JP2011040304A - Driving device and switch - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a driving device capable of operating in two directions and achieving miniaturization of a switch, and to provide the switch having the driving device. <P>SOLUTION: An initial position of a first movable electrode 52 can be set up at a first initial position P1 and a second initial position P2 with a second driving section 2B. The first movable electrode 52 is located on the first initial position P1 at the time of an off-motion. When potential of a second fixed electrode 61 is set up at 5V, a rod 40 slightly moves to a left side since the second movable electrode 62 is attracted at a second fixed electrode 61 side with electrostatic force, and the first movable electrode 52 is displaced at the second initial position P2. Furthermore, when potential of the first fixed electrode 51 and the second fixed electrode 61 is set up at 5V, the rod 40 largely moves to the left side since the first movable electrode 52 is attracted at a first fixed electrode 51A side. Moreover, when potential of the first fixed electrode 51 is set up at 5 V at the time of an off-state, the rod 40 largely moves to a right side since the first movable electrode 52 is attracted at a first fixed electrode 51B side with electrostatic force. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a drive device for a switch using MEMS (Micro Electro Mechanical Systems), and a switch including the drive device.

  MEMS is a system in which micro mechanical elements and electronic circuit elements are fused by silicon process technology, and is mainly called a micro machine in Japan. MEMS technology can realize a small and low-cost SoC (System on a Chip) while supporting high functionality due to its excellent features such as precision workability, and as a switch drive device (actuator) It's being used.

  2. Description of the Related Art Conventionally, a driving device manufactured by MEMS has, for example, a silicon substrate provided with an upper electrode having a doubly-supported beam structure and a lower electrode provided below the upper electrode (for example, see Non-Patent Document 1). .) In such a conventional driving device, when an electrostatic attractive force due to a potential difference is applied between the upper electrode and the pulling electrode, the upper electrode is bent and deformed toward the pulling electrode, and the contact is interrupted along with this deformation. It has become so.

Kuniki Owada, “RFMEMS and its applications”, K-Lab Publishing, p. 20

  In such a conventional driving device, the upper electrode bends and deforms toward the pulling electrode, and then returns to its original position. The switch only closes or opens the contact. It was single pole single throw to control.

  However, for example, a switch used in a MIMO (Multi Input Multi Output) circuit is a single switch that disconnects only an arbitrary contact among a plurality of contacts in order to connect a signal to an appropriate circuit in accordance with the type of input signal. A multi-throw or multi-pole multi-throw function is required. In order to configure a single-pole multi-throw switch using conventional single-pole single-throw switches, there is a method in which single-pole single-throw switches are arranged in parallel and stored in one package so that they can be handled as one switch in appearance. It was taken.

  The problem with this conventional method is that the size of the switch increases. The drive unit occupies the largest volume in one MEMS switch. Since the conventional driving device can only operate in a single direction, as many driving devices as the number of contacts are required in order to connect only an arbitrary contact among a plurality of contacts. Therefore, the size of the switch has increased, such as double for single pole double throw and triple for single pole three throw, and the advantage of the small size inherent in MEMS switches has been lost.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a drive device that can be operated in two directions and can be downsized, and a switch including the same. There is.

The drive device according to the present invention includes the following components (A) and (B).
(A) having at least two first fixed electrodes, a first position close to one of the first fixed electrodes and a second position close to the other of the first fixed electrodes as an initial position, A first driving unit including a first movable electrode that starts displacement in the direction of the first fixed electrode from two positions, and drives a contact point by the displacement of the first movable electrode. (B) Initial stage of the first movable electrode A second drive unit for switching the position to the first position or the second position

  The switch of the present invention includes a contact having two signal paths and a drive device that drives the contact and switches the signal path, and includes the drive device of the present invention as a drive device. .

In the drive device of the present invention or the switch of the present invention, the initial position of the first movable electrode is set to the first position or the second position by the second drive unit, and the first movable from the first position or the second position. The electrode is displaced toward the first fixed electrode on the closer side, thereby driving the contact.
That is, the first movable electrode is displaced from the first position toward one of the first fixed electrodes to drive the contact, and then returns to the first position. When the initial position is set to the second position, the first movable electrode is displaced from the second position toward the other of the first fixed electrodes, and after driving the contact, returns to the second position. Thereby, the operation | movement of the 2nd direction of a 1st movable electrode is performed, and switching of the signal path | route in a contact is attained.

  According to the drive device of the present invention, the initial position of the first movable electrode for driving the contact can be set to two positions by the second drive unit, so that the first movable electrode can be operated in two directions. Is possible. Therefore, in the switch using this drive device, it is possible to connect and disconnect the single pole multiple throw contact with one drive device, and it is possible to reduce the size of the switch.

