JP2011180069A - Device for observation of physical phenomenon - Google Patents

Device for observation of physical phenomenon Download PDF

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JP2011180069A
JP2011180069A JP2010046522A JP2010046522A JP2011180069A JP 2011180069 A JP2011180069 A JP 2011180069A JP 2010046522 A JP2010046522 A JP 2010046522A JP 2010046522 A JP2010046522 A JP 2010046522A JP 2011180069 A JP2011180069 A JP 2011180069A
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observation
substrate
light
physical phenomenon
silicon
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Yoshito Takehana
良人 竹花
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SED KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a device capable of observing a physical phenomenon caused by elementary particles or cosmic rays, more inexpensively with a smaller scale. <P>SOLUTION: An observation part of this observation device is provided with irregularities formed by processing a silicon substrate, and a tilt angle between a grooved part 33 and a ridged part 34 is set at 50°-60°, and the thickness of the ridged part 34 is set at 3-50 μm. By the observation device, Cherenkov light by elementary particles such neutrino entering the observation part can be observed on a slope 36 between the grooved part 33 and the ridged part 34, and a physical phenomenon caused by elementary particles or cosmic rays can be observed inexpensively without using a large-scale device. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、量子学的な物理現象を観測するための装置に関する。   The present invention relates to an apparatus for observing quantum physical phenomena.

地表には、ニュートリノといった素粒子・宇宙線が降り注いでおり、このような素粒子・宇宙線を、例えば、カミオカンデのような大掛かりな装置によって観測することが試みられている。   Elementary particles and cosmic rays such as neutrinos are falling on the surface of the earth, and attempts have been made to observe such elementary particles and cosmic rays with a large-scale device such as Kamiokande.

特開２００５−０２４２９１号公報JP-A-2005-024291

しかしながら、従来の観測装置は、規模が極めて大きく、開発および管理に多大な費用と労力が必要であり、手軽に観測できるものではない。   However, the conventional observation apparatus is extremely large in scale, requires a large amount of money and labor for development and management, and cannot be easily observed.

本発明は、より小規模かつ低コストで、素粒子や宇宙線が引き起こす物理現象を観測できる装置を提供することを目的とする。   An object of the present invention is to provide an apparatus that can observe a physical phenomenon caused by elementary particles or cosmic rays at a smaller scale and at a lower cost.

上記課題を解決するため、本発明に係る観測装置は、観測部に、少なくとも傾斜面を加工形成したシリコン基板を有する、という構成を特徴とする。   In order to solve the above-described problems, an observation apparatus according to the present invention is characterized in that the observation unit includes a silicon substrate formed by processing at least an inclined surface.

本発明に係る観測装置によれば、より小規模かつ低コストで、素粒子や宇宙線が引き起こす物理現象を観測することができる。   According to the observation apparatus according to the present invention, it is possible to observe a physical phenomenon caused by elementary particles and cosmic rays at a smaller scale and at a lower cost.

本発明の一実施形態に係る観測装置の斜視図である。It is a perspective view of an observation device concerning one embodiment of the present invention. 本発明の一実施形態に係る観測装置の側面図である。It is a side view of the observation apparatus concerning one embodiment of the present invention. 本発明の一実施形態に係る観測装置の背面板である。It is a backplate of the observation apparatus which concerns on one Embodiment of this invention. 観測装置に用いる観測基板である。It is an observation board used for an observation device. 観測装置に用いる観測基板の正面図および断面図である。It is the front view and sectional drawing of an observation board used for an observation device. 観測基板で観測される着色光の様子を示す図である。It is a figure which shows the mode of the colored light observed with an observation board | substrate. 本発明の一実施形態に係る観測装置の原理を示す図である。It is a figure which shows the principle of the observation apparatus which concerns on one Embodiment of this invention.

以下、本発明の実施形態について図面を用いて説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明に係る観測装置１００の斜視図である。また、図２は、本発明に係る観測装置１００の側面図である。これらの図に示すように、観測装置１００は、円筒部１０と、背面板２０と、観測基板３０と、を備えている。   FIG. 1 is a perspective view of an observation apparatus 100 according to the present invention. FIG. 2 is a side view of the observation apparatus 100 according to the present invention. As shown in these drawings, the observation apparatus 100 includes a cylindrical portion 10, a back plate 20, and an observation substrate 30.

