JP2011066127A - Method and apparatus for manufacturing solar cell panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell panel capable of making an isolation groove on a thin film by laser without causing heat distortion, reliably removing processing grains caused by making the isolation groove from the isolation groove, and preventing short-circuiting, and an apparatus for the method. <P>SOLUTION: The method of manufacturing the solar cell panel includes the steps of: carrying, in an X direction, the panel 1 having the thin film 9 facing downward and floated and supported by a floating unit 14; in addition irradiating the laser from an optical system unit 22 to the thin film 9 while a processing liquid 50 supplied to a processing liquid supply mechanism 13 disposed on a lower surface of the panel 1 is in contact with or filled in the thin film 9; and forming the isolation groove 4 on the thin film 9 while removing the processing grains generated by laser machining. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a solar cell panel and an apparatus therefor, and more specifically, a separation groove is formed by irradiating a thin film having at least one of an electrode film and a semiconductor film formed on the surface of a transparent substrate with a laser. The present invention relates to a method and apparatus for manufacturing a solar battery panel that is processed to form a battery cell.

  The solar battery panel is manufactured by irradiating a thin film formed on the surface of a transparent substrate with a laser to form a separation groove, and dividing the thin film into a plurality of battery cells. That is, as shown in FIG. 5, the solar cell panel 1 includes a semiconductor film on the first electrode film 3 after the separation groove 4 is formed on the first electrode film 3 formed on the transparent glass substrate 2 by laser. 5 is formed and a separation groove 6 is formed by a laser. Further, a second electrode film 7 is formed on the semiconductor film 5, and then a separation groove 8 is formed in the semiconductor film 5 and the second electrode film 7 by a laser. Thus, a current circuit as shown by a one-dot chain line is formed.

  Conventional devices that form separation grooves in a thin film, also called a laser scriber, include an XY table that transports the substrate in the XY direction, a laser generator that is cooled by an air cooling system, and an optical system member that guides the laser to the substrate. A solar cell manufacturing apparatus disposed indoors is known (for example, see Patent Document 1). Moreover, the manufacturing method of the solar cell which irradiates a laser from the transparent substrate side (for example, refer patent document 2) which supports the lower surface of the board | substrate which turned down the semiconductor film with the curvature prevention correction member, corrects curvature, and irradiates a laser from the transparent substrate side. A solar cell cleaning method in which a laser-scribing substrate is immersed in cleaning water to apply ultrasonic vibration, or particles (processed grains) generated by laser scribing are removed by a rotating brush or high-pressure water jet. And an apparatus are known (for example, refer to Patent Document 3).

JP 2006-54255 A JP 2002-280578 A JP 2001-44466 A

  When a separation groove is formed by irradiating a thin film with a laser, processed grains, which are processing waste, are generated. If these processed grains remain inside or around the separation groove, a short circuit may occur between the battery cells, and the insulation performance, output characteristics, withstand voltage characteristics, etc. may be deteriorated and the characteristics of the solar battery panel may be deteriorated. is there. In addition, there is a problem that the processed grains are melted by the heat of the laser and reattached to the thin film, causing a short circuit, and it is required to remove the processed grains reliably. Furthermore, when processing high-power lasers, there is a possibility that the thin film may be thermally distorted, resulting in a problem that processing accuracy is lowered.

  However, the apparatuses described in Patent Documents 1 to 3 cannot sufficiently solve the above problems. In particular, the cleaning device described in Patent Document 3 performs cleaning after the end of the groove processing. When the melted processed particles are reattached, it is difficult to completely remove the processed particles and the circuit may be short-circuited. was there.

  The present invention has been made in view of the above-described problems, and its object is to process separation grooves into a thin film with a laser without causing thermal strain, and to reliably separate processed grains generated by the separation groove processing. It is an object of the present invention to provide a method and an apparatus for manufacturing a solar cell panel that can be removed from a groove and prevent a short circuit.

