JP2011186240A - Method of manufacturing panel for information display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a panel for information display capable of solving a problem of the displacement of a pixel electrode and a partition, and reducing a manufacture cost by reducing the number of processes. <P>SOLUTION: The method of manufacturing the panel for information display which is actively driven by using a thin film transistor (TFT) includes: a protective film and partition forming process of applying a resist being the protective film of the TFT to a back surface substrate where the TFT is formed, continuously processing the applied resist, and integrally forming the protective film having a through-hole and a partition on the back surface substrate; a pixel electrode forming process of forming the pixel electrode by printing a conductive material on the protective film between partitions and the through-hole; and a sticking process of filling a display medium inside a cell, then bonding a front surface substrate provided with a common electrode and the partition, and sticking the front surface substrate and the back surface substrate to each other. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  In the present invention, cells separated from each other by partition walls are formed between a transparent front substrate on the viewing side and a rear substrate on which a thin film transistor (TFT) is formed for each pixel on the back side, and the cells are composed of particles. By enclosing at least one type of display medium and applying an electric field corresponding to the voltage applied between the common electrode provided on the front substrate and the pixel electrode provided corresponding to the TFT on the rear substrate to the display medium The present invention relates to a method for manufacturing an information display panel that displays information by moving a display medium.

  Conventionally, a cell separated from each other by a partition is formed between a transparent display surface side panel substrate and a back side panel substrate, and at least one kind of display medium composed of particles is enclosed in the cell, 2. Description of the Related Art An information display panel that displays information by moving a display medium by applying an electric field according to a voltage applied between electrodes provided on a panel substrate to the display medium is known. In addition, it is disclosed that the partition wall is formed by photolithography, and usually displays information by passive driving using a line electrode (see, for example, Patent Document 1).

  In the conventional information display panel having the above-described configuration, instead of displaying information by passive driving using a line electrode, a thin film transistor (TFT) and a pixel electrode are formed on the lower substrate, and the pixel is turned on / off by the thin film transistor. Since an active drive system that controls the above can realize a high response speed and high contrast, there is an increasing demand for an information display panel that displays information by active drive using a TFT substrate.

JP 2003-202601 A

  FIG. 6 is a diagram for explaining an example of an active display type information display panel using a TFT substrate. In FIG. 6, 51 is a rear substrate on the rear side, 52 is a front substrate on the viewing side, 53W is a white display medium configured as a particle group including charged white particles 53Wa, and 53B is a particle including charged black particles 53Ba. A black display medium configured as a group, 54 is provided on the back substrate 51 via a TFT layer 57, and 54 is provided between the back substrate 51 and the front substrate 52, for example, in a lattice shape to form cells. The pixel electrode 56 is a common electrode provided on the front substrate 52. The TFT layer 57 is provided with a gate electrode 61 and a gate insulating film 62 on the back substrate 52, a drain electrode 63, a source electrode 64 and a channel layer 65 are provided on the gate insulating film 62, and a through hole is further formed thereon. A protective film 67 having 66 is formed. The pixel electrode 55 is provided in the surface of the protective film 67 and in the through hole 66, and is connected to the drain electrode 63.

  FIGS. 7A to 7H are views for explaining an example of a manufacturing method of the reflective information display panel shown in FIG. In the example illustrated in FIGS. 7A to 7H, the same members as those illustrated in FIG. 6 are denoted by the same reference numerals, and description thereof is omitted. In this example, the protective film forming process shown in FIGS. 7A to 7D, the pixel electrode forming process shown in FIGS. 7E to 7F, and the bonding process shown in FIGS. 7G to 7H. Thus, an information display panel is manufactured.