円筒部１０は、中空の筒状に形成されている。円筒部の一端１１は開口しており、他端１２は背面板２０で塞がれている。なお、円筒部１０全体の大きさに限定はないが、後述するように、開口方向から観測基板３０が観察されるため、開口の直径は３０ｍｍ〜４０ｍｍに形成されている事が好ましい。開口は、観察時に円筒部１０内への光の侵入及び円筒部１０内から外への光の漏れを防ぐため、人の眼の周辺骨格の形状に合わせて、波型としてもよい。   The cylindrical portion 10 is formed in a hollow cylindrical shape. One end 11 of the cylindrical portion is open, and the other end 12 is closed with a back plate 20. In addition, although there is no limitation in the magnitude | size of the cylindrical part 10 whole, since the observation board | substrate 30 is observed from an opening direction so that it may mention later, it is preferable that the diameter of an opening is formed in 30 mm-40 mm. The opening may have a corrugated shape in accordance with the shape of the peripheral skeleton of the human eye in order to prevent light from entering the cylindrical portion 10 and leakage of light from the cylindrical portion 10 to the outside during observation.

背面板２０は、平坦な板状部材である。背面板２０のほぼ中央に、円筒部１０が設置されている。光の漏れがないように、円筒部１０と背面部２０との間は、隙間が空かないように接着されている。背面板２０のおよそ中央部で、円筒部１０の内側に相当する部分には、観測窓２１が設けられている。観測窓２１は、背面板２０を貫通する矩形の穴である。後述するように、観測窓２１には、観測窓２１を塞ぐように、観測基板３０が配置される。観測基板３０は、背面板２０の内側の面（円筒部１０の設置側の面）に設置されている。観測窓２１の大きさは、観測基板３０よりも小さな寸法に形成されればよい。例えば、１０ｍｍ〜２０ｍｍ四方の大きさに形成される事が好ましい。なお、背面板２０全体の大きさに限定はない。   The back plate 20 is a flat plate member. The cylindrical portion 10 is installed in the approximate center of the back plate 20. The cylindrical portion 10 and the back surface portion 20 are bonded so as not to leave a gap so that no light leaks. An observation window 21 is provided in a portion corresponding to the inner side of the cylindrical portion 10 in the central portion of the back plate 20. The observation window 21 is a rectangular hole that penetrates the back plate 20. As will be described later, an observation substrate 30 is disposed in the observation window 21 so as to close the observation window 21. The observation substrate 30 is installed on the inner surface of the back plate 20 (the surface on the installation side of the cylindrical portion 10). The observation window 21 may be formed to have a size smaller than that of the observation substrate 30. For example, it is preferably formed in a size of 10 mm to 20 mm square. The size of the entire back plate 20 is not limited.

図３は、背面板２０と、背面板２０の表面に配置された観測基板３０と、を示した図である。観測基板３０は、観測窓２１を覆うように背面板２０の表面に配置されている。観測基板３０の大きさは、観測窓２１よりも大きな寸法に形成されればよい。例えば、１５ｍｍ〜２５ｍｍ四方の大きさに形成される事が好ましい。観測基板３０の詳細は後述する。   FIG. 3 is a diagram showing the back plate 20 and the observation substrate 30 arranged on the surface of the back plate 20. The observation board 30 is disposed on the surface of the back plate 20 so as to cover the observation window 21. The observation substrate 30 may be formed to have a size larger than that of the observation window 21. For example, it is preferably formed in a size of 15 mm to 25 mm square. Details of the observation substrate 30 will be described later.

上述したように、円筒部１０は、観測窓２１上に配置された観測基板３０の周囲を囲むように背面板２０の表面に取り付けられる。円筒部１０を背面板２０に取り付ける角度（なす角）は適宜設定されればよい。また、円筒部１０および背面板２０を形成する素材に限定はない。例えば、円筒部１０および背面板２０は、紙、プラスチック、金属のいずれから形成されたものであってもよい。ただし、円筒部１０内へ可視光が入り込むのを防ぐために、円筒部１０および背面板２０は、可視光を遮光可能な材料で形成すると良い。また、遮光性のある黒色などで着色加工されていることが望ましい。   As described above, the cylindrical portion 10 is attached to the surface of the back plate 20 so as to surround the periphery of the observation substrate 30 disposed on the observation window 21. The angle (angle formed) for attaching the cylindrical portion 10 to the back plate 20 may be set as appropriate. Moreover, there is no limitation on the material forming the cylindrical portion 10 and the back plate 20. For example, the cylindrical portion 10 and the back plate 20 may be formed from any of paper, plastic, and metal. However, in order to prevent visible light from entering the cylindrical portion 10, the cylindrical portion 10 and the back plate 20 are preferably formed of a material capable of blocking visible light. Further, it is desirable that the material is colored with a light-shielding black or the like.

