JP2011136307A - Pattern drawing apparatus and method therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pattern drawing apparatus and a method therefor which can easily make a film thickness of a pattern constant by a method other than controlling a discharge speed by controlling a drive voltage. <P>SOLUTION: An inkjet drawing apparatus discharges droplets in a scanning direction using a plurality of nozzles to draw a pattern. The inkjet drawing apparatus is provided with a nozzle discharge amount calculating portion 41 for obtaining a relative discharge amount per one droplet of each nozzle by discharging a droplet once from each nozzle to an auxiliary discharge substrate, and a discharge number control portion 42 for controlling the number of discharge times of each nozzle based on the relative discharge amount per one droplet of each nozzle, obtained by the nozzle discharge amount calculating portion 41, so that the discharge amounts of the droplets discharged from respective nozzles coincide with each other in the whole scanning direction area where respective nozzles perform drawing in the pattern. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a pattern drawing apparatus and a pattern drawing method for drawing a pattern by discharging droplets using a plurality of nozzles, and more particularly to a droplet amount correction technique for each nozzle.

  In a pattern drawing apparatus such as an ink jet printer, drawing is performed on a recording medium by an ejection head that ejects liquid droplets from a plurality of nozzles. The amount of droplets discharged from each nozzle changes.

  For example, when recording an image, in order to obtain an image having no color unevenness, it is necessary to maintain the amount of liquid droplets ejected from a plurality of ejection ports at a desired value.

  In order to solve such a problem, for example, in the ink jet apparatus disclosed in Patent Document 1, the second drive waveform for applying to the head a variation in the amount of ink ejected between the heads and a variation in the ink amount based on the operating temperature. It is corrected by controlling with the voltage value of. Thus, the ink amount can be controlled by controlling the ejection speed for each nozzle.

  For example, in the droplet discharge device disclosed in Patent Document 2, the control unit applies a drive voltage controlled so that the droplet discharge speed matches a preset reference speed to the droplet discharge unit. When the droplet discharge operation is executed and the discharge speed changes with respect to the set reference speed, the physical information is compared with the target value, and the magnitude of the drive voltage is controlled so that both coincide with each other. The obtained discharge speed is reset as a new reference speed.

  In addition to the above Patent Document 1 and Patent Document 2, for example, there are those that measure the volume by discharging several thousand shots for each nozzle or a plurality of nozzles, or perform weight measurement. Feedback has been performed on the voltage value of each nozzle.

Japanese Patent Laid-Open No. 6-297708 (released on October 25, 1994) JP 2008-030395 A (published February 14, 2008)

  However, the conventional pattern drawing apparatus and pattern drawing method have the following problems.

  For example, the drive voltage setting of the head described in Patent Document 1 or Patent Document 2 requires observation of the ejection state and measurement of the velocity of the droplets, and it is extremely difficult to reset the pattern on the pattern drawing apparatus after mounting the head. It is difficult to.

  In addition, volume measurement and weight measurement by landing of several thousand shots takes time to be performed with all nozzles as the number of heads mounted on the pattern drawing apparatus and the number of nozzles per head increase. It is difficult to do.

  Thus, when drawing a pattern using a plurality of nozzles, if the same pattern is drawn with different nozzles if the volume per unit area cannot be controlled, the line width and film thickness will be different, and a fine pattern, especially There is a problem that it becomes impossible to form a pattern that requires control of the film thickness.

  The present invention has been made in view of the above-described conventional problems, and an object of the present invention is to easily make the pattern film thickness constant by a method other than controlling the discharge speed by controlling the drive voltage. A pattern drawing apparatus and a pattern drawing method are provided.

  In order to solve the above problems, a pattern drawing apparatus of the present invention is a pattern drawing apparatus that draws a pattern by discharging droplets in a scanning direction using a plurality of nozzles. Nozzle discharge amount calculation means for obtaining a relative discharge amount per droplet of each nozzle by discharging a droplet once, and relative discharge per droplet of each nozzle obtained by the nozzle discharge amount calculation means A discharge number control means for controlling the number of discharges of each nozzle so that the discharge amount of the droplets discharged from each nozzle in the entire scanning direction region drawn by each nozzle in the pattern is based on the amount It is characterized by being provided.

  In order to solve the above-described problem, the pattern drawing method of the present invention is a pattern drawing method in which a plurality of nozzles are used to draw a pattern by discharging droplets in the scanning direction. A nozzle discharge amount calculation step for obtaining a relative discharge amount per droplet of each nozzle by discharging a droplet once, and a relative discharge per droplet of each nozzle determined in the nozzle discharge amount calculation step A discharge number control process for controlling the number of discharges of each nozzle so that the discharge amount of the liquid droplets discharged from each nozzle in the entire scanning direction region drawn by each nozzle in the pattern is based on the amount, It is characterized by including.

  Conventionally, in order to control the discharge amount, the discharge amount is controlled by a method of controlling the discharge speed by controlling the drive voltage. However, this method requires observation of the ejection state, observation of the droplet velocity, and the like, and it is very difficult to reset on the pattern drawing apparatus after mounting the head.

  Therefore, in the present invention, the nozzle discharge amount calculation means determines the relative discharge amount per droplet of each nozzle by discharging the droplet from each nozzle once onto the preliminary discharge substrate. For this reason, in the present invention, when the relative discharge amount per droplet of each nozzle is obtained, it is obtained by once ejecting a droplet from each nozzle onto the preliminary ejection substrate. Compared with volume measurement or weight measurement, the relative discharge amount per drop of each nozzle can be easily determined.

  Next, the number-of-ejection control means to be controlled is each scanning direction in which each nozzle in the pattern draws based on the relative ejection amount per droplet of each nozzle obtained by the nozzle ejection amount calculating means. The number of ejections of each nozzle is controlled so that the ejection amount of the droplets ejected from each nozzle in the entire region is the same.

  Therefore, by determining the relative discharge amount per droplet of each nozzle by discharging droplets from each nozzle to the preliminary discharge substrate once, and by controlling the number of discharges of each nozzle according to the pattern, The discharge amount of the entire scanning direction area drawn by each nozzle in the pattern can be made constant, and the film thickness becomes constant for the entire scanning direction area.

  Conventionally, the timing at which the nozzles are ejected is controlled by general ejection driving. Therefore, the number of ejections at each nozzle can be controlled by simply increasing or decreasing the ejection timing. It can be done easily.

  Accordingly, it is possible to provide a pattern drawing apparatus and a pattern drawing method that can easily and uniformly make the film thickness of the pattern by a method other than controlling the ejection speed by controlling the drive voltage.

