JP2011174609A - Hollow rotary motion introducer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a hollow rotary motion introducer which allows high-precision rotational control by reducing the eccentricity and surface shaking of the rotary motion introducer. <P>SOLUTION: After fixing a bearing 83 to a housing 80, the housing 80 with the bearing 83 is mounted on a rotative flange 82 to thereby enable the bearing 83 to be robustly fixed and regulated, so that the eccentricity and surface shake in the rotary motion can be reduced. Besides, an angle positioning encoder ring 90 is set in and an angle reader 91 is employed to enable high-precision rotational control. Further, for the sake of reducing a moment load from drive units 88, 89 onto the bearing 83, a fluoro-rubber O ring 86 is employed which has features of abrasion resistance, a low frictional property, and non-adhesiveness to metal. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a hollow rotary introducer, and more particularly to a hollow rotary introducer that can be used in a vacuum apparatus such as a semiconductor manufacturing apparatus that requires high-precision rotation control in a vacuum.

  In order to insert a sample, a probe, and the like into the vacuum chamber and introduce the rotational force generated outside the vacuum chamber into the vacuum chamber, a hollow type rotary introduction machine is used. A hollow type rotary introduction machine according to the prior art includes a rotating flange that enables rotation of a sample, a probe, and the like, and an attachment flange that attaches and fixes the rotating flange to a vacuum apparatus. A plurality of vacuum sealing materials are incorporated in the mounting flange, and the space in which the vacuum sealing material is incorporated between the mounting flange and the rotary flange is evacuated to keep the vacuum chamber airtight.

  FIG. 1 is a longitudinal sectional view showing an example of a hollow rotary introduction machine according to the prior art. A vacuum-compatible hollow rotary introduction machine according to the prior art is a “vacuum seal portion” that keeps the airtightness of the vacuum chamber by evacuating the space in which two plastic vacuum seal materials 6 are incorporated from the exhaust port 7, and pushing the internal bearing Using the flange 4 and the external bearing pressing flange 5, a “bearing portion” that holds the hollow rotating flange 2 rotatably on the mounting flange 1 by the bearing 3 and a rotating gear 8 attached to the rotating flange 2 are mounted. It is comprised by the "drive part" rotated by the drive gear 9 fixed to the flange 1. FIG.

  As described in Patent Document 1 and Patent Document 2, the conventional hollow rotary introducer has an integrated structure in which the mounting flange 1 and the rotating flange 2 have both a vacuum seal function and a bearing housing function. .

  Further, as described in Patent Document 3, a rubber packing seal method and a magnetic fluid seal method are mainly used as the vacuum seal method of the hollow type rotary introduction machine. As the rubber packing seal material, a polytetrafluoroethylene seal U-shaped ring, a fluorine rubber O-ring or the like is used.

Japanese Patent Laying-Open No. 2005-291275 (FIGS. 1, 5, and 6) Japanese Patent Laying-Open No. 2006-234094 (FIGS. 1, 5, and 6) JP-A-63-047569 (Table 1) Japanese Patent No. 4030637

  However, the hollow rotary introducer as described above has an integral structure in which the mounting flange 1 and the rotary flange 2 have both a vacuum sealing function and a bearing housing function as shown in FIG. Are difficult to fix and adjust. In such a structure, strength nonuniformity due to insufficient fixing strength and adjustment of the bearing 3 occurs, and the moment load generated in the drive unit 8 during rotation cannot be sufficiently received by the bearing 3. Therefore, fluctuations in the moment load generated in the drive unit 8 cause surface runout of the rotary flange 2 in the rotation axis direction and eccentricity in the radial direction, which is a factor that significantly deteriorates the performance of the bearing unit. . In addition, an exogenous light load on the probe attached to the hollow rotary introducer also causes surface runout and eccentricity.

FIG. 2 shows the amount of eccentricity and the amount of surface vibration of the vacuum-compatible hollow rotary introduction machines of three major manufacturers currently on the market. 2A and 2B show the amount of eccentricity and the amount of surface vibration of the vacuum-compatible hollow type rotary introduction machine of Company A. FIG. 2C and 2D show the amount of eccentricity and the amount of surface vibration of the vacuum-compatible hollow type rotary introduction machine of company B. FIG. FIGS. 2E and 2F show the eccentricity and surface vibration amount of the vacuum-compatible hollow rotary introduction machine of company C. FIG. The eccentricity amount is a displacement amount in the radial direction at a position 75 mm from the rotation center, and the surface vibration amount is a displacement amount in the rotation axis direction at a position 75 mm from the rotation center.
The rotational shaft runout due to the surface runout of the hollow rotary introduction machine according to the above prior art is about ± 0.025 ° in terms of angle. When a probe having a length of 1000 mm is attached to a hollow type rotation introducing machine, the tip position of the probe fluctuates by about ± 0.4 mm due to this axial deflection. As described above, the surface runout of the hollow rotary introduction machine according to the prior art is an element that hinders precise position control of the probe.

