JP2011145071A - Flow monitor and functional liquid supply device equipped with this - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flow monitor which enables automatic sensing of a parameter equivalent to a flow rate of a liquid, and a functional liquid supply device equipped with the monitor. <P>SOLUTION: The flow monitor has: a case 15 having an inflow port 13 and an outflow port 14; a rotor 12 held in the case 15; a detection object disk (detection object part) 16 so provided as to be along the end face of the case 15 and rotating with the rotor 12 used as a power source; and an optical sensor 18 facing the detection object disk 16 and detecting the rotational frequency of the rotor 12. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a flow monitor that measures the flow rate by utilizing the rotation of a rotating body and a functional liquid supply apparatus including the same.

Conventionally, as a flow monitor, a flow path pipe through which a liquid flows, a rotating body that is rotated by the flow of the liquid and is separately applied to a color that represents intermediate color mixing or a figure that represents a subjective color at the time of rotation, and the rotating body are flow path piping And a case designed so that a rotating body that rotates by the flow of a liquid can be seen from the outside is known (see Patent Document 1).
In this flow monitor, the rotation speed of the rotating body changes depending on the flow velocity, and the color of the rotating body looks different depending on the rotation speed. Have confirmed.

JP-A-10-104254

  However, in such a flow monitor, since the amount of flow is judged solely by human vision, for example, when this is used for monitoring a filter, not only the monitoring work becomes complicated, but also the flow Depending on the location of the monitor and the usage situation, there was a problem that monitoring itself was impossible.

  It is an object of the present invention to provide a flow monitor capable of automatically sensing a parameter corresponding to a liquid flow rate and a functional liquid supply apparatus including the flow monitor.

  The flow monitor of the present invention is a flow monitor that measures the flow rate using the rotation of a rotating body, and is rotated by a case having an inflow port and an outflow port, and a liquid that is accommodated in the case and flows from the inflow port to the outflow port. It has a rotating body, a detected part that is disposed outside the case and rotates using the rotating body as a power source, and a detecting part that faces the detected part and detects the number of rotations of the rotating body. .

  According to this configuration, the rotating body accommodated in the case is rotated by the liquid flowing into the inflow port of the case, and the detected portion that is rotated by the rotation of the rotating body as the power rotates. And the rotation speed of this to-be-detected part is detected by a detection part, and the rotation speed of a rotary body is detectable. That is, the detection unit can electrically sense a parameter corresponding to the flow rate of the liquid.

  In this case, it is preferable that the detected part has a disk having a slit in the radial direction, and the detecting part has either a transmissive photosensor or a reflective photosensor.

  According to this configuration, by using the detected portion and the detection portion, an encoder-like configuration using a transmission type photosensor or a reflection type photosensor can be obtained, and with a simple structure, the rotating body A parameter corresponding to the rotation, that is, the flow rate of the liquid can be sensed with high accuracy.

  In this case, it is preferable that the rotating body has an impeller body and a rotating shaft, and the detected portion is fixed to a shaft end portion of the rotating shaft protruding from the case.

  According to this configuration, it is possible to effectively transmit the rotational power of the rotating body in the case to the disc-shaped detected part installed outside the case via the rotating shaft.

  Another flow monitor of the present invention includes a case having an inflow port and an outflow port, a rotating body housed in the case and rotated by a liquid flowing from the inflow port to the outflow port and having a magnet, and the magnet from the outside of the case. And a magnetic sensor that detects the number of rotations of the rotating body via a magnet.

  According to this configuration, the rotation speed of the rotating body can be detected as an electric signal by the magnetic sensor, and a parameter corresponding to the liquid flow rate can be accurately sensed with a simple structure. Further, the number of rotations of the rotating body can be detected from the outside of the case, and the structure including the seal structure can be simplified.