1 is a plan view illustrating an overall configuration of a switch according to an embodiment of the present invention. FIG. 2 is a plan view and a cross-sectional view illustrating a configuration of a contact illustrated in FIG. 1. It is a perspective view showing the structure of the 1st drive part shown in FIG. 1, and a 2nd drive part. It is a perspective view showing other composition of the 1st drive part and the 2nd drive part. FIG. 3 is a plan view and a cross-sectional view showing a manufacturing method of a switch including the contact shown in FIG. 2 in order of steps. FIG. 6 is a plan view and a cross-sectional view illustrating a process following FIG. 5. FIG. 7 is a plan view and a cross-sectional view illustrating a process following FIG. 6. It is a figure for demonstrating operation | movement of a 1st drive part and a 2nd drive part. It is a figure for demonstrating operation | movement of the contact corresponding to FIG. It is a figure for demonstrating other operation | movement of a 1st drive part and a 2nd drive part. It is a figure for demonstrating operation | movement of the contact corresponding to FIG. 10 is a plan view illustrating an overall configuration of a switch according to Modification 1. FIG. 10 is a plan view illustrating an overall configuration of a switch according to Modification 2. FIG. FIG. 10 is a cross-sectional view and a plan view illustrating a configuration of a drive device according to Modification 3. It is a figure for demonstrating the structure of the drive device shown in FIG. It is a top view showing the structure of the 1st movable electrode and 2nd movable electrode which were shown in FIG. It is a figure for demonstrating operation | movement of a 1st drive part and a 2nd drive part. It is a figure for demonstrating other operation | movement of a 1st drive part and a 2nd drive part. FIG. 10 is a cross-sectional view illustrating a configuration of a drive device according to Modification Example 4. It is a figure for demonstrating operation | movement of the 1st drive part shown in FIG. 19, and a 2nd drive part.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The description will be given in the following order.
(1) Embodiment (example in which the second drive unit is provided in part of the first drive unit and performs horizontal operation)
(2) Modification 1 (example in which the second drive unit is provided at one end of the bag)
(3) Modification 2 (example in which the second drive unit is provided at both ends of the bag)
(4) Modification 3 (example of vertical operation)
(5) Modification 4 (example using bimetal)

  FIG. 1 shows the overall configuration of a switch according to an embodiment of the present invention. This switch is a single pole double throw switch used in, for example, a MIMO circuit, and has a contact 1 and a drive device (actuator) 2 that drives the contact 1.

  2A shows a planar configuration of the contact 1, FIG. 2B is a cross-sectional configuration taken along line IIA-IIA in FIG. 2A, and FIG. 2C is IIC-IIC in FIG. 2A. Each represents a cross-sectional configuration of the line. The contact 1 has movable contact electrodes 21 and 22 on the movable portion 10 and fixed contact electrodes 31, 32 and 33 on the substrate 10 </ b> A. The movable portion 10 is connected to the driving device 2 (not shown in FIG. 2 but refer to FIG. 1) via the rod 40 and an auxiliary rod 40A branched from the rod 40 (hereinafter simply referred to as the rod 40). Has been.

  The movable portion 10 is formed by processing the substrate 10A using the MEMS technology, and is held hollow with respect to the substrate 10A by the flange 40. Examples of the substrate 10A include a substrate made of a Si-based semiconductor such as silicon (Si), silicon carbide (SiC), silicon germanium (SiGe), and silicon germanium carbon (SiGeC). As the substrate 10A, a non-Si substrate such as glass, resin, and plastic may be used. An insulating film 11 made of silicon oxide (SiO 2), silicon nitride (SiN), a laminated film of a SiN film and a SiO 2 film, or the like is provided on the surface (upper surface and side surface) of the substrate 10A and the movable portion 10.

  The substrate 10A is divided into two regions with a ridge 40 extending in one direction in between, a fixed contact electrode 31 on one side of the ridge 40, and a fixed contact electrode 32 on the other side of the ridge 40. , 33 are arranged. The fixed contact electrodes 32 and 33 are electrically separated from each other by the insulating film 11. An input port 31 A is connected to the fixed contact electrode 31. A first output port 32 </ b> A is connected to the fixed contact electrode 32. A second output port 33 </ b> A is connected to the fixed contact electrode 33. Each of the input port 31A, the first output port 32A, and the second output port 33A includes, for example, a through wiring (not shown) provided in the substrate 10A and an electrode pad (not shown) on the back surface of the substrate 10A. You may have.

  The movable contact electrodes 21 and 22 are provided on two different side surfaces of the movable part 10, that is, two side surfaces 12A and 12B that face each other in the extending direction of the flange 40. This is because the movable contact electrodes 21 and 22 can be brought into contact with the fixed contact electrodes 31 and 32 or the fixed contact electrodes 31 and 33 by moving the rod 40 in the extending direction.