The above object of the present invention can be achieved by the following constitution.
(1) A method for manufacturing a solar cell panel, wherein a non-processed portion on which a thin film having at least one of an electrode film and a semiconductor film is formed is irradiated with a laser to form a separation groove in the thin film,
The thin film is irradiated with the laser in a state in which the processing liquid is supplied to the panel and the processing liquid is in contact with or filled in the laser irradiation portion of the thin film where the laser is irradiated and the vicinity thereof. Forming a separation groove in
A method for producing a solar cell panel, comprising:
(2) The method further includes a step of conveying the panel levitated and supported by the levitating unit in a predetermined direction,
The method for manufacturing a solar cell panel according to (1), wherein the separation groove is formed while conveying the panel and supplying a processing liquid toward the panel.
(3) The transport step transports the panel with the thin film facing down,
The groove forming step adjusts the hydraulic pressure of the processing liquid supplied from the lower surface side of the panel and the vacuum pressure for sucking air around the laser irradiation site to bring the panel to a predetermined height. The method for producing a solar cell panel according to (2), which is performed in a supported state.
(4) A solar cell panel manufacturing apparatus for irradiating a laser on a non-processed portion on which a thin film having at least one of an electrode film and a semiconductor film is formed to form a separation groove in the thin film,
A laser irradiation device for irradiating the thin film of the panel with a laser;
A solar cell panel comprising: a processing liquid supply mechanism that is disposed so as to face a laser irradiation portion of the thin film, and that contacts or fills at least the laser irradiation portion of the thin film with a processing liquid in the vicinity thereof. Manufacturing equipment.
(5) The solar cell according to (4), further comprising: a floating unit that can float and support the panel; and a transport device that includes the transport mechanism that holds the panel and transports the panel in a predetermined direction. Panel manufacturing equipment.
(6) The machining liquid supply mechanism includes a machining liquid supply port configured to contact or fill at least the laser irradiation portion of the thin film disposed downward with respect to the non-machining portion and the vicinity thereof. A working fluid storage tank for storing the working fluid supplied from
On the outer peripheral side of the machining fluid storage tank, a machining fluid collection groove capable of collecting the machining fluid is disposed,
On the outer peripheral side of the machining liquid recovery groove, a vacuum groove is arranged that can suck out the machining liquid together with surrounding air by vacuum,
The apparatus for manufacturing a solar cell panel according to (4) or (5), wherein an air bearing capable of discharging compressed air is disposed on an outer peripheral side of the vacuum groove.
(7) The manufacturing of the solar cell panel according to (6), wherein the processing liquid storage tank, the processing liquid recovery groove, the vacuum groove, and the air bearing are configured by a single processing block. apparatus.
(8) The machining fluid supply mechanism supplies the machining fluid so that the machining fluid contacts or fills at least the laser irradiation site and the vicinity of the thin film disposed upward with respect to the non-machining portion. A machining fluid supply unit in which a machining fluid supply port is formed;
A first machining fluid recovery groove capable of collecting the machining fluid is disposed on the outer peripheral side of the machining fluid supply unit,
A nozzle hole for discharging air is disposed on the outer peripheral side of the first processing liquid recovery groove so as to suppress the processing liquid from spreading to the outer peripheral side,
A second machining fluid recovery groove capable of collecting the machining fluid is disposed on the outer peripheral side of the nozzle hole,
An apparatus for manufacturing a solar cell panel according to (4) or (5), wherein an air bearing capable of discharging compressed air is disposed on an outer peripheral side of the second machining fluid recovery groove.
(9) The machining fluid supply unit, the first machining fluid collection groove, the nozzle hole, the second machining fluid collection groove, and the air bearing are configured by a single machining block ( The manufacturing apparatus of the solar cell panel as described in 8).

  According to the method for manufacturing a solar cell panel of the present invention, a thin film is irradiated with a laser in a state where the working liquid is supplied toward the panel and the working liquid is in contact with or filled with the laser irradiation portion of the thin film and its vicinity. Since the separation groove is formed in the thin film, the thin film of the panel can be processed while being washed with a processing liquid, and processed grains (residues) generated by laser processing can be removed. As a result, it is possible to prevent a short circuit of the circuit due to the separation grooves and processed grains remaining in the vicinity thereof, thereby preventing a performance degradation of the solar cell panel. Moreover, the laser irradiation site | part and its vicinity can be cooled, the thermal distortion of a thin film can be suppressed, and a separation groove can be processed with high precision.