  In the pattern drawing apparatus of the present invention, the nozzle discharge amount calculating means includes an imaging means for imaging a droplet landing trace on the preliminary discharge substrate, and a droplet landing trace imaged by the imaging means. It is preferable that a discharge amount calculation unit that obtains a relative discharge amount per droplet of each nozzle by multiplying a square of the diameter of the landing mark by a coefficient is preferably provided.

  Thereby, since the landing trace of the droplet on the preliminary discharge substrate is imaged by the imaging means, the discharge amount per droplet of each nozzle can be calculated from the planar area of the landing trace. Specifically, the discharge amount calculation means calculates the relative discharge amount per droplet of each nozzle by multiplying the square of the diameter of the landing mark by a coefficient. That is, the square of the diameter of the landing mark is proportional to the relative discharge amount per droplet of each nozzle. Therefore, if a predetermined coefficient is obtained in advance, the square of the diameter of the landing mark is multiplied by the coefficient. The relative discharge amount per droplet of each nozzle can be easily calculated.

  In the pattern drawing apparatus of the present invention, the discharge number control means draws each nozzle in the pattern based on the relative discharge amount per droplet of each nozzle obtained by the nozzle discharge amount calculation means. A nozzle discharge number calculation means for calculating the number of discharges of each nozzle so that the discharge amount of the droplets discharged from each nozzle in the entire scanning direction region matches, and each nozzle in the nozzle discharge number calculation means It is preferable to include a discharge timing data creating unit that creates discharge timing data for each nozzle based on the number of times of ejection.

  Thereby, in the discharge number control means, the nozzle discharge number calculation means draws each nozzle in the pattern based on the relative discharge amount per droplet of each nozzle obtained by the nozzle discharge amount calculation means. The number of ejections of each nozzle is calculated so that the ejection amounts of the droplets ejected from each nozzle in the entire scanning direction region match. Then, the ejection timing data creating means creates ejection timing data for each nozzle based on the number of ejections of each nozzle in the nozzle ejection number calculating means.

  Therefore, it is possible to discharge from each nozzle so that the discharge amount of the liquid droplets discharged from each nozzle in the entire scanning direction region drawn by each nozzle in the pattern matches based on the discharge timing data of each nozzle. it can.

  In the pattern drawing apparatus of the present invention, it is preferable that the droplets are made of ink jet ink, and the preliminary ejection substrate is coated with a resist.

  That is, a resist such as a photoresist has a property that a landing mark is clearly left with respect to an ink jet ink and observation becomes easy. Therefore, it is possible to easily obtain the relative discharge amount per droplet of each nozzle from the landing mark of the ink jet ink discharged onto the preliminary discharge substrate.

  In the pattern writing apparatus of the present invention, the droplets are insoluble or non-permeable to ink having electrical insulation properties or impurities doped in a semiconductor when dried or baked after coating. It is preferable that the ink comprises

  In other words, a part of electricity flows in the semiconductor, and the semiconductor is doped with impurities to form a P-type semiconductor or an N-type semiconductor. Therefore, when a pattern is drawn on a semiconductor substrate or semiconductor layer for the purpose of preventing diffusion, the droplets have electrical conductivity or are soluble or permeable to impurities doped in the semiconductor. Doing so will adversely affect the semiconductor.

  In this regard, in the present invention, the droplets are formed from an ink having electrical insulating properties when dried or baked after coating, or an ink that is not soluble or impervious to impurities doped in a semiconductor. Therefore, the semiconductor is not adversely affected. Therefore, application to a semiconductor substrate or a semiconductor layer is possible.

  Further, in the pattern drawing apparatus of the present invention, a plurality of heads having a plurality of nozzles arranged in a straight line are provided, and the nozzle discharge amount calculating means is provided for each one of the plurality of heads on the preliminary discharge substrate. By ejecting droplets from the nozzles once, the relative ejection amount per droplet of the nozzle in each head is obtained, and the ejection number control means determines the number of nozzles in each head obtained by the nozzle ejection amount calculation means. Based on the relative discharge amount per droplet, the discharge amount of each nozzle is matched so that the discharge amount of each nozzle in the entire scanning direction region drawn by each nozzle in each head in the pattern matches. The number of ejections can be controlled for each head.

  That is, when a plurality of heads having a plurality of nozzles arranged in a straight line are provided, there may be a difference in ejection amount between the nozzles of the plurality of heads.

  In this case, the relative discharge amount per droplet of each nozzle in each head is obtained. For example, droplets are ejected from nozzles existing at the ends of a plurality of nozzles arranged in a straight line in each head, and the relative ejection amount per droplet of the nozzles is obtained.

  As a result, it is possible to control the discharge amount for each head based on the pattern based on the relative discharge amount per droplet representing the nozzle of each head.

  Further, in the pattern drawing apparatus of the present invention, a plurality of heads having a plurality of nozzles arranged in a straight line are provided, and the nozzle discharge amount calculating means is configured to apply liquid from each nozzle of each head to the preliminary discharge substrate. Each of the droplets is ejected once to obtain a relative ejection amount per droplet of each nozzle, and the number of ejection times control means is provided for each nozzle of each nozzle in each head obtained by the nozzle ejection amount calculation means. Based on the relative discharge amount, the number of discharges of each nozzle so that the discharge amount of the liquid droplets discharged from each nozzle in the entire scanning direction region drawn by each nozzle in each head in the above pattern matches. Can be controlled.

  That is, when a plurality of heads having a plurality of nozzles arranged in a straight line are provided, there is a difference in the discharge amount among the nozzles between the plurality of heads, and there is also a difference in the discharge amount between the nozzles of each head. There may be.

  In this case, in the present invention, the nozzle discharge amount calculation means performs preliminary discharge for all the nozzles in each head, and obtains the relative discharge amount per droplet in all the nozzles.

  Then, the number of ejection times control means discharges the liquid ejected from each nozzle in the entire scanning direction region drawn by each nozzle in each head in the above pattern based on the relative ejection amount per droplet from all the nozzles. The number of ejections of each nozzle is controlled so that the ejection amounts of the droplets match each other.

  Therefore, in the present invention, even when a plurality of heads having a plurality of nozzles arranged in a straight line are provided, preliminary ejection is performed for all nozzles, and the number of ejections of each nozzle is controlled for each nozzle. become.

  As described above, the pattern drawing apparatus of the present invention, as described above, nozzle discharge amount calculating means for obtaining a relative discharge amount per droplet of each nozzle by discharging droplets from each nozzle once onto the preliminary discharge substrate; Based on the relative discharge amount per droplet of each nozzle determined by the nozzle discharge amount calculation means, the droplets discharged from each nozzle in the entire scanning direction region drawn by each nozzle in the pattern are drawn. Discharge number control means for controlling the number of discharges of each nozzle so that the discharge amounts coincide with each other is provided.

