JP2011168962A - Sluice valve for vacuum valve unit and vacuum valve unit - Google Patents

Sluice valve for vacuum valve unit and vacuum valve unit Download PDF

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JP2011168962A
JP2011168962A JP2010031060A JP2010031060A JP2011168962A JP 2011168962 A JP2011168962 A JP 2011168962A JP 2010031060 A JP2010031060 A JP 2010031060A JP 2010031060 A JP2010031060 A JP 2010031060A JP 2011168962 A JP2011168962 A JP 2011168962A
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valve
vacuum
valve body
pipe
valve unit
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Takekuni Araki
建国 荒木
Shigeo Takemura
茂雄 竹村
Yukiaki Toichi
志昭 十市
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Sekisui Chemical Co Ltd
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Sekisui Chemical Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a sluice valve for vacuum valve unit, capable of being easily opened and dispensing with a fall preventing stopper. <P>SOLUTION: The sluice valve 4 for a vacuum valve unit includes a valve element section 41 blocking a vacuum pipe line 56; a valve rod section 42 to which the valve element section 41 is attached; a vertical pipe section 43 provided in the middle of the vacuum pipe line 56; and a valve lid section 44 attached to the vertical pipe section 43 and having an insert hole 44a to which the valve rod section 42 is inserted. A female thread groove is provided on the insert hole 44a of the valve lid section 44, and a male thread groove is provided on the outer periphery of the valve rod section 42 so as to be screwed to the male thread groove over the whole length of the range to be inserted to the insert hole 44a thereof. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、真空弁ユニットの仕切弁及び真空弁ユニットに関するものである。   The present invention relates to a gate valve of a vacuum valve unit and a vacuum valve unit.

近年、自然流下式の下水道システムに代えて、汚水を真空圧によって収集する真空式下水道システムの採用が増加している。   In recent years, the use of vacuum sewer systems that collect sewage by vacuum pressure is increasing instead of natural sewer systems.

この真空式下水道システムでは、住居や工場などから排出される汚水は、真空弁付き汚水マス(真空弁ユニット)に溜められ、所定量だけ溜められると真空圧によって空気とともに気液混送流として真空下水管に取り込まれて搬送される。   In this vacuum sewer system, sewage discharged from residences and factories is stored in a sewage mass with a vacuum valve (vacuum valve unit), and when a predetermined amount is stored, it is vacuumed as a gas-liquid mixed flow with air by vacuum pressure. It is taken into the sewer pipe and transported.

ところで、それぞれの真空弁ユニットには、メンテナンスの際などに真空圧を遮断する必要があるため、真空弁の下流側(真空ポンプ側)に仕切弁が設置されることが一般的である。   By the way, in each vacuum valve unit, since it is necessary to shut off the vacuum pressure during maintenance or the like, a gate valve is generally installed on the downstream side (vacuum pump side) of the vacuum valve.

例えば、特許文献1には、汚水マス内に縦置き管を配置し、この縦置き管の側面から流入管を接続し、縦置き管を閉止する弁体を上下に移動させることで真空弁と真空汚水管の間を開閉する構成が開示されている。   For example, in Patent Document 1, a vertical pipe is disposed in a sewage mass, an inflow pipe is connected from a side surface of the vertical pipe, and a valve body that closes the vertical pipe is moved up and down to thereby form a vacuum valve. The structure which opens and closes between vacuum sewage pipes is disclosed.

この構成によれば、汚水ますから出て行く深さを所望の深さに設定できるうえ、真空汚水管を簡単に汚水マスへ接続できる真空弁ユニットを提供できる。   According to this configuration, it is possible to provide a vacuum valve unit that can set the depth of the sewage mushroom to a desired depth and can easily connect the vacuum sewage pipe to the sewage mass.

特許第2805520号公報Japanese Patent No. 2805520

しかしながら、前記特許文献1の構成は、閉弁状態では大気圧と真空圧の差圧によって弁体が押されているため、弁体を人力で持ち上げることが困難になるうえ、開弁状態では弁体の落下を防止するストッパが必要であった。   However, since the valve body is pushed by the differential pressure between the atmospheric pressure and the vacuum pressure when the valve is closed, it is difficult to lift the valve body manually. A stopper to prevent the body from falling was necessary.

そこで、本発明は、容易に開弁することができるとともに落下防止用のストッパが不要な真空弁ユニットの仕切弁と、この真空弁ユニットの仕切弁を備える真空弁ユニットと、を提供することを目的としている。   Accordingly, the present invention provides a gate valve of a vacuum valve unit that can be easily opened and that does not require a stopper for preventing a drop, and a vacuum valve unit including the gate valve of the vacuum valve unit. It is aimed.

前記目的を達成するために、本発明の真空弁ユニットの仕切弁は、真空管路を塞ぐ弁体部と、前記弁体部が取り付けられた弁棒部と、前記真空管路の途中に設けた縦管部と、前記縦管部に取り付けられており前記弁棒部が挿通される挿通孔を有する弁蓋部と、を備える真空弁ユニットの仕切弁であって、前記弁蓋部の前記挿通孔には、雌ネジ溝が螺刻されるとともに、前記弁棒部の外周には、前記挿通孔に挿通される範囲の全長にわたって前記雌ネジ溝と螺合する雄ネジ溝が設けられている。   In order to achieve the above object, the gate valve of the vacuum valve unit of the present invention includes a valve body portion that closes the vacuum pipe line, a valve rod part to which the valve body part is attached, and a vertical valve provided in the middle of the vacuum pipe line. A gate valve of a vacuum valve unit comprising: a pipe part; and a valve lid part having an insertion hole that is attached to the vertical pipe part and through which the valve stem part is inserted, wherein the insertion hole of the valve lid part In addition, a female thread groove is threaded, and a male thread groove that engages with the female thread groove is provided on the outer periphery of the valve stem portion over the entire length of the range that is inserted into the insertion hole.

また、開弁状態で前記弁蓋部の下面と接する前記弁体部の上面には、前記弁棒部を囲むようにシール部材が設置されている構成とすることができる。   Moreover, it can be set as the structure by which the sealing member is installed in the upper surface of the said valve body part which contact | connects the lower surface of the said valve cover part in a valve open state so that the said valve stem part may be enclosed.