  The manufacturing method will be described with reference to FIGS. 7A to 7H. First, as shown in FIG. 7A, a back substrate 51 provided with a TFT layer 57 other than the protective film 67 is prepared. Next, as shown in FIG. 7B, a resist 71 for forming a protective film 67 is applied on the back substrate 51 provided with the TFT layer 57. Next, as shown in FIG. 7C, a mask 72 is provided on the through hole formation position of the resist 71, and the resist 71 is exposed from above through the mask 72. Next, as shown in FIG. 7D, the protective film 67 having the through hole 66 is formed by developing and removing the uncured resist 71. The protective film forming step is thus completed. Next, as shown in FIG. 7F, the electrode material is printed on the surface of the protective film 67 and in the through hole 66 using the bump 73, thereby forming the pixel electrode 55. This completes the pixel electrode formation step. Next, as shown in FIG. 7G, a front substrate 52 in which a partition wall 54 is provided and a cell formed by the partition wall 54 is filled with display media 53W and 53B is prepared. As shown in FIG. 7 (h), an information display panel is obtained by finishing the bonding step by bonding the protective film 67 at the end of 55 with an adhesive.

  In the information display panel manufactured by the manufacturing method described above, it is difficult to position the partition wall 54 and the protective film 67 shown in FIG. 7G when they are bonded together. As shown in FIG. There has been a problem that misalignment occurs. This problem arises due to insufficient alignment accuracy in the bonding step of FIG. 7G and expansion / contraction of the substrate due to heat and stress, and causes problems such as a decrease in contrast and drive failure in the resulting information display panel. Further, in the manufacturing method described above, since the protective layer formation, the pixel electrode formation, the partition wall formation, and the three photolithography processes are performed, the process cost is high and it is necessary to develop a process that can be manufactured at a lower cost. Furthermore, although different from the manufacturing method described above, when the pixel electrode is formed by using a vacuum film forming method, the through hole portion remains as a concave portion, which may cause a problem in particle movement.

  The object of the present invention is to solve the above-described problems, solve the problem of positional deviation between the pixel electrode and the partition wall, and reduce the manufacturing cost by reducing the number of processes. A manufacturing method is to be provided.

In the method for manufacturing an information display panel according to the present invention, cells separated from each other by partition walls are formed between a transparent front substrate on the viewing side and a rear substrate on which a thin film transistor (TFT) is formed for each pixel on the back side. An electric field corresponding to a voltage applied between a common electrode provided on the front substrate and a pixel electrode provided corresponding to the TFT on the rear substrate, in which at least one type of display medium composed of particle groups is enclosed in the cell Is a manufacturing method of an information display panel that displays information by moving the display medium by applying to the display medium,
A protective film in which a protective film having a through hole and a partition wall are integrally formed on the rear substrate by applying a resist as a TFT protective film to the rear substrate on which the TFT is formed, and continuously processing the applied resist. A film and partition formation step;
A pixel electrode forming step of forming a pixel electrode by printing a conductive material on the protective film between the partition walls and in the through hole;
After filling the display medium in the cell, a bonding step of bonding the front substrate and the back substrate by bonding the front substrate provided with the common electrode and the partition,
It is characterized by comprising.

  As a preferred example of the method for producing an information display panel of the present invention, in the protective film and partition wall forming step, a photo-curing resist is used as a resist, and the coated resist is exposed to only a portion where the partition wall is formed. Then, after the secondary exposure that exposes only the part where the through hole is formed in the protective film, development is performed to remove the uncured resist, so that the protective film having the through hole and the partition wall are integrated on the back substrate. As an exposure condition, the application thickness T of the resist is the sum of the protective layer thickness t1 and the partition wall thickness t2 (T = t1 + t2), and the energy required to completely cure the resist having the thickness T If E is E, energy of E × (t2 / T) or more may be given by primary exposure, and energy of E × (t1 / T) or less may be given by secondary exposure.

  As another preferred example of the method for manufacturing the information display panel of the present invention, in the protective film and partition wall forming step, a photoresist is used as a resist, and only the partition wall portion is masked against the applied resist. First exposure is performed, and then a second exposure is performed only on the through hole portion using a mask, followed by development to form a protective film having a through hole and a partition integrally on the back substrate, and the exposure. As a condition, assuming that the coating thickness T of the resist is the sum of the thickness t1 of the protective layer and the thickness t2 of the partition wall (T = t1 + t2), and the energy required to sufficiently plasticize the resist having the thickness T is E, There are cases where energy of E × (t2 / T) or less is given and energy of E × (t1 / T) or more is given by secondary exposure.