  In the pattern drawing method of the present invention, as described above, a nozzle discharge amount calculating step for obtaining a relative discharge amount per droplet of each nozzle by discharging droplets from each nozzle to the preliminary discharge substrate once; Based on the relative discharge amount per droplet of each nozzle obtained in the nozzle discharge amount calculation step, the droplets discharged from each nozzle in the entire scanning direction region drawn by each nozzle in the pattern are drawn. And a discharge number control step of controlling the number of discharges of each nozzle so that the discharge amounts coincide with each other.

  Therefore, there is an effect of providing a pattern drawing apparatus and a pattern drawing method that can easily make the film thickness of the pattern constant by a method other than controlling the ejection speed by controlling the drive voltage.

1 is a block diagram illustrating a configuration of a control unit according to an embodiment of a pattern drawing apparatus and a pattern drawing method according to the present invention. It is a top view which shows the structure of the inkjet drawing apparatus as said pattern drawing apparatus. (A) is a perspective view which shows the shape of the nozzle of a head and its landing mark, (b) is sectional drawing which shows the structure of the board | substrate for preliminary discharge. It is a flowchart which shows the drawing method in case the magnitude | size of a landing mark differs for every nozzle. (A) is a plan view showing a pattern desired to be drawn, and (b) is an explanatory diagram showing an ink discharge position and a cross-sectional shape of a drawn ink film when a regular ink discharge is performed with a current nozzle. FIG. 8C is an explanatory diagram showing the ink discharge position in the pattern and the cross-sectional shape of the ink film formed by correcting the nozzle discharge timing and performing ink discharge. It is a top view which shows other embodiment in the inkjet drawing apparatus as a pattern drawing apparatus in this invention. It is a perspective view which shows the shape of the nozzle of a head, and its landing mark. It is a flowchart which shows the drawing method when the magnitude | size of a landing mark differs for every nozzle of a head. (A) is a plan view showing a pattern desired to be drawn, and (b) is an explanatory diagram showing an ink discharge position and a cross-sectional shape of a drawn ink film when a regular ink discharge is performed with a current nozzle. FIG. 8C is an explanatory diagram showing the ink discharge position in the pattern and the cross-sectional shape of the ink film formed by correcting the nozzle discharge timing and performing ink discharge. FIG. 5 is a perspective view showing a further embodiment of an ink jet drawing apparatus as a pattern drawing apparatus according to the present invention and showing shapes of nozzles of a plurality of heads and landing marks thereof. It is a flowchart which shows the drawing method in case the magnitude | size of a landing mark differs for every nozzle in a some head. (A) is a plan view showing a pattern desired to be drawn, and (b) is an explanatory diagram showing an ink discharge position and a cross-sectional shape of a drawn ink film when a regular ink discharge is performed with a current nozzle. FIG. 8C is an explanatory diagram showing the ink discharge position in the pattern and the cross-sectional shape of the ink film formed by correcting the nozzle discharge timing and performing ink discharge.

[Embodiment 1]
An embodiment of the present invention will be described below with reference to FIGS.

  A configuration of an ink jet drawing apparatus A as a pattern drawing apparatus according to the present embodiment will be described with reference to FIG. FIG. 2 is a plan view showing the configuration of the ink jet drawing apparatus A. FIG.

  As shown in FIG. 2, the ink jet drawing apparatus A of the present embodiment has a substrate stage on which a drawing substrate 1 with two alignment marks is placed and is carried in the main scanning direction which is the carrying axis direction. 2 and a head unit 22 on which one head 21 is mounted and movable in a direction orthogonal to the transport axis direction.

  The ejection resolution in the transport axis direction in the ink jet drawing apparatus A is determined by the stage transport speed and the drive frequency of the head 21. The head 21 exemplified here has a plurality of nozzles N to be described later arranged in a straight line, and the nozzles N are provided at a nozzle pitch of 141 μm in the nozzle row direction of the head 21. The head 21 is installed to be inclined with respect to the direction perpendicular to the conveyance axis direction so that the nozzle pitch in the direction perpendicular to the conveyance axis direction is 140 μm. The driving frequency of the head 21 is driven at a maximum, for example, single-phase 20 kHz, 3-phase 60 kHz, and can be ejected at a pitch of 10 μm in the conveyance axis direction. Further, in the present embodiment, it is possible to discharge from any nozzle N in the head 21 at any time.

  A basic drawing operation of the ink jet drawing apparatus A having the above configuration will be described.

  First, a cassette 3 in which a plurality of substrates 1 to be drawn made of a semiconductor material such as glass or silicon is stored is set at the end of the ink jet drawing apparatus A, and drawing processing is started. When the drawing process is started, one substrate 1 to be drawn is taken out from the cassette 3 by using the arm 4a or the like in the substrate take-out unit 4 of the ink jet drawing apparatus A, and the substrate 1 to be drawn 1 is placed in the placement unit 5 by the substrate stage 2. It is mounted on the mounting robot 5a. That is, the placement robot 5a of the placement unit 5 vacuum-sucks the drawing substrate 1 taken out from the cassette 3 using the arm 4a and the like and placed on the substrate removal unit 4 using, for example, a vacuum device (not shown). Then, it is lifted, moved in the transport axis direction, and placed on the substrate stage 2.

  The drawing substrate 1 placed on the substrate stage 2 is vacuum-sucked at a suction port (not shown) and is fixed on the substrate stage 2. The substrate stage 2 also has a heating mechanism (not shown) for the drawing substrate 1 so that the drawing substrate 1 can be heated in accordance with ink jet ink to be drawn. Thereafter, the substrate stage 2 moves to the alignment unit 10 along the conveyance axis direction, and the drawing substrate is formed using two alignment marks (not shown) formed on the drawing substrate 1 by the two alignment cameras 11 and 11. 1 position adjustment is performed.

  The substrate stage 2 on which the position-adjusted drawing substrate 1 is placed moves in the transport axis direction, and when the head 21 passes under the head unit 22 in the printing unit 20, the head 21 is driven by a head driving signal based on the drawing pattern. A pattern is drawn by ejecting ink.

  The head unit 22 stands by in the head maintenance unit 23 until immediately before pattern drawing, etc., moves to the transport axis of the substrate stage 2 at the drawing timing, performs drawing, and when drawing is completed, head maintenance is appropriately performed. It is controlled to move to the unit 23. The head maintenance unit 23 cleans the ejection surface of the nozzle N of the head 21 mounted on the head unit 22 to prevent clogging of the nozzle N, performs cleaning ejection of the ejection hole, and keeps the nozzle N moist at rest. Maintenance such as storing and sucking out the thickened ink from the nozzles N is performed.

  The drawing substrate 1 on which the pattern has been drawn is taken out from the substrate stage 2 by the substrate dispensing unit 30 and discharged out of the ink jet drawing apparatus A, and the next processing is performed.

