JP2011056591A - Vibration control device and conveyor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration control device and a conveyor, which quickly and accurately move a link to a desired position, and reduce power consumption while the link is driven at high speed. <P>SOLUTION: The vibration controller includes a moving part 20 movable with respect to a base 10, an actuator 11 for driving the moving part 20, an angle sensor 30 for detecting a rotation angle, an inertia sensor 12 for detecting inertial force, an arithmetic part 13 for transmitting a control signal, a transmission part 14 for transmitting a detection signal of the angle sensor 30, an instruction part 15 for transmitting an instruction signal, and a determination part 16 for determining driving speed of the moving part 20. The arithmetic part 13 generates the control signal based on a low frequency component of the detection signal of the angle sensor 30 and a high frequency component of a detection signal of the inertia sensor 12. The determination part 16 generates a stop signal for stopping at least one of the angle sensor 30 and the transmission part 14 when the driving speed of the moving part 20 is determined to be larger than reference driving speed. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a vibration control device and a transfer device.

  2. Description of the Related Art Conventionally, in a device having a movable link structure (a robot such as an IC handler or a transport device such as a printer), a technique capable of moving the movable link to a predetermined position quickly and accurately has been demanded. In general, in an apparatus having a movable link structure, positional accuracy is enhanced by using an actuator such as a motor and an angle sensor with high resolution called an encoder. In addition, by controlling the motor torque based on the rotation angle of each link detected by the angle sensor, quick and stable movement of the link is realized.

  However, unnecessary vibration caused by link movement is a problem. In particular, the residual vibration remaining after the link is stopped cannot be detected or controlled by the angle sensor alone, and therefore, the next operation cannot be performed unless a sufficient time has elapsed until the vibration is stopped.

  A technique for solving such a problem has been studied. For example, in Patent Document 1, a high frequency component equal to or higher than a cut-off frequency in an integral value of a link angular velocity, a rotation angle of a motor, and a torque transmission mechanism. The link is quickly and accurately moved to a desired position by synthesizing a low frequency component equal to or lower than the cut-off frequency in the product of the reduction ratio and using it for control.

JP 2005-242794 A

  However, in Patent Document 1, since a highly accurate angle sensor is always operated, power may be wasted. For example, in the method used for control by combining the high frequency component in the integral value of the angular velocity of the link and the low frequency component in the product of the motor rotation angle and the reduction ratio, the detection signal of the angle sensor (motor rotation angle) The high frequency component (minor fluctuation component) is not used. The minute fluctuation component of the detection signal of the angle sensor that has been cut off is supplemented by the detection signal of the inertial sensor (high frequency component in the integrated value of the angular velocity of the link). That is, the high frequency component of the signal from the digitized angle sensor is unnecessary, and the power consumed for this purpose is wasted.

  By the way, the high frequency component of the signal from the angle sensor is not always unnecessary. When the link is driven at high speed, the high frequency component of the angle sensor detection signal can be supplemented by the inertial sensor detection signal, but when the link is stopped or driven at low speed, the angle sensor detection The low frequency component of the signal increases and the high frequency component becomes effective. Therefore, it is necessary to change the handling of high-frequency components of the angle sensor in accordance with the link driving speed.

  The present invention has been made in view of such circumstances, and can quickly and accurately move a link to a desired position, and can reduce power consumption when the link is driven at high speed. An object of the present invention is to provide a vibration control device and a transport device.

  In order to solve the above-described problems, a vibration control device of the present invention includes a moving unit that can rotate with respect to a base, an actuator that drives the moving unit, an angle sensor that detects a rotation angle of the actuator, An inertial sensor that detects an inertial force of the moving unit with respect to a base; a calculation unit that transmits a control signal to the actuator; a transmission unit that transmits a detection signal of the angle sensor to the calculation unit; and a command signal to the calculation unit And a determination unit that determines whether the driving speed of the moving unit is larger or smaller than a reference driving speed, and the arithmetic unit cuts out the detection signal of the angle sensor. The control signal is generated based on a low frequency component equal to or lower than an off frequency and a high frequency component equal to or higher than the cutoff frequency among detection signals of the inertial sensor. The determination unit generates a stop signal for stopping at least one of the angle sensor and the transmission unit when it is determined that the driving speed of the moving unit is higher than the reference driving speed. And

