JP2011112564A - Optical waveguide type biochemical sensor chip - Google Patents

Optical waveguide type biochemical sensor chip Download PDF

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JP2011112564A
JP2011112564A JP2009270596A JP2009270596A JP2011112564A JP 2011112564 A JP2011112564 A JP 2011112564A JP 2009270596 A JP2009270596 A JP 2009270596A JP 2009270596 A JP2009270596 A JP 2009270596A JP 2011112564 A JP2011112564 A JP 2011112564A
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substrate
optical waveguide
waveguide layer
propagation component
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JP5777277B2 (en
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Ikuo Uematsu
育生 植松
Isao Nawata
功 縄田
Ichiro Tono
一郎 東野
Tomohiro Takase
智裕 高瀬
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Toshiba Corp
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<P>PROBLEM TO BE SOLVED: To provide an optical waveguide type sensor chip which can improve measurement accuracy by removing a substrate propagating component. <P>SOLUTION: The optical waveguide type sensor chip includes a substrate 11, an optical waveguide layer 13 formed in a first principal surface 11a of the substrate 11 and having a refractive index higher than that of the substrate 11, a pair of gratings 12 for making light incident into and emitted from the optical guide waveguide layer 13, a sensing film 15 formed on the optical waveguide layer 13 and provided across the pair of gratings 12 for changing the strength of light propagating through the optical guide layer 13 according to the amount or concentration of an introduced object to be measured, and a substrate propagating component removal part 20 formed in a second principal surface 11b of the substrate 11 and arranged at a position opposed to a sensing film 15 for removing a substrate propagating component Q reflected and specularly diffracted by the gratings 12 and propagating through the substrate 11. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、光導波路型バイオケミカルセンサチップに関し、特に測定精度を向上させたものに関する。   The present invention relates to an optical waveguide type biochemical sensor chip, and particularly relates to an improved optical measurement accuracy.

従来、小型で高感度なバイオケミカルセンサとしてはグレーティングカプラ及び生体
分子認識機能及び情報変換機能を有するセンシング膜を備え、光導波路層表面に生じるエバネッセント波を利用した平面光導波路型バイオケミカルセンサが提案されている。 Conventionally, as a small and highly sensitive biochemical sensor, a planar optical waveguide type biochemical sensor using a evanescent wave generated on the surface of the optical waveguide layer with a grating coupler and a sensing film having a biomolecule recognition function and an information conversion function has been proposed. Has been.

例えば、基板上にゾル−ゲル法により膜厚６２０ｎｍの酸化シリコン膜からなる光導波路層を形成し、この導波路層の両端にグレーティングを形成した構造の蛍光免疫センサが開示されている（例えば、特許文献１参照）。   For example, a fluorescent immunosensor having a structure in which an optical waveguide layer made of a silicon oxide film having a thickness of 620 nm is formed on a substrate by a sol-gel method and gratings are formed on both ends of the waveguide layer is disclosed (for example, Patent Document 1).

また、基板表面の両端付近にグレーティングを形成し、このグレーティングを含む前記基板表面に光導波路層を形成した構造の平面光導波路型バイオケミカルセンサが開示されている。この光導波路層は、スパッタ法やＣＶＤ法で形成された窒化シリコン、酸化アルミニウム、酸化タンタル等、もしくはイオン交換法により作製されたガラス膜であることが好ましいことが記載されている（例えば、特許文献２，３参照）。   Also disclosed is a planar optical waveguide type biochemical sensor having a structure in which a grating is formed near both ends of a substrate surface and an optical waveguide layer is formed on the substrate surface including the grating. It is described that the optical waveguide layer is preferably a silicon nitride, aluminum oxide, tantalum oxide, or the like formed by sputtering or CVD, or a glass film produced by ion exchange (for example, a patent) References 2 and 3).

一方、ガラス基板主面に生体分子認識機能及び情報変換機能を有するセンシング膜を形成し、基板内に光を伝播させ、前記センシング膜との界面で反射させる光導波路センサが提案されている。特に、許容する入射角範囲の拡大が可能で、かつ高い感度を維持しつつ、光導波路層における光強度の減衰が抑制されている（例えば、特許文献４参照）。   On the other hand, an optical waveguide sensor has been proposed in which a sensing film having a biomolecule recognition function and an information conversion function is formed on the main surface of a glass substrate, and light is propagated in the substrate and reflected at the interface with the sensing film. In particular, the allowable incident angle range can be expanded, and attenuation of light intensity in the optical waveguide layer is suppressed while maintaining high sensitivity (see, for example, Patent Document 4).