  The functional liquid supply device of the present invention includes a functional liquid tank that stores a functional liquid, a functional liquid channel that connects the functional liquid tank and the droplet discharge head, and a functional liquid channel that is interposed in the functional liquid channel. The above-described flow monitor, which is interposed in the functional liquid channel located on one of the upstream side and the downstream side of the functional liquid channel between the filter and the droplet discharge head And a filter monitoring means for notifying that the filter needs to be exchanged when the rotation speed is inputted from the detection unit of the flow monitor and the rotation speed falls below a predetermined threshold value.

  According to this configuration, when the filter is clogged and the flow rate of the functional liquid passing through the filter is reduced, the number of rotations of the rotating body detected by the flow monitor is reduced. And a filter monitoring means alert | reports that a filter needs replacement | exchange, when the rotation speed input from the flow monitor becomes below a predetermined threshold value. Thereby, it is possible to know when the filter needs to be replaced without looking at the flow monitor. Thereby, since the filter is appropriately replaced, it is possible to effectively prevent clogging or ejection failure of the droplet ejection head due to foreign matter.

  In this case, a pressure adjusting valve is further provided that is interposed in the functional liquid flow path between the filter and the droplet discharge head, and that decompresses the functional liquid flowing from the functional liquid tank and supplies the reduced pressure to the droplet discharge head. It is preferable.

  According to this configuration, it is possible to prevent a malfunction of the valve body of the pressure regulating valve due to foreign matter, and it is possible to stabilize and stabilize the discharge flow rate of the functional liquid from the droplet discharge head.

  In this case, the filter monitoring means performs a cleaning operation for sucking the functional liquid from the droplet discharge head for cleaning the discharge nozzle, and a liquid for filling the flow path from the functional liquid tank to the droplet discharge head. Monitoring is preferably performed in synchronization with at least one of the initial filling operations for sucking the functional liquid from the droplet discharge head.

  According to this configuration, the clogging of the filter can be monitored by utilizing the time when a large amount of the functional liquid flows from the functional liquid tank to the droplet discharge head. Thereby, the clogged state of the filter can be detected (monitored) with high accuracy.

1 is a perspective view of a droplet discharge device according to an embodiment of the present invention. FIG. 6 is a cross-sectional view around the carriage unit. It is a perspective view of a droplet discharge head. It is a schematic diagram of a functional liquid supply unit. It is a perspective view of the flow monitor concerning a 1st embodiment. It is a block diagram of the filter monitoring apparatus in a functional liquid supply unit. It is a perspective view of the flow monitor concerning a 2nd embodiment. It is a perspective view of the flow monitor concerning a 3rd embodiment.

  Hereinafter, a liquid droplet ejection apparatus to which a flow monitor and a functional liquid supply apparatus according to an embodiment of the present invention are applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and is used for a color filter or organic filter of a liquid crystal display device. A light emitting element or the like to be each pixel of the EL device is formed. The functional liquid supply unit, which is a functional liquid supply device, supplies the functional liquid to the droplet discharge head via a filter.

As shown in FIG. 1, the droplet discharge device 1 is disposed on an X-axis support base 2, extends in the X-axis direction that is the main scanning direction, and moves the workpiece W in the X-axis direction. (Moving means) 3, a carriage unit 4 on which a plurality of droplet discharge heads 23 are mounted, and a pair of Y-axis support bases 6 spanned across the X-axis table 3 via a plurality of columns 5 And a Y-axis table 7 that is disposed above and extends in the Y-axis direction, which is the sub-scanning direction, and moves the carriage unit 4 in the Y-axis direction.
The droplet discharge device 1 also has a chamber (not shown) that houses various components and manages the temperature and humidity of the atmosphere, and a functional liquid tank 22 of RGB three colors. Functional liquid supply unit 9 and a control device (control means) 10 for controlling each part. The droplet discharge device 1 discharges the functional liquid supplied from the functional liquid supply unit 9 by driving the droplet discharge head 23 in synchronization with the driving of the X-axis table 3 and the Y-axis table 7. Then, a predetermined drawing pattern is drawn on the workpiece W. Note that the Y-axis direction is a direction orthogonal to the X-axis direction in the horizontal plane.