  Furthermore, as still another suitable example of the method for manufacturing the information display panel of the present invention, the pixel electrode forming method in the pixel electrode forming step is an ink jet method, and the viscosity of the ink used at that time is 0.1 mP. There are cases where the pixel electrode is flattened by using the flow of ink during printing of the pixel electrode in the formation of the pixel electrode in the pixel electrode formation step.

  According to the present invention, the partition wall and the protective film are continuously formed of the same material, so that the partition wall is formed on the back substrate instead of the front substrate, and the fabricated partition wall is formed when the pixel electrode is printed. It can be used as a bank. Therefore, the number of necessary steps can be reduced, and manufacturing at a lower cost and higher throughput becomes possible. In addition, since the pixel electrode is formed in accordance with the position of the partition wall, the positional displacement between the pixel electrode and the partition wall does not occur essentially, and precise alignment becomes unnecessary. As a result, the contrast of the obtained information display panel can be improved and the throughput in manufacturing can be improved.

  As a preferred example of the present invention, in the protective film and partition wall forming step, a photo-curing resist is used as a resist, and the applied resist is subjected to primary exposure for exposing only a portion where the partition wall is formed, and through holes are formed in the protective film. After performing the secondary exposure to expose only a part, the development is performed to remove the uncured resist, so that a protective film having a through hole and a partition are integrally formed on the back substrate, and the exposure As a condition, if the coating thickness T of the resist is the sum of the thickness t1 of the protective layer and the partition wall thickness t2 (T = t1 + t2), and E is the energy required to completely cure the resist having the thickness T, E When energy of x (t2 / T) or more is given and energy of E x (t1 / T) or less is given in secondary exposure, the manufacturing method and exposure conditions can be further optimized. More preferably, the contrast of the obtained information display panel can be improved and the throughput at the time of manufacturing can be improved.

  As another preferred embodiment of the present invention, in the protective film and partition wall forming step, a photoresist is used as a resist, and the coated resist is subjected to primary exposure while masking only the partition wall portion, and then the mask is formed. After the secondary exposure is performed only for the through-hole portion, development is performed to form a protective film having a through-hole and a partition integrally on the rear substrate, and the resist coating thickness T is set as the exposure condition. When the sum of the protective layer thickness t1 and the partition wall thickness t2 (T = t1 + t2) is assumed, and E is energy necessary for sufficiently plasticizing the resist having the thickness T, the primary exposure is less than E × (t2 / T). Even when energy is applied and energy of E × (t1 / T) or more is applied in the secondary exposure, the manufacturing method and exposure conditions can be further optimized, and the information display pattern obtained can be more suitably obtained. It is possible to improve the contrast of the channel and the throughput during manufacturing.

  Furthermore, as yet another preferred embodiment of the present invention, the pixel electrode forming method in the pixel electrode forming step is an ink jet method, and the viscosity of the ink used at that time is 0.1 mP · sec to 10 mP · sec. In the formation of the pixel electrode in the pixel electrode formation step, when the flow of ink at the time of printing the pixel electrode is used, the pixel formation can be further optimized, and the obtained information display panel is more preferably obtained Contrast and manufacturing throughput can be improved.

(A), (b) is a figure which shows an example of the fundamental structure of the information display panel used as the object of the manufacturing method of this invention. It is a figure which shows the structure of an example of the information display panel used as the object of the manufacturing method of this invention. (A)-(h) is a figure for demonstrating an example of the manufacturing method of the information display panel of this invention shown in FIG. 2, respectively. (A)-(h) is a figure for demonstrating the other example of the manufacturing method of the information display panel of this invention shown in FIG. 2, respectively. It is a figure for demonstrating the relationship between the pixel electrode and partition of the information display panel manufactured according to the manufacturing method of this invention. It is a figure for demonstrating an example of the information display panel of the active drive system using a TFT substrate. (A)-(h) is a figure for demonstrating an example of the manufacturing method of the reflection type information display panel shown in FIG. 6, respectively. It is a figure for demonstrating the relationship between the pixel electrode of the information display panel manufactured according to the conventional manufacturing method, and a partition.

