JP2011212680A - Long-life chemical filter unit - Google Patents
Long-life chemical filter unit Download PDFInfo
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- JP2011212680A JP2011212680A JP2011151253A JP2011151253A JP2011212680A JP 2011212680 A JP2011212680 A JP 2011212680A JP 2011151253 A JP2011151253 A JP 2011151253A JP 2011151253 A JP2011151253 A JP 2011151253A JP 2011212680 A JP2011212680 A JP 2011212680A
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Abstract
Description
本発明は、半導体製造施設や原子力施設、医療施設などで発生する有害ガスを捕集するケミカルフィルタユニットに関するものである。 The present invention relates to a chemical filter unit that collects harmful gases generated in semiconductor manufacturing facilities, nuclear facilities, medical facilities, and the like.
空気中のガス状放射性物質、酸性ガス、塩基性ガス、有機ガス等を吸着する吸着材には、活性炭、イオン交換樹脂、ゼオライト等が用いられ、例えば鋼板、SUS板、樹脂板からなる箱型フレーム内ガスケットを介して上下2枚の平行なパンチング板を設けて、その中に充填される(たとえば、特許文献1)。この吸着層をフィルタパネルと呼ぶ。活性炭素繊維を吸着材とする場合、その特徴から吸着材を不織布等で挟んでヒダ折りし、フィルタ層(フィルタパネル)としている(たとえば、特許文献2)。 Activated carbon, ion exchange resin, zeolite, etc. are used as the adsorbent for adsorbing gaseous radioactive substances, acidic gas, basic gas, organic gas, etc. in the air. For example, a box shape made of steel plate, SUS plate, resin plate Two parallel punching plates are provided via an in-frame gasket and filled therein (for example, Patent Document 1). This adsorption layer is called a filter panel. When activated carbon fiber is used as an adsorbent, the adsorbent is sandwiched between non-woven fabrics, etc., and is folded to form a filter layer (filter panel) (for example, Patent Document 2).
ガスの吸着能力は、どの吸着材においてもガスと吸着材との接触時間が重要なファクターとなる。面速度が早く接触時間が短いと、吸着効率が落ちたり、吸着材が早くガスを吸着し、劣化して寿命が短くなる。 The gas adsorption capacity is an important factor in the contact time between the gas and the adsorbent in any adsorbent. If the surface speed is fast and the contact time is short, the adsorption efficiency is reduced, or the adsorbent adsorbs gas quickly and deteriorates to shorten the life.
フィルタユニットは一般に、フィルタパネルを上下、コの字状に配置したり(たとえば非特許文献1)、V字状に配置する(特許文献1)。また、活性炭素繊維を吸着材とする場合では、ジグザグ状に折り畳んだフィルタをひとつのフィルタパネルとして、上下、もしくは片方だけに配置する場合がある(特許文献3)。 In general, the filter unit is configured such that the filter panel is arranged in an up and down, U-shape (for example, Non-Patent Document 1) or a V-shape (Patent Document 1). Moreover, when using activated carbon fiber as an adsorbent, a filter folded in a zigzag shape may be arranged as one filter panel on the top and bottom or only on one side (Patent Document 3).
しかし、フィルタユニットの特性として、フィルタパネルを通過する面速度は偏り、1枚のフィルタパネルの中で、面速度の大きい場所と小さい場所が存在する。すると、面速度の大きな場所が早く劣化するため、結果として、そのフィルタユニットとしての寿命は、早く劣化した場所の寿命に依存する事となる。 However, as a characteristic of the filter unit, the surface speed passing through the filter panel is uneven, and there are places where the surface speed is high and small in one filter panel. Then, since the place where the surface speed is large deteriorates quickly, as a result, the life of the filter unit depends on the life of the place where the deterioration is early.
その対策のひとつとして、一部のフィルタユニットでは、フィルタパネルを回転もしくは反転させて寿命を延ばす工夫がされている。(特許文献4)As one of the countermeasures, some filter units are devised to extend the life by rotating or inverting the filter panel. (Patent Document 4)
フィルタパネルをコの字状に設置した場合、ガスがフィルタユニット内部からフィルタパネルを通して上下に流れる場合も、逆にフィルタパネル上下からユニット内部を通して流れる場合も(非特許文献1参照)、フィルタパネルのガス出口(下流)側の部分の面風速が極端に早くなり、フィルタユニットの寿命が短縮される。 When the filter panel is installed in a U-shape, gas flows vertically from the inside of the filter unit through the filter panel, or conversely, flows from the top and bottom of the filter panel through the inside of the unit (see Non-Patent Document 1). The surface wind speed at the gas outlet (downstream) side becomes extremely fast, and the life of the filter unit is shortened.