次に、図４を用いて、観測基板３０の詳細について説明する。   Next, details of the observation substrate 30 will be described with reference to FIG.

同図に示すように、観測基板３０は、四辺形に成形された単結晶のシリコン基板３１から構成される。このようなシリコン基板３１は、例えば、半導体装置に利用される単結晶シリコンウェハーを切断したものであってもよい。観測基板３０は、ｍ×ｎのマトリクス状（格子状）に配列された凹部と、凹部同士の間を隔てる凸部と、を有する。   As shown in the figure, the observation substrate 30 is composed of a single crystal silicon substrate 31 formed into a quadrilateral. Such a silicon substrate 31 may be obtained by cutting a single crystal silicon wafer used for a semiconductor device, for example. The observation substrate 30 has concave portions arranged in an m × n matrix (lattice shape) and convex portions that separate the concave portions.

図５（ａ）は、観測基板３０の一部を拡大した正面図である。図５（ｂ）は、観測基板３０の断面（Ｘ−Ｘ方向断面図）を示した図である。観測基板３０の格子の１区画３２は、４×４ｍｍの正方形状であり、その中央が窪んで凹部３３を形成し、凹部は、２×２ｍｍの正方形状の平面で成形されている。凸部３４は、凹部３３の４辺に沿って土手状に存在する。   FIG. 5A is an enlarged front view of a part of the observation substrate 30. FIG. 5B is a view showing a cross section (XX cross-sectional view) of the observation substrate 30. One section 32 of the lattice of the observation substrate 30 has a square shape of 4 × 4 mm, the center thereof is recessed to form a concave portion 33, and the concave portion is formed by a square plane of 2 × 2 mm. The convex portion 34 exists in a bank shape along the four sides of the concave portion 33.

凹部３３は、セレクチィブエッチングにより形成され、その厚さ（凹部３３の平面部における観測基板３０の厚さｔ１）は、３〜１０数μｍに設定されている。なお、観測基板３０のシリコン酸化膜は、光の干渉現象を生じないように、エッチングによって除去されている。   The concave portion 33 is formed by selective etching, and its thickness (thickness t1 of the observation substrate 30 in the flat portion of the concave portion 33) is set to 3 to 10 and several μm. Note that the silicon oxide film on the observation substrate 30 is removed by etching so as not to cause a light interference phenomenon.

また、凸部３４の頂上面３５には、凹部３３に向かって下る所定角（例えば、傾斜角５０°〜６０°）の傾斜面３６が形成されている。例えば、凹部３３の厚さｔ１が３μｍであるとき、傾斜面３６の傾斜角３７は５４°に設定される。   Further, an inclined surface 36 having a predetermined angle (for example, an inclination angle of 50 ° to 60 °) descending toward the recess 33 is formed on the top surface 35 of the convex portion 34. For example, when the thickness t1 of the recess 33 is 3 μm, the inclination angle 37 of the inclined surface 36 is set to 54 °.

以上、本発明の一実施形態が適用された観測装置１００の構成について説明した。   The configuration of the observation apparatus 100 to which the embodiment of the present invention is applied has been described above.

上記観測装置１００の円筒部１０の開口方向から、周囲の光が侵入しないように、観測基板３０を覗くと、図６に示すように、凹部３３および凸部３４の間の傾斜面３６に緑色または紫色の着色光３８を確認することができる。通常の視力であれば、肉眼で観察可能である。   When the observation substrate 30 is viewed from the opening direction of the cylindrical portion 10 of the observation apparatus 100 so that ambient light does not enter, the inclined surface 36 between the concave portion 33 and the convex portion 34 is green as shown in FIG. Or purple colored light 38 can be confirmed. With normal vision, it can be observed with the naked eye.