<Basic Configuration of Information Display Panel Targeted by Manufacturing Method of the Present Invention>
First, a basic configuration of a charged particle electric field driving system information display panel, which is an example of an information display panel that is an object of the manufacturing method of the present invention, will be described. In the information display panel, an electric field is applied from a counter counter electrode to a display medium configured as a particle group including charged particles sealed between two opposing substrates. Along with the applied electric field direction, the display medium is attracted by an electric field force or a Coulomb force, and the moving direction of the display medium is switched by a change in the electric field direction, whereby information such as an image is displayed. Therefore, it is necessary to design the information display panel so that the display medium can move uniformly and maintain the stability when the display information is rewritten or when the displayed information is continuously displayed. Here, as the force applied to the particles constituting the display medium, in addition to the force attracting each other by the Coulomb force between the particles, an electric mirror image force between the electrode and the substrate, an intermolecular force, a liquid cross-linking force, gravity and the like can be considered.

  The principle of information display applied to the information display panel that is the subject of the manufacturing method of the present invention will be described with reference to FIGS. 1 (a) and 1 (b). In the example shown in FIGS. 1A and 1B, at least two types of display media (in this case, including negatively charged white particles 3Wa) configured as a particle group including particles having at least optical reflectance and chargeability are included. The electrode provided on the substrate 1 in each cell formed by the partition walls 4 is a white display medium 3W configured as a particle group and a black display medium 3B configured as a particle group including positively charged black particles 3Ba). 5 (pixel electrode with TFT (thin film transistor)) and the electrode 6 (common electrode) provided on the substrate 2 are moved vertically to the substrates 1 and 2 in accordance with an electric field generated by applying a voltage. Then, the white display medium 3W is visually recognized by the observer as shown in FIG. 1A, or the white display is displayed by the observer, or the black display medium 3B is visually recognized by the observer as shown in FIG. Is displayed in a matrix with black and white dots. In addition, in FIG. 1 (a), (b), the partition in front is abbreviate | omitted. Here, an example is shown in which cells and pixels (dots) correspond one-to-one. Here, an example of a charged particle gas moving type display panel in which the cell space is filled with gas has been described. It can also be a display panel.

<Concerning Specific Configuration of Information Display Panel Targeted by Manufacturing Method of the Present Invention>
FIG. 2 is a view showing a configuration of an example of an information display panel which is a target of the manufacturing method of the present invention. In the example shown in FIG. 2, the same members as those shown in FIGS. 1A and 1B are denoted by the same reference numerals, and the description thereof is omitted. In the example shown in FIG. 2, 1 is a back substrate on the back side, 2 is a front substrate on the viewing side, 3W is a white display medium configured as a particle group including the chargeable white particles 3Wa, and 3B is the chargeable black particles 3Ba. A black display medium configured as a group of particles including 4 is provided between the rear substrate 1 and the front substrate 2 in a lattice shape, for example, to form cells, and 5 is provided on the rear substrate 1 via the TFT layer 7. A pixel electrode 6 formed on the front substrate 2 is a common electrode provided on the front substrate 2. Further, the TFT layer 7 is provided with a gate electrode 11 and a gate insulating film 12 on the back substrate 2, a drain electrode 13, a source electrode 14 and a channel layer 15 are provided on the gate insulating film 12, and a through hole is further formed thereon. A protective film 17 having 16 is formed. The pixel electrode 15 is provided in the surface of the protective film 17 and in the through hole 16 and is connected to the drain electrode 13.