  By the way, in the inkjet drawing apparatus A, even when discharging onto the drawing substrate 1 made of a material such as paper that absorbs ink or drawing on the drawing substrate 1 made of a material that does not absorb ink, When the film thickness may be different in the drawing substrate 1 instead of using the device or the like, the discharge amount (or discharge volume) of each nozzle N may be different. Therefore, even if the head 21 has a different discharge amount (or discharge volume) for each nozzle N, no problem occurs without correction of the discharge amount. However, when drawing a fine pattern for device use or the like, it is very important to improve the film thickness distribution particularly because the characteristics of the printed matter after drawing greatly affect the characteristics of the device.

  In order to deal with this problem, conventionally, in order to control the discharge amount from the nozzle N, the discharge amount is generally controlled by a method of controlling the discharge speed by controlling the drive voltage. However, this method requires observation of the discharge state and measurement of the droplet velocity, etc., and after setting the head, the discharge state is observed on the pattern drawing apparatus and the droplet velocity is measured and set again. Was very difficult. For example, even when the applied voltage for each nozzle N is measured in advance before mounting on the ink jet drawing apparatus A so that the discharge amount becomes constant, the environment after the mounting on the ink jet drawing apparatus A, change with time, etc. The discharge amount may change, and it is extremely difficult to set each time.

  Therefore, in the present embodiment, as shown in FIG. 1, the discharge drive control unit 40 in the ink jet drawing apparatus A includes a nozzle discharge amount calculation unit 41 as a nozzle discharge amount calculation unit and a discharge as a discharge number control unit. A number control unit 42 is provided.

  The nozzle discharge amount calculation unit 41 determines the relative discharge amount per droplet of each nozzle N by once discharging ink as droplets from each nozzle N onto the preliminary discharge substrate 6.

  Further, the ejection number control unit 42, based on the relative ejection amount per droplet of each nozzle obtained by the nozzle ejection amount calculation unit 41, of the entire scanning direction region drawn by each nozzle in the pattern, The number of ejections of each nozzle N per unit length (for example, 100 μm to several hundreds of μm) is controlled so that the ejection amounts of ink as droplets ejected from each nozzle coincide with each other.

  Further, the nozzle discharge amount calculation unit 41, in detail, from the ink landing trace imaged by the observation camera 12 as an imaging means for imaging the droplet landing trace on the preliminary ejection substrate 6, the landing trace. A discharge amount calculation unit 41a is provided as means (discharge amount calculation means) for measuring the diameter of the nozzle and calculating the square of the diameter (an amount proportional to the discharge amount).

  Further, the number-of-discharges control unit 42 determines the entire region in each scanning direction drawn by each nozzle N in the pattern based on the relative discharge amount per droplet of each nozzle N obtained by the nozzle discharge amount calculation unit 41. In the nozzle discharge number calculation unit 42a as nozzle discharge number calculation means for calculating the number of discharges of each nozzle N so that the discharge amounts of the droplets discharged from each nozzle N coincide with each other, and in the nozzle discharge number calculation unit 42a A discharge timing data creating unit 42b serving as a discharge timing data creating unit that creates the discharge timing data of each nozzle N based on the number of times of ejection of each nozzle N is provided.

  A pattern drawing method in the ink jet drawing apparatus A having the above configuration will be described with reference to FIGS. In the following, the case where the discharge amount (or discharge volume) is different for each nozzle N in the head 21 will be described. Here, FIG. 3A is a perspective view showing the shape of the nozzle N of the head 21 and its landing mark, and FIG. 3B is a cross-sectional view showing the configuration of the preliminary discharge substrate 6. FIG. 4 is a flowchart showing a drawing method when the size of the landing mark is different for each nozzle N. Further, FIG. 5A is a plan view showing a pattern to be drawn, and FIG. 5B is a cross-sectional view of the ink film formed by drawing the ink discharge position when performing the regular ink discharge with the current nozzle N. FIG. 5C is an explanatory diagram showing the ink ejection position in the pattern and the cross-sectional shape of the ink film that can be drawn when correcting the ejection timing of the nozzle N and performing ink ejection. It is.

  First, as shown in FIGS. 4 and 3A, before drawing a pattern, ink is ejected from each nozzle N of the head 21 to the preliminary ejection substrate 6 to measure the diameter of the landing mark. (S1).

  As shown in FIG. 3B, the preliminary ejection substrate 6 is obtained by applying an ink receiving layer 6b made of a resist such as a photoresist, porous silica particles, or alumina particles to a substrate 6a made of glass or silicon. It is made up of. The ink receiving layer 6b is preferable in that the solvent of the ink penetrates into the ink receiving layer 6b, and the solid content of the ink remains on the surface of the ink receiving layer 6b, leaving a landing mark clearly. In other words, the preliminary ejection substrate 6 may be only the substrate 6a, but the presence of the ink receiving layer 6b makes it possible to more accurately evaluate the size of the landing mark.

  A landing mark formed when ink is ejected onto the preliminary ejection substrate 6 is captured by an imaging means such as an observation camera 12 shown in FIG. (Or discharge volume).

Specifically, an approximate expression that the square of the diameter (rm) of the landing mark is proportional to the discharge volume (Vm) Vm = D × rm ^ 2 (D: constant) (Expression 1)
Thus, the discharge amount (or discharge volume) (Vm) of each nozzle N is obtained.

  Next, based on the ejection amount (or ejection volume) (Vm) of each nozzle N, as shown in FIG. 4, the ink ejected from each nozzle N in the entire scanning direction region drawn by each nozzle N in the pattern. Correction data for each nozzle N is created so that the discharge amount is constant (S2).

The correction data for each nozzle N is based on the above (Equation 1).
Correction coefficient Cm = K / Vm (K: constant) (Formula 2)
Is calculated as

  Then, based on the correction coefficient Cm, correction pattern data taking into consideration correction data, that is, ejection timing data is created for the pattern data to be drawn (S3), and drawing (printing) is performed based on the correction pattern data. (S4).

  Specifically, if there is a pattern to be drawn as shown in FIG. 5A, and this pattern is drawn without correcting the ejection timing, for example, as shown in FIG. At the timing of one row, the nozzle N1, the nozzle N3, the nozzle N7, and the nozzle N9 are ejected, and at the timing of the second row, the nozzle N2, the nozzle N4, the nozzle N8, and the nozzle N10 are ejected. Discharged. However, since the discharge amount of each nozzle N is different in such discharge of each nozzle N, the thickness of the discharged ink is different depending on each scanning direction as shown in FIG. The film thickness becomes different, and the film thickness distribution in the pattern becomes non-uniform.