  In addition, in the conventional rotary introduction machine, the rotation control of the absolute angle with high accuracy is impossible due to the problem of mechanical backlash of the drive unit. This is because, in order to perform highly accurate rotation control, it is necessary to incorporate a highly accurate angle positioning encoder into the hollow rotation introduction machine. However, since the eccentric amount of the rotating part generated in the hollow type rotary introducing machine according to the prior art shown in FIG. 2 exceeds the mounting tolerance of such a high-precision angle positioning encoder, a high-precision angle The positioning encoder cannot be incorporated into the hollow type rotary introduction machine. As described above, the eccentricity of the hollow type rotary introduction machine according to the prior art is an element that hinders high-precision rotation control of the probe.

  In addition, when the hollow type rotary introduction machine is used in an ultra-high vacuum atmosphere, it is disclosed in Patent Document 3 as a vacuum seal material due to problems of restriction of use temperature, restriction of use environment, and contamination of ultra-high vacuum atmosphere. Magnetic fluid cannot be used. Therefore, the rubber packing method disclosed in Patent Document 3 is suitable as a vacuum sealing method for a hollow type rotary introduction machine that can be used in an ultra-high vacuum atmosphere. The rubber packing type vacuum seal material incorporated in the hollow type rotary introduction machine according to the prior art uses a polytetrafluoroethylene seal U-type ring and a fluorine rubber O-ring, for example, a Viton rubber O-ring. Yes.

  The vacuum seal material to reduce the moment load on the bearing, which is the cause of surface runout and eccentricity, has the characteristics of heat resistance, high airtightness, wear resistance, low dynamic friction against metal and low static friction. It is required to have.

  The polytetrafluoroethylene seal U-shaped ring described above has the characteristics of heat resistance, wear resistance, low dynamic friction against metal and low static friction, generates less rotational torque due to friction during rotation, and moment load of the drive unit There are few. However, since this polytetrafluoroethylene seal U-shaped ring is inferior in airtightness as compared with the fluororubber O-ring, gas flows into the vacuum chamber as the diameter of the hollow portion increases. For this reason, this large-diameter hollow rotary introducer using the polytetrafluoroethylene seal U-shaped ring maintains the airtightness of the vacuum chamber by performing multiple seal structures and multiple differential pumping. However, the multiple differential exhaust leads to enlargement of the hollow rotary introducer, and it is necessary to prepare a multiple exhaust device, so that the operation cost is greatly increased.

  On the other hand, the fluororubber O-ring has heat resistance and high airtightness characteristics, and can ensure sufficient airtightness even with single-stage differential exhaust. However, the fluororubber O-ring generally tends to adhere (adhere) to the mating member, has a high friction coefficient, and easily wears. Further, the problem of adhesion and friction of the fluororubber O-ring requires a large rotational torque during rotation, and a large moment load is generated on the bearing. A large moment load on the bearing causes runout in the radial direction and rotational axis direction of the bearing, shortens the life of the bearing, and causes unexpected damage. In addition, wear problems cause serious problems of vacuum leaks into the device.

  The present invention has been made in view of such problems of the prior art, and an object of the present invention is to provide a hollow structure that has a bearing fixing structure that does not deteriorate the bearing performance and that can perform highly accurate angle control. It is to provide a mold rotation introduction machine. It is another object of the present invention to provide a hollow type rotary introduction machine incorporating a vacuum seal material more suitable for use in a vacuum apparatus.

  In order to solve the problems as described above, the invention described in claim 1 includes a bearing, an internal bearing pressing flange and an external bearing pressing flange for fixing the bearing, a hollow rotating flange, and a vacuum seal material. And a hollow type rotary introduction machine provided with a housing member fixed to the mounting flange, wherein the bearing includes the internal bearing pressing flange, the external bearing pressing flange, the rotating flange, and And housing by the housing member.

  The invention described in claim 2 is a bearing, an internal bearing pressing flange and an external bearing pressing flange for fixing the bearing, a hollow rotating flange, a mounting flange incorporating a vacuum seal material, and a fixing to the rotating flange. A hollow rotary introducer including a housing member, wherein the bearing is housed by the internal bearing pressing flange, the external bearing pressing flange, the mounting flange, and the housing member. To do.

