JP2011017567A - Spectrophotometer - Google Patents

Spectrophotometer Download PDF

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JP2011017567A
JP2011017567A JP2009161380A JP2009161380A JP2011017567A JP 2011017567 A JP2011017567 A JP 2011017567A JP 2009161380 A JP2009161380 A JP 2009161380A JP 2009161380 A JP2009161380 A JP 2009161380A JP 2011017567 A JP2011017567 A JP 2011017567A
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light
mask
opening
spectrophotometer
shielding plate
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Daisuke Kurimoto
大輔 栗本
Koji Yamamoto
浩司 山本
Atsushi Hiyama
篤 檜山
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
Hitachi High Tech Corp
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Abstract

PROBLEM TO BE SOLVED: To provide masks for optimizing the light quantities of spectrally separated light incident on a photodetector, thereby preventing a fall in S/N caused by a decrease in the light quantity of a light source, in a spectrophotometer using the photodetector having a plurality of light receiving elements.SOLUTION: The photodetector includes the plurality of light receiving elements for spectrally separating light emitted from the light source by an optical system, receiving the spectrally separated light, and simultaneously detecting other wavelengths. The masks are used in the detector for adjusting the light quantities varying with wavelengths. In each of light receivers of the receiving elements, the masks are placed each having a movable mechanism for adjusting the shape of an opening in each mask to a shape for providing light receiving sensitivity optimum for the detector.

Description

本発明は、分光光度計の光検知器の検知感度を最適化するものである。   The present invention optimizes the detection sensitivity of a photodetector of a spectrophotometer.

分光光度計に使用している光源は発光時間、若しくは発光回数によってフィラメントや電極の劣化により光量が減少していくものであるが、通常光量が減少したら即交換するものではなく、光量が初期値の50%ほどに減少するまで使用するものである。複数の受光素子を配列した光検知器を使用した分光光度計では、光源や分光器等の特性によって、波長ごとに異なる光強度が光検知器に入射することになるが、今までの複数の受光素子を配列した光検知器を使用した分光光度計では、前記の波長によって異なる光強度を平均化するために、光量を制限する固定形状の開口部を持つマスクを光検知器の受光部前に設置していたため、光源の光量が減少した場合、光検知器が受光する光量も低下してしまい、S/Nの低下を招いてしまっていた。   The light source used in the spectrophotometer is a light source that decreases due to deterioration of the filament or electrode depending on the light emission time or the number of times of light emission. It is used until it decreases to about 50%. In a spectrophotometer using a light detector in which a plurality of light receiving elements are arranged, different light intensities are incident on the light detector depending on the characteristics of the light source, the spectroscope, etc. In a spectrophotometer that uses a photodetector in which light receiving elements are arranged, in order to average the light intensity that varies depending on the wavelength, a mask having a fixed-shaped opening that restricts the amount of light is placed in front of the light receiving portion of the light detector. Therefore, when the amount of light from the light source is reduced, the amount of light received by the photodetector is also reduced, leading to a decrease in S / N.

特開昭63−94126号公報JP 63-94126 A

解決しようとする課題は、複数の受光素子を持った光検知器を使用する分光光度計において、光検知器に入射する分光された光の光量を最適化するためのマスクを提供し、光源の光量減少によるS/N低下の抑制を図ることである。   The problem to be solved is to provide a mask for optimizing the amount of the split light incident on the photodetector in a spectrophotometer using a photodetector having a plurality of light receiving elements, and It is intended to suppress the S / N decrease due to the light amount decrease.

本発明の分光光度計は、光源から放射された光を光学系によって分光し、分光された光を受光し、他波長を同時に検知する複数の受光素子からなる検知器に使用されている、前記受光素子の受光部に波長によって異なる光量を調整するためのマスクの開口部形状を、検知器にとって最適な受光感度を得られる形状に調整できる可動機構を持ったマスクを設置する。   The spectrophotometer according to the present invention is used in a detector comprising a plurality of light receiving elements that separates light emitted from a light source by an optical system, receives the dispersed light, and simultaneously detects other wavelengths. A mask having a movable mechanism that can adjust the shape of the opening of the mask for adjusting the amount of light depending on the wavelength to a shape that can obtain the optimum light receiving sensitivity for the detector is installed in the light receiving portion of the light receiving element.