  In addition, according to the solar cell panel manufacturing apparatus of the present invention, a laser irradiation device for irradiating the thin film of the panel with a laser, and the laser irradiation site of the thin film and the vicinity thereof are disposed so as to face the laser irradiation site. And a processing liquid supply mechanism that contacts or fills the thin film, and the separation groove is formed by irradiating the thin film with a laser, so that the separation groove can be laser processed while the thin film is washed with the processing liquid. Separation grooves can be efficiently formed while removing processing grains generated by processing with a processing liquid. Moreover, this can prevent a short circuit of the circuit due to the processed grains and prevent the performance degradation of the solar cell panel.

(A) is a top view of the manufacturing apparatus of a solar cell panel, (b) is a side view. It is a principal part side view of the process part of the manufacturing apparatus shown in FIG. It is a perspective view of the process liquid supply mechanism comprised by the single process block. It is an enlarged view of the process part shown in FIG. It is a principal part side view of the process part of the manufacturing apparatus of the solar cell panel which concerns on the modification of this invention. It is a principal part side view of the process part of the manufacturing apparatus of the solar cell panel which concerns on the other modification of this invention. It is a fragmentary sectional view of a solar cell panel.

  Hereinafter, the manufacturing apparatus of the solar cell panel which concerns on one Embodiment of this invention is demonstrated in detail based on drawing.

  As shown in FIG. 1, the solar cell panel manufacturing apparatus 10 includes a transfer device 11, a laser irradiation device 12, and a processing liquid supply mechanism 13.

  The transport device 11 is for transporting the solar cell panel 1 in the X direction, and includes a levitation unit 14 and a transport mechanism 15. The solar cell panel 1 has a first electrode film (transparent electrode) 3, a semiconductor film (solar cell film) 5, and a second electrode film (back electrode) 7 on a transparent glass substrate 2 as a non-processed part. A thin film 9 is formed (see FIG. 5).

  The levitation unit 14 includes a plurality of exhaust air pads 17 provided on the base 16, and exhausts air supplied via a pump and a solenoid valve (none of which is shown) from the exhaust air pad 17 to the panel 1. Levitate and support. The panel 1 is supported with the thin film 9 facing downward and the glass substrate 2 facing upward.

  The transport mechanism 15 sucks and holds one end (lower end portion in the embodiment shown in the figure) of the panel 1 that is levitated and supported by the levitating unit 14 with a suction pad (not shown), for example, a ball screw mechanism (not shown). Is conveyed along the guide rail 18 in the X direction. Further, between the rows of the exhaust air pads 17 arranged in alignment, conveyance rollers 20 that are respectively rotated by a motor 19 are arranged. The conveyance roller 20 supplies the panel 1 from the apparatus in the previous process to the manufacturing apparatus 10, and unloads the processed panel 1 from the manufacturing apparatus 10 and supplies it to the apparatus in the next process.

  The laser irradiation device 12 is for irradiating the thin film 9 with a laser to form the separation grooves 4, 6, 8 (see FIG. 5). In the case of the panel 1 in which 3 is formed, the separation groove 4 is formed in the first electrode film 3, and in the case of the panel 1 in which the first electrode film 3 and the semiconductor film 5 are formed as the thin film 9, In the case of the panel 1 in which the separation groove 6 is formed in the semiconductor film 5 and the first electrode film 3, the semiconductor film 5, and the second electrode film 7 are formed as thin films, the semiconductor film 5 and the second electrode film 7 are formed. A separation groove 8 is formed in The laser irradiation device 12 includes a laser generation device 21 and a plurality of (four in the embodiment shown in FIG. 1) optical system units 22 that are configured by a lens group 23 and connect the focal point of the laser onto the thin film 9.

  The laser generator 21 and each optical system unit 22 are connected by a glass fiber 24 or the like, and the laser led out from the laser generator 21 is guided to each optical system unit 22 through the glass fiber 24 to be transparent. The thin film 9 is irradiated from the glass substrate 2 side.

  A guide rod 25 extends in the Y direction substantially above the center of the base 16. The plurality of optical system units 22 are slidably disposed on the guide rod 25 and can be moved in the Y direction by a driving device (not shown). As a result, the optical system unit 22 can move in a direction (Y direction) orthogonal to the transport direction (X direction) of the panel 1, transmits the glass substrate 2 from above the panel 1, and lasers the thin film 9. Irradiate.