  The invention described in claim 3 is fixed to the bearing, an internal bearing pressing flange and an external bearing pressing flange for fixing the bearing, a hollow rotating flange, a mounting flange incorporating a vacuum seal material, and the rotating flange. A hollow rotary introduction machine comprising a first housing member and a second housing member fixed to the mounting flange, wherein the bearing comprises the internal bearing pressing flange, the external bearing pressing flange, It is characterized by being housed by a first housing member and the second housing member.

  A fourth aspect of the present invention is the hollow rotary introduction machine according to any one of the first to third aspects, wherein the bearing is a plurality of combination bearings.

  The invention described in claim 5 is a hollow type rotary introduction machine provided with a bearing provided with a mounting hole, a hollow rotary flange, and a mounting flange incorporating a vacuum sealing material. The processed bearing is directly attached to the rotating flange and the mounting flange.

  According to a sixth aspect of the present invention, there is provided the hollow type rotary introducing machine according to the fifth aspect, wherein the mounting flange or the rotating flange of the bearing ring in which the mounting hole is machined is arranged in the direction of the rotation axis. It is characterized in that a fitting process has been performed on the surface facing the surface.

  A seventh aspect of the present invention is the hollow type rotary introduction machine according to any one of the first to sixth aspects, wherein an angle positioning encoder ring is incorporated in a rotating portion of the hollow type rotary introduction machine, and the mounting flange An angle reading device is attached to.

  The invention described in claim 8 is the hollow type rotary introduction machine according to any one of claims 1 to 7, wherein the vacuum seal material is a fluororubber having wear resistance, low friction and non-adhesiveness. It is an O-ring.

  According to the present invention, it is possible to firmly fix the bearing and adjust the mounting of the bearing, and to read the rotation angle with high accuracy. In addition, (1) even in a hollow type rotary introducer having a large diameter exceeding 100 mm, it becomes possible to achieve sufficient airtightness by single-stage differential exhaust, and (2) rotational torque acting on the rotating flange during driving is reduced. As a result, the moment load generated in the drive unit can be reduced, and the radial and rotary shaft runouts that occur in the bearing can be suppressed. (3) The bearing life is extended as the moment load on the bearing is reduced. It becomes possible.

It is a longitudinal cross-sectional view which shows the structure of the hollow type rotary introduction machine by a prior art. It is a figure which shows the eccentric amount and surface vibration amount of the hollow type rotation introducing machine by a prior art. It is a figure explaining the assembly and adjustment method of the hollow type | mold rotation introduction machine which divided | segmented the attachment flange by 1st embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the hollow type rotation introducer by 1st embodiment of this invention. It is a figure explaining the assembly and adjustment method of the hollow type | mold rotation introduction machine which performed the division | segmentation of the rotation flange by 2nd embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the hollow type rotation introducer by 2nd embodiment of this invention. It is a figure explaining the assembly and adjustment method of the hollow type | mold rotation introduction machine which divided | segmented the attachment flange and rotation flange by 3rd embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the hollow type rotation introducer by 3rd embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the hollow type rotation introducer by 4th embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the hollow type rotation introducer by 5th embodiment of this invention. It is a figure which shows the eccentric amount and surface vibration amount of the hollow type rotation introducing machine by 1st embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the hollow type rotation introducer by 6th embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the hollow type rotation introducer by 7th embodiment of this invention. It is a figure which shows an example of the longitudinal cross-sectional view (a) and front view (b) which show the structure of the bearing which can be used for the hollow type rotary introducer by 8th embodiment and 9th embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the hollow type rotary introducer by 8th embodiment of this invention. Conventional thin type bearings and bearings according to the eighth embodiment and the ninth embodiment of the present invention in the radial direction basic dynamic load rating and basic static load rating, inner ring rotation accuracy, static permissible moment, rotation axis direction static It is a figure which shows an example of an allowable load. Displacement when a load of 1 kN is applied from the radial direction and displacement when a load of 1 kN is applied from the rotation axis direction of the conventional thin bearing and the bearings according to the eighth and ninth embodiments of the present invention FIG. 5 is a diagram showing an example of a displacement angle amount when a 50 Nm moment load is applied. It is a longitudinal cross-sectional view which shows the structure of the hollow type rotation introducer by 9th embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol represents the same thing in several drawing, and the repeated description is abbreviate | omitted.