本発明の分光光度計は、光検知器の受光面に設置されたマスクの開口部形状を、可変にし、受光する光量を最適化することで、光源の発光時間や発光回数によって光量が初期値を100%として、初期値の70%,60%,50%と減少しても、マスクの開口部のサイズを調整することで、光検知器に入射する光の減少した単位面積あたりの光量を補い、S/Nを向上させることを可能にした分光光度計を提供することができる。   The spectrophotometer of the present invention makes the opening shape of the mask installed on the light receiving surface of the photodetector variable, and optimizes the amount of light received, so that the light amount is the initial value depending on the light emission time and the number of times of light emission. Even if the initial value is reduced to 70%, 60%, and 50%, the light amount per unit area of the light incident on the photodetector is reduced by adjusting the size of the opening of the mask. In addition, it is possible to provide a spectrophotometer that can improve the S / N ratio.

分光光度計の実施方法を示した説明図である。It is explanatory drawing which showed the implementation method of a spectrophotometer. 分光光度計に用いるマスクの実施方法を示した説明図である。It is explanatory drawing which showed the implementation method of the mask used for a spectrophotometer. 分光光度計に用いるマスクの実施方法を示した説明図である。It is explanatory drawing which showed the implementation method of the mask used for a spectrophotometer. 分光光度計に用いるマスクの実施方法を示した説明図である。It is explanatory drawing which showed the implementation method of the mask used for a spectrophotometer. 分光光度計に実施方法を示した説明図である。It is explanatory drawing which showed the implementation method to the spectrophotometer. 分光光度計に用いるマスクの実施方法を示した説明図である。It is explanatory drawing which showed the implementation method of the mask used for a spectrophotometer. 分光光度計に用いるマスクの実施方法を示した説明図である。It is explanatory drawing which showed the implementation method of the mask used for a spectrophotometer. 分光光度計に実施方法を示した説明図である。It is explanatory drawing which showed the implementation method to the spectrophotometer. 分光光度計の光量の一実施例である。It is one Example of the light quantity of a spectrophotometer. 分光光度計に用いるマスクの実施方法を示した説明図である。It is explanatory drawing which showed the implementation method of the mask used for a spectrophotometer.

以下、本発明の各実施例を図面を参照して説明する。   Embodiments of the present invention will be described below with reference to the drawings.

以下、本発明の実施形態について添付図面を参照して説明する。光源1から放射された光は、試料セル2に照射される。試料セル2を透過した光は回折格子3に照射され、分光される。分光された光は光量調整機構付マスク4で光量を制限され、フォトダイオードアレイ検知器5の受光部に入射する。フォトダイオードアレイ検知器5の受光部に入射した光は、信号読み出し部6によって信号として読み出される。信号読み出し部6によって読み出された信号は、中央処理装置7でデータ変換処理をされ、表示モニター8に表示される。光量調整機構付マスク4は、光を遮光する遮光板9が2枚、遮光板9を接着固定する遮光板ベース10,遮光板ベース10を保持する台座11,遮光板を駆動させるための偏心頭を持った軸12が4本、偏心頭を持った軸12を駆動させるモータ13が4つ、遮光板9をお互いに引き付け合うバネのような弾性体14が2本という構成からなっている。偏心頭を持った軸12を駆動させるモータ13はモータ制御部16を介して中央処理装置7で制御される。   Embodiments of the present invention will be described below with reference to the accompanying drawings. The light emitted from the light source 1 is applied to the sample cell 2. The light that has passed through the sample cell 2 is irradiated onto the diffraction grating 3 and dispersed. The amount of light of the dispersed light is limited by the mask 4 with a light amount adjusting mechanism, and enters the light receiving portion of the photodiode array detector 5. The light incident on the light receiving portion of the photodiode array detector 5 is read as a signal by the signal reading portion 6. The signal read by the signal reading unit 6 is subjected to data conversion processing by the central processing unit 7 and displayed on the display monitor 8. The mask 4 with a light amount adjusting mechanism includes two light shielding plates 9 for shielding light, a light shielding plate base 10 for adhesively fixing the light shielding plate 9, a base 11 for holding the light shielding plate base 10, and an eccentric head for driving the light shielding plate. The number of the shafts 12 having four is four, the number of the motors 13 for driving the shaft 12 having the eccentric head is four, and the number of the elastic bodies 14 such as springs for attracting the light shielding plates 9 to each other is two. The motor 13 for driving the shaft 12 having the eccentric head is controlled by the central processing unit 7 via the motor control unit 16.