<About the manufacturing method of the information display panel of this invention>
The characteristics of the information display panel manufacturing method of the present invention are as follows. (1) A resist as a TFT protective film is applied to the back substrate on which the TFT is formed. A protective film and partition forming step for continuously processing the coated resist to form a protective film having a through hole and a partition on the back substrate integrally; and (2) on the protective film between the partition and the through hole. A pixel electrode forming step of forming a pixel electrode by printing a conductive material on the surface; and (3) after filling the display medium in the cell, the front substrate provided with the common electrode and the partition are joined together And a bonding step of bonding the substrate and the back substrate.

<Description of the first embodiment>
3A to 3H are views for explaining an example of a method for manufacturing the information display panel of the present invention shown in FIG. In the example shown in FIGS. 3A to 3H, the same members as those shown in FIG. 2 are denoted by the same reference numerals, and the description thereof is omitted. In this example, the protective film and partition wall forming step shown in FIGS. 3A to 3E, the pixel electrode forming step shown in FIG. 3F, and the bonding step shown in FIGS. Manufacture information display panels.

  The manufacturing method of the information display panel of the present invention will be described with reference to FIGS. 3A to 3H. First, as shown in FIG. 3A, a back substrate 1 provided with a TFT layer other than the protective film 17 is formed. prepare. Next, as shown in FIG. 3B, a photocurable resist 21 for forming the protective film 17 and the partition walls 4 is applied on the back substrate 1 provided with the TFT layer 7. The coating thickness of the resist 21 is a thickness obtained by adding the thickness of the partition wall 4 to the thickness of the protective film 17. Next, as shown in FIG. 3C, a mask 22 is provided in a portion other than the partition formation position of the resist 21, and primary exposure is performed in which the resist 21 is strongly exposed from above through the mask 22. Next, as shown in FIG. 3D, the mask 22 is removed, a mask 23 is provided on the through hole formation position of the resist 21, and the secondary exposure in which the resist 21 is weakly exposed from above through the mask 23. To implement. Next, as shown in FIG. 3E, the protective film 17 having the through holes 16 and the partition walls 4 are integrally formed by developing and removing the uncured resist 21. Although not described here, the entire surface of the protective film can be further exposed to completely cure the protective film 17 as necessary. The protective film and partition formation process is thus completed. Next, as shown in FIG. 3 (f), the pixel electrode 5 is formed by printing the electrode material on the surface of the protective film 17 and in the through hole 16 by using the partition walls 4 as bumps. . This completes the pixel electrode formation step. Next, as shown in FIG. 3G, after the display medium 3W, 3B is filled in the cell formed by the partition 4 of the back substrate 1, the front substrate 2 having the common electrode 6 is prepared, and the partition 4 By finishing the bonding process by bonding the top of the substrate and the common electrode 6 of the front substrate 2 with an adhesive, as shown in FIG. 3 (h), the information display panel to be manufactured according to the present invention Have gained.

  In the manufacturing method of the information display panel of the present invention described above, the resist coating thickness T is the sum of the protective layer thickness t1 and the partition wall thickness t2 (T = t1 + t2) as the exposure condition, and the resist having the thickness T is completely cured. Assuming that the energy required for this is E, it is preferable to give energy of E × (t2 / T) or more in primary exposure and energy of E × (t1 / T) or less in secondary exposure. Here, it is preferable to apply energy of E × (t2 / T) or more in the primary exposure and energy of E × (t1 / T) or less in the secondary exposure because the secondary exposure amount is E × (t1 This is because if the thickness exceeds / T), the protective layer portion is hardened and etching may be difficult. As a result, problems such as the protective layer thickness t1 becoming thicker than the design and the etching shape becoming a mortar shape may occur. Further, since the partition wall portion needs to be completely cured by two exposures, the primary exposure amount is adjusted according to the secondary exposure amount so that the sum of the primary exposure and the secondary exposure exceeds the required exposure amount E. It is preferable.