また、フィルタパネルをV字状に配置した場合も同様に、フィルタパネルのガス出口(下流)側の部分の面風速が早くなり、フィルタユニットの寿命が短縮される。(特許文献4参照) Similarly, when the filter panel is arranged in a V shape, the surface wind speed at the gas outlet (downstream) side of the filter panel is increased, and the life of the filter unit is shortened. (See Patent Document 4)
コの字状、V字状を複数組み合わせたフィルタパネルの場合も同様である。 The same applies to a filter panel in which a plurality of U-shapes and V-shapes are combined.
本発明は、上記課題を解決する為に鋭意研究、検討した結果得られたものである。ガスが流れるフィルタパネルの出口にかけて大となる通気抵抗をかけ、その通気抵抗によりフィルタパネル全体の面速度を一定にする。通気抵抗を変化させる方法として、フィルタパネルのパンチングプレートの穴の口径を変化させる。もしくは、穴の密度を変化させるなどで可能である。また、不織布、織物等を用いて、かさ密度や厚さを変化させる事でも実施できる。変化させる部材料として、金属、布、紙、樹脂等が望ましい。変化させる為の部材料の設置位置は、フィルタパネルの表面もしくは、フィルタパネル吸着層の内部でも良い。 The present invention has been obtained as a result of intensive studies and studies to solve the above problems. A large ventilation resistance is applied to the outlet of the filter panel through which gas flows, and the surface speed of the entire filter panel is made constant by the ventilation resistance. As a method of changing the ventilation resistance, the diameter of the hole in the punching plate of the filter panel is changed. Alternatively, it is possible to change the hole density. Moreover, it can also implement by changing a bulk density and thickness using a nonwoven fabric, a textile fabric, etc. As the material to be changed, metal, cloth, paper, resin, or the like is desirable. The location of the material for changing may be on the surface of the filter panel or inside the filter panel adsorption layer.
本発明によれば、各フィルタパネルを通過するガスの面速度は、全面でほぼ一定となり、フィルタユニットの寿命の延長が図られ、ランニングコストの低減が図られる。 According to the present invention, the surface velocity of the gas passing through each filter panel is substantially constant over the entire surface, extending the life of the filter unit and reducing the running cost.
本発明の実施形態について図面を参照して説明する。[図1]にはフィルタパネルをコの字型に配置した従来のフィルタユニットを示している。フィルタユニット上部には、パンチングプレート2と2aに挟まれた空間に、吸着材3が充填されており1枚のフィルタパネル(上フィルタパネル)を構成している。同様にパンチングプレート2bと2cに挟まれた空間に吸着材3cが充填され、フィルタパネル(下フィルタパネル)を構成する。上下2つのフィルタパネルの間には空洞部があり、上下2つのフィルタパネルにより浄化された汚染ガスは、この空洞部を通ってガス流出口5から浄化ガスとなって排出される。フィルタユニットは、この上下2枚のフィルタパネルとフィルタパネルを支え、フィルタパネル以外から汚染ガスが流入しないように密閉溶接された枠体1と、フィルタユニットとフィルタユニットを取り付ける、フィルタボックスに密着させる為のフェースプレート6、ガスケット7で構成される Embodiments of the present invention will be described with reference to the drawings. [FIG. 1] shows a conventional filter unit in which filter panels are arranged in a U-shape. In the upper part of the filter unit, a space between the punching plates 2 and 2a is filled with the adsorbent 3 to constitute one filter panel (upper filter panel). Similarly, a space between the punching plates 2b and 2c is filled with the adsorbing material 3c to constitute a filter panel (lower filter panel). There is a cavity between the upper and lower filter panels, and the polluted gas purified by the upper and lower filter panels passes through the cavity and is discharged as purified gas from the gas outlet 5. The filter unit supports the two upper and lower filter panels and the filter panel, and is tightly attached to a filter box to which the filter unit and the filter unit are attached, and the frame body 1 hermetically welded so as to prevent inflow of contaminant gas from other than the filter panel. For face plate 6 and gasket 7
上下フィルタパネルから吸い込まれた汚染ガスは、空洞部を通ってガス流出口から排出されるが、空洞部奥とガス流出口5付近の空洞部で圧力差が生じ、ガス流出口5付近のフィルタパネルの面速度が早くなり、面速度に偏りが生じる。 The polluted gas sucked from the upper and lower filter panels is discharged from the gas outlet through the cavity, but a pressure difference is generated between the cavity and the cavity near the gas outlet 5, and the filter near the gas outlet 5. The surface speed of the panel increases, and the surface speed becomes uneven.
