JP2011169714A - Angular velocity sensor unit - Google Patents

Angular velocity sensor unit Download PDF

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JP2011169714A
JP2011169714A JP2010033121A JP2010033121A JP2011169714A JP 2011169714 A JP2011169714 A JP 2011169714A JP 2010033121 A JP2010033121 A JP 2010033121A JP 2010033121 A JP2010033121 A JP 2010033121A JP 2011169714 A JP2011169714 A JP 2011169714A
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angular velocity
velocity sensor
vibration
sensor unit
sensor element
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JP5287760B2 (en
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Toshio Yamazaki
稔夫 山崎
Takashi Uchida
崇 内田
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Panasonic Corp
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Panasonic Corp
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Priority to US13/579,346 priority patent/US9091543B2/en
Priority to EP14200345.8A priority patent/EP2876411A1/en
Priority to PCT/JP2011/000842 priority patent/WO2011102121A1/en
Priority to EP11744412.5A priority patent/EP2538175B1/en
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Priority to US14/568,953 priority patent/US20150135830A1/en
Priority to US14/745,686 priority patent/US9448068B2/en
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Abstract

<P>PROBLEM TO BE SOLVED: To improve a detection accuracy of an angular velocity, concerning an angular velocity sensor unit used for various electronic equipment. <P>SOLUTION: The angular velocity sensor unit suspends an angular velocity sensor element 2 through a vibration control member 8 in an internal space of a package 1. The sensor unit divides the vibration control member 8 into connection 8c of the package 1, connection 8d of a pedestal 9, and a suspension part 8e positioning between the connection parts 8c, 8d, and matches height of a centroid position 12 of the suspension part 8e with height of a centroid position 13 of a compound body comprising the angular velocity sensor element 2, the pedestal 9, and the connection part 8d of the pedestal 9 on the vibration control member 8. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、各種電子機器に用いられる角速度センサユニットに関する。   The present invention relates to an angular velocity sensor unit used in various electronic devices.

この種の角速度センサユニットは図８に示すようなパッケージ１の内部に角速度センサ素子２およびこの角速度センサ素子２を制御するＩＣ３を配置する構造が一般的であり、昨今、パッケージ１に加わる外乱振動を角速度センサ素子２に伝達することを抑制するため、角速度センサ素子２をパッケージ１の内部空間において防振部材４で懸架する構造が提案されている。   This type of angular velocity sensor unit generally has a structure in which an angular velocity sensor element 2 and an IC 3 for controlling the angular velocity sensor element 2 are arranged inside a package 1 as shown in FIG. Has been proposed in which the angular velocity sensor element 2 is suspended by a vibration isolating member 4 in the internal space of the package 1.

また、角速度センサ素子２は素子を駆動振動させ、検出軸の回りに加わる角速度に伴うコリオリ力による素子の撓み成分を検出する振動型の素子を用いるとともに、角速度センサ素子２は角速度を検出するための振動空間を確保するため台座５を介して防振部材４に実装していた。   In addition, the angular velocity sensor element 2 uses a vibration-type element that drives and vibrates the element and detects a deflection component of the element due to the Coriolis force accompanying the angular velocity applied around the detection axis, and the angular velocity sensor element 2 detects the angular velocity. In order to secure the vibration space, the vibration isolating member 4 is mounted via the base 5.

なお、この出願の発明に関連する先行技術文献情報としては、例えば、特許文献１が知られている。   As prior art document information related to the invention of this application, for example, Patent Document 1 is known.

特開２００５−３３１４４９号公報JP 2005-331449 A

しかしながら、角速度センサ素子２を防振部材４の表面に載置した台座５の上に実装した場合、図９に示すように防振部材４を介してパッケージ１に取り付けられる角速度センサ素子２の重心位置が防振部材４の部材平面より高くなってしまうことから、パッケージ１の外部から加わる外乱振動に対して、防振部材４に矢印６で示すような撓み振動が励起され、この撓み振動を検出軸回りの回転として角速度として誤検出してしまうという問題があった。   However, when the angular velocity sensor element 2 is mounted on the pedestal 5 placed on the surface of the vibration isolation member 4, the center of gravity of the angular velocity sensor element 2 attached to the package 1 via the vibration isolation member 4 as shown in FIG. Since the position becomes higher than the member plane of the vibration isolating member 4, flexural vibration as indicated by an arrow 6 is excited in the vibration isolating member 4 against disturbance vibration applied from the outside of the package 1. There has been a problem of erroneous detection as angular velocity as rotation around the detection axis.