  Specifically, the movable contact electrode 21 is disposed on the side surface 12A of the movable portion 10 so as to face the fixed contact electrodes 31 and 32, and the fixed contact electrode 31, the movable contact electrode 21, and the fixed contact electrode 32 are one signal. A path 1A (first signal path) is configured. The movable contact electrode 22 is disposed on the side surface 12B of the movable portion 10 so as to face the fixed contact electrodes 31, 33, and the fixed contact electrode 31, the movable contact electrode 22, and the fixed contact electrode 32 are connected to the other signal path 1B (second Signal line). The movable contact electrodes 21 and 22 are electrically separated from each other by the insulating film 11. The movable contact electrodes 21 and 22 and the fixed contact electrodes 31 to 33 have, for example, a structure in which a titanium (Ti) film having a thickness of 0.1 μm and a gold (Au) film having a thickness of 2 μm are sequentially stacked from the substrate 10A side. ing. Alternatively, gold (Au) or an alloy based on Au, an Al—Cu alloy, or the like may be used.

  The ridge 40 is formed by processing the substrate 10 </ b> A using the MEMS technology, like the movable portion 10. Both ends of the flange 40 are fixed to the substrate 10 </ b> A by anchors 42 via return springs 41. An insulating film 11 is provided on the surface of the flange 40, similarly to the movable portion 10, and the flange 40 is electrically separated from the movable contact electrodes 21 and 22 on the movable portion 10.

  The rod 40 is preferably, for example, a push-pull rod, that is, a push-pull rod that can reciprocate along the extending direction. The push-pull rod can be made of an insulating material, and an electric circuit for driving can be arranged at a position far from the ridge 40, so that the possibility of a signal flowing into the ridge 40 and degrading the frequency characteristics is reduced. This is because it becomes possible.

  The drive device 2 includes a first drive unit 2A and a second drive unit 2B. The second drive unit 2B is provided in a part of the first drive unit 2A, for example. It is preferable that the 2nd drive part 2B is arrange | positioned symmetrically with respect to the movement axis (extension direction of the collar 40) of the collar 40. This is because the operations of the first drive unit 2A and the second drive unit 2B can be stabilized.

  FIG. 3A is an enlarged perspective view showing a part of the first drive unit 2A. The first drive unit 2A has a configuration in which the first fixed electrodes 51 and the first movable electrodes 52 are alternately arranged. The first fixed electrode 51 and the first movable electrode 52 are, for example, MEMS actuators configured by comb-tooth electrodes meshed with each other. The first fixed electrode 51 is fixed to the substrate 10A. The first movable electrode 52 is provided between the two first fixed electrodes 51 and is connected to the flange 40. An electrode layer (not shown) is provided on the opposing surfaces of the comb-tooth portions of the first fixed electrode 51 and the first movable electrode 52.

  FIG. 3B is an enlarged perspective view showing a part of the second drive unit 2B. Similar to the first drive unit 2A, the second drive unit 2B has a configuration in which the second fixed electrodes 61 and the second fixed electrodes 62 are alternately arranged, and the second fixed electrode 61 and the second movable electrode 62 are arranged. Is a MEMS actuator constituted by comb-teeth electrodes meshed with each other. The second fixed electrode 61 is fixed to the substrate 10A. The second movable electrode 62 is connected to the first movable electrode 52 through the flange 40. An electrode layer (not shown) is provided on the opposing surfaces of the comb tooth portions of the second fixed electrode 61 and the second movable electrode 62.

  The first fixed electrode 51 and the first movable electrode 52 and the second fixed electrode 61 and the second movable electrode 62 are made of a material of the substrate 10A having a flat surface, for example, silicon (Si), like the movable portion 10. It is formed by three-dimensional processing using a known lithography technique. The first movable electrode 52 and the second movable electrode 62 can be displaced in a direction parallel to the arrangement direction A of the first fixed electrodes 51 and in a horizontal direction with respect to the surface of the substrate 10A. Is displaced in a horizontal direction with respect to the surface of the substrate 10A. That is, this switch is a so-called lateral in which the movable contact electrodes 21 and 22 and the fixed contact electrodes 31 to 33 are provided in the same horizontal plane at the contact 1 and the movable contact electrodes 21 and 22 on the movable portion 10 are displaced in the horizontal direction. It is classified as a switch.

  The second drive unit 2B sets the initial position of the first movable electrode 52 to the first initial position close to one of the two first fixed electrodes 51 on both sides and the other close to the other of the two first fixed electrodes 51. It is for setting to either one of 2 initial positions. As a result, this switch can operate in two directions, and the switch can be miniaturized.