  According to the vibration control device of the present invention, the control signal is generated based on the low frequency component below the cutoff frequency in the detection signal of the angle sensor and the high frequency component above the cutoff frequency in the detection signal of the inertial sensor. Therefore, the influence of the bias drift of the inertial sensor can be eliminated. For this reason, a link (moving part) can be moved to a desired position quickly and accurately. In addition, when the determination unit determines that the link driving speed is higher than the reference driving speed, a stop signal is generated to stop at least one of the angle sensor and the transmission unit. In this case, power consumption can be reduced. Therefore, it is possible to provide a vibration control device that can move the link quickly and accurately to a desired position and reduce power consumption when the link is driven at high speed.

  In the vibration control device, the angle sensor includes a first angle detection unit having a first resolution and a second angle detection unit having a second resolution higher than the first resolution. The determination unit may generate a first stop signal that stops only the second angle detection unit of the angle sensor.

  According to this configuration, the angle sensor has the first angle detection unit having a relatively low resolution and the second angle detection unit having a relatively high resolution, and the determination unit drives based on the link driving speed. When it is determined that the speed is greater than the speed, the second angle detection unit having a relatively high resolution among the two angle detection units is stopped. For this reason, when the detection signal of the highly accurate angle sensor is not necessary, the second angle detection unit having a relatively high resolution is stopped, so that the two angle detection units are always operated. As a result, power consumption can be reduced.

  In the vibration control device, the determination unit generates a second stop signal for stopping the transmission signal of the lower bits in the transmission unit corresponding to the high frequency component of the detection signal of the angle sensor. May be.

  According to this configuration, when the determination unit determines that the link driving speed is higher than the reference driving speed, the transmission signal of the lower bits in the transmission unit corresponding to the high frequency component of the detection signal of the angle sensor Is stopped. For this reason, it becomes possible to reduce power consumption by the amount by which the transmission signal of the lower bits is stopped.

  In the vibration control device, the determination unit may simultaneously generate the first stop signal and the second stop signal.

  According to this configuration, when the determination unit determines that the link drive speed is higher than the reference drive speed, the second angle detection unit having a relatively high resolution among the two angle detection units is stopped. And a second stop signal for stopping the transmission signal of the lower bits in the transmission unit corresponding to the high frequency component of the detection signal of the angle sensor. For this reason, it becomes possible to reduce power consumption markedly.

  In the vibration control device, the reference driving speed may be set based on the command signal from the command unit.

  According to this configuration, since the reference driving speed is based on the command signal from the command section (a signal calculated from the information on the driving speed of the link 20 obtained from the experimental data input in advance), the link driving speed is reduced. Can be predicted. For example, when the link driving speed is higher than the reference driving speed, an angle sensor (second angle detecting unit when a highly accurate angle sensor detection signal is not required) based on the command signal. It is possible to reduce power consumption by stopping at least one of the transmission units.

  In the vibration control device, the reference driving speed may be set based on a detection signal of the inertial sensor.

  According to this configuration, when the link driving speed is higher than the reference driving speed, the detection signal of the inertial sensor becomes large, and therefore the angle sensor (the detection signal of the angle sensor with high accuracy is not necessary with that value). If not, at least one of the second angle detection unit) and the transmission unit is stopped. Therefore, power consumption can be reduced.

  In the vibration control device, the reference driving speed may be set based on a detection signal of the angle sensor.

  According to this configuration, when the link driving speed is higher than the reference driving speed, the differential value of the detection signal of the angle sensor becomes large. Is not necessary, at least one of the second angle detection unit) and the transmission unit is stopped. Therefore, power consumption can be reduced.

  The conveyance device of the present invention is characterized by including the above-described vibration control device of the present invention.

  According to this configuration, since the vibration control device described above is provided, the link can be quickly and accurately moved to a desired position, and power consumption can be reduced when the link is driven at high speed. Can provide.

It is a figure which shows typically the vibration control apparatus which concerns on this invention. It is a block diagram explaining the calculation method of a calculating part. It is a figure which shows the angle sensor which has a 1st angle detection part and a 2nd angle detection part. It is a figure explaining the stop part of a transmission signal. It is a schematic circuit diagram of a transmission part. It is a block diagram explaining the command signal of a command part. It is a block diagram explaining the detection signal of an inertial sensor or an angle sensor. It is a figure which shows the XY stage apparatus as a conveying apparatus. It is a figure which shows the laser printer as a conveying apparatus. It is a figure which shows the inkjet printer as a conveying apparatus.