FIG. 3 is a view for explaining the assembly of the vacuum-compatible hollow rotary introducer in which the mounting flange is divided and the bearing adjustment method according to the first embodiment of the present invention.
First, the outer ring of the bearing 13 is fixed to the housing 10 using the external bearing pressing flange 15 (A). At this time, the mounting adjustment of the bearing is performed so that play of the outer ring of the bearing 13 does not occur. Next, the hollow rotating flange 12 is fixed to the bearing 13 so as to be rotatable using the internal bearing pressing flange 14 (B). At this time, the mounting adjustment of the bearing is performed so that play of the inner ring of the bearing 13 does not occur. Thereafter, the housing 10 is fixed to the mounting flange 11 in which the vacuum sealing material 16 is incorporated (C). Finally, the rotation gear 18 is attached to the rotation flange 12 (D), and the drive gear 19 is attached to the attachment flange 11.

  FIG. 4 shows the structure of the hollow rotary introducer according to the first embodiment of the present invention assembled as described above.

  In the hollow type rotation introducing machine according to the present embodiment, a conventional mounting flange having a vacuum sealing function and a bearing housing function is divided into a housing 10 having a bearing housing function and a mounting flange 11 having a vacuum sealing function. ing. That is, in the hollow type rotation introducing machine according to the present embodiment, the bearing 13 is housed by the inner bearing pressing flange 14, the outer bearing pressing flange 15, the rotating flange 12, and the housing member 10. Moreover, it has the exhaust port 17 for exhausting the space in which the vacuum sealing material 16 was incorporated.

  As described above, by dividing the bearing housing function from the conventional mounting flange, it is possible to firmly fix and adjust the bearing 13 to the mounting flange 11 and the rotating flange 12. Accordingly, it is possible to realize a vacuum-compatible hollow type rotary introduction machine with reduced surface runout and eccentricity as compared with the prior art. Further, as a high-precision bearing, for example, a high-precision cross roller bearing or a high-precision four-point contact ball bearing can be used to further reduce surface runout and eccentricity.

FIG. 5 is a view for explaining an assembly of a vacuum-compatible hollow rotary introduction machine in which a rotary flange is divided and a bearing adjustment method according to the second embodiment of the present invention.
First, the inner ring of the bearing 23 is fixed to the housing 20 using the internal bearing pressing flange 24 (E). At this time, the mounting adjustment of the bearing is performed so that play of the inner ring of the bearing 23 does not occur. Next, the mounting flange 21 in which the vacuum seal material 26 is incorporated is fixed to the bearing 23 using the external bearing pressing flange 25 (F). At this time, the mounting adjustment of the bearing is performed so that play of the outer ring of the bearing 23 does not occur. Thereafter, the hollow rotating flange 22 is fixed to the housing 20 (G). Finally, the rotation gear 28 is attached to the rotation flange 22 (H), and the drive gear 29 is attached to the attachment flange 21.

  FIG. 6 shows the structure of a hollow rotary introducer according to the second embodiment of the present invention assembled as described above.

  In the hollow type rotation introducing machine according to the present embodiment, a conventional rotary flange having a vacuum seal function and a bearing housing function is divided into a housing 20 having a bearing housing function and a rotary flange 22 having a vacuum seal function. ing. That is, in the hollow type rotary introducing machine according to the present embodiment, the bearing 23 is housed by the internal bearing pressing flange 24, the external bearing pressing flange 25, the mounting flange 21, and the housing member 20. It also has an exhaust port 27 in which a vacuum seal material 26 is incorporated.

  As described above, by separating the bearing housing function from the conventional rotating flange, it is possible to firmly fix and adjust the bearing 23 to the mounting flange 21 and the rotating flange 22. Accordingly, it is possible to realize a vacuum-compatible hollow type rotary introduction machine with reduced surface runout and eccentricity as compared with the prior art. Further, as a high-precision bearing, for example, a high-precision cross roller bearing or a high-precision four-point contact ball bearing can be used to further reduce surface runout and eccentricity.

FIG. 7 is a view for explaining an assembly method of a vacuum-compatible hollow type rotary introduction machine in which a mounting flange and a rotary flange are divided according to the third embodiment of the present invention and a bearing adjustment method.
First, the inner ring of the bearing 33 is fixed to the inner housing 30b using the inner bearing pressing flange 34 (I). At this time, the mounting adjustment of the bearing is performed so that play of the inner ring of the bearing 33 does not occur. Next, the outer ring of the bearing 33 is fixed to the outer housing 30a using the outer bearing pressing flange 35 (J). At this time, the mounting adjustment of the bearing is performed so that play of the outer ring of the bearing 33 does not occur. Next, the inner housing 30b is fixed to the hollow rotating flange 32 (K). Thereafter, the external housing 30a is fixed to the mounting flange 31 in which the vacuum seal material 36 is incorporated (L). Finally, the rotation gear 38 is attached to the rotation flange 32 (M), and the drive gear 39 is attached to the attachment flange 31.

  FIG. 8 shows the structure of the hollow rotary introducer according to the third embodiment of the present invention assembled as described above.