  That is, the first movable electrode 52 operates in a single direction, and the direction of the operation is a force vector determined by the relative position between the first movable electrode 52 and the first fixed electrode 51 at the start of driving. Depending on the position of the two first fixed electrodes 51 on both sides. Therefore, as will be described later, the displacement direction of the first movable electrode is opposite between the case where the first movable electrode is in the first initial position and the case where the first movable electrode is in the second initial position. . Therefore, by changing the initial position of the first movable electrode 52, switching between the signal path 1A and the signal path 1B at the contact 1 can be selected.

  As shown in FIG. 3B, the second driver 2B preferably has an electrode area smaller than that of the first driver 2A. That is, it is preferable that the overlapping width W2 of the second fixed electrode 61 and the second movable electrode 62 is smaller than the overlapping width W1 of the first fixed electrode 51 and the first movable electrode 52.

The reason is as follows. As shown in Table 1, the first driving unit 2A needs to generate a large (strong) force in order to drive the contact 1 by moving the rod 40, whereas the second driving unit 2B is for changing the initial position of the first movable electrode 52. Therefore, the second drive unit 2B only needs to generate a smaller (weaker) force than the first drive unit 2A, and the electrode area is smaller than that of the first drive unit 2A. Therefore, the area occupied by the second drive unit 2B can be reduced as compared with the case where another drive unit identical to the first drive unit 2A is provided for changing the initial position, and the entire drive device 2 is occupied. It is overwhelmingly advantageous in terms of area.

The configuration of the second drive unit 2B is not limited to making the electrode area, that is, the overlap width W2, smaller than that of the first drive unit 2A as shown in FIG. For example, as shown in FIGS. 4A and 4B, the number of the second fixed electrodes 61 and the second movable electrodes 62 is smaller than the number of the first fixed electrodes 51 and the first movable electrodes 52. May be. Alternatively, the gap between the second fixed electrode 61 and the second movable electrode 62 may be narrower than the gap between the first fixed electrode 51 and the first movable electrode 52. This is because the force generated by the second drive unit 2B is smaller than that of the first drive unit 2A, and therefore the stroke (displacement distance) of the second movable electrode 62 can be small.

  This switch can be manufactured as follows, for example.

  5 to 7 show the manufacturing method of this switch in the order of steps. First, as shown in FIG. 5, a substrate 10A made of the above-described material, for example, silicon (Si) is prepared. Note that the substrate 10A has through-hole wiring (not shown) to the back surface of the substrate 10A using, for example, lithography technology and high aspect ratio processing, for example, MEMS technology, as the input port 31A, the first output port 32A, and the second output port 33A. And TSV (Through Silicon Via) may be formed.

  Next, as shown in FIG. 6, the substrate 10 </ b> A is vertically processed by RIE (Reactive Ion Etching) using, for example, MEMS technology, and the movable portion 10 and the ridge 40 are formed. At this time, the first fixed electrode 51 and the first movable electrode 52 of the first drive unit 2A, and the second fixed electrode 61 and the second movable electrode 62 of the second drive unit 2B are also formed at the same time.

  Subsequently, as shown in FIG. 7, the surface of the substrate 10 </ b> A, the movable portion 10, and the rod 40 is subjected to, for example, a CVD (Chemical Vapor Deposition) method or a PVD (Physical Vapor Deposition) method. An insulating film 11 made of the above-described material is formed. At this time, the insulating film 11 is simultaneously formed on the surfaces of the first fixed electrode 51 and the first movable electrode 52 of the first drive unit 2A and the second fixed electrode 61 and the second movable electrode 62 of the second drive unit 2B. To do.

  After that, as shown in FIG. 2, the fixed electrodes 31 to 33 are formed on the substrate 10 </ b> A by the sputtering method or the vapor deposition method, and the movable electrodes 21 and 22 are formed on the side surfaces 12 </ b> A and 12 </ b> B of the movable portion 10. At this time, electrode films (not shown) are also formed on the surfaces of the first fixed electrode 51 and the first movable electrode 52 of the first drive unit 2A, and the second fixed electrode 61 and the second movable electrode 62 of the second drive unit 2B. ) At the same time. Thus, the switch shown in FIG. 1 is completed.