  Embodiments of the present invention will be described below with reference to the drawings. This embodiment shows one aspect of the present invention, and does not limit the present invention, and can be arbitrarily changed within the scope of the technical idea of the present invention. Moreover, in the following drawings, in order to make each structure easy to understand, an actual structure and a scale, a number, and the like in each structure are different.

(First embodiment)
FIG. 1 is a schematic configuration diagram of a vibration control device 1 according to the first embodiment of the present invention. As shown in FIG. 1, the vibration control device 1 includes a base body 10, a link (moving unit) 20, an actuator 11 such as a servo motor, an angle sensor 30 such as an encoder, an inertial sensor 12, and a calculation unit 13. , A transmission unit 14, a command unit 15, and a determination unit 16.

  A link 20 is attached to the upper part of the base body 10 via an angle sensor 30 and an actuator 11. The link 20 can rotate with respect to the base 10. The link 20 includes a link main body 21, a slide shaft 22 provided at the tip of the link main body 21 and movable in the vertical direction, and a hand 23 provided at an end of the slide shaft 22.

  The actuator 11 is provided on the top of the base 10 and a link 20 is attached to the side thereof. The actuator 11 drives the link 20.

  The angle sensor 30 is provided below the actuator 11. The angle sensor 30 has a function of detecting the rotation angle of the actuator 11.

  The inertial sensor 12 is attached to a slide shaft 22 near the hand 23. As the inertia sensor 12, for example, an angular velocity sensor such as a rate gyro is used. The inertial sensor 12 has a function of detecting the inertial force (angular velocity) of the link 20 with respect to the base body 10. Note that the angular velocity of the link 20 with respect to the base 10 is an angular velocity component in the rotation plane of the link 20.

  The calculation unit 13 is electrically connected to the actuator 11, the inertial sensor 12, the transmission unit 14, and the command unit 15. The calculation unit 13 has a function of transmitting a control signal to the actuator 11. A command signal is transmitted to the calculation unit 13 by the command unit 15.

  FIG. 2 is a block diagram illustrating a calculation method of the calculation unit 13. First, the rotation angle of the actuator 11 is detected by the angle sensor 30. Next, the rotation angle of the actuator 11 (detection signal of the angle sensor 30) detected by the angle sensor 30 by the transmission unit 14 is transmitted to the calculation unit 13. Next, the detection signal of the angle sensor 30 is passed through the low pass filter LPF. Thereby, the low frequency component below the cut-off frequency among the detection signals of the angle sensor 30 is obtained.

  On the other hand, the angular velocity of the link 20 relative to the base body 10 is detected by the inertial sensor 12. Next, the angular velocity (detection signal of the inertial sensor 12) of the link 20 detected by the inertial sensor 12 is transmitted to the calculation unit 13. Next, the angular velocity of the link 20 is integrated by the calculation unit 13. Next, this integration result is passed through the high-pass filter HPF. Thereby, the high frequency component more than a cut-off frequency is obtained among the angles of the link 20. FIG. Here, the reason for removing the low-frequency component from the angle of the link 20 is that the angle of the link 20 cannot be obtained accurately due to the influence of the bias drift by the integration of the angular velocity of the link 20, so the influence of the bias drift is removed. It is to do.

  Thus, by using the low-pass filter LPF and the high-pass filter HPF, the low-frequency component of the detection signal of the angle sensor 30 and the high-frequency component of the integration result of the detection signal of the inertial sensor 12 can be added. By this calculation, the angle of the link 20 with respect to the base body 10 is calculated, and a control signal is generated. Then, a control signal is transmitted to the actuator 11 by the arithmetic unit 13.

  The determination unit 16 is electrically connected to the angle sensor 30 and the transmission unit 14. The determination unit 16 determines whether the drive speed of the link 20 is larger or smaller than the reference drive speed. Note that the determination standard (standard drive speed) of the determination unit 16 will be described later.

  Moreover, the determination part 16 produces | generates the stop signal which stops at least one of the angle sensor 30 and the transmission part 14, when it determines with the drive speed of the link 20 being larger than the drive speed used as a reference | standard. As a result, power is not wasted when the link is driven at high speed, and power consumption can be reduced.