そこで、本発明はこのような問題を解決し、角速度センサユニットの検出精度を高めることを目的とする。   SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve such problems and increase the detection accuracy of the angular velocity sensor unit.

この目的を達成するために本発明は、角速度センサ素子をパッケージの内部空間に防振部材を介して懸架する角速度センサユニットにおいて、防振部材をパッケージとの接続部と台座との接続部とこれら接続部間に位置する懸架部とに分け、懸架部の重心位置の高さを角速度センサ素子、台座および防振部材における台座との接続部からなる複合体の重心位置の高さと一致させた構造としたのである。   In order to achieve this object, the present invention provides an angular velocity sensor unit in which an angular velocity sensor element is suspended in an internal space of a package via a vibration isolating member, and the vibration isolating member is connected to a connection portion between a package and a pedestal. A structure in which the height of the center of gravity of the suspension is made to coincide with the height of the center of gravity of the complex composed of the connection with the base of the angular velocity sensor element, the base, and the vibration isolator. It was.

この構成により本発明は、角速度センサ素子に対する外乱振動の影響を抑制し、角速度センサユニットの検出精度を高めることが出来るのである。   With this configuration, the present invention can suppress the influence of disturbance vibration on the angular velocity sensor element, and can improve the detection accuracy of the angular velocity sensor unit.

本発明の一実施形態の角速度センサユニットの断面図Sectional drawing of the angular velocity sensor unit of one Embodiment of this invention 同角速度センサユニットを構成する角速度センサ素子の上面図Top view of angular velocity sensor elements constituting the same angular velocity sensor unit 同角速度センサ素子に設けられる電極の構造を示す模式図Schematic showing the structure of the electrodes provided in the same angular velocity sensor element 同角速度センサ素子の懸架状態を示す模式図Schematic showing the suspended state of the same angular velocity sensor element 他の角速度センサ素子の上面図Top view of other angular velocity sensor elements 同角速度センサ素子の駆動状態を示す模式図Schematic diagram showing the drive state of the same angular velocity sensor element 同角速度センサ素子の検出状態を示す模式図Schematic showing the detection state of the same angular velocity sensor element 従来の角速度センサユニットの断面図Sectional view of a conventional angular velocity sensor unit 同角速度センサ素子の振動状態を表す模式図Schematic diagram showing the vibration state of the same angular velocity sensor element

以下、本発明の一実施形態について図を用いて説明する。なお、上述した従来の技術と同様の構成については同じ符号を付して説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected and demonstrated about the structure similar to the prior art mentioned above.

図１は本発明の一例である角速度センサユニットを示したものであり、その基本構造は積層セラミクスからなるパッケージ１の内部空間に角速度センサ素子２と、この角速度センサ素子２に駆動信号を印加する駆動制御回路および角速度センサ素子２から出力された検出信号を処理する検出回路を包含するＩＣ３を配置し、パッケージ１の開口をリッド７で封口した構造となっている。   FIG. 1 shows an angular velocity sensor unit which is an example of the present invention, and its basic structure is that an angular velocity sensor element 2 is applied to an internal space of a package 1 made of laminated ceramics, and a drive signal is applied to the angular velocity sensor element 2. An IC 3 including a drive control circuit and a detection circuit that processes a detection signal output from the angular velocity sensor element 2 is arranged, and the opening of the package 1 is sealed with a lid 7.

また、角速度センサ素子２はパッケージ１を介して外乱振動が伝達されないように撓み性を有する板バネ素材や弾性素材からなる防振部材８によりパッケージ１の内部空間に懸架された台座９で支持した構造としている。   Further, the angular velocity sensor element 2 is supported by a pedestal 9 suspended in the internal space of the package 1 by a vibration isolating member 8 made of a flexible leaf spring material or an elastic material so that disturbance vibrations are not transmitted through the package 1. It has a structure.