光量調節機構付マスクの可動原理は、モータ13が駆動することで、偏心頭を持った軸12が回る。偏心頭を持った軸12の軸部は偏心頭の重心位置にあり、偏心頭を持った軸12の偏心頭は遮光板ベース10のザグリ部17の内壁に接しているため、偏心頭を持った軸12が回り、遮光板ベース10のザグリ部17の内壁を押し、遮光板9はフォトダイオードアレイの配列方向を水平としたとき、上下方向に稼動する。例えば、軸12の偏心頭が4本とも図2の向きの時は開口部15の開口面積は最小であり、軸12の偏心頭が4本とも図4の向きの時は開口部15の開口面積は最大になる。   The principle of movement of the mask with a light amount adjusting mechanism is that the shaft 12 having an eccentric head rotates when the motor 13 is driven. Since the shaft portion of the shaft 12 having the eccentric head is located at the center of gravity of the eccentric head and the eccentric head of the shaft 12 having the eccentric head is in contact with the inner wall of the counterbore portion 17 of the shading plate base 10, the shaft head has an eccentric head. The shaft 12 rotates, pushes the inner wall of the counterbore portion 17 of the light shielding plate base 10, and the light shielding plate 9 operates vertically when the arrangement direction of the photodiode array is horizontal. For example, when all four eccentric heads of the shaft 12 are in the direction of FIG. 2, the opening area of the opening 15 is minimum, and when all four eccentric heads of the shaft 12 are in the direction of FIG. The area is maximized.

図3は図2のA部分で、遮光板ベース10と台座11の断面をとった図である。図2〜図4において、左側がフォトダイオードアレイ検知器の短波長側、右側が長波長側とする。   FIG. 3 is a cross-sectional view of the light shielding plate base 10 and the pedestal 11 in a portion A of FIG. 2 to 4, the left side is the short wavelength side of the photodiode array detector, and the right side is the long wavelength side.

次に図5において、光量調整の実施例を示す。以下の実施例は光源にタングステンランプと重水素ランプの2つの光源と、フォトダイオードアレイ光検知器にシリコンフォトダイオードアレイ検知器を用いた例である。まず、光量調整機構付マスク4の偏心頭を持った軸12が図2の状態の光量と、中央処理装置7内のメモリ(図示せず)に格納されている光源の初期値の光量とを比較判定を行う。判定は全波長の光量が初期値光量の90%以上であれば光量調整は行われず終了する。初期値光量は未使用光源を初期点灯させたときの光量を中央処理装置7内のメモリに格納しておく。光量が初期値光量の90%より小さければ、4つのモータ13を駆動させ、偏心頭を持った軸12の偏心頭の向きを図4の状態にする。軸12の偏心頭の向きが図4の状態で、光量がサチュレイションを起こしていなければ、調整は完了となる。偏心頭を持った軸12の偏心頭の向きが図4の状態で、光量がサチュレイションを起こしていれば、サチュレイションを起こしている波長範囲に対応したそれぞれのモータ13を駆動させ、偏心頭を持った軸12の偏心頭の向きが図4の状態から図3の状態へ向かうように軸12が一定角度回転するようにモータ13を駆動させ、全波長でサチュレイションを起こさない状態までフィードバック作業を行う。サチュレイションを起こしている波長範囲に対応したモータ13の関係は表1に示す。   Next, FIG. 5 shows an embodiment of light amount adjustment. In the following embodiment, two light sources, a tungsten lamp and a deuterium lamp, are used as the light source, and a silicon photodiode array detector is used as the photodiode array photodetector. First, the shaft 12 having the eccentric head of the mask 4 with the light amount adjusting mechanism has the light amount in the state of FIG. 2 and the initial light amount of the light source stored in the memory (not shown) in the central processing unit 7. Make a comparison decision. The determination ends without adjusting the light amount if the light amounts of all wavelengths are 90% or more of the initial value light amount. The initial value light amount is stored in the memory in the central processing unit 7 when the unused light source is initially turned on. If the light quantity is smaller than 90% of the initial light quantity, the four motors 13 are driven, and the direction of the eccentric head of the shaft 12 having the eccentric head is set to the state shown in FIG. If the direction of the eccentric head of the shaft 12 is in the state shown in FIG. 4 and the amount of light is not saturated, the adjustment is completed. If the direction of the eccentric head of the shaft 12 having the eccentric head is in the state shown in FIG. The motor 13 is driven so that the shaft 12 rotates by a certain angle so that the direction of the eccentric head of the shaft 12 with the head moves from the state of FIG. 4 to the state of FIG. Do work. The relationship of the motor 13 corresponding to the wavelength range causing saturation is shown in Table 1.