さらに、開弁状態で前記弁体部の上面と接する前記弁蓋部の下面には、前記弁棒部を挿通する挿通孔を囲むようにシール部材が設置されている構成とすることができる。   Furthermore, a seal member can be provided on the lower surface of the valve lid portion that is in contact with the upper surface of the valve body portion in a valve open state so as to surround an insertion hole through which the valve rod portion is inserted.

そして、本発明の真空弁ユニットは、上記したいずれかの真空弁ユニットの仕切弁を備えており、前記真空管路には、内周に沿って前記弁体部の挿通方向に対して傾斜した弁座部が設けられるとともに、前記弁体部には、前記弁座部に当接する傾斜した外周部を有するシール部材が配置されている。   And the vacuum valve unit of this invention is equipped with the gate valve of any of the above-mentioned vacuum valve units, and the said vacuum pipe line is a valve inclined with respect to the insertion direction of the said valve body part along inner periphery. A seat part is provided, and a seal member having an inclined outer peripheral part in contact with the valve seat part is disposed on the valve body part.

このように、本発明の真空弁ユニットの仕切弁は、真空管路を塞ぐ弁体部と、弁体部が取り付けられた弁棒部と、真空管路の途中に設けた縦管部と、縦管部に取り付けられており弁棒部が挿通される挿通孔を有する弁蓋部と、を備える真空弁ユニットの仕切弁であって、弁蓋部の挿通孔には、雌ネジ溝が螺刻されるとともに、弁棒部の外周には、挿通孔に挿通される範囲の全長にわたって雌ネジ溝と螺合する雄ネジ溝が設けられている。   As described above, the gate valve of the vacuum valve unit of the present invention includes a valve body part that closes the vacuum pipe line, a valve rod part to which the valve body part is attached, a vertical pipe part provided in the middle of the vacuum pipe line, and a vertical pipe And a valve lid portion having an insertion hole through which the valve stem portion is inserted, and a valve valve of the vacuum valve unit, and a female screw groove is screwed into the insertion hole of the valve lid portion. In addition, a male screw groove that is screwed into the female screw groove is provided on the outer periphery of the valve stem portion over the entire length of the range inserted through the insertion hole.

したがって、弁棒部が回転して弁体部を移動させることで、開弁や閉弁する際に必要な力を低減できるうえに、大気圧と真空圧の差圧が作用しても開弁状態を維持することができる。   Therefore, by rotating the valve stem and moving the valve body, the force required to open and close the valve can be reduced, and the valve can be opened even if a differential pressure between atmospheric pressure and vacuum pressure acts. The state can be maintained.

また、開弁状態で弁蓋部の下面と接する弁体部の上面には、弁棒部を囲むようにシール部材が設置されていることで、全開状態で弁蓋と弁棒の螺合箇所をシールできるうえに、エア漏れ音の有無によって全開状態を確認できる。   In addition, a sealing member is installed on the upper surface of the valve body portion that is in contact with the lower surface of the valve lid portion in the valve open state so as to surround the valve rod portion, so that the valve lid and the valve rod are screwed together in the fully opened state. Can be sealed, and the fully open state can be confirmed by the presence or absence of air leakage noise.

さらに、開弁状態で弁体部の上面と接する弁蓋部の下面には、弁棒部を挿通する挿通孔を囲むようにシール部材が設置されていることで、全開状態で弁蓋と弁棒の螺合箇所をシールできるうえに、エア漏れ音の有無によって全開状態を確認できる。   Furthermore, a seal member is provided on the lower surface of the valve lid portion that contacts the upper surface of the valve body portion in the valve open state so as to surround the insertion hole through which the valve rod portion is inserted, so that the valve lid and valve can be opened in the fully opened state. In addition to sealing the threaded part of the rod, the fully open state can be confirmed by the presence or absence of air leakage noise.

そして、本発明の真空弁ユニットは、上記したいずれかの真空弁ユニットの仕切弁を備えており、真空管路には、内周に沿って弁体部の挿通方向に対して傾斜した弁座部が設けられるとともに、弁体部には、弁座部に当接する傾斜した外周部を有するシール部材が配置されている。   The vacuum valve unit of the present invention includes the gate valve of any one of the above-described vacuum valve units, and the vacuum seat includes a valve seat portion that is inclined with respect to the insertion direction of the valve body portion along the inner periphery. And a seal member having an inclined outer peripheral portion that abuts against the valve seat portion is disposed in the valve body portion.

したがって、閉弁状態では弁座部とシール部材の外周部が当接するため、大気圧と真空圧の差圧によって両者が押しつけ合うことで、閉弁状態を維持することができる。   Accordingly, since the valve seat portion and the outer peripheral portion of the seal member are in contact with each other in the closed state, the valve closed state can be maintained by pressing the two together due to the differential pressure between the atmospheric pressure and the vacuum pressure.

実施例の真空弁ユニットの仕切弁を閉弁した状態の構成を説明する断面図である。It is sectional drawing explaining the structure of the state which closed the gate valve of the vacuum valve unit of an Example. 真空式下水道システムの全体構成を説明する説明図である。It is explanatory drawing explaining the whole structure of a vacuum type sewer system. 真空弁ユニットの構成を説明する説明図である。It is explanatory drawing explaining the structure of a vacuum valve unit. 弁体部の構成を説明する断面図である。(a)は全体図であり、(b)は(a)のA部の拡大図である。It is sectional drawing explaining the structure of a valve body part. (A) is a general view, (b) is an enlarged view of the A part of (a). 別実施例の弁蓋部の構成を説明する断面図である。(a)は全体図であり、(b)は(a)のA部の拡大図である。It is sectional drawing explaining the structure of the valve cover part of another Example. (A) is a general view, (b) is an enlarged view of the A part of (a). 実施例の真空弁ユニットの仕切弁を開弁した状態の構成を説明する断面図である。It is sectional drawing explaining the structure of the state which opened the gate valve of the vacuum valve unit of an Example.

以下、本発明の実施の形態について図面を参照して説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

まず、図2を用いて本発明の真空弁ユニットUを備える真空式下水道システムSの全体構成を説明する。   First, the whole structure of the vacuum-type sewer system S provided with the vacuum valve unit U of this invention is demonstrated using FIG.

本実施例の真空式下水道システムSでは、図2に示すように、家庭91や工場(不図示)などから排出された汚水は自然流下管路92を通じて真空弁ユニットUに流入する。   In the vacuum sewer system S of this embodiment, as shown in FIG. 2, sewage discharged from a home 91 or a factory (not shown) flows into the vacuum valve unit U through a natural flow down pipe 92.

