JP2011135496A - Waveguide filter with sealing function - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a waveguide filter with a sealing function, capable of preventing deterioration in loss and reducing a manufacturing cost. <P>SOLUTION: The waveguide filter 1 with a sealing function which is bonded to an opening portion B1 of a first wavguide 30a and an opening portion B2 of a second waveguide 30b is configured by bonding and integrating a first sealing plate 10a in which a first metal plate 11a having a first passage hole A1 for allowing an electromagnetic wave propagating through the inside of the first waveguide 30a to pass is formed and a first dielectric 12a is sealed on the formed first passage hole A1, a spacer 20 formed of a metal plate 21 in which a second passage hole A2 for allowing the electromagnetic wave to pass is formed, and a second sealing plate 10b formed of a second metal plate 11b in which a third passage hole A3 for allowing the electromagnetic wave to pass is formed and a second dielectric 12b is sealed in the formed third passage hole A3. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a waveguide sealing technique and a filter technique.

  In a system such as a device or a terminal that uses electromagnetic waves, an RF filter and a sealing mechanism may be arranged at the front end (circuit portion of the transmitting / receiving end on the antenna side). The RF filter prevents electromagnetic waves from being radiated outside the band permitted to be used by law, and is an essential component when the system is commercialized. The sealing mechanism maintains the reliability of the system, and is an important mechanism for preventing the deterioration over time by isolating the IC chip stored in the system from the outside atmosphere.

  In particular, in a millimeter wave band in which a waveguide is used for the input / output portion of the system, a waveguide filter is often used as the RF filter. Various sealing techniques have been proposed. According to Patent Document 1, as shown in FIG. 9, the dielectric 12 having a width larger than the width of the opening B in the waveguide 30 (patent) And a technique of bonding so as to close the opening B of the waveguide 30 using a dielectric lid of Document 1). Since the gap between the dielectric 12 and the waveguide 30 is filled with the adhesive 40, it is possible to protect the IC chip (not shown) in the system from the outside atmosphere. As a result, even in a system using millimeter-wave band frequencies, it is possible to provide a band control function and a sealing function at the front end by connecting the waveguide filter and the sealing mechanism. .

JP 2004-72447 A

Eiji Mori, “LC Filter Design & Production”, CQ Publisher

  However, in the frequency band exceeding 100 GHz, the signal loss of the electromagnetic wave during propagation through the waveguide is large, and the total insertion loss increases when the waveguide filter and the sealing mechanism are simply connected. There was a problem that the voltage and sensitivity were lowered.

  Further, since the wavelength of the signal is extremely short, it is required to precisely process the waveguide filter and the sealing mechanism, and there is a problem in that the manufacturing cost for manufacturing these separately is high.

  This invention is made | formed in view of the said subject, and makes it a subject to provide the waveguide filter with a sealing function which can reduce a manufacturing cost while preventing the fall of a loss.

  According to the first aspect of the present invention, in the waveguide filter with a sealing function, which is bonded to the opening of the waveguide, a first passage hole through which the electromagnetic wave propagating through the waveguide passes is formed. A plate-like first conductor having a dielectric material sealed in the first passage hole and a plate-like second conductor having a second passage hole through which the electromagnetic wave passes. It is characterized by being integrated.

  According to the present invention, in the waveguide filter with a sealing function that is bonded to the opening of the waveguide, the first passage hole that allows the electromagnetic wave propagating through the inside of the waveguide to pass therethrough is formed. A plate-like first conductor in which a dielectric is sealed in the first passage hole and a plate-like second conductor in which a second passage hole for allowing electromagnetic waves to pass are bonded and integrated. Therefore, it is possible to provide a waveguide filter with a sealing function that realizes both the band control function and the sealing function, prevents the loss from being reduced, and can reduce the manufacturing cost.

  According to a second aspect of the present invention, the characteristic impedance of the first passage hole determined based on the shape of the first passage hole and / or the dielectric constant of the dielectric, the thickness of the first passage hole, the first passage hole, The characteristic impedance of the second passage hole determined based on the shape of the two passage holes and the thickness of the second passage hole can be changed.

  According to the present invention, based on the characteristic impedance of the first passage hole determined based on the shape of the first passage hole and / or the dielectric constant of the dielectric, the thickness of the first passage hole, and the shape of the second passage hole. Since the characteristic impedance at the determined second pass hole and the thickness of the second pass hole can be changed, the stop band and the pass band can be adjusted in the band control function.

  According to a third aspect of the present invention, at least one of the first conductor and the second conductor is two or more, and the first conductor and the second conductor are alternately arranged. It is characterized by being bonded.

  According to the present invention, at least one of the first conductor and the second conductor is two or more, and the first conductor and the second conductor are alternately bonded. Better pass characteristics can be obtained.

  The present invention according to claim 4 is characterized in that the size of the first passage hole and the second passage hole is smaller than the size of the opening of the waveguide.