特開平８−２８５８５１号公報JP-A-8-285851 特開平９−６１３４６号公報Japanese Patent Laid-Open No. 9-61346 特許第３２３６１９９号公報Japanese Patent No. 3236199 特開２００６−２０８３５９号公報JP 2006-208359 A

上述した導波路型センサでは、次のような問題があった。すなわち、図４は、光導波路型バイオケミカルセンサチップ１００の一例を模式的に示す断面図である。ガラス等の透光性を有する基板１０１の平坦な主面の両端部付近の領域には、それぞれ一対のグレーティング１０２がその基板１０１に光を入射、出射させるためにそれぞれ形成されている。グレーティング１０２は、基板１０１を構成する材料よりも高い屈折率を有する材料で形成されている。   The waveguide type sensor described above has the following problems. That is, FIG. 4 is a cross-sectional view schematically showing an example of the optical waveguide type biochemical sensor chip 100. A pair of gratings 102 are respectively formed in regions near both ends of the flat main surface of the light-transmitting substrate 101 such as glass so that light enters and exits the substrate 101. The grating 102 is formed of a material having a higher refractive index than the material constituting the substrate 101.

光導波路層１０３は、基板１０１より高屈折率の高分子樹脂からなり、均一な厚さの膜体である。グレーティング１０２が形成された基板１０１の主面に密着するように隣接して形成されている。   The optical waveguide layer 103 is made of a polymer resin having a higher refractive index than that of the substrate 101, and is a film body having a uniform thickness. Adjacent to the main surface of the substrate 101 on which the grating 102 is formed.

保護膜１０４は、光導波路層１０３を構成する材料よりも低屈折率で、かつ、センサチップに投入される全ての試薬と反応しないフッ素樹脂で構成される。グレーティング１０２が形成されている領域に対応する光導波路層１０３の両端部、つまりグレーティング１０２に対応する領域を覆うように、光導波路層１０３の表面に隣接して形成されている。   The protective film 104 is made of a fluororesin having a refractive index lower than that of the material constituting the optical waveguide layer 103 and does not react with all the reagents put into the sensor chip. It is formed adjacent to the surface of the optical waveguide layer 103 so as to cover both ends of the optical waveguide layer 103 corresponding to the region where the grating 102 is formed, that is, the region corresponding to the grating 102.

センシング膜１０５は、グレーティング１０２間を結ぶ線分上の保護膜１０４に挟まれた領域に位置し、光導波路層１０３表面に密着するように隣接して形成されている。センシング膜１０５は、例えば、導入された検体の濃度に応じた濃度の反応産物を生成する膜である。反応産物は導波成分と作用してエネルギを消費する性質を有し、吸収したり、蛍光を発したりする。   The sensing film 105 is located in a region sandwiched between the protective films 104 on the line segment connecting the gratings 102 and is formed adjacent to the surface of the optical waveguide layer 103 so as to be in close contact therewith. The sensing film 105 is, for example, a film that generates a reaction product with a concentration corresponding to the concentration of the introduced sample. The reaction product has a property of consuming energy by interacting with the wave guide component, and absorbs or emits fluorescence.

このような光導波路型バイオケミカルセンサチップ１００では、レーザダイオードＬＤから出射された入射光を一方のグレーティング１０２で１次回折し、光導波路層１０３に入射する。光導波路層１０３では、導波成分Ｐとなり、層内を伝播する。一方、センシング膜１０５では、導波成分が吸収される等して、他方のグレーティング１０２で回折し、出射光となって、フォトダイオードＰＤに入射する。したがって、検体の濃度によって導波成分の強度が変わるため、フォトダイオードＰＤで検出された光の強度を測定することで、検体の濃度が測定される原理となっている。   In such an optical waveguide biochemical sensor chip 100, incident light emitted from the laser diode LD is first-order diffracted by one grating 102 and is incident on the optical waveguide layer 103. In the optical waveguide layer 103, it becomes a waveguide component P and propagates in the layer. On the other hand, the sensing film 105 is diffracted by the other grating 102, for example, by absorbing the waveguide component, and becomes emitted light and enters the photodiode PD. Therefore, since the intensity of the waveguide component varies depending on the concentration of the specimen, the principle is that the density of the specimen is measured by measuring the intensity of the light detected by the photodiode PD.