つづいて、この真空弁ユニットUに流入した汚水は、真空ステーション96で発生された真空圧(大気圧よりも低くなった圧力)によって、真空下水管路としての流下部93やリフト部94を逐次通過するように気液混送流となって搬送される。   Subsequently, the sewage that has flowed into the vacuum valve unit U passes through the lower part 93 and the lift part 94 as vacuum sewage pipes sequentially by the vacuum pressure generated in the vacuum station 96 (pressure lower than the atmospheric pressure). It is conveyed as a gas-liquid mixed flow so as to pass.

この真空ポンプ方式の真空ステーション96は、真空ポンプ96aにより密閉したタンク96b内の空気を吸引することで真空圧を発生させるもので、真空下水管内部を0.4気圧程度の真空状態に保持することで、各家庭などから汚水を吸引して集めている。その後、汚水は圧送ポンプ96cによって下水処理場などに送られる。   This vacuum pump type vacuum station 96 generates vacuum pressure by sucking air in a sealed tank 96b by a vacuum pump 96a, and keeps the inside of the vacuum sewage pipe in a vacuum state of about 0.4 atm. Therefore, the sewage is sucked and collected from each household. Thereafter, the sewage is sent to a sewage treatment plant or the like by a pressure pump 96c.

なお、真空ステーション96としては、小規模な施設などでは、上記した真空ポンプ方式ではなく、エジェクタ方式を用いることもできる。   The vacuum station 96 may be an ejector system instead of the above-described vacuum pump system in a small-scale facility or the like.

そして、上記の真空式下水道システムSは、真空と大気圧との差圧によって汚水を強制的に収集・搬送するシステムであり、真空下水管路の埋設深度が浅い、埋設物の回避が容易、真空弁付き汚水ますに電源が不要、汚水の漏れがない、管路の清掃が不要、スカムが発生しにくい、などの特徴を備えている。   The above-mentioned vacuum sewer system S is a system that forcibly collects and conveys sewage by the differential pressure between vacuum and atmospheric pressure, and the embedding depth of the vacuum sewage pipe is shallow, and it is easy to avoid buried objects. Sewage with vacuum valve has features such as no power supply, no leakage of sewage, no need to clean pipes, and less scum.

真空弁ユニットUは、図3に示すように、円筒状の本体50内に、汚水を流入させる流入管51と、流入した汚水を受容して一時的に貯留する貯留槽52と、貯留された汚水に挿入されて真空排出管56に汚水を取り込む吸込管53と、貯留された汚水に挿入されて貯留槽52内の液位の変動を検知する水位検知管54と、真空圧によって真空下水管路に吸引された汚水の後に空気を補う通気管55と、真空下水管路に接続されて真空状態にされた真空排出管56と、真空弁2に不具合が生じた場合に開弁して汚水を吸引する緊急用のバイパス弁57と、真空排出管56と吸込管53との間に設けられる真空弁2と、この水位検知管54内の液位変動に伴って生じる圧力変動によって真空弁2を開閉する真空弁コントローラ3と、メンテナンスの際に真空圧が作用しないように閉弁する仕切弁4と、を備えて地中に埋設されている。   As shown in FIG. 3, the vacuum valve unit U is stored in a cylindrical main body 50, an inflow pipe 51 for allowing sewage to flow in, a storage tank 52 for receiving and temporarily storing the sewage that has flowed in, and the vacuum valve unit U. A suction pipe 53 that is inserted into the sewage and takes the sewage into the vacuum discharge pipe 56, a water level detection pipe 54 that is inserted into the stored sewage and detects a change in the liquid level in the storage tank 52, and a vacuum sewage pipe by vacuum pressure A vent pipe 55 that supplements air after the sewage sucked into the passage, a vacuum exhaust pipe 56 connected to the vacuum sewage pipe and evacuated, and a sewage that opens when a vacuum valve 2 malfunctions. , The vacuum valve 2 provided between the vacuum exhaust pipe 56 and the suction pipe 53, and the vacuum valve 2 due to the pressure fluctuation caused by the liquid level fluctuation in the water level detection pipe 54. Vacuum valve controller 3 to open and close Vacuum is buried in the ground comprises a, the gate valve 4 is closed so as not to act upon.

この真空弁2は、真空弁コントローラ3によって開閉されることで、水位が上昇すると吸込管53に真空圧を導入して貯留槽52内の汚水などを吸い込み、水位が下降すると貯留槽52内に汚水を貯留する。   The vacuum valve 2 is opened and closed by the vacuum valve controller 3 so that when the water level rises, vacuum pressure is introduced into the suction pipe 53 to suck in sewage and the like in the storage tank 52, and when the water level falls, the vacuum valve 2 enters the storage tank 52. Store sewage.

また、真空弁コントローラ3は、水位検知管54内の水位上昇を検知することで、水位が上昇すると真空弁2を開き、水位が下降すると真空弁2を閉じるように動作する。   Further, the vacuum valve controller 3 detects a rise in the water level in the water level detection pipe 54, and operates to open the vacuum valve 2 when the water level rises and close the vacuum valve 2 when the water level falls.

そして、本実施例の仕切弁4は、図1に示すように、真空管路を塞ぐ弁体部41と、弁体部41が取り付けられた外ネジ式の弁棒部42と、真空管路の途中に設けた縦管部43と、縦管部43に横から合流する横管部46と、縦管部43に取り付けられており弁棒部42が挿通される挿通孔44aを有する弁蓋部44と、弁棒部42を手動で回転させるハンドル部45と、を備えている。   As shown in FIG. 1, the gate valve 4 of the present embodiment includes a valve body portion 41 that closes the vacuum pipe line, an externally threaded valve rod part 42 to which the valve body part 41 is attached, and a halfway of the vacuum pipe line. A vertical tube portion 43 provided in the horizontal tube portion, a horizontal tube portion 46 joined to the vertical tube portion 43 from the side, and a valve lid portion 44 having an insertion hole 44a attached to the vertical tube portion 43 and through which the valve stem portion 42 is inserted. And a handle portion 45 for manually rotating the valve stem portion 42.

