄板Wの寸法が短い場合)には、操作する者がレーザ加工機1の操作を中止することで、不具合が生じることを未然に防止できる。   In addition, the light receiving portion 61 is not always necessary, and the light receiving portion 61 may not be accommodated in the through hole 30 b formed in the pressing member 33. In this case, the person who operates the laser beam machine 1 can determine the presence or absence of the thin plate W by visually recognizing the light beam passing through the through hole 30b. When the operator can visually recognize the light beam passing through the through hole 30b despite the operation of holding the thin plate W (when the dimension of the thin plate W is short), the operator operates the laser beam machine. By stopping the operation 1, it is possible to prevent a problem from occurring.

上記実施の形態では、保持装置10は固定部材21と可動部材31とを備え、可動部材31が固定部材21に対して平面移動する場合、即ち固定された第1挟持部20に対して第2挟持部30が平面移動する場合について説明したが、必ずしもこれに限られるものではなく、第1挟持部20と第2挟持部30の双方が移動して、保持された薄板Wに張力を付与することも可能である。この場合も同様の作用が得られる。   In the above-described embodiment, the holding device 10 includes the fixed member 21 and the movable member 31, and when the movable member 31 moves in a plane with respect to the fixed member 21, that is, the second relative to the fixed first clamping unit 20. Although the case where the clamping unit 30 moves in a plane has been described, the present invention is not necessarily limited thereto, and both the first clamping unit 20 and the second clamping unit 30 move to apply tension to the held thin plate W. It is also possible. In this case, the same effect can be obtained.

上記実施の形態では、押え部材33の押圧面33aが内側(図5左側)に向かって傾斜する場合について説明したが、必ずしもこれに限られるものではなく、受部材32の載上面32aが内側に向かって傾斜することも当然可能である。この場合も、載上面32a及び押圧面33aの内側(加工ヘッド側)で薄板Wを押止して強く挟持することが可能である。   In the above-described embodiment, the case where the pressing surface 33a of the pressing member 33 is inclined toward the inner side (left side in FIG. 5) is not necessarily limited to this, and the mounting surface 32a of the receiving member 32 is on the inner side. Of course, it is also possible to incline towards. Also in this case, the thin plate W can be pressed and held firmly inside the mounting surface 32a and the pressing surface 33a (on the processing head side).

上記実施の形態では、付勢部材35が圧縮コイルばねで形成された場合について説明したが、必ずしもこれに限られるものではなく、他の付勢部材を採用することが可能である。他の付勢部材としては、例えば、板ばね、皿ばね、合成樹脂製やゴム製の弾性体等が挙げられる。   In the above embodiment, the case where the urging member 35 is formed of a compression coil spring has been described. However, the urging member 35 is not necessarily limited thereto, and other urging members can be employed. Examples of other urging members include a leaf spring, a disc spring, a synthetic resin, and a rubber elastic body.

1 レーザ加工機
2 加工台
3 XYステージ
10 保持装置
20 第1挟持部
22 受部材
23 押え部材
24 締付具
30 第2挟持部
30b 透孔
32 受部材
32a 載上面
32b 壁部
32c 上段部
33 押え部材
33a 押圧面
34 締付具
35 付勢部材
60 光ビーム照射部
W 薄板
DESCRIPTION OF SYMBOLS 1 Laser beam machine 2 Processing stand 3 XY stage 10 Holding device 20 1st clamping part 22 Receiving member 23 Holding member 24 Fastening tool 30 2nd clamping part 30b Through-hole 32 Receiving member 32a Loading surface 32b Wall part 32c Upper step part 33 Holding Member 33a Pressing surface 34 Fastening tool 35 Biasing member 60 Light beam irradiation part W Thin plate

Claims (5)