  In this switch, three control potentials are applied. The GND potential (always GND) connected to the first movable electrode 52 and the second movable electrode 62, and the SEL potential (5V or GND) connected to the second fixed electrode 61 with the control voltage of the second drive unit 2B. And the Vact potential (5 V or GND) connected to the first fixed electrode 51 by the control voltage of the first drive unit 2A. First, as shown in FIG. 8A, during the off operation, the first fixed electrode 51 (Vact), the first movable electrode 52, the second movable electrode 62 (GND), and the second fixed electrode 61 (SEL). Are all at ground potential (GND). At this time, the 1st movable electrode 52 exists in the 1st initial position P1, and is close to one 1st fixed electrode 51B among the two 1st fixed electrodes 51A and 51B of both sides. That is, the distance D1 between the first movable electrode 52 and the first fixed electrode 51A is larger than the distance D2 between the first movable electrode 52 and the first fixed electrode 51B.

  Here, as shown in FIG. 8B, during the ON operation, the potential (Vact) of the first fixed electrode 51 is set to, for example, 5 V, the first movable electrode 52 and the second movable electrode 62 (GND), The two fixed electrodes 61 (SEL) are all set to the ground potential (GND). Thereby, an electrostatic force is generated as a driving force between the first movable electrode 52 and the first fixed electrode 51B, and the first movable electrode 52 is attracted to the first fixed electrode 51B side, and the first fixed electrode 51 is attracted. It is displaced parallel to the arrangement direction A. In conjunction with this, the rod 40 moves greatly in the direction of the arrow in the direction of the arrow B1 (to the right in FIG. 8B).

As the rod 40 moves, as shown in FIG. 9B, the movable portion 10 moves horizontally toward the fixed contact electrodes 31 and 32 at the contact 1, and the movable contact electrode 21 and the fixed contact electrode 31, 32 contacts. As a result, as shown in FIG. 9A, the signal path 1A composed of the fixed contact electrode 31, the movable contact electrode 21, and the fixed contact electrode 32 is closed, and the signal input from the input port 31A is the first signal. 1 is output to the output port 32A.

  On the other hand, during the off operation shown in FIG. 10A, that is, when the first movable electrode 52 is at the first initial position P1, as shown in FIG. 10B, the potential of the second fixed electrode 61 ( SEL) is set to 5 V, for example, and the first movable electrode 52, the second movable electrode 62 (GND), and the first fixed electrode 51 (Vact) are all set to the ground potential (GND). Thereby, an electrostatic force is generated as a driving force between the second movable electrode 62 and the second fixed electrode 61, and the second movable electrode 62 is attracted to the second fixed electrode 61 side, and the second fixed electrode 61 is attracted. It is displaced parallel to the arrangement direction A. In conjunction with this, the rod 40 moves small in the direction of the arrow in the direction of the arrow B2 (to the left in FIG. 10B).

With the movement of the rod 40, the first movable electrode 52 moves to the second initial position P2, and becomes closer to the other first fixed electrode 51A of the two first fixed electrodes 51A and 51B on both sides. That is, the distance D2 between the first movable electrode 52 and the first fixed electrode 51B is larger than the distance D1 between the first movable electrode 52 and the first fixed electrode 51A.

  Here, as shown in FIG. 10C, the potentials of the first fixed electrode 51 (Vact) and the second fixed electrode 61 (SEL) are set to 5 V, for example, during the ON operation, and the first movable electrode 52 and the first fixed electrode 52 2 The movable electrode 62 (GND) is set to the ground potential (GND). Thereby, an electrostatic force is generated as a driving force between the first movable electrode 52 and the first fixed electrode 51 </ b> A, and the first movable electrode 52 is attracted to the first fixed electrode 51 </ b> A side, and the first fixed electrode 51. It is displaced parallel to the arrangement direction A. In conjunction with this, the rod 40 moves greatly in the direction of the extension in the direction of the arrow B2 (to the left in FIG. 5B).

Along with the movement of the collar 40, as shown in FIG.
Moves horizontally toward the fixed contact electrodes 31 and 33, and the movable contact electrode 21 and the fixed contact electrodes 31 and 33 come into contact with each other. As a result, as shown in FIG. 11A, the signal path 1B including the fixed contact electrode 31, the movable contact electrode 21, and the fixed contact electrode 33 is closed, and the signal input from the input port 31A is the first signal. 2 is output to the output port 33A.

  As described above, in the present embodiment, the second movable unit 2B causes the first movable electrode 51 to move to two initial positions, that is, the first initial position P1 close to the first fixed electrode 51B and the first fixed electrode 51A. Since the first movable electrode 51 can be set to the second initial position P2, the first movable electrode 51 can be operated in the two directions indicated by arrows B1 and B2, and a single drive device 2 includes two signal paths 1A and 1B. 1 can be disconnected.

  Hereinafter, modified examples will be described. Note that the same components as those in the above embodiment are denoted by the same reference numerals, and the description thereof is omitted as appropriate.