  Furthermore, the droplet discharge device 1 includes a maintenance device 60 including a suction unit 52, a wiping unit 53, and the like. The units maintain the droplet discharge heads 23 and maintain the functions of the droplet discharge heads 23.・ Function recovery is planned. In the droplet discharge device 1 of this embodiment, the drawing process of the workpiece W is performed with the carriage unit 4 facing the area (drawing area) where the X-axis table 3 and the Y-axis table 7 intersect. In addition, the carriage unit 4 faces the area where the Y-axis table 7 and the maintenance device 60 intersect (maintenance area), and maintenance processing (function maintenance and function recovery) of the droplet discharge head 23 is performed.

  The suction unit 52 sucks the droplet discharge head 23 and forcibly discharges the functional liquid from the discharge nozzle of the droplet discharge head 23. Although details are not shown, the suction unit 52 faces the carriage unit 4 from below and makes the corresponding caps closely contact the nozzle surfaces of the plurality of droplet discharge heads 23 mounted on the carriage unit 4. A unit, a cap raising / lowering mechanism for moving the cap unit up and down and separating the cap from and coming into contact with the droplet discharge head 23, and suction means for applying a suction force to each droplet discharge head 23 through the closely attached cap; It has.

  The wiping unit 53 wipes the nozzle surface of the droplet discharge head 23 with a wiping sheet sprayed with a cleaning liquid. Although not shown in detail, the wiping unit 53 includes a winding unit that winds up the wiping sheet wound on the roll, and a wiping unit that wipes the nozzle surface of the droplet discharge head 23 with the wiping sheet. ing. The wiping operation is performed after suction by the suction unit 52, and wipes off the dirt adhering to the nozzle surface.

  The X-axis table 3 includes a set table 31 for setting the workpiece W, an X-axis slider 32 for supporting the set table 31 slidably in the X-axis direction, and extending in the X-axis direction. And a pair of left and right X-axis linear motors (not shown). By driving the pair of X-axis linear motors, the set table 31 on the pair of X-axis sliders 32 is moved in the X-axis direction, and the workpiece W is moved in the X-axis direction. Thereby, the X-axis table 3 moves the workpiece W in the X-axis direction, which is the main scanning direction, during drawing.

  The Y-axis table 7 is supported by a pair of Y-axis support bases 6 and a pair of Y-axis sliders (not shown) that suspend the carriage unit 4 so as to be movable in the Y-axis direction, and a pair of Y-axis support bases. 6 and a pair of Y-axis linear motors (not shown) that move the carriage unit 4 in the Y-axis direction. By driving the pair of Y-axis linear motors, the carriage unit 4 on the pair of Y-axis sliders is moved in the Y-axis direction. As a result, the Y-axis table 7 moves the droplet discharge head 23 in the Y-axis direction, which is the sub-scanning direction, during drawing, via the carriage units 4, and also moves the droplet discharge head 23 to the maintenance device 60 during maintenance. Let it come.

  As shown in FIG. 2, the carriage unit 4 includes a carriage main body 94 and a head unit 85 that is detachably bolted to a lower end portion of the carriage main body 94. The carriage body 94 includes a bridge plate 87 between the pair of Y-axis sliders, a suspension member 88 supported by the bridge plate 87, a θ rotation mechanism 86 supported by the suspension member 88, and θ rotation. An attachment member 89 supported by the mechanism 86, and a head unit 85 is suspended from the attachment member 89.

  The head unit 85 includes three droplet discharge heads 23 in three colors of R, G, and B (total of 12 droplets) and 12 droplet discharge heads 23, each of which has the same droplet discharge head 23. And a head plate 84 for supporting the head plate 84 so as to be disposed in a horizontal plane. Each droplet discharge head 23 is a so-called double ink jet head, which is a functional liquid introducing portion 41 having two connecting needles 44, a double head substrate 42 connected to the functional liquid introducing portion 41, and a head substrate 42. And a head main body 43 that discharges the functional liquid (see FIG. 3 for both).