  FIG. 3 is a diagram illustrating an angle sensor 30 having a first angle detection unit 31 and a second angle detection unit 32. In FIG. 3, reference numeral 41 denotes an LED, reference numeral 42 denotes a collimating lens, reference numeral 43 denotes a photosensor (PD array), reference numeral 44 denotes a magnetic sensor (MR sensor), and reference numeral 45 denotes a magnet.

  As shown in FIG. 3, the light emitted from the LED 41 enters the photo sensor 43 via the collimating lens 42 and the angle sensor 30. At this time, the angle sensor 30 is rotated by a motor (not shown).

  The angle sensor 30 includes a first angle detection unit 31 having a first resolution and a second angle detection unit 32 having a second resolution that is higher than the first resolution. As the 1st angle detection part 31, what has an ABS pattern (for example, 11001111001 pattern) can be used, for example. As the 2nd angle detection part 32, what has an INC pattern (for example, 10101010110 pattern) can be used, for example.

  Since the ABS detection of the first angle detection unit 31 does not have a higher resolution than the INC detection of the second angle detection unit 32, a highly accurate detection signal of the angle sensor 30 (rotation angle of the actuator 11) is not necessary. It is effective when there is not.

  In the present embodiment, when the determination unit 16 determines that the drive speed of the link 20 is greater than the reference speed, the first stop signal that stops only the second angle detection unit 32 of the angle sensor 30. Is generated. That is, when the detection signal of the angle sensor 30 with high accuracy is not necessary, the second angle detection unit 32 with relatively high resolution can be stopped. Thereby, it becomes possible to reduce power consumption rather than the two angle detection parts 31 and 32 being always operated.

  FIG. 4 is a diagram for explaining a stop portion of the transmission signal. FIG. 4A shows a transmission signal in a normal state, and FIG. 4B shows a state when the number of bits is reduced. FIG. 5 is a schematic circuit diagram of the transmission unit 14.

  As shown in FIG. 4A, the transmission signal includes a header, a data body, and a parity. The enable corresponding to the transmission signal (header, data body, parity) is in the ON state. In addition, an enable that does not correspond to a transmission signal (header, data body, parity) is in an OFF state.

  By the way, when transmitting the detection signal of the robot encoder (detection signal of the angle sensor 30), the RS-485 standard is often used for transmission using a transmission path (cable) having a length of several meters. Generally, a differential voltage of several volts or more is transmitted to prepare for transmission loss and external noise. For example, in the case of differential transmission with 50 V termination at 5 V, 0.5 watts of power is consumed only by this transmission line. In the case of a 6-axis robot, 3 watts of power is consumed to transmit the detection signal of the angle sensor 30 that detects the rotation angle of each axis actuator.

  Therefore, in the present embodiment, when the determination unit 16 determines that the driving speed of the link 20 is larger than the reference speed, the transmission unit 14 corresponding to the high frequency component of the detection signal of the angle sensor 30 is used. A second stop signal for stopping the transmission signal of the lower bits is generated. That is, the number of bits of a part (lower order bits) of the data body in the detection signal of the angle sensor 30 is reduced. Further, when the detection signal of the angle sensor 30 is not transmitted, the differential buffer is set in a high impedance state (a portion showing a large resistance value in the circuit diagram shown in FIG. 5). As a result, the power consumption in the termination resistor can be reduced by the amount corresponding to the reduced number of lower bits.

  FIG. 6 is a block diagram illustrating the command signal of the command unit 15. As shown in FIG. 6, in this embodiment, the determination reference (drive speed as a reference) of the determination unit 16 is set based on a command signal from the command unit 15.

  For example, information on the driving speed of the link 20 obtained in advance from experimental data is stored in the command unit 15, and a command signal is transmitted to the determination unit 16 based on these information. Based on the command signal from the command unit 15 and the drive speed of the link 20, the determination unit 16 determines whether the drive speed of the link 20 is larger or smaller than the reference drive speed. When the determination unit 16 determines that the drive speed of the link 20 is greater than the reference drive speed, the determination unit 16 generates a stop signal that stops at least one of the angle sensor 30 and the transmission unit 14. The stop signal is output from the determination unit 16 and transmitted to at least one of the angle sensor 30 and the transmission unit 14. Accordingly, power consumption can be reduced by stopping at least one of the angle sensor 30 (the second angle detection unit 32 when the detection signal of the angle sensor 30 with high accuracy is not necessary) and the transmission unit. It becomes possible.