  Further, the pixel electrode forming method in the pixel electrode forming step is an ink jet method, and the viscosity of the ink used at that time is 0.1 mP · sec to 10 mP · sec, and the pixel electrode in the pixel electrode forming step In forming the pixel electrode, it is preferable to flatten the pixel electrode by utilizing the flow of ink during pixel electrode printing. As a method for forming the pixel electrode, a printing method such as a gravure method, a gravure offset method, a lithographic offset method, or a screen printing method can be used in addition to the inkjet method. Among these, the inkjet method is the best because of the flatness of the pixel electrode and the ease of processing. The viscosity of the ink can be freely selected as long as the through hole is smoothly filled, and is preferably in the range of 0.1 mP · sec to 10 mP · sec. An amount of ink corresponding to the required electrode thickness is contained in the partition wall. Drip at any position. Since it is necessary for the ink to flow in the partition walls, the drying rate may be delayed depending on the solvent and concentration.

<Description of the second embodiment>
4A to 4H are views for explaining another example of the method for manufacturing the information display panel of the present invention shown in FIG. In the example shown in FIGS. 4A to 4H, the same members as those shown in FIG. 2 are denoted by the same reference numerals, and the description thereof is omitted. In this example, the protective film and partition formation step shown in FIGS. 4A to 4E, the pixel electrode formation step shown in FIG. 4F, and the bonding step shown in FIGS. Manufacture information display panels.

  The manufacturing method of the information display panel of the present invention will be described with reference to FIGS. 4A to 4H. First, as shown in FIG. 4A, the back substrate 1 provided with a TFT layer other than the protective film 17 is formed. prepare. Next, as shown in FIG. 4B, a photo resist 24 for forming the protective film 17 and the partition walls 4 is applied on the back substrate 1 provided with the TFT layer 7. The coating thickness of the resist 21 is a thickness obtained by adding the thickness of the partition wall 4 to the thickness of the protective film 17. Next, as shown in FIG. 4C, a partition mask 25 is provided at the partition formation position of the resist 24, and weak exposure is performed from above through the partition mask 25. Next, as shown in FIG. 4D, the partition mask 25 is removed, and a through hole processing mask 26 is provided at a portion other than the through hole formation position of the resist 24 serving as a protective film. The resist 24 is strongly exposed from above through the mask 26. Next, as shown in FIG. 4E, the protective film 17 having the through holes 16 and the partition walls 4 are integrally formed by developing and removing the uncured resist 24. Although not described here, if necessary, the entire protective film can be further heated to completely cure the protective film 17. The protective film and partition formation process is thus completed. Next, as shown in FIG. 4F, the pixel electrode 5 is formed by printing the electrode material on the surface of the protective film 17 and in the through hole 16 by using the partition walls 4 as bumps. . This completes the pixel electrode formation step. Next, as shown in FIG. 4G, after the display medium 3W, 3B is filled in the cell formed by the partition 4 of the back substrate 1, the front substrate 2 having the common electrode 6 is prepared, and the partition 4 By finishing the bonding process by bonding the top of the substrate and the common electrode 6 of the front substrate 2 with an adhesive, as shown in FIG. 4 (h), the information display panel to be manufactured according to the present invention Have gained.

  In the information display panel manufacturing method of the present invention described above, the resist coating thickness T is set to the sum of the protective layer thickness t1 and the partition wall thickness t2 (T = t1 + t2) as the exposure condition, and the resist having the thickness T is sufficiently plasticized. Assuming that the energy required for conversion to E is E, it is preferable to give an energy of E × (t2 / T) or less in the primary exposure and give an energy of E × (t1 / T) or more in the secondary exposure. Here, it is preferable to give energy of E × (t2 / T) or less in the primary exposure and to give energy of E × (t1 / T) or more in the secondary exposure because the primary exposure amount is E × (t2 / T). If T) is exceeded, plasticization proceeds to the protective layer portion, and the protective layer thickness t1 may become too thin. In addition, since the through-hole portion needs to be sufficiently plasticized by two exposures, the secondary exposure amount is matched to the primary exposure amount so that the sum of the primary exposure and the secondary exposure exceeds the required exposure amount E. Is preferably adjusted.