  On the lower surface side of the panel 1, machining fluid supply mechanisms 13 are arranged corresponding to the respective optical system units 22. The machining fluid supply mechanism 13 is driven by the drive device (not shown) and can move in the Y direction in synchronization with the optical system unit 22.

  As shown in FIGS. 2 and 3, the machining liquid supply mechanism 13 includes a machining liquid storage tank 31, a machining liquid recovery groove 32, a vacuum groove 33, and an air bearing 34 disposed in a single machining block 30. Has been. Specifically, a rectangular machining liquid recovery groove 32 is provided around the machining liquid storage tank 31 disposed in the center of the machining block 30 so as to surround the machining liquid storage tank 31, and the outer peripheral side of the machining liquid collection groove 32. A rectangular vacuum groove 33 is formed so as to surround the machining liquid recovery groove 32. Further, an air bearing 34 provided with a plurality of compressed air discharge holes 35 is provided on the outer peripheral side of the vacuum groove 33. Such a machining fluid supply mechanism 13 is disposed on the lower surface side of the panel 1 corresponding to each optical system unit 22.

  The machining liquid storage tank 31 is formed in a substantially rectangular box shape with an open upper surface, and the laser irradiation site P is located at the approximate center of the machining liquid storage tank 31. The machining fluid storage tank 31 is provided with a machining fluid supply port 36 at the bottom to constitute a machining fluid supply unit. The machining fluid reservoir 31 is connected to a machining fluid supply device such as a pump (not shown) by a pipe 37 so that the machining fluid 50 is continuously supplied. Supplied.

  Further, a recovery pipe 39 is connected to the drain port 38 provided at the bottom of the processing liquid recovery groove 32, and the processing liquid 50 overflowing from the processing liquid storage tank 31 is recovered via the drain port 38 and the recovery pipe 39. To do. The collected machining liquid 50 is filtered by the filtration device 40 and then circulated and supplied to the machining liquid storage tank 31 again.

  As the processing liquid 50, for example, pure water, tap water, water containing a detergent, or a chemical cleaning liquid containing an organic solvent such as acetone, methanol, ethanol, trichlene, or freon can be used.

  A suction hole 41 provided at the bottom of the vacuum groove 33 is connected to a vacuum source such as a vacuum pump (not shown) via a pipe 42 and sucks air in the vicinity of the vacuum groove 33. Further, the compressed air discharge hole 35 of the air bearing 34 is connected to the compressed air supply device via the pipe 43, and the compressed air is discharged from the compressed air discharge hole 35.

Hereinafter, the operation of the present embodiment will be described.
As shown in FIG. 1, the panel 1 on which a thin film 9 is formed on a glass substrate 2 is placed on a conveying roller 20 with the thin film 9 facing downward, and is supplied to a solar cell panel manufacturing apparatus 10. Here, when compressed air is sent from a pump (not shown) and exhausted from the exhaust air pad 17, the panel 1 floats by air pressure and is supported in a state of being separated from the conveying roller 20. Then, the transport mechanism 15 floats and is supported by the floating unit 14 and sucks and holds one end of the panel 1 supported by a suction pad or the like, and transports it in the X direction.

  When it is detected by a sensor or an imaging device (not shown) that the planned processing position of the panel 1 has been conveyed to the lower side of the optical system unit 22, the conveyance of the panel 1 in the X direction by the conveyance mechanism 15 is stopped. On the other hand, the laser emitted from the laser generator 21 is guided to the four optical system units 22 by the glass fiber 24 and is irradiated onto the panel 1 from the transparent glass substrate 2 side to focus on the thin film 9. This laser irradiation site P is located at the approximate center of the machining liquid storage tank 31.

  The laser generator 21 moves in the Y direction in synchronization with the machining liquid supply mechanism 13 disposed on the lower surface side of the panel 1 corresponding to the optical system unit 22, and the separation grooves 4 (6, 6) extending in the Y direction. 8) is processed into a thin film 9.

  At this time, as shown in FIG. 4, the machining liquid 50 is continuously supplied to the machining liquid storage tank 31 from the machining liquid supply device to the machining liquid supply port 36. The thin film 9 is in contact with or full. The machining liquid 50 overflowing from the machining liquid storage tank 31 is collected from the machining liquid collection groove (machining liquid collection unit) 32 through the drain port 38 and the collection pipe 39.