この弁体部41は、ステンレスなどの金属によって形成される短円柱状の本体41aと、本体41aの下面の嵌合凹部41fに嵌め合わされるシール部材41bと、シール部材41bを下側から押え付ける押え板41cと、弁棒部42の先端に螺合するナット41dと、を備えている。   The valve body 41 includes a short cylindrical main body 41a formed of a metal such as stainless steel, a seal member 41b fitted into a fitting recess 41f on the lower surface of the main body 41a, and presses the seal member 41b from below. A presser plate 41c and a nut 41d screwed to the tip of the valve stem portion 42 are provided.

この本体41aには、図4(a)に示すように、中央に弁棒部42を挿通するための挿通孔41e、下面にシール部材41bを嵌合する浅い嵌合凹部41f、上面にOリング62を勘合する円形溝41g、が形成されている。   As shown in FIG. 4A, the main body 41a has an insertion hole 41e for inserting the valve stem portion 42 in the center, a shallow fitting recess 41f for fitting the seal member 41b on the lower surface, and an O-ring on the upper surface. A circular groove 41g for fitting 62 is formed.

また、本実施例では、この円形溝41gは、弁蓋部44に対向しており開弁(全開)状態で弁蓋部44の下面と接する上面において、弁棒部42を挿通する挿通孔41eを囲むように形成されている。   In this embodiment, the circular groove 41g is opposed to the valve lid portion 44, and the insertion hole 41e through which the valve stem portion 42 is inserted on the upper surface that is in contact with the lower surface of the valve lid portion 44 when the valve is open (fully open). Is formed so as to surround.

さらに、この円形溝41gには、開弁(全開)状態で弁蓋部44の下面と密着して真空管路の真空圧を保持するために弾性変形するOリング62が押し込まれており、その上部は円形溝41gから突出した状態となっている(図1参照)。   Furthermore, an O-ring 62 that is elastically deformed to hold the vacuum pressure of the vacuum pipe line in close contact with the lower surface of the valve lid portion 44 in the valve open (fully open) state is pushed into the circular groove 41g. Is in a state of protruding from the circular groove 41g (see FIG. 1).

なお、この円形溝41gの断面は、図4(b)に示すように、角を面取りした面取部41hと、直線部41iと、Oリング62の変形用の余裕を与えるテーパ部41jと、円弧部41kと、Oリング62に反力を与える底面部41lと、によって構成されており、押し込まれて嵌合したOリング62が脱落しないようになっている。   4B, the circular groove 41g has a chamfered chamfered portion 41h, a straight portion 41i, and a tapered portion 41j that provides a margin for deformation of the O-ring 62. The arc portion 41k and a bottom surface portion 41l that applies a reaction force to the O-ring 62 are configured so that the O-ring 62 that is pushed in and fitted does not fall off.

すなわち、円形溝41gの対向する直線部41iの間の幅をOリング62の直径よりも狭く構成しておくことで、一旦嵌合されたOリング62が抜け出さないように構成されている。   That is, the O-ring 62 once fitted is configured not to come out by configuring the width between the opposing straight portions 41i of the circular groove 41g to be narrower than the diameter of the O-ring 62.

そして、シール部材41bは、EPDMなどの合成ゴムによって円盤状に形成されるもので、傾斜した弁座部43aに隙間なく当接するように、外周部には傾斜面が設けられて略台形状の断面形状を呈している。   The seal member 41b is formed in a disc shape with a synthetic rubber such as EPDM, and has an inclined surface on the outer peripheral portion so as to contact the inclined valve seat portion 43a without a gap. It has a cross-sectional shape.

また、弁棒部42は、ステンレスなどの金属によって棒状に形成されるもので、ハンドル部45を固定する六角部42a、外周面にネジ溝が螺刻された軸部42b、弁体部41が突き当たるストッパ部42c、を備えている。   The valve stem portion 42 is formed in a rod shape by a metal such as stainless steel, and includes a hexagonal portion 42a for fixing the handle portion 45, a shaft portion 42b having a thread groove threaded on the outer peripheral surface, and a valve body portion 41. The stopper part 42c which abuts is provided.

そして、本実施例では、この軸部42bに、弁体部41の全開位置から全閉位置に対応して、挿通孔44aに挿通される範囲の略全長にわたって雌ネジ溝と螺合する雄ネジ溝が螺刻されている。なお、弁棒部42の先端近傍の外周にはOリング63が嵌め込まれており、弁体部41の挿通孔41eの内周面との間が密封されている。   In this embodiment, the male screw threaded into the shaft portion 42b is engaged with the female screw groove over substantially the entire length of the range through which the valve body portion 41 is inserted into the insertion hole 44a corresponding to the fully open position. The groove is threaded. An O-ring 63 is fitted on the outer periphery in the vicinity of the tip of the valve stem portion 42, and the space between the inner peripheral surface of the insertion hole 41 e of the valve body portion 41 is sealed.

さらに、縦管部43は、ポリエチレンなどの合成樹脂によって円筒状に形成されるもので、真空管路である真空排出管56の途中に、真空管路を構成する一部として鉛直に配置されており、その上部は真空管路から突出している。そして、この上方に突出した部分の内周には雌ネジ溝が形成されて弁蓋部44が螺合されている。   Further, the vertical pipe portion 43 is formed in a cylindrical shape by a synthetic resin such as polyethylene, and is arranged vertically as a part constituting the vacuum pipe in the middle of the vacuum discharge pipe 56 which is a vacuum pipe, Its upper part protrudes from the vacuum line. A female screw groove is formed on the inner periphery of the upward projecting portion, and the valve lid portion 44 is screwed together.

加えて、この縦管部43には、側方から真空管路としての横管部46が合流しており、この合流箇所のすぐ下流側(真空ポンプ側)に、内周に沿って弁体部41の挿通方向(鉛直方向)に対して傾斜した円環状の弁座部43aが設けられている。   In addition, a horizontal pipe portion 46 serving as a vacuum pipe line is joined to the vertical pipe portion 43 from the side, and a valve body portion is provided along the inner circumference immediately downstream (vacuum pump side) of the joining portion. An annular valve seat 43a that is inclined with respect to the insertion direction (vertical direction) 41 is provided.

そして、弁蓋部44は、ステンレスなどの金属によって短円柱状に形成されるもので、中央には弁棒部42を挿通する挿通孔44aが形成されており、この挿通孔44aには弁棒部42の雄ネジ溝と螺合する雌ネジ溝が螺刻されている。   The valve lid portion 44 is formed of a metal such as stainless steel in a short columnar shape, and an insertion hole 44a through which the valve rod portion 42 is inserted is formed at the center, and the valve rod is inserted into the insertion hole 44a. A female screw groove that is screwed into the male screw groove of the portion 42 is threaded.