また、角速度センサ素子２は図２に示すように、支持部２ａから検出軸１０に沿って延出された一対の駆動アーム２ｂ上に駆動電極２ｃおよび検知電極２ｄを設けた音叉型の振動型素子であり、台座９における角速度センサ素子２を実装する部分を図１に示すように段差構造として上段面９ａに角速度センサ素子２の支持部２ａを実装し駆動アーム２ｂの振動空間を確保した構造となっている。   As shown in FIG. 2, the angular velocity sensor element 2 is a tuning-fork type vibration type in which a drive electrode 2c and a detection electrode 2d are provided on a pair of drive arms 2b extending from the support portion 2a along the detection shaft 10. As shown in FIG. 1, the portion of the pedestal 9 on which the angular velocity sensor element 2 is mounted has a step structure, and the support portion 2a of the angular velocity sensor element 2 is mounted on the upper step surface 9a to secure the vibration space of the drive arm 2b. It has become.

なお、角速度センサ素子２はＳｉからなる基板で構成され、その表面に設けられる各電極の構造は図３に示すようにＡｕからなる上部電極１１ａとＰｔからなる下部電極１１ｂと、これらの間に配置されたＰＺＴからなる圧電体層１１ｃにより形成され、下部電極１１ｂをグランド接続した状態で上部電極１１ａに正電圧を印加すると電極の積層方向に対して圧縮力が働き、この圧縮力により電極パターンが延びる方向に応力が発生し、これとは逆に負電圧を印加すると電極に引張力が働き、この引張力により電極パターンが縮む方向に応力が発生するものである。また、これとは逆に駆動アーム２ｂの撓みにより電極が縮むことで負電圧を発生し、電極が延びることで正電圧を発生させるものである。   The angular velocity sensor element 2 is composed of a substrate made of Si, and the structure of each electrode provided on the surface thereof is an upper electrode 11a made of Au and a lower electrode 11b made of Pt, as shown in FIG. When a positive voltage is applied to the upper electrode 11a with the lower electrode 11b connected to the ground with the piezoelectric layer 11c made of PZT disposed, a compressive force is exerted in the electrode stacking direction. On the contrary, when a negative voltage is applied, a tensile force is applied to the electrode, and this tensile force generates a stress in the direction in which the electrode pattern contracts. On the contrary, a negative voltage is generated when the electrode contracts due to the bending of the drive arm 2b, and a positive voltage is generated when the electrode extends.

また、角速度の検出については、図２に示した駆動電極２ｃにＩＣ３から駆動電圧を印加することにより駆動アーム２ｂが矢印で示すようＸ軸方向つまり駆動アーム２ｂの並設方向に駆動振動し、この駆動振動状態において検出軸回りに角速度が加わることでコリオリ力により駆動アーム２ｂがＺ軸方向（駆動振動により形成される振動平面（ＸＹ平面）に直交する方向）に撓み振動が生じ、この撓み振動を検知電極２ｄにより電気信号に変換しＩＣ３に出力するのである。   As for angular velocity detection, by applying a drive voltage from the IC 3 to the drive electrode 2c shown in FIG. 2, the drive arm 2b is driven to vibrate in the X-axis direction, that is, in the direction in which the drive arms 2b are juxtaposed as indicated by the arrows. In this driving vibration state, an angular velocity is applied around the detection axis, so that the driving arm 2b is bent and vibrated in the Z-axis direction (direction perpendicular to the vibration plane (XY plane) formed by the driving vibration) by the Coriolis force. The vibration is converted into an electrical signal by the detection electrode 2d and output to the IC3.