被加工物となる薄板へ向けてレーザ光を照射する加工ヘッドと、その加工ヘッドから照射されるレーザ光の光軸に対して直交する方向に平面移動するXYステージと、そのXYステージに取り付けられると共に前記薄板を保持する保持装置とを備え、その保持装置は、前記薄板の一端を挟持する第1挟持部と、その第1挟持部によって挟持される薄板の一端と反対側の他端を挟持すると共に前記第1挟持部から離反する方向に相対移動して前記薄板に張力を付与する第2挟持部とを備えるレーザ加工機において、
前記第1挟持部および前記第2挟持部は、
前記薄板が載上される載上面を有する受部材と、
その受部材の前記載上面の後端側に立設される壁部と、
その壁部の上端と連絡され前記載上面と段差状に形成される上段部に一端側が配設される付勢部材と、
その付勢部材により上向きに付勢されつつ、前記載上面と所定の間隔をあけて前記載上面の長手方向に沿って対向すると共に、前記第2挟持部の相対移動方向と直交方向における薄板の幅よりも長く形成される押圧面を有する押え部材と、
その押え部材を前記付勢部材の付勢力に抗して下降させ、前記受部材の載上面に載上される前記薄板に前記押え部材の押圧面を押し付ける締付具とを備え、
前記第2挟持部が前記第1挟持部から離反する方向に相対移動する前の状態において、前記第1挟持部および前記第2挟持部の受部材にそれぞれ立設された壁部の下端部間の距離は、前記薄板の寸法公差の最大値よりも大きく設定されていることを特徴とするレーザ加工機。
A processing head that irradiates a thin plate as a workpiece with laser light, an XY stage that moves in a plane perpendicular to the optical axis of the laser light irradiated from the processing head, and an XY stage that is attached to the processing head And a holding device for holding the thin plate, the holding device holding a first holding portion for holding one end of the thin plate, and a second end opposite to one end of the thin plate held by the first holding portion. And a second clamping unit that relatively moves in a direction away from the first clamping unit and applies tension to the thin plate,
The first clamping part and the second clamping part are
A receiving member having a mounting surface on which the thin plate is mounted;
A wall portion erected on the rear end side of the upper surface of the receiving member,
A biasing member that is in communication with the upper end of the wall and has an upper end portion that is formed in a stepped shape with the upper surface;
While being urged upward by the urging member, the thin plate in the direction perpendicular to the relative movement direction of the second holding portion is opposed to the upper surface described above with a predetermined interval along the longitudinal direction of the upper surface described above. A pressing member having a pressing surface formed longer than the width;
A clamp that lowers the pressing member against the biasing force of the biasing member and presses the pressing surface of the pressing member against the thin plate placed on the mounting surface of the receiving member;
Between the lower end portions of the wall portions erected on the receiving members of the first clamping portion and the second clamping portion, respectively, in a state before the second clamping portion relatively moves in a direction away from the first clamping portion. Is set to be greater than the maximum value of the dimensional tolerance of the thin plate.
前記第1挟持部または前記第2挟持部の少なくとも一方は、
前記受部材の載上面と前記押え部材の押圧面とが上下に重なる部位の前記受部材または前記押え部材の一方の前記壁部から遠い側に配設され、前記受部材または前記押え部材の他方に向かって光ビームを照射する光ビーム照射部と、
前記受部材または前記押え部材の他方に形成され照射された前記光ビームが入射される透孔とを備えていることを特徴とする請求項1記載のレーザ加工機。
At least one of the first clamping part or the second clamping part is
The receiving surface of the receiving member and the pressing surface of the pressing member are arranged on a side far from the wall portion of the receiving member or the pressing member, and the other of the receiving member or the pressing member. A light beam irradiation unit for irradiating a light beam toward
The laser processing machine according to claim 1, further comprising a through hole formed on the other of the receiving member or the pressing member and into which the irradiated light beam is incident.
前記押え部材の押圧面または前記受部材の載上面は、
前記第2挟持部の相対移動方向に沿って前記壁部から離れるにつれて互いに近づく方向に傾斜していることを特徴とする請求項1又は2に記載のレーザ加工機。
The pressing surface of the pressing member or the mounting surface of the receiving member is
3. The laser beam machine according to claim 1, wherein the laser beam machine is inclined in a direction approaching each other as the distance from the wall portion increases along a relative movement direction of the second holding portion.
前記壁部は、下部側に対して上部側が前記加工ヘッドの方向に向かってそれぞれせり出していることを特徴とする請求項1から3のいずれかに記載のレーザ加工機。   4. The laser processing machine according to claim 1, wherein an upper side of each of the wall portions protrudes toward a direction of the processing head with respect to a lower side. 請求項1から請求項4のいずれかに記載のレーザ加工機に使用されることを特徴とする保持装置。   A holding device used in the laser processing machine according to claim 1.
JP2010089465A 2010-04-08 2010-04-08 Laser processing machine and holding device Expired - Fee Related JP5489829B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103212870A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Tension frame suitable for steel sheets with different lengths
CN103212879A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Tensioning frame for improving constancy of tensile force
JP2016175108A (en) * 2015-03-20 2016-10-06 三菱電機株式会社 Automatic nozzle exchanger of laser processing machine

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JPH06155156A (en) * 1992-11-20 1994-06-03 Amada Co Ltd Material feeder for cutting machine
JPH10328886A (en) * 1997-05-29 1998-12-15 Sumitomo Heavy Ind Ltd Holding device for working thin sheet and its holding method
JP2010051986A (en) * 2008-08-27 2010-03-11 Nippon Sharyo Seizo Kaisha Ltd Laser beam machining apparatus

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JPH0577080A (en) * 1991-09-20 1993-03-30 Nippei Toyama Corp Pallet for supporting work of cutting machine
JPH06155156A (en) * 1992-11-20 1994-06-03 Amada Co Ltd Material feeder for cutting machine
JPH10328886A (en) * 1997-05-29 1998-12-15 Sumitomo Heavy Ind Ltd Holding device for working thin sheet and its holding method
JP2010051986A (en) * 2008-08-27 2010-03-11 Nippon Sharyo Seizo Kaisha Ltd Laser beam machining apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103212870A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Tension frame suitable for steel sheets with different lengths
CN103212879A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Tensioning frame for improving constancy of tensile force
JP2016175108A (en) * 2015-03-20 2016-10-06 三菱電機株式会社 Automatic nozzle exchanger of laser processing machine

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