  According to the present invention, since the size of the first passage hole and the second passage hole is smaller than the size of the opening of the waveguide, it is possible to suppress the generation of higher order modes.

  The present invention according to claim 5 is characterized in that the first passage hole and the second passage hole have the same shape as the opening of the waveguide.

  The present invention described in claim 6 is characterized in that the shape of the first passage hole is different from the shape of the second passage hole.

  According to a seventh aspect of the present invention, the shapes of the first passage hole and the second passage hole are point-symmetric, and the midpoint of the first passage hole and the second passage hole is the waveguide. It is characterized by overlapping with the midpoint of the opening of the tube.

  According to the present invention, since the midpoint of the first and second passage holes overlaps the midpoint of the opening of the waveguide, the opening of the waveguide is sealed while maintaining good propagation characteristics. Can be stopped.

  The present invention according to claim 8 is characterized in that the shape of the first passage hole or the second passage hole is at least one of a polygon, a circle, an ellipse, a concave, a convex, and a star. And

  ADVANTAGE OF THE INVENTION According to this invention, the waveguide filter with a sealing function which can reduce a manufacturing cost while preventing the fall of a loss can be provided.

It is the perspective view which looked at the waveguide filter with a sealing function concerning a 1st embodiment from the perspective direction. It is sectional drawing which shows the X-X 'cross section of the waveguide filter with a sealing function shown in FIG. It is a schematic diagram which shows the outline | summary of a filter function. It is a graph which shows the electromagnetic wave passage characteristic of one sealing board. It is a graph which shows the electromagnetic wave transmission characteristic of the waveguide filter with a sealing function which concerns on 1st Embodiment. It is the perspective view which looked at the waveguide sealing material which concerns on 2nd Embodiment from the perspective direction. It is a figure which shows an example of the shape of the passage hole formed in the metal plate. It is the figure which looked at the positional relationship of a passage hole and an opening part from the upper direction. It is a figure explaining the conventional sealing technique.

  Hereinafter, a waveguide filter with a sealing function according to an embodiment will be described with reference to the drawings.

[First Embodiment]
First, the configuration of the waveguide filter with a sealing function according to the first embodiment will be described. FIG. 1 is a perspective view of the waveguide filter with a sealing function according to the first embodiment viewed from a perspective direction. FIG. 2 is a cross-sectional view showing an XX ′ cross section of the waveguide filter with a sealing function shown in FIG. This waveguide filter with a sealing function 1 is composed of a first sealing plate 10a, a spacer 20, and a second sealing plate 10b.

  The first sealing plate 10a is composed of a first metal plate 11a and a first dielectric 12a whose both surfaces (the upper surface and the lower surface in FIG. 1 or 2) are planarized. In the central region of the first metal plate 11a, an electromagnetic wave propagating through the inside of the first waveguide 30a (an electromagnetic wave propagating upward from the lower side of FIG. 1 or FIG. 2) is passed. A first passage hole A1 having the same shape as the opening B1 of the wave tube 30a is formed. In addition, the first dielectric 12a such as glass is sealed in the formed first passage hole A1 (simply fitted into the first passage hole A1).

  The spacer 20 is composed of a metal plate 21 whose both surfaces are flattened, and an electromagnetic wave propagating through the inside of the first waveguide 30a is allowed to pass through the center region of the first waveguide 30a. A second passage hole A2 having the same shape as the shape of the opening B1 is formed. Note that, unlike the first sealing plate 10a and the second sealing plate 10b described later, the dielectric is not sealed in the second passage hole A2.

  The second sealing plate 10b includes a second metal plate 11b and a second dielectric 12b whose both surfaces are flattened. Similarly to the first sealing plate 10a, the central region of the second metal plate 11b allows the electromagnetic wave propagating through the first waveguide 30a to pass therethrough, so that the opening B1 of the first waveguide 30a A third passage hole A3 having the same shape as the shape is formed. A second dielectric 12b such as glass is sealed in the formed third passage hole A3.

  Next, a manufacturing process of the waveguide filter with a sealing function 1 according to the present embodiment will be described.

  First step: First, a first passage hole A1 is formed by metal processing in the central region of the first metal plate 11a, and the first dielectric 12a is sealed in the first passage hole A1, and then the first sealing plate 10a is produced. Similarly, the third passage hole A3 is formed by metal processing in the central region of the second metal plate 11b, and the second dielectric 12b is sealed in the third passage hole A3 to produce the second sealing plate 10b. To do. The spacer 20 is produced only by forming the second passage hole A2 in the central region of the metal plate 21 by metal processing.

  Second step: Next, both surfaces of the first sealing plate 10a, the spacer 20, and the second sealing plate 10b manufactured in the first step are flattened.