また、図４に示したように防振部材８は、角速度センサ素子２の駆動振動における振動平面（ＸＹ平面）と平行な面８ａと、振動平面（ＸＹ平面）と直交する面８ｂを有する段差構造としており、振動平面（ＸＹ平面）と平行な面８ａの防振作用により振動方向と直交する向き（Ｚ軸方向）の外乱振動を抑制し、振動平面（ＸＹ平面）と直交する面８ｂの防振作用により振動平面と平行な向き（ＸＹ平面での面内方向）の外乱振動を抑制した構造としている。   As shown in FIG. 4, the vibration isolating member 8 includes a step having a surface 8 a parallel to the vibration plane (XY plane) in the driving vibration of the angular velocity sensor element 2 and a surface 8 b orthogonal to the vibration plane (XY plane). The structure has a structure that suppresses disturbance vibration in the direction (Z-axis direction) orthogonal to the vibration direction by the vibration-proofing action of the surface 8a parallel to the vibration plane (XY plane), and the surface 8b orthogonal to the vibration plane (XY plane). It has a structure in which disturbance vibration in a direction parallel to the vibration plane (in-plane direction on the XY plane) is suppressed by a vibration-proofing action.

そして、この角速度センサユニットは、防振部材８の外側部分を接続部８ｃとしてパッケージ１に接続するとともに内側部分を接続部８ｄとして台座９に接続した構成とするとともに、接続部８ｃ，８ｄの間の懸架部８ｅの重心位置１２の高さを角速度センサ素子２、台座９および台座９との接続部８ｄからなる複合体つまり懸架部８ｅにより懸架される部分全体の重心位置１３の高さと一致させた構造として角速度センサユニットの検出精度を向上させている。なお、ここでいう重心位置１２，１３の高さを一致させるとは角速度センサ素子２の駆動振動における振動平面を基準として各重心位置の相対的な高さを合わせることを意味する。   The angular velocity sensor unit has a configuration in which the outer portion of the vibration isolation member 8 is connected to the package 1 as the connection portion 8c and the inner portion is connected to the base 9 as the connection portion 8d, and between the connection portions 8c and 8d. The height of the center of gravity position 12 of the suspension part 8e is made to coincide with the height of the center of gravity position 13 of the entire part suspended by the composite, ie, the suspension part 8e, comprising the angular velocity sensor element 2, the base 9 and the connection part 8d with the base 9. As a structure, the detection accuracy of the angular velocity sensor unit is improved. In addition, making the height of the gravity center positions 12 and 13 here correspond means matching the relative height of each gravity center position on the basis of the vibration plane in the drive vibration of the angular velocity sensor element 2.

すなわち、懸架部８ｅの重心位置１２と、この懸架部８ｅに懸架された複合体の重心位置１３との高さを一致させることで、図９を用いて説明した従来の角速度センサ素子２の重心位置が防振部材８より上に位置する構成での矢印６で示す撓み振動の発生を抑制し、外乱振動に対する不要な検出信号の出力を抑制できることから、結果として角速度センサユニットにおける特性の検出精度を高めることが出来るのである。   That is, the center of gravity of the conventional angular velocity sensor element 2 described with reference to FIG. 9 is made to coincide with the height of the center of gravity 12 of the suspension 8e and the center of gravity 13 of the composite suspended by the suspension 8e. Since the occurrence of flexural vibration indicated by the arrow 6 in the configuration where the position is above the vibration isolating member 8 can be suppressed and the output of an unnecessary detection signal for disturbance vibration can be suppressed, the detection accuracy of the characteristics in the angular velocity sensor unit as a result. Can be increased.

なお、特に図示していないが防振部材８が平坦構造で或る場合においても懸架部８ｅの重心位置１２の高さと、この懸架部８ｅにより懸架される角速度センサ素子２を含む複合体の重心位置１３の高さを一致させることで同様の作用効果を奏する。   Although not particularly illustrated, even when the vibration isolator 8 has a flat structure, the height of the center of gravity 12 of the suspension 8e and the center of gravity of the composite including the angular velocity sensor element 2 suspended by the suspension 8e. Similar effects can be achieved by matching the height of the position 13.

また、上述した角速度センサ素子２は図２に示すよう駆動アーム２ｂが駆動振動する駆動振動平面（ＸＹ平面）に対して検出軸（Ｙ軸）が平行となった角速度センサ素子２を挙げて説明したが、振動平面（ＸＹ平面）に対して検出軸が直交（Ｚ軸）する角速度センサ素子を用いることで検出軸方向が異なる角速度センサユニットを略同等の形状にて構成することも出来る。   Further, the angular velocity sensor element 2 described above is described with reference to the angular velocity sensor element 2 in which the detection axis (Y axis) is parallel to the drive vibration plane (XY plane) on which the drive arm 2b is driven to vibrate as shown in FIG. However, by using an angular velocity sensor element whose detection axis is orthogonal (Z-axis) to the vibration plane (XY plane), angular velocity sensor units having different detection axis directions can be configured in substantially the same shape.