  In the hollow type rotation introducing machine according to the present embodiment, the conventional mounting flange having both a vacuum sealing function and a bearing housing function is divided into an external housing 30a having a bearing housing function and a mounting flange 31 having a vacuum sealing function. In addition, a conventional rotary flange having a vacuum seal function and a bearing housing function is divided into an inner housing 30b having a bearing housing function and a rotary flange 32 having a vacuum seal function. That is, in the hollow type rotation introducing machine according to the present embodiment, the bearing 33 is housed by the inner bearing pressing flange 34, the outer bearing pressing flange 35, the outer housing member 30a, and the inner housing member 30b. Moreover, it has the exhaust port 37 which exhausts the space in which the vacuum sealing material 36 was incorporated.

  As described above, the bearing housing function is divided from the conventional mounting flange and rotating flange, so that the bearing 33 can be firmly fixed and adjusted to the mounting flange 31 and the rotating flange 32. Accordingly, it is possible to realize a vacuum-compatible hollow type rotary introduction machine with reduced surface runout and eccentricity as compared with the prior art. Further, as a high-precision bearing, for example, a high-precision cross roller bearing or a high-precision four-point contact ball bearing can be used to further reduce surface runout and eccentricity.

  The hollow rotary introducer according to the first embodiment, the second embodiment, and the third embodiment described above has a structure in which the outer ring of the bearing is fixed to the mounting flange and the inner ring of the bearing is fixed to the rotating flange. On the other hand, in the hollow type rotary introducer according to the fourth embodiment of the present invention, the inner ring of the bearing is fixed to the mounting flange, and the outer ring of the bearing is fixed to the rotating flange, and the same effect as the above-described embodiment can be obtained. . The hollow rotary introducer according to the fourth embodiment of the present invention will be described below.

  FIG. 9 shows the structure of a hollow rotary introducer according to the fourth embodiment of the present invention. As shown in the second embodiment, the illustrated hollow type rotary introduction machine is obtained by dividing the bearing housing function from the conventional rotating flange, but the first embodiment in which the bearing housing function from the conventional mounting flange is divided. Also in the hollow type rotary introducer according to the embodiment, the same structure can be obtained and the same effect can be obtained also in the hollow type rotary introducer according to the third embodiment in which the bearing housing function is divided from the conventional mounting flange and rotary flange. it can.

  Specifically, in the hollow type rotation introducing machine according to the present embodiment, the outer ring of the bearing 43 is fixed to the housing 40 using the external bearing pressing flange 45. Further, the inner ring of the bearing 43 is fixed to the mounting flange 41 in which the vacuum seal material 46 is incorporated, using an inner bearing pressing flange 44. The housing 40 is fixed to the rotating flange 42. The rotation gear 48 is attached to the rotation flange 42, and the exhaust port 47 and the drive gear 49 are attached to the attachment flange 41.

  The hollow rotary introducer according to the present invention can adjust the bearing portion in the same manner even when a plurality of combination bearings are combined. FIG. 10 shows the structure of a hollow rotary introducer according to the fifth embodiment of the present invention. The hollow type rotation introducing machine according to the present embodiment uses a bearing 53 in combination with an angular contact ball bearing. The housing member 50, the mounting flange 51 incorporating the vacuum seal material 56, the rotation flange 52, the internal bearing pressing flange 54, the external bearing pressing flange 55, the exhaust port 57, the rotation gear 58, and the drive gear 59 are It is comprised similarly to one Embodiment.

  Fluoro rubber O-ring generally wears easily, has strong adhesion, and has a high coefficient of friction. Therefore, when used as a sealing material in a place with long-term and intermittent rotation, such as a hollow type rotary introduction machine, The large moment load generated in the bearing causes malfunction (running in the radial direction and rotating shaft direction of the bearing) and unexpected damage to the bearing. As a method of adding characteristics of abrasion resistance, low friction, and non-adhesiveness to metal to fluororubber, a method of impregnating a fluororubber body with a cross-linking material and causing cross-linking in the vicinity of the rubber surface by heating. (Surface modification) has been devised (see, for example, Patent Document 4). The vacuum seal material of the hollow type rotation introducing machine according to the present invention includes a special fluorine rubber O-ring having characteristics of abrasion resistance, low friction and non-adhesiveness to metal, such as Frid Armor (registered trademark) O-ring By using Fluoroplus (fluorinated rubber manufactured by Nichias) O-ring, sufficient airtightness can be obtained by single-stage differential exhaust even in a large-diameter hollow rotary introducer. In addition, the moment load generated in the drive unit can be reduced, and the radial and rotary shaft runouts that occur in the bearing can be suppressed. As the moment load on the bearing decreases, the life of the bearing can be extended. it can.