  Third step: Thereafter, one surface of the first metal plate 11a and one surface of the metal plate 21 are bonded to each other so that the midpoint of the first passage hole A1 and the midpoint of the second passage hole A2 overlap. (Not shown), and the other surface of the metal plate 21 and one of the second metal plates 11b so that the middle point of the second passage hole A2 and the middle point of the third passage hole A3 overlap. The surface is bonded and integrated. Thereby, one waveguide filter 1 with a sealing function is completed.

  Fourth step: Finally, a marking for alignment is attached to the first waveguide 30a, and the midpoint of the opening B1 in the first waveguide 30a and the midpoint of the first passage hole A1 overlap. Thus, the peripheral region of the other surface of the first metal plate 11a is defined as the opening B1 of the first waveguide 30a (more precisely, the opening end of the first waveguide 30a forming the opening B1). ) And braze to cover. Similarly, the alignment mark is attached to the second waveguide 30b, and the middle point of the opening B2 in the second waveguide 30b and the middle point of the third passage hole A3 are overlapped. The peripheral region of the other surface of the two metal plates 11b covers the opening B2 of the second waveguide 30b (more precisely, the opening end of the second waveguide 30b forming the opening B2). And braze to adhere.

  Through the above first to fourth steps, an IC chip (see FIG. 5) is stored inside the housing by sealing the opening B1 of the first waveguide 30a while securing a transmission path for a desired electromagnetic wave signal. It is possible to manufacture a waveguide filter with a sealing function capable of protecting a not-shown) from the outside atmosphere.

  In addition, according to the waveguide filter with a sealing function described in the present embodiment, the structure of the waveguide filter and the sealing mechanism are integrated, and filtering and sealing can be performed simultaneously. Loss is lower than that of a system in which a waveguide filter and a sealing mechanism are connected, and electromagnetic wave signals can be transmitted without impairing the function of the RF section, and the manufacturing cost can be reduced. It becomes. In addition, since the planarization process of the metal plate and the dielectric is performed after the dielectric is sealed in the through hole formed by metal processing, the processing error can be extremely reduced.

  Furthermore, the first dielectric 12a is sealed in the first passage hole A1 formed in the first metal plate 11a, and the first metal 12a is bonded to the first waveguide 30a instead of the first dielectric 12a. Since it is formed by the plate 11a, it becomes possible to prevent the shape change of the first dielectric 12a due to the flow of the adhesive used for the adhesion, and the characteristic impedance and the first impedance at the first passage hole A1. The mismatch with the characteristic impedance inside the one waveguide 30a can be suppressed, and the opening of the waveguide can be sealed while maintaining good propagation characteristics.

  In the present embodiment, for convenience of explanation, the waveguide is described as being divided into the first waveguide 30a and the second waveguide 30b, but the first waveguide 30a is different from the first waveguide 30a. The second waveguide 30b may be the same waveguide, and the waveguide filter 1 with a sealing function may be used in the middle of the same waveguide.

  At present, there are various types of waveguides depending on the frequency characteristics of signals to be handled. The mainstream waveguide is a rectangular waveguide or a circular waveguide, and the shape of the opening is a rectangle or a circle with an aspect ratio of about 1: 2, but the waveguide described in this embodiment is The following description will be made assuming that the shape of the first through-hole A1 to the third through-hole A3 is a rectangular waveguide and is formed in each metal plate.

  Here, in the present embodiment, the horizontal length x, the vertical length y, and the thickness constituting the shape of the first passage hole A1 formed in the first metal plate 11a of the first sealing plate 10a. The value of the length d and the value of the dielectric constant ε of the first dielectric 12a are parameters that can be arbitrarily changed. That is, since the shape of the first passage hole A1 formed in the first sealing plate 10a and the dielectric constant of the first dielectric 12a are variable, the shape of the first passage hole A1 and the first dielectric 12a The characteristic impedance at the first passage hole A1 determined by the dielectric constant can be arbitrarily set by the designer.

  Similarly, parameters that can arbitrarily change the values of the horizontal length xs, the vertical length ys, and the thickness ds constituting the shape of the second passage hole A2 formed in the metal plate 21 of the spacer 20. It is said. That is, since the shape of the second passage hole A2 formed in the spacer 20 is variable, the characteristic impedance at the second passage hole A2 determined by the shape of the second passage hole A2 can be arbitrarily set by the designer. Is possible.

  Similarly, each of the horizontal length xt, the vertical length yt, and the thickness dt constituting the shape of the third passage hole A3 formed in the second metal plate 11b of the second sealing plate 10b, and The value of the dielectric constant εt of the second dielectric 12b is a parameter that can be arbitrarily changed. That is, since the shape of the third passage hole A3 formed in the second sealing plate 10b and the dielectric constant of the second dielectric 12b are variable, the shape of the third passage hole A3 and the second dielectric 12b The characteristic impedance at the third passage hole A3 determined by the dielectric constant can be arbitrarily set by the designer.