  On the other hand, when drawing this pattern with ejection timing correction, for example, correction pattern data shown in FIG. 5C, that is, ejection timing data is created. In the correction pattern data shown in FIG. 5C, for example, the nozzle N1, the nozzle N3, the nozzle N7, the nozzle N8, and the nozzle N10 are ejected at the timing of the first row, and the nozzles N1 to N1 are ejected at the timing of the second row. N4 and nozzles N7 to N10 are discharged, and then discharged from each nozzle N at the timing shown in FIG.

  When drawing is performed with such ejection timing correction, the film thickness distribution is uniform throughout the pattern as shown in FIG.

  Thus, in the ink jet drawing apparatus A and the pattern drawing method of the present embodiment, the nozzle discharge amount calculation unit 41 as the nozzle discharge amount calculation means discharges ink from each nozzle N once to the preliminary discharge substrate 6. Thus, the relative discharge amount per droplet of each nozzle is obtained. That is, in the present embodiment, when the relative discharge amount per droplet of each nozzle N is obtained, it is obtained by once ejecting a droplet from each nozzle N onto the preliminary ejection substrate 6, so that the conventional number 1000 Compared to volume measurement or weight measurement by the landing impact, the relative discharge amount per drop of each nozzle N can be easily obtained.

  Then, the number-of-discharges control unit 42 to be controlled next performs each scan drawn by each nozzle N in the pattern based on the relative discharge amount per droplet of each nozzle obtained by the nozzle discharge amount calculation unit 41. The number of ejections of each nozzle N is controlled so that the ejection amounts of the droplets ejected from each nozzle N in the entire directional area match.

  Therefore, by discharging ink from each nozzle N once to the preliminary discharge substrate 6, the relative discharge amount per droplet of each nozzle N is obtained, and the number of discharges of each nozzle N is controlled according to the pattern. As a result, the discharge amount of the entire scanning direction region drawn by each nozzle N in the pattern can be made constant, and the film thickness becomes constant for the entire scanning direction region.

  Conventionally, the timing at which the nozzles N are ejected is controlled by general ejection driving. Therefore, the number of ejections at each nozzle N can be controlled by simply increasing or decreasing the ejection timing. Easily.

  In the present embodiment, when the relative discharge amount per droplet of each nozzle N is obtained, it is obtained by once ejecting a droplet from each nozzle N onto the preliminary ejection substrate 6, so that the conventional number 1000 Compared to volume measurement or weight measurement by the landing impact, the relative discharge amount per drop of each nozzle N can be easily obtained.

  Therefore, it is possible to provide an ink jet drawing apparatus A and a pattern drawing method that can easily make the film thickness of the pattern constant by a method other than controlling the ejection speed by controlling the drive voltage.

  Further, in the ink jet drawing apparatus A of the present embodiment, the nozzle discharge amount calculation means includes an observation camera 12 as an image pickup means for picking up ink landing marks on the preliminary discharge substrate 6, and the observation camera 12. A discharge amount calculation unit 41a serving as a discharge amount calculation unit that calculates the relative discharge amount per droplet of each nozzle N by multiplying the square of the diameter of the landing track by a coefficient from the ink landing track imaged in this way; I have.

  As a result, the ink landing mark on the preliminary discharge substrate 6 is imaged by the observation camera 12, so the relative discharge amount per droplet of each nozzle N is calculated from the planar area of the landing mark. be able to. Specifically, the discharge amount calculation unit 41a obtains the relative discharge amount per droplet of each nozzle N from the square of the diameter of the landing mark. When the absolute amount is obtained, the square of the diameter of the landing mark is proportional to the absolute discharge amount per droplet of each nozzle. Therefore, if the predetermined coefficient is obtained in advance, the square of the diameter of the landing mark is obtained. By multiplying by a coefficient, the absolute discharge amount per droplet of each nozzle can be easily calculated.

  That is, in this embodiment, the diameter of the landing mark, which is an amount related to the discharge amount, is measured. In addition, the diameter of the landing mark is not an absolute amount, but a relative relationship is obtained. That is, the magnitude relationship is the same in the same preliminary ejection substrate 6, but the diameter of the landing mark changes when the film thickness or material of the ink receiving layer 6 b changes, and the magnitude relationship changes.

  Further, in the ink jet drawing apparatus A of the present embodiment, the discharge number control unit 42 as the discharge number control means sets the relative discharge amount per droplet of each nozzle N obtained by the nozzle discharge amount calculation unit 41. Based on the above, as a nozzle discharge number calculating means for calculating the discharge number of each nozzle N so that the discharge amount of ink discharged from each nozzle in the entire scanning direction region drawn by each nozzle N in the pattern is the same. A nozzle discharge number calculation unit 42a, and a discharge timing data generation unit 42b as discharge timing data generation means for generating discharge timing data of each nozzle N based on the discharge number of each nozzle N in the nozzle discharge number calculation unit 42a I have.

  Accordingly, in the discharge number control unit 42, the nozzle discharge number calculation unit 42 a determines each nozzle in the pattern based on the relative discharge amount per droplet of each nozzle N obtained by the nozzle discharge amount calculation unit 41. The number of ejections of each nozzle N is calculated so that the ejection amount of the ink ejected from each nozzle N in the entire scanning direction region drawn by N is the same. Then, the ejection timing data creation unit 42b creates ejection timing data for each nozzle N based on the number of ejections for each nozzle N in the nozzle ejection number computation unit 42a.

  Therefore, based on the discharge timing data of each nozzle N, the discharge amount of the droplets discharged from each nozzle N in the entire scanning direction region drawn by each nozzle N in the pattern is matched from each nozzle N. It can be discharged.

  In the ink jet drawing apparatus A of the present embodiment, it is preferable that the droplets are made of ink jet ink, and the preliminary ejection substrate 6 has a resist applied to the substrate 6a.

  That is, a resist such as a photoresist has a property that a landing mark is clearly left with respect to an ink jet ink and observation becomes easy. Accordingly, it is possible to easily obtain the relative discharge amount per droplet of each nozzle N from the landing mark of the ink jet ink discharged onto the preliminary discharge substrate 6.

  Further, in the ink jet drawing apparatus A of the present embodiment, the droplets are not applied to the ink that has undergone steps such as drying and baking after application, and to the impurities that are doped in the semiconductor or the ink having electrical insulation properties. It is preferably made of ink having solubility or non-penetration.

  In other words, a part of electricity flows in the semiconductor, and the semiconductor is doped with impurities to form a P-type semiconductor or an N-type semiconductor. Therefore, when a pattern is drawn on a semiconductor substrate or semiconductor layer for the purpose of preventing diffusion, the droplets have electrical conductivity or are soluble or permeable to impurities doped in the semiconductor. If this happens, the semiconductor will be adversely affected.