  Further, the pixel electrode forming method in the pixel electrode forming step is an ink jet method, and the viscosity of the ink used at that time is 0.1 mP · sec to 10 mP · sec, and the pixel electrode in the pixel electrode forming step In forming the pixel electrode, it is preferable to flatten the pixel electrode by utilizing the flow of ink during pixel electrode printing. As a method for forming the pixel electrode, a printing method such as a gravure method, a gravure offset method, a lithographic offset method, or a screen printing method can be used in addition to the inkjet method. Among these, the inkjet method is the best because of the flatness of the pixel electrode and the ease of processing. The viscosity of the ink can be freely selected as long as the through hole is smoothly filled, and is preferably in the range of 0.1 mP · sec to 10 mP · sec. An amount of ink corresponding to the required electrode thickness is contained in the partition wall. Drip at any position. Since it is necessary for the ink to flow in the partition walls, the drying rate may be delayed depending on the solvent and concentration.

  According to the method for manufacturing the information display panel according to the first and second embodiments of the present invention described above, the partition walls are formed on the front substrate by continuously forming the partition walls and the protective film with the same material. The barrier ribs can be used as banks (banks) when the pixel electrodes are printed and formed. Therefore, the number of necessary steps can be reduced, and manufacturing at a lower cost and higher throughput becomes possible. In addition, since the pixel electrode is formed in accordance with the position of the partition wall, the positional displacement between the pixel electrode and the partition wall does not occur essentially, and precise alignment becomes unnecessary. As a result, the contrast of the obtained information display panel can be improved and the throughput in manufacturing can be improved. Specifically, in the information display panel manufactured by the manufacturing method of the present invention described above, the pixel electrode and the partition wall are integrally formed, so that the pixel electrode 5 and the partition wall 4 are formed as shown in FIG. The alignment is good.

<Example 1>
As the substrate, a TFT substrate in which a bottom gate / top contact type thin film transistor (TFT) in which a gate electrode, a gate insulating film, a channel layer, and a sole / drain electrode were sequentially laminated on a glass substrate was used. Indium tin oxide (ITO) was used for the gate electrode, fluororesin was used for the gate insulating film, pentacene was used for the channel layer, and gold was used for the source / drain electrodes. Is not relevant and can be chosen freely.

  A dry film resist was laminated on the TFT substrate. The dry film resist used was a photo-curable dry film resist (trade name: Raytec) manufactured by Hitachi Chemical Co., Ltd., having a thickness of 50 μm. Next, a partition mask was set and primary exposure was performed, and energy of 450 mJ was irradiated. Next, energy of 50 mJ was irradiated using a through-hole processing mask. Next, after developing with an aqueous sodium carbonate solution and washing with pure water, the entire surface was exposed at 1000 mJ and completely cured. The height of the partition wall formed was 45 μm, and the thickness of the protective layer was 5 μm.

  The pixel electrode was formed by an inkjet method. The ink used was an ink containing silver particles with a filler diameter of several tens of nanometers. The viscosity of the ink was adjusted to 0.1 mP · sec. A droplet of about 10 pl was continuously dropped by an inkjet apparatus having a piezo-type nozzle to fill the through hole with ink and form a pixel electrode. Thereafter, the front substrate was bonded to obtain an information display panel according to the present invention. In the obtained information display panel, since the pixel electrode and the partition were integrated, no displacement between the pixel electrode and the partition occurred.

<Example 2>
A TFT substrate was prepared in the same manner as in Example 1. In this example, a photo-plastic dry film resist was laminated on the prepared TFT substrate. Thereafter, the resist was subjected to primary exposure while masking only the partition wall portion. Next, a portion other than the through hole formation portion on the protective film was masked, and only the through hole portion was irradiated with light, and a through hole was formed by development and washing. Next, pixel electrodes were formed by inkjet printing under the same conditions as in Example 1. Finally, as in Example 1, the front substrate was bonded to obtain an information display panel according to the present invention. In the obtained information display panel, since the pixel electrode and the partition were integrated, no displacement between the pixel electrode and the partition occurred.