また、太陽ニュートリノといった素粒子・宇宙線の影響を観測する目的の場合は、当該素粒子・宇宙線が降り注ぐ方向（太陽の方向）に、観測基板３０を向けて、円筒部１０から観測基板３０を覗き込むことで、凹部３３および凸部３４の間の傾斜面３６に、緑色や紫色の着色光３８を観察することができる。   For the purpose of observing the effects of elementary particles / cosmic rays such as solar neutrinos, the observation substrate 30 is directed from the cylindrical portion 10 to the observation substrate 30 in the direction in which the elementary particles / cosmic rays fall (the direction of the sun). , The green or purple colored light 38 can be observed on the inclined surface 36 between the concave portion 33 and the convex portion 34.

このように、本実施形態における観察装置１００によれば、低コストかつ簡易な方法で素粒子や宇宙線が引き起こす物理現象を観測することができる。   As described above, according to the observation apparatus 100 in the present embodiment, it is possible to observe a physical phenomenon caused by elementary particles or cosmic rays by a low-cost and simple method.

ここで、本実施形態の観測装置１００の原理について説明する。   Here, the principle of the observation apparatus 100 of this embodiment is demonstrated.

現在、素粒子・宇宙線を観測する装置としてカミオカンデが知られている。カミオカンデは、電子ニュートリノ、μニュートリノ、τニュートリノといった素粒子が光速で水分子と衝突した際に発生する微小な光を検出する装置である。ニュートリノが水分子に光速で衝突すると、水分子中の電子や陽子を光速ではじき飛ばす。このとき、円錐状に広がるチェレンコフ光と呼ばれる光が発生する。カミオカンデは、このようなチェレンコフ光を検出している。   Currently, Kamiokande is known as a device for observing elementary particles and cosmic rays. Kamiokande is a device that detects minute light generated when elementary particles such as electron neutrinos, μ neutrinos, and τ neutrinos collide with water molecules at the speed of light. When a neutrino collides with a water molecule at the speed of light, electrons and protons in the water molecule are repelled at the speed of light. At this time, light called Cherenkov light spreading in a conical shape is generated. Kamiokande detects such Cherenkov light.

本発明の観測装置でも、荷電粒子がシリコン原子の作る電界中を走るときに分極を生じ、これが解除されるときに発生するチェレンコフ光を観測しているものと推測される。   In the observation apparatus of the present invention, it is presumed that polarization occurs when charged particles run in an electric field formed by silicon atoms, and Cherenkov light generated when this is released is observed.

荷電粒子が透明な媒質中高速度Ｃを超える条件は、一般に媒質の屈折率をｎとして、荷電粒子速度をｖとすると、ｖ＞Ｃ／ｎを満たす。ここで、Ｃは真空中の光速度である。シリコンの屈折率（ｎ＝３．４４８）であり、可視光はシリコン中でかなり吸収されるが、１０数μｍの厚さでは、比較的透過していることが知られる。なお、この条件での光速度は、媒質中でＣ／３．４４８となり、真空中の光速度の約２９％である。   The condition that the charged particles exceed the high velocity C in the transparent medium generally satisfies v> C / n where n is the refractive index of the medium and v is the charged particle velocity. Here, C is the speed of light in vacuum. It is known that the refractive index of silicon (n = 3.448) and visible light is considerably absorbed in silicon, but is relatively transparent at a thickness of a few tens of micrometers. The light speed under these conditions is C / 3.448 in the medium, which is about 29% of the light speed in vacuum.

太陽からの宇宙線を考えると容易にこの条件を満たしているので、チェレンコフ光の発光が推測されると考えられる。観測装置に使用するシリコン結晶基板は、例えば、＜１００＞面に４×４ｍｍの大きさで中央部に２×２ｍｍの正方形の部分をセレクティブエッチングにより３〜５０μｍまでの厚さ（基板の厚さｔ１）にしている。この試料に電子ニュートリノ、μニュートリノ、τニュートリノを多量に含む太陽光を当てたならば、媒質中に放射角θ（ｃｏｓθ＝１／ｎβ）の光が発光する（βは、物質中で発光したチェレンコフ光の速度／荷電粒子の速度で表される。また、媒体中で発光したチェレンコフ光の速度は、Ｃ／ｎで表される。）   Considering the cosmic rays from the sun, this condition is easily satisfied, so it is thought that the emission of Cherenkov light. The silicon crystal substrate used in the observation apparatus is, for example, 4 × 4 mm in size on the <100> plane and 2 × 2 mm in the center to a thickness of 3 to 50 μm by selective etching (substrate thickness) t1). If sunlight containing a large amount of electron neutrinos, μ neutrinos, and τ neutrinos is applied to this sample, light with a radiation angle θ (cos θ = 1 / nβ) is emitted in the medium (β emitted in the substance) (The speed of Cherenkov light / the speed of charged particles, and the speed of Cherenkov light emitted in the medium is represented by C / n.)