  In this respect, in this embodiment, the droplets are insoluble or non-soluble in an ink having an electrically insulating film or an impurity doped in a semiconductor after being subjected to steps such as drying and baking after coating. Since it is made of ink having penetrability, the semiconductor is not adversely affected. Therefore, application to a semiconductor substrate or a semiconductor layer is possible.

[Embodiment 2]
The following will describe another embodiment of the present invention with reference to FIGS. Configurations other than those described in the present embodiment are the same as those in the first embodiment. For convenience of explanation, members having the same functions as those shown in the drawings of the first embodiment are given the same reference numerals, and explanation thereof is omitted.

  In the ink jet drawing apparatus A of the first embodiment, only one head 21 exists in the head unit 22, but in the ink jet drawing apparatus B as the pattern drawing apparatus of the present embodiment, as shown in FIG. The difference is that the head unit 22 includes a plurality of heads.

  In the ink jet drawing apparatus B, as shown in FIG. 6, the head unit 22 includes, for example, a plurality of first heads 21a and second heads 21b as a plurality. Since the configuration of the ink jet drawing apparatus B is the same as that of the ink jet drawing apparatus A except that the number of heads is plural, the description thereof is omitted.

  In the present embodiment, even when the same drive voltage is applied to the two first heads 21a and the second head 21b mounted on the head unit 22, the relative discharge volume per droplet differs depending on the head. Is described below with reference to FIGS. Here, FIG. 7 is a perspective view showing the shapes of the nozzles N of the first head 21a and the second head 21b and their landing marks. FIG. 8 is a flowchart showing a drawing method when the size of the landing mark differs depending on the nozzles N of the first head 21a and the second head 21b. Further, FIG. 9A is a plan view showing a pattern to be drawn, and FIG. 9B is a cross-section of the ink film that is drawn and the ink discharge position when a regular ink discharge is performed with the current nozzle N. FIG. 9C is an explanatory view showing the ink discharge position in the pattern and the cross-sectional shape of the ink film that can be drawn when correcting the discharge timing of the nozzle N and performing ink discharge. It is.

  First, as shown in FIG. 8 and FIG. 7, before the pattern is drawn, ink is ejected from the nozzles N of the first head 21a and the second head 21b to the preliminary ejection substrate 6 so that the landing marks are removed. The diameter is measured (S1). Here, in the present embodiment, landing marks of only the representative nozzles N are measured as the nozzles N of the first head 21a and the second head 21b. The representative nozzle N can be, for example, the nozzle N at each end of the first head 21a and the second head 21b. The material of the preliminary discharge substrate 6 is the same as that of the first embodiment.

  A landing mark formed when ink is ejected onto the preliminary ejection substrate 6 is captured by an imaging means such as an observation camera 12 shown in FIG. (Or discharge volume).

Specifically, an approximate expression that the square of the diameter (rm) of the landing mark is proportional to the discharge volume (Vm) Vm = D × rm ^ 2 (D: constant) (Expression 1)
Thus, the discharge amount (or discharge volume) (Vm) of each nozzle N is obtained.

  Next, based on the ejection amount (or ejection volume) (Vm) of each nozzle N, as shown in FIG. 8, the ink ejected from each nozzle N in the entire scanning direction region drawn by each nozzle N in the pattern. Correction data for each nozzle N is created so that the discharge amount is constant (S2).

The correction data for each nozzle N is based on the above (Equation 1).
Correction coefficient Cm = K / Vm (K: constant) (Formula 2)
Is calculated as

  Then, based on the correction coefficient Cm, correction pattern data taking into consideration correction data, that is, ejection timing data is created for the pattern data to be drawn (S3), and drawing (printing) is performed based on the correction pattern data. (S4).

  Specifically, if there is a pattern to be drawn as shown in FIG. 9A, and this pattern is drawn without correcting the ejection timing, for example, as shown in FIG. Nozzle N3, Nozzle N5, Nozzle N7, Nozzle N13, Nozzle N15, Nozzle N17 are discharged at the timing of one row, and Nozzle N4, Nozzle N6, Nozzle N8, Nozzle N14, Nozzle N16 at the timing of the second row. Nozzle N18 is discharged and discharged in the following repetition. In the nozzle N number, the odd-numbered nozzle N indicates the nozzle N of the first head 21a, and the even-numbered nozzle N indicates the nozzle N of the second head 21b.

  However, since the discharge amount of each nozzle N is different between the first head 21a and the second head 21b in such discharge of each nozzle N, the discharged ink film thickness is as shown in FIG. 9B. Further, the ink film thickness varies depending on each scanning direction, and the film thickness distribution in the pattern becomes non-uniform.

  Specifically, when there is a pattern to be drawn as shown in FIG. 9A, when this pattern is drawn without correcting the ejection timing, for example, as shown in FIG. Nozzle N3, Nozzle N5, Nozzle N7,..., Nozzle N13, Nozzle N15, Nozzle N17 are ejected at the timing of one row, and Nozzle N4, Nozzle N6, Nozzle N8,. Nozzle N18 is discharged and discharged in the following repetition. In the nozzle N number, the odd-numbered nozzle N indicates the nozzle N of the first head 21a, and the even-numbered nozzle N indicates the nozzle N of the second head 21b.

  However, in such discharge of each nozzle N, since the discharge amount of the nozzle N is different in the first head 21a and the second head 21b, the discharged ink film thickness is as shown in FIG. 9B. The ink film thickness varies depending on each scanning direction, and the film thickness distribution in the pattern becomes non-uniform.

  On the other hand, when this pattern is drawn with the discharge timing corrected, for example, correction pattern data, that is, discharge timing data shown in FIG. 9C is created. In the correction pattern data shown in FIG. 9C, for example, the nozzle N3, the nozzle N5, the nozzle N7, and the nozzle N13, the nozzle N15, and the nozzle N17 are ejected at the timing of the first row, and at the timing of the second row, The nozzle N4, the nozzle N6, the nozzle N8, the nozzle N14, the nozzle N16, and the nozzle N18 are discharged, and at the timing of the third row, the nozzle N3, the nozzle N4, the nozzle N5, the nozzle N7, the nozzle N8, the nozzle N13, and the nozzle N14 Nozzle N15, Nozzle N17, and Nozzle N18 are discharged, and then discharged from each nozzle N of the first head 21a and the second head 21b at the timing shown in FIG.

  When drawing is performed with such ejection timing correction, the film thickness distribution is uniform as a whole pattern as shown in FIG.