しかしながら、グレーティング１０２では、光が回折するにあたり入射光の一部は反射光や特定方向への反射回折光となって、基板１０２内を伝播し、その一部がフォトダイオードＰＤに入射し、検出される。このような基板伝播成分Ｑは本来検出すべき導波成分Ｐに対してノイズ成分となるため、基板伝播成分Ｑがあると、測定精度が低下する虞がある。   However, in the grating 102, when the light is diffracted, a part of the incident light becomes reflected light or reflected diffracted light in a specific direction and propagates in the substrate 102, and a part of the incident light enters the photodiode PD and is detected. Is done. Since such a substrate propagation component Q is a noise component with respect to the waveguide component P that should be detected originally, if the substrate propagation component Q is present, the measurement accuracy may be reduced.

そこで本発明は、基板伝播成分を除去することで測定精度を向上できる光導波路型センサを提供することを目的としている。   Accordingly, an object of the present invention is to provide an optical waveguide sensor that can improve measurement accuracy by removing a substrate propagation component.

前記課題を解決し目的を達成するために、本発明の光導波路型センサは次のように構成されている。   In order to solve the above problems and achieve the object, the optical waveguide sensor of the present invention is configured as follows.

基板と、前記基板の第１主面に形成され、前記基板より高屈折率の光導波路層と、前記光導波路層内に光を入射、出射するための一対のグレーティングと、前記光導波路層上にあって、前記一対のグレーティングの間に設けられ、導入された測定対象物の量または濃度に応じて前記光導波路層内を伝播する光の強度を変化させるセンシング膜と、前記基板の第２主面に形成され、前記センシング膜に対向する位置に配置され、前記グレーティングで反射及び反射回折し前記基板内に伝播する基板伝播成分を除去する基板伝播成分除去部とを備えていることを特徴とする。   A substrate, an optical waveguide layer having a higher refractive index than that of the substrate, a pair of gratings for entering and exiting the optical waveguide layer, and an optical waveguide layer formed on the first main surface of the substrate; A sensing film provided between the pair of gratings and configured to change an intensity of light propagating in the optical waveguide layer according to an amount or concentration of the introduced measurement object; and a second of the substrate. A substrate propagation component removing unit that is formed on the main surface, is disposed at a position facing the sensing film, and that removes a substrate propagation component reflected and diffracted by the grating and propagating into the substrate. And

本発明によれば、基板伝播成分を除去することで測定精度を向上させることが可能である。   According to the present invention, it is possible to improve the measurement accuracy by removing the substrate propagation component.

本発明の第１の実施の形態に係る光導波路型バイオケミカルセンサチップを模式的に示す縦断面図。1 is a longitudinal sectional view schematically showing an optical waveguide biochemical sensor chip according to a first embodiment of the present invention. 本発明の第２の実施の形態に係る光導波路型バイオケミカルセンサチップを模式的に示す縦断面図。The longitudinal cross-sectional view which shows typically the optical waveguide type biochemical sensor chip which concerns on the 2nd Embodiment of this invention. 本発明の第３の実施の形態に係る光導波路型バイオケミカルセンサチップを模式的に示す縦断面図。The longitudinal cross-sectional view which shows typically the optical waveguide type biochemical sensor chip which concerns on the 3rd Embodiment of this invention. 光導波路型センサの一例を模式的に示す縦断面図。The longitudinal cross-sectional view which shows an example of an optical waveguide type sensor typically.