  FIG. 11 shows the amount of eccentricity (a) and the amount of surface vibration (b) of the hollow rotary introducer according to the first embodiment of the present invention. A high-precision four-point contact ball bearing is used as the bearing 13, and the vacuum sealing material 16 is a special fluorine rubber having features of wear resistance, low friction, and non-adhesiveness to metal. A ring was used. The amount of eccentricity and the amount of surface vibration are respectively the amount of displacement in the radial direction and the amount of displacement in the direction of the rotation axis at a position 75 mm from the center of rotation.

  Compared with the eccentric amount and surface vibration amount of the hollow type rotation introducing machine according to the prior art shown in FIG. 2, both the eccentric amount and surface vibration amount of the hollow type rotation introducing machine according to the first embodiment of the present invention are greatly increased. It can be seen that it has been improved. The slight remaining eccentricity and surface vibration are derived from the bearing because they are within the specification range of the bearing used. Therefore, according to the present invention, it was verified that eccentricity and surface vibration can be reduced.

  FIG. 12 shows the structure of a hollow rotary introducer according to the sixth embodiment of the present invention. As shown in the figure, the hollow type rotation introducing machine according to the present embodiment has a high-precision angle positioning encoder ring 70, for example, a high-resolution optical angle positioning encoder ring, incorporated in a rotary flange 62, which is a rotating portion, and a mounting flange. An angle reading device 71 is attached to 61. These devices can be mounted by reducing the eccentricity in the radial direction described above. By doing so, it is possible to read the absolute angle of the angle with high resolution. Other actions and effects are the same as those of the first to fifth embodiments described above.

  The bearing 63 is fixed to the rotating flange 62 by an internal bearing pressing flange 64, and is fixed to the housing member 60 by an external bearing pressing flange 65. The housing member 60 is a mounting flange 61 in which a vacuum seal material 66 is incorporated. It is fixed to. Further, it also has a rotation gear 68 and a drive gear 69.

  The incorporation of a highly accurate angle positioning encoder into the rotating part is also possible with a hollow type rotary introduction machine of an inner ring fixed outer ring rotating type bearing as shown in FIG. FIG. 13 shows the structure of a hollow rotary introducer according to the seventh embodiment of the present invention, in which a highly accurate angle positioning encoder is incorporated in a hollow rotary introducer of the inner ring fixed outer ring rotary type.

  In the present embodiment, a high-precision angle positioning encoder ring 90, for example, a high-resolution optical angle positioning encoder ring is incorporated in the housing 80, which is a rotating part, and the angle reading device 91 is attached to the mounting flange 81. It is possible to read the absolute angle of the angle. Other actions and effects are the same as those of the first to fifth embodiments described above.

  The bearing 83 is fixed to a mounting flange 81 in which a vacuum seal material 86 is incorporated by an internal bearing pressing flange 84, and fixed to a housing member 80 by an external bearing pressing flange 85. The housing member 80 is a rotating flange. 82 is fixed. A rotation gear 88 and a drive gear 89 are also provided.

  Next, a hollow type rotation introducing machine using a bearing integrally processed with the housing member as described above will be described.

  In the hollow type rotary introducer according to the above-described embodiment, since the bearing is fixed to the mounting flange, the rotary flange, or both via the housing member, the structure and processing accuracy of the housing is the same as that of the hollow type rotary introducer. This will affect the accuracy and assembly accuracy.

  In addition, when incorporating a hollow rotary introducer into an existing vacuum system, it is possible to suppress an increase in the size of the hollow rotary introducer in the direction of the rotation axis and the radial direction in order to avoid steric interference with existing equipment. desirable. For example, the hollow type rotary introducer according to the above-described embodiment uses a bearing pressing flange. Therefore, the distance between the mounting surfaces of the vacuum side mounting flange and the atmospheric side rotation flange is such that the rotation flange, the mounting flange, and In addition to the thickness of the bearing, the thickness of the bearing pressing flange and the housing member is added, and therefore the length becomes long. Therefore, in the hollow type rotary introducer of the embodiment as described above, a thin bearing is used to shorten the distance between the mounting surfaces. However, a thin bearing makes it difficult to achieve high accuracy, high rigidity, and high load capacity of the rotation guide of the hollow type rotary introduction machine.

  In addition, the hollow type rotary introducer of the embodiment as described above is composed of parts such as a mounting flange, a rotating flange, a bearing, a bearing pressing flange, a housing member, and a vacuum seal, excluding the drive unit and the angle reading unit. For this reason, the number of parts and the number of assembling steps are increased as compared with a conventional hollow type rotary introduction machine, resulting in an increase in manufacturing cost.