  The functional liquid supply unit 9 includes an R color supply unit 9 a that supplies an R color functional liquid to the corresponding four liquid droplet ejection heads 23, and a G liquid functional liquid that corresponds to the four liquid droplet ejection heads 23. The G color supply unit 9b to be supplied and the B color supply unit 9c to supply the B color functional liquid to the corresponding four droplet discharge heads 23 are configured (see FIG. 1). The R color supply unit 9a, the G color supply unit 9b, and the B color supply unit 9c have the same structure, and the following description will be given by taking the R color supply unit 9a as an example. In addition, the functional liquid supply apparatus said to a claim is comprised by these each supply unit 9a, 9b, 9c.

  As shown in FIG. 4, the R color supply unit 9a temporarily stores the functional liquid tank 22 (main tank) that stores the functional liquid (R color) and the functional liquid supplied from the functional liquid tank 22, The sub tank 29 and each droplet discharge head 23 are connected via a sub tank 29 supplied to each droplet discharge head 23, a main function liquid flow path 24 connecting the functional liquid tank 22 and the sub tank 29, and a manifold (not shown). And a plurality of individual functional liquid channels (functional liquid channels) 51 (only one is shown in the embodiment). The R color supply unit 9 a includes a filter 25 interposed in each individual functional liquid channel 51, and a flow monitor 11 positioned downstream of the filter 25 and interposed in the individual functional liquid channel 51. , A pressure monitoring valve 30 that is located downstream of the flow monitor 11 and interposed in the individual functional liquid flow channel 51, and a filter monitoring device that monitors the replacement time of the filter 25 based on the signal of the flow monitor 11 ( Filter monitoring means) 26. The filter monitoring device 26 is connected to the control device 10 described above. Note that the flow monitor 11 may be disposed on the upstream side of the filter 25.

  The functional liquid tank 22 is accommodated in a cabinet provided in a part of the chamber, and the sub tank 29 is mounted on the bridge plate 87. The filter 25, the flow monitor 11 and the pressure adjustment valve 30 are mounted on the upper side of the head plate 84 in the head unit 85.

  The functional liquid in the functional liquid tank 22 is pressure-fed to the sub-tank 29 with the liquid reduction in the sub-tank 29 as a trigger. The functional liquid in the sub tank 29 is filtered through the filter 25, is reduced to a predetermined pressure by the pressure adjustment valve 30, and is supplied to each droplet discharge head 23. Note that a disposable pack container may be used as the sub tank 29. In such a case, the functional liquid tank 22 and the main functional liquid flow path 24 are not necessary.

  The functional liquid tank 22 is composed of, for example, a pressure vessel, and pressure-feeds the functional liquid by introducing high-pressure air or nitrogen. The sub tank 29 is an open-type tank, and gravity-feeds the functional liquid according to consumption of the functional liquid of each droplet discharge head 23 in a state where the sub-tank 29 is pressure-cut from the functional liquid tank 22.

  The pressure regulating valve 30 has a casing in which, for example, the primary side is connected to the sub tank 29 and the secondary side is connected to the droplet discharge head 23, and a valve body is provided in a flow path that connects the primary side and the secondary side. At the same time, the valve body is opened and closed on the basis of atmospheric pressure by a diaphragm provided on the secondary side. The filter 25 is constituted by a filter main body constituted by a so-called chemical filter and a case-like holder for holding the filter main body. The inflow side and the outflow side of the holder have a joint structure that is connected to the individual functional liquid channel 51 with a single touch. When clogged, the filter 25 is replaced as a whole (disposable).

  As shown in FIG. 5, the flow monitor 11 is disposed so as to follow the case 15 having the inflow port 13 and the outflow port 14, the rotating body 12 accommodated in the case 15, and the end surface of the case 15. A detected disk (detected part) 16 that rotates using the body 12 as a power source, and an optical sensor (detecting part) 18 that faces the detected disk 16 and detects the rotational speed of the rotating body 12. Yes.