(Modification 1)
FIG. 12 illustrates a planar configuration of a switch according to the first modification. In the above-described embodiment, the case where the second drive unit 2B is provided in a part of the first drive unit 2A has been described. The first drive unit 2A is arranged at the center of 40), and the second drive unit 2B is arranged in a region other than the first drive unit 2A in the extending direction of the kite 40 (for example, the end of the kite 40). It is. In the above embodiment, since the second drive unit 2B is provided in a part of the first drive unit 2A, it is clear that it is excellent in terms of downsizing. On the other hand, in the first modification, since the region of the first drive unit 2A and the region of the second drive unit 2B are clearly separated, a wiring space for a control circuit (not shown) is secured, Ease of wiring is improved.

(Modification 2)
FIG. 13 illustrates a planar configuration of a switch according to the second modification. In the second modification, the first drive unit 2 </ b> A is disposed at the center portion of the collar 40, and the second drive units 2 </ b> B are disposed at both ends of the collar 40. Thereby, in this modification 2, it becomes possible to improve the operation | movement precision of the collar 40. In both of the first and second modifications, the second drive unit 2B is arranged symmetrically with respect to the movement axis of the rod 40 (extending direction of the rod 40), as in the above embodiment. preferable. This is because the operations of the first drive unit 2A and the second drive unit 2B can be stabilized.

(Modification 3)
FIG. 14 illustrates the configuration of the drive device 2 according to the third modification, and FIG. 15 schematically illustrates the configuration of the drive device 2 illustrated in FIG. The third modification has the same configuration as that of the above embodiment except that the first movable electrode 52 and the second movable electrode 62 are displaced in a direction perpendicular to the surface of the substrate 10A. is doing.

The first fixed electrode 51 </ b> A is disposed above the first movable electrode 52, and the first fixed electrode 51 </ b> B is disposed below the first movable electrode 52. FIG. 14 shows a state in which the first movable electrode 52 is at a first initial position P1 close to the first fixed electrode 51B, for example. As shown in FIG. 16, the first movable electrode 52 and the second movable electrode 62 are each constituted by a parallel plate electrode and are connected by leaf springs 71, 72, 73. The leaf spring 73 is connected to the substrate 10A, and the leaf spring 71 is connected to a movable electrode (not shown) as a contact. The second fixed electrode 61 is disposed above the second movable electrode 62 so as to face the second movable electrode 61.

  The driving device 2 can be manufactured by, for example, forming a metal layer by sputtering or plating, or both, and then processing the layer with high accuracy by lithography and dry etching.

  In the driving device 2, as shown in FIG. 17A, during the off operation, the first fixed electrode 51 (Vact), the first movable electrode 52, the second movable electrode 62 (GND), and the second fixed electrode 61 (SEL) is set to the ground potential (GND). At this time, the 1st movable electrode 52 exists in the 1st initial position P1, and is close to one 1st fixed electrode 51B among the two 1st fixed electrodes 51A and 51B of both sides. That is, the distance D1 between the first movable electrode 52 and the first fixed electrode 51A is larger than the distance D2 between the first movable electrode 52 and the first fixed electrode 51B.

  Here, as shown in FIG. 17B, during the ON operation, the potential (Vact) of the first fixed electrode 51 is set to 5 V, for example, and the first movable electrode 52 and the second movable electrode 62 (GND), The two fixed electrodes 61 (SEL) are all at ground potential. Thereby, an electrostatic force is generated as a driving force between the first movable electrode 52 and the first fixed electrode 51B, and the first movable electrode 52 is attracted to the first fixed electrode 51B side, and the first fixed electrode 51 is attracted. Is greatly displaced downward in parallel with the arrangement direction A. In conjunction with this, the movable electrode (not shown) of the contact connected to the leaf spring 71 moves greatly downward, and one of the two contact portions of the contact 1 is closed.

  On the other hand, during the OFF operation shown in FIG. 18A, that is, when the first movable electrode 52 is at the first initial position P1, as shown in FIG. 18B, the potential of the second fixed electrode 61 ( SEL) is set to 5 V, for example, and the first movable electrode 52, the second movable electrode 62 (GND), and the first fixed electrode 51 (Vact) are all set to the ground potential (GND). Thereby, an electrostatic force is generated as a driving force between the second movable electrode 62 and the second fixed electrode 61, and the second movable electrode 62 is attracted to the second fixed electrode 61 side, and the second fixed electrode 61 is attracted. It is displaced parallel to the arrangement direction A.

With the displacement of the second movable electrode 52, the first movable electrode 52 moves to the second initial position P2, and is close to the other first fixed electrode 51A of the two first fixed electrodes 51A, 51B on both sides. Become. That is, the distance D2 between the first movable electrode 52 and the first fixed electrode 51B is larger than the distance D1 between the first movable electrode 52 and the first fixed electrode 51A.