これは、θが約７３度の波面の方向で円錐状に進むチェレンコフ光であり、シリコン中をある程度透過して進み、透過光は（多少吸収されるものの）、空気中に現れる。この光は加工されたシリコン壁においてスネルの法則に従って反射し上方向に進み、可視光として観測することができる。   This is Cherenkov light that progresses in a conical shape in the direction of a wavefront having a θ of about 73 degrees, travels through silicon to some extent, and the transmitted light (although somewhat absorbed) appears in the air. This light is reflected on the processed silicon wall according to Snell's law, travels upward, and can be observed as visible light.

図７を用いて説明する。なお、前述と同一の箇所には同一の符号を附して説明を省略する。同図に示すように、観測窓２１を通じて観測基板３０に達したニュートリノ５０は観測基板３０を透過する。ここで、ニュートリノ５０は、シリコン基板３１内で屈折（屈折率ｎ＝３．４４８）し、放射角ｔ２＝１７°（cosθ＝７３°）の波面で円錐状に進んでいく。このとき、ニュートリノ５０の衝突による可視光５１（チェレンコフ光）はシリコン基板３１内でかなり吸収されるが、１０数μｍの厚みに形成されているシリコン基板３１に対しては、比較的透過する。   This will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the location same as the above-mentioned, and description is abbreviate | omitted. As shown in the figure, the neutrino 50 that reaches the observation substrate 30 through the observation window 21 passes through the observation substrate 30. Here, the neutrino 50 is refracted in the silicon substrate 31 (refractive index n = 3.448), and proceeds in a conical shape with a wavefront having a radiation angle t2 = 17 ° (cos θ = 73 °). At this time, visible light 51 (Chelenkov light) due to the collision of the neutrino 50 is considerably absorbed in the silicon substrate 31, but is relatively transmitted to the silicon substrate 31 formed to a thickness of several tens of μm.

このように、シリコン基板３１内で吸収されず、透過して進んだチェレンコフ光５１は、やがて空気中に現れる。この光は、凹部３３と凸部３４との間に形成された傾斜面３６においてスネルの法則に従って反射する。その結果、傾斜面３６で反射したチェレンコフ光５１が可視光５２として視認できているものと考えられる。また、可視光５２が緑色や紫色である理由としては、人間の目の視感度が高い色が緑色や青色であるためと考えられる。   In this way, the Cherenkov light 51 that has not been absorbed in the silicon substrate 31 and has been transmitted therethrough eventually appears in the air. This light is reflected according to Snell's law on the inclined surface 36 formed between the concave portion 33 and the convex portion 34. As a result, it is considered that the Cherenkov light 51 reflected by the inclined surface 36 is visible as visible light 52. Further, the reason why the visible light 52 is green or purple is considered to be because the color having high visibility of human eyes is green or blue.

以上、本発明が適用された観測装置１００の構成とその原理について説明した。   The configuration and principle of the observation apparatus 100 to which the present invention is applied have been described above.

なお、上記実施形態では、観測基板の材料として単結晶シリコンを用いたが、アモルファスシリコンなど、単結晶でなくても加工形状によっては、同様の効果が得られると考えられる。また、シリコンでなくても、屈折率の高い材料であれば良く、ゲルマニウムなどを用いることもできる。   In the above embodiment, single crystal silicon is used as the material of the observation substrate. However, it is considered that the same effect can be obtained depending on the processing shape even if it is not a single crystal such as amorphous silicon. Further, even if it is not silicon, any material having a high refractive index may be used, and germanium or the like can also be used.