  A hollow type rotary introduction machine according to an embodiment of the present invention described below uses a bearing with a mounting hole machined, and this bearing is directly connected to a rotating flange and a mounting flange without using a housing. Can be attached to. Therefore, the structure and processing accuracy of the housing do not affect the rotation accuracy and assembly accuracy of the hollow type rotary introduction machine.

  Further, since this bearing has a structure that does not require a bearing pressing flange, the distance between the mounting surfaces of the mounting flange and the rotating flange can be shortened. Therefore, even when a thicker bearing is incorporated, an increase in the size in the direction of the rotation axis can be suppressed as compared with the hollow type rotary introduction machine as described above. In addition, by using a thicker bearing, the thickness of the inner and outer rings of the bearing and the size of the rolling elements can be increased, and the rigidity and load tolerance of the bearing portion can be greatly increased, and high accuracy can be achieved. It is possible to obtain a rotation guide.

  Further, since the parts such as the housing member and the bearing pressing flange are not required, the number of parts and the number of assembling steps can be reduced, and the manufacturing cost can be suppressed.

  FIG. 14 shows an example of a bearing 100 that has been subjected to mounting hole machining and that can be used in a vacuum-compatible hollow rotary introducer according to an embodiment of the present invention described below. The bearing 100 has a structure in which the thickness of the inner ring 101 and the outer ring 102 and the dimensions of the rolling elements 103 are increased as compared with a conventional thin bearing. In addition, the outer ring 102 of the bearing 100 is subjected to a fitting process on the surface facing the mounting flange in the rotation axis direction. By doing so, the bearing 100 and the mounting flange can be mounted from the rotation axis direction. Therefore, it is not necessary to fix the outer ring 102 of the bearing 100 from the radial direction of the bearing, and an increase in size in the radial direction can be suppressed. In addition, a fitting process may be applied to the surface of the inner ring 101 facing the rotating flange in the rotation axis direction, and the same effect can be obtained.

  FIG. 15 shows the structure of a hollow rotary introducer according to an eighth embodiment of the present invention. In the hollow type rotation introducing machine according to the present embodiment, the inner ring 101 of the bearing 100 in which the mounting hole is machined is fixed to the hollow rotary flange 112 so as to be rotatable, and then the vacuum seal material 116 is incorporated. The outer ring 102 of the bearing 100 is fixed to the flange 111. Finally, the rotation gear 118 is attached to the rotation flange 112 and the drive gear 119 is attached to the attachment flange 111. As the vacuum sealing material 116, a fluororubber O-ring having the characteristics of wear resistance, low friction and non-adhesiveness to metal is used as in the above-described embodiment.

When the bearing 100 according to the present embodiment is used, a thin bearing that has been used in a hollow rotary introduction machine according to the prior art, for example, a cross that receives a complicated load such as a radial load, an axial load, and a moment load with a single bearing. Compared to the case where a roller bearing is used, a bearing pressing flange is not required. Therefore, without the distance L ₁ between the mounting surface is longer, thereby increasing the thickness of the bearing.

  FIG. 16 shows a conventional thin bearing (thin cross roller bearing having an inner diameter (Φd) of 70 mm and a thickness (B) of 8 mm) and a bearing subjected to mounting holes according to the present embodiment (inner diameter (Φd) of 70 mm, thickness). (B) 15 mm cross roller bearing) shows an example of a basic dynamic load rating and a basic static load rating in the radial direction, rotation accuracy of the inner ring, static allowable moment, and static allowable load in the rotation axis direction. It can be seen that the load capacity with respect to the load in the radial direction, the load in the rotation axis direction, and the moment load is improved by increasing the thickness of the bearing from 8 mm to 15 mm.

  FIG. 17 shows a conventional thin bearing (thin cross roller bearing having an inner diameter (Φd) of 70 mm and a thickness (B) of 8 mm) and a bearing subjected to mounting holes according to the present embodiment (inner diameter (Φd) of 70 mm, thickness). (B) 15 mm cross roller bearing) when the load of 1 kN is applied from the radial direction (μm), the amount of displacement when the load of 1 kN is applied from the rotation axis direction (μm), 50 Nm moment An example of the displacement angle (mrad) when a load is applied is shown. It can be seen that when the bearing thickness is increased from 8 mm to 15 mm, the rigidity in the radial direction, the rigidity in the rotation axis direction, and the rigidity against the moment load are improved.

  Thus, in the hollow type rotation introducing machine according to the present embodiment, the housing 100 and the bearing pressing flange are not required, and the bearing 100 can be directly attached to the mounting flange 111 and the rotating flange 112. It is possible to realize a hollow type rotary introduction machine capable of capacity and high-precision rotation guidance. Further, the housing, the bearing pressing flange, and the work for assembling them become unnecessary, and the manufacturing cost can be reduced.