  According to the vibration control device 1 of the present invention, based on the low frequency component below the cutoff frequency in the detection signal of the angle sensor 30 and the high frequency component above the cutoff frequency in the detection signal of the inertial sensor 12. Since the control signal is generated, the influence of the bias drift of the inertial sensor 12 can be removed. For this reason, the link 20 can be quickly and accurately moved to a desired position. Further, when the determination unit 16 determines that the drive speed of the link 20 is higher than the reference drive speed, a stop signal that stops at least one of the angle sensor 30 and the transmission unit 14 is generated. It is possible to reduce power consumption when 20 is driven at high speed. Therefore, it is possible to provide the vibration control device 1 that can move the link 20 quickly and accurately to a desired position and can reduce power consumption when the link 20 is driven at high speed.

  Further, according to this configuration, the angle sensor 30 includes the first angle detection unit 31 having a relatively low resolution and the second angle detection unit 32 having a relatively high resolution, and the determination unit 16 includes the link 20. When it is determined that the driving speed is higher than the reference driving speed, the second angle detecting unit 32 having a relatively high resolution among the two angle detecting units 31 and 32 is stopped. For this reason, when the detection signal of the highly accurate angle sensor is not necessary, the second angle detection unit 32 having a relatively high resolution is stopped, so that the two angle detection units 31 and 32 are always in the state. It becomes possible to reduce power consumption rather than being operated.

  Further, according to this configuration, when the determination unit 16 determines that the drive speed of the link 20 is larger than the reference drive speed, the transmission unit corresponding to the high frequency component of the detection signal of the angle sensor 30 The lower bit transmission signal is stopped. For this reason, it becomes possible to reduce power consumption by the amount by which the transmission signal of the lower bits is stopped.

  Further, according to this configuration, since the reference driving speed is based on the command signal from the command unit 15 (a signal calculated from the driving speed information of the link 20 obtained from the experimental data input in advance), the link 20 Can be predicted. For example, when the drive speed of the link 20 is higher than the reference drive speed, the angle sensor 30 (the second angle detection when a highly accurate detection signal of the angle sensor is not required) based on the command signal. It is possible to reduce power consumption by stopping at least one of the unit 32) and the transmission unit 14.

  In the present embodiment, the determination unit 16 may generate the first stop signal and the second stop signal at the same time. According to this configuration, when the determination unit 16 determines that the drive speed of the link 20 is higher than the reference drive speed, the second angle having a relatively high resolution among the two angle detection units 31 and 32. The first stop signal for stopping the detection unit 32 and the second stop signal for stopping the transmission signal of the lower bits in the transmission unit 14 corresponding to the high frequency component of the detection signal of the angle sensor 30 Generated at the same time. For this reason, it becomes possible to reduce power consumption markedly.

  Moreover, although the determination part 16 has produced | generated the stop signal which stops at least one of the angle sensor 30 and the transmission part 14, it does not restrict to this. For example, the command unit 15 may have a function of generating a stop signal that stops at least one of the angle sensor 30 and the transmission unit 14. That is, a device having a function of generating a stop signal for stopping at least one of the angle sensor 30 and the transmission unit 14 may be provided separately from the determination unit 16.

(Second Embodiment)
FIG. 7 is a block diagram illustrating a detection signal of the inertial sensor 12 or the angle sensor 30 according to the second embodiment of the present invention. FIG. 7 is a diagram illustrating a stop signal generation process of the determination unit 16 according to the second embodiment, corresponding to FIG. As shown in FIG. 7, the stop signal generation process of this embodiment is described in the first embodiment described above in that a reference driving speed is set based on the detection signal of the inertial sensor 12 (angle sensor 30). This is different from the stop signal generation process. Since the other points are the same as in the first embodiment, the same elements as those in FIG. 6 are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 7, in this embodiment, the determination reference (drive speed as a reference) of the determination unit 16 is set based on the output signal of the inertial sensor 12. For example, a threshold value serving as a determination criterion is input to the determination unit 16 in advance, and a reference driving speed is determined based on this threshold value. In the determination unit 16, the detection signal of the inertial sensor 12 is compared with the threshold value. When the drive speed of the link 20 is higher than the reference drive speed, the output signal of the inertial sensor 12 (the angular speed of the link 20) becomes large, and therefore the angle sensor 30 (the detection signal of the angle sensor with a very high accuracy) with that value. Is not necessary, at least one of the second angle detector 32) and the transmitter 14 is stopped. Therefore, power consumption can be reduced.