加えて、この弁蓋部44の外周には縦管部43の突出した部分と螺合する雄ネジ溝が形成されているとともに、弁蓋部44と縦管部43の間を密封するOリング61を嵌合する溝が形成されている。   In addition, a male thread groove is formed on the outer periphery of the valve lid portion 44 to be screwed with the protruding portion of the vertical tube portion 43, and an O-ring for sealing between the valve lid portion 44 and the vertical tube portion 43. A groove for fitting 61 is formed.

なお、このように合成樹脂製の縦管部43に金属製の弁蓋部44を螺合させても、大気圧と真空圧の差圧によって押し込む方向(締め付ける方向)の力が作用するため、弁蓋部44が緩んでしまうことはない。   Even if the metal valve lid portion 44 is screwed into the synthetic resin vertical tube portion 43 in this manner, a force in the direction of pressing (tightening direction) acts due to the differential pressure between the atmospheric pressure and the vacuum pressure. The valve lid portion 44 is never loosened.

そして、本実施例では、上記したように弁体部41に円形溝41gを設けてOリング62を嵌合させる例について説明したが、これに限定されるものではなく、弁蓋部44に円形溝44gを設けてOリング62を嵌合させてもよい。   In the present embodiment, as described above, the example in which the circular groove 41g is provided in the valve body portion 41 and the O-ring 62 is fitted is described. However, the present invention is not limited to this, and the valve lid portion 44 has a circular shape. A groove 44g may be provided to fit the O-ring 62.

すなわち、図5(a)に示すように、弁蓋部44には、弁体部41に対向しており開弁(全開)状態で弁体部41の上面と接する下面に、挿通孔44aを囲むように円形溝44gが形成され、この円形溝44gに弾性変形するOリングが設置されていてもよい。   That is, as shown in FIG. 5 (a), the valve lid portion 44 has an insertion hole 44a on the lower surface facing the valve body portion 41 and in contact with the upper surface of the valve body portion 41 in the valve open (fully open) state. A circular groove 44g may be formed so as to surround, and an O-ring that is elastically deformed may be installed in the circular groove 44g.

この場合には、この円形溝44gの断面は、図5(b)に示すように、上記円形溝41gと同様に、面取部44h、直線部44i、テーパ部44j、円弧部44k、底面部44l、によって構成されることが好ましい。   In this case, as shown in FIG. 5B, the circular groove 44g has a cross-section similar to the circular groove 41g, such as a chamfered portion 44h, a straight portion 44i, a tapered portion 44j, an arc portion 44k, and a bottom surface portion. 44l.

次に、本実施例の真空弁ユニットUの仕切弁4の作用について、図1,6を用いて説明する。   Next, the operation of the gate valve 4 of the vacuum valve unit U of the present embodiment will be described with reference to FIGS.

まず、常時となる開弁(全開)状態について、図6を用いて説明する。真空弁2が故障等していない通常の状態では仕切弁4は開弁状態となっている。   First, the valve open (full open) state that is always constant will be described with reference to FIG. In a normal state where the vacuum valve 2 is not broken or the like, the gate valve 4 is open.

この開弁状態では、ハンドル部45を回転させて弁棒部42が上げられており、この弁棒部42に固定されている弁体部41も、Oリング62が弁蓋部44に接する位置まで上げられている。   In this valve open state, the handle 45 is rotated to raise the valve stem 42, and the valve body 41 fixed to the valve stem 42 is also in a position where the O-ring 62 contacts the valve lid 44. Has been raised.

すなわち、この開弁状態では、弁体部41の上面から突出するように設置されているOリング62の上部は、弁蓋部44の下面に接して密着しつつ、押し潰されて弾性変形した状態となっている。   That is, in this valve open state, the upper part of the O-ring 62 installed so as to protrude from the upper surface of the valve body 41 is in contact with the lower surface of the valve lid 44 and is crushed and elastically deformed. It is in a state.

したがって、弁棒部42の雄ネジ溝と弁蓋部44の雌ネジ溝とは、Oリング62の弾性反力と、大気圧と真空圧の差圧と、の合力によって、互いに押し付け合って回転しないようになっている。   Therefore, the male screw groove of the valve stem portion 42 and the female screw groove of the valve lid portion 44 rotate by being pressed against each other by the resultant force of the elastic reaction force of the O-ring 62 and the differential pressure between the atmospheric pressure and the vacuum pressure. It is supposed not to.

次に、メンテナンス時となる閉弁(全閉)状態について、図1を用いて説明する。メンテナンス時には、真空弁2を取外す場合があるが、真空ステーション96に負担をかけないように、真空弁2を取り外した状態でも真空圧を保持する必要がある。そのため、真空弁2を取外す前に、真空弁2よりも真空ステーション96に近い側で真空圧を遮断するために仕切弁4を閉弁させる。   Next, the closed valve state (fully closed) during maintenance will be described with reference to FIG. During maintenance, the vacuum valve 2 may be removed, but it is necessary to maintain the vacuum pressure even when the vacuum valve 2 is removed so as not to place a burden on the vacuum station 96. Therefore, before removing the vacuum valve 2, the gate valve 4 is closed to shut off the vacuum pressure on the side closer to the vacuum station 96 than the vacuum valve 2.

この閉弁状態では、ハンドル部45を回転させて弁棒部42が下げられており、この弁棒部42に固定されている弁体部41も、シール部材41bが弁座部43aに接する位置まで下げられている。   In this closed state, the handle 45 is rotated to lower the valve stem 42, and the valve body 41 fixed to the valve stem 42 is also in a position where the seal member 41b contacts the valve seat 43a. Has been lowered.

すなわち、この閉弁状態では、弁体部41の下面に設置されているシール部材41bの傾斜面は、弁座部43aの傾斜面と接して密着した状態となって真空圧を遮断している。   That is, in this valve-closed state, the inclined surface of the seal member 41b installed on the lower surface of the valve body portion 41 is in contact with and in close contact with the inclined surface of the valve seat portion 43a to block the vacuum pressure. .