  Thus, since the thin film 9 is processed in a state of being washed in the continuously supplied processing liquid 50, the processing particles generated by the laser processing are discharged from the processing liquid collection groove 32 together with the processing liquid 50. . As a result, the processed grains do not remain inside or around the separation groove 4 (6, 8), and a short circuit between the battery cells is prevented. If bubbles exist in the machining liquid 50, the bubbles may explode by the laser and processing defects may occur. Therefore, the machining liquid 50 is continuously supplied so that bubbles do not accumulate in the machining liquid storage tank 31. It is desirable to do.

  Further, since the separation grooves 4 (6, 8) are processed while being cooled by the processing liquid 50, the melted processed grains do not reattach to the thin film. Furthermore, the thermal distortion of the thin film 9 is prevented by cooling, and processing with high accuracy can be performed. Thereby, the insulation performance of solar cell panel 1, an output characteristic, a withstand voltage characteristic, etc. can be maintained favorable.

  The machining liquid 50 that cannot be collected in the machining liquid collection groove 32 and is attached to the panel 1 due to the surface tension of the machining liquid 50 is sucked out together with the surrounding air sucked from the vacuum groove 33 by vacuum. .

  Note that the machining liquid 50 supplied to the machining liquid storage tank 31 applies a pushing force to the panel 1. On the other hand, the vacuum in the vacuum groove 33 acts as a force that pulls the panel 1 toward the machining fluid supply mechanism 13, so that a pressure sensor, a flow sensor, a flow rate adjustment valve (none of which are shown) are arranged on the pipes 37 and 42. By setting them and controlling the pressure balance between them, the gap between the panel 1 and the machining fluid supply mechanism 13 can be controlled to be constant at several hundred microns, for example. In addition, this can prevent the surface of the processing liquid 50 that contacts or fills the panel 1 from undulating, and can suppress refraction due to fluctuations in the processing liquid 50. As a result, the separation groove 4 (6, 8) processing by the laser can be performed stably and accurately.

  Further, the processing liquid 50 remaining in the panel 1 without being removed by the air suction of the vacuum groove 33 is blown off by the compressed air discharged from the compressed air discharge hole 35 of the air bearing 34 and removed and dried.

  Thereafter, the same operation is repeated while moving the panel 1 by a predetermined distance in the X direction by the transport device 11 to process the separation grooves 4 (6, 8) in the thin film 9, whereby the solar cell panel 1 is manufactured. The

  As described above, according to the method for manufacturing the solar cell panel 1 of the present embodiment, the processing liquid 50 is supplied toward the panel 1 so that the processing liquid 50 is brought into contact with the laser irradiation portion P of the thin film 9 and its vicinity. Since the separation groove 4 (6, 8) is formed in the thin film 9 by irradiating the thin film 9 with a laser in the filled state, the lower surface (thin film) of the panel 1 is processed while being washed with the processing liquid 50. It is possible to remove processed grains (residues) generated by laser processing. Thereby, it is possible to prevent a short circuit of the circuit due to the separation grooves 4 (6, 8) and the processed grains remaining in the vicinity thereof, and to prevent performance degradation of the solar cell panel 1. Moreover, the laser irradiation site | part P and its vicinity can be cooled, the thermal distortion of the thin film 9 can be suppressed, and the isolation | separation groove | channel 4 (6, 8) can be processed with high precision.

  Further, the separation groove 4 (6, 8) is formed while supplying the processing liquid toward the panel 1 while conveying the solar cell panel 1 levitated and supported by the levitating unit in a predetermined direction. The panel 1 can be transported in a non-contact manner without being damaged, and the separation grooves 4 (6, 8) can be easily processed in the transport direction.

Further, the processing of the separation grooves 4 (6, 8) to the panel 1 conveyed with the thin film 9 facing downward is performed by the hydraulic pressure of the processing liquid 50 supplied from the lower surface side of the panel 1 and the surroundings of the laser irradiation site P. Since it is performed in a state where the panel 1 is supported at a predetermined height by adjusting the vacuum pressure for sucking air, the separation groove 4 (6, 8) can be processed with high accuracy.
In addition, when supporting the panel 1 to predetermined | prescribed height, the pressure of the compressed air of the air bearing 34 is also adjusted as needed.