なお、駆動振動平面（ＸＹ平面）に対して検出軸が直交（Ｚ軸）する角速度センサ素子１４としては、図５に示すように、中央部分に位置する固定部１４ａの両側に錘部１４ｂを対称配置し、それぞれの錘部１４ｂを一対の駆動アーム１４ｃで接続した形状となっており、駆動アーム１４ｃ上には後述する駆動電極１４ｄ、検出電極１４ｅ及びモニタ電極１４ｆが配置されている。   As shown in FIG. 5, the angular velocity sensor element 14 whose detection axis is orthogonal (Z axis) to the drive vibration plane (XY plane) is provided with weight portions 14b on both sides of the fixed portion 14a located at the center portion. Each of the weight portions 14b is symmetrically arranged with a pair of drive arms 14c, and a drive electrode 14d, a detection electrode 14e, and a monitor electrode 14f, which will be described later, are arranged on the drive arm 14c.

そして、駆動電極１４ｄにＩＣ３から駆動信号を印加することで、駆動アーム１４ｃが図６に示すよう錘部１４ｂを固定部１４ａと錘部１４ｂを結ぶ方向（Ｘ軸方向）に対称に伸縮するように駆動振動し、この駆動振動の状態において角速度センサ素子１４の振動平面（ＸＹ平面）に垂直な方向（Ｚ軸方向）を検出軸としてこの検出軸回りに角速度を受けることでコリオリ力が生じ、このコリオリ力により駆動アーム１４ｃが図７に示すように駆動振動方向（Ｘ軸方向）と直交する方向（Ｙ軸方向）に振動するようになり、この検出振動による駆動アーム１４ｃの変形を検出電極１４ｅで検知し電気信号としてＩＣ３に出力する振動型素子構造となっている。   Then, by applying a drive signal from the IC 3 to the drive electrode 14d, the drive arm 14c extends and contracts symmetrically in the direction connecting the fixed portion 14a and the weight portion 14b (X-axis direction) as shown in FIG. Coriolis force is generated by receiving an angular velocity around this detection axis with the direction (Z-axis direction) perpendicular to the vibration plane (XY plane) of the angular velocity sensor element 14 in the state of this drive vibration as the detection axis in this drive vibration state, The Coriolis force causes the drive arm 14c to vibrate in a direction (Y-axis direction) orthogonal to the drive vibration direction (X-axis direction) as shown in FIG. 7, and the deformation of the drive arm 14c due to this detected vibration is detected by the detection electrode. It has a vibration element structure that is detected by 14e and output to the IC 3 as an electrical signal.

そして、この角速度センサ素子１４も図２に示す音叉型の角速度センサ素子２と同様に台座により振動空間を確保した状態で防振部材８に懸架する構造であるので、図４に示すように懸架部８ｅの重心位置１２の高さを角速度センサ素子１４、台座９および防振部材８における台座９との接続部８ｄからなる複合体つまり懸架部８ｅにより懸架される部分全体の重心位置１３の高さと一致させる構造とすることで角速度センサユニットの検出精度を向上できるのである。   The angular velocity sensor element 14 is also suspended from the vibration isolating member 8 in a state where a vibration space is secured by a pedestal in the same manner as the tuning fork type angular velocity sensor element 2 shown in FIG. The height of the gravity center position 12 of the part 8e is the height of the center of gravity position 13 of the entire part suspended by the composite body, ie, the suspension part 8e, which is composed of the angular velocity sensor element 14, the base 9 and the connection part 8d of the vibration isolating member 8 with the base 9. Therefore, the detection accuracy of the angular velocity sensor unit can be improved.