したがって、シール部材41bは、弁座部43aの方向に、大気圧と真空圧の差圧によって押し付けられるが、シール部材41bは押え板41cで支えられているため押し付けあった状態のまま保持される。   Therefore, the seal member 41b is pressed in the direction of the valve seat portion 43a by the differential pressure between the atmospheric pressure and the vacuum pressure, but the seal member 41b is held in a pressed state because it is supported by the presser plate 41c. .

次に、本実施例の真空弁ユニットUの仕切弁4の効果を列挙して説明する。   Next, effects of the gate valve 4 of the vacuum valve unit U of this embodiment will be listed and described.

(1)このように、本実施例の真空弁ユニットUの仕切弁4は、真空管路である真空排出管56を塞ぐ弁体部41と、この弁体部41が取り付けられた弁棒部42と、真空排出管56の途中に設けた縦管部43と、縦管部43に取り付けられており弁棒部42が挿通される挿通孔44aを有する弁蓋部44と、を備える真空弁ユニットUの仕切弁4である。   (1) Thus, the gate valve 4 of the vacuum valve unit U of the present embodiment includes a valve body portion 41 that closes the vacuum exhaust pipe 56 that is a vacuum pipe, and a valve rod portion 42 to which the valve body portion 41 is attached. A vacuum valve unit comprising: a vertical pipe portion 43 provided in the middle of the vacuum exhaust pipe 56; and a valve lid portion 44 attached to the vertical pipe portion 43 and having an insertion hole 44a through which the valve rod portion 42 is inserted. U gate valve 4.

したがって、メンテナンスの際などには、弁体部41が真空排出管56を塞ぐことによって、仕切弁4の位置で真空圧を遮断するため、真空ステーション96の真空ポンプ96aに負担をかけることがなくなる。   Therefore, during maintenance or the like, the valve body 41 closes the vacuum discharge pipe 56 to shut off the vacuum pressure at the position of the gate valve 4, so that the vacuum pump 96 a of the vacuum station 96 is not burdened. .

そして、弁蓋部44の挿通孔44aには、雌ネジ溝が螺刻されるとともに、弁棒部42の外周には、挿通孔44aに挿通される範囲の全長にわたって雌ネジ溝と螺合する雄ネジ溝が設けられている。   A female screw groove is threaded into the insertion hole 44a of the valve lid portion 44, and the outer periphery of the valve stem portion 42 is screwed into the female screw groove over the entire length of the range inserted through the insertion hole 44a. A male thread groove is provided.

したがって、ハンドル部45を手動で回転させて、弁棒部42が弁蓋部44に対して回転して弁体部41を上下に移動させることで、開弁や閉弁する際に必要な力を低減できるうえに、大気圧と真空圧の差圧が作用しても開弁状態を維持することができる。   Accordingly, the handle portion 45 is manually rotated, and the valve stem portion 42 is rotated with respect to the valve lid portion 44 to move the valve body portion 41 up and down. In addition, the valve open state can be maintained even when a differential pressure between the atmospheric pressure and the vacuum pressure acts.

つまり、閉弁状態から開弁する際には、大気圧と真空圧の差圧によって弁体部41が下方に押されているため、弁体部41を人力によって直上に引き上げることは困難である。   That is, when the valve is opened from the closed state, the valve body 41 is pushed downward by the differential pressure between the atmospheric pressure and the vacuum pressure, and therefore it is difficult to pull the valve body 41 up directly by human power. .

これに対して、本実施例に示したように弁棒部42と弁蓋部44が螺合するように構成されていれば、ハンドル部45を回転させることによって、少ない力で弁体部41を引き上げることができる。   On the other hand, if the valve stem portion 42 and the valve lid portion 44 are configured to be screwed together as shown in the present embodiment, the valve body portion 41 is rotated with a small force by rotating the handle portion 45. Can be raised.

さらに、開弁状態では、弁棒部42の雄ネジ溝と弁蓋部44の雌ネジ溝とが互いに押し付け合うことで、弁棒部42及び弁体部41が下方に移動することを防止できる。このため、落下防止用の半割れ状のストッパ部材などは不用になる。   Furthermore, in the valve open state, the male screw groove of the valve stem portion 42 and the female screw groove of the valve lid portion 44 are pressed against each other, thereby preventing the valve stem portion 42 and the valve body portion 41 from moving downward. . For this reason, a half-cracked stopper member for preventing the fall is unnecessary.

加えて、弁棒部42の略全長に雄ネジ溝を設け、この弁棒部42ではシールしないように構成すれば、弁棒部42をOリングでシールすることで弁棒部42が動きにくくなったり、突然に動いて弁体部41などを破損したりすることもない。   In addition, if a male thread groove is provided in the substantially entire length of the valve stem portion 42 so that the valve stem portion 42 is not sealed, the valve stem portion 42 is sealed with an O-ring so that the valve stem portion 42 hardly moves. And the valve body 41 or the like is not damaged due to sudden movement.

そして、本実施例の仕切弁4は、主として、弁体部41、弁棒部42、縦管部43及び弁蓋部44によって構成されることで、全体の構成が単純化されるとともに全体の大きさを小型化できるため、仕切弁4を真空弁ユニットUの内部に配置することができる。   And the gate valve 4 of a present Example is mainly comprised by the valve body part 41, the valve rod part 42, the vertical pipe part 43, and the valve cover part 44, and while the whole structure is simplified, the whole structure is simplified. Since the size can be reduced, the gate valve 4 can be disposed inside the vacuum valve unit U.

(2)また、開弁状態で弁蓋部44の下面と接する弁体部41の上面には、弁棒部42を囲むようにシール部材としてのOリング62が設置されていることで、全開状態で弁蓋部44と弁棒部42の螺合箇所をシールできるうえに、エア漏れ音の有無によって全開状態を確認できる。   (2) In addition, an O-ring 62 as a seal member is installed on the upper surface of the valve body portion 41 that is in contact with the lower surface of the valve lid portion 44 in a valve-opened state so as to surround the valve rod portion 42, so that it is fully opened. In addition to being able to seal the screwed portion between the valve lid portion 44 and the valve stem portion 42 in the state, the fully opened state can be confirmed by the presence or absence of air leakage noise.