  Moreover, according to the manufacturing apparatus 10 of the solar cell panel 1 of this embodiment, the laser irradiation apparatus 12 which irradiates a laser to the thin film 9 of the panel 1, and the laser of the thin film 9 are disposed so as to face the laser irradiation site P. Since the processing liquid supply mechanism 13 for contacting or filling the processing liquid 50 in or near the irradiation site P is provided, and the thin film 9 is irradiated with a laser to form the separation grooves 4 (6, 8). The separation grooves 4 (6, 8) can be laser processed while washing 9 with the processing liquid 50, and the processing grooves 50 can be used to efficiently remove the separation grains 4 (6, 8) while removing the processing grains generated by the laser processing. 8) can be formed. In addition, this makes it possible to prevent a short circuit of the circuit due to the processed grains and to prevent performance degradation of the solar cell panel 1.

  Furthermore, since the transport device 11 including the floating unit 14 that can float and support the panel 1 and the transport mechanism 15 that transports the panel 1 that is floated and supported is provided, the separation groove 4 (6 8) can be easily processed.

  In addition, the processing liquid supply mechanism 13 stores the supplied processing liquid 50 and contacts or fills the laser irradiation portion P of the thin film 9 disposed downward with respect to the substrate 2 and the vicinity thereof. 31, a processing liquid recovery groove 32 that is disposed on the outer peripheral side of the processing liquid storage tank 31 to recover the processing liquid 50, a vacuum groove 33 that is disposed on the outer peripheral side of the processing liquid recovery groove 32, and an outer periphery of the vacuum groove 33 An air bearing 34 that is disposed on the side and discharges compressed air, so that the separation groove 4 (6, 8) is laser-processed in the thin film 9 in a state in which the processing liquid 50 is in contact with or filled with the thin film 9, The machining liquid 50 containing the machining grains is efficiently collected by the machining liquid collection groove 32. Furthermore, after the working fluid 50 adhering to the panel 1 is sucked into the vacuum groove 33 together with the surrounding air, the compressed air is blown to reliably remove the working fluid 50 including the processed grains and the processed grains from the panel 1. it can. In addition, this can prevent a short circuit due to residual processed grains.

  Further, since the machining liquid storage tank 31, the machining liquid collection groove 32, the vacuum groove 33, and the air bearing 34 are configured by a single machining block 30, the machining liquid supply mechanism 13 can be downsized.

  FIG. 5 is a side view of an essential part of a processing unit of a solar cell panel manufacturing apparatus according to a modification of the present invention. In this modification, the panel 1 is transported with the thin film 9 facing upward and the glass substrate 2 facing downward, the processing liquid 50 is supplied from the upper surface side of the panel 1, and the processing liquid 50 is applied to the laser irradiation portion P of the thin film 9 and its vicinity. In a state in which the thin film 9 is contacted or filled, the thin film 9 is irradiated with a laser from the upper surface side of the panel 1 to form the separation groove 4 (6, 8) in the thin film 9.

  For this reason, the processing liquid supply mechanism 13 supplies the processing liquid 50 so that the processing liquid 50 is brought into contact with or filled in at least the laser irradiation portion P and the vicinity thereof of the thin film 9 disposed upward with respect to the substrate 2. A machining liquid supply unit 55 in which a liquid supply port 36 is formed is provided. Further, on the outer peripheral side of the machining liquid supply unit 55, a rectangular first machining liquid collection groove 32a capable of collecting the machining liquid is disposed. A rectangular nozzle hole 51 that discharges air is disposed on the outer peripheral side of the first processing liquid recovery groove 32a so as to prevent the processing liquid 50 from spreading to the outer peripheral side. Further, a rectangular second machining fluid recovery groove 32 b capable of collecting the machining fluid 50 is disposed on the outer peripheral side of the nozzle hole 51. And the air bearing 34 which can discharge compressed air is arrange | positioned at a rectangular shape at the outer peripheral side of the 2nd process fluid collection | recovery groove | channel 32b.