Figure 2011017567
Figure 2011017567

実施例1において例えば、光量調整機構付マスク4は図6のように偏心形状部を持った軸18同士をベルト19を用いて連動させることで、偏心形状部を持った軸18全てを単一のモータ13で駆動させ、光量調整機構付マスク4の開口部15の開口面積を可変することができる。図7は図6のA部分で、遮光板ベース10と台座11の断面をとった図である。次に図8において、光量調整の実施例を示す。まず、光量調整機構付マスク4を可動させない状態での光量と、中央処理装置7内のメモリ(図示せず)に格納されている光源の初期値の光量とを比較判定を行う。判定は光量が初期値光量の90%以上であれば光量調整は行われず終了する。初期値光量は未使用光源を初期点灯させたときの光量を中央処理装置7内のメモリに格納しておく。光量が初期値光量の90%より小さければ、4つのモータ13を駆動させ、偏心頭を持った軸12の偏心頭の向きを図4の状態にする。軸12の偏心頭の向きが図4の状態で、光量がサチュレイションを起こしていなければ、調整は完了となる。   In the first embodiment, for example, the mask 4 with the light amount adjusting mechanism is configured such that the shafts 18 having the eccentric shape portions are interlocked using the belt 19 as shown in FIG. It is possible to vary the opening area of the opening 15 of the mask 4 with a light amount adjusting mechanism. FIG. 7 is a cross-sectional view of the light shielding plate base 10 and the pedestal 11 in a portion A of FIG. Next, FIG. 8 shows an example of light amount adjustment. First, the light quantity when the mask 4 with light quantity adjustment mechanism is not moved and the initial light quantity of the light source stored in a memory (not shown) in the central processing unit 7 are compared and determined. The determination ends without adjusting the light amount if the light amount is 90% or more of the initial light amount. The initial value light amount is stored in the memory in the central processing unit 7 when the unused light source is initially turned on. If the light quantity is smaller than 90% of the initial light quantity, the four motors 13 are driven, and the direction of the eccentric head of the shaft 12 having the eccentric head is set to the state shown in FIG. If the direction of the eccentric head of the shaft 12 is in the state shown in FIG. 4 and the amount of light is not saturated, the adjustment is completed.

偏心頭を持った軸12の偏心頭の向きが図4の状態で、光量がサチュレイションを起こしていれば、サチュレイションを起こしている波長範囲に対応したそれぞれのモータ13を駆動させ、偏心頭を持った軸12の偏心頭の向きが図4の状態から図3の状態へ向かうように軸12が一定角度回転するようにモータ13を駆動させ、サチュレイションを起こさない状態までフィードバック作業を行う。   If the direction of the eccentric head of the shaft 12 having the eccentric head is in the state shown in FIG. 4 and the amount of light is saturated, each motor 13 corresponding to the wavelength range causing the saturation is driven, and the eccentric head is driven. The motor 13 is driven so that the shaft 12 rotates by a certain angle so that the direction of the eccentric head of the shaft 12 with the head moves from the state of FIG. 4 to the state of FIG. 3, and the feedback operation is performed until no saturation occurs. .

実施例2において例えば、光量調整機構付マスク4は偏心形状部を持った軸18同士を歯車等のギアを用いて連動させて偏心形状部を持った軸18を単一のモータ13で駆動させ、光量調整機構付マスク4の開口部15の開口面積を可変させてもよい。   In the second embodiment, for example, the mask 4 with the light amount adjusting mechanism is configured such that the shafts 18 having the eccentric shape portion are interlocked with each other using a gear such as a gear, and the shaft 18 having the eccentric shape portion is driven by the single motor 13. The opening area of the opening 15 of the mask 4 with a light amount adjusting mechanism may be varied.