つまり、弁棒部42の外周に雄ネジ溝を螺刻すると、弁棒部42の外周部分で真空圧を遮断することは困難となるが、弁体部41の上面のOリング62が弁蓋部44の下面と密着することで真空圧を遮断できる。   That is, if a male screw groove is screwed on the outer periphery of the valve stem portion 42, it is difficult to shut off the vacuum pressure at the outer peripheral portion of the valve stem portion 42, but the O-ring 62 on the upper surface of the valve body portion 41 has a valve lid. The vacuum pressure can be cut off by being in close contact with the lower surface of the portion 44.

加えて、Oリング62が弁蓋部44の下面と密着しておらずに隙間が生じている場合には、隙間から空気を吸い込む音が生じるため、しっかりと密着しているかどうか確認することができる。   In addition, when the O-ring 62 is not in close contact with the lower surface of the valve lid portion 44 and a gap is formed, a sound for sucking air is generated from the gap. it can.

しかも、この場合、Oリング62は弁棒部42に対して摺動する部位を有しないため、弁棒部42との摩擦によって磨耗することもなく、Oリング62の耐久性が向上する。   In addition, in this case, since the O-ring 62 does not have a portion that slides with respect to the valve stem portion 42, the O-ring 62 is not worn by friction with the valve stem portion 42, and the durability of the O-ring 62 is improved.

(3)同様に、開弁状態で弁体部41の上面と接する弁蓋部44の下面には、弁棒部42を挿通する挿通孔44aを囲むようにOリング62が設置されていることで、全開状態で弁蓋部44と弁棒部42の螺合箇所をシールできるうえに、エア漏れ音の有無によって全開状態を確認できる。   (3) Similarly, an O-ring 62 is installed on the lower surface of the valve lid portion 44 that is in contact with the upper surface of the valve body portion 41 in the valve open state so as to surround the insertion hole 44a through which the valve rod portion 42 is inserted. Thus, the screwed portion of the valve lid portion 44 and the valve stem portion 42 can be sealed in the fully opened state, and the fully opened state can be confirmed by the presence or absence of air leakage noise.

つまり、弁棒部42の外周に雄ネジ溝を螺刻すると、弁棒部42の外周部分で真空圧を遮断することは困難となるが、弁蓋部44の下面のシール部材が弁体部41の上面と密着することで真空圧を遮断できる。   That is, when a male screw groove is screwed on the outer periphery of the valve stem portion 42, it is difficult to shut off the vacuum pressure at the outer peripheral portion of the valve stem portion 42, but the seal member on the lower surface of the valve lid portion 44 serves as the valve body portion. By adhering to the upper surface of 41, the vacuum pressure can be cut off.

加えて、Oリング62が弁体部41の上面と密着しておらずに隙間が生じている場合には、隙間から空気を吸い込む音が生じるため、しっかりと密着しているかどうか確認することができる。   In addition, when the O-ring 62 is not in close contact with the upper surface of the valve body 41 and a gap is formed, a sound is generated to suck air from the gap, so it is possible to confirm whether or not the O-ring 62 is in close contact. it can.

(4)そして、本実施例の真空弁ユニットUは、上記したいずれかの真空弁ユニットUの仕切弁4を備えており、真空管路である真空排出管56の縦管部43には、内周に沿って弁体部41の挿通方向に対して傾斜した弁座部43aが設けられるとともに、弁体部41には、弁座部43aに当接する傾斜した外周部を有するシール部材41bが配置されている。   (4) The vacuum valve unit U of the present embodiment includes the gate valve 4 of any of the vacuum valve units U described above, and the vertical pipe portion 43 of the vacuum exhaust pipe 56 that is a vacuum pipe line includes A valve seat 43a that is inclined with respect to the insertion direction of the valve body 41 along the circumference is provided, and a seal member 41b having an inclined outer peripheral portion that contacts the valve seat 43a is disposed on the valve body 41. Has been.

したがって、閉弁状態では弁座部43aとシール部材41bの外周部が当接するため、大気圧と真空圧の差圧によって両者が押しつけ合うことで、閉弁状態を維持することができる。   Accordingly, since the valve seat portion 43a and the outer peripheral portion of the seal member 41b are in contact with each other in the valve closed state, the valve closed state can be maintained by pressing them together due to the differential pressure between the atmospheric pressure and the vacuum pressure.

すなわち、シール部材41bと弁座部43aとは傾斜面が対向しており、真空圧は弁を閉じる方向に作用するため、シール部材41bと弁座部43aが当接した状態が保持されることとなる。   That is, the seal member 41b and the valve seat portion 43a are inclined to face each other, and the vacuum pressure acts in the direction of closing the valve, so that the seal member 41b and the valve seat portion 43a are kept in contact with each other. It becomes.

加えて、このように縦管部43を設けることで、真空弁ユニットUを浅い位置に埋設しても、真空弁ユニットUから出て行く真空排出管56の位置を深い位置に設定できるようになるため、真空管路の土被りを確保できる。   In addition, by providing the vertical pipe portion 43 in this way, the position of the vacuum exhaust pipe 56 exiting from the vacuum valve unit U can be set to a deep position even if the vacuum valve unit U is buried in a shallow position. Therefore, the earth covering of the vacuum pipe line can be secured.

以上、図面を参照して、本発明の実施例を詳述してきたが、具体的な構成は、この実施例に限らず、本発明の要旨を逸脱しない程度の設計的変更は、本発明に含まれる。   The embodiment of the present invention has been described in detail with reference to the drawings, but the specific configuration is not limited to this embodiment, and design changes that do not depart from the gist of the present invention are not limited to the present invention. included.

例えば、前記実施例では、弁体部41のシール部材41bの外周部と弁座部43aが傾斜している場合について説明したが、これに限定されるものではなく、弁体部41と弁座部43aとが突き当たって移動しないような構成であればよい。   For example, in the above-described embodiment, the case where the outer peripheral portion of the seal member 41b of the valve body 41 and the valve seat 43a are inclined has been described. However, the present invention is not limited to this, and the valve body 41 and the valve seat are not limited thereto. Any structure may be used as long as it does not move by hitting the portion 43a.

さらに、前記実施例では、弁体部41は本体41a、シール部材41b、押え板41c及びナット41dなどによって構成される場合について説明したが、これに限定されるものではなく、全体が合成ゴムによって構成されていてもよい。   Furthermore, in the said Example, although the valve body part 41 demonstrated the case where it comprised by the main body 41a, the sealing member 41b, the pressing board 41c, nut 41d, etc., it is not limited to this, The whole is made of synthetic rubber. It may be configured.