Further, the machining fluid supply unit 55, the first machining fluid collection groove 32a, the nozzle hole 51, the second machining fluid collection groove 32b, and the air bearing 34 are configured by a single machining block 30a and are the same as in the first embodiment. In addition, the machining fluid supply mechanism 13 is downsized. The central portion of the machining block 30a where the machining liquid supply unit 55 is formed is formed by a transparent plate 52 such as a quartz plate,
The laser generator 21 disposed above the processing block 30a passes the transparent plate 52 of the processing block 30a and irradiates the thin film 9 with laser from above the panel 1.

  Further, below the processing block 30a, a receiving tray 53 for storing the processing liquid 50 supplied from the processing liquid supply mechanism 13 in a state where the panel 1 is not transferred is interposed through a gap through which the transferred panel 1 passes. Is formed.

  In the manufacturing apparatus configured as described above, the panel 1 that is levitated and supported by the levitating unit 14 is kept at a predetermined gap between the panel 1 and the processing block 30a by the compressed air discharged from the air bearing 34. Therefore, the separation grooves 4 (6, 8) can be processed with high accuracy. At the time of processing, the processing liquid 50 can be supplied by the processing liquid supply mechanism 13 so that the processing liquid 50 can be brought into contact with or filled with the laser irradiation portion P of the thin film 9 and the vicinity thereof, and the panel 1 is washed with the processing liquid 50. Thus, the separation grooves 4 (6, 8) can be formed while removing processed grains generated by the processing. Furthermore, it is possible to efficiently recover the machining liquid 50 including the machining grains using the first machining liquid collection groove 32a, the nozzle hole 51, and the second machining liquid collection groove 32b.

  FIG. 6: is a principal part side view of the process part of the manufacturing apparatus of the solar cell panel which concerns on the other modification of this invention. In this other modification, the thin film 9 is directed upward and the glass substrate 2 is directed downward, the panel 1 is conveyed, and the processing liquid 50 is supplied from the upper surface side of the panel 1 to process the laser irradiation site P of the thin film 9 and its vicinity. In a state where the liquid 50 is contacted or filled, the thin film 9 is irradiated with a laser from the lower surface side of the panel 1 to form the separation grooves 4 (6, 8) in the thin film 9.

  In this case, a transparent plate 54 such as a quartz plate is formed on a part of the tray 53 instead of forming the transparent plate 52 in the processing block 30a of FIG. The laser generator 21 disposed below the tray 53 passes through the transparent plate 54 of the tray 53, passes through the substrate 2 from below the panel 1, and irradiates the thin film 9 with laser.

  Therefore, similarly to the manufacturing apparatus of FIG. 5, at the time of processing, the processing liquid 50 can be supplied by the processing liquid supply mechanism 13 so that the processing liquid 50 can be contacted or filled in the laser irradiation portion P of the thin film 9 and its vicinity. The separation groove 4 (6, 8) can be formed while the panel 1 is washed with the processing liquid 50 and the processing grains generated by the processing are removed.

In addition, this invention is not limited to embodiment mentioned above, A deformation | transformation, improvement, etc. are possible suitably.
For example, in the above embodiment, the laser emitted from the laser generator 21 is divided and processed by the four optical system units 22. However, the number of the optical system units 22 is not limited thereto. It can be set arbitrarily. Further, the number of machining fluid supply mechanisms 13 is also arbitrary.

Moreover, the non-processed part of this invention is not limited to a board | substrate like a glass substrate, A sheet | seat may be sufficient.
Furthermore, in the embodiment shown in FIGS. 1 to 4, similarly to FIG. 5, when a transparent plate is provided in the portion of the machining liquid storage tank 31 of the machining block 30, the laser generator 21 is below the machining block 30. The thin film 9 may be irradiated from below the panel 1 by being arranged on the side.

  In addition, the present invention provides the thin film as long as it has at least a machining liquid supply unit having a machining liquid supply port for supplying a machining liquid and a machining liquid recovery unit that collects the machining liquid around the machining liquid supply unit. The laser processing can be performed while the processing liquid is brought into contact with or filled with the laser irradiation site and the vicinity thereof and the processing liquid containing the processing grains is collected.