  Here, as an adverse effect of the change in the size of the effective opening surface in the waveguide (such as the difference width between the opening B of the waveguide 30 and the dielectric 12 shown in FIG. 9), the opening in the waveguide There is an adverse effect that the characteristic impedance largely deviates before and after the section. When the frequency is low and the wavelength is sufficiently larger than that of the dielectric, the difference in characteristic impedance does not affect the signal propagation. However, in the case of a waveguide that handles signals in a frequency band such as 90 GHz to 140 GHz such as the WR-8 waveguide, the wavelength of the propagating signal is short (the wavelength of the 90 GHz signal is about 3.3 mm, 140 GHz). The signal is about 2.1 mm), and the thickness of the dielectric used for the sealing application cannot be ignored. As a result, due to such mismatching of characteristic impedance, a reflected wave based on the impedance difference is generated in the waveguide, which greatly affects the propagation characteristics. Therefore, as described above, in the present embodiment, the characteristic impedance in each of the first passage hole A1 to the third passage hole A3 can be changed. Therefore, the characteristic impedance in each passage hole and the inside of the first waveguide 30a can be changed. Inconsistency (difference) with the characteristic impedance can be suppressed, and the opening B1 of the first waveguide 30a can be sealed while maintaining good propagation characteristics.

  Further, among the elements constituting the shape of the first passage hole A1 of the first metal plate 11a in the first sealing plate 10a, the value of the horizontal length x and the value of the vertical length y, and the spacer 20 Among the elements constituting the shape of the second passage hole A2 of the metal plate 21, the value of the horizontal length xs and the value of the vertical length ys, and the second of the second metal plate 11b in the second sealing plate 10b. Since the value of the horizontal length xt and the value of the vertical length yt of the elements constituting the shape of the three passage holes A3 can be arbitrarily set, the first passage hole A1 to the third passage holes The size of A3 can be made smaller than the size of the opening B1 of the first waveguide 30a.

  Here, the generation of higher-order modes is another adverse effect caused by the change in the size of the effective aperture surface in the waveguide. The higher-order mode is a mode in which the direction of the electric field of the electromagnetic wave is different from the propagation mode assumed by the waveguide, which leads to an increase in passage loss and deterioration of reflection characteristics. Therefore, as described above, in the present embodiment, the size of the first passage hole A1 to the third passage hole A3 can be made smaller than the size of the opening B1 of the first waveguide 30a. The effect of suppressing the mismatch of the characteristic impedance and the effect of suppressing the occurrence of higher order modes can be obtained at the same time.

  Note that the values of the thickness d of the first passage hole A1, the thickness ds of the second passage hole A2, and the thickness dt of the third passage hole A3 satisfy the desired sealing characteristics and durability characteristics. The minimum value is limited, but the maximum value can be set arbitrarily. For example, the value of the thickness d can be set near an integral multiple of a half wavelength of the wavelength of the electromagnetic wave passing through the first dielectric 12a, and the influence of the difference in characteristic impedance can be further reduced.

  So far, among the functions and effects obtained from the structure of the waveguide filter with a sealing function described above, the effect of realizing the loss reduction and the reduction of the manufacturing cost, the basic sealing function, and the good propagation characteristics are maintained. In the following, the band control function (filter function) will be described.

  In general, when it is desired to block the passage of a certain frequency band, as shown in FIG. 3, the filter circuits F in which the stop band is determined based on the characteristic impedance Z and the length l in the signal traveling direction are connected in multiple stages. For example, the filter function is designed by connecting the first filter circuit F1 to the third filter circuit F3 in series. As a result, it is possible to output from the output terminal out only the signal in the desired frequency band among the signals input from the input terminal in.

  The same applies to the case of filtering the frequency band of the electromagnetic wave propagating through the waveguide, and the first filter circuit F1 shown in FIG. 3 corresponds to the first sealing plate 10a (the characteristics shown in FIG. 3). The impedance Z1 corresponds to the characteristic impedance in the first passage hole A1, the length l1 corresponds to the thickness d in the first passage hole A1, and the second filter circuit F2 corresponds to the spacer 20 (the characteristic impedance Z2 is It corresponds to the characteristic impedance in the second passage hole A2, the length l2 corresponds to the thickness ds in the second passage hole A2, and the third filter circuit F3 corresponds to the second sealing plate 10b (characteristic impedance Z3). Corresponds to the characteristic impedance at the third passage hole A3, and the length l3 corresponds to the thickness dt at the third passage hole A3).

  That is, each hole region of the first passage hole A1 to the third passage hole A3 so that the electromagnetic wave propagating through the first waveguide 30a passes through the waveguide filter 1 with a sealing function (see FIG. 1 or FIG. Since the first sealing plate 10a, the spacer 20, and the second sealing plate 10b are bonded and integrated in an overlapped state (when viewed from the upper side of 2), the band control function is also realized. Is possible. This will be specifically described below.