[図2]では、汚染ガスが上下フィルタパネルに入り込むそれぞれの面に、面速度が早くなるガス流出口5付近で大となる通気抵抗を持つ、通気抵抗部材8を貼り付けた例である。なお、フィルタパネル幅方向の面速度の偏りは小さく、無視できる。 [FIG. 2] is an example in which a ventilation resistance member 8 having a large ventilation resistance in the vicinity of the gas outlet 5 where the surface velocity is increased is attached to each surface where contaminated gas enters the upper and lower filter panels. In addition, the deviation of the surface speed in the filter panel width direction is small and can be ignored.
[図3]には、V字状フィルタパネルを複数組み合わせたフィルタユニットを示している。[図1]と同様に、2枚のパンチングプレート2に挟まれた中に吸着材が充填され、1つのフィルタパネルを構成している。フィルタパネルの片側を他のフィルタパネルと付け合わせることによりV字状フィルタパネルを構成し、複数組み合わせる事でフィルタユニットが構成される。このように、V字状フィルタパネルを組み合わせることにより、ガス処理風量の効率化を図っている。[図3]では、そのそれぞれのフィルタパネル内側のパンチングプレートにガス出口(下流)方向に大となる通気抵抗を持つ、通気抵抗部材8を貼り付けた例である。 FIG. 3 shows a filter unit in which a plurality of V-shaped filter panels are combined. Similarly to [FIG. 1], an adsorbent is filled between two punching plates 2 to constitute one filter panel. A V-shaped filter panel is configured by attaching one side of the filter panel to another filter panel, and a filter unit is configured by combining a plurality of filter panels. Thus, the efficiency of gas processing air volume is achieved by combining the V-shaped filter panel. [FIG. 3] is an example in which a ventilation resistance member 8 having a ventilation resistance that increases in the gas outlet (downstream) direction is attached to the punching plate inside each filter panel.
[図4]には、吸着材に活性炭素繊維を用いたフィルタユニットを示している。図上部から吸い込まれた汚染ガスは、ヒダ折りされた活性炭素繊維層(フィルタパネル)を通り、フィルタユニット内部の空洞部を通って図右側のガス流出口から排出される。この場合も[図1]と同様にガス流出口付近で面速度が大きくなる為、[図5]では、ガス流出口付近で大となる通気抵抗を持つ通気抵抗部材8をフィルタパネル片面に貼り付けている。 [FIG. 4] shows a filter unit using activated carbon fibers as an adsorbent. The polluted gas sucked from the upper part of the figure passes through the fold-folded activated carbon fiber layer (filter panel), passes through the cavity inside the filter unit, and is discharged from the gas outlet on the right side of the figure. Also in this case, since the surface speed increases near the gas outlet as in FIG. 1, in FIG. 5, a ventilation resistance member 8 having a large ventilation resistance near the gas outlet is attached to one side of the filter panel. Attached.
[図6]には、[図4]に示す活性炭素繊維層(フィルタパネル)の一部を拡大して示している。フィルタパネルは、活性炭素繊維から成る吸着材3を不織布でできたカバー材で挟み込み、セパレータを介してヒダ折りにされている。図では、吸着材3を挟み込むカバー材のかさ密度を変え、ガス流出口付近で大となる通気抵抗を持つ通気抵抗部材8を用いている例である。 FIG. 6 shows an enlarged view of a part of the activated carbon fiber layer (filter panel) shown in FIG. In the filter panel, the adsorbent 3 made of activated carbon fibers is sandwiched between cover materials made of non-woven fabric, and is folded through a separator. In the drawing, the bulk density of the cover material sandwiching the adsorbent 3 is changed, and the ventilation resistance member 8 having a large ventilation resistance near the gas outlet is used.
以下、実施例をもって説明するが、本発明の範囲はこれらに限定されるものではない。 Hereinafter, although demonstrated with an Example, the scope of the present invention is not limited to these.
例として、フィルタパネルをコの字状に配置したフィルタユニットに、右方向から流れてくるガスが、フィルタパネル上下から入って浄化され、フィルタユニット内部の空洞を通して左側に流れ出る(吸い出される)場合のシミュレーション結果を示す。
色の違いは、上部フィルタパネル表面の面速度の分布を示している。
フィルタユニット上下に取付けたフィルタパネルのサイズは、0.58×0.67×0.16m。ガス処理風量は、9.4m3/分、シミュレーション解析プログラムは、e−flow/WindPerfectを用いた。As an example, when the gas flowing from the right direction enters the filter unit with the filter panel arranged in a U-shape and is purified from the top and bottom of the filter panel and flows out (sucked out) to the left through the cavity inside the filter unit. The simulation results are shown.