  The method for manufacturing an information display panel according to the present invention is an information display panel that is actively driven using a thin film transistor (TFT). Cost reduction can be performed, and it can be suitably used for various applications that require improvement in contrast and throughput.

DESCRIPTION OF SYMBOLS 1, 2 Substrate 3W White display medium 3Wa Negatively charged white particle 3B Black display medium 3Ba Positively charged black particle 4 Partition 5, 6 Electrode 7 TFT layer 11 Gate electrode 12 Gate insulating film 13 Drain electrode 14 Source electrode 15 Channel layer 16 Through hole 17 Protective layer 21 Photo-curing resist 22, 23 Mask 24 Photo-plastic resist 25, 26 Mask

Claims (7)

A cell separated from each other by a partition wall is formed between a transparent front substrate on the viewing side and a rear substrate on which a thin film transistor (TFT) is formed for each pixel on the back side, and at least one kind of particle group is formed in the cell. The display medium is encapsulated and an electric field corresponding to the voltage applied between the common electrode provided on the front substrate and the pixel electrode provided corresponding to the TFT on the rear substrate is applied to the display medium. A method of manufacturing an information display panel that displays information by moving it,
A protective film in which a protective film having a through hole and a partition wall are integrally formed on the rear substrate by applying a resist as a TFT protective film to the rear substrate on which the TFT is formed, and continuously processing the applied resist. A film and partition formation step;
A pixel electrode forming step of forming a pixel electrode by printing a conductive material on the protective film between the partition walls and in the through hole;
After filling the display medium in the cell, a bonding step of bonding the front substrate and the back substrate by bonding the front substrate provided with the common electrode and the partition,
A method for producing an information display panel comprising the steps of:   In the protective film and partition formation step, a photo-curing resist is used as a resist, and a primary exposure that exposes only a portion where the partition is formed and a secondary exposure that exposes only a portion where the through hole is formed in the protective film are applied to the applied resist. 2. The information according to claim 1, wherein after the exposure, development is performed to remove the uncured resist, thereby forming a protective film having a through hole and a partition integrally on the back substrate. Manufacturing method of display panel.   As the exposure conditions, assuming that the resist coating thickness T is the sum of the protective layer thickness t1 and the partition wall thickness t2 (T = t1 + t2), and the energy required to completely cure the resist having the thickness T is E, the primary exposure is performed. 3. The method for manufacturing an information display panel according to claim 2, wherein energy of not less than E × (t 2 / T) is applied and energy of not more than E × (t 1 / T) is applied in the secondary exposure.   In the protective film and partition formation step, a photoresist is used as a resist, and the applied resist is subjected to primary exposure by masking only the partition wall, and then only the through hole portion is subjected to secondary exposure using the mask. 2. The method for manufacturing an information display panel according to claim 1, wherein the protective film having through holes and the partition walls are integrally formed on the rear substrate after development.   As the exposure condition, assuming that the resist coating thickness T is the sum of the protective layer thickness t1 and the partition wall thickness t2 (T = t1 + t2), and the energy required to sufficiently plasticize the resist having the thickness T is E, 5. The method for manufacturing an information display panel according to claim 4, wherein energy of E * (t2 / T) or less is given by exposure and energy of E * (t1 / T) or more is given by secondary exposure.   The pixel electrode forming method in the pixel electrode forming step is an inkjet method, and the viscosity of the ink used at that time is 0.1 mP · sec to 10 mP · sec. 2. A method for producing an information display panel according to item 1.   The method for manufacturing an information display panel according to claim 6, wherein in forming the pixel electrode in the pixel electrode forming step, the pixel electrode is flattened by using a flow of ink at the time of printing the pixel electrode. .

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