  First, a case where only one sealing plate is bonded to a waveguide having characteristic impedance Z0 will be described. It is assumed that the shape of the through hole formed in the sealing plate (the horizontal length x1 and the vertical length y1) is designed so that the characteristic impedance is Z1 (≠ Z0). Based on such a premise, when the value of the thickness d1 is set in the vicinity of the half wavelength of the electromagnetic wave so that the electromagnetic wave of the desired frequency f passes through the passage hole of the sealing plate, for example, as shown in FIG. Such pass characteristics are obtained, and good frequency characteristics are obtained before and after the desired frequency f.

  However, there are cases where it is desired to obtain good pass characteristics over a wider frequency range and to increase loss sharply in other frequency bands, that is, to obtain the same characteristics as the bandpass filter. In such a case, the shape of the passage hole (vertical length / horizontal length) is designed so that the characteristic impedance becomes the same value (Z0) as the characteristic impedance value (Z0) of the waveguide, By using a spacer having a thickness near half a wavelength and sandwiching the spacer with the sealing plate described above (that is, a structure as shown in FIG. 1 or FIG. 2), the passage as shown in FIG. Characteristics can be obtained.

  The reason why the range of good pass characteristics is expanded by adopting such a structure is that the resonance condition is increased by the combination of the impedance of the two sealing plates and the impedance of the spacer. Further, other bands (about 0.7 fHz or less, about 1.3 fHz or more) become blocking bands, and the loss increases sharply according to the frequency, and functions equivalent to band control are provided.

  That is, as shown in FIG. 1, the band control function can be realized by the structure in which the sealing plate and the spacer are bonded and integrated. Further, as described above, the characteristic impedance in the first passage hole A1 determined based on the shape of the first passage hole A1 and the dielectric constant ε of the first dielectric 12a, the thickness d of the first passage hole A1, The characteristic impedance at the second passage hole A2 determined based on the shape of the second passage hole A2, the thickness ds of the second passage hole A2, the shape of the third passage hole A3, and the dielectric constant εt of the second dielectric 12b Since the characteristic impedance at the third passage hole A3 determined based on the above and the thickness dt of the third passage hole A3 can be changed, the stop band and the pass band can be adjusted in the band control function.

  As described above, according to the first embodiment, in the waveguide filter 1 with a sealing function bonded to the opening B1 of the first waveguide 30a and the opening B2 of the second waveguide 30b, 1st passage hole A1 which lets the electromagnetic wave which propagated the inside of 1 waveguide 30a pass is formed, and it comprises the 1st metal plate 11a by which the 1st dielectric 12a was sealed in the formed 1st passage hole A1. The first sealing plate 10a to be formed, the spacer 20 composed of the metal plate 21 formed with the second passage hole A2 through which the electromagnetic wave passes, and the third passage hole A3 through which the electromagnetic wave passes are formed and formed. Since the second sealing plate 10b composed of the second metal plate 11b with the second dielectric 12b sealed in the third passage hole A3 is bonded and integrated, the band control function and sealing Both functions are realized to prevent loss reduction and It is possible to provide a reduction possible waveguide filter with sealing function and.

  Further, according to the first embodiment, the characteristic impedance of the first passage hole A1 determined based on the shape of the first passage hole A1 and / or the dielectric constant of the first dielectric 12a, and the first passage hole A1 The characteristic impedance at the second passage hole A2 determined based on the thickness, the shape of the second passage hole A2, the thickness of the second passage hole A2, the shape of the third passage hole A3 and / or the dielectric of the second dielectric 12b Since the characteristic impedance in the third passage hole A3 determined based on the rate and the thickness of the third passage hole A3 can be changed, the stop band and the pass band can be adjusted in the band control function.

  Furthermore, according to the first embodiment, the first through hole A1 to the third through hole A3 are smaller in size than the opening B1 of the first waveguide 30a. Can be suppressed.

  Furthermore, according to the first embodiment, the midpoints of the first passage hole A1 to the third passage hole A3 are the opening B1 of the first waveguide 30a and the opening B2 of the second waveguide 30b. Therefore, the opening of the waveguide can be sealed while maintaining good propagation characteristics.

  In this embodiment, the waveguide is a rectangular waveguide, and the shape of the opening is a rectangle. However, in actual fabrication, the corner of the rectangle is not exactly a right angle, and drilling is used. When created, it is generally a circular arc. Even in such a case, the waveguide filter with a sealing function described in this embodiment can be applied if it can be sufficiently approximated as a rectangular parallelepiped in view of propagation characteristics.

[Second Embodiment]
In the first embodiment, the case where the first waveguide 30a and the second waveguide 30b are rectangular waveguides has been described, but in the second embodiment, the shape of the opening is circular. A case where a circular waveguide is used will be described. FIG. 6 is a perspective view of the waveguide sealing material according to the second embodiment viewed from the perspective direction. The waveguide filter 1 with a sealing function includes a sealing plate 10 and a spacer 20.