  As described above, in the ink jet drawing apparatus B as the pattern drawing apparatus of the present embodiment, a plurality of first heads 21a and second heads 21b having a plurality of nozzles N arranged in a straight line are provided, and the nozzles The nozzle discharge amount calculation unit 41 as the discharge amount calculation means discharges droplets from each one nozzle N in the plurality of first heads 21a and second heads 21b to the preliminary discharge substrate 6 once to each first head. 21a and the second head 21b determine the relative discharge amount per droplet of the nozzle N, and the discharge number control unit 42 serving as a discharge number control means calculates the nozzle discharge amount of the nozzle in each head determined by the nozzle discharge amount calculation unit 41. Based on the relative discharge amount per droplet, each nozzle N in each first head 21a and each second head 21b in the pattern draws. Of each entire scan direction area, controlling the number of discharges of each nozzle N for each first head 21a and second head 21b as the ejection amount of ink droplets ejected from the nozzles N are matched respectively.

  That is, when a plurality of first heads 21a and second heads 21b having a plurality of nozzles N arranged in a straight line are provided, the discharge amount to the nozzles N between the plurality of first heads 21a and the second heads 21b. There may be a difference.

  In this case, the relative discharge amount per droplet of each nozzle N in each of the first head 21a and the second head 21b is obtained. For example, ink is ejected from the nozzles N existing at the ends of a plurality of nozzles N arranged in a straight line in each of the first head 21a and the second head 21b, and the relative ejection amount per droplet of the nozzle N is set. Ask.

  As a result, based on the relative discharge amount per droplet representing the nozzles N of the first head 21a and the second head 21b, the discharge amount is set for each of the first head 21a and the second head 21b based on the pattern. It becomes possible to control.

[Embodiment 3]
The following will describe another embodiment of the present invention with reference to FIGS. The configurations other than those described in the present embodiment are the same as those in the first embodiment and the second embodiment. For convenience of explanation, members having the same functions as those shown in the drawings of Embodiment 1 and Embodiment 2 are given the same reference numerals, and explanation thereof is omitted.

  The ink jet drawing apparatus B of the present embodiment is provided with two first heads 21a and second heads 21b in the head unit 22 as in the second embodiment.

  However, in the second embodiment, there is a difference in the discharge amount of the nozzle N between the first head 21a and the second head 21b. In each of the first head 21a and the second head 21b, the nozzle N There was no difference in the discharge amount.

  However, in the present embodiment, there is a difference in the discharge amount of the nozzle N between the first head 21a and the second head 21b, and each of the first head 21a and the second head 21b also has the nozzle N of the nozzle N. A case where there is a difference in discharge amount will be described below with reference to FIGS. Here, FIG. 10 is a perspective view showing the shapes of the nozzles N of the first head 21a and the second head 21b and their landing marks. FIG. 11 is a flowchart showing a drawing method when the size of the landing mark differs depending on the nozzles N of the first head 21a and the second head 21b. Further, FIG. 12A is a plan view showing a pattern to be drawn, and FIG. 12B is a cross-section of the ink film formed by drawing the ink discharge position when performing the regular ink discharge with the current nozzle N. FIG. 12C is an explanatory diagram showing the ink ejection position in the pattern and the cross-sectional shape of the ink film that can be drawn when correcting the ejection timing of the nozzle N and performing ink ejection. It is.

  First, as shown in FIGS. 11 and 10, before the pattern is drawn, ink is ejected from the nozzles N of the first head 21a and the second head 21b to the preliminary ejection substrate 6 to form landing marks. Is measured (S21). Here, in the present embodiment, as the nozzles N of the first head 21a and the second head 21b, landing marks of all the nozzles N in the first head 21a and the second head 21b are measured. The material of the preliminary ejection substrate 6 is the same as that in the first and second embodiments.

  A landing mark formed when ink is ejected onto the preliminary ejection substrate 6 is captured by an imaging means such as an observation camera 12 shown in FIG. (Or discharge volume).

Specifically, an approximate expression that the square of the diameter (rm) of the landing mark is proportional to the discharge volume (Vm) Vm = D × rm ^ 2 (D: constant) (Expression 1)
Thus, the discharge amount (or discharge volume) (Vm) of each nozzle N is obtained.

  Next, based on the discharge amount (or discharge volume) (Vm) of each nozzle N, as shown in FIG. 11, the ink discharged from each nozzle N in the entire scanning direction region drawn by each nozzle N in the pattern. Correction data for each nozzle N is created so that the discharge amount is constant (S2).

The correction data for each nozzle N is based on the above (Equation 1).
Correction coefficient Cm = K / Vm (K: constant) (Formula 2)
Is calculated as

  Then, based on the correction coefficient Cm, correction pattern data taking into consideration correction data, that is, ejection timing data is created for the pattern data to be drawn (S3), and drawing (printing) is performed based on the correction pattern data. (S4).

  Specifically, when there is a pattern to be drawn shown in FIG. 12A, when this pattern is drawn without correcting the ejection timing, for example, as shown in FIG. Nozzle N3, Nozzle N5, Nozzle N7,..., Nozzle N13, Nozzle N15, Nozzle N17 are discharged at the timing of the second row, and Nozzle N4, Nozzle N6, Nozzle N8,. Nozzle N18 is discharged and discharged in the following repetition. In the nozzle N number, the odd-numbered nozzle N indicates the nozzle N of the first head 21a, and the even-numbered nozzle N indicates the nozzle N of the second head 21b.

  However, since the discharge amount of each nozzle N is different between the first head 21a and the second head 21b in such discharge of each nozzle N, the discharged ink film thickness is as shown in FIG. Further, the ink film thickness varies depending on each scanning direction, and the film thickness distribution in the pattern becomes non-uniform. Further, since there is a time delay in ejection between the second head 21b and the second head 21b, the film thickness differs depending on the measurement location as shown in FIG.

  On the other hand, when this pattern is drawn with the ejection timing corrected, for example, correction pattern data, that is, ejection timing data shown in FIG. 12C is created. In the correction pattern data shown in FIG. 12C, for example, at the timing of the second row, nozzle N3, nozzles N5 to N7, nozzles N9 to N11, nozzles N13 to N15, nozzle N17, and nozzle N18 are ejected. At the timing of the row, nozzle N4, nozzle N6, nozzle N8,..., Nozzle N14, nozzle N16, and nozzle N18 are discharged, and at the timing of the fourth row, nozzles N3 to N5, nozzles N7 to N9, nozzles N11 to N13, nozzles The ink is discharged at N15 to N17, and is discharged from the nozzles N of the first head 21a and the second head 21b at the timing shown in FIG.

  When drawing is performed with such ejection timing correction, the film thickness distribution is uniform as a whole pattern as shown in FIG.