The difference in color indicates the surface speed distribution on the upper filter panel surface.
The size of the filter panel attached to the top and bottom of the filter unit is 0.58 × 0.67 × 0.16 m. The gas processing air volume was 9.4 m 3 / min, and the simulation analysis program was e-flow / WindPerfect.
[図7]に通気抵抗をかけない場合の結果を示す。ガスはフィルタパネル表面、ガス出口(下流)付近で面速度が最大0.3m/secとなり、一方、上流右方向では、0.1m/sec以下と面速度に大きな偏りができる。これは、吸い込みにより空洞内に圧力変化が生じ、空洞内圧力の低い空洞出口付近のフィルタパネルから、多くのガスが引き込まれ、面速度に偏りを生じさせているからである。 [FIG. 7] shows the results when no ventilation resistance is applied. Gas has a maximum surface velocity of 0.3 m / sec near the filter panel surface and the gas outlet (downstream), while in the upstream right direction, the surface velocity can be greatly biased to 0.1 m / sec or less. This is because the suction causes a pressure change in the cavity, and a large amount of gas is drawn from the filter panel near the cavity outlet where the pressure in the cavity is low, causing a deviation in the surface speed.
次に、[図9]に示す2次関数で近似される通気抵抗を、フィルタユニット長さ方向出口にかけて大となるように、フィルタパネル上下に与えた場合のガスの面速分布を[図8]に示す。フィルタパネルの上部表面、全面に渡って、均一の面速度が得られ、改善されている。 Next, the surface velocity distribution of the gas when the ventilation resistance approximated by the quadratic function shown in [FIG. 9] is given to the upper and lower sides of the filter panel so as to increase toward the outlet in the length direction of the filter unit [FIG. ]. A uniform surface speed is obtained and improved over the entire upper surface of the filter panel.
1 :枠体
2 :パンチングプレート
2a:パンチングプレート(上フィルタパネル空洞部側)
2b:パンチングプレート(下フィルタパネル空洞部側)
2c:パンチングプレート(下フィルタパネル外側)
3 :吸着材
3a:吸着材(下フィルタパネル内)
4 :ハンドル
5 :ガス流出口
6 :フェースプレート
7 :ガスケット
8 :通気抵抗部材
8a:通気抵抗部材(下フィルタパネル外側)
9 :セパレータ1: Frame 2: Punching plate 2a: Punching plate (upper filter panel cavity side)
2b: Punching plate (lower filter panel cavity side)
2c: Punching plate (outside of lower filter panel)
3: Adsorbent 3a: Adsorbent (inside lower filter panel)
4: Handle 5: Gas outlet 6: Face plate 7: Gasket 8: Ventilation resistance member 8a: Ventilation resistance member (outside of lower filter panel)
9: Separator
Claims (6)
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102112026B1 (en) * | 2019-11-28 | 2020-05-18 | 주식회사 인코아 | Trocar with filter |
WO2024031782A1 (en) * | 2022-08-12 | 2024-02-15 | 福建省龙德新能源有限公司 | Reaction tower for phosphorus pentafluoride production |
Citations (3)
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JPH08141343A (en) * | 1994-11-22 | 1996-06-04 | Ebara Corp | Filter box incorporating filters for gas removal |
JP2005131506A (en) * | 2003-10-29 | 2005-05-26 | Dan Takuma:Kk | Chemical filter |
JP2008126138A (en) * | 2006-11-21 | 2008-06-05 | Matsushita Electric Ind Co Ltd | Gas removing filter |
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2011
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH08141343A (en) * | 1994-11-22 | 1996-06-04 | Ebara Corp | Filter box incorporating filters for gas removal |
JP2005131506A (en) * | 2003-10-29 | 2005-05-26 | Dan Takuma:Kk | Chemical filter |
JP2008126138A (en) * | 2006-11-21 | 2008-06-05 | Matsushita Electric Ind Co Ltd | Gas removing filter |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102112026B1 (en) * | 2019-11-28 | 2020-05-18 | 주식회사 인코아 | Trocar with filter |
WO2024031782A1 (en) * | 2022-08-12 | 2024-02-15 | 福建省龙德新能源有限公司 | Reaction tower for phosphorus pentafluoride production |
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