（第１実施形態）
図１は、本発明の第１の実施形態に係る光導波路型バイオケミカルセンサチップ（光導波路型センサ）１０を示す断面図である。光導波路型バイオケミカルセンサチップ１０は、ガラス（例えば無アルカリガラス）または石英からなる透光性を有する基板１１を備えている。基板１１の平坦な第１主面１１ａの両端部付近の領域には、それぞれ一対のグレーティング１２が形成されている。これらのグレーティング１２は、基板１１を構成する材料よりも高い屈折率を有する材料（例えば酸化チタン）で形成されている。グレーティング１２は、基板１１を透過した光を後述する光導波路層１３に入射させ、光導波路層１３内で全反射させた後、出射させる機能を有している。 (First embodiment)
FIG. 1 is a sectional view showing an optical waveguide type biochemical sensor chip (optical waveguide type sensor) 10 according to the first embodiment of the present invention. The optical waveguide biochemical sensor chip 10 includes a light-transmitting substrate 11 made of glass (for example, non-alkali glass) or quartz. A pair of gratings 12 is formed in each of the regions near both ends of the flat first main surface 11a of the substrate 11. These gratings 12 are formed of a material (for example, titanium oxide) having a higher refractive index than the material constituting the substrate 11. The grating 12 has a function of causing light transmitted through the substrate 11 to enter an optical waveguide layer 13 to be described later, totally reflected in the optical waveguide layer 13, and then emitted.

光導波路層１３は、基板１１より高屈折率の高分子樹脂からなり、３〜３００μｍの範囲で設定される均一な厚さの膜体である。グレーティング１２が形成された基板１１の第１主面１１ａに密着するように隣接して形成されている。   The optical waveguide layer 13 is made of a polymer resin having a higher refractive index than that of the substrate 11 and is a film body having a uniform thickness set in the range of 3 to 300 μm. It is formed adjacent to the first main surface 11a of the substrate 11 on which the grating 12 is formed.

保護膜１４は、光導波路層１３を構成する材料よりも低屈折率で、かつセンサチップに投入される全ての試薬と反応しない材料（例えばフッ素樹脂）で構成される。グレーティング１２が形成されている領域に対応する光導波路層１３の両端部、つまりグレーティング１２に対応する領域を覆うように、光導波路層１３の表面に隣接して形成されている。   The protective film 14 is made of a material (for example, a fluororesin) that has a lower refractive index than the material constituting the optical waveguide layer 13 and does not react with all the reagents put into the sensor chip. It is formed adjacent to the surface of the optical waveguide layer 13 so as to cover both ends of the optical waveguide layer 13 corresponding to the region where the grating 12 is formed, that is, the region corresponding to the grating 12.

センシング膜１５は、グレーティング１２間を結ぶ線分上の保護膜１４に挟まれた領域に位置し、光導波路層１３表面に密着するように隣接して形成されている。センシング膜１５とは、例えば、膜上に導入された所定濃度の検体に応じて、所定濃度の反応産物を生成する膜である。反応産物は光導波路型バイオケミカルセンサチップ１０内を導波する光、もしくはこの光から生じるエバネッセント波と作用してエネルギーを消費する性質を有し、吸収したり、蛍光を発したりする。   The sensing film 15 is located adjacent to the surface of the optical waveguide layer 13 so as to be in close contact with the surface of the optical waveguide layer 13 between the protective films 14 on the line segment connecting the gratings 12. The sensing membrane 15 is, for example, a membrane that generates a reaction product with a predetermined concentration according to a sample with a predetermined concentration introduced on the membrane. The reaction product has a property of consuming energy by acting on the light guided in the optical waveguide type biochemical sensor chip 10 or an evanescent wave generated from this light, and absorbs or emits fluorescence.

このような膜として機能させるために、膜本体は多孔質組織となっており、検体と抗原抗体反応により結合する標識された抗体や、標識に反応して反応産物を生成する試薬、標識と試薬の反応を促進する触媒等が、薬品の種類に応じて適宜組み合わされ、多孔質組織内の空孔に個別に納められている。検体溶液の溶媒が膜組織を破壊してこれらのセンシング膜構成物質を移動自在に開放し、検体との反応を促す。   In order to function as such a membrane, the membrane body is a porous tissue, a labeled antibody that binds to the specimen by an antigen-antibody reaction, a reagent that reacts with the label to generate a reaction product, a label and a reagent A catalyst or the like that promotes the reaction is appropriately combined depending on the type of chemical and is individually stored in the pores in the porous structure. The solvent of the specimen solution destroys the membrane tissue and movably releases these sensing membrane constituent substances, and promotes reaction with the specimen.

センシング膜１５がグルコースセンシング膜である場合、グルコースセンシング膜はグルコースの酸化酵素または還元酵素、この酵素による生成物と反応して発色剤を発色させる物質を発生する試薬、発色剤、膜形成高分子樹脂、必要に応じてポリエチレングリコールのような透水性促進剤を含んでいる。   In the case where the sensing membrane 15 is a glucose sensing membrane, the glucose sensing membrane is a glucose oxidase or reductase, a reagent that reacts with a product of the enzyme to generate a color former, a color former, and a film-forming polymer. Resin, optionally containing water permeability promoter such as polyethylene glycol.