実施例1〜3において例えば、遮光板の形状は、光源1から放射された光を回折格子3によって分光しフォトダイオードアレイ検知器5の受光部に入射し、信号読み出し部6によって信号として読み出され、中央処理装置7でデータ変換処理をされ、表示モニター8に表示された光量分布の近似形としてもよい。例えば、光源にタングステンランプと重水素ランプを使用した場合、図9のような光量分布を得られる。図10は光量調整機構付マスク4に図9の光量分布の近似形を簡略化した遮光板20を設置したものである。短波長と長波長の光量の少ない波長域で光量調整機構付マスク4の開口部15が大きくなるような形状になっており、光量の少ない波長でより多い光量を得ることが可能である。   In the first to third embodiments, for example, the shape of the light shielding plate is such that the light emitted from the light source 1 is dispersed by the diffraction grating 3 and incident on the light receiving portion of the photodiode array detector 5 and read as a signal by the signal reading portion 6. Then, the data may be converted by the central processing unit 7 and approximated to the light amount distribution displayed on the display monitor 8. For example, when a tungsten lamp and a deuterium lamp are used as the light source, a light quantity distribution as shown in FIG. 9 can be obtained. FIG. 10 shows a mask 4 with a light amount adjusting mechanism provided with a light shielding plate 20 that simplifies the approximate shape of the light amount distribution of FIG. The shape of the opening 15 of the mask 4 with the light amount adjusting mechanism is large in the wavelength range where the light amount of the short wavelength and the long wavelength is small, and it is possible to obtain a larger amount of light at the wavelength where the light amount is small.

なお、本発明は、次のように表現することもできる。   The present invention can also be expressed as follows.

光源と、光源から放射された光を分光する分光器と、分光器により分光された光を波長ごとに光量を制限する開口部を持ったマスクと、マスクによって制限された光を受光して光電変換を行うフォトダイオード受光素子を複数個組み合わせて配列した受光部を持つ光検知器を備えた分光光度計において、前記マスクは、前記分光器と前記光検知器の間に設置されおり、前記開口部を形成するための遮光板を2枚有している。前記マスクは、前記光検知器のフォトダイオード受光素子の配列方向を水平とした場合、前記マスクの遮光板は前記光検知器の垂直方向の上下位置に向い合せに設置され、前記分光器により分光された光が遮光されない部分である遮光板間の隙間が開口部となる。前記マスクは、前記2枚の遮光板をそれぞれ独立させて可動させる駆動機構部を有し、前記駆動部を駆動させることで前記遮光板を可動させ、前記マスクの開口部の開口面積を変化させることで、前記光検知器の受光素子が受光する光量によってサチュレイションしない範囲で最大量を得ることができる分光光度計。   A light source, a spectroscope that separates light emitted from the light source, a mask having an opening that restricts the amount of light split by the spectroscope for each wavelength, and light that is limited by the mask In a spectrophotometer including a photodetector having a light receiving portion in which a plurality of photodiode light receiving elements that perform conversion are arranged in combination, the mask is disposed between the spectroscope and the photodetector, and the opening Two light shielding plates for forming the portion are provided. When the arrangement direction of the photodiode light receiving elements of the light detector is horizontal, the mask has a light shielding plate placed on the vertical position of the light detector in the vertical direction. A gap between the light shielding plates, which is a portion where the emitted light is not shielded, becomes an opening. The mask has a drive mechanism unit that moves the two light shielding plates independently of each other, and drives the driving unit to move the light shielding plate to change the opening area of the opening of the mask. Thus, a spectrophotometer capable of obtaining the maximum amount within a range not saturated by the amount of light received by the light receiving element of the photodetector.