  Here, as shown in FIG. 18C, the potentials of the first fixed electrode 51 (Vact) and the second fixed electrode 61 (SEL) are set to 5 V, for example, during the ON operation, and the first movable electrode 52 and the first fixed electrode 52 2 The movable electrode 62 (GND) is set to the ground potential (GND). Thereby, an electrostatic force is generated as a driving force between the first movable electrode 52 and the first fixed electrode 51 </ b> A, and the first movable electrode 52 is attracted to the first fixed electrode 51 </ b> A side, and the first fixed electrode 51. It is displaced parallel to the arrangement direction A. In conjunction with this, the movable electrode (not shown) of the contact connected to the leaf spring 71 moves greatly upward, and the other one of the two contact portions of the contact 1 is closed.

(Modification 4)
FIG. 19 illustrates a configuration of the driving device 2 according to the fourth modification. Modification 4 is the same as Modification 3 except that the second drive unit 2B is made of bimorph and the first movable electrode 52 is displaced in a direction perpendicular to the surface of the substrate 10A. It has the same composition as. Here, the bimetal is a structure in which two kinds of thin pieces having different expansion coefficients depending on temperature are bonded together.

  The second drive unit 2B has a second layer 82 made of a high expansion coefficient material as a heating element on the lower surface of a plate-like first layer 81 made of a low expansion coefficient material. In this way, by configuring the second drive unit 2B with a bimetal, the first movable electrode 52 is moved from the first initial position P1 to the second initial position P2 by utilizing the expansion or contraction or bending of the second drive unit 2B itself. It can be displaced.

  One end of the first layer 81 is a fixed end fixed to the substrate 10A, and the other end is a movable end that can be expanded and contracted vertically or bent by a bimetal. The first layer 81 is made of, for example, a resin material such as silicon (Si), polycrystalline silicon (polysilicon), polyimide or BCB (benzocyclobutene), or a dielectric film such as SiN or SiO2.

The first layer 81 extends to the movable end side from the second layer 82. An electrode film (not shown) as the first movable electrode 52 is provided on the upper surface and the lower surface of the extended portion of the first layer 81 on the movable end side. Further, when the first layer 81 itself is made of a conductive material, the first layer 81 itself becomes the first movable electrode 52. The first fixed electrode 51 </ b> A is disposed above the first movable electrode 52, and the first fixed electrode 51 </ b> B is disposed below the first movable electrode 52. FIG. 19 shows a state in which the first movable electrode 52 is at a first initial position P1 close to the first fixed electrode 51B, for example.

  The second layer 82 is preferably made of, for example, aluminum (Al), copper (Cu), gold (Au), or an alloy based on them. This is because processing is low cost and suitable for mass production.

  The driving device 2 can be manufactured by, for example, forming a layer made of a metal such as the second layer 82 by sputtering or plating, or both, and then processing it with high accuracy by lithography and dry etching. .

  In the driving device 2, the second driving unit 2B made of bimetal is at a room temperature in a straight state as shown in FIG. 20A, the first movable electrode 52 is at the first initial position P1, Of the two first fixed electrodes 51A and 51B, it is close to one first fixed electrode 51B. That is, the distance D1 between the first movable electrode 52 and the first fixed electrode 51A is larger than the distance D2 between the first movable electrode 52 and the first fixed electrode 51B.

On the other hand, when the temperature is applied to the second drive unit 2B made of bimetal, the second layer 82 made of a high expansion coefficient material has a larger expansion amount than the first layer 81 made of a low expansion coefficient material. As shown in 20 (B), the second drive unit 2B is warped up. Thereby, the 1st movable electrode 52 moves to the 2nd initial position P2, and becomes close to the other 1st fixed electrode 51A among the two 1st fixed electrodes 51A and 51B of both sides. That is, the distance D2 between the first movable electrode 52 and the first fixed electrode 51B is larger than the distance D1 between the first movable electrode 52 and the first fixed electrode 51A.

  It is obvious that this modification can be applied to the case where the second drive unit 2B is deformed by piezoelectric drive, electrostatic drive, or electromagnetic drive in addition to thermal drive such as bimetal.

  While the present invention has been described with reference to the embodiment, the present invention is not limited to the above embodiment, and various modifications can be made. For example, the material and thickness of each layer described in the above embodiment, the film formation method, and the like are not limited, and other materials and thicknesses, or other film formation methods may be used.