一方、基板１１の第２主面１１ｂには、センシング膜１５に対向する位置に基板伝播成分除去部２０が配置されている。基板伝播成分除去部２０は、基板１１の第２主面１１ｂを擦りガラス状に加工したものであり、散乱によって伝播成分を除去する機能を有している。   On the other hand, the substrate propagation component removing unit 20 is disposed on the second main surface 11 b of the substrate 11 at a position facing the sensing film 15. The substrate propagation component removing unit 20 is obtained by processing the second main surface 11b of the substrate 11 into a rubbed glass shape, and has a function of removing the propagation component by scattering.

このような光導波路型バイオケミカルセンサチップ１０は、次のように作用する。すなわち、センシング膜１５に生体分子を含む検体を接触させ、検体中の生体分子をセンシング膜１５に抽出する。この生体分子は、センシング膜１５との間でバイオケミカル反応を起こす。この状態で、レーザダイオードＬＤ及びフォトダイオードＰＤを基板１１の裏面左側及び右側にそれぞれ配置し、レーザダイオードＬＤからレーザ光を光導波路型バイオケミカルセンサチップ１０の基板１１裏面側に入射すると、そのレーザ光は基板１１を通してグレーティング１２と光導波路層１３の界面で回折・屈折され（図１中Ｐ）、さらに光導波路層１３と基板１１及びセンシング膜１５の界面で複数回屈折しながら光導波路層Ｂ内を伝播する。この際、光導波路層１３で伝播する光のエバネッセント波はセンシング膜１５の界面での屈折時にそのセンシング膜１５における検体中の生体分子のバイオケミカル反応に基づく変化（例えば吸光度変化）に応じて吸収される。   Such an optical waveguide type biochemical sensor chip 10 operates as follows. That is, a specimen containing a biomolecule is brought into contact with the sensing film 15, and the biomolecule in the specimen is extracted to the sensing film 15. This biomolecule causes a biochemical reaction with the sensing film 15. In this state, the laser diode LD and the photodiode PD are respectively arranged on the left side and the right side of the back surface of the substrate 11, and laser light is incident on the back surface side of the substrate 11 of the optical waveguide type biochemical sensor chip 10. The light is diffracted and refracted through the substrate 11 at the interface between the grating 12 and the optical waveguide layer 13 (P in FIG. 1), and further refracted multiple times at the interface between the optical waveguide layer 13, the substrate 11 and the sensing film 15, and the optical waveguide layer B. Propagate inside. At this time, the evanescent wave of the light propagating in the optical waveguide layer 13 is absorbed according to a change (for example, a change in absorbance) based on a biochemical reaction of a biomolecule in the specimen in the sensing film 15 at the time of refraction at the interface of the sensing film 15. Is done.

光導波路層１３を伝播した光は、右側のグレーティング１２を介して基板１１の裏面から出射され、フォトダイオードＰＤで受光される。受光したレーザ光強度は、センシング膜１５が生体分子とバイオケミカル反応をなさない時に受光した光強度（初期光強度）に比べて低下した値になり、その低下率から生体分子の量を検出することが可能になる。   The light propagating through the optical waveguide layer 13 is emitted from the back surface of the substrate 11 through the right grating 12 and received by the photodiode PD. The received laser light intensity is a value that is lower than the light intensity (initial light intensity) received when the sensing film 15 does not biochemically react with the biomolecule, and the amount of the biomolecule is detected from the decrease rate. It becomes possible.

一方、グレーティング１２で発生した反射光や特定方向への反射回折光は、基板１１内を基板伝播成分Ｑとして伝播し、基板伝播成分除去部２０に入射する。基板伝播成分除去部２０は、擦りガラス状であるため、基板伝播成分Ｑが散乱し、その指向性が著しく低下することで、フォトダイオードＰＤで検出される比率も大きく低減する。したがって、上述した光導波路層１３を伝播した光の測定値に影響することなく、高精度な測定が可能となる。   On the other hand, the reflected light generated in the grating 12 or the reflected diffracted light in a specific direction propagates through the substrate 11 as the substrate propagation component Q and enters the substrate propagation component removal unit 20. Since the substrate propagation component removing unit 20 has a frosted glass shape, the substrate propagation component Q is scattered and its directivity is significantly reduced, so that the ratio detected by the photodiode PD is also greatly reduced. Therefore, highly accurate measurement is possible without affecting the measured value of the light propagated through the optical waveguide layer 13 described above.