U 真空弁ユニット
2 真空弁
3 真空弁コントローラ
4 仕切弁
41 弁体部
41a 本体
41b シール部材
41e 挿通孔
41g 円形溝
42 弁棒部
42b 軸部
43 縦管部
43a 弁座部
44 弁蓋部
44a 挿通孔
44g 円形溝
50 本体
51 流入管
52 貯留槽
53 吸込管
54 水位検知管
55 通気管
56 真空排出管(真空管路)
62 Oリング(シール部材)
U Vacuum valve unit 2 Vacuum valve 3 Vacuum valve controller 4 Gate valve 41 Valve body part 41a Main body 41b Seal member 41e Insertion hole 41g Circular groove 42 Valve rod part 42b Shaft part 43 Vertical pipe part 43a Valve seat part 44 Valve cover part 44a Insertion Hole 44g Circular groove 50 Main body 51 Inflow pipe 52 Reservoir tank 53 Suction pipe 54 Water level detection pipe 55 Ventilation pipe 56 Vacuum exhaust pipe (vacuum line)
62 O-ring (seal member)

Claims (4)

真空管路を塞ぐ弁体部と、前記弁体部が取り付けられた弁棒部と、前記真空管路の途中に設けた縦管部と、前記縦管部に取り付けられており前記弁棒部が挿通される挿通孔を有する弁蓋部と、を備える真空弁ユニットの仕切弁であって、
前記弁蓋部の前記挿通孔には、雌ネジ溝が螺刻されるとともに、前記弁棒部の外周には、前記挿通孔に挿通される範囲の全長にわたって前記雌ネジ溝と螺合する雄ネジ溝が設けられることを特徴とする真空弁ユニットの仕切弁。
A valve body part that closes the vacuum pipe line, a valve rod part to which the valve body part is attached, a vertical pipe part provided in the middle of the vacuum pipe line, and a valve pipe part that is attached to the vertical pipe part and is inserted therethrough A valve valve portion having an insertion hole, and a gate valve of a vacuum valve unit comprising:
A female screw groove is threaded into the insertion hole of the valve lid portion, and a male screw groove is formed on the outer periphery of the valve stem portion over the entire length of the range inserted through the insertion hole. A gate valve of a vacuum valve unit, wherein a thread groove is provided.
開弁状態で前記弁蓋部の下面と接する前記弁体部の上面には、前記弁棒部を囲むようにシール部材が設置されていることを特徴とする請求項1に記載の真空弁ユニットの仕切弁。   2. The vacuum valve unit according to claim 1, wherein a seal member is provided on an upper surface of the valve body portion that is in contact with a lower surface of the valve lid portion in a valve open state so as to surround the valve rod portion. Gate valve. 開弁状態で前記弁体部の上面と接する前記弁蓋部の下面には、前記弁棒部を挿通する挿通孔を囲むようにシール部材が設置されていることを特徴とする請求項1に記載の真空弁ユニットの仕切弁。   The sealing member is installed in the lower surface of the said valve cover part which contact | connects the upper surface of the said valve body part in a valve opening state so that the penetration hole which penetrates the said valve stem part may be enclosed. A gate valve of the vacuum valve unit described. 請求項1乃至請求項3のいずれか一項に記載の真空弁ユニットの仕切弁を備えており、前記真空管路には、内周に沿って前記弁体部の挿通方向に対して傾斜した弁座部が設けられるとともに、前記弁体部には、前記弁座部に当接する傾斜した外周部を有するシール部材が配置されることを特徴とする真空弁ユニット。   A gate valve of the vacuum valve unit according to any one of claims 1 to 3, wherein the vacuum pipe is inclined with respect to the insertion direction of the valve body portion along an inner periphery. A vacuum valve unit characterized in that a seat member is provided, and a seal member having an inclined outer peripheral portion that comes into contact with the valve seat portion is disposed on the valve body portion.
JP2010031060A 2010-02-16 2010-02-16 Sluice valve for vacuum valve unit and vacuum valve unit Pending JP2011168962A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103470786A (en) * 2013-09-11 2013-12-25 太仓康茂电子有限公司 Vacuum baffle valve
CN110809685A (en) * 2017-06-30 2020-02-18 Vat控股公司 Vacuum valve with acoustic sensor
CN113623181A (en) * 2021-07-23 2021-11-09 张家港中集圣达因低温装备有限公司 Vacuum pumping device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS614069U (en) * 1984-06-13 1986-01-11 日立金属株式会社 Valve disc with reverse seat
JPS6315383U (en) * 1986-07-15 1988-02-01
JPH03247827A (en) * 1990-02-23 1991-11-06 Ebara Corp Gate valve for cesspool with vacuum valve
JPH073866A (en) * 1993-06-15 1995-01-06 Aron Kasei Co Ltd Cut-off valve of vacuum valve used for vacuum type sewerage system
JPH07229191A (en) * 1994-02-18 1995-08-29 Inax Corp Inverted siphon of vacuum type sewage
JPH1136424A (en) * 1997-07-24 1999-02-09 Ebara Corp Device for forcibly operating vacuum valve of vacuum sewer system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS614069U (en) * 1984-06-13 1986-01-11 日立金属株式会社 Valve disc with reverse seat
JPS6315383U (en) * 1986-07-15 1988-02-01
JPH03247827A (en) * 1990-02-23 1991-11-06 Ebara Corp Gate valve for cesspool with vacuum valve
JPH073866A (en) * 1993-06-15 1995-01-06 Aron Kasei Co Ltd Cut-off valve of vacuum valve used for vacuum type sewerage system
JPH07229191A (en) * 1994-02-18 1995-08-29 Inax Corp Inverted siphon of vacuum type sewage
JPH1136424A (en) * 1997-07-24 1999-02-09 Ebara Corp Device for forcibly operating vacuum valve of vacuum sewer system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103470786A (en) * 2013-09-11 2013-12-25 太仓康茂电子有限公司 Vacuum baffle valve
CN110809685A (en) * 2017-06-30 2020-02-18 Vat控股公司 Vacuum valve with acoustic sensor
CN110809685B (en) * 2017-06-30 2022-01-11 Vat控股公司 Vacuum valve
US11460125B2 (en) 2017-06-30 2022-10-04 Vat Holding Ag Vacuum valve with acoustic sensor
CN113623181A (en) * 2021-07-23 2021-11-09 张家港中集圣达因低温装备有限公司 Vacuum pumping device

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