  Further, the driving method of the first driving unit 2A and the second driving unit 2B may be other methods such as electromagnetic driving and piezoelectric driving in addition to the electrostatic driving and thermal driving described in the above embodiment. Technology that is compatible with the present invention is an actuator (driving device) that belongs to a field generally called MEMS and a method for manufacturing the actuator. MEMS is a technology that can convert an electrical signal into a mechanical operation with high efficiency, and can be said to be a technology suitable for an element that mechanically drives the rod 40 (push-pull rod) based on a control signal as in the present invention. The comb electrode type electrostatic actuator described in the above embodiment is also a kind of MEMS actuator, and the thermally driven bimorph actuator described in Modification 4 can also be a kind of MEMS actuator. Besides, piezoelectric and electromagnetically driven MEMS actuators are well known, but it goes without saying that the same effect can be obtained by combining them with the present invention.

  Furthermore, in the said embodiment, although the structure of the contact 1 and the drive device 2 was mentioned concretely and demonstrated, it is not necessary to provide all the components and you may further provide the other component. In addition, the first movable electrode 52 and the second movable electrode 62 are not limited to the case where the first movable electrode 52 and the second movable electrode 62 are physically adjacent to each other with the flange 40 interposed therebetween as shown in FIGS. As described in 1 and 2, they may be indirectly connected via the flange 40.

  The drive device and switch of the present invention are widely applied to applications that require a large number of switches in a circuit, such as an ATE (Automatic Test Equipment), a high-frequency measuring instrument, in addition to a MIMO-compatible mobile device having a MIMO circuit. Is possible.

  DESCRIPTION OF SYMBOLS 1 ... Contact, 2 ... Drive apparatus, 2A ... 1st drive part, 2B ... 2nd drive part, 10 ... Movable part, 10A ... Substrate, 11 ... Insulating film, 21, 22 ... Movable contact electrode, 31, 32 33 ... fixed contact electrode, 31A ... input port, 32A ... first output port, 33A ... second output port, 40 ... 杆 (push-pull rod), 51 ... first fixed electrode, 52 ... first movable electrode, 61 ... 2nd fixed electrode, 62 ... 2nd movable electrode, 71-73 ... Leaf spring, 81 ... 1st layer, 82 ... 2nd layer

Claims (10)

At least two first fixed electrodes, a first position close to one of the first fixed electrodes as an initial position, and a second position close to the other of the first fixed electrodes, and from the first position or the second position A first driving unit including a first movable electrode for starting displacement in the first fixed electrode direction, and driving a contact by displacement of the first movable electrode;
And a second driving unit for switching an initial position of the first movable electrode to the first position or the second position. The driving device according to claim 1, wherein the first movable electrode is displaced by an electrostatic force generated between the first movable electrode and the first fixed electrode. The second driving unit includes a second movable electrode connected to the first movable electrode, and a second fixed electrode disposed opposite to the second movable electrode,
The driving apparatus according to claim 2, wherein the second movable electrode is displaced by an electrostatic force generated between the second movable electrode and the second fixed electrode. The drive device according to claim 3, wherein at least one of the first drive unit and the second drive unit is configured by MEMS. The first fixed electrode and the first movable electrode, and the second fixed electrode and the second movable electrode are formed by processing a substrate having a flat surface,
The driving device according to claim 4, wherein the first movable electrode and the second movable electrode are displaced in a direction horizontal to the surface of the substrate. The contact is
A movable part connected to the first movable electrode via a collar and displaced in conjunction with the displacement of the first movable electrode;
A pair of movable contact electrodes provided on two side surfaces facing the displacement direction of the movable part;
And two sets of fixed contact electrode pairs constituting different signal paths via the movable contact electrodes,
The drive device according to claim 1, wherein switching to one of the different signal paths is selected by changing an initial position of the first movable electrode. The driving device according to claim 6, wherein the first driving unit is provided in a partial region in the extending direction of the heel, and the second driving unit is provided in a region other than the first driving unit in the extending direction of the heel. . The driving device according to claim 7, wherein the second driving unit is provided at an end portion of the bag. A contact having two signal paths, and a driving device for driving the contacts and switching the signal paths;
The driving device includes:
At least two first fixed electrodes, a first position close to one of the first fixed electrodes as an initial position, and a second position close to the other of the first fixed electrodes, and from the first position or the second position A first driving unit including a first movable electrode that starts displacement in the first fixed electrode direction, and that drives the contact point by displacement of the first movable electrode;
And a second drive unit for switching the initial position of the first movable electrode to the first position or the second position. The contact is
A movable part connected to the first movable electrode via a collar and displaced in conjunction with the displacement of the first movable electrode;
A pair of movable contact electrodes provided on two side surfaces facing the displacement direction of the movable part;
And two sets of fixed contact electrode pairs constituting different signal paths through the movable contact electrodes,
The switch according to claim 9, wherein switching to one of the different signal paths is selected by changing an initial position of the first movable electrode.

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