  Note that the same effect can be obtained even if the determination reference (reference drive speed) of the determination unit 16 is set based on the output signal of the angle sensor 30. Alternatively, the angle sensor 30 may be set by a combination using the angle sensor 30 when stopping at least one of the angle sensor 30 and the transmission unit 14 and using the inertial sensor 12 when operating.

(Transport device)
FIG. 8 is a diagram showing an XY stage device (droplet discharge device) which is an example of a transport device using the vibration control device of the present invention. As shown in FIG. 8, the droplet discharge device 100 includes a droplet discharge head 101, a drive shaft 104, a guide shaft 105, a stage 107, a cleaning mechanism 108, a base 109, a heater 106, and the above-described components. And a controller CT using the drive control device of the present invention. For example, an acceleration sensor is used as the inertial sensor in the controller CT. The inertial sensor in the controller CT has a function of detecting an inertial force (acceleration) in the Y-axis direction of the droplet discharge head 101 and an inertial force (acceleration) in the X-axis direction of the stage 107 or the cleaning mechanism 108.

  From the nozzle opening of the droplet discharge head 101, the functional liquid is discharged onto the substrate 100P supported by the stage 107. A drive motor 102 is connected to the drive shaft 104. The drive motor 102 is a stepping motor, for example, and rotates the drive shaft 104 when a drive signal in the Y-axis direction is supplied from the controller CT. When the drive shaft 104 rotates, the droplet discharge head 101 moves in the Y-axis direction. The guide shaft 105 is fixed so as not to move with respect to the base 109. The stage 107 includes a drive motor 103. The drive motor 103 is a stepping motor, for example, and moves the stage 107 in the X-axis direction when a drive signal in the X-axis direction is supplied from the controller CT.

  The controller CT supplies a droplet discharge control voltage to the droplet discharge head 101. The controller CT supplies a pulse signal for controlling the movement of the droplet discharge head 101 in the Y-axis direction to the drive motor 102 and moves the stage 107 in the X-axis direction to the drive motor 103. A drive pulse signal to be controlled is supplied.

  The cleaning mechanism 108 is for cleaning the droplet discharge head 101 and includes a drive motor (not shown). The cleaning mechanism 108 moves in the X-axis direction along the guide shaft 105 by the control of the drive motor. The movement of the cleaning mechanism 108 is also controlled by the controller CT. The heater 106 is means for heat-treating the substrate 100P by, for example, lamp annealing, and evaporates and dries the solvent contained in the functional liquid applied on the substrate 100P. The heater CT is also turned on and off by the controller CT.

  The droplet discharge device 100 discharges droplets onto the substrate 100P while relatively scanning the droplet discharge head 101 and the stage 107 that supports the substrate 100P. According to this configuration, since the above-described vibration control device (controller CT) is provided, the droplet discharge head 101 (stage 107) can be quickly and accurately moved to a desired position, and the droplet discharge head 101 can be moved. It is possible to provide the droplet discharge device 100 capable of reducing power consumption when the (stage 107) is driven at high speed.

  FIG. 9 is a diagram showing a printing apparatus (laser printer) which is an example of a transport apparatus using the vibration control apparatus of the present invention. As shown in FIG. 9, the laser printer 200 includes a motor 220, a power transmission mechanism 221, a photosensitive drum 222, a charging device 225, a latent image forming unit 226, a developing device 227, a transfer device 229, and a fixing device. The apparatus 230 and the controller 240 using the drive control apparatus of this invention mentioned above are provided.

  The motor 220 is connected to the photosensitive drum 222 via a power transmission mechanism 221. The motor 220 rotates the photosensitive drum 222 in the arrow D direction according to a control signal from the controller 240. A charging device 225 is disposed around the photosensitive drum 222. The surface of the photosensitive drum 222 is charged with a predetermined polarity by the charging device 225. Then, the latent image forming unit 226 performs image exposure on the charged surface of the photosensitive drum 222 by scanning with laser light, and an electrostatic latent image based on the gradation information of the image data is formed on the surface of the photosensitive drum 222. The electrostatic latent image formed in this manner is manifested as an image as the toner 228 conveyed from the developing device 227 adheres to the surface of the photosensitive drum 222. Then, the image on the photosensitive drum 222 is transferred to the recording paper 200P by the transfer device 229. The image transferred to the recording paper 200P is fixed by the fixing device 230.