上述したように、本実施形態に係る光導波路型バイオケミカルセンサチップ１０によれば、基板伝播成分Ｑを除去することで測定精度を向上させることができる。   As described above, according to the optical waveguide biochemical sensor chip 10 according to the present embodiment, the measurement accuracy can be improved by removing the substrate propagation component Q.

（第２実施形態）
図２は、本発明の第２の実施形態に係る光導波路型バイオケミカルセンサチップ１０Ａを示す断面図である。図２において、図１と同一機能部分には同一符号を付し、その詳細な説明は省略する。 (Second Embodiment)
FIG. 2 is a sectional view showing an optical waveguide type biochemical sensor chip 10A according to the second embodiment of the present invention. 2, the same functional parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

本実施形態では、上述した基板伝播成分除去部２０の代わりに、基板伝播成分除去部２０Ａが設けられている。基板伝播成分除去部２０Ａは、基板１１の第２主面１１ｂに貼り付けられた遮光テープであり、吸収によって基板伝播成分Ｑを除去する機能を有している。なお、遮光テープの代わりに、黒色の塗料を塗布してもよい。   In the present embodiment, a substrate propagation component removal unit 20A is provided instead of the substrate propagation component removal unit 20 described above. The substrate propagation component removal unit 20A is a light shielding tape attached to the second main surface 11b of the substrate 11 and has a function of removing the substrate propagation component Q by absorption. A black paint may be applied instead of the light shielding tape.

このように構成された光導波路型バイオケミカルセンサチップ１０Ａであっても、上述した光導波路型バイオケミカルセンサチップ１０と同様の効果が得られる。   Even with the optical waveguide biochemical sensor chip 10A configured as described above, the same effects as those of the optical waveguide biochemical sensor chip 10 described above can be obtained.

（第３実施形態）
図３は、本発明の第３の実施形態に係る光導波路型バイオケミカルセンサチップ１０Ｂを示す断面図である。図３において、図１と同一機能部分には同一符号を付し、その詳細な説明は省略する。 (Third embodiment)
FIG. 3 is a cross-sectional view showing an optical waveguide biochemical sensor chip 10B according to the third embodiment of the present invention. 3, the same functional parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

本実施形態では、上述した基板伝播成分除去部２０の代わりに、基板伝播成分除去部２０Ｂが設けられている。基板伝播成分除去部２０Ｂは、基板１１の第２主面１１ｂに形成されたグレーティングであり、回折によって基板１１外部に出射し、基板１１内を伝播する基板伝播成分Ｑを除去する機能を有している。   In the present embodiment, a substrate propagation component removal unit 20B is provided instead of the substrate propagation component removal unit 20 described above. The substrate propagation component removing unit 20B is a grating formed on the second main surface 11b of the substrate 11 and has a function of removing the substrate propagation component Q that is emitted to the outside of the substrate 11 by diffraction and propagates in the substrate 11. ing.

このように構成された光導波路型バイオケミカルセンサチップ１０Ｂであっても、上述した光導波路型バイオケミカルセンサチップ１０と同様の効果が得られる。   Even with the optical waveguide type biochemical sensor chip 10B configured as described above, the same effects as those of the optical waveguide type biochemical sensor chip 10 described above can be obtained.

なお、本発明は上記実施形態そのままに限定されるものではなく、実施段階ではその要旨を逸脱しない範囲で構成要素を変形して具体化できる。また、上記実施形態に開示されている複数の構成要素の適宜な組み合わせにより、種々の発明を形成できる。例えば、実施形態に示される全構成要素から幾つかの構成要素を削除してもよい。さらに、異なる実施形態にわたる構成要素を適宜組み合わせてもよい。   Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different embodiments may be appropriately combined.