  The sealing plate 10 includes a metal plate 11 and a dielectric 12 whose both surfaces are flattened. In the central region of the metal plate 11, a first passage hole A <b> 1 having the same shape as the shape of the opening B of the waveguide 30 is formed in order to pass the electromagnetic wave propagating through the waveguide 30. The formed first passage hole A1 is sealed with a dielectric material 12 such as glass (simply fitted in the first passage hole A1).

  The spacer 20 is composed of a metal plate 21 whose both surfaces are flattened, and an electromagnetic wave propagating through the inside of the waveguide 30 is allowed to pass through the central region thereof. A second passage hole A2 having the same shape as the shape is formed. In addition, unlike the sealing plate, the dielectric is not sealed in the second passage hole A2.

  Next, a manufacturing process of the waveguide filter with a sealing function 1 according to the present embodiment will be described.

  1st process: First, the 1st passage hole A1 is formed by metal processing in the center area | region of the metal plate 11, the dielectric material 12 is sealed to the 1st passage hole A1, and the sealing plate 10 is produced. On the other hand, the spacer 20 is produced only by forming the second passage hole A2 in the central region of the metal plate 21 by metal processing.

  Second step: Next, both surfaces of the sealing plate 10 and the spacer 20 produced in the first step are flattened.

  Third step: Thereafter, one surface of the metal plate 11 and one surface of the metal plate 21 are bonded to each other so that the midpoint of the first passage hole A1 and the midpoint of the second passage hole A2 overlap (FIG. (Not shown) to be bonded and integrated. Thereby, one waveguide filter 1 with a sealing function is completed.

  Fourth step: Finally, a marking for alignment is attached to the waveguide 30, and the middle point of the opening B in the waveguide 30 is overlapped with the middle point of the first passage hole A 1. The peripheral region of the other surface of the plate 11 is brazed and bonded so as to cover the opening B of the waveguide 30 (more precisely, the opening end of the waveguide 30 forming the opening B). Let

  Through the above first to fourth steps, an IC chip (not shown) is stored inside the casing by sealing the opening B of the waveguide 30 while securing a transmission path for a desired electromagnetic wave signal. ) Can be protected from the outside atmosphere. A waveguide filter with a sealing function can be manufactured.

  Further, since the sealing plate 10 and the spacer 20 are bonded and integrated, the loss is lower than that of a system in which a conventional waveguide filter and a sealing mechanism are connected, and the function of the RF unit is not impaired. An electromagnetic wave signal can be transmitted, and the manufacturing cost can be reduced. In addition, since the planarization process of the metal plate and the dielectric is performed after the dielectric is sealed in the through hole formed by metal processing, the processing error can be extremely reduced.

  Further, the dielectric 12 is sealed in the first passage hole A1 formed in the metal plate 11, and further, the adhesion to the waveguide 30 is formed by the metal plate 11 instead of the dielectric 12, so that It is possible to prevent a change in the shape of the dielectric 12 due to the flow of the adhesive used for bonding, and the difference between the characteristic impedance in the first passage hole A1 and the characteristic impedance in the waveguide 30 is reduced. Matching can be suppressed and the opening of the waveguide can be sealed while maintaining good propagation characteristics.

  Here, in this embodiment, each value of the length r and the thickness d of the diameter constituting the shape of the first passage hole A1 formed in the metal plate 11 of the sealing plate 10, and the dielectric 12 The dielectric constant ε is a parameter that can be arbitrarily changed. That is, since the shape of the first passage hole A1 formed in the sealing plate 10 and the dielectric constant of the dielectric 12 are variable, the first passage determined by the shape of the first passage hole A1 and the dielectric constant of the dielectric 12 is the first. It is possible to arbitrarily set the characteristic impedance at the passage hole A1 by the designer.

  Similarly, each value of length rs and thickness ds of the diameter which comprises the shape of 2nd passage hole A2 formed in the metal plate 21 of the spacer 20 is set as the parameter which can be changed arbitrarily. That is, since the shape of the second passage hole A2 formed in the spacer 20 is variable, the characteristic impedance at the second passage hole A2 determined by the shape of the second passage hole A2 can be arbitrarily set by the designer. Is possible.

  In other words, in the present embodiment, the characteristic impedances in the first passage hole A1 and the second passage hole A2 can be changed, respectively, so that the difference between the characteristic impedance in each passage hole and the characteristic impedance in the waveguide 30 is not the same. Matching (difference) can be suppressed, and the opening B of the waveguide 30 can be sealed while maintaining good propagation characteristics.

  Further, the value of the length r of the diameter among the elements constituting the shape of the first passage hole A1 of the metal plate 11 in the sealing plate 10 and the shape of the second passage hole A2 of the metal plate 21 in the spacer 20 are set. Since the value of the length rs of the diameter among the constituent elements can be arbitrarily set, the size of the first passage hole A1 and the second passage hole A2 is set to the size of the opening B of the waveguide 30. It becomes possible to make smaller than this.