  FIG. 18 shows the structure of a hollow rotary introducer according to the ninth embodiment of the present invention. The hollow type rotary introducer according to the present embodiment has an angle positioning encoder ring 130 to the hollow rotary flange 122 which is a rotating part in order to enable highly accurate rotation control of the hollow type rotary introducer according to the eighth embodiment. And the angle reading device 131 is attached to the mounting flange 121. With such a configuration, it is possible to read the rotation angle with high accuracy. Note that the bearing 100 is fixed to the mounting flange 121 and the rotary flange 122 in which the vacuum seal material 126 is incorporated in the same manner as in the hollow rotary introducer according to the eighth embodiment. Finally, the rotation gear 128 is attached to the rotation flange 122 and the drive gear 129 is attached to the attachment flange 121.

  As described above, according to the present invention, the surface runout and eccentricity of the hollow type rotary introducer can be greatly reduced, and highly accurate rotation control can be performed. As a result, it is possible to evaluate a minute material, which has been impossible in the past, and to perform ultrahigh-precision rotation control of an apparatus such as an optical element.

1, 11, 21, 31, 41, 51, 61, 81, 111, 121 Mounting flange 2, 12, 22, 32, 42, 52, 62, 82, 112, 122 Rotating flange 3, 13, 23, 33, 43, 53, 63, 83, 100 Bearing 4, 14, 24, 34, 44, 54, 64, 84 Internal bearing pressing flange 5, 15, 25, 35, 45, 55, 65, 85 External bearing pressing flange 6, 16, 26, 36, 46, 56, 66, 86, 116, 126 Vacuum seal material 7, 17, 27, 37, 47, 57 Evacuation port 8, 18, 28, 38, 48, 58, 68, 88, 118, 128 Rotating gear 9, 19, 29, 39, 49, 59, 69, 89, 119, 129 Drive gear 10, 20, 30, 40, 50, 60, 80 Housing 30a External housing 3 0b Inner housing 70, 90, 130 Angle positioning encoder ring 71, 91, 131 Angle reader 101 Inner ring 102 Outer ring 103 Rolling element L ₁ Distance between mounting flange and mounting surface of rotating flange Φd Bearing inner diameter ΦD Bearing outer diameter B ₁ Bearing width B ₂ Bearing fitting width

Claims (8)

Hollow type comprising a bearing, an internal bearing pressing flange and an external bearing pressing flange for fixing the bearing, a hollow rotating flange, a mounting flange incorporating a vacuum seal material, and a housing member fixed to the mounting flange A rotary introducer,
A hollow type rotary introduction machine characterized in that the bearing is housed by the internal bearing pressing flange, the external bearing pressing flange, the rotating flange, and the housing member. Hollow type comprising a bearing, an internal bearing pressing flange and an external bearing pressing flange for fixing the bearing, a hollow rotary flange, a mounting flange incorporating a vacuum seal material, and a housing member fixed to the rotary flange A rotary introducer,
A hollow type rotary introduction machine characterized in that the bearing is housed by the internal bearing pressing flange, the external bearing pressing flange, the mounting flange, and the housing member. Bearing, internal bearing pressing flange and external bearing pressing flange for fixing the bearing, a hollow rotating flange, a mounting flange incorporating a vacuum seal material, a first housing member fixed to the rotating flange, and the mounting A hollow type rotary introducer including a second housing member fixed to a flange,
A hollow rotary introducer characterized in that the bearing is housed by the inner bearing pressing flange, the outer bearing pressing flange, the first housing member, and the second housing member.   The hollow type rotary introducer according to any one of claims 1 to 3, wherein the bearing is a plurality of combination bearings. A hollow rotary introduction machine having a bearing provided with a mounting hole, a hollow rotating flange, and a mounting flange incorporating a vacuum seal material,
A hollow rotary introduction machine characterized in that the bearing subjected to the mounting hole machining is directly mounted on the rotating flange and the mounting flange.   The hollow according to claim 5, wherein a fitting process is performed on a surface of the bearing ring on which the mounting hole has been processed, which faces the mounting flange or the rotating flange in a rotation axis direction. Mold rotation introduction machine.   The hollow rotary introducer according to any one of claims 1 to 6, wherein an angle positioning encoder ring is incorporated in a rotating portion of the hollow rotary introducer, and an angle reading device is attached to the mounting flange.   The hollow rotary introducer according to any one of claims 1 to 7, wherein the vacuum seal material is a fluororubber O-ring having wear resistance, low friction and non-adhesiveness.

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