図７において、上記シリコン基板３１をゲルマニウム基板に置き換えた場合、ニュートリノ５０は、ゲルマニウム基板内で屈折（屈折率ｎ＝４．０９２）し、放射角ｔ２＝１４．５°（ｃｏｓθ＝７５．５°）の波面で円錐状に進んでいく。このとき、ニュートリノ５０の衝突による可視光５１（チェレンコフ光）はゲルマニウム基板内でかなり吸収されるが、１０数μｍの厚みに形成されているゲルマニウム基板に対しては、比較的透過する。   In FIG. 7, when the silicon substrate 31 is replaced with a germanium substrate, the neutrino 50 is refracted (refractive index n = 4.092) in the germanium substrate, and the radiation angle t2 = 14.5 ° (cos θ = 75.5). It progresses in a conical shape with a wave front of °). At this time, visible light 51 (Chelenkov light) due to the collision of the neutrino 50 is considerably absorbed in the germanium substrate, but is relatively transmitted to the germanium substrate having a thickness of a few tens of μm.

このように、シリコン基板３１をゲルマニウム基板で代用しても、スネルの法則に従って傾斜面３６において反射するチェレンコフ光５１が可視光として視認できるものと考えられる。   Thus, even if the silicon substrate 31 is replaced with a germanium substrate, the Cherenkov light 51 reflected on the inclined surface 36 according to Snell's law can be visually recognized as visible light.

［実施例］
次に、本発明をより詳細に説明するため、実施例について説明する。ただし、本発明は、かかる実施例に限定されるものではない。 [Example]
Next, examples will be described to describe the present invention in more detail. However, the present invention is not limited to such examples.

実施例では、上記の実施形態で説明した観測装置を作成した。観測基板には、シリコン単結晶ウエハ基板を用い、シリコン結晶の＜１００＞面に４×４ｍｍ四方の凸部と、凸部に隔てられる２×２ｍｍ四方の凹部と、を形成した。凹部の厚みは３μｍに設定した。また、凹部と凸部との間に形成される傾斜面の傾斜角を５４°に設定した。そして、このような観測基板を背面板の観測窓上に配置し、円筒部の一方の開口から観測基板を観察した。その結果、上記で考察したように、観測基板の傾斜面に緑色または紫色の着色光を確認することができた。したがって、この実験は推測通りの結果を導き出した。   In the example, the observation apparatus described in the above embodiment was created. A silicon single crystal wafer substrate was used as the observation substrate, and a 4 × 4 mm square convex portion and a 2 × 2 mm square concave portion separated by the convex portion were formed on the <100> plane of the silicon crystal. The thickness of the recess was set to 3 μm. Further, the inclination angle of the inclined surface formed between the concave portion and the convex portion was set to 54 °. And such an observation board | substrate was arrange | positioned on the observation window of a backplate, and the observation board | substrate was observed from one opening of a cylindrical part. As a result, as discussed above, green or purple colored light could be confirmed on the inclined surface of the observation substrate. Therefore, this experiment led to the expected results.

１００・・・観測装置、１０・・・円筒部、２０・・・背面板
３０・・・観測基板 DESCRIPTION OF SYMBOLS 100 ... Observation apparatus, 10 ... Cylindrical part, 20 ... Back plate 30 ... Observation board

Claims (3)

観測部に、少なくとも傾斜面を加工形成したシリコン基板を有する
ことを特徴とする物理現象観測装置。 An apparatus for observing a physical phenomenon, wherein the observation unit includes a silicon substrate on which at least an inclined surface is processed and formed. 請求項１に記載の物理現象観測装置において、
前記傾斜面は、前記シリコン基板の凹部および凸部の間に傾斜角５０°〜６０°で形成される
ことを特徴とする物理現象観測装置。 The physical phenomenon observation apparatus according to claim 1,
2. The physical phenomenon observation apparatus according to claim 1, wherein the inclined surface is formed at an inclination angle of 50 ° to 60 ° between the concave portion and the convex portion of the silicon substrate. 請求項２に記載の物理現象観測装置において、
前記シリコン基板の凹部の厚みは、３〜５０μｍに設定される
ことを特徴とする物理現象観測装置。 The physical phenomenon observation apparatus according to claim 2,
An apparatus for observing a physical phenomenon, wherein the thickness of the concave portion of the silicon substrate is set to 3 to 50 μm.
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CN111458741A (en) * 2020-03-19 2020-07-28 哈尔滨工程大学 Method for measuring motion direction of cosmic ray muons

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JP2001354498A (en) * 2000-06-09 2001-12-25 Furukawa Co Ltd Lead tungstate single crystal for cherenkov material
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WO2014050024A1 (en) * 2012-09-25 2014-04-03 Ｎｅｃ東芝スペースシステム株式会社 Composite cosmic-ray-observation system
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