  As described above, in the ink jet drawing apparatus B as the pattern drawing apparatus of the present embodiment, a plurality of first heads 21a and second heads 21b having a plurality of nozzles N arranged in a straight line are provided, and the nozzles The nozzle discharge amount calculation unit 41 as the discharge amount calculation means discharges ink as droplets from the nozzles N of the first head 21a and the second head 21b to the preliminary discharge substrate 6 once, respectively. The discharge number control unit 42 serving as a discharge number control unit calculates the relative discharge amount per droplet of the first head 21a and the nozzles in the second head 21b determined by the nozzle discharge amount calculation unit 41. Each nozzle N in each of the first head 21a and the second head 21b in the pattern draws based on the relative discharge amount of N per droplet. Of each entire scan direction area, controlling the number of discharges of each nozzle N as the discharge amount of ink ejected from the nozzles N are matched respectively.

  That is, when a plurality of first heads 21a and second heads 21b having a plurality of nozzles N arranged in a straight line are provided, the discharge amount to the nozzles N between the plurality of first heads 21a and the second heads 21b. And there may be a difference in the discharge amount between the nozzles N of the first head 21a and the second head 21b.

  In this case, in the present embodiment, the nozzle discharge amount calculation unit 41 performs preliminary discharge for each of the nozzles N to each of the first head 21a and the second head 21b, and the per-droplet for all the nozzles N. Find the relative discharge rate.

  Then, the number-of-discharges control unit 42, based on the relative discharge amount per droplet from all the nozzles N, draws each region in the scanning direction drawn by each nozzle N in each of the first head 21 a and the second head 21 b in the pattern. The number of ejections of each nozzle N is controlled so that the entire ejection amount of the droplets ejected from each nozzle N is the same.

  Therefore, in the present embodiment, even when a plurality of first heads 21a and second heads 21b having a plurality of nozzles N arranged in a straight line are provided, preliminary ejection is performed for all nozzles N, For each nozzle N, the number of ejections of each nozzle N is controlled.

  The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and the technical means disclosed in different examples can be appropriately combined. Embodiments to be described are also included in the technical scope of the present invention.

  The present invention can be applied to, for example, a pattern drawing apparatus such as an ink jet drawing apparatus and a pattern drawing method in which a plurality of nozzles are used to discharge a droplet in the scanning direction to draw a pattern. Further, the substrate to be drawn can be applied to drawing on a semiconductor, a display device and the like in addition to general paper.

DESCRIPTION OF SYMBOLS 1 Substrate 2 Substrate stage 3 Cassette 4 Substrate take-out part 4a Arm 5 Placement part 5a Placement robot 6 Preliminary discharge board 6a Substrate 6b Ink receiving layer 10 Alignment part 11 Alignment camera 12 Observation camera (imaging means)
21 Head 21a First head (head)
21b Second head (head)
22 Head unit 30 Substrate dispensing unit 40 Discharge drive control unit 41 Nozzle discharge amount calculation unit (nozzle discharge amount calculation means)
41a Discharge amount calculation unit (discharge amount calculation means)
42 Discharge frequency control unit (Discharge frequency control means)
42a Nozzle discharge frequency calculation unit (nozzle discharge frequency calculation means)
42b Discharge timing data creation unit (discharge timing data creation means)
A Inkjet drawing device (pattern drawing device)
B Inkjet drawing device (pattern drawing device)
N nozzle

Claims (8)

In a pattern drawing apparatus that draws a pattern by discharging droplets in the scanning direction using a plurality of nozzles,
Nozzle discharge amount calculating means for determining a relative discharge amount per droplet of each nozzle by discharging droplets from each nozzle once to the preliminary discharge substrate;
Based on the relative discharge amount per droplet of each nozzle determined by the nozzle discharge amount calculation means, the droplets discharged from each nozzle in the entire scanning direction region drawn by each nozzle in the pattern are drawn. A pattern drawing apparatus, comprising: a discharge number control means for controlling the number of discharges of each nozzle so that the discharge amounts coincide with each other. The nozzle discharge amount calculating means includes
Imaging means for imaging the landing trace of the droplet on the preliminary ejection substrate;
Discharge amount calculation means for obtaining a relative discharge amount per droplet of each nozzle by multiplying a square of the diameter of the droplet by the coefficient from the landing trace of the droplet imaged by the imaging means. The pattern drawing apparatus according to claim 1. The discharge number control means includes
Based on the relative discharge amount per droplet of each nozzle obtained by the nozzle discharge amount calculation means, the droplets discharged from each nozzle in the entire scanning direction region drawn by each nozzle in the pattern are drawn. A nozzle discharge number calculating means for calculating the number of discharges of each nozzle so that the discharge amounts respectively match,
3. The pattern drawing apparatus according to claim 1, further comprising discharge timing data creating means for creating discharge timing data of each nozzle based on the number of times of ejection of each nozzle in the nozzle ejection number calculating means. . The droplets are made of inkjet ink,
4. The pattern drawing apparatus according to claim 1, wherein the preliminary ejection substrate is formed by applying a resist to the substrate.   The droplets are made of ink having electrical insulation when dried or baked after coating, or ink having non-solubility or non-penetration with respect to impurities doped in a semiconductor. The pattern drawing apparatus according to any one of claims 1 to 4. A plurality of heads having a plurality of nozzles arranged in a straight line are provided,
The nozzle discharge amount calculating means obtains a relative discharge amount per droplet of the nozzle in each head by discharging the droplet from each nozzle in the plurality of heads once to the preliminary discharge substrate,
Each of the ejection number control means is based on the relative ejection amount per droplet of the nozzle in each head determined by the nozzle ejection amount calculation means, and each scanning direction area drawn by each nozzle in each head in the pattern 6. The pattern according to claim 1, wherein the number of ejections of each nozzle is controlled for each head so that the ejection amount of droplets ejected from each nozzle coincides with each other. Drawing device. A plurality of heads having a plurality of nozzles arranged in a straight line are provided,
The nozzle discharge amount calculation means obtains a relative discharge amount per droplet of each nozzle by discharging droplets from each nozzle of each head once onto the preliminary discharge substrate,
The ejection number control unit is configured to scan each drawing direction of each nozzle in each head in the pattern based on a relative ejection amount per droplet of each nozzle in each head obtained by the nozzle ejection amount calculation unit. The pattern drawing apparatus according to claim 1, wherein the number of ejections of each nozzle is controlled so that the ejection amounts of the droplets ejected from each nozzle in the entire region are matched with each other. . In a pattern drawing method for drawing a pattern by discharging droplets in a scanning direction using a plurality of nozzles,
A nozzle discharge amount calculating step for determining a relative discharge amount per droplet of each nozzle by discharging droplets from each nozzle once to the preliminary discharge substrate;
Based on the relative discharge amount per droplet of each nozzle obtained in the nozzle discharge amount calculation step, the droplets discharged from each nozzle in the entire scanning direction region drawn by each nozzle in the pattern are drawn. And a discharge number control step of controlling the number of discharges of each nozzle so that the discharge amounts coincide with each other.

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