例えば、センシング膜１５は、測定対象物が抗原の場合、表面に抗原と特異的に反応する第１の抗体を固定化し、さらに測定対象物と特異的に反応する第２の抗体が固定化された複数の微粒子が配置されたものを用いてもよい。これにより、センシング膜１５に測定対象物を導入すると、微粒子が第１の抗体と抗原と第２の抗体を介して、センシング膜１５側に固定化される。そこに光を導入すると、微粒子により光が散乱され、光導波路層を伝播する光が減衰する。この構成であっても、上記実施形態と同様の効果が得られる。   For example, when the measurement object is an antigen, the sensing membrane 15 immobilizes a first antibody that specifically reacts with the antigen on the surface, and further immobilizes a second antibody that specifically reacts with the measurement object. Alternatively, a material in which a plurality of fine particles are arranged may be used. Thereby, when the measurement object is introduced into the sensing film 15, the fine particles are immobilized on the sensing film 15 side via the first antibody, the antigen, and the second antibody. When light is introduced there, the light is scattered by the fine particles, and the light propagating through the optical waveguide layer is attenuated. Even if it is this structure, the effect similar to the said embodiment is acquired.

本発明によれば、基板伝播成分を除去することで測定精度を向上させることができる光導波路型センサが得られる。   According to the present invention, an optical waveguide sensor capable of improving measurement accuracy by removing a substrate propagation component is obtained.

１０，１０Ａ，１０Ｂ…光導波路型バイオケミカルセンサチップ（光導波路型センサ）、１１…基板、１２…グレーティング、１３…光導波路層、１５…センシング膜、２０，２０Ａ，２０Ｂ…基板伝播成分除去部、ＬＤ…レーザダイオード、ＰＤ…フォトダイオード、Ｐ…伝播成分、Ｑ…基板伝播成分。   DESCRIPTION OF SYMBOLS 10, 10A, 10B ... Optical waveguide type biochemical sensor chip (optical waveguide type sensor), 11 ... Board | substrate, 12 ... Grating, 13 ... Optical waveguide layer, 15 ... Sensing film | membrane, 20, 20A, 20B ... Substrate propagation component removal part , LD ... laser diode, PD ... photodiode, P ... propagation component, Q ... substrate propagation component.

Claims (5)

基板と、
前記基板の第１主面に形成され、前記基板より高屈折率の光導波路層と、
前記光導波路層内に光を入射、出射するための一対のグレーティングと、
前記光導波路層上にあって、前記一対のグレーティングの間に設けられ、導入された測定対象物の量または濃度に応じて前記光導波路層内を伝播する光の強度を変化させるセンシング膜と、
前記基板の第２主面に形成され、前記センシング膜に対向する位置に配置され、前記グレーティングで反射及び反射回折し前記基板内に伝播する基板伝播成分を除去する基板伝播成分除去部とを備えていることを特徴とする光導波路型センサ。 A substrate,
An optical waveguide layer formed on the first main surface of the substrate and having a higher refractive index than the substrate;
A pair of gratings for entering and exiting light into the optical waveguide layer;
A sensing film on the optical waveguide layer, provided between the pair of gratings, and changing an intensity of light propagating in the optical waveguide layer according to an amount or concentration of an introduced measurement object;
A substrate propagation component removing unit that is formed on the second main surface of the substrate and disposed at a position facing the sensing film, and that removes a substrate propagation component reflected and diffracted by the grating and propagating into the substrate; An optical waveguide sensor characterized by comprising: 前記基板伝播成分除去部は、吸収、散乱または回折によって、前記基板伝播成分を除去するものであることを特徴とする請求項１に記載の光導波路型センサ。   The optical waveguide sensor according to claim 1, wherein the substrate propagation component removing unit removes the substrate propagation component by absorption, scattering, or diffraction. 前記基板伝播成分除去部は、前記基板の第２主面が擦りガラス状に形成されていることを特徴とする請求項１に記載の光導波路型センサ。   2. The optical waveguide sensor according to claim 1, wherein the substrate propagation component removing unit has a second main surface of the substrate formed in a frosted glass shape. 前記基板伝播成分除去部は、グレーティングであることを特徴とする請求項１に記載の光導波路型センサ。   The optical waveguide sensor according to claim 1, wherein the substrate propagation component removing unit is a grating. 前記基板伝播成分除去部は、遮光テープ、または黒塗料であることを特徴とする請求項１に記載の光導波路型センサ。   The optical waveguide sensor according to claim 1, wherein the substrate propagation component removing unit is a light shielding tape or a black paint.
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