光源と、光源から放射された光を分光する分光器と、分光器により分光された光を波長ごとに光量を制限する開口部を持ったマスクと、マスクによって制限された光を受光して光電変換を行うフォトダイオード受光素子を複数個組み合わせて配列した受光部を持つ光検知器を備えた分光光度計において、前記マスクは、前記分光器と前記光検知器の間に設置されおり、前記開口部を形成するための遮光板を1枚有している。前記光検知器の受光部の受光素子配列方向を水平とした場合、前記遮光板は前記光検知器の垂直方向の上位置または下位置に設置され、前記分光器により分光された光が遮光されない部分が開口部となる。前記マスクは、前記遮光板を可動させる駆動機構部を有し、前記駆動部を駆動させることで遮光板を可動させ、前記マスクの開口部の開口面積を変化させることで、前記光検知器の受光素子が受光する光量によってサチュレイションしない範囲で最大量を得ることができる分光光度計。   A light source, a spectroscope that separates light emitted from the light source, a mask having an opening that restricts the amount of light split by the spectroscope for each wavelength, and light that is limited by the mask In a spectrophotometer including a photodetector having a light receiving portion in which a plurality of photodiode light receiving elements that perform conversion are arranged in combination, the mask is disposed between the spectroscope and the photodetector, and the opening It has one light shielding plate for forming the part. When the light receiving element arrangement direction of the light receiving unit of the light detector is horizontal, the light blocking plate is installed at an upper position or a lower position in the vertical direction of the light detector, and the light dispersed by the spectroscope is not blocked. The part becomes an opening. The mask has a driving mechanism unit that moves the light shielding plate, and the light shielding plate is moved by driving the driving unit, and the opening area of the opening of the mask is changed to change the opening of the light detector. A spectrophotometer that can obtain the maximum amount within a range that does not saturate depending on the amount of light received by the light receiving element.

上記マスクは、上記分光器と上記光検知器の間に設置されおり、上記開口部を形成するための遮光板を2枚有している。前記マスクは、前記光検知器のフォトダイオード受光素子の配列方向を水平とした場合、前記マスクの遮光板は前記光検知器の垂直方向の上下位置に向い合せに設置され、前記分光器により分光された光が遮光されない部分である遮光板間の隙間が開口部となる。前記マスクは上下位置に設置された前記遮光板を連動させて可動させる駆動機構部を有し、1つの駆動源で複数の遮光板を可動させることで、前記光検知器の受光素子が受光する光量によってサチュレイションしない範囲で最大量を得ることができる分光光度計。   The mask is installed between the spectroscope and the photodetector, and has two light shielding plates for forming the opening. When the arrangement direction of the photodiode light receiving elements of the light detector is horizontal, the mask has a light shielding plate placed on the vertical position of the light detector in the vertical direction. A gap between the light shielding plates, which is a portion where the emitted light is not shielded, becomes an opening. The mask has a drive mechanism unit that moves the light shielding plates installed in the vertical position in conjunction with each other, and the light receiving element of the light detector receives light by moving a plurality of light shielding plates with one driving source. A spectrophotometer that can obtain the maximum amount without saturation depending on the amount of light.

1 光源
2 セル
3 回折格子
4 光量調整機構付マスク
5 フォトダイオードアレイ光検知器(フォトダイオードアレイ検知器)
6 信号読み出し部
7 中央処理装置
8 表示モニター
9,20 遮光板
10 遮光板ベース
11 台座
12 偏心頭を持った軸
13 モータ
14 弾性体
15 開口部
16 モータ制御部
17 ザグリ部
18 偏心形状部を持った軸
19 ベルト
DESCRIPTION OF SYMBOLS 1 Light source 2 Cell 3 Diffraction grating 4 Mask with light quantity adjustment mechanism 5 Photodiode array photodetector (photodiode array detector)
6 Signal reading unit 7 Central processing unit 8 Display monitor 9, 20 Shading plate 10 Shading plate base 11 Pedestal 12 Shaft with eccentric head 13 Motor 14 Elastic body 15 Opening portion 16 Motor control portion 17 Counterbore portion 18 Having an eccentric shape portion Shaft 19 belt

Claims (6)