また、台座９は、角速度センサ素子２の振動空間を形成する台座９の機能を防振部材８自体に形成しても構わず、例えば特に図示していないが液晶ポリマーなどのシート状の弾性素材を成形して角速度センサ素子２を振動可能に支持する段差構造をシート内に一体成形することで、この段差構造が台座９の役割を果たし周囲のシート部分が防振部材８の役割を果たすため、角速度センサユニットとしての部品点数の削減ができ、生産性の向上に寄与できるのである。なお、このように防振部材８と台座９の複合体を一体成形する構成においては、防振部材８における厚みを確保しやすく、この場合、厚み方向（Ｚ軸方向）に対する防振効果を得ることができ、より角速度センサユニットの検出精度を向上出来るのである。   Further, the pedestal 9 may have the function of the pedestal 9 forming the vibration space of the angular velocity sensor element 2 in the vibration isolating member 8 itself. For example, although not particularly illustrated, a sheet-like elastic material such as a liquid crystal polymer is used. By forming the step structure that supports the angular velocity sensor element 2 so as to vibrate in the sheet, the step structure serves as a pedestal 9 and the surrounding sheet portion serves as the vibration isolation member 8. As a result, the number of parts as the angular velocity sensor unit can be reduced, which can contribute to the improvement of productivity. In the configuration in which the composite body of the vibration isolating member 8 and the pedestal 9 is integrally formed in this way, it is easy to ensure the thickness of the vibration isolating member 8, and in this case, the vibration isolating effect in the thickness direction (Z-axis direction) is obtained. Therefore, the detection accuracy of the angular velocity sensor unit can be improved.

また、防振部材８を構成する弾性素材として用いた液晶ポリマーは、振動吸収性能を有するだけでなく、溶融粘度は低く流動性が良好であることから、防振部材８の成形あるいは防振部材８と台座９の複合体の一体成形においても好適な材料であり、この作用効果はポリフタルアミド（ＰＰＡ）を用いても同様である。   The liquid crystal polymer used as an elastic material constituting the vibration isolator 8 not only has vibration absorption performance but also has a low melt viscosity and good fluidity. It is also a suitable material for the integral molding of the composite of 8 and pedestal 9, and this effect is the same even when polyphthalamide (PPA) is used.

また、他の防振部材８を構成する弾性素材としてはシリコンが挙げられ、液晶ポリマーと同様に振動吸収性能を有するとともに、ヤング率の温度特性が非常に小さいという特徴があり、角速度センサユニットとしての温度特性の改善ができる。   Another example of the elastic material constituting the vibration isolating member 8 is silicon, which has the characteristics of having a vibration absorption performance similar to that of the liquid crystal polymer and having a very low Young's modulus temperature characteristic as an angular velocity sensor unit. Temperature characteristics can be improved.

なお、防振部材８としてステンレスやりん青銅といった板バネ素材を用いる場合には、防振部材８の接続部８ｄを台座９の内部にモールドして一体化する構造とすることで、角速度センサ素子２の振動平面（ＸＹ平面）と平行な面８ａと直交する面８ｂを含む段差構造の懸架部８ｅが板バネ素材で形成する構造となり、この段差構造を含む部分を上述した弾性素材で形成するより生産性を高めることが出来る。   In the case where a leaf spring material such as stainless steel or phosphor bronze is used as the vibration isolation member 8, the angular velocity sensor element is formed by molding the connection portion 8d of the vibration isolation member 8 into the base 9 and integrating them. The suspension portion 8e having a step structure including a surface 8b orthogonal to the surface 8a parallel to the second vibration plane (XY plane) is formed of a leaf spring material, and the portion including the step structure is formed of the elastic material described above. Productivity can be increased.

本発明は、角速度センサ素子の検出精度を向上できるという効果を有し、特に車載用途の角速度センサユニットにおいて有用である。   The present invention has an effect that the detection accuracy of an angular velocity sensor element can be improved, and is particularly useful in an in-vehicle-use angular velocity sensor unit.