The case 15 has a circular box-shaped case main body 55, and an inflow port 13 and an outflow port 14 that are coaxially provided so as to penetrate the case main body 55 in the string direction. Although omitted in the drawing, the inflow port 13 and the outflow port 14 have a joint structure connected to the individual functional liquid channel 51. When the functional liquid flows from the inflow port 13 to the outflow port 14, the rotating body 12 is rotated by being pushed by the flow of the functional liquid.
The rotating body 12 has a form of a so-called impeller, and the rotation shaft 56 is rotatably supported on the end surface wall of the case main body 55. One shaft end portion of the rotation shaft 56 penetrates the end surface wall and protrudes outside the case body 55. The detected disk 16 is fixed to the shaft end of the rotating shaft 56. That is, the rotating shaft 56 of the rotating body 12 and the axis of the detected disk 16 are shared (directly connected), and the detected disk 16 rotates simultaneously with the rotating body 12 by receiving the rotational power of the rotating body 12.

  The detected disk 16 is a slit disk having one slit 17 extending in the radial direction. The optical sensor 18 is composed of a transmissive photosensor (photointerrupter), and is disposed so as to face the peripheral edge of the detection disc 16. When the detection disk 16 rotates, the detection light from the light emitting element of the optical sensor 18 is transmitted through the slit 17 and received by the light receiving element, and the rotation is detected. That is, in the flow monitor 11, the rotational speed of the rotating body 12 that changes depending on the flow rate of the liquid is quantitatively detected by the optical sensor 18 as the rotational speed of the detection disc 16.

  As shown in FIG. 6, the filter monitoring device 26 inputs the detection result of the flow monitor 11 (optical sensor 18), calculates the rotational speed of the rotating body 12 based on the detection result, and this rotational speed is the filter 25. A determination circuit 27 that determines whether or not a threshold value that is an indicator of required replacement is exceeded, and a communication circuit 28 that transmits a determination result of the determination circuit 27 to the control device 10 by wire or wirelessly. . When the determination circuit 27 determines that the replacement is necessary, the control device 10 displays (notifies) the sound or the monitor 54 (display).

  By the way, if the flow rate of the functional liquid flowing from the inflow port 13 to the outflow port 14 is small, the rotating body 12 may not rotate sufficiently. On the other hand, in the present droplet discharge device 1, at the start of operation of the device, a suction operation by the suction unit 52 and a wiping operation by the wiping unit 53 are performed. In this suction operation, the functional liquid is forcibly sucked from the droplet discharge head 23, so that a relatively large amount of the functional liquid flows through the flow monitor 11. Therefore, in the present embodiment, the carriage unit 4 is moved to the maintenance area, and the filter 25 is monitored during the functional liquid suction operation by the suction unit 52 (see FIG. 4). However, since the above suction operation is performed even during the initial filling operation in which the functional liquid is filled in the flow path from the sub tank 29 to the droplet discharge head 23, the filter 25 may be monitored at that time. .

  Next, the flow monitor 11 according to the second embodiment will be described with reference to FIG. Note that the description of the same parts as in the first embodiment is omitted. In the flow monitor 11, a reflective photosensor is used as the optical sensor 19. However, in this case, in the disc 16 to be detected, a mirror or the like may be used for the portion corresponding to the slit 17 and the other portion may be black. In any case, a detection signal is obtained at the slit 17 and a portion corresponding thereto.

Next, the flow monitor 11 according to the third embodiment will be described with reference to FIG. Note that the description of the same parts as in the first embodiment is omitted. In this flow monitor 11, a magnet 57 is provided at the tip of each blade of the rotating body 12 formed of an impeller. On the other hand, a magnetic sensor 20 is disposed outside the case 15 so as to face the magnet 57.
In this configuration, when the rotating body 12 is rotated by the liquid flowing from the inflow port 13 toward the outflow port 14, the magnetism of the magnet 57 provided at the tip of the rotating body 12 is installed outside the case 15. 20 is detected as an electrical signal. Thereby, the rotation speed of the rotary body 12 is detected.