  According to this configuration, since the vibration control device (controller 240) described above is provided, the photosensitive drum 222 is rotated quickly and accurately, and power consumption is reduced when the photosensitive drum 222 is driven at high speed. The laser printer 200 that can be provided can be provided.

  FIG. 10 is a diagram illustrating a printing apparatus (inkjet printer) which is an example of a transport apparatus using the vibration control apparatus of the present invention. As shown in FIG. 10, the inkjet printer 300 includes a housing 340, a guide rail 341, a power transmission mechanism 342, a carriage 343, and a controller 350 using the above-described drive control device of the present invention. Yes. As the inertial sensor in the controller 350, for example, an acceleration sensor is used. The inertial sensor in the controller 350 has a function of detecting an inertial force (acceleration) in the direction of arrow E of the carriage 343.

  The ink jet printer 300 is configured such that a carriage 343 suspended on a guide rail 341 is movable in the direction of arrow E based on a control signal from a controller 350 by a power transmission mechanism 342 connected to a motor (not shown). Yes. The carriage 343 is provided with an inkjet head, and droplets are ejected onto the recording paper 300 </ b> P while moving the inkjet head in the direction of arrow E based on a control signal from the controller 350. Then, the recording paper 300P is sequentially conveyed in the direction of the arrow F, whereby an image is printed on the recording paper 300P.

  According to this configuration, since the above-described vibration control device (controller 350) is provided, the carriage 343 can be moved quickly and accurately, and power consumption can be reduced when the carriage 343 is driven at high speed. Inkjet printer 300 capable of performing the above can be provided.

DESCRIPTION OF SYMBOLS 1 ... Vibration control apparatus, 10 ... Base | substrate, 11 ... Actuator, 12 ... Inertial sensor, 13 ... Operation part, 14 ... Transmission part, 15 ... Command part, 16 ... Determination part, 20 ... Link (moving part), 30 ... Angle sensor 31... First angle detector 32. Second angle detector 100. Droplet ejection device (conveyance device) 200. Laser printer (conveyance device) 300. Inkjet printer (conveyance device)

Claims (8)

A moving part movable with respect to the substrate;
An actuator for driving the moving unit;
An angle sensor for detecting the rotation angle of the actuator;
An inertial sensor for detecting an inertial force of the moving part with respect to the base;
An arithmetic unit for transmitting a control signal to the actuator;
A transmission unit that transmits a detection signal of the angle sensor to the arithmetic unit;
A command unit for transmitting a command signal to the arithmetic unit;
A determination unit that determines whether the driving speed of the moving unit is larger or smaller than a reference driving speed;
The calculation unit generates the control signal based on a low-frequency component that is equal to or lower than a cutoff frequency among detection signals of the angle sensor and a high-frequency component that is equal to or higher than the cutoff frequency among detection signals of the inertial sensor. And
The determination unit generates a stop signal for stopping at least one of the angle sensor and the transmission unit when determining that the driving speed of the moving unit is higher than the reference driving speed. Vibration control device. The angle sensor includes a first angle detection unit having a first resolution, and a second angle detection unit having a second resolution higher than the first resolution,
2. The vibration control device according to claim 1, wherein the determination unit generates a first stop signal that stops only the second angle detection unit of the angle sensor.   The said determination part produces | generates the 2nd stop signal which stops the transmission signal of the low-order bit in the said transmission part corresponding to the said high frequency component among the detection signals of the said angle sensor. Vibration control device.   The vibration control apparatus according to claim 3, wherein the determination unit simultaneously generates the first stop signal and the second stop signal.   The vibration control apparatus according to claim 1, wherein the reference driving speed is set based on the command signal from the command unit.   The vibration control apparatus according to claim 1, wherein the reference driving speed is set based on a detection signal of the inertial sensor.   The vibration control apparatus according to claim 1, wherein the reference driving speed is set based on a detection signal of the angle sensor.   A conveyance device comprising the vibration control device according to claim 1.

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