  That is, in the present embodiment, the size of the first passage hole A1 and the second passage hole A2 can be made smaller than the size of the opening B of the waveguide 30, so that the above-described characteristic impedance mismatch is eliminated. The effect of suppressing and the effect of suppressing the occurrence of higher order modes can be obtained simultaneously.

  Further, in the present embodiment, the hole regions of the first passage hole A1 and the second passage hole A2 are overlapped so that the electromagnetic wave propagating inside the waveguide 30 passes through the waveguide filter 1 with a sealing function. In this state, since the sealing plate 10 and the spacer 20 are bonded and integrated, the band control function can be realized as described in the first embodiment.

  Furthermore, as described above, the characteristic impedance at the first passage hole A1 determined based on the shape of the first passage hole A1 and the dielectric constant ε of the dielectric 12, the thickness d of the first passage hole A1, the second Since the characteristic impedance in the second passage hole A2 determined based on the shape of the passage hole A2 and the thickness ds of the second passage hole A2 can be changed, the stopband and the passband are adjusted in the band control function. Is possible.

  As described above, according to the second embodiment, in the waveguide filter 1 with a sealing function bonded to the opening B of the waveguide 30, the electromagnetic wave propagating through the inside of the waveguide 30 is allowed to pass. The first passage hole A1 is formed, the sealing plate 10 composed of the first metal plate 11a in which the dielectric 12 is sealed in the formed first passage hole A1, and the second passage hole through which the electromagnetic wave passes. Since the spacer 20 composed of the metal plate 21 formed with A2 is bonded and integrated, both the band control function and the sealing function are realized as in the first embodiment, It is possible to provide a waveguide filter with a sealing function capable of preventing loss from being reduced and reducing the manufacturing cost.

  Further, according to the second embodiment, the characteristic impedance at the first passage hole A1 determined based on the shape of the first passage hole A1 and / or the dielectric constant of the dielectric 12, and the thickness of the first passage hole A1 Since the characteristic impedance at the second passage hole A2 determined based on the shape of the second passage hole A2 and the thickness of the second passage hole A2 can be changed, the band is the same as in the first embodiment. In the control function, the stop band and the pass band can be adjusted.

  Furthermore, according to the second embodiment, the size of the first passage hole A1 and the second passage hole A2 is smaller than the size of the opening B of the waveguide 30. Similarly, the occurrence of higher order modes can be suppressed.

  Furthermore, according to the second embodiment, each midpoint of the first passage hole A1 and the second passage hole A2 overlaps with the midpoint of the opening B of the waveguide 30, so that the first embodiment Similarly to the above, it is possible to seal the opening of the waveguide while maintaining good propagation characteristics.

  Hereinafter, the contents common to the first embodiment and the second embodiment will be described using the waveguide filter with a sealing function described in the first embodiment. In the first embodiment, the shapes of the first passage hole A1 to the third passage hole A3 formed in the first metal plate 11a, the metal plate 21, and the second metal plate 11b are the openings in the first waveguide 30a. Although described as being the same as the shape of the portion B1, it is also possible to use one in which a passage hole having a different shape is formed with respect to the shape of the opening B1. For example, it is possible to use the waveguide filter with a sealing function described in the second embodiment for the rectangular waveguide, and it is described in the first embodiment for the circular waveguide. It is also possible to use a waveguide filter with a sealing function.

  Further, since the shapes of the first passage hole A1 to the third passage hole A3 can be arbitrarily set, as shown in FIG. 7, the shape thereof is a triangle, a quadrangle (including a square or a rectangle), or the like. Polygon, ellipse, concave, convex, star shape, etc. can also be used.

  Furthermore, the shapes of the first passage hole A1 to the third passage hole A3 can be made different from each other. For example, the shape of the first passage hole A1 may be a horizontally long rectangle, the shape of the second passage hole A2 may be a vertically long rectangle, and the shape of the third passage hole A3 may be a square.

  Further, particularly when the shape of each passing hole is a point object such as a circle, square, or rectangle, as described in each embodiment, the midpoint of the first passing hole A1 to the third passing hole A3 is It is also possible to overlap the midpoint of the opening B1 in the first waveguide 30a. Thereby, the opening part of a waveguide can be sealed in the state which maintained the propagation characteristic still more favorably.

  Furthermore, in order to allow electromagnetic waves to pass, each passing surface of the first passing hole A1 to the third passing hole A3 only needs to overlap one area of each opening surface of the opening B1 and the opening B2, so FIG. As shown in the figure, the positions of the first passage hole A1 to the third passage hole A3 are shifted with respect to the positions of the opening B1 and the opening B2, and the waveguide sealing material is adhered, or each position is shifted. It is also possible to form through holes.