１ パッケージ
２ 角速度センサ素子
８ 防振部材
８ｃ，８ｄ 接続部
８ｅ 懸架部
９ 台座
１２ 懸架部の重心位置
１３ 複合体の重心位置 DESCRIPTION OF SYMBOLS 1 Package 2 Angular velocity sensor element 8 Anti-vibration member 8c, 8d Connection part 8e Suspension part 9 Base 12 Center of gravity position of suspension part 13 Center of gravity position of complex

Claims (6)

パッケージと、前記パッケージの内部に配置される角速度センサ素子と、前記角速度センサ素子を支持し前記角速度センサ素子の振動空間を確保する台座と、前記台座を前記パッケージの内部空間に懸架する防振部材を有し、前記防振部材は前記パッケージとの接続部と前記台座との接続部と前記接続部間に位置する懸架部とからなり、前記懸架部の重心位置の高さを前記角速度センサ素子、前記台座および前記防振部材における前記台座との接続部からなる複合体の重心位置の高さと一致させたことを特徴とする角速度センサユニット。 A package, an angular velocity sensor element disposed inside the package, a pedestal that supports the angular velocity sensor element and secures a vibration space of the angular velocity sensor element, and a vibration isolating member that suspends the pedestal in the internal space of the package The vibration isolating member comprises a connection portion with the package, a connection portion between the pedestal, and a suspension portion positioned between the connection portions, and the height of the center of gravity of the suspension portion is determined by the angular velocity sensor element. An angular velocity sensor unit characterized in that it matches the height of the center of gravity of a composite body composed of a connecting portion of the base and the vibration isolating member to the base. 防振部材と台座を弾性素材で一体成形したことを特徴とする請求項１に記載の角速度センサユニット。 2. The angular velocity sensor unit according to claim 1, wherein the vibration isolation member and the base are integrally formed of an elastic material. 防振部材を液晶ポリマーで構成したことを特徴とする請求項１に記載の角速度センサユニット。 The angular velocity sensor unit according to claim 1, wherein the vibration isolating member is made of a liquid crystal polymer. 防振部材をポリフタルアミドで構成したことを特徴とする請求項１に記載の角速度センサユニット。 2. The angular velocity sensor unit according to claim 1, wherein the vibration isolating member is made of polyphthalamide. 防振部材をシリコンで構成したことを特徴とする請求項１に記載の角速度センサユニット。 The angular velocity sensor unit according to claim 1, wherein the vibration-proof member is made of silicon. 防振部材を板バネ素材で構成すると共に台座との接続部を前記台座にモールドしたことを特徴とする請求項１に記載の角速度センサユニット。 2. The angular velocity sensor unit according to claim 1, wherein the vibration isolating member is made of a leaf spring material, and a connecting portion with the pedestal is molded on the pedestal.
JP2010033121A 2010-02-18 2010-02-18 Angular velocity sensor unit Expired - Fee Related JP5287760B2 (en)

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JP2010033121A JP5287760B2 (en) 2010-02-18 2010-02-18 Angular velocity sensor unit
EP14200345.8A EP2876411A1 (en) 2010-02-18 2011-02-16 Angular speed sensor and composite sensor for detecting angular speed
PCT/JP2011/000842 WO2011102121A1 (en) 2010-02-18 2011-02-16 Angular speed sensor and composite sensor for detecting angular speed and acceleration
EP11744412.5A EP2538175B1 (en) 2010-02-18 2011-02-16 Angular speed sensor and composite sensor for detecting angular speed and acceleration
US13/579,346 US9091543B2 (en) 2010-02-18 2011-02-16 Angular speed sensor for detecting angular speed
US14/568,953 US20150135830A1 (en) 2010-02-18 2014-12-12 Angular velocity sensor and angular velocity and acceleration detecting composite sensor
US14/745,686 US9448068B2 (en) 2010-02-18 2015-06-22 Angular velocity sensor

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JPH09170926A (en) * 1995-12-21 1997-06-30 Matsushita Electric Ind Co Ltd Angular velocity sensor
JP2001324333A (en) * 2000-05-17 2001-11-22 Denso Corp Angular velocity sensor and its manufacturing method
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JP2001324333A (en) * 2000-05-17 2001-11-22 Denso Corp Angular velocity sensor and its manufacturing method
JP2003028647A (en) * 2001-07-18 2003-01-29 Murata Mfg Co Ltd Vibration type sensor part, method for manufacturing the same and sensor module using the same
JP2007107953A (en) * 2005-10-12 2007-04-26 Denso Corp Angular velocity sensor

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016018923A (en) * 2014-07-09 2016-02-01 京セラ株式会社 Board for sensor nd sensor device

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