1 Solar cell panel 2 Glass substrate (transparent substrate, non-processed part)
DESCRIPTION OF SYMBOLS 3 Electrode film 4 Separation groove 5 Semiconductor film 6 Separation groove 7 Electrode film 8 Separation groove 9 Thin film 10 Solar cell panel manufacturing apparatus 11 Conveyance apparatus 12 Laser irradiation apparatus 13 Processing liquid supply mechanism 14 Floating unit 15 Conveyance mechanism 30 Processing block 31 Processing Liquid storage tank (working fluid supply part)
32, 32a, 32b Machining fluid collection groove (machining fluid collection section)
33 Vacuum groove 34 Air bearing 36 Processing fluid supply port 50 Processing fluid 51 Nozzle holes 52 and 54 Transparent plate 55 Processing fluid supply part P Laser irradiation site

Claims (9)

A method for manufacturing a solar cell panel, wherein a non-processed portion on which a thin film having at least one of an electrode film and a semiconductor film is formed is irradiated with a laser to form a separation groove in the thin film,
The thin film is irradiated with the laser in a state in which the processing liquid is supplied to the panel and the processing liquid is in contact with or filled in the laser irradiation portion of the thin film where the laser is irradiated and the vicinity thereof. Forming a separation groove in
A method for producing a solar cell panel, comprising: A step of conveying the panel levitated and supported by the levitating unit in a predetermined direction;
2. The method for manufacturing a solar cell panel according to claim 1, wherein the separation groove is formed while conveying the panel and supplying a processing liquid toward the panel. The transporting step transports the panel with the thin film facing down,
The groove forming step adjusts the hydraulic pressure of the processing liquid supplied from the lower surface side of the panel and the vacuum pressure for sucking air around the laser irradiation site to bring the panel to a predetermined height. It is performed in the state supported, The manufacturing method of the solar cell panel of Claim 2 characterized by the above-mentioned. An apparatus for manufacturing a solar cell panel that forms a separation groove in the thin film by irradiating a laser on a non-processed portion where a thin film having at least one of an electrode film and a semiconductor film is formed on a surface,
A laser irradiation device for irradiating the thin film of the panel with a laser;
A solar cell panel comprising: a processing liquid supply mechanism that is disposed so as to face a laser irradiation portion of the thin film, and that contacts or fills at least the laser irradiation portion of the thin film with a processing liquid in the vicinity thereof. Manufacturing equipment.   The manufacturing of the solar cell panel according to claim 4, further comprising: a floating unit capable of floating and supporting the panel; and a transport device including a transport mechanism that holds the panel and transports the panel in a predetermined direction. apparatus. The machining fluid supply mechanism is supplied from a machining fluid supply port so that the machining fluid contacts or fills at least the laser irradiation site and its vicinity of the thin film disposed downward with respect to the non-machining portion. A working fluid storage tank for storing the working fluid,
On the outer peripheral side of the machining fluid storage tank, a machining fluid collection groove capable of collecting the machining fluid is disposed,
On the outer peripheral side of the machining liquid recovery groove, a vacuum groove is arranged that can suck out the machining liquid together with surrounding air by vacuum,
The solar cell panel manufacturing apparatus according to claim 4 or 5, wherein an air bearing capable of discharging compressed air is disposed on an outer peripheral side of the vacuum groove.   The apparatus for manufacturing a solar cell panel according to claim 6, wherein the processing liquid storage tank, the processing liquid recovery groove, the vacuum groove, and the air bearing are configured by a single processing block. The processing liquid supply mechanism supplies the processing liquid so that the processing liquid contacts or fills at least the laser irradiation portion and the vicinity thereof of the thin film arranged upward with respect to the non-processing portion. Provided with a machining fluid supply part in which a supply port is formed,
A first machining fluid recovery groove capable of collecting the machining fluid is disposed on the outer peripheral side of the machining fluid supply unit,
A nozzle hole for discharging air is disposed on the outer peripheral side of the first processing liquid recovery groove so as to suppress the processing liquid from spreading to the outer peripheral side,
A second machining fluid recovery groove capable of collecting the machining fluid is disposed on the outer peripheral side of the nozzle hole,
The solar cell panel manufacturing apparatus according to claim 4 or 5, wherein an air bearing capable of discharging compressed air is disposed on an outer peripheral side of the second machining fluid recovery groove.   9. The machining fluid supply unit, the first machining fluid collection groove, the nozzle hole, the second machining fluid collection groove, and the air bearing are configured by a single machining block. The manufacturing apparatus of the solar cell panel of description.

Images