  Furthermore, since the shape of the first through hole A1 to the third through hole A3 can be arbitrarily set, if the position of the through hole is formed so as to allow the electromagnetic wave to pass therethrough, the first dielectric 12a It is possible to make the size of the first passage hole A1 larger than the size of the opening B1 by adjusting the dielectric constant and the thickness.

  Furthermore, the same spacer as the spacer 20 is adhered to the second sealing plate 10b to form four layers (sealing plate / spacer / sealing plate / spacer), or the first sealing plate 10a or the second The same sealing plate as the sealing plate 10b can be further bonded to form five layers (sealing plate / spacer / sealing plate / spacer / sealing plate), and more layers can be formed. is there. As the number of layers is increased, loss increases more steeply in a desired frequency band, so that better pass characteristics can be obtained in the band control function. This is equivalent to increasing the number of filter circuits shown in FIG. 3, and the reason why the loss sharply increases by this is disclosed in Non-Patent Document 1, for example.

  Furthermore, in the first embodiment, the first sealing plate 10a is bonded to the first waveguide 30a, but the spacer 20 may be bonded to the first waveguide 30a.

  Further, as the material of the first dielectric 12a and the second dielectric 12b, for example, the above-described glass or the like can be used. However, the electromagnetic wave propagating through the first waveguide 30a is allowed to pass through, and the first metal plate 11a. Any kind of dielectric material may be used as long as the sealed state can be maintained for a long time after sealing.

  Further, regarding the adhesive and bonding procedure for bonding the waveguide filter 1 with a sealing function to the first waveguide 30a and the second waveguide 30b, the waveguide filter 1 with a sealing function and the first waveguide are used. Any type of adhesive and any process may be used as long as a sealed state can be maintained between the tube 30a and the second waveguide 30b. In particular, regarding the bonding procedure, after the first metal plate 11a is bonded to the first waveguide 30a, the first dielectric 12a is sealed in the first passage hole A1 of the first metal plate 11a. Good.

  Finally, in the first embodiment and the second embodiment, the case where the waveguide is a rectangular waveguide or a circular waveguide has been described, but the shape of the opening is a shape other than a square or a circle. It is also added that the waveguide filter with a sealing function described in both embodiments can be applied even to the above waveguide.

DESCRIPTION OF SYMBOLS 1 ... Waveguide filter with a sealing function 10a ... 1st sealing board 11 ... Metal plate (1st conductor)
11a ... 1st metal plate (1st conductor)
DESCRIPTION OF SYMBOLS 12 ... Dielectric 12a ... 1st dielectric 20 ... Spacer 21 ... Metal plate (2nd conductor)
DESCRIPTION OF SYMBOLS 10b ... 2nd sealing board 11b ... 2nd metal plate 12b ... 2nd dielectric material 30 ... Waveguide 30a ... 1st waveguide 30b ... 2nd waveguide 40 ... Adhesive agent A1 ... 1st passage hole A2 ... 2nd passage hole A3 ... 3rd passage hole B, B1, B2 ... Opening

Claims (8)

In a waveguide filter with a sealing function to be bonded to the opening of the waveguide,
A plate-like first conductor in which a first passage hole for passing an electromagnetic wave propagating through the inside of the waveguide is formed, and a dielectric is sealed in the first passage hole;
A plate-like second conductor having a second passage hole through which the electromagnetic wave passes;
A waveguide filter with a sealing function, wherein the waveguide filters are integrated by bonding.   A first impedance determined based on the characteristic impedance of the first passage hole determined based on the shape of the first passage hole and / or the dielectric constant of the dielectric, the thickness of the first passage hole, and the shape of the second passage hole. 2. The waveguide filter with a sealing function according to claim 1, wherein the characteristic impedance at two passage holes and the thickness of the second passage hole can be changed. At least one of the first conductor and the second conductor is two or more,
The waveguide filter with a sealing function according to claim 1 or 2, wherein the first conductor and the second conductor are alternately adhered. The size of the first passage hole and the second passage hole is as follows:
The waveguide filter with a sealing function according to any one of claims 1 to 3, wherein the waveguide filter is smaller than a size of an opening of the waveguide. The shape of the first passage hole and the second passage hole is as follows:
The waveguide filter with a sealing function according to any one of claims 1 to 4, wherein the waveguide filter has the same shape as the opening of the waveguide. The shape of the first passage hole is
The waveguide filter with a sealing function according to any one of claims 1 to 4, wherein the waveguide filter has a shape different from the shape of the second passage hole. The shapes of the first passage hole and the second passage hole are point symmetric,
7. The sealing function according to claim 1, wherein a midpoint of the first passage hole and the second passage hole overlaps a midpoint of the opening of the waveguide. Waveguide filter. The shape of the first passage hole or the second passage hole is:
The waveguide filter with a sealing function according to any one of claims 1 to 6, wherein the waveguide filter has at least one of a polygon, a circle, an ellipse, a concave, a convex, and a star.

Images