光源と、光源から放射された光を分光する分光器と、分光器により分光された光を波長ごとに光量を制限する開口部を持ったマスクと、マスクによって制限された光を受光して光電変換を行うフォトダイオード受光素子を複数個組み合わせて配列した受光部を持つ光検知器を備えた分光光度計において、
前記マスクは、前記開口部を形成するための複数の遮光板を有し、該遮光板が独立して移動することにより、開口部の開口面積が可変であることを特徴とする分光光度計。
A light source, a spectroscope that separates light emitted from the light source, a mask having an opening that restricts the amount of light split by the spectroscope for each wavelength, and light that is limited by the mask In a spectrophotometer equipped with a light detector having a light receiving portion arranged by combining a plurality of photodiode light receiving elements for conversion,
The spectrophotometer, wherein the mask includes a plurality of light shielding plates for forming the opening, and the opening area of the opening is variable by the movement of the light shielding plate independently.
光源と、光源から放射された光を分光する分光器と、分光器により分光された光を波長ごとに光量を制限する開口部を持ったマスクと、マスクによって制限された光を受光して光電変換を行うフォトダイオード受光素子を複数個組み合わせて配列した受光部を持つ光検知器を備えた分光光度計において、
前記マスクは、前記開口部を形成するための1枚の遮光板を有し、該遮光板が移動することにより、開口部の開口面積が可変であることを特徴とする分光光度計。
A light source, a spectroscope that separates light emitted from the light source, a mask having an opening that restricts the amount of light split by the spectroscope for each wavelength, and light that is limited by the mask In a spectrophotometer equipped with a light detector having a light receiving portion arranged by combining a plurality of photodiode light receiving elements for conversion,
The spectrophotometer, wherein the mask has a single light shielding plate for forming the opening, and the opening area of the opening is variable by the movement of the light shielding plate.
請求項1または2において、
遮光板を駆動させる駆動部を有し、
該駆動部は、前記光検知器の受光素子が受光する光量によってサチュレイションしない範囲で最大量を得るように遮光部を駆動させてマスクの開口部の開口面積を変化させることを特徴とする分光光度計。
In claim 1 or 2,
A drive unit for driving the light shielding plate;
The driving unit drives the light shielding unit to change the opening area of the mask opening so as to obtain the maximum amount within a range not saturated by the amount of light received by the light receiving element of the photodetector. Photometer.
請求項1において、
遮光板を駆動させる駆動部を有し、
該駆動部は、各遮光板を連動させて駆動させることを特徴とする分光光度計。
In claim 1,
A drive unit for driving the light shielding plate;
The drive unit drives each light shielding plate in conjunction with each other, and is a spectrophotometer.
請求項1において、
前記光検知器のフォトダイオード受光素子の配列方向を水平とした場合、前記マスクの遮光板は前記光検知器の垂直方向の上下位置に向い合せに設置されていることを特徴とする分光光度計。
In claim 1,
The spectrophotometer characterized in that, when the arrangement direction of the photodiode light receiving elements of the photo detector is horizontal, the light shielding plate of the mask is installed facing the vertical position of the photo detector in the vertical direction. .
請求項1または2において、
前記マスクの開口部の形状は、前記光源の特性と前記分光器の特性により得られる波長依存の光量の強度分布に近似した形状をしていることを特徴とする分光光度計。
In claim 1 or 2,
The spectrophotometer is characterized in that the shape of the opening of the mask is approximate to the intensity distribution of the wavelength-dependent light quantity obtained by the characteristics of the light source and the characteristics of the spectrometer.
JP2009161380A 2009-07-08 2009-07-08 Spectrophotometer Pending JP2011017567A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015087108A (en) * 2013-10-28 2015-05-07 株式会社島津製作所 Fourier transformation spectrophotometer and light quantity control method
CN112557323A (en) * 2020-12-04 2021-03-26 殷国松 Spectrophotometer and gas detection method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63145134U (en) * 1988-02-18 1988-09-26
JP2005517172A (en) * 2002-02-07 2005-06-09 ゲゼルシャフト・ツア・フェルデルング・アンゲバンター・オプティック,オプトエレクトローニック,クバンテンエレクトローニック・ウント・スペクトロスコピー・アインゲトラーゲナー・フェアアイン Assembly and method for wavelength calibration of an echelle spectrometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63145134U (en) * 1988-02-18 1988-09-26
JP2005517172A (en) * 2002-02-07 2005-06-09 ゲゼルシャフト・ツア・フェルデルング・アンゲバンター・オプティック,オプトエレクトローニック,クバンテンエレクトローニック・ウント・スペクトロスコピー・アインゲトラーゲナー・フェアアイン Assembly and method for wavelength calibration of an echelle spectrometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015087108A (en) * 2013-10-28 2015-05-07 株式会社島津製作所 Fourier transformation spectrophotometer and light quantity control method
CN112557323A (en) * 2020-12-04 2021-03-26 殷国松 Spectrophotometer and gas detection method

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