  According to the above configuration, when the filter 25 is clogged and the flow rate of the functional liquid passing through the filter 25 is reduced, the rotational speed of the rotating body 12 detected by the flow monitor 11 is reduced. And the filter monitoring apparatus 26 alert | reports the replacement required of the filter 25, when the rotation speed input from the flow monitor 11 becomes below a predetermined threshold value. Thereby, it is possible to know when the filter 25 needs to be replaced without looking at the flow monitor 11. Thereby, since the filter 25 is appropriately replaced, clogging and ejection failure of the droplet ejection head 23 due to foreign matter can be effectively prevented, and malfunction of the pressure regulating valve 30 can be prevented. .

  In the present embodiment, the flow monitor 11 of the present invention is applied to the functional liquid supply unit 9. However, the flow monitor 11 can be applied to deterioration determination of industrial filters that are difficult to visually check.

  Further, the method of forming the slit 17 in the detection disk 16 of the flow monitor 11 and using the detection method was used. However, the detection disk 16 has a structure in which a shielding protrusion, a reflector, and a magnetic body are provided on a part of the detection disk 16. May be.

  1: Droplet discharge device, 3: X-axis table, 4: Carriage unit, 6: Y-axis support base, 7: Y-axis table, 9: Functional liquid supply unit, 11: Flow monitor, 12: Rotating body, 13: Inflow port, 14: Outflow port, 15: Case, 16: Detected disk, 17: Slit, 18: Transmission type optical sensor, 19: Reflection type optical sensor, 20: Magnetic sensor, 23: Droplet ejection head 24: Main functional liquid flow path, 25: Filter, 26: Filter monitoring device, 55: Case body, 56: Rotating shaft, 57: Magnet

Claims (7)

A case having an inflow port and an outflow port;
A rotating body housed in the case and rotated by liquid flowing from the inflow port to the outflow port;
A detected portion that is disposed outside the case and rotates with the rotating body as a power source;
A flow monitor comprising: a detection unit that faces the detected unit and detects the number of rotations of the rotating body. The detected portion has a disk having a slit in the radial direction,
The flow monitor according to claim 1, wherein the detection unit includes any one of a transmission type optical sensor and a reflection type optical sensor. The rotating body has an impeller body and a rotating shaft,
The flow monitor according to claim 1, wherein the detected portion is fixed to a shaft end portion of the rotating shaft protruding from the case. A case having an inflow port and an outflow port;
A rotating body housed in the case and rotated by the liquid flowing from the inflow port to the outflow port and having a magnet;
A flow monitor comprising: a magnetic sensor that faces the magnet from the outside of the case and detects the number of rotations of the rotating body via the magnet. A functional liquid supply device that supplies a functional liquid to an inkjet droplet discharge head,
A functional liquid tank for storing functional liquid;
A functional liquid flow path connecting the functional liquid tank and the droplet discharge head;
A filter interposed in the functional liquid channel and filtering the functional liquid flowing in the functional liquid channel;
5. The method according to claim 1, wherein the functional liquid channel is interposed between the filter and the droplet discharge head and located on one of the upstream side and the downstream side of the functional liquid channel. With a flow monitor
Filter monitoring means for inputting the rotation speed from the detection unit of the flow monitor and notifying that the filter needs to be replaced when the rotation speed is equal to or less than a predetermined threshold value. Liquid supply device.   A pressure adjusting valve interposed in the functional liquid flow path between the filter and the droplet discharge head, and depressurizing the functional liquid flowing from the functional liquid tank and supplying the pressure to the droplet discharge head; A functional liquid supply apparatus characterized by the above.   The filter monitoring means is for cleaning the discharge nozzle for cleaning the functional liquid from the liquid droplet discharge head, and for filling the flow path from the functional liquid tank to the liquid droplet discharge head with the functional liquid. 7. The functional liquid supply apparatus according to claim 5, wherein monitoring is performed in synchronization with at least one of an initial filling operation for sucking the functional liquid from the droplet discharge head.

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